JP6901261B2 - レーザー装置 - Google Patents
レーザー装置 Download PDFInfo
- Publication number
- JP6901261B2 JP6901261B2 JP2016253186A JP2016253186A JP6901261B2 JP 6901261 B2 JP6901261 B2 JP 6901261B2 JP 2016253186 A JP2016253186 A JP 2016253186A JP 2016253186 A JP2016253186 A JP 2016253186A JP 6901261 B2 JP6901261 B2 JP 6901261B2
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- laser beam
- wavelength
- laser
- wavelength conversion
- optical fiber
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- 238000006243 chemical reaction Methods 0.000 claims description 50
- 239000013078 crystal Substances 0.000 claims description 44
- 239000013307 optical fiber Substances 0.000 claims description 26
- 230000001678 irradiating effect Effects 0.000 claims description 16
- 230000003287 optical effect Effects 0.000 claims description 16
- 238000005259 measurement Methods 0.000 claims description 8
- 238000002834 transmittance Methods 0.000 claims description 7
- 239000012141 concentrate Substances 0.000 claims description 2
- 238000012545 processing Methods 0.000 description 21
- 238000007493 shaping process Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 4
- 238000013459 approach Methods 0.000 description 3
- 239000002390 adhesive tape Substances 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910009372 YVO4 Inorganic materials 0.000 description 1
- 238000002679 ablation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/362—Laser etching
- B23K26/364—Laser etching for making a groove or trench, e.g. for scribing a break initiation groove
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/083—Devices involving movement of the workpiece in at least one axial direction
- B23K26/0853—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
- B23K26/402—Removing material taking account of the properties of the material involved involving non-metallic material, e.g. isolators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
- B23K2103/56—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26 semiconducting
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Laser Beam Processing (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Lasers (AREA)
Description
レーザー発振器 :1064nm(Nd:YAGレーザー)
平均出力 :1〜10W
繰り返し周波数 :1kHz〜1MHz
パルス幅 :100fs〜100ns
10:ウエーハ
20:レーザー装置
22:保持手段
23:移動手段
24:レーザー光線照射手段
24a:集光器
24b:レーザー発振器
24c:波長変換手段
24d:ハーモニックセパレータ
24e:集光レンズ
24f:光強度分布整形手段
24g:コリメートレンズ
24h:分光器
24i:出力測定手段
24j:透過率調整手段
34:保持テーブル
40:X方向移動手段
42:Y方向移動手段
FB:光ファイバー
Claims (4)
- 被加工物を保持する保持手段と、該保持手段に保持された被加工物にレーザー光線を照射するレーザー光線照射手段と、から少なくとも構成されたレーザー装置であって、
該レーザー光線照射手段は、レーザー発振器と、該レーザー発振器が発振したレーザー光線の波長を、非線形結晶を用いて変換する波長変換手段と、該波長変換手段によって波長が変換されたレーザー光線を該保持手段に保持された被加工物に集光する集光器と、該波長変換手段と該集光器との間に配設された光ファイバーと、を少なくとも含み構成され、
該光ファイバーは、該波長変換手段を通過して乱れたレーザー光線のガウシアン分布を整形するレーザー装置。 - 該波長変換手段と該光ファイバーとの間にハーモニックセパレータが配設され、該ハーモニックセパレータは、該波長変換手段により所定の波長に波長変換されたレーザー光線から、該所定の波長以外の波長のレーザー光線を排除する請求項1に記載のレーザー装置。
- 該光ファイバーと該集光器との間に配設され、出力測定経路にレーザー光線の一部を導く分光器と、該出力測定経路に配設された出力測定手段と、
該分光器と該集光器との間に配設された透過率調整手段と、
を備え、
該保持手段に保持された被加工物に照射するレーザー光線の出力を該透過率調整手段で調整する請求項1に記載のレーザー装置。 - 該波長変換手段を構成する波長変換結晶を、該レーザー発振器が発振したレーザー光線の光路から適宜ずらし該波長変換結晶の寿命を延ばす構成を備えた請求項1に記載のレーザー装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016253186A JP6901261B2 (ja) | 2016-12-27 | 2016-12-27 | レーザー装置 |
TW106138569A TWI746692B (zh) | 2016-12-27 | 2017-11-08 | 雷射裝置 |
KR1020170159299A KR20180076293A (ko) | 2016-12-27 | 2017-11-27 | 레이저 장치 |
