JP6316287B2 - 透明な基板のための高度に透明な水素化炭素保護コーティングの生産方法 - Google Patents
透明な基板のための高度に透明な水素化炭素保護コーティングの生産方法 Download PDFInfo
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- JP6316287B2 JP6316287B2 JP2015520710A JP2015520710A JP6316287B2 JP 6316287 B2 JP6316287 B2 JP 6316287B2 JP 2015520710 A JP2015520710 A JP 2015520710A JP 2015520710 A JP2015520710 A JP 2015520710A JP 6316287 B2 JP6316287 B2 JP 6316287B2
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- 239000000758 substrate Substances 0.000 title claims description 66
- 150000001721 carbon Chemical class 0.000 title claims description 15
- 238000004519 manufacturing process Methods 0.000 title description 4
- 239000011253 protective coating Substances 0.000 title description 2
- 238000000034 method Methods 0.000 claims description 36
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 26
- 229910052786 argon Inorganic materials 0.000 claims description 18
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 11
- 238000000151 deposition Methods 0.000 claims description 10
- 239000007789 gas Substances 0.000 claims description 10
- 229910052739 hydrogen Inorganic materials 0.000 claims description 10
- 239000002245 particle Substances 0.000 claims description 9
- 238000005477 sputtering target Methods 0.000 claims description 8
- 239000001257 hydrogen Substances 0.000 claims description 5
- 239000000203 mixture Substances 0.000 claims description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 2
- 229910052799 carbon Inorganic materials 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- 239000010408 film Substances 0.000 claims 2
- 239000007888 film coating Substances 0.000 claims 2
- 238000009501 film coating Methods 0.000 claims 2
- 229910052681 coesite Inorganic materials 0.000 claims 1
- 238000004040 coloring Methods 0.000 claims 1
- 229910052906 cristobalite Inorganic materials 0.000 claims 1
- 239000000377 silicon dioxide Substances 0.000 claims 1
- 235000012239 silicon dioxide Nutrition 0.000 claims 1
- 229910052682 stishovite Inorganic materials 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 229910052905 tridymite Inorganic materials 0.000 claims 1
- 238000001429 visible spectrum Methods 0.000 claims 1
- 238000000576 coating method Methods 0.000 description 19
- 238000005240 physical vapour deposition Methods 0.000 description 17
- 238000002955 isolation Methods 0.000 description 16
- 238000004544 sputter deposition Methods 0.000 description 16
- 239000011248 coating agent Substances 0.000 description 14
- 229910004298 SiO 2 Inorganic materials 0.000 description 9
- 238000006748 scratching Methods 0.000 description 6
- 230000002393 scratching effect Effects 0.000 description 4
- 230000008021 deposition Effects 0.000 description 3
- 238000005137 deposition process Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000009616 inductively coupled plasma Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000003068 static effect Effects 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- 229910003481 amorphous carbon Inorganic materials 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 230000003678 scratch resistant effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
- C23C14/0057—Reactive sputtering using reactive gases other than O2, H2O, N2, NH3 or CH4
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0605—Carbon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3464—Sputtering using more than one target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3414—Targets
- H01J37/3426—Material
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- Engineering & Computer Science (AREA)
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- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Physical Vapour Deposition (AREA)
- Surface Treatment Of Optical Elements (AREA)
- Surface Treatment Of Glass (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Description
1. 技術分野
本願の開示は、例えば平面パネルディスプレイやタッチスクリーン等の透明基板の製造に関するものであり、より具体的にはこのようなパネルのための高度に透明な保護コーティングの製造に関する。
本願は西暦2012年7月5日に出願された米国仮特許出願第61/668,402号からの優先権の利益を主張する。
平面スクリーンディスプレイ及び/又はタッチスクリーンを有する携帯装置の普及により画面へのスクラッチングの問題が問題性を帯びるようになる。殊にこのことはタッチスクリーンを採用しスクラッチングの影響を受けやすい携帯電話及びタブレット端末の場合に該当する。したがって、強靱な抗スクラッチングコーティングが必要である。
