JP6721393B2 - Magnetic sensor - Google Patents

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JP6721393B2
JP6721393B2 JP2016080671A JP2016080671A JP6721393B2 JP 6721393 B2 JP6721393 B2 JP 6721393B2 JP 2016080671 A JP2016080671 A JP 2016080671A JP 2016080671 A JP2016080671 A JP 2016080671A JP 6721393 B2 JP6721393 B2 JP 6721393B2
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石田　一裕
一裕 石田
田中　健
健 田中
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Asahi Kasei EMD Corp
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Description

本発明は、磁気センサに関する。 The present invention relates to a magnetic sensor.

従来、予め定められた一方向の磁気の有無を検出する巨大磁気抵抗（ＧＭＲ：Ｇｉａｎｔ Ｍａｇｎｅｔｏ−Ｒｅｓｉｓｔａｎｃｅ）素子及びトンネル磁気抵抗（ＴＭＲ：Ｔｕｎｎｅｌ Ｍａｇｎｅｔｏ−Ｒｅｓｉｓｔａｎｃｅ）素子が知られていた。また、これらの磁気抵抗素子と、磁気収束部とを組み合わせ、少なくとも直交する２つの磁場成分を含む入力磁場を検出して、当該２つの成分を分離して出力する磁気センサが知られていた（例えば、特許文献１参照）。
特許文献１ 国際公開第２０１４／１５６１０８号 BACKGROUND ART Conventionally, a giant magnetoresistive (GMR) element and a tunnel magnetoresistive (TMR) element that detect the presence or absence of predetermined one-way magnetism have been known. Further, there is known a magnetic sensor that combines these magnetoresistive elements and a magnetic flux concentrator, detects an input magnetic field including at least two orthogonal magnetic field components, and separates and outputs the two components ( For example, see Patent Document 1).
Patent Document 1 International Publication No. 2014/156108

このような磁気センサを用いて例えばＸＹＺ方向といった直交する３方向の磁場を検出する場合、複数の磁気抵抗素子を用いて検出することが知られていた。しかしながら、複数の磁気抵抗素子を略同一に精度良く形成しないと、それらの感度等の性能にばらつきが生じ、一の軸の検出結果に他の軸の磁場成分の影響が含まれてしまう「他軸感度」が発生することがあった。 When using such a magnetic sensor to detect a magnetic field in three orthogonal directions such as XYZ directions, it has been known to detect using a plurality of magnetoresistive elements. However, if a plurality of magnetoresistive elements are not formed with substantially the same accuracy with high accuracy, their performances such as sensitivity will vary, and the detection result of one axis will include the influence of the magnetic field components of the other axis. "Axis sensitivity" sometimes occurred.

本発明の第１の態様においては、第１方向に延伸する第１磁気収束部と、第１方向に延伸し、第１磁気収束部を挟む第１感磁部および第２感磁部と、を含む基板上の第１パターンと、第１磁気収束部の第１方向とは反対側の端部よりも第１方向側にずれた位置から、第１方向に延伸する第２磁気収束部と、第１方向に延伸し、第２磁気収束部を挟む第３感磁部および第４感磁部と、を含み、基板上において第１パターンと点対称に配置される第２パターンと、を有する第１複合パターンと、第１複合パターンと重ならない位置に設けられ、第１複合パターンと同形状の複合パターンを有する第２複合パターンと、を備え、第１複合パターンおよび第２複合パターンの、第１感磁部の組、第２感磁部の組、第３感磁部の組、および第４感磁部の組は、基板上において第１方向とは直交し、かつ、正負が異なる方向に感磁軸をそれぞれ有する、磁気センサを提供する。 In the first aspect of the present invention, a first magnetic flux concentrating portion that extends in the first direction, a first magnetic sensitive portion and a second magnetic sensitive portion that extend in the first direction and sandwich the first magnetic flux concentrating portion, A first pattern on the substrate including: and a second magnetic flux concentrator that extends in the first direction from a position that is deviated toward the first direction from an end of the first magnetic flux concentrator that is opposite to the first direction. And a second pattern extending in the first direction and including a third magnetic sensing part and a fourth magnetic sensitive part sandwiching the second magnetic flux concentrating part, the second pattern being arranged point-symmetrically to the first pattern on the substrate. The first composite pattern and the second composite pattern which are provided at positions not overlapping with the first composite pattern and have the same composite pattern as the first composite pattern. The set of the first magnetic sensitive unit, the set of the second magnetic sensitive unit, the set of the third magnetic sensitive unit, and the set of the fourth magnetic sensitive unit are orthogonal to the first direction on the substrate, and are positive and negative. Provided is a magnetic sensor having magnetic sensitive axes in different directions.

本発明の第２の態様においては、第１方向に延伸する第１磁気収束部と、第１方向に延伸し、第１磁気収束部を挟み、第１磁気収束部と一部が重なる第１感磁部および第２感磁部と、を含む基板上の第１パターンと、第１方向に延伸し、第１磁気収束部と並走する第２磁気収束部と、第１方向に延伸し、第２磁気収束部を挟み、第２磁気収束部と一部が重なる第３感磁部および第４感磁部と、を含み、基板上において第１パターンと点対称に配置される第２パターンと、を有する第１複合パターンと、第１複合パターンと重ならない位置に設けられ、第１複合パターンと同形状の複合パターンを有する第２複合パターンと、を備え、第１複合パターンおよび第２複合パターンの、第１感磁部の組、第２感磁部の組、第３感磁部の組、および第４感磁部の組は、基板上において第１方向とは直交し、かつ、正負が異なる方向に感磁軸をそれぞれ有する、磁気センサを提供する。 In a second aspect of the present invention, a first magnetic flux concentrating portion that extends in the first direction and a first magnetic flux concentrating portion that extends in the first direction, sandwiches the first magnetic flux concentrating portion, and partially overlaps the first magnetic flux concentrating portion. A first pattern on a substrate including a magnetically sensitive portion and a second magnetically sensitive portion, a second magnetic flux converging portion extending in the first direction and extending in the first direction, and a second magnetic flux concentrating portion extending in parallel with the first magnetic flux concentrating portion; A second magnetic flux converging portion, a third magnetic sensitive portion and a fourth magnetic sensitive portion that partially overlap the second magnetic flux concentrating portion, and are arranged point-symmetrically with respect to the first pattern on the substrate. A first composite pattern having a pattern and a second composite pattern having a composite pattern of the same shape as the first composite pattern, the second composite pattern being provided at a position not overlapping with the first composite pattern. The set of the first magnetic sensitive section, the set of the second magnetic sensitive section, the set of the third magnetic sensitive section, and the set of the fourth magnetic sensitive section of the two composite patterns are orthogonal to the first direction on the substrate, Also, a magnetic sensor having magnetic sensitive axes in directions of different positive and negative is provided.

本発明の第３の態様においては、第１方向に延伸する第１磁気収束部と、第１方向に延伸し、第１磁気収束部の第１方向側の端部において第１磁気収束部を挟む第１感磁部および第２感磁部と、第１方向に延伸し、第１磁気収束部の第１方向とは反対側の端部において第１磁気収束部を挟む第３感磁部および第４感磁部と、を有する第１複合パターンと、第１複合パターンと重ならない位置に設けられ、第１複合パターンと同形状の複合パターンを有する第２複合パターンと、を備え、第１複合パターンおよび第２複合パターンの、第１感磁部の組、第２感磁部の組、第３感磁部の組、および第４感磁部の組は、基板上において第１方向とは直交し、かつ、正負が異なる方向に感磁軸をそれぞれ有する、磁気センサを提供する。 In a third aspect of the present invention, a first magnetic flux concentrating portion extending in the first direction and a first magnetic flux concentrating portion extending in the first direction and having a first magnetic flux concentrating portion at an end portion on the first direction side of the first magnetic flux concentrating portion. A first magnetic sensing portion and a second magnetic sensing portion that are sandwiched, and a third magnetic sensing portion that extends in the first direction and that sandwiches the first magnetic flux concentrating portion at the end of the first magnetic flux concentrating portion opposite to the first direction. And a fourth magnetic sensitive section, and a second composite pattern having a composite pattern of the same shape as the first composite pattern, the second composite pattern being provided at a position not overlapping the first composite pattern, The first magnetic sensitive section set, the second magnetic sensitive section set, the third magnetic sensitive section set, and the fourth magnetic sensitive section set of the first composite pattern and the second composite pattern are arranged in the first direction on the substrate. There is provided a magnetic sensor that has a magnetic sensitive axis in a direction that is orthogonal to, and has different positive and negative signs.

なお、上記の発明の概要は、本発明の必要な特徴の全てを列挙したものではない。また、これらの特徴群のサブコンビネーションもまた、発明となりうる。 Note that the above summary of the invention does not enumerate all the necessary features of the present invention. Further, a sub-combination of these feature groups can also be an invention.

本実施形態に係る磁気センサ１００の第１構成例を示す。The 1st structural example of the magnetic sensor 100 which concerns on this embodiment is shown. 本実施形態に係る第１構成例の磁気センサ１００の断面図の一例を示す。An example of the cross-sectional view of the magnetic sensor 100 of the first configuration example according to the present embodiment is shown. 本実施形態に係る磁気センサ１００の第２構成例を示す。The 2nd structural example of the magnetic sensor 100 which concerns on this embodiment is shown. 異なる感磁軸を有する感磁部が絶縁層２０内に形成された例を示す。An example is shown in which the magnetic sensitive portions having different magnetic sensitive axes are formed in the insulating layer 20. 本実施形態に係る磁気センサ１００の第３構成例を示す。The 3rd example of composition of magnetic sensor 100 concerning this embodiment is shown. 本実施形態に係る磁気センサ１００の第４構成例を示す。The 4th example of composition of magnetic sensor 100 concerning this embodiment is shown. 本実施形態に係る磁気センサ１００の第５構成例を示す。The 5th example of composition of magnetic sensor 100 concerning this embodiment is shown. 本実施形態に係る磁気センサ１００の第６構成例を示す。The 6th example of composition of magnetic sensor 100 concerning this embodiment is shown. 本実施形態に係る磁気センサ１００の第７構成例を示す。The 7th example of composition of magnetic sensor 100 concerning this embodiment is shown. 本実施形態に係る磁気センサ１００の第８構成例を示す。The 8th example of composition of magnetic sensor 100 concerning this embodiment is shown. 本実施形態に係る磁気センサ１００に接続される演算装置１０００の構成例を示す。The structural example of the arithmetic unit 1000 connected to the magnetic sensor 100 which concerns on this embodiment is shown. 本実施形態に係る感磁部の構成例を示す。The structural example of the magnetic sensing part which concerns on this embodiment is shown.

以下、発明の実施の形態を通じて本発明を説明するが、以下の実施形態は特許請求の範囲にかかる発明を限定するものではない。また、実施形態の中で説明されている特徴の組み合わせの全てが発明の解決手段に必須であるとは限らない。 Hereinafter, the present invention will be described through embodiments of the invention, but the following embodiments do not limit the invention according to the claims. Further, not all of the combinations of features described in the embodiments are essential to the solving means of the invention.

図１は、本実施形態に係る磁気センサ１００の第１構成例を示す。磁気センサ１００は、直交する３方向をそれぞれ向く磁場成分が混在した（合成された）磁場ベクトルを検出する。また、磁気センサ１００が検出した信号は、信号処理によって、当該３方向の磁場成分を分離することができる。図１は、直交する３方向をＸ、Ｙ、Ｚ軸で示し、磁気センサ１００の斜視図の例を示す。磁気センサ１００は、基板１０、第１磁気収束部１１０、第２磁気収束部１２０、第３磁気収束部１３０、第１感磁部２１０、第２感磁部２２０、第３感磁部２３０、第４感磁部２４０、および第５感磁部２５０を備える。 FIG. 1 shows a first configuration example of the magnetic sensor 100 according to this embodiment. The magnetic sensor 100 detects a magnetic field vector in which magnetic field components respectively oriented in three orthogonal directions are mixed (combined). Further, the signal detected by the magnetic sensor 100 can be separated into the magnetic field components in the three directions by signal processing. FIG. 1 shows three orthogonal directions by X, Y, and Z axes, and shows an example of a perspective view of the magnetic sensor 100. The magnetic sensor 100 includes a substrate 10, a first magnetic flux concentrator 110, a second magnetic flux concentrator 120, a third magnetic flux concentrator 130, a first magnetic sensitive unit 210, a second magnetic sensitive unit 220, and a third magnetic sensitive unit 230. The fourth magnetic sensitive section 240 and the fifth magnetic sensitive section 250 are provided.

第１磁気収束部１１０、第２磁気収束部１２０、および第３磁気収束部１３０は、基板１０上のＸＹ平面と略平行な面に形成され、第１方向に延伸する。ここで、第１方向は、＋Ｙ方向とする。本実施形態において、第１磁気収束部１１０、第２磁気収束部１２０、および第３磁気収束部１３０を特に区別しない場合、単に磁気収束部とする。磁気収束部は、パーマロイ等の強磁性材料で形成され、近傍の磁力線の向きを変化させる。磁気収束部は、例えば、ＮｉＦｅ、ＮｉＦｅＢ、ＮｉＦｅＣｏ、及びＣｏＦｅ等の軟磁性材料で形成されることが望ましい。 The first magnetic flux concentrator 110, the second magnetic flux concentrator 120, and the third magnetic flux concentrator 130 are formed on a surface of the substrate 10 substantially parallel to the XY plane, and extend in the first direction. Here, the first direction is the +Y direction. In the present embodiment, the first magnetic flux concentrator 110, the second magnetic flux concentrator 120, and the third magnetic flux concentrator 130 are simply referred to as magnetic flux concentrators unless otherwise specified. The magnetic flux concentrator is made of a ferromagnetic material such as permalloy and changes the direction of magnetic lines of force in the vicinity. The magnetic flux concentrator is preferably formed of a soft magnetic material such as NiFe, NiFeB, NiFeCo, and CoFe.

図１は、磁気収束部がＹ方向を長手方向とした矩形の略同一形状に形成され、Ｘ方向に等間隔に配列される例を示す。これに代えて、磁気収束部の形状は、矩形に限らず、Ｙ方向に略平行な向きに長手方向をもつ四角形、平行四辺形、台形、楕円等のいずれであってもよい。また、磁気収束部は、各々がＹ方向に平行なそれぞれの長辺が略同一の長さを有する例を示したが、これに代えて、それぞれの長辺が異なる長さであってもよい。また、磁気収束部は、Ｘ方向に平行なそれぞれの短辺が略同一の長さを有する例を示したが、これに代えて、それぞれの短辺が異なる長さであってもよい。 FIG. 1 shows an example in which the magnetic flux concentrating portions are formed in a substantially rectangular shape with the Y direction as the longitudinal direction and are arranged at equal intervals in the X direction. Instead of this, the shape of the magnetic flux concentrating portion is not limited to a rectangle, and may be any of a quadrangle, a parallelogram, a trapezoid, an ellipse, etc. having a longitudinal direction in a direction substantially parallel to the Y direction. Further, although the magnetic flux concentrator has shown an example in which the respective long sides parallel to the Y direction have substantially the same length, instead, the respective long sides may have different lengths. .. Further, in the magnetic flux concentrating portion, the respective short sides parallel to the X direction are shown to have substantially the same length, but instead, the respective short sides may have different lengths.

第２磁気収束部１２０および第３磁気収束部１３０は、第１磁気収束部１１０を挟み、第１磁気収束部１１０に対して対称に配置されてよい。なお、第２磁気収束部１２０および第３磁気収束部１３０は、第１磁気収束部１１０の第１方向とは反対側の（−Ｙ方向側の）端部よりも第１方向側にずれた位置から、第１方向に延伸する。即ち、第１磁気収束部１１０の第１方向とは反対側（−Ｙ方向側）の端部は、第２磁気収束部１２０および第３磁気収束部１３０と比較して、−Ｙ方向側に突出する。また、第２磁気収束部１２０および第３磁気収束部１３０の＋Ｙ方向側の端部は、第１磁気収束部１１０と比較して、＋Ｙ方向側にそれぞれ突出する。 The second magnetic flux concentrator 120 and the third magnetic flux concentrator 130 may be arranged symmetrically with respect to the first magnetic flux concentrator 110 with the first magnetic flux concentrator 110 in between. The second magnetic flux concentrator 120 and the third magnetic flux concentrator 130 are displaced toward the first direction side with respect to the end portion (on the −Y direction side) opposite to the first direction of the first magnetic flux concentrator 110. From the position, it extends in the first direction. That is, the end of the first magnetic flux concentrator 110 opposite to the first direction (−Y direction side) is closer to the −Y direction side than the second magnetic flux concentrator 120 and the third magnetic flux concentrator 130. Project. Further, the ends of the second magnetic flux concentrating portion 120 and the third magnetic flux concentrating portion 130 on the +Y direction side respectively project toward the +Y direction side as compared with the first magnetic flux concentrating portion 110.

例えば、第１磁気収束部１１０は、第２磁気収束部１２０および第３磁気収束部１３０と比較して−Ｙ方向に突出しているので、−Ｙ方向側から入力する入力する磁場Ｂｙを引き寄せる。また、第２磁気収束部１２０および第３磁気収束部１３０は、第１磁気収束部１１０と比較して＋Ｙ方向に突出しているので、図１の点線の例で示すように、第１磁気収束部１１０に引き寄せられた磁場Ｂｙは、第２磁気収束部１２０および第３磁気収束部１３０の方向へと曲げられて＋Ｙ方向へと出力される。これにより、第１磁気収束部１１０から第２磁気収束部１２０または第３磁気収束部１３０に向かうＸ方向の磁場成分が発生する。 For example, the first magnetic flux concentrator 110 projects in the −Y direction as compared with the second magnetic flux concentrator 120 and the third magnetic flux concentrator 130, and therefore attracts the input magnetic field By from the −Y direction side. Further, since the second magnetic flux concentrating unit 120 and the third magnetic flux concentrating unit 130 project in the +Y direction as compared with the first magnetic flux concentrating unit 110, as shown by the dotted line example in FIG. The magnetic field By attracted to the portion 110 is bent toward the second magnetic flux concentrating portion 120 and the third magnetic flux concentrating portion 130, and is output in the +Y direction. As a result, a magnetic field component in the X direction from the first magnetic flux concentrator 110 toward the second magnetic flux concentrator 120 or the third magnetic flux concentrator 130 is generated.

なお、第２磁気収束部１２０および第３磁気収束部１３０は、第１磁気収束部１１０と比較して＋Ｙ方向に突出しているので、＋Ｙ方向側から入力する磁場Ｂｙを引き寄せる。例えば、−Ｙ方向と略平行に第２磁気収束部１２０または第３磁気収束部１３０へと入力する磁場は、第１磁気収束部１１０の方向へと曲げられ、図１の点線で示した磁場Ｂｙの磁束の経路とは逆向きに進行する。即ち、磁気収束部は、Ｙ方向に入力する磁場の成分を曲げて、Ｘ方向の磁場成分を発生させる。 Since the second magnetic flux concentrator 120 and the third magnetic flux concentrator 130 project in the +Y direction as compared with the first magnetic flux concentrator 110, they attract the magnetic field By input from the +Y direction side. For example, the magnetic field input to the second magnetic flux concentrating unit 120 or the third magnetic flux concentrating unit 130 substantially parallel to the −Y direction is bent toward the first magnetic flux concentrating unit 110, and the magnetic field shown by the dotted line in FIG. The magnetic flux travels in the direction opposite to the By magnetic flux path. That is, the magnetic flux concentrator bends the component of the magnetic field input in the Y direction to generate the magnetic field component in the X direction.

磁気収束部は、それぞれ、磁気収束部材を有してよい。図１は、第１磁気収束部１１０の第１方向とは反対側の端部が、第２方向に延伸する磁気収束部材１１２を有する例を示す。磁気収束部材１１２は、＋Ｙ方向に入力する磁場の成分をより多く収束させて、第１磁気収束部１１０に供給することができる。また、図１は、第２磁気収束部１２０の第１方向側の端部が第２方向に延伸する磁気収束部材１２２を、第３磁気収束部１３０の第１方向側の端部が第２方向に延伸する磁気収束部材１３２を、それぞれ有する例を示す。これにより、磁気収束部材１２２および磁気収束部材１３２は、−Ｙ方向に入力する磁場の成分をより多く収束させることができる。ここで、第２方向は、＋Ｘ方向とする。 The magnetic flux concentrators may each include a magnetic flux concentrator member. FIG. 1 shows an example in which the end of the first magnetic flux concentrator 110 opposite to the first direction has a magnetic flux concentrator member 112 extending in the second direction. The magnetic flux concentrator 112 can focus more of the magnetic field component input in the +Y direction and supply the magnetic field to the first magnetic flux concentrator 110. Further, in FIG. 1, an end of the second magnetic flux concentrator 120 on the first direction side is a magnetic flux concentrator member 122 extending in the second direction, and an end of the third magnetic flux concentrator 130 on the first direction side is a second magnetic flux concentrator. An example is shown in which each has a magnetic flux concentrator member 132 extending in the direction. As a result, the magnetic flux concentrating member 122 and the magnetic flux concentrating member 132 can converge more magnetic field components input in the −Y direction. Here, the second direction is the +X direction.

