JP6869932B2 - Manual valve with erroneous operation prevention cover and erroneous operation prevention cover - Google Patents

Manual valve with erroneous operation prevention cover and erroneous operation prevention cover Download PDF

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JP6869932B2
JP6869932B2 JP2018164958A JP2018164958A JP6869932B2 JP 6869932 B2 JP6869932 B2 JP 6869932B2 JP 2018164958 A JP2018164958 A JP 2018164958A JP 2018164958 A JP2018164958 A JP 2018164958A JP 6869932 B2 JP6869932 B2 JP 6869932B2
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cover member
erroneous operation
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manual valve
prevention cover
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JP2020037970A (en
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信二郎 針山
信二郎 針山
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CKD Corp
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Description

本発明は、ハンドルの回転操作により弁体を弁座に当接または離間させる手動機構と、手動機構の動作を制限するロック機構と、を備える誤操作防止カバー付き手動弁および、誤操作防止カバー付き手動弁に装着される誤操作防止カバーに関するものである。 The present invention includes a manual valve with an erroneous operation prevention cover and a manual with an erroneous operation prevention cover, which comprises a manual mechanism for bringing the valve body into contact with or separated from the valve seat by rotating the handle, and a lock mechanism for limiting the operation of the manual mechanism. It relates to an erroneous operation prevention cover attached to the valve.

半導体製造工程においては、反応室に接続するラインへの流体供給を制御するため、手動弁が用いられる。近年、半導体製造装置の小型化や集積化が進み、各種流体制御機器（バルブやセンサ等）の相互間距離が小さくなる傾向がある。そのため、作業者があるラインの流体制御を行うため、手動弁やその他流体制御機器を操作したところ、隣のラインの手動弁に触れてしまい、意図せず弁開度を変更させてしまうという不具合が起こり得る。
このような不具合を防止すべく、例えば特許文献１に開示される誤操作を防止するロック機構が設けられた手動弁が用いられている。この手動弁は、ハンドルの回転操作によりシリンダ部材に挿通された操作ロッドを上下動させ、操作ロッドに連結された弁体の開弁および閉弁を行うものである。シリンダ部材とハンドルを通過するよう係止孔が設けられており、当該係止孔にロック部材（例えば南京錠）を挿通することで、ハンドルがシリンダ部材に対して相対的に移動しないようにして、ハンドルの操作を制限することができる。よって、作業者が意図せずに手動弁を操作してしまうことを防止できる。 In the semiconductor manufacturing process, a manual valve is used to control the fluid supply to the line connected to the reaction chamber. In recent years, semiconductor manufacturing equipment has become smaller and more integrated, and the distance between various fluid control devices (valves, sensors, etc.) tends to decrease. Therefore, when an operator operates a manual valve or other fluid control device to control the fluid in a certain line, he / she touches the manual valve in the adjacent line and unintentionally changes the valve opening. Can occur.
In order to prevent such a defect, for example, a manual valve provided with a lock mechanism for preventing erroneous operation disclosed in Patent Document 1 is used. This manual valve moves the operating rod inserted into the cylinder member up and down by rotating the handle to open and close the valve body connected to the operating rod. A locking hole is provided so as to pass through the cylinder member and the handle, and by inserting a locking member (for example, a padlock) through the locking hole, the handle is prevented from moving relative to the cylinder member. The operation of the handle can be restricted. Therefore, it is possible to prevent the operator from unintentionally operating the manual valve.

しかし、上記手動弁は、シリンダ部材に設けられた係止孔と、ハンドルに設けられた係止孔の位置が一致したときにのみ、南京錠を挿通することができ、ハンドル操作を制限することができるものである。つまり、所定のハンドル回転角度でのみハンドル操作を制限することができるものであり、弁開度を微調整し、必要な弁開度を維持した状態でハンドル操作を制限することができない。 However, the manual valve can insert the padlock only when the positions of the locking holes provided in the cylinder member and the locking holes provided in the handle match, and the handle operation can be restricted. It can be done. That is, the steering wheel operation can be restricted only at a predetermined steering wheel rotation angle, and the steering wheel operation cannot be restricted while the valve opening degree is finely adjusted and the required valve opening degree is maintained.

そこで、出願人は、特許文献２に開示されるようなロックリングによるロック機構を提案している。
ロックリングとは、ハンドルと弁本体の間において、操作ロッドの長手方向に沿って、ハンドル操作を可能とするロック解除位置と、ハンドル操作を制限するロック位置との間でスライド可能に保持されるものであり、ロックリングがロック解除位置にある状態で、必要な弁開度が得られるまでハンドルを回転させ、必要な弁開度が得られた段階でロックリングをロック位置に移動させれば、必要な弁開度を維持した状態でハンドル操作を制限することが可能である。 Therefore, the applicant has proposed a locking mechanism using a locking ring as disclosed in Patent Document 2.
The lock ring is slidably held between the handle and the valve body along the longitudinal direction of the operation rod between the unlock position that enables the handle operation and the lock position that restricts the handle operation. With the lock ring in the unlocked position, rotate the handle until the required valve opening is obtained, and then move the lock ring to the locked position when the required valve opening is obtained. , It is possible to limit the steering wheel operation while maintaining the required valve opening.

特開２０１０−２５５６６３号公報Japanese Unexamined Patent Publication No. 2010-255663 特開２００５−３４４９１８号公報Japanese Unexamined Patent Publication No. 2005-344918

しかしながら、上記先行技術には次のような問題点があった。
ロックリングによるロック機構を適用すると、ロックリングをロック位置に移動させることを忘れてしまうおそれがある。例えば、作業者があるラインの流体制御を行うため、手動弁やその他流体制御機器を操作しようとし、隣のラインの手動弁に触れてしまったとき、当該隣のラインの手動弁のロックリングがロック位置に移動されていなかった場合には、意図せず開弁または閉弁してしまうおそれがある。 However, the above prior art has the following problems.
Applying a lock mechanism with a lock ring may cause you to forget to move the lock ring to the lock position. For example, when an operator tries to operate a manual valve or other fluid control equipment to control fluid in a certain line and touches the manual valve in the next line, the lock ring of the manual valve in the next line is activated. If it has not been moved to the locked position, the valve may be opened or closed unintentionally.

さらには、ロックリングがロック位置に位置され、ハンドル操作が制限された状態であっても、ハンドルが外部に露出しているため、使用者がハンドル操作をしようとする可能性を排除できない。使用者が無理にハンドルを操作しようとすれば、ハンドルに加えられた回転力が、弁体に接続される操作ロッドに伝達され、弁開度に微妙なずれが生じるおそれがある。 Further, even when the lock ring is located at the locked position and the steering wheel operation is restricted, the possibility that the user tries to operate the steering wheel cannot be excluded because the steering wheel is exposed to the outside. If the user tries to operate the steering wheel forcibly, the rotational force applied to the steering wheel is transmitted to the operating rod connected to the valve body, which may cause a slight deviation in the valve opening degree.

本発明は、上記問題点を解決するためのものであり、ロックリングの操作し忘れを防止するとともに、使用者が不用意にハンドル操作を行うことを防止することができる手動弁を提供することを目的とする。 The present invention is for solving the above-mentioned problems, and provides a manual valve capable of preventing forgetting to operate the lock ring and preventing the user from inadvertently operating the steering wheel. With the goal.

上記課題を解決するために、本発明の誤操作防止カバー付き手動弁は、次のような構成を有している。
（１）ハンドルの回転操作により、弁本体の内部において弁体を弁座に当接または離間させる手動機構と、手動機構の動作を制限するロック機構を備える誤操作防止カバー付き手動弁において、ロック機構は、ロック機構を解除する第１位置と、ロック機構を有効にする第２位置と、の間を移動可能な操作部を備えること、誤操作防止カバー付き手動弁は、誤操作防止カバー付き手動弁に装着される中空状のカバー部材を備えること、カバー部材は、検知部を有する差込片を備えること、差込片がカバー部材に装着される際に、差込片は、検知部がカバー部材の中空内部において一定の進路を持って移動可能に保持されていること、カバー部材が誤操作防止カバー付き手動弁に装着された状態において、ハンドルと、操作部とは、カバー部材の中空内部に位置し、操作部が第１位置にあるときは、操作部が前記進路上に位置して、差込片をカバー部材に装着完了不能であること、操作部が第２位置にあるときは、操作部が前記進路上から退避して、差込片をカバー部材に装着完了可能であること、を特徴とする。 In order to solve the above problems, the manual valve with the erroneous operation prevention cover of the present invention has the following configuration.
(1) A lock mechanism in a manual valve with an erroneous operation prevention cover provided with a manual mechanism for bringing the valve body into contact with or separated from the valve seat inside the valve body by rotating the handle and a lock mechanism for limiting the operation of the manual mechanism. Is provided with an operation unit that can move between the first position for releasing the lock mechanism and the second position for enabling the lock mechanism. The manual valve with the erroneous operation prevention cover is replaced with the manual valve with the erroneous operation prevention cover. A hollow cover member to be mounted is provided, the cover member is provided with an insertion piece having a detection portion, and when the insertion piece is attached to the cover member, the detection portion of the insertion piece is a cover member. The handle and the operation part are located inside the hollow of the cover member when the cover member is mounted on the manual valve with the cover to prevent erroneous operation. However, when the operation unit is in the first position, the operation unit is located in the path and the insertion piece cannot be completely attached to the cover member, and when the operation unit is in the second position, the operation is performed. The portion is retracted from the path, and the insertion piece can be completely attached to the cover member.

（２）（１）に記載の誤操作防止カバー付き手動弁において、カバー部材は、差込片を挿入する挿通孔を備えること、差込片は、挿通孔に、挿入され、差込片がカバー部材の外部に突出する仮固定位置と、差込片がカバー部材の内部に収納される装着完了位置と、の間を移動可能に保持されていること、を特徴とする。
（３）（１）または（２）に記載の誤操作防止カバー付き手動弁において、手動機構は、一端に弁体が接続された操作ロッドを備え、操作ロッドの他端側にハンドルが配置されていること、手動機構は、ハンドルと弁体との間に、抜け止め部を備えること、カバー部材は、ハンドルの操作ロッドが延伸する側とは反対の方向から誤操作防止カバー付き手動弁に装着されること、差込片は、操作ロッドの長手方向と直交する方向からカバー部材に装着されること、カバー部材が誤操作防止カバー付き手動弁に装着され、差込片がカバー部材に装着された状態で、検知部は、抜け止め部の弁体側の端面に隣接して位置され、カバー部材に対してカバー部材の装着方向とは反対の方向に力が加わった場合に、検知部は、抜け止め部の弁体側の端面に当接し、カバー部材の装着方向とは反対の方向への移動を制限すること、を特徴とする。 (2) In the manual valve with the erroneous operation prevention cover described in (1), the cover member is provided with an insertion hole for inserting the insertion piece, the insertion piece is inserted into the insertion hole, and the insertion piece covers the insertion piece. It is characterized in that it is movably held between a temporary fixing position protruding to the outside of the member and a mounting complete position in which the insertion piece is housed inside the cover member.
(3) In the manual valve with the erroneous operation prevention cover according to (1) or (2), the manual mechanism is provided with an operation rod having a valve body connected to one end, and a handle is arranged on the other end side of the operation rod. The manual mechanism is provided with a retaining portion between the handle and the valve body, and the cover member is attached to the manual valve with the erroneous operation prevention cover from the direction opposite to the side where the operation rod of the handle extends. That, the insertion piece is attached to the cover member from the direction orthogonal to the longitudinal direction of the operation rod, the cover member is attached to the manual valve with the erroneous operation prevention cover, and the insertion piece is attached to the cover member. The detection unit is positioned adjacent to the end surface of the stopper on the valve body side, and when a force is applied to the cover member in a direction opposite to the mounting direction of the cover member, the detection unit prevents the cover member from coming off. It is characterized in that it abuts on the end surface of the portion on the valve body side and restricts the movement of the cover member in the direction opposite to the mounting direction.

（４）（１）乃至（３）のいずれか１つに記載の誤操作防止カバー付き手動弁において、差込片は、差込片のカバー部材への装着側端面とは反対側の端面に第１ロック部を備えること、カバー部材は、差込片がカバー部材に装着された状態で、第１ロック部に対向して位置する第２ロック部を備えること、第１ロック部と、第２ロック部とには、差込片がカバー部材に装着された状態で、第１ロック部と第２ロック部とを貫通する係止孔が形成されていること、誤操作防止カバー付き手動弁は、係止孔に挿通されるロック部材を備えること、を特徴とする。 (4) In the manual valve with the erroneous operation prevention cover according to any one of (1) to (3), the insertion piece is placed on the end surface opposite to the end surface on the side opposite to the mounting side end surface of the insertion piece on the cover member. It is provided with one lock portion, the cover member is provided with a second lock portion located opposite to the first lock portion with the insertion piece attached to the cover member, the first lock portion and the second lock portion. The lock portion is formed with a locking hole that penetrates the first lock portion and the second lock portion with the insertion piece attached to the cover member. It is characterized in that it includes a lock member that is inserted into the locking hole.

（５）（１）乃至（４）のいずれか１つに記載の誤操作防止カバー付き手動弁において、手動機構は、一端に弁体が接続された操作ロッドを備え、操作ロッドの他端側にハンドルが配置されていること、操作部は、円環形状をなし、ハンドルの操作ロッドが延伸する側に、操作ロッドと同軸上に配置され、操作ロッドの長手方向に沿って、第１位置と、第２位置と、の間を移動すること、差込片は、操作ロッドの中心軸に直交する方向から、カバー部材に装着されること、カバー部材が誤操作防止カバー付き手動弁に装着された状態において、操作部が第１位置にあるときは、操作部の外周面が、検知部と干渉して、差込片をカバー部材に装着完了不能であること、操作部が第２位置にあるときは、操作部が装着完了された差込片を前記操作ロッドの中心軸を中心に回転投影した空間から退避して、差込片をカバー部材に装着完了可能であること、を特徴とする。 (5) In the manual valve with an erroneous operation prevention cover according to any one of (1) to (4), the manual mechanism includes an operation rod having a valve body connected to one end, and is provided on the other end side of the operation rod. The handle is arranged, the operation part has a ring shape, is arranged coaxially with the operation rod on the side where the operation rod of the handle extends, and is the first position along the longitudinal direction of the operation rod. , The insertion piece is attached to the cover member from the direction orthogonal to the central axis of the operation rod, and the cover member is attached to the manual valve with the erroneous operation prevention cover. In the state, when the operation unit is in the first position, the outer peripheral surface of the operation unit interferes with the detection unit, and the insertion piece cannot be completely attached to the cover member, and the operation unit is in the second position. The case is characterized in that the insertion piece for which the operation unit has been mounted can be retracted from the space rotationally projected around the central axis of the operation rod, and the insertion piece can be completely mounted on the cover member. ..

（６）（１）乃至（５）のいずれか１つに記載の誤操作防止カバー付き手動弁において、手動機構は、一端に弁体が接続された操作ロッドを備えること、カバー部材は、誤操作防止カバー付き手動弁との装着側の端面に、誤操作防止カバー付き手動弁と係合する係合部を有すること、誤操作防止カバー付き手動弁には、係合部と係合する被係合部が設けられていること、係合部と、被係合部とが係合することで、カバー部材は、操作ロッドの中心軸を中心として、９０度ごとに回転して、誤操作防止カバー付き手動弁に対して位置決めが可能であること、を特徴とする。 (6) In the manual valve with the erroneous operation prevention cover according to any one of (1) to (5), the manual mechanism is provided with an operation rod to which the valve body is connected to one end, and the cover member is erroneous operation prevention. The end face on the mounting side with the manual valve with cover has an engaging part that engages with the manual valve with erroneous operation prevention cover, and the manual valve with erroneous operation prevention cover has an engaged part that engages with the engaging part. By being provided and the engaging portion and the engaged portion are engaged, the cover member rotates every 90 degrees around the central axis of the operation rod, and a manual valve with an erroneous operation prevention cover is provided. It is characterized in that it can be positioned with respect to.

（７）（１）乃至（６）のいずれか１つに記載の誤操作防止カバー付き手動弁に装着される誤操作防止カバーであって、カバー部材と、差込片と、からなることを特徴とする。 (7) The erroneous operation prevention cover attached to the manual valve with the erroneous operation prevention cover according to any one of (1) to (6), characterized in that it is composed of a cover member and an insertion piece. To do.

本発明の誤操作防止カバー付き手動弁は、上記構成を有することにより次のような作用・効果を有する。
（１）ハンドルの回転操作により弁体を弁座に当接または離間させる手動機構と、手動機構の動作を制限するロック機構を備える誤操作防止カバー付き手動弁において、ロック機構は、ロック機構を解除する第１位置と、ロック機構を有効にする第２位置と、の間を移動可能な操作部を備えること、誤操作防止カバー付き手動弁は、誤操作防止カバー付き手動弁に装着される中空状のカバー部材を備えること、カバー部材は、検知部を有する差込片を備えること、差込片がカバー部材に装着される際に、差込片は、検知部がカバー部材の中空内部において一定の進路を持って移動可能に保持されていること、カバー部材が誤操作防止カバー付き手動弁に装着された状態において、ハンドルと、操作部とは、カバー部材の中空内部に位置し、操作部が第１位置にあるときは、操作部が検知部の進路上に位置して、差込片をカバー部材に装着完了不能であること、操作部が第２位置にあるときは、操作部が検知部の進路上から退避して、差込片をカバー部材に装着完了可能であること、を特徴とするので、カバー部材を誤操作防止カバー付き手動弁に装着した状態で、カバー部材に差込片を装着しようとすると、作業者が操作部（例えばロックリング）を第２位置に移動させ忘れた場合など、操作部が第１位置にある場合には、操作部は検知部の進路上に位置しているため、操作部が検知部の移動を阻害し、作業者は差込片をカバー部材に装着することができない。
一方、操作部が第２位置に移動されていれば、操作部は検知部の進路上から退避しているため、検知部はカバー部材の中空内部における移動を阻害されることがなく、作業者は差込片をカバー部材に装着することができる。 The manual valve with the erroneous operation prevention cover of the present invention has the following actions and effects by having the above configuration.
(1) In a manual valve with an erroneous operation prevention cover provided with a manual mechanism for bringing the valve body into contact with or separated from the valve seat by rotating the handle and a lock mechanism for limiting the operation of the manual mechanism, the lock mechanism releases the lock mechanism. The manual valve with the erroneous operation prevention cover is a hollow type that is attached to the manual valve with the erroneous operation prevention cover. The cover member is provided, the cover member is provided with an insertion piece having a detection portion, and when the insertion piece is attached to the cover member, the insertion piece is constant in the hollow inside of the cover member. The handle and the operation part are located inside the hollow of the cover member, and the operation part is the first in the state where the cover member is held so as to be movable with a path and the cover member is attached to the manual valve with the cover for preventing erroneous operation. When it is in the 1st position, the operation unit is located in the path of the detection unit, and the insertion piece cannot be completely attached to the cover member. When the operation unit is in the 2nd position, the operation unit is the detection unit. The feature is that the insertion piece can be completely attached to the cover member by retracting from the path of the above, so that the insertion piece can be attached to the cover member with the cover member attached to the manual valve with the erroneous operation prevention cover. If the operation unit is in the first position, such as when the operator forgets to move the operation unit (for example, the lock ring) to the second position when trying to install it, the operation unit is located in the path of the detection unit. Therefore, the operation unit hinders the movement of the detection unit, and the operator cannot attach the insertion piece to the cover member.
On the other hand, if the operation unit is moved to the second position, the operation unit is retracted from the path of the detection unit, so that the detection unit is not hindered from moving inside the hollow of the cover member, and the operator Can attach the plug to the cover member.

したがって、作業者は、カバー部材を誤操作防止カバー付き手動弁に装着した状態で、カバー部材に差込片を装着できるか否かによって、操作部が第１位置にあるのか、第２位置にあるのか知ることが可能である。差込片を装着できず、操作部が第１位置にあると分かれば、カバー部材を誤操作防止カバー付き手動弁から取り外し、操作部を第２位置に移動させてから、改めてカバー部材を誤操作防止カバー付き手動弁に装着すれば良く、操作部が第２位置に移動されていない状態で誤操作防止カバー付き手動弁が放置されることがない。
操作部が第２位置に移動されていない状態で誤操作防止カバー付き手動弁が放置されることがないため、作業者があるラインの流体制御を行うために手動弁やその他流体制御機器を操作しようとし、隣のラインの誤操作防止カバー付き手動弁に触れてしまったとき、当該隣のラインの誤操作防止カバー付き手動弁の操作部が第２位置に移動されていなかったがために意図せず弁開度を変更してしまうというおそれが解消される。 Therefore, the operator may or may not be in the first position or the second position depending on whether or not the insertion piece can be attached to the cover member with the cover member attached to the manual valve with the erroneous operation prevention cover. It is possible to know. If the insertion piece cannot be attached and the operation unit is found to be in the first position, remove the cover member from the manual valve with the erroneous operation prevention cover, move the operation unit to the second position, and then prevent the cover member from erroneous operation again. It may be attached to the manual valve with a cover, and the manual valve with an erroneous operation prevention cover will not be left unattended when the operation unit is not moved to the second position.
Since the manual valve with the erroneous operation prevention cover is not left unattended when the operation unit is not moved to the second position, let's operate the manual valve and other fluid control equipment to control the fluid in a certain line. Then, when the manual valve with the erroneous operation prevention cover on the adjacent line was touched, the operation part of the manual valve with the erroneous operation prevention cover on the adjacent line was not moved to the second position, so the valve was unintentionally valved. The risk of changing the opening is eliminated.

また、誤操作防止のために単純にカバー部材のみを誤操作防止カバー付き手動弁に装着すれば、ハンドルやロック機構の操作部が外部から視認できなくなるため、作業後にロック機構が有効となっているか否かの確認を行うためには、カバー部材を取り外してから操作部の状態を確認しなければならないなど、作業効率の悪化が懸念される。しかし、上記のようにロック機構が有効となっている場合のみカバー部材に装着可能な差込片を備えることで、誤操作防止カバー付き手動弁に装着されたカバー部材に差込片が装着されていれば、ロック機構が有効な状態であるということが一目で判別可能となる。よって、作業後にロック機構が有効となっているか否かの確認を行うのが容易であり、作業効率の悪化を招かない。 Also, if only the cover member is simply attached to the manual valve with the erroneous operation prevention cover to prevent erroneous operation, the operation part of the handle and lock mechanism cannot be seen from the outside, so whether or not the lock mechanism is effective after work. In order to confirm this, it is necessary to check the state of the operation unit after removing the cover member, and there is a concern that the work efficiency may deteriorate. However, by providing the insertion piece that can be attached to the cover member only when the lock mechanism is enabled as described above, the insertion piece is attached to the cover member attached to the manual valve with the erroneous operation prevention cover. Then, it becomes possible to determine at a glance that the lock mechanism is in an effective state. Therefore, it is easy to confirm whether or not the lock mechanism is effective after the work, and the work efficiency is not deteriorated.

さらにまた、誤操作防止カバー付き手動弁にカバー部材を装着すると、ハンドルと、操作部とは、カバー部材の中空内部に位置するので、ハンドルと操作部とが外部に露出されない。
ハンドルが外部に露出していないため、作業者はハンドルに触れることが出来ず、無理にハンドルを操作しようとすることもなくなる。よって、作業者が無理にハンドル操作をしようとして、ハンドルに回転力を加え、ハンドルに加わった回転力が弁体に接続される操作ロッドに伝達され、弁開度に微小なずれが生じてしまうことを防止することができる。また、操作部も外部に露出していないため、不用意に手動機構の制限が解除されてしまうこともない。 Furthermore, when the cover member is attached to the manual valve with the erroneous operation prevention cover, the handle and the operation portion are located inside the hollow of the cover member, so that the handle and the operation portion are not exposed to the outside.
Since the handle is not exposed to the outside, the operator cannot touch the handle and does not try to operate the handle by force. Therefore, when the operator tries to forcibly operate the steering wheel, a rotational force is applied to the steering wheel, and the rotational force applied to the steering wheel is transmitted to the operation rod connected to the valve body, resulting in a slight deviation in the valve opening. Can be prevented. Further, since the operation unit is not exposed to the outside, the restriction of the manual mechanism is not released carelessly.

