JP7064835B2 - Gas separator - Google Patents

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JP7064835B2
JP7064835B2 JP2017165019A JP2017165019A JP7064835B2 JP 7064835 B2 JP7064835 B2 JP 7064835B2 JP 2017165019 A JP2017165019 A JP 2017165019A JP 2017165019 A JP2017165019 A JP 2017165019A JP 7064835 B2 JP7064835 B2 JP 7064835B2
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compressed air
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gas separation
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JP2019042613A (en
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妙朗 高橋
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Hitachi Industrial Equipment Systems Co Ltd
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本発明は、PSA(Pressure Swing Adsorption)式気体分離装置に関する。 The present invention relates to a PSA (Pressure Swing Adsorption) type gas separator.

従来のPSA(Pressure Swing Adsorption)式気体分離装置に、特許文献１がある。 Patent Document 1 is a conventional PSA (Pressure Swing Adsorption) type gas separator.

特許文献１は、第1、第2吸着筒の導出側と外部使用側との間に、吸着後の気体の流通量を絞るメーンオリフィス１８を設けることで、吸着筒内の急激な圧力低下と、不用意な運転停止を阻止することができるとするものである。 According to Patent Document 1, a main orifice 18 for reducing the flow amount of gas after adsorption is provided between the lead-out side and the external use side of the first and second adsorption cylinders, thereby causing a sharp drop in pressure inside the adsorption cylinders. , It is said that it is possible to prevent inadvertent operation stop.

ただし、メーンオリフィス１８が機能しない場合の安全装置として、圧縮機１、圧力調整器３、ドレンフィルタ４、ミストフィルタ５の順に供給する圧縮空気の経路中、ドレンフィルタ４とミストフィルタ５の間に圧力センサ６を設け、検知圧力が設定圧力以下になったときに、圧縮機１の運転を停止したものと判断して、再生運転を停止することが、段落番号００１７乃至００４２に記載されている。 However, as a safety device when the main orifice 18 does not function, in the path of the compressed air supplied in the order of the compressor 1, the pressure regulator 3, the drain filter 4, and the mist filter 5, between the drain filter 4 and the mist filter 5. It is described in paragraphs 0017 to 0042 that the pressure sensor 6 is provided and when the detected pressure becomes equal to or lower than the set pressure, it is determined that the operation of the compressor 1 has been stopped and the regeneration operation is stopped. ..

特開2002-143631号公報Japanese Patent Application Laid-Open No. 2002-143631

上記従来の気体分離装置では、メーンオリフィス１８が機能するしないにかかわらず、圧力センサ６により、圧縮機１または圧力調整器３からの圧縮気体圧力が低下すると、再生運転が停止するが、圧縮機へ停止指示をしていない。圧縮機の劣化や配管漏れのような異常の場合、圧縮機の運転は継続することになり、ユーザが異常に気が付けない可能性がある。 In the above-mentioned conventional gas separation device, regardless of whether the main orifice 18 does not function, when the compressed gas pressure from the compressor 1 or the pressure regulator 3 drops due to the pressure sensor 6, the regeneration operation is stopped, but the compressor No stop instruction is given to. In the case of an abnormality such as deterioration of the compressor or leakage of piping, the operation of the compressor will continue, and the user may not notice the abnormality.

また、上記従来の気体分離装置では、再生運転がいきなり停止される点でも、ユーザの利便性が低い。 Further, in the above-mentioned conventional gas separation device, the user's convenience is low in that the regeneration operation is suddenly stopped.

本発明の目的は、気体分離装置の異常発生時におけるユーザの利便性を向上することにある。 An object of the present invention is to improve user convenience when an abnormality occurs in a gas separation device.

本発明は上記課題を解決するものであるが、代表例を挙げると次のとおである。 The present invention solves the above problems, and the following are typical examples.

本発明に係る気体分離装置は、圧縮空気供給源と吸着槽との間の供給経路に設けられた、圧縮気体の圧力を検出する圧力検出手段と、前記圧力検出手段と通信可能に接続されており、検出した前記圧力に応じて運転を制御する制御部と、を有し、前記制御部は、検出した前記圧力が第１規定値を下回った場合、吸着工程の時間を長くするか、または前記圧縮空気供給源を停止し、かつ前記制御部は、前記第１規定値よりも低い第２規定値を下回った場合、気体分離装置の運転を停止する。 The gas separation device according to the present invention is communicably connected to a pressure detecting means for detecting the pressure of the compressed gas provided in the supply path between the compressed air supply source and the adsorption tank, and the pressure detecting means. It has a control unit that controls the operation according to the detected pressure, and the control unit prolongs the time of the adsorption step or prolongs the time of the adsorption step when the detected pressure falls below the first specified value . When the compressed air supply source is stopped and the control unit falls below the second specified value lower than the first specified value, the operation of the gas separation device is stopped .

本発明によれば、気体分離装置の異常発生時におけるユーザの利便性を向上することができる。 According to the present invention, it is possible to improve the convenience of the user when an abnormality occurs in the gas separation device.

実施例１における気体分離装置を示す全体構成図である。It is an overall block diagram which shows the gas separation apparatus in Example 1. FIG. 実施例１の各工程の吸着槽の状態を示す。The state of the adsorption tank of each step of Example 1 is shown.

以下、本実施例を説明する。 Hereinafter, this embodiment will be described.

以下、本発明に係る実施例を図面に基づいて説明する。 Hereinafter, examples of the present invention will be described with reference to the drawings.

図１は本発明に係る第１実施形態の気体分離装置を示す構成図である。図１に示す実施例１の気体分離装置１はＰＳＡ式の気体分離装置である。気体分離装置１には、圧縮空気を供給する圧縮空気供給源２と圧縮空気を流す配管３と、配管３の途中に設けられて圧縮空気から塵埃等を除去するエアフィルタ４が接続されている。 FIG. 1 is a block diagram showing a gas separation device according to the first embodiment of the present invention. The gas separation device 1 of the first embodiment shown in FIG. 1 is a PSA type gas separation device. The gas separation device 1 is connected to a compressed air supply source 2 that supplies compressed air, a pipe 3 that flows compressed air, and an air filter 4 that is provided in the middle of the pipe 3 and removes dust and the like from the compressed air. ..

気体分離装置には、配管３の端末に接続されエアフィルタ４で清浄処理された圧縮空気を貯留させる空気槽５と圧縮空気を流す配管６を有している。 The gas separation device has an air tank 5 connected to the terminal of the pipe 3 to store the compressed air cleaned by the air filter 4 and a pipe 6 to flow the compressed air.

圧力検知手段７は、吸着槽の一次側にあり、本実施例では配管６の途中に設けられている。圧力検知手段７の位置は、配管３にあってもよいが圧力変動を考慮し、空気槽５や配管６に設置することが好ましい。 The pressure detecting means 7 is located on the primary side of the suction tank, and is provided in the middle of the pipe 6 in this embodiment. The position of the pressure detecting means 7 may be located in the pipe 3, but it is preferable to install the pressure detecting means 7 in the air tank 5 or the pipe 6 in consideration of the pressure fluctuation.

配管６の端末位置には一対の配管８が接続されている。これら配管８には、それぞれ流路を開閉する供給弁９が途中に設けられており、端末には酸素分子を吸着して窒素ガスを製品ガスとして取り出すための吸着槽１０がそれぞれ接続されている。 A pair of pipes 8 are connected to the terminal position of the pipe 6. Each of these pipes 8 is provided with a supply valve 9 that opens and closes a flow path in the middle, and a suction tank 10 for adsorbing oxygen molecules and taking out nitrogen gas as a product gas is connected to the terminal. ..

また、一対の配管８には、それぞれ供給弁９と吸着槽１０との間位置に配管１１が接続されており、これら配管１１には、途中に流路を開閉する排気弁１２が、端末に消音用のフィルタ付きの排気サイレンサ１３が設けられている。また、一対の配管８には、互いの配管１１と吸着槽１０との間位置を結ぶように配管１４が接続されており、この配管１４には流路を開閉する一対の下均圧弁１５が設けられている。 Further, a pipe 11 is connected to each of the pair of pipes 8 at a position between the supply valve 9 and the suction tank 10, and an exhaust valve 12 that opens and closes a flow path in the middle of the pipe 11 is connected to the terminal. An exhaust silencer 13 with a muffling filter is provided. Further, a pipe 14 is connected to the pair of pipes 8 so as to connect the positions between the pipes 11 and the suction tank 10, and a pair of lower pressure equalizing valves 15 for opening and closing the flow path are connected to the pipes 14. It is provided.

