JP6783484B1 - solenoid valve - Google Patents

solenoid valve Download PDF

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Publication number
JP6783484B1
JP6783484B1 JP2020040356A JP2020040356A JP6783484B1 JP 6783484 B1 JP6783484 B1 JP 6783484B1 JP 2020040356 A JP2020040356 A JP 2020040356A JP 2020040356 A JP2020040356 A JP 2020040356A JP 6783484 B1 JP6783484 B1 JP 6783484B1
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Prior art keywords
valve
solenoid valve
solenoid
substrate
unit
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JP2021139487A (en
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文明 青山
文明 青山
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Kaneko Sangyo Co Ltd
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Kaneko Sangyo Co Ltd
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Priority to JP2020040356A priority Critical patent/JP6783484B1/en
Priority to JP2020164563A priority patent/JP7440006B2/en
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Publication of JP6783484B1 publication Critical patent/JP6783484B1/en
Priority to CN202180006785.1A priority patent/CN114787547B/en
Priority to KR1020227003340A priority patent/KR102590655B1/en
Priority to PCT/JP2021/007034 priority patent/WO2021182115A1/en
Publication of JP2021139487A publication Critical patent/JP2021139487A/en
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/16—Actuating devices; Operating means; Releasing devices actuated by fluid with a mechanism, other than pulling-or pushing-rod, between fluid motor and closure member
    • F16K31/163—Actuating devices; Operating means; Releasing devices actuated by fluid with a mechanism, other than pulling-or pushing-rod, between fluid motor and closure member the fluid acting on a piston
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
    • F16K37/0025—Electrical or magnetic means
    • F16K37/0041—Electrical or magnetic means for measuring valve parameters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
    • F16K37/0025—Electrical or magnetic means
    • F16K37/005—Electrical or magnetic means for measuring fluid parameters

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Indication Of The Valve Opening Or Closing Status (AREA)
  • Magnetically Actuated Valves (AREA)
  • Fluid-Driven Valves (AREA)

Abstract

【課題】電磁弁単体で電磁弁の各部の状態を監視するとともに、装置構成の簡略化を図ることができる電磁弁及び流体圧駆動弁を提供する。【解決手段】電磁弁１は、駆動流体が流れる流路を切り替えるスプール部２と、通電状態に応じてスプール部２を変位させるソレノイド部３と、電磁弁１の各部の状態を取得する複数のセンサ４と、複数のセンサ４のうち少なくとも１つが載置されるとともに、電磁弁１を制御する制御部を有する基板５と、スプール部２、ソレノイド部３、複数のセンサ４及び基板５を収容する収容部６とを備える。これにより、収容部６内に、電磁弁１の基本機能だけでなく各部の状態を監視する監視機能についても集約されるので、電磁弁１単体で電磁弁１の各部の状態を監視するとともに、装置構成の簡略化を図ることができる。【選択図】 図２PROBLEM TO BE SOLVED: To provide a solenoid valve and a fluid pressure drive valve capable of monitoring the state of each part of the solenoid valve by a single solenoid valve and simplifying the device configuration. SOLUTION: A solenoid valve 1 has a spool unit 2 that switches a flow path through which a driving fluid flows, a solenoid unit 3 that displaces the spool unit 2 according to an energized state, and a plurality of solenoid valves 1 that acquire the states of each unit. A sensor 4 and at least one of a plurality of sensors 4 are mounted, and a substrate 5 having a control unit for controlling a solenoid valve 1 and a spool unit 2, a solenoid unit 3, a plurality of sensors 4 and a substrate 5 are accommodated. A housing unit 6 is provided. As a result, not only the basic function of the solenoid valve 1 but also the monitoring function for monitoring the state of each part is integrated in the accommodating part 6, so that the state of each part of the solenoid valve 1 can be monitored by the solenoid valve 1 alone. The device configuration can be simplified. [Selection diagram] Fig. 2

Description

本発明は、電磁弁及び流体圧駆動弁に関する。 The present invention relates to a solenoid valve and a fluid pressure driven valve.

従来、電磁弁により駆動流体を制御して主弁を開閉する流体圧駆動弁が知られている。
例えば、特許文献１には、プラント設備の配管に使用される流体圧駆動弁として、設備に
異常が発生したような緊急時に、電磁弁により駆動流体を制御してボールバルブ（主弁）
を閉じることにより、配管を流れる流体を遮断する緊急遮断弁装置が開示されている。 Conventionally, a fluid pressure drive valve that opens and closes a main valve by controlling a drive fluid with a solenoid valve is known.
For example, Patent Document 1 describes a fluid pressure drive valve used for piping of plant equipment, which is a ball valve (main valve) in which the drive fluid is controlled by a solenoid valve in an emergency such as when an abnormality occurs in the equipment.
An emergency shutoff valve device that shuts off the fluid flowing through the pipe by closing the pipe is disclosed.

特開２００９−９７５３９号公報JP-A-2009-97539

特許文献１に開示された緊急遮断弁装置は、プラント設備の制御室に設置されて、電磁
弁の通電操作を行うロジックコントローラと、弁軸の回動動作、すなわち、ボールバルブ
の開閉動作を検知して、ロジックコントローラにフィードバックし、ボールバルブの作動
確認テストを行うリミットスイッチとを備える。 The emergency shutoff valve device disclosed in Patent Document 1 is installed in a control room of a plant facility and detects a logic controller for energizing a solenoid valve and a valve shaft rotation operation, that is, a ball valve opening / closing operation. Then, it is provided with a limit switch that feeds back to the logic controller and performs an operation confirmation test of the ball valve.

しかしながら、特許文献１では、開閉動作を伴う作動確認テストにおいて、リミットス
イッチを用いて緊急遮断弁装置の状態を監視することしか開示されておらず、作動確認テ
ストにおいて、電磁弁の各部の状態を監視することができないという問題点があった。ま
た、特許文献１では、開閉動作を伴う作動確認テストを行う以外に、電磁弁及び緊急遮断
弁装置の異常を診断する手法が開示されておらず、電磁弁及び緊急遮断弁装置の異常の兆
候を事前に把握することを目的として予兆保全を行うために必要なデータを取得すること
ができないという問題点があった。さらに、電磁弁の各部に対して各種のセンサを外付け
で配置することは可能であるが、その場合、装置構成が複雑かつ煩雑になってしまうとい
う問題点があった。 However, Patent Document 1 only discloses that the state of the emergency shutoff valve device is monitored by using a limit switch in the operation confirmation test involving the opening / closing operation, and in the operation confirmation test, the state of each part of the solenoid valve is checked. There was a problem that it could not be monitored. Further, Patent Document 1 does not disclose a method for diagnosing an abnormality of the solenoid valve and the emergency shutoff valve device other than performing an operation confirmation test accompanied by an opening / closing operation, and is a sign of an abnormality of the solenoid valve and the emergency shutoff valve device. There was a problem that it was not possible to acquire the data necessary for performing predictive maintenance for the purpose of grasping in advance. Further, although it is possible to externally arrange various sensors for each part of the solenoid valve, in that case, there is a problem that the device configuration becomes complicated and complicated.

本発明は、このような事情に鑑みてなされたものであって、電磁弁単体で電磁弁の各部
の状態を監視するとともに、装置構成の簡略化を図ることができる電磁弁及び流体圧駆動
弁を提供することを目的とする。 The present invention has been made in view of such circumstances, and a solenoid valve and a fluid pressure drive valve capable of monitoring the state of each part of the solenoid valve by the solenoid valve alone and simplifying the device configuration can be achieved. The purpose is to provide.

本発明は、上記課題を解決するものであって、本発明の一実施形態に係る電磁弁は、
駆動流体が流れる流路を切り替えるスプール部と、
通電状態に応じて前記スプール部を変位させるソレノイド部と、
前記電磁弁の各部の状態を取得する複数のセンサと、
前記複数のセンサのうち少なくとも１つが載置されるとともに、前記電磁弁を制御する
制御部を有する基板と、
前記スプール部、前記ソレノイド部、前記複数のセンサ及び前記基板を収容する収容部
とを備える、 The present invention solves the above problems, and the solenoid valve according to the embodiment of the present invention is
A spool that switches the flow path through which the drive fluid flows, and
A solenoid part that displaces the spool part according to the energized state, and
A plurality of sensors that acquire the state of each part of the solenoid valve, and
A substrate on which at least one of the plurality of sensors is mounted and a control unit for controlling the solenoid valve, and
The spool portion, the solenoid portion, the plurality of sensors, and an accommodating portion for accommodating the substrate are provided.

また、本発明の一実施形態に係る流体圧駆動弁は、
上記電磁弁と、
主弁と、
前記主弁に連結された弁軸を前記駆動流体の流体圧に応じて駆動させることで前記主弁
の開閉操作を行う駆動装置とを備え、
前記電磁弁は、
前記駆動装置に対して前記駆動流体の給排を制御する機能を有する。 Further, the fluid pressure drive valve according to the embodiment of the present invention is
With the above solenoid valve
Main valve and
A drive device for opening and closing the main valve by driving the valve shaft connected to the main valve according to the fluid pressure of the driving fluid is provided.
The solenoid valve is
It has a function of controlling the supply and discharge of the driving fluid to the driving device.

本発明の一実施形態に係る電磁弁及び流体圧駆動弁によれば、収容部が、スプール部、
ソレノイド部、電磁弁の各部の状態を取得する複数のセンサ、及び、複数のセンサのうち
少なくとも１つが載置されるとともに電磁弁を制御する制御部を有する基板を収容する。 According to the solenoid valve and the fluid pressure drive valve according to the embodiment of the present invention, the accommodating portion is a spool portion.
It houses a board having a solenoid unit, a plurality of sensors for acquiring the state of each part of the solenoid valve, and a control unit for controlling the solenoid valve while at least one of the plurality of sensors is mounted.

