JP6791912B2 - Torque detector and magnetic sensor module - Google Patents

Torque detector and magnetic sensor module Download PDF

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JP6791912B2
JP6791912B2 JP2018136685A JP2018136685A JP6791912B2 JP 6791912 B2 JP6791912 B2 JP 6791912B2 JP 2018136685 A JP2018136685 A JP 2018136685A JP 2018136685 A JP2018136685 A JP 2018136685A JP 6791912 B2 JP6791912 B2 JP 6791912B2
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magnetic
magnetic flux
yoke
flux guiding
main body
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JP2019045477A (en
JP2019045477A5 (en
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田中　健
健 田中
深谷　繁利
深谷　　繁利
俊朗 鈴木
俊朗 鈴木
智 神野
智 神野
研介 小林
研介 小林
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Denso Corp
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Denso Corp
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Priority to CN201880055725.7A priority Critical patent/CN111051836B/en
Priority to PCT/JP2018/030667 priority patent/WO2019044562A1/en
Priority to DE112018004892.6T priority patent/DE112018004892T5/en
Publication of JP2019045477A publication Critical patent/JP2019045477A/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/0011—Arrangements or instruments for measuring magnetic variables comprising means, e.g. flux concentrators, flux guides, for guiding or concentrating the magnetic flux, e.g. to the magnetic sensor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/091—Constructional adaptation of the sensor to specific applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L3/00—Measuring torque, work, mechanical power, or mechanical efficiency, in general
    • G01L3/02—Rotary-transmission dynamometers
    • G01L3/04—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft
    • G01L3/10—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/0009—Force sensors associated with a bearing
    • G01L5/0023—Force sensors associated with a bearing by using magnetic sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K1/00—Details of the magnetic circuit
    • H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
    • H02K1/12—Stationary parts of the magnetic circuit
    • H02K1/14—Stator cores with salient poles
    • H02K1/146—Stator cores with salient poles consisting of a generally annular yoke with salient poles
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K1/00—Details of the magnetic circuit
    • H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
    • H02K1/22—Rotating parts of the magnetic circuit
    • H02K1/27—Rotor cores with permanent magnets
    • H02K1/2706—Inner rotors
    • H02K1/272—Inner rotors the magnetisation axis of the magnets being perpendicular to the rotor axis
    • H02K1/274—Inner rotors the magnetisation axis of the magnets being perpendicular to the rotor axis the rotor consisting of two or more circumferentially positioned magnets
    • H02K1/2753—Inner rotors the magnetisation axis of the magnets being perpendicular to the rotor axis the rotor consisting of two or more circumferentially positioned magnets the rotor consisting of magnets or groups of magnets arranged with alternating polarity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/07—Hall effect devices

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Power Steering Mechanism (AREA)

Description

本発明は、トルク検出装置、及び、トルク検出装置に用いられる磁気センサモジュールに関する。 The present invention relates to a torque detection device and a magnetic sensor module used in the torque detection device.

従来、多極磁石とヨークとの相対的回転によって生ずる磁束の変化を磁気センサで検出し、磁気センサの出力信号に基づいて、トーションバーに加わるトルクを検出するトルク検出装置が知られている。また、この種のトルク検出装置において、ヨークの磁束を集めて磁気センサに誘導する磁束誘導部材を用いた構成が知られている。 Conventionally, there is known a torque detection device that detects a change in magnetic flux caused by the relative rotation of a multi-pole magnet and a yoke with a magnetic sensor and detects torque applied to a torsion bar based on an output signal of the magnetic sensor. Further, in this type of torque detecting device, a configuration using a magnetic flux guiding member that collects the magnetic flux of the yoke and guides it to the magnetic sensor is known.

例えば特許文献１に開示された構成では、磁束誘導部材に相当する集磁リングは、多極磁石（またはヨーク）の中心軸から集磁リングの内縁部までの距離が、多極磁石（またはヨーク）の中心軸と磁気センサとを結ぶ方向において最大となるように形成されている。これにより、トルクが一定の状態で、多極磁石とヨークとが同期して回転する時に磁気回路に生ずる磁束の周期的変動が抑制される。以下、本明細書では、この磁束の周期的変動によるノイズを「振れ回りノイズ」という。 For example, in the configuration disclosed in Patent Document 1, in the magnetic collecting ring corresponding to the magnetic flux induction member, the distance from the central axis of the multipolar magnet (or yoke) to the inner edge of the magnetic collecting ring is the multipolar magnet (or yoke). ) Is formed so as to be maximum in the direction connecting the central axis and the magnetic sensor. As a result, the periodic fluctuation of the magnetic flux generated in the magnetic circuit when the multi-pole magnet and the yoke rotate in synchronization with the torque being constant is suppressed. Hereinafter, in the present specification, the noise due to the periodic fluctuation of the magnetic flux is referred to as "swing noise".

特開２０１２−２３７７２７号公報Japanese Unexamined Patent Publication No. 2012-237727

この種のトルク検出装置では、磁気センサの出力電圧がアンプで増幅されて制御装置に伝送されるため、信号を大きく、且つノイズを小さくすることによりＳＮ比を向上させることが重要である。しかし、特許文献１の構成では、磁気センサの近くの部位において磁束誘導部材とヨークとの軸方向の対向面積が相対的に小さくなり、実施形態によっては、磁束誘導部材とヨークとの対向面積が０となっている。そのため、磁気センサから離れた部分で磁束誘導部材とヨークとを対向させ磁束を集める場合、磁気センサ近傍で集める場合よりも磁気抵抗が高くなるため、センサに集められる磁束量が減少する。したがって、振れ回りノイズが小さくなるとともに信号も小さくなることから、ＳＮ比の向上が見込めないという問題がある。 In this type of torque detection device, since the output voltage of the magnetic sensor is amplified by the amplifier and transmitted to the control device, it is important to improve the SN ratio by increasing the signal and reducing the noise. However, in the configuration of Patent Document 1, the area where the magnetic flux guiding member and the yoke face each other in the axial direction becomes relatively small in a portion near the magnetic sensor, and depending on the embodiment, the facing area between the magnetic flux guiding member and the yoke becomes relatively small. It is 0. Therefore, when the magnetic flux guiding member and the yoke are opposed to each other at a portion away from the magnetic sensor to collect the magnetic flux, the magnetoresistance is higher than when the magnetic flux is collected near the magnetic sensor, so that the amount of magnetic flux collected by the sensor is reduced. Therefore, there is a problem that the SN ratio cannot be expected to be improved because the swing noise becomes smaller and the signal becomes smaller.

本発明は、上記の課題に鑑みてなされたものであり、その目的は、磁気センサが検出する磁束のＳＮ比を向上させるトルク検出装置、及び、そのトルク検出装置に用いられる磁気センサモジュールを提供することにある。 The present invention has been made in view of the above problems, and an object of the present invention is to provide a torque detection device for improving the SN ratio of magnetic flux detected by a magnetic sensor, and a magnetic sensor module used for the torque detection device. To do.

本発明のトルク検出装置は、トーションバー（１３）と、多極磁石（１４）と、一組のヨーク（３１、３２）と、一つ以上の磁束誘導部材（５１、５２）と、一つ以上の磁気センサ（７１、７２）と、を備える。トーションバーは、第１軸（１１）と第２軸（１２）とを同軸上に連結し、第１軸と第２軸との間に加わるトルクを捩じれ変位に変換する。多極磁石は、第１軸またはトーションバーの一端側に固定され、Ｎ極とＳ極とが周方向に交互に配置されている。一組のヨークは、軟磁性体で形成され、多極磁石の径外側で第２軸またはトーションバーの他端側に固定され、軸方向に互いに対向し、多極磁石の磁界内に磁気回路を形成する。 The torque detection device of the present invention includes a torsion bar (13), a multi-pole magnet (14), a set of yokes (31, 32), and one or more magnetic flux guiding members (51, 52). The above magnetic sensors (71, 72) are provided. The torsion bar coaxially connects the first axis (11) and the second axis (12), and converts the torque applied between the first axis and the second axis into a torsional displacement. The multi-pole magnet is fixed to the first axis or one end side of the torsion bar, and the north and south poles are alternately arranged in the circumferential direction. A set of yokes is made of a soft magnetic material, fixed to the second axis or the other end of the torsion bar on the outer diameter of the multipolar magnet, facing each other in the axial direction, and a magnetic circuit in the magnetic field of the multipolar magnet. To form.

磁束誘導部材は、軟磁性体で形成され、少なくとも一方のヨークと本体（６０）が対向し、磁気回路の磁束を誘導する。磁気センサは、前記磁束誘導部材の本体、又は、当該本体から分岐した延接部（６１、６２）に設置され、磁束誘導部材により誘導された磁束を検出する。ここで、ヨークの軸方向の投影において、磁気センサが一つの場合、磁気センサとヨークの中心軸とを結び、磁気センサが複数の場合、複数の磁気センサの中間位置とヨークの中心軸とを結ぶ仮想直線を基準線（Ｘ）とする。また、基準線を挟み、磁束誘導部材の本体とヨークとの対向範囲におけるヨークの周方向両端に対応する部位を磁束誘導部材の本体の周端部（６３、６４）と定義する。 The magnetic flux induction member is made of a soft magnetic material, and at least one yoke and the main body (60) face each other to induce the magnetic flux of the magnetic circuit. The magnetic sensor is installed in the main body of the magnetic flux guiding member or the extension portions (61, 62) branched from the main body, and detects the magnetic flux induced by the magnetic flux guiding member. Here, in the axial projection of the yoke, when there is one magnetic sensor, the magnetic sensor and the central axis of the yoke are connected, and when there are a plurality of magnetic sensors, the intermediate position of the plurality of magnetic sensors and the central axis of the yoke are connected. Let the connecting virtual straight line be the reference line (X). Further, the portions corresponding to both ends in the circumferential direction of the yoke in the range facing the main body of the magnetic flux guiding member and the yoke with the reference line sandwiched are defined as the peripheral ends (63, 64) of the main body of the magnetic flux guiding member.

本発明の第１の態様において、磁束誘導部材は、本体における磁気センサの設置部位又は延接部への分岐部位で、周端部に比べ、「磁束誘導部材とヨークとの間の単位面積当たりの磁気パーミアンス」が大きくなるように構成されている。磁束誘導部材の本体は、長手方向の辺が基準線に直交する長方形帯状である。なお、第１の態様の磁束誘導部材に対応する参照符号は、総括符号である「５１、５２」から第２の態様の「５６０、５７０」を除外したものに相当する。これにより、磁気センサが検出する信号が大きくなるため、ＳＮ比を向上させることができる。 In the first aspect of the present invention, the magnetic flux guiding member is a portion of the main body where the magnetic sensor is installed or branched to the extending portion, and is "per unit area between the magnetic flux guiding member and the yoke" as compared with the peripheral end portion. It is configured to increase the "magnetic permeance". The main body of the magnetic flux induction member has a rectangular band shape whose sides in the longitudinal direction are orthogonal to the reference line. The reference code corresponding to the magnetic flux induction member of the first aspect corresponds to the general code "51, 52" excluding "560, 570" of the second aspect. As a result, the signal detected by the magnetic sensor becomes large, so that the SN ratio can be improved.

好ましくは、磁束誘導部材の本体における磁気センサの設置部位又は延接部への分岐部位からヨークの中心軸までの距離は、周端部からヨークの中心軸までの距離よりも短い。例えば磁束誘導部材は、ヨークの中心軸側の辺が基準線に直交する直線であることが好ましい。特に磁束誘導部材の本体が長方形帯状に形成されることで、磁束誘導部材を小型にすることができる。また、例えば板金材料をプレスで打ち抜いて磁束誘導部材を製造する場合には、磁束誘導部材の形状設計により歩留まりを向上させることができる。 Preferably, the distance from the installation portion of the magnetic sensor or the branch portion to the extension portion in the main body of the magnetic flux induction member to the central axis of the yoke is shorter than the distance from the peripheral end portion to the central axis of the yoke. For example, the magnetic flux guiding member preferably has a straight line whose side on the central axis side of the yoke is orthogonal to the reference line. In particular, since the main body of the magnetic flux guiding member is formed in a rectangular band shape, the magnetic flux guiding member can be made smaller. Further, for example, when a sheet metal material is punched out with a press to manufacture a magnetic flux guiding member, the yield can be improved by designing the shape of the magnetic flux guiding member.

また、トルク検出装置が基準線に対して対称に配置される二つの磁気センサを備える構成では、磁束誘導部材の基準線側から二つの磁気センサに向かって磁束が分岐することにより、磁気センサに伝播されるノイズが低減すると考えられる。その結果、磁気センサが検出する磁束のＳＮ比をより向上させることができる。 Further, in the configuration in which the torque detection device includes two magnetic sensors arranged symmetrically with respect to the reference line, the magnetic flux branches from the reference line side of the magnetic flux induction member toward the two magnetic sensors, so that the magnetic sensor becomes a magnetic sensor. It is thought that the propagated noise is reduced. As a result, the SN ratio of the magnetic flux detected by the magnetic sensor can be further improved.

本発明は、また、上記のトルク検出装置に用いられ、磁束誘導部材及び磁気センサが、一体に構成されている磁気センサモジュールとして提供される。例えば磁気センサモジュールは、一体に樹脂モールドされることにより構成される。この磁気センサモジュールは、トルク検出装置を構成する部品として独立して製造販売されることができ、トルク検出装置に用いられたときＳＮ比を向上させる効果を奏する。 The present invention is also used in the torque detection device described above, and is provided as a magnetic sensor module in which a magnetic flux guiding member and a magnetic sensor are integrally configured. For example, the magnetic sensor module is integrally resin-molded. This magnetic sensor module can be independently manufactured and sold as a component constituting the torque detection device, and has an effect of improving the SN ratio when used in the torque detection device.

本発明の第２の態様において、トルク検出装置は、二つの磁気センサを備える。二つの磁気センサは、基準線に対して対称に配置されている。磁束誘導部材は、本体における磁気センサの設置部位又は延接部への分岐部位で、基準線上の部位に比べ、磁束誘導部材とヨークとの間の単位面積当たりの磁気パーミアンスが小さくなるように構成されている。また、磁束誘導部材（５６０、５７０）の本体は、長手方向の辺が基準線に直交する長方形帯状であり、磁束誘導部材は、ヨークの中心軸側の辺が基準線に直交する直線である。第２の態様では、磁気センサが検出する信号は第１の態様に比べ小さくなる。しかし、磁束誘導部材の基準線側から二つの磁気センサに向かって磁束が分岐することによるノイズ低減効果の方が大きい場合には、ＳＮ比の向上が図られる。特に磁束誘導部材の本体が長方形帯状に形成されることで、磁束誘導部材を小型にすることができる。
In the second aspect of the present invention, the torque detector comprises two magnetic sensors . Two magnetic sensors are arranged symmetrically with respect to the reference line. The magnetic flux guiding member is a portion of the main body where the magnetic sensor is installed or branched to the extension portion, and is configured so that the magnetic permeance per unit area between the magnetic flux guiding member and the yoke is smaller than that on the reference line. Has been done. Further, the main body of the magnetic flux guiding member (560, 570) has a rectangular band shape whose side in the longitudinal direction is orthogonal to the reference line, and the magnetic flux guiding member is a straight line whose side on the central axis side of the yoke is orthogonal to the reference line. .. In the second aspect, the signal detected by the magnetic sensor is smaller than that in the first aspect. However, when the noise reduction effect due to the branching of the magnetic flux from the reference line side of the magnetic flux guiding member toward the two magnetic sensors is greater, the SN ratio can be improved. In particular, since the main body of the magnetic flux guiding member is formed in a rectangular band shape, the magnetic flux guiding member can be made smaller.

