JP6684614B2 - Filter member and optical sensor - Google Patents

Filter member and optical sensor Download PDF

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Publication number
JP6684614B2
JP6684614B2 JP2016048817A JP2016048817A JP6684614B2 JP 6684614 B2 JP6684614 B2 JP 6684614B2 JP 2016048817 A JP2016048817 A JP 2016048817A JP 2016048817 A JP2016048817 A JP 2016048817A JP 6684614 B2 JP6684614 B2 JP 6684614B2
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optical filter
sealing portion
filter
optical
hole
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JP2017161862A (en
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圭一郎 桑田
圭一郎 桑田
祐司 合田
祐司 合田
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Asahi Kasei EMD Corp
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Description

本発明はフィルタ部材及びこれを備えた光センサに関する。   The present invention relates to a filter member and an optical sensor including the filter member.

従来、光センサ素子を用いて所定の波長の光を検出する際に、センサ素子に対して波長を選択的に透過させる光学フィルタを用いることが知られている。例えば特許文献１には、保持部材を介して、赤外線センサ素子に光学フィルタが取り付けられている構成が記載されている。   Conventionally, it is known to use an optical filter that selectively transmits a wavelength to a sensor element when detecting light having a predetermined wavelength using the optical sensor element. For example, Patent Document 1 describes a configuration in which an optical filter is attached to an infrared sensor element via a holding member.

特許第５２６６３２１号公報Japanese Patent No. 5266321

しかしながら、従来の光学フィルタの取り付け方法にあっては、光学フィルタを封止材で固定するため、湿度や温度の変動によって封止材が膨張したり、収縮したりした場合には、封止材の変形応力が光学フィルタに伝わることによって光学フィルタが変形し、光学フィルタの透過特性が変化してしまう可能性がある。
本発明は、このような事情に鑑みてなされたものであって、その目的とするところは、温度や湿度変化等の環境変化に伴って、光学フィルタの透過特性が変化することを抑制することが可能なフィルタ部材及びこれを備えた光センサを提供することを目的としている。 However, in the conventional optical filter mounting method, since the optical filter is fixed with the sealing material, if the sealing material expands or contracts due to fluctuations in humidity or temperature, the sealing material When the deformation stress of (1) is transmitted to the optical filter, the optical filter may be deformed and the transmission characteristics of the optical filter may change.
The present invention has been made in view of such circumstances, and an object thereof is to suppress a change in transmission characteristics of an optical filter due to environmental changes such as temperature and humidity changes. It is an object of the present invention to provide a filter member capable of performing the above and an optical sensor including the same.

本発明の一態様に係るフィルタ部材は、光透過面を有し、互いに平行な側面の対を有し、上面視で矩形である光学フィルタと、前記光学フィルタを、当該光学フィルタの側面から支持する封止部と、を備え、前記光学フィルタと前記封止部との間、又は前記封止部の内側面と外側面との間、の少なくともいずれか一方に、窪み又は貫通孔の少なくともいずれか一方を有し、前記光学フィルタと前記封止部との間に、上面視で前記光学フィルタの縁部全周に沿った形状の前記貫通孔を備え、前記封止部は、当該封止部の内側面に前記光学フィルタに向けて突出する凸部を、前記対をなす側面それぞれに対応して一つずつ有し、当該凸部を介して前記光学フィルタを支持し、前記凸部は、上面視で、前記光学フィルタの２つの対角線を、当該対角線の交点を基準として左右４５度未満の範囲で回転させた２つの線分上に位置することを特徴としている。
また、本発明の他の態様に係る光センサは、光センサ素子と上記態様のフィルタ部材とを備え、前記光センサ素子と前記フィルタ部材とは、前記光センサ素子と前記フィルタ部材の光学フィルタとが対向するように張り合わされており、前記窪み又は前記貫通孔は、前記封止部のうち前記光センサ素子側と張り合わされていない部分に形成されていることを特徴としている。 A filter member according to an aspect of the present invention has a light transmitting surface, a pair of side surfaces that are parallel to each other, and an optical filter that is rectangular in a top view, and supports the optical filter from the side surface of the optical filter. And a sealing portion, and between at least one of the optical filter and the sealing portion, or between the inner surface and the outer surface of the sealing portion, at least one of a recess or a through hole. One of the through holes is provided between the optical filter and the sealing portion, the through hole having a shape along the entire circumference of the edge portion of the optical filter in a top view, and the sealing portion is the sealing portion. On the inner side surface of the portion, each having a convex portion protruding toward the optical filter, one corresponding to each of the pair of side surfaces, supporting the optical filter via the convex portion, the convex portion is , The two diagonal lines of the optical filter are It is characterized in that the position of the intersection on two line segments are rotated within a range of less than the left and right 45 [deg.
Also, the optical sensor according to another aspect of the present invention is provided with a filter member of the light sensor element and the embodiment, the and the optical sensor element and the filter member, and the light sensor element optical filter of said filter member Are bonded so as to face each other, and the recess or the through hole is formed in a portion of the sealing portion that is not bonded to the optical sensor element side.

本発明の一態様によれば、温度や湿度等の環境変化により光学フィルタの透過特性が変化することを抑制することができる。   According to one aspect of the present invention, it is possible to prevent the transmission characteristics of the optical filter from changing due to environmental changes such as temperature and humidity.

本発明の第１実施形態におけるフィルタ部材の一例を示す構成図である。It is a block diagram which shows an example of the filter member in 1st Embodiment of this invention. 第１実施形態におけるフィルタ部材の製造工程の一例を示す工程図である。FIG. 6 is a process chart showing an example of a manufacturing process of the filter member in the first embodiment. 本発明の第２実施形態におけるフィルタ部材の一例を示す構成図である。It is a block diagram which shows an example of the filter member in 2nd Embodiment of this invention. 第２実施形態におけるフィルタ部材の製造工程の一例を示す工程図である。It is process drawing which shows an example of the manufacturing process of the filter member in 2nd Embodiment. 本発明の第３実施形態におけるフィルタ部材の一例を示す構成図である。It is a block diagram which shows an example of the filter member in 3rd Embodiment of this invention. 第３実施形態におけるフィルタ部材の変形例である。It is a modification of the filter member in 3rd Embodiment. 光センサの一例を示す構成図である。It is a block diagram which shows an example of an optical sensor.

以下の詳細な説明では、本発明の実施形態の完全な理解を提供するように多くの特定の具体的な構成について記載されている。しかしながら、このような特定の具体的な構成に限定されることなく他の実施態様が実施できることは明らかであろう。また、以下の実施形態は、特許請求の範囲に係る発明を限定するものではなく、実施形態で説明されている特徴的な構成の組み合わせの全てを含むものである。   In the following detailed description, numerous specific configurations are set forth in order to provide a thorough understanding of the embodiments of the invention. However, it will be apparent that other embodiments can be implemented without being limited to such a specific configuration. In addition, the following embodiments do not limit the invention according to the claims, and include all combinations of characteristic configurations described in the embodiments.

以下、図面を参照して本発明の実施形態について説明する。
［実施形態］
（フィルタ部材）
本発明の一実施形態に係るフィルタ部材は、光透過面を有する光学フィルタと、光学フィルタを、当該光学フィルタの側面から支持する封止部と、を備え、光学フィルタと封止部との間、又は封止部の内側面と外側面との間、の少なくともいずれか一方に、窪み又は貫通孔の少なくともいずれか一方を有するものである。 Embodiments of the present invention will be described below with reference to the drawings.
[Embodiment]
(Filter member)
A filter member according to an embodiment of the present invention includes an optical filter having a light transmitting surface, and a sealing portion that supports the optical filter from a side surface of the optical filter, and a space between the optical filter and the sealing portion. Alternatively, at least one of the inner surface and the outer surface of the sealing portion has at least one of a recess and a through hole.

