JP6528161B1 - Reflector for discharge lamp, and light emitting apparatus and exposure apparatus using the same - Google Patents

Reflector for discharge lamp, and light emitting apparatus and exposure apparatus using the same Download PDF

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JP6528161B1
JP6528161B1 JP2018170819A JP2018170819A JP6528161B1 JP 6528161 B1 JP6528161 B1 JP 6528161B1 JP 2018170819 A JP2018170819 A JP 2018170819A JP 2018170819 A JP2018170819 A JP 2018170819A JP 6528161 B1 JP6528161 B1 JP 6528161B1
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reflector
discharge lamp
light emitting
corner
opening
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JP2020043012A (en
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池田　富彦
富彦 池田
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Phoenix Electric Co Ltd
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Priority to KR1020190098229A priority patent/KR20200030446A/en
Priority to CN201910773190.3A priority patent/CN110534399A/en
Priority to TW108131939A priority patent/TWI682125B/en
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V17/00—Fastening of component parts of lighting devices, e.g. shades, globes, refractors, reflectors, filters, screens, grids or protective cages
    • F21V17/10—Fastening of component parts of lighting devices, e.g. shades, globes, refractors, reflectors, filters, screens, grids or protective cages characterised by specific fastening means or way of fastening
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V7/00—Reflectors for light sources
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V7/00—Reflectors for light sources
    • F21V7/04—Optical design
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/025—Associated optical elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34

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  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Securing Globes, Refractors, Reflectors Or The Like (AREA)

Abstract

【課題】位置決め精度の高い、放電灯用のリフレクタを提供する。【解決手段】放電灯７０が配設される、開口２３を有する椀状の反射面２２と、反射面２２の開口２３側の端部に形成された、少なくとも１つの角部２８を有する鍔部１６とでリフレクタ１０を構成する。そして、角部２８の開口２３側の端面における、端縁３４と反射面２２の開口２３との間に、反射面２２の底部から開口２３に向かう方向と同方向の段差３４を形成する。【選択図】図２An object of the present invention is to provide a reflector for a discharge lamp with high positioning accuracy. SOLUTION: A bowl-shaped reflection surface 22 having an opening 23, in which a discharge lamp 70 is disposed, and a ridge part having at least one corner 28 formed at an end on the opening 23 side of the reflection surface 22 A reflector 10 is composed of 16. Then, a step 34 in the same direction as the direction from the bottom of the reflecting surface 22 to the opening 23 is formed between the edge 34 and the opening 23 of the reflecting surface 22 at the end face on the opening 23 side of the corner 28. [Selected figure] Figure 2

Description

本発明は、例えば、露光装置等に用いられる多灯式の照明装置に使用される放電灯用のリフレクタに関する。   BACKGROUND OF THE INVENTION Field of the Invention The present invention relates to a reflector for a discharge lamp used in, for example, a multi-lamp illumination device used in an exposure apparatus and the like.

従前より、複数の放電灯を使用した照明装置が露光装置等に用いられている。（例えば、特許文献１）。   Conventionally, illumination devices using a plurality of discharge lamps have been used for exposure devices and the like. (For example, patent document 1).

特許文献１に係る照明装置では、放電灯と組み合わせて用いられるリフレクタの開口端側の角部を支持枠部材に当接させることによって当該リフレクタの正確な位置決めを行い、その結果、放電灯の点灯位置が所定の場所に位置決めできるようになっている。   In the lighting device according to Patent Document 1, accurate positioning of the reflector is performed by bringing the corner portion on the opening end side of the reflector used in combination with the discharge lamp into contact with the support frame member, and as a result, lighting of the discharge lamp The position can be positioned at a predetermined place.