各実施形態（磁気センサモジュールは第１実施形態）によるトルク検出装置の分解斜視図。An exploded perspective view of the torque detection device according to each embodiment (the magnetic sensor module is the first embodiment). 各実施形態のトルク検出装置が適用される電動パワーステアリング装置の概略構成図。The schematic block diagram of the electric power steering apparatus to which the torque detection apparatus of each embodiment is applied. 第１実施形態の磁気センサモジュールの（ａ）平面図、（ｂ）側面図。(A) plan view, (b) side view of the magnetic sensor module of the first embodiment. 第１実施形態の磁気センサモジュールの軸方向断面図。FIG. 3 is an axial sectional view of the magnetic sensor module of the first embodiment. （ａ）第１実施形態における基準線からの距離と磁気パーミアンスとの相関図、（ｂ）第１実施形態による振れ回り変動の低減を説明する図。(A) A correlation diagram between a distance from a reference line and a magnetic permeance in the first embodiment, and (b) a diagram for explaining reduction of swing fluctuation according to the first embodiment. 第１実施形態の磁束誘導部材による製造歩留まり向上を説明する図。The figure explaining the improvement of the manufacturing yield by the magnetic flux induction member of 1st Embodiment. 第２実施形態の磁気センサモジュールの平面図。The plan view of the magnetic sensor module of the 2nd Embodiment. 第３実施形態の磁気センサモジュールの（ａ）平面図、（ｂ）側面図。(A) plan view, (b) side view of the magnetic sensor module of the third embodiment. 第４実施形態の磁気センサモジュールの（ａ）平面図、（ｂ）側面図。(A) plan view, (b) side view of the magnetic sensor module of the fourth embodiment. 第４実施形態の磁気センサモジュールの軸方向断面図。FIG. 3 is an axial sectional view of the magnetic sensor module of the fourth embodiment. 第５実施形態の磁気センサモジュールの軸方向断面図。FIG. 5 is an axial sectional view of the magnetic sensor module of the fifth embodiment. 第６実施形態の磁気センサモジュールの軸方向断面図。FIG. 6 is an axial sectional view of the magnetic sensor module of the sixth embodiment. 第７実施形態の磁気センサモジュール及びヨークの（ａ）平面図、（ｂ）側面図。(A) plan view and (b) side view of the magnetic sensor module and yoke of the seventh embodiment. 第７実施形態の磁気センサモジュール及びヨークの軸方向断面図。FIG. 6 is an axial sectional view of the magnetic sensor module and the yoke of the seventh embodiment. 第８実施形態の磁気センサモジュールの（ａ）平面図、（ｂ）側面図。(A) plan view, (b) side view of the magnetic sensor module of the eighth embodiment. 第９実施形態の磁気センサモジュールの平面図。The plan view of the magnetic sensor module of the 9th Embodiment. 第１０実施形態の磁気センサモジュールの（ａ）平面図、（ｂ）側面図。(A) plan view, (b) side view of the magnetic sensor module of the tenth embodiment. 第１０実施形態における基準線からの距離と磁気パーミアンスとの相関図。The correlation diagram between the distance from the reference line and the magnetic permeance in the tenth embodiment. 第１１実施形態の磁気センサモジュールの平面図。The plan view of the magnetic sensor module of 11th Embodiment. 第１２実施形態の磁気センサモジュールの平面図。The plan view of the magnetic sensor module of the twelfth embodiment. 第１３実施形態の磁気センサモジュールの（ａ）平面図、（ｂ）軸方向断面図。(A) plan view and (b) axial sectional view of the magnetic sensor module of the thirteenth embodiment. 第１４実施形態の磁気センサモジュールの（ａ）平面図、（ｂ）軸方向断面図。(A) plan view and (b) axial sectional view of the magnetic sensor module of the 14th embodiment. 第１実施形態の直線状磁束誘導部材の好ましい本体の長さを示す図。The figure which shows the preferable length of the main body of the linear magnetic flux induction member of 1st Embodiment. 直線状磁束誘導部材での放射範囲磁極数と振れ回りノイズとの関係を示す図。The figure which shows the relationship between the number of radiation range magnetic poles in a linear magnetic flux induction member, and swing noise. 第３実施形態の円弧状磁束誘導部材の好ましい本体の長さを示す図。The figure which shows the preferable length of the main body of the arc-shaped magnetic flux induction member of 3rd Embodiment. 円弧状磁束誘導部材での放射範囲磁極数と振れ回りノイズとの関係を示す図。The figure which shows the relationship between the number of radiation range magnetic poles in an arcuate magnetic flux induction member, and the swinging noise. 多極磁石の磁極数が（ａ）１２極、（ｂ）２０極の場合の放射範囲磁極数と振れ回りノイズとの関係を示す図。The figure which shows the relationship between the number of magnetic poles of a radiation range and swing noise when the number of magnetic poles of a multi-pole magnet is (a) 12 poles, (b) 20 poles. その他の実施形態の磁束誘導部材の形態を示す図（１）。The figure (1) which shows the form of the magnetic flux induction member of another embodiment. その他の実施形態の磁束誘導部材の形態を示す図（２）。The figure (2) which shows the form of the magnetic flux induction member of another embodiment. その他の実施形態の磁束誘導部材の形態を示す図（３）。The figure (3) which shows the form of the magnetic flux induction member of another embodiment. その他の実施形態の磁束誘導部材の形態を示す図（４）。The figure (4) which shows the form of the magnetic flux induction member of another embodiment. その他の実施形態のヨークの（ａ）平面図、（ｂ）部分斜視図。(A) plan view and (b) partial perspective view of the yoke of other embodiments. ヨークの爪からリングへの磁束の流れを示す参考図。Reference diagram showing the flow of magnetic flux from the claws of the yoke to the ring.

以下、トルク検出装置の複数の実施形態を図面に基づいて説明する。複数の実施形態において、実質的に同一の構成には同一の符号を付して説明を省略する。
また、以下の第１〜第１４実施形態を包括して「本実施形態」という。本実施形態のトルク検出装置は、車両のステアリング操作をアシストするための電動パワーステアリング装置に適用される。 Hereinafter, a plurality of embodiments of the torque detection device will be described with reference to the drawings. In a plurality of embodiments, substantially the same configurations are designated by the same reference numerals and description thereof will be omitted.
Further, the following first to fourth embodiments are collectively referred to as "the present embodiment". The torque detection device of the present embodiment is applied to an electric power steering device for assisting the steering operation of a vehicle.

最初に図２を参照し、各実施形態のトルク検出装置が適用される電動パワーステアリング装置の概略構成について説明する。なお、図２に示す電動パワーステアリング装置９０はコラムアシスト式であるが、ラックアシスト式電動パワーステアリング装置にも同様に適用可能である。ハンドル９３に接続されたステアリングシャフト９４には操舵トルクを検出するためのトルク検出装置１０が設置されている。ステアリングシャフト９４の先端にはピニオンギア９６が設けられており、ピニオンギア９６はラック軸９７に噛み合っている。ラック軸９７の両端には、タイロッド等を介して、一対の車輪９８が回転可能に連結されている。ステアリングシャフト９４の回転運動は、ピニオンギア９６によってラック軸９７の直線運動に変換され、一対の車輪９８が操舵される。 First, with reference to FIG. 2, a schematic configuration of an electric power steering device to which the torque detection device of each embodiment is applied will be described. Although the electric power steering device 90 shown in FIG. 2 is a column assist type, it can be similarly applied to a rack assist type electric power steering device. A torque detection device 10 for detecting steering torque is installed on the steering shaft 94 connected to the steering wheel 93. A pinion gear 96 is provided at the tip of the steering shaft 94, and the pinion gear 96 meshes with the rack shaft 97. A pair of wheels 98 are rotatably connected to both ends of the rack shaft 97 via a tie rod or the like. The rotational motion of the steering shaft 94 is converted into a linear motion of the rack shaft 97 by the pinion gear 96, and the pair of wheels 98 are steered.

トルク検出装置１０は、ステアリングシャフト９４を構成する入力軸１１と出力軸１２との間に設けられ、ステアリングシャフト９４に加わる操舵トルクを検出してＥＣＵ９１に出力する。ＥＣＵ９１は、検出された操舵トルクに応じて、モータ９２の出力を制御する。モータ９２が発生した操舵アシストトルクは、減速ギア９５を介して減速され、ステアリングシャフト９４に伝達される。 The torque detection device 10 is provided between the input shaft 11 and the output shaft 12 constituting the steering shaft 94, detects the steering torque applied to the steering shaft 94, and outputs the torque to the ECU 91. The ECU 91 controls the output of the motor 92 according to the detected steering torque. The steering assist torque generated by the motor 92 is decelerated via the reduction gear 95 and transmitted to the steering shaft 94.

ここで、トルク検出装置１０が二つの磁気センサ７１、７２を備え、操舵トルクとして二つの値ｔｒｑ１、ｔｒｑ２を出力する形態は第１〜第１０実施形態等に対応する。ＥＣＵ９１の制御に用いるトルク情報を冗長出力する構成とすることで、仮に磁気センサや演算回路の故障により一方のトルク情報が使用不能となっても、ＥＣＵ９１は、他方のトルク情報を用いてモータ９２の駆動を継続することができる。そのため、このような冗長構成は、高い信頼性が要求される電動パワーステアリング装置９０において特に有効である。ただし、第１１、第１２実施形態のように、トルク検出装置１０は一つの磁気センサ７１を備える構成としてもよい。 Here, the mode in which the torque detection device 10 includes two magnetic sensors 71 and 72 and outputs two values trq1 and trq2 as steering torque corresponds to the first to tenth embodiments. By configuring the torque information used for controlling the ECU 91 to be redundantly output, even if one torque information becomes unusable due to a failure of the magnetic sensor or the arithmetic circuit, the ECU 91 uses the other torque information to make the motor 92. Can continue to drive. Therefore, such a redundant configuration is particularly effective in the electric power steering device 90, which requires high reliability. However, as in the eleventh and twelfth embodiments, the torque detection device 10 may be configured to include one magnetic sensor 71.

次に、トルク検出装置１０の全体構成について、図１、図２を参照して説明する。図２に示すように、トルク検出装置１０は、トーションバー１３、多極磁石１４、一組のヨーク３１、３２、一つ以上の磁束誘導部材５１、５２、及び、一つ以上の磁気センサ７１、７２等から構成される。また、一つ以上の磁束誘導部材５１、５２及び一つ以上の磁気センサ７１、７２を含むユニットを磁気センサモジュール５０と表す。 Next, the overall configuration of the torque detection device 10 will be described with reference to FIGS. 1 and 2. As shown in FIG. 2, the torque detection device 10 includes a torsion bar 13, a multi-pole magnet 14, a set of yokes 31, 32, one or more magnetic flux guiding members 51, 52, and one or more magnetic sensors 71. , 72 and the like. Further, a unit including one or more magnetic flux guiding members 51 and 52 and one or more magnetic sensors 71 and 72 is referred to as a magnetic sensor module 50.

ここで、構成部材の形状を模式的に示す図２では、各実施形態の磁気センサモジュールを包括する符号として「５０」を用い、各実施形態の磁束誘導部材を包括する符号として「５１、５２」を用いる。一方、第１実施形態の磁束誘導部材の形状を具体的に表した図１では、第１実施形態の磁気センサモジュールの符号「５０１」、及び、第１実施形態の磁束誘導部材の符号「５１１、５２１」を用いる。このように各実施形態は、磁束誘導部材５１、５２の具体的形状や磁気センサ７１、７２の数が異なる。ただし、この部分での説明では、図１における磁束誘導部材５１１、５２１の詳細な形状には言及せず、トルク検出装置１０の全体構成のみを参照する。 Here, in FIG. 2, which schematically shows the shapes of the constituent members, “50” is used as a code that includes the magnetic sensor module of each embodiment, and “51, 52” is used as a code that includes the magnetic flux induction member of each embodiment. Is used. On the other hand, in FIG. 1, which specifically represents the shape of the magnetic flux guiding member of the first embodiment, the reference numeral "501" of the magnetic sensor module of the first embodiment and the reference numeral "511" of the magnetic flux guiding member of the first embodiment are shown. 521 ”is used. As described above, the specific shapes of the magnetic flux guiding members 51 and 52 and the number of magnetic sensors 71 and 72 are different in each embodiment. However, in the description in this portion, the detailed shape of the magnetic flux guiding members 511 and 521 in FIG. 1 is not referred to, and only the overall configuration of the torque detecting device 10 is referred to.

図１、図２に示すように、トーションバー１３は、一端側が「第１軸」としての入力軸１１に、他端側が「第２軸」としての出力軸１２に、それぞれ固定ピン１５で固定され、入力軸１１と出力軸１２とを中心軸Ｏの同軸上に連結する。トーションバー１３は、棒状の弾性部材であり、ステアリングシャフト９４に加わる操舵トルクを捩じれ変位に変換する。多極磁石１４は、入力軸１１に固定され、Ｎ極とＳ極とが周方向に交互に配置されている。本実施形態では、Ｎ極とＳ極とが各８極、計１６極が２２．５°間隔で配置されている。 As shown in FIGS. 1 and 2, the torsion bar 13 is fixed to the input shaft 11 as the "first axis" on one end side and to the output shaft 12 as the "second axis" on the other end side by fixing pins 15. Then, the input shaft 11 and the output shaft 12 are connected on the same axis as the central shaft O. The torsion bar 13 is a rod-shaped elastic member, and converts the steering torque applied to the steering shaft 94 into a torsional displacement. The multi-pole magnet 14 is fixed to the input shaft 11, and the north and south poles are alternately arranged in the circumferential direction. In this embodiment, the north pole and the south pole are each arranged at 8 poles, and a total of 16 poles are arranged at 22.5 ° intervals.

一組のヨーク３１、３２は、軟磁性体で環状に形成され、多極磁石１４の径外側で出力軸１２に固定され、軸方向にギャップを介して互いに対向している。一組のヨーク３１、３２は、それぞれ、多極磁石１４のＮ極及びＳ極と同数の爪３３、３４が環の内縁に沿って全周に等間隔に設けられる。一方のヨーク３１の爪３３と他方のヨーク３２の爪３４とは、周方向にずれて交互に配置される。こうして、一組のヨーク３１、３２は、多極磁石１４が発生する磁界内に磁気回路を形成する。 The pair of yokes 31 and 32 are formed of a soft magnetic material in an annular shape, are fixed to the output shaft 12 on the outer diameter of the multipolar magnet 14, and face each other in the axial direction with a gap. The sets of yokes 31 and 32 have the same number of claws 33 and 34 as the north and south poles of the multi-pole magnet 14, respectively, provided at equal intervals all around the inner edge of the ring. The claw 33 of one yoke 31 and the claw 34 of the other yoke 32 are alternately arranged so as to be displaced in the circumferential direction. In this way, the pair of yokes 31 and 32 form a magnetic circuit in the magnetic field generated by the multipolar magnet 14.

トーションバー１３に捩じれ変位が加わると、多極磁石１４と一組のヨーク３１、３２との相対回転に伴って磁気回路を通る磁束が変化し、その磁束を検出することで回転角度の情報が得られる。その検出原理は特許文献１（特開２０１２−２３７７２７号公報）の図５、図６等に記載されている。 When a torsional displacement is applied to the torsion bar 13, the magnetic flux passing through the magnetic circuit changes with the relative rotation of the multipolar magnet 14 and the pair of yokes 31 and 32, and the information of the rotation angle is obtained by detecting the magnetic flux. can get. The detection principle is described in FIGS. 5 and 6 of Patent Document 1 (Japanese Unexamined Patent Publication No. 2012-237727).

トーションバー１３、多極磁石１４、及び、一組のヨーク３１、３２は同軸に構成されるため、それらのいずれを基準として中心軸Ｏが定義されてもよい。本明細書では、磁束誘導部材５１、５２との対向関係が着目されるヨーク３１、３２を基準として、基本的に「ヨーク３１、３２の中心軸Ｏ」と記載する。 Since the torsion bar 13, the multipole magnet 14, and the set of yokes 31 and 32 are coaxially configured, the central axis O may be defined with reference to any of them. In the present specification, it is basically described as "the central axis O of the yokes 31 and 32" with reference to the yokes 31 and 32 in which the facing relationship with the magnetic flux guiding members 51 and 52 is focused.

また、実施形態の説明では、トーションバー１３、多極磁石１４、一組のヨーク３１、３２等の軸方向及び径方向を、単に「軸方向」及び「径方向」という。また、図面の説明における平面図は軸方向の第１軸１１側から視た図を意味し、側面図は径方向から視た図を意味する。「平面視にて」は、「軸方向の投影において」と同義である。 Further, in the description of the embodiment, the axial direction and the radial direction of the torsion bar 13, the multipolar magnet 14, the set of yokes 31, 32, etc. are simply referred to as "axial direction" and "diameter direction". Further, the plan view in the description of the drawings means a view seen from the first axis 11 side in the axial direction, and the side view means a view seen from the radial direction. "In plan view" is synonymous with "in axial projection".

磁束誘導部材５１、５２は、軟磁性体で形成され、一組のヨーク３１、３２のうち少なくとも一方のヨークと軸方向または径方向で本体６０が対向し、磁気回路の磁束を磁気センサ７１、７２に誘導する。第１４実施形態を除く多くの実施形態では、一組の磁束誘導部材５１、５２が備えられる。 The magnetic flux guiding members 51 and 52 are made of a soft magnetic material, and the main body 60 faces at least one of the yokes 31 and 32 of the set of yokes 31 and 32 in the axial or radial direction, and the magnetic flux of the magnetic circuit is measured by the magnetic sensor 71. Induce to 72. In many embodiments except the 14th embodiment, a set of magnetic flux guiding members 51, 52 is provided.

