JP6950120B1 - Separation device and separation method - Google Patents

Separation device and separation method Download PDF

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JP6950120B1
JP6950120B1 JP2021546795A JP2021546795A JP6950120B1 JP 6950120 B1 JP6950120 B1 JP 6950120B1 JP 2021546795 A JP2021546795 A JP 2021546795A JP 2021546795 A JP2021546795 A JP 2021546795A JP 6950120 B1 JP6950120 B1 JP 6950120B1
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plate
shaped member
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JPWO2022070390A1 (en
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道也 横田
道也 横田
亮一 稲葉
亮一 稲葉
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Shin Etsu Engineering Co Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/799—Apparatus for disconnecting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/02—Containers; Seals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/7999—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto for disconnecting

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Abstract

第一板状部材と第二板状部材の凹凸接合部を形状変形させずに剥離する。互いに凹凸状に接合した第一板状部材と第二板状部材の凹凸接合部を剥がす分離装置であって、チャンバーの内部に形成した加圧室に収容された第一板状部材又は第二板状部材のいずれか一方において凹凸接合部の裏側と、チャンバーの第一室内面との間に設けられる離間吸収部は、チャンバーの第一室内面に対して、第一板状部材又は第二板状部材のいずれか一方の裏側とその厚み方向へ変形又は移動自在に当接する変位部位を有し、加圧室に収容された第一板状部材又は第二板状部材の他方において凹凸接合部の裏側と、チャンバーの第二室内面との間に設けられる保持部は、チャンバーの第二室内面に対して、第一板状部材又は第二板状部材の他方の裏側と厚み方向へ移動不能に当接する固定部位を有し、制御部は、加圧室に陽圧流体を供給する正圧調整部の作動による加圧室の内圧上昇で、チャンバーの第一室内面及び離間吸収部の間に設けられる気密状の第一減圧空間部との間に圧力差が生じて、離間吸収部の変位部位とともに第一板状部材又は第二板状部材のいずれか一方が、第一減圧空間部に向け移動する。The concave-convex joint between the first plate-shaped member and the second plate-shaped member is peeled off without deforming the shape. A separation device that peels off the uneven joints of the first plate-shaped member and the second plate-shaped member that are joined to each other in an uneven shape, and is the first plate-shaped member or the second plate-shaped member housed in the pressurizing chamber formed inside the chamber. The separated absorption portion provided between the back side of the concave-convex joint portion and the first chamber surface of the chamber in any one of the plate-shaped members is a first plate-shaped member or a second plate-shaped member with respect to the first chamber surface of the chamber. Concavo-convex joint on the back side of either one of the plate-shaped members and the other of the first plate-shaped member or the second plate-shaped member housed in the pressurizing chamber, which has a displacement portion that is deformably or movably abutted in the thickness direction thereof. The holding portion provided between the back side of the portion and the second chamber surface of the chamber is in the thickness direction with respect to the second chamber surface of the chamber and the other back side of the first plate-shaped member or the second plate-shaped member. It has a fixed part that comes into contact with immobility, and the control unit is the first chamber surface of the chamber and the separated absorption unit due to the increase in the internal pressure of the pressurizing chamber due to the operation of the positive pressure adjusting unit that supplies positive pressure fluid to the pressurizing chamber. A pressure difference is generated between the first decompression space and the airtight first decompression space provided between the two, and either the first plate-shaped member or the second plate-shaped member is decompressed together with the displacement portion of the separated absorption portion. Move toward the space.

Description

本発明は、ナノインプリントを含むインプリント技術で成形加工される成形型と成形基板の剥離や、並列配置された複数のマイクロＬＥＤなどの微小素子と粘着チャックとの剥離などに用いられる分離装置、及び、分離装置を用いた分離方法に関する。 The present invention provides a separation device used for peeling a molding die and a molded substrate that are molded by an imprint technique including nanoimprint, and for peeling a small element such as a plurality of micro LEDs arranged in parallel from an adhesive chuck. , The present invention relates to a separation method using a separation device.

従来、この種の分離装置として、少なくともいずれか一方がフィルム状である型と被成形物とが所定の剥離位置まで剥離しないように加圧する剥離防止手段と、型又は被成形物のいずれか一方を保持する保持部と、型又は被成形物に張力を付与する張力付与手段と、剥離防止手段と型及び被成形物とを相対的に移動させる移動手段と、を具備した離型装置がある（例えば、特許文献１参照）。
ナノインプリント技術により、型の成形パターンを樹脂等の被成形物に加圧し、熱や光の利用により成形パターンを被成形物に転写した後、被成形物から型を離型している。
特許文献１の図示例では、保持部に保持された被成形物に対して、可撓性のあるフィルム状に形成された型を剥離位置から剥離しており、剥離後の型と被成形物との間の角度を一定に調節する角度調節手段が具備されている。つまり、角度調節手段により、被成形物から型の成形パターンを一定の離型角度で斜めに引き抜くようになっている。Conventionally, as this type of separation device, one of a peeling prevention means for pressurizing the mold having at least one of them in the form of a film and the object to be molded so as not to be peeled to a predetermined peeling position, and one of the mold or the object to be molded. There is a mold release device including a holding portion for holding the mold, a tension applying means for applying tension to the mold or the object to be molded, and a peeling prevention means and a moving means for relatively moving the mold and the object to be molded. (See, for example, Patent Document 1).
By nanoimprint technology, the molding pattern of the mold is pressed against the object to be molded such as resin, the molding pattern is transferred to the object to be molded by using heat or light, and then the mold is released from the object to be molded.
In the illustrated example of Patent Document 1, a mold formed in a flexible film shape is peeled from the peeling position with respect to the object to be molded held in the holding portion, and the mold after peeling and the object to be molded are peeled. An angle adjusting means for adjusting the angle between the and the object is provided. That is, the angle adjusting means is used to diagonally pull out the molding pattern of the mold from the object to be molded at a constant mold release angle.

国際公開第２０１５／０７２５７２号International Publication No. 2015/072572

しかし乍ら、特許文献１では、被成形物に転写された凹凸パターンに対して、型の成形パターンを所定の角度で斜め方向に引き抜くため、剥離過程で被成形物の凹凸パターンが形状変形してダメージを生じてしまう。
詳しくは、図７（ａ）〜（ｃ）に示されるナノインプリントを含むインプリントの場合について説明する。
図７（ａ）に示される剥離前の状態では、型１００の成形パターン１１０との凹凸接合により、被成形物２００に転写された凹凸パターン２１０が、被成形物２００の底面２２０に対して垂直状に立っている。
しかし、図７（ｂ）に示される剥離時の状態では、型１００の成形パターン１１０を斜め方向に引き抜くことに伴って、被成形物２００の凹凸パターン２１０のうち凸状部２１１が倒れてしまう。
このため、図７（ｃ）に示される剥離後の状態でも、一度倒れた凹凸パターン２１０の凸状部２１１は倒れたままで、剥離前の状態に戻ることはない。
このように被成形物２００の凹凸パターン２１０から型１００の成形パターン１１０を引き抜く方向（剥離方向）が斜めである場合には、特に凹凸パターン２１０の凹凸差が長くなる程、形状変形（倒れ）し易くなって、高精度なインプリント成形を達成できないという問題があった。
特にナノインプリントの場合には、凹凸パターンが極めて微細であるため、剥離時の僅かな形状変形（倒れ）でも、凹凸パターンの破損要因となって高精度な凹凸パターンを作製できないという問題があった。However, in Patent Document 1, since the molding pattern of the mold is pulled out diagonally at a predetermined angle with respect to the uneven pattern transferred to the object to be molded, the uneven pattern of the object to be molded is deformed in the peeling process. Will cause damage.
More specifically, the case of the imprint including the nanoimprint shown in FIGS. 7 (a) to 7 (c) will be described.
In the state before peeling shown in FIG. 7A, the uneven pattern 210 transferred to the object to be molded 200 by the concave-convex bonding with the molding pattern 110 of the mold 100 is perpendicular to the bottom surface 220 of the object 200 to be molded. Standing in the shape.
However, in the state at the time of peeling shown in FIG. 7B, the convex portion 211 of the concave-convex pattern 210 of the object to be molded 200 collapses as the molding pattern 110 of the mold 100 is pulled out in the oblique direction. ..
Therefore, even in the state after peeling shown in FIG. 7C, the convex portion 211 of the concave-convex pattern 210 that has once collapsed remains collapsed and does not return to the state before peeling.
When the direction (peeling direction) of pulling out the molding pattern 110 of the mold 100 from the uneven pattern 210 of the object to be molded 200 is oblique in this way, the shape is deformed (tilted) as the unevenness difference of the concave-convex pattern 210 becomes longer. There is a problem that it becomes easy to perform and high-precision imprint molding cannot be achieved.
In particular, in the case of nanoimprint, since the uneven pattern is extremely fine, there is a problem that even a slight shape deformation (tilt) at the time of peeling causes damage to the uneven pattern and makes it impossible to produce a highly accurate uneven pattern.

このような課題を解決するために本発明に係る分離装置は、互いに凹凸状に接合した第一板状部材と第二板状部材の凹凸接合部を剥がす分離装置であって、チャンバーの内部に形成されて、凹凸接合した前記第一板状部材及び前記第二板状部材が出し入れ自在に収容される加圧室と、前記加圧室に収容された前記第一板状部材又は前記第二板状部材のいずれか一方において前記凹凸接合部の裏側と、前記チャンバーの第一室内面との間に設けられる離間吸収部と、前記加圧室に収容された前記第一板状部材又は前記第二板状部材の他方において前記凹凸接合部の裏側と、前記チャンバーの第二室内面との間に設けられる保持部と、前記チャンバーの前記第一室内面及び前記離間吸収部の間に前記加圧室と分離して気密状に設けられる第一減圧空間部と、前記加圧室に陽圧流体を供給して内圧上昇させる正圧調整部と、前記正圧調整部を作動制御する制御部と、を備え、前記離間吸収部は、前記チャンバーの前記第一室内面に対して、前記第一板状部材又は前記第二板状部材のいずれか一方の前記裏側とその厚み方向へ変形又は移動自在に当接する変位部位を有し、前記保持部は、前記チャンバーの前記第二室内面に対して、前記第一板状部材又は前記第二板状部材の他方の前記裏側と前記厚み方向へ移動不能に当接する固定部位を有し、前記制御部は、前記正圧調整部の作動による前記加圧室の内圧上昇で前記第一減圧空間部との間に圧力差が生じて、前記離間吸収部の前記変位部位とともに前記第一板状部材又は前記第二板状部材のいずれか一方が、前記第一減圧空間部に向け移動するように制御することを特徴とする。
また、このような課題を解決するために本発明に係る分離方法は、互いに凹凸状に接合した第一板状部材と第二板状部材の凹凸接合部を剥がす分離方法であって、チャンバーの内部に形成された加圧室に、凹凸接合した前記第一板状部材及び前記第二板状部材を入れる搬入工程と、前記加圧室に前記第一板状部材及び前記第二板状部材を位置決めする保持工程と、前記第一板状部材及び前記第二板状部材が保持された前記加圧室に陽圧流体を供給して内圧上昇させる加圧工程と、内圧上昇した前記加圧室で前記第一板状部材と前記第二板状部材の前記凹凸接合部を剥がす剥離工程と、前記凹凸接合部が剥がされた前記第一板状部材と前記第二板状部材を前記加圧室から取り出す搬出工程と、を含み、前記保持工程では、前記第一板状部材又は前記第二板状部材のいずれか一方において前記凹凸接合部の裏側と、前記チャンバーの第一室内面との間に設けられた離間吸収部の変位部位に対して、前記第一板状部材又は前記第二板状部材のいずれか一方の前記裏側を、その厚み方向へ当接させるとともに、前記第一板状部材又は前記第二板状部材の他方において前記凹凸接合部の裏側と、前記チャンバーの第二室内面との間に設けられた保持部の固定部位に対して、前記第一板状部材又は前記第二板状部材の他方の前記裏側を前記厚み方向へ当接させ、前記剥離工程では、前記陽圧流体の供給で内圧上昇した前記加圧室と、前記チャンバーの前記第一室内面及び前記離間吸収部の間に前記加圧室と分離して気密状に設けられる第一減圧空間部との間に圧力差を生じさせて、前記離間吸収部の前記変位部位とともに前記第一板状部材又は前記第二板状部材のいずれか一方が、前記第一減圧空間部に向け移動することを特徴とする。In order to solve such a problem, the separating device according to the present invention is a separating device for peeling off the uneven joints of the first plate-shaped member and the second plate-shaped member which are joined to each other in a concave-convex shape, and is inside the chamber. A pressurizing chamber in which the first plate-shaped member and the second plate-shaped member that are formed and joined in an uneven manner can be freely taken in and out, and the first plate-shaped member or the second plate-shaped member housed in the pressurizing chamber. A separated absorption portion provided between the back side of the concave-convex joint portion and the first chamber surface of the chamber in any one of the plate-shaped members, and the first plate-shaped member or the first plate-shaped member housed in the pressurizing chamber. On the other side of the second plate-shaped member, the holding portion provided between the back side of the uneven joint portion and the second chamber surface of the chamber, and the separation absorption portion between the first chamber surface and the separation absorption portion of the chamber. Control to control the operation of the first decompression space that is separated from the pressurizing chamber and airtightly provided, the positive pressure adjusting unit that supplies positive pressure fluid to the pressurizing chamber to increase the internal pressure, and the positive pressure adjusting unit. The separated absorption portion is deformed with respect to the first chamber surface of the chamber in the back side of either the first plate-shaped member or the second plate-shaped member and in the thickness direction thereof. Alternatively, the holding portion has a displacement portion that is movably abutted with respect to the second chamber surface of the chamber, and the back side of the first plate-shaped member or the other back side of the second plate-shaped member and the thickness thereof. The control unit has a fixed portion that is immovably abutted in the direction, and the pressure difference between the control unit and the first decompression space portion is generated due to an increase in the internal pressure of the pressurizing chamber due to the operation of the positive pressure adjusting unit. It is characterized in that either the first plate-shaped member or the second plate-shaped member is controlled to move toward the first decompression space portion together with the displacement portion of the separation absorbing portion.
Further, in order to solve such a problem, the separation method according to the present invention is a separation method for peeling off the concavo-convex joint portion of the first plate-shaped member and the second plate-shaped member which are joined to each other in a concavo-convex manner. A carry-in step of inserting the first plate-shaped member and the second plate-shaped member which are unevenly joined into the pressure chamber formed inside, and the first plate-shaped member and the second plate-shaped member in the pressure chamber. A holding step of positioning the first plate-shaped member and a pressurizing step of supplying a positive pressure fluid to the pressurizing chamber in which the first plate-shaped member and the second plate-shaped member are held to increase the internal pressure, and the pressurizing process in which the internal pressure is increased. The peeling step of peeling off the uneven joint portion between the first plate-shaped member and the second plate-shaped member in the chamber, and the addition of the first plate-shaped member and the second plate-shaped member from which the uneven joint portion has been peeled off. In the holding step, which includes a carry-out step of taking out from the pressure chamber, the back side of the uneven joint portion and the first chamber surface of the chamber in either the first plate-shaped member or the second plate-shaped member. The back side of either the first plate-shaped member or the second plate-shaped member is brought into contact with the displacement portion of the separation absorbing portion provided between the two, in the thickness direction thereof, and the first plate-shaped member is brought into contact with the displacement portion. The first plate-shaped member with respect to the fixing portion of the holding portion provided between the back side of the concave-convex joint portion and the second chamber surface of the chamber on the other side of the plate-shaped member or the second plate-shaped member. Alternatively, the back side of the other side of the second plate-shaped member is brought into contact with the thickness direction, and in the peeling step, the pressurizing chamber whose internal pressure is increased by the supply of the positive pressure fluid and the first chamber surface of the chamber. A pressure difference is generated between the separated absorption portion and the first decompression space portion which is separated from the pressurizing chamber and is provided in an airtight manner. One of the shaped member and the second plate-shaped member moves toward the first decompression space.