ここで、光学フィルタは光透過面として、光が入射する光入射面と、光学フィルタに入射した光がその面を通して外部に出て行く光出射面とを有している。また光入射面及び光出射面の間を繋ぐ部分の外縁が側面として定義される。光入射面、光出射面及び側面は平坦な面であってもよく、平坦でない面であってもよい。また、光学フィルタの形状は正方形や長方形等の矩形であってもよく、また、多角形や円形であってもよく、どのような形状であってもよい。   Here, the optical filter has, as a light transmitting surface, a light incident surface on which light is incident and a light emitting surface on which the light incident on the optical filter goes out through the surface. The outer edge of the portion connecting the light incident surface and the light emitting surface is defined as a side surface. The light incident surface, the light emitting surface and the side surface may be flat surfaces or non-flat surfaces. The shape of the optical filter may be a rectangle such as a square or a rectangle, a polygon or a circle, and may be any shape.

封止部は光学フィルタの側面の少なくとも一部と接していればよく、光学フィルタの側面の全域と接していてもよい。また、封止部は光学フィルタの側面のみに限らず、光入射面及び光出射面とも接していてよい。また、封止部と光学フィルタとの間に、上面視で光学フィルタの縁部全周に沿った形状の貫通孔が形成されている場合には、封止部の内側面に、光学フィルタ側に突出して設けられた凸部により光学フィルタが支持されていてよい。凸部は封止部と同一部材で形成されていてもよく、封止部と光学フィルタとを接着する接着剤であってもよい。つまり光学フィルタが、接着剤を介して封止部によって支持されていてもよい。封止部と光学フィルタとの間により多くの空間を確保して、光学フィルタに伝わる封止部の変形応力量を低減する観点から、凸部と光学フィルタの側面とが接する面積は小さいことが好ましい。   The sealing portion may be in contact with at least a part of the side surface of the optical filter, and may be in contact with the entire side surface of the optical filter. Further, the sealing portion may be in contact with not only the side surface of the optical filter but also the light incident surface and the light emitting surface. When a through hole having a shape along the entire circumference of the edge of the optical filter in a top view is formed between the sealing portion and the optical filter, the optical filter side is provided on the inner surface of the sealing portion. The optical filter may be supported by the convex portion provided so as to project. The convex portion may be formed of the same member as the sealing portion, or may be an adhesive that bonds the sealing portion and the optical filter. That is, the optical filter may be supported by the sealing portion via the adhesive. From the viewpoint of securing more space between the sealing portion and the optical filter and reducing the amount of deformation stress of the sealing portion transmitted to the optical filter, the area where the convex portion and the side surface of the optical filter are in contact may be small. preferable.

窪みとは、その周囲よりも凹んだ領域を意味する。また窪みは側面及び底面を有する。つまり、封止部の内側面と外側面との間に窪みを有するとは、封止部の一部がその周囲よりも凹んだ状態となっていることを意味する。また、封止部と光学フィルタとの間に窪みを備えるとは、窪みの側面又は底面の少なくとも一部が封止部及び光学フィルタからなることを意味する。この形態の一例としては、光学フィルタの側面が窪みの側面の一部をなし、封止部側に窪みの側面の他の部分と底面とが形成されている形態が挙げられる。   The dent means a region that is more recessed than its surroundings. The depression has a side surface and a bottom surface. That is, having a recess between the inner side surface and the outer side surface of the sealing portion means that a part of the sealing portion is recessed from the periphery thereof. In addition, the provision of the depression between the sealing portion and the optical filter means that at least a part of the side surface or the bottom surface of the depression is composed of the sealing portion and the optical filter. As an example of this form, there is a form in which the side surface of the optical filter forms a part of the side surface of the recess, and the other side surface of the recess and the bottom surface are formed on the sealing portion side.

貫通孔とは、光学フィルタの一方の光透過面に対応する側から、他方の光透過面に対応する側にフィルタ部材の内部を貫いて通じる孔を意味する。また、封止部の内側面と外側面との間に貫通孔を備えるとは、封止部の一部に貫通孔が形成されており、貫通孔の側面が封止部によって区画された状態を意味する。また、封止部と光学フィルタとの間に貫通孔を備えるとは、貫通孔の側面が封止部及び光学フィルタによって区画された状態を意味する。この形態の一例としては、光学フィルタの側面の一部が貫通孔の側面の一部をなし、封止部の側面の一部が貫通孔の側面の他の一部をなす形態が挙げられる。   The through hole means a hole that penetrates through the inside of the filter member from the side corresponding to one light transmitting surface of the optical filter to the side corresponding to the other light transmitting surface. Further, having a through hole between the inner side surface and the outer side surface of the sealing portion means that the through hole is formed in a part of the sealing portion and the side surface of the through hole is partitioned by the sealing portion. Means In addition, the provision of the through hole between the sealing portion and the optical filter means a state in which the side surface of the through hole is partitioned by the sealing portion and the optical filter. As an example of this form, there is a form in which a part of the side surface of the optical filter forms a part of the side surface of the through hole and a part of the side surface of the sealing portion forms another part of the side surface of the through hole.

窪み又は貫通孔を、光学フィルタの縁部の一部又は縁部全周に沿った形状とすることで、光学フィルタに伝わる変形応力を光学フィルタの縁部に沿って抑制することができる。そのため、光学フィルタの変形をより確実に回避することができる。
窪み又は貫通孔は、上面視で、複数の窪み又は貫通孔が、光学フィルタの縁部の一部又は縁部全周に沿って配置されていてもよい。つまり、例えば光学フィルタが多角形である場合には、複数の窪み又は貫通孔が一辺に沿って配置されていてもよい。 By forming the depression or the through hole along a part of the edge of the optical filter or the entire circumference of the edge, the deformation stress transmitted to the optical filter can be suppressed along the edge of the optical filter. Therefore, the deformation of the optical filter can be more reliably avoided.
A plurality of depressions or through holes may be arranged along a part of the edge portion or the entire circumference of the edge portion of the optical filter in a top view. That is, for example, when the optical filter has a polygonal shape, a plurality of depressions or through holes may be arranged along one side.

また、窪みと貫通孔とが混在して設けられていてもよい。また、例えば、光学フィルタと封止部との間に光学フィルタの縁部全周に沿った形状の貫通孔を設けると共に、貫通孔よりも封止部の外側面側に、窪みを設けてもよい。
本発明の一実施形態に係るフィルタ部材は、このような構成を有する結果、温度や湿度等の環境変化によって光学フィルタの透過特性の変化を抑制することの可能なフィルタ部材を実現することができる。 Further, the depressions and the through holes may be provided in a mixed manner. Further, for example, a through hole having a shape along the entire circumference of the edge portion of the optical filter may be provided between the optical filter and the sealing portion, and a recess may be provided on the outer surface side of the sealing portion with respect to the through hole. Good.
As a result of having such a configuration, the filter member according to an embodiment of the present invention can realize a filter member that can suppress changes in the transmission characteristics of the optical filter due to environmental changes such as temperature and humidity. .