特開２００７−１１５８１７号公報JP, 2007-115817, A

しかしながら、上述した従前からの位置決め手法では、位置決め精度に限界があることがわかった。なぜならば、一般にリフレクタは金型を用いて製造されており、この金型の合わせ面がリフレクタの開口端側における角部の側面に対応する位置に設けられることが多いことから、リフレクタにおけるこの「開口端側における角部の側面」（図１２における矢印を参照）にバリが出てしまう。このため、このバリの大きさがそのままリフレクタに組み合わされた放電灯の位置の公差となっている。   However, it has been found that the conventional positioning method described above has a limit in positioning accuracy. This is because, in general, the reflector is manufactured using a mold, and the mold mating surface is often provided at a position corresponding to the side surface of the corner on the opening end side of the reflector. A burr comes out on the side surface of the corner on the open end side (see the arrow in FIG. 12). For this reason, the size of the burr directly becomes the tolerance of the position of the discharge lamp combined with the reflector.

本発明は、前述した問題に鑑みてなされたものであり、その目的は、位置決め精度の高い、放電灯用のリフレクタ、およびそれを用いた発光装置を提供することにある。   The present invention has been made in view of the above-mentioned problems, and an object thereof is to provide a reflector for a discharge lamp having high positioning accuracy, and a light emitting device using the same.

本発明の一局面によれば、
放電灯が配設される、開口を有する椀状の反射面と、
前記反射面の前記開口側の端部に形成された、少なくとも１つの角部を有する鍔部とを備えるリフレクタであって、
前記角部の前記開口側の端面における、端縁と前記反射面の前記開口との間には、前記反射面の底部から前記開口に向かう方向と同方向の段差が形成されており、
前記段差は、前記方向に直交する平面で見たとき、前記鍔部における前記角部の外形を規定する下辺から右辺に至る線状に形成されており、
前記角部の前記開口側の前記端面において、前記段差を挟んで前記開口側の前記端面の高さが、前記角部の前記端縁側の前記端面の高さに比べて高いことを特徴とするリフレクタが提供される。
According to one aspect of the invention,
A bowl-shaped reflecting surface having an opening, in which a discharge lamp is disposed;
A reflector having at least one corner formed at an end on the opening side of the reflecting surface;
A step is formed in the same direction as the direction from the bottom of the reflection surface toward the opening, between the edge of the end of the corner on the opening side and the opening of the reflection surface.
The step is formed in a line extending from the lower side to the right side which defines the outer shape of the corner portion in the ridge portion when viewed in a plane orthogonal to the direction .
In the end face on the opening side of the corner, the height of the end face on the opening side across the step is higher than the height of the end face on the end edge side of the corner. A reflector is provided .

好適には、前記段差の端縁は、直線状に形成されている。   Preferably, the edge of the step is formed in a straight line.

好適には、前記段差の端縁は、円弧状に形成されている。   Preferably, an edge of the step is formed in an arc shape.

本発明の他の局面によれば、
上述したリフレクタと、放電灯とを備える発光装置が提供される。
さらに、本発明の他の局面によれば、
上述した発光装置を備える、露光装置が提供される。 According to another aspect of the invention,
There is provided a light emitting device comprising the above-described reflector and a discharge lamp.
Furthermore, according to another aspect of the present invention,
An exposure apparatus is provided that includes the light emitting device described above.

本発明のように、反射面の開口端側における角部における、当該角部の端縁と開口端との間に段差を形成することにより、リフレクタの角部の側面にバリが形成される場合であっても、側面よりも内側（反射面の開口側）に形成される段差３４の面にはバリを生じさせないようにできる。   In the case where a burr is formed on the side surface of the corner of the reflector by forming a step between the edge of the corner and the opening end at the corner on the opening end side of the reflecting surface as in the present invention Even in this case, it is possible to prevent burrs on the surface of the step 34 formed on the inner side (the opening side of the reflective surface) than the side surface.

このようにバリがなく、高い寸法精度で形成できる段差面を当り面として使用することにより、リフレクタおよび放電灯の位置決め精度をより高めることができる。   The positioning accuracy of the reflector and the discharge lamp can be further enhanced by using a stepped surface which can be formed with high dimensional accuracy without burrs as a contact surface.