本発明の実施形態（第一実施形態）に係る分離装置及び分離方法の全体構成を示す説明図であり、（ａ）が搬入工程の縦断正面図、（ｂ）が図１（ａ）の横断平面図、（ｃ）が一部を部分拡大した縦断正面図である。It is explanatory drawing which shows the whole structure of the separation apparatus and the separation method which concerns on embodiment (first embodiment) of this invention, (a) is a longitudinal front view of a carry-in process, (b) is a cross section of FIG. 1 (a). The plan view, (c) is a vertical sectional front view in which a part is partially enlarged. 同分離方法の剥がし過程を示す説明図であり、（ａ）が保持工程の縦断正面図、（ｂ）が加圧工程の縦断正面図、（ｃ）が剥離工程の縦断正面図である。It is explanatory drawing which shows the peeling process of the separation method, (a) is a vertical sectional front view of a holding process, (b) is a vertical sectional front view of a pressurizing process, and (c) is a vertical sectional front view of a peeling process. 同分離方法の取り出し過程を示す説明図であり、（ａ）が減圧工程の縦断正面図、（ｂ）が一次搬出工程の縦断正面図、（ｃ）が二次搬出工程の縦断正面図である。It is explanatory drawing which shows the taking-out process of the separation method, (a) is a vertical sectional front view of a decompression process, (b) is a vertical sectional front view of a primary carry-out process, and (c) is a vertical sectional front view of a secondary carry-out process. .. 本発明の第二実施形態に係る分離装置及び分離方法を示す説明図であり、（ａ）が搬入工程の縦断正面図、（ｂ）が加圧工程の縦断正面図、（ｃ）が剥離工程の縦断正面図である。It is explanatory drawing which shows the separation apparatus and the separation method which concerns on 2nd Embodiment of this invention, (a) is the vertical sectional front view of a carry-in process, (b) is a vertical sectional front view of a pressurizing process, (c) is a peeling step. It is a vertical sectional front view of. 本発明の第三実施形態に係る分離装置及び分離方法を示す説明図であり、（ａ）が搬入工程の縦断正面図、（ｂ）が加圧工程の縦断正面図、（ｃ）が剥離工程の縦断正面図である。It is explanatory drawing which shows the separation apparatus and the separation method which concerns on 3rd Embodiment of this invention, (a) is the vertical sectional front view of a carry-in process, (b) is a vertical sectional front view of a pressurizing process, (c) is a peeling step. It is a vertical sectional front view of. 本発明の第四実施形態に係る分離装置及び分離方法を示す説明図であり、（ａ）が搬入工程の縦断正面図、（ｂ）が加圧工程の縦断正面図、（ｃ）が剥離工程の縦断正面図である。It is explanatory drawing which shows the separation apparatus and the separation method which concerns on 4th Embodiment of this invention. It is a vertical sectional front view of. 従来の分離方法の一例を示す説明図であり、（ａ）が剥離前の部分拡大縦断正面図、（ｂ）が剥離中の部分拡大縦断正面図、（ｃ）が剥離後の部分拡大縦断正面図である。It is explanatory drawing which shows an example of the conventional separation method. FIG. It is a figure.

以下、本発明の実施形態を図面に基づいて詳細に説明する。
本発明の実施形態に係る分離装置Ａ及び分離方法は、図１〜図６に示すように、ナノインプリントを含むインプリント技術で成形加工される成形型と成形基板の剥離や、並列配置された複数のマイクロＬＥＤなどの微小素子と粘着チャックとの剥離などのような、互いに凹凸状に接合された第一板状部材Ｂと第二板状部材Ｃを剥がして分離する剥離装置や剥離方法である。
第一板状部材Ｂは、ガラスや合成樹脂などの硬質材料で薄板状に形成され、第二板状部材Ｃと対向する表側の凹凸接合部として第一凹凸部Ｂ１を有している。
第二板状部材Ｃは、ガラスや合成樹脂などの硬質材料で薄板状に形成され、第一板状部材Ｂと対向する表側の凹凸接合部として第一凹凸部Ｂ１が凹凸接合する第二凹凸部Ｃ１を有している。
なお、第一板状部材Ｂと第二板状部材Ｃは、通常、上下方向へ接合するように配置され、第一板状部材Ｂ及び第二板状部材Ｃの厚み方向を以下「Ｚ方向」という。Ｚ方向と交差する第一板状部材Ｂ及び第二板状部材Ｃに沿った方向を以下「ＸＹ方向」という。Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
As shown in FIGS. 1 to 6, the separation device A and the separation method according to the embodiment of the present invention include peeling of a molding die and a molding substrate to be molded by an imprint technique including nanoimprint, and a plurality of separated devices arranged in parallel. This is a peeling device or peeling method for peeling and separating the first plate-shaped member B and the second plate-shaped member C which are joined to each other in an uneven shape, such as peeling between a micro element such as a micro LED and an adhesive chuck. ..
The first plate-shaped member B is formed in a thin plate shape with a hard material such as glass or synthetic resin, and has a first uneven portion B1 as a front-side uneven joint portion facing the second plate-shaped member C.
The second plate-shaped member C is formed in a thin plate shape with a hard material such as glass or synthetic resin, and the first uneven portion B1 is unevenly joined as a front-side uneven joint portion facing the first plate-shaped member B. It has a part C1.
The first plate-shaped member B and the second plate-shaped member C are usually arranged so as to be joined in the vertical direction, and the thickness direction of the first plate-shaped member B and the second plate-shaped member C is hereinafter referred to as "Z direction". ". The direction along the first plate-shaped member B and the second plate-shaped member C that intersect the Z direction is hereinafter referred to as the "XY direction".

互いに凹凸接合する第一板状部材Ｂと第二板状部材Ｃが、ナノインプリントを含むインプリントなどに用いられる場合には、第一板状部材Ｂ又は第二板状部材Ｃのいずれか一方が成形型に該当し、第一板状部材Ｂ又は第二板状部材Ｃの他方が成形基板に該当する。
インプリント成形により成形型の凹凸パターンを成形基板に転写した状態では、凹凸接合部（第一凹凸部Ｂ１，第二凹凸部Ｃ１）が互いに凹凸接合して、搬送可能に一体化された積層状態になっている。
また、互いに凹凸接合する第一板状部材Ｂと第二板状部材Ｃが、並列配置された複数のマイクロＬＥＤなどの微小素子を姿勢維持した状態で搬送した後に搬送先に受け渡す搬送装置などに用いられる場合には、第一板状部材Ｂ又は第二板状部材Ｃのいずれか一方が、並列配置された微小素子に該当し、第一板状部材Ｂ又は第二板状部材Ｃの他方が粘着チャックに該当する。微小素子の受け取りのため並列配置された微小素子の表面に粘着チャックを粘着した状態では、凹凸接合部（第一凹凸部Ｂ１，第二凹凸部Ｃ１）が互いに凹凸接合して、搬送可能に一体化された積層状態になっている。When the first plate-shaped member B and the second plate-shaped member C which are unevenly joined to each other are used for imprint including nanoimprint, either the first plate-shaped member B or the second plate-shaped member C is used. It corresponds to a molding die, and the other of the first plate-shaped member B or the second plate-shaped member C corresponds to a molding substrate.
In the state where the uneven pattern of the molding die is transferred to the molding substrate by imprint molding, the uneven joint portions (first uneven portion B1, second uneven portion C1) are unevenly joined to each other and integrated so as to be transportable. It has become.
Further, a transport device or the like in which the first plate-shaped member B and the second plate-shaped member C, which are concavo-convexly joined to each other, transport a plurality of micro elements such as micro LEDs arranged in parallel while maintaining their postures, and then deliver the micro elements to the transport destination. When used in, either one of the first plate-shaped member B or the second plate-shaped member C corresponds to a micro element arranged in parallel, and the first plate-shaped member B or the second plate-shaped member C The other corresponds to the adhesive chuck. In a state where the adhesive chuck is adhered to the surface of the microelements arranged in parallel for receiving the microelements, the concavo-convex joints (first concavo-convex portion B1, second concavo-convex portion C1) are concavo-convex-bonded to each other and integrated so as to be transportable. It is in a laminated state.

第一板状部材Ｂ及び第二板状部材Ｃの具体例として図１〜図６に示される場合には、第一板状部材Ｂがナノインプリントを含むインプリントの成形型であり、第二板状部材Ｃが成形基板である。
さらに、第一板状部材Ｂにおいて表側の凹凸接合部となる第一凹凸部Ｂ１の裏側（反対側）である第一背面Ｂ２には、硬質材料からなる第一保持板Ｂ３が着脱可能に取り付けられている。第一保持板Ｂ３の表面には、第一板状部材Ｂが突出するように配置される。
これと同様に、第二板状部材Ｃにおいて表側の凹凸接合部となる第二凹凸部Ｃ１の裏側（反対側）である第二背面Ｃ２には、硬質材料からなる第二保持板Ｃ３が着脱可能に取り付けられている。第二保持板Ｃ３の表面には、第二板状部材Ｃが突出するように配置される。
第一保持板Ｂ３及び第二保持板Ｃ３は、矩形（長方形及び正方形を含む角が直角の四辺形）のパネル形状や円形のウエハ形状に形成され、凹凸接合した第一板状部材Ｂ及び第二板状部材Ｃを挟み込むことで、搬送可能に一体化された積層体Ｄとなる。
積層体Ｄとしては、複数の第一板状部材Ｂ及び第二板状部材Ｃを並べて配置することで、複数の凹凸接合部（第一凹凸部Ｂ１，第二凹凸部Ｃ１）を同時に剥がすことが好ましい。
積層体Ｄにおいて第一保持板Ｂ３と第二保持板Ｃ３の間は、第一板状部材Ｂ及び第二板状部材Ｃの他に隙間Ｅを有することが好ましい。隙間Ｅの具体例としては、複数の第一板状部材Ｂ及び第二板状部材Ｃの外側に形成される四角枠状や円環状などの外側隙間Ｅ１，複数の第一板状部材Ｂ及び第二板状部材Ｃ同士の間を通る貫通隙間Ｅ２，第一保持板Ｂ３や第二保持板Ｃ３に開穿される通孔Ｄ１と連通する内側隙間Ｅ３などが挙げられる。
図示例で成形基板となる第二板状部材Ｃは、硬質材料からなる基板Ｃ４の表面に、第二凹凸部Ｃ１となる光や熱などでパターン転写される樹脂層Ｃ５を積層している。
また、その他の例として図示しないが、第一保持板Ｂ３や第二保持板Ｃ３を取り付けず、第一板状部材Ｂと第二板状部材Ｃを直接的に剥がすように変更することも可能である。When the first plate-shaped member B and the second plate-shaped member C are shown in FIGS. 1 to 6, the first plate-shaped member B is an imprint molding mold including nanoimprint, and the second plate. The shaped member C is a molded substrate.
Further, a first holding plate B3 made of a hard material is detachably attached to the first back surface B2 which is the back side (opposite side) of the first uneven portion B1 which is the front surface uneven joint portion of the first plate-shaped member B. Has been done. The first plate-shaped member B is arranged so as to project on the surface of the first holding plate B3.
Similarly, in the second plate-shaped member C, a second holding plate C3 made of a hard material is attached and detached to the second back surface C2 which is the back side (opposite side) of the second uneven portion C1 which is the uneven joint portion on the front side. It is installed as possible. The second plate-shaped member C is arranged so as to project on the surface of the second holding plate C3.
The first holding plate B3 and the second holding plate C3 are formed into a rectangular panel shape (a quadrilateral having a right angle including a rectangle and a square) or a circular wafer shape, and the first plate-shaped member B and the first plate-like member B and the second holding plate are joined in an uneven manner. By sandwiching the two-plate-shaped member C, the laminated body D is integrated so as to be transportable.
As the laminated body D, by arranging a plurality of first plate-shaped members B and second plate-shaped members C side by side, a plurality of uneven joint portions (first uneven portion B1, second uneven portion C1) can be peeled off at the same time. Is preferable.
In the laminated body D, it is preferable that a gap E is provided between the first holding plate B3 and the second holding plate C3 in addition to the first plate-shaped member B and the second plate-shaped member C. Specific examples of the gap E include an outer gap E1, a plurality of first plate-shaped members B, such as a square frame or an annulus formed outside the plurality of first plate-shaped members B and the second plate-shaped member C, and a plurality of first plate-shaped members B. Examples thereof include a through gap E2 passing between the second plate-shaped members C, an inner gap E3 communicating with a through hole D1 opened in the first holding plate B3 and the second holding plate C3, and the like.
In the illustrated example, the second plate-shaped member C, which is a molded substrate, has a resin layer C5, which is a second uneven portion C1 and whose pattern is transferred by light or heat, laminated on the surface of a substrate C4 made of a hard material.
Further, although not shown as another example, it is possible to change so that the first plate-shaped member B and the second plate-shaped member C are directly peeled off without attaching the first holding plate B3 or the second holding plate C3. Is.

