JP6297841B2 - Sheet sticking device and sticking method - Google Patents

Sheet sticking device and sticking method Download PDF

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JP6297841B2
JP6297841B2 JP2014009444A JP2014009444A JP6297841B2 JP 6297841 B2 JP6297841 B2 JP 6297841B2 JP 2014009444 A JP2014009444 A JP 2014009444A JP 2014009444 A JP2014009444 A JP 2014009444A JP 6297841 B2 JP6297841 B2 JP 6297841B2
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holding
adhesive sheet
deformation
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allowing
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JP2015137118A (en
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文男 牧野
文男 牧野
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Lintec Corp
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Lintec Corp
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本発明は、被着体に接着シートを貼付するシート貼付装置および貼付方法に関する。   The present invention relates to a sheet sticking apparatus and a sticking method for sticking an adhesive sheet to an adherend.

従来、物品等の被着体に接着シートを貼付するシート貼付装置が知られている（例えば、特許文献１参照）。
特許文献１に記載のシート貼付装置は、スポンジ（保持手段）を各々支持する３本のロッドを独立してスライド自在に支持し、各スポンジを被着体の被着面の凹凸に追従して変位させ、当該各スポンジでラベル（接着シート）を被着面に押圧して貼付するように構成されている。 Conventionally, a sheet sticking device for sticking an adhesive sheet to an adherend such as an article is known (see, for example, Patent Document 1).
In the sheet sticking device described in Patent Document 1, three rods that respectively support sponges (holding means) are independently slidably supported, and each sponge follows the unevenness of the adherend surface of the adherend. The label (adhesive sheet) is pressed against the adherend surface with each sponge and is attached to the surface.

特開平５−３１０２３８号公報JP-A-5-310238

しかしながら、特許文献１に記載されたような従来のシート貼付装置では、保持手段がスポンジで構成されているため、スポンジの側面から吸引用のエアが漏れて、接着シートを保持し続けることができず落下させてしまったり、接着シート全体に適切な押圧力を付与することができなかったりするという不都合がある。   However, in the conventional sheet sticking device as described in Patent Document 1, since the holding means is made of a sponge, the suction air leaks from the side surface of the sponge and can continue to hold the adhesive sheet. Inadvertently, it may be dropped or an appropriate pressing force cannot be applied to the entire adhesive sheet.

本発明の目的は、接着シートを確実に保持することができ、接着シート全体に適切な押圧力を付与することができるシート貼付装置および貼付方法を提供することにある。   The objective of this invention is providing the sheet sticking apparatus and sticking method which can hold | maintain an adhesive sheet reliably and can provide suitable pressing force to the whole adhesive sheet.

本発明のシート貼付装置は、接着シートを保持する保持手段と、前記保持手段を被着体に対して進退可能に設けられ、前記保持手段で保持した接着シートを前記被着体に押圧して貼付する押圧手段とを備え、前記保持手段は、前記接着シートを保持する保持面と、流体を貯留可能に設けられ、前記保持面の変形を許容する変形許容手段と、前記変形許容手段に前記流体を充填する充填手段と、前記変形許容手段から前記流体を排出する排出手段とを備え、前記充填手段および前記排出手段を制御して前記変形許容手段内の圧力を前記接着シートの押圧中に調整することを特徴とする。 The sheet sticking device of the present invention is provided with a holding means for holding an adhesive sheet, and the holding means is provided so as to be able to advance and retreat with respect to the adherend, and presses the adhesive sheet held by the holding means against the adherend. A pressing means for sticking, and the holding means is provided with a holding surface for holding the adhesive sheet, a deformation allowing means for storing fluid and allowing deformation of the holding surface, and the deformation allowing means with the A filling means for filling a fluid; and a discharging means for discharging the fluid from the deformation allowing means, and controlling the filling means and the discharging means so that the pressure in the deformation allowing means is reduced during the pressing of the adhesive sheet. It is characterized by adjusting .

本発明のシート貼付装置は、接着シートを保持する保持手段と、前記保持手段を被着体に対して進退可能に設けられ、前記保持手段で保持した接着シートを前記被着体に押圧して貼付する押圧手段とを備え、前記保持手段は、前記接着シートを保持する保持面と、流体を貯留可能に設けられ、前記保持面の変形を許容する変形許容手段と、前記変形許容手段に前記流体を充填する充填手段と、前記変形許容手段から前記流体を排出する排出手段とを備え、前記充填手段および前記排出手段を制御して前記変形許容手段内の流体の量を増減させ、前記被着体に貼付された接着シートに対する押圧動作を１回または複数回行う貼付補助動作が可能に設けられていることを特徴とする。 Sheet sticking apparatus of the present invention includes: a holding means for holding an adhesive sheet, retractably provided to said holding means with respect to an adherend, to press the adhesive sheet held by said holding means to said adherend A pressing means for sticking, and the holding means is provided with a holding surface for holding the adhesive sheet, a deformation allowing means for storing fluid and allowing deformation of the holding surface, and the deformation allowing means with the and filling means for filling the fluid, and a discharge means for discharging the fluid from the deformation allowing means, said filling means and the discharge means is controlled to the increase or decrease the amount of fluid in the deformation allowing means, the object The present invention is characterized in that a sticking assisting operation for performing a pressing operation on the adhesive sheet attached to the body once or a plurality of times is provided.

本発明のシート貼付方法は、接着シートを保持面で保持する工程と、内部に流体を貯留可能に設けられた変形許容手段で前記保持面の変形を許容しながら、前記保持面で保持した接着シートを被着体に押圧して貼付する工程と、前記変形許容手段内の流体を充填または排出して前記変形許容手段内の圧力を前記接着シートの押圧中に調整する工程とを実施することを特徴とする。 The sheet sticking method of the present invention includes a step of holding an adhesive sheet on a holding surface, and an adhesion held on the holding surface while allowing deformation of the holding surface by a deformation permitting means provided so that fluid can be stored inside. Performing a step of pressing and adhering the sheet to the adherend, and a step of filling or discharging the fluid in the deformation permission means and adjusting the pressure in the deformation permission means during the pressing of the adhesive sheet. It is characterized by.

本発明によれば、流体を貯留可能な変形許容手段により保持面の変形を許容するため、従来のようにスポンジの側面から吸引用のエアが漏れるような不都合を防止し、接着シートを確実に保持することができ、接着シート全体に適切な押圧力を付与することができる。   According to the present invention, since the deformation of the holding surface is permitted by the deformation permitting means capable of storing the fluid, it is possible to prevent the inconvenience that the air for suction leaks from the side surface of the sponge as in the conventional case, and to secure the adhesive sheet. It can hold | maintain and can apply suitable pressing force to the whole adhesive sheet.

また、保持手段に充填手段を設ければ、簡易な構成で保持面の変形を許容することができる。
さらに、貼付補助動作を可能にすれば、接着シートに念押しの押圧力を付与して当該接着シートを被着体に確実に貼付することができる。 Further, if the holding means is provided with the filling means, the holding surface can be deformed with a simple configuration.
Furthermore, if the sticking assisting operation is enabled, it is possible to apply the pressing force to the adhesive sheet and securely stick the adhesive sheet to the adherend.

本発明の一実施形態に係るシート貼付装置の側面図。The side view of the sheet sticking apparatus which concerns on one Embodiment of this invention. シート貼付装置の動作説明図。Operation | movement explanatory drawing of a sheet sticking apparatus.

以下、本発明の一実施形態を図面に基づいて説明する。
なお、以下において、基準となる図を挙げることなく、例えば、上、下、左、右、または、手前、奥といった方向を示した場合は、全て図１を正規の方向（付した番号が適切な向きとなる方向）から観た場合を基準とし、上、下、左、右方向が紙面に平行な方向であり、手前、奥方向が紙面に直交する方向とする。 Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
In the following, without giving a reference figure, for example, when directions such as up, down, left, right, or near side, back side are shown, all of FIG. In this case, the top, bottom, left, and right directions are directions parallel to the paper surface, and the front and back directions are directions orthogonal to the paper surface.

図１において、シート貼付装置１０は、接着シートＡＳを保持する保持手段２０と、保持手段２０を被着体ＷＫに対して進退可能に設けられ、保持手段２０で保持した接着シートＡＳを被着体ＷＫに押圧して貼付する押圧手段３０とを備え、接着シートＡＳを供給する供給手段４０と、左右方向や前後方向等の所定方向に被着体ＷＫを搬送するコンベアやロボット等の搬送手段ＣＶとの近傍に配置されている。   In FIG. 1, a sheet sticking device 10 is provided with a holding means 20 for holding an adhesive sheet AS, and the holding means 20 is provided so as to be able to advance and retreat with respect to the adherend WK, and the adhesive sheet AS held by the holding means 20 is attached. A supply means 40 for supplying the adhesive sheet AS, and a conveying means such as a conveyor or a robot for conveying the adherend WK in a predetermined direction such as the left-right direction or the front-rear direction. It is arranged in the vicinity of CV.

