JP6646882B2 - Material for metal mask and manufacturing method thereof - Google Patents
Material for metal mask and manufacturing method thereof Download PDFInfo
- Publication number
- JP6646882B2 JP6646882B2 JP2018537395A JP2018537395A JP6646882B2 JP 6646882 B2 JP6646882 B2 JP 6646882B2 JP 2018537395 A JP2018537395 A JP 2018537395A JP 2018537395 A JP2018537395 A JP 2018537395A JP 6646882 B2 JP6646882 B2 JP 6646882B2
- Authority
- JP
- Japan
- Prior art keywords
- metal mask
- less
- rolling
- mask material
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000463 material Substances 0.000 title claims description 94
- 239000002184 metal Substances 0.000 title claims description 64
- 229910052751 metal Inorganic materials 0.000 title claims description 64
- 238000004519 manufacturing process Methods 0.000 title claims description 22
- 238000005096 rolling process Methods 0.000 claims description 69
- 230000003746 surface roughness Effects 0.000 claims description 38
- 238000005097 cold rolling Methods 0.000 claims description 33
- 239000012535 impurity Substances 0.000 claims description 6
- 238000005530 etching Methods 0.000 description 38
- 235000019592 roughness Nutrition 0.000 description 11
- 238000000137 annealing Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 10
- 229910045601 alloy Inorganic materials 0.000 description 8
- 239000000956 alloy Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 8
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 7
- 239000003921 oil Substances 0.000 description 7
- 239000000203 mixture Substances 0.000 description 4
- 238000005498 polishing Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 3
- 238000005098 hot rolling Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 239000010731 rolling oil Substances 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000005242 forging Methods 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 1
- 229910001315 Tool steel Inorganic materials 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 238000004873 anchoring Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000005204 segregation Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 235000019587 texture Nutrition 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21B—ROLLING OF METAL
- B21B1/00—Metal-rolling methods or mills for making semi-finished products of solid or profiled cross-section; Sequence of operations in milling trains; Layout of rolling-mill plant, e.g. grouping of stands; Succession of passes or of sectional pass alternations
- B21B1/22—Metal-rolling methods or mills for making semi-finished products of solid or profiled cross-section; Sequence of operations in milling trains; Layout of rolling-mill plant, e.g. grouping of stands; Succession of passes or of sectional pass alternations for rolling plates, strips, bands or sheets of indefinite length
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21B—ROLLING OF METAL
- B21B3/00—Rolling materials of special alloys so far as the composition of the alloy requires or permits special rolling methods or sequences ; Rolling of aluminium, copper, zinc or other non-ferrous metals
- B21B3/02—Rolling special iron alloys, e.g. stainless steel
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D6/00—Heat treatment of ferrous alloys
- C21D6/001—Heat treatment of ferrous alloys containing Ni
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
- C21D9/0068—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for particular articles not mentioned below
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
- C21D9/46—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for sheet metals
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C19/00—Alloys based on nickel or cobalt
- C22C19/03—Alloys based on nickel or cobalt based on nickel
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C38/00—Ferrous alloys, e.g. steel alloys
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C38/00—Ferrous alloys, e.g. steel alloys
- C22C38/08—Ferrous alloys, e.g. steel alloys containing nickel
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
- C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Thermal Sciences (AREA)
- Physics & Mathematics (AREA)
- Heat Treatment Of Sheet Steel (AREA)
- Metal Rolling (AREA)
- Electrodes For Cathode-Ray Tubes (AREA)
- ing And Chemical Polishing (AREA)
Description
本発明は、メタルマスク用素材およびその製造方法に関するものである。 The present invention relates to a metal mask material and a method for manufacturing the same.
例えば有機ＥＬディスプレイの作製において、基板へ蒸着しカラーパターニングを生成する為にメタルマスクが用いられる。このようなメタルマスクは、開孔部を作製する方法の一つとして、Ｆｅ−Ｎｉ合金の薄板にエッチング加工を行う方法が知られている。このエッチング特性を向上させるために、種々の提案がなされている。例えば特許文献１には、高精細なエッチングパターンの形成を可能とするために、圧延方向と直角方向に測定した表面粗さが、Ｒａ：０．０８〜０．２０μｍであり、圧延方向に測定した表面粗さが、Ｒａ：０．０１〜０．１０μｍであり、且つ、圧延方向と直角方向に測定した表面粗さが、圧延方向に測定した表面粗さより、Ｒａで０．０２μｍを超えて粗い表面粗さを有することを特徴とするエッチング加工用素材について記載されている。また特許文献２には、圧延面の結晶方位（１１１）、（２００）、（２２０）、（３１１）のＸ線回折強度を調整することでエッチング性を向上させたメタルマスク材料について記載されている。 For example, in the production of an organic EL display, a metal mask is used for vapor deposition on a substrate to generate color patterning. As such a metal mask, a method of performing etching on a thin plate of an Fe—Ni alloy has been known as one of methods for forming an opening. Various proposals have been made to improve the etching characteristics. For example, in Patent Document 1, in order to enable formation of a high-definition etching pattern, the surface roughness measured in the direction perpendicular to the rolling direction is Ra: 0.08 to 0.20 μm, and the surface roughness is measured in the rolling direction. The surface roughness is Ra: 0.01 to 0.10 μm, and the surface roughness measured in the direction perpendicular to the rolling direction is more than 0.02 μm in Ra than the surface roughness measured in the rolling direction. An etching material characterized by having a rough surface roughness is described. Patent Document 2 describes a metal mask material in which the etching property is improved by adjusting the X-ray diffraction intensity of the crystal orientations (111), (200), (220), and (311) on the rolled surface. I have.
高精彩な有機ＥＬディスプレイ等の製品を作製するために、使用するマスクにはより高精度なパターンの形成が必要である。そのためにはエッチングが均一に進行できる表面肌に加えて、サイドエッチング抑制のためにレジストと素材との密着性をより向上させることも求められる。特許文献１、特許文献２はそれぞれエッチング加工性を向上させる点において優れた発明だが、密着性も同時に向上させる点に関しては、さらなる検討の余地が残されている。
本発明の目的は、エッチング後の形状変化を抑制するとともに、良好なレジスト密着性とエッチング加工性を得るうえで好適なメタルマスク用素材とその製造方法を提供することである。In order to manufacture a high-definition product such as an organic EL display, a more precise pattern must be formed on a mask to be used. For this purpose, it is required to further improve the adhesion between the resist and the material in order to suppress side etching, in addition to the surface texture on which etching can proceed uniformly. Patent Literature 1 and Patent Literature 2 are excellent inventions in terms of improving the etching processability, however, there is still room for further study on improving the adhesion at the same time.
An object of the present invention is to provide a material for a metal mask which is suitable for suppressing a change in shape after etching and obtaining good resist adhesion and etching processability, and a method for manufacturing the same.
本発明者等は上記目的を達成するために、化学組成、表面粗さ、残留応力等のエッチング加工に影響を及ぼす種々の要因について鋭意検討した。その結果、レジストとの密着性向上や均一なエッチング加工を可能とし、さらにエッチング後の形状変化抑制に有効な構成を知見し、本発明に想到した。 The present inventors have diligently studied various factors affecting the etching process, such as chemical composition, surface roughness, and residual stress, in order to achieve the above object. As a result, the present inventors have found a configuration that enables improvement in the adhesion to the resist and uniform etching processing, and that is effective in suppressing the change in shape after etching.