詳しく説明すると、本発明の実施形態に係る分離装置Ａは、互いに凹凸接合した第一板状部材Ｂ及び第二板状部材Ｃが収容される加圧室１と、加圧室１に収容された第一板状部材Ｂ又は第二板状部材Ｃのいずれか一方の裏側に設けられる離間吸収部２と、加圧室１に収容された第一板状部材Ｂ又は第二板状部材Ｃの他方の裏側に設けられる保持部３と、加圧室１と分離して設けられる第一減圧空間部４と、加圧室１の内圧を上昇させるように設けられる正圧調整部５と、を主要な構成要素として備えている。
さらに、第一減圧空間部４の内圧を下降させる第一負圧調整部６と、加圧室１と分離して設けられる第二減圧空間部７と、第二減圧空間部７の内圧を下降させる第二負圧調整部８と、正圧調整部５，第一負圧調整部６及び第二負圧調整部８などを作動制御する制御部９を備えることが好ましい。More specifically, the separation device A according to the embodiment of the present invention is housed in the pressurizing chamber 1 and the pressurizing chamber 1 in which the first plate-shaped member B and the second plate-shaped member C which are concavo-convex-bonded to each other are housed. The separation absorbing portion 2 provided on the back side of either the first plate-shaped member B or the second plate-shaped member C, and the first plate-shaped member B or the second plate-shaped member C housed in the pressurizing chamber 1. A holding portion 3 provided on the other back side of the above, a first decompression space portion 4 provided separately from the pressurizing chamber 1, a positive pressure adjusting portion 5 provided so as to increase the internal pressure of the pressurizing chamber 1, and the like. Is provided as a main component.
Further, the internal pressure of the first negative pressure adjusting unit 6 for lowering the internal pressure of the first decompression space portion 4, the second decompression space portion 7 provided separately from the pressurizing chamber 1, and the internal pressure of the second decompression space portion 7 are lowered. It is preferable to include a second negative pressure adjusting unit 8 to be operated, and a control unit 9 for operating and controlling the positive pressure adjusting unit 5, the first negative pressure adjusting unit 6, the second negative pressure adjusting unit 8, and the like.

加圧室１は、チャンバー１０の内部に密閉可能に形成され、チャンバー１０内の加圧室１とチャンバー１０の外部空間とに亘って、第一板状部材Ｂ及び第二板状部材Ｃが出し入れ自在に収容される。
チャンバー１０の内部は、搬入された第一板状部材Ｂ及び第二板状部材Ｃと厚み方向（Ｚ方向）へ対向状に配置される第一室内面１０ａと第二室内面１０ｂを有する。
第一室内面１０ａは、第一板状部材Ｂ又は第二板状部材Ｃのいずれか一方において凹凸接合部（第一凹凸部Ｂ１又は第二凹凸部Ｃ１）の裏側と、直接的又は間接的にＺ方向へ対向してＸＹ方向の平面上に形成される。第二室内面１０ｂは、第一板状部材Ｂ又は第二板状部材Ｃの他方において凹凸接合部（第一凹凸部Ｂ１又は第二凹凸部Ｃ１）の裏側、直接的又は間接的にＺ方向へ対向してＸＹ方向の平面上に形成される。
チャンバー１０は、密閉可能な加圧室１に対して第一板状部材Ｂ及び第二板状部材Ｃを出し入れするための出入口１０ｃを有する。チャンバー１０の出入口１０ｃは、開閉自在に構成され、アクチュエータなどからなる駆動機構１０ｄにより開閉される。
加圧室１に対する第一板状部材Ｂ及び第二板状部材Ｃの搬入は、凹凸接合部（第一凹凸部Ｂ１，第二凹凸部Ｃ１）が凹凸状に接合した凹凸接合状態で、例えば搬送ロボットなどの搬送手段（図示しない）を用いて行われる。加圧室１からの第一板状部材Ｂ及び第二板状部材Ｃの搬出は、凹凸接合部（第一凹凸部Ｂ１，第二凹凸部Ｃ１）が剥がれた分離状態で、搬送手段などにより順次又は同時に行われる。The pressurizing chamber 1 is formed so as to be hermetically sealed inside the chamber 10, and the first plate-shaped member B and the second plate-shaped member C extend over the pressurizing chamber 1 in the chamber 10 and the external space of the chamber 10. It is housed freely in and out.
The inside of the chamber 10 has a first chamber surface 10a and a second chamber surface 10b arranged so as to face the carried-in first plate-shaped member B and the second plate-shaped member C in the thickness direction (Z direction).
The first indoor surface 10a is directly or indirectly with the back side of the concavo-convex joint portion (first concavo-convex portion B1 or second concavo-convex portion C1) in either the first plate-shaped member B or the second plate-shaped member C. It is formed on a plane in the XY direction facing the Z direction. The second indoor surface 10b is the back side of the concavo-convex joint portion (first concavo-convex portion B1 or second concavo-convex portion C1) on the other side of the first plate-shaped member B or the second plate-shaped member C, directly or indirectly in the Z direction. It is formed on a plane in the XY direction facing the.
The chamber 10 has an entrance / exit 10c for moving the first plate-shaped member B and the second plate-shaped member C in and out of the sealable pressure chamber 1. The entrance / exit 10c of the chamber 10 is configured to be openable / closable, and is opened / closed by a drive mechanism 10d including an actuator or the like.
The first plate-shaped member B and the second plate-shaped member C are carried into the pressurizing chamber 1 in a concavo-convex joint state in which the concavo-convex joint portions (first concavo-convex portion B1, second concavo-convex portion C1) are joined in a concavo-convex shape, for example. This is performed using a transfer means (not shown) such as a transfer robot. The first plate-shaped member B and the second plate-shaped member C are carried out from the pressurizing chamber 1 by a conveying means or the like in a separated state in which the uneven joint portions (first uneven portion B1 and second uneven portion C1) are peeled off. It is done sequentially or simultaneously.

加圧室１の具体例として図１〜図６に示される場合には、第一板状部材Ｂにおいて表側の第一凹凸部Ｂ１の裏側である第一背面Ｂ２に取り付けた第一保持板Ｂ３が、上側の第一室内面１０ａと対向するように配置されている。第二板状部材Ｃにおいて表側の第二凹凸部Ｃ１の裏側である第二背面Ｃ２に取り付けた第二保持板Ｃ３が、下側の第二室内面１０ｂと対向するように配置されている。
第一室内面１０ａと第二室内面１０ｂの間には、第三室内面１０ｅがＺ方向の平面上に形成される。
また、その他の例として図示しないが、上側の第一室内面１０ａと対向して第二板状部材Ｃの第二保持板Ｃ３を配置し、下側の第二室内面１０ｂと対向して第一板状部材Ｂの第一保持板Ｂ３を配置することも可能である。
さらに、チャンバー１０の第一室内面１０ａには、第一板状部材Ｂ又は第二板状部材Ｃのいずれか一方の裏側などを位置検出するために、間隙検出センサー（図示しない）を配置することが好ましい。In the case shown in FIGS. 1 to 6 as a specific example of the pressurizing chamber 1, the first holding plate B3 attached to the first back surface B2 which is the back side of the first uneven portion B1 on the front side in the first plate-shaped member B. Is arranged so as to face the upper first chamber surface 10a. In the second plate-shaped member C, the second holding plate C3 attached to the second back surface C2, which is the back side of the second uneven portion C1 on the front side, is arranged so as to face the lower second indoor surface 10b.
A third indoor surface 10e is formed on a plane in the Z direction between the first indoor surface 10a and the second indoor surface 10b.
Further, although not shown as another example, the second holding plate C3 of the second plate-shaped member C is arranged so as to face the upper first chamber surface 10a, and the second holding plate C3 is arranged so as to face the lower second chamber surface 10b. It is also possible to arrange the first holding plate B3 of the single plate-shaped member B.
Further, a gap detection sensor (not shown) is arranged on the first chamber surface 10a of the chamber 10 in order to detect the position of the back side of either the first plate-shaped member B or the second plate-shaped member C. Is preferable.

離間吸収部２は、搬入された第一板状部材Ｂ又は第二板状部材Ｃのいずれか一方において凹凸接合部（第一凹凸部Ｂ１又は第二凹凸部Ｃ１）の裏側とその厚み方向（Ｚ方向）へ接触し、且つチャンバー１０の第一室内面１０ａと離隔するように配置される。
離間吸収部２は、チャンバー１０の第一室内面１０ａに対して、搬入された第一板状部材Ｂ又は第二板状部材Ｃのいずれか一方の裏側と厚み方向（Ｚ方向）へ当接する変位部位２ａを有する。
変位部位２ａは、厚み方向（Ｚ方向）へ変形可能又は移動可能に構成され、搬入された第一板状部材Ｂ又は第二板状部材Ｃのいずれか一方の裏側を当接させることにより、厚み方向（Ｚ方向）と交差する方向（ＸＹ方向）へ位置ズレ不能に位置決めして一体化される。
つまり、離間吸収部２は、チャンバー１０の第一室内面１０ａに対して変位部位２ａがＺ方向へ変形自在又は移動自在に配置され、変位部位２ａの変形又は移動に伴って、第一板状部材Ｂ又は第二板状部材Ｃのいずれか一方をＺ方向へ移動させるように構成される。
離間吸収部２とチャンバー１０の第一室内面１０ａとの間には、第一減圧空間部４が加圧室１と隔離して形成される。第一減圧空間部４は、離間吸収部２の変位部位２ａに対して、第一板状部材Ｂ又は第二板状部材Ｃのいずれか一方の裏側を当接することにより、気密状に形成される。
さらに、離間吸収部２は、第一板状部材Ｂ又は第二板状部材Ｃのいずれか一方の裏側と、第一減圧空間部４とを連通させる第一通気口２ｂを有することが好ましい。The separation absorbing portion 2 is formed on either the first plate-shaped member B or the second plate-shaped member C that has been carried in, on the back side of the concavo-convex joint portion (first concavo-convex portion B1 or second concavo-convex portion C1) and in the thickness direction thereof ( It is arranged so as to be in contact with (Z direction) and separated from the first chamber surface 10a of the chamber 10.
The separation absorbing portion 2 abuts against the first chamber surface 10a of the chamber 10 in the thickness direction (Z direction) with the back side of either the first plate-shaped member B or the second plate-shaped member C carried in. It has a displacement portion 2a.
The displacement portion 2a is configured to be deformable or movable in the thickness direction (Z direction), and is brought into contact with the back side of either the first plate-shaped member B or the second plate-shaped member C. It is positioned and integrated so that it cannot be displaced in the direction intersecting the thickness direction (Z direction) (XY direction).
That is, in the separation absorbing portion 2, the displacement portion 2a is arranged so as to be deformable or movable in the Z direction with respect to the first chamber surface 10a of the chamber 10, and the first plate shape is formed as the displacement portion 2a is deformed or moved. It is configured to move either the member B or the second plate-shaped member C in the Z direction.
A first decompression space portion 4 is formed between the separation absorbing portion 2 and the first chamber surface 10a of the chamber 10 so as to be isolated from the pressurizing chamber 1. The first decompression space portion 4 is formed in an airtight manner by abutting the back side of either the first plate-shaped member B or the second plate-shaped member C against the displacement portion 2a of the separation absorbing portion 2. NS.
Further, the separation absorbing portion 2 preferably has a first vent 2b that communicates the back side of either the first plate-shaped member B or the second plate-shaped member C with the first decompression space portion 4.

離間吸収部２の具体例として図１〜図６に示される場合には、離間吸収部２に開設された第一通気口２ｂを通って、第一減圧空間部４と、第一板状部材Ｂ又は第二板状部材Ｃのいずれか一方の裏側とが常時連通される。このため、後述する第一負圧調整部６により下降した第一減圧空間部４の内圧と加圧室１の内圧との圧量差を利用して、離間吸収部２の変位部位２ａに対し、第一板状部材Ｂ又は第二板状部材Ｃのいずれか一方が真空吸着可能になる。
これにより、加圧室１の内圧上昇で変位部位２ａに対して、第一板状部材Ｂ又は第二板状部材Ｃのいずれか一方を着脱自在に吸着保持して仮止めされる。
また、離間吸収部２の他の例として図示しないが、真空吸着に代えて粘着部材や静電吸着などを用いた仮止めに変更することも可能である。In the case shown in FIGS. 1 to 6 as a specific example of the separation absorption portion 2, the first decompression space portion 4 and the first plate-shaped member pass through the first ventilation port 2b provided in the separation absorption portion 2. The back side of either B or the second plate-shaped member C is always in communication. Therefore, by utilizing the pressure difference between the internal pressure of the first decompression space portion 4 and the internal pressure of the pressurizing chamber 1 lowered by the first negative pressure adjusting portion 6 described later, the displacement portion 2a of the separated absorption portion 2 is used. , Either the first plate-shaped member B or the second plate-shaped member C can be vacuum-sucked.
As a result, either the first plate-shaped member B or the second plate-shaped member C is detachably attracted and held to the displacement portion 2a due to the increase in the internal pressure of the pressurizing chamber 1 and temporarily fixed.
Further, although not shown as another example of the separation absorption unit 2, it is possible to change to temporary fixing using an adhesive member, electrostatic suction, or the like instead of vacuum suction.

