JP7072291B2 - Droplet emitting device - Google Patents

Droplet emitting device Download PDF

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JP7072291B2
JP7072291B2 JP2020549354A JP2020549354A JP7072291B2 JP 7072291 B2 JP7072291 B2 JP 7072291B2 JP 2020549354 A JP2020549354 A JP 2020549354A JP 2020549354 A JP2020549354 A JP 2020549354A JP 7072291 B2 JP7072291 B2 JP 7072291B2
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JPWO2020067289A1 (en
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裕 嘉副
武彦 北森
祐輔 清水
康 照井
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Description

本発明は、液滴出射装置に関する。 The present invention relates to a droplet emitting device.

近年、質量分析計やＤＮＡシーケンサ等の分析機器に導入される試料の流量は、μＬ（１０－６リットル）／ｍｉｎやｎＬ（１０－９リットル）／ｍｉｎのオーダーにまで微量化している。また、ガラス等の基板に数１０μｍの幅及び深さを有するマイクロ流路を加工して、様々な化学操作を集積化するマイクロ流体デバイスも進展している。In recent years, the flow rate of a sample introduced into an analytical instrument such as a mass spectrometer or a DNA sequencer has been reduced to the order of μL ( 10-6 liters) / min or nL ( 10-9 liters) / min. In addition, microfluidic devices that integrate various chemical operations by processing microchannels having a width and depth of several tens of μm on a substrate such as glass are also being developed.

マイクロ流体デバイスで処理された試料液体の質量分析に関し、下記特許文献１には、試料液滴と油を混合してマイクロアレイプレートに流し込み、マイクロアレイに液滴を配置した後、液滴をレーザでイオン化して分析機器に導入する技術が開示されている。 Regarding mass analysis of a sample liquid treated with a microfluidic device, Patent Document 1 below describes a sample droplet and oil to be mixed and poured into a microarray plate, the droplet is placed in the microarray, and then the droplet is ionized by a laser. The technology to be introduced into the analytical instrument is disclosed.

Simon K. Kuster、他６名、“Interfacing Droplet Microfluidics with Matrix-Assisted Laser Desorption/Ionization Mass Spectrometry: Label-Free Content Analysis of Single Droplets”、Anal. Chem., 2013, 85 (3), pp 1285－1289Simon K. Kuster, 6 others, "Interfacing Droplet Microfluidics with Matrix-Assisted Laser Desorption / Ionization Mass Spectrometry: Label-Free Content Analysis of Single Droplets", Anal. Chem., 2013, 85 (3), pp 1285-1289

例えば液体クロマトグラフ質量分析計では、クロマトグラフィーによって成分を分離した試料液体に電界を印加してイオン化し、噴霧することで分析機器に導入するエレクトロスプレーイオン化法が用いられている。しかしながら、エレクトロスプレーイオン化法では、噴霧した試料の数％が分析機器に導入されるに過ぎず、導入率が低いため、試料が微量の場合には高精度の分析が難しい。 For example, in a liquid chromatograph mass spectrometer, an electrospray ionization method is used in which an electric field is applied to a sample liquid whose components have been separated by chromatography to ionize and spray the sample liquid, which is introduced into an analytical instrument. However, in the electrospray ionization method, only a few percent of the sprayed sample is introduced into the analytical instrument, and the introduction rate is low, so that high-precision analysis is difficult when the sample is in a small amount.

この点、非特許文献１に記載の技術によれば、分析機器への導入率を向上させることができるが、試料と油の相互作用によって試料の損失が生じることがある。そのため、このような技術を用いても、試料が微量の場合には高精度の分析が難しい。 In this regard, according to the technique described in Non-Patent Document 1, the introduction rate to the analytical instrument can be improved, but the interaction between the sample and the oil may cause a loss of the sample. Therefore, even if such a technique is used, it is difficult to perform highly accurate analysis when the sample amount is very small.

そこで、本発明は、試料液体が微量であっても、高精度の分析が可能となるように試料を分析機器に導入することができる液滴出射装置を提供する。 Therefore, the present invention provides a droplet ejection device capable of introducing a sample into an analysis device so that high-precision analysis is possible even if the sample liquid is a very small amount.

本発明の一態様に係る液滴出射装置は、第１方向に沿って形成され、液体が流される第１流路と、第１流路の出口と接続され、第１方向と交差する第２方向に沿って形成され、気体が流される第２流路と、第１流路の出口と接続され、第１方向及び第２方向と交差する第３方向に沿って形成され、気体が流される第３流路と、第１流路の出口、第２流路の出口及び第３流路の出口と接続され、第１方向に沿って形成され、第１流路より幅が大きく、液体及び気体が流される第４流路と、第４流路の出口と接続され、第１方向と交差する第４方向に沿って形成され、気体が流される第５流路と、第４流路の出口と接続され、第１方向及び第４方向と交差する第５方向に沿って形成され、気体が流される第６流路と、第４流路の出口、第５流路の出口及び第６流路の出口と接続され、第１方向に沿って形成され、第４流路より幅が大きく、液体及び気体が流される第７流路と、を備える。 The droplet emitting device according to one aspect of the present invention is formed along the first direction, is connected to the first flow path through which the liquid flows, and the outlet of the first flow path, and intersects the first direction. The second flow path, which is formed along the direction and through which the gas flows, is connected to the outlet of the first flow path, and is formed along the first direction and the third direction which intersects the second direction, and the gas is flown. The third flow path is connected to the outlet of the first flow path, the outlet of the second flow path, and the outlet of the third flow path, is formed along the first direction, is wider than the first flow path, and is a liquid and a liquid. Of the fifth flow path and the fourth flow path, which are connected to the fourth flow path through which the gas flows and the outlet of the fourth flow path and are formed along the fourth direction intersecting the first direction and through which the gas flows. A sixth flow path, a fourth flow path outlet, a fifth flow path outlet, and a sixth flow path, which are connected to an outlet and are formed along a fifth direction intersecting the first and fourth directions and through which a gas flows. It is connected to the outlet of the flow path, is formed along the first direction, is wider than the fourth flow path, and has a seventh flow path through which liquids and gases flow.

この態様によれば、第１流路に微量な試料液体を流すことで、第２流路及び第３流路を流れて第４流路で合流する気体によって試料液体が第１方向に引き延ばされ、第５流路及び第６流路を流れて第７流路で合流する気体によって試料液体が液滴状に切り取られて、第１方向に向かって出射される。これにより、試料液体が微量であっても、高精度の分析が可能となるように試料を分析機器に導入することができる。 According to this aspect, by flowing a small amount of sample liquid through the first flow path, the sample liquid is stretched in the first direction by the gas flowing through the second flow path and the third flow path and merging in the fourth flow path. The sample liquid is cut into droplets by the gas flowing through the 5th and 6th channels and merging in the 7th channel, and is ejected in the first direction. As a result, even if the amount of the sample liquid is very small, the sample can be introduced into the analytical instrument so that high-precision analysis is possible.

上記態様において、第１流路を流れる液体の流速は、第２流路を流れる気体の流速、第３流路を流れる気体の流速、第５流路を流れる気体の流速及び第６流路を流れる気体の流速のいずれよりも小さく、第２流路を流れる気体の圧力及び第３流路を流れる気体の圧力は、それぞれ、第５流路を流れる気体の圧力及び第６流路を流れる気体の圧力より大きくてもよい。 In the above embodiment, the flow velocity of the liquid flowing through the first flow path is the flow rate of the gas flowing through the second flow path, the flow rate of the gas flowing through the third flow path, the flow rate of the gas flowing through the fifth flow path, and the flow rate of the sixth flow path. The pressure of the gas flowing through the second flow path and the pressure of the gas flowing through the third flow path are smaller than any of the flow paths of the flowing gas, and the pressure of the gas flowing through the fifth flow path and the pressure of the gas flowing through the sixth flow path, respectively. It may be greater than the pressure of.

この態様によれば、第１流路を流れる試料液体が第２流路、第３流路、第５流路及び第６流路に逆流することなく、第１方向に液滴として出射される。 According to this aspect, the sample liquid flowing through the first flow path is ejected as a droplet in the first direction without flowing back to the second flow path, the third flow path, the fifth flow path, and the sixth flow path. ..

上記態様において、第２流路、第３流路、第４流路、第５流路、第６流路及び第７流路の表面は、疎水性コーティングされていてもよい。 In the above embodiment, the surfaces of the second channel, the third channel, the fourth channel, the fifth channel, the sixth channel, and the seventh channel may be hydrophobically coated.

この態様によれば、試料液体が第２流路、第３流路、第４流路、第５流路、第６流路及び第７流路の表面に付着しづらくなり、第４流路での液体の引き延ばし及び第７流路での液滴出射が適切に行われるようになる。 According to this aspect, it becomes difficult for the sample liquid to adhere to the surfaces of the second flow path, the third flow path, the fourth flow path, the fifth flow path, the sixth flow path, and the seventh flow path, and the fourth flow path. The stretching of the liquid in the 7th flow path and the ejection of the droplet in the 7th flow path will be properly performed.

上記態様において、第７流路の深さは、第４流路の幅より大きくてもよい。 In the above embodiment, the depth of the seventh flow path may be larger than the width of the fourth flow path.

この態様によれば、第４流路の出口で形成された液滴が、第７流路の底面及び天面に触れることが防止され、液滴の飛距離を伸ばすことができる。 According to this aspect, the droplet formed at the outlet of the fourth flow path is prevented from touching the bottom surface and the top surface of the seventh flow path, and the flight distance of the droplet can be extended.

上記態様において、第２流路と第３流路は、第１方向に関して軸対称に形成されていてもよい。 In the above embodiment, the second flow path and the third flow path may be formed axisymmetrically with respect to the first direction.

この態様によれば、第２流路及び第３流路に第１圧力で気体を流すことで、第１流路を流れる液体に対して軸対称な力を加えることができ、第１方向に沿うように安定して液体を引き延ばすことができる。 According to this aspect, by flowing a gas through the second flow path and the third flow path at the first pressure, an axisymmetric force can be applied to the liquid flowing through the first flow path, and the force can be applied in the first direction. The liquid can be stretched stably along the line.

