JP6392479B1 - 真空バルブ駆動制御方法 - Google Patents
真空バルブ駆動制御方法 Download PDFInfo
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- JP6392479B1 JP6392479B1 JP2018086023A JP2018086023A JP6392479B1 JP 6392479 B1 JP6392479 B1 JP 6392479B1 JP 2018086023 A JP2018086023 A JP 2018086023A JP 2018086023 A JP2018086023 A JP 2018086023A JP 6392479 B1 JP6392479 B1 JP 6392479B1
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- threshold value
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- vacuum valve
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
- F16K37/0025—Electrical or magnetic means
- F16K37/0041—Electrical or magnetic means for measuring valve parameters
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/0254—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor being operated by particular means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
- F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Details Of Valves (AREA)
- Sliding Valves (AREA)
- Indication Of The Valve Opening Or Closing Status (AREA)
Abstract
【解決手段】真空バルブ駆動制御方法は、真空バルブの開口部を開閉させる弁体と、前記弁体を閉位置と開位置の間で移動させるアクチュエータと、前記弁体の振動を検出する振動センサと、前記アクチュエータに前記弁体の速度を指示する制御部と、を備え、前記制御部は、予め設定された第1閾値と第2閾値を記憶し、前記振動センサから取得した振幅が前記第1閾値および第2閾値を超えたら動作速度を落として振幅を前記第1閾値内にするように前記アクチュエータに指示し、前記振動センサから取得した振幅が前記第2閾値を下回ったら前記アクチュエータに速度復帰指示を出す、ことを特徴とする。
【選択図】図3
Description
110:チャンバ
120:真空ポンプ
200:真空バルブ
210:弁体
220:シール材
230:弁ロッド
240:アクチュエータ
300:制御部
310:演算器
320:開度センサ
330:振動センサ
340:入力部
400:動作開始時
410:減速時
420:第1閾値
430:第2閾値
Claims (4)
- 真空バルブの開口部を開閉させる弁体と、
前記弁体を閉位置と開位置の間で移動させるアクチュエータと、
前記弁体の振動を検出する振動センサと、
前記アクチュエータに前記弁体の速度を指示する制御部と、を備え、
前記制御部は、予め設定された第1閾値と第2閾値を記憶し、前記振動センサから取得した振幅が前記第1閾値および第2閾値を超えたら動作速度を落として振幅を前記第1閾値内にするように前記アクチュエータに指示し、前記振動センサから取得した振幅が前記第2閾値を下回ったら前記アクチュエータに速度復帰指示を出す、
ことを特徴とする真空バルブ駆動制御方法。 - 前記制御部は、前記振動センサから取得した振幅が前記第1閾値を超えた回数、及び前記第2閾値を下回った回数をカウントし、所定の回数を超えたら交換要表示を出力する、
ことを特徴とする請求項1に記載の真空バルブ駆動制御方法。 - 前記制御部は、前記振動センサから取得した振動の種類を判別し、前記弁体の駆動に起因しない振動の影響を除外する、
ことを特徴とする請求項1又は2に記載の真空バルブ駆動制御方法。 - 請求項1乃至3の何れか一に記載の駆動制御方法により制御される、
ことを特徴とする真空バルブ。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018086023A JP6392479B1 (ja) | 2018-04-27 | 2018-04-27 | 真空バルブ駆動制御方法 |
US16/281,732 US10808865B2 (en) | 2018-04-27 | 2019-02-21 | Controlling method of driving a vacuum valve |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018086023A JP6392479B1 (ja) | 2018-04-27 | 2018-04-27 | 真空バルブ駆動制御方法 |
Publications (2)
Publication Number | Publication Date |
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JP6392479B1 true JP6392479B1 (ja) | 2018-09-19 |
JP2019190605A JP2019190605A (ja) | 2019-10-31 |
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JP2018086023A Active JP6392479B1 (ja) | 2018-04-27 | 2018-04-27 | 真空バルブ駆動制御方法 |
Country Status (2)
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US (1) | US10808865B2 (ja) |
JP (1) | JP6392479B1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6491390B1 (ja) * | 2018-10-30 | 2019-03-27 | 株式会社ブイテックス | 電動バルブの制御方法 |
JP2020176689A (ja) * | 2019-04-19 | 2020-10-29 | 株式会社ブイテックス | ゲートバルブの制御方法 |
CN117026220A (zh) * | 2023-10-09 | 2023-11-10 | 上海陛通半导体能源科技股份有限公司 | 压力调节装置及包含其的沉积设备、***及压力控制方法 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7320473B2 (ja) * | 2020-03-27 | 2023-08-03 | Ckd株式会社 | バタフライバルブ |
CN114294434B (zh) * | 2020-10-07 | 2023-12-19 | 株式会社岛津制作所 | 压力调整真空阀 |
DE102021002577A1 (de) | 2021-05-18 | 2022-11-24 | Vat Holding Ag | Hochfrequenz-Erdungsvorrichtung und Vakuumventil mit Hochfrequenz-Erdungsvorrichtung |
US11803129B2 (en) * | 2021-08-13 | 2023-10-31 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor processing tool and methods of operation |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11182699A (ja) * | 1997-12-22 | 1999-07-06 | Toshiba Corp | ゲートバルブ |
JP2015068468A (ja) * | 2013-09-30 | 2015-04-13 | 東京エレクトロン株式会社 | ゲートバルブおよび基板処理装置 |
JP3198694U (ja) * | 2014-05-29 | 2015-07-16 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | スリットバルブドア内の衝撃を軽減するための装置 |
JP2018010986A (ja) * | 2016-07-14 | 2018-01-18 | 日新電機株式会社 | ゲートバルブ、真空処理装置及び真空処理装置の制御方法 |
