JP6443994B2 - Portable X-ray inspection equipment - Google Patents
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本発明は、小型で、薄く、軽いＸ線非破壊検査に用いられる解像度の高いポータブルＸ線検査装置に関する。 The present invention relates to a portable X-ray inspection apparatus with high resolution used for a small, thin, and light X-ray nondestructive inspection.
高度成長期に建設された建築物や社会や産業の基盤となる構造物は現在でも使用されている物が多い。これらの安全性確保のため、現場における非破壊検査のニーズが高まっている。 Many buildings and structures that have been built during the period of high growth and are the foundations of society and industry are still in use. In order to ensure these safety, the need for nondestructive inspection in the field is increasing.
たとえば、図１２に示すように、高度成長期に建設・製造された化学プラントや発電所などのパイプライン１０では、保温材１０ｃ付き配管１０ａの内部管１０ｂの腐食や減肉が問題となっている。そこで、保温材１０ｃを取り外さずに配管１０ａの腐食などを検査するためＸ線透過法が用いられている。 For example, as shown in FIG. 12, in a pipeline 10 such as a chemical plant or power plant constructed and manufactured in a high growth period, corrosion or thinning of the inner pipe 10b of the pipe 10a with the heat insulating material 10c becomes a problem. Yes. Therefore, an X-ray transmission method is used to inspect the corrosion of the pipe 10a without removing the heat insulating material 10c.
しかし、従来のＸ線源２’はサイズが大きく、重量が重く、電源供給用の配線が必要といった制限から現場での作業性が悪く、多数の配管が設置されているような狭い空間（７０ｍｍ程度、図１２（Ｂ））で使うことは難しかった。そのため、狭い空間でも利用できる小型のＸ線源２が求められていた。 However, the conventional X-ray source 2 'is large in size, heavy, and has poor workability on site due to the limitations of the need for power supply wiring, and a narrow space (70 mm) where many pipes are installed. However, it was difficult to use in FIG. Therefore, a small X-ray source 2 that can be used even in a narrow space has been demanded.
また、プラントのような構造物、例えばパイプライン１０等では検査対象が長大、多数であり、作業員のＸ線被ばく低減や作業の効率化のために、ロボットなどに搭載し、移動しながら検査できる小型軽量のＸ線源２も望まれていた。さらに、Ｘ線源を酷使して膨大な数の検査対象の非破壊検査を行っても、長期間交換不要な長寿命のＸ線源も求められている。 In addition, a structure such as a plant such as a pipeline 10 has a long and large number of inspection targets, and is mounted on a robot or the like for inspection while moving to reduce the X-ray exposure of workers and increase work efficiency. A compact and lightweight X-ray source 2 is also desired. Furthermore, there is a need for a long-life X-ray source that does not require long-term replacement even if the X-ray source is overused and a large number of non-destructive inspections are performed.
他方、配管の非破壊検査用の非破壊検査装置として、特許文献１が公開されている。特許文献１の非破壊検査装置１ａは、配管用の非破壊検査装置の設置スペースの狭小化及び検査時間の短縮化を図るため、Ｘ線、γ線などの放射線を検査対象の配管２に放射する放射線源３と、放射線源３より放射されて配管２を透過した放射線を取り込んで受像を行うカラーイメージインテンシファイヤ６と、配管２を挟んで各々対向させるべき放射線源３とカラーＩ．Ｉ．６との相対的な位置及び姿勢を定位させる位置決め機構５と、カラーＩ．Ｉ．６から出力されるカラーの信号をそれぞれ波長成分毎に分解して画像処理を行う画像処理装置７とからなる。 On the other hand, Patent Document 1 is disclosed as a nondestructive inspection apparatus for nondestructive inspection of piping. The nondestructive inspection apparatus 1a of Patent Document 1 radiates radiation such as X-rays and γ rays to the pipe 2 to be inspected in order to reduce the installation space of the nondestructive inspection apparatus for piping and shorten the inspection time. Radiation source 3, a color image intensifier 6 that receives the radiation emitted from the radiation source 3 and transmitted through the pipe 2, and the radiation source 3 to be opposed to each other across the pipe 2. I. A positioning mechanism 5 for positioning the relative position and posture with respect to 6; I. 6 includes an image processing device 7 that performs image processing by decomposing the color signal output from each wavelength component.
しかしながら、特許文献１の発明は、特定の形状、構造の配管であれば検査可能であるが、汎用性がない点が問題であった。加えて、他の検査対象への適用範囲も狭い。Ｘ線源については、長寿命、高解像度、低ランニングコストに関し、具体的な構造、特性について、開示がない。 However, the invention of Patent Document 1 can be inspected as long as the pipe has a specific shape and structure, but there is a problem in that it is not versatile. In addition, the application range to other inspection objects is also narrow. Regarding the X-ray source, there is no disclosure regarding the specific structure and characteristics regarding long life, high resolution, and low running cost.
そこで、本発明は、小型で、薄く、軽いＸ線非破壊検査に用いられ、高解像度で、かつ低ランニングコストで、検査対象の種々の形状、構造にも適用できる、汎用性のあるポータブルＸ線検査装置を提供することを目的とする。 Therefore, the present invention is a portable X that is versatile and can be applied to various shapes and structures to be inspected, which is used for X-ray non-destructive inspection which is small, thin and light, has high resolution and low running cost. An object is to provide a line inspection apparatus.
