JP6504151B2 - Processing device - Google Patents

Processing device Download PDF

Info

Publication number
JP6504151B2
JP6504151B2 JP2016242391A JP2016242391A JP6504151B2 JP 6504151 B2 JP6504151 B2 JP 6504151B2 JP 2016242391 A JP2016242391 A JP 2016242391A JP 2016242391 A JP2016242391 A JP 2016242391A JP 6504151 B2 JP6504151 B2 JP 6504151B2
Authority
JP
Japan
Prior art keywords
air
processing
outside air
processing apparatus
cover
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2016242391A
Other languages
Japanese (ja)
Other versions
JP2018094601A (en
Inventor
仁志 清水
仁志 清水
頼幸 松本
頼幸 松本
翔太 千野
翔太 千野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP2016242391A priority Critical patent/JP6504151B2/en
Priority to CN201710759977.5A priority patent/CN108213701B/en
Publication of JP2018094601A publication Critical patent/JP2018094601A/en
Application granted granted Critical
Publication of JP6504151B2 publication Critical patent/JP6504151B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/142—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor for the removal of by-products

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Auxiliary Devices For Machine Tools (AREA)

Description

本発明は、加工の際に粉塵や気化物が発生する加工装置に関する。   BACKGROUND OF THE INVENTION Field of the Invention The present invention relates to a processing apparatus that generates dust and vaporized substances during processing.

回路基板の穴開け等の加工にレーザ加工装置が広く使用されている。レーザ加工装置は、加工の際に粉塵や気化物が発生する。この粉塵や気化物は、（i）発生した粉塵がレーザの光路に入ることで加工状態を不安定化させたり、（ii）装置内に粉塵が堆積し、定期的な清掃が必要になる、（iii）気化物によっては臭気を有するものや人体に有害な成分もある、（iv）クリーンルームの場合、粉塵が装置外に出ることでクリーンルームのクラスが下がる、といった問題を発生させる。   Laser processing apparatuses are widely used for processing such as drilling of circuit boards. The laser processing apparatus generates dust and vaporized substances during processing. These dusts and vaporized substances (i) destabilize the processing state by the generated dust entering the light path of the laser, or (ii) dust accumulates in the apparatus, and periodic cleaning is required. (Iii) Some vapors have odor and some components are harmful to human body. (Iv) In the case of a clean room, there is a problem that the dust comes out of the apparatus and the class of the clean room is lowered.

上記の問題の発生を防止するため、粉塵や気化物を集塵する集塵機構を取り付けたレーザ加工装置が知られている。例えば、特許文献１には、効果的に集塵を行うために、導入した外気を用いて、装置内に粉塵や気化物の集塵、排気流路を形成するようにしたレーザ加工装置が記載されている。   In order to prevent the occurrence of the above problems, there is known a laser processing apparatus provided with a dust collection mechanism for collecting dust and vaporized substances. For example, in order to effectively collect dust, Patent Document 1 describes a laser processing apparatus in which dust and vaporized substances are collected in the apparatus and an exhaust flow path is formed using the introduced outside air. It is done.

特開２００６−９５５３０号公報JP, 2006-95530, A

しかしながら、レーザ加工装置のような装置内で粉塵や気化物が発生する加工装置において、集塵機構により外気を加工装置内に取り込むと、加工装置内の設定温度が外気の温度によって変動する場合がある。それにより、加工精度が悪化する場合がある。例えば、被加工物（以下、ワークともいう）が温度により伸縮して、加工位置精度が悪化する場合がある。また、加工装置の構成部材が温度により伸縮することにより、加工位置精度が悪化するという問題もある。   However, in a processing apparatus in which dust or vaporized material is generated in an apparatus such as a laser processing apparatus, if outside air is taken into the processing apparatus by the dust collection mechanism, the set temperature in the processing apparatus may fluctuate depending on the temperature of the outside air . As a result, the processing accuracy may be degraded. For example, a workpiece (hereinafter, also referred to as a workpiece) may expand and contract due to temperature, which may deteriorate the processing position accuracy. In addition, there is also a problem that the processing position accuracy is deteriorated because the component members of the processing apparatus expand and contract due to the temperature.

