JP6845312B2 - 少なくとも部分的に強磁性の電子コンポーネントを支持体から基板へ非接触で引きわたす装置と方法 - Google Patents
少なくとも部分的に強磁性の電子コンポーネントを支持体から基板へ非接触で引きわたす装置と方法 Download PDFInfo
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Description
米国特許出願公開第3918146号明細書は、請求項1の前文の対象を具体的に説明している。
米国特許出願第2011/0291302号明細書は、以下のステップを有する方法に関する:
支持体に構造を形成する。構造は、その構造に電子コンポーネントを方向づけするのに適しており、したがって、電子コンポーネントは構造に対して所望の目標位置をとることができる。液体メニスカスを形成するための物質を構造に装填する。液体メニスカスは、電子コンポーネントを少なくとも部分的に収容するのに適している。電子コンポーネントのための放出箇所に、多数の電子コンポーネントを有するストックを準備する。構造を有する支持体を、放出箇所に対して少なくとも近傍にかつ対向するように移動させる。放出箇所から電子コンポーネントの1つを非接触で放出し、一方で支持体に設けられた構造は、放出箇所の近傍に、ストックを離れた後の電子コンポーネントが機械的な装置によって保持又は案内されないように、位置し、したがって、電子コンポーネントは、自由段階の後に、材料に少なくとも部分的に接触する。構造を有する支持体を、後段に配置された処理箇所へ移動させ、一方で電子コンポーネントは、構造自体に設けられた液体メニスカス上でその目標位置をとるために、方向づけされる。構造と電子コンポーネントとの間に、少なくとも部分的に残留する材料によって、支持体上の電子コンポーネントを構造に固定する。放出箇所においては、放出箇所からコンポーネントの1つを非接触で放出することを開始させるために、レーザー光源が配置されている。
この課題を解決するために、少なくとも1つの強磁性の電子コンポーネントを支持体から基板へ非接触で引きわたす装置が提案される。装置は、請求項1の特定事項を有する。
ここに開示され、かつ記述される配置は、既知の非接触の引きわたし方法に対して精度を著しく向上させることを、可能にする。この配置によって、基板上で正確に位置決めするために、少なくとも部分的に強磁性の電子コンポーネントの物理的接触はもはや不要となる。常温において所定の金属は、常に強磁性の特性を有している。その例は、鉄、ニッケル、コバルトである。電子コンポーネントは、大体において少なくとも部分的にニッケルを含んでいる。また、電子コンポーネントを形成する場合に、強磁性の特性をもたらすために、ニッケルを意図的に添加する可能性もある。同様に正確な既知の方法と比較して、コンポーネントの引きわたし速度が著しく増大する。というのは、機械的な位置決め工具をもはや移動させる必要がないからである。この配置によって、高い引きわたし率も、高い位置決め精度も得ることができる。
レーザー7**は、図3においては固定のレーザーである。図3に示すミラー20が、自らへ向けられたレーザービームを、ウェファ箔2の後面のECU18によって定められた箇所へ反射させる。ミラー20は、少なくとも作業領域内で、ミラー位置決めアクチュエータ21によって空間内で自由に移動され、ミラー位置決めアクチュエータ21は、ここでは三次元で揺動可能な電気的なリニアドライブを有しており、それがECU18によって制御される。さらにミラー位置決めアクチュエータ21は、同様にECU18によって制御される電気モータを有しており、その電気モータが少なくとも所定の角度まで、ミラーの回転を可能にする。
図3においては、図2の磁石配置8*が磁石配置8**に代えられている。磁石配置8**は、磁石配置8*のすべての特徴を有しているが、図3における磁石配置の付加的な部分が、磁石調整装置又は位置決め装置19によって位置決め可能である。
Claims (13)
- 少なくとも部分的に強磁性の電子コンポーネント(1)を、放出する支持体(2)から収容する基板(3)へ引きわたす装置であって、
前記装置が、
前記放出する支持体(2)のための第1の収容部(4)を有しており、前記支持体は、少なくとも部分的に強磁性の電子コンポーネント(1)を、前記基板(3)へ向いた前記支持体の面上に保持するように、構成され配置されており、前記第1の収容部が、
前記収容する基板(3)のための第2の収容部(5)から、あらかじめ定められた距離に位置しており、前記基板は、前記コンポーネント(1)の1つを前記基板(3)上のそのためにあらかじめ定められた箇所(6)に収容するように、構成され配置されており、
前記装置が、
剥がしユニット(7、7**)であって、前記コンポーネント(1)の1つを、前記基板(3)上へ引きわたすために、前記支持体(2)からそれぞれ剥がすことを少なくとも支援するように、構成され配置された、剥がしユニットと、
磁石配置(8;8*;8**)であって、少なくとも前記コンポーネント(1)の引きわたしの間、自らがもたらす磁場(9;9*;9**)が、前記支持体(2)から前記基板(3)へ向けられた磁気的な吸引力を前記コンポーネント(1)へもたらすように、前記基板(3)のための前記第2の収容部(5)に対して位置決めされた、磁石配置と、
を有しており、
前記吸引力が、前記基板(3)上にそのためにあらかじめ定められた前記箇所(6)へ前記コンポーネント(1)を位置決めすることを、少なくとも支援し、
前記支持体(2)に固定された前記コンポーネント(1)を前記支持体(2)から剥がすための前記剥がしユニット(7;7**)が、その強度において制御可能なレーザーであり、
1つ又は複数の移動可能なミラーからなるミラー配置(20)と少なくとも1つのミラー位置決めアクチュエータ(21)とが設けられており、前記ミラー位置決めアクチュエータ(21)が、前記ミラー配置(20)の少なくとも1つのミラーを、前記剥がしユニット(7;7**)から放出されたレーザービームを反射させるためにスライドさせかつ/又は揺動させるように、適合されている、ことを特徴とする装置。 - 前記磁石配置(8;8*;8**)が、1つ又は複数の永久磁石及び/又は電磁石を有し、かつ/又は、
少なくとも1つの磁石調整又は位置決め装置(19)をさらに有し、前記磁石調整又は位置決め装置が、前記磁石配置(8**)の少なくとも1つの磁石をスライドさせかつ/又は揺動させるように、構成され配置されている、請求項1に記載の装置。 - 前記基板(3)のための前記第2の収容部(5)が、前記放出する支持体(2)のための前記第1の収容部(4)に対して、前記基板(3)を逐次的に又は連続的に移動させるように、構成され配置されており、
前記基板(3)が、コンポーネント(1)を収容するための複数のあらかじめ定められた箇所(6)を有している、請求項1に記載の装置。 - 前記基板(3)の前記コンポーネント(1)とは逆を向く面が、前記第2の収容部(5)によってサポートを介して案内される、請求項3に記載の装置。
- 前記磁石配置(8;8*;8**)が、前記サポートのそのために設けられている収容装置内で少なくとも部分的に位置決めされている、請求項4に記載の装置。
- 前記第1の収容部(4)をスライドさせかつ/又は揺動させるように構成され配置された第1のアクチュエータ(12)をさらに有し、かつ/又は、
前記第2の収容部(5)をスライドさせかつ/又は揺動させるように構成され配置された第2のアクチュエータ(13)をさらに有する、請求項2に記載の装置。 - 前記支持体(2)上の前記コンポーネント(1)の位置を直接的にかつ/又は参照マーキング(15)の検出によって判断するように構成され配置された第1のセンサ(14)をさらに有し、かつ/又は、
前記基板(3)上の前記コンポーネント(1)の位置を直接的にかつ/又は参照マーキング(17)の検出によって判断するように構成され配置された第2のセンサ(16)をさらに有する、請求項6に記載の装置。 - メモリ機能を備えた少なくとも1つのプログラミング可能な制御ユニット(18)をさらに有し、前記制御ユニットが、
請求項7に記載の前記第1のセンサ(14)の情報を評価しかつ/又は記憶し、かつ/又は、
請求項7に記載の前記第2のセンサ(16)の情報を評価しかつ/又は記憶し、かつ/又は、
請求項6に記載の前記第1のアクチュエータ(12)を制御し、かつ/又は、
請求項6に記載の前記第2のアクチュエータ(13)を制御し、かつ/又は、
請求項1に記載の前記ミラー配置(20)の各ミラー位置決めアクチュエータ(21)をそれぞれ互いに独立して制御し、かつ/又は、
請求項1に記載の前記剥がしユニット(7;7**)の前記強度を制御し、かつ/又は、
請求項2に記載の各磁石調整又は位置決め装置(19)をそれぞれ互いに独立して制御し、かつ/又は、
請求項2に記載の各電磁石(8*;8**)のための電流供給源(22)をそれぞれ互いに独立して制御する、ように構成されている、請求項7に記載の装置。 - 少なくとも部分的に強磁性の電子コンポーネント(1)を、放出する支持体(2)から収容する基板(3)へ引きわたす方法であって、
−少なくとも部分的に強磁性の電子コンポーネント(1)を前記支持体(2)の前記基板(3)へ向いた面に準備し、
−前記支持体(2)を、第1の収容部(4)によって、前記基板(3)のための第2の収容部(5)からあらかじめ定められた間隔で、かつ、コンポーネント(1)のための剥がしユニット(7、7**)に関して、位置決めし、
−それぞれのコンポーネント(1)を前記支持体(2)から前記基板(3)上のそのためにあらかじめ定められている箇所(6)へ引きわたすために、前記剥がしユニット(7;7**)によって少なくとも支援されて、前記支持体(2)から前記コンポーネント(1)の1つをそれぞれ剥がし、前記剥がしユニット(7;7**)が、前記支持体(2)に固定された前記コンポーネント(1)を前記支持体(2)から剥がすための、その強度において制御可能なレーザーであり、
−1つ又は複数の移動可能なミラーからなるミラー配置(20)と少なくとも1つのミラー位置決めアクチュエータ(21)とを準備し、
−前記剥がしユニット(7;7**)から放出されたレーザービームを反射させるために、前記ミラー位置決めアクチュエータ(21)によって前記ミラー配置(20)の少なくとも1つのミラーをスライドさせかつ/又は揺動させ、
−少なくとも部分的に強磁性の電子コンポーネント(1)を、磁場(9、9*、9**)によって前記コンポーネント(1)へもたらされる磁気的な吸引力によって引きつけ、前記磁場(9、9*、9**)が、磁石配置(8;8*;8**)によってもたらされ、前記磁石配置が、前記磁気的な吸引力が、前記基板(3)上のそのためにあらかじめ定められた前記箇所(6)へ前記コンポーネント(1)を位置決めすることを少なくとも支援するように、前記第2の収容部(5)内に位置する前記基板(3)に対して、位置決めされており、
−前記第2の収容部(5)によって位置決めされている前記基板(3)のそのためにあらかじめ定められた前記箇所(6)に、前記コンポーネント(1)を収容する、ステップを特徴とする方法。 - 前記磁石配置が、1つ又は複数の磁石かつ/又は電磁石(8;8*;8**)から形成され、かつ/又は、
前記磁石配置の少なくとも1つの磁石(8**)が、少なくとも1つの磁石調整又は位置決め装置(19)によってスライドされかつ/又は揺動される、請求項9に記載の方法。 - 前記第1の収容部(4)が、第1のアクチュエータ(12)によってスライドされかつ/又は揺動され、かつ/又は、
前記第2の収容部(5)が、第2のアクチュエータ(13)によってスライドされかつ/又は揺動される、請求項10に記載の方法。 - 前記支持体(2)上の前記コンポーネント(1)の位置を直接的にかつ/又は参照マーキング(15)の検出によって判断する第1のセンサ(14)をさらに有する、かつ/又は、
前記基板(3)上の前記コンポーネント(1)の位置を直接的にかつ/又は参照マーキング(17)の検出によって判断する第2のセンサ(16)をさらに有する、請求項11に記載の方法。 - メモリ機能を備えた少なくとも1つのプログラミング可能な制御ユニット(18)をさらに有し、前記制御ユニットが、
請求項12に記載の前記第1のセンサ(14)の情報を評価及び/又は記憶し、かつ/又は、
請求項12に記載の前記第2のセンサ(16)の情報を評価及び/又は記憶し、かつ/又は、
請求項11に記載の前記第1のアクチュエータ(12)を制御し、かつ/又は、
請求項11に記載の前記第2のアクチュエータ(13)を制御し、かつ/又は、
請求項9に記載の各ミラー位置決めアクチュエータ(21)をそれぞれ互いに独立して制御し、かつ/又は、
請求項9に記載の前記レーザーの強度を制御し、かつ/又は、
請求項10に記載の各磁石調整又は位置決め装置(19)をそれぞれ互いに独立して制御し、かつ/又は、
請求項10に記載の各電磁石(8*;8**)のための電流供給源(22)を、それぞれ互いに独立して制御する、請求項12に記載の方法。
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