そのため、収容部には、スプール部及びソレノイド部が収容されるとともに、その収容
部内にて、複数のセンサが電磁弁の各部の状態を取得するとともに、それらのうちの少な
くとも１つが、制御部を有する基板に載置される。これにより、収容部内に、電磁弁の基
本機能だけでなく各部の状態を監視する監視機能についても集約されるので、電磁弁単体
で電磁弁の各部の状態を監視するとともに、装置構成の簡略化を図ることができる。 Therefore, the spool portion and the solenoid portion are accommodated in the accommodating portion, and a plurality of sensors acquire the state of each portion of the solenoid valve in the accommodating portion, and at least one of them controls the control unit. It is placed on the substrate to be held. As a result, not only the basic functions of the solenoid valve but also the monitoring function for monitoring the state of each part are integrated in the accommodating part, so that the state of each part of the solenoid valve can be monitored by the solenoid valve alone and the device configuration can be simplified. Can be planned.

本発明の実施形態に係る流体圧駆動弁１０の一例を示す断面図である。It is sectional drawing which shows an example of the fluid pressure drive valve 10 which concerns on embodiment of this invention. 本発明の実施形態に係る電磁弁１の一例を示す断面図である。It is sectional drawing which shows an example of the solenoid valve 1 which concerns on embodiment of this invention. 本発明の実施形態に係る電磁弁１の一例を示すブロック図である。It is a block diagram which shows an example of the solenoid valve 1 which concerns on embodiment of this invention. 本発明の実施形態に係る基板５に対する複数のセンサ４の載置例を示す模式図である。It is a schematic diagram which shows the mounting example of a plurality of sensors 4 on the substrate 5 which concerns on embodiment of this invention.

以下、本発明の一実施形態について添付図面を参照しつつ説明する。 Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings.

（実施形態）
図１は、本発明の実施形態に係る流体圧駆動弁１０の一例を示す断面図である。 (Embodiment)
FIG. 1 is a cross-sectional view showing an example of a fluid pressure drive valve 10 according to an embodiment of the present invention.

流体圧駆動弁１０は、配管１００の途中に配置される主弁１１と、主弁１１に連結され
た弁軸１３を駆動流体の流体圧に応じて駆動させることで主弁１１の開閉操作を行う駆動
装置１２と、駆動装置１２に対して駆動流体の給排を制御する機能を有する電磁弁１とを
備える。 The fluid pressure drive valve 10 opens and closes the main valve 11 by driving the main valve 11 arranged in the middle of the pipe 100 and the valve shaft 13 connected to the main valve 11 according to the fluid pressure of the driving fluid. The drive device 12 is provided, and the solenoid valve 1 having a function of controlling the supply and discharge of the drive fluid to the drive device 12 is provided.

流体圧駆動弁１０は、例えば、プラント設備において各種のガスや石油等が流れる配管
１００に設置され、プラント設備に異常が発生したような緊急停止時に、配管１００の流
れを遮断するための緊急遮断弁として用いられる。なお、流体圧駆動弁１０の設置場所や
用途は、上記の例に限られない。 The fluid pressure drive valve 10 is installed in, for example, a pipe 100 through which various gases, oil, etc. flow in the plant equipment, and is an emergency shutoff for shutting off the flow of the pipe 100 in the event of an emergency stop such as when an abnormality occurs in the plant equipment. Used as a valve. The installation location and application of the fluid pressure drive valve 10 are not limited to the above examples.

流体圧駆動弁１０には、駆動流体の一例として、空気供給源１４から空気（エアー）Ａ
が供給されるものであり、空気供給源１４からの空気Ａは、第１の空気配管１４０を介し
て電磁弁１に供給され、さらに、第２の空気配管１４１を介して駆動装置１２に供給され
る。また、流体圧駆動弁１０には、外部装置１５及び電磁弁１の間で各種のデータを送受
信するための通信ケーブル１５０と、外部電源１６から電磁弁１に電力を供給するための
電力ケーブル１６０とが接続される。なお、駆動流体は、上記の空気Ａに限られず、他の
気体でもよいし、液体（例えば、油）でもよい。 In the fluid pressure drive valve 10, as an example of the drive fluid, air (air) A from the air supply source 14
Is supplied, and the air A from the air supply source 14 is supplied to the solenoid valve 1 via the first air pipe 140, and further to the drive device 12 via the second air pipe 141. Will be done. Further, the fluid pressure drive valve 10 includes a communication cable 150 for transmitting and receiving various data between the external device 15 and the solenoid valve 1, and a power cable 160 for supplying electric power from the external power supply 16 to the solenoid valve 1. And are connected. The driving fluid is not limited to the above-mentioned air A, and may be another gas or a liquid (for example, oil).

外部装置１５は、例えば、プラント管理用のコンピュータ（ローカルサーバ及びクラウ
ドサーバを含む。）、保守点検者が使用する診断用コンピュータ、又は、ＵＳＢメモリや
外付けＨＤＤ等の外部記憶部で構成されている。なお、外部装置１５及び電磁弁１の間の
通信は無線通信でもよい。 The external device 15 is composed of, for example, a computer for plant management (including a local server and a cloud server), a diagnostic computer used by a maintenance inspector, or an external storage unit such as a USB memory or an external HDD. There is. The communication between the external device 15 and the solenoid valve 1 may be wireless communication.

本実施形態では、流体圧駆動弁１０は、エアーレスクローズ方式を採用したものである
。したがって、定常運転時は、空気供給源１４から電磁弁１を介して駆動装置１２に空気
Ａ（給気）を供給することで、主弁１１が全開操作され、緊急停止時や試験運転時は、駆
動装置１２から電磁弁１を介して空気Ａ（排気）を排出することで、主弁１１が全閉操作
される。なお、流体圧駆動弁１０は、エアーレスオープン方式を採用したものでもよく、
その場合には、駆動装置１２に空気Ａを供給することで全開操作され、駆動装置１２から
空気Ａを排出することで主弁１１を全閉操作されてもよい。 In the present embodiment, the fluid pressure drive valve 10 adopts an airless closing method. Therefore, during steady operation, the main valve 11 is fully opened by supplying air A (air supply) from the air supply source 14 to the drive device 12 via the solenoid valve 1, and during emergency stop or test operation. The main valve 11 is fully closed by discharging air A (exhaust) from the drive device 12 via the solenoid valve 1. The fluid pressure drive valve 10 may be an airless open system.
In that case, the main valve 11 may be fully closed by supplying air A to the drive device 12 to fully open the drive device 12 and discharging air A from the drive device 12.

主弁１１は、例えば、ボールバルブと呼ばれる弁で構成されている。主弁１１は、その
構成例として、配管１００の途中に配置される弁箱１１０と、弁箱１１０内に回転可能に
設けられたボール状の弁体１１１とを備え、弁体１１１の上部には、弁軸１３の第１の端
部１３０Ａが連結されている。弁軸１３が０度から９０度に回転駆動されることに応じて
弁箱１１０内で弁体１１１が回転し、主弁１１の全開状態（図１に示す状態）と全閉状態
が切り替えられる。なお、主弁１１として用いられる弁は、ボールバルブに限られず、例
えば、バタフライバルブ等の他の形式でもよい。 The main valve 11 is composed of, for example, a valve called a ball valve. As a configuration example thereof, the main valve 11 includes a valve box 110 arranged in the middle of the pipe 100 and a ball-shaped valve body 111 rotatably provided in the valve box 110, and is provided on the upper portion of the valve body 111. Is connected to the first end 130A of the valve shaft 13. The valve body 111 rotates in the valve box 110 as the valve shaft 13 is rotationally driven from 0 degrees to 90 degrees, and the main valve 11 can be switched between a fully open state (state shown in FIG. 1) and a fully closed state. .. The valve used as the main valve 11 is not limited to the ball valve, and may be another type such as a butterfly valve.

駆動装置１２は、例えば、主弁１１と電磁弁１との間に配置されるとともに、単作動式
のエアシリンダ機構として構成されている。駆動装置１２は、その構成例として、円筒状
のシリンダ１２０と、シリンダ内に往復直線移動可能に設けられ、ピストンロッド１２１
を介して連結された一対のピストン１２２Ａ、１２２Ｂと、第１のピストン１２２Ａ側に
設けられたコイルばね１２３と、第２のピストン１２２Ｂ側に形成された空気給排口１２
４と、シリンダ１２０を径方向に沿って貫通するように配置された弁軸１３とピストンロ
ッド１２１とが直交する部分に設けられた伝達機構１２５とを備える。なお、駆動装置１
２は、単作動式に限られず、例えば、複作動式等の他の形式で構成されていてもよい。 The drive device 12 is arranged between the main valve 11 and the solenoid valve 1, for example, and is configured as a single-actuated air cylinder mechanism. As a configuration example thereof, the drive device 12 is provided with a cylindrical cylinder 120 and a piston rod 121 that is reciprocally linearly movable in the cylinder.
A pair of pistons 122A and 122B connected via the above, a coil spring 123 provided on the first piston 122A side, and an air supply / discharge port 12 formed on the second piston 122B side.
4 and a transmission mechanism 125 provided at a portion where the valve shaft 13 arranged so as to penetrate the cylinder 120 along the radial direction and the piston rod 121 are orthogonal to each other are provided. The drive device 1
2 is not limited to the single-acting type, and may be configured in another form such as a double-acting type.

第１のピストン１２２Ａは、コイルばね１２３により主弁１１を閉じる方向に付勢され
る。第２のピストン１２２Ｂは、空気給排口１２４から供給された空気Ａ（給気）により
コイルばね１２３の付勢力に抗して主弁１１を開く方向に押圧される。伝達機構１２５は
、例えば、ラックアンドピニオン機構、リンク機構、カム機構等で構成されており、ピス
トンロッド１２１の往復直線運動を回転運動に変換して弁軸１３に伝達する。 The first piston 122A is urged by the coil spring 123 in the direction of closing the main valve 11. The second piston 122B is pressed by the air A (air supply) supplied from the air supply / exhaust port 124 in the direction of opening the main valve 11 against the urging force of the coil spring 123. The transmission mechanism 125 is composed of, for example, a rack and pinion mechanism, a link mechanism, a cam mechanism, etc., and converts the reciprocating linear motion of the piston rod 121 into a rotary motion and transmits it to the valve shaft 13.