一対の吸着槽１０には、酸素分子を吸着する吸着手段である吸着剤が充填されている。吸着剤は、具体的には分子ふるいカーボンやゼオライト等を用いている。 The pair of adsorption tanks 10 are filled with an adsorbent which is an adsorption means for adsorbing oxygen molecules. Specifically, the adsorbent uses molecular sieve carbon, zeolite or the like.

一対の吸着槽１０には、端末位置で互いに合流する配管１６がそれぞれ接続されている。これら配管１６には、互いの吸着槽１０側同士を結ぶように配管１７が接続されており、この配管１７には絞り１８が設けられている。また、一対の配管１６には、互いの配管１７よりも吸着槽１０とは反対側同士を結ぶように配管１９が接続されており、この配管１９には流路を開閉する一対の上均圧弁２０が設けられている。また、一対の配管１６には、それぞれの配管１９よりも吸着槽１０とは反対側に流路を開閉する取出弁２１がそれぞれ設けられている。 The pair of suction tanks 10 are connected to pipes 16 that join each other at the terminal positions. A pipe 17 is connected to these pipes 16 so as to connect the suction tanks 10 to each other, and the pipe 17 is provided with a throttle 18. Further, a pipe 19 is connected to the pair of pipes 16 so as to connect the sides of the pipes 17 opposite to the suction tank 10, and a pair of upper pressure equalizing valves for opening and closing the flow path are connected to the pipes 19. 20 is provided. Further, each of the pair of pipes 16 is provided with an take-out valve 21 for opening and closing the flow path on the side opposite to the suction tank 10 with respect to each pipe 19.

一対の配管１６の合流位置には配管２２が接続されており、この配管２２の端末位置には窒素ガスを貯留させる製品槽としての窒素槽２３が接続されている。この窒素槽２３には、端末位置が吐出口２４とされた配管２５が接続されており、この配管２５の途中位置には窒素槽２３側から順に、塵埃等を除去するとともにガスの流量を調整するフィルタレギュレータ２６、流路を開閉する吐出弁２７、ガスの流量を調整する流量調整弁２８が設けられている。 A pipe 22 is connected to the confluence position of the pair of pipes 16, and a nitrogen tank 23 as a product tank for storing nitrogen gas is connected to the terminal position of the pipe 22. A pipe 25 whose terminal position is the discharge port 24 is connected to the nitrogen tank 23, and dust and the like are removed and the gas flow rate is adjusted in order from the nitrogen tank 23 side at an intermediate position of the pipe 25. A filter regulator 26, a discharge valve 27 for opening and closing the flow path, and a flow rate adjusting valve 28 for adjusting the gas flow rate are provided.

配管２５のフィルタレギュレータ２６と吐出弁２４との間位置には配管２９および配管３０が接続されており、配管２９には、配管２９側から順に、流路を開閉する開閉弁３１と、ガスの流量を調整する流量調整弁３２と、サイレンサ３３とが設けられている。配管３０には、配管３０側から順に、流路を開閉する開閉弁３４と、ガスの流量を調整する流量調整弁３５と、酸素濃度を検出する酸素センサ３６とが設けられている。 A pipe 29 and a pipe 30 are connected at a position between the filter regulator 26 and the discharge valve 24 of the pipe 25, and the pipe 29 has an on-off valve 31 for opening and closing the flow path in order from the pipe 29 side and a gas. A flow rate adjusting valve 32 for adjusting the flow rate and a silencer 33 are provided. The pipe 30 is provided with an on-off valve 34 for opening and closing the flow path, a flow rate adjusting valve 35 for adjusting the gas flow rate, and an oxygen sensor 36 for detecting the oxygen concentration, in order from the pipe 30 side.

