JP6342132B2 - アレイ基板、ディスプレイパネル及びアレイ基板の製造方法 - Google Patents
アレイ基板、ディスプレイパネル及びアレイ基板の製造方法 Download PDFInfo
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/124—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136231—Active matrix addressed cells for reducing the number of lithographic steps
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136231—Active matrix addressed cells for reducing the number of lithographic steps
- G02F1/136236—Active matrix addressed cells for reducing the number of lithographic steps using a grey or half tone lithographic process
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
- H01L27/1288—Multistep manufacturing methods employing particular masking sequences or specially adapted masks, e.g. half-tone mask
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2202/00—Materials and properties
- G02F2202/16—Materials and properties conductive
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Nonlinear Science (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Optics & Photonics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Mathematical Physics (AREA)
- Liquid Crystal (AREA)
- Thin Film Transistor (AREA)
Description
11 ゲート電極
12 ゲート電極絶縁層
13 活性層
14 画素電極
15 ソース電極
16 ドレイン電極
17 パッシベーション層
18 共通電極
23 活性層
24 画素電極
25 透明導電金属層
100 フォトレジスト
230 活性層薄膜
240 透明導電薄膜
Claims (13)
- 複数の画素ユニットを含み、それぞれの画素ユニットは、薄膜トランジスタ、透明導電層及び画素電極を含み、前記薄膜トランジスタは、ゲート電極、活性層、ソース電極及びドレイン電極を含むアレイ基板であって、
前記活性層はゲート電極の上方または下方に位置し、
前記透明導電層及び前記活性層は互いに重なり合い、かつ、同一の平面外形を有しており、並びに前記透明導電層は活性層と接触し、
前記ソース電極とドレイン電極は、活性層のチャネルを定義することを特徴とする、アレイ基板。 - 前記透明導電層及び画素電極の材質は同じであることを特徴とする、請求項1に記載のアレイ基板。
- パッシベーション層さらに含み、前記パッシベーション層は、薄膜トランジスタ、透明導電層及び画素電極から構成される構造体上に位置し且つ基板を覆い、且つ、前記基板の信号導入領域にビアホールを有することを特徴とする、請求項1又は2に記載のアレイ基板。
- 前記パッシベーション層上に形成され、且つスリット構造を有する共通電極をさらに含むことを特徴とする、請求項3に記載のアレイ基板。
- 前記画素電極の下方に位置し、且つ前記画素電極と絶縁して隔離されている共通電極をさらに含み、
前記画素電極はスリット構造を有することを特徴とする、請求項3に記載のアレイ基板。 - 基板、前記ゲート電極と接続するゲートライン、ゲート電極絶縁層、前記ソース電極と接続するデータ走査ラインをさらに含み、
前記ドレイン電極は前記画素電極と接続し、
前記ゲート電極とゲートラインは基板上に形成され、
前記ゲート電極絶縁層は、ゲート電極及びゲートライン上に形成され且つ基板を覆い、
前記画素電極及び透明導電層は、前記ゲート電極絶縁層上に形成され、且つ前記透明導電層は前記ゲート電極の上方に位置し、
前記活性層は、前記透明導電層上に形成され、且つ前記透明導電層と接触し、
前記ソース電極とドレイン電極は、前記活性層上に形成されることを特徴とする、請求項1〜4のいずれか1項に記載のアレイ基板。 - 請求項1〜6のいずれか1項に記載のアレイ基板を含む表示装置。
- 基板上に透明導電薄膜と活性層薄膜とを堆積し、一回のハーフトーンまたはグレートーンマスクパターニング工程によって、画素電極のパターン、透明導電層のパターン及び活性層のパターンを形成するステップを含み、前記透明導電層は活性層と接触することを特徴とするアレイ基板の製造方法。
- 前記一回のハーフトーンまたはグレートーンマスクパターニング工程によって、画素電極のパターン、透明導電層のパターン及び活性層のパターンを形成するステップにおいて、
光全透過エリア、光半透過エリア及び光非透過エリアを有するマスクを用いて基板に対し露光を行い、異なるエリアに異なる厚さのフォトレジストを有するエッチングマスクを形成するステップを含むことを特徴とする、請求項8に記載の製造方法。 - 画素電極のパターン、透明導電層のパターン及び活性層のパターンを形成するステップ以前に、
透明基板上にゲート電極及びゲートラインのパターン及びゲート電極絶縁層を形成するステップをさらに含む、請求項8又は請求項9に記載の製造方法。 - 前記画素電極のパターン、透明導電層のパターン及び活性層のパターンを形成するステップ以後に、
前記活性層上に、互いに向かい合って設けられ、チャネルを定義するソース電極とドレイン電極のパターンを形成し、同時に基板上に前記ソース電極と接続するデータ走査ラインのパターンを形成し、
前記ソース電極、ドレイン電極及びデータ走査ライン上に、前記基板を覆うパッシベーション層を形成し、前記基板の信号導入領域において、ビアホールパターンを形成するステップをさらに含むことを特徴とする、請求項8または10に記載の製造方法。 - 前記ソース電極、ドレイン電極及びデータ走査ライン上に、前記基板を覆うパッシベーション層を形成し、前記基板の信号導入領域において、ビアホールパターンを形成するステップ以後に、さらに