実施形態に係るリフレクタ１０を示す斜視図である。It is a perspective view showing reflector 10 concerning an embodiment. 実施形態に係るリフレクタ１０および放電灯７０を示す正面図である。It is a front view which shows the reflector 10 and the discharge lamp 70 which concern on embodiment. 実施形態に係るリフレクタ１０を示す背面図である。It is a rear view showing reflector 10 concerning an embodiment. 実施形態に係るリフレクタ１０を示す平面図である。It is a top view showing reflector 10 concerning an embodiment. 段差３４が形成された角部２８を拡大した斜視図である。It is the perspective view which expanded the corner 28 in which the level | step difference 34 was formed. 放電灯７０の一例を示す断面図である。5 is a cross-sectional view showing an example of a discharge lamp 70. FIG. 複数の発光装置６０が取り付けられる発光装置台１００の一例を示す図である。It is a figure which shows an example of the light-emitting device stand 100 to which several light-emitting devices 60 are attached. 発光装置台１００に設けられた取付孔１０２と、発光装置６０との関係を示す図である。It is a figure which shows the relationship between the attachment hole 102 provided in the light-emitting device stand 100, and the light-emitting device 60. FIG. 発光装置台１００に対して位置決めされたときの発光装置６０と、取付孔１０２との関係を示す図である。It is a figure which shows the relationship between the light-emitting device 60 and the attachment hole 102 when positioning with respect to the light-emitting device stand 100. FIG. 変形例１に係るリフレクタ１０を示す正面図である。It is a front view which shows the reflector 10 which concerns on the modification 1. FIG. 変形例２に係るリフレクタ１０を示す正面図である。It is a front view which shows the reflector 10 which concerns on the modification 2. FIG. リフレクタ１０の開口端側における角部の側面に形成された「バリ」を示す斜視図である。It is a perspective view which shows the "burr" formed in the side of the corner | angular part in the opening end side of the reflector 10. FIG.

（リフレクタ１０の構造）
本発明が適用されたリフレクタ１０について、図面を用いて説明する。図１は本実施形態に係るリフレクタ１０を示す斜視図であり、図２は同じリフレクタ１０を示す正面図である。また、図３は本実施形態に係るリフレクタ１０を示す背面図であり、図４は同じリフレクタ１０を示す平面図である。 (Structure of reflector 10)
The reflector 10 to which the present invention is applied will be described using the drawings. FIG. 1 is a perspective view showing a reflector 10 according to the present embodiment, and FIG. 2 is a front view showing the same reflector 10. Moreover, FIG. 3 is a rear view which shows the reflector 10 which concerns on this embodiment, FIG. 4: is a top view which shows the same reflector 10. FIG.

リフレクタ１０は、大略、本体部１２と、頸部１４と、鍔部１６と、給電部１８とを備えている。   The reflector 10 generally includes a main body 12, a neck 14, a collar 16, and a power supply 18.

本体部１２は、内側に凹所２０を有する椀状の部分であり、凹所２０の内面は、このリフレクタ１０に組み合わせて使用される放電灯７０から放出される光の一部を反射させる椀状の反射面２２となっている。本実施形態において、反射面２２は回転放物面で規定されているが、反射面２２の形状はこれに限定されるものではなく、回転楕円面であってもよいし、他の回転面であってもよく、また、多数のファセット（小領域）で反射面２２を構成してもよい。なお、反射面２２を規定する回転放物面の回転軸をリフレクタ１０の中心軸ＣＬという。   The main body portion 12 is a bowl-like portion having a recess 20 inside, and the inner surface of the recess 20 reflects a portion of the light emitted from the discharge lamp 70 used in combination with the reflector 10 The reflection surface 22 is shaped like a circle. In the present embodiment, the reflecting surface 22 is defined by a paraboloid of revolution, but the shape of the reflecting surface 22 is not limited to this, and may be an ellipsoid of revolution, or other rotating surfaces. The reflecting surface 22 may be composed of a large number of facets (small areas). The rotation axis of the paraboloid of revolution defining the reflection surface 22 is referred to as a central axis CL of the reflector 10.

また、放電灯７０から放出される光の一部は、上述のように反射面２２で反射した後、開口２３から外部へ放出され、残りの光は反射面２２で反射することなく当該開口２３から直接外部へ放出される。   In addition, a part of the light emitted from the discharge lamp 70 is reflected by the reflecting surface 22 as described above and then emitted from the opening 23 to the outside, and the remaining light is not reflected by the reflecting surface 22 but the opening 23 Released directly from the outside.

頸部１４は、本体部１２の底部から突設された略円柱状の部分であり、その中央部に放電灯７０を取り付ける放電灯挿設孔２４が形成されている。この放電灯挿設孔２４は、本体部１２における反射面２２の底部に接続している。つまり、反射面２２の底部と外部とは、放電灯挿設孔２４を介して互いに連通している。   The neck portion 14 is a substantially cylindrical portion protruding from the bottom portion of the main body portion 12, and a discharge lamp insertion hole 24 to which the discharge lamp 70 is attached is formed at a central portion thereof. The discharge lamp insertion hole 24 is connected to the bottom of the reflection surface 22 of the main body 12. That is, the bottom of the reflective surface 22 and the outside communicate with each other through the discharge lamp insertion hole 24.

鍔部１６は、本体部１２における開口２３側の端部に形成された、中心軸ＣＬと略直交する方向に張り出した部分である。本実施形態では、鍔部１６の外形は略四角形に形成されている（特に、図２を参照）。具体的いうと、この略四角形は、３つの角部２８と、１つの湾曲部３０とで構成されている。   The collar portion 16 is a portion formed at an end portion of the main body portion 12 on the opening 23 side and protruding in a direction substantially orthogonal to the central axis CL. In the present embodiment, the outer shape of the collar portion 16 is formed in a substantially rectangular shape (in particular, refer to FIG. 2). Specifically, this substantially rectangular shape is configured by three corner portions 28 and one curved portion 30.

なお、本実施形態のように、３つの角部２８と１つの湾曲部３０とで略四角形の鍔部１６を構成するのはあくまで一例であり、少なくとも１つの角部２８があればどのような形態で鍔部１６を構成してもよい。   As in the present embodiment, it is merely an example that the substantially square ridge portion 16 is configured by the three corner portions 28 and one curved portion 30, and what is the case if there is at least one corner portion 28 You may comprise the collar part 16 in a form.

本実施形態における鍔部１６を構成する３つの角部２８のうちのひとつ（図２における右下の角部２８）に注目すると、図５に示すように、当該角部２８における開口２３側の端面である開口端面３３には、角部２８における端縁３２と、反射面２２の開口２３との間に、リフレクタ１０の中心軸ＣＬ（反射面２２の底部から開口２３に向かう方向の軸）と同方向の段差３４が形成されている。なお、「同方向」とは、中心軸ＣＬと段差３４とが完全に平行である状態のみならず、中心軸ＣＬと段差３４との間で多少の角度を有している場合も含む意味である。   Focusing on one (the lower right corner 28 in FIG. 2) of the three corners 28 forming the ridge 16 in the present embodiment, as shown in FIG. A central axis CL of the reflector 10 (an axis in a direction from the bottom of the reflecting surface 22 to the opening 23) between the edge 32 of the corner 28 and the opening 23 of the reflecting surface 22 on the opening end surface 33 which is an end surface A step 34 in the same direction is formed. Note that “the same direction” does not mean that the central axis CL and the step 34 are completely parallel, but also includes the case where the central axis CL and the step 34 have a slight angle. is there.

また、この段差３４における端縁３６は、リフレクタ１０の中心軸ＣＬに直交する平面でみたとき（図２を参照）、リフレクタ１０における鍔部１６の外形を規定する図中下辺３８から図中右辺４０に至る直線状に形成されている。   Further, when viewed from a plane perpendicular to the central axis CL of the reflector 10 (see FIG. 2), the edge 36 of the step 34 defines the outer shape of the ridge portion 16 of the reflector 10 from the lower side 38 to the right side in the drawing. It is formed in a straight line up to 40.

給電部１８は、リフレクタ１０に組み合わせた放電灯７０における一方の電極（反射面２２側に位置する電極）に給電するための給電線を通す部分であり、給電部本体４２と、給電線挿通孔４４とを有している。   The feeding portion 18 is a portion for passing a feeding line for feeding power to one electrode (electrode located on the reflecting surface 22 side) in the discharge lamp 70 combined with the reflector 10, and the feeding portion main body 42 and the feeding line insertion hole And 44.

