JP6650772B2 - 微粒子捕捉装置および微粒子測定方法 - Google Patents
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Description
本実施例では、図1に示す微粒子捕捉装置および図2に示すろ過装置を用いて、溶液中の微粒子を捕捉した。ろ過膜として、上面での孔径が100nm、その孔深さが25μmの、Alを主成分とする膜を用いた。被覆シートとして、開口部の面積が20mm2のPETシートをろ過膜に熱溶着したものを用い、ホルダとして、PFA製のホルダを用いた。ろ過する溶液としては、粒径123nmのポリスチレンラテックス(PSL)を10個/ml添加したイソプロピルアルコール(IPA)を用い、0.2MPaの窒素ガスを用いて、ろ過装置に720ml通液した。
ろ過膜として、上面での孔径が10nm、その孔深さが500nmの膜を用い、溶液に添加した粒子を平均粒子径10nmのSi粒子(1000個/ml)とし、ろ過装置への通液量を200mlとした以外、実施例1と同様の条件で微粒子の捕捉と観測を行った。
溶液に添加した粒子を平均粒子径100nmのSi粒子(100個/ml)とした以外、実施例1と同様の条件で微粒子の捕捉と観測を行った。
被覆シートとして、ポリ塩化ビニル(PVC)シールをアクリル系粘着剤でろ過膜に接着したものを用いた以外、実施例3と同様の条件で微粒子の捕捉と観測を行った。
溶液をプロピレングリコール1−モノメチルエーテル2−アセタート(PGMEA)とした以外、実施例3と同様の条件で微粒子の捕捉と観測を行った。
被覆シートとして、PETシールをシリコン系粘着剤でろ過膜に接着したものを用いた以外、実施例5と同様の条件で微粒子の捕捉と観測を行った。
被覆シートとして、PETシートを主成分がアルミナである耐熱性無機系接着剤でろ過膜に接着したものを用いた以外、実施例5と同様の条件で微粒子の捕捉と観測を行った。
被覆シートの開口部の面積を132mm2とし、ろ過装置への通液量を820mlとした以外、実施例1と同様の条件で微粒子の捕捉と観測を行った。
2 供給タンク
3 廃液タンク
4 ガス導入管
5 溶液供給管
6 廃液回収管
10 ろ過装置
10a 流入口
10b 流出口
11 ろ過膜
12 ホルダ
13 被覆シート
13 開口部
14 上部プレート
15 下部プレート
Claims (7)
- 有機溶媒を主成分とする溶液に含まれる微粒子を捕捉する微粒子捕捉装置であって、
ろ過膜と、前記ろ過膜の表面の一部を露出させるように該表面に熱溶着された耐溶剤性を有するシート部材とを含み、前記ろ過膜の前記露出した部分に前記溶液が通液されるように構成されたろ過手段を有する、微粒子捕捉装置。 - 前記ろ過膜の前記露出した部分が、132mm2未満の面積を有する、請求項1に記載の微粒子捕捉装置。
- 前記ろ過膜の前記表面における孔径が、10〜200nmの範囲にある、請求項1または2に記載の微粒子捕捉装置。
- 前記ろ過膜が、単一の無機材料からなる、請求項1から3のいずれか1項に記載の微粒子捕捉装置。
- 有機溶媒を主成分とする溶液に含まれる微粒子を測定する微粒子測定方法であって、
耐溶剤性を有するシート部材が表面に熱溶着されることで該表面の一部が露出したろ過膜を用意する工程と、
前記ろ過膜の前記露出した部分に前記溶液を通液して前記微粒子を捕捉する工程と、
前記捕捉された微粒子の組成を分析する工程と、
を含む、微粒子測定方法。 - 前記組成を分析する工程が、走査型電子顕微鏡とエネルギー分散型X線分析装置とを用いて、前記捕捉された微粒子の組成を特定することを含む、請求項5に記載の微粒子測定方法。
- 前記微粒子を捕捉する工程が、前記微粒子の濃度が100000個/ml以下の前記溶液を前記ろ過膜に通液することを含む、請求項5または6に記載の微粒子測定方法。
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