上記態様において、第５流路と第６流路は、第１方向に関して軸対称に形成されていてもよい。 In the above embodiment, the fifth flow path and the sixth flow path may be formed axially symmetric with respect to the first direction.

この態様によれば、第５流路及び第６流路に第２圧力で気体を流すことで、第４流路を流れる液体に対して軸対称な力を加えることができ、安定して液滴を出射することができる。 According to this aspect, by flowing a gas through the fifth flow path and the sixth flow path at a second pressure, an axisymmetric force can be applied to the liquid flowing through the fourth flow path, and the liquid can be stably applied. Drops can be emitted.

上記態様において、第７流路を流れる液体は、第５流路を流れる気体の圧力又は第６流路を流れる気体の圧力の平方根に反比例する直径を有する液滴を形成していてもよい。 In the above embodiment, the liquid flowing through the seventh flow path may form droplets having a diameter inversely proportional to the square root of the pressure of the gas flowing through the fifth flow path or the pressure of the gas flowing through the sixth flow path.

この態様によれば、液滴の直径を、第５流路を流れる気体の圧力又は第６流路を流れる気体の圧力によって調整することができ、分析機器に導入する試料の量を微細にコントロールすることができる。 According to this aspect, the diameter of the droplet can be adjusted by the pressure of the gas flowing through the fifth flow path or the pressure of the gas flowing through the sixth flow path, and the amount of the sample to be introduced into the analytical instrument can be finely controlled. can do.

上記態様において、液滴の直径は、液体の表面張力の平方根に比例していてもよい。 In the above embodiment, the diameter of the droplet may be proportional to the square root of the surface tension of the liquid.

この態様によれば、第１流路に流す液体の表面張力に応じて液滴の直径を調整することができ、分析機器に導入する試料の量を微細にコントロールすることができる。 According to this aspect, the diameter of the droplet can be adjusted according to the surface tension of the liquid flowing through the first flow path, and the amount of the sample to be introduced into the analytical instrument can be finely controlled.

上記態様において、液滴は、所定の周期で第４流路から第７流路へ出射されてもよい。 In the above embodiment, the droplet may be ejected from the fourth flow path to the seventh flow path at a predetermined cycle.

この態様によれば、ある直径を有する液滴を所定の周期で出射することで、単位時間あたり一定の量で試料を分析機器に導入することができる。 According to this aspect, a sample can be introduced into an analytical instrument in a constant amount per unit time by ejecting droplets having a certain diameter at a predetermined cycle.

上記態様において、所定の周期は、第１流路を流れる液体の流速に比例していてもよい。 In the above embodiment, the predetermined period may be proportional to the flow rate of the liquid flowing through the first flow path.

この態様によれば、単位時間あたりに分析機器に導入する試料の量を微細にコントロールすることができる。 According to this aspect, the amount of the sample to be introduced into the analytical instrument can be finely controlled per unit time.

上記態様において、第７流路を流れる気体の流速、第７流路の深さ及び気体の動粘性係数により算出されるレイノルズ数は、５０以上４００未満であってもよい。 In the above embodiment, the Reynolds number calculated from the flow velocity of the gas flowing through the seventh flow path, the depth of the seventh flow path, and the kinematic viscosity coefficient of the gas may be 50 or more and less than 400.

この態様によれば、第７流路を流れる液滴の飛距離を十分に長くすることができ、試料が分析機器に導入される導入率を向上させることができる。 According to this aspect, the flight distance of the droplet flowing through the seventh flow path can be sufficiently long, and the introduction rate at which the sample is introduced into the analytical instrument can be improved.

上記態様において、第１流路を流れる液体は、第１方向に沿って成分が分離されていてもよい。 In the above embodiment, the liquid flowing through the first flow path may have components separated along the first direction.

この態様によれば、クロマトグラフィーによって成分が分離された試料液体を、分離状態を保ったまま液滴にして出射し、分析機器に導入することができる。 According to this aspect, the sample liquid from which the components have been separated by chromatography can be ejected as droplets while maintaining the separated state and introduced into an analytical instrument.

上記態様において、第７流路の出口は、分析機器の入口に接続されていてもよい。 In the above embodiment, the outlet of the seventh flow path may be connected to the inlet of the analytical instrument.

この態様によれば、試料液体を液滴として出射して分析機器に導入することができ、試料液体が微量であっても高精度の分析が可能となる。 According to this aspect, the sample liquid can be emitted as droplets and introduced into the analysis device, and even if the sample liquid is a small amount, highly accurate analysis becomes possible.

本発明によれば、試料液体が微量であっても、高精度の分析が可能となるように試料を分析機器に導入することができる液滴出射装置が提供される。 INDUSTRIAL APPLICABILITY According to the present invention, there is provided a droplet ejection device capable of introducing a sample into an analysis device so that high-precision analysis is possible even if the sample liquid is a very small amount.

本発明の実施形態に係る液滴出射装置を含む質量分析システムの概要を示す図である。It is a figure which shows the outline of the mass spectrometry system which includes the droplet ejection apparatus which concerns on embodiment of this invention. 本実施形態に係る液滴出射装置を構成する第１基板及び第２基板を示す図である。It is a figure which shows the 1st substrate and 2nd substrate which comprises the droplet ejection apparatus which concerns on this embodiment. 本実施形態に係る液滴出射装置を拡大撮影した画像を示す図である。It is a figure which shows the image which took the magnified image of the droplet emitting apparatus which concerns on this embodiment. 本実施形態に係る液滴出射装置により液滴が出射される様子を連続撮影した画像を示す図である。It is a figure which shows the image which continuously photographed the state which the droplet is ejected by the droplet ejection apparatus which concerns on this embodiment. 本実施形態に係る液滴出射装置を含む質量分析システムにより得られたマススペクトルとエレクトロスプレーイオン化法を用いて得られたマススペクトルを示す図である。It is a figure which shows the mass spectrum obtained by the mass spectrometry system including the droplet ejection apparatus which concerns on this embodiment, and the mass spectrum obtained by using the electrospray ionization method. 本実施形態に係る液滴出射装置の上面図である。It is a top view of the droplet ejection device which concerns on this embodiment. 本実施形態に係る液滴出射装置の側面図である。It is a side view of the droplet ejection device which concerns on this embodiment. 本実施形態に係る液滴出射装置の動作原理を説明する図である。It is a figure explaining the operation principle of the droplet emitting apparatus which concerns on this embodiment. 本実施形態に係る液滴出射装置により液滴が適切に出射される圧力の条件を示す図である。It is a figure which shows the condition of the pressure which the droplet is appropriately ejected by the droplet ejection apparatus which concerns on this embodiment. 本実施形態に係る液滴出射装置により形成される液滴の直径と第２圧力との関係を示す図である。It is a figure which shows the relationship between the diameter of the droplet formed by the droplet ejection device which concerns on this embodiment, and the 2nd pressure. 本実施形態に係る液滴出射装置により形成される液滴の直径と液体の表面張力との関係を示す図である。It is a figure which shows the relationship between the diameter of the droplet formed by the droplet ejection device which concerns on this embodiment, and the surface tension of a liquid. 本実施形態に係る液滴出射装置により形成される液滴の出射頻度と液体の流量との関係を示す図である。It is a figure which shows the relationship between the ejection frequency of the droplet formed by the droplet emitting apparatus which concerns on this embodiment, and the flow rate of a liquid. 本実施形態に係る液滴出射装置により形成される液滴の直径と液体の流量との関係を示す図である。It is a figure which shows the relationship between the diameter of the droplet formed by the droplet ejection device which concerns on this embodiment, and the flow rate of a liquid. 本実施形態に係る液滴出射装置により出射される液滴の飛距離と第２圧力との関係を示す図である。It is a figure which shows the relationship between the flight distance of the droplet emitted by the droplet emitting apparatus which concerns on this embodiment, and the 2nd pressure.

以下、本発明の一側面に係る実施の形態（以下、「本実施形態」と表記する。）を、図面に基づいて説明する。なお、各図において、同一の符号を付したものは、同一又は同様の構成を有する。 Hereinafter, embodiments according to one aspect of the present invention (hereinafter, referred to as “the present embodiment”) will be described with reference to the drawings. In each figure, those with the same reference numerals have the same or similar configurations.

図１は、本実施形態に係る液滴出射装置１０を含む質量分析システム１の概要を示す図である。本実施形態に係る液滴出射装置１０は、Ｑ＝２μＬ／ｍｉｎの流量で流される試料液体を、所定の直径を有する液滴Ｄとして切り出して、所定の周期で出射する。質量分析システム１は、液体にＶ＝３ｋＶの電圧を印加して液滴Ｄをイオン化させるイオン化装置８０と、液滴ＤをＴ＝２００℃で加熱して気化させるヒータ９０と、試料イオンＩのマススペクトルを分析する質量分析計１００とを備える。 FIG. 1 is a diagram showing an outline of a mass spectrometry system 1 including a droplet emitting device 10 according to the present embodiment. The droplet emitting device 10 according to the present embodiment cuts out a sample liquid flowing at a flow rate of Q = 2 μL / min as a droplet D having a predetermined diameter, and emits the sample liquid at a predetermined cycle. The mass spectrometry system 1 includes an ionizing device 80 that applies a voltage of V = 3 kV to a liquid to ionize the droplet D, a heater 90 that heats the droplet D at T = 200 ° C. to vaporize it, and sample ion I. A mass spectrometer 100 for analyzing a mass spectrum is provided.

なお、質量分析システム１は、本実施形態に係る液滴出射装置１０の応用例の一つであり、液滴出射装置１０は、質量分析計１００以外の分析機器に接続されてもよい。 The mass spectrometry system 1 is one of the application examples of the droplet ejection device 10 according to the present embodiment, and the droplet ejection device 10 may be connected to an analysis device other than the mass spectrometer 100.