保持部３は、搬入された第一板状部材Ｂ又は第二板状部材Ｃの裏側とその厚み方向（Ｚ方向）へ接触するように配置される。
さらに、保持部３は、チャンバー１０の第二室内面１０ｂに対して、搬入された第一板状部材Ｂ又は第二板状部材Ｃの他方の裏側と厚み方向（Ｚ方向）へ移動不能に当接する固定部位３ａを有する。
つまり、保持部３は、固定部位３ａに対し、第一板状部材Ｂ又は第二板状部材Ｃの他方を当接させることで、第一板状部材Ｂ又は第二板状部材Ｃの他方がＺ方向へ移動不能に保持するように構成される。
保持部３とチャンバー１０の第二室内面１０ｂとの間には、第二減圧空間部７を加圧室１と隔離して形成することが好ましい。第二減圧空間部７は、保持部３の固定部位３ａに対して、第一板状部材Ｂ又は第二板状部材Ｃの他方を当接することにより、気密状に形成される。
また、保持部３は、第一板状部材Ｂ又は第二板状部材Ｃの他方の裏側と、第二減圧空間部７とを連通させる第二通気口３ｂを有することが好ましい。The holding portion 3 is arranged so as to come into contact with the back side of the carried-in first plate-shaped member B or second plate-shaped member C in the thickness direction (Z direction) thereof.
Further, the holding portion 3 is immovable with respect to the second chamber surface 10b of the chamber 10 in the thickness direction (Z direction) with the other back side of the first plate-shaped member B or the second plate-shaped member C carried in. It has a fixed portion 3a to abut.
That is, the holding portion 3 brings the other of the first plate-shaped member B or the second plate-shaped member C into contact with the fixing portion 3a, so that the other of the first plate-shaped member B or the second plate-shaped member C is brought into contact with the fixing portion 3a. Is configured to hold immovable in the Z direction.
It is preferable that the second decompression space 7 is isolated from the pressurizing chamber 1 between the holding portion 3 and the second chamber surface 10b of the chamber 10. The second decompression space portion 7 is formed in an airtight manner by abutting the other of the first plate-shaped member B or the second plate-shaped member C against the fixing portion 3a of the holding portion 3.
Further, the holding portion 3 preferably has a second vent 3b that communicates the other back side of the first plate-shaped member B or the second plate-shaped member C with the second decompression space portion 7.

保持部３の具体例として図１〜図６に示される場合には、チャンバー１０の第二室内面１０ｂに対して固定された保持用環状体３１であり、保持用環状体３１の内側空間が第二通気口３ｂとなって第二減圧空間部７を形成している。
保持用環状体３１は、例えば軟質合成樹脂やゴムなどの弾性変形可能な材料又は硬質合成樹脂や金属などの変形不能な材料で四角枠状や円環状などに形成される。保持用環状体３１の厚み方向（Ｚ方向）の一端部には、チャンバー１０の第二室内面１０ｂに対する保持用固定部位３１ａを有している。保持用環状体３１において固定部位３ａとなる厚み方向（Ｚ方向）の他端部は、搬入された第一板状部材Ｂ又は第二板状部材Ｃの他方の裏側（図示例では第二板状部材Ｃの第二背面Ｃ２に取り付けられた第二保持板Ｃ３）に当接している。
さらに、保持部３の第二通気口３ｂとなる第二減圧空間部７と、第一板状部材Ｂ又は第二板状部材Ｃの他方の裏側とが常時連通されるため、後述する第二負圧調整部８により下降した第二減圧空間部７の内圧と加圧室１の内圧との圧量差を利用して、保持部３の固定部位３ａに対し、第一板状部材Ｂ又は第二板状部材Ｃの他方が真空吸着可能になる。
これにより、加圧室１の内圧上昇で固定部位３ａに対して、第一板状部材Ｂ又は第二板状部材Ｃの他方を着脱自在に吸着保持して仮止めされる。
また、保持部３の他の例として図示しないが、真空吸着に代えて粘着部材や静電吸着などを用いた仮止めに変更することも可能である。In the case shown in FIGS. 1 to 6 as a specific example of the holding portion 3, the holding annular body 31 is fixed to the second chamber surface 10b of the chamber 10, and the inner space of the holding annular body 31 is The second vent 3b forms the second decompression space 7.
The holding annular body 31 is made of an elastically deformable material such as a soft synthetic resin or rubber, or a non-deformable material such as a hard synthetic resin or a metal, and is formed in a square frame shape or an annular shape. At one end of the holding annular body 31 in the thickness direction (Z direction), a holding fixing portion 31a with respect to the second chamber surface 10b of the chamber 10 is provided. The other end of the holding annular body 31 in the thickness direction (Z direction), which is the fixing portion 3a, is the other back side of the carried-in first plate-shaped member B or second plate-shaped member C (second plate in the illustrated example). It is in contact with the second holding plate C3) attached to the second back surface C2 of the shaped member C.
Further, since the second decompression space portion 7 serving as the second vent 3b of the holding portion 3 and the other back side of the first plate-shaped member B or the second plate-shaped member C are always communicated with each other, the second plate-shaped member B or the second plate-shaped member C will be described later. Utilizing the pressure difference between the internal pressure of the second decompression space 7 lowered by the negative pressure adjusting portion 8 and the internal pressure of the pressurizing chamber 1, the first plate-shaped member B or the first plate-shaped member B or The other side of the second plate-shaped member C can be vacuum-sucked.
As a result, when the internal pressure of the pressurizing chamber 1 rises, the other of the first plate-shaped member B or the second plate-shaped member C is detachably attracted and held to the fixed portion 3a to be temporarily fixed.
Further, although not shown as another example of the holding portion 3, it is possible to change to temporary fixing using an adhesive member, electrostatic suction, or the like instead of vacuum suction.

正圧調整部５は、供給源（図示しない）から圧縮空気，ガス，水などの陽圧流体５Ｆを加圧室１に向け供給することで内圧上昇させるように構成される。
正圧調整部５の具体例として図１（ａ）などに示される場合には、例えばコンプレッサなどの給気用駆動源（図示しない）からチャンバー１０を貫通して加圧室１に通じる正圧路５ａと、正圧路５ａの途中に設けられる正圧用制御弁５ｂと、を有している。
正圧調整部５（給気用駆動源や正圧用制御弁５ｂ）の作動によって加圧室１の内圧は、大気雰囲気から所定の高圧雰囲気まで設定可能になる。
詳しく説明すると、給気用駆動源や正圧用制御弁５ｂの作動制御により、正圧路５ａに供給される陽圧流体５Ｆの全体量をコントロールして、加圧室１の内圧を段階的に調整することが好ましい。The positive pressure adjusting unit 5 is configured to increase the internal pressure by supplying a positive pressure fluid 5F such as compressed air, gas, or water from a supply source (not shown) to the pressurizing chamber 1.
When the positive pressure adjusting unit 5 is shown as a specific example in FIG. 1A, for example, a positive pressure that penetrates the chamber 10 from an air supply drive source (not shown) such as a compressor and leads to the pressurizing chamber 1. It has a passage 5a and a positive pressure control valve 5b provided in the middle of the positive pressure passage 5a.
By operating the positive pressure adjusting unit 5 (air supply drive source and positive pressure control valve 5b), the internal pressure of the pressurizing chamber 1 can be set from an atmospheric atmosphere to a predetermined high pressure atmosphere.
More specifically, by controlling the operation of the air supply drive source and the positive pressure control valve 5b, the total amount of the positive pressure fluid 5F supplied to the positive pressure path 5a is controlled, and the internal pressure of the pressurizing chamber 1 is gradually increased. It is preferable to adjust.

第一負圧調整部６は、第一減圧空間部４から空気などの第一陰圧流体６Ｆを排気することで、第一負圧調整部６の内圧が加圧室１の内圧よりも下降するように構成される。
第一負圧調整部６の具体例として図１（ａ）などに示される場合には、例えば真空ポンプなどの第一排気用駆動源（図示しない）からチャンバー１０を貫通して第一減圧空間部４に通じる第一負圧路６ａと、第一負圧路６ａの途中に設けられる第一負圧用制御弁６ｂと、を有している。
第一負圧調整部６（第一排気用駆動源や第一負圧用制御弁６ｂ）の作動によって第一減圧空間部４の内圧は、大気雰囲気から真空又は真空に近い低圧雰囲気まで設定可能になる。
詳しく説明すると、第一排気用駆動源や第一負圧用制御弁６ｂの作動制御により、第一負圧路６ａから排気される第一陰圧流体６Ｆの全体量をコントロールして、第一減圧空間部４の内圧を段階的に調整することが好ましい。The first negative pressure adjusting unit 6 exhausts the first negative pressure fluid 6F such as air from the first decompression space portion 4, so that the internal pressure of the first negative pressure adjusting unit 6 is lower than the internal pressure of the pressurizing chamber 1. It is configured to do.
In the case shown in FIG. 1A as a specific example of the first negative pressure adjusting unit 6, the first decompression space penetrates the chamber 10 from a first exhaust drive source (not shown) such as a vacuum pump. It has a first negative pressure passage 6a leading to the portion 4 and a first negative pressure control valve 6b provided in the middle of the first negative pressure passage 6a.
By operating the first negative pressure adjusting unit 6 (driving source for first exhaust and control valve 6b for first negative pressure), the internal pressure of the first decompression space 4 can be set from an atmospheric atmosphere to a vacuum or a low pressure atmosphere close to vacuum. Become.
More specifically, by controlling the operation of the first exhaust drive source and the first negative pressure control valve 6b, the total amount of the first negative pressure fluid 6F exhausted from the first negative pressure passage 6a is controlled to reduce the first pressure. It is preferable to adjust the internal pressure of the space portion 4 step by step.

第二負圧調整部８は、第二減圧空間部７から空気などの第二陰圧流体８Ｆを排気することで、第二負圧調整部８の内圧が加圧室１の内圧よりも下降するように構成される。
第二負圧調整部８の具体例として図１（ａ）などに示される場合には、例えば真空ポンプなどの第二排気用駆動源（図示しない）からチャンバー１０を貫通して第二減圧空間部７に通じる第二負圧路８ａと、第二負圧路８ａの途中に設けられる第二負圧用制御弁８ｂと、を有している。
第二負圧調整部８（第二排気用駆動源や第二負圧用制御弁８ｂ）の作動によって第二減圧空間部７の内圧は、大気雰囲気から真空又は真空に近い低圧雰囲気まで設定可能になる。
詳しく説明すると、第二排気用駆動源や第二負圧用制御弁８ｂの作動制御により、第二負圧路８ａから排気される第二陰圧流体８Ｆの全体量をコントロールして、第二減圧空間部７の内圧を段階的に調整することが好ましい。The second negative pressure adjusting unit 8 exhausts the second negative pressure fluid 8F such as air from the second decompression space portion 7, so that the internal pressure of the second negative pressure adjusting unit 8 is lower than the internal pressure of the pressurizing chamber 1. It is configured to do.
In the case shown in FIG. 1A as a specific example of the second negative pressure adjusting unit 8, a second decompression space penetrates the chamber 10 from a second exhaust drive source (not shown) such as a vacuum pump. It has a second negative pressure passage 8a leading to the portion 7 and a second negative pressure control valve 8b provided in the middle of the second negative pressure passage 8a.
By operating the second negative pressure adjusting unit 8 (drive source for second exhaust and control valve for second negative pressure 8b), the internal pressure of the second decompression space 7 can be set from an atmospheric atmosphere to a vacuum or a low pressure atmosphere close to vacuum. Become.
More specifically, the operation control of the second exhaust drive source and the second negative pressure control valve 8b controls the total amount of the second negative pressure fluid 8F exhausted from the second negative pressure passage 8a to reduce the second pressure. It is preferable to adjust the internal pressure of the space portion 7 step by step.

制御部９は、正圧調整部５，第一負圧調整部６及び第二負圧調整部８などとそれぞれ電気的に接続した制御回路（図示しない）を有するコントローラーである。
さらに、チャンバー１０の出入口１０ｃを開閉する駆動機構１０ｄと電気的に接続する。それ以外にも加圧室１に対して第一板状部材Ｂ及び第二板状部材Ｃが出し入れするための搬送手段などにも電気的に接続している。
制御部９となるコントローラーは、その制御回路（図示しない）に予め設定されたプログラムに従って、予め設定されたタイミングで順次それぞれ作動制御している。The control unit 9 is a controller having a control circuit (not shown) electrically connected to each of the positive pressure adjusting unit 5, the first negative pressure adjusting unit 6, the second negative pressure adjusting unit 8, and the like.
Further, it is electrically connected to the drive mechanism 10d that opens and closes the entrance / exit 10c of the chamber 10. In addition to that, the first plate-shaped member B and the second plate-shaped member C are electrically connected to the pressurizing chamber 1 as a means for moving in and out.
The controller serving as the control unit 9 sequentially controls the operation at preset timings according to a program preset in the control circuit (not shown).

そして、制御部の制御回路に設定されたプログラムを、分離装置Ａによる分離方法として説明する。
本発明の実施形態に係る分離装置Ａを用いた分離方法は、剥がし過程と取り出し過程に分けられる。
剥がし過程は、加圧室１に第一板状部材Ｂ及び第二板状部材Ｃを入れる搬入工程と、加圧室１内に第一板状部材Ｂ及び第二板状部材Ｃを気密状に保持する保持工程と、加圧室１を内圧上昇させる加圧工程と、加圧室１で第一板状部材Ｂと第二板状部材Ｃを剥がす剥離工程と、を主要な工程として含んでいる。
搬入工程では、図１（ａ）などに示されるように搬送手段の作動により、凹凸接合部（第一凹凸部Ｂ１，第二凹凸部Ｃ１）が互いに凹凸接合して一体化された第一板状部材Ｂ及び第二板状部材Ｃを、加圧室１に入れて収容する。
保持工程では、図２（ａ）などに示されるように、離間吸収部２の変位部位２ａに対して、第一板状部材Ｂ又は第二板状部材Ｃのいずれか一方において凹凸接合部（第一凹凸部Ｂ１，第二凹凸部Ｃ１）の裏側を、厚み方向（Ｚ方向）へ当接させる。このため、離間吸収部２の変位部位２ａに対し、第一板状部材Ｂ又は第二板状部材Ｃのいずれか一方の裏側が、厚み方向（Ｚ方向）と交差する方向（ＸＹ方向）へ位置ズレ不能に位置決めされて一体化される。これにより、変位部位２ａの厚み方向（Ｚ方向）へ変形又は移動に伴い、第一板状部材Ｂ又は第二板状部材Ｃのいずれか一方の裏側が、チャンバー１０の第一室内面１０ａに対して移動可能となる。
これと同時に、保持部３の固定部位３ａに対して、第一板状部材Ｂ又は第二板状部材Ｃの他方において凹凸接合部（第一凹凸部Ｂ１，第二凹凸部Ｃ１）の裏側を厚み方向（Ｚ方向）へ当接させる。これにより、チャンバー１０の第二室内面１０ｂに対し厚み方向（Ｚ方向）へ移動不能となる。Then, the program set in the control circuit of the control unit will be described as a separation method by the separation device A.
The separation method using the separation device A according to the embodiment of the present invention is divided into a peeling process and a taking-out process.
The peeling process includes a carry-in step of inserting the first plate-shaped member B and the second plate-shaped member C into the pressurizing chamber 1, and an airtight state of the first plate-shaped member B and the second plate-shaped member C in the pressurizing chamber 1. The main steps include a holding step of holding the pressure chamber 1, a pressurizing step of increasing the internal pressure of the pressurizing chamber 1, and a peeling step of peeling off the first plate-shaped member B and the second plate-shaped member C in the pressurizing chamber 1. I'm out.
In the carry-in process, as shown in FIG. 1A and the like, the first plate in which the uneven joint portions (first uneven portion B1 and second uneven portion C1) are unevenly joined and integrated by the operation of the transport means. The shaped member B and the second plate-shaped member C are housed in the pressurizing chamber 1.
In the holding step, as shown in FIG. 2A and the like, the concave-convex joint portion (in the first plate-shaped member B or the second plate-shaped member C) with respect to the displacement portion 2a of the separation absorbing portion 2 The back side of the first uneven portion B1 and the second uneven portion C1) is brought into contact with each other in the thickness direction (Z direction). Therefore, the back side of either the first plate-shaped member B or the second plate-shaped member C intersects the thickness direction (Z direction) with respect to the displacement portion 2a of the separation absorbing portion 2 (XY direction). It is positioned so that it cannot be displaced and integrated. As a result, as the displacement portion 2a is deformed or moved in the thickness direction (Z direction), the back side of either the first plate-shaped member B or the second plate-shaped member C becomes the first chamber surface 10a of the chamber 10. On the other hand, it becomes movable.
At the same time, the back side of the concavo-convex joint portion (first concavo-convex portion B1, second concavo-convex portion C1) is formed on the other side of the first plate-shaped member B or the second plate-shaped member C with respect to the fixing portion 3a of the holding portion 3. The contact is made in the thickness direction (Z direction). As a result, the chamber 10 cannot move in the thickness direction (Z direction) with respect to the second chamber surface 10b.

加圧工程では、図２（ｂ）などに示されるように正圧調整部５の作動により、第一板状部材Ｂ及び第二板状部材Ｃが保持された加圧室１に向け、陽圧流体５Ｆを供給して内圧上昇させる。
剥離工程では、図２（ｃ）などに示されるように加圧室１の内圧上昇に伴い、チャンバー１０の第一室内面１０ａ及び離間吸収部２の間に形成される第一減圧空間部４の内圧よりも高圧になる。このため、加圧室１の内圧と第一減圧空間部４の内圧とでは圧力差が生じて、離間吸収部２を第一減圧空間部４に向け引き寄せる引力が発生する。
この引力で離間吸収部２とともに変位部位２ａを介して当接する第一板状部材Ｂ又は第二板状部材Ｃのいずれか一方が、陽圧流体５Ｆで第一減圧空間部４に向け引き寄せられて移動する。これにより、第一板状部材Ｂ又は第二板状部材Ｃのいずれか一方が、固定部位３ａで厚み方向（Ｚ方向）へ移動不能な他方に対して厚み方向（Ｚ方向）へ引き剥がされ、凹凸接合部（第一凹凸部Ｂ１，第二凹凸部Ｃ１）を剥離する。
この際に、チャンバー１０の第一室内面１０ａに配置された間隙検出センサーで、第一板状部材Ｂ又は第二板状部材Ｃのいずれか一方の裏側などを位置検出して、その検出値を監視することにより、凹凸接合部（第一凹凸部Ｂ１，第二凹凸部Ｃ１）の剥離進行や剥離完了が検知可能になる。In the pressurizing step, as shown in FIG. 2B and the like, the positive pressure adjusting unit 5 operates toward the pressurizing chamber 1 in which the first plate-shaped member B and the second plate-shaped member C are held. The pressure fluid 5F is supplied to raise the internal pressure.
In the peeling step, as shown in FIG. 2C and the like, as the internal pressure of the pressurizing chamber 1 rises, the first decompression space portion 4 formed between the first chamber surface 10a of the chamber 10 and the separated absorption portion 2 The pressure is higher than the internal pressure of. Therefore, a pressure difference is generated between the internal pressure of the pressurizing chamber 1 and the internal pressure of the first decompression space portion 4, and an attractive force is generated that attracts the separated absorption portion 2 toward the first decompression space portion 4.
With this attractive force, either the first plate-shaped member B or the second plate-shaped member C, which abuts with the separation absorbing portion 2 via the displacement portion 2a, is attracted to the first decompression space portion 4 by the positive pressure fluid 5F. To move. As a result, either one of the first plate-shaped member B or the second plate-shaped member C is peeled off in the thickness direction (Z direction) with respect to the other that cannot move in the thickness direction (Z direction) at the fixing portion 3a. , The concavo-convex joint portion (first concavo-convex portion B1, second concavo-convex portion C1) is peeled off.
At this time, the gap detection sensor arranged on the first chamber surface 10a of the chamber 10 detects the position of the back side of either the first plate-shaped member B or the second plate-shaped member C, and the detected value thereof. By monitoring, it becomes possible to detect the progress and completion of peeling of the uneven joint portion (first uneven portion B1, second uneven portion C1).

これに加えて、加圧工程では、第一負圧調整部６の作動により、第一減圧空間部４の内圧を下降させることが好ましい。
図２（ｂ）などに示されるように、正圧調整部５の作動による陽圧流体５Ｆの供給で加圧室１を内圧上昇させるのと同時に、第一減圧空間部４からの排気で、加圧室１の内圧に対する第一減圧空間部４の内圧の圧力差が更に大きくなる。図示例では、離間吸収部２が第一通気口２ｂを有するため、離間吸収部２の変位部位２ａに対し、第一板状部材Ｂ又は第二板状部材Ｃのいずれか一方の裏側を真空吸着している。
さらに、加圧工程では、第二負圧調整部８の作動により、チャンバー１０の第二室内面１０ｂ及び保持部３の間に形成される第二減圧空間部７の内圧を下降させることが好ましい。
図示例では、保持部３が第二通気口３ｂを有するため、加圧室１が内圧上昇するのと同時、又は加圧室１の内圧上昇の開始前に、第二減圧空間部７からの排気で、保持部３の固定部位３ａに対し、第一板状部材Ｂ又は第二板状部材Ｃの他方の裏側を真空吸着している。
また、図示例のように、第一板状部材Ｂの第一背面Ｂ２に取り付けられた第一保持板Ｂ３と、第二板状部材Ｃの第二背面Ｃ２に取り付けられた第二保持板Ｃ３との間には、陽圧流体５Ｆが侵入可能な隙間Ｅを有する場合には、第一保持板Ｂ３及び第二保持板Ｃ３の隙間Ｅに陽圧流体５Ｆが侵入することにより、第一板状部材Ｂと第二板状部材Ｃを相対的に押し離す斥力が発生する。In addition to this, in the pressurizing step, it is preferable that the internal pressure of the first decompression space portion 4 is lowered by the operation of the first negative pressure adjusting portion 6.
As shown in FIG. 2B and the like, the internal pressure of the pressurizing chamber 1 is increased by supplying the positive pressure fluid 5F by the operation of the positive pressure adjusting unit 5, and at the same time, the exhaust from the first decompression space portion 4 is used. The pressure difference between the internal pressure of the pressurizing chamber 1 and the internal pressure of the first decompression space 4 becomes even larger. In the illustrated example, since the separation absorption portion 2 has the first ventilation port 2b, the back side of either the first plate-shaped member B or the second plate-like member C is evacuated with respect to the displacement portion 2a of the separation absorption portion 2. It is adsorbed.
Further, in the pressurizing step, it is preferable that the internal pressure of the second decompression space portion 7 formed between the second chamber surface 10b and the holding portion 3 of the chamber 10 is lowered by the operation of the second negative pressure adjusting portion 8. ..
In the illustrated example, since the holding portion 3 has the second vent 3b, the internal pressure of the pressurizing chamber 1 rises at the same time, or before the internal pressure of the pressurizing chamber 1 starts to rise, from the second decompression space portion 7. By exhaust gas, the back side of the first plate-shaped member B or the other back side of the second plate-shaped member C is vacuum-sucked to the fixed portion 3a of the holding portion 3.
Further, as shown in the illustrated example, the first holding plate B3 attached to the first back surface B2 of the first plate-shaped member B and the second holding plate C3 attached to the second back surface C2 of the second plate-shaped member C. When there is a gap E through which the positive pressure fluid 5F can enter, the positive pressure fluid 5F invades the gap E between the first holding plate B3 and the second holding plate C3, so that the first plate A repulsive force is generated that relatively pushes the shaped member B and the second plate-shaped member C apart.

取り出し過程は、加圧室１を内圧下降させる減圧工程と、加圧室１から第一板状部材Ｂの第二板状部材Ｃのいずれか一方を取り出す一次搬出工程と、加圧室１から第一板状部材Ｂの第二板状部材Ｃの他方を取り出す二次搬出工程と、を主要な工程として含んでいる。
減圧工程では、図３（ａ）に示されるように、正圧調整部５を作動停止させるとともに、加圧室１に充満した陽圧流体５Ｆを加圧室１の外に放出するなど、大気開放することにより、加圧室１が内圧下降する。
一次搬出工程では、図３（ｂ）に示されるように、第二負圧調整部８の作動停止と搬送手段の作動により、保持部３から第一板状部材Ｂの第二板状部材Ｃのいずれか一方（図示例では第二板状部材Ｃ）を取り外して、加圧室１の外に搬出する。
二次搬出工程では、図３（ｃ）に示されるように、第一負圧調整部６の作動停止と搬送手段の作動により、離間吸収部２から第一板状部材Ｂの第二板状部材Ｃの他方（図示例では第一板状部材Ｂ）を取り外して、加圧室１の外に搬出する。The take-out process includes a decompression step of lowering the internal pressure of the pressurizing chamber 1, a primary carry-out step of taking out one of the second plate-shaped member C of the first plate-shaped member B from the pressurizing chamber 1, and a primary carry-out step of taking out one of the second plate-shaped member C from the pressurizing chamber 1. A secondary unloading step of taking out the other of the second plate-shaped member C of the first plate-shaped member B is included as a main step.
In the depressurizing step, as shown in FIG. 3A, the positive pressure adjusting unit 5 is stopped, and the positive pressure fluid 5F filled in the pressurizing chamber 1 is discharged to the outside of the pressurizing chamber 1, and the atmosphere is increased. By opening, the internal pressure of the pressurizing chamber 1 drops.
In the primary unloading step, as shown in FIG. 3B, the operation of the second negative pressure adjusting unit 8 is stopped and the transport means is operated, so that the holding unit 3 to the second plate-shaped member C of the first plate-shaped member B One of the above (second plate-shaped member C in the illustrated example) is removed and carried out of the pressurizing chamber 1.
In the secondary unloading step, as shown in FIG. 3C, the operation of the first negative pressure adjusting unit 6 is stopped and the transport means is operated, so that the separated absorption unit 2 is separated from the first plate-shaped member B in the second plate shape. The other member C (first plate-shaped member B in the illustrated example) is removed and carried out of the pressurizing chamber 1.

次に、加圧室１（チャンバー１０），離間吸収部２，積層体Ｄの構造などが異なる場合の代表例（第一実施形態〜第四実施形態）について説明する。
図１〜図３に示される第一実施形態の分離装置Ａ１は、分割タイプの加圧室１であり、凹凸接合した第一板状部材Ｂ及び第二板状部材Ｃの外側に第一保持板Ｂ３及び第二保持板Ｃ３が取り付けられた積層体Ｄを、離間吸収部２の変形で剥がした場合である。
分割タイプの加圧室１とは、チャンバー１０を第一チャンバー１１と第二チャンバー１２に分割して、離隔した第一チャンバー１１及び第二チャンバー１２の間に出入口１０ｃが形成される。出入口１０ｃには、四角枠状や円環状のパッキン又はＯリングなどからなるシール材１３が介装される。
第一チャンバー１１や第二チャンバー１２を駆動機構１０ｄで相対的に接近させることにより、シール材１３で出入口１０ｃが気密状に閉じて、加圧室１が開閉自在で且つ密封構造となる。
図示例では、上側の第一チャンバー１１のみを下側の第二チャンバー１２に対して往復動させているが、下側の第二チャンバー１２のみ、又は第一チャンバー１１及び第二チャンバー１２の両方を往復動させるなど、図示例以外の構造に変更することが可能である。Next, typical examples (first embodiment to fourth embodiment) in the case where the structures of the pressurizing chamber 1 (chamber 10), the separated absorbing portion 2, and the laminated body D are different will be described.
The separating device A1 of the first embodiment shown in FIGS. This is a case where the laminated body D to which the plate B3 and the second holding plate C3 are attached is peeled off by the deformation of the separation absorbing portion 2.
In the split type pressurizing chamber 1, the chamber 10 is divided into a first chamber 11 and a second chamber 12, and an entrance / exit 10c is formed between the separated first chamber 11 and the second chamber 12. A sealing material 13 made of a square frame-shaped or annular packing, an O-ring, or the like is interposed at the doorway 10c.
By bringing the first chamber 11 and the second chamber 12 relatively close to each other by the drive mechanism 10d, the entrance / exit 10c is closed by the sealing material 13 in an airtight manner, and the pressurizing chamber 1 is openable and closable and has a sealed structure.
In the illustrated example, only the upper first chamber 11 is reciprocated with respect to the lower second chamber 12, but only the lower second chamber 12 or both the first chamber 11 and the second chamber 12 are reciprocated. It is possible to change to a structure other than the illustrated example, such as reciprocating.

