JP6821218B2 - ボンディング装置 - Google Patents
ボンディング装置 Download PDFInfo
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- JP6821218B2 JP6821218B2 JP2019549944A JP2019549944A JP6821218B2 JP 6821218 B2 JP6821218 B2 JP 6821218B2 JP 2019549944 A JP2019549944 A JP 2019549944A JP 2019549944 A JP2019549944 A JP 2019549944A JP 6821218 B2 JP6821218 B2 JP 6821218B2
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- 239000004065 semiconductor Substances 0.000 claims description 51
- 238000005259 measurement Methods 0.000 claims description 28
- 238000003384 imaging method Methods 0.000 claims description 16
- 238000002788 crimping Methods 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 5
- 238000001514 detection method Methods 0.000 description 11
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- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
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- B23K20/02—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a press ; Diffusion bonding
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- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
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- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
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- H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Wire Bonding (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Die Bonding (AREA)
Description
Claims (9)
- 撮像装置により撮像された画像を用いて、半導体チップの実装処理と前記実装処理以外の付帯処理とを実行するボンディング装置であって、
前記撮像装置の光学系に設けられた絞り切替機構であり、少なくとも、第1の絞りと、絞り穴径が前記第1の絞りより大きい第2の絞りとに切り換え可能である絞り切替機構と、
前記絞り切替機構を制御して前記第1の絞りと前記第2の絞りとのいずれかに切り換える制御部と、を備え、
前記制御部は、
前記第1の絞りに切り替えて撮像された画像を用いて前記実装処理を実行し、前記第2の絞りに切り替えて撮像された画像を用いて前記付帯処理を実行する、
ことを特徴とするボンディング装置。 - 請求項1に記載のボンディング装置において、
前記制御部は、
前記絞り切換機構を前記第1の絞りに切り換えて前記実装処理を実行する場合には、絞りを切り換えた後に焦点距離の調整を行わず、
前記絞り切換機構を前記第2の絞りに切り換えて前記付帯処理を実行する場合には、絞りを切り換えた後に焦点距離の調整を行う、
ことを特徴とするボンディング装置。 - 請求項1または2に記載のボンディング装置において、
前記付帯処理は、前記実装処理前の調整処理である、
ことを特徴とするボンディング装置。 - 請求項1または2に記載のボンディング装置において、
前記付帯処理は、前記実装処理後の測定処理である、
ことを特徴とするボンディング装置。 - 請求項1または2に記載のボンディング装置において、
前記実装処理は、ワイヤボンディングである、
ことを特徴とするボンディング装置。 - 請求項1または2に記載のボンディング装置において、
前記実装処理は、ダイボンディングである、
ことを特徴とするボンディング装置。 - 請求項1に記載のボンディング装置において、
前記付帯処理は、前記実装処理後の前記半導体チップのパッドに接続されたワイヤの高さの計測処理であり、
前記制御部は、
前記計測処理において、前記撮像装置の焦点距離を一定にし、前記撮像装置の光学的位置を変化させて前記ワイヤにピントが合う位置を探索し、ピントが合った位置における前記撮像装置の光学的位置に基づいて前記ワイヤの高さを取得する、
ことを特徴とするボンディング装置。 - 請求項1に記載のボンディング装置において、
前記付帯処理は、基板からの前記半導体チップの高さを計測する計測処理であり、
前記制御部は、
前記計測処理において、前記撮像装置の焦点距離を一定にし、前記撮像装置の光学的位置を変化させて前記半導体チップにピントが合う位置を探索し、ピントが合った位置における前記撮像装置の前記光学的位置に基づいて前記基板からの前記半導体チップの高さを取得する、
ことを特徴とするボンディング装置。 - 請求項1に記載のボンディング装置において、
前記付帯処理は、前記半導体チップのパッドに圧着されたワイヤにより形成された圧着ボールの高さを計測する計測処理であり、
前記制御部は、
前記計測処理において、前記撮像装置の焦点距離を一定にし、前記撮像装置の光学的位置を変化させて前記圧着ボールにピントが合う位置を探索し、ピントが合った位置における前記撮像装置の前記光学的位置に基づいて前記圧着ボールの高さを取得する、
ことを特徴とするボンディング装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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JP2017207162 | 2017-10-26 | ||
JP2017207162 | 2017-10-26 | ||
PCT/JP2018/034576 WO2019082558A1 (ja) | 2017-10-26 | 2018-09-19 | ボンディング装置 |
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JPWO2019082558A1 JPWO2019082558A1 (ja) | 2020-06-18 |
JP6821218B2 true JP6821218B2 (ja) | 2021-01-27 |
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US (1) | US11367703B2 (ja) |
JP (1) | JP6821218B2 (ja) |
KR (1) | KR102327786B1 (ja) |
CN (1) | CN111279462B (ja) |
SG (1) | SG11202003745TA (ja) |
TW (1) | TWI674473B (ja) |
WO (1) | WO2019082558A1 (ja) |
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Publication number | Priority date | Publication date | Assignee | Title |
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US20220379410A1 (en) * | 2019-11-05 | 2022-12-01 | Schunk Sonosystems Gmbh | Ultrasonic welding device with integrated camera assembly |
JP7373436B2 (ja) * | 2020-03-09 | 2023-11-02 | ファスフォードテクノロジ株式会社 | ダイボンディング装置および半導体装置の製造方法 |
US11540399B1 (en) * | 2020-04-09 | 2022-12-27 | Hrl Laboratories, Llc | System and method for bonding a cable to a substrate using a die bonder |
