JP6952400B2 - Piezoelectric gas pump - Google Patents

Piezoelectric gas pump Download PDF

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JP6952400B2
JP6952400B2 JP2020519855A JP2020519855A JP6952400B2 JP 6952400 B2 JP6952400 B2 JP 6952400B2 JP 2020519855 A JP2020519855 A JP 2020519855A JP 2020519855 A JP2020519855 A JP 2020519855A JP 6952400 B2 JP6952400 B2 JP 6952400B2
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diaphragm
piezoelectric
plate portion
opening
piezoelectric element
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JPWO2019221121A1 (en
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哲也 下田
哲也 下田
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Kyocera Corp
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive

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  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)

Description

本開示は、気体の流れを発生させる圧電ガスポンプに関する。 The present disclosure relates to a piezoelectric gas pump that generates a gas flow.

従来から、例えば特公昭６４−２７９３号公報に（以下、特許文献１という）に記載のような圧電素子を駆動源に用いた圧電ガスポンプ（流れ発生装置）が知られている。 Conventionally, for example, a piezoelectric gas pump (flow generator) using a piezoelectric element as a drive source as described in Japanese Patent Application Laid-Open No. 64-2793 (hereinafter referred to as Patent Document 1) has been known.

本開示の圧電ガスポンプは、第１開口部を有するダイヤフラムと、該ダイヤフラムと対向して位置する薄板部と、前記ダイヤフラムと前記薄板部とを接続する枠体とを含み、ポンプ室である内部空間を有する第１筐体と、前記第１開口部よりも大きな開口の貫通孔を有し、前記ダイヤフラムに垂直な方向から見たときに前記第１開口部が前記貫通孔の内側に位置するように前記ダイヤフラムに取り付けられた圧電素子と、前記第１開口部に近接する位置に吐出口を有し、少なくとも前記ダイヤフラムを覆い、前記ダイヤフラムとの間に流体通路を有する外壁と、を備えており、前記ダイヤフラムは、当該ダイヤフラムに垂直な方向から見たときに前記貫通孔の内側に位置する領域の少なくとも一部の厚みが、前記圧電素子と重なる領域の厚みと異なっている。 The piezoelectric gas pump of the present disclosure includes a diaphragm having a first opening, a thin plate portion located facing the diaphragm, and a frame body connecting the diaphragm and the thin plate portion, and is an internal space that is a pump chamber. The first housing has a through hole having an opening larger than that of the first opening, and the first opening is located inside the through hole when viewed from a direction perpendicular to the diaphragm. a piezoelectric element attached to the diaphragm, having a discharge port at a position proximate to said first opening, covering at least the diaphragm, provided with a, and an outer wall having a fluid passageway between the diaphragm , the diaphragm, at least a portion of the thickness of the region located inside the through hole when viewed in a direction perpendicular to the diaphragm, that is different from the thickness of the region overlapping with the piezoelectric element.

発明の効果The invention's effect

本開示の圧電ガスポンプによれば、ダイヤフラムの振動に薄板部の振動が重畳することで、小型でかつ流体流量の増大化が可能な圧電ガスポンプを実現することができる。 According to the piezoelectric gas pump of the present disclosure, it is possible to realize a piezoelectric gas pump that is compact and capable of increasing the fluid flow rate by superimposing the vibration of the thin plate portion on the vibration of the diaphragm.

圧電ガスポンプの一例を示す模式的な斜視図である。It is a schematic perspective view which shows an example of a piezoelectric gas pump. 図１に示す圧電ガスポンプのＡ−Ａ線で切断した断面の概略端面図である。It is a schematic end view of the cross section cut along the line AA of the piezoelectric gas pump shown in FIG. 図２に示す第１筐体および圧電素子の概略斜視図である。It is the schematic perspective view of the 1st housing and the piezoelectric element shown in FIG. 図２に示す圧電素子の内側領域に位置するダイヤフラムの形態の一例を示す拡大端面図である。It is an enlarged end view which shows an example of the form of the diaphragm located in the inner region of the piezoelectric element shown in FIG. 図２に示す圧電素子の内側領域に位置するダイヤフラムの形態の他の例を示す拡大端面図である。It is an enlarged end view which shows another example of the form of the diaphragm located in the inner region of the piezoelectric element shown in FIG. 図２に示す圧電素子の内側領域に位置するダイヤフラムの形態の他の例を示す拡大端面図である。It is an enlarged end view which shows another example of the form of the diaphragm located in the inner region of the piezoelectric element shown in FIG. 図２に示す圧電素子の内側領域に位置するダイヤフラムの形態の他の例を示す拡大端面図である。It is an enlarged end view which shows another example of the form of the diaphragm located in the inner region of the piezoelectric element shown in FIG. 図２に示す圧電素子の内側領域に位置するダイヤフラムの形態の他の例を示す拡大端面図である。It is an enlarged end view which shows another example of the form of the diaphragm located in the inner region of the piezoelectric element shown in FIG. 図２に示す圧電素子の内側領域に位置するダイヤフラムの形態の他の例を示す拡大端面図である。It is an enlarged end view which shows another example of the form of the diaphragm located in the inner region of the piezoelectric element shown in FIG. 図２に示す圧電素子の内側領域に位置するダイヤフラムの形態の他の例を示す拡大端面図である。It is an enlarged end view which shows another example of the form of the diaphragm located in the inner region of the piezoelectric element shown in FIG.