図２は、本実施形態に係る液滴出射装置１０を構成する第１基板１０ａ及び第２基板１０ｂを示す図である。本実施形態に係る液滴出射装置１０は、第１基板１０ａに形成されたマイクロ流路と、第２基板１０ｂに形成されたマイクロ流路とを貼り合わせて構成されている。より具体的には、エッチングにより、第１基板１０ａに浅い流路（後述する第１流路、第２流路、第３流路及び第４流路）と、深い流路（後述する第５流路、第６流路及び第７流路）とを形成し、同様にエッチングにより、第２基板１０ｂに深い流路（後述する第５流路、第６流路及び第７流路）を形成して、両部材の深い流路が一致するように貼り合わされて液滴出射装置１０が構成されている。 FIG. 2 is a diagram showing a first substrate 10a and a second substrate 10b constituting the droplet emitting device 10 according to the present embodiment. The droplet emitting device 10 according to the present embodiment is configured by laminating a microchannel formed on the first substrate 10a and a microchannel formed on the second substrate 10b. More specifically, by etching, a shallow flow path (a first flow path, a second flow path, a third flow path and a fourth flow path described later) and a deep flow path (a fifth flow path described later) are formed in the first substrate 10a. A flow path, a sixth flow path, and a seventh flow path) are formed, and a deep flow path (a fifth flow path, a sixth flow path, and a seventh flow path, which will be described later) is formed in the second substrate 10b by etching in the same manner. The droplet ejection device 10 is formed by forming and bonding the deep flow paths of both members so as to coincide with each other.

図３は、本実施形態に係る液滴出射装置１０を拡大撮影した画像を示す図である。液滴出射装置１０は、第１流路Ｃ１、第２流路Ｃ２、第３流路Ｃ３、第４流路Ｃ４、第５流路Ｃ５、第６流路Ｃ６及び第７流路Ｃ７を備える。 FIG. 3 is a diagram showing an enlarged image of the droplet emitting device 10 according to the present embodiment. The droplet emitting device 10 includes a first flow path C1, a second flow path C2, a third flow path C3, a fourth flow path C4, a fifth flow path C5, a sixth flow path C6, and a seventh flow path C7. ..

第１流路Ｃ１は、第１方向Ｄ１に沿って形成され、液体が流される。例えば、第１流路Ｃ１にはＱ＝２μＬ／ｍｉｎの流量で試料液体が第１方向Ｄ１に流されてよい。もっとも、第１流路Ｃ１に流される液体の流量は任意である。また、第１流路Ｃ１を流れる液体は、第１方向Ｄ１に沿って成分が分離されていてよい。これにより、クロマトグラフィーによって成分が分離された試料液体を、分離状態を保ったまま液滴にして出射し、分析機器に導入することができる。 The first flow path C1 is formed along the first direction D1 and a liquid is flowed therethrough. For example, the sample liquid may be flowed in the first direction D1 at a flow rate of Q = 2 μL / min in the first flow path C1. However, the flow rate of the liquid flowing through the first flow path C1 is arbitrary. Further, the liquid flowing through the first flow path C1 may have components separated along the first direction D1. As a result, the sample liquid from which the components have been separated by chromatography can be ejected as droplets while maintaining the separated state, and can be introduced into an analytical instrument.

第２流路Ｃ２は、第１流路Ｃ１の出口と接続され、第１方向Ｄ１と交差する第２方向Ｄ２に沿って形成され、気体が流される。また、第３流路Ｃ３は、第１流路Ｃ１の出口と接続され、第１方向Ｄ１及び第２方向Ｄ２と交差する第３方向Ｄ３に沿って形成され、気体が流される。ここで、第２方向Ｄ２及び第３方向Ｄ３は、第１方向Ｄ１に対して約６０°傾いていてよいが、傾きは任意である。第２流路Ｃ２及び第３流路Ｃ３には、同じ圧力（第１圧力Ｐg1）で同じ気体が流されてよい。第２流路Ｃ２及び第３流路Ｃ３には、例えば空気が流されてよい。The second flow path C2 is connected to the outlet of the first flow path C1 and is formed along the second direction D2 intersecting the first direction D1 to allow gas to flow. Further, the third flow path C3 is connected to the outlet of the first flow path C1 and is formed along the third direction D3 that intersects the first direction D1 and the second direction D2, and the gas flows. Here, the second direction D2 and the third direction D3 may be inclined by about 60 ° with respect to the first direction D1, but the inclination is arbitrary. The same gas may be flowed through the second flow path C2 and the third flow path C3 at the same pressure (first pressure P g1 ). For example, air may flow through the second flow path C2 and the third flow path C3.

第４流路Ｃ４は、第１流路Ｃ１の出口、第２流路Ｃ２の出口及び第３流路Ｃ３の出口と接続され、第１方向Ｄ１に沿って形成され、第１流路Ｃ１より幅が大きく、液体及び気体が流される。第１流路Ｃ１を流れる液体は、第２流路Ｃ２及び第３流路Ｃ３を流れて第４流路Ｃ４で合流する気体と第１流路Ｃ１の出口でぶつかり、気体の流れに引きずられて第４流路Ｃ４で第１方向Ｄ１に引き延ばされる。 The fourth flow path C4 is connected to the outlet of the first flow path C1, the outlet of the second flow path C2, and the outlet of the third flow path C3, is formed along the first direction D1, and is formed from the first flow path C1. It is wide and allows liquids and gases to flow. The liquid flowing through the first flow path C1 collides with the gas flowing through the second flow path C2 and the third flow path C3 and merging at the fourth flow path C4 at the outlet of the first flow path C1, and is dragged by the gas flow. Is stretched in the first direction D1 in the fourth flow path C4.

第２流路Ｃ２と第３流路Ｃ３は、第１方向Ｄ１に関して軸対称に形成されていてよい。これにより、第２流路Ｃ２及び第３流路Ｃ３に第１圧力Ｐg1で気体を流すことで、第１流路Ｃ１を流れる液体に対して軸対称な力を加えることができ、第１方向Ｄ１に沿うように安定して液体を引き延ばすことができる。The second flow path C2 and the third flow path C3 may be formed axially symmetric with respect to the first direction D1. As a result, by flowing a gas through the second flow path C2 and the third flow path C3 at the first pressure P g1 , an axisymmetric force can be applied to the liquid flowing through the first flow path C1. The liquid can be stably stretched along the direction D1.

第５流路Ｃ５は、第４流路Ｃ４の出口と接続され、第１方向Ｄ１と交差する第４方向Ｄ４に沿って形成され、気体が流される。また、第６流路Ｃ６は、第４流路Ｃ４の出口と接続され、第１方向Ｄ１及び第４方向Ｄ４と交差する第５方向Ｄ５に沿って形成され、気体が流される。ここで、第５方向Ｄ５及び第６方向Ｄ６は、第１方向Ｄ１に対して約６０°傾いていてよいが、傾きは任意である。また、第５方向Ｄ５は第２方向Ｄ２と平行であってよく、第６方向Ｄ６は、第３方向Ｄ３と平行であってよい。第５流路Ｃ５及び第６流路Ｃ６には、同じ圧力（第２圧力Ｐg2）で同じ気体が流されてよい。第５流路Ｃ５及び第６流路Ｃ６には、例えば空気が流されてよい。The fifth flow path C5 is connected to the outlet of the fourth flow path C4 and is formed along the fourth direction D4 intersecting the first direction D1 to allow gas to flow. Further, the sixth flow path C6 is connected to the outlet of the fourth flow path C4 and is formed along the fifth direction D5 intersecting the first direction D1 and the fourth direction D4, and the gas is flowed therethrough. Here, the fifth direction D5 and the sixth direction D6 may be inclined by about 60 ° with respect to the first direction D1, but the inclination is arbitrary. Further, the fifth direction D5 may be parallel to the second direction D2, and the sixth direction D6 may be parallel to the third direction D3. The same gas may be flowed through the fifth flow path C5 and the sixth flow path C6 at the same pressure (second pressure P g2 ). For example, air may flow through the fifth flow path C5 and the sixth flow path C6.

第７流路Ｃ７は、第４流路Ｃ４の出口、第５流路Ｃ５の出口及び第６流路Ｃ６の出口と接続され、第１方向Ｄ１に沿って形成され、第３流路Ｃ３より幅が大きく、液体及び気体が流される。第４流路Ｃ４で引き延ばされた液体は、第５流路Ｃ５及び第６流路Ｃ６を流れて第７流路Ｃ７で合流する気体と第４流路Ｃ４の出口でぶつかり、第１方向Ｄ１の抗力を受ける。液体に加わる抗力は、第１方向Ｄ１と反対方向に生じる表面張力と釣り合うが、液体が流れ込むため第４流路Ｃ４の出口で液滴が成長する。液滴に加わる抗力は、液滴の直径が大きくなるにつれて増大し、抗力が表面張力よりも大きくなると、液滴がレイリー不安定性により切り離され、第１方向Ｄ１に向かって出射される。第７流路Ｃ７の出口は、質量分析計１００等の分析機器の入口に接続されていてよい。これにより、試料液体を液滴として出射して分析機器に導入することができ、試料液体が微量であっても高精度の分析が可能となる。 The seventh flow path C7 is connected to the outlet of the fourth flow path C4, the outlet of the fifth flow path C5, and the outlet of the sixth flow path C6, is formed along the first direction D1, and is formed from the third flow path C3. It is wide and allows liquids and gases to flow. The liquid stretched in the fourth flow path C4 collides with the gas flowing through the fifth flow path C5 and the sixth flow path C6 and merging in the seventh flow path C7 at the outlet of the fourth flow path C4, and the first Receives drag in direction D1. The drag applied to the liquid balances with the surface tension generated in the direction opposite to the first direction D1, but since the liquid flows in, droplets grow at the exit of the fourth flow path C4. The drag applied to the droplet increases as the diameter of the droplet increases, and when the drag is greater than the surface tension, the droplet is separated by Rayleigh instability and ejected in the first direction D1. The outlet of the seventh flow path C7 may be connected to the inlet of an analytical instrument such as a mass spectrometer 100. As a result, the sample liquid can be ejected as droplets and introduced into the analysis device, and even if the sample liquid is a small amount, highly accurate analysis becomes possible.

第５流路Ｃ５と第６流路Ｃ６は、第１方向Ｄ１に関して軸対称に形成されていてよい。これにより、第５流路Ｃ５及び第６流路Ｃ６に第２圧力Ｐg2で気体を流すことで、第４流路Ｃ４を流れる液体に対して軸対称な力を加えることができ、安定して液滴を出射することができる。The fifth flow path C5 and the sixth flow path C6 may be formed axially symmetric with respect to the first direction D1. As a result, by flowing a gas through the fifth flow path C5 and the sixth flow path C6 at the second pressure P g2 , an axisymmetric force can be applied to the liquid flowing through the fourth flow path C4, and the force is stable. Can emit droplets.

