JP6781259B2 - Pressure sensor - Google Patents

Pressure sensor Download PDF

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JP6781259B2
JP6781259B2 JP2018528882A JP2018528882A JP6781259B2 JP 6781259 B2 JP6781259 B2 JP 6781259B2 JP 2018528882 A JP2018528882 A JP 2018528882A JP 2018528882 A JP2018528882 A JP 2018528882A JP 6781259 B2 JP6781259 B2 JP 6781259B2
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pressure
pressure sensor
waterproof case
coating agent
pressure detection
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JPWO2018016610A1 (en
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和哉 滝本
和哉 滝本
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Saginomiya Seisakusho Inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings

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  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Description

本発明は、圧力センサに関し、特に圧力検出素子を防水ケースなどで覆い使用する圧力センサに関する。 The present invention relates to a pressure sensor, and more particularly to a pressure sensor in which a pressure detection element is covered with a waterproof case or the like.

従来から流体の圧力を検出する圧力センサとして、例えば液封型の圧力センサが知られている。 As a pressure sensor that detects the pressure of a fluid, for example, a liquid-sealed pressure sensor is conventionally known.

液封型の圧力センサは、圧力検出される流体を圧力室に供給する流体供給部と、圧力室の流体の圧力を検出する圧力検出部と、圧力検出部で検出された圧力信号を外部に送出する信号送出部と、流体供給部、圧力検出部、及び、信号送出部を覆う外表面部材から構成される。 The liquid-sealed pressure sensor has a fluid supply unit that supplies the pressure-detected fluid to the pressure chamber, a pressure detection unit that detects the pressure of the fluid in the pressure chamber, and a pressure signal detected by the pressure detection unit to the outside. It is composed of a signal transmission unit to be transmitted, a fluid supply unit, a pressure detection unit, and an outer surface member covering the signal transmission unit.

外表面部材は、例えば、略円筒形状で圧力検出部及び信号送出部の周囲を覆う防水ケースと、端子台の上部に被される端子台キャップと、防水ケースの内周面とハウジングの外周面及び端子台の外周面との間を充填する封止剤とを主に備える。 The outer surface member is, for example, a waterproof case that has a substantially cylindrical shape and covers the circumference of the pressure detection unit and the signal transmission unit, a terminal block cap that covers the upper part of the terminal block, an inner peripheral surface of the waterproof case, and an outer peripheral surface of the housing. And a sealant that fills the space between the terminal block and the outer peripheral surface thereof is mainly provided.

特開２００１−１１６６３９号公報Japanese Unexamined Patent Publication No. 2001-116639 特開２００４−３７３８８号公報Japanese Unexamined Patent Publication No. 2004-37388

このような、圧力検出素子を防水ケースや封止剤で覆い、圧力検出素子に配線が接続される圧力センサでは、使用環境により、水分が製品樹脂内に透過し、製品の絶縁抵抗が低下することがある。また、絶縁抵抗の低下が更に進行すると、回路短絡を起こす可能性もある。これは、防水ケース等を透過した水と、プリント配線板上のハロゲンイオンにより、金属イオンの移行が起こり、このイオンが電子と結合し、再び金属化することにより新たな電流路が形成されることが原因である。 In such a pressure sensor in which the pressure detection element is covered with a waterproof case or a sealing agent and the wiring is connected to the pressure detection element, moisture permeates into the product resin depending on the usage environment, and the insulation resistance of the product decreases. Sometimes. Further, if the insulation resistance is further reduced, a circuit short circuit may occur. This is because the water that has passed through the waterproof case and the halogen ions on the printed wiring board cause the transfer of metal ions, and these ions combine with the electrons and metallize again to form a new current path. Is the cause.

このような、防水性能を測定する試験としてＰＣＴ試験（プレッシャークッカ試験）が知られており、樹脂封止された電子部品などの耐湿性の評価に使用されている。プレッシャークッカ試験は１００℃以上で、かつ高密度な水蒸気雰囲気を再現し、試験槽内の水蒸気圧力を製品の内部の水蒸気分圧よりも極端に高めることにより、製品の内部への水分の浸入を時間的に短縮することができ、電子部品材料の耐湿評価の加速寿命試験に使用される。 The PCT test (pressure cooker test) is known as a test for measuring such waterproof performance, and is used for evaluating the moisture resistance of resin-sealed electronic parts and the like. The pressure cooker test reproduces a high-density water vapor atmosphere at 100 ° C or higher, and by making the water vapor pressure in the test tank extremely higher than the partial pressure of water vapor inside the product, the infiltration of water into the product is prevented. It can be shortened in time and is used for accelerated life test of moisture resistance evaluation of electronic component materials.