すなわち本発明の一態様は 質量％で、Ｃ：０．０１％以下、Ｓｉ：０．５％以下、Ｍｎ：１．０％以下、Ｎｉ：３０〜５０％を含有し、残部がＦｅ及び不可避的不純物からなるメタルマスク用素材であって、
前記メタルマスク用素材は、圧延方向における表面粗さと圧延方向と直交する方向における表面粗さとがともに、０．０５μｍ≦Ｒａ≦０．２５μｍ、Ｒｚ≦１．５μｍ以下であり、
前記メタルマスク用素材は、圧延方向と直交する方向におけるスキューネスＲｓｋが０以上であり、
前記メタルマスク用素材から長さ１５０ｍｍ、幅３０ｍｍの試料を切り出し、前記試料を片側からエッチングし、前記試料の板厚の６０％を除去したときの反り量が１５ｍｍ以下であり、板厚が０．１０ｍｍ以上０．５ｍｍ以下であるメタルマスク用素材である。
好ましくは、前記メタルマスク用素材の圧延方向におけるスキューネスＲｓｋが前記メタルマスク用素材の圧延方向と直交する方向におけるＲｓｋよりも小さい。
好ましくは、前記メタルマスク用素材の圧延方向と直交する方向における表面粗さＲａが、前記メタルマスク用素材の圧延方向における表面粗さＲａよりも大きい。
好ましくは、前記メタルマスク用素材の圧延方向と直交する方向におけるＲｓｋが１以下である。
好ましくは、前記メタルマスク用素材から長さ１５０ｍｍ、幅３０ｍｍの試料を切り出し、前記試料を片側からエッチングし、前記試料の板厚の２０％、３０％、５０％のいずれかを除去したときの反り量が１５ｍｍ以下である。 That is, one embodiment of the present invention contains, by mass%, C: 0.01% or less, Si: 0.5% or less, Mn: 1.0% or less, and Ni: 30 to 50%, with the balance being Fe and inevitable. Material for metal masks made of natural impurities,
In the metal mask material, the surface roughness in the rolling direction and the surface roughness in a direction perpendicular to the rolling direction are both 0.05 μm ≦ Ra ≦ 0.25 μm and Rz ≦ 1.5 μm or less,
The metal mask material has a skewness Rsk of 0 or more in a direction perpendicular to the rolling direction,
A sample having a length of 150 mm and a width of 30 mm was cut out from the metal mask material, the sample was etched from one side, and the amount of warpage when 60% of the sample thickness was removed was 15 mm or less. It is a metal mask material having a size of 10 mm or more and 0.5 mm or less.
Preferably, the skewness Rsk in the rolling direction of the metal mask material is smaller than Rsk in a direction orthogonal to the rolling direction of the metal mask material.
Preferably, the surface roughness Ra of the metal mask material in a direction perpendicular to the rolling direction is larger than the surface roughness Ra of the metal mask material in the rolling direction.
Preferably, Rsk in a direction orthogonal to a rolling direction of the metal mask material is 1 or less.
Preferably, a sample having a length of 150 mm and a width of 30 mm is cut out from the metal mask material, and the sample is etched from one side to remove any of 20%, 30%, and 50% of the thickness of the sample. The amount of warpage is 15 mm or less.
本発明の他の一態様は、質量％で、Ｃ：０．０１％以下、Ｓｉ：０．５％以下、Ｍｎ：１．０％以下、Ｎｉ：３０〜５０％を含有し、残部がＦｅ及び不可避的不純物からなる冷間圧延用素材を冷間圧延してメタルマスク用素材を得るメタルマスク用素材の製造方法であって、
前記冷間圧延用素材に対する仕上冷間圧延工程における最終パスの条件が、圧下率：３５％以下、圧延ロールの噛み込み角：１．０°以上であり、
前記メタルマスク用素材は、圧延方向における表面粗さと圧延方向と直交する方向における表面粗さとがともに、０．０５μｍ≦Ｒａ≦０．２５μｍ、Ｒｚ≦１．５μｍ以下であり、圧延方向と直交する方向におけるスキューネスＲｓｋが０以上であるとともに、
前記メタルマスク用素材から長さ１５０ｍｍ、幅３０ｍｍの試料を切り出し、前記試料を片側からエッチングし、前記試料の板厚の６０％を除去したときの反り量が１５ｍｍ以下であり、
仕上冷間圧延後の素材の板厚が０．１０ｍｍ以上０．５ｍｍ未満であることを特徴とするメタルマスク用素材の製造方法である。
好ましくは、前記圧延ロールの噛み込み角が３．０°以下である。
好ましくは、前記仕上冷間圧延工程における最終パスの圧下率が、１５％〜３５％である。
好ましくは、前記仕上冷間圧延工程の最終パスに用いるロールの円周方向と直交する方向の表面粗さＲａが０．０５〜０．２５μｍである。
好ましくは、前記仕上冷間圧延工程の圧延速度が１５０ｍ／ｍｉｎ以下である。Another embodiment of the present invention contains, by mass%, C: 0.01% or less, Si: 0.5% or less, Mn: 1.0% or less, and Ni: 30 to 50%, with the balance being Fe. A method for producing a metal mask material by cold rolling a cold rolling material comprising unavoidable impurities to obtain a metal mask material,
The conditions of the final pass in the finish cold rolling step for the cold rolling material are as follows: rolling reduction: 35% or less, biting angle of rolling roll: 1.0 ° or more,
The metal mask material has a surface roughness in a rolling direction and a surface roughness in a direction perpendicular to the rolling direction, both of which are 0.05 μm ≦ Ra ≦ 0.25 μm and Rz ≦ 1.5 μm or less, and are orthogonal to the rolling direction. The skewness Rsk in the direction is 0 or more,
A sample having a length of 150 mm and a width of 30 mm is cut out from the metal mask material, the sample is etched from one side, and the amount of warpage when 60% of the plate thickness of the sample is removed is 15 mm or less,
A method for producing a material for a metal mask, wherein the thickness of the material after finish cold rolling is 0.10 mm or more and less than 0.5 mm.
Preferably, the bite angle of the rolling roll is 3.0 ° or less.
Preferably, the rolling reduction of the final pass in the finish cold rolling step is 15% to 35%.
Preferably, the surface roughness Ra in a direction perpendicular to the circumferential direction of the roll used in the final pass of the finishing cold rolling step is 0.05 to 0.25 μm.
Preferably, the rolling speed in the finish cold rolling step is 150 m / min or less.
上記の特徴を有する本発明によれば、エッチング加工後の形状変化も少なく、レジストとの密着性向上に好適なメタルマスク用素材を得ることが可能である。 According to the present invention having the above characteristics, it is possible to obtain a metal mask material suitable for improving the adhesiveness to a resist, with little change in shape after etching.