圧力検知手段７および酸素センサ３６は制御部３７に通信可能に接続されており、検出信号を制御部３７に出力する。 The pressure detecting means 7 and the oxygen sensor 36 are communicably connected to the control unit 37, and output a detection signal to the control unit 37.

また、供給弁９、排気弁１２、下均圧弁１５、上均圧弁２０、取出弁２１、吐出弁２７、流量調整弁２８、開閉弁３１、流量調整弁３２、開閉弁３４および流量調整弁３５は、制御部３７に通信可能に接続されており、制御部３７からの指令で作動する。 Further, the supply valve 9, the exhaust valve 12, the lower pressure equalizing valve 15, the upper pressure equalizing valve 20, the take-out valve 21, the discharge valve 27, the flow rate adjusting valve 28, the on-off valve 31, the flow rate adjusting valve 32, the on-off valve 34 and the flow rate adjusting valve 35. Is communicably connected to the control unit 37 and operates by a command from the control unit 37.

気体分離装置１にあっては、以下の（ａ）～（ｄ）の工程を順次行うように構成されている。図２に各工程の吸着槽の状態を示す。 The gas separation device 1 is configured to sequentially perform the following steps (a) to (d). FIG. 2 shows the state of the adsorption tank in each step.

（ａ）吸着工程：圧縮空気供給源２により圧縮され空気槽５に貯留された圧縮空気を、供給弁９を開くことで、吸着剤が充填された吸着槽Ａ１０-aに導入するとともに、窒素槽２３に残存する窒素ガスを、取出弁２１-aを開くことで吸着槽Ａ１０-aに還流して吸着槽１０-a内を昇圧させ、圧力を利用して吸着剤に酸素分子を吸着させる工程。 (A) Adsorption step: The compressed air compressed by the compressed air supply source 2 and stored in the air tank 5 is introduced into the adsorption tank A10-a filled with the adsorbent by opening the supply valve 9, and nitrogen is introduced. The nitrogen gas remaining in the tank 23 is returned to the adsorption tank A10-a by opening the take-out valve 21-a to increase the pressure inside the adsorption tank 10-a, and the pressure is used to adsorb oxygen molecules on the adsorbent. Process.

（ｂ）取出工程：吸着工程から引き続いて、空気槽５から圧縮空気を吸着槽Ａ１０-aに導入し続けると同時に、吸着剤により分離生成された窒素ガスを吸着槽Ａ１０-aより取り出して窒素槽２３に貯留させる工程。 (B) Extraction step: Continuing from the adsorption step, compressed air is continuously introduced from the air tank 5 into the adsorption tank A10-a, and at the same time, the nitrogen gas separated and generated by the adsorbent is taken out from the adsorption tank A10-a to produce nitrogen. The step of storing in the tank 23.

（ｃ）均圧工程：上均圧弁２０および下均圧弁１５の開閉により取出工程終了後の均圧化を図り、次回の吸着工程の吸着効率を高めて、より高純度の窒素ガスを生成するための工程。 (C) Pressure equalization step: By opening and closing the upper pressure equalizing valve 20 and the lower pressure equalizing valve 15, pressure equalization is achieved after the completion of the extraction process, the adsorption efficiency of the next adsorption step is enhanced, and higher purity nitrogen gas is generated. Process for.

（ｄ）再生工程：均圧工程終了後の吸着槽Ａ１０-a内を排気弁１２-aを開くことにより配管１１を介して大気開放して吸着剤に吸着された酸素分子を脱着することにより吸着剤を再生する工程。なお、この再生工程において、排気弁１２-a以外の吸着槽Ａ１０-aに関連する供給弁９-a、下均圧弁１５、上均圧弁２０および取出弁２１-aは、閉状態とする。 (D) Regeneration step: By opening the exhaust valve 12-a in the adsorption tank A10-a after the pressure equalization step, the oxygen molecules adsorbed by the adsorbent are desorbed by opening to the atmosphere through the pipe 11. The process of regenerating the adsorbent. In this regeneration step, the supply valve 9-a, the lower pressure equalizing valve 15, the upper pressure equalizing valve 20, and the take-out valve 21-a related to the suction tank A10-a other than the exhaust valve 12-a are closed.