本実施形態に係る液滴出射装置１０によれば、第１流路Ｃ１に微量な試料液体を流すことで、第２流路Ｃ２及び第３流路Ｃ３を流れて第４流路Ｃ４で合流する気体によって試料液体が第１方向Ｄ１に引き延ばされ、第５流路Ｃ５及び第６流路Ｃ６を流れて第７流路Ｃ７で合流する気体によって試料液体が液滴状に切り取られて、第１方向Ｄ１に向かって出射される。これにより、試料液体が微量であっても、高精度の分析が可能となるように試料を分析機器に導入することができる。 According to the droplet emitting device 10 according to the present embodiment, by flowing a small amount of sample liquid through the first flow path C1, the sample liquid flows through the second flow path C2 and the third flow path C3 and joins at the fourth flow path C4. The sample liquid is stretched in the first direction D1 by the gas, and the sample liquid is cut into droplets by the gas flowing through the fifth flow path C5 and the sixth flow path C6 and merging in the seventh flow path C7. , Is emitted toward the first direction D1. As a result, even if the amount of the sample liquid is very small, the sample can be introduced into the analytical instrument so that high-precision analysis is possible.

第２流路Ｃ２、第３流路Ｃ３、第４流路Ｃ４、第５流路Ｃ５、第６流路Ｃ６及び第７流路Ｃ７の表面は、疎水性コーティングされていてよい。これにより、試料液体が第２流路Ｃ２、第３流路Ｃ３、第４流路Ｃ４、第５流路Ｃ５、第６流路Ｃ６及び第７流路Ｃ７の表面に付着しづらくなり、第４流路Ｃ４での液体の引き延ばし及び第７流路Ｃ７での液滴出射が適切に行われるようになる。 The surfaces of the second flow path C2, the third flow path C3, the fourth flow path C4, the fifth flow path C5, the sixth flow path C6, and the seventh flow path C7 may be hydrophobically coated. As a result, the sample liquid is less likely to adhere to the surfaces of the second flow path C2, the third flow path C3, the fourth flow path C4, the fifth flow path C5, the sixth flow path C6, and the seventh flow path C7. The liquid is stretched in the 4th flow path C4 and the droplets are properly ejected in the 7th flow path C7.

図４は、本実施形態に係る液滴出射装置１０により液滴が出射される様子を連続撮影した画像を示す図である。同図では、初期時刻ｔ0に撮影した第１画像と、初期時刻ｔ0から３３μｓ後に撮影した第２画像と、初期時刻ｔ0から６７μｓ後に撮影した第３画像と、初期時刻ｔ0から１００μｓ後に撮影した第４画像と、初期時刻ｔ0から１３３μｓ後に撮影した第５画像と、を示している。なお、本例の場合、第１流路Ｃ１に流される液体の流量は５μＬ／ｍｉｎであり、第２流路Ｃ２及び第３流路Ｃ３に流される気体の圧力は８０ｋＰａであり、第５流路及び第６流路に流される気体の圧力は２０ｋＰａである。FIG. 4 is a diagram showing continuously captured images of droplets being emitted by the droplet emitting device 10 according to the present embodiment. In the figure, the first image taken at the initial time t 0 , the second image taken 33 μs after the initial time t 0 , the third image taken 67 μs after the initial time t 0 , and the initial time t 0 to 100 μs. The fourth image taken later and the fifth image taken 133 μs after the initial time t 0 are shown. In the case of this example, the flow rate of the liquid flowing through the first flow path C1 is 5 μL / min, the pressure of the gas flowing through the second flow path C2 and the third flow path C3 is 80 kPa, and the fifth flow rate. The pressure of the gas flowing through the path and the sixth flow path is 20 kPa.

第１画像は、第４流路Ｃ４の出口に液滴Ｄが形成され始めている様子を示している。なお、第１画像の右端には、一つ前の周期に出射された液滴が撮影されている。 The first image shows how the droplet D is starting to be formed at the outlet of the fourth flow path C4. At the right end of the first image, a droplet emitted in the previous cycle is photographed.

第２画像は、第４流路Ｃ４の出口に液滴Ｄが形成され、成長途中である様子を示している。第３画像は、第４流路Ｃ４の出口に形成された液滴Ｄの直径が、第２画像の場合よりも大きくなり、切り離される直前の様子を示している。第４画像は、液滴Ｄの直径が第３画像の場合よりさらに大きくなり、切り離されて第７流路Ｃ７に出射される様子を示している。第５画像は、第７流路Ｃ７に出射された液滴Ｄが飛行している様子を示している。 The second image shows that the droplet D is formed at the outlet of the fourth flow path C4 and is in the process of growth. The third image shows the state immediately before the droplet D formed at the outlet of the fourth flow path C4 has a diameter larger than that of the second image and is separated. The fourth image shows that the diameter of the droplet D is larger than that of the third image, and the droplet D is separated and emitted to the seventh flow path C7. The fifth image shows how the droplet D emitted from the seventh flow path C7 is flying.

本実施形態に係る液滴出射装置１０は、図４に示した液滴Ｄの出射の過程を所定の周期で繰り返す。本例の設定の場合、液滴Ｄの直径は、約２９μｍであり、出射の頻度は約６．３ｋＨｚである。すなわち、出射の周期は約１６０μｓである。なお、液滴Ｄの直径は、さらに大きくもできるし、小さくもできる。また、出射の頻度は、さらに高頻度にもできるし、低頻度にもできる。 The droplet emitting device 10 according to the present embodiment repeats the ejection process of the droplet D shown in FIG. 4 at a predetermined cycle. In the case of the setting of this example, the diameter of the droplet D is about 29 μm, and the frequency of emission is about 6.3 kHz. That is, the emission cycle is about 160 μs. The diameter of the droplet D can be made larger or smaller. Further, the frequency of emission can be made higher or lower.

本実施形態に係る液滴出射装置１０によれば、試料液体を液滴に分離して出射することができ、ほとんど１００％の導入率で試料を分析機器に導入することができる。また、試料液体を気体によって液滴に分離させ、試料液体を油等の他の液体と混合させることが無いため、微量な試料を損失させることなく分析機器に導入することができる。 According to the droplet emitting device 10 according to the present embodiment, the sample liquid can be separated into droplets and emitted, and the sample can be introduced into the analytical instrument with an introduction rate of almost 100%. Further, since the sample liquid is separated into droplets by gas and the sample liquid is not mixed with other liquids such as oil, it can be introduced into an analytical instrument without losing a small amount of sample.

液滴出射装置１０は、ピペッティング装置として用いることもできる。試料液体の微量のピペッティングは、従来、インクジェットで行われることがあったが、本実施形態に係る液滴出射装置１０は、以下の三点でインクジェットより優れている。第一に、インクジェットは加圧チャンバを必要とするため、ピペッティングする試料液体の体積をｍＬ程度までしか小さくすることができないが、本実施形態に係る液滴出射装置１０によれば、数十μｍの直径の液滴を形成することができるため、μＬ～ｎＬのオーダーで試料液体をピペッティングすることができる。第二に、インクジェットは加圧チャンバにｍＬ程度の液体を溜める必要があるため、試料液体を成分分離したとしても、加圧チャンバで混合せざるを得ない場合があるが、本実施形態に係る液滴出射装置１０によれば、成分分離した試料液体をそのまま液滴にして出射することができ、微量な試料液体の成分を分離してピペッティングすることができる。第三に、インクジェットで異なる試料液体をピペッティングする場合、試料の混合を防ぐため相当の時間をかけて加圧チャンバを洗浄する必要があるが、本実施形態に係る液滴出射装置１０によれば、水等の洗浄液を流すことで流路の洗浄を簡単に比較的短時間で行うことができるため、異なる試料液体を混合させずにピペッティングすることが容易にできる。 The droplet emitting device 10 can also be used as a pipetting device. Conventionally, a small amount of pipetting of the sample liquid has been performed by inkjet, but the droplet emitting device 10 according to the present embodiment is superior to inkjet in the following three points. First, since the inkjet requires a pressure chamber, the volume of the sample liquid to be pipeted can be reduced only to about mL, but according to the droplet ejection device 10 according to the present embodiment, there are several tens. Since droplets having a diameter of μm can be formed, the sample liquid can be pipetted in the order of μL to nL. Secondly, since the ink jet needs to store a liquid of about mL in the pressure chamber, even if the sample liquid is separated from the components, it may have to be mixed in the pressure chamber. According to the droplet emitting device 10, the sample liquid having separated components can be emitted as a droplet as it is, and a small amount of components of the sample liquid can be separated and pipetting. Thirdly, when pipetting different sample liquids by inkjet, it is necessary to wash the pressure chamber for a considerable time in order to prevent mixing of the samples. For example, since the flow path can be easily washed in a relatively short time by flowing a cleaning liquid such as water, pipetting can be easily performed without mixing different sample liquids.

図５は、本実施形態に係る液滴出射装置１０を含む質量分析システム１により得られたマススペクトルとエレクトロスプレーイオン化法を用いて得られたマススペクトルを示す図である。同図では、本発明による液滴出射装置１０を含む質量分析システム１より得られたマススペクトルを実線で示し、エレクトロスプレーイオン化法を用いて得られたマススペクトルを破線で示している。同図では、縦軸に信号値（ｃｐｓ：counts per second）を示し、横軸に質量電荷比（ｍ／ｚ）を示している。なお、本例では、試料液体としてカフェイン５μＭ、ギ酸０．１％を用いている。 FIG. 5 is a diagram showing a mass spectrum obtained by the mass spectrometry system 1 including the droplet emitting device 10 according to the present embodiment and a mass spectrum obtained by using an electrospray ionization method. In the figure, the mass spectrum obtained from the mass spectrometry system 1 including the droplet emitting device 10 according to the present invention is shown by a solid line, and the mass spectrum obtained by using an electrospray ionization method is shown by a broken line. In the figure, the vertical axis shows the signal value (cps: counts per second), and the horizontal axis shows the mass-to-charge ratio (m / z). In this example, 5 μM of caffeine and 0.1% of formic acid are used as the sample liquid.

