JP6838961B2 - Wiring board and its manufacturing method - Google Patents

Wiring board and its manufacturing method Download PDF

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JP6838961B2
JP6838961B2 JP2016252013A JP2016252013A JP6838961B2 JP 6838961 B2 JP6838961 B2 JP 6838961B2 JP 2016252013 A JP2016252013 A JP 2016252013A JP 2016252013 A JP2016252013 A JP 2016252013A JP 6838961 B2 JP6838961 B2 JP 6838961B2
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pair
concave
conductor
wall surface
concave groove
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JP2018107282A (en
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友昭 水谷
友昭 水谷
貞浩 西村
貞浩 西村
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NGK Spark Plug Co Ltd
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本発明は、セラミックなどの絶縁材からなる基板本体の表面などに電子部品を搭載するための配線基板およびその製造方法に関する。 The present invention relates to a wiring board for mounting an electronic component on the surface of a substrate body made of an insulating material such as ceramic, and a method for manufacturing the same.

例えば、金属からなる板形状の基体と、セラミックからなり該基体の表面上に形成され且つ内側に半導体素子を収納する枠体と、該枠体の外面の上端から下端にかけて形成され且つ平面視が円弧形状である複数の溝(凹溝)と、該溝ごとの内面に沿って形成された側面導体層とを備え、平面視において、上記溝における内面の端の接線と上記枠体の外面とのなす角度を95〜170度(鈍角)とし、且つ該溝の底部における前記枠体の厚さを0.15mm以上とした半導体素子収納用パッケージが提案されている(例えば、特許文献1参照)。
しかし、上記枠体を多数個取りにて形成する場合、セラミック製の枠体素材に空けた貫通孔の内面に沿って形成され、且つ表面にメッキ皮膜が被覆された円筒形状の導体層を2分割に切断して一対の側面導体層とした際に、メッキ皮膜が被覆されていない導体の切断端面が露出し、腐を招くおそれがあった。また、側面導体層の一部がバリとして突出し、短絡などの不具合を生じる場合もあった。
For example, a plate-shaped substrate made of metal, a frame made of ceramic formed on the surface of the substrate and accommodating a semiconductor element inside, and a frame formed from the upper end to the lower end of the outer surface of the frame and viewed in a plan view. It is provided with a plurality of arc-shaped grooves (concave grooves) and a side conductor layer formed along the inner surface of each groove, and in a plan view, the tangent to the end of the inner surface of the groove and the outer surface of the frame. A semiconductor device storage package has been proposed in which the angle formed by the conductor is 95 to 170 degrees (obtuse angle) and the thickness of the frame at the bottom of the groove is 0.15 mm or more (see, for example, Patent Document 1). ..
However, when a large number of the above-mentioned frames are formed, a cylindrical conductor layer formed along the inner surface of the through holes formed in the ceramic frame material and having a plating film coated on the surface thereof is formed. when cut into divided and a pair of side conductor layer, cutting end face of the conductor plating film is not coated is exposed, there may result in corrosion. In addition, a part of the side conductor layer may protrude as a burr, causing a problem such as a short circuit.

一方、前記側面導体層における無メッキの切断端面の露出を解消するため、セラミックからなる絶縁基体の厚み方向に沿って形成した貫通孔の内面に、互いに対称な一対の馬蹄型状の導体部材と、これらの端部間ごとに形成した一対の突出部とを備え、上記貫通孔を分割溝および厚み方向に沿って2分割して個片化した際に、絶縁基体の側面に開口する半円形状の貫通溝の内面に沿って形成された導電部材ごとの両端面をセラミックの突出部が個別に覆うようにしたセラミック基板およびその製造方法も提案されている(例えば、特許文献2参照)。
しかし、上記セラミック基板とその製造方法によれば、前記貫通孔の断面形状が通常の真円形の場合、前記導体部材に接触するハンダなどとの接合面積が減少するため、例えば、上記セラミック基板をマザーボードなどの表面上に実装する際の実装強度が低下する、という問題があった。
On the other hand, in order to eliminate the exposure of the unplated cut end face in the side conductor layer, a pair of horseshoe-shaped conductor members symmetrical with each other are formed on the inner surface of the through hole formed along the thickness direction of the insulating substrate made of ceramic. , A semicircle that is provided with a pair of protruding portions formed for each of these ends and opens on the side surface of the insulating substrate when the through hole is divided into two parts along the dividing groove and the thickness direction and separated into individual pieces. A ceramic substrate in which both end surfaces of each conductive member formed along the inner surface of the through groove of the shape are individually covered with ceramic protrusions and a method for manufacturing the same have also been proposed (see, for example, Patent Document 2).
However, according to the ceramic substrate and its manufacturing method, when the cross-sectional shape of the through hole is a normal perfect circle, the bonding area with solder or the like in contact with the conductor member is reduced. Therefore, for example, the ceramic substrate can be used. There is a problem that the mounting strength when mounted on the surface of a motherboard or the like is lowered.

特開2002−231844号公報(第1〜6頁、図1,2)JP-A-2002-231844 (pages 1-6, FIGS. 1 and 2) 特許第3236782号公報(第1〜11頁、図1〜7)Japanese Patent No. 3236782 (pages 1 to 11, FIGS. 1 to 7)

本発明は、背景技術で説明した問題点を解決し、絶縁材からなる基板本体の側面における厚み方向に沿って形成した凹形導体の腐やバリによる不具合を防ぎ、且つ該凹形導体の接続端子としての接合面積を十分に確保できる配線基板およびその製造方法を提供する、ことを課題とする。 The present invention is to solve the problems described in the background art, prevents problems caused by corrosion and burrs concave conductors formed along the thickness direction of the side surface of the substrate body made of an insulating material, and the concave shaped conductor An object of the present invention is to provide a wiring board capable of sufficiently securing a joint area as a connection terminal and a method for manufacturing the same.

課題を解決するための手段および発明の効果Means for Solving Problems and Effects of Invention

本発明は、前記課題を解決するため、絶縁材からなる基板本体の側面における厚み方向に沿って形成した凹形導体の両端部を前記基板本体の側面に開口する凹溝の両側に対向して位置する一対の凸部の内壁面にも沿って形成することなど、に着想して成されたものである。
即ち、本発明の配線基板(請求項1)は、絶縁材からなり、対向する表面および裏面と、かかる表面と裏面との周辺に位置する側面とを有する基板本体と、該基板本体の前記側面に開口し、且つ上記表面から裏面へ向かう厚み方向に沿った凹溝と、少なくとも該凹溝の内壁面に沿って形成された凹形導体と、を備えた配線基板であって、上記凹溝の内壁面は、平面視において、上記基板本体の側面に沿って対向する一対の凸部あるいは幅広部を有し、かかる一対の凸部あるいは幅広部は、平面視において上記基板本体の側面における上記凹溝の開口部から離間していると共に、上記凹形導体は、上記凹溝における上記一対の凸部あるいは幅広部よりも平面視で奥側の内壁面と、上記一対の凸部あるいは幅広部における少なくとも奥側の内壁面とに連続して形成されている、ことを特徴とする。
In order to solve the above problems, the present invention has both ends of a concave conductor formed along the thickness direction on the side surface of a substrate body made of an insulating material facing both sides of a concave groove opening on the side surface of the substrate body. It was created with the idea of forming along the inner wall surface of a pair of convex portions that are located.
That is, the wiring board (claim 1) of the present invention is made of an insulating material, has a front surface and a back surface facing each other, a substrate main body having side surfaces located around the front surface and the back surface, and the side surface of the substrate main body. A wiring board having a concave groove that is open to the surface and along the thickness direction from the front surface to the back surface, and a concave conductor formed at least along the inner wall surface of the concave groove. The inner wall surface of the substrate has a pair of convex portions or wide portions facing each other along the side surface of the substrate body in a plan view, and the pair of convex portions or wide portions face each other along the side surface of the substrate body. The concave conductor is separated from the opening of the concave groove, and the concave conductor has an inner wall surface on the back side of the pair of convex portions or wide portions in the concave groove in a plan view and the pair of convex portions or wide portions. It is characterized in that it is formed continuously with at least the inner wall surface on the back side of the above.

前記配線基板よれば、以下の効果(1)〜()を奏することが可能である。
(1)前記基板本体の側面に凹形導体およびその一部が露出しないので、多数個取りの製造方法における分割溝に沿った剪断加工(ブレイク方法)により個片化されていた場合でも、かかる凹形導体の一部からなり且つ基板本体の上記側面に突出するバリが生じていない。従って、短絡などの不具合を皆無にできる。
(2)前記凹形導体の両端部は、一対の凸部または幅広部の少なくとも平面視で奥側の内壁面まで連続しているため、外部端子との接続面積を確保することが容易となり、例えば、マザーボードへの実装時において、ハンダによる接合面積を十分に確保することが可能となる。従って、本配線基板の実装強度や、リードピンやリード線などのような外部端子との接続強度を十分に保つことができる。
(3)前記凹形導体の両端部が、前記基板本体の側面よりも内側に位置しているので、例えば、搬送時やマザーボードへの実装時などにおいて、不用意な短絡による不具合や、不用意な衝突による破損などを回避できる。
(4)前記一対の凸部あるいは幅広部が、平面視において前記基板本体の側面における前記凹溝の開口部から離れているので、前記効果(1),(3)を一層確実に奏することが可能となる。
According to the wiring board, the following effects (1) to ( 4 ) can be obtained.
(1) Since the concave conductor and a part thereof are not exposed on the side surface of the substrate main body, even if it is separated by shearing along the dividing groove (break method) in the manufacturing method of multi-cavity, it is applied. It is composed of a part of the concave conductor and does not have burrs protruding from the side surface of the substrate body. Therefore, problems such as short circuits can be eliminated.
(2) Since both ends of the concave conductor are continuous to the inner wall surface on the back side at least in a plan view of a pair of convex portions or wide portions, it becomes easy to secure a connection area with an external terminal. For example, when mounting on a motherboard, it is possible to secure a sufficient bonding area by soldering. Therefore, the mounting strength of the wiring board and the connection strength with external terminals such as lead pins and lead wires can be sufficiently maintained.
(3) both ends of the concave ridged body, so is located inside the side surface of the substrate main body, for example, in the example, when the implementation of the transport time and motherboards, failure or due to inadvertent short circuits, not It is possible to avoid damage due to a prepared collision.
(4) Since the pair of convex portions or wide portions are separated from the opening of the concave groove on the side surface of the substrate main body in a plan view, the effects (1) and (3) can be more reliably achieved. It will be possible.