以下、本発明を詳細に説明する。ただし、本発明は、ここで取り挙げた実施形態に限定されるものではなく、その発明の技術的思想を逸脱しない範囲で適宜組み合わせや改良が可能である。なお本発明のメタルマスク用素材とは、コイル状に巻き回されている鋼帯や、その鋼帯を切断して作製された矩形状の薄板も含む。
本発明のメタルマスク用素材を、質量％で、Ｃ：０．０１％以下、Ｓｉ：０．５％以下、Ｍｎ：１．０％以下、Ｎｉ：３０〜５０％を含有し、残部がＦｅ及び不可避的不純物である化学組成のＦｅ−Ｎｉ合金とした理由は以下のとおりである。
[Ｃ：０．０１質量％以下]
Ｃは、エッチング性に影響を及ぼす元素である。Ｃが過度に多く含まれるとエッチング性を阻害するため、Ｃの上限を０．０１％とした。Ｃは０％でも良いが、製造工程上少なからず含まれるものであるため、下限は特に限定しない。
[Ｓｉ：０．５質量％以下、Ｍｎ：１．０質量％以下]
Ｓｉ、Ｍｎは、通常、脱酸の目的で使用され、Ｆｅ−Ｎｉ合金に微量含有されているが、過剰に含有すれば偏析を起こし易くなるため、Ｓｉ：０．５％以下、Ｍｎ：１．０％以下とした。好ましいＳｉ量とＭｎ量は、Ｓｉ：０．１％以下、Ｍｎ：０．５％以下である。ＳｉとＭｎの下限は、例えばＳｉは０．０５％、Ｍｎは０．０５％と設定することができる。
[Ｎｉ：３０〜５０質量％]
Ｎｉは、熱膨張係数を調整する作用を有し、低熱膨張特性に大きな影響を及ぼす元素である。含有量が３０％より少なく、または５０％を越えるものでは熱膨張係数を低める効果がなくなるため、Ｎｉの範囲は３０〜５０％とする。好ましいＮｉ量は３２〜４５％である。
上記以外を構成するのはＦｅ及び不可避的不純物である。Hereinafter, the present invention will be described in detail. However, the present invention is not limited to the embodiments described here, and can be appropriately combined or improved without departing from the technical idea of the present invention. The metal mask material of the present invention includes a steel strip wound in a coil shape and a rectangular thin plate produced by cutting the steel strip.
The metal mask material of the present invention contains, by mass%, C: 0.01% or less, Si: 0.5% or less, Mn: 1.0% or less, and Ni: 30 to 50%, with the balance being Fe. The reason for using an Fe-Ni alloy having a chemical composition that is an unavoidable impurity is as follows.
[C: 0.01% by mass or less]
C is an element that affects the etching property. If C is excessively contained, the etching property is impaired. Therefore, the upper limit of C is set to 0.01%. Although C may be 0%, since it is included in the production process, the lower limit is not particularly limited.
[Si: 0.5% by mass or less, Mn: 1.0% by mass or less]
Si and Mn are usually used for the purpose of deoxidation, and are contained in a small amount in the Fe-Ni alloy. However, if they are contained excessively, segregation is likely to occur. 0.0% or less. The preferred amounts of Si and Mn are Si: 0.1% or less and Mn: 0.5% or less. The lower limits of Si and Mn can be set to, for example, 0.05% for Si and 0.05% for Mn.
[Ni: 30 to 50% by mass]
Ni is an element having an effect of adjusting the coefficient of thermal expansion and having a large effect on low thermal expansion characteristics. If the content is less than 30% or more than 50%, the effect of lowering the coefficient of thermal expansion is lost, so the range of Ni is 30 to 50%. The preferred amount of Ni is 32-45%.
The components other than those described above are Fe and unavoidable impurities.
まず、本発明のメタルマスク用素材について説明する。
（表面粗さ）
本発明のメタルマスク用素材の表面粗さは、算術平均粗さＲａ（ＪＩＳ−Ｂ−０６０１−２００１に準拠）が０．０５〜０．２５μｍであり、かつ最大高さＲｚ（ＪＩＳ−Ｂ−０６０１−２００１に準拠）が１．５μｍ以下であることを特徴とする。上記範囲内のＲａおよびＲｚを有することで、本発明の素材は高精度なエッチング加工が可能となる。Ｒａが０．２５μｍを超える場合、素材表面が粗すぎるためエッチングの進行にばらつきが生じ、高精度なエッチング加工が困難となる。Ｒａが０．０５μｍ未満の場合、レジストの密着性が低下する傾向にある。また上記Ｒａの範囲を満たしていても、Ｒｚが１．５μｍを超える場合、素材表面の一部に、粗さ曲線における大きな山部分が形成され、その山部からエッチングが進行してエッチングムラの要因となるため、好ましくない。Ｒｚの下限は特に限定しないが、より高い密着性を得るために、Ｒｚの下限を０．３μｍに設定すると好ましい。より好ましいＲａの上限は０．２０μｍであり、より好ましいＲｚの上限は１.２μｍである。上記の表面粗さの規定は、局所的なエッチングムラを抑制するために、メタルマスク用素材の圧延方向と直交する方向（以降、「幅方向」または「圧延直角方向とも記載する）の表面粗さと、圧延方向（以降、「長手方向」とも記載する）の表面粗さとの両方で満たすことが好ましい。また、本実施形態におけるメタルマスク用素材の幅方向の表面粗さは、圧延方向に測定した表面粗さよりも大きくなっていることが好ましい。これにより圧延油をロールと素材との間から排出させやすくなり、圧延油の噛み込みによって形成されるオイルピットを抑制することが可能である。具体的には幅方向のＲａは圧延方向のＲａより１０％以上高い値であると、上述したオイルピット抑制効果を得やすくなるため好ましい。なお表面粗さの測定には、一般的に使用されている接触式または非接触式の粗さ計を用いることができる。First, the metal mask material of the present invention will be described.
(Surface roughness)
The surface roughness of the metal mask material of the present invention is such that the arithmetic average roughness Ra (based on JIS-B-0601-2001) is 0.05 to 0.25 μm and the maximum height Rz (JIS-B- 0601-2001) is 1.5 μm or less. By having Ra and Rz within the above ranges, the material of the present invention can be etched with high precision. If Ra exceeds 0.25 μm, the surface of the material is too rough, so that the progress of the etching varies, making it difficult to perform high-precision etching. When Ra is less than 0.05 μm, the adhesiveness of the resist tends to decrease. Further, even if the above range of Ra is satisfied, when Rz exceeds 1.5 μm, a large peak portion in the roughness curve is formed on a part of the material surface, and etching proceeds from the peak portion to cause uneven etching. It is not preferable because it becomes a factor. Although the lower limit of Rz is not particularly limited, it is preferable to set the lower limit of Rz to 0.3 μm in order to obtain higher adhesion. A more preferred upper limit of Ra is 0.20 μm, and a more preferred upper limit of Rz is 1.2 μm. In order to suppress local etching unevenness, the surface roughness is defined in a direction perpendicular to the rolling direction of the metal mask material (hereinafter, also referred to as “width direction” or “rolling perpendicular direction”). And the surface roughness in the rolling direction (hereinafter also referred to as “longitudinal direction”). Further, it is preferable that the surface roughness in the width direction of the metal mask material in the present embodiment is larger than the surface roughness measured in the rolling direction. As a result, the rolling oil is easily discharged from between the roll and the material, and it is possible to suppress oil pits formed due to the biting of the rolling oil. Specifically, it is preferable that the Ra in the width direction is 10% or more higher than the Ra in the rolling direction, because the above-described oil pit suppressing effect is easily obtained. For measuring the surface roughness, a generally used contact or non-contact roughness meter can be used.