これに対し、例えば、精密空調機を用いることで、加工装置内の温度を一定に保つことは可能である。しかし、精密空調機、特に風量の大きな精密空調機は高価であるため、加工装置を含む加工システムの費用が増大するという問題がある。また、クリーンルームで使用する場合、加工装置内は周辺環境に対して負圧にする必要があるため、少なからず外気を取り込んでしまい、加工装置内の温度を一定に保つことが難しいという問題もある。そのため、集塵機構を用いた場合でも、加工装置内の温度を一定に維持することの可能な加工装置が必要とされている。さらに、レーザ加工装置に限定されず、加工の際に粉塵や気化物が発生し、加工時の温度を一定に維持することが要求される他の加工装置についても同様のニーズが存在する。   On the other hand, for example, by using a precision air conditioner, it is possible to keep the temperature in the processing apparatus constant. However, since the precision air conditioners, particularly the precision air conditioners having a large air volume, are expensive, there is a problem that the cost of the processing system including the processing device increases. In addition, when used in a clean room, the inside of the processing apparatus needs to have a negative pressure with respect to the surrounding environment, so there is a problem that it takes in outside air to some extent and it is difficult to keep the temperature inside the processing apparatus constant. . Therefore, there is a need for a processing apparatus capable of maintaining the temperature in the processing apparatus constant even when the dust collection mechanism is used. Furthermore, there is a similar need not only for the laser processing apparatus but also for other processing apparatuses that generate dust and vaporized substances during processing, and are required to maintain a constant temperature during processing.

そこで、本発明は、集塵機構を用いた場合でも、加工装置内の温度を一定に維持することの可能な加工装置を提供することを目的とする。   Then, this invention aims at providing the processing apparatus which can maintain the temperature in a processing apparatus uniformly, even when a dust collection mechanism is used.

上記の課題を解決するため、本発明の一態様に係る加工装置は、被加工物を載置する加工台と、前記加工台が配置された加工室を区画する第１カバー筐体と、隙間空間を介して第１カバー筐体を囲む第２カバー筐体とを含む二重構造のカバー部と、第２カバー筐体と第１カバー筐体を貫通し、前記加工室内に外気を導入する外気導入部と、第１カバー筐体と第２カバー筐体を貫通し、前記加工室内の空気を排気する排気部とを含む集塵機構と、前記第２カバー筐体に設けられた恒温空気導入口と、を備え、前記加工室および外気に対して正圧に調整された恒温空気が、前記恒温空気導入口から、第１カバー筐体と第２カバー筐体との前記隙間空間に供給される、ことを特徴とする。   In order to solve the above-mentioned subject, a processing device concerning one mode of the present invention has a crevice which covers a processing table which places a processed material, a processing room in which the processing table is arranged, and a crevice, and a crevice. A cover of a double structure including a second cover case enclosing the first cover case via a space, a second cover case and a first cover case are introduced to introduce outside air into the processing chamber A dust collection mechanism including an open air introduction part, an exhaust part penetrating the first cover housing and the second cover housing and exhausting air in the processing chamber, and constant temperature air introduction provided in the second cover housing A constant temperature air adjusted to a positive pressure with respect to the processing chamber and the outside air is supplied from the constant temperature air inlet to the gap space between the first cover housing and the second cover housing. It is characterized by

上記の態様によれば、二重構造のカバー部を用い、加工室および外気に対して正圧に調整された恒温空気が、恒温空気導入口から、第１カバー筐体と第２カバー筐体との隙間空間に供給されるので、集塵機構を用いた場合でも、加工室内の温度を一定に維持することが可能となる。また、加工室内で発生した粉塵や気化物が、加工装置外に漏れることも抑制できる。   According to the above aspect, the isothermal air adjusted to a positive pressure to the processing chamber and the outside air by using the cover portion of the double structure, from the isothermal air inlet, the first cover case and the second cover case As a result, the temperature in the processing chamber can be maintained constant even when the dust collection mechanism is used. In addition, it is possible to suppress that dust and vaporized substances generated in the processing chamber leak out of the processing apparatus.

また、上記の態様の一実施形態では、前記外気導入部から導入される外気の風量Ａが、前記排気部から排気される空気の風量Ｂと導入される前記恒温空気の風量Ｃとの間で、（Ｂ−Ｃ）＜Ａ＜Ｂの関係を満たしている。   In one embodiment of the above aspect, the air volume A of the outside air introduced from the outdoor air introduction unit is between the air volume B of the air exhausted from the exhaust unit and the air volume C of the constant temperature air introduced. The relationship of (B−C) <A <B is satisfied.

上記の実施形態によれば、外気導入部から導入される外気をほとんど全て排気することができる。これにより、恒温空気の風量を下げても加工室内の温度を一定に維持することが可能となることで、風量が大きい高価な空調機ではなく、通常の（一般的な）空調機が使用可能となり、加工コストの低減が可能となる。   According to the above embodiment, almost all the outside air introduced from the outside air introducing unit can be exhausted. As a result, it becomes possible to maintain the temperature in the processing chamber constant even if the air volume of constant temperature air is lowered, so that a normal (general) air conditioner can be used instead of an expensive air conditioner with a large air volume. Thus, the processing cost can be reduced.