弁軸１３は、シャフト状に形成されており、回動可能な状態で駆動装置１２を貫通する
ようにして配置される。弁軸１３の第１の端部１３０Ａは、主弁１１に連結されるととも
に、弁軸１３の第２の端部１３０Ｂは、電磁弁１により軸支される。なお、弁軸１３は、
複数のシャフトが、例えば、カップリング等により連結されたものでもよい。 The valve shaft 13 is formed in a shaft shape and is arranged so as to penetrate the drive device 12 in a rotatable state. The first end 130A of the valve shaft 13 is connected to the main valve 11, and the second end 130B of the valve shaft 13 is pivotally supported by the solenoid valve 1. The valve shaft 13 is
A plurality of shafts may be connected by, for example, a coupling.

電磁弁１は、駆動装置１２に対して空気Ａの給排を制御する機能を有し、例えば、２ポ
ジションでノーマルクローズタイプ（通電時「開」、非通電時「閉」）の三方電磁弁とし
て構成されている。電磁弁１は、屋内型又は防爆型の電磁弁１のハウジングとして機能す
る収容部６の内部に、空気Ａが流れる流路を切り替えるスプール部２と、通電状態（通電
時又は非通電時）に応じてスプール部２を変位させるソレノイド部３とを備える。なお、
電磁弁１は、２ポジションでノーマルクローズタイプの三方電磁弁に限られず、３ポジシ
ョンでもよく、ノーマルオープンタイプでもよく、四方電磁弁等でもよく、任意の組み合
わせに基づく各種の形成で構成されていてもよい。また、本実施形態では、電磁弁１は、
流体圧駆動弁１０におけるパイロットバルブとして用いられるものであるが、電磁弁１の
用途はこれに限られない。 The solenoid valve 1 has a function of controlling the supply and discharge of air A to the drive device 12, and is, for example, a three-way solenoid valve of a normally closed type (“open” when energized, “closed” when not energized) at two positions. It is configured as. The solenoid valve 1 has a spool portion 2 that switches the flow path through which the air A flows inside the accommodating portion 6 that functions as a housing of the indoor type or explosion-proof type solenoid valve 1, and is in an energized state (when energized or not energized). It is provided with a solenoid unit 3 that displaces the spool unit 2 accordingly. In addition, it should be noted
The solenoid valve 1 is not limited to a two-position, normally closed type three-way solenoid valve, but may be a three-position solenoid valve, a normally open type, a four-way solenoid valve, or the like, and is composed of various formations based on any combination. May be good. Further, in the present embodiment, the solenoid valve 1 is
Although it is used as a pilot valve in the fluid pressure drive valve 10, the application of the solenoid valve 1 is not limited to this.

スプール部２は、空気供給源１４に第１の空気配管１４０を介して接続される入力ポー
ト２０と、駆動装置１２に第２の空気配管１４１を介して接続される出力ポート２１と、
駆動装置１２からの排気を排出する排気ポート２２とを備える。 The spool portion 2 includes an input port 20 connected to the air supply source 14 via the first air pipe 140, and an output port 21 connected to the drive device 12 via the second air pipe 141.
It is provided with an exhaust port 22 for exhausting exhaust gas from the drive device 12.

ソレノイド部３は、通電時に、入力ポート２０と出力ポート２１との間を連通するよう
に、スプール部２を変位させ、非通電時に、出力ポート２１と排気ポート２２との間を連
通するように、スプール部２を変位させる。 The solenoid unit 3 displaces the spool unit 2 so as to communicate between the input port 20 and the output port 21 when energized, and communicates between the output port 21 and the exhaust port 22 when the power is off. , The spool portion 2 is displaced.

したがって、電磁弁１が通電状態である場合には、空気供給源１４からの空気Ａ（給気
）が、第１の空気配管１４０、入力ポート２０、出力ポート２１及び第２の空気配管１４
１の順に流れて、空気給排口１２４に供給されることで、第２のピストン１２２Ｂが押圧
されてコイルばね１２３が圧縮する。そして、コイルばね１２３の圧縮に応じてピストン
ロッド１２１が移動した分だけピストンロッド１２１及び伝達機構１２５を介して弁軸１
３が回転駆動されると、弁箱１１０内で弁体１１１が回転し、主弁１１が全開状態に操作
される。 Therefore, when the solenoid valve 1 is energized, the air A (air supply) from the air supply source 14 is the first air pipe 140, the input port 20, the output port 21, and the second air pipe 14.
The second piston 122B is pressed and the coil spring 123 is compressed by flowing in the order of 1 and being supplied to the air supply / discharge port 124. Then, the valve shaft 1 is passed through the piston rod 121 and the transmission mechanism 125 by the amount that the piston rod 121 moves according to the compression of the coil spring 123.
When 3 is rotationally driven, the valve body 111 rotates in the valve box 110, and the main valve 11 is operated in a fully open state.

一方、電磁弁１が非通電状態である場合には、シリンダ１２０内の空気Ａ（排気）が、
空気給排口１２４から第２の空気配管１４１、出力ポート２１及び排気ポート２２の順に
流れて、外気に排出されることで、第２のピストン１２２Ｂの押圧力が低下し、コイルば
ね１２３が圧縮状態から復元する。そして、コイルばね１２３の復元に応じてピストンロ
ッド１２１が移動した分だけ伝達機構１２５を介して弁軸１３が回転駆動されると、弁箱
１１０内で弁体１１１が回転し、主弁１１が全閉状態に操作される。 On the other hand, when the solenoid valve 1 is in a non-energized state, the air A (exhaust) in the cylinder 120 becomes
The pressing pressure of the second piston 122B is reduced and the coil spring 123 is compressed by flowing from the air supply / exhaust port 124 to the second air pipe 141, the output port 21 and the exhaust port 22 in this order and being discharged to the outside air. Restore from state. Then, when the valve shaft 13 is rotationally driven via the transmission mechanism 125 by the amount that the piston rod 121 moves in response to the restoration of the coil spring 123, the valve body 111 rotates in the valve box 110, and the main valve 11 rotates. It is operated to the fully closed state.

（電磁弁の構成について）
図２は、本発明の実施形態に係る電磁弁１の一例を示す断面図である。 (About the configuration of the solenoid valve)
FIG. 2 is a cross-sectional view showing an example of the solenoid valve 1 according to the embodiment of the present invention.

電磁弁１は、上記のスプール部２及びソレノイド部３の他に、電磁弁１の各部の状態を
取得する複数のセンサ４と、複数のセンサ４のうち少なくとも１つが載置された基板５と
、これらスプール部２、ソレノイド部３、複数のセンサ４及び基板５を収容する収容部６
とを備える。 In addition to the spool portion 2 and the solenoid portion 3 described above, the solenoid valve 1 includes a plurality of sensors 4 for acquiring the state of each portion of the solenoid valve 1 and a substrate 5 on which at least one of the plurality of sensors 4 is mounted. , The spool portion 2, the solenoid portion 3, the accommodating portion 6 accommodating the plurality of sensors 4 and the substrate 5.
And.

収容部６は、スプール部２を収容する第１の収容部６０と、第１の収容部６０に隣接さ
れるとともに、ソレノイド部３、複数のセンサ４及び基板５を収容する第２の収容部６１
と、通信ケーブル１５０及び電力ケーブル１６０が接続されるターミナルボックス６２と
を備える。なお、第１の収容部６０及び第２の収容部６１は、例えば、アルミニウム等の
金属材料で製作されている。 The accommodating portion 6 is adjacent to the first accommodating portion 60 accommodating the spool portion 2 and the first accommodating portion 60, and also accommodates the solenoid unit 3, the plurality of sensors 4, and the substrate 5. 61
And a terminal box 62 to which the communication cable 150 and the power cable 160 are connected. The first accommodating portion 60 and the second accommodating portion 61 are made of a metal material such as aluminum.

第１の収容部６０は、入力ポート２０、出力ポート２１及び排気ポート２２として、そ
れぞれ機能する開口部（不図示）を有する。 The first accommodating portion 60 has openings (not shown) that function as input ports 20, output ports 21, and exhaust ports 22, respectively.

第２の収容部６１は、両端（第１のハウジング端部６１０ａ及び第２のハウジング端部
６１０ｂ）が開放された円筒状のハウジング６１０と、ハウジング６１０の内部に配置さ
れるボディー６１１と、第１のハウジング端部６１０ａに固定されたソレノイド部３を外
気から覆うソレノイドカバー６１２と、第２のハウジング端部６１０ｂに固定されたター
ミナルボックス６２を外気から覆うターミナルボックスカバー６１３とを備える。 The second housing portion 61 includes a cylindrical housing 610 in which both ends (first housing end portion 610a and second housing end portion 610b) are open, a body 611 arranged inside the housing 610, and a second housing portion 61. A solenoid cover 612 that covers the solenoid portion 3 fixed to the housing end portion 610a of 1 from the outside air, and a terminal box cover 613 that covers the terminal box 62 fixed to the second housing end portion 610b from the outside air are provided.

ハウジング６１０は、その下部に形成されて弁軸１３の第２の端部１３０Ｂが挿入され
る軸挿入口６１０ｃと、その上部に形成されてボディー６１１が挿入されるボディー挿入
口６１０ｄと、第２のハウジング端部６１０ｂ側に形成されて通信ケーブル１５０及び電
力ケーブル１６０が挿入されるケーブル挿入口６１０ｅとを有する。 The housing 610 has a shaft insertion port 610c formed in the lower portion thereof and into which the second end 130B of the valve shaft 13 is inserted, a body insertion port 610d formed in the upper portion thereof into which the body 611 is inserted, and a second. It has a cable insertion port 610e formed on the housing end portion 610b side of the above and into which the communication cable 150 and the power cable 160 are inserted.

第１の収容部６０及び第２の収容部６１には、ボディー６１１を貫通するようにして、
入力側流路２６から分岐して入力側流路２６と第１の圧力センサ４０との間を連通する第
１の流路６３と、出力側流路２７から分岐して出力側流路２７と第２の圧力センサ４１と
の間を連通する第２の流路６４と、スプール部２とソレノイド部３とを連動させるための
空気Ａが流れるスプール流路６５が形成されている。 The first accommodating portion 60 and the second accommodating portion 61 are made to penetrate the body 611.
A first flow path 63 that branches from the input side flow path 26 and communicates between the input side flow path 26 and the first pressure sensor 40, and an output side flow path 27 that branches from the output side flow path 27. A second flow path 64 communicating with the second pressure sensor 41 and a spool flow path 65 through which air A for interlocking the spool portion 2 and the solenoid portion 3 are formed are formed.

スプール部２は、スプールケースとして機能する第２の収容部６１内に形成されたスプ
ールホール２３と、スプールホール２３内に移動可能に配置されたスプールバルブ２４と
、スプールバルブ２４を付勢するスプールスプリング２５と、入力ポート２０とスプール
ホール２３との間を連通する入力側流路２６と、出力ポート２１とスプールホール２３と
の連通する出力側流路２７と、排気ポート２２とスプールホール２３との間を連通する排
気流路２８とを備える。 The spool portion 2 includes a spool hole 23 formed in a second accommodating portion 61 that functions as a spool case, a spool valve 24 that is movably arranged in the spool hole 23, and a spool that urges the spool valve 24. The spring 25, the input side flow path 26 communicating between the input port 20 and the spool hole 23, the output side flow path 27 communicating between the output port 21 and the spool hole 23, the exhaust port 22 and the spool hole 23. It is provided with an exhaust flow path 28 that communicates between the two.

ソレノイド部３は、ソレノイドケース３０と、ソレノイドケース３０内に収容されたソ
レノイドコイル３１と、ソレノイドコイル３１内に移動可能に配置された可動鉄芯３２と
、ソレノイドコイル３１内に固定状態で配置された固定鉄芯３３と、可動鉄芯３２を付勢
するソレノイドスプリング３４とを備える。 The solenoid unit 3 is arranged in a solenoid case 30, a solenoid coil 31 housed in the solenoid case 30, a movable iron core 32 movably arranged in the solenoid coil 31, and a fixed state in the solenoid coil 31. A fixed iron core 33 and a solenoid spring 34 for urging the movable iron core 32 are provided.

電磁弁１が非通電状態から通電状態に切り替えられた場合には、ソレノイド部３におい
て、コイル電流がソレノイドコイル３１に流れることによりソレノイドコイル３１が電磁
力を発生し、当該電磁力により可動鉄芯３２がソレノイドスプリング３４の付勢力に抗し
て固定鉄芯３３に吸引されることで、スプール流路６５を流れる空気Ａの流通状態が切り
替えられる。そして、スプール部２において、スプール流路６５を流れる空気Ａの流通状
態が切り替えられたことにより、スプールバルブ２４がスプールスプリング２５の付勢力
に抗して移動されることで、入力ポート２０と排気ポート２２との間を連通する状態から
、入力ポート２０と出力ポート２１との間を連通する状態に切り替えられる。 When the solenoid valve 1 is switched from the non-energized state to the energized state, the solenoid coil 31 generates an electromagnetic force when the coil current flows through the solenoid coil 31 in the solenoid unit 3, and the movable iron core is generated by the electromagnetic force. When the 32 is sucked into the fixed iron core 33 against the urging force of the solenoid spring 34, the flow state of the air A flowing through the spool flow path 65 is switched. Then, in the spool portion 2, the flow state of the air A flowing through the spool flow path 65 is switched, so that the spool valve 24 is moved against the urging force of the spool spring 25, so that the input port 20 and the exhaust are exhausted. The state of communicating with the port 22 can be switched to the state of communicating with the input port 20 and the output port 21.

基板５は、基板面５００Ａ、５００Ｂが軸挿入口６１０ｃから挿入された弁軸１３に沿
うように配置された第１の基板５０と、ターミナルボックス６２に近接して配置された第
２の基板５１と、ソレノイド部３に近接して配置された第３の基板５２とを備える。 The substrate 5 includes a first substrate 50 arranged so that the substrate surfaces 500A and 500B are arranged along the valve shaft 13 inserted from the shaft insertion port 610c, and a second substrate 51 arranged close to the terminal box 62. And a third substrate 52 arranged close to the solenoid unit 3.

第１の基板５０の基板面５００Ａ、５００Ｂのうち、第１の基板面５００Ａ側には、ボ
ディー６１１、ソレノイド部３及び第３の基板５２が配置される。第１の基板面５００Ａ
側と反対側の第２の基板面５００Ｂ側には、第２の基板５１及びターミナルボックス６２
が配置される。 Of the substrate surfaces 500A and 500B of the first substrate 50, the body 611, the solenoid unit 3, and the third substrate 52 are arranged on the first substrate surface 500A side. First substrate surface 500A
On the second board surface 500B side opposite to the side, the second board 51 and the terminal box 62
Is placed.

第１の基板５０に載置されるセンサ４は、例えば、入力側流路２６及び第１の流路６３
を流れる空気Ａの流体圧を計測する第１の圧力センサ４０と、出力側流路２７及び第２の
流路６４を流れる空気Ａの流体圧を計測する第２の圧力センサ４１と、弁軸１３が回転駆
動するときの回転角度を計測し、当該回転角度に応じて主弁１１の弁開度情報を取得する
主弁開度センサ４２とを含む。これにより、１つの基板（第１の基板５０）に、第１の圧
力センサ４０、第２の圧力センサ４１及び主弁開度センサ４２が集約されるので、電磁弁
１及び流体圧駆動弁１０が正常に動作したか否かを適切に診断するために必要となる監視
機能を簡易な構成で実現することができる。 The sensor 4 mounted on the first substrate 50 is, for example, an input side flow path 26 and a first flow path 63.
A first pressure sensor 40 that measures the fluid pressure of the air A flowing through the air, a second pressure sensor 41 that measures the fluid pressure of the air A flowing through the output side flow path 27 and the second flow path 64, and a valve shaft. It includes a main valve opening degree sensor 42 that measures the rotation angle when the 13 is rotationally driven and acquires valve opening degree information of the main valve 11 according to the rotation angle. As a result, the first pressure sensor 40, the second pressure sensor 41, and the main valve opening sensor 42 are integrated on one substrate (first substrate 50), so that the solenoid valve 1 and the fluid pressure drive valve 10 are integrated. The monitoring function required to properly diagnose whether or not the sensor has operated normally can be realized with a simple configuration.

主弁開度センサ４２は、例えば、磁気センサにより構成されており、弁軸１３の第２の
端部１３０Ｂに取り付けられた永久磁石１３１が発生する磁気の強さを計測し、当該磁気
の強さに応じて主弁１１の弁開度情報を取得する。 The main valve opening sensor 42 is composed of, for example, a magnetic sensor, measures the magnetic strength generated by the permanent magnet 131 attached to the second end 130B of the valve shaft 13, and measures the magnetic strength. Correspondingly, the valve opening information of the main valve 11 is acquired.

主弁開度センサ４２は、軸挿入口６１０ｃから挿入された弁軸１３に沿うように配置さ
れた第１の基板５の第１の基板面５００Ａのうち弁軸１３の軸周りの外周に対向する位置
に載置される。これにより、収容部６内において、配置スペースを無駄にすることなく、
第１の基板５０に載置された主弁開度センサ４２と、弁軸１３の第２の端部１３０Ｂとを
近接して配置することが可能となり、弁開度情報を正確に取得することができる。 The main valve opening sensor 42 faces the outer circumference of the valve shaft 13 around the axis of the first substrate surface 500A of the first substrate 5 arranged along the valve shaft 13 inserted from the shaft insertion port 610c. It is placed in the position to be. As a result, in the accommodating portion 6, the arrangement space is not wasted.
The main valve opening sensor 42 mounted on the first substrate 50 and the second end 130B of the valve shaft 13 can be arranged close to each other, and the valve opening information can be accurately acquired. Can be done.

主弁開度センサ４２は、第１の基板５０において、第１の圧力センサ４０及び第２の圧
力センサ４１よりも軸挿入口６１０ｃ寄りに載置される。これにより、第１の圧力センサ
４０に連通する第１の流路６３と、第２の圧力センサ４０に連通する第２の流路６４とが
、主弁開度センサ４２及び弁軸１３の第２の端部１３０Ｂから離間した位置に配置される
ので、第１の流路６３及び第２の流路６４の形状や配置を簡素化することができる。 The main valve opening degree sensor 42 is mounted on the first substrate 50 closer to the shaft insertion port 610c than the first pressure sensor 40 and the second pressure sensor 41. As a result, the first flow path 63 communicating with the first pressure sensor 40 and the second flow path 64 communicating with the second pressure sensor 40 are the second of the main valve opening sensor 42 and the valve shaft 13. Since it is arranged at a position separated from the end portion 130B of 2, the shape and arrangement of the first flow path 63 and the second flow path 64 can be simplified.

図３は、本発明の実施形態に係る電磁弁１の一例を示すブロック図である。図４は、本
発明の実施形態に係る基板５に対する複数のセンサ４の載置例を示す模式図である。なお
、図４は、各センサ４が基板５に載置された位置を厳密に示すものではなく、各センサ４
が、第１乃至第３の基板５０〜５２のいずれの基板に載置されているかの載置状態を示す
ものである。 FIG. 3 is a block diagram showing an example of the solenoid valve 1 according to the embodiment of the present invention. FIG. 4 is a schematic view showing an example of mounting a plurality of sensors 4 on the substrate 5 according to the embodiment of the present invention. Note that FIG. 4 does not strictly indicate the position where each sensor 4 is placed on the substrate 5, and each sensor 4 does not show exactly.
Indicates the mounting state of which of the first to third substrates 50 to 52 is mounted.

電磁弁１は、電気的な構成例として、上記の第１乃至第３の基板５０〜５２及び複数の
センサ４の他に、電磁弁１を制御する制御部７と、外部装置１５と通信する機能を有する
通信部（外部送信部）８と、外部電源１６に接続される電源回路部９とを備える。 As an example of electrical configuration, the solenoid valve 1 communicates with the control unit 7 that controls the solenoid valve 1 and the external device 15 in addition to the above-mentioned first to third substrates 50 to 52 and the plurality of sensors 4. It includes a communication unit (external transmission unit) 8 having a function and a power supply circuit unit 9 connected to the external power supply 16.