上記の課題を解決するために、本発明は、
（１）
小型で、薄く、軽いながら高出力パルスのＸ線を発生させＸ線非破壊検査に用いられるポータブルＸ線検査装置であって、
電源、検査対象にＸ線を照射するＸ線管、前記Ｘ線管に印加するパルス高電圧を複数段の昇圧回路により生成する高電圧化回路群、前記高電圧化回路群でパルス高電圧の発生タイミングおよびパルス幅を可変制御して前記Ｘ線の照射タイミングを決定する駆動回路を内蔵したＸ線源と、
前記Ｘ線源のＸ線発生のタイミングと同期して前記検査対象を透過した前記Ｘ線を感知するデジタル式のＸ線検出器と、
前記Ｘ線検出器の検出信号をデジタル画像として表示・保存可能に処理する制御装置と、
前記デジタル画像を表示するモニタと、
からなり、
前記高電圧化回路群が、
１．２Ｖ〜６ＶをＤＣ５０Ｖ〜８０Ｖに昇圧するＤＣ−ＤＣコンバータ回路を含む第一段高圧回路と、
前記ＤＣ５０Ｖ〜８０Ｖに昇圧された電圧をさらにＡＣ８ｋＶ〜１５ｋＶに昇圧する巻線小型トランスのＤＣ−ＡＣコンバータ回路を含む第二段陽極高圧回路と、
前記ＤＣ５０Ｖ〜８０Ｖに昇圧された電圧をさらにＡＣ５ｋＶ〜１０ｋＶに昇圧する巻線小型トランスのＤＣ−ＡＣコンバータ回路を含む第二段陰極高圧回路と、
前記ＡＣ８ｋＶ〜１５ｋＶに昇圧された陽極側の電圧をさらにＡＣ５０ｋＶ〜１００ｋＶに昇圧する、コンデンサとダイオードとからなり、前記Ｘ線管に最適化された多段のコッククロフト・ウォルトン回路を含む第三段陽極高圧回路と、
前記ＡＣ５ｋＶ〜１０ｋＶに昇圧された陰極側の電圧をさらにＡＣ４０ｋＶ〜８０ｋＶに昇圧する、コンデンサとダイオードとからなり、前記極Ｘ線管に最適化された多段のコッククロフト・ウォルトン回路を含む第三段陰極高圧回路と、
からなることを特徴とするポータブルＸ線検査装置。
（２）
前記Ｘ線検出器が、Ｘ線の照射タイミングに同期して、有線あるいは無線の同期信号によりＸ線の検出をすることを特徴とする（１）に記載のポータブルＸ線検査装置。
（３）
前記同期は、前記制御装置が、Ｘ線検査開始信号であるトリガーを前記Ｘ線源及び前記Ｘ線検出器に有線あるいは無線により送り、前記トリガーを受けて、前記Ｘ線源はＸ線を照射し、前記Ｘ線検出器が前記Ｘ線の検出を開始することを特徴とする（２）に記載のポータブルＸ線検査装置。
（４）
前記駆動回路が、前記パルス高電圧の値、前記パルス幅及びパルス数の内いずれか１種以上を変動させる制御を行い、前記Ｘ線の照射量を可変としたことを特徴とする（１）に記載のポータブルＸ線検査装置。
（５）
前記Ｘ線源が、
前記Ｘ線管と、前記Ｘ線管を被覆する絶縁モールドから成る本体と、前記複数段の昇圧回路の内の最終段の昇圧回路、前記電源および前記駆動回路を含む操作部とからなり、
前記本体と前記操作部が分離され、有線あるいは無線で接続され、遠隔操作により、
前記パルス高電圧の値、前記パルス幅及びパルス数を変動させる制御を行い、前記操作部と離れた場所でＸ線を発生させ、前記Ｘ線の照射量を可変としたことを特徴とする（１）に記載のポータブルＸ線検査装置。
とした。
In order to solve the above problems, the present invention provides:
(1)
A portable X-ray inspection device that generates X-rays with high output pulses while being small, thin and light, and is used for X-ray non-destructive inspection.
A power source, an X-ray tube that irradiates the inspection target with X-rays, a high-voltage circuit group that generates a pulse high voltage to be applied to the X-ray tube by a plurality of booster circuits, An X-ray source having a built-in drive circuit that variably controls the generation timing and pulse width to determine the X-ray irradiation timing;
A digital X-ray detector that senses the X-ray transmitted through the inspection object in synchronization with the X-ray generation timing of the X-ray source;
A control device for processing the detection signal of the X-ray detector so as to be displayed and stored as a digital image;
A monitor for displaying the digital image;
Tona is,
The high voltage circuit group is:
A first-stage high-voltage circuit including a DC-DC converter circuit that boosts 1.2 V to 6 V to DC 50 V to 80 V;
A second-stage anode high-voltage circuit including a DC-AC converter circuit of a winding small transformer that further boosts the voltage boosted to DC 50 V to 80 V to AC 8 kV to 15 kV;
A second-stage cathode high-voltage circuit including a DC-AC converter circuit of a winding small transformer that further boosts the voltage boosted to DC 50 V to 80 V to AC 5 kV to 10 kV;
A third-stage anode high voltage comprising a multi-stage Cockcroft-Walton circuit, which is composed of a capacitor and a diode, further boosting the voltage on the anode side boosted to 8 kV to 15 kV to 50 kV to 100 kV, and optimized for the X-ray tube Circuit,
A third-stage cathode including a multistage Cockcroft-Walton circuit, which is composed of a capacitor and a diode, further boosting the cathode-side voltage boosted to 5 kV to 10 kV to 40 kV to 80 kV, and optimized for the polar X-ray tube A high voltage circuit,
A portable X-ray inspection apparatus characterized by comprising:
( 2 )
The portable X-ray inspection apparatus according to (1), wherein the X-ray detector detects an X-ray by a wired or wireless synchronization signal in synchronization with an X-ray irradiation timing.