給電部本体４２は、本体部１２の外面（反射面２２が形成されているのと反対側の面）に形成されており、その内部と給電線挿通孔４４とが互いに連通している。   The feeding portion main body 42 is formed on the outer surface of the main portion 12 (the surface opposite to the surface on which the reflecting surface 22 is formed), and the inside thereof and the feeding line insertion hole 44 communicate with each other.

給電線挿通孔４４は、給電部本体４２の内部と、リフレクタ１０の反射面２２の内側とを互いに連通する孔である。   The feed line insertion hole 44 is a hole that allows the inside of the feed portion main body 42 and the inside of the reflection surface 22 of the reflector 10 to communicate with each other.

上述したリフレクタ１０と組み合わせて発光装置６０を構成する放電灯７０は、図６に示すように、発光管部７２と、当該発光管部７２から延出する一対のシール部７４とを有している。発光管部７２および一対のシール部７４は、石英ガラスで一体的に形成されている。さらに、発光管部７２内には、シール部７４によって密閉された内部空間７６が形成されている。   The discharge lamp 70 constituting the light emitting device 60 in combination with the above-described reflector 10 has a light emitting tube portion 72 and a pair of seal portions 74 extending from the light emitting tube portion 72, as shown in FIG. There is. The light emitting tube portion 72 and the pair of seal portions 74 are integrally formed of quartz glass. Further, an internal space 76 sealed by the seal portion 74 is formed in the light emitting tube portion 72.

放電灯７０の各シール部７４内には、埋設されたモリブデン製の箔７８と、一端が箔７８の一方端部に接続されているとともに他端が内部空間７６内に配置されたタングステン製の一対の電極８０と、一端が箔７８の他方端部に接続されているとともに他端がシール部７４から外部へ延出する一対のリード棒８２とがそれぞれ設けられている。また、内部空間７６には、所定量の水銀８４およびハロゲン（例えば臭素）が封入されている。   In each seal portion 74 of the discharge lamp 70, a buried foil 78 made of molybdenum and one end connected to one end of the foil 78 and the other end made of tungsten disposed in the internal space 76 A pair of electrodes 80 and a pair of lead rods 82 each having one end connected to the other end of the foil 78 and the other end extending from the seal portion 74 to the outside are provided. Further, in the internal space 76, predetermined amounts of mercury 84 and halogen (for example, bromine) are enclosed.

放電灯７０に設けられた一対のリード棒８２に所定の高電圧を印加すると、発光管部７２の内部空間７６に設けられた一対の電極８０間で開始したグロー放電がアーク放電に移行し、このアークによって蒸発および励起された水銀８４によって光（主に紫外線）が放射される。   When a predetermined high voltage is applied to the pair of lead rods 82 provided in the discharge lamp 70, the glow discharge initiated between the pair of electrodes 80 provided in the internal space 76 of the light emitting tube 72 shifts to arc discharge, Light (mainly ultraviolet) is emitted by the mercury 84 evaporated and excited by the arc.

（リフレクタ１０の位置決め方法）
次に、所定の位置に放電灯７０を組み合わせた状態で、発光装置台１００に対してリフレクタ１０を位置決めする方法について、簡単に説明する。 (Positioning method of reflector 10)
Next, a method of positioning the reflector 10 with respect to the light emitting device stand 100 in a state where the discharge lamp 70 is combined at a predetermined position will be briefly described.

