JP6520084B2 - オンチップカラーフィルタの製造方法 - Google Patents
オンチップカラーフィルタの製造方法 Download PDFInfo
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- JP6520084B2 JP6520084B2 JP2014246102A JP2014246102A JP6520084B2 JP 6520084 B2 JP6520084 B2 JP 6520084B2 JP 2014246102 A JP2014246102 A JP 2014246102A JP 2014246102 A JP2014246102 A JP 2014246102A JP 6520084 B2 JP6520084 B2 JP 6520084B2
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- film
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- soluble polymer
- resist
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- QFVDKARCPMTZCS-UHFFFAOYSA-N methylrosaniline Chemical compound C1=CC(N(C)C)=CC=C1C(O)(C=1C=CC(=CC=1)N(C)C)C1=CC=C(N(C)C)C=C1 QFVDKARCPMTZCS-UHFFFAOYSA-N 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- JQZWHMOVSQRYRN-UHFFFAOYSA-M n-(2-chloroethyl)-n-ethyl-3-methyl-4-[2-(1,3,3-trimethylindol-1-ium-2-yl)ethenyl]aniline;chloride Chemical compound [Cl-].CC1=CC(N(CCCl)CC)=CC=C1C=CC1=[N+](C)C2=CC=CC=C2C1(C)C JQZWHMOVSQRYRN-UHFFFAOYSA-M 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 125000004433 nitrogen atom Chemical group N* 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 229920003986 novolac Polymers 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- NWVVVBRKAWDGAB-UHFFFAOYSA-N p-methoxyphenol Chemical compound COC1=CC=C(O)C=C1 NWVVVBRKAWDGAB-UHFFFAOYSA-N 0.000 description 1
- FZUGPQWGEGAKET-UHFFFAOYSA-N parbenate Chemical compound CCOC(=O)C1=CC=C(N(C)C)C=C1 FZUGPQWGEGAKET-UHFFFAOYSA-N 0.000 description 1
- VLTRZXGMWDSKGL-UHFFFAOYSA-N perchloric acid Chemical compound OCl(=O)(=O)=O VLTRZXGMWDSKGL-UHFFFAOYSA-N 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- 229950000688 phenothiazine Drugs 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 229920001225 polyester resin Polymers 0.000 description 1
- 239000004645 polyester resin Substances 0.000 description 1
- 229920006393 polyether sulfone Polymers 0.000 description 1
- 229920006146 polyetheresteramide block copolymer Polymers 0.000 description 1
- 239000011112 polyethylene naphthalate Substances 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000002952 polymeric resin Substances 0.000 description 1
- 239000003505 polymerization initiator Substances 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 229920002689 polyvinyl acetate Polymers 0.000 description 1
- 239000011118 polyvinyl acetate Substances 0.000 description 1
- 229920001290 polyvinyl ester Polymers 0.000 description 1
- 229910000027 potassium carbonate Inorganic materials 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 1
- 150000004053 quinones Chemical class 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000011514 reflex Effects 0.000 description 1
- PYWVYCXTNDRMGF-UHFFFAOYSA-N rhodamine B Chemical compound [Cl-].C=12C=CC(=[N+](CC)CC)C=C2OC2=CC(N(CC)CC)=CC=C2C=1C1=CC=CC=C1C(O)=O PYWVYCXTNDRMGF-UHFFFAOYSA-N 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 239000002195 soluble material Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- MDDUHVRJJAFRAU-YZNNVMRBSA-N tert-butyl-[(1r,3s,5z)-3-[tert-butyl(dimethyl)silyl]oxy-5-(2-diphenylphosphorylethylidene)-4-methylidenecyclohexyl]oxy-dimethylsilane Chemical compound C1[C@@H](O[Si](C)(C)C(C)(C)C)C[C@H](O[Si](C)(C)C(C)(C)C)C(=C)\C1=C/CP(=O)(C=1C=CC=CC=1)C1=CC=CC=C1 MDDUHVRJJAFRAU-YZNNVMRBSA-N 0.000 description 1