制御部３７は、これらの各工程（ａ）～（ｄ）の切り替えを、あらかじめ設定された時間、あるいは空気槽５、吸着槽Ａ１０-a, 吸着槽Ｂ１０- bおよび窒素槽２３等の圧力条件に基づいて、吸着槽Ａ１０-a, 吸着槽Ｂ１０- bに配置された供給弁９-a,b、排気弁１２-a,b、下均圧弁１５、上均圧弁２０および取出弁２１-a,bの開閉を制御することにより行う。しかも、各工程（ａ）～（ｄ）の切り替えを、各吸着槽毎に繰り返し行い、各吸着槽における工程が連携して実行されるように、すなわち、一方の吸着槽で吸着工程および取出工程が完了し、他方の吸着槽で再生工程が完了した後、均圧工程を行うように、制御部３７は制御する。 The control unit 37 switches between these steps (a) to (d) for a preset time, or under pressure conditions such as the air tank 5, the adsorption tank A10-a, the adsorption tank B10-b, and the nitrogen tank 23. Supply valves 9-a, b, exhaust valves 12-a, b, lower pressure equalizing valve 15, upper pressure equalizing valve 20 and take-out valve 21-a arranged in the suction tank A10-a and the suction tank B10-b. It is performed by controlling the opening and closing of, b. Moreover, the switching of each step (a) to (d) is repeatedly performed for each adsorption tank so that the steps in each adsorption tank are executed in cooperation with each other, that is, the adsorption step and the extraction step in one adsorption tank. The control unit 37 controls so that the pressure equalizing step is performed after the regenerating step is completed in the other adsorption tank.

先記のように (ａ)の吸着工程では、吸着槽Ａ１０-aの昇圧には、圧縮空気を導入するとともに、窒素槽２３から窒素ガスを還流している。圧縮空気の圧力が低下した場合は、窒素槽２３からの還流が増える。圧縮空気の導入が少ない分、窒素ガスの生成量が少なくなり、窒素槽２３の窒素ガスの圧力、純度が低下する。また均圧工程で、もう一方の吸着槽Ｂ１０-bと均圧したうえ、再生工程で排気されるため、還流が増えるほど、生成した窒素ガスの放気が増えることとなる。 As described above, in the adsorption step (a), compressed air is introduced and nitrogen gas is refluxed from the nitrogen tank 23 to increase the pressure in the adsorption tank A10-a. When the pressure of the compressed air decreases, the reflux from the nitrogen tank 23 increases. Since the amount of compressed air introduced is small, the amount of nitrogen gas produced is small, and the pressure and purity of the nitrogen gas in the nitrogen tank 23 are lowered. Further, in the pressure equalizing step, the pressure is equalized with the other adsorption tank B10-b and then exhausted in the regeneration step. Therefore, as the reflux increases, the amount of nitrogen gas generated increases.

そのため制御部３７は、圧力検知手段７で検出した吸着槽の一次側圧力が一定時間規定値より低下した場合に異常と判断し、気体分離装置１だけでなく、圧縮空気供給源２も停止させる。 Therefore, the control unit 37 determines that it is abnormal when the primary pressure of the adsorption tank detected by the pressure detecting means 7 drops below the specified value for a certain period of time, and stops not only the gas separation device 1 but also the compressed air supply source 2. ..

従来の気体分離装置は窒素ガスの純度が悪化して仕様値を満足しなくなると窒素ガスの吐出を停止させる。その場合でも、気体分離装置の運転は継続し、圧縮空気の圧力が低い状態では、純度が改善せずに圧縮空気供給源２の無駄な運転も続いてしまう。本発明では、気体分離装置１だけでなく、圧縮空気供給源２も停止しているので無駄な運転の防止になる。また気体分離装置が停止することで、還流の増加による精製した窒素の圧力、純度の低下を防ぎ、省エネと修理後の窒素ガスの取出しまでの時間の短縮となる。 The conventional gas separator stops the discharge of nitrogen gas when the purity of nitrogen gas deteriorates and the specified value is not satisfied. Even in that case, the operation of the gas separator continues, and when the pressure of the compressed air is low, the purity is not improved and the wasteful operation of the compressed air supply source 2 continues. In the present invention, not only the gas separation device 1 but also the compressed air supply source 2 is stopped, so that unnecessary operation can be prevented. In addition, by stopping the gas separation device, it is possible to prevent the pressure and purity of the purified nitrogen from decreasing due to the increase in reflux, which saves energy and shortens the time until the nitrogen gas is taken out after repair.