第１感磁部２１０、第２感磁部２２０、第３感磁部２３０、第４感磁部２４０、および第５感磁部２５０は、基板１０上のＸＹ平面と略平行な面に形成され、第１方向に延伸する。本実施形態において、第１感磁部２１０、第２感磁部２２０、第３感磁部２３０、第４感磁部２４０、および第５感磁部２５０を特に区別しない場合、単に感磁部とする。感磁部は、磁気収束部が形成される面とは異なる面に形成されてよい。 The first magnetic sensitive section 210, the second magnetic sensitive section 220, the third magnetic sensitive section 230, the fourth magnetic sensitive section 240, and the fifth magnetic sensitive section 250 are formed on a surface substantially parallel to the XY plane on the substrate 10. And is stretched in the first direction. In the present embodiment, unless the first magnetic sensitive section 210, the second magnetic sensitive section 220, the third magnetic sensitive section 230, the fourth magnetic sensitive section 240, and the fifth magnetic sensitive section 250 are particularly distinguished, the magnetic sensitive section is simply used. And The magnetically sensitive portion may be formed on a surface different from the surface on which the magnetic flux concentrating portion is formed.

図１において、感磁部は、略同一形状にそれぞれ形成され、Ｘ方向にそれぞれ配列される例を示す。また、第１感磁部２１０、第２感磁部２２０、および第３感磁部２３０、第４感磁部２４０は、第５感磁部２５０に対して対称に配置されてよい。図１は、第１磁気収束部１１０のＹ方向の中心軸と第５感磁部２５０のＹ方向の中心軸とが、ＸＹ面と平行な面における平面視で略一致するように配置され、磁気センサ１００が当該２つの中心軸を含むＹＺ面に対して面対称に形成された例を示す。 FIG. 1 shows an example in which the magnetic sensitive portions are formed in substantially the same shape and arranged in the X direction. The first magnetic sensitive section 210, the second magnetic sensitive section 220, the third magnetic sensitive section 230, and the fourth magnetic sensitive section 240 may be arranged symmetrically with respect to the fifth magnetic sensitive section 250. In FIG. 1, the central axis in the Y direction of the first magnetic flux concentrator 110 and the central axis in the Y direction of the fifth magnetic sensing unit 250 are arranged so as to substantially coincide with each other in a plan view in a plane parallel to the XY plane, An example in which the magnetic sensor 100 is formed in plane symmetry with respect to the YZ plane including the two central axes is shown.

感磁部は、第１方向に略垂直な＋Ｘ方向および−Ｘ方向の磁場を検出する。感磁部は、例えば、ＸＹ平面に対して平行かつ第１方向に対して垂直な第２方向と略平行な磁場を検出する感磁軸を有し、第１方向と、第１方向および第２方向に垂直な第３方向（＋Ｚ方向）と略平行な磁場成分を検出しない。即ち、感磁部は、磁気収束部等の無い状態でＸ方向に感磁軸を有する。 The magnetic sensing unit detects the magnetic fields in the +X direction and the −X direction that are substantially perpendicular to the first direction. The magnetically sensitive portion has, for example, a magnetically sensitive axis that detects a magnetic field that is substantially parallel to a second direction parallel to the XY plane and perpendicular to the first direction, and has a first direction, a first direction, and a first direction. A magnetic field component substantially parallel to the third direction (+Z direction) perpendicular to the two directions is not detected. That is, the magnetic sensing section has a magnetic sensing axis in the X direction without a magnetic flux concentrating section or the like.

図１の例において、第１方向、第２方向、および第３方向は、それぞれ互いに直交している例を示すが、これに代えて、互いの方向が異なっていればよい。つまり、それぞれが略直交となっていてもよいし、互いに屈曲していてもよい。 In the example of FIG. 1, the first direction, the second direction, and the third direction are orthogonal to each other, but instead of this, the directions may be different from each other. That is, they may be substantially orthogonal to each other or may be bent to each other.

感磁部は、平板状であることが好ましい。感磁部のそれぞれの形状は、Ｚ軸方向から見た平面視で、矩形がより好ましい形状であるが、これに代えて、正方形、平行四辺形、台形、三角形、多角形、円形、及び楕円形等のいずれであってもよい。また、感磁部のうちの少なくとも１つは、Ｙ方向に小分けに分割区分された複数の感磁部を有してもよい。この場合、分割区分された複数の感磁部は、１かたまりの感磁部として機能するようにメタル配線等で接続される。即ち、感磁部のうちの少なくとも１つは、単一の感磁部に代えて、２つ以上の感磁部をメタル配線で接続して形成されてもよい。 It is preferable that the magnetic sensing part has a flat plate shape. A rectangular shape is more preferable as each shape of the magnetically sensitive portion in a plan view seen from the Z-axis direction, but instead of this, a square, a parallelogram, a trapezoid, a triangle, a polygon, a circle, and an ellipse. The shape may be any. Further, at least one of the magnetically sensitive portions may have a plurality of magnetically sensitive portions that are subdivided in the Y direction. In this case, the plurality of divided magnetic sensitive sections are connected by metal wiring or the like so as to function as a single magnetic sensitive section. That is, at least one of the magnetic sensitive sections may be formed by connecting two or more magnetic sensitive sections by metal wiring instead of a single magnetic sensitive section.

感磁部は、１軸方向の磁場のみを検出して抵抗値を変化させる素子であればよい。感磁部は、例えば、巨大磁気抵抗（ＧＭＲ）素子、トンネル磁気抵抗（ＴＭＲ）素子、及び異方性磁気抵抗（ＡＭＲ）素子等のいずれでもよく、または、これらの組み合わせであってもよい。感磁部は、一例として、＋Ｘ方向の磁場が入力すると、抵抗値が増加し、−Ｘ方向の磁場が入力すると、抵抗値が減少するようにそれぞれ形成される。感磁部は、Ｘ方向の磁場成分の大きさに応じて、抵抗値を変化させる磁気抵抗素子でよい。 The magnetic sensing section may be any element that detects only the magnetic field in the uniaxial direction and changes the resistance value. The magnetically sensitive portion may be, for example, a giant magnetoresistive (GMR) element, a tunnel magnetoresistive (TMR) element, an anisotropic magnetoresistive (AMR) element, or a combination thereof. As an example, the magnetically sensitive portion is formed so that the resistance value increases when a magnetic field in the +X direction is input and the resistance value decreases when a magnetic field in the −X direction is input. The magnetic sensing section may be a magnetoresistive element that changes its resistance value according to the magnitude of the magnetic field component in the X direction.

感磁部は、磁気収束部によって曲げられた磁場のうち、Ｘ方向に入力する磁場の成分に応じて、抵抗値を変化させる。磁気センサ１００に入力する磁場が＋Ｙ方向であっても、図１の例に示すように、磁気収束部によってＸ方向の磁場が生成されるので、感磁部は抵抗値を変化させる。第１磁気収束部１１０および第３磁気収束部１３０の間に配置される第１感磁部２１０および第２感磁部２２０は、例えば、図１に示す＋Ｙ方向の磁場Ｂｙの磁気センサ１００への入力に応じて、−Ｘ方向の磁場成分が入力し、抵抗値が減少する。また、第１磁気収束部１１０および第２磁気収束部１２０の間に配置される第３感磁部２３０および第４感磁部２４０は、＋Ｘ方向の磁場成分が入力し、抵抗値が増加する。 The magnetic sensing unit changes the resistance value according to the magnetic field component input in the X direction in the magnetic field bent by the magnetic flux concentrating unit. Even if the magnetic field input to the magnetic sensor 100 is in the +Y direction, as shown in the example of FIG. 1, the magnetic flux in the X direction is generated by the magnetic flux concentrator, so that the magnetic sensing unit changes the resistance value. The first magnetically sensitive portion 210 and the second magnetically sensitive portion 220 arranged between the first magnetic flux concentrating portion 110 and the third magnetic flux concentrating portion 130 are provided, for example, to the magnetic sensor 100 of the magnetic field By in the +Y direction shown in FIG. In response to the input of, the magnetic field component in the -X direction is input, and the resistance value decreases. Further, the magnetic field component in the +X direction is input to the third magnetic sensing unit 230 and the fourth magnetic sensing unit 240 arranged between the first magnetic flux concentrating unit 110 and the second magnetic flux concentrating unit 120, and the resistance value increases. ..

なお、第５感磁部２５０は、第１磁気収束部１１０の基板１０側の、磁場Ｂｙが分岐する領域に配置されるので、理想的には、＋Ｘ方向および−Ｘ方向に分岐した磁場成分が相殺され、抵抗値は変化しない。以上の例において、感磁部の抵抗値の初期値をＲ０とすると、＋Ｙ方向の磁場Ｂｙの入力に対して、次式が成立する。
（数１）
Ｒ１＝Ｒ０−ΔＲｙ
Ｒ２＝Ｒ０−ΔＲｙ
Ｒ３＝Ｒ０＋ΔＲｙ
Ｒ４＝Ｒ０＋ΔＲｙ
Ｒ５＝Ｒ０ Since the fifth magnetic sensing unit 250 is arranged in the region where the magnetic field By branches on the substrate 10 side of the first magnetic flux concentrating unit 110, ideally, the magnetic field components branched in the +X direction and the −X direction. Are canceled out, and the resistance value does not change. In the above example, assuming that the initial value of the resistance value of the magnetic sensing section is R 0 , the following equation holds for the input of the magnetic field By in the +Y direction.
(Equation 1)
R 1 =R 0 −ΔRy
R 2 =R 0 −ΔRy
R 3 =R 0 +ΔRy
R 4 =R 0 +ΔRy
R 5 =R 0

なお、第１感磁部２１０の抵抗値をＲ１、第２感磁部２２０の抵抗値をＲ２、第３感磁部２３０の抵抗値をＲ３、第４感磁部２４０の抵抗値をＲ４、第５感磁部２５０の抵抗値をＲ５、磁場Ｂｙの入力によって発生するＸ成分の磁場に応じて変化する抵抗値の変化量をΔＲｙとした。また、磁気収束部および感磁部は、形状が略同一形状で形成され、配置は対称配置の理想的な磁気センサ１００の例を考え、抵抗値の初期値および変化量は全て略同一の値を用いた。 The resistance value of the first magnetic sensing unit 210 is R 1 , the resistance value of the second magnetic sensing unit 220 is R 2 , the resistance value of the third magnetic sensing unit 230 is R 3 , and the resistance value of the fourth magnetic sensing unit 240. Is R 4 , the resistance value of the fifth magnetic sensing unit 250 is R 5 , and the change amount of the resistance value that changes according to the magnetic field of the X component generated by the input of the magnetic field By is ΔRy. Further, the magnetic flux concentrating portion and the magnetic sensitive portion are formed to have substantially the same shape, and the arrangement is considered to be an ideal magnetic sensor 100, and the initial value and the variation amount of the resistance value are all substantially the same value. Was used.

図２は、本実施形態に係る第１構成例の磁気センサ１００の断面図の一例を示す。図２は、図１のＡ−Ａ'線の断面図の一例を示す。磁気収束部および感磁部は、基板１０の一方の面に形成される。基板１０は、半導体、ガラス、およびセラミック等で形成された基板のいずれかでよい。また、基板１０は、ＩＣ等の電子回路を搭載した基板であってもよい。基板１０は、複数の層が積層されてよい。例えば、基板１０の一方の面である基板平面１２には、絶縁層２０が形成される。絶縁層２０は、ＳｉＮまたはＳｉＯ２等を含んでよい。 FIG. 2 shows an example of a cross-sectional view of the magnetic sensor 100 of the first configuration example according to the present embodiment. FIG. 2 shows an example of a cross-sectional view taken along the line AA′ of FIG. The magnetic flux concentrating portion and the magnetic sensitive portion are formed on one surface of the substrate 10. The substrate 10 may be any substrate formed of semiconductor, glass, ceramic, or the like. Further, the substrate 10 may be a substrate on which an electronic circuit such as an IC is mounted. The substrate 10 may have a plurality of layers stacked. For example, the insulating layer 20 is formed on the substrate plane 12, which is one surface of the substrate 10. The insulating layer 20 may include SiN, SiO 2 , or the like.

絶縁層２０の上面は、ＸＹ平面に略平行な面が形成される。図２は、絶縁層２０の上面を第１平面２２とし、磁気収束部が当該第１平面２２に形成された例を示す。また、絶縁層２０の内部は、ＸＹ平面に略平行な面が形成されてよい。図２は、絶縁層２０の内部に第２平面２４が形成された例を示す。第２平面２４のような内部の平面は、絶縁層を段階的な積層、またはエッチング等によって形成してよい。 A surface substantially parallel to the XY plane is formed on the upper surface of the insulating layer 20. FIG. 2 shows an example in which the upper surface of the insulating layer 20 is the first plane 22 and the magnetic flux concentrator is formed on the first plane 22. In addition, a surface substantially parallel to the XY plane may be formed inside the insulating layer 20. FIG. 2 shows an example in which the second plane 24 is formed inside the insulating layer 20. The inner flat surface such as the second flat surface 24 may be formed by stepwise stacking an insulating layer, etching, or the like.

図２において、磁気収束部は、Ｚ方向に厚さをもち、第１平面２２に重なる（交差する、または、接する）。磁気収束部は、底面が第１平面２２に接するように配置されてよく、また、それぞれの一部が第１平面２２に埋め込まれるように配置されてもよい。なお、図１は、磁気収束部のＺ方向の厚さが略同一の厚さに形成される例を示すが、これに代えて、各々の厚さが不揃いであってもよい。 In FIG. 2, the magnetic flux concentrator has a thickness in the Z direction and overlaps (intersects or contacts) the first plane 22. The magnetic flux concentrator may be arranged such that the bottom surface is in contact with the first plane 22, or may be arranged so that a part of each is embedded in the first plane 22. Note that, although FIG. 1 shows an example in which the thickness of the magnetic flux concentrating portion in the Z direction is formed to be substantially the same, instead of this, the thicknesses may be uneven.

図２は、感磁部が第２平面２４に形成された例を示す。感磁部は、各々の底面が第２平面２４に接するように配置されてよく、また、各々の一部が第２平面２４に埋め込まれるように配置されてもよい。また、図２において、感磁部は、Ｚ軸方向の厚さが略同一の厚さに形成される例を示すが、これに代えて、各々の厚さが不揃いであってもよい。このように、感磁部が形成される層は、磁気収束部が形成される層とは異なる層でよい。このような磁気センサ１００に対して、磁場がＸ方向およびＺ方向に入力する場合を次に説明する。 FIG. 2 shows an example in which the magnetic sensing portion is formed on the second plane 24. The magnetic sensitive sections may be arranged so that their bottom surfaces are in contact with the second plane 24, or may be arranged so that a part of each is embedded in the second plane 24. Further, in FIG. 2, the magnetically sensitive portion is shown as an example in which the thickness in the Z-axis direction is formed to be substantially the same, but instead of this, the respective thicknesses may be uneven. Thus, the layer in which the magnetically sensitive portion is formed may be different from the layer in which the magnetic flux concentrating portion is formed. A case where a magnetic field is input to the magnetic sensor 100 as described above in the X direction and the Z direction will be described below.

第３磁気収束部１３０は、−Ｘ方向側から入力する近傍の磁場Ｂｘを引き寄せる。例えば、図２の点線で示すように、＋Ｘ方向と略平行に磁気センサ１００へと入力する磁場Ｂｘは、磁気収束部にそれぞれ引き寄せられながら＋Ｘ方向へと向かう。このような＋Ｘ方向に向かう磁場Ｂｘの入力に対して、第１感磁部２１０、第２感磁部２２０、第３感磁部２３０、および第４感磁部２４０は、＋Ｘ方向の磁場成分が入力し、抵抗値が増加する。なお、第５感磁部２５０は、第１磁気収束部１１０の基板１０側に配置されるので、理想的には、Ｘ方向の磁場成分が第１磁気収束部１１０に引き寄せられるので、抵抗値は変化しない。 The third magnetic flux concentrator 130 attracts the magnetic field Bx in the vicinity that is input from the −X direction side. For example, as shown by the dotted line in FIG. 2, the magnetic field Bx that is input to the magnetic sensor 100 substantially in parallel with the +X direction heads in the +X direction while being attracted to the magnetic flux concentrating portions. In response to such an input of the magnetic field Bx directed in the +X direction, the first magnetic sensing unit 210, the second magnetic sensing unit 220, the third magnetic sensing unit 230, and the fourth magnetic sensing unit 240 generate a magnetic field component in the +X direction. , And the resistance value increases. Since the fifth magnetic sensing unit 250 is arranged on the substrate 10 side of the first magnetic flux concentrating unit 110, ideally, the magnetic field component in the X direction is attracted to the first magnetic flux concentrating unit 110, and thus the resistance value is increased. Does not change.

また、第２磁気収束部１２０は、＋Ｘ方向側から入力する近傍の磁場を引き寄せる。例えば、−Ｘ方向と略平行に磁気センサ１００へと入力する磁場は、磁気収束部にそれぞれ引き寄せられながら、例えば図２の点線の逆向きに進行するように、−Ｘ方向へと向かう。例えば、このような−Ｘ方向に向かう磁場の入力に対して、第１感磁部２１０、第２感磁部２２０、第３感磁部２３０、および第４感磁部２４０は、抵抗値が減少し、第５感磁部２５０は、理想的にはＸ方向の磁場成分が入力しないので抵抗値が変化しない。 In addition, the second magnetic flux concentrator 120 attracts the magnetic field in the vicinity input from the +X direction side. For example, the magnetic field input to the magnetic sensor 100 substantially parallel to the −X direction is directed to the −X direction so as to travel in the direction opposite to the dotted line in FIG. For example, the resistance value of the first magnetic sensing unit 210, the second magnetic sensing unit 220, the third magnetic sensing unit 230, and the fourth magnetic sensing unit 240 with respect to the input of the magnetic field directed in the −X direction as described above. Since the magnetic field component in the X direction is ideally not input to the fifth magnetic sensing unit 250, the resistance value does not change.

また、磁気収束部は、−Ｚ方向側から入力する近傍の磁場をそれぞれ引き寄せる。例えば、図２の点線で示すように、＋Ｚ方向と略平行に磁気センサ１００へと入力する磁場Ｂｚは、磁気収束部に引き寄せられながら＋Ｚ方向へと向かう。例えば、このような＋Ｚ方向に向かう磁場Ｂｚの入力に対して、第１感磁部２１０および第３感磁部２３０は、−Ｘ方向の磁場成分が入力し、抵抗値が減少する。また、第２感磁部２２０および第４感磁部２４０は、＋Ｘ方向の磁場成分が入力し、抵抗値が増加する。なお、第５感磁部２５０は、理想的には、Ｘ方向の磁場成分が入力せず、抵抗値が変化しない。 Further, the magnetic flux concentrating unit attracts the magnetic fields in the vicinity input from the −Z direction side. For example, as shown by the dotted line in FIG. 2, the magnetic field Bz input to the magnetic sensor 100 substantially in parallel with the +Z direction goes in the +Z direction while being attracted to the magnetic flux concentrating portion. For example, in response to the input of the magnetic field Bz directed in the +Z direction, the magnetic field component in the −X direction is input to the first magnetic sensing unit 210 and the third magnetic sensing unit 230, and the resistance value decreases. Further, the magnetic field component in the +X direction is input to the second magnetic sensing unit 220 and the fourth magnetic sensing unit 240, and the resistance value increases. Note that, ideally, the magnetic field component in the X direction is not input to the fifth magnetic sensing unit 250, and the resistance value does not change.