本実施形態のメタルマスク用素材は、上述した表面粗さに加えて、素材の圧延方向と直交する方向におけるスキューネスＲｓｋ（ＪＩＳ−Ｂ−０６０１−２００１に準拠）≧０であることを特徴とする。上記の数値範囲を満たすことで、素材表面の粗さ曲線において、尖った形状の山部が多く形成されるため、高いアンカー効果が得ることができる。これによりメタルマスク用素材とレジストとの密着性を向上させ、エッチング液が素材とレジストとの境界に侵入することが要因で発生するサイドエッチングを抑制することが可能である。Ｒｓｋの値が過度に高くなり過ぎるとエッチングの均一な進行を阻害する可能性があるため、Ｒｓｋの上限は１．０が好ましく、０．５がさらに好ましい。さらに素材の圧延方向のＲｓｋを幅方向におけるＲｓｋよりも小さくすることで、前述したオイルピット抑制効果を向上させることができる。圧延方向のＲｓｋは幅方向のＲｓｋの値よりも小さければ、０未満の値（負値）をとってもよい。なお本実施形態のメタルマスク用素材は、上述したＲｓｋの効果を十分に得るためには、板厚０．５ｍｍ以下の素材に適用する。好ましくは、板厚０．２ｍｍ以下である。また板厚の下限は、後述する噛み込み角を１．０°以上に調整し易くするために、０．１０ｍｍに設定する。 The metal mask material of the present embodiment is characterized in that, in addition to the above-described surface roughness, skewness Rsk (based on JIS-B-0601-2001) ≧ 0 in a direction perpendicular to the rolling direction of the material. . By satisfying the above numerical range, many peaks having a sharp shape are formed on the roughness curve of the material surface, so that a high anchoring effect can be obtained. As a result, it is possible to improve the adhesion between the metal mask material and the resist, and to suppress the side etching caused by the intrusion of the etchant into the boundary between the material and the resist. If the value of Rsk becomes excessively high, there is a possibility that uniform progress of etching may be hindered. Therefore, the upper limit of Rsk is preferably 1.0, and more preferably 0.5. Further, by making Rsk in the rolling direction of the material smaller than Rsk in the width direction, the above-described oil pit suppressing effect can be improved. Rsk in the rolling direction may take a value less than 0 (negative value) as long as it is smaller than the value of Rsk in the width direction. The metal mask material of the present embodiment is applied to a material having a plate thickness of 0.5 mm or less in order to sufficiently obtain the above-described effect of Rsk. Preferably, the thickness is 0.2 mm or less. The lower limit of the plate thickness is set to 0.10 mm in order to easily adjust the bite angle described later to 1.0 ° or more.
（反り量）
本実施形態のメタルマスク用素材は、長さ１５０ｍｍ、幅３０ｍｍの試料を切り出し、前記試料を片側からエッチングし、前記試料の板厚の６０％を除去したときの反り量が１５ｍｍ以下であることを特徴とする。上記に示すように、板厚の６０％の領域の残留応力も低減させることで、応力のバランスがより崩れる板厚中央付近のエッチングを行っても、変形を抑制し、良好にエッチング加工を進行させることができる。そのため多様な深さのハーフエッチングに対応でき、エッチングパターンの自由度を向上させることができる。好ましくは、前記試料の板厚の２０％、３０％、５０％のいずれかを除去したときの反り量が１５ｍｍ以下である。より好ましくは、前記試料の板厚の２０、３０、５０％のいずれを除去しても反り量が１５ｍｍ以下である。この反り量は１３ｍｍ以下が好ましく、１１ｍｍ以下がより好ましく、９ｍｍ以下がさらに好ましい。最も好ましくは、応力バランスが崩れやすく、大きな反りが発生しやすい、試料の板厚を５０％除去した際における反り量が９ｍｍ以下であり、板厚の２０％または３０％を除去した際における反り量が７ｍｍ以下であることが好ましい。本実施形態では、長手方向が圧延方向となるように試料を切断し、反りを測定している。なお本実施形態における反り量の測定方法は、試料の片側からエッチングで除去した後、カットサンプルの上端を垂直定盤に接する状態で吊り下げ、反りにより垂直定盤から離れたカットサンプルの下端と、垂直定盤との水平距離を反り量として測定している。(Warpage)
The material for the metal mask of the present embodiment is that a sample having a length of 150 mm and a width of 30 mm is cut out, the sample is etched from one side, and the amount of warpage when 60% of the thickness of the sample is removed is 15 mm or less. It is characterized by. As described above, by reducing the residual stress in the region of 60% of the plate thickness, even when etching near the center of the plate thickness where the balance of the stress is further broken, the deformation is suppressed and the etching process proceeds favorably. Can be done. Therefore, it is possible to cope with half-etching of various depths, and it is possible to improve the degree of freedom of an etching pattern. Preferably, the amount of warpage when any one of 20%, 30%, and 50% of the plate thickness of the sample is removed is 15 mm or less. More preferably, the warpage amount is 15 mm or less even when any of 20, 30 and 50% of the plate thickness of the sample is removed. This warpage is preferably 13 mm or less, more preferably 11 mm or less, and even more preferably 9 mm or less. Most preferably, the stress balance is likely to be lost and large warpage is likely to occur. The amount of warpage when removing 50% of the sample thickness is 9 mm or less, and the warpage when removing 20% or 30% of the thickness. Preferably, the amount is 7 mm or less. In the present embodiment, the sample is cut so that the longitudinal direction is the rolling direction, and the warpage is measured. Note that the method of measuring the amount of warpage in the present embodiment is such that, after being removed from one side of the sample by etching, the upper end of the cut sample is suspended in contact with the vertical surface plate, and the lower end of the cut sample separated from the vertical surface plate by warpage. The horizontal distance from the vertical surface plate is measured as the amount of warpage.
続いて、本発明のメタルマスク用素材の製造方法について説明する。
本実施形態の製造方法は、例えば、真空溶解−熱間鍛造−熱間圧延−冷間圧延という工程を適用することができる。必要に応じて、冷間圧延前の段階で１２００℃程度で均質化熱処理を行い、冷間圧延工程中には、冷間圧延材の硬さを低減するために８００〜９５０℃の焼鈍を１回以上行うことができる。上記冷間圧延工程では、表面のスケールを除去する研磨工程や、素材端部のオフゲージ部（板厚が厚い部分）の除去および圧延加工で発生する耳波部を除去するために耳切り工程を行ってもよい。熱処理工程時に使用する炉も、縦型炉、横型炉（水平炉）等既存のものを使用しても良いが、通板中の折れの防止や、素材の急峻度をより高めるために、自重によるたわみが発生し難い縦型炉を使用することが好ましい。Next, a method for manufacturing a metal mask material of the present invention will be described.