さらに、大きな音を発生する圧縮空気供給源２が停止することで、ユーザは早期に異常に気が付くことができる。 Further, by stopping the compressed air supply source 2 that generates a loud noise, the user can notice the abnormality at an early stage.

吸着工程に入った直後、圧縮空気の圧力は低下するが、吸着槽１０の圧力が上昇していくとともに、吸着工程前の程度まで戻る。停止するまでの時間は、例えば吸着工程の半分程度の時間で、圧縮空気の圧力が規定値以上にならない場合は、異常と判断し、圧縮空気供給源２を停止させても良い。 Immediately after entering the adsorption process, the pressure of the compressed air decreases, but the pressure in the adsorption tank 10 increases and returns to the level before the adsorption process. The time until the stop is, for example, about half the time of the adsorption step, and if the pressure of the compressed air does not exceed the specified value, it may be determined that there is an abnormality and the compressed air supply source 2 may be stopped.

本実施例については、圧縮空気の圧力の規定値に段階を設けて制御する気体分離装置について説明する。実施例１と異なる点は、制御部３７は圧縮空気の圧力が第１規定値以下になった場合、気体分離装置１及び圧縮空気供給源２は運転を継続するが、気体分離装置１が警報を出力する点及び圧縮空気の圧力が更に低下し、第２規定値（第１規定値未満）以下になった場合、実施例１と同様に気体分離装置１及び圧縮空気供給源２を停止させる点である。本実施例では２段階としたが、３段階以上の多段階であっても良い。 In this embodiment, a gas separation device for controlling the specified value of the compressed air pressure in stages will be described. The difference from the first embodiment is that when the pressure of the compressed air becomes equal to or less than the first specified value in the control unit 37, the gas separation device 1 and the compressed air supply source 2 continue to operate, but the gas separation device 1 gives an alarm. When the output point and the pressure of the compressed air are further reduced to the second specified value (less than the first specified value) or less, the gas separation device 1 and the compressed air supply source 2 are stopped as in the first embodiment. It is a point. In this embodiment, there are two stages, but there may be three or more stages.

装置停止の前に警報を出力することで、圧縮空気供給源２の異常や、配管異常等に事前の対処ができ、顧客への影響を小さくすることができる。 By outputting an alarm before the device is stopped, it is possible to take proactive measures against an abnormality in the compressed air supply source 2, an abnormality in piping, and the like, and it is possible to reduce the influence on the customer.

実施例１では、気体分離装置１及び圧縮空気供給源２をいきなり停止していたが、本実施例では、圧縮空気の圧力に規定値に複数の段階を設け、最終段階までの段階では、吸着工程の時間を徐々に長くなるように制御する。 In the first embodiment, the gas separation device 1 and the compressed air supply source 2 were suddenly stopped, but in the present embodiment, the pressure of the compressed air is provided with a plurality of steps at the specified value, and the step up to the final step is adsorption. The process time is controlled to be gradually lengthened.

機器構成は実施例１、２と同構成で、制御部３７は実施例２と同様に圧縮空気の圧力の規定値に段階を設けており、圧縮空気が低下し、第１規定値以下になったときに、吸着工程の時間を長くする。吸着工程を長くすることで、吸着槽１０の圧力が高くなり、窒素槽２３の窒素ガスの圧力と純度が向上する。 The equipment configuration is the same as that of the first and second embodiments, and the control unit 37 has a step at the specified value of the compressed air pressure as in the second embodiment, and the compressed air decreases to be equal to or less than the first specified value. At that time, the time of the adsorption process is lengthened. By lengthening the adsorption step, the pressure in the adsorption tank 10 increases, and the pressure and purity of the nitrogen gas in the nitrogen tank 23 improve.

