JP6700664B2 - 相関原子分解能断層撮影分析用の適応性がある(malleable)薄片の製作 - Google Patents
相関原子分解能断層撮影分析用の適応性がある(malleable)薄片の製作 Download PDFInfo
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Description
104 集束イオン・ビーム
106 試料ステージ
108 基板
110 薄片
Claims (16)
- S/TEMと原子プローブ顕微鏡法の両方によって試料を分析する方法であって、
集束イオン・ビームを使用してバルク材料を加工することにより、関心領域を含む、200nm未満の厚さを有する薄片を形成することと、
マイクロマニピュレータを使用して前記バルク材料から前記薄片を抽出することと、
S/TEM(透過電子顕微鏡または走査型透過電子顕微鏡)を使用して前記関心領域の画像を形成することと、
前記薄片が埋め込まれたより厚い構造体を形成するために、前記S/TEMで前記関心領域の前記画像を形成した後に、ビーム誘起付着、物理蒸着、または化学蒸着を用いて前記薄片上に材料を付着させることであって、前記材料を前記関心領域上の前記薄片の面上に付着させることと、
前記薄片が埋め込まれた前記より厚い構造体から、イオン・ビーム・ミリングを使用して、前記関心領域が含まれる前記薄片の部分と付着した前記材料の一部とを含む針形試料を形成することと、
原子プローブ顕微鏡を使用して前記針形試料中の前記関心領域の原子プローブ顕微鏡画像を形成することと
を含む方法。 - 前記原子プローブ顕微鏡を使用して前記関心領域の画像を形成することが、前記針形試料の3次元マップを形成することを含む、請求項1に記載の方法。
- 前記S/TEMを使用して前記関心領域の画像を形成することが、前記S/TEMの電子ビームに対する角度が異なる前記試料の画像を形成して、前記関心領域の3次元画像を断層撮影によって形成することを含む、請求項1または請求項2に記載の方法。
- 前記S/TEMによって得られた情報と、前記原子プローブ顕微鏡によって得られた情報とをディスプレイ上で結合することをさらに含む、請求項1から3のいずれか一項に記載の方法。
- S/TEMと前記原子プローブ顕微鏡の両方に適合するマウント上に前記薄片を配置することをさらに含み、前記S/TEMは走査型透過電子顕微鏡を含む、請求項1から4のいずれか一項に記載の方法。
- 前記薄片が、前記薄片を抽出した前記バルク材料の頂部に対応する上面を有し、前記薄片が、前記マウント上において、前記上面が実質的に水平になる向きに配置される、請求項5に記載の方法。
- 前記薄片が、前記薄片を抽出した前記バルク材料の頂部に対応する上面を有し、前記薄片が、前記マウント上において、前記上面が実質的に垂直になる向きに配置される、請求項5に記載の方法。
- 前記薄片が、前記薄片を抽出した前記バルク材料の頂部に対応する上面を有し、前記薄片が、前記マウント上において、前記上面が前記マウントに接触するように配置される、請求項5に記載の方法。
- 前記薄片上に前記材料を付着させることが、前記関心領域の質量とは異なる質量を有する材料を付着させることを含む、請求項1から8のいずれか一項に記載の方法。
- 前記薄片上に付着させた前記材料が、シリコン、ニッケル、コバルトおよび/またはクロムを含む、請求項9に記載の方法。
- 前記関心領域が、前記針形試料の先端から30nmから2マイクロメートルの間のところに位置する、請求項1から10のいずれか一項に記載の方法。
- 前記薄片上に前記材料を付着させることが、選択された材料で前記薄片を均一にコーティングすることを含む、請求項1に記載の方法。
- 前記薄片上に前記材料を付着させることが、物理蒸着(PVD)または化学蒸着(CVD)によってシリコンを付着させることを含む、請求項1に記載の方法。
- 前記薄片上に前記材料を付着させることが、ニッケル、コバルト、またはクロムをPVDによって付着させることを含む、請求項1に記載の方法。
- 前記関心領域からのS/TEMの構造情報と前記関心領域からの原子プローブ顕微鏡の元素情報とを関連付けることをさらに含む、請求項1に記載の方法。
- 前記関心領域からのS/TEMの構造情報と前記関心領域からの原子プローブ顕微鏡の元素情報とを関連付けることが、試料の3次元微小構造および組成を再構成することを含む、請求項15に記載の方法。
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US9978586B2 (en) * | 2015-11-06 | 2018-05-22 | Fei Company | Method of material deposition |
US20180122652A1 (en) * | 2016-11-03 | 2018-05-03 | Qualcomm Incorporated | Method of ROI Encapsulation During Axis Conversion of Cross-Sectional TEM Lamellae |
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JP6646002B2 (ja) * | 2017-03-22 | 2020-02-14 | 富士フイルム株式会社 | 放射線検出器及び放射線画像撮影装置 |
CN109521080A (zh) * | 2017-09-19 | 2019-03-26 | 台湾积体电路制造股份有限公司 | 分析试片及其制备方法与材料分析的方法 |
EP3518270A1 (en) * | 2018-01-25 | 2019-07-31 | FEI Company | Innovative imaging technique in transmission charged particle microscopy |
CN111829841A (zh) * | 2019-04-15 | 2020-10-27 | 台湾积体电路制造股份有限公司 | 针状样品、针状样品的分析以及制备方法 |
CN111220819B (zh) * | 2020-01-19 | 2022-03-25 | 中国科学院上海微***与信息技术研究所 | 一种聚焦离子束切割制样方法 |
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EP2916343B1 (en) | 2017-07-05 |
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