以上のような防水性能を高める手段としては、例えば、ケースを頑強にするなどの方法も考えられるが、コストが上がる、内部に部品を設置する製造工数が嵩むなどの問題がある。また、特許文献１には、半導体圧力センサにおいて、樹脂ケース内にセンサチップなどを配置した後、軟質なゲル状コーティング樹脂を充填して、樹脂ケース内に空気、湿気の侵入などを防止する発明が記載されているが、上述のＰＣＴ試験のような室外での過酷な環境には対応できない。また、特許文献２には、センサハウジングの表面に、電気的な絶縁性を有する絶縁膜がコーティングされる圧力センサの発明が記載されているが、コーティングされた絶縁膜の防水性能については、記載されていない。 As a means for improving the waterproof performance as described above, for example, a method of making the case robust is conceivable, but there are problems such as an increase in cost and an increase in manufacturing man-hours for installing parts inside. Further, Patent Document 1 describes an invention in which a sensor chip or the like is placed in a resin case of a semiconductor pressure sensor and then filled with a soft gel-like coating resin to prevent air or moisture from entering the resin case. However, it cannot cope with a harsh outdoor environment such as the PCT test described above. Further, Patent Document 2 describes an invention of a pressure sensor in which an insulating film having an electrically insulating property is coated on the surface of a sensor housing, but the waterproof performance of the coated insulating film is described. It has not been.

したがって、本発明は、圧力検出素子を防水ケースなどで覆い使用する圧力センサにおいて、ＰＣＴ試験など、過酷な防水性能要求を満足できる圧力センサを提供することを目的とする。 Therefore, an object of the present invention is to provide a pressure sensor in which a pressure detection element is covered with a waterproof case or the like and used, which can satisfy strict waterproof performance requirements such as a PCT test.

上記課題を解決するために、本発明の圧力センサは、流体の圧力を検出する圧力検出素子と、上記圧力検出素子に接続され、外部に引き出される複数の電線と、上記圧力検出素子、及び、上記複数の電線を内部に収容する防水ケースと、上記防水ケースの内周部に充填される封止剤とを備える圧力センサにおいて、上記圧力センサの外周面を覆う上記防水ケース及び上記封止剤のいずれよりも水蒸気透過度が低いコーティング剤を更に備え、上記コーティング剤は、上記圧力センサの外周面を覆う上記防水ケース及び上記封止剤のいずれよりも撥水性が高く、上記コーティング剤は、上記封止剤及び上記防水ケースの外周面の全てを覆うことを特徴とする。 In order to solve the above problems, the pressure sensor of the present invention includes a pressure detection element for detecting the pressure of a fluid, a plurality of electric wires connected to the pressure detection element and drawn out to the outside, the pressure detection element, and the pressure sensor. In a pressure sensor including a waterproof case for accommodating the plurality of electric wires inside and a sealing agent filled in the inner peripheral portion of the waterproof case, the waterproof case and the sealing agent covering the outer peripheral surface of the pressure sensor. The coating agent further comprises a coating agent having a lower water vapor permeability than any of the above, and the above coating agent has higher water repellency than any of the above waterproof case and the above encapsulant covering the outer peripheral surface of the pressure sensor . wherein the covering all of the outer peripheral surface of the upper Kifutome agent and the waterproof case.

また、上記コーティング剤はフッ素系樹脂であるものが好ましい。 Further, the coating agent is preferably a fluororesin.

本発明の圧力センサによれば、圧力検出素子を防水ケースなどで覆い使用する圧力センサにおいて、ＰＣＴ試験など、過酷な防水性能要求を満足できる。 According to the pressure sensor of the present invention, in a pressure sensor in which a pressure detection element is covered with a waterproof case or the like and used, strict waterproof performance requirements such as a PCT test can be satisfied.

本発明に係る圧力センサの第１の実施形態として液封形の圧力センサを示す縦断面図である。It is a vertical sectional view which shows the liquid-sealed pressure sensor as the 1st Embodiment of the pressure sensor which concerns on this invention. 本発明に係る圧力センサの第２の実施形態として液封形の圧力センサを示す縦断面図である。It is a vertical sectional view which shows the liquid-sealed pressure sensor as the 2nd Embodiment of the pressure sensor which concerns on this invention. 本発明のコーティング対策の効果を示す模式図である。It is a schematic diagram which shows the effect of the coating measure of this invention.

以下、本発明の実施形態を、図面を参照して説明する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.

まず、本発明の第１の実施形態について説明する。 First, the first embodiment of the present invention will be described.

図１は、本発明に係る圧力センサの第１の実施形態として液封形の圧力センサ１００を示す縦断面図である。 FIG. 1 is a vertical cross-sectional view showing a liquid-sealed pressure sensor 100 as a first embodiment of the pressure sensor according to the present invention.

図１において、液封型の圧力センサ１００は、圧力検出される流体を後述する圧力室１１２Ａに供給する流体導入部１１０と、圧力室１１２Ａの流体の圧力を検出する圧力検出部１２０と、圧力検出部１２０で検出された圧力信号を外部に送出する信号送出部１３０と、流体導入部１１０、圧力検出部１２０、及び、信号送出部１３０を覆う外表面部材１４０とを備える。 In FIG. 1, the liquid-sealed pressure sensor 100 includes a fluid introduction unit 110 that supplies a pressure-detected fluid to a pressure chamber 112A, which will be described later, a pressure detection unit 120 that detects the pressure of the fluid in the pressure chamber 112A, and a pressure. It includes a signal transmission unit 130 that transmits a pressure signal detected by the detection unit 120 to the outside, a fluid introduction unit 110, a pressure detection unit 120, and an outer surface member 140 that covers the signal transmission unit 130.