( 3 )
In the synchronization, the control device sends a trigger, which is an X-ray inspection start signal, to the X-ray source and the X-ray detector by wire or wirelessly, receives the trigger, and the X-ray source emits X-rays. The portable X-ray inspection apparatus according to ( 2 ), wherein the X-ray detector starts detection of the X-ray.
( 4 )
The drive circuit performs control to vary one or more of the value of the pulse high voltage, the pulse width, and the number of pulses, and makes the X-ray dose variable (1) Portable X-ray inspection apparatus as described in 1.
( 5 )
The X-ray source is
The X-ray tube, a main body made of an insulating mold that covers the X-ray tube, and a final-stage booster circuit of the plurality of booster circuits, an operation unit including the power supply and the drive circuit,
The main body and the operation unit are separated, connected by wire or wirelessly, by remote operation,
Control is performed to vary the value of the pulse high voltage, the pulse width, and the number of pulses, X-rays are generated at a location distant from the operation unit, and the X-ray irradiation dose is variable ( The portable X-ray inspection apparatus according to 1).
It was.
本発明は以上の構成であるので、以下の効果を発揮する。小型で、薄く、軽いＸ線非破壊検査に用いられ、高解像度で、かつ低ランニングコストで、検査対象の種々の形状、構造にも適用できる、汎用性のある小型軽量可搬型Ｘ線検査装置を提供できる。 Since this invention is the above structure, the following effects are exhibited. A compact, lightweight and portable X-ray inspection device that is small, thin and light, used for non-destructive X-ray inspection, can be applied to various shapes and structures of inspection objects with high resolution and low running cost. Can provide.
より具体的には、Ｘ線照射と検出を同期させることで、Ｘ線が照射されたときだけ検出器を動作させるので、Ｘ線が照射されていない間に発生する検出器のバックグラウンドノイズがなくなり、ノイズ成分を減らせるため、Ｓ／Ｎ（Ｓｉｇｎａｌ／Ｎｏｉｓｅ）が良くなり、高解像度画像（綺麗な画像）として検査結果を取得できる。また、厚さ７０ｍｍ以下、重さ６ｋｇ以下の小型軽量なＸ線源が実現でき、さらにＸ線検出器、モニタを組み合わせ、ロボットなどに搭載し、Ｘ線発生とデータ通信を無線通信とすれば、高所、狭小スペースであっても、効率的な非破壊Ｘ線検査が安全に行える。検査コスト、ランニングコストの大きな削減になる。 More specifically, by synchronizing X-ray irradiation and detection, the detector is operated only when X-rays are irradiated, so the detector background noise that occurs while X-rays are not irradiated is reduced. Since the noise component is reduced and the S / N (Signal / Noise) is improved, the inspection result can be acquired as a high resolution image (beautiful image). In addition, a compact and lightweight X-ray source with a thickness of 70 mm or less and a weight of 6 kg or less can be realized. Furthermore, if an X-ray detector and a monitor are combined and mounted on a robot, etc., X-ray generation and data communication are made wireless communication. Efficient nondestructive X-ray inspection can be performed safely even in high places and narrow spaces. This greatly reduces inspection costs and running costs.
エージングしたカーボンナノ構造体を電子源に用いることで、予熱が不要ですぐＸ線を照射でき、乾電池でも駆動できるほど省電力で、さらにカーボンナノ構造体Ｘ線管の長寿命化が可能になり、使用頻度が高い現場でも長期間Ｘ線管の交換が不要になる。 By using an aged carbon nanostructure as an electron source, it is possible to irradiate X-rays immediately without the need for preheating, power savings that can be driven by a dry cell, and further extending the life of the carbon nanostructure X-ray tube. Even if the site is used frequently, it is not necessary to replace the X-ray tube for a long time.
加えて、複数段の昇圧回路で、高圧電圧化回路を適正化することで、乾電池などの電源であっても、ミリ秒オーダー短時間で高出力パルスＸ線を発生でき、パルス照射のため、電源および昇圧回路が小型で外部漏えいを最低限に抑えられ、動く物の撮影やＸ線源を移動しながらの撮影も可能になり、Ｘ線検査の応用範囲が広がる。 In addition, by optimizing the high voltage circuit with a multi-stage booster circuit, even a power source such as a dry battery can generate high output pulse X-rays in a short time on the order of milliseconds, and for pulse irradiation, The power supply and booster circuit are small and external leakage can be minimized, so that moving objects can be imaged and X-ray sources can be moved while moving, expanding the application range of X-ray inspection.
以下、添付図面に基づき、本発明の実施の形態について詳細に説明する。ただし、本発明はそれら実施形態に限定されるものではない。 Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited to these embodiments.