変形可能な離間吸収部２は、チャンバー１０の第一室内面１０ａに対してＺ方向へ弾性変形可能に取り付けられた弾性通気体２１で構成される。
図示例で弾性通気体２１は、例えば軟質合成樹脂やゴムなどの弾性変形可能な材料で、その中央に一つの第一通気口２ｂを有する四角枠状や円環状などに形成されたパッキン又はＯリングなどの環状部材からなる。弾性通気体２１の厚み方向（Ｚ方向）の一端部には、チャンバー１０の第一室内面１０ａに対する取付部位２１ａを有している。弾性通気体２１は、厚み方向（Ｚ方向）の他端部を変位部位２ａとして、搬入された第一板状部材Ｂ又は第二板状部材Ｃのいずれか一方の裏側（図示例では第一板状部材Ｂの第一背面Ｂ２に取り付けられた第一保持板Ｂ３）に当接させることにより、弾性通気体２１の内側に第一減圧空間部４が形成される。
このため、陽圧流体５Ｆの流入による加圧室１の内圧上昇と第一減圧空間部４の内圧の差で、弾性通気体２１がＺ方向へ弾性的に圧縮変形して、その変位部位２ａとともに第一板状部材Ｂ又は第二板状部材Ｃのいずれか一方を、第一減圧空間部４に向け移動させる。これにより、第一板状部材Ｂ又は第二板状部材Ｃのいずれか一方（図示例では第一板状部材Ｂ）が、他方（図示例では第二板状部材Ｃ）から引き剥がされる。
なお、弾性通気体２１の他の例として図示しないが、環状部材に代えて複数の第一通気口２ｂを有する板状部材や、多数の第一通気口２ｂを有する多孔質部材などを用いることも可能である。
これらの場合には、チャンバー１０の第一室内面１０ａに配置された間隙検出センサーで、第一板状部材Ｂ又は第二板状部材Ｃのいずれか一方（図示例では第一板状部材Ｂ）を位置検出することにより、第一板状部材Ｂの異常な変形や過剰な変形も検知することが可能になる。第一板状部材Ｂの過剰変形を機械的に防止するためのストッパーなどの変形抑止部材（図示しない）を設けることも可能である。
さらに、図１（ａ）〜（ｃ）に示される例では、積層体Ｄとなる第一保持板Ｂ３及び第二保持板Ｃ３の間に、複数の第一板状部材Ｂ及び第二板状部材ＣがＸＹ方向へそれぞれ所定間隔毎に並列配置され、四角枠状の外側隙間Ｅ１と、ＸＹ方向の両方へ直線状に通る複数本の貫通隙間Ｅ２と、を有している。
これにより、陽圧流体５Ｆは、外側隙間Ｅ１だけでなく、複数本の貫通隙間Ｅ２にもそれぞれ侵入するため、第一板状部材Ｂと第二板状部材Ｃを全面的に押し離す斥力が発生する。The deformable separation absorbing portion 2 is composed of an elastic vent body 21 attached so as to be elastically deformable in the Z direction with respect to the first chamber surface 10a of the chamber 10.
In the illustrated example, the elastic ventilator 21 is an elastically deformable material such as a soft synthetic resin or rubber, and is a packing or O-ring formed in a square frame shape or an annular shape having one first vent 2b in the center thereof. It consists of an annular member such as a ring. At one end of the elastic ventilator 21 in the thickness direction (Z direction), a mounting portion 21a with respect to the first chamber surface 10a of the chamber 10 is provided. The elastic ventilator 21 has the other end in the thickness direction (Z direction) as the displacement portion 2a, and the back side of either the first plate-shaped member B or the second plate-shaped member C carried in (first in the illustrated example). The first decompression space 4 is formed inside the elastic ventilator 21 by abutting the first holding plate B3) attached to the first back surface B2 of the plate-shaped member B.
Therefore, the elastic ventilator 21 elastically compresses and deforms in the Z direction due to the difference between the internal pressure increase of the pressurizing chamber 1 and the internal pressure of the first decompression space 4 due to the inflow of the positive pressure fluid 5F, and the displacement portion 2a thereof. At the same time, either the first plate-shaped member B or the second plate-shaped member C is moved toward the first decompression space portion 4. As a result, either one of the first plate-shaped member B and the second plate-shaped member C (first plate-shaped member B in the illustrated example) is peeled off from the other (second plate-shaped member C in the illustrated example).
Although not shown as another example of the elastic vent body 21, a plate-shaped member having a plurality of first vents 2b, a porous member having a large number of first vents 2b, and the like are used instead of the annular member. Is also possible.
In these cases, the gap detection sensor arranged on the first chamber surface 10a of the chamber 10 is one of either the first plate-shaped member B or the second plate-shaped member C (in the illustrated example, the first plate-shaped member B). ), It is possible to detect abnormal deformation or excessive deformation of the first plate-shaped member B. It is also possible to provide a deformation suppressing member (not shown) such as a stopper for mechanically preventing excessive deformation of the first plate-shaped member B.
Further, in the examples shown in FIGS. 1 (a) to 1 (c), a plurality of first plate-shaped members B and second plate-shaped members B and second plate-like members are formed between the first holding plate B3 and the second holding plate C3 to be the laminated body D. The members C are arranged in parallel at predetermined intervals in the XY directions, and have a square frame-shaped outer gap E1 and a plurality of through gaps E2 that pass linearly in both the XY directions.
As a result, the positive pressure fluid 5F invades not only the outer gap E1 but also a plurality of through gaps E2, so that a repulsive force that completely pushes the first plate-shaped member B and the second plate-shaped member C apart is generated. appear.

図４（ａ）〜（ｃ）に示される第二実施形態の分離装置Ａ２は、部分開閉タイプの加圧室１である構成が、前述した第一実施形態とは異なり、それ以外の構成は第一実施形態と同じものである。
図示例では、箱形チャンバー１４の一部に出入口１０ｃが開設され、出入口１０ｃに対して扉１４ａを駆動機構１０ｄで開閉動させている。
これにより、加圧室１の一部が開閉自在で且つ密封構造となるように構成されている。The separation device A2 of the second embodiment shown in FIGS. 4A to 4C is a partially open / close type pressurizing chamber 1, which is different from the above-described first embodiment, and other configurations are different. It is the same as the first embodiment.
In the illustrated example, the doorway 10c is opened in a part of the box-shaped chamber 14, and the door 14a is opened and closed by the drive mechanism 10d with respect to the doorway 10c.
As a result, a part of the pressurizing chamber 1 is configured to be openable and closable and has a sealed structure.

図５（ａ）〜（ｃ）に示される第三実施形態の分離装置Ａ３は、積層体Ｄを離間吸収部２の移動で剥がした構成が、前述した第一実施形態とは異なり、それ以外の構成は第一実施形態と同じものである。
移動可能な離間吸収部２は、チャンバー１０の第一室内面１０ａに対してＺ方向へ往復動可能に支持された昇降通気体２２で構成される。
図示例で昇降通気体２２は、例えば硬質合成樹脂や金属などの変形不能な材料で、その中央に一つの第一通気口２ｂを有する四角板状や円板状などに形成された板状部材からなる。昇降通気体２２の側面は、チャンバー１０の第三室内面１０ｅに沿ってＺ方向へ往復動自在で且つ気密状に支持される摺動部位２２ａを有している。チャンバー１０の第三室内面１０ｅは、昇降通気体２２に向け突出する一方側のストッパー１０ｆと他方側のストッパー１０ｇを有する。Ｚ方向へ移動した昇降通気体２２が一方側のストッパー１０ｆや他方側のストッパー１０ｇに当接することで、昇降通気体２２の移動範囲を規制している。昇降通気体２２は、厚み方向（Ｚ方向）の先端部を変位部位２ａとして、搬入された第一板状部材Ｂ又は第二板状部材Ｃのいずれか一方の裏側（図示例では第一板状部材Ｂの第一背面Ｂ２に取り付けられた第一保持板Ｂ３に当接させることにより昇降通気体２２とチャンバー１０の第一室内面１０ａとの間に第一減圧空間部４が形成される。
このため、陽圧流体５Ｆの流入による加圧室１の内圧上昇と第一減圧空間部４の内圧の差で、昇降通気体２２がＺ方向へ移動して、その変位部位２ａとともに第一板状部材Ｂ又は第二板状部材Ｃのいずれか一方を、第一減圧空間部４に向け移動させる。これにより、第一板状部材Ｂ又は第二板状部材Ｃのいずれか一方（図示例では第一板状部材Ｂ）が、他方（図示例では第二板状部材Ｃ）から引き剥がされる。
なお、昇降通気体２２の他の例として図示しないが、一つの第一通気口２ｂを有する板状部材に代えて、複数の第一通気口２ｂを有する板状部材や、多数の第一通気口２ｂを有する多孔質板状部材などを用いることも可能である。
さらに、昇降通気体２２の摺動部位２２ａが第三室内面１０ｅに沿って移動可能に支持される支持構造に代えて、ステンレスなどの弾性変形可能な薄板状の可撓性部材の中央に昇降通気体２２を浮島状に支持することにより、可撓性部材の弾性変形で昇降通気体２２がＺ方向へ往復動可能に支持される支持構造に変更することも可能である。この浮島状の場合には、可撓性部材の外周をチャンバー１０の第三室内面１０ｅに対して取り付けることにより、可撓性部材の裏側に第一減圧空間部４が加圧室１と分離して気密状に設けられる。The separation device A3 of the third embodiment shown in FIGS. 5A to 5C has a configuration in which the laminated body D is peeled off by moving the separation absorption unit 2, which is different from the first embodiment described above, and other than that. The configuration of is the same as that of the first embodiment.
The movable separation / absorption unit 2 is composed of an elevating / ventilating body 22 that is supported so as to be reciprocally reciprocating in the Z direction with respect to the first chamber surface 10a of the chamber 10.
In the illustrated example, the elevating ventilator 22 is a plate-like member formed of a non-deformable material such as a hard synthetic resin or metal, and having one first vent 2b in the center thereof, such as a square plate or a disk. Consists of. The side surface of the elevating and lowering ventilator 22 has a sliding portion 22a that can reciprocate in the Z direction along the third chamber surface 10e of the chamber 10 and is supported in an airtight manner. The third chamber surface 10e of the chamber 10 has a stopper 10f on one side and a stopper 10g on the other side that protrude toward the elevating ventilator 22. The elevating and lowering ventilator 22 that has moved in the Z direction abuts on the stopper 10f on one side and the stopper 10g on the other side to regulate the moving range of the elevating and lowering ventilator 22. The elevating and lowering ventilator 22 has the tip end portion in the thickness direction (Z direction) as the displacement portion 2a, and the back side of either the first plate-shaped member B or the second plate-shaped member C carried in (the first plate in the illustrated example). The first decompression space 4 is formed between the elevating ventilator 22 and the first chamber surface 10a of the chamber 10 by abutting against the first holding plate B3 attached to the first back surface B2 of the shape member B. ..
Therefore, due to the difference between the internal pressure increase of the pressurizing chamber 1 and the internal pressure of the first decompression space 4 due to the inflow of the positive pressure fluid 5F, the elevating ventilator 22 moves in the Z direction, and the first plate is moved together with the displacement portion 2a. Either one of the shaped member B or the second plate-shaped member C is moved toward the first decompression space portion 4. As a result, either one of the first plate-shaped member B and the second plate-shaped member C (first plate-shaped member B in the illustrated example) is peeled off from the other (second plate-shaped member C in the illustrated example).
Although not shown as another example of the elevating and lowering ventilator 22, instead of the plate-shaped member having one first vent 2b, a plate-shaped member having a plurality of first vents 2b and a large number of first vents are used. It is also possible to use a porous plate-shaped member having a mouth 2b or the like.
Further, instead of the support structure in which the sliding portion 22a of the elevating ventilator 22 is movably supported along the third chamber surface 10e, the elevating / lowering / elevating body 22 moves up and down to the center of an elastically deformable thin plate-shaped flexible member such as stainless steel. By supporting the vent body 22 in a floating island shape, it is possible to change to a support structure in which the elevating ventilator 22 is supported so as to be able to reciprocate in the Z direction by elastic deformation of the flexible member. In the case of this floating island shape, the outer circumference of the flexible member is attached to the third chamber surface 10e of the chamber 10, so that the first decompression space 4 is separated from the pressurizing chamber 1 on the back side of the flexible member. It is provided in an airtight manner.