（２）（１）に記載の誤操作防止カバー付き手動弁において、カバー部材は、差込片を挿入する挿通孔を備えること、差込片は、挿通孔に、挿入され、差込片がカバー部材の外部に突出する仮固定位置と、差込片がカバー部材の内部に収納される装着完了位置と、の間を移動可能に保持されていること、を特徴とするので、差込片が、カバー部材の挿通孔に、仮固定位置と装着完了位置との間を移動可能なように一体化されており、誤操作防止カバーを誤操作防止カバー付き手動弁に装着するために持ち運ぶ際にも、差込片がカバー部材から脱落しない。
カバー部材と差込片とが一体になっていないとすると、差込片を紛失するおそれや、差込片をカバー部材に装着し忘れるおそれがある。
しかし、上記のようにカバー部材と差込片とが一体になっていることで、差込片を紛失するおそれが解消される。また、差込片が仮固定位置にある場合、カバー部材から突出しているため、差込片が装着完了位置にないことの視認性が向上し、差込片をカバー部材に装着し忘れるおそれが解消される。 (2) In the manual valve with the erroneous operation prevention cover described in (1), the cover member is provided with an insertion hole for inserting the insertion piece, the insertion piece is inserted into the insertion hole, and the insertion piece covers the insertion piece. The insertion piece is characterized in that it is movably held between a temporary fixing position protruding to the outside of the member and a mounting completion position in which the insertion piece is housed inside the cover member. , It is integrated into the insertion hole of the cover member so that it can be moved between the temporary fixing position and the mounting completion position, and even when carrying the erroneous operation prevention cover for mounting on the manual valve with the erroneous operation prevention cover. The insertion piece does not fall off from the cover member.
If the cover member and the insertion piece are not integrated, the insertion piece may be lost or the insertion piece may be forgotten to be attached to the cover member.
However, since the cover member and the insertion piece are integrated as described above, the risk of losing the insertion piece is eliminated. In addition, when the insertion piece is in the temporarily fixed position, it protrudes from the cover member, so that the visibility that the insertion piece is not in the mounting complete position is improved, and there is a risk of forgetting to mount the insertion piece on the cover member. It will be resolved.

また、カバー部材と差込片とが一体になっていないとすると、カバー部材を誤操作防止カバー付き手動弁に装着した後に、作業者は差込片を持ち運んできて、カバー部材に装着させなければならない。近年、半導体製造装置の小型化や集積化が進んでいることから、作業スペースも狭小化され、差込片を装着するための作業スペース確保が困難である可能性がある。
さらにまた、半導体製造装置の小型化や集積化により、誤操作防止カバー付き手動弁も小型である場合が多い。誤操作防止カバー付き手動弁が小型であると、差込片も当然に小型となり、差込片を挿通孔に挿通させる作業は細かい作業となり、作業効率の悪化が懸念される。作業者が怪我防止のために手袋をしている場合などは、細かい作業を行うことがますます困難である。 If the cover member and the insertion piece are not integrated, the operator must carry the insertion piece and attach it to the cover member after attaching the cover member to the manual valve with the erroneous operation prevention cover. It doesn't become. In recent years, as semiconductor manufacturing equipment has become smaller and more integrated, the work space has also become narrower, and it may be difficult to secure a work space for mounting the insertion piece.
Furthermore, due to the miniaturization and integration of semiconductor manufacturing equipment, the manual valve with an erroneous operation prevention cover is often also small. If the manual valve with the erroneous operation prevention cover is small, the insertion piece is naturally small, and the work of inserting the insertion piece into the insertion hole becomes a detailed work, and there is a concern that the work efficiency may be deteriorated. It is increasingly difficult to perform detailed work, such as when a worker is wearing gloves to prevent injury.

差込片がカバー部材の挿通孔に、仮固定位置と装着完了位置との間を移動可能に保持されていれば、作業者は、カバー部材を誤操作防止カバー付き手動弁に取り付けた後、差込片を仮固定位置から装着完了位置へ押し込むなどして移動させるのみで良い。
よって、作業スペースの確保が容易であるとともに、作業が単純となるため、作業効率の悪化を防止できる。また、作業者が手袋をしている場合であっても、差込片を移動させるのみであれば、容易に作業が可能である。 If the insertion piece is movably held in the insertion hole of the cover member between the temporary fixing position and the mounting completion position, the operator attaches the cover member to the manual valve with the erroneous operation prevention cover, and then makes a difference. All that is required is to move the insert piece by pushing it from the temporarily fixed position to the mounting completed position.
Therefore, it is easy to secure a work space and the work is simplified, so that deterioration of work efficiency can be prevented. Further, even when the worker is wearing gloves, the work can be easily performed if only the insertion piece is moved.

（３）（１）または（２）に記載の誤操作防止カバー付き手動弁において、手動機構は、一端に弁体が接続された操作ロッドを備え、操作ロッドの他端側にハンドルが配置されていること、手動機構は、ハンドルと弁体との間に、抜け止め部を備えること、カバー部材は、ハンドルの操作ロッドが延伸する側とは反対の方向から誤操作防止カバー付き手動弁に装着されること、検知部材は、操作ロッドの長手方向と直交する方向からカバー部材に装着されること、カバー部材が誤操作防止カバー付き手動弁に装着され、検知部材がカバー部材に装着された状態で、検知部は、抜け止め部の弁体側の端面に隣接して位置され、カバー部材に対してカバー部材の装着方向とは反対の方向に力が加わった場合に、検知部は、抜け止め部の弁体側の端面に当接し、カバー部材の装着方向とは反対の方向への移動を制限すること、を特徴とするので、作業者が、操作部を第２位置に移動させた後、カバー部材をハンドルの操作ロッドが延伸する側とは反対の方向から誤操作防止カバー付き手動弁に装着させ、差込片を操作部の移動方向と直交する方向から、カバー部材に装着させることで、差込片の検知部は、手動機構がハンドルと弁体との間に有する抜け止め部の弁体側端面に隣接して位置されることになる。差込片の検知部が抜け止め部の端面に隣接して位置されるため、カバー部材に対してカバー部材の装着方向とは反対の方向に力が加わった場合、検知部がハンドルの端面に当接し、カバー部材が誤操作防止カバー付き手動弁から脱落することを防止する。
差込片を、カバー部材脱落防止のためのロック構造としても使用することが可能であるため、脱落防止のための構造や、部材を別途に設ける必要がなく、製造コスト増大の防止や、製品構造の単純化が可能である。 (3) In the manual valve with the erroneous operation prevention cover according to (1) or (2), the manual mechanism is provided with an operation rod having a valve body connected to one end, and a handle is arranged on the other end side of the operation rod. The manual mechanism is provided with a retaining portion between the handle and the valve body, and the cover member is attached to the manual valve with the erroneous operation prevention cover from the direction opposite to the side where the operation rod of the handle extends. That, the detection member is attached to the cover member from the direction orthogonal to the longitudinal direction of the operation rod, the cover member is attached to the manual valve with the erroneous operation prevention cover, and the detection member is attached to the cover member. The detection unit is located adjacent to the end face of the retaining portion on the valve body side, and when a force is applied to the cover member in a direction opposite to the mounting direction of the cover member, the detection unit is used as a retaining portion. It is characterized in that it abuts on the end face on the valve body side and restricts the movement in the direction opposite to the mounting direction of the cover member. Therefore, after the operator moves the operation portion to the second position, the cover member Is attached to the manual valve with the erroneous operation prevention cover from the direction opposite to the side where the operation rod of the handle is extended, and the insertion piece is attached to the cover member from the direction orthogonal to the moving direction of the operation part. The detection unit on one side will be positioned adjacent to the valve body side end surface of the retaining portion that the manual mechanism has between the handle and the valve body. Since the detection part of the insertion piece is located adjacent to the end face of the retaining part, when a force is applied to the cover member in the direction opposite to the mounting direction of the cover member, the detection part is placed on the end face of the handle. It comes into contact and prevents the cover member from falling off from the manual valve with the cover to prevent erroneous operation.
Since the insertion piece can also be used as a lock structure to prevent the cover member from falling off, there is no need to provide a structure for preventing the cover member from falling off or a separate member, which prevents an increase in manufacturing cost and a product. The structure can be simplified.

（４）（１）乃至（３）のいずれか１つに記載の誤操作防止カバー付き手動弁において、差込片は、差込片のカバー部材への装着側端面とは反対側の端面に第１ロック部を備えること、カバー部材は、差込片がカバー部材に装着された状態で、第１ロック部に対向して位置する第２ロック部を備えること、第１ロック部と、第２ロック部とには、差込片がカバー部材に装着された状態で、第１ロック部と第２ロック部とを貫通する係止孔が形成されていること、誤操作防止カバー付き手動弁は、係止孔に挿通されるロック部材を備えること、を特徴とするので、差込片は第１ロック部を、カバー部材は第２ロック部を備え、第１ロック部と第２ロック部を貫通するよう係止孔が備えられているため、例えば南京錠のようなロック部材を、係止孔に挿通させることで、差込片をカバー部材に装着された状態で固定することができる。
また、第１ロック部は、差込片のカバー部材への装着側端面とは反対側の端面に設けられているため、例えばカバー部材が六面体である場合、カバー部材の、差込片を装着する面でロック部材を取付けることができ、装着する面とは反対側の面などにわざわざ手を回してロック部材を取り付ける必要がない。よって、作業スペースが限られる半導体製造工程においても、容易に差込片をカバー部材に固定することが可能である。 (4) In the manual valve with the erroneous operation prevention cover according to any one of (1) to (3), the insertion piece is placed on the end surface opposite to the end surface on the side opposite to the mounting side end surface of the insertion piece on the cover member. It is provided with one lock portion, the cover member is provided with a second lock portion located opposite to the first lock portion with the insertion piece attached to the cover member, the first lock portion and the second lock portion. The lock portion is formed with a locking hole that penetrates the first lock portion and the second lock portion with the insertion piece attached to the cover member. Since the insertion piece is provided with a lock member to be inserted into the locking hole, the insertion piece is provided with a first lock portion, and the cover member is provided with a second lock portion, and penetrates the first lock portion and the second lock portion. Since the locking hole is provided so as to be provided, the insertion piece can be fixed in a state of being attached to the cover member by inserting a locking member such as a Nanjing lock into the locking hole.
Further, since the first lock portion is provided on the end face on the side opposite to the end face on the side where the insertion piece is attached to the cover member, for example, when the cover member is a hexahedron, the insertion piece of the cover member is attached. The lock member can be attached to the surface to be attached, and it is not necessary to bother to turn the hand to attach the lock member to the surface opposite to the surface to be attached. Therefore, even in the semiconductor manufacturing process where the work space is limited, the insertion piece can be easily fixed to the cover member.

（５）（１）乃至（４）に記載の誤操作防止カバー付き手動弁において、手動機構は、一端に弁体が接続された操作ロッドを備え、操作ロッドの他端側にハンドルが配置されていること、操作部は、円環形状をなし、ハンドルの操作ロッドが延伸する側に、操作ロッドと同軸上に配置され、操作ロッドの長手方向に沿って、第１位置と、第２位置と、の間を移動すること、検知部材は、操作ロッドの中心軸に直交する方向から、カバー部材に装着されること、カバー部材が誤操作防止カバー付き手動弁に装着された状態において、操作部が第１位置にあるときは、操作部の外周面が、検知部と干渉して、差込片をカバー部材に装着完了不能であること、操作部が第２位置にあるときは、操作部が装着完了された差込片を前記操作ロッドの中心軸を中心に回転投影した空間から退避して、差込片をカバー部材に装着完了可能であること、を特徴とするので、操作ロッドおよび操作部の中心軸に直交する方向からであれば、どの角度から検知部材を装着しても、操作部の第２位置への移動し忘れを確実に防止することができる。 (5) In the manual valve with the erroneous operation prevention cover according to (1) to (4), the manual mechanism is provided with an operation rod having a valve body connected to one end, and a handle is arranged on the other end side of the operation rod. The operation unit has a ring shape and is arranged coaxially with the operation rod on the side where the operation rod of the handle extends, and the first position and the second position are arranged along the longitudinal direction of the operation rod. The operation unit is mounted on the cover member from the direction orthogonal to the central axis of the operation rod, and the operation unit is mounted on the manual valve with the erroneous operation prevention cover. When the operation unit is in the first position, the outer peripheral surface of the operation unit interferes with the detection unit, and the insertion piece cannot be completely attached to the cover member. When the operation unit is in the second position, the operation unit is The insertion piece that has been completely mounted is retracted from the space that is rotationally projected around the central axis of the operation rod, and the insertion piece can be completely mounted on the cover member. As long as it is from a direction orthogonal to the central axis of the portion, it is possible to reliably prevent forgetting to move the operation portion to the second position regardless of the angle at which the detection member is mounted.

すなわち、操作部が円環状であるため、操作部中心から検知部が干渉する外周面の任意の点までの距離は常に一定であり、検知部が外周面と干渉する位置は、操作ロッドおよび操作部の中心軸に直交する方向からであれば、どの角度から検知部材を装着しても、一定である。したがって、操作部が第１位置にあるときは、操作ロッドおよび操作部の中心軸に直交する方向からであれば、どの角度から検知部材を装着しても、一定の位置で検知部材の装着ができなくなるため、装着する角度によって装着できなくなる位置がばらつきを原因とする検知部材の装着可否の誤認を防止できる。
一方、操作部が第２位置にあるときは、操作部が装着完了された差込片を前記操作ロッドの中心軸を中心に回転投影した空間から退避するので、操作ロッドおよび操作部の中心軸に直交する方向からであれば、どの角度から検知部材を装着しても、検知部材と操作部とが干渉することなく、検知部材を装着完了させることができる。
よって、実際に誤操作防止カバー付き手動弁が配設される半導体製造ラインの作業スペースに応じて、作業者が自由に差込片を装着する方向を選択することができる。 That is, since the operation unit is annular, the distance from the center of the operation unit to an arbitrary point on the outer peripheral surface where the detection unit interferes is always constant, and the position where the detection unit interferes with the outer peripheral surface is the operation rod and the operation. As long as it is from the direction orthogonal to the central axis of the portion, it is constant regardless of the angle at which the detection member is mounted. Therefore, when the operation unit is in the first position, the detection member can be installed at a fixed position regardless of the angle at which the detection member is installed from the direction orthogonal to the operation rod and the central axis of the operation unit. Since it cannot be mounted, it is possible to prevent misidentification of whether or not the detection member can be mounted due to variations in the mounting position depending on the mounting angle.
On the other hand, when the operation unit is in the second position, the insertion piece to which the operation unit has been mounted is retracted from the space rotationally projected around the central axis of the operation rod, so that the central axis of the operation rod and the operation unit is retracted. The detection member can be completely mounted without interference between the detection member and the operation unit, regardless of the angle at which the detection member is mounted, as long as the direction is orthogonal to the above.
Therefore, the operator can freely select the direction in which the insertion piece is mounted according to the work space of the semiconductor manufacturing line in which the manual valve with the erroneous operation prevention cover is actually arranged.

（６）（１）乃至（５）のいずれか１つに記載の誤操作防止カバー付き手動弁において、カバー部材は、誤操作防止カバー付き手動弁との装着側の端面に、誤操作防止カバー付き手動弁と係合する係合部を有すること、誤操作防止カバー付き手動弁には、係合部と係合する被係合部が設けられていること、係合部と、被係合部とが係合することで、カバー部材は、操作ロッドの中心軸を中心として、９０度ごとに回転して、誤操作防止カバー付き手動弁に対して位置決めが可能であること、を特徴とするので、誤操作防止カバーを、誤操作防止カバー付き手動弁に対して操作ロッドの中心軸を中心に９０度ずつ回転させても誤操作防止カバー付き手動弁に装着し、係合させることが可能である。１方向のみで装着可能である場合と比べ、作業性が向上する。 (6) In the manual valve with an erroneous operation prevention cover according to any one of (1) to (5), the cover member is a manual valve with an erroneous operation prevention cover on the end face on the mounting side with the manual valve with the erroneous operation prevention cover. The manual valve with the erroneous operation prevention cover is provided with an engaged portion that engages with the engaging portion, and the engaging portion and the engaged portion are engaged with each other. By combining, the cover member is characterized in that it can be rotated every 90 degrees around the central axis of the operation rod and can be positioned with respect to the manual valve with the erroneous operation prevention cover, so that erroneous operation prevention can be prevented. Even if the cover is rotated by 90 degrees about the central axis of the operation rod with respect to the manual valve with the erroneous operation prevention cover, it can be attached to and engaged with the manual valve with the erroneous operation prevention cover. Workability is improved as compared with the case where it can be mounted in only one direction.

（７）（１）乃至（６）のいずれか１つに記載の誤操作防止カバー付き手動弁に装着される誤操作防止カバーであって、カバー部材と、差込片と、からなることを特徴とするので、カバー部材を誤操作防止カバー付き手動弁に装着した状態で、カバー部材に差込片を装着しようとすると、作業者が操作部（例えばロックリング）を第２位置に移動させ忘れた場合など、操作部が第１位置にある場合には、操作部は検知部の進路上に位置しているため、操作部が検知部の移動を阻害し、作業者は差込片をカバー部材に装着することができない。
一方、操作部が第２位置に移動されていれば、操作部は検知部の進路上から退避しているため、検知部はカバー部材の中空内部における移動を阻害されることがなく、作業者は差込片をカバー部材に装着することができる。 (7) The erroneous operation prevention cover attached to the manual valve with the erroneous operation prevention cover according to any one of (1) to (6), characterized in that it is composed of a cover member and an insertion piece. Therefore, if the operator tries to attach the insertion piece to the cover member while the cover member is attached to the manual valve with the erroneous operation prevention cover, the operator forgets to move the operation unit (for example, the lock ring) to the second position. When the operation unit is in the first position, the operation unit is located in the path of the detection unit, so that the operation unit hinders the movement of the detection unit, and the operator uses the insertion piece as a cover member. Cannot be installed.
On the other hand, if the operation unit is moved to the second position, the operation unit is retracted from the path of the detection unit, so that the detection unit is not hindered from moving inside the hollow of the cover member, and the operator Can attach the plug to the cover member.

したがって、作業者は、カバー部材を誤操作防止カバー付き手動弁に装着した状態で、カバー部材に差込片を装着できるか否かによって、操作部が第１位置にあるのか、第２位置にあるのか知ることが可能である。差込片を装着できず、操作部が第１位置にあると分かれば、カバー部材を誤操作防止カバー付き手動弁から取り外し、操作部を第２位置に移動させてから、改めてカバー部材を手動弁に装着すれば良く、操作部が第２位置に移動されていない状態で誤操作防止カバー付き手動弁が放置されることがない。
操作部が第２位置に移動されていない状態で誤操作防止カバー付き手動弁が放置されることがないため、作業者があるラインの流体制御を行うために誤操作防止カバー付き手動弁やその他流体制御機器を操作しようとし、隣のラインの誤操作防止カバー付き手動弁に触れてしまったとき、当該隣のラインの誤操作防止カバー付き手動弁の操作部が第２位置に移動されていなかったがために意図せず弁開度を変更してしまうというおそれが解消される。 Therefore, the operator may or may not be in the first position or the second position depending on whether or not the insertion piece can be attached to the cover member with the cover member attached to the manual valve with the erroneous operation prevention cover. It is possible to know. If the insertion piece cannot be attached and the operation unit is found to be in the first position, remove the cover member from the manual valve with the erroneous operation prevention cover, move the operation unit to the second position, and then move the cover member to the manual valve again. The manual valve with the erroneous operation prevention cover is not left unattended when the operation unit is not moved to the second position.
Since the manual valve with the erroneous operation prevention cover is not left unattended when the operation unit is not moved to the second position, the manual valve with the erroneous operation prevention cover and other fluid control are used to control the fluid of a certain line by the operator. When trying to operate the device and touching the manual valve with the erroneous operation prevention cover on the adjacent line, the operation part of the manual valve with the erroneous operation prevention cover on the adjacent line was not moved to the second position. The risk of unintentionally changing the valve opening is eliminated.

また、誤操作防止のために単純にカバー部材のみを誤操作防止カバー付き手動弁に装着すれば、ハンドルやロック機構の操作部が外部から視認できなくなるため、作業後にロック機構が有効となっているか否かの確認を行うためには、カバー部材を取り外してから操作部の状態を確認しなければならないなど、作業効率の悪化が懸念される。しかし、上記のようにロック機構が有効となっている場合のみカバー部材に装着可能な差込片を備えることで、誤操作防止カバー付き手動弁に装着されたカバー部材に差込片が装着されていれば、ロック機構が有効な状態であるということが一目で判別可能となる。よって、作業後にロック機構が有効となっているか否かの確認を行うのが容易であり、作業効率の悪化を招かない。 Also, if only the cover member is simply attached to the manual valve with the erroneous operation prevention cover to prevent erroneous operation, the operation part of the handle and lock mechanism cannot be seen from the outside, so whether or not the lock mechanism is effective after work. In order to confirm this, it is necessary to check the state of the operation unit after removing the cover member, and there is a concern that the work efficiency may deteriorate. However, by providing the insertion piece that can be attached to the cover member only when the lock mechanism is enabled as described above, the insertion piece is attached to the cover member attached to the manual valve with the erroneous operation prevention cover. Then, it becomes possible to determine at a glance that the lock mechanism is in an effective state. Therefore, it is easy to confirm whether or not the lock mechanism is effective after the work, and the work efficiency is not deteriorated.

さらにまた、誤操作防止カバー付き手動弁にカバーを装着すると、ハンドルと、操作部とは、カバー部材の中空内部に位置するので、ハンドルと操作部とが外部に露出されない。
ハンドルが外部に露出していないため、作業者はハンドルに触れることが出来ず、無理にハンドルを操作しようとすることもなくなる。よって、作業者が無理にハンドル操作をしようとして、ハンドルに回転力を加え、ハンドルに加わった回転力が弁体に接続される操作ロッドに伝達され、弁開度に微小なずれが生じてしまうことを防止することができる。また、操作部も外部に露出していないため、不用意に手動機構の制限が解除されてしまうこともない。 Furthermore, when the cover is attached to the manual valve with the erroneous operation prevention cover, the handle and the operation portion are located inside the hollow of the cover member, so that the handle and the operation portion are not exposed to the outside.
Since the handle is not exposed to the outside, the operator cannot touch the handle and does not try to operate the handle by force. Therefore, when the operator tries to forcibly operate the steering wheel, a rotational force is applied to the steering wheel, and the rotational force applied to the steering wheel is transmitted to the operation rod connected to the valve body, resulting in a slight deviation in the valve opening. Can be prevented. Further, since the operation unit is not exposed to the outside, the restriction of the manual mechanism is not released carelessly.

誤操作防止カバーは、差込片が、カバー部材の挿通孔に、仮固定位置と装着完了位置との間を移動可能なように一体化されており、誤操作防止カバーを誤操作防止カバー付き手動弁に装着するために持ち運ぶ際にも、差込片がカバー部材から脱落しない。
カバー部材と差込片とが一体になっていないとすると、差込片を紛失するおそれや、差込片をカバー部材に装着し忘れるおそれがある。
しかし、上記のようにカバー部材と差込片とが一体になっていることで、差込片を紛失するおそれが解消される。また、差込片が仮固定位置にある場合、カバー部材から突出しているため、差込片が装着完了位置にないことの視認性が向上し、差込片をカバー部材に装着し忘れるおそれが解消される。 The erroneous operation prevention cover is integrated so that the insertion piece can move between the temporary fixing position and the mounting completion position in the insertion hole of the cover member, and the erroneous operation prevention cover becomes a manual valve with the erroneous operation prevention cover. The insert does not fall off the cover member when it is carried for mounting.
If the cover member and the insertion piece are not integrated, the insertion piece may be lost or the insertion piece may be forgotten to be attached to the cover member.
However, since the cover member and the insertion piece are integrated as described above, the risk of losing the insertion piece is eliminated. In addition, when the insertion piece is in the temporarily fixed position, it protrudes from the cover member, so that the visibility that the insertion piece is not in the mounting complete position is improved, and there is a risk of forgetting to mount the insertion piece on the cover member. It will be resolved.

また、カバー部材と差込片とが一体になっていないとすると、カバー部材を誤操作防止カバー付き手動弁に装着した後に、作業者は差込片を持ち運んできて、カバー部材に装着させなければならない。近年、半導体製造装置の小型化や集積化が進んでいることから、作業スペースも狭小化され、差込片を装着するための作業スペース確保が困難である可能性がある。
さらにまた、半導体製造装置の小型化や集積化により、誤操作防止カバー付き手動弁も小型である場合が多い。誤操作防止カバー付き手動弁が小型であると、差込片も当然に小型となり、差込片を挿通孔に挿通させる作業は細かい作業となり、作業効率の悪化が懸念される。作業者が怪我防止のために手袋をしている場合などは、細かい作業を行うことがますます困難である。 If the cover member and the insertion piece are not integrated, the operator must carry the insertion piece and attach it to the cover member after attaching the cover member to the manual valve with the erroneous operation prevention cover. It doesn't become. In recent years, as semiconductor manufacturing equipment has become smaller and more integrated, the work space has also become narrower, and it may be difficult to secure a work space for mounting the insertion piece.
Furthermore, due to the miniaturization and integration of semiconductor manufacturing equipment, the manual valve with an erroneous operation prevention cover is often also small. If the manual valve with the erroneous operation prevention cover is small, the insertion piece is naturally small, and the work of inserting the insertion piece into the insertion hole becomes a detailed work, and there is a concern that the work efficiency may be deteriorated. It is increasingly difficult to perform detailed work, such as when a worker is wearing gloves to prevent injury.

誤操作防止カバーは、差込片がカバー部材の挿通孔に、仮固定位置と装着完了位置との間を移動可能に保持されているため、作業者は、カバー部材を誤操作防止カバー付き手動弁に取り付けた後、差込片を仮固定位置から装着完了位置へ押し込むなどして移動させるのみで良い。
よって、作業スペースの確保が容易であるとともに、作業が単純となるため、作業効率の悪化を防止できる。また、作業者が手袋をしている場合であっても、差込片を移動させるのみであれば、容易に作業が可能である。 Since the insertion piece of the erroneous operation prevention cover is movably held in the insertion hole of the cover member between the temporarily fixed position and the mounting completion position, the operator can use the cover member as a manual valve with the erroneous operation prevention cover. After mounting, it is only necessary to move the insertion piece by pushing it from the temporary fixing position to the mounting completion position.
Therefore, it is easy to secure a work space and the work is simplified, so that deterioration of work efficiency can be prevented. Further, even when the worker is wearing gloves, the work can be easily performed if only the insertion piece is moved.