以下、説明の便宜上、図１、図２において第１軸１１側に配置されるヨーク３１及び磁束誘導部材５１を「上側のヨーク３１」及び「上側の磁束誘導部材５１」という。また、第２軸１２側に配置されるヨーク３２及び磁束誘導部材５２を「下側のヨーク３２」及び「下側の磁束誘導部材５２」という。上側の磁束誘導部材５１は上側のヨーク３１と対向し、下側の磁束誘導部材５２は下側のヨーク３２と対向する。第１３実施形態を除く多くの実施形態では、一組のヨーク３１、３２は軸方向に対称に配置され、軸方向に互いに対向する。 Hereinafter, for convenience of explanation, the yoke 31 and the magnetic flux guiding member 51 arranged on the first shaft 11 side in FIGS. 1 and 2 are referred to as "upper yoke 31" and "upper magnetic flux guiding member 51". Further, the yoke 32 and the magnetic flux guiding member 52 arranged on the second shaft 12 side are referred to as "lower yoke 32" and "lower magnetic flux guiding member 52". The upper magnetic flux guiding member 51 faces the upper yoke 31, and the lower magnetic flux guiding member 52 faces the lower yoke 32. In many embodiments except the thirteenth embodiment, the set of yokes 31 and 32 are arranged symmetrically in the axial direction and face each other in the axial direction.

図１に示すように、第１実施形態の一組の磁束誘導部材５１１、５２１は、本体６０から分岐した二組の延接部６１、６２を有している。詳しくは、延接部６１、６２は、本体６０からヨーク３１、３２の径方向外側に延びる。二つの磁気センサ７１、７２は、それぞれ延接部６１、６２の間に配置される。延接部６１、６２は、磁気センサ７１、７２が間に配置される部分においてギャップが最小となるように、軸方向に段差を有している。例えば磁束誘導部材５１、５２がプレス成形される場合、延接部６１、６２の段差は、板金を折り曲げること等によって形成可能である。 As shown in FIG. 1, one set of magnetic flux guiding members 511 and 521 of the first embodiment has two sets of extension portions 61 and 62 branched from the main body 60. Specifically, the extension portions 61 and 62 extend radially outward from the main body 60 to the yokes 31 and 32. The two magnetic sensors 71 and 72 are arranged between the extension portions 61 and 62, respectively. The extension portions 61 and 62 have a step in the axial direction so that the gap is minimized in the portion where the magnetic sensors 71 and 72 are arranged between them. For example, when the magnetic flux induction members 51 and 52 are press-formed, the steps of the extension portions 61 and 62 can be formed by bending the sheet metal or the like.

磁気センサ７１、７２は、一組のヨーク３１、３２から磁束誘導部材５１、５２により誘導された磁束を検出して電圧信号に変換し、リード線７３、７４を経由して外部のＥＣＵ９１に出力する。例えば磁気センサ７１、７２は、ホール素子、磁気抵抗素子等が樹脂モールドされた略直方体のＩＣパッケージで構成されている。 The magnetic sensors 71 and 72 detect the magnetic flux induced by the magnetic flux guiding members 51 and 52 from the set of yokes 31 and 32, convert it into a voltage signal, and output it to the external ECU 91 via the lead wires 73 and 74. To do. For example, the magnetic sensors 71 and 72 are composed of a substantially rectangular parallelepiped IC package in which Hall elements, magnetoresistive elements, and the like are resin-molded.

以上の構成のトルク検出装置において、トーションバー１３に加わるトルクが一定の状態で、多極磁石１４とヨーク３１、３２とが同期して回転する時に、磁気回路を通る磁束が周期的に変動する。この磁束の周期的変動は、磁気センサ７１、７２からＥＣＵ９１への出力信号に対し「振れ回りノイズ」となり得る。 In the torque detection device having the above configuration, when the multipolar magnet 14 and the yokes 31 and 32 rotate in synchronization with the torque applied to the torsion bar 13 being constant, the magnetic flux passing through the magnetic circuit fluctuates periodically. .. This periodic fluctuation of the magnetic flux can be "swing noise" with respect to the output signal from the magnetic sensors 71 and 72 to the ECU 91.

ここで、ヨークの爪からリングへの磁束の流れを示す参考図である図３３を参照し、振れ回りノイズについて説明する。磁束源となる多極磁石１４に面するヨーク３１、３２の爪３３、３４との距離によって、ヨーク３１、３２のリング部分には磁束密度の差が生じる。つまり、爪３３、３４に近い部分では磁束密度が高くなり、爪３３、３４から離れた部分では磁束密度が小さくなる。 Here, the runout noise will be described with reference to FIG. 33, which is a reference diagram showing the flow of magnetic flux from the claw of the yoke to the ring. The ring portion of the yokes 31 and 32 has a difference in magnetic flux density depending on the distance from the claws 33 and 34 of the yokes 31 and 32 facing the multipolar magnet 14 which is the magnetic flux source. That is, the magnetic flux density is high in the portion close to the claws 33 and 34, and the magnetic flux density is low in the portion away from the claws 33 and 34.

そのため、多極磁石１４とヨーク３１、３２とが同期して回転する場合、ヨーク３１、３２のリング間の特定の位置に配置された磁気センサでは、回転に伴った磁束の変動が検知される。さらに、回転に伴って、爪３３、３４同士の間から漏れる漏れ磁束が加わり、磁束の変動が大きくなる。これが振れ回りノイズとして磁気センサで検出される。このように、磁気センサで検出される信号に比べ振れ回りノイズが相対的に大きくなると、ＳＮ比が低下することとなる。 Therefore, when the multipolar magnet 14 and the yokes 31 and 32 rotate in synchronization, the magnetic sensor arranged at a specific position between the rings of the yokes 31 and 32 detects the fluctuation of the magnetic flux due to the rotation. .. Further, with rotation, a leakage flux leaking between the claws 33 and 34 is added, and the fluctuation of the magnetic flux becomes large. This is detected by the magnetic sensor as swinging noise. As described above, when the swing noise is relatively large compared to the signal detected by the magnetic sensor, the SN ratio is lowered.

このノイズに対し、特許文献１の従来技術では、中心軸Ｏと磁気センサとを結ぶ方向において、中心軸Ｏから集磁リング（ずなわち、本実施形態の磁束誘導部材）の内縁部までの距離が最大となるように、集磁リングの形状が決められている。例えば集磁リングは、中心軸Ｏと磁気センサとを結ぶ方向が長径となる楕円弧状に形成されている。このように磁気センサを多極磁石から遠ざけることで、磁束変動による磁気センサへの影響を抑制しようとしている。 In response to this noise, in the prior art of Patent Document 1, in the direction connecting the central axis O and the magnetic sensor, from the central axis O to the inner edge of the magnetic collecting ring (that is, the magnetic flux guiding member of the present embodiment). The shape of the magnetic collecting ring is determined so that the distance is maximized. For example, the magnetic collecting ring is formed in an elliptical arc shape having a major axis in the direction connecting the central axis O and the magnetic sensor. By moving the magnetic sensor away from the multi-pole magnet in this way, we are trying to suppress the influence of magnetic flux fluctuations on the magnetic sensor.

しかし、特許文献１の構成では、磁気センサの近くの部位において磁束誘導部材とヨークとの軸方向の対向面積が相対的に小さくなり、実施形態によっては、磁束誘導部材とヨークとの対向面積が０となっている。そのため、磁気センサから離れた部分で磁束誘導部材とヨークとを対向させ磁束を集める場合、磁気センサ近傍で集める場合よりも磁気抵抗が高くなるため、センサに集められる磁束量が減少する。したがって、振れ回りノイズが小さくなるとともに信号も小さくなることから、ＳＮ比の向上が見込めないという問題がある。 However, in the configuration of Patent Document 1, the area where the magnetic flux guiding member and the yoke face each other in the axial direction becomes relatively small in a portion near the magnetic sensor, and depending on the embodiment, the facing area between the magnetic flux guiding member and the yoke becomes relatively small. It is 0. Therefore, when the magnetic flux guiding member and the yoke are opposed to each other at a portion away from the magnetic sensor to collect the magnetic flux, the magnetoresistance is higher than when the magnetic flux is collected near the magnetic sensor, so that the amount of magnetic flux collected by the sensor is reduced. Therefore, there is a problem that the SN ratio cannot be expected to be improved because the swing noise becomes smaller and the signal becomes smaller.

そこで本実施形態は、基本的に、磁気センサの近傍の部位ほど信号を大きくしつつ振れ回りノイズを抑制することで、磁気センサが検出する磁束のＳＮ比を向上させることを目的とする。ただし、例外的に第１０実施形態は、信号を大きくすることなくノイズの抑制効果のみによってＳＮ比を向上させるものである。 Therefore, it is basically an object of the present embodiment to improve the SN ratio of the magnetic flux detected by the magnetic sensor by suppressing the swinging noise while increasing the signal toward the portion closer to the magnetic sensor. However, as an exception, in the tenth embodiment, the SN ratio is improved only by the noise suppressing effect without increasing the signal.

また、一部の実施形態では、さらなる目的として、磁気センサモジュール５０の小型化及び組み付け性の向上を図る。例えば特許文献１に開示された半環状の集磁リングは、トーションバー１３や多極磁石１４を中に通す必要のある環状の集磁リングに比べ、径方向から組み付け可能である点で組み付け性に優れる。一部の実施形態では、径方向から組み付け可能というだけでなく、磁気センサモジュール５０を小型化し、製造歩留まりを向上させると共に、部品管理のスペース低減や組み付け性の一層の向上を図る。 Further, in some embodiments, as a further purpose, the size of the magnetic sensor module 50 is reduced and the ease of assembly is improved. For example, the semi-annular magnetic collecting ring disclosed in Patent Document 1 is assembleable in that it can be assembled from the radial direction as compared with the annular magnetic collecting ring in which the torsion bar 13 and the multipolar magnet 14 need to be passed through. Excellent for. In some embodiments, not only is it possible to assemble from the radial direction, but also the magnetic sensor module 50 is miniaturized to improve the manufacturing yield, reduce the space for component management, and further improve the assembleability.

次に、図３（ａ）〜図２２（ｂ）を参照し、実施形態毎に磁気センサモジュール５０の詳細な構成を説明する。以下の第１〜第９実施形態について、磁気センサモジュールの符号は、「５０」に続く３桁目に実施形態の番号を付し、一組の磁束誘導部材の符号は、「５１」、「５２」に続く３桁目に実施形態の番号を付す。第１０〜第１４実施形態については、磁気センサモジュールの符号は、「５５」に続く３桁目に順に「１」〜「４」を付す。また、第１０〜第１３実施形態について、一組の磁束誘導部材の符号は、「５６」、「５７」に続く３桁目に順に「０」〜「３」を付す。第１４実施形態については、片側のみの磁束誘導部材の符号を「５６４」とする。 Next, with reference to FIGS. 3A to 22B, a detailed configuration of the magnetic sensor module 50 will be described for each embodiment. Regarding the following first to ninth embodiments, the code of the magnetic sensor module is the number of the embodiment in the third digit following "50", and the code of the set of magnetic flux induction members is "51", " The number of the embodiment is assigned to the third digit following "52". In the tenth to fourteenth embodiments, the reference numerals of the magnetic sensor modules are "1" to "4" in order of the third digit following "55". Further, with respect to the tenth to thirteenth embodiments, the reference numerals of the set of magnetic flux guiding members are sequentially added with "0" to "3" in the third digit following "56" and "57". In the fourteenth embodiment, the reference numeral of the magnetic flux guiding member on only one side is “564”.

各実施形態の磁気センサモジュールの構成は、原則として、平面図、側面図、軸方向断面図の三図によって示す。ただし、いずれかの図が前出の実施形態と実質的に同じである場合、適宜、前出の図を援用する。また、明細書中、例えば「平面視にて」とは、「平面図を視たとき」の意味である。第１実施形態では、図３（ａ）が平面図、図３（ｂ）が側面図、図４が軸方向断面図である。「平面図」は、厳密には上側の磁束誘導部材５１の上部で多極磁石１４及びヨーク３１、３２の爪３３、３４を切断した径方向断面図であるが、磁束誘導部材５１の視点から「平面図」と記す。また、径方向断面視にて実際に環が見えるのは下側のヨーク３２のみであるが、説明の都合上、上側のヨーク３１を含めて符号を「３１、３２」と付す。 As a general rule, the configuration of the magnetic sensor module of each embodiment is shown by three views: a plan view, a side view, and an axial sectional view. However, if any of the figures is substantially the same as the above-described embodiment, the above-mentioned figure is appropriately incorporated. Further, in the specification, for example, "in a plan view" means "when a plan view is viewed". In the first embodiment, FIG. 3A is a plan view, FIG. 3B is a side view, and FIG. 4 is an axial sectional view. Strictly speaking, the "plan view" is a radial cross-sectional view in which the multipolar magnet 14 and the claws 33 and 34 of the yokes 31 and 32 are cut at the upper part of the upper magnetic flux guiding member 51, but from the viewpoint of the magnetic flux guiding member 51. Notated as "plan view". Further, although the ring is actually visible only in the lower yoke 32 in the radial cross-sectional view, the reference numerals are given as "31, 32" including the upper yoke 31 for convenience of explanation.

各平面図には、中心軸Ｏを通って左右方向に延びる「基準線Ｘ」が記載される。図３（ａ）等、二つの磁気センサ７１、７２を備える構成の図では、基準線Ｘは、二つの磁気センサ７１、７２の中間位置と中心軸Ｏとを結ぶ仮想直線と定義される。言い換えれば、二つの磁気センサ７１、７２は、基準線Ｘに対して対称に配置される。図１９等、一つの磁気センサ７１を備える構成の図では、基準線Ｘは、一つの磁気センサ７１と中心軸Ｏとを結ぶ仮想直線と定義される。また、各平面図は、トーションバー１３に捩じれ変位が加わっていない中立状態の図である。中立状態では、磁極（図３（ａ）の例ではＳ極）の中心線が基準線Ｘに一致する。 In each plan view, a "reference line X" extending in the left-right direction through the central axis O is described. In the diagram of the configuration including the two magnetic sensors 71 and 72 as shown in FIG. 3A, the reference line X is defined as a virtual straight line connecting the intermediate position of the two magnetic sensors 71 and 72 and the central axis O. In other words, the two magnetic sensors 71, 72 are arranged symmetrically with respect to the reference line X. In the diagram of the configuration including one magnetic sensor 71 as shown in FIG. 19, the reference line X is defined as a virtual straight line connecting the one magnetic sensor 71 and the central axis O. Further, each plan view is a view in a neutral state in which the torsion bar 13 is not twisted and displaced. In the neutral state, the center line of the magnetic pole (S pole in the example of FIG. 3A) coincides with the reference line X.

側面図は、基準線Ｘに沿って、磁気センサモジュール５０を径方向外側から視た図である。二点鎖線は爪３３、３４の外形を示す。側面図では、トーションバー１３、多極磁石１４の図示を省略する。軸方向断面図は、中心軸Ｏ及び基準線Ｘを含む平面での断面図である。軸方向断面図ではトーションバー１３の図示を省略し、多極磁石１４は外形線のみを示す。 The side view is a view of the magnetic sensor module 50 viewed from the outside in the radial direction along the reference line X. The alternate long and short dash line indicates the outer shape of the claws 33 and 34. In the side view, the torsion bar 13 and the multi-pole magnet 14 are not shown. The axial sectional view is a sectional view on a plane including the central axis O and the reference line X. In the axial sectional view, the torsion bar 13 is not shown, and the multi-pole magnet 14 shows only the outline.

（第１実施形態）
図３（ａ）、図３（ｂ）、図４を参照し、第１実施形態について説明する。第１実施形態の磁気センサモジュール５０１では、平面視にて、磁束誘導部材５１１、５２１の本体は、基準線Ｘに対して対称な長方形帯状に形成されている。磁束誘導部材５１１、５２１の中心軸Ｏ側の辺は、ヨーク３１、３２の内部で基準線Ｘに直交する直線である。 (First Embodiment)
The first embodiment will be described with reference to FIGS. 3 (a), 3 (b), and 4. In the magnetic sensor module 501 of the first embodiment, the main body of the magnetic flux guiding members 511 and 521 is formed in a rectangular band shape symmetrical with respect to the reference line X in a plan view. The side of the magnetic flux guiding members 511 and 521 on the O side of the central axis is a straight line orthogonal to the reference line X inside the yokes 31 and 32.

磁束誘導部材５１１、５２１は、本体６０から径方向外側に延びる延設部６１、６２を有しており、「本体６０における延接部６１、６２への分岐部位」をＳ部と記す。「延接部６１、６２への分岐部位」は、実質的に磁気センサ７１、７２の近傍を意味する。なお、「Ｓ部」は多極磁石１４のＳ極と同じ記号であるが、それらの区別は自明であり、混同のおそれはない。 The magnetic flux guiding members 511 and 521 have extending portions 61 and 62 extending radially outward from the main body 60, and the "branch portion of the main body 60 to the extending portions 61 and 62" is referred to as an S portion. The "branch portion to the extension portions 61 and 62" substantially means the vicinity of the magnetic sensors 71 and 72. The "S part" is the same symbol as the S pole of the multi-pole magnet 14, but the distinction between them is obvious and there is no risk of confusion.