前記パッシベーション層上に、スリット構造を有する共通電極のパターンを形成するステップを含むことを特徴とする、請求項11に記載の製造方法。 - 前記画素電極のパターンはスリット構造を有し、且つ、
前記画素電極のパターン、透明導電層のパターン及び活性層のパターンを形成するステップステップ以前に、
前記スリット構造を有する前記画素電極の下方に位置し、且つ前記画素電極と絶縁するように隔離されている共通電極のパターンを形成するステップをさらに含むことを特徴とする、請求項8に記載の製造方法。
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CN201210349520.4A CN102881688B (zh) | 2012-09-19 | 2012-09-19 | 一种阵列基板、显示面板及阵列基板的制造方法 |
CN201210349520.4 | 2012-09-19 |
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JP6342132B2 true JP6342132B2 (ja) | 2018-06-13 |
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US (1) | US9385141B2 (ja) |
EP (1) | EP2711769B1 (ja) |
JP (1) | JP6342132B2 (ja) |
KR (2) | KR20140037782A (ja) |
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US9107316B2 (en) * | 2013-09-11 | 2015-08-11 | Eastman Kodak Company | Multi-layer micro-wire substrate structure |
CN103715200A (zh) * | 2013-12-19 | 2014-04-09 | 京东方科技集团股份有限公司 | 阵列基板及其制备方法、显示装置 |
CN103715137B (zh) * | 2013-12-26 | 2018-02-06 | 京东方科技集团股份有限公司 | 阵列基板及其制造方法、显示装置 |
CN104218041B (zh) * | 2014-08-15 | 2017-12-08 | 京东方科技集团股份有限公司 | 阵列基板及制备方法和显示装置 |
JP2016057428A (ja) * | 2014-09-09 | 2016-04-21 | 株式会社ジャパンディスプレイ | 液晶表示装置 |
CN105810745B (zh) * | 2014-12-31 | 2019-06-18 | 鸿富锦精密工业(深圳)有限公司 | 薄膜晶体管及薄膜晶体管基板 |
CN106298951B (zh) * | 2015-05-28 | 2019-12-17 | 鸿富锦精密工业(深圳)有限公司 | 薄膜晶体管的制作方法 |
CN105355631A (zh) | 2015-10-10 | 2016-02-24 | 京东方科技集团股份有限公司 | 阵列基板及其制作方法、显示装置、掩膜板 |
CN105633015B (zh) * | 2016-03-09 | 2018-04-17 | 合肥京东方显示技术有限公司 | 一种阵列基板的制造方法、阵列基板及显示装置 |
CN106952825A (zh) * | 2017-03-15 | 2017-07-14 | 深圳市华星光电技术有限公司 | Tft的制造方法及阵列基板的制造方法 |
CN107293554A (zh) * | 2017-06-19 | 2017-10-24 | 深圳市华星光电技术有限公司 | 顶发射型oled面板的制作方法及其结构 |
CN107293555A (zh) * | 2017-06-19 | 2017-10-24 | 深圳市华星光电技术有限公司 | 底发射型白光oled面板的制作方法及其结构 |
CN109872973A (zh) * | 2019-01-16 | 2019-06-11 | 南京中电熊猫液晶显示科技有限公司 | 一种阵列基板及其制造方法 |
CN110335869B (zh) * | 2019-05-09 | 2021-11-23 | 京东方科技集团股份有限公司 | 阵列基板及其制备方法、显示装置 |
CN110161761A (zh) * | 2019-05-10 | 2019-08-23 | 香港科技大学 | 液晶显示面板及其制作方法以及显示设备 |
CN112038288B (zh) * | 2020-11-04 | 2021-02-02 | 成都中电熊猫显示科技有限公司 | 阵列基板的制作方法及阵列基板 |
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CN101887897B (zh) * | 2009-05-13 | 2013-02-13 | 北京京东方光电科技有限公司 | Tft-lcd阵列基板及其制造方法 |
CN102023433B (zh) * | 2009-09-18 | 2012-02-29 | 北京京东方光电科技有限公司 | Tft-lcd阵列基板及其制造方法 |
KR101174546B1 (ko) | 2010-02-26 | 2012-08-16 | 한양대학교 산학협력단 | 통과 대역의 재구성이 가능한 디지털 필터 장치 |
CN102446913A (zh) * | 2010-09-30 | 2012-05-09 | 北京京东方光电科技有限公司 | 阵列基板及其制造方法和液晶显示器 |
JP5139503B2 (ja) * | 2010-11-18 | 2013-02-06 | 株式会社ジャパンディスプレイイースト | 液晶表示装置およびその製造方法 |
CN102629584B (zh) * | 2011-11-15 | 2015-03-25 | 京东方科技集团股份有限公司 | 一种阵列基板及其制造方法和显示器件 |
CN102544029A (zh) * | 2012-02-07 | 2012-07-04 | 深圳市华星光电技术有限公司 | 一种薄膜晶体管阵列基板及其制作方法 |
CN102651342B (zh) * | 2012-03-13 | 2014-12-17 | 京东方科技集团股份有限公司 | 阵列基板及其制造方法 |
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