誤操作防止カバーは、作業者が、操作部を第２位置に移動させた後、カバー部材をハンドルの操作ロッドが延伸する側とは反対の方向から誤操作防止カバー付き手動弁に装着され、差込片を操作部の移動方向と直交する方向から、カバー部材に装着させることで、差込片の検知部は、手動機構がハンドルと弁体との間に有する抜け止め部の弁体側端面に隣接して位置されることになる。差込片の検知部が抜け止め部の端面に隣接して位置されるため、カバー部材に対してカバー部材の装着方向とは反対の方向に力が加わった場合、検知部がハンドルの端面に当接し、カバー部材が誤操作防止カバー付き手動弁から脱落することを防止する。
差込片を、カバー部材脱落防止のためのロック構造としても使用することが可能であるため、脱落防止のための構造や、部材を別途に設ける必要がなく、製造コスト増大の防止や、製品構造の単純化が可能である。 After the operator moves the operation unit to the second position, the erroneous operation prevention cover is attached to the manual valve with the erroneous operation prevention cover from the direction opposite to the side where the operation rod of the handle extends, and the cover member is inserted. By attaching the piece to the cover member from the direction orthogonal to the moving direction of the operation part, the detection part of the insertion piece is adjacent to the valve body side end surface of the retaining part that the manual mechanism has between the handle and the valve body. Will be positioned. Since the detection part of the insertion piece is located adjacent to the end face of the retaining part, when a force is applied to the cover member in the direction opposite to the mounting direction of the cover member, the detection part is placed on the end face of the handle. It comes into contact and prevents the cover member from falling off from the manual valve with the cover to prevent erroneous operation.
Since the insertion piece can also be used as a lock structure to prevent the cover member from falling off, there is no need to provide a structure for preventing the cover member from falling off or a separate member, which prevents an increase in manufacturing cost and a product. The structure can be simplified.

誤操作防止カバーは、差込片が第１ロック部を、カバー部材が第２ロック部を備え、第１ロック部と第２ロック部を貫通するよう係止孔が備えられているため、例えば南京錠のようなロック部材を、係止孔に挿通させることで、差込片をカバー部材に装着された状態で固定することができる。
また、第１ロック部は、差込片のカバー部材への装着側端面とは反対側の端面に設けられているため、例えばカバー部材が六面体である場合、カバー部材の、差込片を装着する面でロック部材を取付けることができ、装着する面とは反対側の面などにわざわざ手を回してロック部材を取り付ける必要がない。よって、作業スペースが限られる半導体製造工程においても、容易に差込片をカバー部材に固定することが可能である。 The erroneous operation prevention cover has a first lock portion for the insertion piece, a second lock portion for the cover member, and a locking hole for penetrating the first lock portion and the second lock portion. Therefore, for example, a Nanjing lock. By inserting a lock member such as the above into the locking hole, the insertion piece can be fixed in a state of being attached to the cover member.
Further, since the first lock portion is provided on the end face on the side opposite to the end face on the side where the insertion piece is attached to the cover member, for example, when the cover member is a hexahedron, the insertion piece of the cover member is attached. The lock member can be attached to the surface to be attached, and it is not necessary to bother to turn the hand to attach the lock member to the surface opposite to the surface to be attached. Therefore, even in the semiconductor manufacturing process where the work space is limited, the insertion piece can be easily fixed to the cover member.

誤操作防止カバーは、操作ロッドおよび操作部の中心軸に直交する方向からであれば、どの角度から検知部材を装着しても、操作部の第２位置への移動し忘れを確実に防止することができる。
すなわち、操作部が円環状であるため、操作部中心から検知部が干渉する外周面の任意の点までの距離は常に一定であり、検知部が外周面と干渉する位置は、操作ロッドおよび操作部の中心軸に直交する方向からであれば、どの角度から検知部材を装着しても、一定である。したがって、操作部が第１位置にあるときは、操作ロッドおよび操作部の中心軸に直交する方向からであれば、どの角度から検知部材を装着しても、一定の位置で検知部材の装着ができなくなるため、装着する角度によって装着できなくなる位置がばらつきを原因とする検知部材の装着可否の誤認を防止できる。
一方、操作部が第２位置にあるときは、操作部が装着完了された差込片を前記操作ロッドの中心軸を中心に回転投影した空間から退避するので、操作ロッドおよび操作部の中心軸に直交する方向からであれば、どの角度から検知部材を装着しても、検知部材と操作部とが干渉することなく、検知部材を装着完了させることができる。
よって、実際に誤操作防止カバー付き手動弁が配設される半導体製造ラインの作業スペースに応じて、作業者が自由に差込片を装着する方向を選択することができる。 The erroneous operation prevention cover ensures that the detection member is prevented from being forgotten to move to the second position of the operation unit from any angle as long as it is from the direction orthogonal to the central axis of the operation rod and the operation unit. Can be done.
That is, since the operation unit is annular, the distance from the center of the operation unit to an arbitrary point on the outer peripheral surface where the detection unit interferes is always constant, and the position where the detection unit interferes with the outer peripheral surface is the operation rod and the operation. As long as it is from the direction orthogonal to the central axis of the portion, it is constant regardless of the angle at which the detection member is mounted. Therefore, when the operation unit is in the first position, the detection member can be installed at a fixed position regardless of the angle at which the detection member is installed from the direction orthogonal to the operation rod and the central axis of the operation unit. Since it cannot be mounted, it is possible to prevent misidentification of whether or not the detection member can be mounted due to variations in the mounting position depending on the mounting angle.
On the other hand, when the operation unit is in the second position, the insertion piece to which the operation unit has been mounted is retracted from the space rotationally projected around the central axis of the operation rod, so that the central axis of the operation rod and the operation unit is retracted. The detection member can be completely mounted without interference between the detection member and the operation unit, regardless of the angle at which the detection member is mounted, as long as the direction is orthogonal to the above.
Therefore, the operator can freely select the direction in which the insertion piece is mounted according to the work space of the semiconductor manufacturing line in which the manual valve with the erroneous operation prevention cover is actually arranged.

誤操作防止カバーは、誤操作防止カバー付き手動弁に対して操作ロッドの中心軸を中心に９０度ずつ回転させても誤操作防止カバー付き手動弁に装着し、係合させることが可能である。１方向のみで装着可能である場合と比べ、作業性が向上する。 The erroneous operation prevention cover can be attached to and engaged with the manual valve with the erroneous operation prevention cover even if the manual valve with the erroneous operation prevention cover is rotated by 90 degrees about the central axis of the operation rod. Workability is improved as compared with the case where it can be mounted in only one direction.

誤操作防止カバー付き手動弁１に誤操作防止カバー１０を装着した状態の斜視図である。It is a perspective view of the state which attached the erroneous operation prevention cover 10 to the manual valve 1 with the erroneous operation prevention cover. 誤操作防止カバー１０の未装着状態の誤操作防止カバー付き手動弁１の斜視図である。It is a perspective view of the manual valve 1 with an erroneous operation prevention cover in a state where the erroneous operation prevention cover 10 is not attached. 誤操作防止カバー１０の斜視図である。It is a perspective view of the erroneous operation prevention cover 10. 誤操作防止カバー付き手動弁１に誤操作防止カバー１０を装着した状態の正面図である。It is a front view of the state which attached the erroneous operation prevention cover 10 to the manual valve 1 with the erroneous operation prevention cover. 誤操作防止カバー付き手動弁１に誤操作防止カバー１０を装着した状態の右側面図である。It is a right side view of the state where the erroneous operation prevention cover 10 is attached to the manual valve 1 with the erroneous operation prevention cover. 図５のＡ−Ａ断面図である。FIG. 5 is a cross-sectional view taken along the line AA of FIG. 図５のＢ−Ｂ断面図である。FIG. 5 is a cross-sectional view taken along the line BB of FIG. 検知部材１０２が仮固定位置にある状態のＢ−Ｂ断面図である。FIG. 5 is a cross-sectional view taken along the line BB in a state where the detection member 102 is in a temporarily fixed position. 図６のダイアフラム押え２１と、ボディ２３との係合部を示す拡大図である。FIG. 6 is an enlarged view showing an engaging portion between the diaphragm retainer 21 of FIG. 6 and the body 23. 図４のＤ−Ｄ断面図である。FIG. 4 is a cross-sectional view taken along the line DD of FIG. 誤操作防止カバー１０の未装着状態の誤操作防止カバー付き手動弁１の右側面図である。It is a right side view of the manual valve 1 with an erroneous operation prevention cover in a state where the erroneous operation prevention cover 10 is not attached. 図１１のＣ−Ｃ断面図である。FIG. 11 is a cross-sectional view taken along the line CC of FIG. 南京錠２４により、検知部材１０２をカバー部材１０１に固定した状態を示す誤操作防止カバー付き手動弁１の斜視図である。FIG. 5 is a perspective view of a manual valve 1 with an erroneous operation prevention cover showing a state in which the detection member 102 is fixed to the cover member 101 by a padlock 24.

本発明の誤操作防止カバー付き手動弁１の実施形態について、図面を参照しながら詳細に説明する。
誤操作防止カバー付き手動弁１は、取付プレート５を介して半導体製造装置に設置され、反応室に接続するラインへの流体供給を制御するためのものである。
誤操作防止カバー付き手動弁１は、図６に示すように、弁部２と、手動機構３と、ロック機構４とからなり、さらに手動機構３を構成するハンドル３１を覆うための誤操作防止カバー１０を有する。
誤操作防止カバー付き手動弁１は、ハンドル３１の回転操作によりスライドナット３３が中心軸を中心に回転され、スライドナット３３の回転により操作ロッド３２が開弁方向（図６中上方向）また閉弁方向（図６中下方向）に移動されるため、弁部２において、操作ロッド３２に接続された弁体２２を弁座２３ａに当接または離間させ、流体流量を制御することができる。 An embodiment of the manual valve 1 with an erroneous operation prevention cover of the present invention will be described in detail with reference to the drawings.
The manual valve 1 with an erroneous operation prevention cover is installed in the semiconductor manufacturing apparatus via the mounting plate 5 to control the fluid supply to the line connected to the reaction chamber.
As shown in FIG. 6, the manual valve 1 with an erroneous operation prevention cover includes a valve portion 2, a manual mechanism 3, and a lock mechanism 4, and further, an erroneous operation prevention cover 10 for covering the handle 31 constituting the manual mechanism 3. Have.
In the manual valve 1 with an erroneous operation prevention cover, the slide nut 33 is rotated about the central axis by the rotation operation of the handle 31, and the operation rod 32 is opened (upward in FIG. 6) and closed by the rotation of the slide nut 33. Since it is moved in the direction (downward in FIG. 6), the valve body 22 connected to the operation rod 32 can be brought into contact with or separated from the valve seat 23a in the valve portion 2 to control the fluid flow rate.

また、ロック機構４を構成するロックリング４１は、スライドナット３３の外周面上に、ロック機構４を解除する第１位置と、ロック機構４を有効にする第２位置と、の間を移動可能に保持されている。ロックリング４１が第１位置にある場合は、ハンドル操作により誤操作防止カバー付き手動弁１を開弁および閉弁させることが可能である。一方で、ロックリング４１が第２位置にある場合は、スライドナット３３が回転不能となるため（詳細は後述）、ハンドル操作によって操作ロッド３２を開弁方向（図６中上方向）また閉弁方向（図６中下方向）に移動させることが出来なくなり、誤操作防止カバー付き手動弁１を開弁および閉弁させることが不能となる。 Further, the lock ring 41 constituting the lock mechanism 4 can move between the first position for releasing the lock mechanism 4 and the second position for enabling the lock mechanism 4 on the outer peripheral surface of the slide nut 33. It is held in. When the lock ring 41 is in the first position, the manual valve 1 with the erroneous operation prevention cover can be opened and closed by operating the handle. On the other hand, when the lock ring 41 is in the second position, the slide nut 33 cannot rotate (details will be described later), so that the operation rod 32 is opened (upward in FIG. 6) and closed by operating the handle. It becomes impossible to move in the direction (downward in FIG. 6), and it becomes impossible to open and close the manual valve 1 with the erroneous operation prevention cover.

誤操作防止カバー１０は、開弁または閉弁作業を完了した後、誤操作防止カバー付き手動弁１に装着されることで、ハンドル３１を覆い、作業者が直接ハンドル３１に触れることができないようにするものである。また、誤操作防止カバー１０に装着される検知部材１０２により、ロックリング４１が第２位置に移動されているか否か検知することが可能となっており、作業者がロックリング４１を第２位置に移動させ忘れた状態で誤操作防止カバー付き手動弁１が放置されることを防止する。 The erroneous operation prevention cover 10 is attached to the manual valve 1 with the erroneous operation prevention cover after the valve opening or closing operation is completed to cover the handle 31 and prevent the operator from directly touching the handle 31. It is a thing. Further, the detection member 102 attached to the erroneous operation prevention cover 10 makes it possible to detect whether or not the lock ring 41 has been moved to the second position, and the operator can move the lock ring 41 to the second position. Prevents the manual valve 1 with the erroneous operation prevention cover from being left unattended when it is forgotten to move.

以下、誤操作防止カバー付き手動弁１の構成について詳しく説明する。
まず、手動機構３について説明する。
手動機構３は、ハンドル３１と、操作ロッド３２と、スライドナット３３と、スライドナットカバー３４と、クリップ３５と、インジケータカバー３６と、からなる。 Hereinafter, the configuration of the manual valve 1 with the erroneous operation prevention cover will be described in detail.
First, the manual mechanism 3 will be described.
The manual mechanism 3 includes a handle 31, an operation rod 32, a slide nut 33, a slide nut cover 34, a clip 35, and an indicator cover 36.

ハンドル３１は、図６に示すように中央部に貫通孔３１ａを有する略円筒形状であり、図２に示すように外周面には複数の滑り止め突起３１ｂが円周方向に等間隔に設けられている。
ハンドル３１の上端面には、貫通孔３１ａを塞ぐように透明体からなるインジケータカバー３６が備えられており、貫通孔３１ａに挿通される操作ロッド３２の上端部が目視可能となっている。
したがって、インジケータカバー３６を通して視認可能な操作ロッド３２の上端部の位置を参考にしながら弁開度を把握し、ハンドル３１を回転させることが可能である。 As shown in FIG. 6, the handle 31 has a substantially cylindrical shape having a through hole 31a in the central portion, and as shown in FIG. 2, a plurality of non-slip protrusions 31b are provided on the outer peripheral surface at equal intervals in the circumferential direction. ing.
An indicator cover 36 made of a transparent body is provided on the upper end surface of the handle 31 so as to close the through hole 31a, and the upper end portion of the operation rod 32 inserted into the through hole 31a is visible.
Therefore, it is possible to grasp the valve opening degree and rotate the handle 31 while referring to the position of the upper end portion of the operation rod 32 that can be visually recognized through the indicator cover 36.

図１１に示すように、ハンドル３１の下面には、第２係止部３１２が下垂しており、第２係止部３１２の両端には、図１２に示すように半径方向外側に向かって弾性変形可能な押え部３１２ａ，３１２ａ。が形成されている。
さらに、第１係止部３１１が、第２係止部３１２と対向するようにハンドル３１の下面から下垂しており、クリップ３５を保持している。
ハンドル３１が回転されると、クリップ３５は、第１係止部３１１と、第２係止部３１２と、により保持されているため、ハンドル３１と一体に回転する。 As shown in FIG. 11, a second locking portion 312 hangs down on the lower surface of the handle 31, and both ends of the second locking portion 312 are elastic outward in the radial direction as shown in FIG. Deformable presser portions 312a, 312a. Is formed.
Further, the first locking portion 311 hangs down from the lower surface of the handle 31 so as to face the second locking portion 312, and holds the clip 35.
When the handle 31 is rotated, the clip 35 is held by the first locking portion 311 and the second locking portion 312, so that the clip 35 rotates integrally with the handle 31.

クリップ３５は、図１２に示すように、挟持部３５１を有し、略Ｃ字型形状をなしている。これらの挟持部３５１，３５１は、相互に離間したり、元の位置に戻ったりする近接離間運動方向に弾性変形可能となっている。
挟持部３５１の先端には、第２係止部３１２の係止部当接面３１２ｂに当接する第２係止部当接面３５１ｂが形成されている。さらに、挟持部３５１の内周面には、スライドナット３３の上側の端部に形成される係合部３３ｂの外周面の全ての面と当接可能な挟持部当接面３５１ａが形成されている。
挟持部３５１，３５１は、ハンドル３１の一対の押え部３１２ａ，３１２ａ挟持されており、スライドナット３３を挟持する方向に所定の弾性力を与えられており、挟持部当接面３５１ａが、スライドナット３３の係合部３３ｂの外周面の全ての面と当接し、挟持するため、ハンドル３１と一体に回転するクリップ３５の回転力が、スライドナット３３に伝達されることとなる。 As shown in FIG. 12, the clip 35 has a holding portion 351 and has a substantially C-shaped shape. These sandwiching portions 351 and 351 are elastically deformable in the proximity separation motion direction in which they are separated from each other and return to their original positions.
A second locking portion contact surface 351b that contacts the locking portion contact surface 312b of the second locking portion 312 is formed at the tip of the sandwiching portion 351. Further, on the inner peripheral surface of the holding portion 351, a holding portion contact surface 351a capable of contacting all the outer peripheral surfaces of the engaging portion 33b formed at the upper end of the slide nut 33 is formed. There is.
The sandwiching portions 351 and 351 are sandwiched between a pair of holding portions 312a and 312a of the handle 31, and a predetermined elastic force is applied in the direction of sandwiching the slide nut 33, and the sandwiching portion contact surface 351a is a slide nut. Since the clip 35 is in contact with and sandwiched with all the outer peripheral surfaces of the engaging portion 33b of the 33, the rotational force of the clip 35 that rotates integrally with the handle 31 is transmitted to the slide nut 33.

スライドナット３３は、図６に示すように、中央部に長手方向に貫通する貫通孔を有し、略円筒形状をなしている。当該貫通孔の内周面には、雌ねじ部３３ａが形成され、雌ねじ部３３ａは、操作ロッド３２の雄ねじ部３２ａと螺着する。また、操作ロッド３２は、回転止め部３２ｂを図示しないダイアフラム押え２１の一部に周方向に係止しており、スライドナット３３内で自転しないようになっている。
したがって、ハンドル３１操作によってスライドナット３３が中心軸を中心に回転されると、操作ロッド３２は、雄ねじ部３２ａ雌ねじ部３３ａによってねじ送りされ、スライドナット３３に対して相対的に図６の上下方向に螺進可能となっている。操作ロッド３２の下端部には弁体２２が結合されており、操作ロッド３２の上下方向の運動に伴い、弁体２２も上下に運動し、開弁および閉弁動作が行われる。 As shown in FIG. 6, the slide nut 33 has a through hole penetrating in the longitudinal direction in the central portion, and has a substantially cylindrical shape. A female threaded portion 33a is formed on the inner peripheral surface of the through hole, and the female threaded portion 33a is screwed to the male threaded portion 32a of the operating rod 32. Further, the operation rod 32 has a rotation stop portion 32b locked to a part of a diaphragm retainer 21 (not shown) in the circumferential direction so as not to rotate in the slide nut 33.
Therefore, when the slide nut 33 is rotated about the central axis by operating the handle 31, the operation rod 32 is screwed by the male screw portion 32a and the female screw portion 33a, and is screwed in the vertical direction of FIG. 6 relative to the slide nut 33. It is possible to screw in. A valve body 22 is coupled to the lower end of the operation rod 32, and the valve body 22 also moves up and down as the operation rod 32 moves up and down, and valve opening and closing operations are performed.

スライドナット３３は、スライドナットカバー３４の中央部に設けられた貫通孔３４ｃに挿通されている。そして、図６中下側の端部に、フランジ部３３ｃを有し、スライドナットカバー３４の段差部３４ｂと、ダイアフラム押え２１の段差部２１ｄにより、スライドナット３３の中心軸を中心とした回転が可能なように保持されている。
段差部３４ｂは、図中下側に突出する突起を有しており、当該突起がフランジ部３３ｃの上面と接触している。突起を接触させることで、接触面積を最小限とすることができ、スライドナット３３が、スライドナットカバー３４と、ダイアフラム押え２１と、に対して回転しやすくなる。 The slide nut 33 is inserted into a through hole 34c provided in the central portion of the slide nut cover 34. A flange portion 33c is provided at the lower end in FIG. 6, and the step portion 34b of the slide nut cover 34 and the step portion 21d of the diaphragm retainer 21 allow the slide nut 33 to rotate about the central axis. It is held as possible.
The step portion 34b has a protrusion protruding downward in the drawing, and the protrusion is in contact with the upper surface of the flange portion 33c. By bringing the protrusions into contact, the contact area can be minimized, and the slide nut 33 can easily rotate with respect to the slide nut cover 34 and the diaphragm retainer 21.

また、スライドナット３３の係合部３３ｂとフランジ部３３ｃとの間の外周面には、ロック機構４を構成する円環状のロックリング４１が第１位置と第２位置との間を移動可能に保持されている。そして、図７に示すように、ロックリング４１の内周面には係合突起４１ｂが設けられており、当該係合突起４１ｂが、スライドナット３３の外周面に設けられた係合溝３３ｄと係合している。係合突起４１ｂと係合溝３３ｄが係合しているため、スライドナット３３がスライドナット３３の軸を中心とした回転をするとき、ロックリング４１とスライドナット３３とが一体となって回転する。 Further, on the outer peripheral surface between the engaging portion 33b and the flange portion 33c of the slide nut 33, an annular lock ring 41 constituting the lock mechanism 4 can move between the first position and the second position. It is being held. Then, as shown in FIG. 7, an engaging protrusion 41b is provided on the inner peripheral surface of the lock ring 41, and the engaging protrusion 41b is formed with an engaging groove 33d provided on the outer peripheral surface of the slide nut 33. Engaged. Since the engaging protrusion 41b and the engaging groove 33d are engaged, when the slide nut 33 rotates about the axis of the slide nut 33, the lock ring 41 and the slide nut 33 rotate integrally. ..

スライドナットカバー３４の図６中上側の端面には、ロック機構４を構成する歯部３４ａが形成され、歯部３４ａのロックリング４１の歯部４１ａと係合可能となっている。図６に示すようにロックリング４１が、歯部３４ａと係合している場合がロックリング４１の第２位置であり、この場合に、ロックリング４１は、ロックリング４１の軸を中心とした回転をすることができない。ロックリング４１が回転不能であるため、ロックリング４１と一体となっているスライドナット３３も、スライドナット３３の軸を中心とした回転をすることができない。作業者がハンドル３１の操作をしようとしても、スライドナット３３が回転しないため、スライドナット３３の雌ねじ部３３ａに螺着された操作ロッド３２は上下運動することがない。操作ロッド３２は上下運動することがないため、操作ロッド３２に接続された弁体２２も上下運動することがなく、誤操作防止カバー付き手動弁１の開弁および閉弁動作が行われることがない。 A tooth portion 34a constituting the lock mechanism 4 is formed on the upper end surface of the slide nut cover 34 in FIG. 6, and can be engaged with the tooth portion 41a of the lock ring 41 of the tooth portion 34a. As shown in FIG. 6, the case where the lock ring 41 is engaged with the tooth portion 34a is the second position of the lock ring 41. In this case, the lock ring 41 is centered on the axis of the lock ring 41. I can't rotate. Since the lock ring 41 cannot rotate, the slide nut 33 integrated with the lock ring 41 cannot rotate about the axis of the slide nut 33. Even if the operator tries to operate the handle 31, the slide nut 33 does not rotate, so that the operation rod 32 screwed to the female screw portion 33a of the slide nut 33 does not move up and down. Since the operation rod 32 does not move up and down, the valve body 22 connected to the operation rod 32 does not move up and down, and the manual valve 1 with the erroneous operation prevention cover does not open and close. ..

また、ロックリング４１が第２位置にある場合に、ハンドル３１を回転させようとすると、スライドナット３３が回転不能となっているため、ハンドル３１に所定値以上の回転力が加わる。ハンドル３１に所定値以上の回転力が加わると、スライドナット３３の係合部３３ｂがクリップ３５の挟持部当接面３５１ａを押し広げ、挟持部３５１，３５１が相互に離間する方向に弾性変形する。挟持部３５１，３５１が相互に離間する方向に弾性変形することで、ハンドル３１と、ハンドル３１と一体になっているクリップ３５とが、スライドナット３３に対して、空転するため、ハンドル３１に与えられた回転力がスライドナット３３に伝達されず、誤操作防止カバー付き手動弁１の開弁および閉弁動作が行われない。 Further, when the lock ring 41 is in the second position and the handle 31 is to be rotated, the slide nut 33 cannot rotate, so that a rotational force of a predetermined value or more is applied to the handle 31. When a rotational force of a predetermined value or more is applied to the handle 31, the engaging portion 33b of the slide nut 33 expands the holding portion contact surface 351a of the clip 35, and the holding portions 351 and 351 are elastically deformed in a direction in which they are separated from each other. .. Since the holding portions 351 and 351 are elastically deformed in the direction in which they are separated from each other, the handle 31 and the clip 35 integrated with the handle 31 idle with respect to the slide nut 33, so that the handle 31 is provided with the handle 31. The generated rotational force is not transmitted to the slide nut 33, and the valve opening and closing operations of the manual valve 1 with the erroneous operation prevention cover are not performed.