また、基準線Ｘを挟み、磁束誘導部材５１１、５２１の本体６０とヨーク３１、３２との対向範囲におけるヨーク３１、３２の周方向両端に対応する部位を「本体６０の周端部６３、６４」と定義し、図中、破線ハッチングで示す。周端部６３、６４は、「本体６０とヨーク３１、３２との対向範囲における周方向両端」に「対応する」部位であって、周端部６３、６４自体がヨーク３１、３２との対向範囲に直接含まれていなくてもよい。例えば周端部６３、６４は、直接的な対向範囲よりも外側、すなわち基準線Ｘから離れた側において、「直接的な対向範囲における周方向両端」に対応していればよい。Ｓ部から中心軸Ｏまでの距離ｄｓは、周端部６３、６４から中心軸Ｏまでの距離ｄｅよりも短い。 Further, the portions corresponding to both ends in the circumferential direction of the yokes 31 and 32 in the range facing the main body 60 of the magnetic flux guiding member 511 and 521 and the yokes 31 and 32 with the reference line X sandwiched are defined as "peripheral end portions 63 and 64 of the main body 60". , And is indicated by dashed hatching in the figure. The peripheral end portions 63 and 64 are portions that "correspond" to "both ends in the circumferential direction in the facing range between the main body 60 and the yokes 31 and 32", and the peripheral end portions 63 and 64 themselves face the yokes 31 and 32. It does not have to be directly included in the range. For example, the peripheral end portions 63 and 64 may correspond to "both ends in the circumferential direction in the direct facing range" on the outside of the directly facing range, that is, on the side away from the reference line X. The distance ds from the S portion to the central axis O is shorter than the distance de from the peripheral end portions 63 and 64 to the central axis O.

側面視及び軸方向断面視にて、磁束誘導部材５１１、５２１は、軸方向の内側において一定のギャップでヨーク３１、３２の環状面に対向し、その対向面積は、磁気センサ７１、７２に近い中間部６５で相対的に大きく、周端部６３、６４に向かうほど小さくなる。延設部６１、６２への分岐部位であるＳ部では、周端部６３、６４に比べ対向面積が大きいため、磁束誘導部材５１１、５２１とヨーク３１、３２との間の単位面積当たりの磁気パーミアンスが大きくなる。 In the side view and the axial cross-sectional view, the magnetic flux guiding members 511 and 521 face the annular surfaces of the yokes 31 and 32 with a constant gap inside in the axial direction, and the facing area thereof is close to that of the magnetic sensors 71 and 72. It is relatively large at the intermediate portion 65, and decreases toward the peripheral ends 63 and 64. Since the facing area of the S portion, which is the branching portion to the extending portions 61 and 62, is larger than that of the peripheral end portions 63 and 64, the magnetism per unit area between the magnetic flux guiding members 511 and 521 and the yokes 31 and 32. The permeance increases.

ここで、「単位面積当たり」の意味は、部位毎に磁気パーミアンスを比較する範囲の面積を同一とすることを明確に記すことにある。以下の実施形態の説明では、都度の「単位面積当たり」の記載を省略し、「磁気パーミアンス」とは「単位面積当たりの磁気パーミアンス」を意味するものとして解釈する。 Here, the meaning of "per unit area" is to clearly state that the area of the range in which the magnetic permeance is compared is the same for each part. In the following description of the embodiment, the description of "per unit area" is omitted, and "magnetic permeance" is interpreted as meaning "magnetic permeance per unit area".

二つの磁気センサ７１、７２は、それぞれ延接部６１、６２の間に配置される。延接部６１、６２は、磁気センサ７１、７２が間に配置される部分においてギャップが最小となるように軸方向に折り曲げられ、段差を有している。このような延接部６１、６２の構成は、以下の第２〜第７、第９〜第１１実施形態において共通である。 The two magnetic sensors 71 and 72 are arranged between the extension portions 61 and 62, respectively. The extension portions 61 and 62 are bent in the axial direction so as to minimize the gap in the portion where the magnetic sensors 71 and 72 are arranged between them, and have a step. The configurations of the extension portions 61 and 62 are common to the following second to seventh and ninth to eleventh embodiments.

次に図５（ａ）、図５（ｂ）、図６を参照し、第１０実施形態を除く各実施形態の磁気センサモジュール５０の作用効果について説明する。まず、信号が大きくなる理由を説明する。図５（ａ）に、磁束誘導部材５１、５２とヨーク３１、３２との間の磁気パーミアンスについて、基準線Ｘからの距離または回転角度と磁気パーミアンスとの相関図を示す。磁気パーミアンスＰは、材の透磁率μ、対向面積Ａ、ギャップ長Ｌを用いて、式（１）で表される。
Ｐ＝μ（Ａ／Ｌ） ・・・（１） Next, with reference to FIGS. 5 (a), 5 (b), and 6, the effects of the magnetic sensor module 50 of each embodiment excluding the tenth embodiment will be described. First, the reason why the signal becomes large will be described. FIG. 5A shows a correlation diagram between the distance or rotation angle from the reference line X and the magnetic permeance for the magnetic permeance between the magnetic flux guiding members 51 and 52 and the yokes 31 and 32. The magnetic permeance P is represented by the formula (1) using the magnetic permeability μ of the material, the facing area A, and the gap length L.
P = μ (A / L) ・ ・ ・ (1)

ここで、磁束誘導部材５１、５２は単一の軟磁性材質で形成されることを前提とすると、磁束誘導部材５１、５２とヨーク３１、３２との対向面積Ａが大きいほど、又は、ギャップ長Ｌが短いほど、磁気パーミアンスＰは大きくなる。 Here, assuming that the magnetic flux guiding members 51 and 52 are formed of a single soft magnetic material, the larger the facing area A between the magnetic flux guiding members 51 and 52 and the yokes 31 and 32, or the gap length. The shorter L, the larger the magnetic permeance P.

第１実施形態等では、磁束誘導部材５１、５２とヨーク３１、３２とのギャップは一定であるが、対向面積が中間部６５から周端部６３、６４に向かうほど小さくなる。一方、後述の第３実施形態等では、磁束誘導部材５１、５２とヨーク３１、３２との対向面積は一定であるが、ギャップが中間部６５から周端部６３、６４に向かうほど大きくなる。したがって、いずれの実施形態でも、中間部６５の磁気パーミアンスが周端部６３、６４の磁気パーミアンスよりも大きくなる。その相関特性は、図５（ａ）中、Ｐ１のような直線、Ｐ２のような変曲点の無い単純な曲線、Ｐ３のようなＳ字曲線或いはステップ状の折れ線等、どのような特性であってもよい。 In the first embodiment and the like, the gap between the magnetic flux guiding members 51 and 52 and the yokes 31 and 32 is constant, but the facing area becomes smaller from the intermediate portion 65 toward the peripheral end portions 63 and 64. On the other hand, in the third embodiment described later and the like, the facing area between the magnetic flux guiding members 51 and 52 and the yokes 31 and 32 is constant, but the gap increases from the intermediate portion 65 toward the peripheral end portions 63 and 64. Therefore, in any of the embodiments, the magnetic permeance of the intermediate portion 65 is larger than the magnetic permeance of the peripheral end portions 63 and 64. In FIG. 5A, the correlation characteristic is a straight line like P1, a simple curve without an inflection point like P2, an S-shaped curve like P3, or a stepped polygonal line. There may be.

ところで、特許第５０９０１６２号公報及び米国特許ＵＳ７，６４４，６３５号明細書には、「磁束誘導部材とヨークとの間の磁気パーミアンスが、相対的半径及び角度位置とは独立に決められる」構成が開示されている。これは、基準線Ｘからの距離によらず磁気パーミアンスが一定となる特性を有することを意味する。この特性を比較例として、図５（ａ）に破線で示す。本実施形態の特性は、基準線Ｘからの距離または回転角度に応じて磁気パーミアンスが変化するという点で、比較例の特性とは明らかに異なるものである。 By the way, Japanese Patent No. 5090162 and US Pat. No. 7,644,635 have a configuration in which "the magnetic permeance between the magnetic flux guiding member and the yoke is determined independently of the relative radius and angular position". It is disclosed. This means that it has a characteristic that the magnetic permeance is constant regardless of the distance from the reference line X. This characteristic is shown by a broken line in FIG. 5A as a comparative example. The characteristics of this embodiment are clearly different from the characteristics of the comparative example in that the magnetic permeance changes according to the distance from the reference line X or the rotation angle.

そして、第１０実施形態を除く各実施形態では、磁気センサ７１、７２は、中間部６５の近くの本体６０、又は、本体６０から分岐した延設部６１、６２に設置される。ここで、「設置される」には、延接部６１、６２に近接した位置に磁気センサ７１、７２が非接触で配置される形態を含み、必ずしも磁気センサ７１、７２が延設部６１、６２に接触することを意味しない。磁束誘導部材５１、５２の本体６０における磁気センサ７１、７２の設置部位又は延接部６１、６２への分岐部位は、実質的に「磁気センサ７１、７２の近傍」を意味する。そして、磁束誘導部材５１、５２は、本体６０における磁気センサ７１、７２の設置部位又は延接部６１、６２への分岐部位で、周端部６３、６４に比べ、「磁束誘導部材５１、５２とヨーク３１、３２との間の単位面積当たりの磁気パーミアンス」が大きくなるように構成されている。これにより、磁気センサ７１、７２の信号を大きくすることができる。 Then, in each embodiment except the tenth embodiment, the magnetic sensors 71 and 72 are installed in the main body 60 near the intermediate portion 65 or in the extension portions 61 and 62 branched from the main body 60. Here, "installed" includes a form in which the magnetic sensors 71 and 72 are arranged in a non-contact position close to the extension portions 61 and 62, and the magnetic sensors 71 and 72 are not necessarily arranged in the extension portions 61. It does not mean to touch 62. The installation portion of the magnetic sensors 71, 72 or the branch portion to the extension portions 61, 62 in the main body 60 of the magnetic flux induction members 51, 52 substantially means "near the magnetic sensors 71, 72". The magnetic flux guiding members 51 and 52 are the installation portions of the magnetic sensors 71 and 72 in the main body 60 or the branching portions to the extending portions 61 and 62, and are "magnetic flux guiding members 51 and 52" as compared with the peripheral end portions 63 and 64. The magnetic permeance per unit area between the and the yokes 31 and 32 is increased. As a result, the signals of the magnetic sensors 71 and 72 can be increased.

次に、振れ回りノイズが低減する理由を説明する。特許文献１等の従来技術のトルク検出装置では、集磁リングの形状は、ヨークのリングに沿った円環状、半円状、半楕円状等に形成されている。これらの形状では、集磁リングの広範囲の部分から磁気センサ部分に磁束を集めてくることになるため、信号がある程度大きくなると同時に、各部位の磁束変動も集めてしまい、その結果、大きな振れ回り変動が生じる。一方、第１０実施形態を除く各実施形態では、磁気センサ７１、７２から離れた周端部６３、６４で、ヨーク３１、３２と磁束誘導部材５１、５２との間の磁気パーミアンスが低下するように構成されている。 Next, the reason why the runout noise is reduced will be described. In the torque detection device of the prior art such as Patent Document 1, the shape of the magnetic collecting ring is formed in an annular shape, a semicircular shape, a semi-elliptical shape, or the like along the ring of the yoke. With these shapes, the magnetic flux is collected from a wide range of the magnetic collection ring to the magnetic sensor part, so that the signal becomes large to some extent and at the same time, the magnetic flux fluctuations of each part are also collected, resulting in a large swing. Fluctuations occur. On the other hand, in each embodiment except the tenth embodiment, the magnetic permeance between the yokes 31 and 32 and the magnetic flux guiding members 51 and 52 is reduced at the peripheral end portions 63 and 64 away from the magnetic sensors 71 and 72. It is configured in.

第１実施形態の図３（ａ）において、特に、磁気パーミアンスが大きいＳ部で、ヨーク３１、３２と磁束誘導部材５１１、５２１との間に磁束が流れる。そして、磁束誘導部材５１１、５２１に流れ込んだ磁束は、破線矢印Ｂで示すように、周端部６３、６４に向かって漏れ広がるように流れていく。これは、従来技術のトルク検出装置の集磁リングと違い、磁束誘導部材５１１、５２１の周端部６３、６４では、磁束密度が低く、磁気抵抗が小さい状態になっているためである。これにより、延設部６１、６２を通って磁気センサ７１、７２側に流れる磁束の変動が抑制、つまり磁束が平滑化される効果が生まれる。 In FIG. 3A of the first embodiment, magnetic flux flows between the yokes 31 and 32 and the magnetic flux guiding members 511 and 521, particularly in the S portion having a large magnetic permeance. Then, the magnetic flux flowing into the magnetic flux guiding members 511 and 521 flows so as to leak and spread toward the peripheral end portions 63 and 64 as shown by the broken line arrow B. This is because the magnetic flux density is low and the magnetic resistance is low at the peripheral end portions 63 and 64 of the magnetic flux guiding members 511 and 521, unlike the magnetic collecting ring of the torque detection device of the prior art. As a result, the fluctuation of the magnetic flux flowing to the magnetic sensors 71 and 72 side through the extending portions 61 and 62 is suppressed, that is, the effect of smoothing the magnetic flux is produced.

例えば、多極磁石１４の磁極が二つのヨーク３１、３２の爪３３、３４の間にある中立状態、すなわちトルクが加わっていない状態で、従来技術の集磁リングは、磁束を集めるだけであり、大きな振れ回りノイズが発生する。それに対し、第１実施形態の磁束誘導部材５１１、５２１は、集めた磁束の変動を抑える構造となっているため、図５（ｂ）に示すように振れ回りノイズの変動が小さくなる。加えて、二つの磁気センサ７１、７２を備える構成では、ヨーク３１、３２から誘導された磁束は基準線Ｘ側から二つの磁気センサ７１、７２に向かって分岐し、周端部６３、６４に向かって広がっていく。この作用により、伝播される振れ回りノイズを低減させることができる。 For example, in a neutral state where the magnetic poles of the multipole magnet 14 are between the claws 33 and 34 of the two yokes 31, 32, that is, no torque is applied, the conventional magnetic collecting ring only collects magnetic flux. , Large swing noise is generated. On the other hand, since the magnetic flux induction members 511 and 521 of the first embodiment have a structure that suppresses fluctuations in the collected magnetic flux, fluctuations in swing noise become small as shown in FIG. 5 (b). In addition, in the configuration including the two magnetic sensors 71 and 72, the magnetic flux induced from the yokes 31 and 32 branches from the reference line X side toward the two magnetic sensors 71 and 72 and reaches the peripheral ends 63 and 64. It spreads toward you. By this action, it is possible to reduce the propagating run-out noise.

なお、磁気センサ７１、７２の信号についても、集められる磁束量に対して最も寄与度の高い磁気センサ７１、７２の近傍で、磁束誘導部材５１１、５２１とヨーク３１、３２との間の磁気パーミアンスが大きくされて磁束が集められるため、信号の低下に対する影響は小さい。以上のことから、第１０実施形態を除く各実施形態では、従来技術に対し、大きな信号（Ｓ）を得つつ、振れ回りノイズ（Ｎ）を抑制することが可能となる。よって、磁気センサ７１、７２が検出する磁束のＳＮ比を向上させることができる。 Regarding the signals of the magnetic sensors 71 and 72, the magnetic permeance between the magnetic flux guiding members 511 and 521 and the yokes 31 and 32 in the vicinity of the magnetic sensors 71 and 72 having the highest contribution to the collected magnetic flux amount. Is increased to collect magnetic flux, so the effect on signal degradation is small. From the above, in each embodiment other than the tenth embodiment, it is possible to suppress the swing noise (N) while obtaining a large signal (S) as compared with the conventional technique. Therefore, the SN ratio of the magnetic flux detected by the magnetic sensors 71 and 72 can be improved.

次に図６を参照し、第１実施形態の磁束誘導部材５１１、５１２を用いることによる製造歩留まり向上について説明する。例えば板金材料をプレスで打ち抜いて二枚の磁束誘導部材５１１、５１２を取る場合、延設部６１、６２が向かい合うように本体６０を並べ、互いに凹凸が嵌り合うようにレイアウトする。延設部６１、６２と反対側の辺は直線であるため、二枚の磁束誘導部材５１１、５１２を取るために使用される材料の幅はＷ１となる。 Next, with reference to FIG. 6, the improvement of the manufacturing yield by using the magnetic flux guiding members 511 and 512 of the first embodiment will be described. For example, when the sheet metal material is punched out with a press to take two magnetic flux guiding members 511 and 512, the main bodies 60 are arranged so that the extending portions 61 and 62 face each other, and the layout is made so that the unevenness fits each other. Since the side opposite to the extending portions 61 and 62 is a straight line, the width of the material used to take the two magnetic flux guiding members 511 and 512 is W1.

