JP7009128B2 - 基板処理装置、基板処理方法及び記憶媒体 - Google Patents
基板処理装置、基板処理方法及び記憶媒体 Download PDFInfo
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- 238000012545 processing Methods 0.000 title claims description 48
- 238000003860 storage Methods 0.000 title claims description 9
- 238000003672 processing method Methods 0.000 title claims description 8
- 239000000758 substrate Substances 0.000 claims description 304
- 238000005498 polishing Methods 0.000 claims description 266
- 230000002093 peripheral effect Effects 0.000 claims description 27
- 238000003825 pressing Methods 0.000 claims description 7
- 230000007423 decrease Effects 0.000 claims description 6
- 239000002245 particle Substances 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 description 32
- 239000007788 liquid Substances 0.000 description 31
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 18
- 238000000034 method Methods 0.000 description 14
- 238000007517 polishing process Methods 0.000 description 11
- 238000012546 transfer Methods 0.000 description 10
- 239000012530 fluid Substances 0.000 description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 229910001873 dinitrogen Inorganic materials 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000009826 distribution Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 239000003595 mist Substances 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B29/00—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
- B24B29/005—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents using brushes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/005—Control means for lapping machines or devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/006—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the speed
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
- H01L21/02008—Multistep processes
- H01L21/0201—Specific process step
- H01L21/02013—Grinding, lapping
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
- H01L21/02008—Multistep processes
- H01L21/0201—Specific process step
- H01L21/02016—Backside treatment
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H01L21/02052—Wet cleaning only
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30625—With simultaneous mechanical treatment, e.g. mechanico-chemical polishing
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67046—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly scrubbing means, e.g. brushes
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
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- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
- H01L21/67219—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process comprising at least one polishing chamber