尚、前記絶縁材は、例えば、アルミナなどのセラミック、あるいはエポキシ系などの樹脂である。
また、前記基板本体は、単一の絶縁層からなる形態であるか、あるいは、複数の絶縁層を一体に積層したものである。
更に、前記基板本体の表面は、平面視が矩形(正方形または長方形)状の平坦面、あるいは、平面視が矩形状で且つ中央側にキャビティの開口部が位置する矩形枠状の面である。
また、前記凹溝、一対の凸部、および幅広部は、例えば、追って前記セラミック(絶縁材)層となるグリーンシートを、打ち抜き加工して形成されたものである。例えば、多数個取りによる場合には、大判のグリーンシートにおいて隣接する製品領域同士の間を区分する境界線を跨いで、線対称であるパターンによる上記打ち抜き加工を施すことにより形成される。
The insulating material is, for example, a ceramic such as alumina or a resin such as an epoxy-based material.
Further, the substrate main body is in the form of a single insulating layer, or a plurality of insulating layers are integrally laminated.
Further, the surface of the substrate body is a flat surface having a rectangular (square or rectangular) shape in a plan view, or a rectangular frame-shaped surface having a rectangular shape in a plan view and a cavity opening located on the center side.
Further, the concave groove, the pair of convex portions, and the wide portion are formed by, for example, punching a green sheet to be a ceramic (insulating material) layer. For example, in the case of multi-cavity, it is formed by performing the above punching process with a line-symmetrical pattern across a boundary line that divides adjacent product areas in a large-sized green sheet.

更に、前記幅広部は、対向する一対の細溝や段部から構成され、平面視で前記一対の細溝などの内壁面同士間の長さ(幅)が、基板本体の側面に沿った凹溝の内壁面間の長さ(幅)よりも大である。
また、前記凹形導体は、主導体部および端部からなり、前記絶縁材がアルミナなどの高温焼成セラミックの場合には、タングステン(以下、単にWとする)あるいはモリブデン(以下、単にMoとする)を主成分とし、前記絶縁材がガラス−セラミックなどの低温焼成セラミックやエポキシ系などの樹脂の場合には、銅(以下、Cuとする)あるいは銀(以下、Agとする)を主成分とするものが適用される。
更に、前記平面視で奥側とは、平面視において前記基板本体の側面よりも該基板本体の中心側の位置を指している。換言すると、平面視において前記凹溝の開口部と反対側の位置でもある。
加えて、前記凹形導体は、前記グリーンシートに対する打ち抜き加工で形成された貫通孔の内壁面における所要の位置に対し、所定パターンのマスクを介して、W粉末など含む導電性ペーストを減圧吸引して被覆することにより形成される。
Further, the wide portion is composed of a pair of opposed narrow grooves and stepped portions, and the length (width) between the inner wall surfaces of the pair of fine grooves and the like in a plan view is concave along the side surface of the substrate main body. It is larger than the length (width) between the inner walls of the groove.
Further, the concave conductor is composed of a main conductor portion and an end portion, and when the insulating material is a high-temperature fired ceramic such as alumina, tungsten (hereinafter, simply referred to as W) or molybdenum (hereinafter, simply referred to as Mo) is used. ) Is the main component, and when the insulating material is a low-temperature co-fired ceramic such as glass-ceramic or a resin such as an epoxy-based resin, copper (hereinafter referred to as Cu) or silver (hereinafter referred to as Ag) is the main component. What you do applies.
Further, the back side in the plan view refers to a position on the center side of the substrate body rather than the side surface of the board body in the plan view. In other words, it is also a position opposite to the opening of the concave groove in a plan view.
In addition, the concave conductor sucks the conductive paste containing W powder or the like under reduced pressure at a required position on the inner wall surface of the through hole formed by punching the green sheet through a mask having a predetermined pattern. It is formed by covering with a paste.

また、本発明には、前記凹溝は、平面視で矩形状、多角形状、半円形状、または円弧形状の何れかと、対向する一対の凸部あるいは幅広部とを組み合わせた形状であり、且つ該凹溝の内壁面に沿って前記凹形導体の主導体部が形成されていると共に、対向する前記一対の凸部あるいは幅広部の内壁面は、前記基板本体の側面と平行状の面または平面視で先細の三角形状を形成する傾斜面であり、上記一対の凸部あるいは幅広部の内壁面に沿って前記凹形導体の端部が形成されている、配線基板(請求項2)も含まれる。
これによれば、平面視における前記凹溝の形状が前記の何れかであり、且つ前記凹形導体の(両)端部が、前記一対の凸部あるいは幅広部の前記形態である内壁面に沿って形成されているので、前記効果(1),(2)を一層確実に奏することが可能となる。
尚、前記凹溝の平面視における多角形状とは、四角形以上の正多角形あるいは変形多角形であり、円弧形状とは、例えば、C字形状や、Ω字形状を呈し、平面視で半円形や半楕円形であるか、これらよりも円周部が大きな形状である。
Further, in the present invention, the concave groove has a shape obtained by combining any of a rectangular shape, a polygonal shape, a semicircular shape, or an arc shape in a plan view and a pair of convex portions or wide portions facing each other. The main conductor portion of the concave conductor is formed along the inner wall surface of the concave groove, and the inner wall surface of the pair of convex portions or wide portions facing each other is a surface parallel to the side surface of the substrate main body or A wiring board (claim 2) is also an inclined surface that forms a tapered triangular shape in a plan view, and an end portion of the concave conductor is formed along the inner wall surface of the pair of convex portions or wide portions. included.
According to this, the shape of the concave groove in a plan view is any of the above, and the (both) ends of the concave conductor are formed on the inner wall surface of the pair of convex portions or wide portions. Since it is formed along the same direction, it is possible to more reliably achieve the above-mentioned effects (1) and (2).
The polygonal shape of the concave groove in the plan view is a regular polygon or a deformed polygon of a quadrangle or more, and the arc shape is, for example, a C-shape or an Ω-shape, and is a semicircle in the plan view. Or a semi-elliptical shape, or a shape with a larger circumference than these.

一方、本発明による配線基板の製造方法(請求項3)は、絶縁材からなり、対向する表面および裏面と、かかる表面と裏面との周辺に位置する側面とを有する基板本体と、該基板本体の前記側面に開口し、且つ上記表面から裏面へ向かう厚み方向に沿った凹溝と、少なくとも該凹溝の内壁面に沿って形成された凹形導体と、を備えた配線基板の製造方法であって、絶縁材からなる多数個取り用のシート素材を、該シート素材に予め設定された切断予定面を跨ぐ一対の凸片、あるいは、該切断予定面を挟む二対の凸片と、該対の凸片ごとの奥側に線対称に位置する一対の凹溝と、を有する貫通孔を打ち抜く工程と、上記対の凸片における少なくとも奥側の内壁面と、上記貫通孔における前記対の凸片よりも奥側の内壁面とに沿って、導電性ペーストを被覆する工程と、上記貫通孔および導電性ペーストが形成された上記シート素材を、上記切断予定面に沿って個片化する工程と、を含む、ことを特徴とする
これによれば、前記配線基板を多数個取りによって製造することができる
尚、前記シート素材がセラミックグリーンシートである場合には、前記打ち抜く工程と個片化する工程との間に、焼成工程が行われる。
On the other hand, the method for manufacturing a wiring board according to the present invention (claim 3) is a substrate main body made of an insulating material, having facing front and back surfaces, and side surfaces located around the front and back surfaces, and the substrate main body. A method for manufacturing a wiring board, which comprises a concave groove that opens on the side surface and is formed along the thickness direction from the front surface to the back surface, and at least a concave conductor formed along the inner wall surface of the concave groove. Therefore, a sheet material for taking a large number of pieces made of an insulating material is composed of a pair of convex pieces straddling a planned cutting surface set in advance for the sheet material, or a pair of convex pieces sandwiching the planned cutting surface. A step of punching a through hole having a pair of concave grooves located line-symmetrically on the back side of each pair of convex pieces, and at least the inner wall surface on the back side of the pair of convex pieces and the pair of the pair in the through hole. The step of coating the conductive paste along the inner wall surface on the back side of the convex piece, and the sheet material on which the through holes and the conductive paste are formed are individualized along the planned cutting surface. It is characterized by including a process .
According to this, the wiring board can be manufactured by taking a large number of pieces .
When the sheet material is a ceramic green sheet, a firing step is performed between the punching step and the individualizing step.