また、上記の態様の一実施形態では、前記恒温空気導入口が、前記第２カバー筐体の上面に設けられている。   In one embodiment of the above aspect, the constant-temperature air inlet is provided on the top surface of the second cover casing.

上記の実施形態によれば、第１カバー筐体の上面から恒温空気を導入することで、隙間空間内に効果的に恒温空気を満たすことができる。   According to the above embodiment, the constant temperature air can be effectively filled in the clearance space by introducing the constant temperature air from the upper surface of the first cover casing.

また、上記の態様の一実施形態では、前記外気導入部の外気吹出口と前記排気部の空気吸引口とが、前記被加工物に対向している。   Moreover, in one Embodiment of said aspect, the external air blower outlet of the said external air introduction part and the air suction port of the said exhaust part are facing the said to-be-processed object.

上記の実施形態によれば、外気吹出口と排気部の空気吸引口をそれぞれ被加工物に対向させることで、外気吹出口との空気吸引口との間に空気の流路を形成し易くして、導入した外気が加工室内へ拡散するのを抑制して、加工室内の温度変化を抑制できるとともに、被加工物が発生する粉塵や気化物を効果的に集塵および排気することができる。   According to the above embodiment, by making the air suction port of the outside air outlet and the air suction port of the exhaust unit face the work respectively, it becomes easy to form a flow path of air between the air outlet and the air suction port. As a result, it is possible to suppress the diffusion of the introduced outside air into the processing chamber, to suppress the temperature change in the processing chamber, and to effectively collect and exhaust the dust and the vapor generated from the workpiece.

また、上記の態様の一実施形態では、前記外気導入部の外気吹出口と前記排気部の空気吸引口とが互いに対向している。   Moreover, in one Embodiment of said aspect, the external air blower outlet of the said external air introduction part and the air suction port of the said exhaust part are mutually opposing.

上記の実施形態によれば、外気吹出口と排気部の空気吸引口とを互いに対向させることで、外気吹出口との空気吸引口との間に空気の流路がさらに形成され易くなるので、導入した外気が加工室内へ拡散するのをさらに抑制できるので、加工室内の温度変化をさらに抑制できるとともに、被加工物が発生する粉塵や気化物をより効果的に集塵することができる。   According to the above-described embodiment, by causing the outside air outlet and the air suction port of the exhaust unit to face each other, the flow path of air is further easily formed between the outside air outlet and the air inlet. Since it is possible to further suppress the spread of the introduced outside air into the processing chamber, it is possible to further suppress the temperature change in the processing chamber, and to collect dust and vaporized substances generated by the workpiece more effectively.

また、上記の態様の一実施形態では、レーザ光源と、該レーザ光源から出射されたレーザ光を前記被加工物に導く光学系を有している。   In one embodiment of the above aspect, the laser light source and the optical system for guiding the laser light emitted from the laser light source to the workpiece are provided.

上記の実施形態によれば、レーザ加工装置として用いることで、温度変化によるワークの伸縮を抑制することができるので、加工位置精度を高めることが可能となる。   According to the above embodiment, by using the laser processing apparatus, expansion and contraction of the work due to temperature change can be suppressed, so that processing position accuracy can be improved.

本発明によれば、集塵機構を用いた場合でも、加工装置内の温度を一定に維持することの可能な加工装置を提供することはできる。   According to the present invention, it is possible to provide a processing apparatus capable of maintaining the temperature in the processing apparatus constant even when the dust collection mechanism is used.

本発明の一実施の形態に係る加工装置を用いた加工システムの構造を示す模式斜視図であり、カバー部の一部を取り除いた状態を示している。It is a model perspective view which shows the structure of the processing system using the processing apparatus which concerns on one embodiment of this invention, and has shown the state which removed a part of cover part. 図１の加工システムの模式縦断面図である。It is a model longitudinal cross-sectional view of the processing system of FIG. 本発明の加工装置における空気の流れの一例を示す説明図である。It is explanatory drawing which shows an example of the flow of the air in the processing apparatus of this invention.

以下、図面を参照して本発明の実施の形態について説明する。   Hereinafter, embodiments of the present invention will be described with reference to the drawings.