複数の発光装置６０（リフレクタ１０と放電灯７０とが互いに組み合わされた状態のもの。以下同じ。）を正しい位置に設置するための発光装置台１００は、図７に示すように、リフレクタ１０を取り付けるための取付孔１０２が複数形成されている。また、図８に示すように、当該取付孔１０２の底部には、リフレクタ１０における鍔部１６の開口端面３３を当接させることによって発光装置台１００に対するリフレクタ１０の中心軸ＣＬ方向の位置を決めるための位置決め面１０４が形成されている。なお、複数の発光装置６０を発光装置台１００に組み込むことにより、露光装置が構成される。   As shown in FIG. 7, the light emitting device stand 100 for installing the plurality of light emitting devices 60 (in a state where the reflector 10 and the discharge lamp 70 are combined with each other, the same applies in the same manner) is correct. A plurality of mounting holes 102 for mounting are formed. Further, as shown in FIG. 8, the position of the central axis CL direction of the reflector 10 with respect to the light emitting device stand 100 is determined by bringing the open end face 33 of the flange portion 16 of the reflector 10 into contact with the bottom of the mounting hole 102. Positioning surface 104 is formed. An exposure apparatus is configured by incorporating a plurality of light emitting devices 60 into the light emitting device stand 100.

さらに、この位置決め面１０４の隅部（図中左下部）には、発光装置台１００に対するリフレクタ１０の中心軸ＣＬに直交する方向の位置決めをするための位置決め凸部１０６が形成されている。この位置決め凸部１０６は、リフレクタ１０の段差３４の高さと同じかやや低い寸法で位置決め面１０４から凸設されている。   Further, at a corner (lower left portion in the figure) of the positioning surface 104, a positioning convex portion 106 for positioning in a direction orthogonal to the central axis CL of the reflector 10 with respect to the light emitting device stand 100 is formed. The positioning convex portion 106 is provided so as to protrude from the positioning surface 104 with a dimension equal to or slightly lower than the height of the step 34 of the reflector 10.

上述のようにリフレクタ１０における鍔部１６の開口端面３３を位置決め面１０４に当接させた後、図９に示すように、リフレクタ１０を含む発光装置６０を位置決め凸部１０６が形成されている図中左下方に移動させていく。そして、位置決め凸部１０６がリフレクタ１０の角部２８に形成された段差３４に当接するまでリフレクタ１０を移動させることにより、発光装置台１００に対するリフレクタ１０の位置決めが完了する。   After bringing the open end face 33 of the collar portion 16 of the reflector 10 into contact with the positioning surface 104 as described above, as shown in FIG. 9, the light emitting device 60 including the reflector 10 is formed with the positioning convex portion 106 Move the lower left middle. Then, by moving the reflector 10 until the positioning convex portion 106 abuts on the step 34 formed on the corner 28 of the reflector 10, the positioning of the reflector 10 with respect to the light emitting device stand 100 is completed.

位置決め凸部１０６がリフレクタ１０の段差３４に当接しているときのリフレクタ１０や放電灯７０の位置を予め正確な位置に設定しておくことにより、リフレクタ１０の角部２８の端縁（側面）３２にバリが形成される場合であっても、端縁（側面）３２よりも内側（反射面２２の開口２３側）に形成される段差３４の面にはバリを生じさせないようにできるので、高い寸法精度で形成できる段差３４を当り面として使用することにより、リフレクタ１０および放電灯７０の位置決め精度をより高めることができる。   By setting the positions of the reflector 10 and the discharge lamp 70 when the positioning convex portion 106 is in contact with the step 34 of the reflector 10 at an accurate position in advance, the edge (side surface) of the corner 28 of the reflector 10 Even when burrs are formed on the surface 32, the surface of the step 34 formed on the inner side (the side of the opening 23 of the reflective surface 22) of the edge (side surface) 32 can be prevented from generating burrs. The positioning accuracy of the reflector 10 and the discharge lamp 70 can be further enhanced by using the step 34 which can be formed with high dimensional accuracy as the contact surface.

つまり、本実施形態に係る、段差３４を有するリフレクタ１０を有する発光装置６０と、位置決め凸部１０６を有する発光装置台１００とを用いることにより、当該位置決め凸部１０６がリフレクタ１０の角部２８に形成された段差３４に当接するまでリフレクタ１０を移動させる、放電灯７０（リフレクタ１０）の位置決め方法を実施できる。   That is, by using the light emitting device 60 having the reflector 10 having the step 34 and the light emitting device stand 100 having the positioning convex portion 106 according to the present embodiment, the positioning convex portion 106 can be used as the corner 28 of the reflector 10. The positioning method of the discharge lamp 70 (reflector 10) can be implemented in which the reflector 10 is moved until it abuts on the formed step 34.