保持手段２０は、接着シートＡＳを保持する保持部材２１と、保持部材２１に流体としての気体を充填する加圧ポンプやタービン等の充填手段２２と、保持部材２１から気体を排出する減圧ポンプや解放バルブ（電磁弁）等の排出手段２３とを備えている。
保持部材２１は、フレーム２４と、外縁部がフレーム２４の下面に支持されるとともに、下面が接着シートＡＳを保持する保持面２５Ａとされ、ゴムや樹脂等の変形可能な部材によって構成されて気体を貯留可能に設けられ、保持面２５Ａの変形を許容する変形許容手段としての変形許容部２５と、クーロン力によって保持面２５Ａに接着シートＡＳを引き付けて保持可能な静電チャック２６とを備えている。変形許容部２５は、配管２２Ａを介して充填手段２２に接続されるとともに、配管２３Ａを介して排出手段２３に接続された貯留室２７を備え、側面が蛇腹のように伸縮する構成となっている。 The holding means 20 includes a holding member 21 that holds the adhesive sheet AS, a pressure pump that fills the holding member 21 with a gas as a fluid, a filling means 22 such as a turbine, a decompression pump that discharges gas from the holding member 21, Discharge means 23 such as a release valve (electromagnetic valve) is provided.
The holding member 21 has a frame 24 and an outer edge portion supported by the lower surface of the frame 24, and the lower surface is a holding surface 25 </ b> A that holds the adhesive sheet AS, and is configured by a deformable member such as rubber or resin. Is provided so as to be able to store, and a deformation allowing portion 25 as a deformation allowing means for allowing the holding surface 25A to be deformed, and an electrostatic chuck 26 capable of attracting and holding the adhesive sheet AS to the holding surface 25A by Coulomb force. Yes. The deformation allowing portion 25 includes a storage chamber 27 connected to the filling means 22 via the pipe 22A and connected to the discharge means 23 via the pipe 23A, and has a configuration in which the side surface expands and contracts like a bellows. Yes.

押圧手段３０は、出力軸３１Ａで保持部材２１のフレーム２４を支持する駆動機器としての直動モータ３１を備えている。   The pressing means 30 includes a linear motion motor 31 as a drive device that supports the frame 24 of the holding member 21 with an output shaft 31A.

供給手段４０は、基材シートＢＳの一方の面に接着剤ＡＤ層を有する接着シートＡＳが当該接着剤ＡＤ層を介して帯状の剥離シートＲＬの一方の面に仮着された原反ＲＳを支持する支持ローラ４１と、原反ＲＳを案内する複数のガイドローラ４２と、剥離シートＲＬを折り返して当該剥離シートＲＬから接着シートＡＳを剥離する剥離板４３と、駆動機器としての回動モータ４４Ａによって駆動される駆動ローラ４４との間に剥離シートＲＬを挟み込むピンチローラ４５と、剥離シートＲＬを回収する回収ローラ４６とを備え、その全体がフレーム４７に支持されている。   The supply means 40 includes a raw fabric RS in which an adhesive sheet AS having an adhesive AD layer on one surface of the base sheet BS is temporarily attached to one surface of the strip-shaped release sheet RL via the adhesive AD layer. A supporting roller 41 for supporting, a plurality of guide rollers 42 for guiding the raw fabric RS, a peeling plate 43 for folding the peeling sheet RL and peeling the adhesive sheet AS from the peeling sheet RL, and a rotation motor 44A as a driving device Are provided with a pinch roller 45 that sandwiches the release sheet RL between the drive roller 44 and a recovery roller 46 that recovers the release sheet RL, and the whole is supported by a frame 47.

以上のシート貼付装置１０において、被着体ＷＫに接着シートＡＳを貼付する手順について説明する。
先ず、原反ＲＳを図１に示すようにセットする。そして、図示しない操作パネルやパーソナルコンピュータ等の入力手段を介して運転開始の信号を入力すると、保持手段２０が充填手段２２および排出手段２３を駆動し、貯留室２７内を所定の圧力（第１圧力）に調整した後、供給手段４０が回動モータ４４Ａを駆動し、原反ＲＳを繰り出す。次いで、剥離板４３上に位置する先頭の接着シートＡＳが所定位置に到達したことを光学センサや撮像手段等の図示しない検知手段が検知すると、供給手段４０が回動モータ４４Ａの駆動を停止し、シート貼付装置１０がスタンバイ状態となる。 In the above sheet sticking apparatus 10, the procedure for sticking the adhesive sheet AS to the adherend WK will be described.
First, the raw fabric RS is set as shown in FIG. Then, when an operation start signal is input via an input means such as an operation panel (not shown) or a personal computer, the holding means 20 drives the filling means 22 and the discharge means 23, and the storage chamber 27 has a predetermined pressure (first pressure). After the pressure is adjusted, the supply means 40 drives the rotation motor 44A to feed out the original fabric RS. Next, when a detection unit (not shown) such as an optical sensor or an imaging unit detects that the leading adhesive sheet AS positioned on the peeling plate 43 has reached a predetermined position, the supply unit 40 stops driving the rotation motor 44A. The sheet sticking device 10 is in a standby state.

そして、搬送手段ＣＶがコンベア等を駆動し、図１に示すように、被着体ＷＫを保持部材２１の下方所定位置で停止させる。次に、供給手段４０が回動モータ４４Ａを駆動し、接着シートＡＳを供給し、保持手段２０が静電チャック２６を駆動し、供給された接着シートＡＳを保持面２５Ａで保持する。次いで、押圧手段３０が直動モータ３１を駆動し、保持部材２１を被着体ＷＫに向かって下降させる。そして、接着シートＡＳが被着体ＷＫの被着面ＷＫ１に当接すると、図１中二点鎖線で示すように、変形許容部２５が変形することにより保持面２５Ａの変形が許容されて被着面ＷＫ１の凹凸に追従し、接着シートＡＳ全体を被着面ＷＫ１に押圧して貼付する。この際、接着シートＡＳは、貯留室２７内の気体の圧力（第１圧力）によって、全体的に適切で均等な押圧力が付与される。   Then, the conveying means CV drives a conveyor or the like, and stops the adherend WK at a predetermined position below the holding member 21 as shown in FIG. Next, the supply means 40 drives the rotation motor 44A to supply the adhesive sheet AS, the holding means 20 drives the electrostatic chuck 26, and the supplied adhesive sheet AS is held by the holding surface 25A. Next, the pressing means 30 drives the linear motor 31 to lower the holding member 21 toward the adherend WK. When the adhesive sheet AS comes into contact with the adherend surface WK1 of the adherend WK, as shown by the two-dot chain line in FIG. 1, the deformation permitting portion 25 is deformed to allow deformation of the holding surface 25A. Following the unevenness of the wearing surface WK1, the entire adhesive sheet AS is pressed and stuck to the wearing surface WK1. At this time, the adhesive sheet AS is given an appropriate and uniform pressing force as a whole by the pressure of the gas in the storage chamber 27 (first pressure).

ここで、貯留室２７内の圧力を検出する圧力センサやロードセル等の図示しない検知手段を設け、当該検知手段の検知結果を基にして保持手段２０が排出手段２３を駆動し、貯留室２７内の圧力（第１圧力）を保った状態で気体を徐々に排出するように構成してもよい。このとき、押圧手段３０が直動モータ３１を駆動し、保持部材２１を下降させることができる。これにより、保持面２５Ａの変形を促進させることができ、被着面ＷＫ１の凹凸が大きい場合でも、当該凹凸に保持面２５Ａを追従させることができ、被着面ＷＫ１に接着シートＡＳを密着させることができる。また、貯留室２７内の圧力を保った状態で、気体を徐々に排出して被着面ＷＫ１に接着シートＡＳを密着させた後、保持手段２０が充填手段２２を駆動し、貯留室２７内の圧力を第１圧力よりも高い第２圧力として、接着シートＡＳ全体に大きな押圧力を付与する構成としてもよい。なお、貯留室２７内の気体を徐々に排出して被着面ＷＫ１に接着シートＡＳを密着させるとき、貯留室２７内の圧力を第１圧力よりも低い第３圧力としてもよい。   Here, a detection means (not shown) such as a pressure sensor for detecting the pressure in the storage chamber 27 or a load cell is provided, and the holding means 20 drives the discharge means 23 based on the detection result of the detection means. The gas may be gradually discharged while maintaining the pressure (first pressure). At this time, the pressing means 30 can drive the linear motor 31 to lower the holding member 21. Thereby, the deformation of the holding surface 25A can be promoted, and even when the unevenness of the adherend surface WK1 is large, the retainer surface 25A can follow the unevenness, and the adhesive sheet AS is brought into close contact with the adherend surface WK1. be able to. Further, after the gas is gradually exhausted and the adhesive sheet AS is brought into close contact with the adherend surface WK1 while the pressure in the storage chamber 27 is maintained, the holding unit 20 drives the filling unit 22 to It is good also as a structure which gives a big pressing force to the adhesive sheet AS whole as a 2nd pressure higher than a 1st pressure. In addition, when the gas in the storage chamber 27 is gradually discharged to bring the adhesive sheet AS into close contact with the adherend surface WK1, the pressure in the storage chamber 27 may be a third pressure lower than the first pressure.