一つの参考形態の配線基板を示す平面図。The plan view which shows the wiring board of one reference form. (A)は図1中のX−X線の矢視に沿った垂直断面図、(B)は前記配線基板の変形形態を示す(A)と同様な垂直断面図。(A) is a vertical cross-sectional view taken along the line XX in FIG. 1, and (B) is a vertical cross-sectional view similar to (A) showing a modified form of the wiring board. (A)は異なる参考形態の配線基板を示す平面図、(B)は(A)中のY−Y線の矢視に沿った垂直断面図。(A) is a plan view showing wiring boards having different reference forms, and (B) is a vertical cross-sectional view taken along the arrow of the YY line in (A). (A)は前記配線基板における凹溝および凹形導体の付近を示す部分平面図、(B),(C)はその製造工程を示す概略図。(A) is a partial plan view showing the vicinity of the concave groove and the concave conductor in the wiring board, and (B) and (C) are schematic views showing the manufacturing process thereof. (A)は本発明による一形態である凹溝および凹形導体の付近を示す部分平面図、(B),(C)はその製造工程を示す概略図。(A) is a partial plan view showing the vicinity of a concave groove and a concave conductor, which is one form according to the present invention, and (B) and (C) are schematic views showing the manufacturing process thereof. (A)はより異なる参考形態の凹溝および凹形導体の付近を示す部分平面図、(B),(C)はその製造工程を示す概略図。(A) is a partial plan view showing the vicinity of a more different reference embodiment of the groove and concave conductors, (B), (C) is a schematic diagram showing a manufacturing process. (A)は更に異なる参考形態凹溝および凹形導体の付近を示す部分平面図、(B),(C)はその製造工程を示す概略図。(A) is a partial plan view showing the vicinity of the concave groove and the concave conductor of a further different reference form, and (B) and (C) are schematic views showing the manufacturing process thereof. (A)は別異な参考形態の凹溝および凹形導体の付近を示す部分平面図、(B),(C)はその製造工程を示す概略図。(A) is a partial plan view showing the vicinity of the concave groove and the concave conductor of different reference forms, and (B) and (C) are schematic views showing the manufacturing process thereof. (A)は別異なる参考形態の凹溝および凹形導体の付近を示す部分平面図、(B),(C)はその製造工程を示す概略図。(A) is a partial plan view showing the vicinity of the concave groove and the concave conductor of different reference forms, and (B) and (C) are schematic views showing the manufacturing process thereof. (A)は本発明の異なる形態である凹溝および凹形導体の付近を示す部分平面図、(B),(C)はその製造工程を示す概略図。(A) is a partial plan view showing the vicinity of a concave groove and a concave conductor, which are different forms of the present invention, and (B) and (C) are schematic views showing the manufacturing process thereof. (A)は別個な参考形態凹溝および凹形導体の付近を示す部分平面図、(B),(C)はその製造工程を示す概略図。(A) is a partial plan view showing the vicinity of a concave groove and a concave conductor in a separate reference form , and (B) and (C) are schematic views showing the manufacturing process thereof.

以下において、本発明を実施するための形態について説明する。
図1は、本発明の前提となる1つの参考形態の配線基板1aを示す平面図、図2(A)は、図1中のX−X線の矢視に沿った垂直断面図である。
上記配線基板1aは、図1,図2(A)に示すように、セラミック(絶縁材)からなり、全体が平板形状の基板本体2aと、該基板本体2aにおいて対向する一対の側面5の厚み方向に沿って形成された複数の凹溝11と、該凹溝11ごとの内壁面に沿って形成された凹形導体13と、を備えている。
上記基板本体2aは、平面視が矩形(長方形または正方形)状で且つ対向する表面3および裏面4と、かかる表面3と裏面4との周辺間に位置する四辺の側面5とを有している。該基板本体2aは、例えば、アルミナや窒化アルミニウムなどからなる単一のセラミック層からなる。
Hereinafter, embodiments for carrying out the present invention will be described.
FIG. 1 is a plan view showing a wiring board 1a of one reference embodiment which is a premise of the present invention, and FIG. 2A is a vertical cross-sectional view taken along the line XX in FIG.
As shown in FIGS. 1 and 2, the wiring board 1a is made of ceramic (insulating material), and has a thickness of a substrate body 2a having a flat plate shape as a whole and a pair of side surfaces 5 facing each other in the substrate body 2a. A plurality of concave grooves 11 formed along the direction and a concave conductor 13 formed along the inner wall surface of each of the concave grooves 11 are provided.
The substrate main body 2a has a front surface 3 and a back surface 4 which are rectangular (rectangular or square) in a plan view and face each other, and side surfaces 5 on four sides located between the periphery of the front surface 3 and the back surface 4. .. The substrate body 2a is made of, for example, a single ceramic layer made of alumina, aluminum nitride, or the like.

また、前記凹溝11は、平面視が矩形(長方形)状部を有し、前記基板本体2aの表面3から裏面4に向かう厚み方向に沿っている。該凹溝11の開口部側には、基板本体2aの側面5を外側面とし、且つ該側面5と平行な奥側の内壁面を有して対向している一対の凸部12を有している。
更に、前記凹形導体13は、その主導体部14が上記凹溝11の矩形状部の内壁面に沿って形成され、該凹形導体13の両端部(以下、端部と称する)15は、上記一対の凸部12の内壁面ごと(奥側の内壁面)に沿って形成されている。
図1,図2(A)に示すように、前記基板本体2aにおける表面3の中央側には、複数の素子搭載用パッド10が形成され、該パッド10ごとと前記凹形導体13ごとの上端部との間は、上記表面3に沿って形成された表面配線9によって個別に接続されている。これにより、上記各凹形導体13と各素子搭載用パッド10とは、各表面配線9を介して個別に導通可能とされている。
Further, the concave groove 11 has a rectangular portion in a plan view, and is along the thickness direction from the front surface 3 to the back surface 4 of the substrate main body 2a. On the opening side of the concave groove 11, a pair of convex portions 12 having a side surface 5 of the substrate main body 2a as an outer surface and an inner wall surface on the back side parallel to the side surface 5 and facing each other are provided. ing.
Further, the concave conductor 13 has a main conductor portion 14 formed along the inner wall surface of the rectangular portion of the concave groove 11, and both end portions (hereinafter, referred to as end portions) 15 of the concave conductor 13 are formed. , It is formed along each inner wall surface (inner wall surface on the back side) of the pair of convex portions 12.
As shown in FIGS. 1 and 2A, a plurality of element mounting pads 10 are formed on the center side of the surface 3 of the substrate main body 2a, and the upper ends of each of the pads 10 and each of the concave conductors 13. The portions are individually connected by surface wiring 9 formed along the surface 3. As a result, the concave conductor 13 and the element mounting pad 10 can be individually conducted via the surface wiring 9.

尚、前記表面配線9、素子搭載用パッド10、および凹形導体13は、主にWあるいはMoからなっている。
また、前記複数の素子搭載用パッド10の上方には、追って、半導体素子などの電子部品40がロウ付けなどによって搭載される。
更に、前記複数の凹溝11および凹形導体13が基板本体2aの裏面4にまで達している形態の前記配線基板1aは、追って、例えば、図示しないマザーボードの表面に形成された複数の電極ごとの上に、複数の上記凹形導体13を個別に載置し、これらの間にハンダを充填することにより、上記マザーボードの表面上に十分な接続強度をもって実装される。
The surface wiring 9, the element mounting pad 10, and the concave conductor 13 are mainly made of W or Mo.
Further, an electronic component 40 such as a semiconductor element is mounted above the plurality of element mounting pads 10 by brazing or the like.
Further, the wiring board 1a in a form in which the plurality of concave grooves 11 and the concave conductor 13 reach the back surface 4 of the substrate main body 2a is described later, for example, for each of a plurality of electrodes formed on the surface of a motherboard (not shown). A plurality of the concave conductors 13 are individually placed on the motherboard, and solder is filled between them so that the concave conductors 13 are mounted on the surface of the motherboard with sufficient connection strength.

図2(B)は、前記参考形態の配線基板1aの変形形態を示す前記同様の垂直断面図である。図示のように、凹溝11ごとにおける厚み方向の底部(以下、単に底部と称する)は、前記基板本体2aの裏面部4aによって、各側面5の厚み方向における中間位置に留められている。そのため、各凹形導体13の主導体部14は、前記裏面部4aの上面に位置する底導体部14aを一体に有している。
上記のように、各凹溝11の底部を裏面部4aにより塞ぐため、前記基板本体2aには、上下2層以上のセラミック層を一体に積層したものが用いられる。
また、上記のように、凹形導体13ごとの底導体部14aの上面には、追って、図示しない水平姿勢とされたリード線の先端部が個別に載置され、これらの間をハンダを介して接続することにより、外部の電子装置などに導通可能とされる。
FIG. 2B is a similar vertical cross-sectional view showing a modified form of the wiring board 1a of the reference form. As shown in the drawing, the bottom portion in the thickness direction of each of the concave grooves 11 (hereinafter, simply referred to as the bottom portion) is held at an intermediate position in the thickness direction of each side surface 5 by the back surface portion 4a of the substrate main body 2a. Therefore, the main conductor portion 14 of each concave conductor 13 integrally has a bottom conductor portion 14a located on the upper surface of the back surface portion 4a.
As described above, in order to close the bottom portion of each concave groove 11 with the back surface portion 4a, a substrate body 2a in which two or more upper and lower ceramic layers are integrally laminated is used.
Further, as described above, the tip portions of the lead wires in a horizontal posture (not shown) are individually placed on the upper surface of the bottom conductor portion 14a for each concave conductor 13, and the leading portions of the lead wires in a horizontal posture (not shown) are individually placed between them via solder. By connecting the solder, it is possible to conduct electricity to an external electronic device or the like.