比較のため、第３実施形態における円弧状の磁束誘導部材５１３、５２３を二点鎖線で示す。この形態では二枚の磁束誘導部材５１１、５１２を取るために幅Ｗ３の材料を使用する必要があり、ムダが大きい。これに対し、第１実施形態では材料のムダを最小限に抑えることができ、製造歩留まりが向上する。また、磁束誘導部材５１１、５２１は基準線Ｘ方向の幅が小さいため、図３（ａ）に示す幅Ｗｉｎのスペースで、ブロック矢印ＩＮのようにスライドさせてトルク検出装置１０に組み付けることができる。したがって、例えば半環状の磁束誘導部材を組み付ける場合に比べ、さらに組み付け性を向上させることができる。 For comparison, the arc-shaped magnetic flux guiding members 513 and 523 in the third embodiment are shown by alternate long and short dash lines. In this form, it is necessary to use a material having a width W3 in order to take two magnetic flux guiding members 511 and 512, which is wasteful. On the other hand, in the first embodiment, waste of the material can be minimized, and the manufacturing yield is improved. Further, since the magnetic flux guiding members 511 and 521 have a small width in the reference line X direction, they can be assembled to the torque detection device 10 by sliding them as shown by the block arrow IN in the space of the width Win shown in FIG. 3A. .. Therefore, the assembling property can be further improved as compared with the case of assembling, for example, a semi-annular magnetic flux guiding member.

（第２実施形態）
第２実施形態の磁気センサモジュール５０２について、側面図及び軸方向断面図は第１実施形態の図３（ｂ）及び図４を援用する。図７の平面図において、下側の磁束誘導部材を含め、磁束誘導部材の符号を「５１２，５２２」と記す。 (Second Embodiment)
Regarding the magnetic sensor module 502 of the second embodiment, the side view and the axial sectional view refer to FIGS. 3 (b) and 4 of the first embodiment. In the plan view of FIG. 7, the code of the magnetic flux guiding member including the lower magnetic flux guiding member is referred to as “512,522”.

図７に示すように、第２実施形態の磁気センサモジュール５０２では、平面視にて、磁束誘導部材５１２、５２２の本体は、基準線Ｘに対して対称な同心円弧を対辺とする帯状に形成されている。この同心円弧は、基準線Ｘ上で中心軸Ｏに対し磁気センサ７１、７２とは反対側に位置する点Ｑを中心とし、中心軸Ｏを中心とする円弧よりも曲率が小さい。第１実施形態と同様に、本体６０における延設部６１、６２への分岐部位であるＳ部から中心軸Ｏまでの距離ｄｓは、周端部６３、６４から中心軸Ｏまでの距離ｄｅよりも短い。 As shown in FIG. 7, in the magnetic sensor module 502 of the second embodiment, in a plan view, the main body of the magnetic flux guiding members 512 and 522 is formed in a band shape having concentric arcs symmetrical with respect to the reference line X as opposite sides. Has been done. This concentric arc is centered on a point Q located on the reference line X on the opposite side of the magnetic sensors 71 and 72 with respect to the central axis O, and has a smaller curvature than the arc centered on the central axis O. Similar to the first embodiment, the distance ds from the S portion, which is a branching portion to the extension portions 61, 62 in the main body 60, to the central axis O is from the distance de from the peripheral end portions 63, 64 to the central axis O. Is also short.

磁束誘導部材５１２、５２２は、軸方向の内側において一定のギャップでヨーク３１、３２と対向する。その対向面積は、磁気センサ７１、７２に近い中間部６５で相対的に大きく、周端部６３、６４に向かうほど小さくなる。延設部６１、６２への分岐部位では、周端部６３、６４に比べ対向面積が大きいため、磁束誘導部材５１２、５２２とヨーク３１、３２との間の磁気パーミアンスが大きくなる。したがって、第２実施形態は、第１実施形態と同様にＳＮ比向上効果を奏する。なお、磁束誘導部材の中心軸Ｏ側の辺が直線である第１実施形態は、第２実施形態の点Ｑが無限遠に存在し、円弧の曲率が無限小となる特殊な形態として解釈される。 The magnetic flux guiding members 512 and 522 face the yokes 31 and 32 with a constant gap inside in the axial direction. The facing area is relatively large at the intermediate portion 65 close to the magnetic sensors 71 and 72, and decreases toward the peripheral ends 63 and 64. Since the facing area of the branching portion to the extending portions 61 and 62 is larger than that of the peripheral end portions 63 and 64, the magnetic permeance between the magnetic flux guiding members 512 and 522 and the yokes 31 and 32 becomes large. Therefore, the second embodiment has the same effect of improving the SN ratio as the first embodiment. The first embodiment in which the side of the magnetic flux guiding member on the O side of the central axis is a straight line is interpreted as a special mode in which the point Q of the second embodiment exists at infinity and the curvature of the arc is infinitesimal. To.

（第３実施形態）
第３実施形態の磁気センサモジュール５０３について、軸方向断面図は第１実施形態の図４を援用する。図８（ａ）、図８（ｂ）に示すように、第３実施形態の磁気センサモジュール５０３では、平面視にて、磁束誘導部材５１３の本体は、中心軸Ｏを中心とする同心円弧を対辺とする帯状に形成されている。磁束誘導部材５１３、５２３は、軸方向の内側においてヨーク３１、３２と対向し、その対向面積はヨーク３１、３２の周方向について一定である。 (Third Embodiment)
For the magnetic sensor module 503 of the third embodiment, FIG. 4 of the first embodiment is used as an axial sectional view. As shown in FIGS. 8A and 8B, in the magnetic sensor module 503 of the third embodiment, the main body of the magnetic flux guiding member 513 has a concentric arc centered on the central axis O in a plan view. It is formed in a strip shape on the opposite side. The magnetic flux guiding members 513 and 523 face the yokes 31 and 32 inside in the axial direction, and the facing area thereof is constant in the circumferential direction of the yokes 31 and 32.

側面視にて、磁束誘導部材５１３、５２３とヨーク３１、３２との軸方向のギャップは、磁気センサ７１、７２に近い中間部６５でのギャップｇｃから周端部６３、６４でのギャップｇｅまで、周端部６３、６４に向かうほど大きくなる。延設部６１、６２への分岐部位では、周端部６３、６４に比べギャップが小さいため、磁束誘導部材５１３、５２３とヨーク３１、３２との間の磁気パーミアンスが大きくなる。したがって、第３実施形態は、第１実施形態と同様にＳＮ比向上効果を奏する。 From the side view, the axial gap between the magnetic flux guiding members 513 and 523 and the yokes 31 and 32 ranges from the gap gc at the intermediate portion 65 near the magnetic sensors 71 and 72 to the gap ge at the peripheral ends 63 and 64. , It becomes larger toward the peripheral ends 63 and 64. At the branching portion to the extending portions 61 and 62, the gap is smaller than that of the peripheral end portions 63 and 64, so that the magnetic permeance between the magnetic flux guiding members 513 and 523 and the yokes 31 and 32 becomes large. Therefore, the third embodiment has the same effect of improving the SN ratio as the first embodiment.

（第４実施形態）
図９（ａ）、図９（ｂ）、図１０に示すように、第４実施形態の磁気センサモジュール５０４では、磁束誘導部材５１４、５２４の本体は、平面視にてヨーク３１、３２の外形より径方向外側に位置し、且つ、基準線Ｘに対して対称な長方形帯状に形成されている。磁束誘導部材５１４、５２４の中心軸Ｏ側の辺は、基準線Ｘに直交する直線である。したがって、第４実施形態は、第１実施形態と同様に小型化、歩留まり向上の効果を奏する。 (Fourth Embodiment)
As shown in FIGS. 9A, 9B, and 10, in the magnetic sensor module 504 of the fourth embodiment, the main body of the magnetic flux guiding members 514 and 524 has the outer shapes of the yokes 31 and 32 in a plan view. It is formed in a rectangular band shape that is located on the outer side in the radial direction and is symmetrical with respect to the reference line X. The side of the magnetic flux guiding members 514 and 524 on the central axis O side is a straight line orthogonal to the reference line X. Therefore, the fourth embodiment has the same effect of miniaturization and improvement of yield as the first embodiment.

側面視及び軸方向断面視にて、磁束誘導部材５１４、５２４は、径方向においてヨーク３１、３２の側面と対向する。対向部分の軸方向の高さは一定である。磁束誘導部材５１４、５２４とヨーク３１、３２との径方向のギャップは、磁気センサ７１、７２に近い中間部６５から周端部６３、６４に向かうほど大きくなる。延設部６１、６２への分岐部位では、周端部６３、６４に比べギャップが小さいため、磁束誘導部材５１４、５２４とヨーク３１、３２との間の磁気パーミアンスが大きくなる。したがって、第４実施形態は、第１実施形態と同様にＳＮ比向上効果を奏する。 The magnetic flux guiding members 514 and 524 face the side surfaces of the yokes 31 and 32 in the radial direction in the side view and the axial cross-sectional view. The height of the facing portion in the axial direction is constant. The radial gap between the magnetic flux guiding members 514 and 524 and the yokes 31 and 32 increases from the intermediate portion 65 near the magnetic sensors 71 and 72 toward the peripheral ends 63 and 64. Since the gap at the branching portion to the extending portions 61 and 62 is smaller than that at the peripheral end portions 63 and 64, the magnetic permeance between the magnetic flux guiding members 514 and 524 and the yokes 31 and 32 becomes large. Therefore, the fourth embodiment has the same effect of improving the SN ratio as the first embodiment.

（第５、第６実施形態）
図１１、図１２に、第５、第６実施形態の磁気センサモジュール５０５、５０６の軸方向断面図を示す。第５、第６実施形態は、磁束誘導部材とヨークとの対向構成に係る他のバリエーションである。第５、第６実施形態の磁束誘導部材５１５、５２５、５１６、５２６の本体の平面視形状は、第１、第４実施形態のような長方形帯状、又は、第２実施形態のような円弧を対辺とする帯状のいずれでもよい。 (Fifth and sixth embodiments)
11 and 12 show axial cross-sectional views of the magnetic sensor modules 505 and 506 of the fifth and sixth embodiments. The fifth and sixth embodiments are other variations relating to the facing configuration of the magnetic flux guiding member and the yoke. The plan-view shape of the main body of the magnetic flux guiding members 515, 525, 516, 526 of the fifth and sixth embodiments has a rectangular band shape as in the first and fourth embodiments, or an arc as in the second embodiment. It may be in the shape of a strip on the opposite side.

第１実施形態の磁束誘導部材５１１、５２１等が軸方向の内側においてヨーク３１、３２の環状面と対向するのに対し、図１１に示すように、第５実施形態の磁束誘導部材５１５、５２５は、軸方向の外側に配置され、軸方向の外側においてヨーク３１、３２の環状面と対向する。また、図１２に示すように、第６実施形態の磁束誘導部材５１６、５２６は、軸方向の外側及び径方向において、ヨーク３１、３２の環状面及び側面と対向する。このように、各実施形態の磁束誘導部材は、ヨーク３１、３２に対し軸方向、径方向、又は、その両方向を適宜組み合わせて対向するように配置されればよい。 While the magnetic flux guiding members 511, 521 and the like of the first embodiment face the annular surfaces of the yokes 31 and 32 inside in the axial direction, as shown in FIG. 11, the magnetic flux guiding members 515 and 525 of the fifth embodiment Is arranged on the outer side in the axial direction and faces the annular surfaces of the yokes 31 and 32 on the outer side in the axial direction. Further, as shown in FIG. 12, the magnetic flux guiding members 516 and 526 of the sixth embodiment face the annular surfaces and side surfaces of the yokes 31 and 32 on the outer side in the axial direction and in the radial direction. As described above, the magnetic flux induction member of each embodiment may be arranged so as to face the yokes 31 and 32 in the axial direction, the radial direction, or a combination thereof as appropriate.

（第７実施形態）
図１３（ａ）、図１３（ｂ）、図１４に示すように、第７実施形態の磁気センサモジュール５０７では、磁束誘導部材５１７、５２７の本体は、平面視にて、ヨーク３１、３２の外形より径方向外側に位置し、且つ、中心軸Ｏを中心とする同心円弧を対辺とする帯状に形成されている。 (7th Embodiment)
As shown in FIGS. 13 (a), 13 (b), and 14, in the magnetic sensor module 507 of the seventh embodiment, the main bodies of the magnetic flux guiding members 517 and 527 are the yokes 31 and 32 in a plan view. It is located radially outside the outer shape, and is formed in a band shape having a concentric arc centered on the central axis O as the opposite side.

側面視及び軸方向断面視にて、ヨーク３１、３２の周縁部に軸方向高さを確保する壁部３５が形成されている。なお、壁部３５の形成に代えて、単純にヨーク３１、３２の板厚を厚くしてもよい。磁束誘導部材５１７，５２７は、径方向においてヨーク３１、３２の側面と対向し、その径方向のギャップは一定である。また、磁束誘導部材５１７、５２７の本体の軸方向高さは、磁気センサ７１、７２に近い中間部６５から周端部６３、６４に向かうほど小さくなる。したがって、磁束誘導部材５１７、５２７とヨーク３１、３２との対向面積は、中間部６５から周端部６３、６４に向かうほど小さくなる。延設部６１、６２への分岐部位（Ｓ部）では、周端部６３、６４に比べ対向面積が大きいため、磁束誘導部材５１７、５２７とヨーク３１、３２との間の磁気パーミアンスが大きくなる。したがって、第７実施形態は、第１実施形態と同様にＳＮ比向上効果を奏する。 A wall portion 35 for ensuring an axial height is formed on the peripheral portions of the yokes 31 and 32 in the side view and the axial cross-sectional view. Instead of forming the wall portion 35, the thickness of the yokes 31 and 32 may be simply increased. The magnetic flux guiding members 517 and 527 face the side surfaces of the yokes 31 and 32 in the radial direction, and the gap in the radial direction is constant. Further, the axial height of the main body of the magnetic flux guiding members 517 and 527 decreases from the intermediate portion 65 near the magnetic sensors 71 and 72 toward the peripheral end portions 63 and 64. Therefore, the facing area between the magnetic flux guiding members 517 and 527 and the yokes 31 and 32 becomes smaller from the intermediate portion 65 toward the peripheral end portions 63 and 64. At the branching portion (S portion) to the extending portions 61 and 62, the facing area is larger than that of the peripheral end portions 63 and 64, so that the magnetic permeance between the magnetic flux guiding members 517 and 527 and the yokes 31 and 32 becomes large. .. Therefore, the seventh embodiment has the same effect of improving the SN ratio as the first embodiment.

（第８実施形態）
第８実施形態の磁気センサモジュール５０８について、軸方向断面図を省略する。図１５（ａ）、図１５（ｂ）に示すように、第８実施形態の磁気センサモジュール５０６では、磁束誘導部材５１８、５２８は長方形帯状の本体のみで構成され、延設部６１、６２を有していない。磁束誘導部材５１８、５２８において、軸方向に互いに近接するように折り曲げられたセンサ保持部６６、６７の間に磁気センサ７１、７２が配置される。この形態では、本体６０における磁気センサ７１、７２の設置部位が実質的に「磁気センサ７１、７２の近傍」に相当する。第８実施形態は、第１実施形態と同様にＳＮ比向上効果を奏する他、磁気センサモジュール５０６をより小型にすることができる。 (8th Embodiment)
The axial sectional view of the magnetic sensor module 508 of the eighth embodiment is omitted. As shown in FIGS. 15 (a) and 15 (b), in the magnetic sensor module 506 of the eighth embodiment, the magnetic flux guiding members 518 and 528 are composed of only a rectangular band-shaped main body, and the extending portions 61 and 62 are provided. I don't have it. In the magnetic flux guiding members 518 and 528, the magnetic sensors 71 and 72 are arranged between the sensor holding portions 66 and 67 bent so as to be close to each other in the axial direction. In this embodiment, the installation portion of the magnetic sensors 71 and 72 in the main body 60 substantially corresponds to "near the magnetic sensors 71 and 72". The eighth embodiment has the same effect of improving the SN ratio as the first embodiment, and the magnetic sensor module 506 can be made smaller.

（第９実施形態）
第９実施形態の磁気センサモジュール５０９について、側面図及び軸方向断面図を省略する。図１６の平面図において、下側の磁束誘導部材を含め、磁束誘導部材の符号を「５１９、５２９」と記す。図１６に示すように、第９実施形態の磁気センサモジュール５０９では、磁束誘導部材５１９、５２９は、それぞれ、基準線Ｘの一方側と他方側とに分割して形成される。それ以外の点では、第９実施形態は第１実施形態と同様である。第９実施形態では、第１実施形態の効果に加え、中間部６５を省くことで磁束誘導部材の製造歩留まりをより向上させることができる。なお、第９実施形態では、二つの磁気センサ７１、７２、又は四つ以上の偶数個の磁気センサが基準線Ｘに対して対称に配置される構成が前提となる。 (9th Embodiment)
The side view and the axial sectional view of the magnetic sensor module 509 of the ninth embodiment are omitted. In the plan view of FIG. 16, the code of the magnetic flux guiding member including the lower magnetic flux guiding member is described as “519, 529”. As shown in FIG. 16, in the magnetic sensor module 509 of the ninth embodiment, the magnetic flux guiding members 519 and 529 are formed by being divided into one side and the other side of the reference line X, respectively. In other respects, the ninth embodiment is similar to the first embodiment. In the ninth embodiment, in addition to the effect of the first embodiment, the manufacturing yield of the magnetic flux induction member can be further improved by omitting the intermediate portion 65. In the ninth embodiment, it is premised that two magnetic sensors 71, 72, or four or more even magnetic sensors are arranged symmetrically with respect to the reference line X.

（第１０実施形態）
第１０実施形態の磁気センサモジュール５１０について、軸方向断面図は第１実施形態の図４を援用する。図１７（ａ）、図１７（ｂ）に示すように、第１０実施形態の磁気センサモジュール５５０では、磁束誘導部材５６０、５７０は、第１実施形態の磁束誘導部材５１１、５２１に対し、延設部６１、６２が周端部６３、６４近くに設けられている点が異なる。つまり、第１０実施形態では、延接部６１、６２への分岐部位であるＳ部での磁束誘導部材５６０、５７０とヨーク３１、３２との対向面積が中間部６５に比べて小さくなっている。なお、第８実施形態のように延接部が設けられず、磁気センサ７１、７２が本体６０に直接設置されてもよい。 (10th Embodiment)
For the magnetic sensor module 510 of the tenth embodiment, FIG. 4 of the first embodiment is used as an axial sectional view. As shown in FIGS. 17A and 17B, in the magnetic sensor module 550 of the tenth embodiment, the magnetic flux guiding members 560 and 570 extend with respect to the magnetic flux guiding members 511 and 521 of the first embodiment. The difference is that the installation portions 61 and 62 are provided near the peripheral ends 63 and 64. That is, in the tenth embodiment, the facing area between the magnetic flux guiding members 560 and 570 and the yokes 31 and 32 at the S portion, which is the branching portion to the extending portions 61 and 62, is smaller than that at the intermediate portion 65. .. It should be noted that the magnetic sensors 71 and 72 may be directly installed on the main body 60 without providing the extension portion as in the eighth embodiment.

図５（ａ）に対応する図１８に示すように、第１０実施形態では、基準線Ｘからの距離または回転角度と磁気パーミアンスとの相関図において、磁気センサ７１、７２は、周端部６３、６４の近くに配置される。したがって、第１０実施形態の磁束誘導部材５６０、５７０は、本体６０における延接部６１、６２への分岐部位であるＳ部で、基準線Ｘ上の部位に比べ、磁束誘導部材５６０、５７０とヨーク３１、３２との間の磁気パーミアンスが小さくなるように構成されている。また、「磁束誘導部材とヨークとの間の磁気パーミアンスが、相対的半径及び角度位置とは独立に決められる」、すなわち、基準線Ｘからの距離によらず磁気パーミアンスが一定となる比較例の特性とは異なるという点では、第１０実施形態は第１実施形態と共通する。 As shown in FIG. 18 corresponding to FIG. 5 (a), in the tenth embodiment, in the correlation diagram between the distance or rotation angle from the reference line X and the magnetic permeance, the magnetic sensors 71 and 72 have the peripheral end 63. , 64 is located near. Therefore, the magnetic flux guiding members 560 and 570 of the tenth embodiment are the S portions of the main body 60 which are branching portions to the extending portions 61 and 62, and are the magnetic flux guiding members 560 and 570 as compared with the portions on the reference line X. It is configured so that the magnetic permeance between the yokes 31 and 32 is small. Further, "the magnetic permeance between the magnetic flux guiding member and the yoke is determined independently of the relative radius and the angular position", that is, in the comparative example in which the magnetic permeance is constant regardless of the distance from the reference line X. The tenth embodiment is common to the first embodiment in that it differs from the characteristics.

ＳＮ比を向上させるという観点から考えると、第１０実施形態は、第１実施形態のように信号を大きくするという効果は奏しない。ただし、ヨーク３１、３２から誘導された磁束は、破線矢印Ｍに示すように、基準線Ｘ側から二つの磁気センサ７１、７２に向かって分岐する。これにより、伝播される振れ回りノイズを低減させることができる。よって、第１０実施形態においても、磁気センサ７１、７２が検出する磁束のＳＮ比が向上する。なお、このような特性上、第１０実施形態は、第９実施形態と同様に、二つ以上の偶数個の磁気センサが基準線Ｘに対して対称に配置される構成が前提となる。 From the viewpoint of improving the SN ratio, the tenth embodiment does not have the effect of increasing the signal as in the first embodiment. However, the magnetic flux induced from the yokes 31 and 32 branches from the reference line X side toward the two magnetic sensors 71 and 72, as shown by the broken line arrow M. As a result, it is possible to reduce the propagating run-out noise. Therefore, also in the tenth embodiment, the SN ratio of the magnetic flux detected by the magnetic sensors 71 and 72 is improved. Due to such characteristics, the tenth embodiment is premised on a configuration in which two or more even-numbered magnetic sensors are arranged symmetrically with respect to the reference line X, as in the ninth embodiment.

（第１１、第１２実施形態）
磁気センサ７１、７２を二つ備える上記第１〜第１０実施形態に対し、磁気センサモジュールは、一つの磁気センサが基準線Ｘ上に配置される構成としてもよい。ここでは、第１及び第８実施形態に対し磁気センサを一つに変更した実施形態を第１１及び第１２実施形態として説明する。 (11th and 12th embodiments)
In contrast to the first to tenth embodiments including two magnetic sensors 71 and 72, the magnetic sensor module may be configured such that one magnetic sensor is arranged on the reference line X. Here, an embodiment in which the magnetic sensor is changed to one with respect to the first and eighth embodiments will be described as the eleventh and twelfth embodiments.

第１１実施形態の磁気センサモジュール５５１について、側面図及び軸方向断面図を省略する。図１９の平面図において、下側の磁束誘導部材を含め、磁束誘導部材の符号を「５６１、５７１」と記す。図１９に示すように、磁束誘導部材５６１、５７１は、第１実施形態の磁束誘導部材５１１、５２１に対し、一つの磁気センサ７１に対応する一つの延設部６１が形成される点が異なる。 The side view and the axial sectional view of the magnetic sensor module 551 of the eleventh embodiment are omitted. In the plan view of FIG. 19, the reference numerals of the magnetic flux guiding members including the lower magnetic flux guiding member are referred to as “561, 571”. As shown in FIG. 19, the magnetic flux guiding members 561 and 571 differ from the magnetic flux guiding members 511 and 521 of the first embodiment in that one extending portion 61 corresponding to one magnetic sensor 71 is formed. ..

第１２実施形態の磁気センサモジュール５５２について、側面図及び軸方向断面図を省略する。図２０の平面図において、下側の磁束誘導部材を含め、磁束誘導部材の符号を「５６２、５７２」と記す。図２０に示すように、磁束誘導部材５６２、５７２は、第８実施形態の磁束誘導部材５１８，５２８に対し、一つの磁気センサ７１に対応する一つのセンサ保持部６６が形成される点が異なる。 The side view and the axial sectional view of the magnetic sensor module 552 of the twelfth embodiment are omitted. In the plan view of FIG. 20, the reference numerals of the magnetic flux guiding members including the lower magnetic flux guiding member are referred to as “562, 572”. As shown in FIG. 20, the magnetic flux guiding members 562 and 572 differ from the magnetic flux guiding members 518 and 528 of the eighth embodiment in that one sensor holding portion 66 corresponding to one magnetic sensor 71 is formed. ..

このように、二つの磁気センサ７１、７２を備えることを前提とした第９、第１０実施形態を除き、各実施形態の磁気センサモジュールに適用される磁気センサの数は、一つでも二つでもよく、或いは三つ以上であってもよい。具体的には、適用される磁気センサの数に応じて磁束誘導部材の延設部またはセンサ保持部の数が調整されればよい。 As described above, except for the ninth and tenth embodiments on the premise that the two magnetic sensors 71 and 72 are provided, the number of magnetic sensors applied to the magnetic sensor module of each embodiment is at least two. However, it may be three or more. Specifically, the number of extending portions or sensor holding portions of the magnetic flux guiding member may be adjusted according to the number of applied magnetic sensors.

（第１３実施形態）
上記実施形態ではいずれも、磁気センサ７１、７２は、略直方体のＩＣパッケージの広い面が軸に直交するように（いわゆる横向きに）配置されている。これに対し図２１（ａ）、図２１（ｂ）に示す第１３実施形態の磁気センサモジュール５５３は、略直方体のＩＣパッケージの広い面が軸に平行となるように（いわゆる縦向きに）配置される。なお、図２１（ａ）では、周端部６３、６４の符号及びハッチングの記載を省略する。 (13th Embodiment)
In each of the above embodiments, the magnetic sensors 71 and 72 are arranged so that the wide surface of the substantially rectangular parallelepiped IC package is orthogonal to the axis (so-called sideways). On the other hand, the magnetic sensor module 553 of the thirteenth embodiment shown in FIGS. 21 (a) and 21 (b) is arranged so that the wide surface of the IC package of a substantially rectangular parallelepiped is parallel to the axis (so-called vertical orientation). Will be done. In FIG. 21A, the reference numerals and hatching of the peripheral end portions 63 and 64 are omitted.

例えば磁束誘導部材５６３、５７３の本体は、第４実施形態と同様に、平面視にて、ヨーク３１、３２の外形より径方向外側に位置し、且つ、基準線Ｘに対して対称な長方形帯状に形成されており、ヨーク３１、３２と径方向に対向する。上側の磁束誘導部材５６３から下向きに曲がって延びる延設部６１１は磁気センサ７１の径方向外側を保持する。下側の磁束誘導部材５７３から上向きに曲がって延びる延設部６１２は磁気センサ７１の径方向内側を保持する。第１３実施形態は、例えばリード線７３の取り出し方向を軸方向としたい場合等に有効である。なお、第１３実施形態は、磁気センサが一つの構成にも適用可能である。 For example, the main bodies of the magnetic flux guiding members 563 and 573 are located radially outside the outer shape of the yokes 31 and 32 in a plan view and have a rectangular band shape symmetrical with respect to the reference line X, as in the fourth embodiment. It is formed in a radial direction and faces the yokes 31 and 32 in the radial direction. The extension portion 611 that bends downward and extends from the upper magnetic flux guiding member 563 holds the radial outside of the magnetic sensor 71. The extension portion 612 that bends upward and extends from the lower magnetic flux guiding member 573 holds the inside of the magnetic sensor 71 in the radial direction. The thirteenth embodiment is effective, for example, when the lead wire 73 is to be taken out in the axial direction. The thirteenth embodiment can be applied to a configuration in which one magnetic sensor is used.

（第１４実施形態）
上記実施形態ではいずれも、一組のヨークのそれぞれと対向する一組の磁束誘導部材が設けられる。これに対し図２２（ａ）、図２２（ｂ）に示す第１４実施形態の磁気センサモジュール５５４では、磁束誘導部材は、一方のヨーク側にのみ設けられ、他方のヨーク側には設けられない。例えば磁束誘導部材５６４は、一組のヨーク３１、３２の軸方向の間に配置され、上端部が上側のヨーク３１と対向する。磁気センサ７１は、磁束誘導部材５６４の下端部と下側のヨーク３２との間に配置される。すなわち、磁気センサ７１の下面は、磁束誘導部材を介することなく、下側のヨーク３２から直接磁束が伝達される。このように、磁束誘導部材は、必ずしも一組のヨークのそれぞれと対向するように一組設けられなくてもよい。なお、第１４実施形態は、磁気センサが一つの構成にも適用可能である。 (14th Embodiment)
In each of the above embodiments, a set of magnetic flux guiding members facing each of the set of yokes is provided. On the other hand, in the magnetic sensor module 554 of the 14th embodiment shown in FIGS. 22 (a) and 22 (b), the magnetic flux guiding member is provided only on one yoke side and not on the other yoke side. .. For example, the magnetic flux induction member 564 is arranged between the set of yokes 31 and 32 in the axial direction, and the upper end thereof faces the upper yoke 31. The magnetic sensor 71 is arranged between the lower end of the magnetic flux guiding member 564 and the lower yoke 32. That is, the magnetic flux is directly transmitted from the lower yoke 32 to the lower surface of the magnetic sensor 71 without passing through the magnetic flux guiding member. As described above, the magnetic flux guiding members do not necessarily have to be provided in a set so as to face each of the sets of yokes. The 14th embodiment can be applied to a configuration in which the magnetic sensor is one.

［磁束誘導部材の本体長さと振れ回りノイズとの関係］
上記の図５（ｂ）を参照する説明において、磁束誘導部材５１１、５２１に流れ込んだ磁束が中間部６５から周端部６３、６４に向かって漏れ広がるように流れていくことにより、振れ回りノイズが低減することを説明した。次に、振れ回りノイズ低減を最適化する磁束誘導部材の本体長さの条件について、図２３〜図２７を参照して説明する。多極磁石１４の磁極数は、まず１６極の場合を想定する。ここでは、二つの磁気センサ７１、７２を有し、磁束誘導部材５１、５２の本体６０の中間部６５寄りに延設部６１、６２が設けられている形態において、多極磁石１４の磁極数との対応関係に着目し、本体６０の長さの最適条件を検討する。 [Relationship between the main body length of the magnetic flux induction member and the swinging noise]
In the explanation with reference to FIG. 5 (b) above, the magnetic flux flowing into the magnetic flux guiding members 511 and 521 flows so as to leak and spread from the intermediate portion 65 toward the peripheral end portions 63 and 64, thereby causing swing noise. Was explained to be reduced. Next, the condition of the main body length of the magnetic flux induction member for optimizing the reduction of runout noise will be described with reference to FIGS. 23 to 27. First, it is assumed that the number of magnetic poles of the multi-pole magnet 14 is 16 poles. Here, in a form in which two magnetic sensors 71 and 72 are provided and the extension portions 61 and 62 are provided near the intermediate portion 65 of the main body 60 of the magnetic flux guiding members 51 and 52, the number of magnetic poles of the multipolar magnet 14 is provided. Focusing on the correspondence with and, the optimum condition for the length of the main body 60 is examined.

磁束誘導部材５１、５２の本体６０の形状としては、第１実施形態の「長手方向の辺が基準線Ｘに直交する長方形帯状の磁束誘導部材５１１、５２１」、及び、第３実施形態の「同心円弧を対辺とする帯状の磁束誘導部材５１３、５２３」を想定する。いずれも本体６０は基準線Ｘに対して対称に配置される。以下、第１実施形態の磁束誘導部材５１１、５２１の形状を簡単に「直線状」と表し、第３実施形態の磁束誘導部材５１３、５２３の形状を簡単に「円弧状」と表す。 The shapes of the main bodies 60 of the magnetic flux guiding members 51 and 52 include the "rectangular strip-shaped magnetic flux guiding members 511 and 521 whose longitudinal sides are orthogonal to the reference line X" of the first embodiment and the "third embodiment". A band-shaped magnetic flux guiding member 513, 523, whose opposite sides are concentric arcs, is assumed. In each case, the main body 60 is arranged symmetrically with respect to the reference line X. Hereinafter, the shape of the magnetic flux guiding members 511 and 521 of the first embodiment is simply referred to as "straight line", and the shape of the magnetic flux guiding members 513 and 523 of the third embodiment is simply referred to as "arc shape".

図２３に第１実施形態の図３（ａ）に対応する平面図を示す。ここで、ヨーク３１、３２の軸方向の投影において、多極磁石１４の中心軸Ｏと、両周端部６３、６４の任意の点Ｍ１、Ｍ２とを結ぶ二本の直線ＯＭ１、ＯＭ２で区画される周方向の範囲を「磁束放射範囲」と定義する。図２３において、磁束誘導部材５１１、５２１側にある基準線Ｘ上のＳ極を「基準磁極」といい、基準磁極の両側に隣接する二つのＮ極を「基準隣接磁極」という。図２３に示す例では、直線ＯＭ１、ＯＭ２は基準隣接磁極の中心を通っている。したがって、磁束放射範囲に含まれる多極磁石１４の磁極数は２極である。なお、図中、直線ＯＭ１、ＯＭ２について、「ＯＭ１」、「ＯＭ２」の上に横棒を記載して表す。 FIG. 23 shows a plan view corresponding to FIG. 3A of the first embodiment. Here, in the axial projection of the yokes 31 and 32, the central axis O of the multipolar magnet 14 and the two straight lines OM1 and OM2 connecting the arbitrary points M1 and M2 of both peripheral end portions 63 and 64 are defined. The circumferential range is defined as the "magnetic flux emission range". In FIG. 23, the S pole on the reference line X on the magnetic flux guiding member 511 and 521 side is referred to as a “reference magnetic pole”, and the two N poles adjacent to both sides of the reference magnetic pole are referred to as “reference adjacent magnetic poles”. In the example shown in FIG. 23, the straight lines OM1 and OM2 pass through the center of the reference adjacent magnetic pole. Therefore, the number of magnetic poles of the multi-pole magnet 14 included in the magnetic flux radiation range is two poles. In the figure, the straight lines OM1 and OM2 are represented by writing horizontal bars above "OM1" and "OM2".