複数のセンサ４は、各部の物理量を計測するセンサ群として、上記の第１の圧力センサ
４０、第２の圧力センサ４１及び主弁開度センサ４２の他に、ソレノイド部３に対する供
給電圧を計測する電圧センサ４３と、ソレノイド部３における通電時の電流値及び非通電
時の抵抗値を計測する電流・抵抗センサ４４と、収容部６の内部温度を計測する温度セン
サ４５と、ソレノイド部３が発生する磁気の強さを計測する磁気センサ４６とを備える。 The plurality of sensors 4 measure the supply voltage to the solenoid unit 3 in addition to the above-mentioned first pressure sensor 40, second pressure sensor 41, and main valve opening sensor 42 as a sensor group for measuring the physical quantity of each part. The voltage sensor 43, the current / resistance sensor 44 that measures the current value when the solenoid unit 3 is energized and the resistance value when the solenoid unit is not energized, the temperature sensor 45 that measures the internal temperature of the housing unit 6, and the solenoid unit 3 It includes a magnetic sensor 46 that measures the strength of the generated magnetism.

また、複数のセンサ４は、各部の動作履歴に関する情報を取得するセンサ群として、ソ
レノイド部３の稼働時間としてソレノイド部に対する通電時間の合計及び現在の通電連働
時間の少なくとも一方を計測する稼働時間計４７と、電磁弁１、駆動装置１２及び主弁１
１それぞれの作動回数を計数する作動カウンタ４８とを備える。 In addition, the plurality of sensors 4 measure at least one of the total energization time for the solenoid unit and the current energization continuous time as the operating time of the solenoid unit 3 as a sensor group for acquiring information on the operation history of each unit. 47 in total, solenoid valve 1, drive unit 12 and main valve 1
1 The operation counter 48 for counting the number of times of each operation is provided.

制御部７は、複数のセンサ４により取得された電磁弁１の各部の状態を示す情報を処理
するとともに、電磁弁１の各部を制御するマイクロコントローラ７０と、ソレノイド部３
の通電状態を制御し、試験運転時における主弁１１の開閉操作を行うバルブテストスイッ
チ７１とを備える。 The control unit 7 processes the information indicating the state of each part of the solenoid valve 1 acquired by the plurality of sensors 4, and also controls the microcontroller 70 and the solenoid unit 3 that control each part of the solenoid valve 1.
It is provided with a valve test switch 71 that controls the energized state of the main valve 11 and opens and closes the main valve 11 during a test operation.

マイクロコントローラ７０は、ＣＰＵ（Central Processing Unit）等のプロセッサ（
不図示）と、ＲＯＭ（Read Only Memory）、ＲＡＭ（Random Access Memory）等により構
成される内部記憶部７０１とを備える。 The microcontroller 70 is a processor such as a CPU (Central Processing Unit) (
It includes an internal storage unit 701 composed of a ROM (Read Only Memory), a RAM (Random Access Memory), and the like (not shown).

内部記憶部７０１には、電磁弁１が動作するときの設定値、電磁弁１が動作したときの
一時記憶データ、及び、電磁弁１の動作を制御する電磁弁制御プログラム等が記憶されて
いる。 The internal storage unit 701 stores a set value when the solenoid valve 1 operates, temporary storage data when the solenoid valve 1 operates, an electromagnetic valve control program that controls the operation of the solenoid valve 1, and the like. ..

マイクロコントローラ７０のプロセッサは、内部記憶部７０１に記憶された電磁弁制御
プログラムを実行することにより、複数のセンサ４により電磁弁１の各部の状態を監視す
る監視処理を実行する監視処理部７００として機能する。 The processor of the microcontroller 70 is a monitoring processing unit 700 that executes a monitoring process for monitoring the state of each part of the solenoid valve 1 by a plurality of sensors 4 by executing a solenoid valve control program stored in the internal storage unit 701. Function.

監視処理部７００は、定常運転中に、主弁１１の開閉操作の有無に関わることなく、複
数のセンサ４のうち少なくとも１つのセンサ４（以下、「第１の監視対象センサ４Ａ」と
いう。）を用いて電磁弁１の状態を監視する「第１の監視処理」を実行する。また、監視
処理部７００は、主弁１１の開閉操作が行われる非定常運転中に、複数のセンサ４のうち
少なくとも１つのセンサ（以下、「第２の監視対象センサ４Ｂ」という。）を用いて電磁
弁１の状態を監視する「第２の監視処理」を実行する。なお、第１の監視対象センサ４Ａ
は、例えば、複数のセンサ４の全て（第１の圧力センサ４０、第２の圧力センサ４１、主
弁開度センサ４２、電圧センサ４３、電流・抵抗センサ４４、温度センサ４５、磁気セン
サ４６、稼働時間計４７、及び、作動カウンタ４８）であるが、これらの例に限られない
。また、第２の監視対象センサ４Ｂは、例えば、第２の圧力センサ４１及び主弁開度セン
サ４２であるが、これらの例に限られない。 During steady operation, the monitoring processing unit 700 is at least one of the plurality of sensors 4 regardless of whether or not the main valve 11 is opened / closed (hereinafter, referred to as “first monitored sensor 4A”). Is used to execute the "first monitoring process" for monitoring the state of the solenoid valve 1. Further, the monitoring processing unit 700 uses at least one of the plurality of sensors 4 (hereinafter, referred to as “second monitored sensor 4B”) during the unsteady operation in which the main valve 11 is opened and closed. The "second monitoring process" for monitoring the state of the solenoid valve 1 is executed. The first monitored sensor 4A
For example, all of the plurality of sensors 4 (first pressure sensor 40, second pressure sensor 41, main valve opening sensor 42, voltage sensor 43, current / resistance sensor 44, temperature sensor 45, magnetic sensor 46, The operating time total 47 and the operation counter 48) are not limited to these examples. Further, the second monitoring target sensor 4B is, for example, the second pressure sensor 41 and the main valve opening degree sensor 42, but is not limited to these examples.

第１の監視処理では、監視処理部７００は、第１のサンプリング周期（例えば、１０秒
間隔）で第１の監視対象センサ４Ａにより取得された電磁弁１の状態を第１の取得データ
として取得し、当該第１の取得データについて、取得する毎に通信部８を介して外部装置
１５に順次送信する。 In the first monitoring process, the monitoring processing unit 700 acquires the state of the solenoid valve 1 acquired by the first monitored sensor 4A in the first sampling period (for example, every 10 seconds) as the first acquired data. Then, each time the first acquired data is acquired, it is sequentially transmitted to the external device 15 via the communication unit 8.

第２の監視処理では、監視処理部７００は、電磁弁１の操作が行われる操作期間におい
て、第１のサンプリング周期よりも短い第２のサンプリング周期（例えば、１０ｍｓｅｃ
間隔）で第２の監視対象センサ４Ｂにより取得された電磁弁１の状態を第２の取得データ
としてそれぞれ取得する。そして、監視処理部７００は、操作期間内にそれぞれ取得した
第２の取得データと当該第２の取得データのそれぞれを取得した取得時刻とを紐付けて構
成する取得データ群を一時記憶データとして内部記憶部７０１に記憶する。そして、内部
記憶部７０１に記憶された取得データ群は、所定のタイミングで外部装置１５に送信され
る。 In the second monitoring process, the monitoring process unit 700 has a second sampling cycle (for example, 10 msec) shorter than the first sampling cycle in the operation period in which the solenoid valve 1 is operated.
The state of the solenoid valve 1 acquired by the second monitored sensor 4B at (interval) is acquired as the second acquired data. Then, the monitoring processing unit 700 internally sets the acquired data group configured by associating the second acquired data acquired within the operation period with the acquired acquisition time of each of the second acquired data as temporary storage data. It is stored in the storage unit 701. Then, the acquired data group stored in the internal storage unit 701 is transmitted to the external device 15 at a predetermined timing.

バルブテストスイッチ７１は、所定の試験運転条件が満たされた場合にマイクロコント
ローラ７０からの指令を受けて、試験運転として、電磁弁１のフルストロークテスト（以
下、「ＦＳＴ」という。）又はパーシャルストロークテスト（以下、「ＰＳＴ」という。
）を実行する。 The valve test switch 71 receives a command from the microcontroller 70 when a predetermined test operation condition is satisfied, and as a test operation, a full stroke test (hereinafter, referred to as “FST”) or a partial stroke of the solenoid valve 1 is performed. Test (hereinafter referred to as "PST".
) Is executed.

ＦＳＴは、主弁１１を全開状態から全閉状態に操作して全開状態に戻すことで、流体圧
駆動弁１０の異常を診断するものである。ＰＳＴは、主弁１１を全開状態から所定の開度
まで部分的に閉じて全開状態に戻すことで、主弁１１を全閉状態に操作することなく（す
なわち、プラント設備を停止することなく）、流体圧駆動弁１０の異常を診断するもので
ある。 The FST diagnoses an abnormality in the fluid pressure drive valve 10 by operating the main valve 11 from the fully open state to the fully closed state and returning it to the fully open state. The PST partially closes the main valve 11 from the fully open state to a predetermined opening state and returns it to the fully open state, without operating the main valve 11 in the fully closed state (that is, without stopping the plant equipment). , The abnormality of the fluid pressure drive valve 10 is diagnosed.

ＦＳＴ及びＰＳＴは、監視処理部７００による第２の監視処理と並行して実行される。
そのため、主弁１１が操作されたときに各センサ４により取得された電磁弁１の状態に基
づいて、当該操作が所定の設定時間内に完了したか否かを判定することにより、流体圧駆
動弁１０の異常を診断することが可能である。また、主弁１１が操作されたときに各セン
サ４により取得された電磁弁１の状態の時系列変化を解析する（例えば、正常時の時系列
変化と比較する）ことにより、流体圧駆動弁１０の異常を診断することが可能である。 The FST and PST are executed in parallel with the second monitoring process by the monitoring process unit 700.
Therefore, the fluid pressure drive is performed by determining whether or not the operation is completed within a predetermined set time based on the state of the solenoid valve 1 acquired by each sensor 4 when the main valve 11 is operated. It is possible to diagnose the abnormality of the valve 10. Further, by analyzing the time-series change of the state of the solenoid valve 1 acquired by each sensor 4 when the main valve 11 is operated (for example, comparing with the time-series change at the normal time), the fluid pressure drive valve It is possible to diagnose 10 abnormalities.