＜＜第１実施形態＞＞
＜構造＞
図１は、本発明の第１実施形態に係るフィルタ部材の一例を示す構成図である。図１（ａ）は上面図であり、図１（ｂ）は図１（ａ）のＡ−Ａ′断面図である。図１（ａ）、図１（ｂ）に示すように、フィルタ部材１は、上面視で、光学フィルタ２を挟んで向かい合うように２つの貫通孔４を封止部３に備え、各貫通孔４は、光学フィルタ２の縁部の一部に沿った形状を有する。 << First Embodiment >>
<Structure>
FIG. 1 is a configuration diagram showing an example of a filter member according to the first embodiment of the present invention. 1A is a top view, and FIG. 1B is a sectional view taken along the line AA ′ of FIG. As shown in FIGS. 1A and 1B, the filter member 1 is provided with two through holes 4 in the sealing portion 3 so as to face each other with the optical filter 2 sandwiched between them in a top view. 4 has a shape along a part of the edge of the optical filter 2.

封止部３は、例えば上面視で略正方形の板状を有し、封止部３の略中央部分に光学フィルタ２が配置される。
光学フィルタ２は、例えば上面視で略正方形状であり、光学フィルタ２の略正方形の一方の面が光入射面２ａ、他方の面が光出射面２ｂとなる。
この光学フィルタ２は、その側面を覆うように配置される封止部３によって支持される。
貫通孔４は、光学フィルタ２を挟んで封止部３の、光学フィルタ２側の内側面と光学フィルタ２とは逆側の外側面との間の略中央部分に設けられ、光学フィルタ２の平行な２つの辺それぞれに設けられる。貫通孔４は、光学フィルタ２の辺に沿った線形状を有する。 The sealing portion 3 has, for example, a substantially square plate shape in a top view, and the optical filter 2 is arranged at a substantially central portion of the sealing portion 3.
The optical filter 2 has, for example, a substantially square shape in a top view, and one surface of the optical filter 2 having a substantially square shape serves as a light incident surface 2a and the other surface serves as a light emitting surface 2b.
The optical filter 2 is supported by the sealing portion 3 arranged so as to cover the side surface thereof.
The through hole 4 is provided in a substantially central portion between the inner surface on the optical filter 2 side and the outer surface on the opposite side of the optical filter 2 of the sealing portion 3 with the optical filter 2 interposed therebetween. It is provided on each of two parallel sides. The through hole 4 has a linear shape along the side of the optical filter 2.

＜製造方法＞
図２は、フィルタ部材１の製造方法の一例を工程順に示す断面図である。ここでは、図１（ｂ）に示した断面図に沿って、各工程を説明する。
図２（ａ）に示すように、まず耐熱性の粘着シート１１を用意する。
なお、粘着シート１１としては、粘着性を有すると共に、耐熱性を有する樹脂性のテープが用いられる。粘着性については、粘着層の糊厚がより薄い方が望ましい。また、耐熱性については、約１５０℃以上２００℃以下の温度に耐えることが必要とされる。
このような粘着シート１１として、例えばポリイミドテープを用いることができる。ポリイミドテープは、約２８０℃に耐える耐熱性を有している。このような高い耐熱性を有するポリイミドテープは、例えば、後工程としてトランスファーモールド工程が実行される場合には、このトランスファーモールド工程時に加わる高熱にも耐えることが可能である。 <Manufacturing method>
2A to 2C are cross-sectional views showing an example of a method of manufacturing the filter member 1 in process order. Here, each step will be described along the cross-sectional view shown in FIG.
As shown in FIG. 2A, first, a heat resistant adhesive sheet 11 is prepared.
As the adhesive sheet 11, a resin tape having adhesiveness and heat resistance is used. Regarding adhesiveness, it is desirable that the adhesive layer has a thinner adhesive thickness. Regarding heat resistance, it is required to withstand a temperature of about 150 ° C or higher and 200 ° C or lower.
As such an adhesive sheet 11, for example, a polyimide tape can be used. The polyimide tape has heat resistance that can withstand approximately 280 ° C. Such a polyimide tape having high heat resistance can withstand high heat applied during the transfer molding step, for example, when the transfer molding step is performed as a subsequent step.

また、粘着シート１１としては、ポリイミドテープの他に、以下のテープを用いることも可能である。
・ポリエステルテープ 耐熱温度：約１３０℃（但し使用条件次第で耐熱温度は約２００℃にまで達する）。
・テフロン（登録商標） テープ耐熱温度：約１８０℃
・ＰＰＳ（ポリフェニレンサルファイド） 耐熱温度：約１６０℃
・ガラスクロス 耐熱温度：約２００℃
・ノーメックスペーパー（登録商標 デュポン帝人アドバンスドペーパー株式会社製）
耐熱温度：約１５０〜２００℃
・他に、アラミド、クレープ紙が粘着シート１１として利用することができる。 As the adhesive sheet 11, the following tapes can be used in addition to the polyimide tape.
・ Polyester tape Heat resistant temperature: Approx. 130 ℃ (However, heat resistant temperature reaches up to about 200 ℃ depending on the usage conditions).
・ Teflon (registered trademark) Tape heat resistance temperature: Approx. 180 ° C
・ PPS (Polyphenylene sulfide) Heat-resistant temperature: Approx. 160 ° C
・ Glass cloth heat-resistant temperature: approx. 200 ° C
・ Nomex paper (registered trademark, manufactured by DuPont Teijin Advanced Paper Co., Ltd.)
Heat resistance temperature: Approx. 150-200 ℃
In addition, aramid and crepe paper can be used as the adhesive sheet 11.

次に、粘着シート１１の粘着層１１ａに光学フィルタ２の一方の面、例えば光入射面２ａを貼付する。
なお、光学フィルタ２の光入射面２ａや光出射面２ｂには、予め、保護膜を貼付してもよい。
次に、図２（ｂ）に示すように、光学フィルタ２の光入射面２ａ側に下金型２２を配置すると共に、光学フィルタ２の光出射面２ｂ側に上金型２１を配置する。そして、上金型２１と下金型２２とにより光学フィルタ２を挟み込み、上金型２１と下金型２２とに挟まれた空間（即ち、キャビティ）にサイドから溶融した封止材を注入し充填する。封止材として、例えばエポキシ樹脂を用いる。これにより、封止部３を形成する。 Next, one surface of the optical filter 2, for example, the light incident surface 2a is attached to the adhesive layer 11a of the adhesive sheet 11.
A protective film may be attached to the light incident surface 2a and the light emitting surface 2b of the optical filter 2 in advance.
Next, as shown in FIG. 2B, the lower mold 22 is arranged on the light incident surface 2a side of the optical filter 2, and the upper mold 21 is arranged on the light emitting surface 2b side of the optical filter 2. Then, the optical filter 2 is sandwiched between the upper mold 21 and the lower mold 22, and the melted sealing material is injected into the space (that is, the cavity) sandwiched between the upper mold 21 and the lower mold 22 from the side. Fill. For example, an epoxy resin is used as the sealing material. Thereby, the sealing part 3 is formed.

