JP6857186B2 - 改善されたスポットサイズ能力を有する単波長エリプソメトリー - Google Patents
改善されたスポットサイズ能力を有する単波長エリプソメトリー Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
- G01N21/211—Ellipsometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0641—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization
- G01B11/065—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization using one or more discrete wavelengths
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
- G01B2210/56—Measuring geometric parameters of semiconductor structures, e.g. profile, critical dimensions or trench depth
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- Life Sciences & Earth Sciences (AREA)
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- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
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Description
本特許出願は、米国特許法第119条の下で、2016年1月22日に出願された、「Methods of Improved Spot Size Capability in Single Wavelength Ellipsometry」というタイトルの米国仮特許出願第62/286,279号の優先権を主張し、同仮特許出願の内容は、全体の参照により本明細書に組み込まれる。
I(r)=Iin+Iout+Iint (1)
式中、Iinは計測ターゲットの内部の光から発生する放射照度であり、Ioutは計測ターゲットの外部の光から発生する放射照度であり、Iintは式(2)によって表される、計測ターゲットの内部の光と、計測ターゲットの外部の光との干渉から発生する放射照度であり、
Claims (15)
- 計測システムであって、
照明光ビームを生成するように構成された狭帯域照明源と、
照明光ビームを、前記照明源から、測定中の試験片上に配置された計測ターゲットに向けるように構成された照明光学素子サブシステムと、を備え、前記照明光学素子サブシステムが、
狭帯域照明源によって生成された照明光ビームを受け取り、線形偏光を照明光ビームに加えるように構成されたリニア偏光子と、
リニア偏光子から照明光ビームを受け取り、楕円偏光を照明光ビームに加えるように構成された楕円偏光子を備え、
さらに、
入射光に感応する平坦な二次元表面を有し、照明光ビームに対する試験片の応答を示す複数の出力信号を生成するように構成された検出器と、
試験片からの集束光ビームを集束し、集束光ビームを検出器の表面に向けるように構成された集束光学素子サブシステムを備え、前記集束光学素子サブシステムが、
集束光ビームを受け取り、集束光ビームに線形偏光を加えるように構成された検光子と、
集束光学素子サブシステムの像面付近または像面において集束光ビーム内に配置された視野絞りと、集束光学素子サブシステムの瞳面付近または瞳面において集束光ビーム内に配置された瞳絞りと、
を含む、計測システム。 - 前記リニア偏光子はナノ粒子系偏光素子を含む、請求項1に記載の計測システム。
- 前記視野絞りは長方形の開口である、請求項1に記載の計測システム。
- 前記瞳絞りは円形の開口である、請求項1に記載の計測システム。
- 前記瞳絞りの開口の領域、前記視野絞りの開口の領域、またはその両方は調節可能である、請求項1に記載の計測システム。
- 前記瞳絞り、前記視野絞り、またはその両方は、前記計測システムの集束光路において、信号対混入測定基準が最大化される1つ以上の位置に配置されている、請求項1に記載の計測システム。
- さらに、瞳絞りに、計測ターゲットのエッジから回折された光に関連する光線を遮蔽するように瞳絞りの開口の領域を調節させる第1のコマンド信号を瞳絞りに通信し、視野絞りに、集束光学素子サブシステムの光学機械要素との望ましくない光相互作用に関連する光線を遮蔽するために視野絞りの開口の領域を調節させる第2のコマンド信号を視野絞りに通信する、または、第1と第2のコマンド信号両方を通信するように構成されたコンピューティングシステムを備えた、請求項1に記載の計測システム。
- 前記楕円偏光子は所定の角速度で回転する、請求項1に記載の計測システム。
- 前記計測システムは単波長エリプソメータとして構成される、請求項1に記載の計測システム。
- 前記照明光ビームは、1ナノメートル未満の波長スパンの範囲を有する狭帯域光である、請求項1に記載の計測システム。
- 計測システムであって、
照明光ビームを生成するように構成された狭帯域照明源と、
照明光ビームを、前記照明源から、測定中の試験片上に配置された計測ターゲットに向けるように構成された照明光学素子サブシステムと、を備え、前記照明光学素子サブシステムが、
狭帯域照明源によって生成された照明光ビームを受け取り、線形偏光を照明光ビームに加えるように構成されたリニア偏光子と、
リニア偏光子から照明光ビームを受け取り、楕円偏光を照明光ビームに加えるように構成された楕円偏光子を備え、
さらに、入射光に感応する平坦な二次元表面を有し、照明光ビームに対する試験片の応答を示す複数の出力信号を生成するように構成された検出器と、
試験片からの集束光ビームを集束し、集束光ビームを検出器の表面に向けるように構成された集束光学素子サブシステムを備え、前記集束光学素子サブシステムが、
集束光ビームを受け取り、集束光ビームに線形偏光を加えるように構成された検光子と、
集束光学素子サブシステムの像面付近または像面において集束光ビーム内に配置された視野絞りと、集束光学素子サブシステムの瞳面付近または瞳面において集束光ビーム内に配置された瞳絞りと、
非一時的コンピュータ可読媒体を備え、非一時的コンピュータ可読媒体が、
瞳絞りに、瞳絞りの開口の領域を調節させる第1のコマンド信号を瞳絞りに通信するように、コンピューティングシステムを仕向けるためのコードと、
視野絞りに、視野絞りの開口の領域を調節させる第2のコマンド信号を視野絞りに通信するように、コンピュータシステムを仕向けるコードと、
を含む、計測システム。 - 前記リニア偏光子はナノ粒子系偏光素子を含む、請求項11に記載の計測システム。
- 前記視野絞りは長方形の開口であり、前記瞳絞りは円形の開口である、請求項11に記載の計測システム。
- 前記計測システムは単波長エリプソメータとして構成される、請求項11に記載の計測システム。
- 前記照明光ビームは複数の入射角で計測ターゲットに向けられる、請求項11に記載の計測システム。
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US201662286279P | 2016-01-22 | 2016-01-22 | |
US62/286,279 | 2016-01-22 | ||
US15/214,814 | 2016-07-20 | ||
US15/214,814 US9574992B1 (en) | 2016-01-22 | 2016-07-20 | Single wavelength ellipsometry with improved spot size capability |
PCT/US2017/014523 WO2017127789A1 (en) | 2016-01-22 | 2017-01-23 | Single wavelength ellipsometry with improved spot size capability |
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JP2021000466A Active JP7126009B2 (ja) | 2016-01-22 | 2021-01-05 | 単波長エリプソメトリー計測方法 |
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JP (2) | JP6857186B2 (ja) |
KR (1) | KR102362673B1 (ja) |
CN (1) | CN108603830B (ja) |
DE (1) | DE112017000464T5 (ja) |
TW (1) | TWI712782B (ja) |
WO (1) | WO2017127789A1 (ja) |
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CN103364349A (zh) * | 2013-06-27 | 2013-10-23 | 山东大学 | 利用可调波长激光器进行磁光椭偏测试的装置及测量方法 |
CN103471992B (zh) * | 2013-09-03 | 2016-06-01 | 华中科技大学 | 一种光谱椭偏仪中氙灯光源的光强平滑处理装置及方法 |
US9546962B2 (en) * | 2014-02-12 | 2017-01-17 | Kla-Tencor Corporation | Multi-spot scanning collection optics |
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