US20180051813A1 (en) * | 2015-03-27 | 2018-02-22 | Vat Holding Ag | Valve, in particular vacuum valve |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5381996A (en) * | 1994-03-07 | 1995-01-17 | The E. H. Wachs Company | Valve operator |
US5594175A (en) * | 1994-05-06 | 1997-01-14 | Massachusetts Institute Of Technology | Apparatus and method for non-invasive diagnosis and control of motor operated valve condition |
US5616829A (en) * | 1995-03-09 | 1997-04-01 | Teledyne Industries Inc. | Abnormality detection/suppression system for a valve apparatus |
JPH08304555A (ja) | 1995-05-02 | 1996-11-22 | Osaka Gas Co Ltd | 振動の種類の弁別方法および装置 |
JP4092028B2 (ja) | 1999-02-08 | 2008-05-28 | 新明和工業株式会社 | 真空ゲート弁 |
JP3433207B2 (ja) | 1999-12-09 | 2003-08-04 | エヌオーケー株式会社 | ゲートバルブ |
US6629682B2 (en) * | 2001-01-11 | 2003-10-07 | Vat Holding Ag | Vacuum valve |
JP2003232705A (ja) | 2002-02-08 | 2003-08-22 | Toshiba Corp | 寿命診断システム及び寿命診断方法 |
DE10218830C1 (de) * | 2002-04-26 | 2003-12-18 | Siemens Ag | Diagnosesystem und -verfahren für ein Ventil |
US7036794B2 (en) | 2004-08-13 | 2006-05-02 | Vat Holding Ag | Method for control of a vacuum valve arranged between two vacuum chambers |
DE102007034926A1 (de) | 2007-07-24 | 2009-02-05 | Vat Holding Ag | Verfahren zur Steuerung oder Regelung eines Vakuumventils |
DE102007034927A1 (de) | 2007-07-24 | 2009-02-05 | Vat Holding Ag | Verfahren zur Steuerung oder Regelung eines Vakuumventils |
DE102011052901B4 (de) * | 2011-08-22 | 2020-07-09 | Samson Ag | Partial Stoke Test für ein Stellgerät |
JP5044725B1 (ja) | 2012-04-27 | 2012-10-10 | 株式会社ブイテックス | シール材のつぶし量が制御可能なゲートバルブ |
US9528629B2 (en) * | 2012-06-27 | 2016-12-27 | Fisher Controls International Llc | Methods and apparatus to use vibration data to determine a condition of a process control device |
US9068657B2 (en) * | 2012-10-19 | 2015-06-30 | Varian Semiconductor Equipment Associates, Inc. | Gate valve with improved seal arrangement |
US9726643B2 (en) * | 2012-12-28 | 2017-08-08 | Vetco Gray Inc. | Gate valve real time health monitoring system, apparatus, program code and related methods |
US9423050B2 (en) * | 2013-04-09 | 2016-08-23 | Fisher Controls International Llc | Intelligent actuator and method of monitoring actuator health and integrity |
JP2015133209A (ja) | 2014-01-10 | 2015-07-23 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
US10626749B2 (en) * | 2016-08-31 | 2020-04-21 | General Electric Technology Gmbh | Spindle vibration evaluation module for a valve and actuator monitoring system |
US10678272B2 (en) * | 2017-03-27 | 2020-06-09 | Uop Llc | Early prediction and detection of slide valve sticking in petrochemical plants or refineries |
-
2018
- 2018-04-27 JP JP2018086023A patent/JP6392479B1/ja active Active
-
2019
- 2019-02-21 US US16/281,732 patent/US10808865B2/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11182699A (ja) * | 1997-12-22 | 1999-07-06 | Toshiba Corp | ゲートバルブ |
JP2015068468A (ja) * | 2013-09-30 | 2015-04-13 | 東京エレクトロン株式会社 | ゲートバルブおよび基板処理装置 |
JP3198694U (ja) * | 2014-05-29 | 2015-07-16 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | スリットバルブドア内の衝撃を軽減するための装置 |
US20180051813A1 (en) * | 2015-03-27 | 2018-02-22 | Vat Holding Ag | Valve, in particular vacuum valve |
JP2018010986A (ja) * | 2016-07-14 | 2018-01-18 | 日新電機株式会社 | ゲートバルブ、真空処理装置及び真空処理装置の制御方法 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6491390B1 (ja) * | 2018-10-30 | 2019-03-27 | 株式会社ブイテックス | 電動バルブの制御方法 |
JP2020070827A (ja) * | 2018-10-30 | 2020-05-07 | 株式会社ブイテックス | 電動バルブの制御方法 |
JP2020176689A (ja) * | 2019-04-19 | 2020-10-29 | 株式会社ブイテックス | ゲートバルブの制御方法 |
CN117026220A (zh) * | 2023-10-09 | 2023-11-10 | 上海陛通半导体能源科技股份有限公司 | 压力调节装置及包含其的沉积设备、***及压力控制方法 |
CN117026220B (zh) * | 2023-10-09 | 2023-12-15 | 上海陛通半导体能源科技股份有限公司 | 压力调节装置及包含其的沉积设备、***及压力控制方法 |
Also Published As
Publication number | Publication date |
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US10808865B2 (en) | 2020-10-20 |
JP2019190605A (ja) | 2019-10-31 |
US20190331257A1 (en) | 2019-10-31 |
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