次に、押圧手段３０が直動モータ３１の駆動を停止させた状態で、保持手段２０が静電チャック２６の駆動を停止し、接着シートＡＳの保持を解除する。そして、保持手段２０が充填手段２２および排出手段２３を駆動し、貯留室２７内の気体の量を増減させ、被着体ＷＫに貼付された接着シートＡＳに対する押圧動作を１回または複数回行う貼付補助動作を実行する。この貼付補助動作は、図２に示すように、変形許容部２５を収縮させて、被着体ＷＫに貼付された接着シートＡＳに対して保持面２５Ａを少なくとも１度離間させてから、再度貯留室２７内の圧力を第１圧力にして当接させる。このような貼付補助動作を行った後、押圧手段３０が直動モータ３１を駆動し、保持部材２１を図１中実線で示す位置に復帰させ、搬送手段ＣＶがコンベア等を駆動し、接着シートＡＳが貼付された被着体ＷＫを次工程の装置等に搬送し、以降上記同様の動作が繰り返される。なお、貼付補助動作を行う度に第１圧力よりも高い第４圧力、第５圧力・・・となるように、貯留室２７内の圧力を段階的に上昇させ、念押しの押圧が確実に接着シートＡＳに付与されるように構成してもよい。また、貼付補助動作を行う際、保持面２５Ａを接着シートＡＳから離間させなくてもよい。   Next, in a state where the pressing unit 30 stops driving the linear motor 31, the holding unit 20 stops driving the electrostatic chuck 26 and releases the holding of the adhesive sheet AS. Then, the holding unit 20 drives the filling unit 22 and the discharge unit 23 to increase or decrease the amount of gas in the storage chamber 27, and performs the pressing operation on the adhesive sheet AS attached to the adherend WK one or more times. Execute sticking assist operation. As shown in FIG. 2, the sticking assisting operation is performed by contracting the deformation allowing portion 25 and separating the holding surface 25A from the adhesive sheet AS attached to the adherend WK at least once, and then storing again. The pressure in the chamber 27 is brought into contact with the first pressure. After performing such a sticking assisting operation, the pressing means 30 drives the linear motor 31 to return the holding member 21 to the position indicated by the solid line in FIG. 1, and the conveying means CV drives the conveyor and the like, and the adhesive sheet The adherend WK to which the AS is affixed is conveyed to the next process apparatus or the like, and thereafter the same operation is repeated. It should be noted that the pressure in the storage chamber 27 is increased step by step so that the fourth pressure, the fifth pressure,. You may comprise so that it may be provided to adhesive sheet AS. Further, when performing the sticking assist operation, the holding surface 25A may not be separated from the adhesive sheet AS.

以上のような実施形態によれば、気体を貯留可能な変形許容部２５により保持面２５Ａの変形を許容するため、従来のようにスポンジの側面から吸引用のエアが漏れるような不都合を防止し、接着シートＡＳを確実に保持することができ、接着シートＡＳ全体に適切な押圧力を付与することができる。   According to the embodiment as described above, since the deformation of the holding surface 25A is permitted by the deformation permitting portion 25 capable of storing gas, it is possible to prevent inconvenience that suction air leaks from the side surface of the sponge as in the past. The adhesive sheet AS can be reliably held, and an appropriate pressing force can be applied to the entire adhesive sheet AS.

以上のように、本発明を実施するための最良の構成、方法等は、前記記載で開示されているが、本発明は、これに限定されるものではない。すなわち、本発明は、主に特定の実施形態に関して特に図示され、かつ説明されているが、本発明の技術的思想および目的の範囲から逸脱することなく、以上述べた実施形態に対し、形状、材質、数量、その他の詳細な構成において、当業者が様々な変形を加えることができるものである。また、上記に開示した形状、材質などを限定した記載は、本発明の理解を容易にするために例示的に記載したものであり、本発明を限定するものではないから、それらの形状、材質などの限定の一部もしくは全部の限定を外した部材の名称での記載は、本発明に含まれるものである。   As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this. That is, the invention has been illustrated and described with particular reference to certain specific embodiments, but without departing from the spirit and scope of the invention, Various modifications can be made by those skilled in the art in terms of material, quantity, and other detailed configurations. In addition, the description of the shape, material, and the like disclosed above is exemplary for ease of understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded the limitation of one part or all of such restrictions is included in this invention.