以下、添付図面を参照して、圧電ガスポンプの例を詳細に説明する。なお、以下に示す開示の一例によりこの発明が限定されるものではない。 Hereinafter, an example of the piezoelectric gas pump will be described in detail with reference to the accompanying drawings. The present invention is not limited to the following disclosure examples.

図１は、圧電ガスポンプの開示の一例を示す模式的な斜視図であり、図２は図１に示す圧電ガスポンプのＡ−Ａ線で切断した断面の概略端面図、図３は図２に示す第１筐体および圧電素子の概略斜視図である。 FIG. 1 is a schematic perspective view showing an example of disclosure of the piezoelectric gas pump, FIG. 2 is a schematic end view of a cross section of the piezoelectric gas pump shown in FIG. 1 cut along the line AA, and FIG. 3 is shown in FIG. It is a schematic perspective view of the 1st housing and a piezoelectric element.

図１および図２に示す圧電ガスポンプは、ポンプ室となる内部空間を有する第１筐体１を備える。 The piezoelectric gas pump shown in FIGS. 1 and 2 includes a first housing 1 having an internal space serving as a pump chamber.

第１筐体１は、第１開口部１１１を有するダイヤフラム１１と、ダイヤフラム１１と対向する位置に設けられた薄板部１２と、ダイヤフラム１１と薄板部１２とを接続する枠体１３とを含んでいる。図に示す例では、この第１筐体１は、ダイヤフラム１１を天板、薄板部１２を底板、枠体１３を側壁とする箱型の形状になっており、第１開口部１１１はダイヤフラム１１の中央部に設けられている。 The first housing 1 includes a diaphragm 11 having a first opening 111, a thin plate portion 12 provided at a position facing the diaphragm 11, and a frame body 13 connecting the diaphragm 11 and the thin plate portion 12. There is. In the example shown in the figure, the first housing 1 has a box shape in which the diaphragm 11 is the top plate, the thin plate portion 12 is the bottom plate, and the frame body 13 is the side wall, and the first opening 111 is the diaphragm 11. It is provided in the center of.

第１筐体１の内部には、ダイヤフラム１１と薄板部１２と枠体１３とで空間が形成され、この空間（内部空間１０）がポンプ室となる。なお、ここでいうポンプ室とは、ダイヤフラム１１の振動によって内部空間１０への気体の流入および流出が繰り返され、ポンプとして機能する部屋のことを意味している。気体（ガス）としては、酸素含有ガス（空気）のほか、適宜用いることができる。 Inside the first housing 1, a space is formed by the diaphragm 11, the thin plate portion 12, and the frame body 13, and this space (internal space 10) serves as a pump chamber. The pump room referred to here means a room that functions as a pump by repeatedly inflowing and outflowing gas into the internal space 10 due to vibration of the diaphragm 11. As the gas, an oxygen-containing gas (air) or an appropriate gas can be used.

第１筐体１を構成するダイヤフラム１１、薄板部１２および枠体１３としては、ステンレス（ＳＵＳ）、黄銅、４２アロイなどの金属部材、ポリブチレンテレフタレート（ＰＢＴ）、液晶ポリマーなどの樹脂部材を用いることができる。 As the diaphragm 11, the thin plate portion 12, and the frame body 13 constituting the first housing 1, metal members such as stainless steel (SUS), brass, and 42 alloy, and resin members such as polybutylene terephthalate (PBT) and liquid crystal polymer are used. be able to.

ダイヤフラム１１は、第１開口部１１１を有していて、この第１開口部１１１を通して内部空間１０への気体の流入および流出が行われる。ここで、第１開口部１１とは、１個の孔を有する構成であってもよく、複数の孔を有する構成であってもよい。 The diaphragm 11 has a first opening 111, and gas flows in and out of the internal space 10 through the first opening 111. Here, the first opening 11 may have a structure having one hole or a structure having a plurality of holes.

ダイヤフラム１１の厚みは、例えば５０〜５００μｍの厚みとされる。 The thickness of the diaphragm 11 is, for example, 50 to 500 μm.

また、ダイヤフラム１１が円板状であって、第１開口部１１が１個の円形の孔を有する場合の当該第１開口部１１の直径は、ダイヤフラム１１の外周形状の直径の例えば１〜２０％の長さとされる。 Further, when the diaphragm 11 has a disk shape and the first opening 11 has one circular hole, the diameter of the first opening 11 is, for example, 1 to 20 of the diameter of the outer peripheral shape of the diaphragm 11. % Length.

また、ダイヤフラム１１が円板状であって、第１開口部１１１が複数の円形の孔を有する場合の当該孔の個数は例えば２〜３００個とされ、それぞれの孔の直径はダイヤフラム１１の外周形状の直径の例えば０．０２〜１０％の長さとされる。第１開口部１１１が、複数の孔を有する場合には、流出する気体の吐出方向の指向性を抑制できるため、流体を広範囲に送風可能となる。 When the diaphragm 11 has a disk shape and the first opening 111 has a plurality of circular holes, the number of the holes is, for example, 2 to 300, and the diameter of each hole is the outer circumference of the diaphragm 11. The length is, for example, 0.02 to 10% of the diameter of the shape. When the first opening 111 has a plurality of holes, the directivity of the outflowing gas in the discharge direction can be suppressed, so that the fluid can be blown over a wide range.