流体導入部１１０は、圧力検出される流体が導かれる配管に接続される金属製の継手部材１１１と、継手部材１１１の配管に接続される端部と別の端部に溶接等により接続されるお椀形状を有する金属製のベースプレート１１２とを備える。 The fluid introduction unit 110 is connected to a metal joint member 111 connected to a pipe through which a fluid whose pressure is detected is guided, and to an end portion of the joint member 111 connected to the pipe and another end portion by welding or the like. A metal base plate 112 having a bowl shape is provided.

継手部材１１１には、上述の配管の接続部の雄ねじ部にねじ込まれる雌ねじ部１１１ａと、配管から導入された流体を圧力室１１２Ａに導くポート１１１ｂとが形成される。ポート１１１ｂの開口端は、ベースプレート１１２の中央に設けられた開口部に溶接等により接続される。なお、ここでは、継手部材１１１に雌ねじ部１１１ａが設けられるものとしたが、雄ねじが設けられるものとしてもよく、または、継手部材１１１の代わりに、銅製の接続パイプが接続されるものとしてもよい。ベースプレート１１２は、継手部材１１１と対向する側に向かい広がるお椀形状を有し、後述するダイヤフラム１２２との間に圧力室１１２Ａを形成する。 The joint member 111 is formed with a female threaded portion 111a screwed into the male threaded portion of the above-mentioned pipe connecting portion and a port 111b for guiding the fluid introduced from the pipe to the pressure chamber 112A. The open end of the port 111b is connected to the opening provided in the center of the base plate 112 by welding or the like. Although the female thread portion 111a is provided in the joint member 111 here, a male thread may be provided, or a copper connecting pipe may be connected instead of the joint member 111. .. The base plate 112 has a bowl shape that spreads toward the side facing the joint member 111, and forms a pressure chamber 112A between the base plate 112 and the diaphragm 122 described later.

圧力検出部１２０は、貫通孔を有するハウジング１２１と、上述の圧力室１１２Ａと後述する液封室１２４Ａとを隔絶するダイヤフラム１２２と、ダイヤフラム１２２の圧力室１１２Ａ側に配置されるダイヤフラム保護カバー１２３と、ハウジング１２１の貫通孔内部にはめ込まれるハーメチックガラス１２４と、ハーメチックガラス１２４の圧力室１１２Ａ側の凹部とダイヤフラム１２２との間にシリコーンオイル等の圧力伝達媒体が充填される液封室１２４Ａと、ハーメチックガラス１２４の中央の貫通孔に配置される支柱１２５と、支柱１２５に固定され液封室１２４Ａ内部に配置される圧力検出素子１２６と、液封室１２４Ａの周囲に配置される電位調整部材１２７と、ハーメチックガラス１２４に固定される複数のリードピン１２８と、ハーメチックガラス１２４に固定されるオイル充填用パイプ１２９とを備える。 The pressure detection unit 120 includes a housing 121 having a through hole, a diaphragm 122 that isolates the pressure chamber 112A described above and a liquid sealing chamber 124A described later, and a diaphragm protective cover 123 arranged on the pressure chamber 112A side of the diaphragm 122. , Hermetic glass 124 fitted inside the through hole of the housing 121, liquid sealing chamber 124A filled with a pressure transmission medium such as silicone oil between the recess on the pressure chamber 112A side of the hermetic glass 124 and the diaphragm 122, and hermetic. A support column 125 arranged in the central through hole of the glass 124, a pressure detecting element 126 fixed to the support column 125 and arranged inside the liquid sealing chamber 124A, and a potential adjusting member 127 arranged around the liquid sealing chamber 124A. , A plurality of lead pins 128 fixed to the hermetic glass 124, and an oil filling pipe 129 fixed to the hermetic glass 124.

ハウジング１２１は、例えばＦｅ・Ｎｉ系合金やステンレス等の金属材料により形成される。ダイヤフラム１２２と、ダイヤフラム保護カバー１２３は、共に金属材料で形成され、共にハウジング１２１の圧力室１１２Ａ側の貫通孔の外周縁部において溶接される。ダイヤフラム保護カバー１２３は、ダイヤフラム１２２を保護するために圧力室１１２Ａ内部に設けられ、流体導入部１１０から導入された流体が通過するための複数の連通孔１２３ａが設けられる。ハウジング１２１は、圧力検出部１２０が組み立てられた後、流体導入部１１０のベースプレート１１２の外周縁部において、溶接等により接続される。 The housing 121 is made of a metal material such as a Fe / Ni alloy or stainless steel. Both the diaphragm 122 and the diaphragm protective cover 123 are made of a metal material, and both are welded at the outer peripheral edge of the through hole on the pressure chamber 112A side of the housing 121. The diaphragm protective cover 123 is provided inside the pressure chamber 112A to protect the diaphragm 122, and is provided with a plurality of communication holes 123a through which the fluid introduced from the fluid introduction unit 110 passes. After the pressure detection unit 120 is assembled, the housing 121 is connected by welding or the like at the outer peripheral edge of the base plate 112 of the fluid introduction unit 110.