同図によれば、本実施形態に係る液滴出射装置１０を含む質量分析システム１によって、従来法であるエレクトロスプレーイオン化法に対して、マススペクトルについて約２０倍の信号値を得ることができることが読み取れる。これは、本実施形態に係る液滴出射装置１０によって微量の試料液体のほとんど全量を質量分析計１００に導入できるためである。このように、本実施形態に係る液滴出射装置１０によれば、高精度の分析が可能となるように試料を分析機器に導入することができる。 According to the figure, the mass spectrometry system 1 including the droplet emitting device 10 according to the present embodiment can obtain a signal value about 20 times as large as that of the conventional electrospray ionization method for the mass spectrum. Can be read. This is because the droplet emitting device 10 according to the present embodiment can introduce almost the entire amount of a small amount of sample liquid into the mass spectrometer 100. As described above, according to the droplet emitting device 10 according to the present embodiment, the sample can be introduced into the analysis device so as to enable highly accurate analysis.

図６は、本実施形態に係る液滴出射装置１０の上面図である。同図では、第１流路Ｃ１に流速Ｕ1で液体が流され、第４流路Ｃ４の出口で液滴Ｄが形成され、第７流路Ｃ７に出射される様子を示している。同図では、第４流路Ｃ４の出口で成長中の液滴Ｄに加わる表面張力と、抗力とを示し、第２流路Ｃ２、第３流路Ｃ３、第４流路Ｃ４、第５流路Ｃ５、第６流路及び第７流路Ｃ７を流れる気体の流線を破線で示している。FIG. 6 is a top view of the droplet emitting device 10 according to the present embodiment. The figure shows a state in which a liquid is flowed through the first flow path C1 at a flow velocity U 1 , a droplet D is formed at the outlet of the fourth flow path C4, and the liquid is emitted to the seventh flow path C7. In the figure, the surface tension applied to the growing droplet D at the outlet of the fourth flow path C4 and the drag force are shown, and the second flow path C2, the third flow path C3, the fourth flow path C4, and the fifth flow path are shown. The streamlines of the gas flowing through the passage C5, the sixth flow path, and the seventh flow path C7 are shown by broken lines.

第４流路Ｃ４の幅ｗ２は、第１流路Ｃ１の幅ｗ１よりも大きい。これにより、第４流路Ｃ４で引き延ばされる液体が、第４流路Ｃ４の壁面に接触することが防止される。また、第７流路Ｃ７の幅ｗ３は、第４流路Ｃ４の幅ｗ２より大きい。これにより、第４流路Ｃ４の出口で形成された液滴が、第７流路Ｃ７の壁面に接触することが防止される。 The width w2 of the fourth flow path C4 is larger than the width w1 of the first flow path C1. This prevents the liquid stretched in the fourth flow path C4 from coming into contact with the wall surface of the fourth flow path C4. Further, the width w3 of the seventh flow path C7 is larger than the width w2 of the fourth flow path C4. This prevents the droplet formed at the outlet of the fourth flow path C4 from coming into contact with the wall surface of the seventh flow path C7.

本実施形態に係る液滴出射装置１０において、第１流路Ｃ１を流れる液体の流速Ｕ1は、第２流路Ｃ２を流れる気体の流速Ｕg1、第３流路Ｃ３を流れる気体の流速Ｕg1、第５流路Ｃ５を流れる気体の流速Ｕg2及び第６流路Ｃ６を流れる気体の流速Ｕg2のいずれよりも小さい。また、本実施形態に係る液滴出射装置１０において、第２流路Ｃ２を流れる気体の圧力Ｐg1及び第３流路Ｃ３を流れる気体の圧力Ｐg1は、それぞれ、第５流路Ｃ５を流れる気体の圧力Ｐg2及び第６流路Ｃ６を流れる気体の圧力Ｐg2より大きい。このような関係を満たすことで、第１流路Ｃ１を流れる試料液体が第２流路Ｃ２、第３流路Ｃ３、第５流路Ｃ５及び第６流路Ｃ６に逆流することなく、第１方向Ｄ１に液滴として出射される。なお、第２流路Ｃ２及び第３流路Ｃ３を流れる気体の圧力（第１圧力Ｐg1）及び第６流路Ｃ６及び第７流路Ｃ７を流れる気体の圧力（第２圧力Ｐg2）と、液滴出射可否との関係については、後に図９を用いて詳細に説明する。In the droplet emitting device 10 according to the present embodiment, the flow rate U 1 of the liquid flowing through the first flow path C1 is the flow rate U g1 of the gas flowing through the second flow path C2 and the flow rate U of the gas flowing through the third flow path C3. It is smaller than any of g1 , the flow velocity U g2 of the gas flowing through the fifth flow path C5, and the flow velocity U g2 of the gas flowing through the sixth flow path C6. Further, in the droplet emitting device 10 according to the present embodiment, the pressure P g1 of the gas flowing through the second flow path C2 and the pressure P g1 of the gas flowing through the third flow path C3 each flow through the fifth flow path C5. It is larger than the gas pressure P g2 and the gas pressure P g2 flowing through the sixth flow path C6. By satisfying such a relationship, the sample liquid flowing through the first flow path C1 does not flow back to the second flow path C2, the third flow path C3, the fifth flow path C5, and the sixth flow path C6. It is emitted as a droplet in the direction D1. The pressure of the gas flowing through the second flow path C2 and the third flow path C3 (first pressure P g1 ) and the pressure of the gas flowing through the sixth flow path C6 and the seventh flow path C7 (second pressure P g2 ). The relationship with the possibility of ejecting droplets will be described in detail later with reference to FIG.

図７は、本実施形態に係る液滴出射装置１０の側面図である。同図では、第１流路Ｃ１、第４流路Ｃ４及び第７流路Ｃ７を示している。本実施形態に係る液滴出射装置１０では、第７流路Ｃ７の深さｄ２は、第４流路Ｃ４の幅ｗ２より大きい。これにより、第４流路Ｃ４の出口で形成された液滴Ｄが、第７流路Ｃ７の底面及び天面に触れることが防止され、液滴ｄの飛距離を伸ばすことができる。 FIG. 7 is a side view of the droplet emitting device 10 according to the present embodiment. In the figure, the first flow path C1, the fourth flow path C4, and the seventh flow path C7 are shown. In the droplet emitting device 10 according to the present embodiment, the depth d2 of the seventh flow path C7 is larger than the width w2 of the fourth flow path C4. As a result, the droplet D formed at the outlet of the fourth flow path C4 is prevented from touching the bottom surface and the top surface of the seventh flow path C7, and the flight distance of the droplet d can be extended.

また、第１流路Ｃ１の深さ及び第４流路Ｃ４の深さは、それぞれｄ１で同じであり、第７流路Ｃ７の深さｄ２より小さい。ここで、第７流路Ｃ７の底面は、第１流路Ｃ１及び第４流路Ｃ４の底面より低く形成され、第７流路Ｃ７の天面は、第１流路Ｃ１及び第４流路Ｃ４の天面より高く形成されている。これにより、第４流路Ｃ４の出口で形成された液滴が、第７流路Ｃ７の底面及び天面に触れることが防止され、液滴ｄの飛距離を伸ばすことができる。このような構造は、第１基板１０ａと第２基板１０ｂを貼り合わせて液滴出射装置１０を構成することで、簡単な工程で実現できる。 Further, the depth of the first flow path C1 and the depth of the fourth flow path C4 are the same at d1, and are smaller than the depth d2 of the seventh flow path C7. Here, the bottom surface of the seventh flow path C7 is formed lower than the bottom surfaces of the first flow path C1 and the fourth flow path C4, and the top surface of the seventh flow path C7 is the first flow path C1 and the fourth flow path. It is formed higher than the top surface of C4. As a result, the droplet formed at the outlet of the fourth flow path C4 is prevented from touching the bottom surface and the top surface of the seventh flow path C7, and the flight distance of the droplet d can be extended. Such a structure can be realized by a simple process by laminating the first substrate 10a and the second substrate 10b to form the droplet emitting device 10.

図８は、本実施形態に係る液滴出射装置１０の動作原理を説明する図である。同図では、第４流路Ｃ４の出口で液滴Ｄの形成が始まる第１段階と、第４流路Ｃ４の出口で液滴Ｄが成長する第２段階と、液滴Ｄが切り離されて第７流路Ｃ７に出射される第３段階とを示している。液滴出射装置１０は、第１段階、第２段階及び第３段階を所定の周期で繰り返して、液滴Ｄを連続して出射する。 FIG. 8 is a diagram illustrating the operating principle of the droplet emitting device 10 according to the present embodiment. In the figure, the first stage in which the formation of the droplet D starts at the outlet of the fourth flow path C4, the second stage in which the droplet D grows at the outlet of the fourth flow path C4, and the droplet D are separated. The third stage emitted to the seventh flow path C7 is shown. The droplet emitting device 10 repeats the first step, the second step, and the third step at a predetermined cycle to continuously eject the droplet D.

第１段階において、第４流路Ｃ４で引き延ばされた液体は、第５流路Ｃ５及び第６流路Ｃ６を流れて第７流路Ｃ７で合流する気体と第４流路Ｃ４の出口でぶつかり、第１方向Ｄ１の抗力を受ける。液体に加わる抗力は、液滴Ｄの半径Ｒに比例し、第１方向Ｄ１と反対方向に生じる表面張力と釣り合う。ここで、表面張力は、成長中の液滴Ｄと第４流路Ｃ４に延びる液体との接触面積Ａに比例する。 In the first stage, the liquid stretched in the fourth flow path C4 flows through the fifth flow path C5 and the sixth flow path C6 and joins in the seventh flow path C7, and the outlet of the fourth flow path C4. It collides with and receives the drag of the first direction D1. The drag applied to the liquid is proportional to the radius R of the droplet D and balances with the surface tension generated in the direction opposite to the first direction D1. Here, the surface tension is proportional to the contact area A between the growing droplet D and the liquid extending in the fourth flow path C4.

第２段階では、液体が流れ込んで液滴が成長し、接触面積Ａが一定のまま半径Ｒが大きくなるため、抗力が増大していく。そして、抗力が表面張力よりも大きくなると、液滴Ｄが抗力により引っ張られて、レイリー不安定性により切り離され、第１方向Ｄ１に向かって出射される。 In the second stage, the liquid flows in, the droplets grow, and the radius R increases while the contact area A remains constant, so that the drag increases. Then, when the drag becomes larger than the surface tension, the droplet D is pulled by the drag, separated by Rayleigh instability, and emitted toward the first direction D1.