また、発光装置台１００に対して、万一、段差３４が形成されていない従来の発光装置が装着された場合、位置決め凸部１０６が干渉して当該発光装置を正しく位置決めできず光軸がずれてしまうことにより、露光面における照度が不足するおそれがある。このように、段差３４を有するリフレクタ１０を含む発光装置６０と、位置決め凸部１０６を有する発光装置台１００とを組み合わせて用いることにより、誤って予定外の発光装置を使用して露光不良等の不具合が生じるのを回避できる。   In addition, if a conventional light emitting device in which the step 34 is not formed is mounted to the light emitting device stand 100, the positioning convex portion 106 interferes and the light emitting device can not be positioned correctly, and the optical axis is deviated. By doing so, the illuminance on the exposure surface may be insufficient. Thus, by using the light emitting device 60 including the reflector 10 having the step 34 and the light emitting device base 100 having the positioning convex portion 106 in combination, it is possible to erroneously use an unintended light emitting device to prevent exposure defects etc. It is possible to avoid the occurrence of a defect.

（変形例１）
上述した実施形態では、段差３４における端縁３６は直線状に形成されていたが、これに変えて、図１０に示すように、当該端縁３６を鍔部１６の外形を規定する図中下辺３８から図中右辺４０に至る円弧状に形成してもよい。 (Modification 1)
In the embodiment described above, the edge 36 of the step 34 is formed in a straight line, but instead, as shown in FIG. 10, the lower edge in the figure defining the outer shape of the flange 16 as shown in FIG. It may be formed in an arc shape from 38 to the right side 40 in the figure.

このように円弧状に形成した場合であっても、当該リフレクタ１０を発光装置台１００の所定の位置に位置決めする際に、位置決め凸部１０６を円弧状の段差３４の所定位置に当接させることにより、リフレクタ１０および放電灯７０を正確な位置に位置決めできる。   Even when the arc 10 is formed in this manner, when positioning the reflector 10 at a predetermined position of the light emitting device stand 100, the positioning convex portion 106 is brought into contact with the predetermined position of the arc-shaped step 34. Thus, the reflector 10 and the discharge lamp 70 can be positioned at accurate positions.

（変形例２）
また、図１１に示すように、リフレクタ１０における鍔部１６を４つの角部２８で構成し、さらに、段差３４を形成しない残り３つの角部２８の開口端面３３にそれぞれ当接凸部５０を形成してもよい。 (Modification 2)
Further, as shown in FIG. 11, the ridge portion 16 in the reflector 10 is configured by four corner portions 28, and the contact convex portions 50 are respectively formed on the open end faces 33 of the remaining three corner portions 28 not forming the step 34. You may form.

このように当接凸部５０を３つ形成することにより、発光装置台１００における取付孔１０２の位置決め面１０４に対して、リフレクタ１０における鍔部１６の開口端面３３という「面」ではなく、３つの「点」で位置決めできるので、この位置決め面１０４に対するリフレクタ１０の中心軸ＣＬ方向の位置をより精度よく決めることができる。   By forming three contact convex portions 50 in this manner, the positioning surface 104 of the mounting hole 102 in the light emitting device stand 100 is not a "face" of the opening end face 33 of the flange portion 16 in the reflector 10, Since positioning can be performed at two “points”, the position of the reflector 10 in the direction of the central axis CL relative to the positioning surface 104 can be determined more accurately.

今回開示された実施の形態はすべての点で例示であって制限的なものではないと考えられるべきである。本発明の範囲は、上記した説明ではなく、特許請求の範囲によって示され、特許請求の範囲と均等の意味および範囲内でのすべての変更が含まれることが意図される。   It should be understood that the embodiments disclosed herein are illustrative and non-restrictive in every respect. The scope of the present invention is indicated not by the above description but by the claims, and is intended to include all modifications within the meaning and scope equivalent to the claims.