DE102021211601A1 (de) * | 2020-10-14 | 2022-04-14 | Emage Equipment PTE, Ltd. | Messung der loop-höhe überlappender bonddrähte |
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JP2969403B2 (ja) * | 1991-12-02 | 1999-11-02 | 株式会社新川 | ボンデイングワイヤ検査装置 |
JP2981942B2 (ja) * | 1991-12-02 | 1999-11-22 | 株式会社新川 | ボンデイングワイヤ検査方法 |
JP2969402B2 (ja) * | 1991-12-02 | 1999-11-02 | 株式会社新川 | ボンデイングワイヤ検査装置 |
JP2981941B2 (ja) | 1991-12-02 | 1999-11-22 | 株式会社新川 | ボンデイングワイヤ検査装置 |
JP2990550B2 (ja) * | 1991-12-10 | 1999-12-13 | 株式会社新川 | ボンデイングワイヤ検査装置 |
JPH05347326A (ja) * | 1992-06-15 | 1993-12-27 | Sony Corp | ワイヤボンディング装置におけるキャピラリのセッティング方法 |
JP2579869B2 (ja) * | 1992-07-16 | 1997-02-12 | キヤノン株式会社 | 光学検査装置 |
JP3120200B2 (ja) * | 1992-10-12 | 2000-12-25 | セイコーインスツルメンツ株式会社 | 光弁装置、立体画像表示装置および画像プロジェクタ |
JPH06174437A (ja) * | 1992-12-01 | 1994-06-24 | Canon Inc | ボンディングワイヤ検査装置 |
JPH06320294A (ja) * | 1993-05-14 | 1994-11-22 | Nippei Toyama Corp | 接合線検出装置 |
US5854745A (en) * | 1994-03-30 | 1998-12-29 | Matsushita Electric Industrial Co., Ltd. | Method and apparatus for mounting electronic component |
JP3329623B2 (ja) * | 1995-06-27 | 2002-09-30 | 株式会社東芝 | ワイヤボンディング装置およびワイヤボンディング方法 |
US6317513B2 (en) * | 1996-12-19 | 2001-11-13 | Cognex Corporation | Method and apparatus for inspecting solder paste using geometric constraints |
US5796486A (en) * | 1997-03-31 | 1998-08-18 | Lam Research Corporation | Apparatus method for determining the presence or absence of a wafer on a wafer holder |
US6608320B1 (en) * | 1998-11-05 | 2003-08-19 | Cyberoptics Corporation | Electronics assembly apparatus with height sensing sensor |
JP4635354B2 (ja) * | 2001-03-07 | 2011-02-23 | 株式会社ニコン | 露光方法及び継ぎ誤差計測方法並びにデバイス製造方法 |
US7523848B2 (en) * | 2001-07-24 | 2009-04-28 | Kulicke And Soffa Industries, Inc. | Method and apparatus for measuring the size of free air balls on a wire bonder |
US7419085B2 (en) * | 2003-05-13 | 2008-09-02 | Matsushita Electric Industrial Co., Ltd. | Optical processing apparatus |
EP1670043B1 (en) * | 2003-09-29 | 2013-02-27 | Nikon Corporation | Exposure apparatus, exposure method, and device manufacturing method |
JP2006310364A (ja) * | 2005-04-26 | 2006-11-09 | Nidec Copal Electronics Corp | ボンディングワイヤー検査方法 |
JP2008060366A (ja) * | 2006-08-31 | 2008-03-13 | Fujifilm Corp | ボンディング装置及びボンディング方法 |
JP2008091397A (ja) * | 2006-09-29 | 2008-04-17 | Denso Corp | 光学素子のパッケージ構造、パッケージ製造装置およびパッケージ製造方法 |
JP4825171B2 (ja) * | 2007-06-08 | 2011-11-30 | 株式会社新川 | ボンディング装置用撮像装置及び撮像方法 |
JP4825172B2 (ja) * | 2007-06-08 | 2011-11-30 | 株式会社新川 | ボンディング装置用撮像装置及び撮像方法 |
US8474721B2 (en) * | 2007-06-11 | 2013-07-02 | Drs Rsta, Inc. | Variable aperture and actuator assemblies for an imaging system |
JP5096940B2 (ja) * | 2008-01-22 | 2012-12-12 | 株式会社フジクラ | プリント配線板の検査方法及びその装置 |
US7791015B2 (en) * | 2008-05-08 | 2010-09-07 | Lite-On Semiconductor Corp. | Motion-detecting module for combining a light-emitting function and a light-sensing function together |
JP5243284B2 (ja) * | 2009-01-30 | 2013-07-24 | 株式会社新川 | 補正位置検出装置、補正位置検出方法及びボンディング装置 |
US9140978B2 (en) * | 2010-10-12 | 2015-09-22 | Weng-Dah Ken | Semiconductor multi-project or multi-product wafer process |
TWI580511B (zh) * | 2014-06-10 | 2017-05-01 | Shinkawa Kk | A bonding device, and a method of estimating the placement position of the engagement tool |
JP2016070795A (ja) * | 2014-09-30 | 2016-05-09 | キヤノンマシナリー株式会社 | 計測方法および計測装置 |
JP6422819B2 (ja) * | 2015-05-15 | 2018-11-14 | キヤノンマシナリー株式会社 | 画像認識装置および画像認識方法 |
JP2020123697A (ja) * | 2019-01-31 | 2020-08-13 | キヤノン株式会社 | 半導体装置、半導体ウエハ、機器、製造方法 |
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US11367703B2 (en) | 2022-06-21 |
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CN111279462A (zh) | 2020-06-12 |
KR102327786B1 (ko) | 2021-11-17 |
US20210202432A1 (en) | 2021-07-01 |
CN111279462B (zh) | 2023-07-14 |
TW201923438A (zh) | 2019-06-16 |
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