第３段階では、第１方向Ｄ１に向かって出射された液滴Ｄが第７流路Ｃ７を飛行する。液滴Ｄの飛距離は、第７流路Ｃ７を流れる気体の流速、第７流路Ｃ７の深さｄ２及び気体の動粘性係数νにより算出されるレイノルズ数Ｒｅによって変動する。例えば、レイノルズ数Ｒｅが２００程度である場合、飛距離は第７流路Ｃ７の深さｄ２の３０倍程度になる。 In the third stage, the droplet D emitted toward the first direction D1 flies through the seventh flow path C7. The flight distance of the droplet D varies depending on the Reynolds number Re calculated by the flow velocity of the gas flowing through the seventh flow path C7, the depth d2 of the seventh flow path C7, and the kinematic viscosity coefficient ν of the gas. For example, when the Reynolds number Re is about 200, the flight distance is about 30 times the depth d2 of the seventh flow path C7.

抗力と表面張力の釣り合いの条件から、出射される液滴Ｄの直径２Ｒは、液体の表面張力γの平方根に比例し、第５流路Ｃ５を流れる気体の圧力Ｐg2又は第６流路Ｃ６を流れる気体の圧力Ｐg2の平方根に反比例することが示される。このような関係から、液滴Ｄの直径２Ｒを、第５流路Ｃ５を流れる気体の圧力Ｐg2又は第６流路Ｃ６を流れる気体の圧力Ｐg2によって調整することができ、分析機器に導入する試料の量を微細にコントロールすることができる。また、第１流路Ｃ１に流す液体の表面張力γに応じて液滴Ｄの直径２Ｒを調整することができ、分析機器に導入する試料の量を微細にコントロールすることができる。From the condition of the balance between the drag force and the surface tension, the diameter 2R of the emitted droplet D is proportional to the square root of the surface tension γ of the liquid, and the pressure P g2 of the gas flowing through the fifth flow path C5 or the sixth flow path C6. It is shown that it is inversely proportional to the square root of the pressure P g2 of the flowing gas. From such a relationship, the diameter 2R of the droplet D can be adjusted by the pressure P g2 of the gas flowing through the fifth flow path C5 or the pressure P g2 of the gas flowing through the sixth flow path C6, and is introduced into the analytical instrument. The amount of sample to be sampled can be finely controlled. Further, the diameter 2R of the droplet D can be adjusted according to the surface tension γ of the liquid flowing through the first flow path C1, and the amount of the sample to be introduced into the analytical instrument can be finely controlled.

図９は、本実施形態に係る液滴出射装置１０により液滴が適切に出射される圧力の条件を示す図である。同図では、縦軸に第５流路Ｃ５及び第６流路Ｃ６を流れる気体の圧力（第２圧力Ｐg2）をｋＰａの単位で示し、横軸に第２流路Ｃ２及び第３流路Ｃ３を流れる気体の圧力（第１圧力Ｐg1）をｋＰａの単位で示して、第１流路Ｃ１に流れる液体の流量が５μＬ／ｍｉｎである場合に、液滴出射可能な場合を「○」でプロットし、液滴出射不可能な場合を「×」でプロットしている。FIG. 9 is a diagram showing the condition of the pressure at which the droplet is appropriately emitted by the droplet emitting device 10 according to the present embodiment. In the figure, the vertical axis shows the pressure of the gas flowing through the fifth flow path C5 and the sixth flow path C6 (second pressure P g2 ) in units of kPa, and the horizontal axis shows the second flow path C2 and the third flow path. The pressure of the gas flowing through C3 (first pressure P g1 ) is shown in units of kPa, and when the flow rate of the liquid flowing through the first flow path C1 is 5 μL / min, the case where droplets can be ejected is “◯”. It is plotted with, and the case where the droplet cannot be emitted is plotted with "x".

同図から、おおよそＰg2≦Ｐg1≦Ｐg2＋１００であれば、液滴が適切に出射されることが読み取れる。もっとも、このような条件を満たさない場合であっても、液滴が全く出射されないわけではなく、ある程度出射される場合もある。From the figure, it can be read that if P g2 ≤ P g1 ≤ P g2 +100, the droplets are appropriately emitted. However, even if such a condition is not satisfied, it does not mean that the droplet is not emitted at all, and it may be emitted to some extent.

図１０は、本実施形態に係る液滴出射装置１０により形成される液滴の直径２Ｒと第２圧力Ｐg2との関係を示す図である。同図では、縦軸に液滴の直径２Ｒをμｍの単位で示し、横軸に第５流路Ｃ５及び第６流路Ｃ６を流れる気体の圧力（第２圧力Ｐg2）をｋＰａの単位で示している。また、同図では、第１圧力Ｐg1が６０ｋＰａの場合を丸印でプロットし、第１圧力Ｐg1が８０ｋＰａの場合を三角印でプロットし、第１圧力Ｐg1が１００ｋＰａの場合を四角印でプロットし、第１圧力Ｐg1が１２０ｋＰａの場合を菱形印でプロットしている。さらに、第２圧力Ｐg2の平方根に反比例する関数を実線で示している。なお、第１流路Ｃ１に流れる液体の流量は５μＬ／ｍｉｎである。FIG. 10 is a diagram showing the relationship between the diameter 2R of the droplet formed by the droplet emitting device 10 according to the present embodiment and the second pressure P g2 . In the figure, the vertical axis shows the diameter 2R of the droplet in units of μm, and the horizontal axis shows the pressure of the gas flowing through the fifth flow path C5 and the sixth flow path C6 (second pressure P g2 ) in units of kPa. Shows. In the figure, the case where the first pressure P g1 is 60 kPa is plotted with a circle, the case where the first pressure P g1 is 80 kPa is plotted with a triangle mark, and the case where the first pressure P g1 is 100 kPa is plotted with a square mark. The case where the first pressure P g1 is 120 kPa is plotted with a diamond mark. Further, a function inversely proportional to the square root of the second pressure P g2 is shown by a solid line. The flow rate of the liquid flowing through the first flow path C1 is 5 μL / min.

先に説明したように、第７流路Ｃ７を流れる液体は、第５流路Ｃ５及び第６流路Ｃ６を流れる気体の圧力（第２圧力Ｐg2）の平方根に反比例する直径を有する液滴を形成する。同図によって、第２圧力Ｐg2が２０ｋＰａから７０ｋＰａの範囲で、第１圧力Ｐg1が６０ｋＰａから１２０ｋＰａの範囲である場合に、液滴の直径２Ｒが第２圧力Ｐg2の平方根に反比例していることが確かめられる。As described above, the liquid flowing through the seventh flow path C7 is a droplet having a diameter inversely proportional to the square root of the pressure of the gas flowing through the fifth flow path C5 and the sixth flow path C6 (second pressure P g2 ). To form. According to the figure, when the second pressure P g2 is in the range of 20 kPa to 70 kPa and the first pressure P g1 is in the range of 60 kPa to 120 kPa, the diameter 2R of the droplet is inversely proportional to the square root of the second pressure P g2 . It is confirmed that there is.

このように、液滴の直径２Ｒを、第５流路Ｃ５及び第６流路Ｃ６を流れる気体の圧力Ｐg2によって調整することができ、分析機器に導入する試料の量を微細にコントロールすることができる。In this way, the diameter 2R of the droplet can be adjusted by the pressure P g2 of the gas flowing through the fifth flow path C5 and the sixth flow path C6, and the amount of the sample to be introduced into the analytical instrument can be finely controlled. Can be done.

図１１は、本実施形態に係る液滴出射装置１０により形成される液滴の直径２Ｒと液体の表面張力γとの関係を示す図である。同図では、縦軸に液滴の直径２Ｒをμｍの単位で示し、横軸に液体の表面張力γをＮ／ｍの単位で示している。同図では、２種類の液体の混合比を変えることで表面張力γを変化させて、他の条件は一定として液滴の直径２Ｒと表面張力γとの関係をプロットしている。なお、第１流路Ｃ１に流れる液体の流量は５μＬ／ｍｉｎである。 FIG. 11 is a diagram showing the relationship between the diameter 2R of the droplet formed by the droplet emitting device 10 according to the present embodiment and the surface tension γ of the liquid. In the figure, the vertical axis shows the diameter 2R of the droplet in units of μm, and the horizontal axis shows the surface tension γ of the liquid in units of N / m. In the figure, the surface tension γ is changed by changing the mixing ratio of the two liquids, and the relationship between the droplet diameter 2R and the surface tension γ is plotted assuming that the other conditions are constant. The flow rate of the liquid flowing through the first flow path C1 is 5 μL / min.

同図では、液体の表面張力γの平方根に比例する関数を実線で示している。先に説明したように、液滴の直径２Ｒは、液体の表面張力γの平方根に比例する。同図によって、表面張力γが０．０２Ｎ／ｍから０．０７Ｎ／ｍの範囲で、液滴の直径２Ｒが表面張力γの平方根に比例していることが確かめられる。 In the figure, the solid line shows the function proportional to the square root of the surface tension γ of the liquid. As described above, the diameter 2R of the droplet is proportional to the square root of the surface tension γ of the liquid. From the figure, it is confirmed that the surface tension γ is in the range of 0.02 N / m to 0.07 N / m, and the diameter 2R of the droplet is proportional to the square root of the surface tension γ.

このように、第１流路Ｃ１に流す液体の表面張力γに応じて液滴の直径２Ｒを調整することができ、分析機器に導入する試料の量を微細にコントロールすることができる。 In this way, the diameter 2R of the droplet can be adjusted according to the surface tension γ of the liquid flowing through the first flow path C1, and the amount of the sample to be introduced into the analytical instrument can be finely controlled.