例えば、保持手段２０が排出手段２３を駆動し、変形許容部２５を縮めた状態で供給手段４０から接着シートＡＳを受け取り、押圧手段３０が直動モータ３１を駆動し、図２に示すように、接着シートＡＳが被着面ＷＫ１に当接することのない位置で保持部材２１の下降を停止させた後、保持手段２０が充填手段２２を駆動し、図１中二点鎖線で示すように、接着シートＡＳを被着体ＷＫに押圧して貼付する構成でもよい。
また、保持手段２０は、接着シートＡＳが貼付された被着体ＷＫを搬送手段ＣＶで次工程の装置等に搬送しながら、貼付補助動作を行ってもよい。
さらに、保持手段２０は、貼付補助動作を行わなくてもよい。 For example, the holding means 20 drives the discharge means 23 and receives the adhesive sheet AS from the supply means 40 in a state where the deformation allowing portion 25 is contracted, and the pressing means 30 drives the linear motion motor 31, as shown in FIG. Then, after stopping the lowering of the holding member 21 at a position where the adhesive sheet AS does not come into contact with the adherend surface WK1, the holding means 20 drives the filling means 22, and as shown by a two-dot chain line in FIG. A configuration in which the adhesive sheet AS is pressed against the adherend WK and pasted may be employed.
Further, the holding unit 20 may perform a sticking assisting operation while transporting the adherend WK to which the adhesive sheet AS is pasted to the next process apparatus or the like by the transport unit CV.
Furthermore, the holding means 20 may not perform the sticking assist operation.

また、保持部材２１は、変形許容部２５のみで貯留室２７を構成してもよい。
さらに、充填手段２２が貯留室２７に供給する流体は、大気、単体ガス、混合ガス、水やオイル等の液体、ジェル状体等であってもよい。
また、保持手段２０は、充填手段２２が加熱された流体を貯留室２７に供給する構成とし、接着シートＡＳの接着剤ＡＤ層を温めて流動性を向上させて接着しやすくする接着力向上手段を採用してもよい。
さらに、接着シートＡＳを冷却して貼付する場合、保持手段２０は、充填手段２２が冷却された流体を貯留室２７に供給する構成とすることができる。
また、保持手段２０は、減圧ポンプや真空エジェクタ等の減圧手段によって保持面２５Ａで接着シートＡＳを吸引保持する構成でもよい。この場合、減圧手段からフレーム２４を貫通し、貯留室２７内を通って保持面２５Ａに連通する変形自在なホースやパイプ等の管を設ければよい。
さらに、保持手段２０は、接着剤や粘着剤によって接着シートＡＳを保持する構成としてもよい。
また、保持手段２０は、充填手段２２および排出手段２３を設けずに、予め貯留室２７内の圧力を所定の圧力としておいてもよい。 In addition, the holding member 21 may form the storage chamber 27 with only the deformation allowing portion 25.
Furthermore, the fluid supplied to the storage chamber 27 by the filling means 22 may be air, a single gas, a mixed gas, a liquid such as water or oil, a gel-like body, or the like.
Also, the holding means 20 is configured to supply the fluid heated by the filling means 22 to the storage chamber 27, and the adhesive force improving means that warms the adhesive AD layer of the adhesive sheet AS to improve fluidity and facilitate adhesion. May be adopted.
Further, when the adhesive sheet AS is cooled and pasted, the holding unit 20 can be configured to supply the fluid cooled by the filling unit 22 to the storage chamber 27.
The holding means 20 may be configured to suck and hold the adhesive sheet AS on the holding surface 25A by a pressure reducing means such as a pressure reducing pump or a vacuum ejector. In this case, a tube such as a deformable hose or pipe that penetrates the frame 24 from the decompression means and communicates with the holding surface 25A through the storage chamber 27 may be provided.
Furthermore, the holding means 20 may be configured to hold the adhesive sheet AS with an adhesive or an adhesive.
In addition, the holding unit 20 may set the pressure in the storage chamber 27 to a predetermined pressure in advance without providing the filling unit 22 and the discharge unit 23.

また、押圧手段３０は、被着体ＷＫに接着シートＡＳを貼付した後、直動モータ３１を駆動し、当該被着体ＷＫに貼付された接着シートＡＳに対して保持面２５Ａを離間させてから、再度保持面２５Ａを接着シートＡＳに押し付ける再押圧動作を１回または複数回行ってもよい。この場合、再押圧動作を行う度に、保持手段２０が充填手段２２および排出手段２３を駆動し、第１圧力よりも高い第６圧力、第７圧力・・・となるように、貯留室２７内の圧力を段階的に上昇させ、念押しの押圧が確実に接着シートＡＳに付与されるように構成してもよい。この再押圧動作を行う際も、保持面２５Ａを接着シートＡＳから離間させてもよいし、離間させなくてもよい。
さらに、押圧手段３０は、被着体ＷＫを搬送手段ＣＶで次工程の装置等に搬送しながら、接着シートＡＳの貼付動作や再押圧動作を行ってもよい。
また、供給手段４０を設けずに、人手で接着シートＡＳを保持手段２０に供給してもよい。 The pressing means 30 drives the linear motor 31 after the adhesive sheet AS is attached to the adherend WK, and separates the holding surface 25A from the adhesive sheet AS attached to the adherend WK. Therefore, the re-pressing operation of pressing the holding surface 25A against the adhesive sheet AS may be performed once or a plurality of times. In this case, each time the re-pressing operation is performed, the holding unit 20 drives the filling unit 22 and the discharging unit 23 to be the sixth pressure, the seventh pressure,... Higher than the first pressure. The internal pressure may be increased step by step so that the pressure is surely applied to the adhesive sheet AS. Also when this re-pressing operation is performed, the holding surface 25A may or may not be separated from the adhesive sheet AS.
Further, the pressing means 30 may perform the attaching operation and the repressing operation of the adhesive sheet AS while conveying the adherend WK to the next process apparatus or the like by the conveying means CV.
Further, the adhesive sheet AS may be manually supplied to the holding unit 20 without providing the supply unit 40.

また、本発明における接着シートＡＳおよび被着体ＷＫの材質、種別、形状等は、特に限定されることはない。例えば、接着シートＡＳは、感圧接着性、感熱接着性等の接着形態に限定されることはなく、感熱接着性のものが採用された場合は、当該接着シートＡＳを加熱する適宜な加熱手段を設ければよい。また、このような接着シートＡＳは、例えば、接着剤ＡＤ層だけの単層のもの、基材シートＢＳと接着剤ＡＤ層との間に中間層を有するもの、基材シートＢＳの上面にカバー層を有する等３層以上のもの、更には、基材シートＢＳを接着剤ＡＤ層から剥離することのできる所謂両面接着シートのようなものであってもよく、両面接着シートは、単層又は複層の中間層を有するものや、中間層のない単層又は複層のものであってよい。また、被着体ＷＫとしては、例えば、食品、樹脂容器、シリコン半導体ウエハや化合物半導体ウエハ等の半導体ウエハ、回路基板、光ディスク等の情報記録基板、ガラス板、鋼板、陶器、木板または樹脂板等、任意の形態の部材や物品なども対象とすることができる。なお、接着シートＡＳを機能的、用途的な読み方に換え、例えば、情報記載用ラベル、装飾用ラベル、保護シート、ダイシングテープ、ダイアタッチフィルム、ダイボンディングテープ、記録層形成樹脂シート等の任意の形状の任意のシート、フィルム、テープ等を前述のような任意の被着体ＷＫに貼付することができる。   In addition, the material, type, shape, and the like of the adhesive sheet AS and the adherend WK in the present invention are not particularly limited. For example, the adhesive sheet AS is not limited to adhesive forms such as pressure-sensitive adhesiveness and heat-sensitive adhesiveness. When a heat-sensitive adhesive is used, an appropriate heating means for heating the adhesive sheet AS. May be provided. Such an adhesive sheet AS is, for example, a single layer having only an adhesive AD layer, an adhesive layer having an intermediate layer between the base sheet BS and the adhesive AD layer, and a cover on the upper surface of the base sheet BS. It may be a layer having three or more layers, such as a so-called double-sided adhesive sheet that can peel the base sheet BS from the adhesive AD layer. It may have a multilayer intermediate layer, or may be a single layer or a multilayer without an intermediate layer. Examples of the adherend WK include food, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, information recording substrates such as circuit boards and optical disks, glass plates, steel plates, ceramics, wood plates, resin plates, and the like. Any form of member or article can also be targeted. In addition, the adhesive sheet AS is replaced with a functional and intended reading, for example, any information label, decorative label, protective sheet, dicing tape, die attach film, die bonding tape, recording layer forming resin sheet, etc. Arbitrary sheets, films, tapes, and the like can be attached to any adherend WK as described above.

本発明における手段および工程は、それら手段および工程について説明した動作、機能または工程を果たすことができる限りなんら限定されることはなく、まして、前記実施形態で示した単なる一実施形態の構成物や工程に全く限定されることはない。例えば、保持手段は、接着シートを保持する保持面と、流体を貯留可能に設けられ、保持面の変形を許容する変形許容手段とを備えているものであれば、出願当初の技術常識に照らし合わせ、その技術範囲内のものであればなんら限定されることはない（他の手段および工程についての説明は省略する）。
また、前記実施形態における駆動機器は、回動モータ、直動モータ、リニアモータ、単軸ロボット、多関節ロボット等の電動機器、エアシリンダ、油圧シリンダ、ロッドレスシリンダおよびロータリシリンダ等のアクチュエータ等を採用することができる上、それらを直接的又は間接的に組み合せたものを採用することもできる（実施形態で例示したものと重複するものもある）。 The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions, or steps described with respect to those means and steps. The process is not limited at all. For example, if the holding means is provided with a holding surface for holding the adhesive sheet and a deformation allowing means for allowing fluid to be stored and allowing deformation of the holding surface, it is in light of the common general technical knowledge at the time of filing. In addition, there is no limitation as long as it is within the technical scope (description of other means and steps is omitted).
The drive device in the embodiment includes an electric device such as a rotation motor, a linear motion motor, a linear motor, a single axis robot, an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to these, a combination of them directly or indirectly may be employed (some of them overlap with those exemplified in the embodiment).

１０ シート貼付装置
２０ 保持手段
２２ 充填手段
２３ 排出手段
２５ 変形許容部（変形許容手段）
２５Ａ 保持面
３０ 押圧手段
ＡＤ 接着剤
ＡＳ 接着シート
ＢＳ 基材シート
ＷＫ 被着体 DESCRIPTION OF SYMBOLS 10 Sheet sticking apparatus 20 Holding means 22 Filling means 23 Discharge means 25 Deformation permissible part (deformation permissible means)
25A Holding surface 30 Pressing means AD Adhesive AS Adhesive sheet BS Base sheet WK Substrate

Claims (3)

接着シートを保持する保持手段と、
前記保持手段を被着体に対して進退可能に設けられ、前記保持手段で保持した接着シートを前記被着体に押圧して貼付する押圧手段とを備え、
前記保持手段は、前記接着シートを保持する保持面と、流体を貯留可能に設けられ、前記保持面の変形を許容する変形許容手段と、前記変形許容手段に前記流体を充填する充填手段と、前記変形許容手段から前記流体を排出する排出手段とを備え、前記充填手段および前記排出手段を制御して前記変形許容手段内の圧力を前記接着シートの押圧中に調整することを特徴とするシート貼付装置。 Holding means for holding the adhesive sheet;
The holding means is provided so as to be movable back and forth with respect to the adherend, and includes a pressing means that presses and adheres the adhesive sheet held by the holding means to the adherend,
The holding means is provided with a holding surface for holding the adhesive sheet, a deformation allowing means for allowing fluid to be stored and allowing deformation of the holding surface, and a filling means for filling the deformation allowing means with the fluid; And a discharge means for discharging the fluid from the deformation permission means, and controls the filling means and the discharge means to adjust the pressure in the deformation permission means during pressing of the adhesive sheet. Pasting device. 接着シートを保持する保持手段と、
前記保持手段を被着体に対して進退可能に設けられ、前記保持手段で保持した接着シートを前記被着体に押圧して貼付する押圧手段とを備え、
前記保持手段は、前記接着シートを保持する保持面と、流体を貯留可能に設けられ、前記保持面の変形を許容する変形許容手段と、前記変形許容手段に前記流体を充填する充填手段と、前記変形許容手段から前記流体を排出する排出手段とを備え、前記充填手段および前記排出手段を制御して前記変形許容手段内の流体の量を増減させ、前記被着体に貼付された接着シートに対する押圧動作を１回または複数回行う貼付補助動作が可能に設けられていることを特徴とするシート貼付装置。 Holding means for holding the adhesive sheet;
The holding means is provided so as to be movable back and forth with respect to the adherend, and includes a pressing means that presses and adheres the adhesive sheet held by the holding means to the adherend,
The holding means is provided with a holding surface for holding the adhesive sheet, a deformation allowing means for allowing fluid to be stored and allowing deformation of the holding surface, and a filling means for filling the deformation allowing means with the fluid; and a discharge means for discharging the fluid from the deformation allowing means, said filling means and the controls the discharge means to increase or decrease the amount of fluid in the deformation allowing means, adhesive sheet, wherein the affixed to the adherend sheet sticking device characterized by sticking aid operation for pressing operation one or more times is provided to be against. 接着シートを保持面で保持する工程と、
内部に流体を貯留可能に設けられた変形許容手段で前記保持面の変形を許容しながら、前記保持面で保持した接着シートを被着体に押圧して貼付する工程と、
前記変形許容手段内の流体を充填または排出して前記変形許容手段内の圧力を前記接着シートの押圧中に調整する工程とを実施することを特徴とするシート貼付方法。 Holding the adhesive sheet on the holding surface;
A process of pressing and adhering the adhesive sheet held by the holding surface to the adherend while allowing deformation of the holding surface by a deformation permitting means provided so that fluid can be stored therein ;
Filling and discharging the fluid in the deformation permission means and adjusting the pressure in the deformation permission means during pressing of the adhesive sheet .
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