図１、４等に示すように、本発明の一例であるポータブルＸ線検査装置１は、Ｘ線源２と、Ｘ線検出器３と、モニタ４ｄ及び制御装置４ａを含むＰＣ４とからなる。本発明では、例えば、配管１０ａから外被１０ｄ、保温材１０ｃを外すことなく、配管１０ａにＸ線２ａを照射して、保温材１０ｃで被覆された内部管１０ｂの劣化等をＸ線撮影（検査画像４ｅ）で確認（Ｘ線非破壊検査）することができる。Ｘ線源２及びＸ線検出器３を、ＰＣ４によって無線通信６、７でも制御することができる。 As shown in FIGS. 1 and 4 and the like, a portable X-ray inspection apparatus 1 which is an example of the present invention includes an X-ray source 2, an X-ray detector 3, and a PC 4 including a monitor 4d and a control device 4a. In the present invention, for example, the X-ray 2a is irradiated to the pipe 10a without removing the jacket 10d and the heat insulating material 10c from the pipe 10a, and the deterioration of the internal tube 10b covered with the heat insulating material 10c is X-ray photographed ( The inspection image 4e) can be confirmed (X-ray nondestructive inspection). The X-ray source 2 and the X-ray detector 3 can also be controlled by the wireless communication 6 and 7 by the PC 4.
図２に示すように、検査対象が、配管１０ａであれば、（Ａ）のように全体に、Ｘ線源２からＸ線２ａを配管全体に照射し、配管１０ａの全体像をＸ線検出器３を介して撮影すること、（Ｂ）に示すように、エッジ１０ｅ部分を撮影し、内部管１０ｂの肉厚度合いを検査することもできる。図２（Ｂ）に示すエッジ１０ｅの撮影結果（検査画像４ｅ）を図３に示す。 As shown in FIG. 2, when the inspection object is a pipe 10a, the whole pipe is irradiated with the X-ray 2a from the X-ray source 2 as shown in FIG. It is also possible to take an image through the vessel 3, and as shown in (B), to take an image of the edge 10e and inspect the thickness of the inner tube 10b. The imaging result (inspection image 4e) of the edge 10e shown in FIG. 2B is shown in FIG.
図３に示すように、Ｘ線源２及びＸ線検出器３を用いた配管１０ａのＸ線非破壊検査（撮影）において、保温材１０ｃで被覆された内部管１０ｂの保温材１０ｃとの境界であるエッジ１０ｅ部分を、内部管画像４ｆと保温材画像４ｇの境界として明確に確認することができるとともに、内部管１０ｂに人工的に形成した傷（スリット４ｈ）もはっきり確認することができる。 As shown in FIG. 3, in the X-ray nondestructive inspection (imaging) of the pipe 10a using the X-ray source 2 and the X-ray detector 3, the boundary between the inner tube 10b covered with the heat insulating material 10c and the heat insulating material 10c. The edge 10e portion can be clearly confirmed as a boundary between the inner tube image 4f and the heat insulating material image 4g, and a flaw (slit 4h) artificially formed in the inner tube 10b can also be clearly confirmed.
以下、本発明の一例であるポータブルＸ線検査装置１の構成について詳しく説明する。 Hereinafter, the configuration of the portable X-ray inspection apparatus 1 which is an example of the present invention will be described in detail.
Ｘ線源２は、Ｘ線２ａを検査対象１１に照射するもので、図４−６に示すように、電池２ｂと、駆動回路２ｑと、高電圧化回路群２ｃと、Ｘ線管５からなる。それらは、絶縁モールドで被覆され、筐体２ｒ内に内蔵され、筐体２ｒには操作部２ｆとアンテナ２ｅが設けられる。Ｘ線源２のアンテナ２ｅは、ＰＣ４とＸ線源２との無線通信６に用いられる。 The X-ray source 2 irradiates the inspection object 11 with the X-ray 2a. As shown in FIG. 4-6, the battery 2b, the drive circuit 2q, the high-voltage circuit group 2c, and the X-ray tube 5 Become. They are covered with an insulating mold and built in the housing 2r. The housing 2r is provided with an operation unit 2f and an antenna 2e. The antenna 2 e of the X-ray source 2 is used for wireless communication 6 between the PC 4 and the X-ray source 2.
Ｘ線源２は、乾電池（電池２ｂ）１本の電圧（１．２Ｖ）でも駆動し、配管１０ａの鮮明なＸ線画像を撮影するのに十分な放射線エネルギーレベルのＸ線２ａを出力（１００ｋｅＶ〜１５０ｋｅＶ程度）することができるが、より長時間の駆動に耐えるため、６Ｖ等のリチウム電池などを採用するとよい。 The X-ray source 2 is also driven by a voltage (1.2 V) of one dry battery (battery 2b), and outputs an X-ray 2a having a radiation energy level sufficient to take a clear X-ray image of the pipe 10a (100 keV). However, in order to withstand driving for a longer time, a lithium battery of 6V or the like may be employed.
駆動回路２ｑは、Ｘ線管５に印加されるパルス高電圧２ｐの生成を制御し、パルス高電圧の値、パルス幅、パルス数を変動させ、Ｘ線２ａの照射量を可変制御する。操作部２ｆは、駆動回路２ｑの設置を入力するボタンである。 The drive circuit 2q controls the generation of the pulse high voltage 2p applied to the X-ray tube 5, varies the value of the pulse high voltage, the pulse width, and the number of pulses, and variably controls the irradiation amount of the X-ray 2a. The operation unit 2f is a button for inputting installation of the drive circuit 2q.
高電圧化回路群２ｃは、図６に示すように、電池に接続する（Ｂ）第一段高電圧回路２ｇ、第二段陽極高電圧回路２ｈ及び第二段陰極高電圧回路２ｉと、（Ｃ）第三段陽極昇圧回路２ｋ及び第三段陰極昇圧回路２ｎとからなり、（Ｄ）Ｘ線管５にパルス高電圧２ｐを印加する。図６を参照して、１．２Ｖ〜６Ｖから陽極、陰極合わせてＡＣ１００ｋＶ〜１５０ｋＶ範囲内のパルス高電圧２ｐを生成する機構について説明する。 As shown in FIG. 6, the high voltage circuit group 2c is connected to a battery (B) a first stage high voltage circuit 2g, a second stage anode high voltage circuit 2h, and a second stage cathode high voltage circuit 2i; C) It comprises a third stage anode booster circuit 2k and a third stage cathode booster circuit 2n, and (D) a pulse high voltage 2p is applied to the X-ray tube 5. With reference to FIG. 6, a mechanism for generating a pulse high voltage 2p in the range of AC 100 kV to 150 kV from 1.2 V to 6 V in combination with the anode and the cathode will be described.
第一段高電圧回路２ｇは、ＤＣ−ＤＣコンバータによる昇圧回路を含み、乾電池（電池２ｂ）の電圧（１．２Ｖ〜６Ｖ）をＤＣ５０Ｖ〜８０Ｖに昇圧する。 The first stage high voltage circuit 2g includes a booster circuit using a DC-DC converter, and boosts the voltage (1.2V to 6V) of the dry battery (battery 2b) to DC50V to 80V.
第二段陽極高電圧回路２ｈは、Ｘ線管５の陽極に印加される電圧の二段階目の昇圧回路であり、トランスを用いたＤＣ−ＡＣコンバータによる昇圧回路を含み、おおよそＤＣ８０Ｖの入力電圧をおおよそＡＣ１５ｋＶに昇圧させる。 The second-stage anode high-voltage circuit 2h is a second-stage booster circuit for the voltage applied to the anode of the X-ray tube 5, includes a booster circuit using a DC-AC converter using a transformer, and has an input voltage of approximately DC80V. Is raised to approximately AC 15 kV.
第二段陰極高電圧回路２ｉは、Ｘ線管５の陰極に印加される電圧の二段階目の昇圧回路であり、陽極と同じようにトランスを用いたＤＣ−ＡＣコンバータによる昇圧回路を含み、おおよそＤＣ８０Ｖの入力電圧をおおよそＡＣ１０ｋＶに昇圧させる。 The second-stage cathode high-voltage circuit 2i is a second-stage booster circuit for the voltage applied to the cathode of the X-ray tube 5, and includes a booster circuit using a DC-AC converter using a transformer in the same manner as the anode. The input voltage of about DC80V is boosted to about AC10kV.
第三段陽極昇圧回路２ｋは、Ｘ線管５の陽極に印加される電圧の三段階目の昇圧回路であり、多段のコッククロフト・ウォルトン回路でその段数を最適化した回路を含み、おおよそＡＣ１５ｋＶの入力電圧をおおよそＡＣ１００ｋＶに昇圧させる。 The third-stage anode booster circuit 2k is a third-stage booster circuit for the voltage applied to the anode of the X-ray tube 5 and includes a circuit whose number of stages is optimized by a multistage Cockcroft-Walton circuit. The input voltage is boosted to approximately AC 100 kV.
第三段陰極昇圧回路２ｎは、Ｘ線管５の陰極に印加される電圧の三段階目の昇圧回路であり、陽極と同じように、多段のコッククロフト・ウォルトン回路でその段数を最適化した回路を含み、おおよそＡＣ１０ｋＶの入力電圧をおおよそＡＣ８０ｋＶに昇圧させる。 The third-stage cathode booster circuit 2n is a third-stage booster circuit for the voltage applied to the cathode of the X-ray tube 5 and, like the anode, is a circuit in which the number of stages is optimized by a multistage Cockcroft-Walton circuit. The input voltage of approximately AC 10 kV is boosted to approximately AC 80 kV.
第三段陽極、陰極昇圧回路２ｋ、２ｎの回路図を図７に示す。図７に示すように、第三段陽極、陰極昇圧回路２ｋ、２ｎは、コンデンサとダイオードとからなり、冷陰極Ｘ線管の特性に合わせて段数を最適化する点に特徴がある。 A circuit diagram of the third stage anode / cathode booster circuits 2k, 2n is shown in FIG. As shown in FIG. 7, the third stage anode / cathode booster circuits 2k, 2n are composed of capacitors and diodes, and are characterized in that the number of stages is optimized in accordance with the characteristics of the cold cathode X-ray tube.
乾電池の電圧（１．２Ｖ〜６Ｖ）が、これらの回路を経ることで、およそＡＣ１５０ｋＶのパルス高電圧２ｐとして、Ｘ線管５に印加され、１５０ｋｅＶのＸ線２ａを出射させることができる。 By passing through these circuits, the voltage (1.2V to 6V) of the dry battery is applied to the X-ray tube 5 as a pulse high voltage 2p of approximately AC 150 kV, and the X-ray 2 a of 150 keV can be emitted.
図４に示すように、Ｘ線検出器３は、Ｘ線源２とで検査対象１１を挟む位置に配置され、検査対象１１を透過したＸ線２ａをデジタル式の２次元画像データとして感知し、制御装置４ａに、有線、Ｘ線検出器３のアンテナ３ａを介して無線通信６で送信する。 As shown in FIG. 4, the X-ray detector 3 is arranged at a position sandwiching the inspection object 11 with the X-ray source 2, and senses the X-ray 2a transmitted through the inspection object 11 as digital two-dimensional image data. Then, the signal is transmitted to the control device 4a by the wireless communication 6 through the antenna 3a of the wired / X-ray detector 3.
Ｘ線検出器３としては、例えば、シンチレータ、ＣＣＤ、ＣＭＯＳ、ＣｄＴｅ半導体などが例示される。 Examples of the X-ray detector 3 include a scintillator, a CCD, a CMOS, and a CdTe semiconductor.
ＰＣ４は、図１、４に示すように、モニタ４ｄ、制御装置４ａからなり、Ｘ線検出器３で取得されたデータは、制御装置４ａでモニタ４ｄに表示可能なデータに処理され、モニタ４ｄでリアルタイムに検査対象１１のＸ線画像（検査画像４ｅ）を確認することができる。当然、取得データ、検査画像４ｅは、記録媒体に保存することもできる。制御装置４ａには、後述のＸ線２ａの照射と、Ｘ線検出器３の検出開始の同期を制御するトリガー４ｃを生成する同期生成部４ｂを含む。 As shown in FIGS. 1 and 4, the PC 4 includes a monitor 4d and a control device 4a. Data acquired by the X-ray detector 3 is processed into data that can be displayed on the monitor 4d by the control device 4a. Thus, the X-ray image (inspection image 4e) of the inspection object 11 can be confirmed in real time. Of course, the acquired data and the inspection image 4e can be stored in a recording medium. The control device 4a includes a synchronization generation unit 4b that generates a trigger 4c that controls the synchronization of irradiation of an X-ray 2a described later and detection start of the X-ray detector 3.
次に、図８を参照して、Ｘ線２ａの照射と、Ｘ線検出器３の検出開始の同期機構を説明する。制御装置４ａの同期生成部４ｂが、スタート信号を受けて、Ｘ線検査開始信号であるトリガー４ｃをＸ線源２（駆動回路２ｑ）及びＸ線検出器３に送り、それらがトリガー４ｃを受けて、Ｘ線源２はＸ線２ａを照射し、Ｘ線検出器３はトリガー４ｃからＸ線２ａ照射までの時間ロスを見込んでＸ線２ａの検出を開始する。これにより、検査画像４ｅのノイズを抑制するとともに、周囲環境の被曝低減に資する。 Next, with reference to FIG. 8, the synchronization mechanism of X-ray 2a irradiation and detection start of the X-ray detector 3 will be described. The synchronization generator 4b of the control device 4a receives the start signal, sends a trigger 4c, which is an X-ray inspection start signal, to the X-ray source 2 (drive circuit 2q) and the X-ray detector 3, and receives the trigger 4c. The X-ray source 2 irradiates the X-ray 2a, and the X-ray detector 3 starts detection of the X-ray 2a in anticipation of a time loss from the trigger 4c to the X-ray 2a irradiation. Thereby, while suppressing the noise of the test | inspection image 4e, it contributes to the exposure reduction of the surrounding environment.
その後、取得された撮影データは、Ｘ線検出器３とＰＣ４との無線通信７で、ＰＣ４に送られ、制御装置４ａによる画像処理が施され、モニタ４ｄに、検査画像４ｅとして、表示される。 Thereafter, the acquired imaging data is sent to the PC 4 by the wireless communication 7 between the X-ray detector 3 and the PC 4, subjected to image processing by the control device 4a, and displayed on the monitor 4d as the inspection image 4e. .
このようにしてなる本願発明は、配管１０ａに限らず、図９（Ａ）に示すように、内部に収納された回路の撮影、検査、図９（Ｂ）に示すように、人の手のＸ線撮影等にも利用でき、汎用範囲は極めて広い。また、パルス間隔も任意に、１ｍｓ〜１０００ｍｓなどで設定できるので、高速運動する検査対象を連続撮影することで、鮮明な静止画像が撮影できるとともに、検査画像を連続再生することで、まるで動画のように確認することもできる。 The present invention thus configured is not limited to the pipe 10a, but as shown in FIG. 9A, the photographing and inspection of the circuit housed therein, as shown in FIG. It can also be used for X-ray photography and has a very wide general-purpose range. In addition, the pulse interval can be arbitrarily set from 1 ms to 1000 ms, etc., so that a continuous still image of an inspection object that moves at high speed can be used to capture a clear still image, and a continuous reproduction of the inspection image makes it possible to It can also be confirmed.
次に、Ｘ線管について説明する。図１０に示すように、Ｘ線管５としては、例えば、カーボンナノ構造体三極式冷陰極Ｘ線管５ａなどがあり、小型で、パルス高電圧２ｐの印加を受けて、陰極５ｂ側のカーボンナノ構造体冷陰極５ｄで発生した電子５ｅを陽極５ｃ側のターゲット５ｆに照射して、Ｘ線２ａを発生させ、出射口５ｇから放出する。なお、Ｘ線管５が、乾電池、バッテリ、商用電源で駆動する原理、構成は、特許文献２及び非特許文献１に詳しく記載されている。 Next, the X-ray tube will be described. As shown in FIG. 10, as the X-ray tube 5, for example, there is a carbon nanostructure triode cold cathode X-ray tube 5a, etc., which is small in size and receives a pulse high voltage 2p, and on the cathode 5b side. Electrons 5e generated at the carbon nanostructure cold cathode 5d are irradiated onto the target 5f on the anode 5c side to generate X-rays 2a, which are emitted from the emission port 5g. Note that the principle and configuration in which the X-ray tube 5 is driven by a dry cell, a battery, and a commercial power source are described in detail in Patent Document 2 and Non-Patent Document 1.