それでも、圧縮空気が低下し、第２規定値以下になった場合は、制御部２７は、気体分離装置１を停止する。本実施例では、圧縮空気供給源２の停止を付加してもよいが、必須構成ではない。 Even so, when the compressed air drops to the second specified value or less, the control unit 27 stops the gas separation device 1. In this embodiment, the stop of the compressed air supply source 2 may be added, but it is not an essential configuration.

本実施例については、実施例１～３の構成の圧力検知手段７が流量検知手段の場合について説明する。 In this embodiment, the case where the pressure detecting means 7 having the configurations of the first to third embodiments is the flow rate detecting means will be described.

機器構成は実施例１～３と異なる点は、圧力検知手段７が流量検知手段になっており、実施例１～３の圧縮空気の圧力の規定値を圧縮空気の流量の規定値としている点である。規定値以下となった場合に同様の制御を行う。 The equipment configuration is different from Examples 1 to 3 in that the pressure detecting means 7 is a flow rate detecting means, and the specified value of the compressed air pressure of Examples 1 to 3 is the specified value of the compressed air flow rate. Is. Similar control is performed when the value falls below the specified value.

本実施例は、実施例１乃至４の気体分離装置１において、気体分離装置１の運転開始時、空気槽５の圧力が規定値を超えていない場合、気体分離装置１の運転を開始させないようしたものである。圧縮空気供給源２を駆動させて空気槽５に規定値の圧力が充填されるまで待つ必要があるからである。これにより、気体分離装置１の無駄な運転を防ぎ、精製した窒素槽の放気を防止する。また気体分離装置１が運転しないため、圧縮空気供給源２の異常や、先行運転の忘れを発見することが可能となる。 In this embodiment, in the gas separation devices 1 of Examples 1 to 4, when the pressure of the air tank 5 does not exceed the specified value at the start of the operation of the gas separation device 1, the operation of the gas separation device 1 is not started. It was done. This is because it is necessary to drive the compressed air supply source 2 and wait until the air tank 5 is filled with the pressure of the specified value. This prevents unnecessary operation of the gas separation device 1 and prevents air release from the purified nitrogen tank. Further, since the gas separation device 1 does not operate, it is possible to detect an abnormality in the compressed air supply source 2 or forgetting to perform the preceding operation.

１…気体分離装置、２…圧縮空気供給源、３…配管、４…エアフィルタ、５…空気槽、６…配管、７…圧力検知手段、８…配管、９…供給弁、１０…吸着槽、１１…配管、１２…排気弁、１３…排気サイレンサ、１４…配管、１５…下均圧弁、１６…配管、１７…配管、１８…絞り、１９…配管、２０…上均圧弁、２１…取出弁、２２…配管、２３…窒素槽、２４…吐出口、２５…配管、２６…フィルタレギュレータ、２７…吐出弁、２８…流量調整弁、２９…配管、３０…配管、３１…開閉弁、３２…流量調整弁、３４…開閉弁、３５…流量調整弁、３７…制御部 1 ... Gas separation device, 2 ... Compressed air supply source, 3 ... Piping, 4 ... Air filter, 5 ... Air tank, 6 ... Piping, 7 ... Pressure detecting means, 8 ... Piping, 9 ... Supply valve, 10 ... Suction tank , 11 ... Piping, 12 ... Exhaust valve, 13 ... Exhaust silencer, 14 ... Piping, 15 ... Lower pressure equalizing valve, 16 ... Piping, 17 ... Piping, 18 ... Squeezing, 19 ... Piping, 20 ... Upper pressure equalizing valve, 21 ... Extraction Valve, 22 ... piping, 23 ... nitrogen tank, 24 ... discharge port, 25 ... piping, 26 ... filter regulator, 27 ... discharge valve, 28 ... flow control valve, 29 ... piping, 30 ... piping, 31 ... on-off valve, 32 ... Flow control valve, 34 ... On-off valve, 35 ... Flow control valve, 37 ... Control unit

Claims (6)