一方、図１１に示すのが、ロックリング４１の第１位置である。ロックリング４１が第１位置にある場合には、ロックリング４１の歯部４１ａとスライドナットカバー３４の歯部３４ａとの係合が解除されているため、作業者がハンドル３１を操作し、回転力を与えれば、スライドナット３３が回転し、誤操作防止カバー付き手動弁１の開弁および閉弁動作が行われる。 On the other hand, FIG. 11 shows the first position of the lock ring 41. When the lock ring 41 is in the first position, the tooth portion 41a of the lock ring 41 and the tooth portion 34a of the slide nut cover 34 are disengaged, so that the operator operates the handle 31 to rotate the lock ring 41. When a force is applied, the slide nut 33 rotates to open and close the manual valve 1 with the erroneous operation prevention cover.

スライドナットカバー３４の下方には、弁部２を構成するダイアフラム押え２１と、ボディ２３とが位置しており、さらにボディ２３の下方には、取付プレート５が配置される。そして、図１０に示すように、スライドナットカバー３４の挿通孔３４ｅと、ダイアフラム押え２１の挿通孔２１ｅと、ボディ２３の挿通孔２３ｇと、取付プレート５の挿通孔５ａと、にボルト５０が挿通され、ナット５１で締め付けることで、スライドナットカバー３４と、ダイアフラム押え２１と、ボディ２３と、取付プレート５とが一体となる。 The diaphragm retainer 21 constituting the valve portion 2 and the body 23 are located below the slide nut cover 34, and the mounting plate 5 is arranged below the body 23. Then, as shown in FIG. 10, the bolt 50 is inserted into the insertion hole 34e of the slide nut cover 34, the insertion hole 21e of the diaphragm retainer 21, the insertion hole 23g of the body 23, and the insertion hole 5a of the mounting plate 5. Then, by tightening with the nut 51, the slide nut cover 34, the diaphragm retainer 21, the body 23, and the mounting plate 5 are integrated.

次に弁部２について説明する。
弁部２は、ボディ２３と、ダイアフラム押え２１と、弁体２２と、から構成される。また、ボディ２３の材質は、樹脂製であり、特に耐酸性を有するフッ素系樹脂が適する。 Next, the valve portion 2 will be described.
The valve portion 2 includes a body 23, a diaphragm retainer 21, and a valve body 22. Further, the material of the body 23 is made of resin, and a fluorine-based resin having acid resistance is particularly suitable.

ボディ２３は、上部にダイアフラム押え取付端２３ｅが突設され、ダイアフラム押え取付端２３ｅの内面には、入力側の流入経路２３ｃと、出力側の流出経路２３ｄとを連通させる弁室２３ｂが形成されている。そして、弁室２３ｂの底面が弁座２３ａであり、その上方に弁体２２が配設され、弁体２２の当接部２２ａが弁座２３ａと当接又は離間することにより流体供給を制御する。
弁体２２は、上方になだらかに膨出して湾曲した形状のダイアフラム部２２ｂを有しており、操作ロッド３２の上下運動に伴い、ダイアフラム部２２ｂが弾性変形し、弁体２２を上下させる。
また、弁体２２は、外周部に備えられた圧入部２２ｃが、ボディ２３の圧入溝２３ｆに圧入され、さらに上端面が、ダイアフラム押え２１の押え面２１ａにより、位置決め固定されている The diaphragm retainer mounting end 23e is projected from the upper portion of the body 23, and a valve chamber 23b is formed on the inner surface of the diaphragm retainer mounting end 23e to communicate the inflow path 23c on the input side and the outflow path 23d on the output side. ing. The bottom surface of the valve chamber 23b is the valve seat 23a, the valve body 22 is arranged above the valve seat 23a, and the contact portion 22a of the valve body 22 contacts or separates from the valve seat 23a to control the fluid supply. ..
The valve body 22 has a diaphragm portion 22b having a curved shape that gently bulges upward, and the diaphragm portion 22b elastically deforms as the operation rod 32 moves up and down, causing the valve body 22 to move up and down.
Further, in the valve body 22, the press-fitting portion 22c provided on the outer peripheral portion is press-fitted into the press-fitting groove 23f of the body 23, and the upper end surface is positioned and fixed by the pressing surface 21a of the diaphragm pressing 21.

ダイアフラム押え２１は、下端面に設けられた凹溝２１ｂによりボディ２３のダイアフラム押え取付端２３ｅと係合している。
また、凹溝２１ｂと、ダイアフラム押え取付端２３ｅの内周面との間には、Ｏリング７が配置されており、ダイアフラム部２２ｂからの透過ガスがボルト５０に到達しないようになっている。透過ガスにより、ボルト５０が腐食するおそれがあるためである。 The diaphragm retainer 21 is engaged with the diaphragm retainer mounting end 23e of the body 23 by a concave groove 21b provided on the lower end surface.
Further, an O-ring 7 is arranged between the concave groove 21b and the inner peripheral surface of the diaphragm holding end 23e so that the permeated gas from the diaphragm portion 22b does not reach the bolt 50. This is because the permeated gas may corrode the bolt 50.

ダイアフラム押え２１下端部の図６中左右２か所には、対向するように押圧部２１１，２１１が形成されており、押圧部２１１，２１１の先端内周面には、図９に示すように爪部２１１ａが形成されている。
対向する爪部２１１ａ内面と爪部２１１ａ内面との距離は、ダイアフラム押え取付端２３ｅの外径よりも小さく、ダイアフラム押え２１と、ボディ２３とが係合されると、図９に示すようにダイアフラム押え取付端２３ｅが爪部２１１ａを外側に押し広げ、押圧部２１１が弾性変形する。
押圧部２１１が弾性変形することにより生じる反力でダイアフラム押え取付端２３ｅが押圧されており、ダイアフラム押え２１が、ボディ２３に対してハンドル３１の回転方向にがたつかない。 Pressing portions 211 and 211 are formed at two positions on the left and right sides of the lower end of the diaphragm retainer 21 in FIG. 6 so as to face each other, and as shown in FIG. The claw portion 211a is formed.
The distance between the inner surface of the claw portion 211a and the inner surface of the claw portion 211a facing each other is smaller than the outer diameter of the diaphragm retainer mounting end 23e, and when the diaphragm retainer 21 and the body 23 are engaged, the diaphragm is as shown in FIG. The presser foot mounting end 23e pushes the claw portion 211a outward, and the pressing portion 211 is elastically deformed.
The diaphragm retainer mounting end 23e is pressed by the reaction force generated by the elastic deformation of the pressing portion 211, and the diaphragm retainer 21 does not rattle in the rotational direction of the handle 31 with respect to the body 23.

ダイアフラム押え２１が、ボディ２３に対して作業者がハンドルを回転させた方向にがたつかないようにしている理由は、ダイアフラム押え２１がずれることで作業者に、閉弁および閉弁の精度に悪影響があるのではないか、という不安感を与えることを防止するためである。 The reason why the diaphragm retainer 21 prevents the operator from rattling in the direction in which the handle is rotated with respect to the body 23 is that the displacement of the diaphragm retainer 21 gives the operator the accuracy of valve closing and valve closing. This is to prevent giving anxiety that there may be an adverse effect.

より詳しく説明すると、ダイアフラム押え２１の段差部２１ｄとスライドナットカバー３４の段差部３４ｂとで、スライドナット３３のフランジ部３３ｃを保持しているため、ハンドル３１の回転操作によりスライドナット３３が回転されると、摩擦力により、ダイアフラム押え２１にも回転力が伝達される。
先述の通り、スライドナットカバー３４と、ダイアフラム押え２１と、ボディ２３と、取付プレート５とは、ボルト５０と、ナット５１とにより一体となっており、ボルト５０と、ナット５１との締結が確実になされていれば、上記回転力が加わってもダイアフラム押え２１は回転方向にがたつかない。
しかし、半導体製造工程で使用される流体の温度は１００℃程度と高く、誤操作防止カバー付き手動弁１が高温下に置かれる。そして、メンテナンス時には手で触れることができるよう、誤操作防止カバー付き手動弁１の温度を常温まで下げる。高温と常温の温度サイクルが繰り返されることにより、誤操作防止カバー付き手動弁１を構成する部材の膨張と収縮が繰り返され、膨張と収縮が繰り返されるうち、ボルト５０と、ナット５１との締結力が低下するおそれがある。ボルト５０と、ナット５１との締結力が低下した状態で、上記のようにダイアフラム押え２１に回転力が加わると、回転力が加わった方向（作業者がハンドルを回転させた方向）に、ダイアフラム押え２１がずれてしまい、作業者に不安感を与えることになる。
そこで、ダイアフラム押え２１の押圧部２１１により、ボディ２３のダイアフラム押え取付端２３ｅを押圧し、ダイアフラム押え２１が、ボディ２３に対してスライドナット３３の回転方向にがたつかないようにしているのである。 More specifically, since the flange portion 33c of the slide nut 33 is held by the step portion 21d of the diaphragm retainer 21 and the step portion 34b of the slide nut cover 34, the slide nut 33 is rotated by the rotation operation of the handle 31. Then, due to the frictional force, the rotational force is also transmitted to the diaphragm retainer 21.
As described above, the slide nut cover 34, the diaphragm retainer 21, the body 23, and the mounting plate 5 are integrated by the bolt 50 and the nut 51, and the bolt 50 and the nut 51 are securely fastened. If this is done, the diaphragm retainer 21 will not rattle in the rotational direction even if the above rotational force is applied.
However, the temperature of the fluid used in the semiconductor manufacturing process is as high as about 100 ° C., and the manual valve 1 with the erroneous operation prevention cover is placed at a high temperature. Then, the temperature of the manual valve 1 with the erroneous operation prevention cover is lowered to room temperature so that it can be touched by hand during maintenance. By repeating the temperature cycle of high temperature and normal temperature, the members constituting the manual valve 1 with the erroneous operation prevention cover are repeatedly expanded and contracted, and while the expansion and contraction are repeated, the fastening force between the bolt 50 and the nut 51 is increased. It may decrease. When a rotational force is applied to the diaphragm retainer 21 as described above with the fastening force between the bolt 50 and the nut 51 reduced, the diaphragm is in the direction in which the rotational force is applied (the direction in which the operator rotates the handle). The presser foot 21 will be displaced, giving the operator a sense of insecurity.
Therefore, the pressing portion 211 of the diaphragm retainer 21 presses the diaphragm retainer mounting end 23e of the body 23 so that the diaphragm retainer 21 does not rattle in the rotation direction of the slide nut 33 with respect to the body 23. ..

また、ダイアフラム押え２１は、図６に示すように中央部に操作ロッド３２が挿通される貫通孔２１ｃを有し、貫通孔２１ｃの内周面と、操作ロッド３２の外周面との間には、Ｏリング６が配置され、ダイアフラム部２２ｂから透過ガスがボルト５０に到達しないようになっている。透過ガスにより、ボルト５０が腐食するおそれがあるためである。 Further, as shown in FIG. 6, the diaphragm retainer 21 has a through hole 21c in which the operation rod 32 is inserted, and is located between the inner peripheral surface of the through hole 21c and the outer peripheral surface of the operation rod 32. , The O-ring 6 is arranged so that the permeated gas does not reach the bolt 50 from the diaphragm portion 22b. This is because the permeated gas may corrode the bolt 50.

ボディ２３の下端部には、取付プレート５が配置され、誤操作防止カバー付き手動弁１は取付プレート５を介して半導体製造装置に設置されるとともに、継手８を介して流体供給ラインに組付けられる。 A mounting plate 5 is arranged at the lower end of the body 23, and the manual valve 1 with an erroneous operation prevention cover is installed in the semiconductor manufacturing apparatus via the mounting plate 5 and assembled to the fluid supply line via the joint 8. ..

次に誤操作防止カバー１０について説明する。
誤操作防止カバー１０は、一端が閉塞され、他端が開口された筒形状のカバー部材１０１と、ロックリング４１の第２位置への移動し忘れを防止するための検知部材１０２とからなる。 Next, the erroneous operation prevention cover 10 will be described.
The erroneous operation prevention cover 10 includes a tubular cover member 101 whose one end is closed and the other end is open, and a detection member 102 for preventing the lock ring 41 from being forgotten to move to the second position.

誤操作防止カバー１０を誤操作防止カバー付き手動弁１に装着すると、ハンドル３１と、ロックリング４１とが、カバー部材１０１の中空内部に位置され、外部に露出されない状態となる。
ハンドル３１が外部に露出していないため、使用者はハンドル３１に触れることが出来ず、無理にハンドル３１を操作しようとすることもなくなる。よって、使用者が無理にハンドル３１操作をしようとして、ハンドル３１に回転力を加え、ハンドル３１に加わった回転力が弁体２２に接続される操作ロッド３２に伝達され、弁開度に微小なずれが生じてしまうことを防止することができる。また、ロックリング４１も外部に露出していないため、不用意に手動機構３の制限が解除されてしまうこともない。 When the erroneous operation prevention cover 10 is attached to the manual valve 1 with the erroneous operation prevention cover, the handle 31 and the lock ring 41 are located inside the hollow of the cover member 101 and are not exposed to the outside.
Since the handle 31 is not exposed to the outside, the user cannot touch the handle 31 and does not try to operate the handle 31 forcibly. Therefore, when the user tries to forcibly operate the handle 31, a rotational force is applied to the handle 31, and the rotational force applied to the handle 31 is transmitted to the operation rod 32 connected to the valve body 22, and the valve opening is minute. It is possible to prevent the deviation from occurring. Further, since the lock ring 41 is not exposed to the outside, the restriction of the manual mechanism 3 is not released carelessly.

カバー部材１０１は閉塞された端面（図６中上側の端面）に貫通孔１０１ａを有しており、図１に示すように、誤操作防止カバー１０が誤操作防止カバー付き手動弁１に装着された状態で、貫通孔１０１ａからインジケータカバー３６が突出する。そのため、作業者は、誤操作防止カバー付き手動弁１に誤操作防止カバー１０を装着した状態であっても、インジケータカバー３６を通して視認可能な操作ロッド３２の上端部の位置を参考にして弁開度を把握することが可能である。 The cover member 101 has a through hole 101a in the closed end surface (upper end surface in FIG. 6), and as shown in FIG. 1, a state in which the erroneous operation prevention cover 10 is attached to the manual valve 1 with the erroneous operation prevention cover. Then, the indicator cover 36 projects from the through hole 101a. Therefore, even when the erroneous operation prevention cover 10 is attached to the manual valve 1 with the erroneous operation prevention cover, the operator can adjust the valve opening degree with reference to the position of the upper end portion of the operation rod 32 that can be visually recognized through the indicator cover 36. It is possible to grasp.

また、カバー部材１０１の開口側の端面の四角には、カバー部材１０１を誤操作防止カバー付き手動弁１に装着したときにスライドナットカバー３４の上端部四角と係合する係合部１０１ｅが設けられている。係合部１０１ｅがスライドナットカバー３４と４角で係合することで、中心軸を中心とした回転方向への位置決めがなされる。 Further, an engaging portion 101e that engages with the upper end square of the slide nut cover 34 when the cover member 101 is attached to the manual valve 1 with an erroneous operation prevention cover is provided on the square of the end surface of the cover member 101 on the opening side. ing. By engaging the engaging portion 101e with the slide nut cover 34 at the four corners, positioning is performed in the rotational direction about the central axis.

また、カバー部材１０１の４面ある側面のうちの一つの面に、検知部材１０２を挿通するための検知部材挿通孔１０１ｃが設けられている。
検知部材１０２は、図７に示すように、カバー部材１０１に装着された状態で、カバー部材１０１の内部空間に延伸される検知部１０２ａを有し、平面視略コの字形状に形成されている。 Further, a detection member insertion hole 101c for inserting the detection member 102 is provided on one of the four side surfaces of the cover member 101.
As shown in FIG. 7, the detection member 102 has a detection unit 102a extending into the internal space of the cover member 101 in a state of being attached to the cover member 101, and is formed in a substantially U-shape in a plan view. There is.

そして、検知部材１０２は、カバー部材１０１の検知部材挿通孔１０１ｃに、仮固定位置と、装着完了位置との間を移動可能に保持され、検知部材１０２と、カバー部材１０１とは一体になっている。
もし、カバー部材１０１と検知部材１０２とが一体になっていないとすると、検知部材１０２を紛失するおそれや、検知部材１０２をカバー部材１０１に装着し忘れるおそれがある。
しかし、上記のようにカバー部材１０１と検知部材１０２とが一体になっていることで、検知部材１０２を紛失するおそれが解消される。また、検知部材１０２が仮固定位置にある場合、カバー部材１０１から突出しているため、検知部材１０２が装着完了位置にないことの視認性が向上し、検知部材１０２をカバー部材１０１に装着し忘れるおそれが解消される。 Then, the detection member 102 is movably held between the temporary fixing position and the mounting completion position in the detection member insertion hole 101c of the cover member 101, and the detection member 102 and the cover member 101 are integrated. There is.
If the cover member 101 and the detection member 102 are not integrated, the detection member 102 may be lost or the detection member 102 may be forgotten to be attached to the cover member 101.
However, since the cover member 101 and the detection member 102 are integrated as described above, the risk of losing the detection member 102 is eliminated. Further, when the detection member 102 is in the temporarily fixed position, since it protrudes from the cover member 101, the visibility that the detection member 102 is not in the mounting complete position is improved, and the detection member 102 is forgotten to be mounted on the cover member 101. The fear is eliminated.

また、カバー部材１０１と検知部材１０２とが一体になっていないとすると、カバー部材１０１を誤操作防止カバー付き手動弁１に装着した後に、作業者は検知部材１０２を持ってきて、カバー部材１０１に装着させなければならない。近年、半導体製造装置の小型化や集積化が進んでいることから、作業スペースも狭小化され、検知部材１０２を装着するための作業スペース確保が困難である可能性がある。
さらにまた、半導体製造装置の小型化や集積化により、誤操作防止カバー付き手動弁１も小型である場合が多い。誤操作防止カバー付き手動弁１が小型であると、検知部材１０２も当然に小型となり、検知部材１０２を検知部材挿通孔１０１ｃに挿通させる作業は細かい作業となり、作業効率の悪化が懸念される。特に作業者が怪我防止のために手袋をしている場合などは、細かい作業を行うことがますます困難である。 Further, assuming that the cover member 101 and the detection member 102 are not integrated, the operator brings the detection member 102 to the cover member 101 after mounting the cover member 101 on the manual valve 1 with the erroneous operation prevention cover. Must be fitted. In recent years, as semiconductor manufacturing equipment has become smaller and more integrated, the work space has also become narrower, and it may be difficult to secure a work space for mounting the detection member 102.
Furthermore, due to the miniaturization and integration of semiconductor manufacturing equipment, the manual valve 1 with an erroneous operation prevention cover is often also small. If the manual valve 1 with the erroneous operation prevention cover is small, the detection member 102 is naturally also small, and the work of inserting the detection member 102 into the detection member insertion hole 101c is a detailed work, and there is a concern that the work efficiency may be deteriorated. It is increasingly difficult to perform detailed work, especially if the worker is wearing gloves to prevent injury.

検知部材１０２がカバー部材１０１の検知部材挿通孔１０１ｃに、仮固定位置と装着完了位置との間を移動可能に保持され、検知部材１０２とカバー部材１０１とが一体になっていれば、作業者は、カバー部材１０１を誤操作防止カバー付き手動弁１に取り付けた後、検知部材１０２を仮固定位置から装着完了位置へ押し込むなどして移動させるのみで良い。よって、作業スペースの確保が容易であるとともに、作業が単純となるため、作業効率の悪化を防止できる。また、作業者が手袋をしている場合であっても、検知部材１０２を移動させるのみであれば、容易に作業が可能である。 If the detection member 102 is movably held in the detection member insertion hole 101c of the cover member 101 between the temporarily fixed position and the mounting completion position, and the detection member 102 and the cover member 101 are integrated, the operator After attaching the cover member 101 to the manual valve 1 with the erroneous operation prevention cover, the detection member 102 may be moved by pushing it from the temporary fixing position to the mounting completion position. Therefore, it is easy to secure a work space and the work is simplified, so that deterioration of work efficiency can be prevented. Further, even when the worker is wearing gloves, the work can be easily performed as long as the detection member 102 is only moved.

図３、図８に示すのが、検知部材１０２の仮固定位置である。検知部１０２ａが、誤操作防止カバー１０を誤操作防止カバー付き手動弁１に装着する際に、ハンドル３１に干渉しない位置にあり、検知部１０２ａ先端の内面側の係止突起１０２ｃと、検知部１０２ａ先端の外面側の係止突起１０２ｄとにより、検知部材挿通孔１０１ｃと係合しているため、検知部材１０２がカバー部材１０１から脱落しないようになっている。 3 and 8 show temporary fixing positions of the detection member 102. The detection unit 102a is located at a position where it does not interfere with the handle 31 when the erroneous operation prevention cover 10 is attached to the manual valve 1 with the erroneous operation prevention cover, and the locking projection 102c on the inner surface side of the tip of the detection unit 102a and the tip of the detection unit 102a. Since the detection member 102 is engaged with the detection member insertion hole 101c by the locking projection 102d on the outer surface side of the cover member 102, the detection member 102 is prevented from falling off from the cover member 101.

図７に示すのが、検知部材１０２の装着が完了した装着完了位置である。作業者が手指などにより、検知部材１０２を押し込むことで、仮固定位置から装着完了位置に移動させることが可能である。検知部材１０２が仮固定位置から押し込まれるに従い、検知部１０２ａが、カバー部材１０１の中空内部において、直線進路をもって移動していく。 FIG. 7 shows the mounting completion position where the mounting of the detection member 102 is completed. By pushing the detection member 102 with a finger or the like, the operator can move the detection member 102 from the temporarily fixed position to the mounting complete position. As the detection member 102 is pushed in from the temporarily fixed position, the detection unit 102a moves in a straight path inside the hollow of the cover member 101.

そして、検知部１０２ａが、カバー部材１０１の中空内部を移動する直線進路上にロックリング４１が位置するか否かにより、ロックリング４１を第２位置に移動し忘れていないかどうかの検知が行われる。
すなわち、作業者が誤操作防止カバー付き手動弁１の開弁または閉弁動作を終えた後、ロックリング４１を第２位置に移動させ忘れ、ロックリング４１が第１位置にある状態で誤操作防止カバー１０を誤操作防止カバー付き手動弁１に装着した場合、図１０に示すように、検知部材１０２とロックリング４１は図中上下方向の位置がほぼ同一となる。つまり、検知部１０２ａがカバー部材１０１の中空内部を移動する直線進路上にロックリング４１があることになり、この状態で作業者が検知部材１０２を装着させるために装着完了位置に押し込もうとすると、検知部１０２ａがロックリング４１の外周面に干渉し、検知部材１０２をカバー部材１０１に装着させることができない。 Then, the detection unit 102a detects whether or not the lock ring 41 has been forgotten to move to the second position depending on whether or not the lock ring 41 is located on the straight path that moves inside the hollow of the cover member 101. It is said.
That is, after the operator finishes opening or closing the manual valve 1 with the erroneous operation prevention cover, he forgets to move the lock ring 41 to the second position, and the erroneous operation prevention cover is in the state where the lock ring 41 is in the first position. When the 10 is attached to the manual valve 1 with the erroneous operation prevention cover, as shown in FIG. 10, the detection member 102 and the lock ring 41 are substantially the same in the vertical direction in the drawing. That is, the lock ring 41 is on a straight path in which the detection unit 102a moves inside the hollow of the cover member 101, and in this state, the operator tries to push the lock ring 41 into the mounting completion position in order to mount the detection member 102. Then, the detection unit 102a interferes with the outer peripheral surface of the lock ring 41, and the detection member 102 cannot be attached to the cover member 101.

一方で、ロックリング４１が第２位置にある場合には、ロックリング４１が、検知部１０２ａがカバー部材１０１の中空内部を移動する直線進路上から図１０中下方向に退避するため、検知部材１０２を押し込む際に、検知部１０２ａと、ロックリング４１が干渉することがなく、作業者は検知部材１０２を装着完了位置まで押し込むことができる。 On the other hand, when the lock ring 41 is in the second position, the lock ring 41 retracts in the downward direction in FIG. 10 from the straight path in which the detection unit 102a moves inside the hollow of the cover member 101, so that the detection member When pushing the 102, the detection unit 102a and the lock ring 41 do not interfere with each other, and the operator can push the detection member 102 to the mounting complete position.

したがって、作業者は、カバー部材１０１を誤操作防止カバー付き手動弁１に装着した状態で、カバー部材１０１に検知部材１０２を装着できるか否かによって、ロックリング４１が第１位置にあるのか、第２位置にあるのか知ることが可能である。ロックリング４１が第１位置にあると分かれば、カバー部材１０１を誤操作防止カバー付き手動弁１から取り外し、ロックリング４１を第２位置に移動させてから、改めてカバー部材１０１を誤操作防止カバー付き手動弁１に装着すれば良く、ロックリング４１が第２位置に移動されていない状態で誤操作防止カバー付き手動弁１が放置されることがない。
よって、作業者があるラインの流体制御を行うため、誤操作防止カバー付き手動弁１やその他流体制御機器を操作しようとし、隣のラインの誤操作防止カバー付き手動弁１に触れてしまったとき、当該隣のラインの誤操作防止カバー付き手動弁１のロックリング４１が第２位置に移動されていなかったがために意図せず弁開度が変更されてしまうというおそれが解消される。 Therefore, the operator determines whether the lock ring 41 is in the first position depending on whether or not the detection member 102 can be attached to the cover member 101 with the cover member 101 attached to the manual valve 1 with the erroneous operation prevention cover. It is possible to know if it is in two positions. If the lock ring 41 is found to be in the first position, the cover member 101 is removed from the manual valve 1 with the erroneous operation prevention cover, the lock ring 41 is moved to the second position, and then the cover member 101 is manually moved with the erroneous operation prevention cover. It suffices to be attached to the valve 1, and the manual valve 1 with the erroneous operation prevention cover is not left unattended when the lock ring 41 is not moved to the second position.
Therefore, when an operator tries to operate a manual valve 1 with an erroneous operation prevention cover or other fluid control equipment in order to control fluid in a certain line and touches the manual valve 1 with an erroneous operation prevention cover on the adjacent line, the relevant operation is concerned. Since the lock ring 41 of the manual valve 1 with the erroneous operation prevention cover on the adjacent line has not been moved to the second position, the possibility that the valve opening degree is unintentionally changed is eliminated.

また、誤操作防止のために単純にカバー部材１０１のみを誤操作防止カバー付き手動弁１に装着すると、ハンドル３１やロックリング４１が外部から視認できなくなるため、作業後にロック機構４が有効となっているか否かの確認を行うためには、カバー部材１０１を取り外してからロックリング４１の状態を確認しなければならないなど、作業効率の悪化が懸念される。しかし、上記のようにロック機構４が有効となっている場合のみカバー部材１０１に装着可能な検知部材１０２を備えることで、誤操作防止カバー付き手動弁１に装着されたカバー部材１０１に検知部材１０２が装着されていれば、ロック機構４が有効な状態であるということが一目で判別可能となる。よって、作業後にロック機構４が有効となっているか否かの確認を行うのが容易であり、作業効率の悪化を招かない。 Further, if only the cover member 101 is simply attached to the manual valve 1 with the erroneous operation prevention cover to prevent erroneous operation, the handle 31 and the lock ring 41 cannot be visually recognized from the outside. Therefore, is the lock mechanism 4 effective after the work? In order to confirm whether or not the cover member 101 is removed, the state of the lock ring 41 must be confirmed, and there is a concern that the work efficiency may be deteriorated. However, by providing the detection member 102 that can be attached to the cover member 101 only when the lock mechanism 4 is enabled as described above, the detection member 102 is attached to the cover member 101 that is attached to the manual valve 1 with the erroneous operation prevention cover. If is attached, it can be determined at a glance that the lock mechanism 4 is in an effective state. Therefore, it is easy to confirm whether or not the lock mechanism 4 is effective after the work, and the work efficiency is not deteriorated.

検知部材１０２をカバー部材１０１に装着完了すると、検知部１０２ａは、図６に示すように、ハンドル３１とロックリング４１との間に位置される。
検知部１０２ａが、抜け止め部３１２ｃの直下に位置しているため、誤操作防止カバー１０に対して、誤操作防止カバー１０が誤操作防止カバー付き手動弁１から抜ける方向（図中上方向）に力が加わった場合に、検知部材１０２が抜け止め部３１２ｃに当接し、誤操作防止カバー１０が誤操作防止カバー付き手動弁１から抜ける方向へ移動することを制限する。よって、誤操作防止カバー１０が誤操作防止カバー付き手動弁１から脱落することを防止することが可能である。
検知部材１０２を、カバー部材１０１脱落防止のためのロック構造としても使用することが可能であるため、脱落防止のための構造や、部材を別途に設ける必要がなく、製造コスト増大の防止や、製品構造の単純化が可能である。 When the detection member 102 is completely attached to the cover member 101, the detection unit 102a is positioned between the handle 31 and the lock ring 41 as shown in FIG.
Since the detection unit 102a is located directly below the retaining unit 312c, a force is applied to the erroneous operation prevention cover 10 in the direction in which the erroneous operation prevention cover 10 comes out of the manual valve 1 with the erroneous operation prevention cover (upward in the figure). When it is added, the detection member 102 comes into contact with the retaining portion 312c, and the erroneous operation prevention cover 10 is restricted from moving in the direction of coming out of the manual valve 1 with the erroneous operation prevention cover. Therefore, it is possible to prevent the erroneous operation prevention cover 10 from falling off from the manual valve 1 with the erroneous operation prevention cover.
Since the detection member 102 can also be used as a lock structure for preventing the cover member 101 from falling off, it is not necessary to separately provide a structure for preventing the cover member 101 from falling off, or to prevent an increase in manufacturing cost. The product structure can be simplified.

さらにまた、検知部材１０２は、カバー部材１０１に装着された状態で、カバー部材１０１の側面に略直角に立ち上がるようにロック部１０２ｂを有しており、ロック部１０２ｂは南京錠２４を挿通するための係止孔１０２ｅを備える。そして、カバー部材１０１は、検知部材１０２がカバー部材１０１に装着された状態で、ロック部１０２ｂの直下に対向するようにロック部１０１ｂを有しており、ロック部１０１ｂは南京錠２４を挿通するための係止孔１０１ｄを備える。
係止孔１０１ｄと、係止孔１０２ｅとは、検知部材１０２がカバー部材１０１に装着された状態で、同心位置に配置され、ロック部１０１ｂとロック部１０２ｂを貫通する１つの係止孔を形成する。該係止孔に南京錠２４を挿通することで、検知部材１０２を、カバー部材１０１に固定することが可能である（図１３参照）。 Furthermore, the detection member 102 has a lock portion 102b so as to stand up at a substantially right angle to the side surface of the cover member 101 in a state of being attached to the cover member 101, and the lock portion 102b is for inserting the padlock 24. A locking hole 102e is provided. The cover member 101 has a lock portion 101b so as to face directly below the lock portion 102b in a state where the detection member 102 is attached to the cover member 101, and the lock portion 101b inserts the padlock 24. The locking hole 101d is provided.
The locking holes 101d and the locking holes 102e are arranged at concentric positions with the detection member 102 mounted on the cover member 101, and form one locking hole penetrating the lock portion 101b and the lock portion 102b. To do. By inserting the padlock 24 into the locking hole, the detection member 102 can be fixed to the cover member 101 (see FIG. 13).

また、カバー部材１０１の検知部材１０２を装着する側の面に係止孔１０１ｄ，１０２ｅが位置するため、カバー部材１０１の、検知部材１０２を装着する側の面で南京錠２４を取付けることができる。検知部材１０２を装着する側の面で南京錠２４を取付けることができるため、検知部材１０２を装着する面とは反対側の面などにわざわざ手を回して南京錠２４を取り付ける必要がない。よって、作業スペースが限られる半導体製造工程においても、容易に検知部材１０２をカバー部材１０１に固定することが可能である。 Further, since the locking holes 101d and 102e are located on the surface of the cover member 101 on the side where the detection member 102 is mounted, the padlock 24 can be mounted on the surface of the cover member 101 on the side where the detection member 102 is mounted. Since the padlock 24 can be attached to the surface on which the detection member 102 is attached, it is not necessary to bother to turn the hand on the surface opposite to the surface on which the detection member 102 is attached to attach the padlock 24. Therefore, the detection member 102 can be easily fixed to the cover member 101 even in the semiconductor manufacturing process in which the work space is limited.

次に誤操作防止カバー付き手動弁１の作用について説明する。
まず、操作ロッド３２の動作について説明する。
開弁または閉弁しようとする場合、まず誤操作防止カバー１０の南京錠２４取り外した上、検知部材１０２を装着完了位置から仮固定位置に移動させ、誤操作防止カバー１０を誤操作防止カバー付き手動弁１から取り外す。そして、ロックリング４１を第２位置から第１位置へ移動させ、スライドナット３３が回転可能な状態にしておく。 Next, the operation of the manual valve 1 with the erroneous operation prevention cover will be described.
First, the operation of the operation rod 32 will be described.
When trying to open or close the valve, first remove the padlock 24 of the erroneous operation prevention cover 10, move the detection member 102 from the mounting complete position to the temporary fixing position, and move the erroneous operation prevention cover 10 from the manual valve 1 with the erroneous operation prevention cover. Remove. Then, the lock ring 41 is moved from the second position to the first position so that the slide nut 33 can rotate.

ハンドル３１は、第１係止部３１１と第２係止部３１２とによりクリップを３５保持しており、ハンドル３１とクリップ３５とは一体に回転するようになっている。さらに、クリップ３５の挟持部３５１が、スライドナット３３の係合部３３ｂを挟持しているため、ハンドル３１を、中心軸を中心に回転させると、クリップ３５を介してスライドナット３３に回転力が伝達され、ハンドル３１と、クリップ３５と、スライドナット３３が一体となって回転する。
スライドナット３３は、スライドナットカバー３４の段差部３４ｂと、ダイアフラム押え２１の段差部２１ｄとにより、フランジ部３３ｃの上下方向から回転可能に保持されているため、スライドナット３３は上下方向への移動は抑止されている。さらに、操作ロッド３２が、スライドナット３３内に、自転しないように螺着されているため、ハンドル３１操作によりスライドナット３３が回転されることで、スライドナット３３の雌ねじ部３３ａと、操作ロッド３２の雄ねじ部３２ａとのねじ送りにより、操作ロッド３２がスライドナット３３に対して相対的に図６の上下方向に螺進可能となっている。 The handle 31 holds the clip 35 by the first locking portion 311 and the second locking portion 312, and the handle 31 and the clip 35 rotate integrally. Further, since the sandwiching portion 351 of the clip 35 sandwiches the engaging portion 33b of the slide nut 33, when the handle 31 is rotated about the central axis, a rotational force is applied to the slide nut 33 via the clip 35. It is transmitted, and the handle 31, the clip 35, and the slide nut 33 rotate together.
Since the slide nut 33 is rotatably held from the vertical direction of the flange portion 33c by the stepped portion 34b of the slide nut cover 34 and the stepped portion 21d of the diaphragm retainer 21, the slide nut 33 moves in the vertical direction. Is deterred. Further, since the operation rod 32 is screwed into the slide nut 33 so as not to rotate, the slide nut 33 is rotated by operating the handle 31, so that the female screw portion 33a of the slide nut 33 and the operation rod 32 The operating rod 32 can be screwed in the vertical direction of FIG. 6 relative to the slide nut 33 by screw feeding with the male screw portion 32a.

次に閉弁状態から開弁状態にする場合を説明する。
本実施形態の誤操作防止カバー付き手動弁１は、スライドナット３３の雌ねじ部３３ａ及び操作ロッド３２の雄ねじ部３２ａはいずれも左ねじになっており、ハンドル３１を右回りに回転させると、操作ロッド３２は閉弁側に移動し、左回りに回転させると、操作ロッド３２は開弁側に移動するようになっている。
開弁状態にするには、ハンドル３１を一方向（左回り）に回転させると、スライドナット３３とハンドル３１とが共に同方向に回転し、このスライドナット３３の回転によって操作ロッド３２が開弁側（図６中上方）に移動する。これにより、操作ロッド３２と連結する弁体２２が、弁座２３ａから離間して開弁する。このとき、作業者は、インジケータカバー３６を通して視認可能な操作ロッド３２の上端部を参考にしながら弁開度を把握し、ハンドル３１を回転させる。 Next, a case of changing from the valve closed state to the valve open state will be described.
In the manual valve 1 with the erroneous operation prevention cover of the present embodiment, the female threaded portion 33a of the slide nut 33 and the male threaded portion 32a of the operating rod 32 are both left-handed, and when the handle 31 is rotated clockwise, the operating rod When the 32 moves to the valve closing side and is rotated counterclockwise, the operating rod 32 moves to the valve opening side.
To open the valve, when the handle 31 is rotated in one direction (counterclockwise), the slide nut 33 and the handle 31 both rotate in the same direction, and the rotation of the slide nut 33 causes the operation rod 32 to open the valve. Move to the side (upper in FIG. 6). As a result, the valve body 22 connected to the operation rod 32 is separated from the valve seat 23a and opened. At this time, the operator grasps the valve opening degree while referring to the upper end portion of the operation rod 32 that can be visually recognized through the indicator cover 36, and rotates the handle 31.

次いで、誤操作防止カバー付き手動弁１を開弁状態から閉弁状態にする場合を説明する。
閉弁状態にするには、ハンドル３１を所定値以内のトルクで他方向（右回り）に回転させると、スライドナット３３とハンドル３１とが共に同方向に回転し、このスライドナット３３の回転によって、操作ロッド３２が閉弁側（図６中下方）に移動する。そして、操作ロッド３２と連結する弁体２２が弁座２３ａに当接すると、誤操作防止カバー付き手動弁１は閉弁状態となる。 Next, a case where the manual valve 1 with the erroneous operation prevention cover is changed from the valve open state to the valve closed state will be described.
To close the valve, rotate the handle 31 in the other direction (clockwise) with a torque within a predetermined value, and the slide nut 33 and the handle 31 both rotate in the same direction. , The operation rod 32 moves to the valve closing side (lower in FIG. 6). Then, when the valve body 22 connected to the operation rod 32 comes into contact with the valve seat 23a, the manual valve 1 with the erroneous operation prevention cover is closed.

弁体２２が弁座２３ａに当接した後、さらにハンドル３１を回転させようとすると、操作ロッド３２は、弁体２２と弁座２３ａとの当接により、その当接位置よりも閉弁側（図６中下方）に移動できず、ハンドル３１にかかるトルクは所定値よりも大きくなる。
ハンドル３１にかかるトルクは所定値よりも大きくなると、スライドナット３３の係合部３３ｂが挟持部当接面３５１ａを押し広げ、挟持部３５１，３５１が相互に離間する方向に弾性変形するとともに、挟持部３５１，３５１を挟持する押え部３１２ａ，３１２ａも相互に離間する方向に弾性変形する。挟持部３５１，３５１および押え部３１２ａ，３１２ａが相互に離間する方向に弾性変形することで、ハンドル３１と、ハンドル３１と一体になっているクリップ３５とが、スライドナット３３に対して、空転する。
したがって、作業者が、たとえ弁体２２と弁座２３ａとの当接後にも、ハンドル３１を回転し続けたとしても、ハンドル３１の回転は、スライドナット３３に伝達されず、操作ロッド３２が閉弁方向に螺進しないため、弁体２２が弁座２３ａを過度に押圧することはなく、弁体２２の押圧による弁座２３ａの損傷が防止できる。 After the valve body 22 comes into contact with the valve seat 23a, when the handle 31 is further rotated, the operation rod 32 comes into contact with the valve body 22 and the valve seat 23a, and the valve closed side of the contact position. It cannot move to (lower in the middle of FIG. 6), and the torque applied to the handle 31 becomes larger than a predetermined value.
When the torque applied to the handle 31 becomes larger than a predetermined value, the engaging portion 33b of the slide nut 33 expands the holding portion contact surface 351a, and the holding portions 351 and 351 are elastically deformed in the direction of being separated from each other and sandwiched. The holding portions 312a and 312a that sandwich the portions 351 and 351 are also elastically deformed in the direction of being separated from each other. When the holding portions 351 and 351 and the pressing portions 312a and 312a are elastically deformed in the direction in which they are separated from each other, the handle 31 and the clip 35 integrated with the handle 31 idle with respect to the slide nut 33. ..
Therefore, even if the operator continues to rotate the handle 31 even after the valve body 22 and the valve seat 23a come into contact with each other, the rotation of the handle 31 is not transmitted to the slide nut 33 and the operation rod 32 is closed. Since the valve body 22 does not screw in the valve direction, the valve body 22 does not excessively press the valve seat 23a, and damage to the valve seat 23a due to the pressing of the valve body 22 can be prevented.

開弁または閉弁動作を完了した後は、ロックリング４１を第１位置から第２位置へ移動させる。
ロックリング４１を第２位置へ移動させることで、ロックリング４１の歯部４１ａと、スライドナットカバー３４の歯部３４ａがかみ合う。
ロックリング４１は、ロックリング４１の内周面の係合突起４１ｂとスライドナット３３の外周面の係合溝３３ｄとが係合することで、スライドナット３３と一体となっている。
ロックリング４１の歯部４１ａと、スライドナットカバー３４の歯部３４ａがかみ合うことで、ロックリング４１と一体となっているスライドナット３３は回転不能となる。したがって、ハンドル３１を操作しても操作ロッド３２が開弁、閉弁方向に螺進することがなく、作業者が意図せず弁開度の変更がなされることを防止することが可能である。 After completing the valve opening or closing operation, the lock ring 41 is moved from the first position to the second position.
By moving the lock ring 41 to the second position, the tooth portion 41a of the lock ring 41 and the tooth portion 34a of the slide nut cover 34 are engaged with each other.
The lock ring 41 is integrated with the slide nut 33 by engaging the engaging projection 41b on the inner peripheral surface of the lock ring 41 and the engaging groove 33d on the outer peripheral surface of the slide nut 33.
When the tooth portion 41a of the lock ring 41 and the tooth portion 34a of the slide nut cover 34 mesh with each other, the slide nut 33 integrated with the lock ring 41 becomes non-rotatable. Therefore, even if the handle 31 is operated, the operation rod 32 does not screw in the valve opening and closing directions, and it is possible to prevent the operator from unintentionally changing the valve opening degree. ..

また、ロックリング４１が第２位置に移動された状態で、ハンドル３１を回転させようとすると、スライドナット３３が回転不能となっているため、ハンドル３１にかかるトルクは所定値よりも大きくなる。
ハンドル３１にかかるトルクは所定値よりも大きくなると、スライドナット３３の係合部３３ｂが挟持部当接面３５１ａを押し広げ、挟持部３５１，３５１が相互に離間する方向に弾性変形するとともに、挟持部３５１，３５１を挟持する押え部３１２ａ，３１２ａも相互に離間する方向に弾性変形する。挟持部３５１，３５１および押え部３１２ａ，３１２ａが相互に離間する方向に弾性変形することで、ハンドル３１と、ハンドル３１と一体になっているクリップ３５とが、スライドナット３３に対して、空転する。
したがって、ロックリング４１が第２位置に移動された状態で、作業者がハンドル３１を回転させようとしても、ハンドル３１に与えられた回転力がスライドナット３３に伝達されず、誤操作防止カバー付き手動弁１の開弁および閉弁動作が行われない。 Further, if the handle 31 is to be rotated while the lock ring 41 is moved to the second position, the slide nut 33 cannot rotate, so that the torque applied to the handle 31 becomes larger than a predetermined value.
When the torque applied to the handle 31 becomes larger than a predetermined value, the engaging portion 33b of the slide nut 33 expands the holding portion contact surface 351a, and the holding portions 351 and 351 are elastically deformed in the direction of being separated from each other and sandwiched. The holding portions 312a and 312a that sandwich the portions 351 and 351 are also elastically deformed in the direction of being separated from each other. When the holding portions 351 and 351 and the pressing portions 312a and 312a are elastically deformed in the direction in which they are separated from each other, the handle 31 and the clip 35 integrated with the handle 31 idle with respect to the slide nut 33. ..
Therefore, even if the operator tries to rotate the handle 31 while the lock ring 41 is moved to the second position, the rotational force applied to the handle 31 is not transmitted to the slide nut 33, and the manual operation with the erroneous operation prevention cover is provided. The valve 1 does not open and close.

ロックリング４１を第２位置に移動させた後は、誤操作防止カバー１０を誤操作防止カバー付き手動弁１に装着する。
検知部材１０２がカバー部材１０１の検知部材挿通孔１０１ｃに仮固定位置に保持され、検知部材１０２とカバー部材１０１が一体となった状態（図３参照）の誤操作防止カバー１０を、誤操作防止カバー付き手動弁１の上方からかぶせる。
もし、カバー部材１０１と検知部材１０２とが一体になっていないとすると、検知部材１０２を紛失するおそれや、検知部材１０２をカバー部材１０１に装着し忘れるおそれがあるがある。
しかし、上記のようにカバー部材１０１と検知部材１０２とが一体になっていることで、検知部材１０２を紛失するおそれが解消される。また、検知部材１０２が仮固定位置にある場合、カバー部材１０１から突出しているため、検知部材１０２が装着完了位置にないことの視認性が向上し、検知部材１０２をカバー部材１０１に装着し忘れるおそれが解消される。 After moving the lock ring 41 to the second position, the erroneous operation prevention cover 10 is attached to the manual valve 1 with the erroneous operation prevention cover.
The erroneous operation prevention cover 10 in a state where the detection member 102 is temporarily fixed in the detection member insertion hole 101c of the cover member 101 and the detection member 102 and the cover member 101 are integrated (see FIG. 3) is provided with an erroneous operation prevention cover. Cover from above the manual valve 1.
If the cover member 101 and the detection member 102 are not integrated, the detection member 102 may be lost or the detection member 102 may be forgotten to be attached to the cover member 101.
However, since the cover member 101 and the detection member 102 are integrated as described above, the risk of losing the detection member 102 is eliminated. Further, when the detection member 102 is in the temporarily fixed position, since it protrudes from the cover member 101, the visibility that the detection member 102 is not in the mounting complete position is improved, and the detection member 102 is forgotten to be mounted on the cover member 101. The fear is eliminated.

また、カバー部材１０１と検知部材１０２とが一体になっていないとすると、カバー部材１０１を誤操作防止カバー付き手動弁１に装着した後に、作業者は検知部材１０２を持ってきて、カバー部材１０１に装着させなければならない。近年、半導体製造装置の小型化や集積化が進んでいることから、作業スペースも狭小化され、差込片を装着するための作業スペース確保が困難である可能性がある。
さらにまた、半導体製造装置の小型化や集積化により、誤操作防止カバー付き手動弁１も小型である場合が多い。手動弁が１小型であると、検知部材１０２も当然に小型となり、検知部材１０２を検知部材挿通孔１０１ｃに挿通させる作業は細かい作業となり、作業効率の悪化が懸念される。作業者が怪我防止のために手袋をしている場合などは、細かい作業を行うことがますます困難である。 Further, assuming that the cover member 101 and the detection member 102 are not integrated, the operator brings the detection member 102 to the cover member 101 after mounting the cover member 101 on the manual valve 1 with the erroneous operation prevention cover. Must be fitted. In recent years, as semiconductor manufacturing equipment has become smaller and more integrated, the work space has also become narrower, and it may be difficult to secure a work space for mounting the insertion piece.
Furthermore, due to the miniaturization and integration of semiconductor manufacturing equipment, the manual valve 1 with an erroneous operation prevention cover is often also small. If the manual valve is one small size, the detection member 102 is naturally also small, and the work of inserting the detection member 102 into the detection member insertion hole 101c is a detailed work, and there is a concern that the work efficiency may be deteriorated. It is increasingly difficult to perform detailed work, such as when a worker is wearing gloves to prevent injury.

検知部材１０２がカバー部材１０１の検知部材挿通孔１０１ｃに保持され、検知部材１０２とカバー部材１０１が一体となっていれば、作業者は、カバー部材１０１を誤操作防止カバー付き手動弁１に取り付けた後、検知部材１０２を仮固定位置から装着完了位置へ押し込んで移動させるのみで良い。
よって、作業スペースの確保が容易であるとともに、作業が単純となるため、作業効率の悪化を防止できる。また、作業者が手袋をしている場合であっても、検知部材１０２を移動させるのみであれば、容易に作業が可能である。 If the detection member 102 is held in the detection member insertion hole 101c of the cover member 101 and the detection member 102 and the cover member 101 are integrated, the operator attaches the cover member 101 to the manual valve 1 with the erroneous operation prevention cover. After that, it is only necessary to push the detection member 102 from the temporarily fixed position to the mounting completion position and move it.
Therefore, it is easy to secure a work space and the work is simplified, so that deterioration of work efficiency can be prevented. Further, even when the worker is wearing gloves, the work can be easily performed as long as the detection member 102 is only moved.