本発明で用いるカーボンナノ構造体三極式冷陰極５ａは、例えば、図１１に示すように、カーボンナノチューブ、カーボンナノウール、ナノダイヤモンドのランダムが混在した先端に向け全体としてテーパー状で、先端から電子５ｅを、Ｘ線２ａを発生させるターゲット５ｆに放出する。ただし、この形状に限定されるものではない。カーボンナノ構造体冷陰極は、例えば、冷陰極に徐々に電圧、電流をかけて、冷陰極の特性を安定させるエージング処理により寿命が延びる。 The carbon nanostructure tripolar cold cathode 5a used in the present invention is, for example, as shown in FIG. 11, tapered as a whole toward the tip where random carbon nanotubes, carbon nanowool, and nanodiamond are mixed. Electrons 5e are emitted to a target 5f that generates X-rays 2a. However, it is not limited to this shape. The lifetime of the carbon nanostructure cold cathode is extended by, for example, aging treatment that gradually applies voltage and current to the cold cathode to stabilize the properties of the cold cathode.
図１３に、本発明であるポータブルＸ線検査装置２１のＸ線源分離型の第２の実施例について説明する。 FIG. 13 illustrates a second embodiment of the X-ray source separation type of the portable X-ray inspection apparatus 21 according to the present invention.
Ｘ線源２２は、Ｘ線管５と、Ｘ線管５を被覆する絶縁モールドから成る本体２２ａと、
複数段の昇圧回路の内の最終段の昇圧回路、電池２ｂなどの電源および駆動回路２ｑを含む操作部２２ｆとからなり、
本体２２ａと操作部２ｆが分離され、例えばコード２２ｂなどの有線、あるいは無線で接続され、遠隔操作により、
パルス高電圧の値、パルス幅及びパルス数を変動させる制御を行い、操作部２２ｆと離れた場所でＸ線２ａを発生させ、Ｘ線２ａの照射量を可変する。これにより、汎用性が高く、被ばくも避けられて、安全なＸ線検査装置となる。Ｘ線検出器３は、Ｘ線２ａの照射に、ＰＣ４及び無線機２３のアンテナ２３ａを介して無線通信６ａ、７ａで同期させることもできる。ＰＣ４と無線機２３は、通信２３ｂで電気的に接続する。
The X-ray source 22 includes an X-ray tube 5, a main body 22 a made of an insulating mold that covers the X-ray tube 5,
A final stage booster circuit among a plurality of stage booster circuits, a power source such as a battery 2b, and an operation unit 22f including a drive circuit 2q.
The main body 22a and the operation unit 2f are separated and connected, for example, by a wired or wireless connection such as a cord 22b.
Control is performed to vary the value of the pulse high voltage, the pulse width, and the number of pulses, X-ray 2a is generated at a location distant from the operation unit 22f, and the irradiation amount of X-ray 2a is varied. Thereby, versatility is high, exposure is avoided, and it becomes a safe X-ray inspection apparatus. The X-ray detector 3 can also be synchronized with the irradiation of the X-ray 2a by the wireless communication 6a, 7a via the PC 4 and the antenna 23a of the wireless device 23. The PC 4 and the wireless device 23 are electrically connected by communication 23b.
１ ポータブルＸ線検査装置
２ Ｘ線源
２’ 従来のＸ線源
２ａ Ｘ線
２ｂ 電池
２ｃ 高電圧化回路群
２ｅ アンテナ
２ｆ 操作部
２ｇ 第一段高電圧回路
２ｈ 第二段陽極高電圧回路
２ｉ 第二段陰極高電圧回路
２ｋ 第三段陽極昇圧回路
２ｎ 第三段陰極昇圧回路
２ｐ パルス高電圧
２ｑ 駆動回路
２ｒ 筐体
３ Ｘ線検出器
３ａ アンテナ
４ ＰＣ
４ａ 制御装置
４ｂ 同期生成部
４ｃ トリガー
４ｄ モニタ
４ｅ 検査画像
４ｆ 内部管画像
４ｇ 保温材画像
４ｈ スリット
５ Ｘ線管
５ａ カーボンナノ構造体三極式冷陰極Ｘ線管
５ｂ 陰極
５ｃ 陽極
５ｄ カーボンナノ構造体冷陰極
５ｅ 電子
５ｆ ターゲット
５ｇ 出射口
５ｈ 中間極
５ｉ 孔
５ｋ グランド
６ 無線通信
６ａ 無線通信
７ 無線通信
７ａ 無線通信
１０ パイプライン
１０ａ 配管
１０ｂ 内部管
１０ｃ 保温材
１０ｄ 外被
１０ｅ エッジ
１１ 検査対象
２１ ポータブルＸ線検査装置
２２ Ｘ線源
２２ａ 本体
２２ｂ コード
２２ｆ 操作部
２３ 無線機
２３ａ アンテナ
２３ｂ 通信
DESCRIPTION OF SYMBOLS 1 Portable X-ray inspection apparatus 2 X-ray source 2 'Conventional X-ray source 2a X-ray 2b Battery 2c High voltage circuit group 2e Antenna 2f Operation part 2g First stage high voltage circuit 2h Second stage anode high voltage circuit 2i Two-stage cathode high voltage circuit 2k Third stage anode boost circuit 2n Third stage cathode boost circuit 2p Pulse high voltage 2q Drive circuit 2r Housing 3 X-ray detector 3a Antenna 4 PC
4a Control device 4b Trigger generator 4c Trigger 4d Monitor 4e Inspection image 4f Inner tube image 4g Thermal insulation image 4h Slit 5 X-ray tube 5a Carbon nanostructure Tripolar cold cathode X-ray tube 5b Cathode 5c Anode 5d Carbon nanostructure Cold cathode 5e Electron 5f Target 5g Emission port 5h Middle pole 5i Hole 5k Ground 6 Wireless communication 6a Wireless communication 7 Wireless communication 7a Wireless communication 10 Pipeline 10a Pipe 10b Inner tube 10c Heat insulating material 10d Outer cover 10e Edge 11 Inspection object 21 Portable X X-ray source 22a Main body 22b Code 22f Operation unit 23 Radio 23a Antenna 23b Communication