なお、試験運転条件としては、例えば、内部記憶部７０１の設定値として指定された実
行頻度（例えば、１年に１回）による実行時期や特定の指定日時が到来したり、外部装置
１５（例えば、プラント管理用のコンピュータ）からの実行命令を受け付けたり、電磁弁
１に設けられた試験実行ボタン（不図示）が管理者により操作されたりした場合に、試験
運転条件を満たすものとして、試験運転が実行されるようにすればよい。 As test operation conditions, for example, the execution time or a specific designated date and time according to the execution frequency (for example, once a year) designated as the set value of the internal storage unit 701 may arrive, or the external device 15 (for example, once a year) may be used. , Plant management computer), or when the test execution button (not shown) provided on the solenoid valve 1 is operated by the administrator, the test operation condition is satisfied. Should be executed.

通信部８は、ＨＡＲＴ（Highway Addressable Remote Transducer）通信規格に従って
外部装置１５との間でデータの送受信を行う通信モデム８０と、制御電流（４〜２０ｍＡ
のアナログ信号）を入出力するループ電流制御器８１とを備える。通信モデム８０が、送
信対象のデータを周波数信号に変換すると、ループ電流制御器８１は、当該周波数信号を
制御電流に重畳した重畳信号を外部装置１５に送信する。ループ電流制御器８１が、外部
装置１５から重畳信号を受信し、当該重畳信号から周波数信号を分離すると、通信モデム
８０は、当該周波数信号を受信対象のデータに変換する。 The communication unit 8 includes a communication modem 80 that transmits / receives data to / from the external device 15 in accordance with the HART (Highway Addressable Remote Transducer) communication standard, and a control current (4 to 20 mA).
It is provided with a loop current controller 81 for inputting / outputting an analog signal). When the communication modem 80 converts the data to be transmitted into a frequency signal, the loop current controller 81 transmits a superimposed signal obtained by superimposing the frequency signal on the control current to the external device 15. When the loop current controller 81 receives the superimposed signal from the external device 15 and separates the frequency signal from the superimposed signal, the communication modem 80 converts the frequency signal into data to be received.

電源回路部９は、電力ケーブル１６０がターミナルボックス６２に逆接続された場合に
発生する逆電圧から制御部７を保護する逆電圧保護回路９０と、外部電源１６から電力ケ
ーブル１６０を介して供給された電力を所定の電圧及び電流に変換し、電磁弁１の各部（
ソレノイド部３、センサ４、基板５、制御部７及び通信部８等）に供給する内部電源回路
９１とを備える。 The power circuit unit 9 is supplied from the external power supply 16 via the power cable 160 and the reverse voltage protection circuit 90 that protects the control unit 7 from the reverse voltage generated when the power cable 160 is reversely connected to the terminal box 62. Converts the generated power into a predetermined voltage and current, and converts each part of the electromagnetic valve 1 (
It includes an internal power supply circuit 91 that supplies the solenoid unit 3, the sensor 4, the substrate 5, the control unit 7, the communication unit 8, etc.).

図４に示すように、第１の基板５０は、第１の圧力センサ４０、第２の圧力センサ４１
、主弁開度センサ４２、電圧センサ４３、電流・抵抗センサ４４、温度センサ４５、稼働
時間計４７、作動カウンタ４８、制御部７、通信モデム８０及び逆電圧保護回路９０が載
置される。第２の基板５１は、ループ電流制御器８１及び内部電源回路９１が載置される
。第３の基板５２は、磁気センサ４６が載置される。 As shown in FIG. 4, the first substrate 50 includes a first pressure sensor 40 and a second pressure sensor 41.
, Main valve opening sensor 42, voltage sensor 43, current / resistance sensor 44, temperature sensor 45, operating time meter 47, operation counter 48, control unit 7, communication modem 80 and reverse voltage protection circuit 90 are mounted. The loop current controller 81 and the internal power supply circuit 91 are mounted on the second substrate 51. The magnetic sensor 46 is mounted on the third substrate 52.

なお、複数のセンサ４としては、上記のセンサ４０〜４８に限られず、他の物理量や動
作履歴に関する情報を取得するセンサをさらに備えていてもよいし、これらのセンサ４０
〜４８の一部が省略されていてもよい。また、複数のセンサ４が各基板５０〜５２に載置
される際の各センサ４０〜４８の載置状態は、図４に示す例に限られず、適宜変更しても
よい。さらに、収容部６に収容される基板５の枚数や、収容部６に対する各基板５０〜５
２の配置についても適宜変更してもよい。 The plurality of sensors 4 are not limited to the above sensors 40 to 48, and may further include sensors for acquiring information on other physical quantities and operation histories, and these sensors 40.
A part of ~ 48 may be omitted. Further, the mounting state of the sensors 40 to 48 when the plurality of sensors 4 are mounted on the substrates 50 to 52 is not limited to the example shown in FIG. 4, and may be appropriately changed. Further, the number of substrates 5 accommodated in the accommodating portion 6 and each substrate 50 to 5 with respect to the accommodating portion 6
The arrangement of 2 may be changed as appropriate.

また、上記のセンサ４０〜４８は、図３、図４に示すように、それぞれのセンサが個別
に設けられたものに限られず、特定のセンサが他のセンサの機能を兼ねることで、当該他
のセンサが個別に設けられていなくてもよい。例えば、磁気センサ４６が、ソレノイド部
３が発生する磁気の強さを計測するとともに、当該磁気の強さに基づいてソレノイド部３
における通電時の電流値を求めることで、電流・抵抗センサ４４が個別に設けられていな
くてもよい。また、マイクロコントローラ７０が、センサの機能を内蔵したり、センサの
機能の一部を実現したりしてもよく、例えば、マイクロコントローラ７０が、稼働時間計
４７及び作動カウンタ４８を内蔵することで、稼働時間計４７及び作動カウンタ４８が個
別に設けられていなくてもよい。 Further, the sensors 40 to 48 are not limited to those in which each sensor is individually provided as shown in FIGS. 3 and 4, and the specific sensor also functions as another sensor. Sensors may not be provided individually. For example, the magnetic sensor 46 measures the magnetic strength generated by the solenoid unit 3, and the solenoid unit 3 is based on the magnetic strength.
The current / resistance sensor 44 may not be provided individually by obtaining the current value at the time of energization. Further, the microcontroller 70 may have a built-in sensor function or a part of the sensor function. For example, the microcontroller 70 has a built-in operating time meter 47 and an operation counter 48. , The operation time meter 47 and the operation counter 48 may not be provided separately.

（他の実施形態）
以上、本発明の実施形態について説明したが、本発明は上記実施形態に限定されるもの
ではなく、本発明の技術的思想を逸脱しない範囲で適宜変更可能である。 (Other embodiments)
Although the embodiment of the present invention has been described above, the present invention is not limited to the above embodiment and can be appropriately modified without departing from the technical idea of the present invention.

例えば、上記実施形態では、駆動装置１２は、弁軸１３を回転駆動させるものとして説
明したが、弁軸１３を往復直線駆動させるようにしてもよい。この場合、弁軸１３を往復
直線駆動させることに応じて開閉操作が行われる主弁１１として、例えば、ゲートバルブ
やグローブバルブ等の形式を用いるようにしてもよい。 For example, in the above embodiment, the drive device 12 has been described as rotating the valve shaft 13, but the valve shaft 13 may be driven in a reciprocating linear manner. In this case, as the main valve 11 whose opening / closing operation is performed in response to the reciprocating linear drive of the valve shaft 13, for example, a type such as a gate valve or a globe valve may be used.

さらに、この場合の電磁弁１の構成としては、収容部６が、駆動装置１２により往復直
線駆動される弁軸の端部が挿入される軸挿入口を有するとともに、当該弁軸が往復直線駆
動されることに連動して回転軸を回転駆動させる駆動力伝達機構（例えば、ラックアンド
ピニオン機構、リンク機構、カム機構等）を収容する。そして、第１の基板５０の基板面
が当該回転軸に沿うように配置されており、主弁開度センサ４２が、第１の基板５０の基
板面のうち当該回転軸の軸周りの外周に対向する位置に載置されて、主弁１１の弁開度を
求めるべく、当該回転軸の回転角度を計測するようにすればよい。 Further, as the configuration of the electromagnetic valve 1 in this case, the accommodating portion 6 has a shaft insertion port into which the end portion of the valve shaft driven linearly by the drive device 12 is inserted, and the valve shaft is driven linearly reciprocatingly. It accommodates a driving force transmission mechanism (for example, a rack and pinion mechanism, a link mechanism, a cam mechanism, etc.) that rotationally drives the rotating shaft in conjunction with the movement. The substrate surface of the first substrate 50 is arranged along the rotation axis, and the main valve opening sensor 42 is located on the outer periphery of the substrate surface of the first substrate 50 around the axis of the rotation axis. It may be placed at opposite positions and the rotation angle of the rotation shaft may be measured in order to obtain the valve opening degree of the main valve 11.

また、上記の駆動力伝達機構は、収容部６の外部に配置されていてもよく、この場合に
は、駆動力伝達機構により回転駆動される回転軸の端部が軸挿入口から挿入されるととも
に、第１の基板５０の基板面が軸挿入口から挿入された回転軸に沿うように配置されてお
り、主弁開度センサ４２が、主弁１１の弁開度を求めるべく、弁軸１３の回転角度に代え
て、当該回転軸の回転角度を計測するようにすればよい。 Further, the above-mentioned driving force transmission mechanism may be arranged outside the accommodating portion 6, and in this case, the end portion of the rotary shaft rotationally driven by the driving force transmission mechanism is inserted from the shaft insertion port. At the same time, the substrate surface of the first substrate 50 is arranged along the rotation axis inserted from the shaft insertion port, and the main valve opening sensor 42 determines the valve opening of the main valve 11. Instead of the rotation angle of 13, the rotation angle of the rotation shaft may be measured.