１０…リフレクタ
１２…本体部、１４…頸部、１６…鍔部、１８…給電部、２０…凹所、２２…反射面、２３…開口、２４…放電灯挿設孔、２８…角部、３０…湾曲部、３２…（角部２８の）端縁、３３…開口端面、３４…段差、３６…（段差３４の）端縁、３８…（鍔部１６の外形を規定する）下辺、４０…（鍔部１６の外形を規定する）右辺、４２…給電部本体、４４…給電線挿通孔、５０…当接凸部、６０…発光装置
７０…放電灯、７２…発光管部、７４…シール部、７６…内部空間、７８…箔、８０…電極、８２…リード棒、８４…水銀
１００…発光装置台、１０２…取付孔、１０４…位置決め面、１０６…位置決め凸部
ＣＬ…（リフレクタ１０の）中心軸 DESCRIPTION OF SYMBOLS 10 ... Reflector 12 ... Body part, 14 ... Neck part, 16 ... Collar part, 18 ... Power supply part, 20 ... Recess, 22 ... Reflection surface, 23 ... Opening, 24 ... Discharge lamp insertion hole, 28 ... Corner part, Reference Signs List 30 curved portion 32 edge (of the corner portion 28) 33 opening end face 34 step difference 36 edge (of the step difference 34) edge 38 defining the outer shape of the ridge 16 lower side 40 ... (Defines the outer shape of the flange portion 16), right side 42, feed portion main body 44, feed line insertion hole 50, contact convex portion 60, light emitting device 70, discharge lamp 72, light emitting tube portion 74, ... Seal part 76 internal space 78 foil 80 electrode 82 lead rod 84 mercury 100 light emitting device stand 102 mounting hole 104 positioning surface 106 positioning convex portion CL reflector 10 ) Central axis

Claims (5)

放電灯が配設される、開口を有する椀状の反射面と、
前記反射面の前記開口側の端部に形成された、少なくとも１つの角部を有する鍔部とを備えるリフレクタであって、
前記角部の前記開口側の端面における、端縁と前記反射面の前記開口との間には、前記反射面の底部から前記開口に向かう方向と同方向の段差が形成されており、
前記段差は、前記方向に直交する平面で見たとき、前記鍔部における前記角部の外形を規定する下辺から右辺に至る線状に形成されており、
前記角部の前記開口側の前記端面において、前記段差を挟んで前記開口側の前記端面の高さが、前記角部の前記端縁側の前記端面の高さに比べて高いことを特徴とする
リフレクタ。 A bowl-shaped reflecting surface having an opening, in which a discharge lamp is disposed;
A reflector having at least one corner formed at an end on the opening side of the reflecting surface;
A step is formed in the same direction as the direction from the bottom of the reflection surface toward the opening, between the edge of the end of the corner on the opening side and the opening of the reflection surface.
The step is formed in a line extending from the lower side to the right side which defines the outer shape of the corner portion in the ridge portion when viewed in a plane orthogonal to the direction .
In the end face on the opening side of the corner, the height of the end face on the opening side across the step is higher than the height of the end face on the end edge side of the corner. Reflector. 前記段差の端縁は、直線状に形成されていることを特徴とする
請求項１に記載のリフレクタ。 The reflector according to claim 1 , wherein an edge of the step is formed in a straight line. 前記段差の端縁は、円弧状に形成されていることを特徴とする
請求項１に記載のリフレクタ。 The reflector according to claim 1 , wherein an edge of the step is formed in an arc shape. 請求項１から３のいずれか１項に記載のリフレクタと、
放電灯とを備える
発光装置。 A reflector according to any one of claims 1 to 3 ;
A light emitting device comprising a discharge lamp. 請求項４に記載の発光装置を備える、露光装置。
An exposure apparatus comprising the light emitting device according to claim 4 .
JP2018170819A 2018-09-12 2018-09-12 Reflector for discharge lamp, and light emitting apparatus and exposure apparatus using the same Active JP6528161B1 (en)

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CN201910773190.3A CN110534399A (en) 2018-09-12 2019-08-21 The reflector of use for discharge lamp and the light emitting device for using the reflector
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