本実施の形態に係る加工装置は、被加工物を載置する加工台と、前記加工台が配置された加工室を区画する第１カバー筐体と、隙間空間を介して第１カバー筐体を囲む第２カバー筐体とを含む二重構造のカバー部と、第２カバー筐体と第１カバー筐体を貫通し、前記加工室内に外気を導入する外気導入部と、第１カバー筐体と第２カバー筐体を貫通し、前記加工室内の空気を排気する排気部とを含む集塵機構と、前記第２カバー筐体に設けられた恒温空気導入口と、を備え、前記加工室および外気に対して正圧に調整された恒温空気が、前記恒温空気導入口から、第１カバー筐体と第２カバー筐体との前記隙間空間に供給される、ことを特徴とするものである。   The processing apparatus according to the present embodiment includes a processing table on which a workpiece is placed, a first cover case that divides a processing chamber in which the processing table is disposed, and a first cover case via a clearance space. And a second cover case including a second cover case surrounding the second cover case, an outside air introducing unit which penetrates the second cover case and the first cover case and introduces outside air into the processing chamber, and the first cover case The processing chamber includes a dust collection mechanism including a body and a second cover housing and an exhaust unit for exhausting air in the processing chamber, and a constant temperature air inlet provided in the second cover housing, the processing chamber And constant-temperature air adjusted to a positive pressure with respect to the outside air is supplied from the constant-temperature air inlet to the gap space between the first cover case and the second cover case. is there.

図１は、本実施の形態に係る加工装置Ｐを用いた加工システムＳの一例を示す模式斜視図であり、加工装置がレーザ加工装置である例を示している。図１は、説明上、後述のカバー部の一部を除いた状態を示している。また、図２は、図１の模式縦断面図である。   FIG. 1 is a schematic perspective view showing an example of a processing system S using a processing apparatus P according to the present embodiment, and shows an example in which the processing apparatus is a laser processing apparatus. FIG. 1 shows a state in which a part of a cover described later is removed for the sake of explanation. FIG. 2 is a schematic vertical sectional view of FIG.

加工システムＳは、加工装置１と、集塵機８と、精密空調機９とから構成されている。加工装置１の内部には、被加工物Ｗを載置する加工台２が配置されている。加工台２が配置された加工室６は、二重構造のカバー部３により囲まれている。カバー部３は、加工室６を区画する第１カバー筐体４と、隙間空間１０を介して第１カバー筐体４を囲む第２カバー筐体５とから構成されている。   The processing system S includes a processing device 1, a dust collector 8, and a precision air conditioner 9. Inside the processing apparatus 1, a processing table 2 on which the workpiece W is placed is disposed. The processing chamber 6 in which the processing table 2 is disposed is surrounded by the cover portion 3 having a double structure. The cover portion 3 is configured of a first cover housing 4 that divides the processing chamber 6 and a second cover housing 5 that surrounds the first cover housing 4 via the clearance space 10.

さらに、加工装置１には、集塵機構７が取り付けられている。集塵機構７は、第２カバー筐体５と第１カバー筐体４を貫通し、加工室６内に外気を導入する外気導入部８と、第１カバー筐体４と第２カバー筐体５を貫通し、加工室６内の空気を排気する排気部９とから構成されている。これにより、外気導入部８は加工装置１外の外気を直接第１カバー筐体４内の加工室６に導入し、また、排気部は加工室６から直接外部の集塵機２１に排気することができる。外気導入部８は、加工室６内に露出する一端と、外気に接する他端を有する管状部材であり、その一端には外気吹出口８ａを有し、その他端には外気を取り込む送風機１１が設けられている。一方、排気部９は、加工室６内に露出する一端と、集塵機２１に接続される他端を有する管状部材であり、その一端には空気吸引口９ａを有している。また、第２カバー筐体５の上面には恒温空気導入口１６が設けられており、精密空調機２２から恒温空気供給管２３を介して、恒温空気が加工装置１に供給される。   Furthermore, a dust collection mechanism 7 is attached to the processing device 1. The dust collection mechanism 7 penetrates the second cover housing 5 and the first cover housing 4 and introduces an outside air introducing portion 8 for introducing the outside air into the processing chamber 6, the first cover housing 4 and the second cover housing 5. And an exhaust unit 9 for exhausting the air in the processing chamber 6. Thus, the outside air introducing unit 8 directly introduces outside air outside the processing apparatus 1 into the processing chamber 6 in the first cover housing 4, and the exhaust unit directly exhausts the processing chamber 6 into the dust collector 21 outside. it can. The outside air introducing unit 8 is a tubular member having one end exposed in the processing chamber 6 and the other end in contact with the outside air, and one end thereof has an outside air outlet 8a and the other end has a blower 11 for taking in outside air. It is provided. On the other hand, the exhaust unit 9 is a tubular member having one end exposed in the processing chamber 6 and the other end connected to the dust collector 21 and has an air suction port 9a at one end. Further, a constant temperature air inlet 16 is provided on the upper surface of the second cover housing 5, and constant temperature air is supplied from the precision air conditioner 22 to the processing device 1 through the constant temperature air supply pipe 23.

