JP6905557B2 - 多段冷却を有する装置 - Google Patents
多段冷却を有する装置 Download PDFInfo
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- JP6905557B2 JP6905557B2 JP2019140475A JP2019140475A JP6905557B2 JP 6905557 B2 JP6905557 B2 JP 6905557B2 JP 2019140475 A JP2019140475 A JP 2019140475A JP 2019140475 A JP2019140475 A JP 2019140475A JP 6905557 B2 JP6905557 B2 JP 6905557B2
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D1/00—Heat-exchange apparatus having stationary conduit assemblies for one heat-exchange medium only, the media being in contact with different sides of the conduit wall, in which the other heat-exchange medium is a large body of fluid, e.g. domestic or motor car radiators
- F28D1/02—Heat-exchange apparatus having stationary conduit assemblies for one heat-exchange medium only, the media being in contact with different sides of the conduit wall, in which the other heat-exchange medium is a large body of fluid, e.g. domestic or motor car radiators with heat-exchange conduits immersed in the body of fluid
- F28D1/04—Heat-exchange apparatus having stationary conduit assemblies for one heat-exchange medium only, the media being in contact with different sides of the conduit wall, in which the other heat-exchange medium is a large body of fluid, e.g. domestic or motor car radiators with heat-exchange conduits immersed in the body of fluid with tubular conduits
- F28D1/053—Heat-exchange apparatus having stationary conduit assemblies for one heat-exchange medium only, the media being in contact with different sides of the conduit wall, in which the other heat-exchange medium is a large body of fluid, e.g. domestic or motor car radiators with heat-exchange conduits immersed in the body of fluid with tubular conduits the conduits being straight
- F28D1/0535—Heat-exchange apparatus having stationary conduit assemblies for one heat-exchange medium only, the media being in contact with different sides of the conduit wall, in which the other heat-exchange medium is a large body of fluid, e.g. domestic or motor car radiators with heat-exchange conduits immersed in the body of fluid with tubular conduits the conduits being straight the conduits having a non-circular cross-section
- F28D1/05366—Assemblies of conduits connected to common headers, e.g. core type radiators
- F28D1/05391—Assemblies of conduits connected to common headers, e.g. core type radiators with multiple rows of conduits or with multi-channel conduits combined with a particular flow pattern, e.g. multi-row multi-stage radiators
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- F28D7/00—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
- F28D7/08—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being otherwise bent, e.g. in a serpentine or zig-zag
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D7/00—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
- F28D7/16—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being arranged in parallel spaced relation
- F28D7/1615—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being arranged in parallel spaced relation the conduits being inside a casing and extending at an angle to the longitudinal axis of the casing; the conduits crossing the conduit for the other heat exchange medium
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D7/00—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
- F28D7/16—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being arranged in parallel spaced relation
- F28D7/1684—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being arranged in parallel spaced relation the conduits having a non-circular cross-section
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F21/00—Constructions of heat-exchange apparatus characterised by the selection of particular materials
- F28F21/08—Constructions of heat-exchange apparatus characterised by the selection of particular materials of metal
- F28F21/081—Heat exchange elements made from metals or metal alloys
- F28F21/082—Heat exchange elements made from metals or metal alloys from steel or ferrous alloys
- F28F21/083—Heat exchange elements made from metals or metal alloys from steel or ferrous alloys from stainless steel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32357—Generation remote from the workpiece, e.g. down-stream
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32816—Pressure
- H01J37/32834—Exhausting
- H01J37/32844—Treating effluent gases
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32853—Hygiene
- H01J37/32862—In situ cleaning of vessels and/or internal parts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67248—Temperature monitoring
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/002—Cooling arrangements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/18—Vacuum control means
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
- Y02C20/00—Capture or disposal of greenhouse gases
- Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]
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- Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)
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Description
101 処理チャンバ
102 排除システム
104 プラズマ源
106 熱交換器
108 プロセス真空ポンプ
110 設備排気
112 チャンバ排気ポート
114 排気フォアライン
116 排気導管
117 導管
118 排気導管
120 遠隔プラズマ源
122 処理領域
124 第1のガス供給源
126 第2のガス供給源
128 第3のガス供給源
130 壁
132 場所
200 熱交換体
202 第1の端部
204 第2の端部
206 入口ポート
208 出口ポート
210 第1の取付けフランジ
212 熱交換面
213 熱交換領域
214 内壁
216 外壁
218 内部領域
220 外側領域
222 第2の取付けフランジ
224 中心軸
226 面
228 水入口
230 水出口
232 参照矢印
233 フィン構造
300 熱交換体
302 第1の端部
304 第2の端部
306 入口ポート
308 出口ポート
309 のぞき窓
309A クランプ
309B 窓
310 デフレクタ
310A 一体化リップ
311 第1の取付けフランジ
312 円錐形トレイ
313 熱交換領域
314 熱交換面
316 内壁
318 外壁
320 内部領域
322 外側領域
323 第2の取付けフランジ
326 中心軸
328 面
330 水入口
332 水出口
333 フィン構造
334 参照矢印
400 方法
Claims (15)
- 流動流体と熱を交換するように構成された熱交換器であって、
第1の取付けフランジであり、前記第1の取付けフランジの接続面を通って延びる中央開口を有し、前記接続面が第1の面と平行である、第1の取付けフランジと、
第2の取付けフランジであり、前記第2の取付けフランジの接続面を通って延びる中央開口を有し、第1の方向において前記第1の取付けフランジから距離を置いて配設される、第2の取付けフランジと、
前記熱交換器の内部領域を囲むように構成された外壁であり、前記外壁および前記内部領域が、前記第1の取付けフランジと前記第2の取付けフランジとの間に配設される、外壁と、
前記内部領域内に配設された内壁であり、前記内壁が、前記内部領域の熱交換領域を前記内部領域の外側領域から隔離するように位置づけられ、前記外側領域が、前記内壁と前記外壁との間に形成された空間によって画定される、内壁と、
熱交換流体入口ポートおよび熱交換流体出口ポートであり、各々が前記外側領域と流体連結する、熱交換流体入口ポートおよび熱交換流体出口ポートと、
前記内壁内に配設された円錐形トレイであり、前記第1の取付けフランジの前記中央開口を通過する粒子を収集し、前記粒子が前記熱交換器に入るのを防止するように構成される、円錐形トレイと
を含む、熱交換器。 - 前記熱交換流体入口ポートの開口の面積が、水入口の面積と実質的に等しい、請求項1に記載の熱交換器。
- 前記外壁を通って延びる開口を有するのぞき窓であり、前記開口は、前記外壁の外にいるユーザが前記円錐形トレイの少なくとも一部分を前記のぞき窓を通して見ることができるように配向される、のぞき窓をさらに含む、請求項1に記載の熱交換器。
- 前記中央開口を通過するガスを偏向させるように構成されたデフレクタをさらに含む、請求項1に記載の熱交換器。
- 前記デフレクタが一体化リップを含む、請求項4に記載の熱交換器。
- 流動流体と熱を交換するように構成された熱交換器であって、
第1の面と平行な接続面と前記接続面を取って延びる中央開口とを有する第1の取付けフランジと、
接続面を有する第2の取付けフランジであり、第1の方向において前記第1の取付けフランジから距離を置いて配設される、第2の取付けフランジと、
前記第1の取付けフランジと前記第2の取付けフランジと間に配設され、前記第1の取付けフランジと前記第2の取付けフランジとに結合された熱交換体であり、前記熱交換体が、
前記熱交換体の内部領域を囲むように構成された外壁であり、前記内部領域が前記第1の面に実質的に垂直な中心軸を有する、外壁と、
前記内部領域内に配設された内壁であり、前記内壁が、前記内部領域の熱交換領域を前記内部領域の外側領域から隔離するように位置づけられた、内壁と、
前記内壁内に配設された円錐形トレイであり、前記第1の取付けフランジの前記中央開口を通過する粒子を収集し、前記粒子が前記熱交換器に入るのを防止するように構成される、円錐形トレイと
を含み、
前記内壁が、前記熱交換領域に隣接する熱交換面を有し、
前記熱交換面の少なくとも一部分が、前記中心軸と平行な方向に変化する湾曲を有し、
前記熱交換面の任意の点における前記湾曲の接線が、中心軸に対して、60度以下の角度を有する、熱交換器。 - 前記外側領域と流体連結する開口を有し、前記第1の取付けフランジよりも前記第2の取付けフランジに近い位置に配設される熱交換流体入口ポートをさらに含む、請求項6に記載の熱交換器。
- 前記外側領域と流体連結する開口を有し、前記第2の取付けフランジよりも前記第1の取付けフランジに近い位置に配設される熱交換流体出口ポートをさらに含む、請求項7に記載の熱交換器。
- 前記熱交換面の任意の点における前記湾曲の前記接線が、前記中心軸に対して、45度以下の角度を有する、請求項6に記載の熱交換器。
- 前記熱交換面の任意の点における前記湾曲の前記接線が、前記中心軸に対して、30度以下の角度を有する、請求項6に記載の熱交換器。
- 流動流体と熱を交換するように構成された熱交換器を形成する方法であって、
中央開口を有する第1の取付けフランジを形成することであり、熱伝導性材料の層を第1の表面上に順次堆積させることを含む、第1の取付けフランジを形成することと、
前記第1の取付けフランジ上に熱交換体を形成することであり、前記熱交換体が、第1の表面に垂直な方向に延びる熱交換領域を囲む熱交換セクションを有し、
前記熱交換体を形成することが、前記形成された第1の取付けフランジの表面上に前記熱伝導性材料の層を順次堆積させることを含み、
前記熱交換セクション内に配設されている前記順次堆積された層が、各々、外壁の少なくとも一部分と、内壁の少なくとも一部分とを含み、
前記外壁が前記熱交換体の内部領域を囲むように構成され、前記内部領域が前記第1の表面に実質的に垂直な中心軸を有し、
前記内壁が前記内部領域内に配設され、前記熱交換領域を前記内部領域の外側領域から隔離するように位置づけられ、前記外側領域が前記内壁と前記外壁との間に形成された空間によって画定され、
前記内壁が、前記熱交換領域に隣接する熱交換面を有し、
前記熱交換面が、前記中心軸と平行な方向に変化する湾曲を有し、
前記熱交換面の任意の点における前記湾曲の接線が、中心軸に対して、60度以下の角度を有する、熱交換体を形成することと、
前記第1の取付けフランジの前記中央開口を通過する粒子を収集し、前記粒子が前記熱交換器に入るのを防止する円錐形トレイを前記内壁内に形成することと、
前記熱交換体上に第2の取付けフランジを形成することであり、前記第2の取付けフランジが、前記熱交換体上に熱伝導性材料の層を順次堆積させることを含む、第2の取付けフランジを形成することと
を含む、方法。 - 前記熱交換体が150mmと200mmとの間の直径を有する、請求項11に記載の方法。
- 前記第1の取付けフランジと前記第2の取付けフランジとの間の距離が、200mmと250mmとの間にある、請求項11に記載の方法。
- 前記第2の取付けフランジの方に配置された熱交換流体入口ポートと、前記第1の取付けフランジの方に配置された熱交換流体出口ポートとをさらに含む、請求項11に記載の方法。
- 前記熱交換器が、ステンレス鋼材料を使用した3D印刷プロセスによって形成される、請求項11に記載の方法。
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