Claims (5)
電源、検査対象にＸ線を照射するＸ線管、前記Ｘ線管に印加するパルス高電圧を複数段の昇圧回路により生成する高電圧化回路群、前記高電圧化回路群でパルス高電圧の発生タイミングおよびパルス幅を可変制御して前記Ｘ線の照射タイミングを決定する駆動回路を内蔵したＸ線源と、
前記Ｘ線源のＸ線発生のタイミングと同期して前記検査対象を透過した前記Ｘ線を感知するデジタル式のＸ線検出器と、
前記Ｘ線検出器の検出信号をデジタル画像として表示・保存可能に処理する制御装置と、
前記デジタル画像を表示するモニタと、
からなり、
前記高電圧化回路群が、
１．２Ｖ〜６ＶをＤＣ５０Ｖ〜８０Ｖに昇圧するＤＣ−ＤＣコンバータ回路を含む第一段高圧回路と、
前記ＤＣ５０Ｖ〜８０Ｖに昇圧された電圧をさらにＡＣ８ｋＶ〜１５ｋＶに昇圧する巻線小型トランスのＤＣ−ＡＣコンバータ回路を含む第二段陽極高圧回路と、
前記ＤＣ５０Ｖ〜８０Ｖに昇圧された電圧をさらにＡＣ５ｋＶ〜１０ｋＶに昇圧する巻線小型トランスのＤＣ−ＡＣコンバータ回路を含む第二段陰極高圧回路と、
前記ＡＣ８ｋ〜１５ｋＶに昇圧された陽極側の電圧をさらにＡＣ５０ｋＶ〜１００ｋＶに昇圧する、コンデンサとダイオードとからなり、前記Ｘ線管に最適化された多段のコッククロフト・ウォルトン回路を含む第三段陽極高圧回路と、
前記ＡＣ５ｋ〜１０ｋＶに昇圧された陰極側の電圧をさらにＡＣ４０ｋＶ〜８０ｋＶに昇圧する、コンデンサとダイオードとからなり、前記極Ｘ線管に最適化された多段のコッククロフト・ウォルトン回路を含む第三段陰極高圧回路と、
からなることを特徴とするポータブルＸ線検査装置。 A portable X-ray inspection device that generates X-rays with high output pulses while being small, thin and light, and is used for X-ray non-destructive inspection.
A power source, an X-ray tube that irradiates the inspection target with X-rays, a high-voltage circuit group that generates a pulse high voltage to be applied to the X-ray tube by a plurality of booster circuits, An X-ray source having a built-in drive circuit that variably controls the generation timing and pulse width to determine the X-ray irradiation timing;
A digital X-ray detector that senses the X-ray transmitted through the inspection object in synchronization with the X-ray generation timing of the X-ray source;
A control device for processing the detection signal of the X-ray detector so as to be displayed and stored as a digital image;
A monitor for displaying the digital image;
Tona is,
The high voltage circuit group is:
A first-stage high-voltage circuit including a DC-DC converter circuit that boosts 1.2 V to 6 V to DC 50 V to 80 V;
A second-stage anode high-voltage circuit including a DC-AC converter circuit of a winding small transformer that further boosts the voltage boosted to DC 50 V to 80 V to AC 8 kV to 15 kV;
A second-stage cathode high-voltage circuit including a DC-AC converter circuit of a winding small transformer that further boosts the voltage boosted to DC 50 V to 80 V to AC 5 kV to 10 kV;
A third stage anode high voltage comprising a multi-stage Cockcroft-Walton circuit, which is composed of a capacitor and a diode, further boosting the voltage on the anode side boosted to AC8 k to 15 kV to AC 50 kV to 100 kV, and optimized for the X-ray tube Circuit,
A third-stage cathode including a multi-stage Cockcroft-Walton circuit, which is composed of a capacitor and a diode, and further optimizes the cathode-side voltage boosted to 5 to 10 kV AC to 40 to 80 kV, and is optimized for the polar X-ray tube A high voltage circuit,
A portable X-ray inspection apparatus characterized by comprising:
前記Ｘ線管と、前記Ｘ線管を被覆する絶縁モールドから成る本体と、前記複数段の昇圧回路の内の最終段の昇圧回路、前記電源および前記駆動回路を含む操作部とからなり、
前記本体と前記操作部が分離され、有線あるいは無線で接続され、遠隔操作により、
前記パルス高電圧の値、前記パルス幅及びパルス数を変動させる制御を行い、前記操作部と離れた場所でＸ線を発生させ、前記Ｘ線の照射量を可変としたことを特徴とする請求項１に記載のポータブルＸ線検査装置。 The X-ray source is
The X-ray tube, a main body made of an insulating mold that covers the X-ray tube, and a final-stage booster circuit of the plurality of booster circuits, an operation unit including the power supply and the drive circuit,
The main body and the operation unit are separated, connected by wire or wirelessly, by remote operation,
The control is performed to vary the value of the pulse high voltage, the pulse width, and the number of pulses, X-rays are generated at a location away from the operation unit, and the X-ray irradiation amount is variable. Item 2. The portable X-ray inspection apparatus according to Item 1.
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