図２（ｂ）に示すように、例えば上金型２１の下側（即ち、キャビティ側）の面は断面視で凹凸形状となっている。この凸部２１ａによって、図１に示す貫通孔４が形成される。
また、このフィルタ部材１の形成工程では、上金型２１の凹部２１ｂと光学フィルタ２との間にフッ素樹脂製シートを介在させ、上金型２１の凹部と光学フィルタ２とがフッ素樹脂製シートを介して隙間無く接触し、且つ、光学フィルタ２の光入射面２ａと下金型２２とが粘着シート１１を介して隙間無く接触した状態で、サイドからエポキシ樹脂等を注入し、充填する。これにより、フィルタ部材１の形成終了後は、光学フィルタ２の光入射面２ａ及び光出射面２ｂが、それぞれ封止材から露出した状態となる。 As shown in FIG. 2B, for example, the lower surface of the upper die 21 (that is, the cavity side) has an uneven shape in a cross-sectional view. The through hole 4 shown in FIG. 1 is formed by the convex portion 21a.
In the step of forming the filter member 1, a fluororesin sheet is interposed between the recess 21b of the upper mold 21 and the optical filter 2 so that the recess of the upper mold 21 and the optical filter 2 are made of the fluororesin sheet. In the state in which there is no gap between them and the light incident surface 2a of the optical filter 2 and the lower die 22 are in contact with each other through the adhesive sheet 11 without a gap, epoxy resin or the like is injected from the side and filled. Accordingly, after the formation of the filter member 1, the light incident surface 2a and the light emitting surface 2b of the optical filter 2 are exposed from the sealing material.

次に、上金型２１及び下金型２２をそれぞれ上方向及び下方向に移動させて、図２（ｃ）に示すように、フィルタ部材１が形成されたフィルタ部材群を両金型間から取り出す。そして、光学フィルタ２の光入射面２ａ側から粘着シート１１を除去する。粘着シート１１の除去後、封止材をより硬化させるためのポストキュアを行い、封止材薄バリを完全に除去するのに必要ならばウェットブラストを施し、さらに、光学フィルタ２の光入射面２ａや光出射面２ｂに保護膜が形成されている場合は、当該保護膜を除去する。
次に、図２（ｄ）に示すように、フィルタ部材１の光出射面２ｂ側にダイシングテープ１２を貼付し、ダイシング装置によりダイシングする。これにより、フィルタ部材１は個々の製品に切り離されてパッケージ化され、図１に示したフィルタ部材１が完成する。 Next, the upper mold 21 and the lower mold 22 are moved upward and downward, respectively, and as shown in FIG. 2 (c), the filter member group having the filter member 1 is formed between the two molds. Take it out. Then, the adhesive sheet 11 is removed from the light incident surface 2a side of the optical filter 2. After removing the adhesive sheet 11, post-curing is performed to further cure the sealing material, wet blasting is performed if necessary to completely remove the thin burr of the sealing material, and the light incident surface of the optical filter 2 is further applied. If a protective film is formed on the light emitting surface 2a or the light emitting surface 2b, the protective film is removed.
Next, as shown in FIG. 2D, the dicing tape 12 is attached to the light emitting surface 2b side of the filter member 1 and dicing is performed by a dicing device. As a result, the filter member 1 is separated into individual products and packaged, and the filter member 1 shown in FIG. 1 is completed.

＜変形例＞
図１では、封止部３に貫通孔４を設けた場合について説明したが、これに限るものではない。例えば、貫通孔４に代えて窪みを設けてもよい。
＜第１実施形態の効果＞
封止部３に貫通孔４を設けることで、封止材の体積が減少し、湿度や温度等の変動によって封止材が膨張、収縮した場合の封止材の変形応力が減少する。また、封止部３に設けられた貫通孔４が変形することによって封止部３の変形応力が吸収され、結果的に光学フィルタ２に伝わる変形応力が減少する。そのため、変形応力が光学フィルタ２に伝わった際に生じる光学フィルタ２の変形量も減少し、光学フィルタ２の透過特性の変化を低減することができる。 <Modification>
Although the case where the through hole 4 is provided in the sealing portion 3 is described in FIG. 1, the present invention is not limited to this. For example, a recess may be provided instead of the through hole 4.
<Effects of First Embodiment>
By providing the through hole 4 in the sealing portion 3, the volume of the sealing material is reduced, and the deformation stress of the sealing material when the sealing material expands or contracts due to changes in humidity, temperature, etc. is reduced. Further, the deformation stress of the sealing portion 3 is absorbed by the deformation of the through hole 4 provided in the sealing portion 3, and as a result, the deformation stress transmitted to the optical filter 2 is reduced. Therefore, the amount of deformation of the optical filter 2 that occurs when the deformation stress is transmitted to the optical filter 2 is also reduced, and the change in the transmission characteristics of the optical filter 2 can be reduced.

なお、第１実施形態では、光学フィルタ２の一対の平行な辺それぞれについて、この辺に沿った形状の貫通孔４を、封止部３に設けた場合について説明したがこれに限るものではない。例えば、封止部３に、光学フィルタ２の４辺それぞれに対応する、各辺に沿った形状の４つの貫通孔４を設けてもよく、また、いずれか１辺或いは３辺に沿った形状の貫通孔４を設けるようにしてもよい。また、光学フィルタ２の一辺に、この辺に沿った形状の一つの貫通孔４を設けているが、例えば、複数の貫通孔４を光学フィルタ２の一辺に沿って設けてもよい。   In addition, in 1st Embodiment, about each pair of parallel sides of the optical filter 2, the case where the through-hole 4 of the shape along this side was provided in the sealing part 3 was demonstrated, but it is not restricted to this. For example, the sealing portion 3 may be provided with four through holes 4 each having a shape along each side corresponding to each of the four sides of the optical filter 2, and a shape along any one side or three sides. The through hole 4 may be provided. Further, although one through hole 4 having a shape along this side is provided on one side of the optical filter 2, for example, a plurality of through holes 4 may be provided along one side of the optical filter 2.

＜＜第２実施形態＞＞
＜構造＞
図３は、本発明の第２実施形態に係るフィルタ部材の一例を示す構成図である。図３（ａ）は上面図であり、図３（ｂ）は図３（ａ）のＡ−Ａ′の断面図である。図３（ａ）、図３（ｂ）に示すように、封止部３は、その略中央部に、光学フィルタ２の外周よりも大きい貫通孔が形成されている。この貫通孔に光学フィルタ２を配置すると、光学フィルタ２と封止部３との間に隙間が形成される。つまり、上面視で光学フィルタ２の縁部全周にわたって、光学フィルタ２と封止部３との間に貫通孔４ａが形成される。そして、光学フィルタ２の角部分で、接着剤５により封止部３と光学フィルタ２とを固定することによって、光学フィルタ２は、封止部３により支持される。 << Second Embodiment >>
<Structure>
FIG. 3 is a configuration diagram showing an example of a filter member according to the second embodiment of the present invention. 3A is a top view, and FIG. 3B is a cross-sectional view taken along the line AA ′ in FIG. As shown in FIGS. 3A and 3B, the sealing portion 3 has a through hole larger than the outer periphery of the optical filter 2 formed in the substantially central portion thereof. When the optical filter 2 is arranged in this through hole, a gap is formed between the optical filter 2 and the sealing portion 3. That is, the through hole 4a is formed between the optical filter 2 and the sealing portion 3 over the entire circumference of the edge portion of the optical filter 2 in a top view. Then, the optical filter 2 is supported by the sealing portion 3 by fixing the sealing portion 3 and the optical filter 2 with the adhesive 5 at the corner portion of the optical filter 2.