なお、ダイヤフラム１１の外周形状および第１開口部１１１の形状はともに円状に限られず、多角形状であってもよい。 The outer peripheral shape of the diaphragm 11 and the shape of the first opening 111 are not limited to a circular shape, and may be a polygonal shape.

薄板部１２は、ダイヤフラム１１と対向する位置に設けられていて、基本的にはダイヤフラム１１の外周形状と同じ外周形状である。 The thin plate portion 12 is provided at a position facing the diaphragm 11, and basically has the same outer peripheral shape as the outer peripheral shape of the diaphragm 11.

枠体１３は、ダイヤフラム１１および薄板部１２をこれらの間に所望の間隔を設けるように支持し、ダイヤフラム１１および薄板部１２とともに第１筐体１を形成している。ここで、図に示す枠体１３は、断面で見たときに高さ方向の中央部に内側に向けて突出するように内面に凸部１３１を有する段差形状になっていて、凸部１３１がダイヤフラム１１および薄板部１２で挟まれた構成になっている。 The frame body 13 supports the diaphragm 11 and the thin plate portion 12 so as to provide a desired interval between them, and forms the first housing 1 together with the diaphragm 11 and the thin plate portion 12. Here, the frame body 13 shown in the figure has a stepped shape having a convex portion 131 on the inner surface so as to project inward toward the central portion in the height direction when viewed in cross section, and the convex portion 131 has a stepped shape. It is sandwiched between the diaphragm 11 and the thin plate portion 12.

枠体１３は、ダイヤフラム１１および薄板部１２よりも変形しにくく、例えばダイヤフラム１１および薄板部１２と同じ材質を有する場合は、これらよりも厚みが厚くなっている。ここで、枠体１３が内面に凸部１３１を有するなど厚みが異なる部位を有する場合は、枠体１３の最も薄い部分がダイヤフラム１１および薄板部よりも厚くなっている。 The frame body 13 is less likely to be deformed than the diaphragm 11 and the thin plate portion 12. For example, when the frame body 13 has the same material as the diaphragm 11 and the thin plate portion 12, the frame body 13 is thicker than these. Here, when the frame body 13 has a portion having a different thickness such as having a convex portion 131 on the inner surface, the thinnest portion of the frame body 13 is thicker than the diaphragm 11 and the thin plate portion.

なお、枠体１３は、図に示すような凸部１３１を有する形状に限られず、断面で見て厚みが高さ方向に沿って一定となっている形状でもよく内面に凹部を有する形状であってもよい。 The frame body 13 is not limited to a shape having a convex portion 131 as shown in the figure, and may have a shape in which the thickness is constant along the height direction when viewed in cross section, and is a shape having a concave portion on the inner surface. You may.

また、圧電ガスポンプは、第１開口部１１１よりも大きな開口の貫通孔２１を有し、ダイヤフラム１１に垂直な方向から見たときに第１開口部１１１が貫通孔２１の内側に位置するようにダイヤフラム１１に取り付けられた圧電素子２を備える。なお、図２は端面図であって、図２に示す圧電素子２は複数個あるのではなく、図３に示すような環状平板型の形状を有する１個の圧電素子２を示している。 Further, the piezoelectric gas pump has a through hole 21 having an opening larger than that of the first opening 111 so that the first opening 111 is located inside the through hole 21 when viewed from a direction perpendicular to the diaphragm 11. A piezoelectric element 2 attached to the diaphragm 11 is provided. Note that FIG. 2 is an end view, and does not show a plurality of piezoelectric elements 2 shown in FIG. 2, but shows one piezoelectric element 2 having an annular flat plate shape as shown in FIG.

圧電素子２は、例えば、貫通孔２１を有する圧電体と、圧電体の対向する一対の主面にそれぞれ設けられた表面電極とを備えるものである。 The piezoelectric element 2 includes, for example, a piezoelectric body having a through hole 21 and surface electrodes provided on a pair of main surfaces of the piezoelectric body facing each other.

圧電素子２を構成する圧電体としては、チタン酸ジルコン酸鉛系、チタン酸バリウム系、ニオブ酸カリウム／ナトリウム系などの圧電セラミックス、水晶、タンタル酸リチウムなどの圧電単結晶を用いることができる。圧電素子２を構成する表面電極としては、銀、ニッケル、銅、銀−パラジウムなどを用いることができる。 As the piezoelectric body constituting the piezoelectric element 2, piezoelectric ceramics such as lead zirconate titanate, barium titanate, potassium niobate / sodium niobate, and piezoelectric single crystals such as crystal and lithium tantalate can be used. As the surface electrode constituting the piezoelectric element 2, silver, nickel, copper, silver-palladium or the like can be used.

ここで、圧電素子２が第１開口部１１１よりも大きな開口の貫通孔２１を有しているとは、貫通孔２１の横断面の面積が第１開口部１１１の横断面の面積よりも大きいことを意味する。圧電素子２の内側領域（貫通孔２１の内側領域）でダイヤフラム１１が圧電素子２の変位よりも大きな変位を得られるように、貫通孔２１の大きさが設定されている。 Here, the fact that the piezoelectric element 2 has a through hole 21 having an opening larger than that of the first opening 111 means that the cross-sectional area of the through hole 21 is larger than the cross-sectional area of the first opening 111. Means that. The size of the through hole 21 is set so that the diaphragm 11 can obtain a displacement larger than the displacement of the piezoelectric element 2 in the inner region of the piezoelectric element 2 (the inner region of the through hole 21).

図１に示すように、圧電素子２は例えば配線部材５を介して外部回路に接続されており、圧電素子２を駆動させることによって、ダイヤフラム１１を振動させ、圧電ガスポンプを駆動させることができる。 As shown in FIG. 1, the piezoelectric element 2 is connected to an external circuit via, for example, a wiring member 5, and by driving the piezoelectric element 2, the diaphragm 11 can be vibrated to drive the piezoelectric gas pump.

圧電素子２は、圧電体の対向する一対の主面にそれぞれ設けられた表面電極のパターンとして、以下の形態をとり得る。 The piezoelectric element 2 can take the following form as a pattern of surface electrodes provided on the pair of main surfaces of the piezoelectric body, respectively.

圧電素子２は、一方の主面および他方の主面に設けられた表面電極がそれぞれの面に面方向に広がる一つの主表面電極（一対の主表面電極）を有する他励振型の圧電素子であってもよい。 The piezoelectric element 2 is a separately excited type piezoelectric element having one main surface electrode (a pair of main surface electrodes) in which surface electrodes provided on one main surface and the other main surface spread in the plane direction on each surface. There may be.

また圧電素子２は、一方の主面に設けられた表面電極が、主表面電極および該主表面電極と分離された副表面電極とを含むいわゆる自励振型の圧電素子であってもよい。このような構成とすることで、例えば、複数の圧電ガスポンプを利用する際に、それぞれの圧電ガスポンプごとに最適駆動周波数を調整できるため、圧電ガスポンプの流体流量の個体差を抑制できる。加えて、例えば−２０℃〜＋８０℃といった環境温度変化に伴う流体流量の変化も抑制できる。なお、ダイヤフラム１１に４２アロイを用いると、圧電素子２との熱膨張差を低減できるため、環境温度変化に伴う流体流量の変化の抑制に特に有効である。 Further, the piezoelectric element 2 may be a so-called self-excited piezoelectric element in which the surface electrode provided on one main surface includes the main surface electrode and the sub-surface electrode separated from the main surface electrode. With such a configuration, for example, when a plurality of piezoelectric gas pumps are used, the optimum drive frequency can be adjusted for each piezoelectric gas pump, so that individual differences in the fluid flow rate of the piezoelectric gas pump can be suppressed. In addition, changes in fluid flow rate due to changes in environmental temperature, such as −20 ° C. to + 80 ° C., can be suppressed. When 42 alloys are used for the diaphragm 11, the difference in thermal expansion from the piezoelectric element 2 can be reduced, which is particularly effective in suppressing changes in the fluid flow rate due to changes in the environmental temperature.

また、圧電ガスポンプは、第１開口部１１１に近接する位置に吐出口３１１を有し、少なくともダイヤフラム１１を覆うとともにダイヤフラム１１との間に流体通路４を有するように設けられた外壁３を備える。 Further, the piezoelectric gas pump has a discharge port 311 at a position close to the first opening 111, and includes an outer wall 3 provided so as to cover at least the diaphragm 11 and have a fluid passage 4 between the piezoelectric gas pump and the diaphragm 11.

外壁３は、少なくともダイヤフラム１１を覆うように設けられる。図に示す例では、第１筐体１の外側からダイヤフラム１１と対向する天板部３１と、枠体部３２とを備えている。天板部３１および枠体部３２としては、ステンレス（ＳＵＳ）、黄銅、４２アロイなどの金属部材、ポリブチレンテレフタレート（ＰＢＴ）、液晶ポリマーなどの樹脂部材を用いることができる。 The outer wall 3 is provided so as to cover at least the diaphragm 11. In the example shown in the figure, a top plate portion 31 facing the diaphragm 11 from the outside of the first housing 1 and a frame body portion 32 are provided. As the top plate portion 31 and the frame body portion 32, a metal member such as stainless steel (SUS), brass, 42 alloy, or a resin member such as polybutylene terephthalate (PBT) or a liquid crystal polymer can be used.

外壁３を構成する天板部３１は、第１開口部１１１に近接する位置に吐出口３１１を有している。ここで、吐出口３１１とは、気体（ガス）を流出させる開口部のことを意味している。吐出口３１１は、例えば第１開口部１１１と同じかこれよりも大きな開口面積を有している。 The top plate portion 31 constituting the outer wall 3 has a discharge port 311 at a position close to the first opening 111. Here, the discharge port 311 means an opening through which a gas (gas) flows out. The discharge port 311 has, for example, an opening area equal to or larger than that of the first opening 111.

枠体部３２は、天板部３１の外周部と接合されて天板部３１を支持している。図２に示す例では、枠体部３２の内面が段差形状になっているが、断面で見て厚みが高さ方向に沿って一定となっている形状でもよく内面に凹部を有する形状であってもよい。 The frame body portion 32 is joined to the outer peripheral portion of the top plate portion 31 to support the top plate portion 31. In the example shown in FIG. 2, the inner surface of the frame body portion 32 has a stepped shape, but the thickness may be constant along the height direction when viewed in cross section, and the inner surface may have a recess. You may.

また、図１に示す例では、枠体部３２の一部に配線部材５を挿通する挿通口３２１が設けられ、この挿通口３２１から外部に配線部材５を取り出しているが、この取り出し方についても特に限定はない。 Further, in the example shown in FIG. 1, an insertion port 321 through which the wiring member 5 is inserted is provided in a part of the frame body portion 32, and the wiring member 5 is taken out from the insertion port 321 to the outside. There is no particular limitation.

外壁３（天板部３１）は、少なくともダイヤフラム１１との間に流体通路４を有するように設けられている。ここで、流体通路４とは、気体（ガス）が流れる通路のことを意味している。この流体通路４は、外壁３（天板部３１）と第１筐体１（ダイヤフラム１１）との間に所望の間隔を有するように外壁３を固定することによって形成される。例えば、外壁３の枠体部３２の内寸を、第１筐体１の枠体１３の外寸よりも大きく設定したうえで、第１筐体１の枠体１３の複数個所を高さ方向に突出させて天板部３１と接合したり、第１筐体１の枠体１３の複数個所を径方向（高さ方向に垂直な方向）に突出させて枠体部３２と接合したりすることによって、流体通路４を形成できる。 The outer wall 3 (top plate portion 31) is provided so as to have a fluid passage 4 at least between the outer wall 3 and the diaphragm 11. Here, the fluid passage 4 means a passage through which a gas (gas) flows. The fluid passage 4 is formed by fixing the outer wall 3 so as to have a desired distance between the outer wall 3 (top plate portion 31) and the first housing 1 (diaphragm 11). For example, after setting the inner dimension of the frame body portion 32 of the outer wall 3 to be larger than the outer dimension of the frame body 13 of the first housing 1, a plurality of locations of the frame body 13 of the first housing 1 are set in the height direction. It is projected to be joined to the top plate portion 31, or a plurality of positions of the frame body 13 of the first housing 1 are projected in the radial direction (direction perpendicular to the height direction) and joined to the frame body portion 32. Thereby, the fluid passage 4 can be formed.

図１および図２に示す例では、外壁３は天板部３１および枠体部３２を備え、第１筐体１の枠体１３と外壁３の枠体部３２との間にも流体通路４を有している構成を示しているが、この構成に限定されず、枠体部３２を備えていない構成でもよい。 In the examples shown in FIGS. 1 and 2, the outer wall 3 includes a top plate portion 31 and a frame body portion 32, and a fluid passage 4 is also provided between the frame body 13 of the first housing 1 and the frame body portion 32 of the outer wall 3. However, the configuration is not limited to this configuration, and a configuration that does not include the frame body portion 32 may be used.

また、図１および図２に示す例では、第１筐体１の枠体１３と外壁３の枠体部３２との間の開放された端部（下端部）が気体の流入口となっているが、その他の形態もとり得る。例えば、外壁３が第１筐体１の全体を取り囲むように、さらに底板部を備える構成であってもよく、この場合は、枠体部３２または底板部に気体の流入口が設けられる。 Further, in the examples shown in FIGS. 1 and 2, the open end (lower end) between the frame 13 of the first housing 1 and the frame 32 of the outer wall 3 serves as a gas inflow port. However, other forms are possible. For example, the outer wall 3 may be further provided with a bottom plate portion so as to surround the entire first housing 1. In this case, a gas inflow port is provided in the frame body portion 32 or the bottom plate portion.

そして、ダイヤフラム１１の振動に伴って薄板部１２が振動する。このように振動させるためには、薄板部１２がダイヤフラム１１よりも変形しやすく、振動しやすい構成とすればよい。例えば、薄板部１２の弾性率をダイヤフラム１１の弾性率よりも小さくしてもよく、薄板部１２の厚みをダイヤフラム１１の厚みよりも薄くしてもよい。 Then, the thin plate portion 12 vibrates with the vibration of the diaphragm 11. In order to vibrate in this way, the thin plate portion 12 may be more easily deformed than the diaphragm 11 and may be easily vibrated. For example, the elastic modulus of the thin plate portion 12 may be smaller than the elastic modulus of the diaphragm 11, and the thickness of the thin plate portion 12 may be smaller than the thickness of the diaphragm 11.

薄板部１２の厚みをダイヤフラム１１の厚みよりも薄くする場合、例えば、ダイヤフラム１１の厚みに対する薄板部１２の厚みを３０〜８０％と設定することができる。具体的には、ダイヤフラム１１の厚みを１００μｍとしたときに、薄板部１２の厚みを５０μｍ程度にすることができる。 When the thickness of the thin plate portion 12 is made thinner than the thickness of the diaphragm 11, for example, the thickness of the thin plate portion 12 can be set to 30 to 80% with respect to the thickness of the diaphragm 11. Specifically, when the thickness of the diaphragm 11 is 100 μm, the thickness of the thin plate portion 12 can be about 50 μm.