図3(A)は、異なる参考形態の配線基板1bを示す平面図、同図(B)は、(A)中のY−Y線の矢視に沿った垂直断面図である。
上記配線基板1bは、図3(A),(B)に示すように、前記と同じセラミックからなり、全体が箱形状の基板本体2bと、該基板本体2bにおいて対向する一対の側面5の厚み方向に沿って形成された複数の凹溝11と、該凹溝11ごとの内壁面に沿って形成された複数の凹形導体13と、を備えている。上記基板本体2bは、平面視の外形が矩形状で且つ対向する表面3および裏面4と、かかる表面3と裏面4との周辺間に位置する四辺の側面5と、上記表面3の中央側に開口するキャビティ6とを有している。該キャビティ6は、平面視が矩形状の底面7と、その四辺ごとから上記表面3に向かって立設する側面8とからなる。
FIG. 3A is a plan view showing wiring boards 1b having different reference forms, and FIG. 3B is a vertical cross-sectional view taken along the line YY in FIG. 3A.
As shown in FIGS. 3A and 3B, the wiring board 1b is made of the same ceramic as described above, and has a box-shaped substrate body 2b as a whole and a pair of side surfaces 5 facing each other in the substrate body 2b. A plurality of concave grooves 11 formed along the direction and a plurality of concave conductors 13 formed along the inner wall surface of each of the concave grooves 11 are provided. The substrate main body 2b has a rectangular outer shape in a plan view and faces the front surface 3 and the back surface 4, the side surfaces 5 of the four sides located between the periphery of the front surface 3 and the back surface 4, and the central side of the front surface 3. It has a cavity 6 that opens. The cavity 6 includes a bottom surface 7 having a rectangular plan view, and side surfaces 8 standing upright from each of the four sides toward the surface 3.

尚、前記キャビティ6を内設した基板本体2bは、平板状のセラミック層と平面視が矩形枠状のセラミック層とを、2層以上積層することで形成されている。
図3(A),(B)に示すように、前記キャビティ6の底面7に、複数の素子搭載用パッド10が形成され、該各パッド10と前記各凹形導体13との間は、上記キャビティ6の側面8と凹溝11の最奥辺との間を水平方向に沿って貫通する前記表面配線9と同様な内部配線層9を介して、個別に導通可能とされている。
上記複数の素子搭載用パッド10の上方には、追って前記同様の電子部品40が搭載された後、基板本体2bの表面3に前記キャビティ6の開口部を封止する図示しない蓋板が接合される。
尚、上記凹溝11ごとの底部側を前記裏面部4aによって塞ぐと共に、該裏面部4aの上面に形成される前記底導体部14aを有する形態の凹形導体13とすることも可能である。
The substrate main body 2b in which the cavity 6 is provided is formed by laminating two or more layers of a flat plate-shaped ceramic layer and a ceramic layer having a rectangular frame shape in a plan view.
As shown in FIGS. 3A and 3B, a plurality of element mounting pads 10 are formed on the bottom surface 7 of the cavity 6, and the space between the pads 10 and the concave conductors 13 is described above. It is individually conductive via an internal wiring layer 9 similar to the surface wiring 9 that penetrates between the side surface 8 of the cavity 6 and the innermost side of the concave groove 11 along the horizontal direction.
A lid plate (not shown) for sealing the opening of the cavity 6 is joined to the surface 3 of the substrate main body 2b after the same electronic component 40 is mounted above the plurality of element mounting pads 10. To.
It is also possible to form the concave conductor 13 in a form having the bottom conductor portion 14a formed on the upper surface of the back surface portion 4a while closing the bottom side of each of the concave grooves 11 with the back surface portion 4a.

図4(A)に示す前記基板本体2a(2b)において、一対の凸部12を有する前記凹溝11、および、本発明の配線基板の製造方法に含まれる凹形導体13の形成方法を、図4(B),(C)によって説明する。
予め、図4(B)に示す多数個取り用のセラミックグリーンシート(以下、単にグリーンシートと称する(シート素材))2gを用意した。該グリーンシート2gは、例えば、アルミナ粉末、所定のバインダ樹脂、可塑剤、および溶剤を適量ずつ配合して得られたセラミックスラリーを、ドクターブレード法によりシート状に成形したものである。当該グリーンシート2gには、追って、前記各基板本体2a(2b)となる製品領域ごとを区分する仮想の切断予定面cfが設定されている。
先ず、図4(B)に示すように、切断予定面cfを跨いで上下一対の前記凹溝11を形成する。具体的には、前記凸部12を幅方向(図4(B)中の垂直方向)に約2倍とし、且つ切断予定面cfに跨る左右一対の凸片16を有する貫通孔h1を、図示しないパンチピンと該パンチピンの先端部を受け入れる透孔を有するダイとを用いる打ち抜き加工により形成した。
In the substrate main body 2a (2b) shown in FIG. 4A, the method of forming the concave groove 11 having a pair of convex portions 12 and the concave conductor 13 included in the method for manufacturing a wiring board of the present invention is described. This will be described with reference to FIGS. 4 (B) and 4 (C).
In advance, 2 g of a ceramic green sheet (hereinafter, simply referred to as a green sheet (sheet material) ) for taking a large number of pieces shown in FIG. 4 (B) was prepared. The green sheet 2g is obtained by molding, for example, a ceramic slurry obtained by blending an appropriate amount of alumina powder, a predetermined binder resin, a plasticizer, and a solvent into a sheet shape by a doctor blade method. In the green sheet 2g, a virtual cut surface cf for dividing each product area to be the substrate main body 2a (2b) is set later.
First, as shown in FIG. 4B, a pair of upper and lower recessed grooves 11 are formed so as to straddle the planned cutting surface cf. Specifically, the through hole h1 having the convex portion 12 approximately doubled in the width direction (vertical direction in FIG. 4B) and having a pair of left and right convex pieces 16 straddling the planned cutting surface cf is shown. It was formed by punching using a non-punch pin and a die having a through hole for receiving the tip of the punch pin.

尚、前記パンチピンおよびダイには、単一のもの同士を用いることで1回の打ち抜き加工を行っても良いし、互いに断面形状が異なる複数のパンチピンと、透孔の形状が異なる同数のダイとを用い、複数回の打ち抜き加工を行っても良い。
次に、図4(C)に示すように、左右一対の凸片16における奥側の内壁面と、貫通孔h1における該一対の凸片16よりも奥側の内壁面とに沿って、W粉末を含む導電性ペーストを、前記貫通孔h1における一方の開口部側から負圧を利用して減圧吸引して被覆した。この際、前記開口部側に導電性ペーストを被覆しない箇所を覆うパターンのマスク板を配置したり、または、前記一対の凸片16の先端面同士に接触する棒状のマスクを挿入しても良い。
次いで、図示のように、主導体部14および端部15を含む未焼成の凹形導体13が線対称に一対形成された前記グリーンシート2gを、前記凹形導体13などと共に同時焼成した。
By using a single punch pin and die, one punching process may be performed, or a plurality of punch pins having different cross-sectional shapes and the same number of dies having different through-hole shapes may be used. May be used to perform punching processing a plurality of times.
Next, as shown in FIG. 4C, W is along the inner wall surface on the back side of the pair of left and right convex pieces 16 and the inner wall surface on the back side of the pair of convex pieces 16 in the through hole h1. The conductive paste containing the powder was covered by suction under reduced pressure from one opening side of the through hole h1 using negative pressure. At this time, a mask plate having a pattern covering the portion not covered with the conductive paste may be arranged on the opening side, or a rod-shaped mask that contacts the tip surfaces of the pair of convex pieces 16 may be inserted. ..
Next, as shown in the figure, 2 g of the green sheet in which a pair of unfired concave conductors 13 including the main conductor portion 14 and the end portion 15 were formed line-symmetrically was simultaneously fired together with the concave conductor 13.

更に、前記焼成によって得られたセラミック層2cを、前記切断予定面cfに沿って、例えばダイシング加工によって個片化した。その結果、図4(A)に示すように、基板本体2a(2b)の側面5に開口し、且つ一対の凸部12を有する凹溝11と、該凹溝11における凸部12ごとの内壁面から奥側の内壁面に沿って連続する焼成済みの凹形導体13を得ることができた。
以上のような一対の凸部12を有する凹溝11、主導体部14および端部15を含む凹形導体13を備えた基板本体2a(2b)を有する前記配線基板1a(2b)によれば、前記効果(1),(2)を奏することができる。
尚、前記グリーンシート2gは、単層でも複数層であっても良い。また、前記図2(B)で示した裏面部4aを含む基板本体2aを得るには、前記グリーンシート2gに加えて、更に前記打ち抜き加工がされていない平板のグリーンシートを裏面4側に積層すれば良い。
Further, the ceramic layer 2c obtained by the firing was individualized along the planned cutting surface cf by, for example, dicing. As a result, as shown in FIG. 4A, a concave groove 11 having an opening on the side surface 5 of the substrate main body 2a (2b) and having a pair of convex portions 12 and each of the convex portions 12 in the concave groove 11 It was possible to obtain a fired concave conductor 13 that is continuous from the wall surface along the inner wall surface on the back side.
According to the wiring board 1a (2b) having a substrate body 2a (2b) including a concave groove 11 having a pair of convex portions 12 as described above, a concave conductor 13 including a main conductor portion 14 and an end portion 15. , The above effects (1) and (2) can be achieved.
The green sheet 2g may be a single layer or a plurality of layers. Further, in order to obtain the substrate main body 2a including the back surface portion 4a shown in FIG. 2 (B), in addition to the green sheet 2 g, a flat plate green sheet which has not been punched is further laminated on the back surface 4 side. Just do it.

