JP6729015B2 - 圧電素子 - Google Patents
圧電素子 Download PDFInfo
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- JP6729015B2 JP6729015B2 JP2016114522A JP2016114522A JP6729015B2 JP 6729015 B2 JP6729015 B2 JP 6729015B2 JP 2016114522 A JP2016114522 A JP 2016114522A JP 2016114522 A JP2016114522 A JP 2016114522A JP 6729015 B2 JP6729015 B2 JP 6729015B2
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- 239000000758 substrate Substances 0.000 description 10
- 230000005684 electric field Effects 0.000 description 9
- 238000000034 method Methods 0.000 description 9
- 239000004020 conductor Substances 0.000 description 8
- 238000010586 diagram Methods 0.000 description 8
- 238000005452 bending Methods 0.000 description 7
- 229910052720 vanadium Inorganic materials 0.000 description 6
- 230000008602 contraction Effects 0.000 description 5
- 238000006073 displacement reaction Methods 0.000 description 5
- 238000003825 pressing Methods 0.000 description 5
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 230000000149 penetrating effect Effects 0.000 description 4
- 238000005498 polishing Methods 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 229910052721 tungsten Inorganic materials 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000002003 electrode paste Substances 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
- B06B1/0648—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element of rectangular shape
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/001—Driving devices, e.g. vibrators
- H02N2/002—Driving devices, e.g. vibrators using only longitudinal or radial modes
- H02N2/0025—Driving devices, e.g. vibrators using only longitudinal or radial modes using combined longitudinal modes
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/005—Mechanical details, e.g. housings
- H02N2/0065—Friction interface
- H02N2/007—Materials
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/0075—Electrical details, e.g. drive or control circuits or methods
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
- H10N30/063—Forming interconnections, e.g. connection electrodes of multilayered piezoelectric or electrostrictive parts
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
- H10N30/067—Forming single-layered electrodes of multilayered piezoelectric or electrostrictive parts
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Description
図1は、第一実施形態に係る圧電素子の斜視図である。図1に示される第一実施形態に係る圧電素子1Aは、複数の圧電体層を積層して一体化することによって形成された、いわゆる積層型圧電素子である。圧電素子1Aは、交流電圧を印加されて駆動されることによって、後述の被駆動体DR(図4参照)を移動させる機能を有している。圧電素子1Aは、本体部2と、本体部2に設けられ、被駆動体DRに当接される摩擦部材3と、を備えている。
図7は、第二実施形態に係る圧電素子の斜視図である。図7に示される第二実施形態に係る圧電素子1Bは、本体部2における電極層11,21,31,41の構成、及び摩擦部材3の配置の点で主に第一実施形態に係る圧電素子1Aと相違している。以下では、これらの相違点を中心に説明を行う。
図12は、第三実施形態に係る圧電素子の本体部の分解斜視図である。図13は、第三実施形態に係る圧電素子の断面図である。図12及び図13に示される第三実施形態に係る圧電素子1Cは、電極層41の構成の点で、第二実施形態に係る圧電素子1Bと、主に相違している。以下では、この相違点を中心に説明を行う。
Claims (7)
- 所定方向に沿って並んだ第一領域及び第二領域を有する本体部を備え、
前記第一領域は、前記所定方向に沿って伸縮変形し、
前記第二領域は、前記所定方向に交差する交差方向の一方側又は他方側が湾曲外側となるように湾曲変形し、
前記第二領域は、前記交差方向に沿って並んだ第三領域及び第四領域を有し、
前記第三領域及び第四領域は、前記所定方向に沿って互いに独立に伸縮変形し、
前記第一領域は、第一圧電体と、互いに対向するように前記第一圧電体に配置された第一電極及び第二電極と、を含み、
前記第三領域は、第二圧電体と、互いに対向するように前記第二圧電体に配置された第三電極及び第四電極と、を含み、
前記第四領域は、第三圧電体と、互いに対向するように前記第三圧電体に配置された第五電極及び第六電極と、を含む、圧電素子。 - 前記第二電極と、前記第四電極と、前記第六電極とは、グラウンド電極である、請求項1に記載の圧電素子。
- 所定方向に沿って並んだ第一領域及び第二領域を有する本体部を備え、
前記第一領域は、前記所定方向に沿って伸縮変形し、
前記第二領域は、前記所定方向に交差する交差方向の一方側又は他方側が湾曲外側となるように湾曲変形し、
前記本体部は、複数の圧電体層が前記交差方向に沿って積層された1つの積層体として構成されている、圧電素子。 - 前記第二領域は、前記交差方向に沿って並んだ第三領域及び第四領域を有し、