このように、直線状の磁束誘導部材５１１、５２１の本体６０の基準線Ｘに直交する方向の長さを「磁束放射範囲に含まれる多極磁石の磁極数」（以下、「放射範囲磁極数」）により表現する。そして、シミュレーションにより求めた放射範囲磁極数と振れ回りノイズとの関係を図２４に示す。振れ回りノイズは、放射範囲磁極数が１極から増加するにつれて低減し、約２．０極で最小となり、２極から３極に増加するにしたがって増加する。 In this way, the length of the linear magnetic flux guiding member 511 and 521 in the direction orthogonal to the reference line X of the main body 60 is defined as "the number of magnetic poles of the multipolar magnet included in the magnetic flux radiation range" (hereinafter, "the number of magnetic poles in the radiation range". ”). Then, FIG. 24 shows the relationship between the number of magnetic poles in the radiation range obtained by simulation and the swing noise. The runout noise decreases as the number of magnetic poles in the radiation range increases from 1 pole, becomes minimum at about 2.0 poles, and increases as the number of magnetic poles in the radiation range increases from 2 poles to 3 poles.

そして、振れ回りノイズの許容閾値をＴｈ１に設定した場合、放射範囲磁極数が１．２極〜２．８極の範囲で振れ回りノイズが許容閾値Ｔｈ１を下回る。したがって、磁束誘導部材５１１、５２１の本体６０の長さは、放射範囲磁極数が１．２極〜２．８極の範囲に含まれるように設定されることが好ましい。 When the permissible threshold value of the swing noise is set to Th1, the swing noise falls below the permissible threshold Th1 in the range where the number of magnetic poles in the radiation range is 1.2 poles to 2.8 poles. Therefore, the length of the main body 60 of the magnetic flux guiding members 511 and 521 is preferably set so that the number of magnetic poles in the radiation range is included in the range of 1.2 poles to 2.8 poles.

さらに、振れ回りノイズの許容閾値をＴｈ１よりも低いＴｈ２に設定した場合、放射範囲磁極数が１．５極〜２．５極の範囲で振れ回りノイズが許容閾値Ｔｈ２を下回る。したがって、放射範囲磁極数が１．５極〜２．５極となる範囲では振れ回りノイズの低減効果がより大きくなる。特に放射範囲磁極数が２．０極の場合、振れ回りノイズの低減効果が最大となる。 Further, when the allowable threshold value of the swing noise is set to Th2, which is lower than Th1, the swing noise falls below the allowable threshold Th2 in the range of 1.5 poles to 2.5 poles in the radiation range. Therefore, in the range where the number of magnetic poles in the radiation range is 1.5 to 2.5 poles, the effect of reducing the swing noise becomes larger. In particular, when the number of magnetic poles in the radiation range is 2.0, the effect of reducing swing noise is maximized.

図２５に第３実施形態の図８（ａ）に対応する平面図を示す。用語や図示の注記は、図２３に関する事項を援用する。図２５に示す例では、図２３と同様に、直線ＯＭ１、ＯＭ２は基準隣接磁極の中心を通り、磁束放射範囲に含まれる多極磁石１４の磁極数は２極である。また、円弧状の磁束誘導部材５１３、５２３の本体６０の円周方向の長さを放射範囲磁極数により表現し、シミュレーションにより求めた放射範囲磁極数と振れ回りノイズとの関係を図２６に示す。 FIG. 25 shows a plan view corresponding to FIG. 8A of the third embodiment. The terminology and illustrated notes are incorporated with reference to FIG. 23. In the example shown in FIG. 25, as in FIG. 23, the straight lines OM1 and OM2 pass through the center of the reference adjacent magnetic poles, and the number of magnetic poles of the multipolar magnet 14 included in the magnetic flux radiation range is two poles. Further, the length in the circumferential direction of the main body 60 of the arc-shaped magnetic flux guiding member 513 and 523 is expressed by the number of magnetic poles in the radiation range, and the relationship between the number of magnetic poles in the radiation range obtained by simulation and the swing noise is shown in FIG. ..

振れ回りノイズは、放射範囲磁極数が２．５極以上の範囲で最大となり、放射範囲磁極数が２．５極未満の範囲で、放射範囲磁極数が減少するにつれて単調減少する。そのため、磁束誘導部材５１３、５２３の本体６０の円周方向の長さは、放射範囲磁極数が２．５極未満となるように設定されることが好ましい。 The runout noise is maximized in the range where the number of magnetic poles in the radiation range is 2.5 poles or more, and decreases monotonically as the number of magnetic poles in the radiation range decreases in the range where the number of magnetic poles in the radiation range is less than 2.5 poles. Therefore, the length of the main body 60 of the magnetic flux guiding members 513 and 523 in the circumferential direction is preferably set so that the number of magnetic poles in the radiation range is less than 2.5 poles.

次に図２７（ａ）、（ｂ）に、多極磁石の磁極数が１６極以外の場合について、直線状の磁束誘導部材５１１、５２１でのシミュレーション結果を示す。図２７（ａ）に示すように、多極磁石の磁極数が１２極の場合、破線で示す放射範囲磁極数が約２．０極以上の範囲で振れ回りノイズが低下する。ただし、これは、磁束誘導部材５１１、５２１とヨーク３１、３２との距離が遠くなり、磁石磁束の影響を受けなくなるためである。一方、放射範囲磁極数が１．５極〜２．０極の範囲において、放射範囲磁極数の増加に伴って振れ回りノイズが急激に低下する傾向は、磁極数１６極の場合と一致する。 Next, FIGS. 27 (a) and 27 (b) show simulation results of the linear magnetic flux guiding members 511 and 521 when the number of magnetic poles of the multi-pole magnet is other than 16 poles. As shown in FIG. 27A, when the number of magnetic poles of the multi-pole magnet is 12 poles, the swing noise is reduced in the range where the number of magnetic poles in the radiation range shown by the broken line is about 2.0 poles or more. However, this is because the distance between the magnetic flux guiding members 511 and 521 and the yokes 31 and 32 becomes long, and the magnetic flux is not affected by the magnetic flux. On the other hand, in the range where the number of magnetic poles in the radiation range is 1.5 to 2.0 poles, the tendency that the swing noise sharply decreases as the number of magnetic poles in the radiation range increases is consistent with the case where the number of magnetic poles is 16.

また、図２７（ｂ）に示すように、多極磁石の磁極数が２０極の場合、同等サイズの磁気センサ７１、７２を使用する前提では、放射範囲磁極数が２．５極以下の範囲で磁束誘導部材５１１、５２１の形状が成立しなくなる。ただし、より小さいサイズの磁気センサを使用することを想定すると、破線で示すように放射範囲磁極数が２．０極〜２．５極の範囲において、磁極数１６極の場合と同様に、放射範囲磁極数が２．０極に近づくほど振れ回りノイズが低下すると考えられる。 Further, as shown in FIG. 27 (b), when the number of magnetic poles of the multi-pole magnet is 20 poles, the radiation range is in the range of 2.5 poles or less on the premise that magnetic sensors 71 and 72 of the same size are used. Therefore, the shape of the magnetic flux induction member 511 and 521 is not established. However, assuming that a smaller size magnetic sensor is used, as shown by the broken line, radiation is emitted in the range of 2.0 to 2.5 poles, as in the case of 16 poles. It is considered that the swinging noise decreases as the number of magnetic poles in the range approaches 2.0 poles.

したがって、多極磁石の磁極数は１６極に限らず１２極又は２０極の場合にも、直線状の磁束誘導部材５１１、５２１の本体６０の長さについて、放射範囲磁極数が１．５極〜２．５極の範囲に含まれることが好ましい。 Therefore, the number of magnetic poles of the multi-pole magnet is not limited to 16 poles, and even when it is 12 poles or 20 poles, the number of magnetic poles in the radiation range is 1.5 poles with respect to the length of the main body 60 of the linear magnetic flux guiding member 511 and 521. It is preferably contained in the range of ~ 2.5 poles.

（その他の実施形態）
（ａ）上記第１実施形態では、磁束誘導部材５１１、５２１の本体６０は、平面視にて基準線Ｘに対して対称な長方形帯状に形成されている。また、図３等では「長方形帯状」は、理想的に四辺が直線で構成される形状として図示されている。しかし、長方形帯状とは、全体の外観が略長方形を呈するものであればよい。 (Other embodiments)
(A) In the first embodiment, the main body 60 of the magnetic flux guiding members 511 and 521 is formed in a rectangular band shape symmetrical with respect to the reference line X in a plan view. Further, in FIG. 3 and the like, the "rectangular strip" is shown as a shape ideally composed of straight lines on all four sides. However, the rectangular band shape may be any shape as long as the overall appearance is substantially rectangular.

例えば図２８（ａ）に示す磁気センサモジュール５５５Ａの磁束誘導部材５６５Ａは、本体６０の周端部６３、６４を構成する短辺に基準線Ｘに向かって凹むＶ字カットが形成されている。図２８（ｂ）に示す磁気センサモジュール５５５Ｂの磁束誘導部材５６５Ｂは、本体６０の延接部６１、６２側の長辺がヨーク３１、３２の中心軸Ｏ側の長辺より短い台形状に形成されている。 For example, the magnetic flux induction member 565A of the magnetic sensor module 555A shown in FIG. 28A has a V-shaped cut recessed toward the reference line X on the short sides constituting the peripheral end portions 63 and 64 of the main body 60. The magnetic flux induction member 565B of the magnetic sensor module 555B shown in FIG. 28B is formed in a trapezoidal shape in which the long sides of the extension portions 61 and 62 of the main body 60 are shorter than the long sides of the yokes 31 and 32 on the central axis O side. Has been done.

逆に、図２９（ａ）に示す磁気センサモジュール５５５Ｃの磁束誘導部材５６５Ｃは、本体６０の延接部６１、６２側の長辺がヨーク３１、３２の中心軸Ｏ側の長辺より長い台形状に形成されている。図２９（ｂ）に示す磁気センサモジュール５５５Ｄの磁束誘導部材５６５Ｄは、本体６０のヨーク３１、３２の中心軸Ｏ側の長辺に基準線Ｘに沿って延接部６１、６２側に向かって凹むＶ字カットが形成されている。 On the contrary, in the magnetic flux induction member 565C of the magnetic sensor module 555C shown in FIG. 29 (a), the long side of the extension portions 61 and 62 of the main body 60 is longer than the long side of the yokes 31 and 32 on the central axis O side. It is formed in a shape. The magnetic flux induction member 565D of the magnetic sensor module 555D shown in FIG. 29B is directed toward the extending portions 61 and 62 along the reference line X on the long side of the yokes 31 and 32 of the main body 60 on the central axis O side. A dented V-shaped cut is formed.

また、図３０に示す磁気センサモジュール５５６の磁束誘導部材５６６のように、本体６０の略長方形の長辺が波状に形成されている形状も「長方形帯状」に含まれるものとして解釈する。波の数や凹凸の大きさは図示の例に限らず、波の形も三角歯状や鋸歯状であってもよい。そもそも現実には、肉眼で直線に見える面もミクロ的には波状面であると考えられる。また同様に、上記第３実施形態のような円弧状の本体について、円弧の対辺が波状に形成されてもよい。 Further, a shape in which the long side of the substantially rectangular shape of the main body 60 is formed in a wavy shape as in the magnetic flux guiding member 566 of the magnetic sensor module 556 shown in FIG. 30 is also interpreted as being included in the “rectangular band shape”. The number of waves and the size of the unevenness are not limited to the illustrated examples, and the shape of the waves may be triangular or serrated. In reality, the surface that looks straight to the naked eye is also considered to be a wavy surface microscopically. Similarly, with respect to the arc-shaped main body as in the third embodiment, the opposite side of the arc may be formed in a wavy shape.

（ｂ）また、上記第２、第３実施形態の磁束誘導部材５１２、５１３は本体６０が円弧状に形成されているのに対し、図３１に示す磁気センサモジュール５５７の磁束誘導部材５６７のように、本体６０が多角形の一部をなす形状に形成されてもよい。図３１に示す例では、主の直線部の両端が径方向内側に折れ曲がった三つの直線部から本体６０が構成されているが、他の例ではＶ字状の二つの直線部、又は四つ以上の直線部から本体６０が構成されるようにしてもよい。 (B) Further, in the magnetic flux guiding members 512 and 513 of the second and third embodiments, the main body 60 is formed in an arc shape, whereas the magnetic flux guiding member 567 of the magnetic sensor module 557 shown in FIG. 31 is used. In addition, the main body 60 may be formed in a shape forming a part of a polygon. In the example shown in FIG. 31, the main body 60 is composed of three straight portions in which both ends of the main straight portion are bent inward in the radial direction, but in other examples, two V-shaped straight portions or four The main body 60 may be formed from the above straight line portion.

（ｃ）上記実施形態の図１等では、一組のヨーク３１、３２は一定幅の環状であり、爪３３、３４は、ヨーク３１、３２の内周から軸方向に折れ曲がるように形成されている。これに対し、図３２（ａ）、図３２（ｂ）に示す一組のヨーク３６、３７は、隣接する爪３８、３９同士の間の部分で環の内側が切り欠かれ環の幅が狭くなっている。言い換えれば、爪３８、３９は、環から径内方向へ突出してから軸方向に折れ曲がるように形成されている。これにより、爪３８、３９部分の磁気回路の面積を拡大し、ヨーク３６、３７に集められる磁束を増大させることができる。 (C) In FIG. 1 and the like of the above embodiment, the set of yokes 31 and 32 is an annular shape having a constant width, and the claws 33 and 34 are formed so as to be bent in the axial direction from the inner circumference of the yokes 31 and 32. There is. On the other hand, in the pair of yokes 36 and 37 shown in FIGS. 32 (a) and 32 (b), the inside of the ring is cut out at the portion between the adjacent claws 38 and 39, and the width of the ring is narrow. It has become. In other words, the claws 38 and 39 are formed so as to project inward from the ring and then bend in the axial direction. As a result, the area of the magnetic circuit of the claws 38 and 39 can be expanded, and the magnetic flux collected in the yokes 36 and 37 can be increased.

（ｄ）上記実施形態の磁束誘導部材５１、５２は単一の軟磁性材質で形成されることを前提とし、ヨーク３１、３２との対向面積又はギャップの差によって、部位による磁気パーミアンスを変化させている。この他、式（１）によると、透磁率μの異なる二種以上の材質を貼り合わせて磁束誘導部材を構成することにより、部位による磁気パーミアンスを変化させることも理論的には可能である。 (D) Assuming that the magnetic flux guiding members 51 and 52 of the above embodiment are formed of a single soft magnetic material, the magnetic permeance of each part is changed depending on the area facing the yokes 31 and 32 or the difference in the gap. ing. In addition, according to the equation (1), it is theoretically possible to change the magnetic permeance depending on the part by laminating two or more kinds of materials having different magnetic permeability μ to form a magnetic flux induction member.

（ｅ）上記実施形態では、多極磁石１４が入力軸１１に、一組のヨーク３１、３２が出力軸１２に固定されるが、逆に、多極磁石１４が出力軸１２に、一組のヨーク３１、３２が入力軸１１に固定されてもよい。また、多極磁石１４がトーションバー１３の一端側に、一組のヨーク３１、３２がトーションバー１３の他端側に固定されてもよい。 (E) In the above embodiment, the multi-pole magnet 14 is fixed to the input shaft 11 and a set of yokes 31 and 32 are fixed to the output shaft 12, but conversely, a set of multi-pole magnets 14 is fixed to the output shaft 12. The yokes 31 and 32 of the above may be fixed to the input shaft 11. Further, the multi-pole magnet 14 may be fixed to one end side of the torsion bar 13, and a set of yokes 31 and 32 may be fixed to the other end side of the torsion bar 13.

（ｆ）本発明のトルク検出装置は、電動パワーステアリング装置に限らず、軸トルクを検出する様々な装置に適用することができる。 (F) The torque detection device of the present invention is not limited to the electric power steering device, and can be applied to various devices that detect shaft torque.

以上、本発明はこのような実施形態に限定されるものではなく、その趣旨を逸脱しない範囲において、種々の形態で実施することができる。 As described above, the present invention is not limited to such embodiments, and can be implemented in various embodiments without departing from the spirit of the present invention.

１０ ・・・トルク検出装置、
１１ ・・・入力軸（第１軸）、 １２ ・・・出力軸（第２軸）、
１３ ・・・トーションバー、 １４ ・・・多極磁石、
３１、３２・・・一組のヨーク、
５０（５０１−５０９、５５０−５５７）・・・磁気センサモジュール、
５１（５１１−５１９、５６０−５６７）、５２（５２１−５２９、５７０−５７３）
・・・磁束誘導部材、
６０ ・・・本体、 ６１、６２・・・延設部、 ６３、６４・・・周端部、
７１、７２・・・磁気センサ、 Ｘ ・・・基準線。 10 ... Torque detector,
11 ... Input axis (1st axis), 12 ... Output axis (2nd axis),
13 ・ ・ ・ Torsion bar, 14 ・ ・ ・ Multi-pole magnet,
31, 32 ... A set of yokes,
50 (501-509, 550-557) ... Magnetic sensor module,
51 (511-519, 560-567), 52 (521-529, 570-573)
・ ・ ・ Magnetic flux induction member,
60 ・ ・ ・ Main body, 61, 62 ・ ・ ・ Extension part, 63, 64 ・ ・ ・ Peripheral end part,
71, 72 ... Magnetic sensor, X ... Reference line.

Claims (14)

第１軸（１１）と第２軸（１２）とを同軸上に連結し、前記第１軸と前記第２軸との間に加わるトルクを捩じれ変位に変換するトーションバー（１３）と、
前記第１軸または前記トーションバーの一端側に固定され、Ｎ極とＳ極とが周方向に交互に配置されている多極磁石（１４）と、
軟磁性体で形成され、前記多極磁石の径外側で前記第２軸または前記トーションバーの他端側に固定され、軸方向に互いに対向し、前記多極磁石の磁界内に磁気回路を形成する一組のヨーク（３１、３２）と、
軟磁性体で形成され、少なくとも一方の前記ヨークと本体（６０）が対向し、前記磁気回路の磁束を誘導する一つ以上の磁束誘導部材（５１、５２）と、
前記磁束誘導部材の本体、又は、当該本体から分岐した延接部（６１、６２）に設置され、前記磁束誘導部材により誘導された磁束を検出する一つ以上の磁気センサ（７１、７２）と、
を備え、
前記ヨークの軸方向の投影において、
前記磁気センサが一つの場合、前記磁気センサと前記ヨークの中心軸とを結び、前記磁気センサが複数の場合、複数の前記磁気センサの中間位置と前記ヨークの中心軸とを結ぶ仮想直線を基準線（Ｘ）とし、
前記基準線を挟み、前記磁束誘導部材の本体と前記ヨークとの対向範囲における前記ヨークの周方向両端に対応する部位を前記磁束誘導部材の本体の周端部（６３、６４）と定義すると、
前記磁束誘導部材は、本体における前記磁気センサの設置部位又は前記延接部への分岐部位で、前記周端部に比べ、前記磁束誘導部材と前記ヨークとの間の単位面積当たりの磁気パーミアンスが大きくなるように構成されており、
前記磁束誘導部材の本体は、長手方向の辺が前記基準線に直交する長方形帯状であるトルク検出装置。 A torsion bar (13) that coaxially connects the first axis (11) and the second axis (12) and converts the torque applied between the first axis and the second axis into a torsional displacement.
A multi-pole magnet (14) fixed to one end side of the first axis or the torsion bar and having N poles and S poles alternately arranged in the circumferential direction.
It is formed of a soft magnetic material, is fixed to the second axis or the other end side of the torsion bar on the outer diameter of the multipolar magnet, faces each other in the axial direction, and forms a magnetic circuit in the magnetic field of the multipolar magnet. With a pair of yokes (31, 32)
One or more magnetic flux guiding members (51, 52) formed of a soft magnetic material, in which at least one of the yokes and the main body (60) face each other and induce the magnetic flux of the magnetic circuit.
With one or more magnetic sensors (71, 72) installed in the main body of the magnetic flux guiding member or the extension portions (61, 62) branched from the main body and detecting the magnetic flux induced by the magnetic flux guiding member. ,
With
In the axial projection of the yoke,
When there is one magnetic sensor, the magnetic sensor and the central axis of the yoke are connected, and when there are a plurality of magnetic sensors, a virtual straight line connecting the intermediate positions of the plurality of magnetic sensors and the central axis of the yoke is used as a reference. Line (X)
When the portions corresponding to both ends in the circumferential direction of the yoke in the facing range between the main body of the magnetic flux guiding member and the yoke with the reference line sandwiched are defined as the peripheral ends (63, 64) of the main body of the magnetic flux guiding member.
The magnetic flux guiding member is a portion where the magnetic sensor is installed in the main body or a branching portion to the extending portion, and has a magnetic permeance per unit area between the magnetic flux guiding member and the yoke as compared with the peripheral end portion. It is configured to be large and
The main body of the magnetic flux guiding member is a torque detection device having a rectangular band whose side in the longitudinal direction is orthogonal to the reference line . 前記一組のヨークのそれぞれと対向する一組の前記磁束誘導部材を備える請求項１に記載のトルク検出装置。 The torque detection device according to claim 1 , further comprising a set of the magnetic flux guiding members facing each of the set of yokes. 各前記磁束誘導部材は、本体から前記ヨークの径方向外側に延びる前記延接部を有し、
前記磁気センサは、一組の前記磁束誘導部材の前記延接部の間に配置される請求項２に記載のトルク検出装置。 Each of the magnetic flux guiding members has the extending portion extending radially outward from the main body of the yoke.
The torque detection device according to claim 2 , wherein the magnetic sensor is arranged between the extension portions of the set of the magnetic flux induction members. 一組の前記磁束誘導部材の前記延接部は、前記磁気センサが間に配置される部分においてギャップが最小となるように、前記ヨークの軸方向に段差を有している請求項３に記載のトルク検出装置。 The third aspect of the present invention, wherein the extending portion of the set of the magnetic flux guiding members has a step in the axial direction of the yoke so that a gap is minimized in a portion where the magnetic sensor is arranged between them. Torque detector. 前記磁束誘導部材の本体は、前記基準線に対して対称に配置され、
前記ヨークの軸方向の投影において、
前記多極磁石の中心軸と、前記磁束誘導部材の本体の両側の前記周端部とを結ぶ二本の直線で区画される周方向範囲を磁束放射範囲と定義すると、前記磁束放射範囲に含まれる前記多極磁石の磁極数は１．２〜２．８極の範囲に含まれる請求項３または４に記載のトルク検出装置。 The main body of the magnetic flux induction member is arranged symmetrically with respect to the reference line.
In the axial projection of the yoke,
The central axis of the front Symbol multipolar magnet, the two circumferential-direction range which is defined by a straight line that connects with the peripheral edge portions on both sides of the body of the flux guide elements Defining flux radiation range, the flux irradiation range The torque detection device according to claim 3 or 4 , wherein the number of magnetic fluxes of the multi-pole magnet included is in the range of 1.2 to 2.8 poles. 前記磁束誘導部材の本体における前記磁気センサの設置部位又は前記延接部への分岐部位から前記ヨークの中心軸までの距離は、前記周端部から前記ヨークの中心軸までの距離よりも短い請求項１〜５のいずれか一項に記載のトルク検出装置。 The distance from the installation portion of the magnetic sensor or the branch portion to the extension portion in the main body of the magnetic flux induction member to the central axis of the yoke is shorter than the distance from the peripheral end portion to the central axis of the yoke. Item 6. The torque detection device according to any one of Items 1 to 5 . 前記ヨークの軸方向の投影において、
前記磁束誘導部材は、前記ヨークの中心軸側の辺が前記基準線に直交する直線である請求項６に記載のトルク検出装置。 In the axial projection of the yoke,
The torque detecting device according to claim 6 , wherein the magnetic flux guiding member is a straight line whose side on the central axis side of the yoke is orthogonal to the reference line. 第１軸（１１）と第２軸（１２）とを同軸上に連結し、前記第１軸と前記第２軸との間に加わるトルクを捩じれ変位に変換するトーションバー（１３）と、
前記第１軸または前記トーションバーの一端側に固定され、Ｎ極とＳ極とが周方向に交互に配置されている多極磁石（１４）と、
軟磁性体で形成され、前記多極磁石の径外側で前記第２軸または前記トーションバーの他端側に固定され、軸方向に互いに対向し、前記多極磁石の磁界内に磁気回路を形成する一組のヨーク（３１、３２）と、
軟磁性体で形成され、前記一組のヨークとそれぞれ本体（６０）が対向し、前記磁気回路の磁束を誘導する一組の磁束誘導部材（５１、５２）と、
前記一組の磁束誘導部材の本体から分岐し前記本体から前記ヨークの径方向外側に延びる延接部（６１、６２）の間に設置され、前記磁束誘導部材により誘導された磁束を検出する一つ以上の磁気センサ（７１、７２）と、
を備え、
前記ヨークの軸方向の投影において、
前記磁気センサが一つの場合、前記磁気センサと前記ヨークの中心軸とを結び、前記磁気センサが複数の場合、複数の前記磁気センサの中間位置と前記ヨークの中心軸とを結ぶ仮想直線を基準線（Ｘ）とし、
前記基準線を挟み、前記磁束誘導部材の本体と前記ヨークとの対向範囲における前記ヨークの周方向両端に対応する部位を前記磁束誘導部材の本体の周端部（６３、６４）と定義すると、
前記磁束誘導部材は、本体における前記磁気センサの設置部位又は前記延接部への分岐部位で、前記周端部に比べ、前記磁束誘導部材と前記ヨークとの間の単位面積当たりの磁気パーミアンスが大きくなるように構成されており、
前記ヨークの軸方向の投影において、
前記磁束誘導部材の本体は、前記基準線に対して対称に配置され、前記ヨークに沿って周方向に延びる同心円弧を対辺とする帯状であり、
前記多極磁石の中心軸と、前記磁束誘導部材の本体の両側の前記周端部とを結ぶ二本の直線で区画される周方向範囲を磁束放射範囲と定義すると、前記磁束放射範囲に含まれる前記多極磁石の磁極数は２．５極未満であるトルク検出装置。 A torsion bar (13) that coaxially connects the first axis (11) and the second axis (12) and converts the torque applied between the first axis and the second axis into a torsional displacement.
A multi-pole magnet (14) fixed to one end side of the first axis or the torsion bar and having N poles and S poles alternately arranged in the circumferential direction.
It is formed of a soft magnetic material, is fixed to the second axis or the other end side of the torsion bar on the outer diameter of the multipolar magnet, faces each other in the axial direction, and forms a magnetic circuit in the magnetic field of the multipolar magnet. With a pair of yokes (31, 32)
Is formed of a soft magnetic member, a pre-Symbol pair of yokes respectively body (60) is opposed, a pair of magnetic flux induction member for inducing the magnetic flux of the magnetic circuit (51, 52),
Installed between the Nobese' part from the body or we branched the body of a set of flux guide elements extending radially outward of the yoke (61, 62), detecting the induced magnetic flux by the flux guide elements With one or more magnetic sensors (71, 72)
With
In the axial projection of the yoke,
When there is one magnetic sensor, the magnetic sensor and the central axis of the yoke are connected, and when there are a plurality of magnetic sensors, a virtual straight line connecting the intermediate positions of the plurality of magnetic sensors and the central axis of the yoke is used as a reference. Line (X)
When the portions corresponding to both ends in the circumferential direction of the yoke in the facing range between the main body of the magnetic flux guiding member and the yoke with the reference line sandwiched are defined as the peripheral ends (63, 64) of the main body of the magnetic flux guiding member.
The magnetic flux guiding member is a portion where the magnetic sensor is installed in the main body or a branching portion to the extending portion, and has a magnetic permeance per unit area between the magnetic flux guiding member and the yoke as compared with the peripheral end portion. It is configured to be large and
In the axial projection of the yoke,
The main body of the magnetic flux guiding member is arranged symmetrically with respect to the reference line, and has a band shape having concentric arcs extending in the circumferential direction along the yoke as opposite sides.
The magnetic flux radiation range includes the circumferential range defined by two straight lines connecting the central axis of the multipolar magnet and the peripheral ends on both sides of the main body of the magnetic flux induction member. A torque detection device in which the number of magnetic fluxes of the multi-pole magnet is less than 2.5 poles . 一組の前記磁束誘導部材の前記延接部は、前記磁気センサが間に配置される部分においてギャップが最小となるように、前記ヨークの軸方向に段差を有している請求項８に記載のトルク検出装置。 The eighth aspect of the present invention, wherein the extending portion of the set of the magnetic flux guiding members has a step in the axial direction of the yoke so that a gap is minimized in a portion where the magnetic sensor is arranged between them. Torque detector. 前記基準線に対して対称に配置される二つの前記磁気センサを備える請求項１〜９のいずれか一項に記載のトルク検出装置。 The torque detection device according to any one of claims 1 to 9 , further comprising the two magnetic sensors arranged symmetrically with respect to the reference line. 前記磁束誘導部材は、少なくとも前記ヨークの軸方向において、前記ヨークと対向する請求項１〜１０のいずれか一項に記載のトルク検出装置。 The torque detecting device according to any one of claims 1 to 10 , wherein the magnetic flux guiding member faces the yoke at least in the axial direction of the yoke. 前記磁束誘導部材は、少なくとも前記ヨークの径方向において、前記ヨークと対向する請求項１〜１１のいずれか一項に記載のトルク検出装置。 The torque detecting device according to any one of claims 1 to 11 , wherein the magnetic flux guiding member faces the yoke at least in the radial direction of the yoke. 請求項１〜１２のいずれか一項に記載のトルク検出装置に用いられ、
前記磁束誘導部材及び前記磁気センサが一体に構成されている磁気センサモジュール。 Used in the torque detection device according to any one of claims 1 to 12,
A magnetic sensor module in which the magnetic flux guiding member and the magnetic sensor are integrally configured. 第１軸（１１）と第２軸（１２）とを同軸上に連結し、前記第１軸と前記第２軸との間に加わるトルクを捩じれ変位に変換するトーションバー（１３）と、
前記第１軸または前記トーションバーの一端側に固定され、Ｎ極とＳ極とが周方向に交互に配置されている多極磁石（１４）と、
軟磁性体で形成され、前記多極磁石の径外側で前記第２軸または前記トーションバーの他端側に固定され、軸方向に互いに対向し、前記多極磁石の磁界内に磁気回路を形成する一組のヨーク（３１、３２）と、
軟磁性体で形成され、少なくとも一方の前記ヨークと本体（６０）が対向し、前記磁気回路の磁束を誘導する一つ以上の磁束誘導部材（５６０、５７０）と、
前記磁束誘導部材の本体、又は、当該本体から分岐した延接部（６１、６２）に設置され、前記磁束誘導部材により誘導された磁束を検出する二つの磁気センサ（７１、７２）と、
を備え、
前記ヨークの軸方向の投影において、
前記磁気センサが一つの場合、前記磁気センサと前記ヨークの中心軸とを結び、前記磁気センサが複数の場合、複数の前記磁気センサの中間位置と前記ヨークの中心軸とを結ぶ仮想直線を基準線（Ｘ）とすると、
二つの前記磁気センサは、前記基準線に対して対称に配置されており、
前記磁束誘導部材は、本体における前記磁気センサの設置部位又は前記延接部への分岐部位で、前記基準線上の部位に比べ、前記磁束誘導部材と前記ヨークとの間の単位面積当たりの磁気パーミアンスが小さくなるように構成されており、
前記磁束誘導部材の本体は、長手方向の辺が前記基準線に直交する長方形帯状であり、
前記磁束誘導部材は、前記ヨークの中心軸側の辺が前記基準線に直交する直線であるトルク検出装置。 A torsion bar (13) that coaxially connects the first axis (11) and the second axis (12) and converts the torque applied between the first axis and the second axis into a torsional displacement.
A multi-pole magnet (14) fixed to one end side of the first axis or the torsion bar and having N poles and S poles alternately arranged in the circumferential direction.
It is formed of a soft magnetic material, is fixed to the second axis or the other end side of the torsion bar on the outer diameter of the multipolar magnet, faces each other in the axial direction, and forms a magnetic circuit in the magnetic field of the multipolar magnet. With a pair of yokes (31, 32)
One or more magnetic flux guiding members (560, 570) formed of a soft magnetic material, in which at least one yoke and the main body (60) face each other and induce the magnetic flux of the magnetic circuit.
Two magnetic sensors (71, 72) installed on the main body of the magnetic flux guiding member or the extension portions (61, 62) branched from the main body and detecting the magnetic flux induced by the magnetic flux guiding member, and
With
In the axial projection of the yoke,
When there is one magnetic sensor, the magnetic sensor and the central axis of the yoke are connected, and when there are a plurality of magnetic sensors, a virtual straight line connecting the intermediate positions of the plurality of magnetic sensors and the central axis of the yoke is used as a reference. If it is a line (X),
Two of said magnetic sensors are disposed symmetrically with respect to the reference line,
The magnetic flux guiding member is a magnetic permeance per unit area between the magnetic flux guiding member and the yoke at a portion where the magnetic sensor is installed or a branch portion to the extending portion in the main body, as compared with a portion on the reference line. Is configured to be smaller ,
The main body of the magnetic flux guiding member has a rectangular band shape whose sides in the longitudinal direction are orthogonal to the reference line.
The magnetic flux guiding member is a torque detection device in which a side of the yoke on the central axis side is a straight line orthogonal to the reference line .
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