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
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- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
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- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
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- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Debugging And Monitoring (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
基板搬送ユニット11が、基板5の裏面を上向きにした状態で、基板5を基板処理ユニット9に搬入し、基板保持回転部15に渡す。基板5は、チャック22により水平方向に移動できないように拘束された状態で基板支持体23上に水平姿勢で支持される。
次に、研磨ブラシ29を退避位置(図6~図9の右端位置)から基板5の中心部の上方の基板5から僅かに上方に離れた位置に移動させる。基板洗浄ノズル42は、退避位置(図6~図9の左端位置)で待機させておく。ここまでの手順が図6に示されている。
次に、基板保持回転部15により基板5を鉛直軸線周りに回転させる。基板5の回転は処理の終了まで継続する。また、リンス液供給ノズル39から基板5の上面(裏面)の中心に純水を供給するとともに、処理液供給機構35から研磨ブラシ29に純水を供給する。この状態で、研磨ブラシ29を回転させるとともに基板5の上面に押しつけ、研磨ブラシ29を基板5の周縁に向けて移動させる。これにより、基板5の上面に存在する除去対象物が研磨ブラシ29により削り取られる。削り取られた除去対象物は、リンス液供給ノズル39から基板5に供給された純水、並びに処理液供給機構35から研磨ブラシ29に供給された純水と一緒に、回転する基板5の上面を基板5の周縁に向かって流れ、基板5の外方に流出する。ここまでの手順が図7に示されている。研磨条件の詳細については後述する。
次に、研磨ブラシ29を上昇させて基板5の上面から離し、処理液供給機構35からの研磨ブラシ29への純水の供給を停止し、研磨ブラシ29を退避位置(図6~図9の右端位置)に移動する。これと同時に基板洗浄ノズル42を退避位置から基板5の上面の中心の真上の位置まで移動させる。ここまでの手順が図8に示されている。
次に、基板5の裏面の中央部に純水を供給することにより、リンス工程が行われる。このリンス工程において、純水は、リンス液供給ノズル39から供給してもよいし、基板洗浄ノズル42から供給してもよい。基板洗浄ノズル42から純水を供給する場合には、基板洗浄ノズル42に窒素ガスを供給しないで、純水のみを供給する。
次に、基板5の上面への純水の供給を停止し、基板5を引き続き回転させることにより(好ましくは回転速度を増して)、基板の振り切り乾燥を行う。このとき、研磨ブラシ29及び基板洗浄ノズル42は図3に示されるように各々の退避位置に退避している。基板5の上面が乾燥したら、基板5の回転を停止する。
研磨の開始前に、研磨ブラシ29の中心Bを基板5の裏面上の位置P1に位置させた。位置P1におけるX座標は-15である。このとき、X軸上にある研磨ブラシ29の研磨面の外周上の二点のうち、X座標値が大きい方の点つまり研磨ブラシ29の進行方向側の点(以下「最前点F」と呼ぶ)におけるX座標は0である。つまり、この最前点Fは、基板5の回転中心Oと一致している。
研磨ブラシ29の中心BのX座標が+15となったら、つまり、研磨ブラシ29の最前点FのX座標が+30となり最前点Fが円C1上に位置したら、研磨ブラシ29のX正方向への移動速度を3.8mm/secに低下させるとともに、基板5の回転速度を1238rpmに低下させ、研磨ブラシ29を、その中心BのX座標値が+45となるまで移動させた。
研磨ブラシ29の中心BのX座標値が+45となったら、つまり、研磨ブラシ29の最前点FのX座標値が+60となり最前点Fが円C2上に位置したら、研磨ブラシ29のX正方向への移動速度を2.5mm/secに低下させるとともに、基板5の回転速度を825rpmに低下させ、研磨ブラシ29を、その中心BのX座標値が+75となるまで移動させた。
研磨ブラシ29の中心BのX座標値が+75となったら、つまり、研磨ブラシ29の最前点FのX座標値が+90となり最前点Fが円C3上に位置したら、研磨ブラシ29のX正方向への移動速度を1.9mm/secに低下させるとともに、基板5の回転速度を619rpmに低下させ、研磨ブラシ29を、その中心BのX座標値が+105となるまで移動させた。
研磨ブラシ29の中心BのX座標値が+105となったら、つまり、研磨ブラシ29の最前点FのX座標値が+120となり最前点Fが円C4上に位置したら、研磨ブラシ29のX正方向への移動速度を1.4mm/secに低下させるとともに、基板5の回転速度を500rpmに低下させ、研磨ブラシ29を、その中心BのX座標値が+135となるまで移動させる。研磨ブラシ29の中心BのX座標値が+133.5となったら、つまり、研磨ブラシ29の最前点FのX座標値が+148.5となり最前点Fが円C5上に位置したら、研磨ブラシ29を上昇させて基板5の裏面から離した。
比較例として従来方法による研磨を行った結果について説明する。研磨工程の開始から終了までの間、基板の回転速度は1000rpmで一定、研磨ブラシの回転数は50rpmで一定、ブラシ圧(研磨ブラシを基板に押しつける力)は1Nで一定とした。この比較例では前述した実施例とは異なる3つの径方向範囲(第1~第3径方向範囲)を設定した。
<第1径方向範囲での研磨>
研磨の開始前に、上記の実施例と同様に、研磨ブラシ29の中心Bを基板5の裏面上のX軸上の位置P1(図10を参照)に位置させた。位置P1におけるX座標は-15である。研磨ブラシ29の最前点FのX座標は0である。つまり、この最前点Fは、基板5の回転中心Oと一致している。