図5(A)は、本発明による一形態である凹溝11および凹形導体13aの付近を示す前記同様の部分平面図である。図示のように、対向する一対の凸部12は、平面視において、基板本体2a(2b)の該側面5および凹溝11の開口部の双方から奥側に離間している。即ち、一対の凸部12の内壁面は、上記側面5と平行であり、該凸部12と基板本体2a(2b)の側面5との間には、上記凹溝11の開口部側である左右一対の段部17が位置している。更に、上記凹形導体13aの端部15は、上記凸部12ごとの先端面(突出する方向(図5(A)中の左右方向)の先端面)をも覆っている。尚、上記一対の段部17は、単一の幅広部でもある。
上記一対の段部17と一対の凸部12とを含む凹溝11、および凹形導体13aの形成方法(本発明による配線基板の製造方法)を、以下に説明する。
図5(B)に示すように、前記と同じグリーンシート2gにおける切断予定面cfを跨いで、上下一対の前記凹溝11を形成する。具体的には、切断予定面cf側に位置する左右一対、および切断予定面cfを挟んだ上下一対合計4つの凸部12と、上下一対ずつの凸部12同士間に位置し且つ前記段部17の深さの約2倍の幅である左右一対の凹み18とを備えた貫通孔h2を、前記と同様な打ち抜き加工によって形成した。
FIG. 5A is a similar partial plan view showing the vicinity of the concave groove 11 and the concave conductor 13a, which is one form according to the present invention. As shown in the drawing, the pair of convex portions 12 facing each other are separated from both the side surface 5 of the substrate main body 2a (2b) and the opening of the concave groove 11 to the back side in a plan view. That is, the inner wall surface of the pair of convex portions 12 is parallel to the side surface 5, and the convex portion 12 and the side surface 5 of the substrate main body 2a (2b) are on the opening side of the concave groove 11. A pair of left and right step portions 17 are located. Further, the end portion 15 of the concave conductor 13a also covers the tip surface of each of the convex portions 12 (the tip surface in the projecting direction (left-right direction in FIG. 5A)). The pair of stepped portions 17 is also a single wide portion.
A method for forming the concave groove 11 including the pair of stepped portions 17 and the pair of convex portions 12 and the concave conductor 13a (method for manufacturing a wiring board according to the present invention) will be described below.
As shown in FIG. 5B, a pair of upper and lower recessed grooves 11 are formed across the planned cutting surface cf in the same green sheet 2g as described above. Specifically, a pair of left and right convex portions 12 located on the planned cutting surface cf side, a pair of upper and lower convex portions 12 sandwiching the planned cutting surface cf, and a pair of upper and lower convex portions 12 located between the convex portions 12 and the step. A through hole h2 having a pair of left and right recesses 18 having a width about twice the depth of the portion 17 was formed by the same punching process as described above.

次いで、図5(C)に示すように、左右および上下一対ずつの凸部12の内壁面(少なくとも奥側の内壁面)および先端面と、貫通孔h2において上方および下方それぞれにおける左右一対の凸部12よりも奥側の内壁面とにわたって、前記と同じ導電性ペーストを吸引しつつ被覆した。次に、図示のように、主導体部14および端部15を有する未焼成の凹形導体13aが線対称に一対形成された前記グリーンシート2gを、前記凹形導体13aなどと共に同時焼成した。
更に、上記焼成によって得られたセラミック層2cを、前記切断予定面cfに沿って、前記ダイシング加工などによって個片化した。
Next, as shown in FIG. 5C, the inner wall surface (at least the inner wall surface on the back side) and the tip surface of each pair of left and right and upper and lower convex portions 12 and the pair of left and right convex portions on the upper and lower sides of the through hole h2, respectively. The same conductive paste as described above was sucked and coated over the inner wall surface on the back side of the portion 12. Next, as shown in the figure, the green sheet 2g in which a pair of unfired concave conductors 13a having a main conductor portion 14 and an end portion 15 were formed line-symmetrically was simultaneously fired together with the concave conductor 13a and the like.
Further, the ceramic layer 2c obtained by the firing was separated into pieces by the dicing process or the like along the planned cutting surface cf.

その結果、図5(A)に示すように、基板本体2a(2b)の側面5において、一対の段部17を介して一対の凸部12を有する凹溝11と、該凹溝11の内壁面に沿って形成され、且つ端部15が凸部12ごとの先端面まで覆っている凹形導体13aとが得られた。換言すると、上記一対の凸部12は、凹溝11の開口部および基板本体2a(2b)の側面5の双方から離間している
以上のように、一対の凸部12が凹溝11の開口部から離間することにより、端部15が凸部12ごとの先端面まで覆っている凹形導体13aを備えた基板本体2a(2b)を有する前記配線基板1a(1b)によれば、前記効果(1)〜()を奏することができる。
尚、前記凹形導体13aは、基板本体2a(2b)の側面5よりも奥側であり、端部15が該側面5に露出しない範囲において、その端部15を凸部12ごとの外壁面まで延出させても良い。
As a result, as shown in FIG. 5 (A), on the side surface 5 of the substrate main body 2a (2b), a concave groove 11 having a pair of convex portions 12 via a pair of stepped portions 17 and the inside of the concave groove 11 A concave conductor 13a formed along the wall surface and having an end portion 15 covering up to the tip surface of each convex portion 12 was obtained. In other words, the pair of convex portions 12 are separated from both the opening of the concave groove 11 and the side surface 5 of the substrate main body 2a (2b) .
As described above, the substrate main body 2a (2b) provided with the concave conductor 13a in which the end portion 15 covers up to the tip surface of each convex portion 12 by separating the pair of convex portions 12 from the opening of the concave groove 11. According to the wiring board 1a (1b) having the above effect (1) to ( 4 ).
The concave conductor 13a is on the back side of the side surface 5 of the substrate main body 2a (2b), and the end portion 15 is formed on the outer wall surface of each convex portion 12 within a range in which the end portion 15 is not exposed to the side surface 5. May be extended to.

図6(A)は、前記とは異なる参考形態の凹溝19および凹形導体20の付近を示す前記同様の部分平面図である。
図6(A)に示すように、上記凹溝19は、平面視において、変形八角形(多角形)を呈し、その開口部を挟んで対向する一対の凸部22を有し、該凸部22ごとの内壁面が基板本体2a(2b)の側面5と傾斜する先細の三角形状を呈している。また、上記凹形導体20は、凹溝19における一対の凸部22よりも奥側の内壁面に沿って形成された主導体部21と、凸部22ごとの内壁面における開口部の直前に達する端部15とからなる。
上記一対の凸部22を有する凹溝19および凹形導体20の形成方法(本発明による配線基板の製造方法)を、以下に説明する
6(B)に示すように、前述と同様にグリーンシート2gを用意し、該グリーンシート2gにおける切断予定面cfに跨った左右一対の凸片22aを備えた貫通孔h3を、前記と同様な打ち抜き加工により形成した。尚、前記凸片22aの外形は、上下一対の凸部22における2つの傾斜面と相似形である。
FIG. 6A is a similar partial plan view showing the vicinity of the concave groove 19 and the concave conductor 20 in a reference form different from the above.
As shown in FIG. 6A, the concave groove 19 exhibits a deformed octagon (polygon) in a plan view, and has a pair of convex portions 22 facing each other with the opening thereof interposed therebetween. The inner wall surface of each of the 22 has a tapered triangular shape that is inclined with the side surface 5 of the substrate main body 2a (2b). Further, the concave conductor 20 is formed immediately before the main conductor portion 21 formed along the inner wall surface on the inner wall surface side of the pair of convex portions 22 in the concave groove 19 and the opening in the inner wall surface of each convex portion 22. It consists of a reaching end 15.
A method for forming the concave groove 19 and the concave conductor 20 having the pair of convex portions 22 (method for manufacturing a wiring board according to the present invention) will be described below .
As shown in FIG. 6B, 2 g of a green sheet is prepared in the same manner as described above, and a through hole h3 having a pair of left and right convex pieces 22a straddling the planned cutting surface cf in the green sheet 2 g is formed in the same manner as described above. It was formed by punching. The outer shape of the convex piece 22a is similar to the two inclined surfaces of the pair of upper and lower convex portions 22.

次に、図6(C)に示すように、左右一対の凸片22aの各側面と、貫通孔h3における該一対の凸片22aよりも奥側の内壁面とにわたって、前記と同じ導電性ペーストを吸引しつつ被覆した。次いで、図示のように、主導体部21および端部15を含む未焼成の凹形導体20が線対称に一対形成された前記グリーンシート2gを、該凹形導体20などと共に同時焼成した。更に、該焼成によって得られた前記セラミック層2cを、前記切断予定面cfに沿って、ダイシング加工などにより個片化した。
その結果、図6(A)に示すように、基板本体2a(2b)の側面5に、一対の凸部22を有する凹溝19と、該凹溝19に含まれる各凸部22の内壁面と該凸部22よりも奥側の内壁面とに沿って形成され、主導体部21および端部15を有する凹形導体20が得られた。
Next, as shown in FIG. 6C, the same conductive paste as described above extends over each side surface of the pair of left and right convex pieces 22a and the inner wall surface of the through hole h3 behind the pair of convex pieces 22a. Was covered while sucking. Next, as shown in the figure, 2 g of the green sheet in which a pair of unfired concave conductors 20 including the main conductor portion 21 and the end portion 15 were formed line-symmetrically was simultaneously fired together with the concave conductor 20 and the like. Further, the ceramic layer 2c obtained by the firing was separated into pieces by dicing or the like along the planned cutting surface cf.
As a result, as shown in FIG. 6A, a concave groove 19 having a pair of convex portions 22 on the side surface 5 of the substrate main body 2a (2b) and an inner wall surface of each convex portion 22 included in the concave groove 19 A concave conductor 20 formed along the inner wall surface on the back side of the convex portion 22 and having a main conductor portion 21 and an end portion 15 was obtained.