The manufacturing method of this embodiment can apply, for example, vacuum melting, hot forging, hot rolling, and cold rolling. If necessary, a homogenizing heat treatment is performed at about 1200 ° C. before the cold rolling. During the cold rolling step, annealing at 800 to 950 ° C. is performed to reduce the hardness of the cold-rolled material. Can be done more than once. In the cold rolling step, a polishing step for removing the scale on the surface, a trimming step for removing an off-gage part (a part having a large thickness) at the end of the material and an ear wave part generated in the rolling process are performed. May go. The furnace used in the heat treatment process may be an existing furnace such as a vertical furnace or a horizontal furnace (horizontal furnace). However, in order to prevent breakage during passing and to increase the steepness of the material, the weight of the furnace is reduced. It is preferable to use a vertical furnace in which deflection due to the above is hardly generated.
本実施形態の製造方法は、仕上冷間圧延工程における最終パスにおける圧下率を３５％以下に調整する。上記の圧下率が３５％を超える場合、素材の残留歪が大きくなり、エッチング加工時に変形の発生が増加する傾向にある。好ましい圧下率の上限は３０％である。なお過度に圧下率が少ないと、上述する表面粗さに調整することが困難となるため、圧下率の下限は１５％に設定することが好ましい。より好ましい圧下率の下限は１８％であり、さらに好ましい圧下率の下限は、２０％である。なお仕上冷間圧延におけるパス回数は特に規定せず、複数回（例えば、３回以上）行っても良いが、後述する研磨痕が潰れないように圧延するために、１回のパス数で仕上圧延を行うことが好ましい。 In the manufacturing method of the present embodiment, the rolling reduction in the final pass in the finishing cold rolling step is adjusted to 35% or less. When the rolling reduction exceeds 35%, the residual strain of the material increases, and the occurrence of deformation during etching tends to increase. A preferred upper limit of the rolling reduction is 30%. If the rolling reduction is excessively small, it is difficult to adjust the surface roughness as described above. Therefore, the lower limit of the rolling reduction is preferably set to 15%. A more preferred lower limit of the rolling reduction is 18%, and a still more preferred lower limit of the rolling reduction is 20%. The number of passes in the finish cold rolling is not particularly limited, and may be performed a plurality of times (for example, three or more times). Preferably, rolling is performed.
本実施形態の製造方法において、仕上冷間圧延に使用するロールは、ロールの円周方向（ロールの回転方向）と直交する方向の表面粗さがＲａ：０．０５〜０．２５μｍのロールを用いることができる。好ましいＲａの上限は０．１５μｍである。これによりメタルマスク用素材に所望の粗さを付与することができる。ロールの材質は特に限定せず、例えばＪＩＳ−Ｇ４４０４に規定される合金工具鋼ロールを使用することができる。また、圧延時のオイルが圧延材料表面とロールの間を通り抜けて行き易くする粗さをロールに付与することで、オイルピットの発生を抑制することができるため、本発明に係る製造方法のロール表面には、ロールの円周方向に研磨痕を形成することが好ましい。この研磨痕の形成には、ロールの円周方向と直交する方向の粗さがＲａ：０．０５〜０．２５μｍとすることができる粗さを有する砥石を用意し、ロールを転動しながら砥石を押し当てることで、形成することができる。この研磨痕により、本実施形態におけるロールの円周方向粗さと、円周方向に直交する方向の表面粗さとの差がＲａで０．０２μｍ以上であることがより好ましい。この特徴により、メタルマスク用素材の圧延直角方向の表面粗さと、圧延方向の表面粗さとの間に意図的に差を設けることができ、圧延油がより排出されやすくなるため、オイルピットの発生をさらに抑制することが可能である。 In the manufacturing method of the present embodiment, the roll used for the finish cold rolling is a roll having a surface roughness Ra: 0.05 to 0.25 μm in a direction perpendicular to the circumferential direction of the roll (the rotation direction of the roll). Can be used. The preferred upper limit of Ra is 0.15 μm. Thereby, a desired roughness can be imparted to the metal mask material. The material of the roll is not particularly limited, and for example, an alloy tool steel roll specified in JIS-G4404 can be used. Further, by giving the roll a roughness that facilitates the passage of oil during rolling between the rolled material surface and the roll, it is possible to suppress the occurrence of oil pits. Preferably, polishing marks are formed on the surface in the circumferential direction of the roll. For the formation of the polishing marks, a grindstone having a roughness whose roughness in the direction perpendicular to the circumferential direction of the roll can be Ra: 0.05 to 0.25 μm is prepared, and the roll is rolled. It can be formed by pressing a grindstone. Due to the polishing marks, the difference between the circumferential roughness of the roll in the present embodiment and the surface roughness in a direction perpendicular to the circumferential direction is more preferably 0.02 μm or more in Ra. Due to this feature, it is possible to intentionally provide a difference between the surface roughness of the metal mask material in the direction perpendicular to the rolling direction and the surface roughness in the rolling direction. Can be further suppressed.
本発明に係る製造方法は仕上冷間圧延において、被圧延材とワークロールとが接触を開始する角度である噛み込み角を１．０°以上に設定する。噛み込み角をこのように調整することで、オイルピットの過度の発生を抑制しつつ、所望の表面粗さを得ることが可能である。ここで噛み込み角が大きすぎると、圧延荷重が過大となって所望の圧延形状が得られない可能性があるため、噛み込み角の上限を３．０°に設定することができる。好ましい噛み込み角の上限は、２．０°である。また上記噛み込み角の規定は、仕上冷間圧延の全パスに適用されることが好ましい。なお本実施形態における噛み込み角をθとしたとき、θ＝１８０／π・ａｒｃｃｏｓ（（Ｒ−（ｈ０−ｈ１）／２）／Ｒ）の計算式より噛み込み角を導出することができる。ここでＲ：ロール半径、ｈ０：圧延前の素材板厚、ｈ１：圧延後の素材板厚である。In the manufacturing method according to the present invention, in the finish cold rolling, the bite angle which is the angle at which the material to be rolled and the work roll start to contact is set to 1.0 ° or more. By adjusting the bite angle in this way, it is possible to obtain a desired surface roughness while suppressing excessive generation of oil pits. Here, if the bite angle is too large, the rolling load becomes excessive and a desired rolled shape may not be obtained. Therefore, the upper limit of the bite angle can be set to 3.0 °. The preferred upper limit of the bite angle is 2.0 °. Further, it is preferable that the above-mentioned definition of the bite angle is applied to all passes of the finish cold rolling. When the bite angle in the present embodiment is θ, it is possible to derive the bite angle from a calculation formula of θ = 180 / π · arccos ((R− (h 0 −h 1 ) / 2) / R). it can. Wherein R: roll radius, h 0: Material thickness before rolling, h 1: a material plate thickness after rolling.