図１２は、本実施形態に係る液滴出射装置１０により形成される液滴の出射頻度と液体の流量との関係を示す図である。同図では、縦軸に液滴の出射頻度をｋＨｚの単位で示し、横軸に液体の流量をμＬ／ｍｉｎの単位で示している。同図では、液体の流量を変化させて、他の条件は一定として液滴の出射頻度と流量との関係をプロットしている。 FIG. 12 is a diagram showing the relationship between the ejection frequency of the droplet formed by the droplet emitting device 10 according to the present embodiment and the flow rate of the liquid. In the figure, the vertical axis shows the emission frequency of droplets in kHz, and the horizontal axis shows the flow rate of liquid in μL / min. In the figure, the relationship between the ejection frequency of the droplet and the flow rate is plotted by changing the flow rate of the liquid and keeping the other conditions constant.

本実施形態に係る液滴出射装置１０は、所定の周期で第４流路Ｃ４から第７流路Ｃ７へ液滴を出射する。ここで、所定の周期は、第１流路Ｃ１を流れる液体の流速に比例している。同図によれば、第１流路Ｃ１を流れる液体の流量が１μＬ／ｍｉｎから９μＬ／ｍｉｎの範囲で、液滴の出射頻度が第１流路Ｃ１を流れる液体の流量に比例していることが確かめられる。 The droplet emitting device 10 according to the present embodiment emits droplets from the fourth flow path C4 to the seventh flow path C7 at a predetermined cycle. Here, the predetermined period is proportional to the flow velocity of the liquid flowing through the first flow path C1. According to the figure, the flow rate of the liquid flowing through the first flow path C1 is in the range of 1 μL / min to 9 μL / min, and the ejection frequency of the droplet is proportional to the flow rate of the liquid flowing through the first flow path C1. Can be confirmed.

このように、本実施形態に係る液滴出射装置１０によれば、ある直径を有する液滴を所定の周期で出射することで、単位時間あたり一定の量で試料を分析機器に導入することができる。また、本実施形態に係る液滴出射装置１０によれば、第１流路Ｃ１を流れる液体の流量によって単位時間あたりに分析機器に導入する試料の量を微細にコントロールすることができる。 As described above, according to the droplet ejection device 10 according to the present embodiment, by ejecting droplets having a certain diameter at a predetermined cycle, a sample can be introduced into the analytical instrument in a constant amount per unit time. can. Further, according to the droplet emitting device 10 according to the present embodiment, the amount of the sample to be introduced into the analytical instrument can be finely controlled per unit time by the flow rate of the liquid flowing through the first flow path C1.

図１３は、本実施形態に係る液滴出射装置１０により形成される液滴の直径２Ｒと液体の流量との関係を示す図である。同図では、縦軸に液滴の直径２Ｒをμｍの単位で示し、横軸に液体の流量をμＬ／ｍｉｎの単位で示している。同図では、液体の流量を変化させて、他の条件は一定として液滴の直径２Ｒと流量との関係をプロットしている。 FIG. 13 is a diagram showing the relationship between the diameter 2R of the droplet formed by the droplet emitting device 10 according to the present embodiment and the flow rate of the liquid. In the figure, the vertical axis shows the diameter of the droplet 2R in units of μm, and the horizontal axis shows the flow rate of the liquid in units of μL / min. In the figure, the relationship between the diameter 2R of the droplet and the flow rate is plotted by changing the flow rate of the liquid and keeping the other conditions constant.

液滴の直径２Ｒは、先に説明したように、第２圧力Ｐg2と液体の表面張力γに依存するが、第１流路Ｃ１を流れる液体の流量には依存しない。同図によれば、第１流路Ｃ１を流れる液体の流量が１μＬ／ｍｉｎから９μＬ／ｍｉｎの範囲で、液滴の直径２Ｒが第１流路Ｃ１を流れる液体の流量に対してほとんど一定であることが確かめられる。As described above, the droplet diameter 2R depends on the second pressure P g2 and the surface tension γ of the liquid, but does not depend on the flow rate of the liquid flowing through the first flow path C1. According to the figure, the flow rate of the liquid flowing through the first flow path C1 is in the range of 1 μL / min to 9 μL / min, and the diameter 2R of the droplet is almost constant with respect to the flow rate of the liquid flowing through the first flow path C1. It is confirmed that there is.

このように、第１流路Ｃ１を流れる液体の流量を変化させても液滴の直径２Ｒが変化しないため、本実施形態に係る液滴出射装置１０によれば、液滴の出射頻度と、液滴の直径２Ｒとを独立にコントロールすることができる。すなわち、液滴の出射頻度を、第１流路Ｃ１を流れる液体の流量によってコントロールし、液滴の直径２Ｒを、第５流路Ｃ５及び第６流路Ｃ６を流れる気体の圧力Ｐg2によってコントロールすることができる。従って、液滴出射装置１０によれば、単位時間あたりの試料液体の出射量が同じであっても、液滴を大きくして出射頻度を下げた設定にしたり、液滴を小さくして出射頻度を上げた設定にしたりすることができ、より精密なピペッティングや分析機器への導入を行うことができる。As described above, since the diameter 2R of the droplet does not change even if the flow rate of the liquid flowing through the first flow path C1 is changed, according to the droplet emitting device 10 according to the present embodiment, the ejection frequency of the droplet and the ejection frequency of the droplet are determined. The diameter of the droplet 2R can be controlled independently. That is, the emission frequency of the droplet is controlled by the flow rate of the liquid flowing through the first flow path C1, and the diameter 2R of the droplet is controlled by the pressure P g2 of the gas flowing through the fifth flow path C5 and the sixth flow path C6. can do. Therefore, according to the droplet ejection device 10, even if the emission amount of the sample liquid per unit time is the same, the droplet may be set to be larger to reduce the emission frequency, or the droplet may be made smaller to emit out frequency. Can be set to a higher value, and more precise pipetting and introduction to analytical instruments can be performed.

図１４は、本実施形態に係る液滴出射装置１０により出射される液滴の飛距離と第２圧力との関係を示す図である。同図では、縦軸に液滴の飛距離をｍｍの単位で示し、横軸に第５流路Ｃ５及び第６流路Ｃ６を流れる気体の圧力（第２圧力Ｐg2）をｋＰａの単位で示している。同図では、横軸に、第２圧力Ｐg2を第５流路Ｃ５及び第６流路Ｃ６を流れる気体の流速に換算した値をｍ／ｓの単位で示している。また、横軸に、第２圧力Ｐg2をレイノルズ数Ｒｅに換算した値を示している。FIG. 14 is a diagram showing the relationship between the flight distance of the droplet emitted by the droplet emitting device 10 according to the present embodiment and the second pressure. In the figure, the vertical axis shows the flight distance of the droplet in mm, and the horizontal axis shows the pressure of the gas flowing through the fifth flow path C5 and the sixth flow path C6 (second pressure P g2 ) in kPa. Shows. In the figure, the value obtained by converting the second pressure P g2 into the flow velocity of the gas flowing through the fifth flow path C5 and the sixth flow path C6 is shown in the unit of m / s on the horizontal axis. Further, the horizontal axis shows the value obtained by converting the second pressure P g2 into the Reynolds number Re.

本実施形態に係る液滴出射装置１０において、第７流路Ｃ７を流れる気体の流速Ｕg2、第７流路Ｃ７の深さｄ２及び気体の動粘性係数νにより算出されるレイノルズ数Ｒｅ＝Ｕg2ｄ２／νは、５０以上４００未満であってよい。望ましくは、レイノルズ数Ｒｅは１００以上３００未満であってよく、さらに望ましくは、レイノルズ数Ｒｅは１５０以上２５０未満であってよい。In the droplet emitting device 10 according to the present embodiment, the Reynolds number Re = U calculated from the flow velocity U g2 of the gas flowing through the seventh flow path C7, the depth d2 of the seventh flow path C7, and the kinematic viscosity coefficient ν of the gas. g2 d2 / ν may be 50 or more and less than 400. Desirably, the Reynolds number Re may be 100 or more and less than 300, and more preferably, the Reynolds number Re may be 150 or more and less than 250.

同図によれば、第７流路Ｃ７を流れる気体の圧力Ｐg2が４０ｋＰａの場合（第７流路Ｃ７を流れる気体の流速Ｕg2が８８ｍ／ｓの場合）にレイノルズ数Ｒｅが２２０であり、液滴の飛距離は第７流路Ｃ７の深さが５０μｍのときに約１．４ｍｍとなっている。一方、例えば第７流路Ｃ７を流れる気体の圧力Ｐg2が２００ｋＰａの場合（第７流路Ｃ７を流れる気体の流速Ｕg2が３５４ｍ／ｓの場合）にレイノルズ数Ｒｅが８７９であり、液滴の飛距離は約０．１ｍｍとなっている。According to the figure, when the pressure P g2 of the gas flowing through the seventh flow path C7 is 40 kPa (when the flow velocity U g2 of the gas flowing through the seventh flow path C7 is 88 m / s), the Reynolds number Re is 220. The flight distance of the droplet is about 1.4 mm when the depth of the seventh flow path C7 is 50 μm. On the other hand, for example, when the pressure P g2 of the gas flowing through the seventh flow path C7 is 200 kPa (when the flow velocity U g2 of the gas flowing through the seventh flow path C7 is 354 m / s), the Reynolds number Re is 879 and the droplets. The flight distance is about 0.1 mm.

このように、レイノルズ数の観点で気体の圧力や液滴出射装置１０の寸法を設計することで、第７流路Ｃ７を流れる液滴の飛距離を十分に長くすることができ、試料が分析機器に導入される導入率を向上させることができる。 In this way, by designing the pressure of the gas and the dimensions of the droplet ejection device 10 from the viewpoint of the Reynolds number, the flight distance of the droplet flowing through the seventh flow path C7 can be sufficiently lengthened, and the sample can be analyzed. It is possible to improve the introduction rate introduced into the equipment.