図7(A)は、更に異なる参考形態の凹溝23および凹形導体24の付近を示す前記同様の部分平面図である。
図7(A)に示すように、上記凹溝23は、平面視において円弧(略円形)形状部を有し、該円弧形状部と基板本体2a(2b)の側面5との間に、一対の凸部26を有している。該一対の凸部26間の開口幅は、上記凹溝23における平面視で最も広い箇所の幅よりも小さい。該凹溝23には、各凸部26の内壁面を含む当該凹溝23の内壁面に沿って、これらと相似形の主導体部25と、各凸部26の内壁面における先端面側に位置する端部15とからなり、平面視がC字形状の凹形導体24が形成されている
上記一対の凸部26を有する凹溝23、および凹形導体24を得る方法(本発明による配線基板の製造方法)を以下に説明する。
7(B)に示すように、前記グリーンシート2gにおける切断予定面cfに跨って、左右一対の凸片27を線対称に備えた貫通孔h4を、前記と同様な打ち抜き加工によって形成した。尚、前記凸片27の外形は、上下一対の凸部26の各湾曲面と相似形である。
FIG. 7A is a similar partial plan view showing the vicinity of the concave groove 23 and the concave conductor 24 having a further different reference form.
As shown in FIG. 7A, the concave groove 23 has an arc (substantially circular) shaped portion in a plan view, and a pair of the arc-shaped portion and the side surface 5 of the substrate main body 2a (2b). It has a convex portion 26 of the above. The opening width between the pair of convex portions 26 is smaller than the width of the widest portion of the concave groove 23 in a plan view. The concave groove 23 includes a main conductor portion 25 having a similar shape to the inner wall surface of the concave groove 23 including the inner wall surface of each convex portion 26, and a tip surface side of the inner wall surface of each convex portion 26. A concave conductor 24 having a C-shaped plan view is formed, which is composed of a positioned end portion 15 .
A method for obtaining the concave groove 23 having the pair of convex portions 26 and the concave conductor 24 (method for manufacturing a wiring board according to the present invention) will be described below.
As shown in FIG. 7B, a through hole h4 having a pair of left and right convex pieces 27 line-symmetrically formed across the planned cutting surface cf of the green sheet 2g was formed by the same punching process as described above. The outer shape of the convex piece 27 is similar to each curved surface of the pair of upper and lower convex portions 26.

次に、図7(C)に示すように、左右一対の凸片27の各側面と、貫通孔h4における該一対の凸片27よりも奥側の内壁面とに沿って、前記と同じ導電性ペーストを吸引しつつ被覆した。次いで、図示のように、主導体部25および端部15を含む未焼成の凹形導体24が線対称に一対形成された前記グリーンシート2gを、前記凹形導体24などと共に同時焼成した。更に、前記焼成によって得られた前記セラミック層2cを、前記切断予定面cfに沿って、ダイシング加工などにより個片化した。
その結果、図7(A)に示すように、基板本体2a(2b)の側面5に、一対の凸部26を有する凹溝23と、各凸部26の内壁面および該凸部26よりも奥側凹溝23の内壁面とに沿って形成され、主導体部25および端部15からなる凹形導体24が得られた。
尚、平面視で円弧(略円形)形状を呈する前記凹形導体24によれば、前述したハンダ付けによる接続のほか、断面が円形の導体ピンの挿入による導通も可能である。
Next, as shown in FIG. 7C, the same conductivity as described above is provided along each side surface of the pair of left and right convex pieces 27 and the inner wall surface of the through hole h4 behind the pair of convex pieces 27. The sex paste was coated while being sucked. Next, as shown in the figure, 2 g of the green sheet in which a pair of unfired concave conductors 24 including the main conductor portion 25 and the end portion 15 were formed line-symmetrically was simultaneously fired together with the concave conductor 24 and the like. Further, the ceramic layer 2c obtained by the firing was separated into pieces by dicing or the like along the planned cutting surface cf.
As a result, as shown in FIG. 7A, the concave groove 23 having a pair of convex portions 26 on the side surface 5 of the substrate main body 2a (2b), the inner wall surface of each convex portion 26, and the convex portions 26. A concave conductor 24 formed along the inner wall surface of the back-side concave groove 23 and composed of a main conductor portion 25 and an end portion 15 was obtained.
According to the concave conductor 24 which has an arc (substantially circular) shape in a plan view, in addition to the connection by soldering described above, conduction by inserting a conductor pin having a circular cross section is also possible.

図8(A)は、前記とは別異な参考形態の凹溝28および凹形導体30の付近を示す前記同様の部分平面図である。
図8(A)に示すように、上記凹溝28は、平面視において半円形状部を有し、該半円形状部と基板本体2a(2b)の側面5との間には、前記一対の凸部12を有している。また、上記凹形導体30は、凹溝28における各凸部12よりも奥側の内壁面に沿って形成された主導体部29と、各凸部12における奥側の内壁面の先端面側に位置する端部15とからなる。
上記一対の凸部12を有する凹溝28および凹形導体30を得る方法(本発明による配線基板の製造方法)を以下に説明する。
8(B)に示すように、前記グリーンシート2gにおける切断予定面cfに跨って、左右一対の前記凸片16とを備えた貫通孔h5を、前記と同様な打ち抜き加工によって形成した。
FIG. 8A is a similar partial plan view showing the vicinity of the concave groove 28 and the concave conductor 30 in a reference form different from the above.
As shown in FIG. 8A, the concave groove 28 has a semicircular portion in a plan view, and the pair is between the semicircular portion and the side surface 5 of the substrate main body 2a (2b). It has a convex portion 12 of. Further, the concave conductor 30 includes a main conductor portion 29 formed along the inner wall surface on the inner wall surface side of each convex portion 12 in the concave groove 28, and a tip surface side of the inner wall surface on the inner wall side on the inner wall surface side in each convex portion 12. It consists of an end portion 15 located at.
A method for obtaining the concave groove 28 and the concave conductor 30 having the pair of convex portions 12 (method for manufacturing a wiring board according to the present invention) will be described below.
As shown in FIG. 8B, a through hole h5 having a pair of left and right convex pieces 16 straddling the planned cutting surface cf of the green sheet 2g was formed by the same punching process as described above.

次に、図8(C)に示すように、左右一対の凸片16の各側面と、貫通孔h5における該一対の凸片16よりも奥側の内壁面とに沿って、前記と同じ導電性ペーストを吸引しつつ被覆した。次いで、図示のように、主導体部29および端部15を含む未焼成の凹形導体30が線対称に一対形成された前記グリーンシート2gを、該凹形導体30などと共に同時焼成した。更に、該焼成によって得られた前記セラミック層2cを、前記切断予定面cfに沿って、ダイシング加工などにより個片化した。
その結果、図8(A)に示すように、基板本体2a(2b)の側面5に、一対の凸部12を有する凹溝28と、各凸部12の内壁面と該各凸部12よりも奥側の内壁面とに沿って形成され、主導体部29および端部15からなる凹形導体30が得られた。
Next, as shown in FIG. 8C, the same conductivity as described above is provided along each side surface of the pair of left and right convex pieces 16 and the inner wall surface of the through hole h5 behind the pair of convex pieces 16. The sex paste was coated while being sucked. Next, as shown in the figure, 2 g of the green sheet in which a pair of unfired concave conductors 30 including the main conductor portion 29 and the end portion 15 were formed line-symmetrically was simultaneously fired together with the concave conductor 30 and the like. Further, the ceramic layer 2c obtained by the firing was separated into pieces by dicing or the like along the planned cutting surface cf.
As a result, as shown in FIG. 8A, the concave groove 28 having a pair of convex portions 12 on the side surface 5 of the substrate main body 2a (2b), the inner wall surface of each convex portion 12, and the convex portions 12 A concave conductor 30 formed along the inner wall surface on the back side and composed of a main conductor portion 29 and an end portion 15 was obtained.

図9(A)は、前記とは別なる参考形態の凹溝31および凹形導体32の付近を示す前記同様の部分平面図である。
図9(A)に示すように、上記凹溝31は、平面視において矩形状部を有し、該矩形状部と基板本体2a(2b)の側面5との間には、左右一対の段部(幅広部)17が位置している。また、上記凹形導体32は、前記凹溝31の段部17ごとよりも奥側の内壁面および段部17ごとの底面(内壁面)に沿って形成され、その端部34は、前記段部17ごとの垂直な端面付近に位置している。
上記一対の段部(幅広部)17を有する凹溝31、および凹形導体32を得る方法(本発明による配線基板の製造方法)を以下に説明する。
9(B)に示すように、前述と同様に用意したグリーンシート2gにおける切断予定面cfに跨って、左右一対の前記凹み18とを備えた貫通孔h6を、前記と同様の打ち抜き加工により形成した。
9 (A) is the same as defined above partial plan view showing the vicinity of the recessed groove 31 and the concave conductor 32 references form said to become different,.
As shown in FIG. 9A, the concave groove 31 has a rectangular portion in a plan view, and a pair of left and right steps are provided between the rectangular portion and the side surface 5 of the substrate main body 2a (2b). The portion (wide portion) 17 is located. Further, the concave conductor 32 is formed along an inner wall surface on the back side of each step portion 17 of the concave groove 31 and a bottom surface (inner wall surface) of each step portion 17, and the end portion 34 thereof is formed on the step portion 34. It is located near the vertical end face of each portion 17.
A method for obtaining the concave groove 31 having the pair of stepped portions (wide portions) 17 and the concave conductor 32 (method for manufacturing a wiring board according to the present invention) will be described below.
As shown in FIG. 9B, a through hole h6 having a pair of left and right recesses 18 straddling the planned cutting surface cf of the green sheet 2g prepared in the same manner as described above is punched in the same manner as described above. Formed.

次に、図9(C)に示すように、左右一対の凹み18の各内壁面と貫通孔h6における該一対の凹み18よりも奥側の内壁面とに沿って、前記と同じ導電性ペーストを吸引しつつ被覆した。次いで、図示のように、主導体部33および端部34を有する未焼成の凹形導体32が線対称に一対形成された前記グリーンシート2gを、該凹形導体32などと共に同時焼成した。更に、前記焼成によって得られた前記セラミック層2cを、前記切断予定面cfに沿って、ダイシング加工などにより個片化した。
その結果、図9(A)に示すように、基板本体2a(2b)の側面5に、一対の段部(幅広部)17を有する凹溝31と、該凹溝31の内壁面に沿って形成された主導体部33と、各段部17の内壁面沿い且つそれらの端面側に位置する端部34とからなる凹形導体32が得られた。
Next, as shown in FIG. 9C, the same conductive paste as described above is provided along each inner wall surface of the pair of left and right recesses 18 and the inner wall surface behind the pair of recesses 18 in the through hole h6. Was covered while sucking. Next, as shown in the figure, 2 g of the green sheet in which a pair of unfired concave conductors 32 having a main conductor portion 33 and an end portion 34 were formed line-symmetrically was co-fired together with the concave conductor 32 and the like. Further, the ceramic layer 2c obtained by the firing was separated into pieces by dicing or the like along the planned cutting surface cf.
As a result, as shown in FIG. 9A, a concave groove 31 having a pair of stepped portions (wide portions) 17 on the side surface 5 of the substrate main body 2a (2b) and along the inner wall surface of the concave groove 31. A concave conductor 32 including the formed main conductor portion 33 and end portions 34 located along the inner wall surface of each step portion 17 and on the end face side thereof was obtained.

図10(A)は、前記凹形導体32の応用形態であり、且つ本発明による異なる形態の凹形導体35とその付近を示す前記同様の部分平面図である。
図10(A)に示すように、前記と同じ矩形状部と、基板本体2a(2b)の側面5との間に、左右一対の凸部12と、平面視が長方形状である左右一対の細溝(幅広部)36とを有する凹溝31が位置している。また、上記凹形導体35は、各細溝36よりも奥側の内壁面(矩形状部の内壁面)と、各細溝36の内壁面(少なくとも奥側の内壁面)および底面とに沿った主導体部33と、各凸部12の内壁面を兼ねる各細溝36における前記側面5側の内壁面の先端面側に位置する端部37とから構成されている。
上記一対の凸部12と一対の細溝36とを有する凹溝31、および凹形導体33を得る方法(本発明による配線基板の製造方法)を以下に説明する。
10(B)に示すように、前記グリーンシート2gにおける切断予定面cfを挟んで、上下一対の前記凹溝31の矩形状部と、上下および左右一対(合計4つ)の細溝36と、切断予定面cfに跨った左右一対の前記凸片16とを備えた貫通孔h7を、前記と同様な打ち抜き加工により形成した。
FIG. 10 (A) the modified embodiment der concave conductor 32 is, which is the same partial plan view showing a different embodiment concave conductors 35 and near the according and invention.
As shown in FIG. 10A, between the same rectangular portion as described above and the side surface 5 of the substrate main body 2a (2b), a pair of left and right convex portions 12 and a pair of left and right rectangular portions in a plan view are rectangular. A concave groove 31 having a narrow groove (wide portion) 36 is located. Further, the concave conductor 35 is along the inner wall surface (inner wall surface of the rectangular portion) on the back side of each fine groove 36, the inner wall surface (at least the inner wall surface on the back side) and the bottom surface of each fine groove 36. It is composed of a main conductor portion 33 and an end portion 37 located on the tip end surface side of the inner wall surface on the side surface 5 side of each narrow groove 36 that also serves as the inner wall surface of each convex portion 12.
A method for obtaining the concave groove 31 having the pair of convex portions 12 and the pair of fine grooves 36 and the concave conductor 33 (method for manufacturing a wiring board according to the present invention) will be described below.
As shown in FIG. 10B, the rectangular portion of the pair of upper and lower concave grooves 31 and the pair of upper and lower and left and right fine grooves 36 (four in total) are sandwiched between the planned cutting surface cf of the green sheet 2g. A through hole h7 having a pair of left and right convex pieces 16 straddling the planned cutting surface cf was formed by the same punching process as described above.

次に、図10(C)に示すように、上下および左右一対の細溝36の各内壁面と貫通孔h7における該一対の細溝36よりも奥側の内壁面とに沿って、前記と同じ導電性ペーストを吸引しつつ被覆した。次いで、図示のように、主導体部33と端部37とを含む未焼成の凹形導体35が線対称に一対形成された前記グリーンシート2gを、前記凹形導体35などと共に同時焼成した。更に、前記焼成によって得られた前記セラミック層2cを、前記切断予定面cfに沿って、ダイシング加工などにより個片化した。
その結果、図10(A)に示すように、基板本体2a(2b)の側面5に、一対の凸部12および一対の細溝(幅広部)36を有する凹溝31と、各細溝36の底面を含む全内壁面と、該凹溝31における各細溝36よりも奥側の内壁面とに沿って形成され、主導体部33および端部37からなる凹形導体35が得られた。
Next, as shown in FIG. 10C, along the inner wall surfaces of the pair of vertical and left and right fine grooves 36 and the inner wall surface of the through hole h7 behind the pair of fine grooves 36, as described above. The same conductive paste was sucked and coated. Next, as shown in the figure, 2 g of the green sheet in which a pair of unfired concave conductors 35 including the main conductor portion 33 and the end portion 37 were formed line-symmetrically was simultaneously fired together with the concave conductor 35 and the like. Further, the ceramic layer 2c obtained by the firing was separated into pieces by dicing or the like along the planned cutting surface cf.
As a result, as shown in FIG. 10A, a concave groove 31 having a pair of convex portions 12 and a pair of fine grooves (wide portions) 36 on the side surface 5 of the substrate main body 2a (2b), and each fine groove 36. A concave conductor 35 formed along the entire inner wall surface including the bottom surface of the concave groove 31 and the inner wall surface on the inner wall surface on the back side of each narrow groove 36 in the concave groove 31 and composed of a main conductor portion 33 and an end portion 37 was obtained. ..

図11(A)は、前記とは別個の参考形態の凹形導体38の付近を示す前記同様の部分平面図である。
図11(A)に示すように、平面視で前記同様の半円形状部を有る凹溝28は、基板本体2a(2b)の側面5と、上記半円形状部との間に、前記と同じ左右一対の段部(幅広部)17を有している。そのため、上記凹形導体38は、上記凹溝28における一対の段部17よりも奥側の内壁面(半円形状部の内壁面)に沿った主導体部39と、各段部17の内壁面に沿い且つその端面側に達する端部34とから構成されている。
上記一対の段部(幅広部)17を有する凹溝28、および凹形導体38を得る方法(本発明による配線基板の製造方法)を以下に説明する。
11(B)に示すように、前記グリーンシート2gにおける切断予定面cfに跨って、左右一対の凹み18を備えた貫通孔h8を、前記と同様の打ち抜き加工により形成した。
FIG. 11A is a similar partial plan view showing the vicinity of the concave conductor 38 in a reference form different from the above.
As shown in FIG. 11 (A), the groove 28 you have the the same semicircular section in plan view, the side surface 5 of the substrate main body 2a (2b), between the semicircular portion, It has the same pair of left and right stepped portions (wide portions) 17 as described above. Therefore, the concave conductor 38 includes the main conductor portion 39 along the inner wall surface (inner wall surface of the semicircular portion) on the back side of the pair of step portions 17 in the concave groove 28, and the inside of each step portion 17. It is composed of an end portion 34 along the wall surface and reaching the end face side thereof.
A method for obtaining the concave groove 28 having the pair of stepped portions (wide portions) 17 and the concave conductor 38 (method for manufacturing a wiring board according to the present invention) will be described below.
As shown in FIG. 11B, a through hole h8 having a pair of left and right recesses 18 was formed by the same punching process as described above, straddling the planned cutting surface cf of the green sheet 2g.

次に、図11(C)に示すように、左右一対の凹み18の各内壁面と貫通孔h8における該一対の凹み18よりも奥側の内壁面と沿って、前記と同じ導電性ペーストを吸引しつつ被覆した。次いで、図示のように、主導体部39と端部34とを含む未焼成の凹形導体38が線対称に形成された前記グリーンシート2gを、前記凹形導体38などと共に同時焼成した。更に、前記焼成によって得られた前記セラミック層2cを、前記切断予定面cfに沿って、ダイシング加工などにより個片化した。
その結果、図11(A)に示すように、基板本体2a(2b)の側面5に、一対の段部(幅広部)17を有する凹溝28と、各段部17の底面(奥側の内壁面)と、該凹溝28における各段部17よりも奥側の内壁面とに沿って形成され、主導体部39および端部34からなる凹形導体38が得られた。
Next, as shown in FIG. 11 (C), along the inner wall surface of the inner side than the pair of indentations 18 at each inner wall surfaces of the pair of left and right dents 18 and through holes h8, same conductive paste as the Was covered while sucking. Next, as shown in the figure, 2 g of the green sheet in which the unfired concave conductor 38 including the main conductor portion 39 and the end portion 34 was formed line-symmetrically was co-fired together with the concave conductor 38 and the like. Further, the ceramic layer 2c obtained by the firing was separated into pieces by dicing or the like along the planned cutting surface cf.
As a result, as shown in FIG. 11A, a concave groove 28 having a pair of step portions (wide portions) 17 on the side surface 5 of the substrate main body 2a (2b) and a bottom surface (back side) of each step portion 17 An inner wall surface) and an inner wall surface on the inner wall surface on the back side of each step portion 17 in the concave groove 28 were formed, and a concave conductor 38 composed of a main conductor portion 39 and an end portion 34 was obtained.