支柱１２５の液封室１２４Ａ側には、圧力検出素子１２６が接着剤から構成される接着剤層により接着して固定される。なお、本実施形態では、支柱１２５は、Ｆｅ・Ｎｉ系合金で形成されるものとしたが、これには限定されず、ステンレス等その他の金属材料で形成されるものとしてもよい。圧力検出素子１２６は、流体導入部１１０から圧力室１１２Ａに導入された流体の圧力を、ダイヤフラム１２２を介して液封室１２４Ａ内のシリコーンオイルの圧力変動として検出する半導体圧力センサ等の電子式の圧力センサである。 The pressure detection element 126 is adhered and fixed to the liquid sealing chamber 124A side of the support column 125 by an adhesive layer composed of an adhesive. In the present embodiment, the support column 125 is formed of an Fe / Ni alloy, but the present invention is not limited to this, and the support column 125 may be formed of another metal material such as stainless steel. The pressure detection element 126 is an electronic type such as a semiconductor pressure sensor that detects the pressure of the fluid introduced from the fluid introduction unit 110 into the pressure chamber 112A as the pressure fluctuation of the silicone oil in the liquid sealing chamber 124A via the diaphragm 122. It is a pressure sensor.

電位調整部材１２７は、特許第３９８７３８６号公報に記載されているように、圧力検出素子１２６を無電界（ゼロ電位）内に置き、フレームアースと２次電源との間に生じる電位の影響でチップ内の回路などが悪影響を受けないようにするために設けられる。電位調整部材１２７は、液封室１２４Ａ内の圧力検出素子１２６とダイヤフラム１２２との間に配置され、金属等の導電性の材料で形成され、圧力検出素子１２６のゼロ電位に接続される端子に接続される。 As described in Japanese Patent No. 3987386, the potential adjusting member 127 places the pressure detecting element 126 in a no electric field (zero potential), and the chip is affected by the potential generated between the frame ground and the secondary power supply. It is provided to prevent the internal circuit and the like from being adversely affected. The potential adjusting member 127 is arranged between the pressure detecting element 126 and the diaphragm 122 in the liquid sealing chamber 124A, is formed of a conductive material such as metal, and is connected to a terminal connected to the zero potential of the pressure detecting element 126. Be connected.

ハーメチックガラス１２４には、複数のリードピン１２８と、オイル充填用パイプ１２９が貫通状態でハーメチック処理により固定される。本実施形態では、リードピン１２８として、全部で８本のリードピン１２８が設けられている。すなわち、外部入出力用（Ｖｏｕｔ）、電源供給用（Ｖｃｃ）、接地用（ＧＮＤ）の３本のリードピン１２８と、圧力検出素子１２６の調整用の端子として５本のリードピン１２８が設けられている。なお、図１においては、８本のリードピン１２８のうち４本が示されている。複数のリードピン１２８は、例えば、金属またはアルミニウム製のボンディングワイヤ１２６ａにより圧力検出素子１２６に接続され、圧力検出素子１２６の外部入出力端子を構成している。 A plurality of lead pins 128 and an oil filling pipe 129 are fixed to the hermetic glass 124 by a hermetic treatment in a penetrating state. In the present embodiment, a total of eight lead pins 128 are provided as the lead pins 128. That is, three lead pins 128 for external input / output (Vout), power supply (Vcc), and grounding (GND), and five lead pins 128 as terminals for adjusting the pressure detection element 126 are provided. .. In addition, in FIG. 1, four out of eight lead pins 128 are shown. The plurality of lead pins 128 are connected to the pressure detection element 126 by, for example, a metal or aluminum bonding wire 126a, and form an external input / output terminal of the pressure detection element 126.

オイル充填用パイプ１２９は、液封室１２４Ａの内部にシリコーンオイル等の圧力伝達媒体を充填するために設けられる。なお、オイル充填用パイプ１２９の一方の端部は、オイル充填後、図１の点線で示されるように、押し潰されて閉塞される。 The oil filling pipe 129 is provided to fill the inside of the liquid sealing chamber 124A with a pressure transmission medium such as silicone oil. After filling the oil, one end of the oil filling pipe 129 is crushed and closed as shown by the dotted line in FIG.