以上のように、上記実施形態に係る電磁弁１によれば、収容部６が、スプール部２、ソ
レノイド部３、複数のセンサ４、及び、複数のセンサ４のうち少なくとも１つが載置され
るとともに制御部７を有する基板５を収容する。 As described above, according to the solenoid valve 1 according to the above embodiment, at least one of the spool unit 2, the solenoid unit 3, the plurality of sensors 4, and the plurality of sensors 4 is mounted on the accommodating unit 6. In addition, the substrate 5 having the control unit 7 is housed.

そのため、収容部６には、スプール部２及びソレノイド部３が収容されるとともに、そ
の収容部６内にて、複数のセンサ４が電磁弁１の各部の状態を取得するとともに、それら
のうちの少なくとも１つが、制御部７を有する基板５に載置される。これにより、収容部
６内に、電磁弁１の基本機能だけでなく各部の状態を監視する監視機能についても集約さ
れるので、電磁弁１単体で電磁弁１の各部の状態を監視するとともに、装置構成の簡略化
を図ることができる。 Therefore, the spool portion 2 and the solenoid portion 3 are accommodated in the accommodating portion 6, and in the accommodating portion 6, a plurality of sensors 4 acquire the state of each portion of the solenoid valve 1 and among them. At least one is mounted on the substrate 5 having the control unit 7. As a result, not only the basic function of the solenoid valve 1 but also the monitoring function for monitoring the state of each part is integrated in the accommodating part 6, so that the state of each part of the solenoid valve 1 can be monitored by the solenoid valve 1 alone. The device configuration can be simplified.

また、第１の収容部６０及び第２の収容部６１には、主に駆動流体系回路を構成するス
プール部２と、主に電気系回路を構成するソレノイド部３、複数のセンサ４及び基板５と
が別々に収容されるので、空気系回路及び電気系回路を効率的に配置することができる。 Further, in the first accommodating portion 60 and the second accommodating portion 61, a spool portion 2 mainly constituting a drive fluid system circuit, a solenoid portion 3 mainly constituting an electric system circuit, a plurality of sensors 4, and a substrate Since 5 and 5 are housed separately, the air system circuit and the electrical system circuit can be efficiently arranged.

また、収容部６内において、第１の基板５０を境界にして、第１の基板面５００Ａ側に
は、電気系回路のうち電磁弁１を構成するソレノイド部３が配置され、第２の基板面５０
０Ｂ側には、電気系回路のうち通信部８及び電源回路部９を構成する第２の基板５１及び
ターミナルボックス６２が配置されるので、電気系回路をさらに効率的に配置することが
できる。 Further, in the accommodating portion 6, the solenoid portion 3 constituting the solenoid valve 1 of the electrical circuit is arranged on the first substrate surface 500A side with the first substrate 50 as a boundary, and the second substrate is provided. Surface 50
Since the second board 51 and the terminal box 62 constituting the communication unit 8 and the power supply circuit unit 9 of the electric system circuits are arranged on the 0B side, the electric system circuits can be arranged more efficiently.

１…電磁弁、２…スプール部、３…ソレノイド部、
４…センサ、４Ａ…第１の監視対象センサ、４Ｂ…第２の監視対象センサ、
５…基板、６…収容部、７…制御部、８…通信部、９…電源回路部、
１０…流体圧駆動弁、１１…主弁、１２…駆動装置、１３…弁軸、
１４…空気供給源、１５…外部装置、１６…外部電源、
２０…入力ポート、２１…出力ポート、２２…排気ポート、
２３…スプールホール、２４…スプールバルブ、２５…スプールスプリング、
２６…入力側流路、２７…出力側流路、２８…排気流路、
３０…ソレノイドケース、３１…ソレノイドコイル、
３２…可動鉄芯、３３…固定鉄芯、３４…ソレノイドスプリング、
４０…第１の圧力センサ、４１…第２の圧力センサ、
４２…主弁開度センサ、４３…電圧センサ、４４…電流・抵抗センサ、
４５…温度センサ、４６…磁気センサ、４７…稼働時間計、４８…作動カウンタ、
５０…第１の基板、５１…第２の基板、５２…第３の基板、
６０…第１の収容部、６１…第２の収容部、６２…ターミナルボックス、
６３…第１の流路、６４…第２の流路、６５…スプール流路、
７０…マイクロコントローラ、７１…バルブテストスイッチ、
８０…通信モデム、８１…ループ電流制御器、
９０…逆電圧保護回路、９１…内部電源回路、
１００…配管、１１０…弁箱、１１１…弁体、
１２０…シリンダ、１２１…ピストンロッド、
１２２Ａ…第１のピストン、１２２Ｂ…第２のピストン、
１２３…コイルばね、１２４…空気給排口、１２５…伝達機構、
１３０Ａ…第１の端部、１３０Ｂ…第２の端部、
１４０…第１の空気配管、１４１…第２の空気配管、
１５０…通信ケーブル、１６０…電力ケーブル、
５００Ａ…第１の基板面、５００Ｂ…第２の基板面、
６１０…ハウジング、６１０ａ…第１のハウジング端部、
６１０ｂ…第２のハウジング端部、６１０ｃ…軸挿入口、６１０ｄ…ボディー挿入口、
６１０ｅ…ケーブル挿入口、６１１…ボディー、
６１２…ソレノイドカバー、６１３…ターミナルボックスカバー、
７００…監視処理部、７０１…内部記憶部、Ａ…空気 1 ... Solenoid valve, 2 ... Spool part, 3 ... Solenoid part,
4 ... Sensor, 4A ... First monitored sensor, 4B ... Second monitored sensor,
5 ... board, 6 ... accommodating unit, 7 ... control unit, 8 ... communication unit, 9 ... power supply circuit unit,
10 ... Fluid pressure drive valve, 11 ... Main valve, 12 ... Drive device, 13 ... Valve shaft,
14 ... air supply source, 15 ... external device, 16 ... external power supply,
20 ... input port, 21 ... output port, 22 ... exhaust port,
23 ... Spool hole, 24 ... Spool valve, 25 ... Spool spring,
26 ... Input side flow path, 27 ... Output side flow path, 28 ... Exhaust flow path,
30 ... solenoid case, 31 ... solenoid coil,
32 ... Movable iron core, 33 ... Fixed iron core, 34 ... Solenoid spring,
40 ... 1st pressure sensor, 41 ... 2nd pressure sensor,
42 ... Main valve opening sensor, 43 ... Voltage sensor, 44 ... Current / resistance sensor,
45 ... temperature sensor, 46 ... magnetic sensor, 47 ... operating time meter, 48 ... operation counter,
50 ... 1st substrate, 51 ... 2nd substrate, 52 ... 3rd substrate,
60 ... 1st containment, 61 ... 2nd containment, 62 ... Terminal box,
63 ... 1st flow path, 64 ... 2nd flow path, 65 ... Spool flow path,
70 ... Microcontroller, 71 ... Valve Test Switch,
80 ... communication modem, 81 ... loop current controller,
90 ... Reverse voltage protection circuit, 91 ... Internal power supply circuit,
100 ... Piping, 110 ... Valve box, 111 ... Valve body,
120 ... Cylinder, 121 ... Piston rod,
122A ... 1st piston, 122B ... 2nd piston,
123 ... Coil spring, 124 ... Air supply / exhaust port, 125 ... Transmission mechanism,
130A ... 1st end, 130B ... 2nd end,
140 ... 1st air pipe, 141 ... 2nd air pipe,
150 ... communication cable, 160 ... power cable,
500A ... 1st substrate surface, 500B ... 2nd substrate surface,
610 ... housing, 610a ... first housing end,
610b ... Second housing end, 610c ... Shaft insertion slot, 610d ... Body insertion slot,
610e ... Cable insertion slot, 611 ... Body,
612 ... Solenoid cover, 613 ... Terminal box cover,
700 ... Monitoring processing unit, 701 ... Internal storage unit, A ... Air

Claims (10)