圧縮空気供給源と吸着槽との間の供給経路に設けられた、圧縮気体の圧力を検出する圧力検出手段と、
前記圧力検出手段と通信可能に接続されており、検出した前記圧力に応じて運転を制御する制御部と、を有し、
前記制御部は、検出した前記圧力が第１規定値を下回った場合、吸着工程の時間を長くするか、または前記圧縮空気供給源を停止し、かつ
前記制御部は、前記第１規定値よりも低い第２規定値を下回った場合、気体分離装置の運転を停止することを特徴とする気体分離装置。 A pressure detecting means for detecting the pressure of the compressed gas provided in the supply path between the compressed air supply source and the adsorption tank,
It has a control unit that is communicably connected to the pressure detecting means and controls operation according to the detected pressure.
When the detected pressure falls below the first specified value, the control unit prolongs the time of the adsorption step or shuts down the compressed air supply source and stops the compressed air supply source.
The control unit is a gas separation device, characterized in that the operation of the gas separation device is stopped when the value falls below the second specified value lower than the first specified value . 請求項１において、
前記圧縮気体の供給経路には圧縮気体を貯留する空気槽を備え、
前記圧力検出手段は、前記空気槽と前記吸着槽との間の圧力を検出することを特徴とする気体分離装置。 In claim 1,
The compressed gas supply path is provided with an air tank for storing the compressed gas.
The pressure detecting means is a gas separation device characterized by detecting the pressure between the air tank and the adsorption tank . 請求項１において、
前記圧縮空気供給源と前記圧力検出手段との間の供給経路に圧縮空気を貯留させる空気槽を有し、
気体分離装置の運転開始時、前記空気槽の圧力が規定値を超えていない場合、気体分離装置の運転を開始させないことを特徴とする気体分離装置。 In claim 1,
It has an air tank for storing compressed air in a supply path between the compressed air supply source and the pressure detecting means.
A gas separation device, characterized in that the operation of the gas separation device is not started if the pressure of the air tank does not exceed a specified value at the start of operation of the gas separation device. 圧縮空気供給源と、吸着槽と、前記圧縮空気供給源と前記吸着槽との間の供給経路に設けられた、圧縮気体の圧力を検出する圧力検出手段と、前記圧力検出手段と通信可能に接続されており、検出した前記圧力に応じて運転を制御する制御部と、を有する気体分離装置において、
前記制御部は、検出した前記圧力が第１規定値を下回った場合、吸着工程の時間を長くするか、または前記圧縮空気供給源を停止し、かつ
前記制御部は、前記第１規定値よりも低い第２規定値を下回った場合、気体分離装置の運転を停止することを特徴とする気体分離装置。 It is possible to communicate with the compressed air supply source, the suction tank, the pressure detecting means for detecting the pressure of the compressed gas provided in the supply path between the compressed air supply source and the suction tank, and the pressure detecting means. In a gas separator having a control unit that is connected and controls operation according to the detected pressure .
When the detected pressure falls below the first specified value, the control unit prolongs the time of the adsorption step or shuts down the compressed air supply source and stops the compressed air supply source.
The control unit is a gas separation device, characterized in that the operation of the gas separation device is stopped when the value falls below the second specified value lower than the first specified value . 請求項４において、
前記圧縮気体の供給経路には圧縮気体を貯留する空気槽を備え、
前記圧力検出手段は、前記空気槽と前記吸着槽との間の圧力を検出することを特徴とする気体分離装置。 In claim 4,
The compressed gas supply path is provided with an air tank for storing the compressed gas.
The pressure detecting means is a gas separation device characterized by detecting the pressure between the air tank and the adsorption tank . 請求項４において、
前記圧縮空気供給源と前記圧力検出手段との間の供給経路に圧縮空気を貯留させる空気槽を有し、
気体分離装置の運転開始時、前記空気槽の圧力が規定値を超えていない場合、気体分離装置の運転を開始させないことを特徴とする気体分離装置。 In claim 4,
It has an air tank for storing compressed air in a supply path between the compressed air supply source and the pressure detecting means.
A gas separation device, characterized in that the operation of the gas separation device is not started if the pressure of the air tank does not exceed a specified value at the start of operation of the gas separation device.
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