信号送出部１３０は、圧力検出部１２０の圧力室１１２Ａに対向する側に設けられ、複数のリードピン１２８を配列する端子台１３１と、端子台１３１に接着剤１３２ａにより固定され、複数のリードピン１２８に接続される複数の接続端子１３２と、複数の接続端子１３２の外端部に半田付け等により電気的に接続される複数の電線１３３と、ハウジング１２１の上端部と端子台１３１の間にシリコーン系接着剤で形成される静電気保護層１３４とを備える。 The signal transmission unit 130 is provided on the side of the pressure detection unit 120 facing the pressure chamber 112A, and is fixed to the terminal block 131 in which a plurality of lead pins 128 are arranged and the terminal block 131 with an adhesive 132a, and is fixed to the plurality of lead pins 128. A silicone system between the plurality of connection terminals 132 to be connected, the plurality of electric wires 133 electrically connected to the outer ends of the plurality of connection terminals 132 by soldering, etc., and the upper end of the housing 121 and the terminal block 131. It includes an electrostatic protection layer 134 formed of an adhesive.

端子台１３１は、略円柱形状であって、当該円柱の中段付近に、上述の複数のリードピン１２８を固定するための固定壁を有する形状に形成され、樹脂材料、例えば、ポリブチレンテレフタレート（ＰＢＴ）により形成される。端子台１３１は、例えば、エポキシ樹脂などの接着剤により、圧力検出部１２０のハウジング１２１の上部に固定される。 The terminal block 131 has a substantially cylindrical shape, and is formed in a shape having a fixing wall for fixing the plurality of lead pins 128 described above in the vicinity of the middle stage of the cylinder, and is made of a resin material such as polybutylene terephthalate (PBT). Is formed by. The terminal block 131 is fixed to the upper part of the housing 121 of the pressure detection unit 120 with an adhesive such as epoxy resin.

接続端子１３２は、金属材料で形成され、端子台１３１の上述の固定壁より上段の円柱側壁に垂直に接着剤１３２ａにより固定される。なお、本実施形態では、外部入出力用（Ｖｏｕｔ）、電源供給用（Ｖｃｃ）、接地用（ＧＮＤ）の３本の接続端子１３２が設けられる。３本の接続端子１３２の内端部は、それぞれ対応するリードピン１２８に溶接等により電気的に接続されるが、この接続方法には限定されず、その他の方法で接続してもよい。 The connection terminal 132 is made of a metal material and is fixed by an adhesive 132a perpendicularly to the cylindrical side wall above the above-mentioned fixing wall of the terminal block 131. In this embodiment, three connection terminals 132 for external input / output (Vout), power supply (Vcc), and grounding (GND) are provided. The inner ends of the three connection terminals 132 are electrically connected to the corresponding lead pins 128 by welding or the like, but the connection method is not limited to this, and other methods may be used for connection.

また、本実施形態では、３本の接続端子１３２に接続するために３本の電線１３３が設けられる。電線１３３は、電線１３３のポリ塩化ビニル（ＰＶＣ）等で形成された被覆をはがした芯線１３３ａに予め予備半田を行い、その撚り線を束ねたものを、上述の接続端子１３２の外端部に設けられた穴に貫通させた後、半田付けや溶接等により接続端子１３２に電気的に接続されるが、この接続方法には限定されず、その他の方法で接続してもよい。また、３本の電線１３３は、圧力センサ１００の周囲を覆う外表面部材１４０から引き出された後、３本束ねた状態にしてポリ塩化ビニル（ＰＶＣ）等で形成された保護チューブ１３５で覆われる。 Further, in the present embodiment, three electric wires 133 are provided for connecting to the three connection terminals 132. The electric wire 133 is obtained by pre-soldering the core wire 133a, which has been stripped of the coating formed of polyvinyl chloride (PVC) or the like of the electric wire 133, and bundling the stranded wires, which is the outer end portion of the above-mentioned connection terminal 132. After penetrating through the hole provided in, it is electrically connected to the connection terminal 132 by soldering, welding, or the like, but the connection method is not limited to this, and other methods may be used for connection. Further, the three electric wires 133 are pulled out from the outer surface member 140 that covers the circumference of the pressure sensor 100, and then are covered with a protective tube 135 formed of polyvinyl chloride (PVC) or the like in a bundled state. ..

静電気保護層１３４は、ハーメチックガラス１２４の上端面を覆うようにハウジング１２１の上端面に塗布され、シリコーン系接着剤により形成される所定の厚さを有する環状の接着層と、複数のリードピン１２８が突出するハーメチックガラス１２４の上端面全体に塗布され、シリコーン系接着剤からなる被覆層とから構成される。静電気保護層１３４は、ＥＳＤ保護回路の有無に影響されることなく、圧力検出部１２０の静電気耐力を向上させるために設けられる。 The electrostatic protection layer 134 is applied to the upper end surface of the housing 121 so as to cover the upper end surface of the hermetic glass 124, and has an annular adhesive layer having a predetermined thickness formed by a silicone-based adhesive and a plurality of lead pins 128. It is applied to the entire upper end surface of the protruding hermetic glass 124 and is composed of a coating layer made of a silicone-based adhesive. The electrostatic protection layer 134 is provided to improve the electrostatic proof stress of the pressure detection unit 120 without being affected by the presence or absence of the ESD protection circuit.