＜製造方法＞
図４は、第２実施形態におけるフィルタ部材の製造方法の一例を工程順に示す断面図である。ここでは、図３（ｂ）に示した断面図に沿って、各工程を説明する。ただし、接着剤塗布工程のみは図３（ａ）に示した上面図を用いて説明する。
まず、図４（ａ）に示すように、上金型３１と下金型３２とを対向するように配置させ、上金型３１と下金型３２とに挟まれた空間（即ち、キャビティ）にサイドから溶融した封止材を注入し、充填する。封止材として例えばエポキシ樹脂を用いる。これにより、封止部３となる封止材群を形成する。図４（ａ）に示すように、例えば上金型３１の下側（即ち、キャビティ側）の面は断面視で凹凸形状となっており、この凸部３１ａによって、図４（ｂ）に示すように、光学フィルタ２を収容可能な大きさの貫通孔４ａ′が形成される。 <Manufacturing method>
4A to 4C are cross-sectional views showing an example of the method of manufacturing the filter member according to the second embodiment in the order of steps. Here, each step will be described along the cross-sectional view shown in FIG. However, only the adhesive application step will be described with reference to the top view shown in FIG.
First, as shown in FIG. 4A, the upper mold 31 and the lower mold 32 are arranged so as to face each other, and a space (that is, a cavity) sandwiched between the upper mold 31 and the lower mold 32. Then, the melted sealing material is injected from the side and filled. For example, epoxy resin is used as the sealing material. As a result, a group of sealing materials that will become the sealing unit 3 is formed. As shown in FIG. 4A, for example, the lower surface (that is, the cavity side) of the upper die 31 has an uneven shape in a sectional view, and this convex portion 31a causes the surface shown in FIG. 4B. Thus, the through hole 4a 'having a size capable of accommodating the optical filter 2 is formed.

次に、上金型３１及び下金型３２をそれぞれ上方向及び下方向に移動させて、フィルタ部材１が形成された封止材群を両金型間から取り出す。そして、封止材をより硬化させるためのポストキュアを行い、さらに封止材薄バリを完全に除去するのに必要ならばウェットブラストを施す。
次に、図４（ｃ）に示すように封止材群間の貫通孔４ａに光学フィルタ２を挿入して位置決めし、図４（ｄ）に示すように光学フィルタ２の一方の面、例えば光入射面２ａ側の、４つの角部分の封止材つまり封止部３と光学フィルタ２との間に接着剤（エポキシ樹脂等）５を塗布し、封止部３と光学フィルタ２とを固定する。そして、接着剤５をより硬化させるためのポストキュアを行う。さらに、光学フィルタ２の他方の面、例えば、光出射面２ｂ側にも光入射面２ａと同様の接着剤処理を行ってもよい。また、光学フィルタ２の角部分だけでなく、角部分の、光入射面２ａ側から光出射面２ｂ側にかけて光学フィルタ２の厚さ方向にわたって全体に接着剤５を塗布してもよい。封止部３の貫通孔４ａからなる開口部の角部分は、例えば図４（ｄ）に示すように、上面視で曲率Ｒを持っており、光学フィルタ２の角部と封止部３の曲率Ｒを有する角部との間の、封止部３の角部と光学フィルタ２の角部との距離が最も短くなる部分で接着剤５により接着される。 Next, the upper mold 31 and the lower mold 32 are moved upward and downward, respectively, and the encapsulant group on which the filter member 1 is formed is taken out from between the molds. Then, post-curing is performed to further harden the sealing material, and wet blasting is performed if necessary to completely remove the thin burr of the sealing material.
Next, as shown in FIG. 4C, the optical filter 2 is inserted into the through holes 4a between the encapsulating material groups and positioned, and as shown in FIG. An adhesive (epoxy resin or the like) 5 is applied between the sealing material at the four corners on the light incident surface 2a side, that is, the sealing portion 3 and the optical filter 2 to attach the sealing portion 3 and the optical filter 2 to each other. Fix it. Then, post-cure for further curing the adhesive 5 is performed. Further, the same adhesive treatment as that of the light incident surface 2a may be performed on the other surface of the optical filter 2, for example, the light emitting surface 2b side. Further, the adhesive 5 may be applied not only to the corner portion of the optical filter 2 but also to the entire corner portion of the optical filter 2 in the thickness direction from the light incident surface 2a side to the light emitting surface 2b side. The corner portion of the opening formed of the through hole 4a of the sealing portion 3 has a curvature R in a top view as shown in FIG. 4D, for example, and the corner portion of the optical filter 2 and the sealing portion 3 have a curvature R. The corners of the sealing portion 3 and the corners of the optical filter 2 between the corners having the curvature R have the shortest distance, and are bonded by the adhesive 5.

これによって、図４（ｄ）に示すように、封止部３と光学フィルタ２との間に、上面視で、光学フィルタ２の縁部全周に沿った形状の貫通孔４ａが形成され且つ、封止部３と光学フィルタ２とが角部分で接着剤５によって固定されたフィルタ部材１が形成される。
次に、図４（ｅ）に示すように、フィルタ部材１の一方の面、例えば光出射面２ｂ側にダイシングテープ１２を貼付し、ダイシング装置によりダイシングする。これにより、フィルタ部材１は個々の製品に切り離されてパッケージ化され、図３（ｂ）に示したフィルタ部材１が完成する。 Thereby, as shown in FIG. 4D, a through hole 4a having a shape along the entire circumference of the edge of the optical filter 2 is formed between the sealing portion 3 and the optical filter 2 in a top view. The filter member 1 in which the sealing portion 3 and the optical filter 2 are fixed at the corners with the adhesive 5 is formed.
Next, as shown in FIG. 4E, the dicing tape 12 is attached to one surface of the filter member 1, for example, the light emitting surface 2b side, and dicing is performed by a dicing device. As a result, the filter member 1 is separated into individual products and packaged, and the filter member 1 shown in FIG. 3B is completed.

＜変形例＞
図３では、封止部３と光学フィルタ２との間に、上面視で光学フィルタ２の縁部全周に沿った形状の貫通孔４ａを設けた場合について説明したが、これに限るものではない。例えば、貫通孔４ａに代えて窪みを設けてもよい。つまり、上面視で光学フィルタ２の縁部全周に沿った形状の窪みを設けてもよい。この場合には、窪みの底部に相当する光学フィルタ２と封止部３とが接する側面部分で光学フィルタ２を支持するようにしてもよく、光学フィルタ２と封止部３とが接する部分を接着剤５で接着してもよい。 <Modification>
In FIG. 3, the case where the through hole 4a having a shape along the entire circumference of the edge portion of the optical filter 2 in the top view is provided between the sealing portion 3 and the optical filter 2, but the present invention is not limited to this. Absent. For example, a depression may be provided instead of the through hole 4a. That is, a recess having a shape along the entire circumference of the edge of the optical filter 2 may be provided in a top view. In this case, the optical filter 2 may be supported by the side surface portion where the optical filter 2 and the sealing portion 3 are in contact with each other, which corresponds to the bottom of the depression, and the portion where the optical filter 2 and the sealing portion 3 are in contact with each other. You may adhere with the adhesive agent 5.