また、加工室６内には、レーザ光源（不図示）と、レーザ光源から出射されたレーザ光を前記被加工物に導く光学系として加工ヘッド１３が配置されている。加工ヘッド１３は、偏向器１４と集光器１５とから構成され、さらに、偏向器１４は、Ｘ軸用偏向器１４ａとＹ軸用偏向器１４ｂとから構成されている。   Further, in the processing chamber 6, a processing light 13 (not shown) and a processing head 13 are disposed as an optical system for guiding the laser light emitted from the laser light source to the workpiece. The processing head 13 is composed of a deflector 14 and a condenser 15. Further, the deflector 14 is composed of an X-axis deflector 14a and a Y-axis deflector 14b.

以下、図２を参照して加工装置１内の空気の流れについて説明する。恒温空気は、精密空調機２２から恒温空気供給管２３を通り、第２カバー筐体５の上面に設けた恒温空気導入口１６から、第１カバー筐体４と第２カバー筐体５との間の隙間空間１０に導入される。隙間空間１０に導入された恒温空気は、加工室６および外気に対して正圧となるように調整されており、隙間空間１０を恒温雰囲気に維持する。正圧に調整された恒温空気により、加工室６内の空気（以下、加工雰囲気ともいう）が隙間空間１０に漏れることが抑制される。なお、後述するように、正圧に調整された恒温空気の一部が、加工室６内に漏れてもよい。一方、送風機１１により外気導入部８を通って取り込まれた外気は、レーザ光Ｌを用いたレーザ加工により被加工物Ｗから発生した粉塵や気化物を外気の流れに乗せて、空気吸引口９ａに吸い込まれ、排気部９を通って集塵機２１に排気される。これにより、集塵機構を用いた場合でも、加工室内の温度を一定に維持することが可能となるとともに、加工室内で発生した粉塵や気化物が、加工装置１外に漏れることもない。   Hereinafter, the flow of air in the processing apparatus 1 will be described with reference to FIG. The constant temperature air passes from the precision air conditioner 22 through the constant temperature air supply pipe 23 and from the constant temperature air inlet 16 provided on the upper surface of the second cover housing 5, the first cover housing 4 and the second cover housing 5 Are introduced into the interstice space 10 between them. The constant temperature air introduced into the clearance space 10 is adjusted to be a positive pressure with respect to the processing chamber 6 and the outside air, and the clearance space 10 is maintained in a constant temperature atmosphere. The constant temperature air adjusted to a positive pressure prevents the air in the processing chamber 6 (hereinafter also referred to as a processing atmosphere) from leaking into the gap space 10. Note that, as described later, part of constant temperature air adjusted to a positive pressure may leak into the processing chamber 6. On the other hand, outside air taken in through the outside air introduction unit 8 by the blower 11 carries dust and vaporized material generated from the workpiece W by laser processing using the laser light L on the flow of the outside air, and the air suction port 9a And is exhausted to the dust collector 21 through the exhaust unit 9. As a result, even when the dust collection mechanism is used, the temperature in the processing chamber can be maintained constant, and dust and vaporized substances generated in the processing chamber do not leak out of the processing apparatus 1.

図１，２では、被加工物Ｗの被加工面に対して垂直な方向からレーザ光を照射する例を示している。この場合、集塵機構の外気導入部の外気吹出口と排気部の空気吸引口の向きは、被加工面の近傍であれば特に限定されないが、外気導入部の外気吹出口と排気部の空気吸引口とが、被加工物に対向していることが好ましい。外気吹出口と排気部の空気吸引口をそれぞれ被加工物に対向させることで、外気吹出口との空気吸引口との間に空気の流路を形成し易くして、導入した外気が加工室内へ拡散するのを抑制して、加工室内の温度変化を抑制できるとともに、被加工物が発生する粉塵や気化物を効果的に集塵することができる。さらに、外気導入部の外気吹出口と前記排気部の空気吸引口とが互いに対向していることがより好ましい。外気吹出口との空気吸引口との間に空気の流路がさらに形成され易くなるので、導入した外気が加工室内へ拡散するのをさらに抑制できる。これにより、加工室内の温度変化をさらに抑制できるとともに、被加工物が発生する粉塵や気化物をより効果的に集塵することができる。   1 and 2 show an example in which the laser beam is irradiated from a direction perpendicular to the surface to be processed of the workpiece W. In this case, the direction of the outside air outlet of the outside air introduction unit of the dust collection mechanism and the direction of the air suction port of the exhaust unit are not particularly limited as long as they are in the vicinity of the processing surface. Preferably, the mouth is opposed to the workpiece. By making the air suction port of the outside air blowout port and the air suction port of the exhaust unit face the workpiece respectively, it becomes easy to form a flow path of air between the outside air blowout port and the air suction port. It is possible to suppress the diffusion to the outside, to suppress the temperature change in the processing chamber, and to effectively collect dust and vaporized substances generated by the workpiece. Furthermore, it is more preferable that the outside air outlet of the outside air introduction part and the air suction port of the exhaust part be opposed to each other. Since the flow path of air is further easily formed between the outside air outlet and the air suction port, it is possible to further suppress the spread of the introduced outside air into the processing chamber. Thereby, the temperature change in the processing chamber can be further suppressed, and dust and vaporized substances generated by the workpiece can be collected more effectively.

また、外気導入部から導入される外気の風量Ａが、排気部から排気される空気の風量Ｂと導入される前記恒温空気の風量Ｃとの間で、（Ｂ−Ｃ）＜Ａ＜Ｂの関係を満たすことが好ましい。図３は、加工装置内の空気の流れの一例の説明図である。空調機から温度２３℃の恒温空気が風量１０ｍ３／ｍｉｎで供給され、その一部が９ｍ３／ｍｉｎの風量で加工室内に導入される。一方、外気導入部から導入される外気の風量は１１ｍ３／ｍｉｎ（２５℃）であり、排気部から排気される空気の風量が２０ｍ３／ｍｉｎである。この場合、外気導入部から導入される外気は、ほとんど全て排気部から排気される。また、恒温空気の一部（１ｍ３／ｍｉｎ）は装置外に排出されることになる。これにより、第２カバー筐体の恒温空気（雰囲気）は加工室および外気に対して正圧に調整されることになる。すなわち、上記の関係を満たす場合、外気導入部から導入される外気は、ほとんど全て排気されるので、加工室内の温度に対する外気の影響をさらに抑制することができる。また、この場合、恒温空気の風量を下げることができるので、定格風量の小さい空調機を用いることができ、加工システムのコストダウンが可能となる。 Further, the air flow rate A of the outside air introduced from the outside air introduction unit is between the air flow rate B of the air exhausted from the exhaust unit and the air flow rate C of the constant-temperature air introduced: It is preferable to satisfy the relationship. FIG. 3 is an explanatory view of an example of the flow of air in the processing apparatus. Constant temperature air with a temperature of 23 ° C. is supplied from the air conditioner with an air volume of 10 m 3 / min, and a portion thereof is introduced into the processing chamber with an air volume of 9 m 3 / min. On the other hand, the air volume of outside air introduced from the outside air introduction unit is 11 m 3 / min (25 ° C.), and the air volume of air exhausted from the exhaust unit is 20 m 3 / min. In this case, almost all the outside air introduced from the outside air introducing unit is exhausted from the exhaust unit. In addition, a part (1 m 3 / min) of constant temperature air is discharged to the outside of the apparatus. As a result, the constant temperature air (atmosphere) of the second cover casing is adjusted to a positive pressure with respect to the processing chamber and the outside air. That is, when the above relationship is satisfied, almost all the outside air introduced from the outside air introducing unit is exhausted, the influence of the outside air on the temperature in the processing chamber can be further suppressed. Further, in this case, since the air volume of constant temperature air can be reduced, an air conditioner with a small rated air volume can be used, and the cost reduction of the processing system becomes possible.

また、加工装置内の温度をより一定に維持するために、熱源となる可能性のある装置類は、加工室内に置かないことが好ましい。例えば、レーザ加工装置の場合、熱源とは、例えば、モータ、センサ、制御機器、レーザ光吸収体、等である。   Also, in order to maintain the temperature in the processing apparatus more constant, it is preferable not to place the devices that can be heat sources in the processing chamber. For example, in the case of a laser processing apparatus, the heat source is, for example, a motor, a sensor, a control device, a laser light absorber, or the like.