外表面部材１４０は、略円筒形状で圧力検出部１２０及び信号送出部１３０の周囲を覆う防水ケース１４１と、端子台１３１の上部に被される端子台キャップ１４２と、防水ケース１４１の内周面とハウジング１２１の外周面及び端子台１３１の外周面との間を充填する封止剤１４３とを備える。 The outer surface member 140 has a substantially cylindrical shape, a waterproof case 141 that covers the periphery of the pressure detection unit 120 and the signal transmission unit 130, a terminal block cap 142 that covers the upper part of the terminal block 131, and an inner peripheral surface of the waterproof case 141. A sealant 143 that fills the space between the outer peripheral surface of the housing 121 and the outer peripheral surface of the terminal block 131 is provided.

端子台キャップ１４２は、例えば樹脂材料により形成される。端子台キャップ１４２は、本実施形態では、上述の円柱形状の端子台１３１の上部を塞ぐ形状に形成され、ウレタン系樹脂等の封止剤１４３が充填される前に端子台１３１の上部に被される。しかしながら、端子台キャップ１４２はこの形状には限定されず、端子台１３１の上部及び防水ケース１４１の上部を一体として塞ぐ形状に形成され、封止剤１４３が充填された後に被されるものとしても、または、端子台キャップ１４２とは別に新たな蓋部材が設けられ、端子台キャップ１４２及び封止剤１４３が配置された後に、防水ケース１４１の上部に新たな蓋部材が被されるものとしてもよい。 The terminal block cap 142 is formed of, for example, a resin material. In the present embodiment, the terminal block cap 142 is formed in a shape that closes the upper portion of the above-mentioned cylindrical terminal block 131, and is covered on the upper portion of the terminal block 131 before being filled with the sealing agent 143 such as urethane resin. Will be done. However, the terminal block cap 142 is not limited to this shape, and may be formed in a shape that integrally closes the upper portion of the terminal block 131 and the upper portion of the waterproof case 141, and may be covered after being filled with the sealant 143. Alternatively, a new lid member is provided separately from the terminal block cap 142, and after the terminal block cap 142 and the sealing agent 143 are arranged, the new lid member is covered on the upper part of the waterproof case 141. Good.

防水ケース１４１は、樹脂材料、例えば、ポリブチレンテレフタレート（ＰＢＴ）により略円筒形状に形成され、円筒形状の下端部には、内側に向かうフランジ部が設けられている。このフランジ部には、防水ケース１４１の上部の開口部から挿入された信号送出部１３０及び圧力検出部１２０が接続された流体導入部１１０のベースプレート１１２の外周部が当接する。この状態で封止剤１４３を充填することにより圧力検出部１２０等の内部の部品が固定される。 The waterproof case 141 is formed of a resin material, for example, polybutylene terephthalate (PBT) into a substantially cylindrical shape, and a flange portion facing inward is provided at a lower end portion of the cylindrical shape. The outer peripheral portion of the base plate 112 of the fluid introduction portion 110 to which the signal transmission portion 130 and the pressure detection portion 120 inserted through the opening at the upper part of the waterproof case 141 are in contact with the flange portion. By filling the sealant 143 in this state, internal parts such as the pressure detection unit 120 are fixed.

図１に示す本発明の圧力センサ１００では、防水ケース１４１、端子台キャップ１４２、及び、封止剤１４３を含む圧力センサ１００の外周面の全面が均一にコーティング剤１４４でコーティングされる。なお、金属部品である継手部材１１１、及び、ベースプレート１１２などには、コーティング剤１４４をコーティングする必要はない。コーティング剤としては、防水ケース１４１及び封止剤１４３のいずれかよりも水蒸気透過度が低いコーティング剤を使用すると良い。なお、例えばＰＢＴで形成された防水ケース１４１の水蒸気透過度は１．２ｇ・ｍｍ／ｍ２・２４ｈであり、ウレタン系樹脂の封止剤１４３の水蒸気透過度は７ｇ・ｍｍ／ｍ２・２４ｈである。具体的なコーティング剤の種類としては、フッ素系樹脂を含む、例えば、フロロサーフ（登録商標）などのコーティング剤が使用可能であるが、これには限定されない。フッ素系樹脂のコーティング剤１４４は、ポリマー系などの他のコーティング剤と比較して、難付着性、撥水性・撥油性、耐熱性、耐磨耗性などの性能が優れている。In the pressure sensor 100 of the present invention shown in FIG. 1, the entire outer peripheral surface of the pressure sensor 100 including the waterproof case 141, the terminal block cap 142, and the sealing agent 143 is uniformly coated with the coating agent 144. It is not necessary to coat the joint member 111, the base plate 112, and the like, which are metal parts, with the coating agent 144. As the coating agent, it is preferable to use a coating agent having a lower water vapor permeability than either the waterproof case 141 or the sealing agent 143. Incidentally, for example, water vapor permeability of the waterproof case 141 formed with PBT is 1.2g · mm / m 2 · 24h , water vapor permeability of the sealant 143 of the urethane resin is 7g · mm / m 2 · 24h Is. As a specific type of coating agent, a coating agent containing, for example, Fluorosurf (registered trademark) containing a fluororesin can be used, but the coating agent is not limited thereto. The fluororesin coating agent 144 is superior in performance such as resistance to adhesion, water repellency / oil repellency, heat resistance, and abrasion resistance as compared with other coating agents such as polymers.