図６（ａ）〜（ｃ）に示される第四実施形態の分離装置Ａ４は、第一保持板Ｂ３や第二保持板Ｃ３の通孔Ｄ１と連通する内側隙間Ｅ３が形成された積層体Ｄを剥がした構成が、前述した第一実施形態とは異なり、それ以外の構成は第一実施形態と同じものである。
通孔Ｄ１は、第一保持板Ｂ３又は第二保持板Ｃ３のいずれか一方又は両方に、第一減圧空間部４や第二減圧空間部７と隔離するように開穿され、加圧室１の陽圧流体５Ｆが通孔Ｄ１を通って内側隙間Ｅ３に侵入する。
図示例では、積層体Ｄとなる第一保持板Ｂ３及び第二保持板Ｃ３の間に、内側隙間Ｅ３を中心とした円周方向などへ複数の第一板状部材Ｂ及び第二板状部材Ｃがそれぞれ所定間隔毎に並列配置され、外側隙間Ｅ１と、内側隙間Ｅ３を中心とした放射方向などへ直線状に通る複数本の貫通隙間（図示しない）と、を有している。
第一減圧空間部４と対向する第一保持板Ｂ３又は第二保持板Ｃ３のいずれか一方（図示例では第一保持板Ｂ３）の中央には通孔Ｄ１が開穿される。
通孔Ｄ１と対向するチャンバー１０の第一室内面１０ａには、通孔Ｄ１と連通するように陽圧流体５Ｆが通る正圧導入路５ｃを形成して、正圧導入路５ｃの流出口から通孔Ｄ１に陽圧流体５Ｆが導入される。
また、前述した第一実施形態と同様に、積層体Ｄを離間吸収部２の変形で剥離するが、チャンバー１０の第一室内面１０ａに正圧導入路５ｃの流出口が開口するため、正圧導入路５ｃの流出口から通孔Ｄ１に至る通路と、第一減圧空間部４とを気密状に分離する必要がある。
そこで、図示例の離間吸収部２は、第一実施形態の弾性通気体２１に相当する外側環状部材２３とは別個に、正圧導入路５ｃの流出口から通孔Ｄ１に至る通路を囲むように内側環状部材２４が設けられる。外側環状部材２３と内側環状部材２４の間に第一減圧空間部４を形成している。
なお、弾性通気体２１の他の例として図示しないが、外側環状部材２３や内側環状部材２４に代えて、複数の第一通気口２ｂを有する板状部材や、多数の第一通気口２ｂを有する多孔質部材などを用いることも可能である。
これにより、陽圧流体５Ｆは、外側隙間Ｅ１だけでなく、正圧導入路５ｃ，内側環状部材２４の内側通路，通孔Ｄ１を通って内側隙間Ｅ３にも侵入し、貫通隙間Ｅ２から複数本の貫通隙間Ｅ２にそれぞれ流れるため、第一板状部材Ｂと第二板状部材Ｃを全面的に押し離す斥力が発生する。The separation device A4 of the fourth embodiment shown in FIGS. 6A to 6C is a laminated body D in which an inner gap E3 communicating with the through holes D1 of the first holding plate B3 and the second holding plate C3 is formed. The configuration in which the above is removed is different from the above-described first embodiment, and the other configurations are the same as those in the first embodiment.
The through hole D1 is opened in either or both of the first holding plate B3 and the second holding plate C3 so as to be isolated from the first decompression space portion 4 and the second decompression space portion 7, and the pressurizing chamber 1 Positive pressure fluid 5F enters the inner gap E3 through the through hole D1.
In the illustrated example, between the first holding plate B3 and the second holding plate C3 to be the laminated body D, a plurality of first plate-shaped members B and second plate-shaped members B in the circumferential direction around the inner gap E3 and the like. Cs are arranged in parallel at predetermined intervals, and have an outer gap E1 and a plurality of through gaps (not shown) that pass linearly in the radial direction centered on the inner gap E3.
A through hole D1 is formed in the center of either one of the first holding plate B3 or the second holding plate C3 (the first holding plate B3 in the illustrated example) facing the first decompression space portion 4.
A positive pressure introduction path 5c through which the positive pressure fluid 5F passes so as to communicate with the through hole D1 is formed on the first chamber surface 10a of the chamber 10 facing the through hole D1 from the outlet of the positive pressure introduction path 5c. A positive pressure fluid 5F is introduced into the through hole D1.
Further, as in the first embodiment described above, the laminated body D is peeled off by the deformation of the separation absorbing portion 2, but since the outlet of the positive pressure introduction path 5c opens on the first chamber surface 10a of the chamber 10, it is positive. It is necessary to airtightly separate the passage from the outlet of the pressure introduction path 5c to the through hole D1 and the first decompression space portion 4.
Therefore, the separated absorption unit 2 of the illustrated example surrounds the passage from the outlet of the positive pressure introduction path 5c to the through hole D1 separately from the outer annular member 23 corresponding to the elastic ventilator 21 of the first embodiment. Is provided with an inner annular member 24. A first decompression space 4 is formed between the outer annular member 23 and the inner annular member 24.
Although not shown as another example of the elastic vent body 21, instead of the outer annular member 23 and the inner annular member 24, a plate-shaped member having a plurality of first vents 2b and a large number of first vents 2b are used. It is also possible to use a porous member or the like.
As a result, the positive pressure fluid 5F penetrates not only the outer gap E1 but also the inner gap E3 through the positive pressure introduction path 5c, the inner passage of the inner annular member 24, and the through hole D1, and a plurality of positive pressure fluids 5F enter through the through gap E2. Since the fluid flows through the through gaps E2, a repulsive force is generated that pushes the first plate-shaped member B and the second plate-shaped member C apart from each other.

このような本発明の実施形態に係る分離装置Ａ及び分離方法によると、凹凸接合された第一板状部材Ｂ及び第二板状部材Ｃを加圧室１に収容することにより、第一板状部材Ｂ又は第二板状部材Ｃのいずれか一方の裏側（図示例では第一背面Ｂ２側）が、離間吸収部２の変位部位２ａに当接して、チャンバー１０の第一室内面１０ａに対し厚み方向（Ｚ方向）へ変形又は移動可能となる。第一板状部材Ｂ又は第二板状部材Ｃの他方の裏側（図示例では第二背面Ｃ２側）は、保持部３の固定部位３ａに当接して、チャンバー１０の第二室内面１０ｂに対し厚み方向（Ｚ方向）へ移動不能となる。
この収容状態で加圧室１に陽圧流体５Ｆを供給ことにより、加圧室１の内圧が上昇して第一減圧空間部４の内圧よりも高くなる。このため、離間吸収部２の変位部位２ａとともに第一板状部材Ｂ又は第二板状部材Ｃのいずれか一方（図示例では第一板状部材Ｂ）が、第一減圧空間部４に向け移動する。 これにより、第一板状部材Ｂ又は第二板状部材Ｃのいずれか一方（図示例では第一板状部材Ｂ）が、他方（図示例では第二板状部材Ｃ）から引き剥がされる。
したがって、第一板状部材Ｂと第二板状部材Ｃの凹凸接合部（第一凹凸部Ｂ１，第二凹凸部Ｃ１）を形状変形（倒れ）させずに剥離することができる。
その結果、被成形物に転写した凹凸パターンから型の凹凸パターンを斜めに引き抜く従来のものに比べ、凹凸接合部（第一凹凸部Ｂ１，第二凹凸部Ｃ１）の突出量が長くなっても、剥離に伴う形状変形を防止できる。
このため、ナノインプリントを含むインプリント成形などに用いられる場合には、凹凸接合部（第一凹凸部Ｂ１，第二凹凸部Ｃ１）の凹凸パターンが破損ぜす、高精度な凹凸パターンを作製できる。
また、並列配置された複数のマイクロＬＥＤなどの微小素子を粘着チャックから剥離して微小素子の受け渡しを行う搬送装置などの場合には、微小素子が破損せず、高精度な受け渡しを行える。According to the separation device A and the separation method according to the embodiment of the present invention, the first plate-shaped member B and the second plate-shaped member C which are unevenly joined are housed in the pressurizing chamber 1. The back side of either the shaped member B or the second plate-shaped member C (the first back surface B2 side in the illustrated example) abuts on the displacement portion 2a of the separation absorbing portion 2 and comes into contact with the first chamber surface 10a of the chamber 10. On the other hand, it can be deformed or moved in the thickness direction (Z direction). The other back side of the first plate-shaped member B or the second plate-shaped member C (the second back surface C2 side in the illustrated example) abuts on the fixing portion 3a of the holding portion 3 and is brought into contact with the second chamber surface 10b of the chamber 10. On the other hand, it becomes immovable in the thickness direction (Z direction).
By supplying the positive pressure fluid 5F to the pressurizing chamber 1 in this accommodation state, the internal pressure of the pressurizing chamber 1 rises and becomes higher than the internal pressure of the first decompression space portion 4. Therefore, either one of the first plate-shaped member B or the second plate-shaped member C (the first plate-shaped member B in the illustrated example) is directed toward the first decompression space portion 4 together with the displacement portion 2a of the separation absorbing portion 2. Moving. As a result, either one of the first plate-shaped member B and the second plate-shaped member C (first plate-shaped member B in the illustrated example) is peeled off from the other (second plate-shaped member C in the illustrated example).
Therefore, the concavo-convex joints (first concavo-convex portion B1, second concavo-convex portion C1) of the first plate-shaped member B and the second plate-shaped member C can be peeled off without deforming (falling).
As a result, even if the amount of protrusion of the concavo-convex joint portion (first concavo-convex portion B1, second concavo-convex portion C1) is longer than that of the conventional one in which the concavo-convex pattern of the mold is diagonally pulled out from the concavo-convex pattern transferred to the object to be molded. , It is possible to prevent shape deformation due to peeling.
Therefore, when it is used for imprint molding including nanoimprint, it is possible to produce a highly accurate uneven pattern in which the uneven pattern of the concave-convex joint portion (first uneven portion B1, second uneven portion C1) is damaged.
Further, in the case of a transfer device or the like in which micro elements such as a plurality of micro LEDs arranged in parallel are peeled off from an adhesive chuck to deliver the micro elements, the micro elements are not damaged and high-precision delivery can be performed.

特に、第一減圧空間部４の内圧を下降させる第一負圧調整部６を備えることが好ましい。
この場合には、加圧室１の内圧上昇と同時に、第一負圧調整部６で第一減圧空間部４の内圧を下降させることにより、加圧室１の内圧と第一減圧空間部４の内圧との圧力差が更に大きくなる。
このため、離間吸収部２を第一減圧空間部４に向け引き寄せる引力が増大する。
したがって、互いに凹凸接合された第一板状部材Ｂと第二板状部材Ｃの凹凸接合部（第一凹凸部Ｂ１，第二凹凸部Ｃ１）をスムーズに剥離することができる。
その結果、剥離能力の向上が図れる。
さらに、正圧調整部５（給気用駆動源や正圧用制御弁５ｂ）又は第一負圧調整部６（第一排気用駆動源や第一負圧用制御弁６ｂ）のいずれか一方若しくは両方の作動制御により、加圧室１の内圧と第一減圧空間部４の内圧を相対的に段階的調整した場合には、凹凸接合部（第一凹凸部Ｂ１，第二凹凸部Ｃ１）をよりスムーズに剥離できる。
また、加圧室１の内圧と第一減圧空間部４の内圧との圧力差で、離間吸収部２の変位部位２ａに対して、第一板状部材Ｂ又は第二板状部材Ｃのいずれか一方の裏側（図示例では第一背面Ｂ２側）が真空吸着することが可能になる。これにより、加圧室１の内圧と第一減圧空間部４の内圧との圧力差で、離間吸収部２の変位部位２ａとともに第一減圧空間部４に向け移動した第一板状部材Ｂ又は第二板状部材Ｃのいずれか一方を吸着保持できる。In particular, it is preferable to include a first negative pressure adjusting portion 6 for lowering the internal pressure of the first decompression space portion 4.
In this case, at the same time as the internal pressure of the pressurizing chamber 1 rises, the internal pressure of the first decompression space portion 4 is lowered by the first negative pressure adjusting unit 6, so that the internal pressure of the pressurizing chamber 1 and the first decompression space portion 4 The pressure difference from the internal pressure of is further increased.
Therefore, the attractive force that attracts the separated absorption portion 2 toward the first decompression space portion 4 increases.
Therefore, the concavo-convex joints (first concavo-convex portion B1, second concavo-convex portion C1) of the first plate-shaped member B and the second concavo-convex member C that are concavo-convex-bonded to each other can be smoothly peeled off.
As a result, the peeling ability can be improved.
Further, either or both of the positive pressure adjusting unit 5 (air supply drive source and positive pressure control valve 5b) or the first negative pressure adjusting unit 6 (first exhaust drive source and first negative pressure control valve 6b). When the internal pressure of the pressurizing chamber 1 and the internal pressure of the first decompression space 4 are relatively stepwise adjusted by the operation control of the above, the uneven joints (first uneven portion B1, second uneven portion C1) are twisted. Can be peeled off smoothly.
Further, the pressure difference between the internal pressure of the pressurizing chamber 1 and the internal pressure of the first decompression space portion 4 causes either the first plate-shaped member B or the second plate-shaped member C with respect to the displacement portion 2a of the separated absorption portion 2. One back side (first back surface B2 side in the illustrated example) can be vacuum-sucked. As a result, due to the pressure difference between the internal pressure of the pressurizing chamber 1 and the internal pressure of the first decompression space portion 4, the first plate-shaped member B or the first plate-shaped member B that has moved toward the first decompression space portion 4 together with the displacement portion 2a of the separation absorption portion 2. Either one of the second plate-shaped members C can be sucked and held.