本実施形態に係る液滴出射装置１０は、液体クロマトグラフィー装置やキャピラリー電気泳動装置等で化学処理した微量の試料液体を全量回収したり、分析機器に全量導入したりするインターフェースとして用いることができる。ここで、分析機器は、特に質量分析計であってよい。また、本実施形態に係る液滴出射装置１０は、１００～１０００ｎｍ流路を分離カラムとして利用する拡張ナノクロマトグラフィー（例えばIshibashi, Mawatari, Kitamori, "Highly efficient and ultra-small volume separation by pressure-driven liquid chromatography in extended nanochannels", Small, 8, 1237-1242, 2012に記載の技術）で分離した微量の試料液体を、全量質量分析計に導入するインターフェースとして用いることができる。これにより、分離性能の指標である理論段数が１０万段程度であり、しかも高感度な分離分析システムを実現することができる。さらに、本実施形態に係る液滴出射装置１０は、国際公開第２０１８／０５６１１３号に記載のインターフェース装置の液滴生成部として用いることができる。 The droplet emitting device 10 according to the present embodiment can be used as an interface for recovering the entire amount of a small amount of sample liquid chemically treated by a liquid chromatography device, a capillary electrophoresis device, or the like, or introducing the entire amount into an analytical instrument. .. Here, the analytical instrument may be a mass spectrometer in particular. Further, the droplet emitting device 10 according to the present embodiment uses extended nanochromatography (for example, Ishibashi, Mawatari, Kitamori, "Highly efficient and ultra-small volume separation by pressure-driven") using a 100 to 1000 nm flow path as a separation column. A small amount of sample liquid separated by liquid chromatography in extended nanochannels ", Small, 8, 1237-1242, 2012) can be used as an interface to be introduced into a total mass spectrometer. As a result, it is possible to realize a highly sensitive separation analysis system in which the number of theoretical plates, which is an index of separation performance, is about 100,000. Further, the droplet emitting device 10 according to the present embodiment can be used as a droplet generating unit of the interface device described in International Publication No. 2018/056113.

以上説明した実施形態は、本発明の理解を容易にするためのものであり、本発明を限定して解釈するためのものではない。実施形態が備える各要素並びにその配置、材料、条件、形状及びサイズ等は、例示したものに限定されるわけではなく適宜変更することができる。また、異なる実施形態で示した構成同士を部分的に置換し又は組み合わせることが可能である。 The embodiments described above are for facilitating the understanding of the present invention, and are not for limiting the interpretation of the present invention. Each element included in the embodiment and its arrangement, material, condition, shape, size, and the like are not limited to those exemplified, and can be appropriately changed. Further, it is possible to partially replace or combine the configurations shown in different embodiments.

１…質量分析システム、１０…液滴出射装置、１０ａ…第１基板、１０ｂ…第２基板、８０…イオン化装置、９０…ヒータ、１００…質量分析計、Ｃ１…第１流路、Ｃ２…第２流路、Ｃ３…第３流路、Ｃ４…第４流路、Ｃ５…第５流路、Ｃ６…第６流路、Ｃ７…第７流路、Ｄ１…第１方向、Ｄ２…第２方向、Ｄ３…第３方向、Ｄ４…第４方向、Ｄ５…第５方向 1 ... Mass spectrometry system, 10 ... Droplet ejection device, 10a ... First substrate, 10b ... Second substrate, 80 ... Ionizer, 90 ... Heater, 100 ... Mass spectrometer, C1 ... First flow path, C2 ... First 2 flow paths, C3 ... 3rd flow path, C4 ... 4th flow path, C5 ... 5th flow path, C6 ... 6th flow path, C7 ... 7th flow path, D1 ... 1st direction, D2 ... 2nd direction , D3 ... 3rd direction, D4 ... 4th direction, D5 ... 5th direction

Claims (13)

第１方向に沿って形成され、液体が流される第１流路と、
前記第１流路の出口と接続され、前記第１方向と交差する第２方向に沿って形成され、気体が流される第２流路と、
前記第１流路の出口と接続され、前記第１方向及び前記第２方向と交差する第３方向に沿って形成され、前記気体が流される第３流路と、
前記第１流路の出口、前記第２流路の出口及び前記第３流路の出口と接続され、前記第１方向に沿って形成され、前記第１流路より幅が大きく、前記液体及び前記気体が流される第４流路と、
前記第４流路の出口と接続され、前記第１方向と交差する第４方向に沿って形成され、前記気体が流される第５流路と、
前記第４流路の出口と接続され、前記第１方向及び前記第４方向と交差する第５方向に沿って形成され、前記気体が流される第６流路と、
前記第４流路の出口、前記第５流路の出口及び前記第６流路の出口と接続され、前記第１方向に沿って形成され、前記第４流路より幅が大きく、前記液体及び前記気体が流される第７流路と、
を備え、
前記第２流路及び前記第３流路を流れて前記第４流路で合流し前記第４流路を流れる気体によって前記液体を引き延ばし、引き延ばした液体を、前記第４流路の出口において、前記第５流路及び前記第６流路を流れて前記第７流路で合流する気体によって切り取り、液滴を所定の周期で前記第７流路に出射する液滴出射装置。 A first flow path formed along the first direction and through which a liquid flows,
A second flow path connected to the outlet of the first flow path, formed along a second direction intersecting the first direction, and through which a gas flows.
A third flow path connected to the outlet of the first flow path, formed along a third direction intersecting the first direction and the second direction, and through which the gas flows.
It is connected to the outlet of the first flow path, the outlet of the second flow path, and the outlet of the third flow path, is formed along the first direction, is wider than the first flow path, and has the liquid and the liquid. The fourth flow path through which the gas flows and
A fifth flow path connected to the outlet of the fourth flow path, formed along a fourth direction intersecting the first direction, and through which the gas flows.
A sixth flow path connected to the outlet of the fourth flow path, formed along the first direction and a fifth direction intersecting the fourth direction, and through which the gas flows.
It is connected to the outlet of the 4th flow path, the outlet of the 5th flow path, and the outlet of the 6th flow path, is formed along the first direction, is wider than the 4th flow path, and has the liquid and the liquid. The seventh flow path through which the gas flows and
Equipped with
The liquid is stretched by the gas flowing through the second flow path and the third flow path, merging at the fourth flow path, and flowing through the fourth flow path, and the stretched liquid is delivered at the outlet of the fourth flow path. A droplet ejection device that cuts out a liquid flowing through the fifth flow path and the sixth flow path and merging in the seventh flow path, and ejects droplets to the seventh flow path at a predetermined cycle . 前記第１流路を流れる前記液体の流速は、前記第２流路を流れる前記気体の流速、前記第３流路を流れる前記気体の流速、前記第５流路を流れる前記気体の流速及び前記第６流路を流れる前記気体の流速のいずれよりも小さく、
前記第２流路を流れる前記気体の圧力及び前記第３流路を流れる前記気体の圧力は、それぞれ、前記第５流路を流れる前記気体の圧力及び前記第６流路を流れる前記気体の圧力より大きい、
請求項１に記載の液滴出射装置。 The flow velocity of the liquid flowing through the first flow path includes the flow velocity of the gas flowing through the second flow path, the flow velocity of the gas flowing through the third flow path, the flow velocity of the gas flowing through the fifth flow path, and the flow rate of the gas. It is smaller than any of the flow velocities of the gas flowing through the sixth flow path,
The pressure of the gas flowing through the second flow path and the pressure of the gas flowing through the third flow path are the pressure of the gas flowing through the fifth flow path and the pressure of the gas flowing through the sixth flow path, respectively. Greater
The droplet emitting device according to claim 1. 前記第２流路、前記第３流路、前記第４流路、前記第５流路、前記第６流路及び前記第７流路の表面は、疎水性コーティングされている、
請求項１又は２に記載の液滴出射装置。 The surfaces of the second channel, the third channel, the fourth channel, the fifth channel, the sixth channel, and the seventh channel are hydrophobically coated.
The droplet emitting device according to claim 1 or 2. 前記第７流路の深さは、前記第４流路の幅より大きい、
請求項１又は２に記載の液滴出射装置。 The depth of the 7th flow path is larger than the width of the 4th flow path.
The droplet emitting device according to claim 1 or 2. 前記第２流路と前記第３流路は、前記第１方向に関して軸対称に形成されている、
請求項１又は２に記載の液滴出射装置。 The second flow path and the third flow path are formed axially symmetric with respect to the first direction.
The droplet emitting device according to claim 1 or 2. 前記第５流路と前記第６流路は、前記第１方向に関して軸対称に形成されている、
請求項１又は２に記載の液滴出射装置。 The fifth flow path and the sixth flow path are formed axially symmetric with respect to the first direction.
The droplet emitting device according to claim 1 or 2. 前記第７流路を流れる液体は、前記第５流路を流れる前記気体の圧力又は前記第６流路を流れる前記気体の圧力の平方根に反比例する直径を有する液滴を形成している、
請求項１又は２に記載の液滴出射装置。 The liquid flowing through the seventh flow path forms droplets having a diameter inversely proportional to the square root of the pressure of the gas flowing through the fifth flow path or the pressure of the gas flowing through the sixth flow path.
The droplet emitting device according to claim 1 or 2. 前記液滴の直径は、前記液体の表面張力の平方根に比例している、
請求項７に記載の液滴出射装置。 The diameter of the droplet is proportional to the square root of the surface tension of the liquid,
The droplet emitting device according to claim 7. 前記液滴は、所定の周期で前記第４流路から前記第７流路へ出射される、
請求項７又は８に記載の液滴出射装置。 The droplets are ejected from the fourth flow path to the seventh flow path at a predetermined cycle.
The droplet emitting device according to claim 7. 前記所定の周期は、前記第１流路を流れる前記液体の流速に比例している、
請求項９に記載の液滴出射装置。 The predetermined period is proportional to the flow rate of the liquid flowing through the first flow path.
The droplet emitting device according to claim 9. 前記第７流路を流れる前記気体の流速、前記第７流路の深さ及び前記気体の動粘性係数により算出されるレイノルズ数は、５０以上４００未満である、
請求項１又は２に記載の液滴出射装置。 The Reynolds number calculated from the flow velocity of the gas flowing through the seventh flow path, the depth of the seventh flow path, and the kinematic viscosity coefficient of the gas is 50 or more and less than 400.
The droplet emitting device according to claim 1 or 2. 前記第１流路を流れる前記液体は、前記第１方向に沿って成分が分離されている、
請求項１又は２に記載の液滴出射装置。 The liquid flowing through the first flow path has components separated along the first direction.
The droplet emitting device according to claim 1 or 2. 前記第７流路の出口は、分析機器の入口に接続されている、
請求項１又は２に記載の液滴出射装置。 The outlet of the seventh flow path is connected to the inlet of the analytical instrument.
The droplet emitting device according to claim 1 or 2.
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