このような、フッ素系樹脂を含むコーティング剤１４４を圧力センサ１００の外周面の全面に均一にコーティングしてＰＣＴ試験を行った。試験条件としては、コーティング剤１４４として、フロロサーフ（ＦＧ−３０５０シリーズ）（登録商標）を、膜圧１２０μｍで塗布し、１１０℃、１．４気圧の、高温の水蒸気ガスが充満する環境に放置する等の試験条件が考えられる。 A PCT test was conducted by uniformly coating the entire outer peripheral surface of the pressure sensor 100 with such a coating agent 144 containing a fluororesin. As a test condition, as a coating agent 144, Fluorosurf (FG-3050 series) (registered trademark) is applied at a film pressure of 120 μm and left in an environment filled with high-temperature water vapor gas at 110 ° C. and 1.4 atm. And other test conditions are conceivable.

図３は、本発明のコーティング対策の効果を示す模式図である。
図３に示す横軸は耐久時間（ｈ）を示し、縦軸は絶縁耐圧（ＭΩ）を示す。図３に示すように、コーティング剤が有る場合は、コーティング剤が無い場合と比較して、絶縁耐圧（ここでは１０００ＭΩ）を確保できる耐久時間が長くなることがわかる。FIG. 3 is a schematic view showing the effect of the coating measures of the present invention.
The horizontal axis shown in FIG. 3 indicates the endurance time (h), and the vertical axis indicates the dielectric strength (MΩ). As shown in FIG. 3, it can be seen that when the coating agent is present, the durability time during which the dielectric strength (here, 1000 MΩ) can be secured is longer than when the coating agent is not present.

また、上述のようにフッ素系樹脂のコーティング剤１４４のように撥水性を有するコーティング剤を使用すると水が付着するような環境において、水との接触面積が小さくなるため、防水性能が更に向上する。 Further, when a water-repellent coating agent such as the fluorine-based resin coating agent 144 is used as described above, the contact area with water becomes smaller in an environment where water adheres, so that the waterproof performance is further improved. ..

なお、本実施形態では、圧力センサの一例として、液封形の圧力センサ１００を例にとり説明したが、これには限定されず、本発明は、防水ケースなどの樹脂で防水機能を確保する全ての圧力センサに適用可能である。 In the present embodiment, the liquid-sealed pressure sensor 100 has been described as an example of the pressure sensor, but the present invention is not limited to this, and the present invention is all that secure the waterproof function with a resin such as a waterproof case. It is applicable to the pressure sensor of.

以上のように本発明の第１の実施形態によれば、圧力検出素子を防水ケースなどで覆い使用する圧力センサにおいて、ＰＣＴ試験など、過酷な防水性能要求を満足できる圧力センサを提供できる。 As described above, according to the first embodiment of the present invention, in a pressure sensor in which a pressure detection element is covered with a waterproof case or the like, it is possible to provide a pressure sensor that can satisfy strict waterproof performance requirements such as a PCT test.

次に、本発明の第２の実施形態について説明する。 Next, a second embodiment of the present invention will be described.

図２は、本発明に係る圧力センサの第２の実施形態として液封形の圧力センサ２００を示す縦断面図である。 FIG. 2 is a vertical cross-sectional view showing a liquid-sealed pressure sensor 200 as a second embodiment of the pressure sensor according to the present invention.

図２において、液封型の圧力センサ２００は、図１に示す圧力センサ１００と比較して、コーティング剤２４４がコーティングされる位置が異なり、その他の構成要素は同じである。同様の構成要素には、同様の参照符号を付し、説明を省略する。 In FIG. 2, the liquid-sealed pressure sensor 200 is different in the position where the coating agent 244 is coated as compared with the pressure sensor 100 shown in FIG. 1, and other components are the same. Similar components are designated by the same reference numerals, and description thereof will be omitted.

図２において、液封型の圧力センサ２００では、コーティング剤２４４が防水ケース２４１の上部の開口部に配置された封止剤２４３及び端子台キャップ２４２の上面のみにコーティングされる。コーティング剤２４４としては、第１の実施形態と同様に、フッ素系樹脂を含むコーティング剤が使用される。これにより、第１の実施形態の圧力センサ１００と同等かそれに近い性能が期待できる。 In FIG. 2, in the liquid-sealed pressure sensor 200, the coating agent 244 is coated only on the upper surface of the sealant 243 and the terminal block cap 242 arranged in the upper opening of the waterproof case 241. As the coating agent 244, a coating agent containing a fluororesin is used as in the first embodiment. As a result, performance equivalent to or close to that of the pressure sensor 100 of the first embodiment can be expected.