また、磁気収束部は、＋Ｚ方向側から入力する近傍の磁場をそれぞれ引き寄せる。例えば、−Ｚ方向と略平行に磁気センサ１００へと入力する磁場Ｂｚは、磁気収束部に引き寄せられながら、例えば図２の点線の逆向きに進行するように、−Ｚ方向へと向かう。例えば、このような−Ｚ方向に向かう磁場Ｂｚの入力に対して、第１感磁部２１０および第３感磁部２３０は、＋Ｘ方向の磁場成分が入力し、抵抗値が増加する。また、第２感磁部２２０および第４感磁部２４０は、−Ｘ方向の磁場成分が入力し、抵抗値が減少する。なお、第５感磁部２５０は、理想的には、Ｘ方向の磁場成分が入力せず、抵抗値が変化しない。 Further, the magnetic flux concentrating portion attracts magnetic fields in the vicinity input from the +Z direction side. For example, the magnetic field Bz that is input to the magnetic sensor 100 substantially in parallel with the −Z direction moves toward the −Z direction while being attracted to the magnetic flux concentrating portion and traveling in the direction opposite to the dotted line in FIG. 2, for example. For example, in response to the input of the magnetic field Bz directed in the −Z direction, the magnetic field component in the +X direction is input to the first magnetic sensing unit 210 and the third magnetic sensing unit 230, and the resistance value increases. Further, the magnetic field component in the −X direction is input to the second magnetic sensing unit 220 and the fourth magnetic sensing unit 240, and the resistance value decreases. Note that, ideally, the magnetic field component in the X direction is not input to the fifth magnetic sensing unit 250, and the resistance value does not change.

以上の例において、感磁部の（数１）式に示す抵抗値は、＋Ｘ方向の磁場Ｂｘおよび+Ｚ方向の磁場Ｂｚの更なる入力に対して、次式が成立する。
（数２）
Ｒ１＝Ｒ０＋ΔＲｘ−ΔＲｙ−ΔＲｚ
Ｒ２＝Ｒ０＋ΔＲｘ−ΔＲｙ＋ΔＲｚ
Ｒ３＝Ｒ０＋ΔＲｘ＋ΔＲｙ−ΔＲｚ
Ｒ４＝Ｒ０＋ΔＲｘ＋ΔＲｙ＋ΔＲｚ
Ｒ５＝Ｒ０ In the above example, the following equation holds for the resistance value shown in the equation (1) of the magnetic sensing unit for further input of the magnetic field Bx in the +X direction and the magnetic field Bz in the +Z direction.
(Equation 2)
R 1 =R 0 +ΔRx-ΔRy-ΔRz
R 2 =R 0 +ΔRx−ΔRy+ΔRz
R 3 =R 0 +ΔRx+ΔRy−ΔRz
R 4 =R 0 +ΔRx+ΔRy+ΔRz
R 5 =R 0

なお、磁場Ｂｘの入力によって発生するＸ成分の磁場に応じて変化する抵抗値の変化量をΔＲｘ、磁場Ｂｚの入力によって発生するＸ成分の磁場に応じて変化する抵抗値の変化量をΔＲｚとした。ここで、第５感磁部２５０は、磁場の入力があっても抵抗値を変化させない参照用の磁気抵抗素子として動作する。 The amount of change in resistance value that changes according to the magnetic field of the X component generated by the input of the magnetic field Bx is ΔRx, and the amount of change of resistance value that changes according to the magnetic field of the X component generated by the input of the magnetic field Bz is ΔRz. did. Here, the fifth magnetic sensing unit 250 operates as a reference magnetoresistive element that does not change its resistance value even when a magnetic field is input.

以上のように、磁気センサ１００は、磁場成分Ｂｘ、Ｂｙ、およびＢｚを含む磁場ベクトルＢ（Ｂｘ，Ｂｙ，Ｂｚ）の入力に対して、（数２）式に示す感磁部の抵抗値の変化量を出力する。磁気センサ１００は、次式に示す演算を実行することにより、磁場成分に応じて変化する抵抗値の変化量ΔＲｘ、ΔＲｙ、およびΔＲｚを算出することができる。
（数３）
４ΔＲｘ＝＋Ｒ１＋Ｒ２＋Ｒ３＋Ｒ４−４・Ｒ５
４ΔＲｙ＝−Ｒ１−Ｒ２＋Ｒ３＋Ｒ４
４ΔＲｚ＝−Ｒ１＋Ｒ２−Ｒ３＋Ｒ４ As described above, the magnetic sensor 100 receives the magnetic field vector B(Bx, By, Bz) including the magnetic field components Bx, By, and Bz from the resistance value of the magnetic sensing unit represented by the formula (2). Output the amount of change. The magnetic sensor 100 can calculate the change amounts ΔRx, ΔRy, and ΔRz of the resistance value that change according to the magnetic field component by executing the calculation shown in the following equation.
(Equation 3)
4ΔRx=+R 1 +R 2 +R 3 +R 4 −4·R 5
4ΔRy=−R 1 −R 2 +R 3 +R 4
4ΔRz=−R 1 +R 2 −R 3 +R 4

以上の本実施形態に係る磁気センサ１００によれば、直交する３方向の磁場成分を含む磁場ベクトルの入力に対して、５つの感磁部の抵抗値の変化量に基づき、当該３つの磁場成分を分離して出力することができる。次に、感磁部の数を１つ低減させた磁気センサ１００の例を説明する。 According to the magnetic sensor 100 according to the present embodiment described above, based on the change amounts of the resistance values of the five magnetic sensitive sections with respect to the input of the magnetic field vector including the magnetic field components in the three orthogonal directions, the three magnetic field components are input. Can be output separately. Next, an example of the magnetic sensor 100 in which the number of magnetic sensitive parts is reduced by one will be described.

図３は、本実施形態に係る磁気センサ１００の第２構成例を示す。第２構成例の磁気センサ１００において、図１および図２に示された第１構成例の磁気センサ１００の動作と略同一のものには同一の符号を付け、説明を省略する。第２構成例の磁気センサ１００は、第１構成例の磁気センサ１００における参照用の磁気抵抗素子として動作する第５感磁部２５０を除去した構成である。即ち、磁気センサ１００は、基板１０、第１磁気収束部１１０、磁気収束部材１１２、第２磁気収束部１２０、磁気収束部材１２２、第３磁気収束部１３０、磁気収束部材１３２、第１感磁部２１０、第２感磁部２２０、第３感磁部２３０、および第４感磁部２４０を備える。 FIG. 3 shows a second configuration example of the magnetic sensor 100 according to this embodiment. In the magnetic sensor 100 of the second configuration example, substantially the same operations as those of the magnetic sensor 100 of the first configuration example shown in FIGS. 1 and 2 are designated by the same reference numerals, and the description thereof will be omitted. The magnetic sensor 100 of the second configuration example has a configuration in which the fifth magnetic sensing unit 250 that operates as a reference magnetoresistive element in the magnetic sensor 100 of the first configuration example is removed. That is, the magnetic sensor 100 includes the substrate 10, the first magnetic flux concentrator 110, the magnetic flux concentrator 112, the second magnetic flux concentrator 120, the magnetic flux concentrator 122, the third magnetic flux concentrator 130, the magnetic flux concentrator 132, and the first magnetically sensitive member. The unit 210, the second magnetic sensitive section 220, the third magnetic sensitive section 230, and the fourth magnetic sensitive section 240 are provided.

磁気収束部は、図１および図２で説明したので、ここでは説明を省略する。また、第１感磁部２１０、第２感磁部２２０、第３感磁部２３０、および第４感磁部２４０の感磁軸以外の構成等については、図１および図２で説明したので、ここでは説明を省略する。第２構成例の磁気センサ１００は、第１感磁部２１０、第２感磁部２２０、第３感磁部２３０、および第４感磁部２４０の感磁軸が、第１構成例の磁気センサ１００と異なる。 Since the magnetic flux concentrator has been described with reference to FIGS. 1 and 2, the description thereof is omitted here. In addition, the configurations other than the magnetic sensitive axes of the first magnetic sensitive section 210, the second magnetic sensitive section 220, the third magnetic sensitive section 230, and the fourth magnetic sensitive section 240 have been described with reference to FIGS. 1 and 2. The description is omitted here. In the magnetic sensor 100 of the second configuration example, the magnetic axes of the first magnetic sensing unit 210, the second magnetic sensing unit 220, the third magnetic sensing unit 230, and the fourth magnetic sensing unit 240 have the magnetic fields of the first structural example. Different from the sensor 100.

一例として、第１感磁部２１０および第４感磁部２４０の感磁軸が、第２感磁部２２０および第３感磁部２３０の感磁軸に対して略１８０°異なる例を説明する。即ち、第１感磁部２１０および第４感磁部２４０は、＋Ｘ軸方向の磁場が入力すると抵抗値が減少し、−Ｘ軸方向の磁場が入力すると抵抗値が増加するように形成される。 As an example, an example will be described in which the magnetic sensitive axes of the first magnetic sensitive section 210 and the fourth magnetic sensitive section 240 differ from the magnetic sensitive axes of the second magnetic sensitive section 220 and the third magnetic sensitive section 230 by approximately 180°. .. That is, the first magnetic sensitive section 210 and the fourth magnetic sensitive section 240 are formed such that the resistance value decreases when a magnetic field in the +X axis direction is input, and the resistance value increases when a magnetic field in the −X axis direction is input. ..

この場合、感磁部の抵抗値の変化は、（数２）式に代えて、次式が成立する。なお、第２構成例の磁気センサ１００は、第５感磁部２５０を有さないので、感磁部の抵抗値を示す式は次の４式となる。
（数４）
Ｒ１＝Ｒ０−ΔＲｘ＋ΔＲｙ＋ΔＲｚ
Ｒ２＝Ｒ０＋ΔＲｘ−ΔＲｙ＋ΔＲｚ
Ｒ３＝Ｒ０＋ΔＲｘ＋ΔＲｙ−ΔＲｚ
Ｒ４＝Ｒ０−ΔＲｘ−ΔＲｙ−ΔＲｚ In this case, the change of the resistance value of the magnetic sensing part is satisfied by the following equation instead of the equation (2). Since the magnetic sensor 100 of the second configuration example does not have the fifth magnetic sensing section 250, the equation showing the resistance value of the magnetic sensing section is the following four equations.
(Equation 4)
R 1 =R 0 −ΔRx+ΔRy+ΔRz
R 2 =R 0 +ΔRx−ΔRy+ΔRz
R 3 =R 0 +ΔRx+ΔRy−ΔRz
R 4 =R 0 −ΔRx−ΔRy−ΔRz

磁気センサ１００は、（数４）式に基づき、次式に示す演算を実行して、磁場成分に応じて変化する抵抗値の変化量ΔＲｘ、ΔＲｙ、およびΔＲｚを算出することができる。
（数５）
４ΔＲｘ＝−Ｒ１＋Ｒ２＋Ｒ３−Ｒ４
４ΔＲｙ＝＋Ｒ１−Ｒ２＋Ｒ３−Ｒ４
４ΔＲｚ＝＋Ｒ１＋Ｒ２−Ｒ３−Ｒ４ The magnetic sensor 100 can execute the calculation shown in the following equation based on the equation (4) to calculate the change amounts ΔRx, ΔRy, and ΔRz of the resistance value that change according to the magnetic field component.
(Equation 5)
4ΔRx=−R 1 +R 2 +R 3 −R 4
4ΔRy=+R 1 −R 2 +R 3 −R 4
4ΔRz=+R 1 +R 2 −R 3 −R 4

以上の第２構成例の磁気センサ１００によれば、直交する３方向の磁場成分を含む磁場ベクトルの入力に対して、４つの感磁部の抵抗値の変化量に基づき、当該３つの磁場成分を分離して出力することができる。なお、第２構成例の磁気センサ１００において、第１感磁部２１０および第４感磁部２４０の感磁軸が、第２感磁部２２０および第３感磁部２３０の感磁軸に対して略１８０°異なる例を説明したが、これに限定されることはない。４つの感磁軸のうち、２つの感磁軸が、他の２つの感磁軸に対して略１８０°異なっていればよい。 According to the magnetic sensor 100 of the second configuration example described above, with respect to the input of the magnetic field vector including the magnetic field components in the three directions orthogonal to each other, the three magnetic field components are calculated based on the change amounts of the resistance values of the four magnetic sensitive sections. Can be output separately. In the magnetic sensor 100 of the second configuration example, the magnetic sensitive axes of the first magnetic sensitive section 210 and the fourth magnetic sensitive section 240 are different from the magnetic sensitive axes of the second magnetic sensitive section 220 and the third magnetic sensitive section 230. Although an example in which they are different by approximately 180° has been described, the present invention is not limited to this. It suffices that two of the four magnetic sensitive axes differ from the other two magnetic sensitive axes by approximately 180°.

このように、感磁軸を異ならせた４つの感磁部を用いることにより、磁気センサ１００は、３方向の磁場成分を分離することができる。しかしながら、異なる感磁軸を有する感磁部は、感磁軸に応じて異なる製造過程を経て製造されることがある。例えば、同一方向の感磁軸を有する感磁部を形成してから、異なる方向の感磁軸を有する感磁部を形成する場合がある。この場合、製造過程が異なるので、感磁部の抵抗値の変化量が、感磁軸に応じて異なって形成されてしまうことがある。また、感磁部が形成されるＺ方向の位置が、感磁軸に応じて異なって形成されてしまうことがある。 As described above, the magnetic sensor 100 can separate the magnetic field components in three directions by using the four magnetic sensitive sections having different magnetic sensitive axes. However, the magnetic sensitive section having different magnetic sensitive axes may be manufactured through different manufacturing processes depending on the magnetic sensitive axes. For example, there is a case where a magnetic sensitive section having magnetic sensitive axes in the same direction is formed and then a magnetic sensitive section having magnetic sensitive axes in different directions is formed. In this case, since the manufacturing process is different, the amount of change in the resistance value of the magnetic sensing part may be formed differently depending on the magnetic sensing axis. Further, the position in the Z direction at which the magnetic sensitive portion is formed may be differently formed depending on the magnetic sensitive axis.

図４は、異なる感磁軸を有する感磁部が絶縁層２０内に形成された例を示す。図４は、絶縁層２０内に、第２感磁部２２０および第３感磁部２３０が形成された例を示す。図４の点線で示す例のように、第１磁気収束部１１０が＋Ｚ方向に向かう磁場Ｂｚを引き寄せることにより、第２感磁部２２０および第３感磁部２３０にＸ方向の磁場成分が入力する。 FIG. 4 shows an example in which magnetic sensitive portions having different magnetic sensitive axes are formed in the insulating layer 20. FIG. 4 shows an example in which the second magnetic sensitive section 220 and the third magnetic sensitive section 230 are formed in the insulating layer 20. As in the example shown by the dotted line in FIG. 4, the first magnetic flux concentrator 110 attracts the magnetic field Bz directed in the +Z direction, so that the magnetic field component in the X direction is input to the second magnetic sensitive unit 220 and the third magnetic sensitive unit 230. To do.

このような第２感磁部２２０および第３感磁部２３０の感磁軸の方向を異ならせて形成する場合、第２感磁部２２０および第３感磁部２３０は、製造過程が異なることにより、絶縁層２０内におけるＺ方向の位置がずれてしまうことがある。例えば、第２感磁部２２０を形成した後に、第３感磁部２３０を形成すると、第２感磁部２２０の形成に用いた材料が堆積してしまうことがあり、この場合、当該堆積物の上に第３感磁部２３０を形成することになる。 When the second magnetic sensitive section 220 and the third magnetic sensitive section 230 are formed with different directions of the magnetic sensitive axes, the second magnetic sensitive section 220 and the third magnetic sensitive section 230 have different manufacturing processes. As a result, the position in the Z direction in the insulating layer 20 may be displaced. For example, if the third magnetic sensitive portion 230 is formed after the second magnetic sensitive portion 220 is formed, the material used for forming the second magnetic sensitive portion 220 may be deposited. In this case, the deposit The third magnetically sensitive portion 230 will be formed on the above.

即ち、第２感磁部２２０から第１磁気収束部１１０までの距離は、第３感磁部２３０から第１磁気収束部１１０までの距離と異なってしまうことになる。したがって、略同一の分布のＺ方向の磁場Ｂｚが入力しても、第２感磁部２２０および第３感磁部２３０に入力するＸ方向の磁場成分の絶対値は、異なってしまうことになる。以上のように、異なる感磁軸を有する感磁部が絶縁層２０内に形成された場合、感磁部の抵抗値の変化量は、感磁軸の方向に応じて異なってしまうことがある。 That is, the distance from the second magnetically sensitive portion 220 to the first magnetic flux concentrating portion 110 is different from the distance from the third magnetically sensitive portion 230 to the first magnetic flux concentrating portion 110. Therefore, even if the Z-direction magnetic field Bz having substantially the same distribution is input, the absolute values of the X-direction magnetic field components input to the second magnetic sensing unit 220 and the third magnetic sensing unit 230 will be different. .. As described above, when the magnetic sensitive portions having different magnetic sensitive axes are formed in the insulating layer 20, the amount of change in the resistance value of the magnetic sensitive portions may differ depending on the direction of the magnetic sensitive axis. ..

また、第２感磁部２２０から第１磁気収束部１１０までの距離と、第３感磁部２３０から第１磁気収束部１１０までの距離が等しく形成できたとしても、感磁部そのものの抵抗値の変化量が感磁軸の方向に応じて異なって形成されてしまうことがある。以上のように、感磁部の抵抗値の変化量が感磁軸の方向に応じて異なる場合、（数５）式の計算に誤差が重畳することになる。 Further, even if the distance from the second magnetic sensing unit 220 to the first magnetic flux concentrating unit 110 and the distance from the third magnetic sensing unit 230 to the first magnetic flux concentrating unit 110 can be formed to be equal, the resistance of the magnetic sensitive unit itself. The amount of change in the value may be formed differently depending on the direction of the magnetic sensitive axis. As described above, when the amount of change in the resistance value of the magnetically sensitive portion differs depending on the direction of the magnetically sensitive axis, an error will be superimposed on the calculation of equation (5).

例えば、感磁部の抵抗値を示す式は、（数４）式に代えて、次式が成立する。なお、Ｘ方向およびＹ方向の磁場成分に応じて変化する抵抗値の変化量も、感磁軸の方向に応じて異なるものとした。即ち、第１感磁部２１０と第４感磁部２４０とは、感度軸の方向がーＸ方向で同一であるので、磁場Ｂｘ、Ｂｙ、Ｂｚのそれぞれの入力によって発生するＸ成分の磁場に応じて変化する抵抗値は、ΔＲｘ１、ΔＲｙ１、ΔＲｚ１とした。また、第２感磁部２２０と第３感磁部２３０とは、感度軸の方向が＋Ｘ方向で同一であるので、磁場Ｂｘ、Ｂｙ、Ｂｚのそれぞれの入力によって発生するＸ成分の磁場に応じて変化する抵抗値は、ΔＲｘ２、ΔＲｙ２、ΔＲｚ２とした。
（数６）
Ｒ１＝Ｒ０−ΔＲｘ１＋ΔＲｙ１＋ΔＲｚ１
Ｒ２＝Ｒ０＋ΔＲｘ２−ΔＲｙ２＋ΔＲｚ２
Ｒ３＝Ｒ０＋ΔＲｘ２＋ΔＲｙ２−ΔＲｚ２
Ｒ４＝Ｒ０−ΔＲｘ１−ΔＲｙ１−ΔＲｚ１ For example, the following expression holds for the expression indicating the resistance value of the magnetic sensing part, instead of the expression (4). The amount of change in the resistance value, which changes according to the magnetic field components in the X direction and the Y direction, also differs depending on the direction of the magnetic sensitive axis. That is, since the first magnetic sensitive section 210 and the fourth magnetic sensitive section 240 have the same sensitivity axis in the −X direction, the magnetic field of the X component generated by each input of the magnetic fields Bx, By, and Bz is detected. The resistance values that change accordingly are ΔRx1, ΔRy1, and ΔRz1. Further, since the second magnetic sensitive section 220 and the third magnetic sensitive section 230 have the same sensitivity axis direction in the +X direction, the magnetic field of the X component generated by each input of the magnetic fields Bx, By, and Bz is determined. The resistance values that change as a result are ΔRx2, ΔRy2, and ΔRz2.
(Equation 6)
R 1 =R 0 −ΔRx 1 +ΔRy 1 +ΔRz 1
R 2 =R 0 +ΔRx 2 −ΔRy 2 +ΔRz 2
R 3 =R 0 +ΔRx 2 +ΔRy 2 −ΔRz 2
R 4 =R 0 −ΔRx 1 −ΔRy 1 −ΔRz 1

ここで、（数５）式に示す演算を実行すると、次式のように算出される。
（数７）
−Ｒ１＋Ｒ２＋Ｒ３−Ｒ４＝２（ΔＲｘ１＋ΔＲｘ２）
＋Ｒ１−Ｒ２＋Ｒ３−Ｒ４＝２（ΔＲｙ１＋ΔＲｙ２）＋２（ΔＲｚ１−ΔＲｚ２）
＋Ｒ１＋Ｒ２−Ｒ３−Ｒ４＝２（ΔＲｚ１＋ΔＲｚ２）＋２（ΔＲｙ１−ΔＲｙ２） Here, when the calculation shown in the equation (5) is executed, it is calculated as the following equation.
(Equation 7)
-R 1 +R 2 +R 3 -R 4 =2(ΔRx 1 +ΔRx 2 )
+R 1 −R 2 +R 3 −R 4 =2(ΔRy 1 +ΔRy 2 )+2(ΔRz 1 −ΔRz 2 ).
+R 1 +R 2 −R 3 −R 4 =2(ΔRz 1 +ΔRz 2 )+2(ΔRy 1 −ΔRy 2 ).

（数７）式の第２式の（ΔＲｚ１−ΔＲｚ２）の項、および、第３式の（ΔＲｙ１−ΔＲｙ２）の項は、（数５）式と異なり、相殺されずに残った項であり、磁気センサ１００の出力に誤差が発生することがわかる。なお、当該誤差は、一の軸の検出結果に他の軸の磁場成分の影響が含まれてしまう「他軸感度」が発生したことを示す。例えば、第２式は、本来、磁場Ｂｙに反応する２（ΔＲｙ１＋ΔＲｙ２）だけが取り出せればよいが、ΔＲｚ１とΔＲｚ２とが異なると、不必要な磁場Ｂｚに反応する２（ΔＲｚ１−ΔＲｚ２）が生じてしまう。このような不必要な出力が、他軸感度である。第２の構成例の磁気センサ１００のように、他軸感度が発生する他の例について次に説明する。 Unlike the equation (5), the term (ΔRz 1 −ΔRz 2 ) in the second equation and the term (ΔRy 1 −ΔRy 2 ) in the third equation remain without being offset. It can be seen that an error occurs in the output of the magnetic sensor 100. The error indicates that “other axis sensitivity” occurs in which the influence of the magnetic field component of the other axis is included in the detection result of the one axis. For example, in the second equation, only 2 (ΔRy 1 +ΔRy 2 ) which originally reacts to the magnetic field By needs to be extracted, but when ΔRz 1 and ΔRz 2 are different, 2 (ΔRz which reacts to an unnecessary magnetic field Bz is obtained. 1− ΔRz 2 ) will occur. Such unnecessary output is the other axis sensitivity. Another example in which another axis sensitivity is generated, like the magnetic sensor 100 of the second configuration example, will be described below.

図５は、本実施形態に係る磁気センサ１００の第３構成例を示す。第３構成例の磁気センサ１００において、図１から図３に示された第１構成例および第２構成例の磁気センサ１００の動作と略同一のものには同一の符号を付け、説明を省略する。図５は、＋Ｚ方向側からの磁気センサ１００の平面視の一例を示す。即ち、図５は、基板１０の基板平面１２側における磁気センサ１００の表面の一例を示す。第３構成例の磁気センサ１００は、基板１０、第１磁気収束部１１０、第２磁気収束部１２０、第１感磁部２１０、第２感磁部２２０、第３感磁部２３０、第４感磁部２４０、第１補助磁気収束部３１０、および第２補助磁気収束部３２０を備える。 FIG. 5 shows a third configuration example of the magnetic sensor 100 according to this embodiment. In the magnetic sensor 100 of the third configuration example, substantially the same operations as those of the magnetic sensor 100 of the first configuration example and the second configuration example shown in FIGS. 1 to 3 are denoted by the same reference numerals, and the description thereof will be omitted. To do. FIG. 5 shows an example of a plan view of the magnetic sensor 100 from the +Z direction side. That is, FIG. 5 shows an example of the surface of the magnetic sensor 100 on the substrate plane 12 side of the substrate 10. The magnetic sensor 100 of the third configuration example includes a substrate 10, a first magnetic flux concentrator 110, a second magnetic flux concentrator 120, a first magnetic sensitive unit 210, a second magnetic sensitive unit 220, a third magnetic sensitive unit 230, and a fourth magnetic sensitive unit 230. The magnetic field sensitive unit 240, the first auxiliary magnetic flux concentrator 310, and the second auxiliary magnetic flux concentrator 320 are provided.

磁気収束部は、図１および図２で説明したので、ここでは説明を省略する。なお、図５の磁気センサは、第３磁気収束部１３０を有さない構成例を示す。第３構成例の磁気センサ１００は、第１感磁部２１０、第２感磁部２２０、第３感磁部２３０、および第４感磁部２４０の配置が、第１構成例および第２構成例の磁気センサ１００と異なる。 Since the magnetic flux concentrator has been described with reference to FIGS. 1 and 2, the description thereof is omitted here. The magnetic sensor of FIG. 5 shows a configuration example that does not have the third magnetic flux concentrator 130. In the magnetic sensor 100 of the third configuration example, the first magnetic sensing section 210, the second magnetic sensing section 220, the third magnetic sensing section 230, and the fourth magnetic sensing section 240 are arranged in the first configuration example and the second configuration. Different from the magnetic sensor 100 of the example.

例えば、第３構成例の磁気センサ１００は、第２感磁部２２０および第３感磁部２３０が、第１磁気収束部１１０および第２磁気収束部１２０の間に設けられる。即ち、第１感磁部２１０および第２感磁部２２０は、第１磁気収束部１１０を挟むように設けられ、第３感磁部２３０および第４感磁部２４０は、第２磁気収束部１２０を挟むように設けられる。 For example, in the magnetic sensor 100 of the third configuration example, the second magnetic sensing unit 220 and the third magnetic sensing unit 230 are provided between the first magnetic flux concentrating unit 110 and the second magnetic flux concentrating unit 120. That is, the first magnetic sensitive section 210 and the second magnetic sensitive section 220 are provided so as to sandwich the first magnetic flux concentrating section 110, and the third magnetic sensitive section 230 and the fourth magnetic sensitive section 240 are the second magnetic flux focusing section. It is provided so as to sandwich 120.

また、第３構成例の磁気センサ１００は、第１補助磁気収束部３１０および第２補助磁気収束部３２０が、磁気収束部および感磁部を挟むように設けられてよい。第１補助磁気収束部３１０および第２補助磁気収束部３２０は、第１方向にそれぞれ延伸する。第１補助磁気収束部３１０および第２補助磁気収束部３２０は、磁気収束部と略同一の平面に、略同一の形状および材質で設けられてよい。 Further, in the magnetic sensor 100 of the third configuration example, the first auxiliary magnetic flux concentrator 310 and the second auxiliary magnetic flux concentrator 320 may be provided so as to sandwich the magnetic flux concentrator and the magnetic sensitive unit. The first auxiliary magnetic flux concentrator 310 and the second auxiliary magnetic flux concentrator 320 extend in the first direction, respectively. The first auxiliary magnetic flux concentrator 310 and the second auxiliary magnetic flux concentrator 320 may be provided in substantially the same plane as the magnetic flux concentrator and have substantially the same shape and material.

また、第１補助磁気収束部３１０は、第１方向側の端部に、第２方向に延伸する磁気収束部材３１２を有してよく、第２補助磁気収束部３２０は、第１方向とは反対側の端部に、第２方向に延伸する磁気収束部材３２２を有してよい。第３構成例の磁気センサ１００は、一例として、第２感磁部２２０および第３感磁部２３０の間のＹＺ面に略平行な面に対して、面対称に形成される。 Further, the first auxiliary magnetic flux concentrator 310 may have a magnetic flux concentrator member 312 extending in the second direction at the end on the first direction side, and the second auxiliary magnetic flux concentrator 320 is different from the first direction. A magnetic flux concentrating member 322 extending in the second direction may be provided at the opposite end. As an example, the magnetic sensor 100 of the third configuration example is formed in plane symmetry with respect to a plane substantially parallel to the YZ plane between the second magnetic sensing section 220 and the third magnetic sensing section 230.

第３構成例の磁気センサ１００は、第２構成例の磁気センサ１００と同様に、第１感磁部２１０、第２感磁部２２０、第３感磁部２３０、および第４感磁部２４０の感磁軸が、第１構成例の磁気センサ１００と異なる。一例として、第１感磁部２１０および第２感磁部２２０の感磁軸が、第３感磁部２３０および第４感磁部２４０の感磁軸に対して略１８０°異なる例を説明する。即ち、第１感磁部２１０および第２感磁部２２０は、＋Ｘ軸方向の磁場が入力すると抵抗値が減少し、−Ｘ軸方向の磁場が入力すると抵抗値が増加するように形成される。 Similar to the magnetic sensor 100 of the second configuration example, the magnetic sensor 100 of the third configuration example has a first magnetic sensitive section 210, a second magnetic sensitive section 220, a third magnetic sensitive section 230, and a fourth magnetic sensitive section 240. Is different from the magnetic sensor 100 of the first configuration example. As an example, an example will be described in which the magnetic sensitive axes of the first magnetic sensitive section 210 and the second magnetic sensitive section 220 differ from the magnetic sensitive axes of the third magnetic sensitive section 230 and the fourth magnetic sensitive section 240 by approximately 180°. .. That is, the first magnetic sensitive section 210 and the second magnetic sensitive section 220 are formed so that the resistance value decreases when a magnetic field in the +X axis direction is input, and the resistance value increases when a magnetic field in the −X axis direction is input. ..

この場合、感磁部の抵抗値は、（数４）式に代えて、次式が成立する。
（数８）
Ｒ１＝Ｒ０−ΔＲｘ＋ΔＲｙ−ΔＲｚ
Ｒ２＝Ｒ０−ΔＲｘ−ΔＲｙ＋ΔＲｚ
Ｒ３＝Ｒ０＋ΔＲｘ＋ΔＲｙ＋ΔＲｚ
Ｒ４＝Ｒ０＋ΔＲｘ−ΔＲｙ−ΔＲｚ In this case, the resistance value of the magnetic sensing section is replaced by the expression (4), and the following expression is established.
(Equation 8)
R 1 =R 0 −ΔRx+ΔRy−ΔRz
R 2 =R 0 −ΔRx−ΔRy+ΔRz
R 3 =R 0 +ΔRx+ΔRy+ΔRz
R 4 =R 0 +ΔRx-ΔRy-ΔRz

磁気センサ１００は、（数８）式に基づき、次式に示す演算を実行して、磁場成分に応じて変化する抵抗値の変化量ΔＲｘ、ΔＲｙ、およびΔＲｚを算出することができる。
（数９）
４ΔＲｘ＝−Ｒ１−Ｒ２＋Ｒ３＋Ｒ４
４ΔＲｙ＝＋Ｒ１−Ｒ２＋Ｒ３−Ｒ４
４ΔＲｚ＝−Ｒ１＋Ｒ２＋Ｒ３−Ｒ４ The magnetic sensor 100 can execute the calculation shown in the following equation based on the equation (8) to calculate the change amounts ΔRx, ΔRy, and ΔRz of the resistance value that change according to the magnetic field component.
(Equation 9)
4ΔRx=−R 1 −R 2 +R 3 +R 4
4ΔRy=+R 1 −R 2 +R 3 −R 4
4ΔRz=−R 1 +R 2 +R 3 −R 4

この場合において、第１感磁部２１０および第２感磁部２２０の抵抗値の変化量と、第３感磁部２３０および第４感磁部２４０の抵抗値の変化量とが、感磁軸の方向に応じて異なる場合を考える。即ち、（数８）式に代えて、次式が成立する。
（数１０）
Ｒ１＝Ｒ０−ΔＲｘ１＋ΔＲｙ１−ΔＲｚ１
Ｒ２＝Ｒ０−ΔＲｘ１−ΔＲｙ１＋ΔＲｚ１
Ｒ３＝Ｒ０＋ΔＲｘ２＋ΔＲｙ２＋ΔＲｚ２
Ｒ４＝Ｒ０＋ΔＲｘ２−ΔＲｙ２−ΔＲｚ２ In this case, the amount of change in the resistance value of the first magnetic sensitive section 210 and the second magnetic sensitive section 220 and the amount of change in the resistance value of the third magnetic sensitive section 230 and the fourth magnetic sensitive section 240 are the magnetic sensitive axis. Consider different cases depending on the direction. That is, the following formula is established instead of the formula (8).
(Equation 10)
R 1 =R 0 −ΔRx 1 +ΔRy 1 −ΔRz 1
R 2 =R 0 −ΔRx 1 −ΔRy 1 +ΔRz 1
R 3 =R 0 +ΔRx 2 +ΔRy 2 +ΔRz 2
R 4 =R 0 +ΔRx 2 −ΔRy 2 −ΔRz 2

ここで、（数９）式に示す演算を実行すると、次式のように算出される。
（数１１）
−Ｒ１−Ｒ２＋Ｒ３＋Ｒ４＝２（ΔＲｘ１＋ΔＲｘ２）
＋Ｒ１−Ｒ２＋Ｒ３−Ｒ４＝２（ΔＲｙ１＋ΔＲｙ２）−２（ΔＲｚ１−ΔＲｚ２）
−Ｒ１＋Ｒ２＋Ｒ３−Ｒ４＝２（ΔＲｚ１＋ΔＲｚ２）−２（ΔＲｙ１−ΔＲｙ２） Here, when the calculation shown in the equation (9) is executed, it is calculated as the following equation.
(Equation 11)
-R 1 -R 2 + R 3 + R 4 = 2 (ΔRx 1 + ΔRx 2)
+R 1 −R 2 +R 3 −R 4 =2(ΔRy 1 +ΔRy 2 )−2(ΔRz 1 −ΔRz 2 ).
-R 1 + R 2 + R 3 -R 4 = 2 (ΔRz 1 + ΔRz 2) -2 (ΔRy 1 -ΔRy 2)

（数１１）式の第２式の（ΔＲｚ１−ΔＲｚ２）の項、および、第３式の（ΔＲｙ１−ΔＲｙ２）の項は、（数９）式と異なり、相殺されずに残った項であり、磁気センサ１００の出力に他軸感度が発生したことがわかる。そこで、このような他軸感度の発生を防止して、異なる３方向の磁場成分を分離して出力する磁気センサ１００について、次に説明する。 Unlike the equation (9), the term (ΔRz 1 −ΔRz 2 ) of the second equation of the equation (11) and the term (ΔRy 1 −ΔRy 2 ) of the third equation remain without being offset. It is understood that the other axis sensitivity is generated in the output of the magnetic sensor 100. Therefore, a magnetic sensor 100 that prevents the occurrence of such other-axis sensitivity and separates and outputs magnetic field components in three different directions will be described below.

図６は、本実施形態に係る磁気センサ１００の第４構成例を示す。第４構成例の磁気センサ１００において、図１から図５に示された第１から第３構成例の磁気センサ１００の動作と略同一のものには同一の符号を付け、説明を省略する。図６は、＋Ｚ方向側からの磁気センサ１００の平面視の一例を示す。第４構成例の磁気センサ１００は、基板１０と、第１補助磁気収束部３１０と、第２補助磁気収束部３２０と、第１複合パターン４１０と、第２複合パターン４２０と、を備える。 FIG. 6 shows a fourth configuration example of the magnetic sensor 100 according to this embodiment. In the magnetic sensor 100 of the fourth configuration example, substantially the same operations as those of the magnetic sensor 100 of the first to third configuration examples shown in FIGS. 1 to 5 are designated by the same reference numerals, and the description thereof will be omitted. FIG. 6 shows an example of a plan view of the magnetic sensor 100 from the +Z direction side. The magnetic sensor 100 according to the fourth configuration example includes the substrate 10, the first auxiliary magnetic flux concentrator 310, the second auxiliary magnetic flux concentrator 320, the first composite pattern 410, and the second composite pattern 420.

第１複合パターン４１０は、基板１０上に第１パターンおよび第２パターンを有する。第１パターンは、第１方向に延伸する第１磁気収束部１１０と、第１方向に延伸し、第１磁気収束部１１０を挟む第１感磁部２１０および第２感磁部２２０と、を含む。第２パターンは、第１方向に延伸する第２磁気収束部１２０と、第１方向に延伸し、第２磁気収束部１２０を挟む第３感磁部２３０および第４感磁部２４０と、を含む。なお、第２磁気収束部１２０は、第１磁気収束部１１０の第１方向とは反対側の端部よりも第１方向側にずれた位置から、第１方向に延伸する。即ち、第１磁気収束部１１０は、第１方向とは反対側の端部が、第２磁気収束部１２０よりも突出する。このような第１磁気収束部１１０および第２磁気収束部１２０の配置により、第１方向の磁束成分が第１磁気収束部１１０から第２磁気収束部１２０に移る磁路を形成することができる。 The first composite pattern 410 has a first pattern and a second pattern on the substrate 10. The first pattern includes a first magnetic flux concentrator 110 that extends in the first direction, and a first magnetic sensitive unit 210 and a second magnetic sensitive unit 220 that extend in the first direction and sandwich the first magnetic flux concentrator 110. Including. The second pattern includes a second magnetic flux concentrator 120 that extends in the first direction, and a third magnetic flux sensing unit 230 and a fourth magnetic flux sensing unit 240 that stretch in the first direction and sandwich the second magnetic flux focusing unit 120. Including. The second magnetic flux concentrator 120 extends in the first direction from a position displaced toward the first direction from the end of the first magnetic flux concentrator 110 opposite to the first direction. That is, the end of the first magnetic flux concentrator 110 opposite to the first direction projects more than the second magnetic flux concentrator 120. By disposing the first magnetic flux concentrator 110 and the second magnetic flux concentrator 120 as described above, it is possible to form a magnetic path in which the magnetic flux component in the first direction moves from the first magnetic flux concentrator 110 to the second magnetic flux concentrator 120. ..

図６は、基板１０上において、第１方向の磁束成分が第１磁気収束部１１０から第２磁気収束部１２０に移る磁路を形成する位置に配置される第２パターンとして、第１パターンと点対称に配置される例を示す。即ち、第１複合パターン４１０は、隣り合って配置する第２感磁部２２０および第３感磁部２３０の間の線分Ｂ−Ｂ'が、ＸＹ平面と略平行な面上における当該パターンの中心線となり、当該線分Ｂ−Ｂ'の−Ｘ方向側が第１パターン、＋Ｘ方向側が第２パターンとなる。また、線分Ｂ−Ｂ'上の点４１２に対して、第１パターンおよび第２パターンは点対称に配置される。ここで点対称とは、図６に示す通り、第１パターンおよび第２パターンは、点対称に全てが重複する位置に配置されることが好ましいが、全てが重複する配置に限定されることはなく、点対称にそれぞれの一部が重複する位置に配置されてもよいことを意味する。 FIG. 6 illustrates a first pattern as a second pattern arranged on the substrate 10 at a position where a magnetic path in which a magnetic flux component in the first direction moves from the first magnetic flux concentrator 110 to the second magnetic flux concentrator 120 is formed. An example in which they are arranged point-symmetrically is shown. That is, in the first composite pattern 410, the line segment BB′ between the second magnetic sensitive section 220 and the third magnetic sensitive section 230, which are arranged adjacent to each other, is formed on a plane substantially parallel to the XY plane. The center line becomes the first pattern on the −X direction side of the line segment BB′ and the second pattern on the +X direction side. Further, the first pattern and the second pattern are arranged point-symmetrically with respect to the point 412 on the line segment BB′. Here, the point symmetry means that, as shown in FIG. 6, it is preferable that the first pattern and the second pattern are arranged at positions where all of them are symmetrically overlapped with each other, but it is not limited to the arrangement where all of them are overlapped. Instead, it means that they may be arranged symmetrically with respect to each other in a partly overlapping manner.