前記第三領域及び第四領域は、前記所定方向に沿って互いに独立に伸縮変形する、請求項3に記載の圧電素子。 - 前記本体部に設けられ、被駆動体に当接される摩擦部材を更に備えている、請求項1〜4のいずれか一項に記載の圧電素子。
- 前記摩擦部材は、前記第二領域側に設けられている、請求項5に記載の圧電素子。
- 前記第一領域の前記所定方向に沿う長さと、前記第二領域の前記所定方向に沿う長さとは、互いに異なっている、請求項1〜6のいずれか一項に記載の圧電素子。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016114522A JP6729015B2 (ja) | 2016-06-08 | 2016-06-08 | 圧電素子 |
CN201710423278.3A CN107482111B (zh) | 2016-06-08 | 2017-06-07 | 压电元件 |
US15/616,127 US10686119B2 (en) | 2016-06-08 | 2017-06-07 | Piezoelectric device |
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JP2016114522A JP6729015B2 (ja) | 2016-06-08 | 2016-06-08 | 圧電素子 |
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JP2017221042A JP2017221042A (ja) | 2017-12-14 |
JP6729015B2 true JP6729015B2 (ja) | 2020-07-22 |
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JP2016114522A Active JP6729015B2 (ja) | 2016-06-08 | 2016-06-08 | 圧電素子 |
Country Status (3)
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US (1) | US10686119B2 (ja) |
JP (1) | JP6729015B2 (ja) |
CN (1) | CN107482111B (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7087942B2 (ja) * | 2018-11-16 | 2022-06-21 | Tdk株式会社 | 振動デバイス、電子機器、及び、振動デバイスの駆動方法 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5140215A (en) * | 1988-09-19 | 1992-08-18 | Brother Kogyo Kabushiki Kaisha | Vibrator and ultrasonic motor employing the same |
US5068566A (en) * | 1990-06-04 | 1991-11-26 | Rockwell International Corporation | Electric traction motor |
US5365296A (en) | 1990-10-30 | 1994-11-15 | Canon Kabushiki Kaisha | Motor and an optical apparatus having such motor |
JPH04165966A (ja) | 1990-10-30 | 1992-06-11 | Canon Inc | 圧電リニアモータ |
US5178012A (en) * | 1991-05-31 | 1993-01-12 | Rockwell International Corporation | Twisting actuator accelerometer |
US5747915A (en) * | 1996-08-19 | 1998-05-05 | Sandia Corporation | Bent shaft motor |
JP2000060163A (ja) * | 1998-02-10 | 2000-02-25 | Nikon Corp | 振動アクチュエ―タ |
DE102004024656A1 (de) * | 2004-05-18 | 2005-12-08 | Physik Instrumente (Pi) Gmbh & Co. Kg | Piezoelektrischer Ultraschallmotor |
JP5116250B2 (ja) * | 2006-04-11 | 2013-01-09 | キヤノン株式会社 | 積層圧電素子及びその製造方法、並びに振動波駆動装置 |
KR100818482B1 (ko) | 2006-10-16 | 2008-04-01 | 삼성전기주식회사 | 압전 모터 |
US7922302B2 (en) | 2007-07-31 | 2011-04-12 | Hewlett-Packard Development Company, L.P. | Piezoelectric actuation mechanism |
JP5298999B2 (ja) | 2009-03-19 | 2013-09-25 | Tdk株式会社 | 積層型圧電素子 |
JP5959807B2 (ja) * | 2010-08-05 | 2016-08-02 | キヤノン株式会社 | アクチュエータおよびアクチュエータ構造体 |
EP2682995A4 (en) | 2011-03-01 | 2014-10-22 | Murata Manufacturing Co | PIEZOELECTRIC ELEMENT AND PIEZOELECTRIC DEVICE THEREWITH |
JP5974493B2 (ja) * | 2012-01-18 | 2016-08-23 | 株式会社村田製作所 | 圧電ポンプ、圧電ポンプの製造方法 |
JP5673752B2 (ja) | 2013-07-25 | 2015-02-18 | Tdk株式会社 | 圧電アクチュエータ |
EP3172826B1 (de) * | 2014-07-23 | 2019-04-17 | Physik Instrumente (PI) GmbH & Co. Kg | Ultraschallmotor |
-
2016
- 2016-06-08 JP JP2016114522A patent/JP6729015B2/ja active Active
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2017
- 2017-06-07 CN CN201710423278.3A patent/CN107482111B/zh active Active
- 2017-06-07 US US15/616,127 patent/US10686119B2/en active Active
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Publication number | Publication date |
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US20170358733A1 (en) | 2017-12-14 |
US10686119B2 (en) | 2020-06-16 |
CN107482111B (zh) | 2020-01-07 |
CN107482111A (zh) | 2017-12-15 |
JP2017221042A (ja) | 2017-12-14 |
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