このような構成によれば、圧電素子２の変位に伴うダイヤフラム１１の変位に加え、圧電素子２（貫通孔２１）の内側領域に位置するダイヤフラム１１の一部の重畳変位を誘発でき、更にダイヤフラム１１と対向する薄板部１２の振動を重畳させることができる。したがって、小型でかつ流体流量の増大化が可能な圧電ガスポンプを得ることができる。 According to such a configuration, in addition to the displacement of the diaphragm 11 due to the displacement of the piezoelectric element 2, a superposed displacement of a part of the diaphragm 11 located in the inner region of the piezoelectric element 2 (through hole 21) can be induced, and further, the diaphragm can be induced. The vibration of the thin plate portion 12 facing the 11 can be superimposed. Therefore, it is possible to obtain a piezoelectric gas pump that is small in size and capable of increasing the fluid flow rate.

ここで、図４および図５に示すように、ダイヤフラム１１は、当該ダイヤフラム１１に垂直な方向から見たときに貫通孔２１の内側に位置する領域の少なくとも一部が、薄板部１２の側または外壁３（天板部３１）の側に向けて突出していてもよい。なお、図４は、ダイヤフラム１１に垂直な方向から見たときに貫通孔２１の内側に位置するダイヤフラム１１の一部が、外壁３（天板部３１）の側に向けてドーム状に突出している構成を示している。また、図５は、ダイヤフラム１１に垂直な方向から見たときに貫通孔２１の内側に位置するダイヤフラム１１の一部が、薄板部１２の側に向けてドーム状に突出している構成を示している。 Here, as shown in FIGS. 4 and 5, at least a part of the region located inside the through hole 21 when viewed from the direction perpendicular to the diaphragm 11 is on the side of the thin plate portion 12 or at least a part of the region. It may protrude toward the outer wall 3 (top plate portion 31) side. In FIG. 4, a part of the diaphragm 11 located inside the through hole 21 when viewed from a direction perpendicular to the diaphragm 11 projects in a dome shape toward the outer wall 3 (top plate portion 31). Shows the configuration. Further, FIG. 5 shows a configuration in which a part of the diaphragm 11 located inside the through hole 21 when viewed from a direction perpendicular to the diaphragm 11 projects in a dome shape toward the thin plate portion 12. There is.

このような構成とすることで、ダイヤフラム１１の突出部が形状効果により変形し易くなるため、圧電素子２の貫通孔２１の内側に位置するダイヤフラム１１の重畳変位を更に増大させることができ、流体流量の更なる増化が可能となる。 With such a configuration, the protruding portion of the diaphragm 11 is easily deformed due to the shape effect, so that the superimposed displacement of the diaphragm 11 located inside the through hole 21 of the piezoelectric element 2 can be further increased, and the fluid can be fluidized. The flow rate can be further increased.

また、図６〜図１０に示すように、ダイヤフラム１１は、当該ダイヤフラム１１に垂直な方向から見たときに貫通孔２１の内側に位置する領域の少なくとも一部の厚みが、圧電素子２と重なる領域の厚みと異なっていてもよい。なお、図６は、ダイヤフラム１１に垂直な方向から見たときに貫通孔２１の内側に位置するダイヤフラム１１の一部が、薄板部１２の側の面に設けられた凹みにより薄くなっている構成を示している。図７は、ダイヤフラム１１に垂直な方向から見たときに貫通孔２１の内側に位置するダイヤフラム１１の一部が、薄板部１２の側の面に設けられた凸部により厚くなっている構成を示している。図８は、ダイヤフラム１１に垂直な方向から見たときに貫通孔２１の内側に位置するダイヤフラム１１の一部が、薄板部１２の側の面および外壁３（天板部３１）の側の面の両方に設けられた凹部により薄くなっている構成を示している。図９は、ダイヤフラム１１に垂直な方向から見たときに貫通孔２１の内側に位置するダイヤフラム１１の一部が、薄板部１２の側の面に設けられた凹みにより薄くなっているものであるが、図６に示すような凹みとそれ以外の部位との境界が段差状になっているのではなく、傾斜状になっている構成を示している。図１０は、ダイヤフラム１１に垂直な方向から見たときに貫通孔２１の内側に位置するダイヤフラム１１の一部が、外壁３（天板部３１）の側の面の両方に設けられた環状の溝により薄くなっている構成を示している。 Further, as shown in FIGS. 6 to 10, in the diaphragm 11, at least a part of the thickness of the region located inside the through hole 21 when viewed from the direction perpendicular to the diaphragm 11 overlaps with the piezoelectric element 2. It may be different from the thickness of the region. Note that FIG. 6 shows a configuration in which a part of the diaphragm 11 located inside the through hole 21 when viewed from a direction perpendicular to the diaphragm 11 is thinned by a recess provided on the surface on the side of the thin plate portion 12. Is shown. FIG. 7 shows a configuration in which a part of the diaphragm 11 located inside the through hole 21 when viewed from a direction perpendicular to the diaphragm 11 is thickened by a convex portion provided on the surface on the side surface of the thin plate portion 12. Shown. In FIG. 8, a part of the diaphragm 11 located inside the through hole 21 when viewed from a direction perpendicular to the diaphragm 11 is a surface on the side of the thin plate portion 12 and a surface on the side of the outer wall 3 (top plate portion 31). The configuration is shown to be thinner due to the recesses provided in both. In FIG. 9, a part of the diaphragm 11 located inside the through hole 21 when viewed from a direction perpendicular to the diaphragm 11 is thinned by a dent provided on the surface on the side of the thin plate portion 12. However, the boundary between the dent and the other portion as shown in FIG. 6 is not a stepped shape but an inclined shape. In FIG. 10, a part of the diaphragm 11 located inside the through hole 21 when viewed from a direction perpendicular to the diaphragm 11 is an annular shape provided on both sides of the outer wall 3 (top plate portion 31). The configuration is shown to be thinner due to the groove.