本実施形態の製造方法は、圧延速度を１５０ｍ／ｍｉｎ以下に設定することが好ましい。圧延速度を１５０ｍ／ｍｉｎ以下に設定することで、ワークロールとメタルマスク用素材との間に導入される圧延油量を少なくしてオイルピットの発生を抑制し、より確実にＲｓｋを正値に調整することが可能である。より好ましい圧延速度の上限は、１２０ｍ／ｍｉｎである。さらに好ましくは１００ｍ／ｍｉｎに上限を設定する。なお、圧延速度の下限は特に設定しないが、遅すぎると生産効率が低下するため、２０ｍ／ｍｉｎと設定することができる。好ましくは３０ｍ／ｍｉｎである。 In the manufacturing method of the present embodiment, it is preferable to set the rolling speed to 150 m / min or less. By setting the rolling speed to 150 m / min or less, the amount of rolling oil introduced between the work roll and the metal mask material is reduced to suppress the generation of oil pits, and to more reliably set Rsk to a positive value. It is possible to adjust. A more preferable upper limit of the rolling speed is 120 m / min. More preferably, the upper limit is set to 100 m / min. The lower limit of the rolling speed is not particularly set, but if it is too low, the production efficiency is reduced. Therefore, it can be set to 20 m / min. Preferably it is 30 m / min.
本実施形態の製造方法において、仕上圧延後にエッチング加工用素材に残留する歪を除去し、素材に発生する形状不良を抑制するために、歪取り焼鈍を行っても良い。歪取り焼鈍は、４００〜７００℃程度の温度で行うことが好ましい。なお焼鈍時間は特に限定しないが、長すぎると引張強さ等の特性が大幅に劣化し、短すぎると歪みを除去する効果が得られないため、０．５〜３．０ｍｉｎ程度とすることが好ましい。より好ましい歪取り焼鈍時間の下限は１．２ｍｉｎであり、さらに好ましい歪取り焼鈍時間の下限は１．５ｍｉｎである。 In the manufacturing method of the present embodiment, in order to remove distortion remaining in the material for etching after finish rolling and to suppress shape defects occurring in the material, strain relief annealing may be performed. The strain relief annealing is preferably performed at a temperature of about 400 to 700 ° C. The annealing time is not particularly limited, but if it is too long, properties such as tensile strength are significantly deteriorated, and if it is too short, the effect of removing strain cannot be obtained, so that the annealing time is about 0.5 to 3.0 min. preferable. A more preferred lower limit of the strain relief annealing time is 1.2 min, and a still more preferred lower limit of the strain relief annealing time is 1.5 min.
以下の実施例で本発明を更に詳しく説明する。
本実施例のメタルマスク用素材の化学組成を表１に示す。本実施例のＦｅ−Ｎｉ合金は、真空溶解−熱間鍛造−均質化熱処理−熱間圧延で厚さ２〜３ｍｍに仕上げる工程の後、冷間圧延を実施した。熱間圧延後のＦｅ−Ｎｉ合金には２回の焼鈍を含む冷間圧延を行い、Ｆｅ−Ｎｉ合金冷間圧延材を作製した。仕上冷間圧延の最終パス前のＦｅ−Ｎｉ合金冷間圧延材のそれぞれの厚さは、０．１２５ｍｍ（試料Ｎｏ．１）と０．２７５ｍｍ（試料Ｎｏ．２）であり、試料Ｎｏ．１は仕上冷間圧延後に０．１０ｍｍ（圧下率２０％）、試料Ｎｏ．２は仕上冷間圧延後に０．２０ｍｍ（圧下率２７％）となるように圧延条件を調整した。この時の試料Ｎｏ．１のロールの噛み込み角は１．２８°であった。また試料Ｎｏ．２のロールの噛み込み角は２．２２°であった。また、試料Ｎｏ．１と試料Ｎｏ．２において、仕上冷間圧延時の圧延速度はおよそ１００ｍ／ｍｉｎであった。また、仕上冷間圧延に用いたロールの円周方向（ロールの回転方向）と直交する方向の粗さＲａが０．０８〜０．２５μｍの範囲内であるロールを用いた。仕上冷間圧延後には、Ｎｏ．１の試料は６００℃の温度で２分間、Ｎｏ．２の試料は６３０℃の温度で１分間歪取り焼鈍を行った。また比較例として、圧延条件を調整してロール噛み込み角を１．０°未満に調整した試料Ｎｏ．１１を作成した。試料Ｎｏ．１１の化学組成や最終板厚、歪取り焼鈍条件は試料Ｎｏ．１と同様である。The following examples illustrate the invention in more detail.
Table 1 shows the chemical composition of the metal mask material of this example. The Fe—Ni alloy of the present example was subjected to cold rolling after a step of finishing to a thickness of 2 to 3 mm by vacuum melting, hot forging, homogenizing heat treatment, and hot rolling. The Fe-Ni alloy after the hot rolling was subjected to cold rolling including annealing twice to produce an Fe-Ni alloy cold-rolled material. The thicknesses of the Fe—Ni alloy cold-rolled materials before the final pass of the finish cold rolling are 0.125 mm (sample No. 1) and 0.275 mm (sample No. 2), respectively. Sample No. 1 was 0.10 mm (20% reduction) after finish cold rolling. For No. 2, the rolling conditions were adjusted so that after finishing cold rolling, the rolling reduction was 0.20 mm (27% reduction). At this time, the sample No. The bite angle of the first roll was 1.28 °. Sample No. The bite angle of the roll No. 2 was 2.22 °. In addition, the sample No. 1 and Sample No. In No. 2, the rolling speed at the time of finish cold rolling was approximately 100 m / min. Further, a roll having a roughness Ra in a direction perpendicular to the circumferential direction (rotation direction of the roll) of the roll used for the finish cold rolling was in the range of 0.08 to 0.25 μm was used. After finish cold rolling, no. Sample No. 1 was at a temperature of 600 ° C. for 2 minutes, Sample No. 2 was annealed for 1 minute at a temperature of 630 ° C. In addition, as a comparative example, the rolling conditions were adjusted to adjust the roll bite angle to less than 1.0 °. 11 was created. Sample No. The chemical composition, final thickness, and strain relief annealing conditions of Sample No. 11 are the same as those of Sample No. 11. Same as 1.
続いて得られた試料の表面粗さと反りを測定した。表面粗さＲａ、Ｒｚ、Ｒｓｋの測定は、ＪＩＳＢ０６０１，ＪＩＳＢ０６５１で示される測定方法に従い、ランダムに３箇所を選んで長手方向と幅方向の表面粗さを測定した。測定装置には触針式粗さ計を使用し、評価長さ４ｍｍ、測定速度０．３ｍｍ／ｓ、カットオフ値０．８ｍｍの条件で測定した。表２には、３箇所の平均値を示す。また反りの測定は、長さ１５０ｍｍ、幅３０ｍｍのカットサンプルを作成し、板厚の２／５（板厚の６０％を除去）となるように片側からエッチングした後、カットサンプルを垂直上盤に吊下げた際の反り量を測定し、評価を行った。なお上記カットサンプルは、長さ方向が圧延方向となるように、作製した試料の幅方向中央部から採取した。エッチング液は塩化第二鉄水溶液を使用し、液温５０℃のエッチング液を噴霧させ試験片の腐食を実施した。結果を表２に示す。 Subsequently, the surface roughness and warpage of the obtained sample were measured. The surface roughnesses Ra, Rz, and Rsk were measured by randomly selecting three points and measuring the surface roughness in the longitudinal direction and the width direction in accordance with the measurement method shown in JIS B0601 and JIS B0651. A stylus roughness meter was used as a measuring device, and the measurement was performed under the conditions of an evaluation length of 4 mm, a measurement speed of 0.3 mm / s, and a cutoff value of 0.8 mm. Table 2 shows the average values at three locations. For the measurement of warpage, a cut sample having a length of 150 mm and a width of 30 mm was prepared and etched from one side so as to have a thickness of 2/5 (removing 60% of the thickness). Was measured and evaluated. The cut sample was collected from the center in the width direction of the manufactured sample so that the length direction was the rolling direction. The etching solution used was an aqueous ferric chloride solution, and the test piece was corroded by spraying the etching solution at a solution temperature of 50 ° C. Table 2 shows the results.