Claims (6)
- 基板上に水素化炭素膜を形成する方法であって、
プロセスチャンバと前記プロセスチャンバの外側に配置されたプラズマケージとを提供するステップと、
前記プラズマケージ内の2つの陰極上に炭素のスパッタリングターゲットを取り付けるステップであって、前記2つのスパッタリングターゲットは互いに向き合うようにしてある、ステップと、
前記プロセスチャンバに対して排気を行うステップと、
前記プラズマケージ内にアルゴン及び水素ガスを含むプロセスガスを注入するステップと、
前記ターゲットにつきおよそ30−770W/平方インチの電力密度にて前記2つの陰極に電力を印加することによってプラズマを着火及び維持して並びに前記プラズマを前記プラズマケージ内に閉じ込めるステップと、
電気的なバイアスを前記基板に何ら印加せずに、前記基板を前記プロセスチャンバ内において移送するステップと、
前記スパッタリングターゲットからスパッタリングされた粒子に経路を与えて、前記プラズマケージのオリフィス及び前記プロセスチャンバの開口部を経て移動させ、前記プロセスチャンバ内の前記基板に到達させ、光学的に透明な、ダイヤモンド状の水素化炭素膜コーティングを蒸着するステップであって、前記水素化炭素膜コーティングは可視スペクトルに対し透明であり且つ覚知可能な着色を有さずにクリアである、ステップと
を備える、方法。 - 前記2つの陰極に電力を印加するステップは、400−1000Vの直流電圧を印加することを含む、請求項1に記載の方法。
- 前記2つの陰極に電力を印加するステップは、1−10kWの直流電力を印加することを含む、請求項1に記載の方法。
- 前記プラズマケージ内にアルゴン及び水素のプロセスガスを注入するステップは、アルゴンを50%及び水素を50%として注入することを含む、請求項1に記載の方法。
- 前記プラズマケージ内にアルゴン及び水素のプロセスガスを注入するステップは、アルゴンが40%−80%で水素が60%−20%の混合気を注入することを含む、請求項1に記載の方法。
- 前記水素化炭素膜を蒸着する前にSiO2薄膜を蒸着するステップをさらに備える、請求項1に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201261668402P | 2012-07-05 | 2012-07-05 | |
US61/668,402 | 2012-07-05 | ||
PCT/US2013/049467 WO2014008484A2 (en) | 2012-07-05 | 2013-07-05 | Method to produce highly transparent hydrogenated carbon protective coating for transparent substrates |
Publications (2)
Publication Number | Publication Date |
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JP2015528056A JP2015528056A (ja) | 2015-09-24 |
JP6316287B2 true JP6316287B2 (ja) | 2018-04-25 |
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Application Number | Title | Priority Date | Filing Date |
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JP2015520710A Active JP6316287B2 (ja) | 2012-07-05 | 2013-07-05 | 透明な基板のための高度に透明な水素化炭素保護コーティングの生産方法 |
Country Status (8)
Country | Link |
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US (2) | US9605340B2 (ja) |
JP (1) | JP6316287B2 (ja) |
KR (2) | KR102292497B1 (ja) |
CN (1) | CN104603324B (ja) |
MY (1) | MY171465A (ja) |
SG (1) | SG11201500038PA (ja) |
TW (1) | TWI560297B (ja) |
WO (1) | WO2014008484A2 (ja) |
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MY171465A (en) | 2012-07-05 | 2019-10-15 | Intevac Inc | Method to produce highly transparent hydrogenated carbon protective coating for transparent substrates |
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CN106796308B (zh) * | 2014-09-30 | 2018-12-14 | 富士胶片株式会社 | 防反射膜、透镜以及摄像装置 |
CN106796309B (zh) | 2014-09-30 | 2018-11-06 | 富士胶片株式会社 | 防反射膜、硫属化合物玻璃透镜以及摄像装置 |
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CN107785488A (zh) * | 2016-08-25 | 2018-03-09 | 杭州纤纳光电科技有限公司 | 钙钛矿薄膜的低压化学沉积的设备及其使用方法和应用 |
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US20100230274A1 (en) | 2009-03-12 | 2010-09-16 | Applied Materials, Inc. | Minimizing magnetron substrate interaction in large area sputter coating equipment |
CN101602273A (zh) | 2009-07-22 | 2009-12-16 | 天津南玻节能玻璃有限公司 | 一种类金刚石镀膜玻璃及其制备方法 |
US20120097525A1 (en) | 2010-10-26 | 2012-04-26 | Harkness Iv Samuel D | Method and apparatus to control ionic deposition |
US20120152726A1 (en) | 2010-12-17 | 2012-06-21 | Harkness Iv Samuel D | Method and apparatus to produce high density overcoats |
US20140102888A1 (en) | 2010-12-17 | 2014-04-17 | Intevac, Inc. | Method and apparatus to produce high density overcoats |
MY171465A (en) | 2012-07-05 | 2019-10-15 | Intevac Inc | Method to produce highly transparent hydrogenated carbon protective coating for transparent substrates |
WO2015051277A2 (en) | 2013-10-04 | 2015-04-09 | Intevac, Inc. | Method and apparatus to produce high density overcoats |
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SG11201500038PA (en) | 2015-02-27 |
KR20150030741A (ko) | 2015-03-20 |
US9605340B2 (en) | 2017-03-28 |
MY171465A (en) | 2019-10-15 |
CN104603324A (zh) | 2015-05-06 |
KR20210010667A (ko) | 2021-01-27 |
CN104603324B (zh) | 2017-03-08 |
TW201410902A (zh) | 2014-03-16 |
WO2014008484A2 (en) | 2014-01-09 |
WO2014008484A3 (en) | 2014-02-27 |
TWI560297B (en) | 2016-12-01 |
US20170152592A1 (en) | 2017-06-01 |
US9896758B2 (en) | 2018-02-20 |
JP2015528056A (ja) | 2015-09-24 |
US20140008214A1 (en) | 2014-01-09 |
KR102292497B1 (ko) | 2021-08-20 |
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