なお、第１磁気収束部１１０の第１方向とは反対側の端部は、第２磁気収束部１２０の方向および第２磁気収束部１２０とは反対の方向にそれぞれ突出する磁気収束部材１１２を有してよい。また、第２磁気収束部１２０の第１方向側の端部は、第１磁気収束部１１０の方向および第１磁気収束部１１０とは反対の方向にそれぞれ突出する磁気収束部材１２２を有してよい。以上の第１複合パターン４１０は、図５に示す第３構成例の磁気センサ１００の第１磁気収束部１１０、第２磁気収束部１２０、第１感磁部２１０、第２感磁部２２０、第３感磁部２３０、および第４感磁部２４０の配置と略同一でよい。 The end of the first magnetic flux concentrator 110 opposite to the first direction has magnetic flux concentrator members 112 projecting in the direction of the second magnetic flux concentrator 120 and the direction opposite to the second magnetic flux concentrator 120, respectively. You may have. Further, the end portion of the second magnetic flux concentrating portion 120 on the first direction side has magnetic flux concentrating members 122 projecting in the direction of the first magnetic flux concentrating portion 110 and in the direction opposite to the first magnetic flux concentrating portion 110, respectively. Good. The first composite pattern 410 described above includes the first magnetic flux concentrator 110, the second magnetic flux concentrator 120, the first magnetic sensitive unit 210, the second magnetic sensitive unit 220 of the magnetic sensor 100 of the third configuration example shown in FIG. The arrangement of the third magnetic sensitive section 230 and the fourth magnetic sensitive section 240 may be substantially the same.

第２複合パターン４２０は、ＸＹ平面上で第１複合パターン４１０と重ならない位置に設けられ、第１複合パターン４１０と同形状の複合パターンを有する。図６に示す磁気センサ１００は、第２複合パターン４２０が、基板１０上において、第１複合パターン４１０の第１方向に対して直交する第２方向に位置する例を示す。 The second composite pattern 420 is provided at a position not overlapping the first composite pattern 410 on the XY plane, and has a composite pattern of the same shape as the first composite pattern 410. The magnetic sensor 100 shown in FIG. 6 shows an example in which the second composite pattern 420 is located on the substrate 10 in the second direction orthogonal to the first direction of the first composite pattern 410.

即ち、第２複合パターン４２０は、第１複合パターン４１０と同様に、第１パターンおよび第２パターンを有する。また、基板１０上において、第２パターンは、第１パターンと点対称に配置される。即ち、第２複合パターン４２０は、線分Ｃ−Ｃ'が、ＸＹ平面と略平行な面上における当該パターンの中心線となり、当該線分Ｃ−Ｃ'の−Ｘ方向側が第１パターン、＋Ｘ方向側が第２パターンとなる。また、線分Ｃ−Ｃ'上の点４２２に対して、第１パターンおよび第２パターンは点対称に配置される。 That is, the second composite pattern 420, like the first composite pattern 410, has a first pattern and a second pattern. Further, on the substrate 10, the second pattern is arranged in point symmetry with the first pattern. That is, in the second composite pattern 420, the line segment CC′ is the center line of the pattern on a plane substantially parallel to the XY plane, and the −X direction side of the line segment CC′ is the first pattern, +X. The direction side is the second pattern. Further, the first pattern and the second pattern are arranged point-symmetrically with respect to the point 422 on the line segment CC′.

第２複合パターン４２０が有する第１パターンは、第１複合パターン４１０が有する第１パターンと同様に、第１磁気収束部１４０、第１感磁部２６０、および第２感磁部２７０を含む。また、第２複合パターン４２０が有する第２パターンは、第１複合パターン４１０が有する第２パターンと同様に、第２磁気収束部１５０、第３感磁部２８０、および第４感磁部２９０を含む。また、第１磁気収束部１４０は、第１磁気収束部１１０と同様に、磁気収束部材１４２を有してよく、第２磁気収束部１５０は、第２磁気収束部１２０と同様に、磁気収束部材１５２を有してよい。 The first pattern included in the second composite pattern 420 includes the first magnetic flux concentrator 140, the first magnetic sensitive section 260, and the second magnetic sensitive section 270, similar to the first pattern included in the first composite pattern 410. The second pattern included in the second composite pattern 420 includes the second magnetic flux concentrator 150, the third magnetic sensitive unit 280, and the fourth magnetic sensitive unit 290, like the second pattern included in the first composite pattern 410. Including. Further, the first magnetic flux concentrator 140 may include a magnetic flux concentrator member 142 similarly to the first magnetic flux concentrator 110, and the second magnetic flux concentrator 150 may have the magnetic flux concentrator similar to the second magnetic flux concentrator 120. The member 152 may be included.

第１補助磁気収束部３１０および第２補助磁気収束部３２０は、第１複合パターン４１０および第２複合パターン４２０を挟み、第１方向に延伸する。第１補助磁気収束部３１０は、第１複合パターン４１０の第１磁気収束部１１０の第２磁気収束部１２０が設けられる側とは反対側に設けられる。また、第２補助磁気収束部３２０は、第２複合パターン４２０の第２磁気収束部１５０の第１磁気収束部１４０が設けられる側とは反対側に設けられる。なお、第１補助磁気収束部３１０の第１方向側の端部は、第２方向に突出する磁気収束部材３１２を有してよく、第２補助磁気収束部３２０の第１方向とは反対側の端部は、第２方向に突出する磁気収束部材３２２を有してよい。 The first auxiliary magnetic flux concentrator 310 and the second auxiliary magnetic flux concentrator 320 sandwich the first composite pattern 410 and the second composite pattern 420 and extend in the first direction. The first auxiliary magnetic flux concentrator 310 is provided on the opposite side of the first magnetic flux concentrator 110 of the first composite pattern 410 from the side where the second magnetic flux concentrator 120 is disposed. The second auxiliary magnetic flux concentrator 320 is provided on the opposite side of the second magnetic flux concentrator 150 of the second composite pattern 420 from the side on which the first magnetic flux concentrator 140 is disposed. The end of the first auxiliary magnetic flux concentrator 310 on the first direction side may have a magnetic flux concentrator member 312 protruding in the second direction, and the side of the second auxiliary magnetic flux concentrator 320 opposite to the first direction. May have a magnetic flux concentrating member 322 protruding in the second direction.

以上の磁気センサ１００において、第１複合パターン４１０および第２複合パターン４２０の、第１感磁部の組、第２感磁部の組、第３感磁部の組、および第４感磁部の組は、基板１０上において第１方向とは直交し、かつ、正負が異なる方向に感磁軸をそれぞれ有する。なお、第１感磁部の組は第１感磁部２１０および第１感磁部２６０を、第２感磁部の組は第２感磁部２２０および第２感磁部２７０を、第３感磁部の組は第３感磁部２３０および第３感磁部２８０を、第４感磁部の組は第４感磁部２４０および第４感磁部２９０を、それぞれ有する。 In the above magnetic sensor 100, the first magnetic sensitive section set, the second magnetic sensitive section set, the third magnetic sensitive section set, and the fourth magnetic sensitive section of the first composite pattern 410 and the second composite pattern 420. On the substrate 10, the groups of (3) and (7) have magnetic sensitive axes that are orthogonal to the first direction and have different positive and negative directions. Note that the first set of magnetic sensitive parts includes the first magnetic sensitive part 210 and the first magnetic sensitive part 260, and the second set of magnetic sensitive parts includes the second magnetic sensitive part 220 and the second magnetic sensitive part 270. The set of magnetic sensitive sections has the third magnetic sensitive section 230 and the third magnetic sensitive section 280, and the set of the fourth magnetic sensitive section has the fourth magnetic sensitive section 240 and the fourth magnetic sensitive section 290, respectively.

ここで、第１感磁部２１０、第２感磁部２２０、第３感磁部２３０、および第４感磁部２４０が−Ｘ方向に感磁軸を有し、第１感磁部２６０、第２感磁部２７０、第３感磁部２８０、および第４感磁部２９０が＋Ｘ方向に感磁軸を有する例を説明する。この場合、それぞれの感磁部の抵抗値は、磁場成分Ｂｘ、Ｂｙ、およびＢｚを含む磁場ベクトルＢ（Ｂｘ，Ｂｙ，Ｂｚ）の入力に対して、次式に示すように与えられる。
（数１２）
Ｒ１１＝Ｒ０−ΔＲｘ１＋ΔＲｙ１−ΔＲｚ１
Ｒ１２＝Ｒ０−ΔＲｘ１−ΔＲｙ１＋ΔＲｚ１
Ｒ１３＝Ｒ０−ΔＲｘ１−ΔＲｙ１−ΔＲｚ１
Ｒ１４＝Ｒ０−ΔＲｘ１＋ΔＲｙ１＋ΔＲｚ１
Ｒ２１＝Ｒ０＋ΔＲｘ２−ΔＲｙ２＋ΔＲｚ２
Ｒ２２＝Ｒ０＋ΔＲｘ２＋ΔＲｙ２−ΔＲｚ２
Ｒ２３＝Ｒ０＋ΔＲｘ２＋ΔＲｙ２＋ΔＲｚ２
Ｒ２４＝Ｒ０＋ΔＲｘ２−ΔＲｙ２−ΔＲｚ２ Here, the first magnetic sensitive section 210, the second magnetic sensitive section 220, the third magnetic sensitive section 230, and the fourth magnetic sensitive section 240 have a magnetic sensitive axis in the −X direction, and the first magnetic sensitive section 260, An example in which the second magnetic sensing section 270, the third magnetic sensing section 280, and the fourth magnetic sensing section 290 have a magnetic sensing axis in the +X direction will be described. In this case, the resistance value of each magnetic sensitive section is given to the input of the magnetic field vector B (Bx, By, Bz) including the magnetic field components Bx, By, and Bz as shown in the following equation.
(Equation 12)
R 11 =R 0 −ΔRx 1 +ΔRy 1 −ΔRz 1
R 12 =R 0 −ΔRx 1 −ΔRy 1 +ΔRz 1
R 13 =R 0 −ΔRx 1 −ΔRy 1 −ΔRz 1
R 14 =R 0 −ΔRx 1 +ΔRy 1 +ΔRz 1
R 21 =R 0 +ΔRx 2 −ΔRy 2 +ΔRz 2
R 22 =R 0 +ΔRx 2 +ΔRy 2 −ΔRz 2
R 23 =R 0 +ΔRx 2 +ΔRy 2 +ΔRz 2
R 24 =R 0 +ΔRx 2 −ΔRy 2 −ΔRz 2

なお、第１複合パターン４１０の感磁部の抵抗値をＲ１ｎとし、第２複合パターン４２０の感磁部の抵抗値をＲ２ｎとした（ｎ＝１，２，３，４）。また、−Ｘ方向に感磁軸を有する感磁部の抵抗値の変化をΔＲｍ１とし、＋Ｘ方向に感磁軸を有する感磁部の抵抗値の変化をΔＲｍ２とした（ｍ＝ｘ，ｙ，ｚ）。磁気センサ１００は、（数１２）式に基づき、次式に示す演算を実行して、磁場成分に応じて変化する抵抗値の変化量を算出できる。
（数１３）
−Ｒ１１−Ｒ１２−Ｒ１３−Ｒ１４＋Ｒ２１＋Ｒ２２＋Ｒ２３＋Ｒ２４＝４（ΔＲｘ１＋ΔＲｘ２）
＋Ｒ１１−Ｒ１２−Ｒ１３＋Ｒ１４−Ｒ２１＋Ｒ２２＋Ｒ２３−Ｒ２４＝４（ΔＲｙ１＋ΔＲｙ２）
−Ｒ１１＋Ｒ１２−Ｒ１３＋Ｒ１４＋Ｒ２１−Ｒ２２＋Ｒ２３−Ｒ２４＝４（ΔＲｚ１＋ΔＲｚ２） The resistance value of the magnetic sensing portion of the first composite pattern 410 was R 1n, and the resistance value of the magnetic sensing portion of the second composite pattern 420 was R 2n (n=1, 2, 3, 4). Further, the change in the resistance value of the magnetic sensitive section having the magnetic sensitive axis in the −X direction is ΔRm 1, and the change in the resistance value of the magnetic sensitive section having the magnetic sensitive axis in the +X direction is ΔRm 2 (m=x, y, z). The magnetic sensor 100 can calculate the change amount of the resistance value that changes according to the magnetic field component by executing the calculation shown in the following formula based on the formula (12).
(Equation 13)
-R 11 -R 12 -R 13 -R 14 +R 21 +R 22 +R 23 +R 24 =4 (ΔRx 1 +ΔRx 2 )
+ R 11 -R 12 -R 13 + R 14 -R 21 + R 22 + R 23 -R 24 = 4 (ΔRy 1 + ΔRy 2)
-R 11 + R 12 -R 13 + R 14 + R 21 -R 22 + R 23 -R 24 = 4 (ΔRz 1 + ΔRz 2)

以上のように、第４構成例の磁気センサ１００は、略同一の入力磁場に対する感磁部の抵抗値の変化量が、感磁軸の方向に応じて異なった場合でも、他軸感度を低減させて、磁場ベクトルの直交する３方向の磁場成分を分離することができる。このように、磁気センサ１００は、第１複合パターン４１０の感磁部の感磁軸と、第２複合パターン４２０の感磁部の感磁軸とを、互いに逆向きにすることで、他軸感度の項を相殺することができる。 As described above, the magnetic sensor 100 according to the fourth configuration example reduces the sensitivity of the other axis even when the amount of change in the resistance value of the magnetic sensing section with respect to substantially the same input magnetic field differs depending on the direction of the magnetic sensing axis. By doing so, it is possible to separate the magnetic field components of the magnetic field vector in three orthogonal directions. As described above, the magnetic sensor 100 makes the magnetic sensitive axis of the magnetic sensitive section of the first composite pattern 410 and the magnetic sensitive axis of the magnetic sensitive section of the second composite pattern 420 reverse to each other, so that the other axis The sensitivity term can be offset.

（数１２）式および（数１３）式は、第１複合パターン４１０の感磁部の感磁軸が−Ｘ方向を向き、第２複合パターン４２０の感磁部の感磁軸が＋Ｘ方向を向く例を説明した。磁気センサ１００は、この他にも、他軸感度を低減させる感磁軸の方向の組み合わせを有する。ここで、磁気センサ１００が、図６に示した例のように８の感磁軸を有する場合を考える。 In equations (12) and (13), the magnetic sensitive axis of the magnetic sensitive portion of the first composite pattern 410 faces the −X direction, and the magnetic sensitive axis of the magnetic sensitive portion of the second composite pattern 420 faces the +X direction. I explained an example of turning. In addition to this, the magnetic sensor 100 has a combination of directions of the magnetic sensitive axes that reduce the sensitivity of the other axis. Here, consider a case where the magnetic sensor 100 has eight magnetic fields as in the example shown in FIG.

この場合、第１複合パターン４１０は４の感磁部を有し、当該４の感磁部のうち、３の感磁部が−Ｘ方向を向く組み合わせは、（Ｄ１１，Ｄ１２，Ｄ１３，Ｄ１４）＝（＋，−，−，−）、（−，＋，−，−）、（−，−，＋，−）、（−，−，−，＋）の４通りである。ここで、第１複合パターン４１０の感磁部の感磁軸の方向をＤ１ｎとし（ｎ＝１，２，３，４）、−Ｘ方向の感磁軸を「−」、＋Ｘ方向の感磁軸を「＋」とした。なお、当該組み合わせは、４Ｃ３として算出される組み合わせの数に等しい。 In this case, the first composite pattern 410 has four magnetic sensitive sections, and among the four magnetic sensitive sections, the combination in which the three magnetic sensitive sections face the −X direction is (D 11 , D 12 , D 13 ). , D 14 )=(+, −, −, −), (−, +, −, −), (−, −, +, −), (−, −, −, +). Here, the direction of the magnetic sensitive axis of the magnetic sensitive portion of the first composite pattern 410 is D 1n (n=1, 2, 3, 4), the magnetic sensitive axis of the −X direction is “−”, and the magnetic sensitive axis of the +X direction is the sense. The magnetic axis is set to "+". The number of combinations is equal to the number of combinations calculated as 4 C 3 .

また、第１複合パターン４１０の感磁部の感磁軸の当該組み合わせに対応する、第２複合パターン４２０の感磁部の感磁軸の組み合わせは、（Ｄ２１，Ｄ２２，Ｄ２３，Ｄ２４）＝（−，＋，＋，＋）、（＋，−，＋，＋）、（＋，＋，−，＋）、（＋，＋，＋，−）となる。なお、第２複合パターン４２０の感磁部の感磁軸の方向をＤ２ｎとした。即ち、第１複合パターン４１０および第２複合パターン４２０の、第１感磁部の組、第２感磁部の組、第３感磁部の組、および第４感磁部の組は、基板１０上において第１方向とは直交し、かつ、正負が異なる方向に感磁軸をそれぞれ有する。この場合、磁気センサ１００は、他軸感度を低減することができる。 Further, the combination of the magnetic sensitive axes of the magnetic sensitive portions of the second composite pattern 420 corresponding to the combination of the magnetic sensitive axes of the magnetic sensitive portions of the first composite pattern 410 is (D 21 , D 22 , D 23 , D 24 ) = (-, +, +, +), (+, -, +, +), (+, +, -, +), (+, +, +, -). The direction of the magnetic sensitive axis of the magnetic sensitive portion of the second composite pattern 420 was D 2n . That is, the first magnetic sensitive section set, the second magnetic sensitive section set, the third magnetic sensitive section set, and the fourth magnetic sensitive section set of the first composite pattern 410 and the second composite pattern 420 are the substrates. The magneto-sensitive axes are arranged in a direction that is orthogonal to the first direction and that has different positive and negative polarities. In this case, the magnetic sensor 100 can reduce the sensitivity of the other axis.

同様に、第１複合パターン４１０の感磁部のうち、２の感磁部が−Ｘ方向を向く組み合わせは、（Ｄ１１，Ｄ１２，Ｄ１３，Ｄ１４）＝（＋，＋，−，−）、（＋，−，＋，−）、（＋，−，−，＋）、（−，＋，＋，−）、（−，＋，−，＋）、（−，−，＋，＋）の６通りである。なお、当該組み合わせは、４Ｃ２として算出される組み合わせの数に等しい。また、第１複合パターン４１０の感磁部のうち、１の感磁部が−Ｘ方向を向く組み合わせは、（Ｄ１１，Ｄ１２，Ｄ１３，Ｄ１４）＝（−，＋，＋，＋）、（＋，−，＋，＋）、（＋，＋，−，＋）、（＋，＋，＋，−）の４通りであり、当該組み合わせは、４Ｃ１として算出される組み合わせの数に等しい。 Similarly, among the magnetic sensitive portions of the first composite pattern 410, a combination in which the two magnetic sensitive portions face the −X direction is (D 11 , D 12 , D 13 , D 14 )=(+, +, −, -), (+, -, +, -), (+, -, -, +), (-, +, +, -), (-, +, -, +), (-, -, +, There are 6 types of +). Note that the combination is equal to the number of combinations calculated as 4 C 2 . Further, among the magnetic sensitive portions of the first composite pattern 410, a combination in which one magnetic sensitive portion faces the −X direction is (D 11 , D 12 , D 13 , D 14 )=(−, +, +, + ), (+, -, +, +), (+, +, -, +), (+, +, +, -), and there are four combinations of the combinations calculated as 4 C 1 . Equal to the number.

同様に、第１複合パターン４１０の感磁部のうち、４の感磁部が−Ｘ方向を向く組み合わせは、（Ｄ１１，Ｄ１２，Ｄ１３，Ｄ１４）＝（−，−，−，−）の１通りである。なお、当該組み合わせは、４Ｃ４として算出される組み合わせの数に等しい。また、第１複合パターン４１０の０の感磁部が−Ｘ方向を向く組み合わせは、（Ｄ１１，Ｄ１２，Ｄ１３，Ｄ１４）＝（＋，＋，＋，＋）の１通りであり、当該組み合わせは、４Ｃ０として算出される組み合わせの数に等しい。したがって、８の感磁軸を有する磁気センサ１００は、第１複合パターン４１０の感磁部の組み合わせと、第２複合パターン４２０の対応する感磁部の組み合わせの、合計１６通りのいずれかで形成されることで、他軸感度の影響を低減させることができる。 Similarly, among the magnetic sensitive portions of the first composite pattern 410, the combination of the four magnetic sensitive portions facing the −X direction is (D 11 , D 12 , D 13 , D 14 )=(−, −, −, -) is one way. The number of combinations is equal to the number of combinations calculated as 4 C 4 . Further, there are one combination of (D 11 , D 12 , D 13 , D 14 )=(+, +, +, +) in which the 0 magnetic sensitive portion of the first composite pattern 410 faces the −X direction. , The combination is equal to the number of combinations calculated as 4 C 0 . Therefore, the magnetic sensor 100 having eight magnetic sensitive axes is formed by any one of a total of 16 combinations of the magnetic sensitive portions of the first composite pattern 410 and the corresponding magnetic sensitive portions of the second composite pattern 420. By doing so, the influence of the sensitivity of the other axis can be reduced.

以上の本実施形態に係る磁気センサ１００は、感磁部が２つの磁気収束部の間、または磁気収束部および補助磁気収束部の間に配置される例を説明した。この場合において、感磁部は、ＸＹ平面視で、磁気収束部と重なるように配置されてもよい。 In the magnetic sensor 100 according to the present embodiment described above, an example has been described in which the magnetically sensitive portion is arranged between the two magnetic flux concentrating portions or between the magnetic flux focusing portion and the auxiliary magnetic flux concentrating portion. In this case, the magnetically sensitive portion may be arranged so as to overlap the magnetic flux concentrating portion in XY plan view.

図７は、本実施形態に係る磁気センサ１００の第５構成例を示す。第５構成例の磁気センサ１００において、図６に示された第４構成例の磁気センサ１００の動作と略同一のものには同一の符号を付け、説明を省略する。図７は、＋Ｚ方向側からの磁気センサ１００の平面視の一例を示す。 FIG. 7 shows a fifth configuration example of the magnetic sensor 100 according to this embodiment. In the magnetic sensor 100 of the fifth configuration example, substantially the same operations as those of the magnetic sensor 100 of the fourth configuration example shown in FIG. 6 are designated by the same reference numerals, and the description thereof will be omitted. FIG. 7 shows an example of a plan view of the magnetic sensor 100 from the +Z direction side.

第５構成例の磁気センサ１００は、第１複合パターン４１０の第１感磁部２１０および第２感磁部２２０が、第１磁気収束部１１０と一部が重なり、第２複合パターン４２０の第１感磁部２６０および第２感磁部２７０が、第１磁気収束部１４０と一部が重なる。また、磁気センサ１００は、第１複合パターン４１０の第３感磁部２３０および第４感磁部２４０が、第２磁気収束部１２０と一部が重なり、第２複合パターン４２０の第３感磁部２８０および第４感磁部２９０が、第２磁気収束部１５０と一部が重なる。 In the magnetic sensor 100 of the fifth configuration example, the first magnetically sensitive portion 210 and the second magnetically sensitive portion 220 of the first composite pattern 410 partially overlap the first magnetic flux concentrating portion 110, and the second composite pattern 420 has the second magnetic sensitive portion 420. The first magnetic sensing section 260 and the second magnetic sensing section 270 partially overlap the first magnetic flux concentrating section 140. Further, in the magnetic sensor 100, the third magnetic sensing section 230 and the fourth magnetic sensing section 240 of the first composite pattern 410 partially overlap with the second magnetic flux concentrating section 120, and the third magnetic sensing section of the second composite pattern 420. The portion 280 and the fourth magnetically sensitive portion 290 partially overlap the second magnetic flux concentrating portion 150.

このような第５構成例の磁気センサ１００の感磁部は、図６で説明した第４構成例の磁気センサ１００の動作と略同様に動作することができ、他軸感度の影響を低減させることができる。以上の本実施形態に係る磁気センサ１００は、第１複合パターン４１０の第１方向に対して直交する第２方向に第２複合パターン４２０が設けられる例を説明した。これに代えて、第２複合パターン４２０は、第１複合パターン４１０に対して第２方向とは異なる方向に設けられてよい。 Such a magnetically sensitive portion of the magnetic sensor 100 of the fifth configuration example can operate in substantially the same manner as the operation of the magnetic sensor 100 of the fourth configuration example described with reference to FIG. 6, and reduces the influence of the sensitivity of another axis. be able to. The magnetic sensor 100 according to the present embodiment described above has described the example in which the second composite pattern 420 is provided in the second direction orthogonal to the first direction of the first composite pattern 410. Alternatively, the second composite pattern 420 may be provided in a direction different from the second direction with respect to the first composite pattern 410.

図８は、本実施形態に係る磁気センサ１００の第６構成例を示す。第６構成例の磁気センサ１００において、図６に示された第４構成例の磁気センサ１００の動作と略同一のものには同一の符号を付け、説明を省略する。図８は、＋Ｚ方向側からの磁気センサ１００の平面視の一例を示す。 FIG. 8 shows a sixth configuration example of the magnetic sensor 100 according to this embodiment. In the magnetic sensor 100 of the sixth configuration example, substantially the same operations as those of the magnetic sensor 100 of the fourth configuration example shown in FIG. 6 are designated by the same reference numerals, and the description thereof will be omitted. FIG. 8 shows an example of a plan view of the magnetic sensor 100 from the +Z direction side.

第６構成例の磁気センサ１００において、第２複合パターン４２０は、基板１０上において、第１複合パターン４１０の第１方向に位置する。図８は、第２複合パターン４２０が第１複合パターン４１０の−Ｙ方向側に設けられた例を示す。なお、図８は、第１方向に延伸する補助磁気収束部および第２方向に延伸する磁気収束部材については省略したが、磁気センサ１００は、これらを更に備えることが望ましい。 In the magnetic sensor 100 of the sixth configuration example, the second composite pattern 420 is located on the substrate 10 in the first direction of the first composite pattern 410. FIG. 8 shows an example in which the second composite pattern 420 is provided on the −Y direction side of the first composite pattern 410. Although FIG. 8 omits the auxiliary magnetic flux concentrating portion extending in the first direction and the magnetic flux concentrating member extending in the second direction, it is desirable that the magnetic sensor 100 further includes these.

また、磁気センサ１００は、図８に示すように、１または複数の補助磁気収束部を更に備えてもよい。第１補助磁気収束部３１０および第２補助磁気収束部３２０は、第１複合パターン４１０を挟み、第１方向に延伸する。第１補助磁気収束部３１０は、第１パターンの第１磁気収束部１１０の第２磁気収束部１２０が設けられる側とは反対側に設けられる。また、第２補助磁気収束部３２０は、第２パターンの第２磁気収束部１２０の第１磁気収束部１１０が設けられる側とは反対側に設けられる。 Further, the magnetic sensor 100 may further include one or a plurality of auxiliary magnetic flux concentrators, as shown in FIG. 8. The first auxiliary magnetic flux concentrator 310 and the second auxiliary magnetic flux concentrator 320 sandwich the first composite pattern 410 and extend in the first direction. The first auxiliary magnetic flux concentrator 310 is provided on the opposite side of the first magnetic flux concentrator 110 of the first pattern to the side where the second magnetic flux concentrator 120 is provided. The second auxiliary magnetic flux concentrator 320 is provided on the opposite side of the second magnetic flux concentrator 120 of the second pattern to the side where the first magnetic flux concentrator 110 is provided.

また、第１補助磁気収束部３４０および第２補助磁気収束部３５０は、第２複合パターン４２０を挟み、第１方向に延伸する。第１補助磁気収束部３４０は、第１パターンの第１磁気収束部１４０の第２磁気収束部１５０が設けられる側とは反対側に設けられる。また、第２補助磁気収束部３５０は、第２パターンの第２磁気収束部１５０の第１磁気収束部１４０が設けられる側とは反対側に設けられる。 Further, the first auxiliary magnetic flux concentrating portion 340 and the second auxiliary magnetic flux concentrating portion 350 sandwich the second composite pattern 420 and extend in the first direction. The first auxiliary magnetic flux concentrator 340 is provided on the opposite side of the first magnetic flux concentrator 140 of the first pattern to the side where the second magnetic flux concentrator 150 is provided. In addition, the second auxiliary magnetic flux concentrator 350 is provided on the side of the second magnetic flux concentrator 150 of the second pattern opposite to the side on which the first magnetic flux concentrator 140 is provided.

以上の第６構成例の磁気センサ１００においても、第１複合パターン４１０の感磁部の感磁軸と、第２複合パターン４２０の対応する感磁部の感磁軸とを、互いに逆向きにすることで、他軸感度の項を相殺することができる。 Also in the magnetic sensor 100 of the sixth configuration example described above, the magnetic sensitive axis of the magnetic sensitive section of the first composite pattern 410 and the magnetic sensitive axis of the corresponding magnetic sensitive section of the second composite pattern 420 are set in opposite directions. By doing so, it is possible to cancel the term of the other axis sensitivity.

なお、第２複合パターン４２０は、第１複合パターン４１０とＸＹ平面上で重ならなければよい。即ち、磁気センサに入力する磁場の均一性が保たれている範囲であれば、第１複合パターン４１０および第２複合パターン４２０は、基板１０上において離間して設けられてもよい。 The second composite pattern 420 may not overlap the first composite pattern 410 on the XY plane. That is, the first composite pattern 410 and the second composite pattern 420 may be provided separately on the substrate 10 as long as the uniformity of the magnetic field input to the magnetic sensor is maintained.

以上の本実施形態に係る磁気センサ１００は、第１磁気収束部１１０が、第２磁気収束部１２０と比較して、第１方向とは反対側に突出する例を説明した。これに代えて、第２磁気収束部１２０が、第１磁気収束部１１０と比較して、第１方向とは反対側に突出してもよい。この場合、第１磁気収束部１１０は、第２磁気収束部１２０と比較して、第１方向側に突出してよい。また、これに代えて、第１磁気収束部１１０および第２磁気収束部１２０は、他の磁気収束部と比較して、いずれの方向にも突出しなくてもよい。このような磁気センサ１００について、次に説明する。 In the magnetic sensor 100 according to the present embodiment described above, the example in which the first magnetic flux concentrator 110 is projected to the side opposite to the first direction as compared with the second magnetic flux concentrator 120 has been described. Alternatively, the second magnetic flux concentrator 120 may project to the side opposite to the first direction as compared with the first magnetic flux concentrator 110. In this case, the first magnetic flux concentrator 110 may protrude toward the first direction side as compared with the second magnetic flux concentrator 120. Alternatively, the first magnetic flux concentrator 110 and the second magnetic flux concentrator 120 may not protrude in any direction as compared with the other magnetic flux concentrators. Such a magnetic sensor 100 will be described next.

図９は、本実施形態に係る磁気センサ１００の第７構成例を示す。第７構成例の磁気センサ１００において、図６に示された第４構成例の磁気センサ１００の動作と略同一のものには同一の符号を付け、説明を省略する。図９は、＋Ｚ方向側からの磁気センサ１００の平面視の一例を示す。第７構成例の磁気センサ１００は、基板１０と、第１複合パターン４１０と、第２複合パターン４２０と、を備える。 FIG. 9 shows a seventh configuration example of the magnetic sensor 100 according to this embodiment. In the magnetic sensor 100 of the seventh configuration example, substantially the same operations as those of the magnetic sensor 100 of the fourth configuration example shown in FIG. 6 are designated by the same reference numerals, and the description thereof will be omitted. FIG. 9 shows an example of a plan view of the magnetic sensor 100 from the +Z direction side. The magnetic sensor 100 according to the seventh configuration example includes the substrate 10, the first composite pattern 410, and the second composite pattern 420.

第１複合パターン４１０は、基板１０上に第１パターンおよび第２パターンを有する。第１パターンは、第１方向に延伸する第１磁気収束部１１０と、第１方向に延伸し、第１磁気収束部１１０の第１方向側の端部において第１磁気収束部１１０を挟む第１感磁部２１０および第２感磁部２２０と、を含む。第２パターンは、第１方向に延伸し、第２磁気収束部１２０の第１方向とは反対側の端部において第１磁気収束部１１０と並走する第２磁気収束部１２０と、第１方向に延伸し、第２磁気収束部１２０を挟む第３感磁部２３０および第４感磁部２４０と、を含む。 The first composite pattern 410 has a first pattern and a second pattern on the substrate 10. The first pattern includes a first magnetic flux concentrator 110 that extends in the first direction and a first magnetic flux concentrator 110 that extends in the first direction and sandwiches the first magnetic flux concentrator 110 at an end of the first magnetic flux concentrator 110 on the first direction side. The first magnetic sensitive section 210 and the second magnetic sensitive section 220 are included. The second pattern extends in the first direction, and the second magnetic flux concentrator 120 runs parallel to the first magnetic flux concentrator 110 at the end of the second magnetic flux concentrator 120 opposite to the first direction. The third magnetic sensitive portion 230 and the fourth magnetic sensitive portion 240 that extend in the direction and sandwich the second magnetic flux concentrating portion 120 are included.

また、基板１０上において、第２パターンは、第１パターンと点対称に配置されてよい。即ち、第１複合パターン４１０は、第２感磁部２２０および第３感磁部２３０の間の線分Ｂ−Ｂ'が、ＸＹ平面と略平行な面上における当該パターンの中心線となり、当該線分Ｂ−Ｂ'の−Ｘ方向側が第１パターン、＋Ｘ方向側が第２パターンとなる。また、線分Ｂ−Ｂ'上の点４１２に対して、第１パターンおよび第２パターンは点対称に配置される。 Further, on the substrate 10, the second pattern may be arranged in point symmetry with the first pattern. That is, in the first composite pattern 410, the line segment BB′ between the second magnetic sensing section 220 and the third magnetic sensing section 230 becomes the center line of the pattern on a plane substantially parallel to the XY plane, The −X direction side of the line segment BB′ is the first pattern, and the +X direction side is the second pattern. Further, the first pattern and the second pattern are arranged point-symmetrically with respect to the point 412 on the line segment BB′.

第２複合パターン４２０は、ＸＹ平面上で第１複合パターン４１０と重ならない位置に設けられ、第１複合パターン４１０と同形状の複合パターンを有する。図９に示す磁気センサ１００は、第２複合パターン４２０が、基板１０上において、第１複合パターン４１０の第１方向に対して直交する第２方向に位置する例を示す。 The second composite pattern 420 is provided at a position not overlapping the first composite pattern 410 on the XY plane, and has a composite pattern of the same shape as the first composite pattern 410. The magnetic sensor 100 shown in FIG. 9 shows an example in which the second composite pattern 420 is located on the substrate 10 in the second direction orthogonal to the first direction of the first composite pattern 410.

即ち、第２複合パターン４２０は、第１複合パターン４１０と同様に、第１パターンおよび第２パターンを有する。また、基板１０上において、第２パターンは、第１パターンと点対称に配置される。即ち、第２複合パターン４２０は、線分Ｃ−Ｃ'が、ＸＹ平面と略平行な面上における当該パターンの中心線となり、当該線分Ｃ−Ｃ'の−Ｘ方向側が第１パターン、＋Ｘ方向側が第２パターンとなる。また、線分Ｃ−Ｃ'上の点４２２に対して、第１パターンおよび第２パターンは点対称に配置される。 That is, the second composite pattern 420, like the first composite pattern 410, has a first pattern and a second pattern. Further, on the substrate 10, the second pattern is arranged in point symmetry with the first pattern. That is, in the second composite pattern 420, the line segment CC′ is the center line of the pattern on a plane substantially parallel to the XY plane, and the −X direction side of the line segment CC′ is the first pattern, +X. The direction side is the second pattern. Further, the first pattern and the second pattern are arranged point-symmetrically with respect to the point 422 on the line segment CC′.

第２複合パターン４２０が有する第１パターンは、第１複合パターン４１０が有する第１パターンと同様に、第１磁気収束部１４０、第１感磁部２６０、および第２感磁部２７０を含む。また、第２複合パターン４２０が有する第２パターンは、第１複合パターン４１０が有する第２パターンと同様に、第２磁気収束部１５０、第３感磁部２８０、および第４感磁部２９０を含む。 The first pattern included in the second composite pattern 420 includes the first magnetic flux concentrator 140, the first magnetic sensitive section 260, and the second magnetic sensitive section 270, similar to the first pattern included in the first composite pattern 410. The second pattern included in the second composite pattern 420 includes the second magnetic flux concentrator 150, the third magnetic sensitive unit 280, and the fourth magnetic sensitive unit 290, like the second pattern included in the first composite pattern 410. Including.

なお、第１複合パターン４１０の第１感磁部２１０、第２感磁部２２０は、第１磁気収束部１１０と一部が重なってよい。また、第１複合パターン４１０の第３感磁部２３０、および第４感磁部２４０は、第２磁気収束部１２０と一部が重なってよい。この場合、同様に、第２複合パターン４２０の第１感磁部２６０、第２感磁部２７０は、第１磁気収束部１４０と一部が重なってよい。また、第２複合パターンの４２０の第３感磁部２８０、および第４感磁部２９０は、第２磁気収束部１５０と一部が重なってよい。 The first magnetic sensing section 210 and the second magnetic sensing section 220 of the first composite pattern 410 may partially overlap the first magnetic flux concentrating section 110. Further, the third magnetic sensing part 230 and the fourth magnetic sensing part 240 of the first composite pattern 410 may partially overlap the second magnetic flux concentrating part 120. In this case, similarly, the first magnetic sensing section 260 and the second magnetic sensing section 270 of the second composite pattern 420 may partially overlap the first magnetic flux concentrating section 140. Further, the third magnetic sensing portion 280 and the fourth magnetic sensing portion 290 of the second composite pattern 420 may partially overlap the second magnetic flux concentrating portion 150.

より好ましい形態は、第１複合パターン４１０の第１磁気収束部１１０および第２磁気収束部１２０は、各々の第１方向の長さが等しく、各々の第１方向側の端部と第１方向とは反対側の端部が揃って配置されるとよい。同様に、第２複合パターン４２０の第１磁気収束部１４０および第２磁気収束部１５０は、各々の第１方向の長さが等しく、各々の第１方向側の端部と第１方向とは反対側の端部が揃って配置されるとよい。 More preferably, the first magnetic flux concentrating portion 110 and the second magnetic flux concentrating portion 120 of the first composite pattern 410 have the same length in the first direction, and the end portions on the first direction side and the first direction. It is preferable that the end portions on the side opposite to are aligned. Similarly, the first magnetic flux concentrating portion 140 and the second magnetic flux concentrating portion 150 of the second composite pattern 420 have the same length in the first direction, and the end portions on the first direction side and the first direction are the same. It is preferable that the opposite ends are aligned.

以上の磁気センサ１００において、第１感磁部２１０および第２感磁部２２０は、第１磁気収束部１１０の−Ｙ方向側の端部よりも＋Ｙ方向側にずれた位置から、第１磁気収束部１１０の＋Ｙ方向側の端部まで延伸する。同様に、第１感磁部２６０、および第２感磁部２７０は、第１磁気収束部１４０の−Ｙ方向側の端部よりも＋Ｙ方向側にずれた位置から、第１磁気収束部１４０の＋Ｙ方向側の端部まで延伸する。 In the above-described magnetic sensor 100, the first magnetic sensing unit 210 and the second magnetic sensing unit 220 are located at positions where the first magnetic sensing unit 210 and the second magnetic sensing unit 220 deviate toward the +Y direction side from the −Y direction side end of the first magnetic flux concentrating unit 110. It extends to the end of the converging portion 110 on the +Y direction side. Similarly, the first magnetically sensitive portion 260 and the second magnetically sensitive portion 270 are displaced from the end of the first magnetic flux concentrating portion 140 on the −Y direction side toward the +Y direction side from the first magnetic flux concentrating portion 140. To the end on the +Y direction side.

また、第３感磁部２３０および第４感磁部２４０は、第２磁気収束部１２０の−Ｙ方向側の端部から、第２磁気収束部１２０の＋Ｙ方向側の端部よりも−Ｙ方向側にずれた位置まで延伸する。同様に、第３感磁部２８０および第４感磁部２９０は、第２磁気収束部１５０の−Ｙ方向側の端部から、第２磁気収束部１５０の＋Ｙ方向側の端部よりも−Ｙ方向側にずれた位置まで延伸する。 In addition, the third magnetically sensitive portion 230 and the fourth magnetically sensitive portion 240 are located at the −Y direction end of the second magnetic flux concentrating portion 120 and at the −Y side of the +Y direction side end of the second magnetic flux concentrating portion 120. Stretch to a position deviated to the direction side. Similarly, the third magnetically sensitive portion 280 and the fourth magnetically sensitive portion 290 are more negative than the −Y direction side end portion of the second magnetic flux concentrating portion 150 than the +Y direction side end portion of the second magnetic flux concentrating portion 150. The film is stretched to a position displaced in the Y direction.

即ち、第７構成例の磁気センサ１００は、第３感磁部２３０、第４感磁部２４０、第３感磁部２８０、および第４感磁部２９０が、第１感磁部２１０および第２感磁部２２０と比較して、第１方向とは反対側に突出する。また、第１感磁部２１０、第２感磁部２２０、第１感磁部２６０、および第２感磁部２７０は、第３感磁部２３０および第４感磁部２４０と比較して、第１方向側に突出する。 That is, in the magnetic sensor 100 of the seventh configuration example, the third magnetic sensitive section 230, the fourth magnetic sensitive section 240, the third magnetic sensitive section 280, and the fourth magnetic sensitive section 290 are the first magnetic sensitive section 210 and the first magnetic sensitive section 210. 2 Compared with the magnetic sensing section 220, it projects to the side opposite to the first direction. Further, the first magnetic sensitive section 210, the second magnetic sensitive section 220, the first magnetic sensitive section 260, and the second magnetic sensitive section 270 are compared with the third magnetic sensitive section 230 and the fourth magnetic sensitive section 240, respectively. It projects in the first direction.

これにより、磁気センサ１００は、図９の点線の矢印で示したように、第１方向に向かう入力磁場Ｂｙに対して、第２磁気収束部１２０および第２磁気収束部１５０が引き寄せて生成したＸ方向の磁場成分を、第３感磁部２３０、第４感磁部２４０、第３感磁部２８０、および第４感磁部２９０に入力させることができる。また、第１磁気収束部１１０および第１磁気収束部１４０が放出して生成したＸ方向の磁場成分を、第１感磁部２１０、第２感磁部２２０、第１感磁部２６０、および第２感磁部２７０に入力させることができる。 As a result, the magnetic sensor 100 is generated by the second magnetic flux concentrating unit 120 and the second magnetic flux concentrating unit 150 attracting the input magnetic field By in the first direction, as indicated by the dotted arrow in FIG. 9. The magnetic field component in the X direction can be input to the third magnetic sensitive section 230, the fourth magnetic sensitive section 240, the third magnetic sensitive section 280, and the fourth magnetic sensitive section 290. Further, the X-direction magnetic field component emitted and generated by the first magnetic flux concentrator 110 and the first magnetic flux concentrator 140 is converted into the first magnetic sensitive unit 210, the second magnetic sensitive unit 220, the first magnetic sensitive unit 260, and It can be input to the second magnetic sensing unit 270.

したがって、このような第７構成例の磁気センサ１００においても、第１複合パターン４１０の感磁部の感磁軸と、第２複合パターン４２０の対応する感磁部の感磁軸とを、互いに逆向きにすることで、他軸感度の項を相殺して、異なる３方向の磁場成分を分離できる。なお、図９は、第１方向に延伸する補助磁気収束部および第２方向に延伸する磁気収束部材については省略したが、磁気センサ１００は、これらを更に備えてもよい。また、第２複合パターン４２０は、ＸＹ平面上で第１複合パターン４１０と重ならなければ、第１複合パターン４１０に対して第２方向とは異なる方向に設けられてよい。 Therefore, also in the magnetic sensor 100 of the seventh configuration example, the magnetic sensitive axis of the magnetic sensitive portion of the first composite pattern 410 and the magnetic sensitive axis of the corresponding magnetic sensitive portion of the second composite pattern 420 are mutually By making them in opposite directions, the terms of the other axis sensitivity can be canceled and the magnetic field components in different three directions can be separated. 9 omits the auxiliary magnetic flux concentrating portion extending in the first direction and the magnetic flux focusing member extending in the second direction, the magnetic sensor 100 may further include these. The second composite pattern 420 may be provided in a direction different from the second direction with respect to the first composite pattern 410 as long as it does not overlap the first composite pattern 410 on the XY plane.

以上の本実施形態に係る磁気センサ１００は、第１複合パターン４１０および第２複合パターン４２０が、それぞれ２つの磁気収束部を有する例を説明した。これに代えて、第１複合パターン４１０および第２複合パターン４２０は、それぞれ１つの磁気収束部を有する構成であってもよい。このような磁気センサ１００について、次に説明する。 In the magnetic sensor 100 according to the present embodiment described above, the example in which the first composite pattern 410 and the second composite pattern 420 each have two magnetic flux concentrators has been described. Instead of this, the first composite pattern 410 and the second composite pattern 420 may each have one magnetic flux concentrator. Such a magnetic sensor 100 will be described next.

図１０は、本実施形態に係る磁気センサ１００の第８構成例を示す。図１０は、＋Ｚ方向側からの磁気センサ１００の平面視の一例を示す。第８構成例の磁気センサ１００は、基板１０と、第１複合パターン４１０と、第２複合パターン４２０と、を備える。 FIG. 10 shows an eighth configuration example of the magnetic sensor 100 according to this embodiment. FIG. 10 shows an example of a plan view of the magnetic sensor 100 from the +Z direction side. The magnetic sensor 100 according to the eighth configuration example includes the substrate 10, the first composite pattern 410, and the second composite pattern 420.

第１複合パターン４１０は、第１方向に延伸する第１磁気収束部５１０と、第１感磁部６１０と、第２感磁部６２０と、第３感磁部６３０と、第４感磁部６４０と、を有する。第１感磁部６１０および第２感磁部６２０は、第１方向に延伸し、第１磁気収束部５１０の第１方向側の端部において第１磁気収束部５１０を挟むように設けられる。第３感磁部６３０および第４感磁部６４０は、第１方向に延伸し、第１磁気収束部５１０の第１方向とは反対側の端部において第１磁気収束部５１０を挟むように設けられる。 The first composite pattern 410 includes a first magnetic flux concentrating portion 510 extending in the first direction, a first magnetic sensitive portion 610, a second magnetic sensitive portion 620, a third magnetic sensitive portion 630, and a fourth magnetic sensitive portion. 640. The first magnetically sensitive portion 610 and the second magnetically sensitive portion 620 are provided so as to extend in the first direction and sandwich the first magnetically converging portion 510 at the end of the first magnetically concentrating portion 510 on the first direction side. The third magnetically sensitive portion 630 and the fourth magnetically sensitive portion 640 extend in the first direction and sandwich the first magnetic flux concentrating portion 510 at the end of the first magnetic flux concentrating portion 510 opposite to the first direction. It is provided.

第２複合パターン４２０は、ＸＹ平面上で第１複合パターン４１０と重ならない位置に設けられ、第１複合パターン４１０と同形状の複合パターンを有する。図１０に示す磁気センサ１００は、第２複合パターン４２０が、基板１０上において、第１複合パターン４１０の第１方向に対して直交する第２方向に位置する例を示す。即ち、第２複合パターン４２０は、第１複合パターン４１０と同様に、第１磁気収束部５２０、第１感磁部６５０、第２感磁部６６０、第３感磁部６７０、および第４感磁部６８０、を有する。 The second composite pattern 420 is provided at a position not overlapping the first composite pattern 410 on the XY plane, and has a composite pattern of the same shape as the first composite pattern 410. The magnetic sensor 100 shown in FIG. 10 shows an example in which the second composite pattern 420 is located on the substrate 10 in the second direction orthogonal to the first direction of the first composite pattern 410. That is, the second composite pattern 420 is similar to the first composite pattern 410 in that the first magnetic flux concentrator 520, the first magnetic sensitive part 650, the second magnetic sensitive part 660, the third magnetic sensitive part 670, and the fourth magnetic sensitive part 670. It has a magnetic portion 680.

なお、第１複合パターン４１０の第１感磁部６１０、第２感磁部６２０、第３感磁部６３０、および第４感磁部６４０は、第１磁気収束部５１０と一部が重なってよい。この場合、同様に、第２複合パターンの第１感磁部６５０、第２感磁部６６０、第３感磁部６７０、および第４感磁部６８０は、第１磁気収束部５２０と一部が重なってよい。 The first magnetic sensing section 610, the second magnetic sensing section 620, the third magnetic sensing section 630, and the fourth magnetic sensing section 640 of the first composite pattern 410 partially overlap with the first magnetic flux concentrating section 510. Good. In this case, similarly, the first magnetic sensitive portion 650, the second magnetic sensitive portion 660, the third magnetic sensitive portion 670, and the fourth magnetic sensitive portion 680 of the second composite pattern are partially combined with the first magnetic flux concentrating portion 520. May overlap.

また、磁気センサ１００は、図１０に示すように、１または複数の補助磁気収束部を更に備えてもよい。第１補助磁気収束部３１０および第２補助磁気収束部３２０は、第１複合パターン４１０および第２複合パターン４２０を挟み、第１方向に延伸する。第１補助磁気収束部３１０は、第１複合パターン４１０の第１磁気収束部５１０の第２複合パターン４２０が設けられる側とは反対側に設けられる。また、第２補助磁気収束部３２０は、第２複合パターンの第１磁気収束部５２０の第１複合パターン４１０が設けられる側とは反対側に設けられる。 Further, the magnetic sensor 100 may further include one or a plurality of auxiliary magnetic flux concentrators, as shown in FIG. 10. The first auxiliary magnetic flux concentrator 310 and the second auxiliary magnetic flux concentrator 320 sandwich the first composite pattern 410 and the second composite pattern 420 and extend in the first direction. The first auxiliary magnetic flux concentrator 310 is provided on the opposite side of the first magnetic flux concentrator 510 of the first composite pattern 410 from the side on which the second complex pattern 420 is provided. The second auxiliary magnetic flux concentrator 320 is provided on the opposite side of the first magnetic flux concentrator 520 of the second composite pattern from the side on which the first composite pattern 410 is provided.

以上の第８構成例の磁気センサ１００は、図１０の点線の矢印で示したように、第１方向に向かう入力磁場Ｂｙに対して、第１磁気収束部５１０および第１磁気収束部５２０が引き寄せて生成したＸ方向の磁場成分を、第３感磁部６３０、第４感磁部６４０、第３感磁部６７０、および第４感磁部６８０に入力させることができる。また、第１磁気収束部５１０および第１磁気収束部５２０が放出して生成したＸ方向の磁場成分を、第１感磁部６１０、第２感磁部６２０、第１感磁部６５０、および第２感磁部６６０に入力させることができる。 In the magnetic sensor 100 of the eighth configuration example described above, as indicated by the dotted arrow in FIG. 10, the first magnetic flux concentrating unit 510 and the first magnetic flux concentrating unit 520 respond to the input magnetic field By in the first direction. The magnetic field component in the X direction generated by drawing can be input to the third magnetic sensing unit 630, the fourth magnetic sensing unit 640, the third magnetic sensing unit 670, and the fourth magnetic sensing unit 680. In addition, the X-direction magnetic field component emitted and generated by the first magnetic flux concentrator 510 and the first magnetic flux concentrator 520 is converted into the first magnetic sensitive unit 610, the second magnetic sensitive unit 620, the first magnetic sensitive unit 650, and It can be input to the second magnetic sensing unit 660.

したがって、このような第８構成例の磁気センサ１００においても、第１複合パターン４１０の感磁部の感磁軸と、第２複合パターン４２０の対応する感磁部の感磁軸とを、互いに逆向きにすることで、他軸感度の項を相殺して、異なる３方向の磁場成分を分離できる。なお、図１０は、第１方向に延伸する補助磁気収束部および第２方向に延伸する磁気収束部材については省略したが、磁気センサ１００は、これらを更に備えてもよい。また、第２複合パターン４２０は、第１複合パターン４１０と重ならなければ、第１複合パターン４１０に対して第２方向とは異なる方向に設けられてよい。 Therefore, also in the magnetic sensor 100 of such an eighth configuration example, the magnetic sensitive axis of the magnetic sensitive section of the first composite pattern 410 and the magnetic sensitive axis of the corresponding magnetic sensitive section of the second composite pattern 420 are mutually By making them in opposite directions, the terms of the other axis sensitivity can be canceled and the magnetic field components in different three directions can be separated. Although FIG. 10 omits the auxiliary magnetic flux concentrating portion extending in the first direction and the magnetic flux concentrating member extending in the second direction, the magnetic sensor 100 may further include these. Further, the second composite pattern 420 may be provided in a direction different from the second direction with respect to the first composite pattern 410 as long as it does not overlap the first composite pattern 410.

図１１は、本実施形態に係る磁気センサ１００に接続される演算装置１０００の構成例を示す。図１１において、磁気収束部の記載は省略する。図１１は、演算装置１０００が、図６、図７、図８、および図９に示す磁気センサ１００から、抵抗値の変化量を取得して入力磁場の成分を演算して出力する例を示す。演算装置１０００は、電源部７１０と、定電流源７２０と、演算部７３０と、を備える。 FIG. 11 shows a configuration example of the arithmetic unit 1000 connected to the magnetic sensor 100 according to the present embodiment. In FIG. 11, the description of the magnetic flux concentrator is omitted. FIG. 11 shows an example in which the arithmetic device 1000 acquires the amount of change in the resistance value from the magnetic sensor 100 shown in FIGS. 6, 7, 8 and 9 and calculates and outputs the component of the input magnetic field. .. The arithmetic device 1000 includes a power supply unit 710, a constant current source 720, and an arithmetic unit 730.

電源部７１０は、予め定められた電源電圧を出力し、定電流源７２０に電流を供給する。定電流源７２０は、複数の感磁部に対応して複数設けられ、一定の電流を複数の感磁部のそれぞれに供給する。図１１に示す演算装置１０００は、８の感磁部に対応して８の定電流源７２０が設けられ、感磁部の一端から他端へと一定の電流を流す例を示す。複数の感磁部は、一端が対応する定電流源７２０に接続され、他端が基準電位に接続される。基準電位は、予め定められた電位でよく、一例として、０Ｖである。 The power supply unit 710 outputs a predetermined power supply voltage and supplies a current to the constant current source 720. A plurality of constant current sources 720 are provided corresponding to the plurality of magnetic sensitive sections, and supply a constant current to each of the plurality of magnetic sensitive sections. The arithmetic device 1000 shown in FIG. 11 shows an example in which eight constant current sources 720 are provided corresponding to the eight magnetic sensing parts, and a constant current flows from one end of the magnetic sensing part to the other end. One end of each of the plurality of magnetic sensitive sections is connected to the corresponding constant current source 720, and the other end is connected to the reference potential. The reference potential may be a predetermined potential, and is 0 V as an example.

演算部７３０は、複数の感磁部の出力に基づき、外部から入力する磁場ベクトルの直交する３つの成分を演算する。図１１に示す演算装置１０００は、第１感磁部２１０から第４感磁部２４０、および、第１感磁部２６０から第４感磁部２９０の抵抗値の変化量に基づき、入力された磁場ベクトルの直交する３つの磁場成分Ｂｘ、Ｂｙ、およびＢｚの大きさを算出する例を示す。この場合、演算部７３０は、各感磁部の定電流源７２０側の一端に接続され、一例として、（数１２）式に示された抵抗値の変化を取得して、（数１３）式に基づき、入力磁場の各成分を算出する。なお、（数１３）式は、加算および減算等の単純な式なので、演算部７３０は、電子回路等で簡便に構成することができる。 The calculation unit 730 calculates three orthogonal components of the magnetic field vector input from the outside based on the outputs of the plurality of magnetic sensing units. The arithmetic device 1000 shown in FIG. 11 is input based on the amount of change in the resistance values of the first magnetic sensing unit 210 to the fourth magnetic sensing unit 240 and the first magnetic sensing unit 260 to the fourth magnetic sensing unit 290. An example of calculating the magnitudes of three perpendicular magnetic field components Bx, By, and Bz of the magnetic field vector will be shown. In this case, the calculation unit 730 is connected to one end of each magnetic sensing unit on the side of the constant current source 720, and as an example, obtains the change in the resistance value shown in the formula (12) to obtain the formula (13). Based on the above, each component of the input magnetic field is calculated. Since the equation (13) is a simple equation such as addition and subtraction, the arithmetic unit 730 can be easily configured by an electronic circuit or the like.

以上の演算装置１０００は、定電流源７２０が複数の感磁部に対応して複数設けられる例を説明した。これに代えて、演算装置１０００は、定電流源７２０の出力に接続されるスイッチ等を含む切換部を有し、抵抗値を取得すべき感磁部に定電流を流し、複数の感磁部から順次抵抗値を取得するように切り替えてもよい。なお、本実施形態に係る磁気センサ１００は、以上のような演算装置１０００を含めた構成であってよい。 The arithmetic device 1000 described above has described the example in which the plurality of constant current sources 720 are provided corresponding to the plurality of magnetic sensing units. Instead of this, the arithmetic device 1000 has a switching unit that includes a switch or the like connected to the output of the constant current source 720, and applies a constant current to the magnetic sensing unit whose resistance value is to be acquired, so that the plurality of magnetic sensing units are provided. Alternatively, the resistance value may be sequentially acquired. The magnetic sensor 100 according to the present embodiment may have a configuration including the arithmetic device 1000 as described above.

図１２は、本実施形態に係る感磁部の構成例を示す。図１２は、ＧＭＲ素子を形成する第１感磁部２１０の一例を示す。ＧＭＲ素子は、磁性材料の磁化の向きで電子のスピン散乱が変化して、当該素子の抵抗値が変わる。第１感磁部２１０は、ピニング層２１２、ピンド層２１４、スペーサ層２１６、およびフリー層２１８を備える。 FIG. 12 shows a configuration example of the magnetic sensing unit according to the present embodiment. FIG. 12 shows an example of the first magnetic sensing section 210 forming a GMR element. In the GMR element, the spin scattering of electrons changes depending on the magnetization direction of the magnetic material, and the resistance value of the element changes. The first magnetic sensing section 210 includes a pinning layer 212, a pinned layer 214, a spacer layer 216, and a free layer 218.

ピニング層２１２は、当該ピニング層２１２に積層されるピンド層２１４の磁化の向きを固定する。ピニング層２１２は、ＰｔＭｎまたはＩｒＭｎなどの反強磁性体で形成されてよい。 The pinning layer 212 fixes the magnetization direction of the pinned layer 214 laminated on the pinning layer 212. The pinning layer 212 may be formed of an antiferromagnetic material such as PtMn or IrMn.

ピンド層２１４は、ピニング層２１２の上面に積層され、ピニング層２１２との磁気結合により磁気モーメントの方向が固定される。なお、ピンド層２１４は、ピニング層２１２を用いずにセルフバイアス構造を用いてもよい。ピンド層２１４の磁化が固定される方向は、本実施形態において、感磁軸とした。図１２は、感磁軸の方向を−Ｘ方向とした例を示す。ピンド層２１４は、ＣｏＦｅなどの強磁性体またはＣｏＦｅ／Ｒｕ／ＣｏＦｅなどの強磁性体を含む積層構造で形成されてよい。 The pinned layer 214 is laminated on the upper surface of the pinning layer 212, and the direction of the magnetic moment is fixed by magnetic coupling with the pinning layer 212. The pinned layer 214 may have a self-bias structure without using the pinning layer 212. In the present embodiment, the direction in which the magnetization of the pinned layer 214 is fixed is the magnetosensitive axis. FIG. 12 shows an example in which the direction of the magnetic sensitive axis is the −X direction. The pinned layer 214 may be formed of a laminated structure including a ferromagnetic material such as CoFe or a ferromagnetic material such as CoFe/Ru/CoFe.

スペーサ層２１６は、電流を流すとスピン散乱が生じる導電層である。スペーサ層２１６は、一例として、ピンド層２１４およびフリー層２１８の間に設けられる。スペーサ層２１６は、Ｃｕ等の非磁性体で形成されてよい。図１２は、スペーサ層２１６に＋Ｙ方向の電流が流れる例を示す。 The spacer layer 216 is a conductive layer in which spin scattering occurs when a current is applied. The spacer layer 216 is provided, for example, between the pinned layer 214 and the free layer 218. The spacer layer 216 may be formed of a non-magnetic material such as Cu. FIG. 12 shows an example in which a current in the +Y direction flows through the spacer layer 216.

フリー層２１８は、スペーサ層２１６の上面に積層され、外部から入力する磁場Ｂに応じて磁化の向きが自由に回転する。フリー層２１８は、ＮｉＦｅなどの強磁性体またはＣｏＦｅ／ＮｉＦｅなどの強磁性体を含む積層構造で形成されてよい。図１２は、フリー層２１８の磁化容易軸が、ピンド層２１４の感磁軸と略垂直な＋Ｙ方向を向く例を示す。フリー層２１８は、外部磁場Ｂに応じた角度θ（Ｂ）に磁化の向きが回転する。このような、フリー層２１８の磁気モーメントの方向の変化に伴い、スペーサ層２１６に流れる電流の経路が曲げられるので、第１感磁部２１０の抵抗値が変化することになる。 The free layer 218 is laminated on the upper surface of the spacer layer 216, and the direction of magnetization freely rotates according to the magnetic field B input from the outside. The free layer 218 may be formed of a laminated structure including a ferromagnetic material such as NiFe or a ferromagnetic material such as CoFe/NiFe. FIG. 12 shows an example in which the easy axis of magnetization of the free layer 218 faces the +Y direction substantially perpendicular to the magnetosensitive axis of the pinned layer 214. The magnetization direction of the free layer 218 rotates by an angle θ(B) according to the external magnetic field B. With such a change in the direction of the magnetic moment of the free layer 218, the path of the current flowing through the spacer layer 216 is bent, so that the resistance value of the first magnetic sensing unit 210 changes.

このような第１感磁部２１０の抵抗値の変化を検出することにより、外部磁場Ｂの大きさを取得することができる。例えば、抵抗値の変化量は、ΔＲ＝（ＲＡＰ−ＲＰ）／ＲＰで表される。ここで、ＲＡＰは、ピンド層２１４とフリー層２１８の磁化の向きが反平行のときの抵抗値、ＲＰは、ピンド層２１４とフリー層２１８の磁化の向きが平行のときの抵抗値を示す。 The magnitude of the external magnetic field B can be acquired by detecting such a change in the resistance value of the first magnetic sensing unit 210. For example, the amount of change in the resistance value is expressed by ΔR = (R AP -R P) / R P. Here, R AP is the resistance value when the magnetization directions are antiparallel pinned layer 214 and free layer 218, R P is the resistance value when the magnetization direction of the pinned layer 214 and free layer 218 are parallel Show.

以上、本発明を実施の形態を用いて説明したが、本発明の技術的範囲は上記実施の形態に記載の範囲には限定されない。上記実施の形態に、多様な変更または改良を加えることが可能であることが当業者に明らかである。その様な変更または改良を加えた形態も本発明の技術的範囲に含まれ得ることが、特許請求の範囲の記載から明らかである。 Although the present invention has been described using the embodiments, the technical scope of the present invention is not limited to the scope described in the above embodiments. It is apparent to those skilled in the art that various changes or improvements can be added to the above-described embodiment. It is apparent from the scope of the claims that the embodiments added with such changes or improvements can be included in the technical scope of the present invention.

特許請求の範囲、明細書、および図面中において示した装置、システム、プログラム、および方法における動作、手順、ステップ、および段階等の各処理の実行順序は、特段「より前に」、「先立って」等と明示しておらず、また、前の処理の出力を後の処理で用いるのでない限り、任意の順序で実現しうることに留意すべきである。特許請求の範囲、明細書、および図面中の動作フローに関して、便宜上「まず、」、「次に、」等を用いて説明したとしても、この順で実施することが必須であることを意味するものではない。 The execution order of each process such as the operation, procedure, step, and step in the device, system, program, and method shown in the claims, the specification, and the drawings is, in particular, “before” or “prior to”. It should be noted that the output of the previous process can be realized in any order unless the output of the previous process is used in the subsequent process. Even if the operation flow in the claims, the description, and the drawings is described by using “first,” “next,” and the like for convenience, it means that it is essential to carry out in this order. Not a thing.

１０ 基板、１２ 基板平面、２０ 絶縁層、２２ 第１平面、２４ 第２平面、１００ 磁気センサ、１１０ 第１磁気収束部、１１２ 磁気収束部材、１２０ 第２磁気収束部、１２２ 磁気収束部材、１３０ 第３磁気収束部、１３２ 磁気収束部材、１４０ 第１磁気収束部、１４２ 磁気収束部材、１５０ 第２磁気収束部、１５２ 磁気収束部材、２１０ 第１感磁部、２１２ ピニング層、２１４ ピンド層、２１６ スペーサ層、２１８ フリー層、２２０ 第２感磁部、２３０ 第３感磁部、２４０ 第４感磁部、２５０ 第５感磁部、２６０ 第１感磁部、２７０ 第２感磁部、２８０ 第３感磁部、２９０ 第４感磁部、３１０ 第１補助磁気収束部、３１２ 磁気収束部材、３２０ 第２補助磁気収束部、３２２ 磁気収束部材、３４０ 第１補助磁気収束部、３５０ 第２補助磁気収束部、４１０ 第１複合パターン、４１２ 点、４２０ 第２複合パターン、４２２ 点、５１０ 第１磁気収束部、５２０ 第１磁気収束部、６１０ 第１感磁部、６２０ 第２感磁部、６３０ 第３感磁部、６４０ 第４感磁部、６５０ 第１感磁部、６６０ 第２感磁部、６７０ 第３感磁部、６８０ 第４感磁部、７１０ 電源部、７２０ 定電流源、７３０ 演算部、１０００ 演算装置 10 substrate, 12 substrate plane, 20 insulating layer, 22 first plane, 24 second plane, 100 magnetic sensor, 110 first magnetic flux concentrator, 112 magnetic flux concentrator, 120 second magnetic flux concentrator, 122 magnetic flux concentrator, 130 Third magnetic flux concentrator, 132 Magnetic flux concentrator, 140 First magnetic flux concentrator, 142 Magnetic flux concentrator, 150 Second magnetic flux concentrator, 152 Magnetic flux concentrator, 210 First magnetic sensitive unit, 212 Pinning layer, 214 Pinned layer, 216 Spacer layer, 218 Free layer, 220 Second magnetic sensitive section, 230 Third magnetic sensitive section, 240 Fourth magnetic sensitive section, 250 Fifth magnetic sensitive section, 260 First magnetic sensitive section, 270 Second magnetic sensitive section, 280 Third magnetically sensitive portion, 290 Fourth magnetically sensitive portion, 310 First auxiliary magnetic flux concentrating portion, 312 Magnetic flux concentrating member, 320 Second auxiliary magnetic flux concentrating portion, 322 Magnetic flux concentrating member, 340 First auxiliary magnetic flux concentrating portion, 350th 2 auxiliary magnetic flux concentrator, 410 first composite pattern, 412 points, 420 second hybrid pattern, 422 points, 510 first magnetic flux concentrator, 520 first magnetic flux concentrator, 610 first magnetic sensing unit, 620 second magnetic flux sensing unit Part, 630 third magnetic sensitive part, 640 fourth magnetic sensitive part, 650 first magnetic sensitive part, 660 second magnetic sensitive part, 670 third magnetic sensitive part, 680 fourth magnetic sensitive part, 710 power source part, 720 constant Current source, 730 arithmetic unit, 1000 arithmetic unit

Claims (18)

第１方向に延伸する第１磁気収束部と、
前記第１方向に延伸し、前記第１磁気収束部を挟む第１感磁部および第２感磁部と、
を含む基板上の第１パターンと、
前記第１磁気収束部の前記第１方向とは反対側の端部よりも前記第１方向側にずれた位置から、前記第１方向に延伸する第２磁気収束部と、
前記第１方向に延伸し、前記第２磁気収束部を挟む第３感磁部および第４感磁部と、
を含み、基板上において前記第１方向の磁束成分が前記第１磁気収束部から前記第２磁気収束部に移る磁路を形成する位置に配置される第２パターンと、
を有する第１複合パターンと、
前記第１複合パターンと重ならない位置に設けられ、前記第１複合パターンと同形状の複合パターンを有する第２複合パターンと、
を備え、
前記第１複合パターンおよび前記第２複合パターンの、前記第１感磁部の組、前記第２感磁部の組、前記第３感磁部の組、および前記第４感磁部の組は、前記基板上において前記第１方向とは直交し、かつ、正負が異なる方向に感磁軸をそれぞれ有する、磁気センサ。 A first magnetic flux concentrator extending in the first direction,
A first magnetically sensitive portion and a second magnetically sensitive portion that extend in the first direction and sandwich the first magnetic flux concentrating portion;
A first pattern on the substrate including
A second magnetic flux concentrator that extends in the first direction from a position that is displaced toward the first direction from an end of the first magnetic flux concentrator that is opposite to the first direction;
A third magnetic sensitive portion and a fourth magnetic sensitive portion that extend in the first direction and sandwich the second magnetic flux concentrating portion;
And a second pattern arranged on the substrate at a position forming a magnetic path where the magnetic flux component in the first direction moves from the first magnetic flux concentrating portion to the second magnetic flux concentrating portion,
A first composite pattern having
A second composite pattern which is provided at a position not overlapping the first composite pattern and has a composite pattern of the same shape as the first composite pattern;
Equipped with
The set of the first magnetic sensitive section, the set of the second magnetic sensitive section, the set of the third magnetic sensitive section, and the set of the fourth magnetic sensitive section of the first composite pattern and the second composite pattern are A magnetic sensor having a magnetic sensitive axis on the substrate in a direction orthogonal to the first direction and different in positive and negative directions. 第１方向に延伸する第１磁気収束部と、
前記第１方向に延伸し、前記第１磁気収束部の前記第１方向側の端部において前記第１磁気収束部を挟む第１感磁部および第２感磁部と、
を含む基板上の第１パターンと、
前記第１方向に延伸し、前記第１磁気収束部と並走する第２磁気収束部と、
前記第１方向に延伸し、前記第２磁気収束部の前記第１方向とは反対側の端部において前記第２磁気収束部を挟む第３感磁部および第４感磁部と、
を含む基板上の第２パターンと、
を有する第１複合パターンと、
前記第１複合パターンと重ならない位置に設けられ、前記第１複合パターンと同形状の複合パターンを有する第２複合パターンと、
を備え、
前記第１複合パターンおよび前記第２複合パターンの、前記第１感磁部の組、前記第２感磁部の組、前記第３感磁部の組、および前記第４感磁部の組は、前記基板上において前記第１方向とは直交し、かつ、正負が異なる方向に感磁軸をそれぞれ有する、磁気センサ。 A first magnetic flux concentrator extending in the first direction,
A first magnetically sensitive portion and a second magnetically sensitive portion that extend in the first direction and sandwich the first magnetically converging portion at an end of the first magnetically converging portion on the first direction side;
A first pattern on the substrate including
A second magnetic flux concentrator that extends in the first direction and runs in parallel with the first magnetic flux concentrator;
A third magnetic sensitive portion and a fourth magnetic sensitive portion that extend in the first direction and sandwich the second magnetic converging portion at an end of the second magnetic converging portion opposite to the first direction;
A second pattern on the substrate including
A first composite pattern having
A second composite pattern which is provided at a position not overlapping the first composite pattern and has a composite pattern of the same shape as the first composite pattern;
Equipped with
The set of the first magnetic sensitive section, the set of the second magnetic sensitive section, the set of the third magnetic sensitive section, and the set of the fourth magnetic sensitive section of the first composite pattern and the second composite pattern are A magnetic sensor having a magnetic sensitive axis on the substrate in a direction orthogonal to the first direction and different in positive and negative directions. 前記第１磁気収束部および前記第２磁気収束部は、各々の前記第１方向の長さが等しく、各々の前記第１方向側の端部と前記第１方向とは反対側の端部が揃って配置する、請求項２に記載の磁気センサ。 The first magnetic flux converging portion and the second magnetic flux concentrating portion have equal lengths in the first direction, and the end portions on the first direction side and the end portions on the opposite side to the first direction respectively. The magnetic sensor according to claim 2, wherein the magnetic sensors are arranged side by side. 前記第１感磁部および前記第２感磁部は、前記第１磁気収束部と一部が重なり、
前記第３感磁部および前記第４感磁部は、前記第２磁気収束部と一部が重なる、請求項１から３のいずれか一項に記載の磁気センサ。 The first magnetically sensitive portion and the second magnetically sensitive portion partially overlap with the first magnetic flux concentrating portion,
The magnetic sensor according to claim 1, wherein the third magnetic sensing unit and the fourth magnetic sensing unit partially overlap with the second magnetic flux concentrating unit. 前記第１および前記第２パターンは、前記基板上において点対称に配置される、請求項１から４のいずれか一項に記載の磁気センサ。 The magnetic sensor according to claim 1, wherein the first and second patterns are arranged point-symmetrically on the substrate. 前記第２複合パターンは、基板上において、前記第１複合パターンの前記第１方向に対して直交する第２方向に位置する、請求項１から５のいずれか一項に記載の磁気センサ。 The magnetic sensor according to claim 1, wherein the second composite pattern is located on a substrate in a second direction orthogonal to the first direction of the first composite pattern. 前記第１複合パターンの前記第１磁気収束部の前記第２磁気収束部が設けられる側とは反対側において、前記第１方向に延伸する第１補助磁気収束部と、
前記第２複合パターンの前記第２磁気収束部の前記第１磁気収束部が設けられる側とは反対側において、前記第１方向に延伸する第２補助磁気収束部と、
を備える請求項６に記載の磁気センサ。 A first auxiliary magnetic flux concentrating portion extending in the first direction on a side of the first magnetic flux concentrating portion of the first composite pattern opposite to a side where the second magnetic flux concentrating portion is provided;
A second auxiliary magnetic flux concentrator extending in the first direction on a side of the second magnetic flux concentrator of the second composite pattern opposite to a side where the first magnetic flux concentrator is provided;
The magnetic sensor according to claim 6, further comprising: 前記第２複合パターンは、基板上において、前記第１複合パターンの前記第１方向に位置する、請求項１から５のいずれか一項に記載の磁気センサ。 The magnetic sensor according to claim 1, wherein the second composite pattern is located on the substrate in the first direction of the first composite pattern. 前記第１パターンの前記第１磁気収束部の前記第２磁気収束部が設けられる側とは反対側において、前記第１方向に延伸する第１補助磁気収束部と、
前記第２パターンの前記第２磁気収束部の前記第１磁気収束部が設けられる側とは反対側において、前記第１方向に延伸する第２補助磁気収束部と、
を備える請求項８に記載の磁気センサ。 A first auxiliary magnetic flux concentrating portion extending in the first direction on a side of the first magnetic flux concentrating portion of the first pattern opposite to a side where the second magnetic flux concentrating portion is provided;
A second auxiliary magnetic flux concentrator extending in the first direction on a side of the second magnetic flux concentrator of the second pattern opposite to a side where the first magnetic flux concentrator is provided;
The magnetic sensor according to claim 8, further comprising: 前記第１磁気収束部の前記第１方向とは反対側の端部は、前記第２磁気収束部の方向および前記第２磁気収束部とは反対の方向にそれぞれ突出する磁気収束部材を有する、請求項１から９のいずれか一項に記載の磁気センサ。 An end of the first magnetic flux concentrating portion opposite to the first direction has a magnetic flux concentrating member that protrudes in a direction of the second magnetic flux concentrating portion and a direction opposite to the second magnetic flux concentrating portion, respectively. The magnetic sensor according to any one of claims 1 to 9. 前記第２磁気収束部の前記第１方向側の端部は、前記第１磁気収束部の方向および前記第１磁気収束部とは反対の方向にそれぞれ突出する磁気収束部材を有する、請求項１から１０のいずれか一項に記載の磁気センサ。 The end portion on the first direction side of the second magnetic flux concentrating portion has a magnetic flux concentrating member that protrudes in the direction of the first magnetic flux concentrating portion and the direction opposite to the first magnetic flux concentrating portion, respectively. 11. The magnetic sensor according to any one of items 1 to 10. 前記第１補助磁気収束部の前記第１方向側の端部と、前記第２補助磁気収束部の前記第１方向とは反対側の端部とは、前記第１方向に対して直交する第２方向に突出する磁気収束部材をそれぞれ有する、請求項７または９に記載の磁気センサ。 An end portion of the first auxiliary magnetic flux concentrating portion on the first direction side and an end portion of the second auxiliary magnetic flux concentrating portion on the opposite side to the first direction are orthogonal to the first direction . The magnetic sensor according to claim 7, wherein the magnetic sensor has magnetic converging members protruding in two directions, respectively. 第１方向に延伸する第１磁気収束部と、
前記第１方向に延伸し、前記第１磁気収束部の前記第１方向側の端部において前記第１磁気収束部を挟む第１感磁部および第２感磁部と、
前記第１方向に延伸し、前記第１磁気収束部の前記第１方向とは反対側の端部において前記第１磁気収束部を挟む第３感磁部および第４感磁部と、
を有する基板上の第１複合パターンと、
前記第１複合パターンと重ならない位置に設けられ、前記第１複合パターンと同形状の複合パターンを有する前記基板上の第２複合パターンと、
を備え、
前記第１複合パターンおよび前記第２複合パターンの、前記第１感磁部の組、前記第２感磁部の組、前記第３感磁部の組、および前記第４感磁部の組は、前記基板上において前記第１方向とは直交し、かつ、正負が異なる方向に感磁軸をそれぞれ有する、磁気センサ。 A first magnetic flux concentrator extending in the first direction,
A first magnetically sensitive portion and a second magnetically sensitive portion that extend in the first direction and sandwich the first magnetically converging portion at an end of the first magnetically converging portion on the first direction side;
A third magnetic sensitive portion and a fourth magnetic sensitive portion that extend in the first direction and sandwich the first magnetic flux concentrating portion at an end of the first magnetic flux concentrating portion opposite to the first direction;
A first composite pattern on the substrate having:
A second composite pattern on the substrate, which is provided at a position not overlapping the first composite pattern and has a composite pattern of the same shape as the first composite pattern;
Equipped with
The set of the first magnetic sensitive section, the set of the second magnetic sensitive section, the set of the third magnetic sensitive section, and the set of the fourth magnetic sensitive section of the first composite pattern and the second composite pattern are A magnetic sensor having a magnetic sensitive axis on the substrate in a direction orthogonal to the first direction and different in positive and negative directions. 前記第１複合パターンおよび前記第２複合パターンの前記第１感磁部、前記第２感磁部、前記第３感磁部、および前記第４感磁部は、前記第１磁気収束部と一部が重なる、請求項１３に記載の磁気センサ。 The first magnetic sensing part, the second magnetic sensing part, the third magnetic sensing part, and the fourth magnetic sensing part of the first composite pattern and the second composite pattern are the same as the first magnetic flux concentrating part. 14. The magnetic sensor according to claim 13, wherein the parts overlap. 前記第２複合パターンは、基板上において、前記第１複合パターンの前記第１方向に対して直交する第２方向に位置する、請求項１３または１４に記載の磁気センサ。 The magnetic sensor according to claim 13 or 14, wherein the second composite pattern is located on a substrate in a second direction orthogonal to the first direction of the first composite pattern. 前記第１複合パターンの前記第１磁気収束部の前記第２複合パターンが設けられる側とは反対側において、前記第１方向に延伸する第１補助磁気収束部と、
前記第２複合パターンの前記第１磁気収束部の前記第１複合パターンが設けられる側とは反対側において、前記第１方向に延伸する第２補助磁気収束部と、
を備える請求項１５に記載の磁気センサ。 A first auxiliary magnetic flux concentrator extending in the first direction on a side of the first magnetic flux concentrator of the first hybrid pattern opposite to a side where the second hybrid pattern is provided;
A second auxiliary magnetic flux concentrator extending in the first direction on a side of the first magnetic flux concentrator of the second hybrid pattern opposite to a side where the first hybrid pattern is provided;
The magnetic sensor according to claim 15, further comprising: 前記基板は複数の層が積層され、
前記第１感磁部、前記第２感磁部、前記第３感磁部、および前記第４感磁部が形成される層は、前記第１磁気収束部が形成される層とは異なる層である、請求項１から１６のいずれか一項に記載の磁気センサ。 The substrate has a plurality of laminated layers,
The layer in which the first magnetic sensing unit, the second magnetic sensing unit, the third magnetic sensing unit, and the fourth magnetic sensing unit are formed is different from the layer in which the first magnetic flux concentrating unit is formed. The magnetic sensor according to any one of claims 1 to 16, wherein 前記第１感磁部、前記第２感磁部、前記第３感磁部、および前記第４感磁部の出力に基づき、外部から入力する磁場ベクトルの直交する３つの成分を演算する演算部を備える、請求項１から１７のいずれか一項に記載の磁気センサ。 A computing unit that computes three orthogonal components of a magnetic field vector input from the outside based on the outputs of the first magnetic sensing unit, the second magnetic sensing unit, the third magnetic sensing unit, and the fourth magnetic sensing unit. The magnetic sensor according to claim 1, further comprising:
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