表２の結果より、本発明例のメタルマスク用素材である試料Ｎｏ．１と試料Ｎｏ．２は、良好な密着性と均一なエッチング加工性を発揮するために最適な表面状態であり、板厚の半分を超える深いエッチング後の形状変化も抑制できることが確認できた。一方で比較例である試料Ｎｏ．１１は、Ｒｓｋの幅方向が負値となっているため、密着性が本発明例よりも劣る可能性が高いことが確認できた。 From the results in Table 2, it can be seen that Sample No. which is a material for a metal mask of the present invention example was used. 1 and Sample No. No. 2 is an optimal surface state for exhibiting good adhesion and uniform etching processability, and it was confirmed that a shape change after deep etching exceeding half of the plate thickness can be suppressed. On the other hand, the sample No. As for No. 11, since the width direction of Rsk was a negative value, it was confirmed that there is a high possibility that the adhesiveness is inferior to the examples of the present invention.
（実施例２）
次に、試料Ｎｏ．１および試料Ｎｏ．２の長さ１５０ｍｍ、幅３０ｍｍのカットサンプルを複数準備し、エッチングの除去量を表３に示すように変更した本発明例の試料Ｎｏ．３〜８を作成し、反り量の測定を行った。表３において、試料Ｎｏ．３〜５が試料Ｎｏ．１から作成した試料であり、試料Ｎｏ．６〜８が試料Ｎｏ．２から作成した試料である。反り量の測定方法や使用したエッチング液は、実施例１で使用したものと同様である。結果を表３に示す。(Example 2)
Next, the sample No. 1 and sample no. A plurality of cut samples having a length of 150 mm and a width of 30 mm were prepared. Nos. 3 to 8 were prepared, and the amount of warpage was measured. In Table 3, the sample No. Sample Nos. 3 to 5 are sample Nos. Sample No. 1 was prepared from Sample No. 1. Sample Nos. 6 to 8 are sample Nos. 2 is a sample prepared from FIG. The method for measuring the amount of warpage and the etching solution used are the same as those used in Example 1. Table 3 shows the results.
表３の結果より、本発明のメタルマスク用素材は、エッチング深さを変更しても、反り量を抑制できることを確認した。特にエッチングによる素材の除去量が板厚の５０％の場合、圧縮残留応力と引張残留応力のバランスが崩れ、過大な反りが発生しやすい傾向にあるが、本発明例の素材には過大な反りは発生せず、エッチング用途に適することが確認できた。さらに、試料Ｎｏ．３〜５は、試料Ｎｏ．６〜８よりも反りが少ないことが確認できた。これは試料作製時において、試料Ｎｏ．６〜８の歪取り焼鈍時間が試料Ｎｏ．３〜５よりも短いため、残存する歪み量がわずかに大きくなったためと考えられる。 From the results in Table 3, it was confirmed that the metal mask material of the present invention can suppress the amount of warpage even when the etching depth is changed. In particular, when the removal amount of the material by etching is 50% of the plate thickness, the balance between the compressive residual stress and the tensile residual stress is broken, and excessive warpage tends to occur. No occurrence was observed, and it was confirmed that the film was suitable for etching applications. Further, the sample No. Sample Nos. 3 to 5 are sample Nos. It was confirmed that warpage was smaller than that of 6 to 8. This is because the sample No. Sample No. 6 to 8 for the strain relief annealing time. It is considered that, since the length is shorter than 3 to 5, the amount of remaining distortion slightly increased.
Claims (10)
前記メタルマスク用素材は、圧延方向における表面粗さと圧延方向と直交する方向における表面粗さとがともに、０．０５μｍ≦Ｒａ≦０．２５μｍ、Ｒｚ≦１．５μｍ以下であり、
前記メタルマスク用素材は、圧延方向と直交する方向におけるスキューネスＲｓｋが０以上であり、
前記メタルマスク用素材から長さ１５０ｍｍ、幅３０ｍｍの試料を切り出し、前記試料を片側からエッチングし、前記試料の板厚の６０％を除去したときの反り量が１５ｍｍ以下であり、板厚が０．１０ｍｍ以上０．５ｍｍ以下であるメタルマスク用素材。For a metal mask containing, by mass%, C: 0.01% or less, Si: 0.5% or less, Mn: 1.0% or less, Ni: 30 to 50%, and the balance being Fe and unavoidable impurities. Material
In the metal mask material, the surface roughness in the rolling direction and the surface roughness in a direction perpendicular to the rolling direction are both 0.05 μm ≦ Ra ≦ 0.25 μm and Rz ≦ 1.5 μm or less,
The metal mask material has a skewness Rsk of 0 or more in a direction perpendicular to the rolling direction,
A sample having a length of 150 mm and a width of 30 mm was cut out from the metal mask material, the sample was etched from one side, and the amount of warpage when 60% of the sample thickness was removed was 15 mm or less. A metal mask material having a size of 10 mm or more and 0.5 mm or less.
前記冷間圧延用素材に対する仕上冷間圧延工程における最終パスの条件が、圧下率：３５％以下、圧延ロールの噛み込み角：１．０°以上であり、
前記メタルマスク用素材は、圧延方向における表面粗さと圧延方向と直交する方向における表面粗さとがともに、０．０５μｍ≦Ｒａ≦０．２５μｍ、Ｒｚ≦１．５μｍ以下であり、圧延方向と直交する方向におけるスキューネスＲｓｋが０以上であるとともに、
前記メタルマスク用素材から長さ１５０ｍｍ、幅３０ｍｍの試料を切り出し、前記試料を片側からエッチングし、前記試料の板厚の６０％を除去したときの反り量が１５ｍｍ以下であり、
仕上冷間圧延後の素材の板厚が０．１０ｍｍ以上０．５ｍｍ以下であることを特徴とするメタルマスク用素材の製造方法。Cold rolling in which, by mass%, C: 0.01% or less, Si: 0.5% or less, Mn: 1.0% or less, Ni: 30 to 50%, the balance being Fe and unavoidable impurities A method for producing a metal mask material by cold rolling the material for use to obtain a metal mask material,
The conditions of the final pass in the finish cold rolling step for the cold rolling material are as follows: rolling reduction: 35% or less, biting angle of rolling roll: 1.0 ° or more,
The metal mask material has a surface roughness in a rolling direction and a surface roughness in a direction perpendicular to the rolling direction, both of which are 0.05 μm ≦ Ra ≦ 0.25 μm and Rz ≦ 1.5 μm or less, and are orthogonal to the rolling direction. The skewness Rsk in the direction is 0 or more,
A sample having a length of 150 mm and a width of 30 mm is cut out from the metal mask material, the sample is etched from one side, and the amount of warpage when 60% of the plate thickness of the sample is removed is 15 mm or less,
A method for producing a material for a metal mask, wherein the thickness of the material after finish cold rolling is 0.10 mm or more and 0.5 mm or less.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016169881 | 2016-08-31 | ||
| JP2016169881 | 2016-08-31 | ||
| PCT/JP2017/031349 WO2018043642A1 (en) | 2016-08-31 | 2017-08-31 | Metal mask material and production method therefor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2018043642A1 JPWO2018043642A1 (en) | 2019-06-24 |
| JP6646882B2 true JP6646882B2 (en) | 2020-02-14 |
Family
ID=61301875
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018537395A Active JP6646882B2 (en) | 2016-08-31 | 2017-08-31 | Material for metal mask and manufacturing method thereof |
Country Status (5)
| Country | Link |
|---|---|
| EP (1) | EP3508285B1 (en) |
| JP (1) | JP6646882B2 (en) |
| KR (1) | KR102164912B1 (en) |
| CN (1) | CN109641248B (en) |
| WO (1) | WO2018043642A1 (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114752891B (en) * | 2017-09-07 | 2023-11-14 | Lg伊诺特有限公司 | Deposition mask |
| CN117187746A (en) | 2017-11-14 | 2023-12-08 | 大日本印刷株式会社 | Method for manufacturing metal plate and method for manufacturing vapor deposition mask |
| JP6704540B1 (en) * | 2018-09-27 | 2020-06-03 | 日鉄ケミカル＆マテリアル株式会社 | Metal mask material, manufacturing method thereof, and metal mask |
| KR20210042026A (en) * | 2019-10-08 | 2021-04-16 | 다이니폰 인사츠 가부시키가이샤 | Metal plate for producing vapor deposition mask, production method for metal plate, vapor deposition mask and production method for vapor deposition mask |
| JP6888128B1 (en) * | 2020-01-30 | 2021-06-16 | 凸版印刷株式会社 | Vapor deposition mask |
| JP2021192914A (en) * | 2020-06-08 | 2021-12-23 | 浜松ホトニクス株式会社 | Method for manufacturing workpiece, workpiece, and processing device |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0826437B2 (en) * | 1990-08-22 | 1996-03-13 | 日本鋼管株式会社 | Fe-Ni alloy thin plate for shadow mask and method for manufacturing the same |
| JP2842022B2 (en) * | 1992-02-13 | 1998-12-24 | 日本鋼管株式会社 | Thin plate for Fe-Ni-based shadow mask and method for producing the same |
| JP3128422B2 (en) * | 1994-03-14 | 2001-01-29 | 新日本製鐵株式会社 | Fe-Ni alloy sheet for shadow mask and method for producing the same |
| JP3487471B2 (en) * | 1996-01-30 | 2004-01-19 | 日立金属株式会社 | Fe-Ni alloy thin plate with excellent etching processability |
| JPH09262603A (en) * | 1996-03-28 | 1997-10-07 | Nippon Yakin Kogyo Co Ltd | Metallic sheet for shadow mask and its manufacture |
| JP2002294407A (en) * | 2001-03-30 | 2002-10-09 | Nippon Mining & Metals Co Ltd | Material with high surface cleanliness for shadow mask |
| JP2005144466A (en) * | 2003-11-12 | 2005-06-09 | Jfe Steel Kk | Manufacturing method of iron-nickel based alloy thin sheet for shadow mask with excellent etching performance |
| JP5294072B2 (en) * | 2009-03-18 | 2013-09-18 | 日立金属株式会社 | Etching material manufacturing method and etching material |
| JP5721691B2 (en) | 2012-11-20 | 2015-05-20 | Jx日鉱日石金属株式会社 | Metal mask material and metal mask |
| CN104981931B (en) * | 2013-02-01 | 2017-06-09 | 新日铁住金株式会社 | The fuel cell separator part of contact electric conductivity and excellent in te pins of durability to carbon titanium material or titanium alloy material, fuel cell separator part and fuel cell using it |
| JP2015193871A (en) * | 2014-03-31 | 2015-11-05 | 日立金属株式会社 | Fe-Ni-BASED ALLOY THIN SHEET AND MANUFACTURING METHOD THEREFOR |
| JP6628082B2 (en) * | 2015-01-20 | 2020-01-08 | 日立金属株式会社 | Method for producing Fe-Ni alloy thin plate |
-
2017
- 2017-08-31 WO PCT/JP2017/031349 patent/WO2018043642A1/en unknown
- 2017-08-31 KR KR1020197005481A patent/KR102164912B1/en active IP Right Grant
- 2017-08-31 CN CN201780052365.0A patent/CN109641248B/en active Active
- 2017-08-31 JP JP2018537395A patent/JP6646882B2/en active Active
- 2017-08-31 EP EP17846646.2A patent/EP3508285B1/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| EP3508285B1 (en) | 2021-09-29 |
| KR102164912B1 (en) | 2020-10-13 |
| EP3508285A4 (en) | 2020-05-13 |
| CN109641248A (en) | 2019-04-16 |
| KR20190030754A (en) | 2019-03-22 |
| JPWO2018043642A1 (en) | 2019-06-24 |
| CN109641248B (en) | 2021-04-06 |
| EP3508285A1 (en) | 2019-07-10 |
| WO2018043642A1 (en) | 2018-03-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP6646882B2 (en) | Material for metal mask and manufacturing method thereof | |
| JP5294072B2 (en) | Etching material manufacturing method and etching material | |
| JP6598007B2 (en) | Method for producing Fe-Ni alloy thin sheet | |
| JP6855895B2 (en) | Non-oriented electrical steel sheet and its manufacturing method | |
| JP6729679B2 (en) | Martensitic stainless steel foil and method for producing the same | |
| JP6807038B2 (en) | Material for metal mask and its manufacturing method | |
| JP2021014639A (en) | PRODUCING METHOD OF Fe-Ni ALLOY SHEET | |
| JP7156279B2 (en) | METHOD FOR MANUFACTURING METAL MASK THIN PLATE AND METHOD FOR METAL MASK SLIM | |
| JP2018178198A (en) | Nonoriented electromagnetic steel sheet and manufacturing method therefor | |
| JP6424875B2 (en) | Directional electromagnetic steel sheet and method of manufacturing the same | |
| JP3348565B2 (en) | Method of producing Fe-Ni-based alloy thin plate for electronic parts and Fe-Ni-Co-based alloy thin plate excellent in degreasing property | |
| JP5928396B2 (en) | Method for producing high carbon hot-rolled steel sheet for cold rolling | |
| JP5943105B2 (en) | Steel sheet and manufacturing method thereof | |
| WO2024070489A1 (en) | Non-oriented electromagnetic steel sheet and method for manufacturing non-oriented electromagnetic steel sheet | |
| JP2015004095A (en) | Aluminum alloy sheet for can body and production method thereof | |
| JP2018062684A (en) | PRODUCTION METHOD OF Fe-Ni-BASED ALLOY THIN SHEET, AND Fe-Ni-BASED ALLOY THIN SHEET | |
| KR20120127097A (en) | Method and apparatus for manufacturing drawn wire rod for saw wire having excellent abrasion resistance |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20190312 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20191212 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20191225 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 6646882 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
| S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |