JP6348941B2 - 被膜形成装置 - Google Patents
被膜形成装置 Download PDFInfo
- Publication number
- JP6348941B2 JP6348941B2 JP2016188078A JP2016188078A JP6348941B2 JP 6348941 B2 JP6348941 B2 JP 6348941B2 JP 2016188078 A JP2016188078 A JP 2016188078A JP 2016188078 A JP2016188078 A JP 2016188078A JP 6348941 B2 JP6348941 B2 JP 6348941B2
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- Prior art keywords
- film forming
- forming apparatus
- film
- cylinder block
- workpiece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 239000011248 coating agent Substances 0.000 claims description 45
- 238000000576 coating method Methods 0.000 claims description 45
- 239000011810 insulating material Substances 0.000 claims description 11
- 239000002994 raw material Substances 0.000 claims description 11
- 239000004020 conductor Substances 0.000 claims description 4
- 238000005229 chemical vapour deposition Methods 0.000 claims description 3
- 239000007769 metal material Substances 0.000 claims description 3
- 230000000873 masking effect Effects 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 29
- 230000002093 peripheral effect Effects 0.000 description 23
- 230000015572 biosynthetic process Effects 0.000 description 21
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 12
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 10
- 229910001882 dioxygen Inorganic materials 0.000 description 10
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 7
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 6
- 229910052786 argon Inorganic materials 0.000 description 6
- 229910052799 carbon Inorganic materials 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 239000000919 ceramic Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000009413 insulation Methods 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02F—CYLINDERS, PISTONS OR CASINGS, FOR COMBUSTION ENGINES; ARRANGEMENTS OF SEALINGS IN COMBUSTION ENGINES
- F02F1/00—Cylinders; Cylinder heads
- F02F1/004—Cylinder liners
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0227—Pretreatment of the material to be coated by cleaning or etching
- C23C16/0245—Pretreatment of the material to be coated by cleaning or etching by etching with a plasma
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
- C23C16/042—Coating on selected surface areas, e.g. using masks using masks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
- C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
- C23C16/4405—Cleaning of reactor or parts inside the reactor by using reactive gases
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02F—CYLINDERS, PISTONS OR CASINGS, FOR COMBUSTION ENGINES; ARRANGEMENTS OF SEALINGS IN COMBUSTION ENGINES
- F02F1/00—Cylinders; Cylinder heads
- F02F1/18—Other cylinders
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02F—CYLINDERS, PISTONS OR CASINGS, FOR COMBUSTION ENGINES; ARRANGEMENTS OF SEALINGS IN COMBUSTION ENGINES
- F02F2200/00—Manufacturing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/334—Etching
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Combustion & Propulsion (AREA)
- General Engineering & Computer Science (AREA)
- Inorganic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Cylinder Crankcases Of Internal Combustion Engines (AREA)
Description
14…シリンダボア 14a、16a…内面
16…クランクケース 18…閉塞部材
20…連結ケース 22…第1絶縁部材
24…筐体 26…第2絶縁部材
28…アノードケース 30…アノード電極
32…第3絶縁部材 33…マニホールド
34…マスク部材 34a…小外径部
36…第4絶縁部材 38…シールド部材
38a、39a…環状凸部 39…保護部材
40…集合管 41、50…中空部
42a、42b、52a、52b…フランジ部
42c…大孔 42d…小孔
43…絶縁シート 44…絶縁リング
45、46…開口 46a…小内径部
54…チャンバ
Claims (5)
- 円筒状のワークの内面にプラズマ化学的気相成長法により被膜を形成する被膜形成装置であって、
前記ワークの内面の前記被膜を形成する被膜形成部位を露出させるとともに、前記ワークの内面の前記被膜を形成しない非形成部位をマスクすることが可能な円筒状の絶縁材料からなるマスク部材と、
前記マスク部材の内面に沿って配置された金属材料からなるシールド部材と、
を備えることを特徴とする被膜形成装置。 - 請求項1記載の被膜形成装置において、
前記マスク部材の少なくとも一部は前記ワークの内面に当接し、前記シールド部材は前記ワークと離間していることを特徴とする被膜形成装置。 - 請求項1又は2記載の被膜形成装置において、
前記ワークをシリンダブロックとするとき、前記マスク部材は、前記シリンダブロックのシリンダボアの内面を前記被膜形成部位として露出させるとともに、前記シリンダブロックのクランクケースの内面を前記非形成部位としてマスクすることが可能であることを特徴とする被膜形成装置。 - 請求項3記載の被膜形成装置において、
前記シリンダブロックの気筒に、前記被膜の原料ガスを供給可能である原料ガス供給装置と、
前記シリンダブロックを収容する筐体と、
前記原料ガス供給装置と前記筐体との間に配置される閉塞部材と、
前記気筒内のガスを排気可能である排気手段に接続されたマニホールドと、
前記筐体と前記マニホールドとの間に、各々と電気的に絶縁された状態で配置される導電性材料からなるアノードケースと、
前記アノードケースに電気的に絶縁された状態で配置され、前記シリンダブロックとの間に電位差を形成可能であるアノード電極と、
を有することを特徴とする被膜形成装置。 - 請求項4記載の被膜形成装置において、
前記シールド部材は、前記マスク部材内から前記アノードケース内まで延在し、前記シールド部材と前記アノードケースとは互いに電気的に絶縁されていることを特徴とする被膜形成装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016188078A JP6348941B2 (ja) | 2016-09-27 | 2016-09-27 | 被膜形成装置 |
US15/713,901 US10030603B2 (en) | 2016-09-27 | 2017-09-25 | Film forming apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016188078A JP6348941B2 (ja) | 2016-09-27 | 2016-09-27 | 被膜形成装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018053284A JP2018053284A (ja) | 2018-04-05 |
JP6348941B2 true JP6348941B2 (ja) | 2018-06-27 |
Family
ID=61687716
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016188078A Expired - Fee Related JP6348941B2 (ja) | 2016-09-27 | 2016-09-27 | 被膜形成装置 |
Country Status (2)
Country | Link |
---|---|
US (1) | US10030603B2 (ja) |
JP (1) | JP6348941B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6348941B2 (ja) * | 2016-09-27 | 2018-06-27 | 本田技研工業株式会社 | 被膜形成装置 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6719847B2 (en) * | 2002-02-20 | 2004-04-13 | Cinetic Automation Corporation | Masking apparatus |
JP4497086B2 (ja) * | 2005-01-28 | 2010-07-07 | 日産自動車株式会社 | シリンダブロックの溶射マスキング方法および同マスキング装置ならびに気体噴出ノズル |
CA2587409C (en) * | 2006-07-24 | 2013-10-29 | Sulzer Metco Ag | A masking system for the masking of a cylinder bore |
US8980049B2 (en) * | 2007-04-02 | 2015-03-17 | Charm Engineering Co., Ltd. | Apparatus for supporting substrate and plasma etching apparatus having the same |
JP5504621B2 (ja) * | 2008-02-29 | 2014-05-28 | 日産自動車株式会社 | シリンダボア用溶射装置及び溶射膜形成方法 |
DE102009024463B4 (de) * | 2009-06-10 | 2020-06-18 | Dr. Ing. H.C. F. Porsche Aktiengesellschaft | Verfahren zum Herstellen eines Zylinderblocks |
WO2012009653A1 (en) * | 2010-07-16 | 2012-01-19 | Cv Holdings, Llc | Injection molding process and product produced using the same |
US9272095B2 (en) * | 2011-04-01 | 2016-03-01 | Sio2 Medical Products, Inc. | Vessels, contact surfaces, and coating and inspection apparatus and methods |
JP2011168894A (ja) * | 2011-04-20 | 2011-09-01 | Ulvac Singapore Pte Ltd | 成膜用マスク及びその洗浄方法 |
US8726874B2 (en) * | 2012-05-01 | 2014-05-20 | Ford Global Technologies, Llc | Cylinder bore with selective surface treatment and method of making the same |
CA2909512C (en) * | 2013-05-31 | 2017-05-23 | Honda Motor Co., Ltd. | Carbon-coated member and production method therefor |
CN106062348A (zh) * | 2014-03-04 | 2016-10-26 | 本田技研工业株式会社 | 内燃机用气缸体及其制造方法 |
US10132267B2 (en) * | 2015-12-17 | 2018-11-20 | Ford Global Technologies, Llc | Coated bore aluminum cylinder liner for aluminum cast blocks |
JP6384493B2 (ja) * | 2016-01-21 | 2018-09-05 | トヨタ自動車株式会社 | シリンダヘッドの製造方法 |
JP6288116B2 (ja) * | 2016-01-21 | 2018-03-07 | トヨタ自動車株式会社 | シリンダヘッドの製造方法 |
JP6348941B2 (ja) * | 2016-09-27 | 2018-06-27 | 本田技研工業株式会社 | 被膜形成装置 |
-
2016
- 2016-09-27 JP JP2016188078A patent/JP6348941B2/ja not_active Expired - Fee Related
-
2017
- 2017-09-25 US US15/713,901 patent/US10030603B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US20180087467A1 (en) | 2018-03-29 |
JP2018053284A (ja) | 2018-04-05 |
US10030603B2 (en) | 2018-07-24 |
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