以上のように本発明の第２の実施形態によれば、第１の実施形態の圧力センサと同等の効果があり、更に、第１の実施形態の圧力センサと比較してコストを抑制できるという効果がある。 As described above, according to the second embodiment of the present invention, the effect is equivalent to that of the pressure sensor of the first embodiment, and the cost can be suppressed as compared with the pressure sensor of the first embodiment. effective.

以上説明したように、本発明の圧力センサによれば、圧力検出素子を防水ケースなどで覆い使用する圧力センサにおいて、ＰＣＴ試験など、過酷な防水性能要求を満足できる。 As described above, according to the pressure sensor of the present invention, a pressure sensor in which the pressure detection element is covered with a waterproof case or the like can satisfy strict waterproof performance requirements such as a PCT test.

１００、２００ 圧力センサ
１１０、２１０ 流体導入部
１１１、２１１ 継手部材
１１１ａ、２１１ａ 雌ねじ部
１１１ｂ、２１１ｂ ポート
１１２、２１２ ベースプレート
１１２Ａ、２１２Ａ 圧力室
１２０、２２０ 圧力検出部
１２１、２２１ ハウジング
１２２、２２２ ダイヤフラム
１２３、２２３ ダイヤフラム保護カバー
１２３ａ、２２３ａ 連通孔
１２４、２２４ ハーメチックガラス
１２４Ａ、２２４Ａ 液封室
１２５、２２５ 支柱
１２６、２２６ 圧力検出素子
１２６ａ、２２６ａ ボンディングワイヤ
１２７、２２７ 電位調整部材
１２８、２２８ リードピン
１２９、２２９ オイル充填用パイプ
１３０、２３０ 信号送出部
１３１、２３１ 端子台
１３２、２３２ 接続端子
１３２ａ、２３２ａ 接着剤
１３３、２３３ 電線
１３３ａ、２３３ａ 芯線
１３４、２３４ 静電気保護層
１４０、２４０ 外表面部材
１４１、２４１ 防水ケース
１４２、２４２ 端子台キャップ
１４３、２４３ 封止剤
１４４、２４４ コーティング剤100, 200 Pressure sensor 110, 210 Fluid introduction part 111, 211 Joint member 111a, 211a Female thread part 111b, 211b Port 112, 212 Base plate 112A, 212A Pressure chamber 120, 220 Pressure detection part 121, 221 Housing 122, 222 Diaphragm 123, 223 Diaphragm protective cover 123a, 223a Communication hole 124, 224 Hermetic glass 124A, 224A Liquid sealing chamber 125, 225 Strut 126, 226 Pressure detection element 126a, 226a Bonding wire 127, 227 Potential adjusting member 128, 228 Lead pin 129, 229 Oil filling Pipes 130, 230 Signal transmission part 131, 231 Terminal block 132, 232 Connection terminal 132a, 232a Adhesive 133, 233 Electric wire 133a, 233a Core wire 134, 234 Electrostatic protection layer 140, 240 Outer surface member 141, 241 Waterproof case 142, 242 Terminal block cap 143, 243 Sealant 144, 244 Coating agent

Claims (2)

流体の圧力を検出する圧力検出素子と、
前記圧力検出素子に接続され、外部に引き出される複数の電線と、
前記圧力検出素子、及び、前記複数の電線を内部に収容する防水ケースと、
前記防水ケースの内周部に充填される封止剤と
を備える圧力センサにおいて、
前記圧力センサの外周面を覆う前記防水ケース及び前記封止剤のいずれよりも水蒸気透過度が低いコーティング剤を更に備え、
前記コーティング剤は、前記圧力センサの外周面を覆う前記防水ケース及び前記封止剤のいずれよりも撥水性が高く、
前記コーティング剤は、前記封止剤及び前記防水ケースの外周面の全てを覆うことを特徴とする圧力センサ。 A pressure detection element that detects the pressure of a fluid and
A plurality of electric wires connected to the pressure detection element and pulled out to the outside,
A waterproof case for accommodating the pressure detecting element and the plurality of electric wires inside,
In a pressure sensor provided with a sealant filled in the inner peripheral portion of the waterproof case.
Further provided with a coating agent having a lower water vapor permeability than either the waterproof case or the sealant covering the outer peripheral surface of the pressure sensor.
The coating agent has higher water repellency than both the waterproof case and the sealant that cover the outer peripheral surface of the pressure sensor.
The coating agent, a pressure sensor, characterized in that covers all of the outer peripheral surface of the front Kifutome agent and the waterproof case. 前記コーティング剤は、フッ素系樹脂であることを特徴とする請求項１に記載の圧力センサ。 The pressure sensor according to claim 1, wherein the coating agent is a fluororesin.
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