このような構成とすることで、厚みの減少による剛性の低下により、圧電素子２の貫通孔２１の内側に位置するダイヤフラム１１の振幅を増大させたり、厚みの増加による質量負荷効果（運動エネルギーの増加）により圧電素子２の貫通孔２１の内側に位置するダイヤフラム１１の重畳変位を更に増大させたりすることができ、流体流量の更なる増化が可能となる。 With such a configuration, the amplitude of the diaphragm 11 located inside the through hole 21 of the piezoelectric element 2 is increased due to the decrease in rigidity due to the decrease in thickness, and the mass loading effect (kinetic energy) due to the increase in thickness is achieved. By (increase), the superimposed displacement of the diaphragm 11 located inside the through hole 21 of the piezoelectric element 2 can be further increased, and the fluid flow rate can be further increased.

次に、圧電ガスポンプの製造方法の一例について説明する。 Next, an example of a method for manufacturing a piezoelectric gas pump will be described.

まず、圧電素子２の圧電体を形成するためのチタン酸ジルコン酸鉛などの原料をボールミルなどで調合し、得られた混合原料を７００℃〜１２００℃で仮焼合成する。この仮焼合成原料をボールミルなどで粉砕し、成形用バインダーを添加後スプレードライヤーで顆粒を作製する。 First, a raw material such as lead zirconate titanate for forming the piezoelectric body of the piezoelectric element 2 is prepared by a ball mill or the like, and the obtained mixed raw material is calcined and synthesized at 700 ° C. to 1200 ° C. This calcined synthetic raw material is crushed with a ball mill or the like, a binder for molding is added, and then granules are prepared with a spray dryer.

得られた顆粒を用い、中心付近に軸ピンを有する成形金型でプレス成形することで貫通孔を有する成形体を作製する。この成形体を脱脂、焼成して得られた圧電体をラッピング等で所望の形状に加工し、表面電極ペーストを印刷後に５００℃〜８００℃で焼付けして表面電極を形成する。その後、３ｋＶ／ｍｍ程度の電圧を印加して、所望の圧電特性を有する圧電素子２を得る。 Using the obtained granules, a molded body having a through hole is produced by press molding with a molding die having a shaft pin near the center. The piezoelectric body obtained by degreasing and firing this molded product is processed into a desired shape by wrapping or the like, and the surface electrode paste is printed and then baked at 500 ° C. to 800 ° C. to form a surface electrode. Then, a voltage of about 3 kV / mm is applied to obtain a piezoelectric element 2 having a desired piezoelectric characteristic.

次に、打抜き加工などで所望の形状に加工した４２アロイを有するダイヤフラム１１に、例えば熱硬化型のエポキシ系接着剤を印刷し、圧電素子２を当接させながら８０℃〜２００℃で加熱することで、圧電素子２を有するダイヤフラム１１を得る。 Next, for example, a thermosetting epoxy adhesive is printed on the diaphragm 11 having a 42 alloy processed into a desired shape by punching or the like, and the piezoelectric element 2 is heated at 80 ° C. to 200 ° C. while being brought into contact with the diaphragm 11. As a result, the diaphragm 11 having the piezoelectric element 2 is obtained.

また同様に、打抜き加工などで所望の形状に加工したＳＵＳを有する薄板部１２と、射出成形などで成形された内面に凸部１３１（段差形状）を有する枠体１３を準備し、枠体１３の一方端部および他方端部にそれぞれ設けた段差部に、例えばエポキシ系接着剤を塗布し、一方端部の段差部へダイヤフラム１１を組み込むとともに、他方端部の段差部へ薄板部１２を組み込み、加熱、硬化させることで第１筐体１を得る。 Similarly, a thin plate portion 12 having a SUS processed into a desired shape by punching or the like and a frame body 13 having a convex portion 131 (step shape) on the inner surface formed by injection molding or the like are prepared, and the frame body 13 is prepared. For example, an epoxy adhesive is applied to the stepped portions provided at one end and the other end, the diaphragm 11 is incorporated into the stepped portion at one end, and the thin plate portion 12 is incorporated into the stepped portion at the other end. The first housing 1 is obtained by heating and curing.

次に、外部からの電気信号を圧電素子２に入力するため配線部材５、例えば側面を樹脂で被覆されたリード線を準備する。そして、半田等の接合部材を用いて圧電素子２の表面電極とダイヤフラム１１とに配線部材５を電気的および機械的に接合する。 Next, in order to input an electric signal from the outside to the piezoelectric element 2, a wiring member 5, for example, a lead wire whose side surface is coated with resin is prepared. Then, the wiring member 5 is electrically and mechanically bonded to the surface electrode of the piezoelectric element 2 and the diaphragm 11 by using a bonding member such as solder.