本実施例においては、図４のように正面視において、検知部材１０２が正面に見えるような方向で誤操作防止カバー１０を誤操作防止カバー付き手動弁１に装着しているが、正面視右側、左側、および裏面側に検知部材挿通孔１０１ｃが配値されるようにカバー部材１０１を装着し、検知部材１０２を装着することも可能である。
カバー部材１０１は、略正方形の開口側の端面の４角よりスライドナットカバー３４側に突設する係合部１０１ｅを有しており、スライドナットカバー３４の略正方形の上端部４角には、係合部１０１ｅと係合する被係合部３４ｄが、設けられている。そして、係合部１０１ｅは、被係合部３４ｄの外周面を覆うようにしてスライドナットカバー３４と係合する。
係合部１０１ｅと、被係合部３４ｄとは操作ロッドの中心軸を中心とした円周方向に等間隔に４か所設けられているため、係合部１０１ｅと、被係合部３４ｄとが係合することで、カバー部材１０１は、操作ロッド３２の中心軸を中心として、９０度ごとに回転して、誤操作防止カバー付き手動弁１に対して位置決めが可能である。
よって、誤操作防止カバー１０を、誤操作防止カバー付き手動弁１に対して操作ロッドの中心軸を中心に９０度ずつ回転させても誤操作防止カバー付き手動弁１に装着し、係合させることが可能である。１方向のみで装着可能である場合と比べ、作業性が向上する。
なお、係合部１０１ｅは、操作ロッド３２の中心軸を対称として、２箇所に設けることとしても良い。 In this embodiment, as shown in FIG. 4, the erroneous operation prevention cover 10 is attached to the manual valve 1 with the erroneous operation prevention cover in the direction in which the detection member 102 can be seen in the front as shown in FIG. It is also possible to mount the cover member 101 so that the detection member insertion hole 101c is assigned to the back surface side, and mount the detection member 102.
The cover member 101 has an engaging portion 101e projecting from the four corners of the end face on the opening side of the substantially square toward the slide nut cover 34, and the four corners of the upper end of the substantially square of the slide nut cover 34 have an engaging portion 101e. An engaged portion 34d that engages with the engaging portion 101e is provided. Then, the engaging portion 101e engages with the slide nut cover 34 so as to cover the outer peripheral surface of the engaged portion 34d.
Since the engaging portion 101e and the engaged portion 34d are provided at four locations at equal intervals in the circumferential direction about the central axis of the operation rod, the engaging portion 101e and the engaged portion 34d By engaging the cover member 101, the cover member 101 rotates about every 90 degrees around the central axis of the operation rod 32, and can be positioned with respect to the manual valve 1 with the erroneous operation prevention cover.
Therefore, even if the erroneous operation prevention cover 10 is rotated by 90 degrees about the central axis of the operation rod with respect to the manual valve 1 with the erroneous operation prevention cover, it can be attached to and engaged with the manual valve 1 with the erroneous operation prevention cover. Is. Workability is improved as compared with the case where it can be mounted in only one direction.
The engaging portions 101e may be provided at two locations with the central axis of the operating rod 32 symmetrical.

また、ロックリング４１が円環状であるため、ロックリング４１の中心から検知部１０２ａが干渉する外周面の任意の点までの距離は常に一定であり、検知部１０２ａが外周面と干渉する位置は、ロックリング４１の中心軸に直交する方向からであれば、どの角度から検知部材１０２を装着しても、一定である。したがって、ロックリング４１が第１位置にあるときは、上記のようにカバー部材１０１を９０度ずつ回転させた場合、すなわち、誤操作防止カバー付き手動弁１の正面側、右側面側、背面側、左側面側のどの方向から検知部材１０２を装着した場合でも、一定の位置で検知部材１０２の装着ができなくなるため、装着する角度によって装着できなくなる位置がばらつきを原因とする検知部材の装着可否の誤認を防止できる。
一方、ロックリング４１が第２位置にあるときは、ロックリング４１が装着完了された検知部材１０２を操作ロッド３２の中心軸を中心に回転投影した空間から退避するので、上記のようにカバー部材１０１を９０度ずつ回転させた場合、すなわち、誤操作防止カバー付き手動弁１の正面側、右側面側、背面側、左側面側のどの方向から検知部材１０２を装着しても、検知部材１０２とロックリング４１とが干渉することなく、検知部材１０２を装着完了させることができる。
よって、実際に誤操作防止カバー付き手動弁１が配設される半導体製造ラインの作業スペースに応じて、作業者が自由に検知部材１０２を装着する方向を選択することができる。 Further, since the lock ring 41 is annular, the distance from the center of the lock ring 41 to an arbitrary point on the outer peripheral surface where the detection unit 102a interferes is always constant, and the position where the detection unit 102a interferes with the outer peripheral surface is always constant. As long as it is from a direction orthogonal to the central axis of the lock ring 41, it is constant regardless of the angle at which the detection member 102 is mounted. Therefore, when the lock ring 41 is in the first position, when the cover member 101 is rotated by 90 degrees as described above, that is, the front side, the right side side, and the back side of the manual valve 1 with the erroneous operation prevention cover, When the detection member 102 is mounted from any direction on the left side surface, the detection member 102 cannot be mounted at a fixed position. Therefore, the position where the detection member 102 cannot be mounted varies depending on the mounting angle. Misidentification can be prevented.
On the other hand, when the lock ring 41 is in the second position, the detection member 102 on which the lock ring 41 has been mounted is retracted from the space rotationally projected around the central axis of the operation rod 32, so that the cover member is as described above. When the 101 is rotated by 90 degrees, that is, regardless of the direction of the front side, the right side surface side, the back surface side, or the left side surface side of the manual valve 1 with the erroneous operation prevention cover, the detection member 102 and the detection member 102 The detection member 102 can be completely mounted without interfering with the lock ring 41.
Therefore, the operator can freely select the direction in which the detection member 102 is mounted according to the work space of the semiconductor manufacturing line in which the manual valve 1 with the erroneous operation prevention cover is actually arranged.

また、カバー部材１０１を誤操作防止カバー付き手動弁１に装着したとき、カバー部材１０１の開口側端面の４角に設けられた係合部１０１ｅが、スライドナットカバー３４の上端部四角と係合し、カバー部材１０１は、中心軸を中心とした回転方向への位置決めがなされる。 Further, when the cover member 101 is attached to the manual valve 1 with the erroneous operation prevention cover, the engaging portions 101e provided at the four corners of the opening side end surface of the cover member 101 engage with the upper end square of the slide nut cover 34. , The cover member 101 is positioned in the rotation direction about the central axis.

誤操作防止カバー１０を誤操作防止カバー付き手動弁１にかぶせた後、検知部材１０２を仮固定位置から、装着完了位置に移動させることで、誤操作防止カバー１０の装着が完了する。
検知部材１０２が装着完了位置に移動されることで、検知部１０２ａが、カバー部材１０１内に延伸され、検知部１０２ａが、ハンドル３１の第２係止部３１２の直下に位置される。
検知部１０２ａが、抜け止め部３１２ｃの直下に位置しているため、誤操作防止カバー１０に対して、誤操作防止カバー１０が誤操作防止カバー付き手動弁１から抜ける方向（図中上方向）に力が加わった場合に、検知部材１０２が抜け止め部３１２ｃに当接し、誤操作防止カバー１０が誤操作防止カバー付き手動弁１から抜ける方向へ移動することを制限する。よって、誤操作防止カバー１０が誤操作防止カバー付き手動弁１から脱落することを防止することが可能である。
検知部材１０２を、カバー部材１０１脱落防止のためのロック構造としても使用することが可能であるため、脱落防止のための構造や、部材を別途に設ける必要がなく、製造コスト増大の防止や、製品構造の単純化が可能である。 After the erroneous operation prevention cover 10 is put on the manual valve 1 with the erroneous operation prevention cover, the erroneous operation prevention cover 10 is completed by moving the detection member 102 from the temporary fixing position to the mounting completion position.
When the detection member 102 is moved to the mounting complete position, the detection unit 102a is extended into the cover member 101, and the detection unit 102a is positioned directly below the second locking portion 312 of the handle 31.
Since the detection unit 102a is located directly below the retaining unit 312c, a force is applied to the erroneous operation prevention cover 10 in the direction in which the erroneous operation prevention cover 10 comes out of the manual valve 1 with the erroneous operation prevention cover (upward in the figure). When it is added, the detection member 102 comes into contact with the retaining portion 312c, and the erroneous operation prevention cover 10 is restricted from moving in the direction of coming out of the manual valve 1 with the erroneous operation prevention cover. Therefore, it is possible to prevent the erroneous operation prevention cover 10 from falling off from the manual valve 1 with the erroneous operation prevention cover.
Since the detection member 102 can also be used as a lock structure for preventing the cover member 101 from falling off, it is not necessary to separately provide a structure for preventing the cover member 101 from falling off, or to prevent an increase in manufacturing cost. The product structure can be simplified.

誤操作防止カバー付き手動弁１に誤操作防止カバー１０を装着すると、ハンドル３１と、ロックリング４１とは、カバー部材１０１の中空内部に位置するので、ハンドル３１とロックリング４１とが外部に露出されない。
ハンドル３１が外部に露出していないため、作業者はハンドル３１に触れることが出来ず、無理にハンドル３１を操作しようとすることもなくなる。よって、作業者が無理にハンドル３１操作をしようとして、ハンドル３１に回転力を加え、ハンドル３１に加わった回転力が、弁体２２に接続される操作ロッド３２に伝達され、弁開度に微小なずれが生じてしまうことを防止することができる。また、ロックリング４１も外部に露出していないため、不用意に手動機構３の制限が解除されてしまうこともない。 When the erroneous operation prevention cover 10 is attached to the manual valve 1 with the erroneous operation prevention cover, the handle 31 and the lock ring 41 are located inside the hollow of the cover member 101, so that the handle 31 and the lock ring 41 are not exposed to the outside.
Since the handle 31 is not exposed to the outside, the operator cannot touch the handle 31 and does not try to operate the handle 31 forcibly. Therefore, when the operator tries to forcibly operate the handle 31, a rotational force is applied to the handle 31, and the rotational force applied to the handle 31 is transmitted to the operation rod 32 connected to the valve body 22, and the valve opening is minute. It is possible to prevent the deviation from occurring. Further, since the lock ring 41 is not exposed to the outside, the restriction of the manual mechanism 3 is not released carelessly.

次に、作業者が開弁または閉弁動作を完了した後にロックリング４１を第２位置に移動させ忘れ、ロックリング４１が第１位置にある状態で誤操作防止カバー１０を誤操作防止カバー付き手動弁１に装着しようとした場合について説明する。
誤操作防止カバー付き手動弁１の上方から、検知部材１０２がカバー部材１０１の検知部材挿通孔１０１ｃに仮固定位置に保持された状態の誤操作防止カバー１０をかぶせる。
誤操作防止カバー１０を誤操作防止カバー付き手動弁１にかぶせた後、検知部材１０２を仮固定位置から装着完了位置に移動させようとしても、図１０に示すように、検知部材１０２とロックリング４１は図中上下方向の位置がほぼ同一となっているため、検知部１０２ａがカバー部材１０１の中空内部を移動する直線進路上にロックリング４１があることになり、検知部１０２ａがロックリング４１の外周面に干渉し、検知部材１０２をカバー部材１０１に装着させることができない。
この場合、作業者は、誤操作防止カバー１０を誤操作防止カバー付き手動弁１から一旦取り外し、ロックリング４１を第２位置に移動させてから、改めて誤操作防止カバー１０を誤操作防止カバー付き手動弁１にかぶせ、検知部材１０２を仮固定位置から装着完了位置に移動させる。 Next, after the operator completes the valve opening or closing operation, he forgets to move the lock ring 41 to the second position, and with the lock ring 41 in the first position, the erroneous operation prevention cover 10 is manually valved with the erroneous operation prevention cover. The case of trying to attach to 1 will be described.
From above the manual valve 1 with the erroneous operation prevention cover, the detection member 102 covers the detection member insertion hole 101c of the cover member 101 with the erroneous operation prevention cover 10 held at the temporarily fixed position.
Even if the detection member 102 is moved from the temporarily fixed position to the mounting complete position after the erroneous operation prevention cover 10 is put on the manual valve 1 with the erroneous operation prevention cover, the detection member 102 and the lock ring 41 still have the detection member 102 and the lock ring 41 as shown in FIG. Since the positions in the vertical direction in the figure are substantially the same, the lock ring 41 is located on a straight path in which the detection unit 102a moves inside the hollow of the cover member 101, and the detection unit 102a is the outer circumference of the lock ring 41. The detection member 102 cannot be attached to the cover member 101 because it interferes with the surface.
In this case, the operator temporarily removes the erroneous operation prevention cover 10 from the manual valve 1 with the erroneous operation prevention cover, moves the lock ring 41 to the second position, and then changes the erroneous operation prevention cover 10 to the manual valve 1 with the erroneous operation prevention cover again. The cover and the detection member 102 are moved from the temporarily fixed position to the mounting complete position.

以上のように、作業者は、カバー部材１０１に検知部材１０２を装着できるか否かによって、ロックリング４１が第１位置にあるのか、第２位置にあるのか知ることが可能である。検知部材１０２をカバー部材１０１に装着できず、ロックリング４１が第１位置にあると分かれば、誤操作防止カバー１０を誤操作防止カバー付き手動弁１から取り外し、操作部を第２位置に移動させてから、改めて誤操作防止カバー１０を誤操作防止カバー付き手動弁１に装着すれば良く、ロックリング４１が第２位置に移動されていない状態で誤操作防止カバー付き手動弁１が放置されることがない。
よって、作業者があるラインの流体制御を行うため、誤操作防止カバー付き手動弁１やその他流体制御機器を操作しようとし、隣のラインの誤操作防止カバー付き手動弁１に触れてしまったとき、当該隣のラインの誤操作防止カバー付き手動弁１のロックリング４１が第２位置に移動されていなかったがために意図せず弁開度が変更されてしまうというおそれが解消される。 As described above, the operator can know whether the lock ring 41 is in the first position or the second position depending on whether or not the detection member 102 can be attached to the cover member 101. If the detection member 102 cannot be attached to the cover member 101 and the lock ring 41 is found to be in the first position, the erroneous operation prevention cover 10 is removed from the manual valve 1 with the erroneous operation prevention cover, and the operation unit is moved to the second position. Therefore, the erroneous operation prevention cover 10 may be attached to the manual valve 1 with the erroneous operation prevention cover again, and the manual valve 1 with the erroneous operation prevention cover will not be left in a state where the lock ring 41 is not moved to the second position.
Therefore, when an operator tries to operate a manual valve 1 with an erroneous operation prevention cover or other fluid control equipment in order to control fluid in a certain line and touches the manual valve 1 with an erroneous operation prevention cover on the adjacent line, the relevant operation is concerned. Since the lock ring 41 of the manual valve 1 with the erroneous operation prevention cover on the adjacent line has not been moved to the second position, the possibility that the valve opening degree is unintentionally changed is eliminated.

また、誤操作防止のために単純にカバー部材１０１のみを誤操作防止カバー付き手動弁１に装着すると、ハンドル３１やロックリング４１が外部から視認できなくなるため、作業後にロック機構４が有効となっているか否かの確認を行うためには、カバー部材１０１を取り外してからロックリング４１の状態を確認しなければならないなど、作業効率の悪化が懸念される。しかし、上記のようにロック機構４が有効となっている場合のみカバー部材１０１に装着可能な検知部材１０２を備えることで、誤操作防止カバー付き手動弁１に装着されたカバー部材１０１に検知部材１０２が装着されていれば、ロック機構４が有効な状態であるということが一目で判別可能となる。よって、作業後にロック機構４が有効となっているか否かの確認を行うのが容易であり、作業効率の悪化を招かない。 Further, if only the cover member 101 is simply attached to the manual valve 1 with the erroneous operation prevention cover to prevent erroneous operation, the handle 31 and the lock ring 41 cannot be visually recognized from the outside. Therefore, is the lock mechanism 4 effective after the work? In order to confirm whether or not the cover member 101 is removed, the state of the lock ring 41 must be confirmed, and there is a concern that the work efficiency may be deteriorated. However, by providing the detection member 102 that can be attached to the cover member 101 only when the lock mechanism 4 is enabled as described above, the detection member 102 is attached to the cover member 101 that is attached to the manual valve 1 with the erroneous operation prevention cover. If is attached, it can be determined at a glance that the lock mechanism 4 is in an effective state. Therefore, it is easy to confirm whether or not the lock mechanism 4 is effective after the work, and the work efficiency is not deteriorated.

誤操作防止カバー１０を誤操作防止カバー付き手動弁１に装着すると、ハンドル３１と、ロックリング４１とが、カバー部材１０１の中空内部に位置され、外部に露出されない状態となる。
ハンドル３１が外部に露出していないため、使用者はハンドル３１に触れることが出来ず、無理にハンドル３１を操作しようとすることもなくなる。よって、使用者が無理にハンドル３１操作をしようとして、ハンドル３１に回転力を加え、ハンドル３１に加わった回転力が弁体２２に接続される操作ロッド３２に伝達され、弁開度に微小なずれが生じてしまうことを防止することができる。また、ロックリング４１も外部に露出していないため、不用意に手動機構３の制限が解除されてしまうこともない。 When the erroneous operation prevention cover 10 is attached to the manual valve 1 with the erroneous operation prevention cover, the handle 31 and the lock ring 41 are located inside the hollow of the cover member 101 and are not exposed to the outside.
Since the handle 31 is not exposed to the outside, the user cannot touch the handle 31 and does not try to operate the handle 31 forcibly. Therefore, when the user tries to forcibly operate the handle 31, a rotational force is applied to the handle 31, and the rotational force applied to the handle 31 is transmitted to the operation rod 32 connected to the valve body 22, and the valve opening is minute. It is possible to prevent the deviation from occurring. Further, since the lock ring 41 is not exposed to the outside, the restriction of the manual mechanism 3 is not released carelessly.

誤操作防止カバー１０を誤操作防止カバー付き手動弁１に装着した後は、南京錠２４により、検知部材１０２を、カバー部材１０１に固定する（図１３参照）。
検知部材１０２は、カバー部材１０１に装着された状態で、カバー部材１０１の側面に略直角に立ち上がるようにロック部１０２ｂを有しており、ロック部１０２ｂは南京錠２４を挿通するための係止孔１０２ｅを備える。そして、カバー部材１０１は、検知部材１０２がカバー部材１０１に装着された状態で、ロック部１０２ｂの直下に対向するようにロック部１０１ｂを有しており、ロック部１０１ｂは南京錠２４を挿通するための係止孔１０１ｄを備える。
係止孔１０１ｄと、係止孔１０２ｅとは、検知部材１０２がカバー部材１０１に装着された状態で、同心位置に配置され、ロック部１０１ｂとロック部１０２ｂを貫通する１つの係止孔を形成する。該係止孔に南京錠２４を挿通することで、検知部材１０２を、カバー部材１０１に固定することが可能である。 After the erroneous operation prevention cover 10 is attached to the manual valve 1 with the erroneous operation prevention cover, the detection member 102 is fixed to the cover member 101 by the padlock 24 (see FIG. 13).
The detection member 102 has a lock portion 102b so as to stand up at a substantially right angle to the side surface of the cover member 101 in a state of being attached to the cover member 101, and the lock portion 102b has a locking hole for inserting the padlock 24. It includes 102e. The cover member 101 has a lock portion 101b so as to face directly below the lock portion 102b in a state where the detection member 102 is attached to the cover member 101, and the lock portion 101b inserts the padlock 24. The locking hole 101d is provided.
The locking holes 101d and the locking holes 102e are arranged at concentric positions with the detection member 102 mounted on the cover member 101, and form one locking hole penetrating the lock portion 101b and the lock portion 102b. To do. By inserting the padlock 24 into the locking hole, the detection member 102 can be fixed to the cover member 101.

また、カバー部材１０１の検知部材１０２を装着する側の面に係止孔１０１ｄ，１０２ｅが位置するため、カバー部材１０１の、検知部材１０２を装着する側の面で南京錠２４を取付けることができる。検知部材１０２を装着する側の面で南京錠２４を取付けることができるため、検知部材１０２を装着する面とは反対側の面などにわざわざ手を回して南京錠２４を取り付ける必要がない。よって、作業スペースが限られる半導体製造工程においても、容易に検知部材１０２をカバー部材１０１に固定することが可能である。 Further, since the locking holes 101d and 102e are located on the surface of the cover member 101 on the side where the detection member 102 is mounted, the padlock 24 can be mounted on the surface of the cover member 101 on the side where the detection member 102 is mounted. Since the padlock 24 can be attached to the surface on which the detection member 102 is attached, it is not necessary to bother to turn the hand on the surface opposite to the surface on which the detection member 102 is attached to attach the padlock 24. Therefore, the detection member 102 can be easily fixed to the cover member 101 even in the semiconductor manufacturing process in which the work space is limited.

以上説明したように、本実施形態の誤操作防止カバー付き手動弁１によれば、
（１）ハンドル３１の回転操作により弁体２２を弁座２３ａに当接または離間させる手動機構３と、手動機構３の動作を制限するロック機構４を備える誤操作防止カバー付き手動弁１において、ロック機構４は、ロック機構４を解除する第１位置と、ロック機構４を有効にする第２位置と、の間を移動可能なロックリング４１を備えること、誤操作防止カバー付き手動弁１は、誤操作防止カバー付き手動弁１に装着される中空状のカバー部材１０１を有すること、カバー部材１０１は、検知部１０２ａを有する検知部材１０２を備えること、検知部材１０２がカバー部材１０１に装着される際に、検知部材１０２は、検知部１０２ａがカバー部材１０１の中空内部において一定の進路を持って移動可能に保持されていること、カバー部材１０１が誤操作防止カバー付き手動弁１に装着された状態において、ハンドル３１と、ロックリング４１とは、カバー部材１０１の中空内部に位置し、ロックリング４１が第１位置にあるときは、ロックリング４１は検知部１０２ａの進路上に位置して、検知部材１０２をカバー部材１０１に装着完了不能であること、ロックリング４１が第２位置にあるときは、ロックリング４１は検知部１０２ａの進路上から退避して、検知部材１０２をカバー部材１０１に装着完了可能であること、を特徴とするので、カバー部材１０１を誤操作防止カバー付き手動弁１に装着した状態で、カバー部材１０１に検知部材１０２を装着しようとすると、作業者がロックリング４１を第２位置に移動させ忘れた場合など、ロックリング４１が第１位置にある場合には、ロックリング４１は検知部１０２ａの進路上に位置しているため、ロックリング４１が検知部１０２ａの延伸を阻害し、作業者は検知部材１０２をカバー部材１０１に装着することができない。
一方、ロックリング４１が第２位置に移動されていれば、ロックリング４１は検知部１０２ａの進路上から退避しているため、検知部１０２ａは延伸完了点まで移動することができ、作業者は検知部材１０２をカバー部材１０１に装着することができる。 As described above, according to the manual valve 1 with the erroneous operation prevention cover of the present embodiment,
(1) Locked in a manual valve 1 with an erroneous operation prevention cover provided with a manual mechanism 3 for bringing the valve body 22 into contact with or separated from the valve seat 23a by rotating the handle 31 and a lock mechanism 4 for limiting the operation of the manual mechanism 3. The mechanism 4 includes a lock ring 41 that can move between a first position for releasing the lock mechanism 4 and a second position for enabling the lock mechanism 4, and the manual valve 1 with an erroneous operation prevention cover is erroneously operated. It has a hollow cover member 101 to be mounted on the manual valve 1 with a prevention cover, the cover member 101 includes a detection member 102 having a detection unit 102a, and when the detection member 102 is mounted on the cover member 101. The detection member 102 is held in a state where the detection unit 102a is movably held inside the hollow of the cover member 101 with a constant course, and the cover member 101 is attached to the manual valve 1 with the erroneous operation prevention cover. The handle 31 and the lock ring 41 are located inside the hollow of the cover member 101, and when the lock ring 41 is in the first position, the lock ring 41 is located on the path of the detection unit 102a and the detection member 102. Can not be completely attached to the cover member 101, and when the lock ring 41 is in the second position, the lock ring 41 can be retracted from the path of the detection unit 102a and the detection member 102 can be completely attached to the cover member 101. Therefore, when the cover member 101 is attached to the manual valve 1 with the erroneous operation prevention cover and the detection member 102 is to be attached to the cover member 101, the operator places the lock ring 41 in the second position. When the lock ring 41 is in the first position, such as when the lock ring 41 is forgotten to be moved to, the lock ring 41 is located on the path of the detection unit 102a, so that the lock ring 41 hinders the extension of the detection unit 102a. , The operator cannot attach the detection member 102 to the cover member 101.
On the other hand, if the lock ring 41 is moved to the second position, the lock ring 41 is retracted from the path of the detection unit 102a, so that the detection unit 102a can move to the extension completion point, and the operator can move. The detection member 102 can be attached to the cover member 101.

したがって、作業者は、カバー部材１０１を誤操作防止カバー付き手動弁１に装着した状態で、カバー部材１０１に検知部材１０２を装着できるか否かによって、ロックリング４１が第１位置にあるのか、第２位置にあるのか知ることが可能である。ロックリング４１が第１位置にあると分かれば、カバー部材１０１を誤操作防止カバー付き手動弁１から取り外し、ロックリング４１を第２位置に移動させてから、改めてカバー部材１０１を誤操作防止カバー付き手動弁１に装着すれば良く、ロックリング４１が第２位置に移動されていない状態で誤操作防止カバー付き手動弁１が放置されることがない。
ロックリング４１が第２位置に移動されていない状態で誤操作防止カバー付き手動弁１が放置されることがないため、作業者があるラインの流体制御を行うために誤操作防止カバー付き手動弁１やその他流体制御機器を操作しようとし、隣のラインの誤操作防止カバー付き手動弁１に触れてしまったとき、当該隣のラインの誤操作防止カバー付き手動弁１のロックリング４１が第２位置に移動されていなかったがために意図せず開弁または閉弁してしまうというおそれが解消される。 Therefore, the operator determines whether the lock ring 41 is in the first position depending on whether or not the detection member 102 can be attached to the cover member 101 with the cover member 101 attached to the manual valve 1 with the erroneous operation prevention cover. It is possible to know if it is in two positions. If the lock ring 41 is found to be in the first position, the cover member 101 is removed from the manual valve 1 with the erroneous operation prevention cover, the lock ring 41 is moved to the second position, and then the cover member 101 is manually moved with the erroneous operation prevention cover. It suffices to be attached to the valve 1, and the manual valve 1 with the erroneous operation prevention cover is not left unattended when the lock ring 41 is not moved to the second position.
Since the manual valve 1 with the erroneous operation prevention cover is not left unattended when the lock ring 41 is not moved to the second position, the manual valve 1 with the erroneous operation prevention cover or the manual valve 1 with the erroneous operation prevention cover is used to control the fluid of a certain line by the operator. When trying to operate other fluid control equipment and touching the manual valve 1 with the erroneous operation prevention cover on the adjacent line, the lock ring 41 of the manual valve 1 with the erroneous operation prevention cover on the adjacent line is moved to the second position. The risk of unintentionally opening or closing the valve because it was not done is eliminated.