以上のような基板本体2a,2bの側面5に開口する凹溝11,19,23,28,31の内壁面などに沿って形成された凹形導体13,13a,20,24,30,32,35,38を備えた配線基板1a,1bによれば、前記効果(1)〜(3)を確実に奏することができる。
に、前記側面5から離間して、一対の凸部12および一対の段部(幅広部)36を併有する前記凹形導体35を備えた配線基板1a,1bによれば、前記効果(1)〜()を一層確実に奏することができる。
Concave conductors 13, 13a, 20, 24, 30, 32 formed along the inner wall surfaces of the concave grooves 11, 19, 23, 28, 31 opened on the side surfaces 5 of the substrate main bodies 2a and 2b as described above. According to the wiring boards 1a and 1b provided with, 35 and 38, the above-mentioned effects (1) to (3) can be surely achieved.
In particular, the spaced apart from the side surface 5, the wiring substrate 1a having a concave conductor 35 having both a pair of protrusions 12 and a pair of step portions (wide portion) 36, according to 1b, the effect (1 ) ~ ( 4 ) can be played more reliably.

本発明は、以上において説明した各形態に限定されるものではない。
例えば、前記基板本体を構成する絶縁材は、ガラス−セラミックなどの低温焼成セラミック、あるいはエポキシ系などの樹脂であっても良い。これらの場合、前記凹形導体13などの導体には、主にCuまたはAgが用いられる。
また、前記凹溝は、平面視で長軸が前記基板本体2a,2bの側面5と平行な楕円形状、あるいは長円形状を呈する形態としても良い。
更に、前記凹溝19,23,28,31も、前記基板本体2a,2bの裏面4側を前記裏面部4aによって塞がれた形態としても良い。
また、前記幅広部を形成する一対の細溝は、平面視でそれぞれ底面側が狭くなるV字形状あるいはU字形状を呈する形態としても良い。
更に、前記凹溝11〜31および凹形導体12〜38は、前記基板本体2a,2bにおいて隣接する一対の側面5同士間のコーナー部に沿って形成した形態としても良い。
加えて、前記凹溝11〜31および凹形導体12〜38は、単一の前記基板本体2a,2bごとに併設して形成しても良い。
The present invention is not limited to each of the forms described above.
For example, an insulating material constituting the substrate main body, glass - may be a low-temperature co-fired ceramic or a resin such as an epoxy, such as ceramics. In these cases, Cu or Ag is mainly used for the conductor such as the concave conductor 13.
Further, the concave groove may have an elliptical shape or an oval shape whose long axis is parallel to the side surface 5 of the substrate main body 2a and 2b in a plan view.
Further, the recessed grooves 19, 23, 28, 31 may also have a form in which the back surface 4 side of the substrate main body 2a, 2b is closed by the back surface portion 4a.
Further, the pair of narrow grooves forming the wide portion may have a V-shape or a U-shape in which the bottom surface side thereof is narrowed in a plan view.
Further, the concave grooves 11 to 31 and the concave conductors 12 to 38 may be formed along a corner portion between a pair of adjacent side surfaces 5 in the substrate main body 2a and 2b.
In addition, the concave grooves 11 to 31 and the concave conductors 12 to 38 may be formed side by side for each of the single substrate main bodies 2a and 2b.

本発明によれば、絶縁材(セラミック)からなる基板本体の側面における厚み方向に沿って形成した凹形導体の腐やバリによる不具合を防ぎ、且つ該凹形導体の接続端子としての接合面積を十分に確保できる配線基板を確実に提供できる。 According to the present invention prevents problems due to corrosion or burrs concave conductors formed along the thickness direction of the side surface of the substrate body made of an insulating material (ceramic), and the bonding area of the connection terminals of the concave-shaped conductor It is possible to reliably provide a wiring board that can sufficiently secure the above.

1a,1b……………………………………配線基板
2a,2b……………………………………基板本体
2g……………………………………………グリーンシート(シート素材)
3………………………………………………表面
4………………………………………………裏面
5………………………………………………側面
11,19,23,28,31…………………凹溝
12,22,26……………………………凸部
13,13a,20,24,30,32,38…凹形導体
14,21,25,29,33,39……主導体部
15,34,27……………………………端部
17……………………………………………段部(幅広部)
36……………………………………………細溝(幅広部)

1a, 1b …………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………
2g ……………………………………………… Green sheet (sheet material)
3 ……………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………… ……………………… Side 11,19,23,28,31 …………………… Concave groove 12,22,26 ……………………………… Convex part 13,13a, 20,24,30,32,38… Concave conductor 14,21,25,29,33,39 …… Main conductor part 15,34,27 ……………………………… End 17 …… …………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………
36 ………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………………

Claims (3)

絶縁材からなり、対向する表面および裏面と、かかる表面と裏面との周辺に位置する側面とを有する基板本体と、該基板本体の前記側面に開口し、且つ上記表面から裏面へ向かう厚み方向に沿った凹溝と、少なくとも該凹溝の内壁面に沿って形成された凹形導体と、を備えた配線基板であって、
上記凹溝の内壁面は、平面視において、上記基板本体の側面に沿って対向する一対の凸部あるいは幅広部を有し、かかる一対の凸部あるいは幅広部は、平面視において上記基板本体の側面における上記凹溝の開口部から離間していると共に、
上記凹形導体は、上記凹溝における上記一対の凸部あるいは幅広部よりも平面視で奥側の内壁面と、上記一対の凸部あるいは幅広部における少なくとも奥側の内壁面とに連続して形成されている、
ことを特徴とする配線基板。
A substrate body made of an insulating material and having facing front and back surfaces and side surfaces located around the front surface and the back surface, and an opening in the side surface of the substrate body in the thickness direction from the front surface to the back surface. A wiring board provided with a concave groove along the groove and at least a concave conductor formed along the inner wall surface of the concave groove.
The inner wall surface of the concave groove has a pair of convex portions or wide portions facing each other along the side surface of the substrate main body in a plan view, and the pair of convex portions or wide portions are the convex portions or wide portions of the substrate main body in a plan view. Being separated from the opening of the concave groove on the side surface
The concave conductor is continuous with the inner wall surface on the back side of the pair of convex portions or wide portions in the concave groove in a plan view and at least the inner wall surface on the back side in the pair of convex portions or wide portions. Is formed,
A wiring board characterized by that.
前記凹溝は、平面視で矩形状、多角形状、半円形状、または円弧形状の何れかと、対向する前記一対の凸部あるいは幅広部とを組合せた形状であり、且つ該凹溝の内壁面に沿って前記凹形導体の主導体部が形成されていると共に、対向する前記一対の凸部あるいは幅広部の内壁面は、前記基板本体の側面と平行状の面または平面視で先細の三角形状を形成する傾斜面であり、上記一対の凸部あるいは幅広部の内壁面に沿って前記凹形導体の端部が形成されている、
ことを特徴とする請求項1に記載の配線基板。
The concave groove has a shape obtained by combining any of a rectangular shape, a polygonal shape, a semicircular shape, or an arc shape in a plan view with the pair of convex portions or wide portions facing each other, and the inner wall surface of the concave groove. The main conductor portion of the concave conductor is formed along the above, and the inner wall surface of the pair of convex portions or wide portions facing each other is a surface parallel to the side surface of the substrate main body or a triangular shape tapered in a plan view. It is an inclined surface that forms a shape, and an end portion of the concave conductor is formed along the inner wall surface of the pair of convex portions or wide portions.
The wiring board according to claim 1.
絶縁材からなり、対向する表面および裏面と、かかる表面と裏面との周辺に位置する側面とを有する基板本体と、該基板本体の前記側面に開口し、且つ上記表面から裏面へ向かう厚み方向に沿った凹溝と、少なくとも該凹溝の内壁面に沿って形成された凹形導体と、を備えた配線基板の製造方法であって、A substrate body made of an insulating material and having facing front and back surfaces and side surfaces located around the front surface and the back surface, and an opening in the side surface of the substrate body in the thickness direction from the front surface to the back surface. A method for manufacturing a wiring board including a concave groove along the groove and at least a concave conductor formed along the inner wall surface of the concave groove.
絶縁材からなる多数個取り用のシート素材を、該シート素材に予め設定された切断予定面を跨ぐ一対の凸片、あるいは、該切断予定面を挟む二対の凸片と、該対の凸片ごとの奥側に線対称に位置する一対の凹溝と、を有する貫通孔を打ち抜く工程と、A sheet material for taking a large number of pieces made of an insulating material is composed of a pair of convex pieces straddling a planned cutting surface set in advance for the sheet material, or a pair of convex pieces sandwiching the planned cutting surface and a pair of convex pieces. A process of punching a through hole having a pair of concave grooves located line-symmetrically on the back side of each piece, and
上記対の凸片における少なくとも奥側の内壁面と、上記貫通孔における前記対の凸片よりも奥側の内壁面とに沿って、導電性ペーストを被覆する工程と、A step of coating the conductive paste along at least the inner wall surface on the back side of the pair of convex pieces and the inner wall surface on the back side of the pair of convex pieces in the through hole.
上記貫通孔および導電性ペーストが形成された上記シート素材を、上記切断予定面に沿って個片化する工程と、を含む、The sheet material in which the through hole and the conductive paste are formed is individually separated along the planned cutting surface.
ことを特徴とする配線基板の製造方法。A method for manufacturing a wiring board, which is characterized in that.
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