次に、第１筐体１を構成する枠体１３の高さ方向上端に設けた突出部または外面に設けた突出部にエポキシ系接着剤を塗布し、外壁３を構成する枠体部３２の内面に接合後、加熱、硬化させる。 Next, an epoxy adhesive is applied to the protruding portion provided at the upper end of the frame body 13 constituting the first housing 1 in the height direction or the protruding portion provided on the outer surface of the frame body portion 32 forming the outer wall 3. After joining to the inner surface, it is heated and cured.

なお、流体が移動可能な流体通路４は、枠体１３の高さ方向上端に設けた突出部の高さおよび天板部３１に設ける受け部との位置などを適切に設定することで構成できる。 The fluid passage 4 through which the fluid can move can be configured by appropriately setting the height of the protruding portion provided at the upper end of the frame body 13 in the height direction and the position with the receiving portion provided on the top plate portion 31. ..

次に、枠体部３２の一方端部に設けた段差部へ例えばエポキシ系接着剤を塗布し、第１筐体１を接合した天板部３１を組み込み、加熱、硬化させることで本開示の圧電ガスポンプが得られる。 Next, for example, an epoxy adhesive is applied to the stepped portion provided at one end of the frame body portion 32, and the top plate portion 31 to which the first housing 1 is joined is incorporated, heated, and cured to obtain the present disclosure. A piezoelectric gas pump can be obtained.

１ 第１筐体
１１ ダイヤフラム
１１１ 第１開口部
１２ 薄板部
１３ 枠体
１３１ 凸部
２ 圧電素子
２１ 貫通孔
３ 外壁
３１ 天板部
３１１ 吐出孔
３２ 枠体部1 1st housing 11 Diaphragm 111 1st opening 12 Thin plate 13 Frame 131 Convex 2 Piezoelectric element 21 Through hole 3 Outer wall 31 Top plate 311 Discharge hole 32 Frame

Claims (5)

第１開口部を有するダイヤフラムと、該ダイヤフラムと対向して位置する薄板部と、前記ダイヤフラムと前記薄板部とを接続する枠体とを含み、ポンプ室である内部空間を有する第１筐体と、
前記第１開口部よりも大きな開口の貫通孔を有し、前記ダイヤフラムに垂直な方向から見たときに前記第１開口部が前記貫通孔の内側に位置するように前記ダイヤフラムに取り付けられた圧電素子と、
前記第１開口部に近接する位置に吐出口を有し、少なくとも前記ダイヤフラムを覆い、前記ダイヤフラムとの間に流体通路を有する外壁と、を備えており、
前記ダイヤフラムは、当該ダイヤフラムに垂直な方向から見たときに前記貫通孔の内側に位置する領域の少なくとも一部の厚みが、前記圧電素子と重なる領域の厚みと異なっている圧電ガスポンプ。 A first housing having an internal space that is a pump chamber, including a diaphragm having a first opening, a thin plate portion located facing the diaphragm, and a frame body connecting the diaphragm and the thin plate portion. ,
A piezoelectric material having a through hole with an opening larger than the first opening and attached to the diaphragm so that the first opening is located inside the through hole when viewed from a direction perpendicular to the diaphragm. With the element
It has a discharge port at a position close to the first opening, covers at least the diaphragm, and has an outer wall having a fluid passage between the diaphragm and the diaphragm .
The diaphragm, the piezoelectric gas pump at least part of the thickness of the region located inside the through hole when viewed in a direction perpendicular to the diaphragm, that is different from the thickness of the region overlapping with the piezoelectric element. 前記薄板部の厚みが前記ダイヤフラムの厚みよりも薄い請求項１に記載の圧電ガスポンプ。 The piezoelectric gas pump according to claim 1, wherein the thickness of the thin plate portion is smaller than the thickness of the diaphragm. 前記ダイヤフラムは、当該ダイヤフラムに垂直な方向から見たときに前記貫通孔の内側に位置する領域の少なくとも一部の厚みが、前記圧電素子と重なる領域の厚みと異なっている請求項１または請求項２に記載の圧電ガスポンプ。 Claim 1 or claim that the thickness of at least a part of the region located inside the through hole when viewed from a direction perpendicular to the diaphragm is different from the thickness of the region overlapping the piezoelectric element. 2. The piezoelectric gas pump according to 2. 前記圧電素子は、圧電体と、該圧電体の対向する一対の主面にそれぞれ設けられた表面電極とを備え、
一方の主面に設けられた前記表面電極が、主表面電極および該主表面電極と分離された副表面電極とを含む自励振型の圧電素子である請求項１乃至請求項３のうちのいずれかに記載の圧電ガスポンプ。 The piezoelectric element includes a piezoelectric body and surface electrodes provided on a pair of main surfaces of the piezoelectric body facing each other.
Any of claims 1 to 3 , wherein the surface electrode provided on one main surface is a self-excited piezoelectric element including a main surface electrode and a sub-surface electrode separated from the main surface electrode. Piezoelectric gas pump described in. 前記第１開口部が、複数の孔を有する請求項１乃至請求項４のうちのいずれかに記載の圧電ガスポンプ。 The piezoelectric gas pump according to any one of claims 1 to 4 , wherein the first opening has a plurality of holes.
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