また、誤操作防止カバー付き手動弁１にカバー部材１０１を装着すると、ハンドル３１と、ロックリング４１とは、カバー部材１０１の中空内部に位置するので、ハンドル３１とロックリング４１とが外部に露出されない。
ハンドル３１が外部に露出していないため、作業者はハンドル３１に触れることが出来ず、無理にハンドル３１を操作しようとすることもなくなる。よって、作業者が無理にハンドル３１を操作しようとして、ハンドル３１に回転力を加え、ハンドル３１に加わった回転力が弁体２２に接続される操作ロッド３２に伝達され、弁開度に微小なずれが生じてしまうことを防止することができる。また、ロックリング４１も外部に露出していないため、不用意に手動機構３の制限が解除されてしまうこともない。 Further, when the cover member 101 is attached to the manual valve 1 with the erroneous operation prevention cover, the handle 31 and the lock ring 41 are located inside the hollow of the cover member 101, so that the handle 31 and the lock ring 41 are not exposed to the outside. ..
Since the handle 31 is not exposed to the outside, the operator cannot touch the handle 31 and does not try to operate the handle 31 forcibly. Therefore, when the operator tries to forcibly operate the handle 31, a rotational force is applied to the handle 31, and the rotational force applied to the handle 31 is transmitted to the operation rod 32 connected to the valve body 22, and the valve opening is minute. It is possible to prevent the deviation from occurring. Further, since the lock ring 41 is not exposed to the outside, the restriction of the manual mechanism 3 is not released carelessly.

（２）（１）に記載の誤操作防止カバー付き手動弁１において、カバー部材１０１は、検知部材１０２を挿入する検知部材挿通孔１０１ｃを備えること、検知部材１０２は、検知部材挿通孔１０１ｃに、挿入され、検知部材１０２がカバー部材１０１の外部に突出する仮固定位置と、検知部材１０２がカバー部材１０１の内部に収納される装着完了位置と、の間を移動可能に保持されていること、を特徴とするので、検知部材１０２が、カバー部材１０１の検知部材挿通孔１０１ｃに、仮固定位置と装着完了位置との間を移動可能なように一体化されており、誤操作防止カバー１０を誤操作防止カバー付き手動弁１に装着するために持ち運ぶ際にも、検知部材１０２がカバー部材１０１から脱落しない。
カバー部材１０１と検知部材１０２とが一体になっていないとすると、検知部材１０２を紛失するおそれや、検知部材１０２をカバー部材１０１に装着し忘れるおそれがある。
しかし、上記のようにカバー部材１０１と検知部材１０２とが一体になっていることで、検知部材１０２を紛失するおそれが解消される。また、検知部材１０２が仮固定位置にある場合、カバー部材１０１から突出しているため、検知部材１０２が装着完了位置にないことの視認性が向上し、検知部材１０２をカバー部材１０１に装着し忘れるおそれが解消される。 (2) In the manual valve 1 with the erroneous operation prevention cover according to (1), the cover member 101 is provided with a detection member insertion hole 101c into which the detection member 102 is inserted, and the detection member 102 is provided in the detection member insertion hole 101c. The temporary fixing position where the detection member 102 is inserted and the detection member 102 protrudes to the outside of the cover member 101 and the mounting completion position where the detection member 102 is housed inside the cover member 101 are movably held. Therefore, the detection member 102 is integrated into the detection member insertion hole 101c of the cover member 101 so as to be movable between the temporarily fixed position and the mounting completion position, and the erroneous operation prevention cover 10 is erroneously operated. The detection member 102 does not fall off from the cover member 101 even when it is carried for mounting on the manual valve 1 with a prevention cover.
If the cover member 101 and the detection member 102 are not integrated, the detection member 102 may be lost or the detection member 102 may be forgotten to be attached to the cover member 101.
However, since the cover member 101 and the detection member 102 are integrated as described above, the risk of losing the detection member 102 is eliminated. Further, when the detection member 102 is in the temporarily fixed position, since it protrudes from the cover member 101, the visibility that the detection member 102 is not in the mounting complete position is improved, and the detection member 102 is forgotten to be mounted on the cover member 101. The fear is eliminated.

また、カバー部材１０１と検知部材１０２とが一体になっていないとすると、カバー部材１０１を誤操作防止カバー付き手動弁１に装着した後に、作業者は検知部材１０２を持ち運んできて、カバー部材１０１に装着させなければならない。近年、半導体製造装置の小型化や集積化が進んでいることから、作業スペースも狭小化され、検知部材１０２を装着するための作業スペース確保が困難である可能性がある。
さらにまた、半導体製造装置の小型化や集積化により、誤操作防止カバー付き手動弁１も小型である場合が多い。手動弁が小型であると、検知部材１０２も当然に小型となり、検知部材１０２を検知部材挿通孔１０１ｃに挿通させる作業は細かい作業となり、作業効率の悪化が懸念される。特に作業者が怪我防止のために手袋をしている場合などは、細かい作業を行うことがますます困難である。 Further, assuming that the cover member 101 and the detection member 102 are not integrated, after the cover member 101 is attached to the manual valve 1 with the erroneous operation prevention cover, the operator carries the detection member 102 to the cover member 101. Must be fitted. In recent years, as semiconductor manufacturing equipment has become smaller and more integrated, the work space has also become narrower, and it may be difficult to secure a work space for mounting the detection member 102.
Furthermore, due to the miniaturization and integration of semiconductor manufacturing equipment, the manual valve 1 with an erroneous operation prevention cover is often also small. If the manual valve is small, the detection member 102 is naturally also small, and the work of inserting the detection member 102 into the detection member insertion hole 101c is a detailed work, and there is a concern that the work efficiency may be deteriorated. It is increasingly difficult to perform detailed work, especially if the worker is wearing gloves to prevent injury.

検知部材１０２がカバー部材１０１の検知部材挿通孔１０１ｃに、仮固定位置と装着完了位置との間を移動可能に保持されていれば、作業者は、カバー部材１０１を誤操作防止カバー付き手動弁１に取り付けた後、検知部材１０２を仮固定位置から装着完了位置へ押し込むなどして移動させるのみで良い。
よって、作業スペースの確保が容易であるとともに、作業が単純となるため、作業効率の悪化を防止できる。また、作業者が手袋をしている場合であっても、検知部材１０２を移動させるのみであれば、容易に作業が可能である。 If the detection member 102 is movably held in the detection member insertion hole 101c of the cover member 101 between the temporarily fixed position and the mounting completion position, the operator can move the cover member 101 to the manual valve 1 with an erroneous operation prevention cover. It is only necessary to move the detection member 102 by pushing it from the temporary fixing position to the mounting completion position after mounting the detection member 102.
Therefore, it is easy to secure a work space and the work is simplified, so that deterioration of work efficiency can be prevented. Further, even when the worker is wearing gloves, the work can be easily performed as long as the detection member 102 is only moved.

（３）（１）または（２）に記載の誤操作防止カバー付き手動弁１において、手動機構３は、一端に弁体２２が接続された操作ロッド３２を備え、操作ロッド３２の他端側にハンドル３１が配置されていること、手動機構３は、ハンドル３１と弁体２２との間に、抜け止め部３１２ｃを備えること、カバー部材１０１は、ハンドル３１の操作ロッド３２が延伸する側とは反対の方向から誤操作防止カバー付き手動弁１に装着されること、検知部材１０２は、操作ロッド３２の長手方向と直交する方向からカバー部材１０１に装着されること、カバー部材１０１が誤操作防止カバー付き手動弁１に装着され、検知部材１０２がカバー部材１０１に装着された状態で、検知部１０２ａは、抜け止め部３１２ｃの弁体側の端面に隣接して位置され、カバー部材１０１に対してカバー部材１０１の装着方向とは反対の方向に力が加わった場合に、検知部１０２ａは、抜け止め部３１２ｃの弁体側の端面に当接し、カバー部材１０１の装着方向とは反対の方向への移動を制限すること、を特徴とするので、
作業者が、操作部を第２位置に移動させた後、カバー部材をハンドルの操作ロッドが延伸する側とは反対の方向から手動弁に装着させ、差込片を操作部の移動方向と直交する方向から、カバー部材に装着させることで、差込片の検知部は、手動機構がハンドルと弁体との間に有する抜け止め部の弁体側端面に隣接して位置されることになる。差込片の検知部が抜け止め部の端面に隣接して位置されるため、カバー部材に対してカバー部材の装着方向とは反対の方向に力が加わった場合、検知部がハンドルの端面に当接し、カバー部材が手動弁から脱落することを防止する。
検知部材１０２を、カバー部材１０１脱落防止のためのロック構造としても使用することが可能であるため、脱落防止のための構造や、部材を別途に設ける必要がなく、製造コスト増大の防止や、製品構造の単純化が可能である。 (3) In the manual valve 1 with the erroneous operation prevention cover according to (1) or (2), the manual mechanism 3 includes an operation rod 32 to which the valve body 22 is connected to one end, and is located on the other end side of the operation rod 32. The handle 31 is arranged, the manual mechanism 3 is provided with a retaining portion 312c between the handle 31 and the valve body 22, and the cover member 101 is on the side where the operation rod 32 of the handle 31 extends. The manual valve 1 with the erroneous operation prevention cover is mounted from the opposite direction, the detection member 102 is mounted on the cover member 101 from the direction orthogonal to the longitudinal direction of the operation rod 32, and the cover member 101 is equipped with the erroneous operation prevention cover. With the detection member 102 mounted on the cover member 101 and mounted on the manual valve 1, the detection unit 102a is positioned adjacent to the end surface of the retaining portion 312c on the valve body side, and is a cover member with respect to the cover member 101. When a force is applied in a direction opposite to the mounting direction of the 101, the detection unit 102a abuts on the end surface of the retaining portion 312c on the valve body side and moves in the direction opposite to the mounting direction of the cover member 101. Because it is characterized by limiting
After the operator moves the operation unit to the second position, the cover member is attached to the manual valve from the direction opposite to the side where the operation rod of the handle extends, and the insertion piece is orthogonal to the movement direction of the operation unit. By attaching the insertion piece to the cover member from this direction, the detection portion of the insertion piece is positioned adjacent to the valve body side end surface of the retaining portion that the manual mechanism has between the handle and the valve body. Since the detection part of the insertion piece is located adjacent to the end face of the retaining part, when a force is applied to the cover member in the direction opposite to the mounting direction of the cover member, the detection part is placed on the end face of the handle. It comes into contact and prevents the cover member from falling off the manual valve.
Since the detection member 102 can also be used as a lock structure for preventing the cover member 101 from falling off, it is not necessary to separately provide a structure for preventing the cover member 101 from falling off, or to prevent an increase in manufacturing cost. The product structure can be simplified.

（４）（１）乃至（３）のいずれか１つに記載の誤操作防止カバー付き手動弁１において、検知部材１０２は、検知部材１０２のカバー部材１０１への装着側端面とは反対側の端面にロック部１０２ｂを備えること、カバー部材１０１は、検知部材１０２がカバー部材１０１に装着された状態で、ロック部１０２ｂに対向して位置するロック部１０１ｂを備えること、ロック部１０１ｂ，１０２ｂには、検知部材１０２がカバー部材１０１に装着された状態で、ロック部１０１ｂ，１０２ｂを貫通する係止孔１０１ｄ，１０２ｅが形成されていること、誤操作防止カバー付き手動弁１は、係止孔１０１ｄ，１０２ｅに挿通される南京錠２４を備えること、を特徴とするので、検知部材１０２はロック部１０２ｂを、カバー部材１０１はロック部１０１ｂを備え、ロック部１０１ｂ，１０２ｂを貫通するよう係止孔１０１ｄ，１０２ｅが備えられているため、南京錠２４のようなロック部材を、係止孔１０１ｄ，１０２ｅに挿通させることで、検知部材１０２をカバー部材１０１に装着された状態で固定することができる。
また、カバー部材１０１の検知部材１０２を装着する側の面に係止孔１０１ｄ，１０２ｅが位置するため、カバー部材１０１の、検知部材１０２を装着する側の面で南京錠２４を取付けることができる。検知部材１０２を装着する側の面で南京錠２４を取付けることができるため、検知部材１０２を装着する面とは反対側の面などにわざわざ手を回して南京錠２４を取り付ける必要がない。よって、作業スペースが限られる半導体製造工程においても、容易に検知部材１０２をカバー部材１０１に固定することが可能である。 (4) In the manual valve 1 with an erroneous operation prevention cover according to any one of (1) to (3), the detection member 102 has an end surface opposite to the end surface on the side of mounting the detection member 102 on the cover member 101. The cover member 101 is provided with the lock portion 102b, and the cover member 101 is provided with the lock portion 101b located opposite to the lock portion 102b with the detection member 102 mounted on the cover member 101. With the detection member 102 mounted on the cover member 101, the locking holes 101d and 102e penetrating the lock portions 101b and 102b are formed, and the manual valve 1 with the erroneous operation prevention cover has the locking holes 101d. Since the detection member 102 is provided with the lock portion 102b and the cover member 101 is provided with the lock portion 101b because the Nanjing lock 24 to be inserted through the 102e is provided, the locking holes 101d, Since the 102e is provided, the detection member 102 can be fixed in a state of being attached to the cover member 101 by inserting a lock member such as the Nanjing lock 24 into the locking holes 101d and 102e.
Further, since the locking holes 101d and 102e are located on the surface of the cover member 101 on the side where the detection member 102 is mounted, the padlock 24 can be mounted on the surface of the cover member 101 on the side where the detection member 102 is mounted. Since the padlock 24 can be attached to the surface on which the detection member 102 is attached, it is not necessary to bother to turn the hand on the surface opposite to the surface on which the detection member 102 is attached to attach the padlock 24. Therefore, the detection member 102 can be easily fixed to the cover member 101 even in the semiconductor manufacturing process in which the work space is limited.

（５）（１）乃至（４）に記載の誤操作防止カバー付き手動弁１において、手動機構３は、一端に弁体２２が接続された操作ロッド３２を備え、操作ロッド３２の他端側にハンドル３１が配置されていること、ロックリング４１は、円環形状をなし、ハンドル３１の操作ロッド３２が延伸する側に、操作ロッド３２と同軸上に配置され、操作ロッド３２の長手方向に沿って、第１位置と、第２位置と、の間を移動すること、検知部材１０２は、操作ロッド３２の中心軸に直交する方向から、カバー部材１０１に装着されること、カバー部材１０１が誤操作防止カバー付き手動弁１に装着された状態において、ロックリング４１が第１位置にあるときは、ロックリング４１の外周面が、検知部１０２ａと干渉して、検知部材１０２をカバー部材１０１に装着完了不能であること、ロックリング４１が第２位置にあるときは、ロックリング４１が装着完了された検知部材１０２を前記操作ロッド３２の中心軸を中心に回転投影した空間から退避して、検知部材１０２をカバー部材１０１に装着完了可能であること、を特徴とするので、操作ロッド３２およびロックリング４１の中心軸に直交する方向からであれば、どの角度から検知部材１０２を装着しても、ロックリング４１の第２位置への移動し忘れを確実に防止することができる。 (5) In the manual valve 1 with the erroneous operation prevention cover according to (1) to (4), the manual mechanism 3 includes an operation rod 32 to which the valve body 22 is connected to one end, and is located on the other end side of the operation rod 32. The handle 31 is arranged, the lock ring 41 has a ring shape, and is arranged coaxially with the operation rod 32 on the side where the operation rod 32 of the handle 31 extends, along the longitudinal direction of the operation rod 32. The detection member 102 is mounted on the cover member 101 from a direction orthogonal to the central axis of the operation rod 32, and the cover member 101 is erroneously operated. When the lock ring 41 is in the first position in the state of being mounted on the manual valve 1 with the prevention cover, the outer peripheral surface of the lock ring 41 interferes with the detection unit 102a, and the detection member 102 is mounted on the cover member 101. When it cannot be completed and the lock ring 41 is in the second position, the detection member 102 to which the lock ring 41 has been mounted is retracted from the space rotationally projected around the central axis of the operation rod 32 for detection. Since the member 102 can be completely attached to the cover member 101, the detection member 102 can be attached from any angle as long as it is from a direction orthogonal to the central axis of the operation rod 32 and the lock ring 41. , It is possible to surely prevent forgetting to move the lock ring 41 to the second position.

すなわち、ロックリング４１が円環状であるため、ロックリング４１中心から検知部１０２ａが干渉する外周面の任意の点までの距離は常に一定であり、検知部１０２ａが外周面と干渉する位置は、ロックリング４１の中心軸に直交する方向からであれば、どの角度から検知部材１０２を装着しても、一定である。したがって、ロックリング４１が第１位置にあるときは、ロックリング４１の中心軸に直交する方向からであれば、どの角度から検知部材１０２を装着しても、一定の位置で検知部材１０２の移動が阻害されるため、装着する角度によって移動を阻害される位置のばらつきを原因とする検知部材１０２の装着可否の誤認を防止できる。
一方、ロックリング４１が第２位置にあるときは、ロックリング４１が装着完了された検知部材１０２を操作ロッド３２の中心軸を中心に回転投影した空間から退避するので、ロックリング４１の中心軸に直交する方向からであれば、どの角度から検知部材１０２を装着しても、検知部材１０２とロックリング４１とが干渉することなく、検知部材１０２を装着完了させることができる。
よって、実際に誤操作防止カバー付き手動弁１が配設される半導体製造ラインの作業スペースに応じて、作業者が自由に検知部材１０２を装着する方向を選択することができる。 That is, since the lock ring 41 is annular, the distance from the center of the lock ring 41 to an arbitrary point on the outer peripheral surface where the detection unit 102a interferes is always constant, and the position where the detection unit 102a interferes with the outer peripheral surface is fixed. As long as it is from a direction orthogonal to the central axis of the lock ring 41, it is constant regardless of the angle at which the detection member 102 is mounted. Therefore, when the lock ring 41 is in the first position, the detection member 102 moves at a fixed position regardless of the angle from which the detection member 102 is mounted, as long as it is from a direction orthogonal to the central axis of the lock ring 41. Is hindered, so that it is possible to prevent misidentification of whether or not the detection member 102 can be mounted due to a variation in the position where movement is hindered depending on the mounting angle.
On the other hand, when the lock ring 41 is in the second position, the detection member 102 on which the lock ring 41 has been mounted is retracted from the space rotationally projected around the central axis of the operation rod 32, so that the central axis of the lock ring 41 is retracted. Regardless of the angle from which the detection member 102 is mounted, the detection member 102 can be mounted without the detection member 102 and the lock ring 41 interfering with each other as long as the direction is orthogonal to the above.
Therefore, the operator can freely select the direction in which the detection member 102 is mounted according to the work space of the semiconductor manufacturing line in which the manual valve 1 with the erroneous operation prevention cover is actually arranged.

（６）（１）乃至（５）のいずれか１つに記載の誤操作防止カバー付き手動弁１において、カバー部材１０１は、誤操作防止カバー付き手動弁１との装着側の端面に、誤操作防止カバー付き手動弁１と係合する係合部１０１ｅを有すること、誤操作防止カバー付き手動弁１には、係合部１０１ｅと係合する被係合部３４ｄが設けられていること、係合部１０１ｅと、被係合部３４ｄとが係合することで、カバー部材１０１は、操作ロッド３２の中心軸を中心として、９０度ごとに回転して、誤操作防止カバー付き手動弁１に対して位置決めが可能であること、を特徴とするので、誤操作防止カバー１０を、誤操作防止カバー付き手動弁１に対して操作ロッド３２の中心軸を中心に９０度ずつ回転させても誤操作防止カバー付き手動弁１に装着し、係合させることが可能である。１方向のみで装着可能である場合と比べ、作業性が向上する。 (6) In the manual valve 1 with the erroneous operation prevention cover according to any one of (1) to (5), the cover member 101 has an erroneous operation prevention cover on the end surface on the mounting side with the manual valve 1 with the erroneous operation prevention cover. The manual valve 1 with an erroneous operation prevention cover is provided with an engaged portion 34d that engages with the engaging portion 101e, and the engaging portion 101e is provided. By engaging the engaged portion 34d, the cover member 101 rotates about every 90 degrees around the central axis of the operation rod 32, and is positioned with respect to the manual valve 1 with the erroneous operation prevention cover. Since it is possible, even if the erroneous operation prevention cover 10 is rotated by 90 degrees about the central axis of the operation rod 32 with respect to the manual valve 1 with the erroneous operation prevention cover, the manual valve 1 with the erroneous operation prevention cover 1 It can be attached to and engaged with. Workability is improved as compared with the case where it can be mounted in only one direction.

（７）（１）乃至（６）のいずれか１つに記載の誤操作防止カバー付き手動弁１に装着される誤操作防止カバー１０であって、カバー部材１０１と、検知部材１０２と、からなることを特徴とするので、カバー部材１０１を誤操作防止カバー付き手動弁１に装着した状態で、カバー部材１０１に検知部材１０２を装着しようとすると、作業者がロックリング４１を第２位置に移動させ忘れた場合など、ロックリング４１が第１位置にある場合には、ロックリング４１は検知部１０２ａの進路上に位置しているため、ロックリング４１が検知部１０２ａの移動を阻害し、作業者は検知部材１０２をカバー部材１０１に装着することができない。
一方、ロックリング４１が第２位置に移動されていれば、ロックリング４１は検知部１０２ａの進路上から退避しているため、検知部１０２ａは延伸完了点まで移動することができ、作業者は検知部材１０２をカバー部材１０１に装着することができる。 (7) The erroneous operation prevention cover 10 attached to the manual valve 1 with the erroneous operation prevention cover according to any one of (1) to (6), comprising the cover member 101 and the detection member 102. Therefore, when the detection member 102 is attached to the cover member 101 with the cover member 101 attached to the manual valve 1 with the erroneous operation prevention cover, the operator forgets to move the lock ring 41 to the second position. When the lock ring 41 is in the first position, for example, the lock ring 41 is located on the path of the detection unit 102a, so that the lock ring 41 hinders the movement of the detection unit 102a, and the operator The detection member 102 cannot be attached to the cover member 101.
On the other hand, if the lock ring 41 is moved to the second position, the lock ring 41 is retracted from the path of the detection unit 102a, so that the detection unit 102a can move to the extension completion point, and the operator can move. The detection member 102 can be attached to the cover member 101.

したがって、作業者は、カバー部材１０１を誤操作防止カバー付き手動弁１に装着した状態で、カバー部材１０１に検知部材１０２を装着できるか否かによって、ロックリング４１が第１位置にあるのか、第２位置にあるのか知ることが可能である。ロックリング４１が第１位置にあると分かれば、カバー部材１０１を誤操作防止カバー付き手動弁１から取り外し、ロックリング４１を第２位置に移動させてから、改めてカバー部材１０１を誤操作防止カバー付き手動弁１に装着すれば良く、ロックリング４１が第２位置に移動されていない状態で誤操作防止カバー付き手動弁１が放置されることがない。
ロックリング４１が第２位置に移動されていない状態で誤操作防止カバー付き手動弁１が放置されることがないため、作業者があるラインの流体制御を行うために誤操作防止カバー付き手動弁１やその他流体制御機器を操作しようとし、隣のラインの誤操作防止カバー付き手動弁１に触れてしまったとき、当該隣のラインの誤操作防止カバー付き手動弁１のロックリング４１が第２位置に移動されていなかったがために意図せず開弁または閉弁してしまうというおそれが解消される。 Therefore, the operator determines whether the lock ring 41 is in the first position depending on whether or not the detection member 102 can be attached to the cover member 101 with the cover member 101 attached to the manual valve 1 with the erroneous operation prevention cover. It is possible to know if it is in two positions. If the lock ring 41 is found to be in the first position, the cover member 101 is removed from the manual valve 1 with the erroneous operation prevention cover, the lock ring 41 is moved to the second position, and then the cover member 101 is manually moved with the erroneous operation prevention cover. It suffices to be attached to the valve 1, and the manual valve 1 with the erroneous operation prevention cover is not left unattended when the lock ring 41 is not moved to the second position.
Since the manual valve 1 with the erroneous operation prevention cover is not left unattended when the lock ring 41 is not moved to the second position, the manual valve 1 with the erroneous operation prevention cover or the manual valve 1 with the erroneous operation prevention cover is used to control the fluid of a certain line by the operator. When trying to operate other fluid control equipment and touching the manual valve 1 with the erroneous operation prevention cover on the adjacent line, the lock ring 41 of the manual valve 1 with the erroneous operation prevention cover on the adjacent line is moved to the second position. The risk of unintentionally opening or closing the valve because it was not done is eliminated.

また、誤操作防止カバー付き手動弁１にカバー部材１０１を装着すると、ハンドル３１と、ロックリング４１とは、カバー部材１０１の中空内部に位置するので、ハンドル３１とロックリング４１とが外部に露出されない。
ハンドル３１が外部に露出していないため、作業者はハンドル３１に触れることが出来ず、無理にハンドル３１を操作しようとすることもなくなる。よって、作業者が無理にハンドル３１を操作しようとして、ハンドル３１に回転力を加え、ハンドル３１に加わった回転力が弁体２２に接続される操作ロッド３２に伝達され、弁開度に微小なずれが生じてしまうことを防止することができる。また、ロックリング４１も外部に露出していないため、不用意に手動機構３の制限が解除されてしまうこともない。 Further, when the cover member 101 is attached to the manual valve 1 with the erroneous operation prevention cover, the handle 31 and the lock ring 41 are located inside the hollow of the cover member 101, so that the handle 31 and the lock ring 41 are not exposed to the outside. ..
Since the handle 31 is not exposed to the outside, the operator cannot touch the handle 31 and does not try to operate the handle 31 forcibly. Therefore, when the operator tries to forcibly operate the handle 31, a rotational force is applied to the handle 31, and the rotational force applied to the handle 31 is transmitted to the operation rod 32 connected to the valve body 22, and the valve opening is minute. It is possible to prevent the deviation from occurring. Further, since the lock ring 41 is not exposed to the outside, the restriction of the manual mechanism 3 is not released carelessly.

誤操作防止カバー１０は、検知部材１０２が、カバー部材１０１の検知部材挿通孔１０１ｃに、仮固定位置と装着完了位置との間を移動可能なように一体化されており、誤操作防止カバー１０を誤操作防止カバー付き手動弁１に装着するために持ち運ぶ際にも、検知部材１０２がカバー部材１０１から脱落しない。
カバー部材１０１と検知部材１０２とが一体になっていないとすると、検知部材１０２を紛失するおそれや、検知部材１０２をカバー部材１０１に装着し忘れるおそれがある。
しかし、上記のようにカバー部材１０１と検知部材１０２とが一体になっていることで、検知部材１０２を紛失するおそれが解消される。また、検知部材１０２が仮固定位置にある場合、カバー部材１０１から突出しているため、検知部材１０２が装着完了位置にないことの視認性が向上し、検知部材１０２をカバー部材１０１に装着し忘れるおそれが解消される。 The erroneous operation prevention cover 10 is integrated so that the detection member 102 can move between the temporarily fixed position and the mounting completion position in the detection member insertion hole 101c of the cover member 101, and the erroneous operation prevention cover 10 is erroneously operated. The detection member 102 does not fall off from the cover member 101 even when it is carried for mounting on the manual valve 1 with a prevention cover.
If the cover member 101 and the detection member 102 are not integrated, the detection member 102 may be lost or the detection member 102 may be forgotten to be attached to the cover member 101.
However, since the cover member 101 and the detection member 102 are integrated as described above, the risk of losing the detection member 102 is eliminated. Further, when the detection member 102 is in the temporarily fixed position, since it protrudes from the cover member 101, the visibility that the detection member 102 is not in the mounting complete position is improved, and the detection member 102 is forgotten to be mounted on the cover member 101. The fear is eliminated.

また、カバー部材１０１と検知部材１０２とが一体になっていないとすると、カバー部材１０１を誤操作防止カバー付き手動弁１に装着した後に、作業者は検知部材１０２を持ち運んできて、カバー部材１０１に装着させなければならない。近年、半導体製造装置の小型化や集積化が進んでいることから、作業スペースも狭小化され、検知部材１０２を装着するための作業スペース確保が困難である可能性がある。
さらにまた、半導体製造装置の小型化や集積化により、誤操作防止カバー付き手動弁１も小型である場合が多い。手動弁が小型であると、検知部材１０２も当然に小型となり、検知部材１０２を検知部材挿通孔１０１ｃに挿通させる作業は細かい作業となり、作業効率の悪化が懸念される。特に作業者が怪我防止のために手袋をしている場合などは、細かい作業を行うことがますます困難である。 Further, assuming that the cover member 101 and the detection member 102 are not integrated, after the cover member 101 is attached to the manual valve 1 with the erroneous operation prevention cover, the operator carries the detection member 102 to the cover member 101. Must be fitted. In recent years, as semiconductor manufacturing equipment has become smaller and more integrated, the work space has also become narrower, and it may be difficult to secure a work space for mounting the detection member 102.
Furthermore, due to the miniaturization and integration of semiconductor manufacturing equipment, the manual valve 1 with an erroneous operation prevention cover is often also small. If the manual valve is small, the detection member 102 is naturally also small, and the work of inserting the detection member 102 into the detection member insertion hole 101c is a detailed work, and there is a concern that the work efficiency may be deteriorated. It is increasingly difficult to perform detailed work, especially if the worker is wearing gloves to prevent injury.

検知部材１０２がカバー部材１０１の検知部材挿通孔１０１ｃに、仮固定位置と装着完了位置との間を移動可能に保持されていれば、作業者は、カバー部材１０１を誤操作防止カバー付き手動弁１に取り付けた後、検知部材１０２を仮固定位置から装着完了位置へ押し込むなどして移動させるのみで良い。
よって、作業スペースの確保が容易であるとともに、作業が単純となるため、作業効率の悪化を防止できる。また、作業者が手袋をしている場合であっても、検知部材１０２を移動させるのみであれば、容易に作業が可能である。 If the detection member 102 is movably held in the detection member insertion hole 101c of the cover member 101 between the temporarily fixed position and the mounting completion position, the operator can move the cover member 101 to the manual valve 1 with an erroneous operation prevention cover. It is only necessary to move the detection member 102 by pushing it from the temporary fixing position to the mounting completion position after mounting the detection member 102.
Therefore, it is easy to secure a work space and the work is simplified, so that deterioration of work efficiency can be prevented. Further, even when the worker is wearing gloves, the work can be easily performed as long as the detection member 102 is only moved.

誤操作防止カバーは、作業者が、操作部を第２位置に移動させた後、カバー部材をハンドルの操作ロッドが延伸する側とは反対の方向から手動弁に装着させ、差込片を操作部の移動方向と直交する方向から、カバー部材に装着させることで、差込片の検知部は、手動機構がハンドルと弁体との間に有する抜け止め部の弁体側端面に隣接して位置されることになる。差込片の検知部が抜け止め部の端面に隣接して位置されるため、カバー部材に対してカバー部材の装着方向とは反対の方向に力が加わった場合、検知部がハンドルの端面に当接し、カバー部材が手動弁から脱落することを防止する。
検知部材１０２を、カバー部材１０１脱落防止のためのロック構造としても使用することが可能であるため、脱落防止のための構造や、部材を別途に設ける必要がなく、製造コスト増大の防止や、製品構造の単純化が可能である。 For the erroneous operation prevention cover, after the operator moves the operation part to the second position, the cover member is attached to the manual valve from the direction opposite to the side where the operation rod of the handle extends, and the insertion piece is attached to the operation part. By attaching it to the cover member from the direction orthogonal to the moving direction of, the detection part of the insertion piece is positioned adjacent to the valve body side end surface of the retaining part that the manual mechanism has between the handle and the valve body. Will be. Since the detection part of the insertion piece is located adjacent to the end face of the retaining part, when a force is applied to the cover member in the direction opposite to the mounting direction of the cover member, the detection part is placed on the end face of the handle. It comes into contact and prevents the cover member from falling off the manual valve.
Since the detection member 102 can also be used as a lock structure for preventing the cover member 101 from falling off, it is not necessary to separately provide a structure for preventing the cover member 101 from falling off, or to prevent an increase in manufacturing cost. The product structure can be simplified.

誤操作防止カバーは、検知部材１０２がロック部１０２ｂを、カバー部材１０１がロック部１０１ｂを備え、ロック部１０１ｂ，１０２ｂを貫通するよう係止孔１０１ｄ，１０２ｅが備えられているため、南京錠２４のようなロック部材を、係止孔１０１ｄ，１０２ｅに挿通させることで、検知部材１０２をカバー部材１０１に装着された状態で固定することができる。
また、カバー部材１０１の検知部材１０２を装着する側の面に係止孔１０１ｄ，１０２ｅが位置するため、カバー部材１０１の、検知部材１０２を装着する側の面で南京錠２４を取付けることができる。検知部材１０２を装着する側の面で南京錠２４を取付けることができるため、検知部材１０２を装着する面とは反対側の面などにわざわざ手を回して南京錠２４を取り付ける必要がない。よって、作業スペースが限られる半導体製造工程においても、容易に検知部材１０２をカバー部材１０１に固定することが可能である。 The erroneous operation prevention cover is like a padlock 24 because the detection member 102 is provided with the lock portion 102b, the cover member 101 is provided with the lock portion 101b, and the locking holes 101d and 102e are provided so as to penetrate the lock portions 101b and 102b. By inserting the locking member into the locking holes 101d and 102e, the detection member 102 can be fixed in a state of being mounted on the cover member 101.
Further, since the locking holes 101d and 102e are located on the surface of the cover member 101 on the side where the detection member 102 is mounted, the padlock 24 can be mounted on the surface of the cover member 101 on the side where the detection member 102 is mounted. Since the padlock 24 can be attached to the surface on which the detection member 102 is attached, it is not necessary to bother to turn the hand on the surface opposite to the surface on which the detection member 102 is attached to attach the padlock 24. Therefore, the detection member 102 can be easily fixed to the cover member 101 even in the semiconductor manufacturing process in which the work space is limited.

誤操作防止カバーは、操作ロッド３２およびロックリング４１の中心軸に直交する方向からであれば、どの角度から検知部材１０２を装着しても、ロックリング４１の第２位置への移動し忘れを確実に防止することができる。 The erroneous operation prevention cover ensures that the lock ring 41 is forgotten to move to the second position regardless of the angle from which the detection member 102 is attached, as long as it is from a direction orthogonal to the central axis of the operation rod 32 and the lock ring 41. Can be prevented.

すなわち、ロックリング４１が円環状であるため、ロックリング４１中心から検知部１０２ａが干渉する外周面の任意の点までの距離は常に一定であり、検知部１０２ａが外周面と干渉する位置は、ロックリング４１の中心軸に直交する方向からであれば、どの角度から検知部材１０２を装着しても、一定である。したがって、ロックリング４１が第１位置にあるときは、ロックリング４１の中心軸に直交する方向からであれば、どの角度から検知部材１０２を装着しても、一定の位置で検知部材１０２の移動が阻害されるため、装着する角度によって移動を阻害される位置のばらつきを原因とする検知部材１０２の装着可否の誤認を防止できる。
一方、ロックリング４１が第２位置にあるときは、ロックリング４１が装着完了された検知部材１０２を操作ロッド３２の中心軸を中心に回転投影した空間から退避するので、ロックリング４１の中心軸に直交する方向からであれば、どの角度から検知部材１０２を装着しても、検知部材１０２とロックリング４１とが干渉することなく、検知部材１０２を装着完了させることができる。
よって、実際に誤操作防止カバー付き手動弁１が配設される半導体製造ラインの作業スペースに応じて、作業者が自由に検知部材１０２を装着する方向を選択することができる。 That is, since the lock ring 41 is annular, the distance from the center of the lock ring 41 to an arbitrary point on the outer peripheral surface where the detection unit 102a interferes is always constant, and the position where the detection unit 102a interferes with the outer peripheral surface is fixed. As long as it is from a direction orthogonal to the central axis of the lock ring 41, it is constant regardless of the angle at which the detection member 102 is mounted. Therefore, when the lock ring 41 is in the first position, the detection member 102 moves at a fixed position regardless of the angle from which the detection member 102 is mounted, as long as it is from a direction orthogonal to the central axis of the lock ring 41. Is hindered, so that it is possible to prevent misidentification of whether or not the detection member 102 can be mounted due to a variation in the position where movement is hindered depending on the mounting angle.
On the other hand, when the lock ring 41 is in the second position, the detection member 102 on which the lock ring 41 has been mounted is retracted from the space rotationally projected around the central axis of the operation rod 32, so that the central axis of the lock ring 41 is retracted. Regardless of the angle from which the detection member 102 is mounted, the detection member 102 can be mounted without the detection member 102 and the lock ring 41 interfering with each other as long as the direction is orthogonal to the above.
Therefore, the operator can freely select the direction in which the detection member 102 is mounted according to the work space of the semiconductor manufacturing line in which the manual valve 1 with the erroneous operation prevention cover is actually arranged.

誤操作防止カバー１０は、誤操作防止カバー１０を、誤操作防止カバー付き手動弁１に対して操作ロッド３２の中心軸を中心に９０度ずつ回転させても誤操作防止カバー付き手動弁１に装着し、係合させることが可能である。１方向のみで装着可能である場合と比べ、作業性が向上する。 The erroneous operation prevention cover 10 is attached to the manual valve 1 with the erroneous operation prevention cover even if the erroneous operation prevention cover 10 is rotated by 90 degrees about the central axis of the operation rod 32 with respect to the manual valve 1 with the erroneous operation prevention cover. It is possible to match. Workability is improved as compared with the case where it can be mounted in only one direction.

なお、上記実施形態は単なる例示にすぎず、本発明を何ら限定するものではない。したがって本発明は当然に、その要旨を逸脱しない範囲内で様々な改良、変形が可能である。
例えば、上記実施形態においてはロック部材として南京錠２４を提案しているが、結束バンドを係止孔１０１ｄ，１０２ｅに挿通させることでも、検知部材１０２をカバー部材１０１に装着された状態で固定することができる。 It should be noted that the above embodiment is merely an example and does not limit the present invention in any way. Therefore, as a matter of course, the present invention can be improved and modified in various ways without departing from the gist thereof.
For example, in the above embodiment, the padlock 24 is proposed as the lock member, but the detection member 102 can be fixed in the state of being attached to the cover member 101 by inserting the binding band into the locking holes 101d and 102e. Can be done.

１ 誤操作防止カバー付き手動弁
３ 手動機構
４ ロック機構
２２ 弁体
２３ ボディ
２３ａ 弁座
２４ 南京錠（ロック部材の一例）
３２ 操作ロッド
４１ ロックリング（操作部の一例）
１０１ カバー部材
１０１ｃ 検知部材挿通孔
１０１ｂ ロック部
１０１ｄ 係止孔
１０２ 検知部材（差込片の一例）
１０２ａ 検知部
１０２ｂ ロック部
１０２ｅ 係止孔 1 Manual valve with erroneous operation prevention cover 3 Manual mechanism 4 Lock mechanism 22 Valve body 23 Body 23a Valve seat 24 Padlock (example of lock member)
32 Operation rod 41 Lock ring (Example of operation unit)
101 Cover member 101c Detection member insertion hole 101b Lock part 101d Locking hole 102 Detection member (example of insertion piece)
102a Detection unit 102b Lock unit 102e Locking hole

Claims (7)

ハンドルの回転操作により、弁本体の内部において弁体を弁座に当接または離間させる手動機構と、前記手動機構の動作を制限するロック機構を備える誤操作防止カバー付き手動弁において、
前記ロック機構は、前記ロック機構を解除する第１位置と、前記ロック機構を有効にする第２位置と、の間を移動可能な操作部を備えること、
前記誤操作防止カバー付き手動弁は、前記誤操作防止カバー付き手動弁に装着される中空状のカバー部材を備えること、
前記カバー部材は、検知部を有する差込片を備えること、
前記差込片が前記カバー部材に装着される際に、前記差込片は、前記検知部が前記カバー部材の中空内部において一定の進路を持って移動可能に保持されていること、
前記カバー部材が前記誤操作防止カバー付き手動弁に装着された状態において、前記ハンドルと、前記操作部とは、前記カバー部材の中空内部に位置し、前記操作部が第１位置にあるときは、前記操作部が前記進路上に位置して、前記差込片を前記カバー部材に装着完了不能であること、前記操作部が第２位置にあるときは、前記操作部が前記進路上から退避して、前記差込片を前記カバー部材に装着完了可能であること、
を特徴とする誤操作防止カバー付き手動弁。 In a manual valve with an erroneous operation prevention cover provided with a manual mechanism that abuts or separates the valve body from the valve seat inside the valve body by rotating the handle and a lock mechanism that limits the operation of the manual mechanism.
The lock mechanism includes an operation unit that can move between a first position for releasing the lock mechanism and a second position for enabling the lock mechanism.
The manual valve with an erroneous operation prevention cover includes a hollow cover member to be attached to the manual valve with an erroneous operation prevention cover.
The cover member includes an insertion piece having a detection unit.
When the insertion piece is attached to the cover member, the insertion piece is held so that the detection unit can move with a constant path inside the hollow of the cover member.
When the cover member is mounted on the manual valve with the erroneous operation prevention cover, the handle and the operation portion are located inside the hollow of the cover member, and the operation portion is in the first position. When the operation unit is located on the path and the insertion piece cannot be completely attached to the cover member, and the operation unit is in the second position, the operation unit retracts from the path. Therefore, the insertion piece can be completely attached to the cover member.
A manual valve with an erroneous operation prevention cover. 請求項１に記載の誤操作防止カバー付き手動弁において、
前記カバー部材は、前記差込片を挿入する挿通孔を備えること、
前記差込片は、前記挿通孔に、挿入され、前記差込片が前記カバー部材の外部に突出する仮固定位置と、前記差込片が前記カバー部材の内部に収納される装着完了位置と、の間を移動可能に保持されていること、
を特徴とする誤操作防止カバー付き手動弁。 In the manual valve with an erroneous operation prevention cover according to claim 1,
The cover member is provided with an insertion hole into which the insertion piece is inserted.
The insertion piece is inserted into the insertion hole, and the temporary fixing position where the insertion piece protrudes to the outside of the cover member and the mounting completion position where the insertion piece is housed inside the cover member. Being held movable between,
A manual valve with an erroneous operation prevention cover. 請求項１または２に記載の誤操作防止カバー付き手動弁において、
前記手動機構は、一端に前記弁体が接続された操作ロッドを備え、前記操作ロッドの他端側に前記ハンドルが配置されていること、
前記手動機構は、前記ハンドルと前記弁本体との間に、抜け止め部を備えること、
前記カバー部材は、前記ハンドルの前記操作ロッドが延伸する側とは反対の方向から前記誤操作防止カバー付き手動弁に装着されること、
前記差込片は、前記操作ロッドの長手方向と直交する方向から前記カバー部材に装着されること、
前記カバー部材が前記誤操作防止カバー付き手動弁に装着され、前記差込片が前記カバー部材に装着された状態で、前記検知部は、前記抜け止め部の前記弁本体側の端面に隣接して位置され、前記カバー部材に対して前記カバー部材の装着方向とは反対の方向に力が加わった場合に、前記検知部は、前記抜け止め部の前記端面に当接し、前記カバー部材の装着方向とは反対の方向への移動を制限すること、
を特徴とする誤操作防止カバー付き手動弁。 In the manual valve with the erroneous operation prevention cover according to claim 1 or 2.
The manual mechanism includes an operation rod to which the valve body is connected to one end, and the handle is arranged on the other end side of the operation rod.
The manual mechanism is provided with a retaining portion between the handle and the valve body.
The cover member shall be attached to the manual valve with the erroneous operation prevention cover from the direction opposite to the extending side of the operation rod of the handle.
The insertion piece shall be attached to the cover member from a direction orthogonal to the longitudinal direction of the operation rod.
With the cover member attached to the manual valve with the erroneous operation prevention cover and the insertion piece attached to the cover member, the detection unit is adjacent to the end surface of the retaining portion on the valve body side. When the cover member is positioned and a force is applied to the cover member in a direction opposite to the mounting direction of the cover member, the detection unit abuts on the end face of the retaining portion and the mounting direction of the cover member. Restricting movement in the opposite direction,
A manual valve with an erroneous operation prevention cover. 請求項１乃至３のいずれか１つに記載の誤操作防止カバー付き手動弁において、
前記差込片は、前記差込片の前記カバー部材への装着側端面とは反対側の端面に第１ロック部を備えること、
前記カバー部材は、前記差込片が前記カバー部材に装着された状態で、前記第１ロック部に対向して位置する第２ロック部を備えること、
前記第１ロック部と、前記第２ロック部とには、前記差込片が前記カバー部材に装着された状態で、前記第１ロック部と前記第２ロック部とを貫通する係止孔が形成されていること、
前記誤操作防止カバー付き手動弁は、前記係止孔に挿通されるロック部材を備えること、
を特徴とする誤操作防止カバー付き手動弁。 In the manual valve with an erroneous operation prevention cover according to any one of claims 1 to 3.
The insertion piece is provided with a first lock portion on an end surface of the insertion piece opposite to the end surface of the insertion piece on the side of mounting the cover member on the cover member.
The cover member includes a second lock portion located opposite to the first lock portion with the insertion piece attached to the cover member.
The first lock portion and the second lock portion have locking holes penetrating the first lock portion and the second lock portion in a state where the insertion piece is attached to the cover member. Being formed,
The manual valve with an erroneous operation prevention cover is provided with a lock member to be inserted into the locking hole.
A manual valve with an erroneous operation prevention cover. 請求項１乃至４のいずれか１つに記載の誤操作防止カバー付き手動弁において、
前記手動機構は、一端に前記弁体が接続された操作ロッドを備え、前記操作ロッドの他端側に前記ハンドルが配置されていること、
前記操作部は、円環形状をなし、前記ハンドルの前記操作ロッドが延伸する側に、前記操作ロッドと同軸上に配置され、前記操作ロッドの長手方向に沿って、前記第１位置と、前記第２位置と、の間を移動すること、
前記差込片は、前記操作ロッドの中心軸に直交する方向から、前記カバー部材に装着されること、
前記カバー部材が前記誤操作防止カバー付き手動弁に装着された状態において、前記操作部が前記第１位置にあるときは、前記操作部の外周面が、前記検知部と干渉して、前記差込片を前記カバー部材に装着完了不能であること、前記操作部が第２位置にあるときは、前記操作部が装着完了された前記差込片を前記操作ロッドの中心軸を中心に回転投影した空間から退避して、前記差込片を前記カバー部材に装着完了可能であること、
を特徴とする誤操作防止カバー付き手動弁。 In the manual valve with an erroneous operation prevention cover according to any one of claims 1 to 4.
The manual mechanism includes an operation rod to which the valve body is connected to one end, and the handle is arranged on the other end side of the operation rod.
The operating portion has a ring shape and is arranged coaxially with the operating rod on the side where the operating rod of the handle extends, and the first position and the operating portion are arranged along the longitudinal direction of the operating rod. Moving between the second position,
The insertion piece shall be attached to the cover member from a direction orthogonal to the central axis of the operation rod.
When the operation unit is in the first position in a state where the cover member is attached to the manual valve with the erroneous operation prevention cover, the outer peripheral surface of the operation unit interferes with the detection unit and the insertion unit is inserted. When the piece cannot be completely attached to the cover member and the operation unit is in the second position, the insertion piece to which the operation unit has been attached is rotationally projected around the central axis of the operation rod. It is possible to evacuate from the space and complete the mounting of the insertion piece on the cover member.
A manual valve with an erroneous operation prevention cover. 請求項１乃至５のいずれか１つに記載の誤操作防止カバー付き手動弁において、
前記手動機構は、一端に前記弁体が接続された操作ロッドを備えること、
前記カバー部材は、前記誤操作防止カバー付き手動弁との装着側の端面に、前記誤操作防止カバー付き手動弁と係合する係合部を有すること、
前記誤操作防止カバー付き手動弁には、前記係合部と係合する被係合部が設けられていること、
前記係合部と、前記被係合部とが係合することで、前記カバー部材は、前記操作ロッドの中心軸を中心として、９０度ごとに回転して、前記誤操作防止カバー付き手動弁に対して位置決めが可能であること、
を特徴とする誤操作防止カバー付き手動弁。 In the manual valve with an erroneous operation prevention cover according to any one of claims 1 to 5.
The manual mechanism includes an operation rod to which the valve body is connected at one end.
The cover member has an engaging portion that engages with the manual valve with the erroneous operation prevention cover on the end face on the mounting side with the manual valve with the erroneous operation prevention cover.
The manual valve with the erroneous operation prevention cover is provided with an engaged portion that engages with the engaging portion.
When the engaging portion and the engaged portion engage, the cover member rotates every 90 degrees around the central axis of the operating rod to form the manual valve with the erroneous operation prevention cover. On the other hand, positioning is possible,
A manual valve with an erroneous operation prevention cover. 請求項１乃至６のいずれか１つに記載の誤操作防止カバー付き手動弁に装着される誤操作防止カバーであって、前記カバー部材と、前記差込片と、からなる誤操作防止カバー。 An erroneous operation prevention cover attached to the manual valve with the erroneous operation prevention cover according to any one of claims 1 to 6, wherein the erroneous operation prevention cover includes the cover member and the insertion piece.
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