CN201711336717.3A CN108262565A (zh) | 2016-12-27 | 2017-12-14 | 激光装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016253186A JP6901261B2 (ja) | 2016-12-27 | 2016-12-27 | レーザー装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018103232A JP2018103232A (ja) | 2018-07-05 |
JP6901261B2 true JP6901261B2 (ja) | 2021-07-14 |
Family
ID=62771952
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016253186A Active JP6901261B2 (ja) | 2016-12-27 | 2016-12-27 | レーザー装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP6901261B2 (ja) |
KR (1) | KR20180076293A (ja) |
CN (1) | CN108262565A (ja) |
TW (1) | TWI746692B (ja) |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3935639B2 (ja) * | 1999-04-01 | 2007-06-27 | 松下電器産業株式会社 | レーザー接合方法及びその装置 |
JP3452057B2 (ja) * | 2001-12-21 | 2003-09-29 | 株式会社ニコン | レーザ光の高調波発生装置、及びそれを用いた露光装置、並びにレーザ光の高調波発生方法、及びそれを用いた露光方法、それを用いたデバイス製造方法 |
JP2005116729A (ja) * | 2003-10-07 | 2005-04-28 | Sharp Corp | レーザ加工装置およびレーザ加工方法 |
JP4348199B2 (ja) * | 2004-01-16 | 2009-10-21 | 日立ビアメカニクス株式会社 | レーザ加工方法およびレーザ加工装置 |
JP4567984B2 (ja) * | 2004-01-30 | 2010-10-27 | 株式会社 日立ディスプレイズ | 平面表示装置の製造装置 |
US7486705B2 (en) * | 2004-03-31 | 2009-02-03 | Imra America, Inc. | Femtosecond laser processing system with process parameters, controls and feedback |
JP2006317724A (ja) * | 2005-05-13 | 2006-11-24 | Nikon Corp | 波長変換光学系及びレーザ装置 |
JP2008060274A (ja) * | 2006-08-30 | 2008-03-13 | Sumitomo Heavy Ind Ltd | レーザ加工装置 |
CN101959637A (zh) * | 2008-03-27 | 2011-01-26 | 松下电器产业株式会社 | 印字装置及使用印字装置的印字方法 |
JP4647696B2 (ja) * | 2009-07-07 | 2011-03-09 | 株式会社フジクラ | ファイバレーザ装置 |
JP5585135B2 (ja) * | 2010-03-15 | 2014-09-10 | オムロン株式会社 | レーザ加工装置 |
US9470623B2 (en) * | 2011-02-28 | 2016-10-18 | Toshiba Mitsubishi-Electric Industrial Systems Corporation | Property measurement system for metal material |
WO2012161092A1 (ja) * | 2011-05-24 | 2012-11-29 | 住友電気工業株式会社 | 光源制御方法 |
JP2015028501A (ja) * | 2011-11-24 | 2015-02-12 | 住友電気工業株式会社 | 波長変換器およびレーザ装置 |
JP5964621B2 (ja) * | 2012-03-16 | 2016-08-03 | 株式会社ディスコ | レーザー加工装置 |
JP5595573B1 (ja) * | 2013-09-30 | 2014-09-24 | 三菱重工業株式会社 | レーザ加工装置及びレーザ加工方法 |
CN104795511A (zh) * | 2014-01-20 | 2015-07-22 | 上海微电子装备有限公司 | 一种激光封装设备及其封装方法 |
JP6305270B2 (ja) * | 2014-08-08 | 2018-04-04 | 株式会社キーエンス | レーザ加工装置及びワーキングディスタンス測定方法 |
US10008819B2 (en) * | 2014-09-16 | 2018-06-26 | Ipg Photonics Corporation | Broadband red light generator for RGB display |
JP6140750B2 (ja) * | 2015-03-24 | 2017-05-31 | 株式会社フジクラ | ファイバレーザ装置 |
JP6651768B2 (ja) * | 2015-09-28 | 2020-02-19 | 株式会社ニコン | パターン描画装置 |
CN105598582B (zh) * | 2016-02-04 | 2017-07-21 | 广东正业科技股份有限公司 | 一种激光能量调节装置及激光微加工设备 |
CN105772937B (zh) * | 2016-05-26 | 2017-09-12 | 中国科学院上海光学精密机械研究所 | 并排放置透明光学元件的激光预处理装置和方法 |
CN105953739B (zh) * | 2016-06-29 | 2020-07-14 | 武汉纺织大学 | 一种基于激光照射强度变化的横向形变测量***及方法 |
-
2016
- 2016-12-27 JP JP2016253186A patent/JP6901261B2/ja active Active
-
2017
- 2017-11-08 TW TW106138569A patent/TWI746692B/zh active
- 2017-11-27 KR KR1020170159299A patent/KR20180076293A/ko not_active Application Discontinuation
- 2017-12-14 CN CN201711336717.3A patent/CN108262565A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
TW201822928A (zh) | 2018-07-01 |
KR20180076293A (ko) | 2018-07-05 |
JP2018103232A (ja) | 2018-07-05 |
CN108262565A (zh) | 2018-07-10 |
TWI746692B (zh) | 2021-11-21 |
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