なお、本実施の形態では、レーザ加工装置を例にとり説明したが、本実施の形態に係る加工装置は、レーザ加工装置に限定されず、加工の際に粉塵や気化物が発生し、加工時の温度を一定に維持することが要求される種々の加工装置にも用いることができる。例えば、クリーンルーム内で用いる導電性ペースト乾燥装置、金属溶接装置、切断装置、等を挙げることができる。   In the present embodiment, the laser processing apparatus has been described as an example, but the processing apparatus according to the present embodiment is not limited to the laser processing apparatus, and dust and vaporized substances are generated during processing, and processing is performed. It can also be used in various processing devices that are required to maintain a constant temperature. For example, a conductive paste drying device, a metal welding device, a cutting device, etc. used in a clean room can be mentioned.

１ 加工装置
２ 加工台
３ カバー部
４ 第１カバー筐体
５ 第２カバー筐体
６ 加工室
７ 集塵機構
８ 外気導入部
８ａ 外気吹出口
９ 排気部
９ａ 空気吸引口
１０ 隙間空間
１１ 送風機
１２ 可動ステージ
１２ａ 第１ステージ
１２ｂ 第２ステージ
１３ 加工ヘッド
１４ 偏向器
１４ａ Ｘ軸用偏向器
１４ｂ Ｙ軸用偏向器
１５ 集光器
１６ 恒温空気導入口
２１ 集塵機
２２ 空調機
２３ 恒温空気供給管
Ｌ レーザ光線
Ｗ 被加工物 DESCRIPTION OF SYMBOLS 1 processing apparatus 2 processing stand 3 cover part 4 1st cover housing 5 2nd cover housing 6 processing room 7 dust collection mechanism 8 outside air introduction part 8a outside air blowout port 9 exhaust part 9a air suction port 10 clearance space 11 blower 12 movable stage 12a 1st stage 12b 2nd stage 13 processing head 14 deflector 14a X-axis deflector 14b Y-axis deflector 15 condenser 16 constant temperature air inlet 21 dust collector 22 air conditioner 23 constant temperature air supply pipe L laser beam W Workpiece

Claims (6)

被加工物を載置する加工台と、
前記加工台が配置された加工室を区画する第１カバー筐体と、隙間空間を介して第１カバー筐体を囲む第２カバー筐体とを含む二重構造のカバー部と、
第２カバー筐体と第１カバー筐体を貫通し、前記加工室内に外気を導入する外気導入部と、第１カバー筐体と第２カバー筐体を貫通し、前記加工室内の空気を排気する排気部とを含む集塵機構と、
前記第２カバー筐体に設けられた恒温空気導入口と、を備え、
前記加工室および外気に対して正圧に調整された恒温空気が、前記恒温空気導入口から、第１カバー筐体と第２カバー筐体との前記隙間空間に供給される、加工装置。 A processing table on which a workpiece is placed;
A cover portion of a double structure including a first cover housing that defines a processing chamber in which the processing table is disposed, and a second cover housing that encloses the first cover housing via a clearance space;
It penetrates the 2nd cover case and the 1st cover case, penetrates the 1st cover case and the 2nd cover case through the open air introduction part which introduces outside air into the processing room, and exhausts the air in the processing room A dust collection mechanism including an exhaust portion,
A constant temperature air inlet provided in the second cover housing;
A processing apparatus, wherein constant temperature air adjusted to a positive pressure with respect to the processing chamber and the outside air is supplied from the constant temperature air inlet to the clearance space between the first cover housing and the second cover housing. 前記外気導入部から導入される外気の風量Ａが、前記排気部から排気される空気の風量Ｂと導入される前記恒温空気の風量Ｃとの間で、（Ｂ−Ｃ）＜Ａ＜Ｂの関係を満たす、請求項１記載の加工装置。   The air flow rate A of the outside air introduced from the outside air introduction unit is between the air flow rate B of the air exhausted from the exhaust unit and the air flow rate C of the constant-temperature air to be introduced: (B−C) <A <B The processing apparatus according to claim 1, which satisfies the relationship. 前記恒温空気導入口が、前記第２カバー筐体の上面に設けられている、請求項１または２に記載の加工装置。   The processing apparatus according to claim 1, wherein the constant temperature air inlet is provided on an upper surface of the second cover casing. 前記外気導入部の外気吹出口と前記排気部の空気吸引口とが、前記被加工物に対向している、請求項１から３のいずれか１項に記載の加工装置。   The processing apparatus according to any one of claims 1 to 3, wherein an outside air outlet of the outside air introduction unit and an air suction port of the exhaust unit face the workpiece. 前記外気導入部の外気吹出口と前記排気部の空気吸引口とが互いに対向している、請求項１から４のいずれか１項に記載の加工装置。   The processing apparatus according to any one of claims 1 to 4, wherein an outside air outlet of the outside air introduction unit and an air suction port of the exhaust unit face each other. レーザ光源と、該レーザ光源から出射されたレーザ光を前記被加工物に導く光学系を有する、請求項１から５のいずれか１項に記載の加工装置。   The processing apparatus according to any one of claims 1 to 5, comprising: a laser light source; and an optical system for guiding a laser beam emitted from the laser light source to the workpiece.
JP2016242391A 2016-12-14 2016-12-14 Processing device Active JP6504151B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2016242391A JP6504151B2 (en) 2016-12-14 2016-12-14 Processing device
CN201710759977.5A CN108213701B (en) 2016-12-14 2017-08-29 Processing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016242391A JP6504151B2 (en) 2016-12-14 2016-12-14 Processing device