さらに、チャンバー１０の第二室内面１０ｂ及び保持部３の間に形成される気密状の第二減圧空間部７と、第二減圧空間部７の内圧を下降させる第二負圧調整部８と、を備えることが好ましい。
この場合には、加圧室１の内圧上昇と同時、又は加圧室１の内圧上昇開始前から、第一減圧空間部４の内圧を下降させることで、加圧室１の内圧と第一減圧空間部４の内圧との間に圧力差が生じる。
このため、保持部３の固定部位３ａに対して第一板状部材Ｂ又は第二板状部材Ｃの他方の裏側（図示例では第二背面Ｃ２側）が圧力差で真空吸着される。これにより、第一板状部材Ｂ又は第二板状部材Ｃの他方が移動不能に吸着保持される。
したがって、保持部３の固定部位３ａに第一板状部材Ｂ又は第二板状部材Ｃの他方を確実に固定することができる。
その結果、互いに凹凸接合された第一板状部材Ｂと第二板状部材Ｃの凹凸接合部（第一凹凸部Ｂ１，第二凹凸部Ｃ１）を確実に剥離できる。Further, an airtight second decompression space 7 formed between the second chamber surface 10b and the holding portion 3 of the chamber 10, and a second negative pressure adjusting portion 8 for lowering the internal pressure of the second decompression space 7. , Are preferably provided.
In this case, the internal pressure of the pressurizing chamber 1 and the first are increased by lowering the internal pressure of the first decompression space 4 at the same time as the internal pressure of the pressurizing chamber 1 rises or before the start of the internal pressure rise of the pressurizing chamber 1. A pressure difference is generated between the pressure difference and the internal pressure of the decompression space portion 4.
Therefore, the other back side (the second back surface C2 side in the illustrated example) of the first plate-shaped member B or the second plate-shaped member C is vacuum-sucked to the fixed portion 3a of the holding portion 3 by a pressure difference. As a result, the other of the first plate-shaped member B or the second plate-shaped member C is immovably sucked and held.
Therefore, the other of the first plate-shaped member B or the second plate-shaped member C can be securely fixed to the fixing portion 3a of the holding portion 3.
As a result, the concavo-convex joints (first concavo-convex portion B1, second concavo-convex portion C1) of the first plate-shaped member B and the second concavo-convex member C that are concavo-convex-bonded to each other can be reliably peeled off.

また、第一板状部材Ｂの第一背面Ｂ２に第一保持板Ｂ３が取り付けられ、第二板状部材Ｃの第二背面Ｃ２に第二保持板Ｃ３が取り付けられ、第一保持板Ｂ３と第二保持板Ｃ３の間には、陽圧流体５Ｆが侵入可能な隙間Ｅを有することが好ましい。
この場合には、加圧室１と第一減圧空間部４の圧力差により、離間吸収部２を第一減圧空間部４に向け引き寄せる引力が発生するのと同時に、陽圧流体５Ｆが隙間Ｅに侵入して、第一板状部材Ｂと第二板状部材Ｃの凹凸接合部（第一凹凸部Ｂ１，第二凹凸部Ｃ１）を相対的に押し離す斥力が発生する。
したがって、引力と斥力が相まって凹凸接合部（第一凹凸部Ｂ１，第二凹凸部Ｃ１）をよりスムーズに剥離することができる。
その結果、剥離能力の向上が更なる図れる。Further, the first holding plate B3 is attached to the first back surface B2 of the first plate-shaped member B, the second holding plate C3 is attached to the second back surface C2 of the second plate-shaped member C, and the first holding plate B3 and It is preferable that the second holding plate C3 has a gap E through which the positive pressure fluid 5F can enter.
In this case, the pressure difference between the pressurizing chamber 1 and the first decompression space 4 generates an attractive force that attracts the separation absorption section 2 toward the first decompression space 4, and at the same time, the positive pressure fluid 5F creates a gap E. A repulsive force is generated that relatively pushes the concavo-convex joints (first concavo-convex portion B1, second concavo-convex portion C1) between the first plate-shaped member B and the second plate-shaped member C apart.
Therefore, the attractive force and the repulsive force are combined to enable smoother peeling of the uneven joint portion (first uneven portion B1, second uneven portion C1).
As a result, the peeling ability can be further improved.

なお、前示の実施形態（第一実施形態〜第四実施形態）では、第一板状部材Ｂ及び第二板状部材Ｃが、ナノインプリントを含むインプリントの成形型と成形基板である場合を説明したが、これに限定されず、微小素子の受け渡しを行う搬送装置として用いてもよい。
この場合には、第一保持板Ｂ３から突出状に配置される複数の第一板状部材Ｂ、又は第二保持板Ｃ３から突出状に配置される複数の第二板状部材Ｃのいずれか一方が、並列配置された微小素子であり、他方が複数の第一板状部材Ｂ又は第二板状部材Ｃと凹凸接合する粘着チャックとなる。
このような場合においても、前述した第一実施形態〜第四実施形態と同様な作用や利点が得られる。In the above-described embodiment (first to fourth embodiments), the case where the first plate-shaped member B and the second plate-shaped member C are an imprint molding die and a molding substrate including nanoimprint is used. As described above, the present invention is not limited to this, and the microelements may be used as a transfer device for delivery.
In this case, either a plurality of first plate-shaped members B projecting from the first holding plate B3 or a plurality of second plate-shaped members C projecting from the second holding plate C3. One is a micro element arranged in parallel, and the other is an adhesive chuck that is unevenly joined to a plurality of first plate-shaped members B or second plate-shaped members C.
Even in such a case, the same operations and advantages as those of the first to fourth embodiments described above can be obtained.

Ａ 分離装置 １ 加圧室
２ 離間吸収部 ２ａ 変位部位
３ 保持部 ３ａ 固定部位
４ 第一減圧空間部 ５ 正圧調整部
５Ｆ 陽圧流体 ６ 第一負圧調整部
７ 第二減圧空間部 ８ 第二負圧調整部
９ 制御部 １０ａ 第一室内面
１０ｂ 第二室内面
Ｂ 第一板状部材 Ｂ１ 凹凸接合部（第一凹凸部）
Ｂ２ 第一凹凸部の裏側，第一背面 Ｂ３ 第一保持板
Ｃ 第二板状部材 Ｃ１ 凹凸接合部（第二凹凸部）
Ｃ２ 第二凹凸部の裏側，第二背面 Ｃ３ 第二保持板
Ｅ 隙間A Separator 1 Pressurizing chamber 2 Separation absorbing part 2a Displacement part 3 Holding part 3a Fixed part 4 First decompression space part 5 Positive pressure adjustment part 5F Positive pressure fluid 6 First negative pressure adjustment part 7 Second decompression space part 8th 2 Negative pressure adjustment unit 9 Control unit 10a First chamber surface 10b Second chamber surface B First plate-like member B1 Concavo-convex joint (first concavo-convex portion)
B2 Back side of the first uneven part, first back side B3 First holding plate C Second plate-like member C1 Concavo-convex joint (second uneven part)
C2 Back side of the second uneven part, second back surface C3 Second holding plate E Gap

Claims (5)

互いに凹凸状に接合した第一板状部材と第二板状部材の凹凸接合部を剥がす分離装置であって、
チャンバーの内部に形成されて、凹凸接合した前記第一板状部材及び前記第二板状部材が出し入れ自在に収容される加圧室と、
前記加圧室に収容された前記第一板状部材又は前記第二板状部材のいずれか一方において前記凹凸接合部の裏側と、前記チャンバーの第一室内面との間に設けられる離間吸収部と、
前記加圧室に収容された前記第一板状部材又は前記第二板状部材の他方において前記凹凸接合部の裏側と、前記チャンバーの第二室内面との間に設けられる保持部と、
前記チャンバーの前記第一室内面及び前記離間吸収部の間に前記加圧室と分離して気密状に設けられる第一減圧空間部と、
前記加圧室に陽圧流体を供給して内圧上昇させる正圧調整部と、
前記正圧調整部を作動制御する制御部と、を備え、
前記離間吸収部は、前記チャンバーの前記第一室内面に対して、前記第一板状部材又は前記第二板状部材のいずれか一方の前記裏側とその厚み方向へ変形又は移動自在に当接する変位部位を有し、
前記保持部は、前記チャンバーの前記第二室内面に対して、前記第一板状部材又は前記第二板状部材の他方の前記裏側と前記厚み方向へ移動不能に当接する固定部位を有し、
前記制御部は、前記正圧調整部の作動による前記加圧室の内圧上昇で前記第一減圧空間部との間に圧力差が生じて、前記離間吸収部の前記変位部位とともに前記第一板状部材又は前記第二板状部材のいずれか一方が、前記第一減圧空間部に向け移動するように制御することを特徴とする分離装置。It is a separation device that peels off the uneven joints of the first plate-shaped member and the second plate-shaped member that are joined to each other in an uneven shape.
A pressure chamber formed inside the chamber and accommodating the first plate-shaped member and the second plate-shaped member that are concavo-convex-bonded so as to be freely taken in and out.
A separated absorption portion provided between the back side of the uneven joint portion and the first chamber surface of the chamber in either the first plate-shaped member or the second plate-shaped member housed in the pressurizing chamber. When,
A holding portion provided between the back side of the concavo-convex joint portion and the second chamber surface of the chamber on the other side of the first plate-shaped member or the second plate-shaped member housed in the pressurizing chamber.
A first decompression space portion that is separated from the pressurizing chamber and airtightly provided between the first chamber surface and the separated absorption portion of the chamber.
A positive pressure adjusting unit that supplies a positive pressure fluid to the pressurizing chamber to raise the internal pressure,
A control unit that controls the operation of the positive pressure adjusting unit is provided.
The separation absorbing portion abuts on the first chamber surface of the chamber so as to be deformably or movable in the thickness direction with the back side of either the first plate-shaped member or the second plate-shaped member. Has a displacement site,
The holding portion has a fixing portion that is immovably contacted with the first plate-shaped member or the other back side of the second plate-shaped member in the thickness direction with respect to the second chamber surface of the chamber. ,
In the control unit, a pressure difference is generated between the control unit and the first decompression space portion due to an increase in the internal pressure of the pressurizing chamber due to the operation of the positive pressure adjusting unit, and the first plate together with the displacement portion of the separation absorption portion. A separation device characterized in that either one of the shaped member or the second plate-shaped member is controlled to move toward the first decompression space portion. 前記第一減圧空間部の内圧を下降させる第一負圧調整部を備えることを特徴とする請求項１記載の分離装置。 The separation device according to claim 1, further comprising a first negative pressure adjusting unit for lowering the internal pressure of the first decompression space portion. 前記チャンバーの前記第二室内面及び前記保持部の間に形成される気密状の第二減圧空間部と、前記第二減圧空間部の内圧を下降させる第二負圧調整部と、を備えることを特徴とする請求項１又は２記載の分離装置。 The chamber is provided with an airtight second decompression space formed between the second chamber surface and the holding portion, and a second negative pressure adjusting portion for lowering the internal pressure of the second decompression space. The separation device according to claim 1 or 2. 前記第一板状部材の第一背面に第一保持板が取り付けられ、前記第二板状部材の第二背面に第二保持板が取り付けられ、前記第一保持板と前記第二保持板の間には、前記陽圧流体が侵入可能な隙間を有することを特徴とする請求項１、２又は３記載の分離装置。 A first holding plate is attached to the first back surface of the first plate-shaped member, a second holding plate is attached to the second back surface of the second plate-shaped member, and between the first holding plate and the second holding plate. The separation device according to claim 1, 2 or 3, wherein the positive pressure fluid has a gap through which the positive pressure fluid can enter. 互いに凹凸状に接合した第一板状部材と第二板状部材の凹凸接合部を剥がす分離方法であって、
チャンバーの内部に形成された加圧室に、凹凸接合した前記第一板状部材及び前記第二板状部材を入れる搬入工程と、
前記加圧室に前記第一板状部材及び前記第二板状部材を位置決めする保持工程と、
前記第一板状部材及び前記第二板状部材が保持された前記加圧室に陽圧流体を供給して内圧上昇させる加圧工程と、
内圧上昇した前記加圧室で前記第一板状部材と前記第二板状部材の前記凹凸接合部を剥がす剥離工程と、
前記凹凸接合部が剥がされた前記第一板状部材と前記第二板状部材を前記加圧室から取り出す搬出工程と、を含み、
前記保持工程では、前記第一板状部材又は前記第二板状部材のいずれか一方において前記凹凸接合部の裏側と、前記チャンバーの第一室内面との間に設けられた離間吸収部の変位部位に対して、前記第一板状部材又は前記第二板状部材のいずれか一方の前記裏側を、その厚み方向へ当接させるとともに、前記第一板状部材又は前記第二板状部材の他方において前記凹凸接合部の裏側と、前記チャンバーの第二室内面との間に設けられた保持部の固定部位に対して、前記第一板状部材又は前記第二板状部材の他方の前記裏側を前記厚み方向へ当接させ、
前記剥離工程では、前記陽圧流体の供給で内圧上昇した前記加圧室と、前記チャンバーの前記第一室内面及び前記離間吸収部の間に前記加圧室と分離して気密状に設けられる第一減圧空間部との間に圧力差を生じさせて、前記離間吸収部の前記変位部位とともに前記第一板状部材又は前記第二板状部材のいずれか一方が、前記第一減圧空間部に向け移動することを特徴とする分離方法。It is a separation method that peels off the uneven joints of the first plate-shaped member and the second plate-shaped member that are joined to each other in an uneven shape.
A carry-in step of inserting the first plate-shaped member and the second plate-shaped member, which are concave-convex-bonded, into the pressurizing chamber formed inside the chamber.
A holding step of positioning the first plate-shaped member and the second plate-shaped member in the pressurizing chamber, and
A pressurizing step of supplying a positive pressure fluid to the pressurizing chamber in which the first plate-shaped member and the second plate-shaped member are held to increase the internal pressure.
A peeling step of peeling the uneven joint portion between the first plate-shaped member and the second plate-shaped member in the pressurizing chamber where the internal pressure has increased.
The first plate-shaped member from which the uneven joint portion has been peeled off and the carry-out step of taking out the second plate-shaped member from the pressurizing chamber are included.
In the holding step, displacement of the separation absorbing portion provided between the back side of the uneven joint portion and the first chamber surface of the chamber in either the first plate-shaped member or the second plate-shaped member. The back side of either the first plate-shaped member or the second plate-shaped member is brought into contact with the portion in the thickness direction thereof, and the first plate-shaped member or the second plate-shaped member On the other hand, with respect to the fixing portion of the holding portion provided between the back side of the uneven joint portion and the second chamber surface of the chamber, the first plate-shaped member or the other said of the second plate-shaped member. The back side is brought into contact with the thickness direction,
In the peeling step, the pressurizing chamber whose internal pressure is increased by the supply of the positive pressure fluid is separated from the pressurizing chamber and airtightly provided between the first chamber surface of the chamber and the separated absorption portion. A pressure difference is generated between the first decompression space portion and the first plate-shaped member or the second plate-shaped member together with the displacement portion of the separation absorption portion. A separation method characterized by moving towards.
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