JP6360123B2 - ワークピースの加工手順およびシステム - Google Patents
ワークピースの加工手順およびシステム Download PDFInfo
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- JP6360123B2 JP6360123B2 JP2016206724A JP2016206724A JP6360123B2 JP 6360123 B2 JP6360123 B2 JP 6360123B2 JP 2016206724 A JP2016206724 A JP 2016206724A JP 2016206724 A JP2016206724 A JP 2016206724A JP 6360123 B2 JP6360123 B2 JP 6360123B2
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Classifications
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- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/7806—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices involving the separation of the active layers from a substrate
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- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76829—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers
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- H01L24/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
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Landscapes
- Engineering & Computer Science (AREA)
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Description
「キャリア層、ワークピース層、および、キャリア層とワークピース層との間の介在層からなる接合スタックを用意するステップ」
図1〜図4に示す実施形態では、接合スタック200が用意、加工および分離される。図1を参照する。介在層208が最初にキャリア層201に接合され、次いで、ワークピース層202が介在層208に接合される。代替的に、介在層208は、最初にワークピース層202に接合され得、次いで、キャリア層201が介在層208に接合される。
「ワークピース層を加工するステップ」
次に、ワークピース層202を加工する。ワークピースの加工には、研削、研磨、フォトレジストのスピンコーティング、フォトリソグラフィ、電気めっき、物理蒸着、金属再配線層(metal redistribution layer)の形成、TSVの形成、化学的機械的研磨、エッチング、金属蒸着および誘電体蒸着、パターン形成、パッシベーション、アニーリング、搬送、ならびに、これらの任意の組合せを広く包含可能であることを理解されたい。研削を一例とすると、ワークピースの研削は、光学レンズ、薄型ウェハ、薄型液晶ガラス、薄型水晶ウェハ、薄型金属板、薄型水晶円板、薄型固体膜、薄型固体フィルム、および、薄型固体フィルタ等の薄型製品の用意のために行なわれ得る。
「スタック内の隣接する2層の間の接合箇所にガスジェットを噴射してこれら隣接する2層を分離または剥離するステップ」
スタック200において、介在層208とキャリア層201とが所謂「隣接する2層」であると同時に、介在層208はワークピース層202とも「隣接する2層」である。図2は、スタック200内の隣接する2層(例えば、介在層208とキャリア層201)を分離または剥離するために使用される剥離装置300の概略図である。装置300は、(i)接合スタック200のワークピース層202を保持することができるプラットフォーム310と;(ii)キャリア層201を保持することができるメカニズム320と;(iii)隣接する2層の間の接合箇所にガスジェットを噴射するためのガスジェット噴射システム330と、を備える。ガスは、空気、窒素、ヘリウム、アルゴン、または、それらの任意の混合物から選択可能であり、ガスジェットは、パイプ内のガス流を、ノズルを通して放出することにより生成可能である。ガス流の圧力は、2Bar〜10Barの範囲内であり得、ガス流の流量は、10リットル/分〜1000リットル/分の範囲内であり得る。
Claims (17)
- (1)キャリア層の接合面に前処理を施して当該接合面の剥離強度を低下するステップと;
(2)前記キャリア層、ワークピース層、および、前記キャリア層と前記ワークピース層との間の介在層を備える接合スタックを用意するステップと;
(3)前記ワークピース層を加工するステップと;