Publications (2)

Publication Number Publication Date
JP2018094601A JP2018094601A (en) 2018-06-21
JP6504151B2 true JP6504151B2 (en) 2019-04-24

Family

ID=62634252

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016242391A Active JP6504151B2 (en) 2016-12-14 2016-12-14 Processing device

Country Status (2)

Country Link
JP (1) JP6504151B2 (en)
CN (1) CN108213701B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110560885A (en) * 2019-08-20 2019-12-13 苏州川普光电有限公司 Laser processing equipment for light guide plate
JP6892543B1 (en) * 2020-09-17 2021-06-23 Dmg森精機株式会社 Machine Tools

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5227608A (en) * 1992-07-31 1993-07-13 Matsuhita Electric Industrial Co., Ltd. Laser ablation apparatus
JP2004255494A (en) * 2003-02-25 2004-09-16 Fanuc Ltd Temperature adjusting system for machine
JP2006095530A (en) * 2004-09-28 2006-04-13 Tdk Corp Laser beam machining apparatus, and laser beam machining method
KR20080075613A (en) * 2007-02-13 2008-08-19 주식회사 코윈디에스티 Treatment method of processing residue and origination gas by laser processing and treatment apparatus
JP5250348B2 (en) * 2008-09-10 2013-07-31 東芝機械株式会社 Precision machine cover
CN101829848B (en) * 2010-01-29 2013-04-10 东莞晨真光伏有限公司 Laser recticle dedusting plant and dedusting method
CN102476240A (en) * 2010-11-22 2012-05-30 大连兆阳软件科技有限公司 Device and method for clearing dust generated by laser graduating
KR101327644B1 (en) * 2011-12-20 2013-11-13 봉민 Laser processing apparatus
CN203630384U (en) * 2013-12-17 2014-06-04 嘉兴华嶺机电设备有限公司 Large-size grating manufacturing equipment
CN104355527B (en) * 2014-09-05 2017-01-11 沈阳航空航天大学 Sludge high-temperature thermal treatment system

Also Published As

Publication number Publication date
JP2018094601A (en) 2018-06-21
CN108213701B (en) 2020-01-03
CN108213701A (en) 2018-06-29

Similar Documents

Publication Publication Date Title
JP6504151B2 (en) Processing device
US8603217B2 (en) Recirculating filtration systems for material processing systems and associated methods of use and manufacture
US20130314929A1 (en) Cooling heat-generating components of a light fixture
CN106345783B (en) Extractor with segmented positive air flow system
JP2006043775A (en) Laser beam machining head
JP2016108667A (en) Additive manufacture system with containment chamber and low pressure operating atmosphere
US9155988B2 (en) Multi-stage air filtration systems and associated apparatuses and methods
US11292086B2 (en) Thermo-concept for a machine tool
JP2018080365A (en) Laminate shaping apparatus
KR102182608B1 (en) Laser Cutting System
JP6214880B2 (en) Laser ion source and heavy particle beam therapy system
CN104334505A (en) System and method providing partial vacuum operation of arc discharge for controlled heating
JP2006184283A (en) System for inspecting disk-like object to be inspected
JP4933348B2 (en) Laser processing equipment
JP2008304112A (en) Heat recovery device
JP2019047042A (en) Semiconductor manufacturing device
JP2007088066A (en) Laser light source device
CN210703159U (en) Dust suction device of laser cutting machine
JP2015199029A (en) Dust splash prevention tool
JP2015072238A (en) Particle collection jig, particle collection method, and particle measuring device using the particle collection jig
JP6134217B2 (en) Air cleaner
JP2015150465A (en) draft chamber
KR20140132521A (en) Fume extractor
JP4551984B2 (en) Desktop ventilation system
KR101978849B1 (en) Packing apparatus

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20180607

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20190214

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20190226

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20190311

R150 Certificate of patent or registration of utility model

Ref document number: 6504151

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150