＜第２実施形態の効果＞
上面視で光学フィルタ２の縁部全周に沿った形状の貫通孔４ａを設け、光学フィルタ２の角部で光学フィルタ２と封止部３とを接着剤５で固定することで、接着剤５を介した、光学フィルタ２と封止部３との接触面積を最小化することができる。そのため、第１実施形態と同様に、湿度や温度等の変動によって封止材が膨張又は収縮した場合の封止材の変形応力が光学フィルタ２に伝わり難くなる。また、封止部３と光学フィルタ２の間の貫通孔４ａが変形することによって封止部３の変形応力が吸収され、結果的に光学フィルタ２に伝わる変形応力が減少する。そのため、光学フィルタ２の変形量を低減することができ、光学フィルタ２の透過特性の変化を低減することができる。 <Effects of Second Embodiment>
The through hole 4a having a shape along the entire circumference of the edge of the optical filter 2 in a top view is provided, and the optical filter 2 and the sealing portion 3 are fixed at the corners of the optical filter 2 with the adhesive 5. It is possible to minimize the contact area between the optical filter 2 and the sealing portion 3 through the area 5. Therefore, similarly to the first embodiment, the deformation stress of the encapsulating material when the encapsulating material expands or contracts due to fluctuations in humidity, temperature, or the like is less likely to be transmitted to the optical filter 2. Further, the deformation stress of the sealing portion 3 is absorbed by the deformation of the through hole 4a between the sealing portion 3 and the optical filter 2, and as a result, the deformation stress transmitted to the optical filter 2 is reduced. Therefore, the deformation amount of the optical filter 2 can be reduced, and the change of the transmission characteristic of the optical filter 2 can be reduced.

＜＜第３実施形態＞＞
＜構造＞
図５は、本発明の第３実施形態に係るフィルタ部材の一例を示す構成図である。図５（ａ）は上面図であり、図５（ｂ）は図５（ａ）のＡ−Ａ′の断面図である。図５（ａ）、図５（ｂ）に示すように、フィルタ部材１は、光学フィルタ２と封止部３との間に、上面視で、光学フィルタ２の縁部全周に沿った形状の貫通孔４ｂを有し、光学フィルタ２と封止部３とはその各辺の中央で接着剤５により固定されている。つまり、第２実施形態におけるフィルタ部材では、上面視で矩形の光学フィルタ２の縁部全周において光学フィルタ２と封止部３との間に隙間が形成され、封止部３と光学フィルタ２とを４つの角部で接着剤５により接着することによって、封止部３により光学フィルタ２を支持しているのに対し、第３実施形態では、角部ではなく、各辺の中央部分で、封止部３と光学フィルタ２とが接着剤５により接着されている。 << Third Embodiment >>
<Structure>
FIG. 5: is a block diagram which shows an example of the filter member which concerns on 3rd Embodiment of this invention. 5A is a top view, and FIG. 5B is a cross-sectional view taken along the line AA ′ of FIG. As shown in FIGS. 5A and 5B, the filter member 1 has a shape between the optical filter 2 and the sealing portion 3 along the entire circumference of the edge portion of the optical filter 2 in a top view. The optical filter 2 and the sealing portion 3 are fixed by the adhesive 5 at the center of each side thereof. That is, in the filter member of the second embodiment, a gap is formed between the optical filter 2 and the sealing portion 3 along the entire circumference of the edge portion of the rectangular optical filter 2 in a top view, and the sealing portion 3 and the optical filter 2 are formed. While the optical filter 2 is supported by the sealing part 3 by adhering and with four corners by the adhesive 5, in the third embodiment, not the corners but the central part of each side. The sealing portion 3 and the optical filter 2 are bonded by the adhesive 5.

＜製造方法＞
接着剤５の塗布部分が光学フィルタ２の各辺の端部ではなく各辺の中央部分であることを除けば、製造方法は第２実施形態と同様である。
＜変形例＞
図６は本発明の第３実施形態に係るフィルタ部材の変形例を示す図である。
図６（ａ）は上面図であり、図６（ｂ）は図６（ａ）のＡ−Ａ′の断面図である。光学フィルタ２と封止部３との接着部分は、各辺の中央部にある必要はなく、例えば、図６（ａ）、図６（ｂ）に示すように、各辺の中央部からずれた位置にあってもよく、上面視で光学フィルタ２の重心を対称中心として、点対称となる位置にあってもよい。 <Manufacturing method>
The manufacturing method is similar to that of the second embodiment, except that the applied portion of the adhesive 5 is not the end portion of each side of the optical filter 2 but the central portion of each side.
<Modification>
FIG. 6 is a view showing a modified example of the filter member according to the third embodiment of the present invention.
6A is a top view, and FIG. 6B is a cross-sectional view taken along the line AA ′ of FIG. The adhesive portion between the optical filter 2 and the sealing portion 3 does not have to be in the central portion of each side, and for example, as shown in FIGS. 6A and 6B, is displaced from the central portion of each side. The optical filter 2 may be located at different positions, or may be located at point symmetry with the center of gravity of the optical filter 2 as the center of symmetry in a top view.

また、光学フィルタ２と封止部３との接着部分は、光学フィルタ２の互いに平行な２つの側面それぞれに対応する接着部分（凸部）が、これら接着部分どうしを結んだ線分が、互いに平行な側面に対して非垂直となるように配置されていてもよい。つまり、矩形の光学フィルタ２の、平行な２つの側面それぞれに対応する接着部分が、上面視で、平行な２つの側面間の中央を通り且つこれら側面に平行な線分を対称の軸として、線対称の位置とならないように配置されていてもよい。
また、図５及び図６では、貫通孔４ｂを設けた場合について説明したが、貫通孔４ｂではなく窪みであってもよい。 In addition, as for the adhesive portion between the optical filter 2 and the sealing portion 3, the adhesive portions (convex portions) corresponding to the two side surfaces of the optical filter 2 which are parallel to each other, and the line segments connecting these adhesive portions are mutually It may be arranged so as not to be perpendicular to the parallel side surfaces. That is, the adhesive portions of the rectangular optical filter 2 corresponding to the two parallel side surfaces respectively pass through the center between the two parallel side surfaces in a top view, and the line segments parallel to these side surfaces are used as axes of symmetry. They may be arranged so as not to be line-symmetrical positions.
Further, although the case where the through hole 4b is provided is described in FIGS. 5 and 6, it may be a recess instead of the through hole 4b.

＜第３実施形態の効果＞
上面視で、光学フィルタ２の縁部に沿って全周にわたって貫通孔４ｂを設け、光学フィルタ２と封止部３とを辺毎に１箇所ずつ接着剤５で接着する構成とし、光学フィルタ２と封止部３との接着剤５を介した接触面積をより低減することによって、湿度や温度の変動によって封止材が膨張、収縮した場合に、封止材の変形応力が光学フィルタ２に伝わり難くすることができる。また、封止部３と光学フィルタ２の間の貫通孔４ｂが変形することによって封止部３の変形応力が吸収され、結果的に光学フィルタ２に伝わる変形応力が減少する。そのため、光学フィルタ２の変形量を低減することができ、光学フィルタ２の透過特性の変化を低減することができる。 <Effects of Third Embodiment>
In a top view, a through hole 4b is provided along the entire periphery along the edge of the optical filter 2, and the optical filter 2 and the sealing portion 3 are bonded to each other with an adhesive 5 at each one side. By further reducing the contact area between the adhesive and the sealing portion 3 via the adhesive 5, when the sealing material expands or contracts due to fluctuations in humidity or temperature, the deformation stress of the sealing material is applied to the optical filter 2. It can be difficult to communicate. Further, the deformation stress of the sealing portion 3 is absorbed by the deformation of the through hole 4b between the sealing portion 3 and the optical filter 2, and as a result, the deformation stress transmitted to the optical filter 2 is reduced. Therefore, the deformation amount of the optical filter 2 can be reduced, and the change of the transmission characteristic of the optical filter 2 can be reduced.