電磁弁であって、
駆動流体が流れる流路を切り替えるスプール部と、
通電状態に応じて前記スプール部を変位させるソレノイド部と、
前記電磁弁の各部の状態を取得する複数のセンサと、
前記複数のセンサのうち少なくとも１つが載置されるとともに、前記電磁弁を制御する制御部を有する基板と、
前記スプール部、前記ソレノイド部、前記複数のセンサ及び前記基板を収容する収容部とを備え、
前記電磁弁は、
主弁に連結された弁軸を前記駆動流体の流体圧に応じて駆動させることで前記主弁の開閉操作を行う駆動装置に対して、前記駆動流体の給排を制御する機能を有し、
前記複数のセンサのうち前記基板に載置されるセンサは、少なくとも、
前記主弁の弁開度を求めるべく、前記弁軸が回転駆動されるときの当該弁軸の回転角度又は前記弁軸が往復直線駆動されることに連動して回転軸が回転駆動されるときの当該回転軸の回転角度を計測する主弁開度センサを含む
ことを特徴とする電磁弁。 It ’s a solenoid valve,
A spool that switches the flow path through which the drive fluid flows, and
A solenoid part that displaces the spool part according to the energized state, and
A plurality of sensors that acquire the state of each part of the solenoid valve, and
A substrate on which at least one of the plurality of sensors is mounted and a control unit for controlling the solenoid valve, and
The spool unit, the solenoid unit, the plurality of sensors, and an accommodating unit for accommodating the substrate are provided.
The solenoid valve is
It has a function of controlling the supply and discharge of the driving fluid to the driving device that opens and closes the main valve by driving the valve shaft connected to the main valve according to the fluid pressure of the driving fluid.
Of the plurality of sensors, at least the sensor mounted on the substrate is at least.
When the rotary shaft is rotationally driven in conjunction with the rotational angle of the valve shaft when the valve shaft is rotationally driven or the reciprocating linear drive of the valve shaft in order to obtain the valve opening degree of the main valve. solenoid valve electrodeposition, characterized in that the containing main valve opening sensor for measuring the rotation angle of the rotary shaft. 前記収容部は、
前記弁軸又は前記回転軸の端部が挿入される軸挿入口を有し、
前記基板は、
基板面が前記軸挿入口から挿入された前記弁軸又は前記回転軸に沿うように配置されており、
前記主弁開度センサは、
前記基板面のうち前記弁軸又は前記回転軸の軸周りの外周に対向する位置に載置されて、前記弁軸又は前記回転軸の回転角度を計測する、
ことを特徴とする請求項１に記載の電磁弁。 The accommodating part
It has a shaft insertion slot into which the valve shaft or the end of the rotating shaft is inserted.
The substrate is
The substrate surface is arranged along the valve shaft or the rotation shaft inserted from the shaft insertion port.
The main valve opening sensor is
It is placed at a position on the substrate surface facing the valve shaft or the outer circumference of the rotating shaft around the axis, and the rotation angle of the valve shaft or the rotating shaft is measured.
The solenoid valve according to claim 1, wherein the solenoid valve is characterized in that. 前記収容部は、
前記弁軸の端部が挿入される軸挿入口を有するとともに、前記弁軸が往復直線駆動されることに連動して前記回転軸を回転駆動させる駆動力伝達機構を収容し、
前記基板は、
基板面が前記回転軸に沿うように配置されており、
前記主弁開度センサは、
前記基板面のうち前記回転軸の軸周りの外周に対向する位置に載置されて、前記回転軸の回転角度を計測する、
ことを特徴とする請求項１に記載の電磁弁。 The accommodating part
It has a shaft insertion port into which the end of the valve shaft is inserted, and houses a driving force transmission mechanism that rotationally drives the rotary shaft in conjunction with the reciprocating linear drive of the valve shaft.
The substrate is
The substrate surface is arranged along the rotation axis, and the substrate surface is arranged along the rotation axis.
The main valve opening sensor is
It is placed on the substrate surface at a position facing the outer periphery of the rotation shaft and measures the rotation angle of the rotation shaft.
The solenoid valve according to claim 1, wherein the solenoid valve is characterized in that. 前記複数のセンサのうち前記基板に載置されるセンサは、少なくとも、
前記駆動流体の供給源に接続される前記スプール部の入力側流路を流れる前記駆動流体の前記流体圧を計測する第１の圧力センサと、
前記駆動装置に接続される前記スプール部の出力側流路を流れる前記駆動流体の前記流体圧を計測する第２の圧力センサとを含み、
前記収容部には、
前記入力側流路と前記第１の圧力センサとの間を連通する第１の流路と、
前記出力側流路と前記第２の圧力センサとの間を連通する第２の流路とが形成されている、
ことを特徴とする請求項２又は請求項３に記載の電磁弁。 Of the plurality of sensors, at least the sensor mounted on the substrate is at least.
A first pressure sensor that measures the fluid pressure of the driving fluid flowing through the input side flow path of the spool portion connected to the driving fluid supply source, and
A second pressure sensor for measuring the fluid pressure of the driving fluid flowing through the output side flow path of the spool portion connected to the driving device is included.
In the storage part
A first flow path that communicates between the input side flow path and the first pressure sensor,
A second flow path that communicates between the output side flow path and the second pressure sensor is formed.
The solenoid valve according to claim 2 or 3, wherein the solenoid valve is characterized in that. 前記主弁開度センサは、
前記基板において、前記第１の圧力センサ及び前記第２の圧力センサよりも前記軸挿入口寄りに載置されている、
ことを特徴とする請求項４に記載の電磁弁。 The main valve opening sensor is
In the substrate, it is placed closer to the shaft insertion port than the first pressure sensor and the second pressure sensor.
The solenoid valve according to claim 4, wherein the solenoid valve is characterized in that. 電磁弁であって、
駆動流体が流れる流路を切り替えるスプール部と、
通電状態に応じて前記スプール部を変位させるソレノイド部と、
前記電磁弁の各部の状態を取得する複数のセンサと、
前記複数のセンサのうち少なくとも１つが載置されるとともに、前記電磁弁を制御する制御部を有する基板と、
前記スプール部、前記ソレノイド部、前記複数のセンサ及び前記基板を収容する収容部とを備え、
前記複数のセンサは、
前記ソレノイド部が発生する磁気の強さを計測する磁気センサを含む、
ことを特徴とする電磁弁。 It ’s a solenoid valve,
A spool that switches the flow path through which the drive fluid flows, and
A solenoid part that displaces the spool part according to the energized state, and
A plurality of sensors that acquire the state of each part of the solenoid valve, and
A substrate on which at least one of the plurality of sensors is mounted and a control unit for controlling the solenoid valve, and
The spool unit, the solenoid unit, the plurality of sensors, and an accommodating unit for accommodating the substrate are provided.
The plurality of sensors
A magnetic sensor for measuring the magnetic strength generated by the solenoid unit is included.
A solenoid valve characterized by that. 電磁弁であって、
駆動流体が流れる流路を切り替えるスプール部と、
通電状態に応じて前記スプール部を変位させるソレノイド部と、
前記電磁弁の各部の状態を取得する複数のセンサと、
前記複数のセンサのうち少なくとも１つが載置されるとともに、前記電磁弁を制御する制御部を有する基板と、
前記スプール部、前記ソレノイド部、前記複数のセンサ及び前記基板を収容する収容部とを備え、
前記収容部は、
前記スプール部を収容する第１の収容部と、
前記第１の収容部に隣接されるとともに、前記ソレノイド部、前記複数のセンサ及び前記基板を収容する第２の収容部とを備える、
ことを特徴とする電磁弁。 It ’s a solenoid valve,
A spool that switches the flow path through which the drive fluid flows, and
A solenoid part that displaces the spool part according to the energized state, and
A plurality of sensors that acquire the state of each part of the solenoid valve, and
A substrate on which at least one of the plurality of sensors is mounted and a control unit for controlling the solenoid valve, and
The spool unit, the solenoid unit, the plurality of sensors, and an accommodating unit for accommodating the substrate are provided.
The accommodating part
A first accommodating portion accommodating the spool portion and
Adjacent to the first accommodating portion, the solenoid portion, the plurality of sensors, and a second accommodating portion for accommodating the substrate are provided.
A solenoid valve characterized by that. 電磁弁であって、
駆動流体が流れる流路を切り替えるスプール部と、
通電状態に応じて前記スプール部を変位させるソレノイド部と、
前記電磁弁の各部の状態を取得する複数のセンサと、
前記複数のセンサのうち少なくとも１つが載置されるとともに、前記電磁弁を制御する制御部を有する基板と、
前記スプール部、前記ソレノイド部、前記複数のセンサ及び前記基板を収容する収容部とを備え、
前記基板は、
前記複数のセンサのうち少なくとも１つが載置される第１の基板と、
外部装置と通信する機能を有する通信部及び外部電源に接続される電源回路部を有する第２の基板とを備え、
前記ソレノイド部は、
前記第１の基板の基板面のうち第１の基板面側に配置されており、
前記第２の基板は、
前記第１の基板の基板面のうち前記第１の基板面側と反対側の第２の基板面側に配置されている、
ことを特徴とする電磁弁。 It ’s a solenoid valve,
A spool that switches the flow path through which the drive fluid flows, and
A solenoid part that displaces the spool part according to the energized state, and
A plurality of sensors that acquire the state of each part of the solenoid valve, and
A substrate on which at least one of the plurality of sensors is mounted and a control unit for controlling the solenoid valve, and
The spool unit, the solenoid unit, the plurality of sensors, and an accommodating unit for accommodating the substrate are provided.
The substrate is
A first substrate on which at least one of the plurality of sensors is mounted, and
It includes a communication unit having a function of communicating with an external device and a second board having a power supply circuit unit connected to an external power supply.
The solenoid part is
It is arranged on the first substrate surface side of the substrate surface of the first substrate.
The second substrate is
Of the substrate surface of the first substrate, it is arranged on the second substrate surface side opposite to the first substrate surface side.
A solenoid valve characterized by that. 請求項１乃至請求項８のいずれか一項に記載の電磁弁と、
主弁と、
前記主弁に連結された弁軸を前記駆動流体の流体圧に応じて駆動させることで前記主弁の開閉操作を行う駆動装置とを備え、
前記電磁弁は、
前記駆動装置に対して前記駆動流体の給排を制御する機能を有する、
ことを特徴とする流体圧駆動弁。 The solenoid valve according to any one of claims 1 to 8.
Main valve and
A drive device for opening and closing the main valve by driving the valve shaft connected to the main valve according to the fluid pressure of the driving fluid is provided.
The solenoid valve is
It has a function of controlling the supply and discharge of the driving fluid to the driving device.
A fluid pressure driven valve characterized by this. 電磁弁と、
主弁と、
前記主弁に連結された弁軸を駆動流体の流体圧に応じて駆動させることで前記主弁の開閉操作を行う駆動装置とを備え、
前記電磁弁は、
前記駆動流体が流れる流路を切り替えるスプール部と、
通電状態に応じて前記スプール部を変位させるソレノイド部と、
前記電磁弁の各部の状態を取得する複数のセンサと、
前記複数のセンサのうち少なくとも１つが載置されるとともに、前記電磁弁を制御する制御部を有する基板と、
前記スプール部、前記ソレノイド部、前記複数のセンサ及び前記基板を収容する収容部とを備え、
前記駆動装置に対して前記駆動流体の給排を制御する機能を有する、
ことを特徴とする流体圧駆動弁。 Solenoid valve and
Main valve and
A drive device for opening and closing the main valve by driving the valve shaft connected to the main valve according to the fluid pressure of the driving fluid is provided.
The solenoid valve is
A spool unit that switches the flow path through which the driving fluid flows, and
A solenoid part that displaces the spool part according to the energized state, and
A plurality of sensors that acquire the state of each part of the solenoid valve, and
A substrate on which at least one of the plurality of sensors is mounted and a control unit for controlling the solenoid valve, and
The spool unit, the solenoid unit, the plurality of sensors, and an accommodating unit for accommodating the substrate are provided.
It has a function of controlling the supply and discharge of the driving fluid to the driving device.
A fluid pressure driven valve characterized by this.
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