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- GZBUMTPCIKCWFW-UHFFFAOYSA-N triethylcholine Chemical compound CC[N+](CC)(CC)CCO GZBUMTPCIKCWFW-UHFFFAOYSA-N 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
- 239000006097 ultraviolet radiation absorber Substances 0.000 description 1
- ROVRRJSRRSGUOL-UHFFFAOYSA-N victoria blue bo Chemical compound [Cl-].C12=CC=CC=C2C(NCC)=CC=C1C(C=1C=CC(=CC=1)N(CC)CC)=C1C=CC(=[N+](CC)CC)C=C1 ROVRRJSRRSGUOL-UHFFFAOYSA-N 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
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Images
Landscapes
- Optical Filters (AREA)
- Materials For Photolithography (AREA)
Description
樹脂溶液1:55部(質量部)、Pigment Green 36:4.0部、Pigment Yellow154:1.7部、分散剤:0.29部およびシクロヘキサノン:7.8部を混合し、ペイントシェイカーにて24時間分散して緑色分散体を作製した。
次いで、緑色分散体:54.15部、NKエステルATMPT(新中村化学社製)4.85部、イソプロピルチオキサントン0.2部、2−メチル−1−(4−メチルチオフェニル)−2−モルホリノ−プロパン−1−オン0.8部およびシクロヘキサノン39.0部を容器中で十分に混合し、1.0ミクロンのフィルタにて濾過し、不揮発分20%緑色レジストを作製した。
基材として、無アルカリガラス(日本電気硝子株式会社製 OA−10)上全面にITOターゲット(東ソー株式会社製)を、厚さ1000Åで成膜した。なお、基材は事前に中性洗剤にて洗浄している。
成膜後、スルーホール位置がカラーレジストと同様となる配列のフォトマスクを使用し、i線スキャンフィールドステッパー(ニコン社製NSR−SF155)で露光し、アルカリ現像液(東京応化工業株式会社製NMD−3、TMAH2.3%)を用い現像することで、ポジ型レジストをパターニングした。
(比較例1:水溶性ポリマー内平均粒子サイズと粒子量との影響)
樹脂溶液1:55部、Pigment Green 36:4.0部、Pigment Yellow154:1.7部、分散剤:0.29部およびシクロヘキサノン:7.8部を混合し、ペイントシェイカーにて24時間分散して緑色分散体を作製した。
次いで、緑色分散体:54.15部、NKエステルATMPT(新中村化学社製)4.85部、イソプロピルチオキサントン0.2部、2−メチル−1−(4−メチルチオフェニル)−2−モルホリノ−プロパン−1−オン0.8部およびシクロヘキサノン39.0部を容器中で十分に混合し、1.0ミクロンのフィルタにて濾過し、不揮発分20%緑色レジストを作製した。
基材として、無アルカリガラス(日本電気硝子株式会社製 OA−10)上全面にITOターゲット(東ソー株式会社製)を、厚さ1000Åで成膜した。なお、基材は事前に中性洗剤にて洗浄している。
成膜後、スルーホール位置がカラーレジストと同様となる配列のフォトマスクを使用し、i線スキャンフィールドステッパー(ニコン社製NSR−SF155)で露光し、アルカリ現像液(東京応化工業株式会社製NMD−3、TMAH2.3%)を用い現像することで、ポジ型レジストをパターニングした。
樹脂溶液1:55部、Pigment Green 36:4.0部、Pigment Yellow154:1.7部、分散剤:0.29部およびシクロヘキサノン:7.8部を混合し、ペイントシェイカーにて24時間分散して緑色分散体を作製した。
次いで、緑色分散体:54.15部、NKエステルATMPT(新中村化学社製)4.85部、イソプロピルチオキサントン0.2部、2−メチル−1−(4−メチルチオフェニル)−2−モルホリノ−プロパン−1−オン0.8部およびシクロヘキサノン39.0部を容器中で十分に混合し、1.0ミクロンのフィルタにて濾過し、不揮発分20%緑色レジストを作製した。
基材として、無アルカリガラス(日本電気硝子株式会社製 OA−10)上全面にITOターゲット(東ソー株式会社製)を、厚さ1000Åで成膜した。なお、基材は事前に中性洗剤にて洗浄している。
102 基材
103 スルーホール
104 平坦化膜
105 水溶性ポリマー(粒子含有)
106 ポジ型レジスト
107 スルーホール内のポジ型レジストを除いた状態
108 ガス
110 洗浄液
111 オンチップカラーフィルタ
112 難溶性副生成物(フルオロカーボン系)
303 スルーホール
305 平坦化膜
306 カラーレジスト層
307 基材
Claims (3)
- 基材上にカラーレジストを塗布し、前記カラーレジストにスルーホールを有するパターンを形成する工程と、
前記基材およびカラーレジスト上に平坦化膜を形成する工程と、
前記平坦化膜上に水溶性ポリマーを塗布する工程と、
前記水溶性ポリマー上にポジ型レジストを塗布し、前記スルーホール内の前記ポジ型レジストを除去する工程と、
前記スルーホール内の前記水溶性ポリマー及び前記平坦化膜をドライエッチングにて処理する工程と、
前記ドライエッチング後に残りの前記水溶性ポリマーを純水もしくはアルコールにて剥離する工程とを有し、
前記水溶性ポリマーには、D50メディアン径が0.1μm以上0.3μm以下の粒子を、5.0wt%以上30wt%以下含有する、
オンチップカラーフィルタの製造方法。 - 前記水溶性ポリマーの膜厚は、0.3μm以上0.6μm以下である、請求項1に記載のオンチップカラーフィルタの製造方法。
- 前記平坦化膜の光透過率は、95%以上である、請求項1または2に記載のオンチップカラーフィルタの製造方法。
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