また、上面視が矩形の光学フィルタ２において、光学フィルタ２の平行な２辺において、光学フィルタ２と封止部３とを接着する場合、接着剤を塗布する位置を、各辺の中央ではなく、中央からずらして配置してもよい。
例えば、上面視で、光学フィルタの２つの対角線を、対角線の交点を基準として左右４５度未満の範囲で回転させた２つの線分上に接着剤を塗布して固定するようにしてもよい。このように、各辺の中央からずらした位置で接着することで、光学フィルタ２に応力が伝わったとしても、上面視で光学フィルタ２の重心を中心に上面視水平方向に光学フィルタ２が回転し、光学フィルタ２の変形量が低減する。これにより、光学フィルタ２の透過特性の変化をより低減することができる。また、２つの接着部分がフィルタ中心点を基準に点対称であると、光学フィルタ２を効率的に回転させることができるため光学フィルタ２の変形量がより低減し、透過特性の変化をさらに低減することができる。 In addition, in the optical filter 2 having a rectangular top view, when the optical filter 2 and the sealing portion 3 are bonded to each other on two parallel sides of the optical filter 2, the position where the adhesive is applied is not the center of each side. Alternatively, they may be arranged offset from the center.
For example, in a top view, two diagonal lines of the optical filter may be fixed by applying an adhesive on two line segments that are rotated within a range of less than 45 degrees to the left and right with the intersection of the diagonal lines as a reference. Thus, by adhering at a position displaced from the center of each side, even if stress is transmitted to the optical filter 2, the optical filter 2 rotates in the horizontal direction in the top view centering on the center of gravity of the optical filter 2 in the top view. However, the amount of deformation of the optical filter 2 is reduced. This makes it possible to further reduce changes in the transmission characteristics of the optical filter 2. When the two bonded portions are point-symmetric with respect to the filter center point, the optical filter 2 can be efficiently rotated, so that the deformation amount of the optical filter 2 is further reduced and the change of the transmission characteristic is further reduced. can do.

同様に、光学フィルタ２の互いに平行な２つの側面それぞれに対応する接着部分を、上面視で、平行な２つの側面間の中央を通るこれら側面に平行な線分を対称の軸として、線対称の位置とならないように配置した場合も、封止部３の変形応力により、光学フィルタ２が上面視水平方向で回転する。そのため、この場合も、光学フィルタ２を効率的に回転させることができ、透過特性の変化の低減を図ることができる。   Similarly, an adhesive portion corresponding to each of the two parallel side surfaces of the optical filter 2 is line-symmetrical with a line segment parallel to the side surfaces passing through the center between the two parallel side surfaces as an axis of symmetry in a top view. Even when the optical filter 2 is arranged so as not to be in the position, the optical filter 2 is rotated in the horizontal direction in a top view due to the deformation stress of the sealing portion 3. Therefore, also in this case, the optical filter 2 can be efficiently rotated, and the change in the transmission characteristics can be reduced.

また、上記第１から第３実施形態のように、窪み又は貫通孔を設けることで温度や湿度等の環境の変化により光学フィルタ２の透過特性が変化することを低減することができる。そのため、本発明の各実施形態におけるフィルタ部材１を用いて光センサを構成した場合には、温度や湿度等の環境に変化に伴う光センサの出力特性の変化を抑制することができ、すなわちより高精度な光センサを実現することができる。   Further, as in the first to third embodiments, by providing the depression or the through hole, it is possible to reduce the change in the transmission characteristics of the optical filter 2 due to the change in environment such as temperature and humidity. Therefore, when the optical sensor is configured using the filter member 1 in each of the embodiments of the present invention, it is possible to suppress the change in the output characteristic of the optical sensor due to the change in the environment such as temperature and humidity, that is, It is possible to realize a highly accurate optical sensor.

なお、フィルタ部材１を用いて光センサを構成される場合、光センサ素子とフィルタ部材とが、光センサ素子とフィルタ部材の光学フィルタと対向するように張り合わされている場合には、窪み又は貫通孔は、封止部のうち光センサ素子側と張り合わされていない部分に形成されることが好ましい。
このように、窪み又は貫通孔が、封止部のうち光センサ素子と張り合わされていない部分に形成されることにより、光センサ素子と封止部とが貼り合わされることにより、封止部の変形が妨げられ、窪み又は貫通孔を設けることによる効果が妨げられることを回避することができる。 In the case where the filter member 1 is used to form an optical sensor, if the optical sensor element and the filter member are attached so as to face the optical filter of the optical sensor element and the filter member, a dent or a through hole is formed. It is preferable that the hole is formed in a portion of the sealing portion that is not bonded to the optical sensor element side.
In this way, the depression or the through hole is formed in a portion of the sealing portion that is not bonded to the optical sensor element, and thus the optical sensor element and the sealing portion are bonded to each other. It is possible to prevent the deformation from being hindered and the effect of providing the depression or the through hole from being hindered.

図７に、本発明に係るフィルタ部材１を用いて構成した光センサ４０の一例を示す。
図７に示すように、赤外線センサ素子等の光センサ素子からなるセンサ素子４１は、封止部４２によって支持され、センサ素子４１の受光面又は発光面を除く領域が封止部４２により覆われている。そして、センサ素子４１の受光面又は発光面と光学フィルタ２とが対向し、且つ、センサ素子４１の受光面又は発光面と光学フィルタ２とが間隙をもって、接着剤４３によって固定される。接着剤４３は、図７（ｂ）に示すように、貫通孔４よりも縁側に配置され、貫通孔４よりも光学フィルタ２側には配置されない。 FIG. 7 shows an example of the optical sensor 40 configured by using the filter member 1 according to the present invention.
As shown in FIG. 7, the sensor element 41, which is an optical sensor element such as an infrared sensor element, is supported by the sealing portion 42, and the area of the sensor element 41 excluding the light receiving surface or the light emitting surface is covered by the sealing portion 42. ing. Then, the light receiving surface or the light emitting surface of the sensor element 41 and the optical filter 2 face each other, and the light receiving surface or the light emitting surface of the sensor element 41 and the optical filter 2 are fixed with an adhesive 43 with a gap. As shown in FIG. 7B, the adhesive 43 is arranged on the edge side of the through hole 4 and not on the optical filter 2 side of the through hole 4.

なお、窪み又は貫通孔内に封止部３よりも弾性係数の小さい部材をさらに備えてもよい。これによって、封止部３からの応力が緩和され光学フィルタ２に伝わる変形応力が減少するという効果を得ることができる。
以下、本発明の一実施形態におけるフィルタ部材1における各構成要件について説明する。各構成要件の具体例や技術的特徴は、本発明の技術思想を逸脱しない範囲で単独または組み合わせて適用可能である。 A member having an elastic coefficient smaller than that of the sealing portion 3 may be further provided in the recess or the through hole. Thereby, it is possible to obtain an effect that the stress from the sealing portion 3 is relaxed and the deformation stress transmitted to the optical filter 2 is reduced.
Hereinafter, each component of the filter member 1 according to the embodiment of the present invention will be described. The specific examples and technical features of each constituent element can be applied individually or in combination without departing from the technical idea of the present invention.

（光学フィルタ）
光学フィルタ２は、所望の波長範囲の光を選択的に（即ち、透過率が高くなるように）透過させる機能を有するものである。光学フィルタ２は、例えば赤外線のみを透過する機能を有する。光学フィルタ２を構成する光学部材の材料としては、シリコン（Ｓｉ）、硝子（ＳｉＯ２）、サファイヤ（Ａｌ２Ｏ３）、ゲルマニウム（Ｇｅ）、ＺｎＳ、ＺｎＳｅ、ＣａＦ２、ＢａＦ２等、予め設定した（即ち、所定の）波長範囲の赤外線が透過する材料が用いられる。また、これら光学部材に蒸着される薄膜材料としては、シリコン（Ｓｉ）、硝子（ＳｉＯ２）、サファイヤ（Ａｌ２Ｏ３）、Ｇｅ、ＺｎＳ、ＴｉＯ２、ＭｇＦ２、ＳｉＯ２、ＺｒＯ２、Ｔａ２Ｏ５等が用いられる。また、光学部材上に異なる屈折率を有する誘電体を層状に積層した誘電体多層膜フィルタは、表面、裏面異なる所定の厚み構成で両面に作られていてもよいし、また、片面のみに形成されていてもよい。また、不要な反射を防止する目的で反射防止膜が表面、裏面の両面、又は片面の最表層に形成されていても構わない。 (Optical filter)
The optical filter 2 has a function of selectively transmitting light in a desired wavelength range (that is, so as to increase the transmittance). The optical filter 2 has a function of transmitting only infrared rays, for example. As a material of an optical member that constitutes the optical filter 2, silicon (Si), glass (SiO 2 ), sapphire (Al 2 O 3 ), germanium (Ge), ZnS, ZnSe, CaF 2 , BaF 2, etc. are set in advance. A material that transmits infrared rays in the specified wavelength range (that is, a predetermined range) is used. The thin film material deposited on these optical members includes silicon (Si), glass (SiO 2 ), sapphire (Al 2 O 3 ), Ge, ZnS, TiO 2 , MgF 2 , SiO 2 , ZrO 2 , Ta. 2 O 5 or the like is used. In addition, the dielectric multilayer filter in which dielectrics having different refractive indexes are laminated in layers on the optical member may be formed on both surfaces with a predetermined thickness configuration different on the front surface and the back surface, or formed on only one surface. It may have been done. Further, an antireflection film may be formed on the front surface, both surfaces of the back surface, or the outermost surface of one surface for the purpose of preventing unnecessary reflection.

（封止材）
封止材は、リフロー時の高熱に耐えられる部材であることが好ましい。リフロー時の高熱に耐えられる部材としては、例えば、エポキシ系の熱硬化型樹脂、ポリフタルアミド樹脂、ポリフェニレンサルファイド樹脂、液晶ポリマーなどが挙げられる。
（接着剤）
接着剤は、封止材と同様にリフロー時の高熱に耐えられる部材であることが好ましい。リフロー時の高熱に耐えられる部材としては、例えば、エポキシ系の熱硬化型樹脂、ポリフタルアミド樹脂、ポリフェニレンサルファイド樹脂、液晶ポリマーなどが挙げられる。 (Sealing material)
The sealing material is preferably a member that can withstand high heat during reflow. Examples of members that can withstand high heat during reflow include epoxy thermosetting resins, polyphthalamide resins, polyphenylene sulfide resins, and liquid crystal polymers.
(adhesive)
The adhesive is preferably a member that can withstand high heat during reflow, like the sealing material. Examples of members that can withstand high heat during reflow include epoxy thermosetting resins, polyphthalamide resins, polyphenylene sulfide resins, and liquid crystal polymers.

以上、本発明の一実施形態を説明したが、本発明の技術的範囲は上記実施形態に記載の範囲には限定されない。上記実施形態に、多様な変更又は改良を加えることが可能であることが当業者に明らかである。その様な変更又は改良を加えた形態も本発明の技術的範囲に含まれ得ることが、特許請求の範囲の記載から明らかである。   Although one embodiment of the present invention has been described above, the technical scope of the present invention is not limited to the scope described in the above embodiment. It is apparent to those skilled in the art that various changes or improvements can be added to the above-described embodiment. It is apparent from the description of the scope of claims that the embodiments added with such changes or improvements can be included in the technical scope of the present invention.

１ フィルタ部材
２ 光学フィルタ
３ 封止部
４、４ａ、４ｂ 貫通孔
５ 接着剤
１１ 粘着シート
１２ ダイシングテープ
４０ 光センサ
４１ センサ素子 1 Filter Member 2 Optical Filter 3 Sealing Part 4, 4a, 4b Through Hole 5 Adhesive 11 Adhesive Sheet 12 Dicing Tape 40 Optical Sensor 41 Sensor Element

Claims (4)

光透過面を有し、互いに平行な側面の対を有し、上面視で矩形である光学フィルタと、
前記光学フィルタを、当該光学フィルタの側面から支持する封止部と、を備え、
前記光学フィルタと前記封止部との間、又は前記封止部の内側面と外側面との間、の少なくともいずれか一方に、窪み又は貫通孔の少なくともいずれか一方を有し、
前記光学フィルタと前記封止部との間に、上面視で前記光学フィルタの縁部全周に沿った形状の前記貫通孔を備え、
前記封止部は、当該封止部の内側面に前記光学フィルタに向けて突出する凸部を、前記対をなす側面それぞれに対応して一つずつ有し、当該凸部を介して前記光学フィルタを支持し、
前記凸部は、上面視で、前記光学フィルタの２つの対角線を、当該対角線の交点を基準として左右４５度未満の範囲で回転させた２つの線分上に位置するフィルタ部材。 An optical filter having a light transmitting surface, having a pair of side surfaces parallel to each other, and having a rectangular shape in a top view,
A sealing portion that supports the optical filter from a side surface of the optical filter,
Between at least one of the optical filter and the sealing portion, or between the inner surface and the outer surface of the sealing portion, at least one of a recess or a through hole,
Between the optical filter and the sealing portion, the through hole having a shape along the entire circumference of the edge portion of the optical filter in a top view,
The sealing portion has, on the inner side surface of the sealing portion, one convex portion projecting toward the optical filter corresponding to each of the pair of side surfaces, and the optical portion is provided via the convex portion. Support the filter,
The above-mentioned convex part is a filter member which is located on two line segments which rotated two diagonals of the above-mentioned optical filter in the range of less than 45 degrees to the left and right on the basis of the intersection of the said diagonal in a top view. 前記光学フィルタの光透過面は矩形である請求項１に記載のフィルタ部材。 The filter member according to claim 1, wherein the light transmitting surface of the optical filter is rectangular. 前記窪み又は前記貫通孔内に前記封止部よりも弾性係数の小さい部材をさらに備える請求項１又は請求項２に記載のフィルタ部材。 The filter member according to claim 1 or 2 , further comprising a member having an elastic coefficient smaller than that of the sealing portion in the recess or the through hole. 光センサ素子と請求項１から請求項３の何れか一項に記載のフィルタ部材とを備え、
前記光センサ素子と前記フィルタ部材とは、前記光センサ素子と前記フィルタ部材の光学フィルタとが対向するように張り合わされており、
前記窪み又は前記貫通孔は、前記封止部のうち前記光センサ素子側と張り合わされていない部分に形成されている光センサ。 An optical sensor element and the filter member according to any one of claims 1 to 3 ,
The optical sensor element and the filter member are laminated so that the optical sensor element and the optical filter of the filter member face each other,
The optical sensor, wherein the recess or the through hole is formed in a portion of the sealing portion that is not bonded to the optical sensor element side.
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