JP6271991B2 - Stage installation structure in a vacuum vessel - Google Patents

Stage installation structure in a vacuum vessel Download PDF

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JP6271991B2
JP6271991B2 JP2013258484A JP2013258484A JP6271991B2 JP 6271991 B2 JP6271991 B2 JP 6271991B2 JP 2013258484 A JP2013258484 A JP 2013258484A JP 2013258484 A JP2013258484 A JP 2013258484A JP 6271991 B2 JP6271991 B2 JP 6271991B2
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stage
vacuum vessel
vacuum
bottom plate
plate
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JP2015115548A (en
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松太郎 宮本
松太郎 宮本
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Ebara Corp
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Ebara Corp
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Priority to TW107141037A priority patent/TWI698910B/en
Priority to TW107141041A priority patent/TWI674620B/en
Priority to US14/568,596 priority patent/US9508526B2/en
Priority to TW107141038A priority patent/TWI661471B/en
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Description

本発明は、真空中で試料の検査を行う検査装置や材料の加工を行う半導体製造装置などに装備されるステージを内包した真空容器（真空チャンバ）におけるステージの設置構造に関する。   The present invention relates to a stage installation structure in a vacuum vessel (vacuum chamber) including a stage equipped in an inspection apparatus for inspecting a sample in a vacuum or a semiconductor manufacturing apparatus for processing a material.

図７は、検査装置や半導体装置に装備されるステージを内包した真空容器の一例の構成を示しており、この真空容器１００は、除振マウント１０１上に水平に支持され、その底板１００ａの上面にステージベース１０２を収納し、このステージベース１０２上に試料や材料である対象物を保持しつつ移動させるステージ１０３を設置して構成してある（例えば特許文献１参照）。   FIG. 7 shows a configuration of an example of a vacuum vessel including a stage equipped in an inspection device or a semiconductor device. The vacuum vessel 100 is supported horizontally on a vibration isolation mount 101 and the upper surface of a bottom plate 100a thereof. The stage base 102 is housed, and a stage 103 is provided on the stage base 102 to move while holding a sample or a material as an object (see, for example, Patent Document 1).

このような真空容器１００は、容器内部の真空と容器外部の大気圧の差圧による変形が少なくなるように強固（高剛性）に設計されており、また、対象物を微細加工する装置や微細加工品を検査する装置では、保持した対象物を所定の位置に正確に移動させる高いステージ性能（走行精度や位置決め精度）が要求されることから、ステージ１０３を設置する基準面となる真空容器１００の底板１００ａは前記差圧による変形が少なくなるように特に高剛性に設計されるとともに、前記図示したように、前記装置が設置される床から伝わる振動を低減するため、空気バネや振動制御機器を具備した除振装置（除振マウント１０１）で真空容器１００の底板１００ａの下面を複数点支持により支持するように設計されている。
また、真空容器１００内へのステージ１０３の設置は、一般的に、ステージベース１０２上にステージ１０３を一体に組み立てて調整した後、これを真空容器１００の底板１００ａ上に搭載する工程により行われている。 Such a vacuum vessel 100 is designed to be strong (high rigidity) so as to reduce deformation due to the differential pressure between the vacuum inside the vessel and the atmospheric pressure outside the vessel, In an apparatus for inspecting a processed product, high stage performance (running accuracy and positioning accuracy) for accurately moving a held object to a predetermined position is required. Therefore, the vacuum container 100 serving as a reference surface on which the stage 103 is installed. The bottom plate 100a is designed to be particularly rigid so that deformation due to the differential pressure is reduced, and as shown in the figure, in order to reduce vibration transmitted from the floor where the apparatus is installed, an air spring or vibration control device is used. Is designed so that the lower surface of the bottom plate 100a of the vacuum vessel 100 is supported by a plurality of points.
The stage 103 is generally installed in the vacuum vessel 100 by a process in which the stage 103 is integrally assembled and adjusted on the stage base 102 and then mounted on the bottom plate 100a of the vacuum vessel 100. ing.

また、真空容器内でステージが正確な基準面に基づいて固定されるようにするため、石定盤上に真空容器を設置するとともに、ステージの下部を支持する複数の固定基台を真空容器の底板を貫通させて、石定盤の上面に直接固定した構成のものが知られている（例えば特許文献２参照）。   In addition, in order to fix the stage in the vacuum container based on an accurate reference plane, the vacuum container is installed on a stone surface plate and a plurality of fixed bases supporting the lower part of the stage are installed on the vacuum container. The thing of the structure which penetrated the baseplate and was directly fixed to the upper surface of a stone surface plate is known (for example, refer patent document 2).

特開２０１１−６５９５６号公報JP 2011-65956 A 特開２００４−２３５２２６号公報JP 2004-235226 A

前記のようにステージが収納される真空容器を高剛性に設計したとしても、真空と大気圧の差圧による真空容器の変形を完全になくすことはできず、容器内外の差圧が大きくなると、真空容器の全体に僅かな変形が必ず生じてしまう。
ステージを構築する際の基準面となる真空容器の底板の変形は、その変形量が僅かであってもステージの走行精度などに重大な影響を与えることから、可能な限り変形しないように設計しておく必要があるが、底板を高剛性にしただけの従来の容器の構成では変形の発生を完全になくすことはできず、ステージの性能が劣化することは避けられない。 Even if the vacuum container in which the stage is accommodated is designed with high rigidity as described above, the deformation of the vacuum container due to the differential pressure between the vacuum and the atmospheric pressure cannot be completely eliminated, and when the differential pressure inside and outside the container increases, A slight deformation always occurs in the entire vacuum vessel.
Since the deformation of the bottom plate of the vacuum vessel, which serves as the reference plane when building the stage, has a significant effect on the stage running accuracy even if the amount of deformation is small, it should be designed so that it does not deform as much as possible. However, in the conventional container configuration in which the bottom plate has only high rigidity, the occurrence of deformation cannot be completely eliminated, and the performance of the stage is inevitably deteriorated.

また、ステージの組み立て及び調整は、必然的に大気圧の環境下で行うことになるが、実際の作動は真空容器内の真空の環境下であり、前記基準面が変形することで当初の調整精度が維持されなくなり、また、予め容器の変形に伴う基準面の真空中での変位を考慮してステージを組み立てて調整することも非常に困難であり、そのような調整はそもそも非現実的である。また、前記基準面の変位の最小化を目指して、さらなる高剛性化を図ったのでは、真空容器の底部の寸法が大きくなって、真空容器及びこれを用いた装置が大型化し、重量の増加及び装置の高コストを招くことになる。   In addition, the assembly and adjustment of the stage are inevitably performed under an atmospheric pressure environment, but the actual operation is under the vacuum environment in the vacuum vessel, and the initial adjustment is performed by deforming the reference plane. The accuracy is not maintained, and it is also very difficult to assemble and adjust the stage in advance considering the displacement of the reference plane in vacuum accompanying the deformation of the container, and such adjustment is unrealistic in the first place. is there. In addition, aiming at minimizing the displacement of the reference surface, further increasing the rigidity leads to an increase in the size of the bottom of the vacuum vessel, an increase in size of the vacuum vessel and the apparatus using the same, and an increase in weight. And high cost of the apparatus.

また、従来技術のように、真空容器内でステージの下部を支持する複数の固定基台を真空容器の下部を支持する石定盤の上面に直接固定すれば、真空容器の底板が変形することによるステージへの影響は極めて小さくなるが、このものは、複数の固定基台の上にステージが走行するガイドを取り付け、その上にステージ本体が取り付けられてガイド上を走行するように設けられており、ステージを構築する際の基準面は各固定基台の上面となるため、各固定基台の上面を一定の高さに揃えて石定盤に固定する調整が難しく、各固定基台上に組み立てられるステージの精度を出し難く、調整に時間を要して組み立てコストが嵩張り、装置全体がコスト高になるという問題がある。   In addition, as in the prior art, if a plurality of fixed bases that support the lower part of the stage in the vacuum vessel are directly fixed to the upper surface of the stone surface plate that supports the lower part of the vacuum vessel, the bottom plate of the vacuum vessel is deformed. The effect of the stage on the stage is extremely small, but this is provided so that the guide on which the stage travels is mounted on a plurality of fixed bases, and the stage body is mounted on the guide to travel on the guide. In addition, since the reference plane when constructing the stage is the top surface of each fixed base, it is difficult to adjust the top surface of each fixed base to a fixed level with the top surface of each fixed base fixed. However, it is difficult to obtain the accuracy of the stage to be assembled, and it takes time for adjustment, so that the assembly cost is increased, and the entire apparatus is expensive.

本発明は従来技術の有するこのような問題点に鑑み、真空容器内のステージの設置構造において、真空容器を大型化することなく、差圧により真空容器が変形したとしても、ステージが搭載される基準面の変位を生じさせずに、高いステージ性能を維持することができるようにするとともに、ステージの組み立て及び調整が高精度で行えるようにすることを課題とする。   In view of such a problem of the prior art, the present invention has a stage installation structure in which a stage is mounted even if the vacuum container is deformed by a differential pressure without increasing the size of the vacuum container. It is an object of the present invention to maintain high stage performance without causing a displacement of the reference surface and to perform assembly and adjustment of the stage with high accuracy.

前述の通り、ステージの下部を支持する固定基台を、真空容器の下側の石定盤の上面に固定すれば、真空容器の底板が変形することによるステージへの影響を抑えることができるが、固定基台上にステージを構築する際の精度出しが困難である。そこで、本発明では、ステージの可動部が直動するレール部を石定盤に直接固定し、このレール部に沿ってステージ本体が走行するように設けることで、つまりステージが構築される基準面を石定盤の上面とすることで、ステージの組み立てと調整の際の精度出しを正確に行えるようにし、真空容器の変形に関わりなく、前記基準面が変位しないようにして、調整後のステージの走行精度や位置決め精度が維持されるようにした。   As mentioned above, if the fixed base that supports the lower part of the stage is fixed to the upper surface of the stone surface plate on the lower side of the vacuum vessel, the influence on the stage due to the deformation of the bottom plate of the vacuum vessel can be suppressed. It is difficult to obtain accuracy when building the stage on the fixed base. Therefore, in the present invention, the rail part on which the movable part of the stage moves directly is fixed directly to the stone surface plate, and the stage main body travels along this rail part, that is, the reference plane on which the stage is constructed. Is the top surface of the stone surface plate so that the accuracy of assembly and adjustment of the stage can be accurately determined, and the reference surface is not displaced regardless of the deformation of the vacuum vessel. The running accuracy and positioning accuracy were maintained.

すなわち、前記課題を解決するため本発明は、石定盤上に設置された真空容器内にステージを設置する構造において、
ステージの直線運動するリニアガイドの可動部であるガイドブロック部とこれを案内するレール部が真空容器の底板に形成された開口部に嵌め入れられ、この開口部を通して前記レール部が底板下面に面した石定盤の上面に直接取り付けられ、前記ガイドブロック部上にステージが組み立てられた構成を有することを特徴する。 That is, in order to solve the above problems, the present invention provides a structure in which a stage is installed in a vacuum vessel installed on a stone surface plate.
A guide block portion that is a movable portion of a linear guide that linearly moves on the stage and a rail portion that guides the guide block portion are fitted into an opening formed in the bottom plate of the vacuum vessel, and the rail portion faces the bottom surface of the bottom plate through the opening. It is directly attached to the top surface of the stone surface plate, and has a configuration in which a stage is assembled on the guide block portion .

これによれば、高剛性で正確な面精度の確保が容易な石定盤の上面に、ステージの軌道路であるリニアガイドのレール部が直に固定してあるので、リニアガイドに沿って直動するステージを高精度に設置しその性能の調整を行うことができる。
すなわち、上面を正確な面精度を確保して形成された石定盤は、体積（厚さ）があり、石定盤が備える高剛性であること及び金属材料と比較して線膨張係数が低いことの特徴により、真空容器内部を真空状態とした際に石定盤自体の変形・膨張が極めて少なく、その上面の面精度が正確に確保される。
よって、石定盤の上面を基準面として構築されるステージは、基準面の変位による影響を受けて、その走行精度や位置決め精度が低下するようなことはなく、真空容器内部を真空にしたときの容器の変形度合いなどを考慮することなく、容器内部に組み立てて調整することができ、且つ調整後の当初の走行性能を維持して、真空中で保持した対象物を正確な位置に移動し位置決めすることができる。石定盤の上面をステージ構築の基準面としているので、真空容器の底板の剛性を高めたり大型化したりする必要はない。 According to this, the rail portion of the linear guide, which is the raceway of the stage, is directly fixed to the upper surface of the stone surface plate that is easy to ensure high rigidity and accurate surface accuracy. The moving stage can be installed with high accuracy and its performance can be adjusted.
In other words, the stone surface plate formed with an accurate upper surface accuracy has a volume (thickness), is highly rigid, and has a low coefficient of linear expansion compared to metal materials. Due to this feature, when the inside of the vacuum vessel is in a vacuum state, the deformation and expansion of the stone surface plate itself are extremely small, and the surface accuracy of the upper surface is ensured accurately.
Therefore, the stage constructed with the upper surface of the stone surface plate as the reference plane is not affected by the displacement of the reference plane, and its running accuracy and positioning accuracy do not decrease, and when the inside of the vacuum vessel is evacuated It can be assembled and adjusted inside the container without considering the degree of deformation of the container, and the original running performance after adjustment is maintained, and the object held in the vacuum is moved to an accurate position. Can be positioned. Since the upper surface of the stone surface plate is used as the reference surface for stage construction, there is no need to increase the rigidity or size of the bottom plate of the vacuum vessel.

前記構成のステージの設置構造において、真空容器の内部は、その気密性を確保するために真空容器の底板と石定盤の上面とは真空シールがされて、外部から隔離した密閉空間に設けられる。真空シールは、真空容器の底板に形成された開口部の周囲にＯリングなどの密封部材を設置し、真空となる開口部内と大気中にある石定盤の上面間を隔離することにより形成することができる。   In the stage installation structure configured as described above, the inside of the vacuum vessel is provided in a sealed space isolated from the outside by vacuum-sealing the bottom plate of the vacuum vessel and the top surface of the stone surface plate in order to ensure hermeticity. . The vacuum seal is formed by installing a sealing member such as an O-ring around the opening formed in the bottom plate of the vacuum vessel, and isolating the inside of the opening that becomes a vacuum and the upper surface of the stone surface plate in the atmosphere. be able to.

また、開口部周囲の真空シールに加え又はこれとは別に、真空容器の底板の下面外周近傍と石定盤の上面間を真空シールし、底板下面と石定盤上面とが面する空間に通じた排気口を底板側部に設け、この排気口から前記空間を真空排気可能に設けた構成としてもよい。
これによれば、石定盤の上面に面する真空容器の底板下面全体を真空下に保つことができるので、外気温の変化が真空容器内の気圧に及ぼす影響を少なくすることができ、また、底板の前記開口部周辺の真空シール性能が確保できない場合にも、真空容器の底板下面全体の空間を真空吸引することで、真空容器内の真空度を良好に保つことができる。 In addition to or separately from the vacuum seal around the opening, a vacuum seal is provided between the vicinity of the outer periphery of the bottom surface of the bottom plate of the vacuum vessel and the top surface of the stone surface plate, leading to a space where the bottom surface of the bottom plate faces the top surface of the stone surface plate. The exhaust port may be provided on the side of the bottom plate, and the space may be evacuated from the exhaust port.
According to this, since the entire bottom surface of the bottom plate of the vacuum vessel facing the upper surface of the stone surface plate can be kept under vacuum, the influence of changes in the outside temperature on the atmospheric pressure in the vacuum vessel can be reduced. Even when the vacuum sealing performance around the opening of the bottom plate cannot be ensured, the degree of vacuum in the vacuum vessel can be kept good by vacuum suction of the entire space of the bottom surface of the bottom plate of the vacuum vessel.

さらに、リニアガイドのレール部が挿通される開口部に加えて、周囲が真空シールされた他の開口部が真空容器の底板に少なくとも一つ以上設けられた構成とすれば、リニアガイドの取り付けや、その上部へのステージ本体の組み立てと調整の際に、ステージ構築の基準面である石定盤の上面を他の開口部を通して視認及び計測して直接活用することが可能となるため、正確で高精度なステージの組み立て、調整及び確認が可能となる。   Furthermore, in addition to the opening through which the rail part of the linear guide is inserted, if the opening is provided with at least one other opening that is vacuum-sealed around the bottom of the vacuum vessel, the mounting of the linear guide When assembling and adjusting the stage body to the top, it is possible to see and measure the top surface of the stone surface plate, which is the reference plane for stage construction, through other openings and use it directly. It is possible to assemble, adjust and check the stage with high accuracy.

本発明によれば、真空容器を大型化することなく、真空容器内の気圧の変化に関わりなく、ステージが搭載される基準面の変位を生じさせずに、ステージをその組み立て及び調整した当初の走行性能を維持して、真空中で保持した対象物を正確な位置に移動し位置決めすることができるようにステージを作動させることが可能である。ステージ構築の基準面が石定盤上面であり、その変位が極めて小さいので、真空容器内部を真空にしたときの容器の変形度合いなどを考慮することなく、ステージの組み立て及び調整を高精度で行うことが可能である。   According to the present invention, the initial stage in which the stage is assembled and adjusted without increasing the size of the vacuum container and without causing a displacement of the reference surface on which the stage is mounted, regardless of changes in the atmospheric pressure in the vacuum container. It is possible to operate the stage so that the traveling performance can be maintained and the object held in the vacuum can be moved and positioned at an accurate position. The stage construction reference surface is the top of the stone platen, and its displacement is extremely small, so the stage is assembled and adjusted with high accuracy without considering the degree of deformation of the container when the inside of the vacuum container is evacuated. It is possible.

本発明を適用した一実施形態の真空容器の要部を破断した外観構成図である。It is the external appearance block diagram which fractured | ruptured the principal part of the vacuum vessel of one Embodiment to which this invention is applied. 図１の真空容器の側面板と上板を取り去った要部外観構成図である。It is the principal part external appearance block diagram which removed the side plate and upper plate of the vacuum vessel of FIG. 図１の真空容器を構成する底板の（Ａ）は平面図、（Ｂ）は側面図である。1A is a plan view and FIG. 1B is a side view of a bottom plate constituting the vacuum container of FIG. 図１の真空容器の石定盤、底板及びステージの設置態様を示した要部断面図である。It is principal part sectional drawing which showed the installation aspect of the stone surface plate, bottom plate, and stage of the vacuum vessel of FIG. 図４のガイドレール取り付け部分を拡大した図である。It is the figure which expanded the guide rail attachment part of FIG. 底板が石定盤に設置された状態における図３中のＶＩ−ＶＩ線に沿った要部拡大断面図である。It is a principal part expanded sectional view along the VI-VI line in FIG. 3 in the state in which the baseplate was installed in the stone surface plate. 従来の真空容器の構成を示した断面図である。It is sectional drawing which showed the structure of the conventional vacuum vessel.

本発明の好適な一実施形態を図面に基づいて説明する。
なお、図面には主として真空容器及びその内部に設置されるステージと石定盤の設置態様を示し、ステージ本体の詳細な構成や真空容器とともに検査装置や半導体製造装置に装備される他の装置・機器類、例えば真空容器に取り付けられる真空ポンプや送・排気管などの図示は省略してある。 A preferred embodiment of the present invention will be described with reference to the drawings.
In addition, the drawing mainly shows the installation mode of the vacuum vessel and the stage and stone surface plate installed therein, the detailed configuration of the stage body, and other devices equipped in the inspection apparatus and semiconductor manufacturing apparatus together with the vacuum vessel. Illustrations of devices such as a vacuum pump and a feed / exhaust pipe attached to a vacuum vessel are omitted.

図１は本発明を適用した一実施形態の真空容器を検査装置に用いた状態の要部外観構成図、図２は真空容器の側面板と上板を取り去った要部外観構成図であり、両図に示されるように、真空容器１は、その内部に検査試料である対象物を保持・移動させるステージ本体２１を有するステージ２が設置されて、除振装置３上に支持された石定盤４上に載せられるとともに、ステージ２を構成するリニアガイド２２のレール部２２ａを真空容器１の底板１１に形成された開口部１１ａを通して下方へ露出させ、この露出した部分を底板１１下面に面して重なった石定盤４の上面４ａに直に固定して設置してある（図４及び図５参照）。   FIG. 1 is a main part external configuration diagram in a state where a vacuum vessel according to an embodiment to which the present invention is applied is used in an inspection apparatus, and FIG. 2 is a main unit external configuration diagram in which a side plate and an upper plate of the vacuum vessel are removed, As shown in both figures, the vacuum vessel 1 has a stage 2 having a stage body 21 for holding and moving an object as an inspection sample, and is supported on the vibration isolator 3. The rail 22a of the linear guide 22 constituting the stage 2 is exposed downward through an opening 11a formed in the bottom plate 11 of the vacuum vessel 1, and the exposed portion faces the lower surface of the bottom plate 11 while being placed on the board 4. Then, it is fixed and installed directly on the upper surface 4a of the stone surface plate 4 that overlaps (see FIGS. 4 and 5).

詳しくは、真空容器１は、何れも鋼板を加工してなる、平面視方形状の底板１１と、底板１１の周辺を囲う四側面板１２と、四側面板１２の上端開口を閉鎖する上板１３とを組み合わせて方形箱型に形成してある。
底板１１は、図３に示されるように、その面内に、後述するリニアガイド２２のレール部２２ａが挿通する幅で当該底板の長手方向に伸びた複数の開口部１１ａ、図では三つの開口部１１ａを設けるとともに、当該底板の両短手側辺の近傍に平面視正方形の他の開口部１１ｂをそれぞれ設けて形成してある。
また、底板１１の下面には、前記開口部１１ａ，１１ｂが形成された部分であって当該底板の周辺部よりも内側の部分に一定の幅で凹んだ凹部１１ｃが設けられており、底板１１の側面には、この凹部１１ｃと連通した排気口１１ｄを形成してある。
なお、後述するように、各開口部１１ａ，１１ｂと凹部１１ｃは、底板１１の下面でこれらを囲うように密封部材であるＯリング５が各々設置されて、各部の内側と石定盤４とが真空シールされる（図６参照）。 Specifically, the vacuum vessel 1 is a flat plate-shaped bottom plate 11, a four-side plate 12 that surrounds the periphery of the bottom plate 11, and an upper plate that closes the upper end opening of the four-side plate 12. 13 is formed into a rectangular box shape.
As shown in FIG. 3, the bottom plate 11 has a plurality of openings 11 a extending in the longitudinal direction of the bottom plate with a width through which a rail portion 22 a of a linear guide 22 to be described later is inserted. A portion 11a is provided, and other openings 11b in a square shape in plan view are provided in the vicinity of both short sides of the bottom plate.
In addition, the bottom plate 11 is provided with a concave portion 11c which is a portion where the openings 11a and 11b are formed and is recessed with a certain width in a portion inside the peripheral portion of the bottom plate. An exhaust port 11d that communicates with the recess 11c is formed on the side surface.
As will be described later, each of the openings 11a and 11b and the recess 11c is provided with an O-ring 5 as a sealing member so as to surround the bottom plate 11 with the lower surface of the bottom plate 11. Is vacuum sealed (see FIG. 6) .

ステージ２は、下側ステージと上側ステージを上下段に重ねて配置し、それぞれモータ（図示せず）で互いに直交する方向へ直線移動するように構成されたステージ本体２１と、下側ステージの可動部を直動案内する複数のリニアガイド２２を具備し、図４及び図５に示されるように、各リニアガイド２２のレール部２２ａが前記真空容器１の底板１１に形成された開口部１１ａを通して石定盤４の上面４ａに固定され、レール部２２ａの上面を摺動するガイドブロック部２２ｂにステージ本体２１の可動部を連結して、ステージ本体２１が真空容器１の底板１１上をレール部２２ａに沿って直線運動するように構成してある。   The stage 2 is configured such that a lower stage and an upper stage are arranged so as to overlap each other, and a stage main body 21 configured to move linearly in directions orthogonal to each other by a motor (not shown), and the movable of the lower stage. 4 and 5, the rail portion 22 a of each linear guide 22 passes through an opening portion 11 a formed in the bottom plate 11 of the vacuum vessel 1. The movable part of the stage body 21 is connected to a guide block part 22b that is fixed to the upper surface 4a of the stone surface plate 4 and slides on the upper surface of the rail part 22a, and the stage body 21 moves on the bottom plate 11 of the vacuum vessel 1 to the rail part. It is configured to linearly move along 22a.

石定盤４は、花崗岩（グラナイト）を用いて上下が１００ｍｍ以上の厚みを有する六面ブロック形に形成されており、その上面４ａを含む全面を、ＪＩＳで規定する０級以上の平面度で高精度な平滑面に形成してある。   The stone surface plate 4 is formed in a six-sided block shape having a thickness of 100 mm or more using granite (granite), and the entire surface including the upper surface 4a has a flatness of grade 0 or higher defined by JIS. It is formed on a high-precision smooth surface.

本形態の真空容器１の検査装置への設置は以下のようにして行うことができる。
先ず、除振装置３上に石定盤４を支持させ、石定盤４の上面４ａに真空容器１の底板１１を重ねた状態で、底板１１の各開口部１１ａに予めガイドブロック部２２ｂと組み合わせたステージ２のリニアガイド２２のレール部２２ａを嵌め入れて、レール部２２ａを石定盤４の上面４ａに載せ、留めネジなどでレール部２２ａを石定盤４の上面４ａに固定する。なお、リニアガイド２２のレール部２２ａを予め石定盤４の上面４ａに設置した後に底板１１を設置してもよい。 The vacuum vessel 1 of this embodiment can be installed in the inspection apparatus as follows.
First, the stone surface plate 4 is supported on the vibration isolator 3, and the guide block portion 22 b and the opening portion 11 a of the bottom plate 11 are preliminarily placed on the top surface 4 a of the stone surface plate 4 and the opening 11 a of the bottom plate 11. The rail portion 22a of the linear guide 22 of the combined stage 2 is fitted, the rail portion 22a is placed on the upper surface 4a of the stone surface plate 4, and the rail portion 22a is fixed to the upper surface 4a of the stone surface plate 4 with a fastening screw or the like. The bottom plate 11 may be installed after the rail portion 22a of the linear guide 22 is previously installed on the upper surface 4a of the stone surface plate 4.

この際、図６に示されるように、底板１１に形成された各開口部１１ａ，１１ｂ及び凹部１１ｃの下側には、これらを各々囲うようにしてＯリング５を設置し、底板１１の下面と石定盤４の上面４ａ間にＯリング５を弾圧接させて、互いに面する石定盤４の上面４ａと、各開口部１１ａ、１１ｂの内側の空間及び凹部１１ｃの内側の空間が、Ｏリング５により隔離されるようにする。また、底板１１の側面に形成した排気口には、真空ポンプに接続された排気管を接続しておく。   At this time, as shown in FIG. 6, O-rings 5 are installed below the openings 11 a and 11 b and the recesses 11 c formed in the bottom plate 11 so as to surround them. The O-ring 5 is pressed between the upper surface 4a of the stone surface plate 4 and the upper surface 4a of the stone surface plate 4 facing each other, the space inside each opening 11a, 11b and the space inside the recess 11c, Isolate by the O-ring 5. An exhaust pipe connected to a vacuum pump is connected to the exhaust port formed on the side surface of the bottom plate 11.

次いで、石定盤４の上面４ａを取り付け基準面として、リニアガイド２２上に、すなわちガイドブロック部２２ｂ上にステージ本体２１を組み立てる。さらに、底板１１の周辺に真空容器１の四側面板１２を取り付けて、前記基準面に基づきステージ２の作動調整を行う。 Next, the stage main body 21 is assembled on the linear guide 22, that is, on the guide block portion 22b , using the upper surface 4a of the stone surface plate 4 as an attachment reference surface. Further, the four side plates 12 of the vacuum vessel 1 are attached around the bottom plate 11 and the operation of the stage 2 is adjusted based on the reference plane.

そして、前記底板１１の排気口１１ｄに取り付ける排気管も含めて、真空ポンプの送気管や排気管などの真空容器１内外の送排気系統を取り付けた後、前記四側面板１２の上端開口を、上板１３を取り付けて閉鎖することで真空容器１の設置が完了する。   And after attaching the exhaust system inside and outside of the vacuum vessel 1 such as the exhaust pipe and exhaust pipe of the vacuum pump including the exhaust pipe attached to the exhaust port 11d of the bottom plate 11, the upper end opening of the four side plate 12 is Installation of the vacuum vessel 1 is completed by attaching and closing the upper plate 13.

検査装置を使用した対象物の検査は、真空容器１の内部を真空にした状態で行われる。なお、真空容器１の内部の真空度や外気温度の変化の程度等、状況に応じて、真空容器１の底板１１の排気口１１ｄを通して、底板１１の下面と石定盤４の上面４ａとが面する空間である底板１１の凹部１１ｄ内を真空排気した状態で行われる場合もある。
この際、真空容器１の内部を真空することで容器外部との差圧により真空容器１が変形するが、容器内部のステージ２は、そのステージ本体２１の軌道路であるリニアガイド２２のレール部２１を高剛性で正確な面精度が確保された石定盤４の上面４ａに直に固定して取り付けられているので、真空容器１の変形に伴って石定盤４の上面４ａが変位するようなことはなく、ステージ２により真空中で保持した対象物を正確な位置に移動し位置決めすることが可能である。 The inspection of the object using the inspection apparatus is performed in a state where the inside of the vacuum vessel 1 is evacuated. Note that the bottom surface of the bottom plate 11 and the top surface 4a of the stone surface plate 4 pass through the exhaust port 11d of the bottom plate 11 of the vacuum vessel 1 depending on the situation such as the degree of vacuum inside the vacuum vessel 1 and the change in the outside air temperature. There may be a case where the inside of the concave portion 11d of the bottom plate 11, which is the facing space, is evacuated.
At this time, the vacuum container 1 is deformed by evacuating the inside of the vacuum container 1 due to a differential pressure with the outside of the container. The stage 2 inside the container is a rail portion of the linear guide 22 that is a track path of the stage main body 21. Since 21 is directly fixed and attached to the upper surface 4a of the stone surface plate 4 with high rigidity and accurate surface accuracy, the upper surface 4a of the stone surface plate 4 is displaced as the vacuum vessel 1 is deformed. The object held in the vacuum by the stage 2 can be moved and positioned at an accurate position.

また、真空容器１の底板１１に形成した各開口部１１ａ，１１ｂは、その下面側で周囲をＯリング５で囲って、その周辺の石定盤４の上面４ａ間を真空シールしてあるので、ステージ２の作動に関わりなく真空容器１内は真空に保持され、また、底板１１の凹部１１ｃをＯリング５で囲い、その内部空間を真空排気することで底板１１の下面全体が真空下に保たれ、外気温の変化が真空容器１内の気圧に及ぼす影響を少なくすることができる。
さらに、ステージ２のステージ本体２１の直接の軌道路であるリニアガイド２２のレール部２２ａを石定盤４の上面４ａに直に固定してあるので、ステージ２を組み立てる際の精度出しに手間がかからず、石定盤４の上面４ａを基準面として、底板１１の上方にステージ２を高精度で取り付けて調整することが可能である。 Further, the openings 11a and 11b formed in the bottom plate 11 of the vacuum vessel 1 are surrounded by an O-ring 5 on the lower surface side, and the space between the upper surfaces 4a of the surrounding stone surface plates 4 is vacuum-sealed. Regardless of the operation of the stage 2, the inside of the vacuum vessel 1 is kept in a vacuum, and the recess 11c of the bottom plate 11 is surrounded by an O-ring 5 and the inner space is evacuated so that the entire lower surface of the bottom plate 11 is kept under vacuum. Thus, the influence of the change in the outside air temperature on the atmospheric pressure in the vacuum vessel 1 can be reduced.
Furthermore, since the rail portion 22a of the linear guide 22 which is a direct track path of the stage body 21 of the stage 2 is directly fixed to the upper surface 4a of the stone surface plate 4, it takes time and effort to increase accuracy when the stage 2 is assembled. However, the stage 2 can be mounted and adjusted with high accuracy above the bottom plate 11 using the upper surface 4a of the stone surface plate 4 as a reference surface.

なお、図示した真空容器１やステージ２の形態は一例であり、本発明はこれに限定されず、他の適宜な形態で構成することが可能である。   In addition, the form of the illustrated vacuum vessel 1 and stage 2 is an example, and the present invention is not limited to this, and can be configured in other appropriate forms.

１ 真空容器、１１ 底板、１１ａ 開口部、１１ｂ 他の開口部、１１ｃ 凹部、１１ｄ 排気口、１２ 側面板、１３ 上板、２ ステージ、２１ ステージ本体、２２ リニアガイド、２２ａ レール部、２２ｂ ガイドブロック部、３ 除震装置、４ 石定盤、４ａ 上面、５ Ｏリング DESCRIPTION OF SYMBOLS 1 Vacuum container, 11 Bottom plate, 11a Opening part, 11b Other opening part, 11c Recessed part, 11d Exhaust port, 12 Side plate, 13 Top plate, 2 Stage, 21 Stage main body, 22 Linear guide, 22a Rail part, 22b Guide block Part, 3 seismic isolator , 4 stone surface plate , 4a top surface , 5 O-ring

Claims (4)

石定盤上に設置された真空容器内にステージを設置する構造において、
ステージの直線運動するリニアガイドの可動部であるガイドブロック部とこれを案内するレール部が真空容器の底板に形成された開口部に嵌め入れられ、この開口部を通して前記レール部が底板下面に面した石定盤の上面に直接取り付けられ、前記ガイドブロック部上にステージが組み立てられた構成を有することを特徴する真空容器内のステージの設置構造。 In the structure where the stage is installed in the vacuum vessel installed on the stone surface plate,
A guide block portion that is a movable portion of a linear guide that linearly moves on the stage and a rail portion that guides the guide block portion are fitted into an opening formed in the bottom plate of the vacuum vessel, and the rail portion faces the bottom surface of the bottom plate through the opening. An installation structure for a stage in a vacuum vessel , wherein the stage is mounted directly on the upper surface of the stone surface plate and the stage is assembled on the guide block portion . 真空容器の底板に形成された開口部と石定盤の上面間が真空シールされた構成を有することを特徴とする請求項１に記載の真空容器内のステージの設置構造。   2. The stage installation structure in a vacuum vessel according to claim 1, wherein the opening formed in the bottom plate of the vacuum vessel and the upper surface of the stone surface plate are vacuum sealed. 真空容器の底板の下面外周近傍と石定盤の上面間が真空シールされているとともに、前記底板下面と石定盤上面とが面する空間に通じた排気口を底板側部に設け、当該排気口から前記空間を真空排気可能に設けた構成を有することを特徴とする請求項１又は２に記載の真空容器内のステージの設置構造。   A vacuum seal is provided between the vicinity of the outer periphery of the bottom surface of the bottom plate of the vacuum vessel and the top surface of the stone surface plate, and an exhaust port that communicates with the space between the bottom surface of the bottom plate and the top surface of the stone surface plate is provided on the side of the bottom plate. The stage installation structure in a vacuum vessel according to claim 1 or 2, wherein the space is provided so that the space can be evacuated from the mouth. リニアガイドのレール部が挿通される開口部に加えて、周囲が真空シールされた他の開口部が真空容器の底板に少なくとも一つ以上設けられた構成を有することを特徴とする請求項１〜３の何れかに記載の真空容器内のステージの設置構造。


2. In addition to the opening through which the rail portion of the linear guide is inserted, at least one other opening that is vacuum sealed is provided on the bottom plate of the vacuum vessel. The stage installation structure in the vacuum vessel according to any one of 3.


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