研磨ブラシ29の中心BのX座標が+35となったら、研磨ブラシ29のX正方向への移動速度を10mm/secに変化させ、研磨ブラシ29を、その中心BのX座標値が+85となるまで移動させた。この第2径方向範囲(+35~+85)における研磨ブラシ29の移動所要時間は5.0(sec)であった。
研磨ブラシ29の中心BのX座標が+85となったら、研磨ブラシ29のX正方向への移動速度を7mm/secに変化させ、研磨ブラシ29を、その中心BのX座標値が+133.5となるまで移動させた。この第3径方向範囲(+85~+133.5)における研磨ブラシ29の移動所要時間は6.9(sec)であった。その後、研磨ブラシ29をその位置で4(sec)保持した。
表1より明らかなように、上記実施例では、基板5の周縁側における研磨ブラシ29のX軸方向の移動速度を小さく抑えているため、基板5の周縁側領域(例えば径方向範囲R4~R5に対応する領域)の研磨には16~20秒という比較的長時間が必要となる。この問題を解決するため、図12に概略的に示すように、1つの基板処理ユニット9に2つ(2つ以上でもよい)の研磨ブラシ29(図12では、一方に29-1、他方に29-2の参照符号を付けた)を設けてもよい。これら2つの研磨ブラシ29-1,29-2は互いに独立して移動させることができる。
19 制御部(制御装置)
20 回転駆動部
21,22 基板保持部
29(29-1,29-2) 研磨ブラシ
46 研磨ブラシ移動部(スキャン駆動機構)
O 基板の回転中心
R1~R2 径方向範囲
Claims (8)
- 基板を水平に保持する基板保持部と、
前記基板保持部を回転させて、前記基板保持部に保持された前記基板を鉛直軸線周りに回転させる回転駆動部と、
前記基板の研磨対象面を研磨する研磨ブラシと、
前記研磨ブラシを、前記基板保持部により保持されて回転する前記基板に押し当てながら前記研磨ブラシを水平方向に移動させる研磨ブラシ移動部と、
前記基板保持部と前記研磨ブラシ移動部の動作を制御する制御部と
を備え、
前記研磨ブラシは、研磨粒子を担持するとともに前記基板の前記研磨対象面と接触する研磨面を有し、
前記基板上に複数の径方向範囲が設定され、
前記制御部は、前記回転駆動部及び前記研磨ブラシ移動部を制御して、
前記研磨ブラシの中心が前記各径方向範囲の最も半径方向外側の位置にあるときの前記研磨ブラシの前記研磨面の最も半径方向外側にある部分に対向する前記基板の位置における前記基板の接線速度が、前記複数の径方向範囲同士で互いに等しくなり、かつ、前記研磨ブラシの中心が前記各径方向範囲の最も半径方向外側の位置と最も半径方向内側の位置との間の位置を移動する間に前記基板が回転する数が、前記複数の径方向範囲同士で互いに等しくなるという条件が満たされるように、前記基板の半径方向に測定した前記基板の回転中心から前記研磨ブラシの中心までの距離の増大に伴い、前記基板の回転速度を段階的または連続的に小さくし、かつ、前記研磨ブラシの前記基板の半径方向の移動速度を段階的または連続的に小さくすることを特徴とする、基板処理装置。 - 前記制御部は、前記研磨ブラシの中心が前記各一つの径方向範囲を移動している間における前記基板の回転速度及び前記研磨ブラシの前記基板の半径方向の移動速度が一定であるように、前記回転駆動部及び前記研磨ブラシ移動部を制御する、請求項1記載の基板処理装置。
- 前記各径方向範囲の半径方向幅は、前記研磨ブラシの前記研磨面の外径と等しい、請求項1または2記載の基板処理装置。
- 前記制御部は、前記研磨ブラシが前記基板に接しているときには前記研磨ブラシを前記基板の半径方向内側から半径方向外側に向けて移動させる、請求項1から3のうちのいずれか一項に記載の基板処理装置。
- 前記研磨ブラシを少なくとも2つ備え、
前記研磨ブラシ移動部は、前記少なくとも2つの研磨ブラシを独立して移動させることができるように構成され、
前記制御部は、前記基板の中心側領域を研磨するときに前記少なくとも2つの研磨ブラシのうちの1つを用いて研磨を行い、前記基板の周縁側領域を研磨するときに前記少なくとも2つの研磨ブラシを用いて研磨を行うように前記研磨ブラシ移動部を制御する、請求項1から4のうちのいずれか一項に記載の基板処理装置。 - 水平姿勢で鉛直軸線周りに回転している基板の研磨対象面に研磨ブラシを押し当てながら前記研磨ブラシを水平方向に移動させることにより、前記研磨対象面を研磨する基板処理方法において、
前記研磨ブラシは、研磨粒子を担持するとともに前記基板の前記研磨対象面と接触する研磨面を有し、
前記基板上に複数の径方向範囲が設定され、
前記研磨ブラシの中心が前記各径方向範囲の最も半径方向外側の位置にあるときの前記研磨ブラシの前記研磨面の最も半径方向外側にある部分に対向する前記基板の位置における前記基板の接線速度が、前記複数の径方向範囲同士で互いに等しくなり、かつ、前記研磨ブラシの中心が前記各径方向範囲の最も半径方向外側の位置と最も半径方向内側の位置との間の位置を移動する間に前記基板が回転する数が、前記複数の径方向範囲同士で互いに等しくなるという条件が満たされるように、前記基板の半径方向に測定した前記基板の回転中心から前記研磨ブラシの中心までの距離の増大に伴い、前記基板の回転速度が段階的または連続的に小さくなり、かつ、前記研磨ブラシの前記基板の半径方向の移動速度が段階的または連続的に小さくなるように、前記基板の回転速度及び前記研磨ブラシの移動速度を変化させながら研磨が行われる、基板処理方法。 - 前記基板上に複数の径方向範囲が設定され、
前記研磨ブラシの中心が前記各一つの径方向範囲を移動している間における前記基板の回転速度及び前記研磨ブラシの前記基板の半径方向の移動速度が一定である
という条件が満たされるように研磨が行われる、請求項6記載の基板処理方法。 - 基板処理装置の動作を制御するためのコンピュータにより実行されたときに、前記コンピュータが前記基板処理装置を制御して請求項6または7に記載の基板処理方法を実行させるプログラムが記録された記憶媒体。
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