(4)隣接する2層の間の前記剥離強度を、ASTM D6862に規定される0.01g/cm〜50.0g/cmの範囲まで低下するステップと、
(5)前記接合スタック内の隣接する2層の間の接合箇所にガスジェットを噴射して前記隣接する2層を分離または剥離するステップと、を含む、
ワークピースの加工手順。 - 前記隣接する2層は、前記キャリア層および前記介在層である、
請求項1に記載の手順。 - 前記キャリア層は、ガラス、シリコン、セラミック、サファイア、石英、ポリシリコン、二酸化ケイ素、シリコンゲルマニウム、(酸)窒化ケイ素、窒化ガリウム(GaN)、ガリウムヒ素(GaAs)、リン化ガリウム(GaP)、ガリウムヒ素リン(GaAsP)、炭化ケイ素(SiC)、金属(例えば、銅、アルミニウム、金、タングステン、タンタル)、低k誘電体、ポリマー誘電体、ならびに、金属窒化物および金属シリサイドから選択される材料から作られる、
請求項1に記載の手順。 - 前記ワークピース層の前記介在層に対向する面には、半導体材料(例えば、シリコン、ポリシリコン、二酸化ケイ素、シリコンゲルマニウム、(酸)窒化ケイ素、窒化ガリウム(GaN)、ガリウムヒ素(GaAs)、リン化ガリウム(GaP)、ガリウムヒ素リン(GaAsP)、炭化ケイ素(SiC))、金属(例えば、ステンレス鋼、銅、アルミニウム、金、タングステン、タンタル)、低k誘電体、ポリマー誘電体、ならびに、様々な金属窒化物および金属シリサイドの上に、または、それらから製造されたマイクロデバイスが備えられ、
前記マイクロデバイスは、集積回路、微小電気機械システム(MEMS)、マイクロセンサ、パワー半導体、発光ダイオード、フォトニック回路、インタポーザ、埋め込み型受動デバイス、はんだバンプ、金属支柱、金属柱から選択される、
請求項1に記載の手順。 - ステップ(3)における前記ワークピース層を加工するステップには、研削、研磨、フォトレジストのスピンコーティング、フォトリソグラフィ、電気めっき、物理蒸着、金属再配線層の形成、TSVの形成、化学的機械的研磨、エッチング、金属蒸着および誘電体蒸着、パターン形成、パッシベーション、アニーリング、搬送、ならびに、これらの任意の組合せが含まれる、
請求項1に記載の手順。 - ステップ(3)における前記ワークピース層を加工するステップは、光学レンズ、薄型ウェハ、薄型液晶ガラス、薄型水晶ウェハ、薄型金属板、薄型水晶円板、薄型固体膜、薄型固体フィルム、および、薄型固体フィルタから選択される薄型製品を作るために前記ワークピースを研削するステップを含む、
請求項1に記載の手順。 - 前記ガスは、空気、窒素、ヘリウム、アルゴン、または、それらの任意の混合物から選択される、
請求項1に記載の手順。 - 前記ガスジェットは、パイプ内のガス流を、ノズルを通して放出することにより生成される、
請求項1に記載の手順。 - 前記ガス流の圧力は、2Bar〜10Barの範囲内である、
請求項8に記載の手順。 - 前記ガスジェットを噴射するステップは、前記接合箇所の周りの1〜6つのノズルを使用して実行される、
請求項8に記載の手順。 - 前記ガスジェットを噴射するステップは、固定された前記接合スタックを中心に前記ノズルを回転することによって、または、固定されたノズルに対して前記接合スタックを回すことによって実行される、
請求項10に記載の手順。 - 前記剥離強度を低下するステップは、活性エネルギー線照射、UV光照射、電子線照射、可視光照射、赤外線照射、熱処理、電界処理、磁界処理、電磁波処理、超音波処理、または、これらの任意の組合せを用いて達成される、
請求項1に記載の手順。 - 前記接合箇所の外周の一部分に前記ガスジェットを噴射する前に、前記一部分を機械的および/または化学的に粉砕または破壊するステップをさらに含む、
請求項1に記載の手順。 - 前記接合箇所の外周の一部分に前記ガスジェットを噴射する前に、前記一部分を切り取るためのブレードを使用するステップをさらに含む、
請求項1に記載の手順。 - ステップ(5)後に互いに接合されたまま残る前記2層を分離するステップをさらに含む、
請求項1に記載の手順。 - 請求項1に記載の手順を実施するためのシステムであって、
キャリア層の接合面に前処理を施して当該接合面の剥離強度を低下する装置と、
前記キャリア層、ワークピース層、および、前記キャリア層と前記ワークピース層との間の介在層を備える接合スタックを用意する装置と、
前記ワークピース層を加工する装置と、
隣接する2層の間の前記剥離強度を、ASTM D6862に規定される0.01g/cm〜50.0g/cmの範囲まで低下する装置と、
前記接合スタックを剥離する剥離装置と、
を備え、
前記剥離装置は、
(i)前記接合スタックの前記ワークピース層を保持することができるプラットフォームと、
(ii)前記接合スタックの前記キャリア層を保持することができるメカニズムと、
(iii)前記接合スタック内の前記隣接する2層の間の接合箇所にガスジェットを噴射するためのガスジェット噴射システムと、を備えるシステム。 - 前記剥離装置は、前記プラットフォームと前記メカニズムとを互いに反対に移動する力を印加することができる分離機をさらに備える、
請求項16に記載のシステム。
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