JP6413006B1 - パーティクルカウンタ - Google Patents
パーティクルカウンタ Download PDFInfo
- Publication number
- JP6413006B1 JP6413006B1 JP2017227734A JP2017227734A JP6413006B1 JP 6413006 B1 JP6413006 B1 JP 6413006B1 JP 2017227734 A JP2017227734 A JP 2017227734A JP 2017227734 A JP2017227734 A JP 2017227734A JP 6413006 B1 JP6413006 B1 JP 6413006B1
- Authority
- JP
- Japan
- Prior art keywords
- light
- detection signal
- particles
- detection
- unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000002245 particle Substances 0.000 title claims abstract description 151
- 238000001514 detection method Methods 0.000 claims abstract description 177
- 238000001914 filtration Methods 0.000 claims abstract description 37
- 238000000034 method Methods 0.000 claims abstract description 24
- 230000003287 optical effect Effects 0.000 claims description 58
- 239000012530 fluid Substances 0.000 claims description 30
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 238000005259 measurement Methods 0.000 description 13
- 238000010586 diagram Methods 0.000 description 12
- 230000005684 electric field Effects 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 4
- 230000001427 coherent effect Effects 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 230000002238 attenuated effect Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 230000003467 diminishing effect Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 230000003313 weakening effect Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N15/14—Optical investigation techniques, e.g. flow cytometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N15/14—Optical investigation techniques, e.g. flow cytometry
- G01N15/1429—Signal processing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/02—Investigating particle size or size distribution
- G01N15/0205—Investigating particle size or size distribution by optical means
- G01N15/0211—Investigating a scatter or diffraction pattern
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N15/14—Optical investigation techniques, e.g. flow cytometry
- G01N15/1434—Optical arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N15/14—Optical investigation techniques, e.g. flow cytometry
- G01N15/1456—Optical investigation techniques, e.g. flow cytometry without spatial resolution of the texture or inner structure of the particle, e.g. processing of pulse signals
- G01N15/1459—Optical investigation techniques, e.g. flow cytometry without spatial resolution of the texture or inner structure of the particle, e.g. processing of pulse signals the analysis being performed on a sample stream
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N15/14—Optical investigation techniques, e.g. flow cytometry
- G01N15/1434—Optical arrangements
- G01N2015/1454—Optical arrangements using phase shift or interference, e.g. for improving contrast
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N15/14—Optical investigation techniques, e.g. flow cytometry
- G01N2015/1486—Counting the particles
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N15/14—Optical investigation techniques, e.g. flow cytometry
- G01N2015/1493—Particle size
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Dispersion Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Signal Processing (AREA)
- Engineering & Computer Science (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
Description
4 検出部
5 フィルタ
6 判定部
7 計数部
11 ビームスプリッタ(光分岐部の一例)
12 照射光学系
13 検出光学系
16 ビームエキスパンダ(参照光学系の一例)
17 ビームスプリッタ(光重畳部の一例)
21a,21b 受光素子
Claims (3)
- 光を出射する光源と、
2つの光を空間的に重畳する光重畳部と、
前記光源からの光を分岐して得られる複数の光のうちの1つの光を流路内を流れる流体に照射して検出領域を形成する照射光学系と、
前記検出領域内の前記流体に含まれる粒子からの散乱光のうち、前記照射光学系の光軸とは異なる方向の散乱光を、前記光重畳部に入射させる検出光学系と、
前記複数の光のうちの別の1つの光を参照光として前記光重畳部に入射させる参照光学系と、
前記光重畳部によって得られる、前記散乱光と前記参照光との干渉光を受光素子で受光し、前記干渉光に対応する検出信号を生成する検出部と、
前記検出部により生成された前記検出信号に対して、前記干渉光の強度変化に応じた周波数成分を通過させるフィルタ処理を行うフィルタと、
前記フィルタ処理前の前記検出信号のピークレベルと前記フィルタ処理後の前記検出信号のピークレベルとから所定の算出式に基づいて、前記検出信号が前記粒子によるものか否かを判定する判定部と、
前記判定部により前記検出信号が前記粒子によるものであると判定された場合には、前記フィルタ処理後の前記検出信号に基づく前記粒子の計数を行い、前記判定部により前記検出信号が前記粒子によるものであると判定されなかった場合には、前記フィルタ処理後の前記検出信号に基づく前記粒子の計数を行わない計数部と、
を備え、
前記所定の算出式は、前記フィルタ処理前の前記検出信号のピークレベルVp1から前記フィルタ処理後の前記検出信号のピークレベルVp2への減衰率を求める式(Vp1−Vp2)/Vp1であること、
を特徴とするパーティクルカウンタ。 - 前記判定部は、減衰率閾値と前記減衰率とを比較した結果に基づいて、前記検出信号が前記粒子によるものか否かを判定し、
前記計数部は、計数閾値と前記フィルタ処理後の前記検出信号とを比較した結果に基づいて前記粒子の計数を行い、
前記減衰率閾値および前記計数閾値の一方は、前記減衰率閾値および前記計数閾値の他方に応じて設定されること、
を特徴とする請求項1記載のパーティクルカウンタ。 - 前記フィルタは、前記干渉光の強度変化に応じた周波数成分以外の周波数成分を減衰させるバンドパスフィルタであることを特徴とする請求項1または請求項2記載のパーティクルカウンタ。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017227734A JP6413006B1 (ja) | 2017-11-28 | 2017-11-28 | パーティクルカウンタ |
CN201811382136.8A CN109900602B (zh) | 2017-11-28 | 2018-11-20 | 粒子计数器 |
KR1020180143090A KR101981517B1 (ko) | 2017-11-28 | 2018-11-20 | 파티클 카운터 |
TW107141478A TWI651525B (zh) | 2017-11-28 | 2018-11-21 | 粒子計數器 |
US16/200,511 US10416069B2 (en) | 2017-11-28 | 2018-11-26 | Particle counter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017227734A JP6413006B1 (ja) | 2017-11-28 | 2017-11-28 | パーティクルカウンタ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP6413006B1 true JP6413006B1 (ja) | 2018-10-24 |
JP2019095413A JP2019095413A (ja) | 2019-06-20 |
Family
ID=63920551
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017227734A Active JP6413006B1 (ja) | 2017-11-28 | 2017-11-28 | パーティクルカウンタ |
Country Status (5)
Country | Link |
---|---|
US (1) | US10416069B2 (ja) |
JP (1) | JP6413006B1 (ja) |
KR (1) | KR101981517B1 (ja) |
CN (1) | CN109900602B (ja) |
TW (1) | TWI651525B (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2019082186A1 (en) | 2017-10-26 | 2019-05-02 | Particle Measuring Systems, Inc. | SYSTEM AND METHOD FOR MEASURING PARTICLES |
JP7071849B2 (ja) * | 2018-03-09 | 2022-05-19 | リオン株式会社 | パーティクルカウンタ |
WO2020219841A1 (en) | 2019-04-25 | 2020-10-29 | Particle Measuring Systems, Inc. | Particle detection systems and methods for on-axis particle detection and/or differential detection |
KR102147627B1 (ko) * | 2019-05-02 | 2020-08-26 | 한국전력공사 | 미세먼지 분석장치 |
CN114729868A (zh) | 2019-11-22 | 2022-07-08 | 粒子监测***有限公司 | 先进的用于干涉测量颗粒检测和具有小大小尺寸的颗粒的检测的***和方法 |
KR102544474B1 (ko) * | 2021-10-19 | 2023-06-20 | 관악아날로그 주식회사 | 먼지 센서 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07103878A (ja) * | 1993-10-05 | 1995-04-21 | Hitachi Ltd | パルス信号測定装置および測定方法 |
JPH08210347A (ja) * | 1995-01-31 | 1996-08-20 | Hitachi Ltd | 超低速回転軸受の損傷検出方法及びその装置、及び、それを利用したエスカレータの診断システム |
JP2017102068A (ja) * | 2015-12-03 | 2017-06-08 | リオン株式会社 | パーティクルカウンタ |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06331529A (ja) * | 1993-05-19 | 1994-12-02 | Toshiba Corp | 微粒子検出装置 |
US20020031737A1 (en) * | 2000-03-10 | 2002-03-14 | American Air Liquide, Inc. | Method for continuously monitoring chemical species and temperature in hot process gases |
JP2003270120A (ja) | 2002-03-18 | 2003-09-25 | Rion Co Ltd | 粒子検出器 |
JP2004363085A (ja) * | 2003-05-09 | 2004-12-24 | Ebara Corp | 荷電粒子線による検査装置及びその検査装置を用いたデバイス製造方法 |
US9297737B2 (en) * | 2004-03-06 | 2016-03-29 | Michael Trainer | Methods and apparatus for determining characteristics of particles |
JP2006138833A (ja) * | 2004-06-11 | 2006-06-01 | Fuji Electric Systems Co Ltd | 微粒子測定装置 |
JP2007333409A (ja) * | 2006-06-12 | 2007-12-27 | Horiba Ltd | 浮遊粒子測定装置 |
JP4981569B2 (ja) * | 2007-07-24 | 2012-07-25 | リオン株式会社 | 粒子計数装置 |
KR101863270B1 (ko) * | 2009-05-01 | 2018-06-29 | 엑스트랄리스 테크놀로지 리미티드 | 입자 검출기에 대한 향상 |
JP5325679B2 (ja) * | 2009-07-03 | 2013-10-23 | 富士フイルム株式会社 | 低コヒーレンス光源を用いた動的光散乱測定装置及び光散乱強度測定方法 |
CN102003936B (zh) * | 2010-09-14 | 2012-01-04 | 浙江大学 | 同时测量液滴位置、粒径和复折射率的方法和装置 |
DK3004838T3 (da) * | 2013-05-28 | 2022-06-20 | Chemometec As | Billeddannende cytometer |
JP5719473B1 (ja) * | 2014-09-25 | 2015-05-20 | リオン株式会社 | 薬液用パーティクルカウンタ |
JP5859154B1 (ja) * | 2015-03-06 | 2016-02-10 | リオン株式会社 | パーティクルカウンタ |
US20180259441A1 (en) * | 2017-03-07 | 2018-09-13 | Axsun Technologies, Inc. | OCT Sensing of Particulates in Oil |
-
2017
- 2017-11-28 JP JP2017227734A patent/JP6413006B1/ja active Active
-
2018
- 2018-11-20 KR KR1020180143090A patent/KR101981517B1/ko active IP Right Grant
- 2018-11-20 CN CN201811382136.8A patent/CN109900602B/zh active Active
- 2018-11-21 TW TW107141478A patent/TWI651525B/zh active
- 2018-11-26 US US16/200,511 patent/US10416069B2/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07103878A (ja) * | 1993-10-05 | 1995-04-21 | Hitachi Ltd | パルス信号測定装置および測定方法 |
JPH08210347A (ja) * | 1995-01-31 | 1996-08-20 | Hitachi Ltd | 超低速回転軸受の損傷検出方法及びその装置、及び、それを利用したエスカレータの診断システム |
JP2017102068A (ja) * | 2015-12-03 | 2017-06-08 | リオン株式会社 | パーティクルカウンタ |
Also Published As
Publication number | Publication date |
---|---|
US10416069B2 (en) | 2019-09-17 |
CN109900602B (zh) | 2020-03-06 |
JP2019095413A (ja) | 2019-06-20 |
CN109900602A (zh) | 2019-06-18 |
TWI651525B (zh) | 2019-02-21 |
US20190162645A1 (en) | 2019-05-30 |
KR101981517B1 (ko) | 2019-05-23 |
TW201925751A (zh) | 2019-07-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6413006B1 (ja) | パーティクルカウンタ | |
JP5859154B1 (ja) | パーティクルカウンタ | |
JP6030740B1 (ja) | パーティクルカウンタ | |
US10705010B2 (en) | Particle counter | |
US9702975B2 (en) | Lidar measuring system and lidar measuring method | |
WO2011067554A1 (en) | Phase based sensing | |
US20190107496A1 (en) | Apparatus and method for increasing dynamic range of a particle sensor | |
FR2577322A1 (fr) | Dispositif pour mesurer sans contact la vitesse d'un milieu en mouvement | |
JPH01292235A (ja) | 流体検査装置 | |
CN104036787B (zh) | 一种语音监听方法和设备,以及激光反射声源定位方法 | |
CN109238133A (zh) | 高重频激光的光斑位置测量器件的数据采集方法和装置 | |
JP3950567B2 (ja) | トルク計測装置 | |
Pouet et al. | Recent progress in multi-channel laser-ultrasonic receivers | |
Pouet et al. | Multi-channel random-quadrature receiver for industrial laser-ultrasonics | |
JPH04272742A (ja) | 眼軸長測定装置 | |
JP3798753B2 (ja) | 粒径分布測定装置 | |
JP2017181037A (ja) | 検査装置及び方法 | |
Wang et al. | Using Optical Scintillation to Measure Airflow for Stack and Duct | |
JPH049687A (ja) | レーザドップラ速度計 | |
JPH0580065A (ja) | 流速測定装置および方法 | |
JP2009222530A (ja) | 速度計 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20180529 |
|
A871 | Explanation of circumstances concerning accelerated examination |
Free format text: JAPANESE INTERMEDIATE CODE: A871 Effective date: 20180529 |
|
A975 | Report on accelerated examination |
Free format text: JAPANESE INTERMEDIATE CODE: A971005 Effective date: 20180703 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20180719 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20180828 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20180920 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20181001 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6413006 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |