JP6206295B2 - Optical apparatus provided with tilt adjustment mechanism and tilt adjustment method - Google Patents
Optical apparatus provided with tilt adjustment mechanism and tilt adjustment method Download PDFInfo
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Description
本発明は傾き調整機構を備えた光学機器及び傾き調整方法に関する。 The present invention relates to an optical apparatus provided with a tilt adjusting mechanism and a tilt adjusting method.
２次元の光学像を表示する複数の空間光変調素子を３行３列、あるいは４行４列のように並列に配置し、それら複数の空間光変調素子からの各光学像を光学系で合成して大きな合成像を得る光学機器が知られている。これは大きな光学像を表示するために、表示する像に見合った大面積或いは高密度に多数の光学素子を配列した単体の空間光変調素子の製作が難しいため、並列配置された複数の空間光変調素子が最終的表示情報を分担表示する事で同様の大きな映像を得るためである。 A plurality of spatial light modulation elements that display a two-dimensional optical image are arranged in parallel in 3 rows and 3 columns or 4 rows and 4 columns, and each optical image from the plurality of spatial light modulation elements is synthesized by an optical system. Optical apparatuses that obtain a large composite image are known. In order to display a large optical image, it is difficult to manufacture a single spatial light modulation element in which a large number of optical elements are arranged in a large area or high density corresponding to the image to be displayed. This is because the modulation element displays the final display information in a shared manner to obtain a similar large image.
このような複数の空間光変調素子が並列配置された光学機器においては、それぞれの空間光変調素子について光軸に対する倒れ角の調整（アオリ調整）と、光軸に垂直な平面内での回転による傾きを他の空間光変調素子と揃える傾き調整とを行って各空間光変調素子の傾きが揃った状態とする粗調整の後、更に合成像を表示しながら光学系に合わせ込む微調整が必要である。これらの調整のうち、粗調整に関しては従来特許文献１に記載の方法が知られている。 In such an optical apparatus in which a plurality of spatial light modulation elements are arranged in parallel, the inclination angle (tilt adjustment) with respect to the optical axis of each spatial light modulation element is adjusted and rotated in a plane perpendicular to the optical axis. After coarse adjustment to make the inclination of each spatial light modulation element uniform with the inclination adjustment to align the inclination with other spatial light modulation elements, further fine adjustment to fit the optical system while displaying the composite image is necessary It is. Among these adjustments, the method described in Patent Document 1 is known for coarse adjustment.
特許文献１に記載の従来の光学機器では、並列配置された複数の空間光変調素子にそれぞれアオリ調整の支持体として外枠を設け、ネジとバネで表示部を保持し、ネジとバネの釣り合いの調整により傾きを調整する構成としている。 In the conventional optical device described in Patent Document 1, an outer frame is provided as a tilt adjustment support for each of a plurality of spatial light modulation elements arranged in parallel, and the display unit is held by a screw and a spring. The inclination is adjusted by adjusting the angle.
しかしながら、特許文献１に記載の３行３列に空間光変調素子を並列配置した光学機器の構成では、表示面に垂直な側面方向の空間を利用して回転による傾き調整を行う場合、真ん中の１個の空間光変調素子は傾き調整する際の基準の設定ができない問題がある。 However, in the configuration of the optical apparatus in which spatial light modulation elements are arranged in parallel in 3 rows and 3 columns described in Patent Document 1, when the tilt adjustment by rotation is performed using the space in the side surface direction perpendicular to the display surface, One spatial light modulator has a problem that it is impossible to set a reference for adjusting the inclination.
本発明は以上の点に鑑みなされたもので、複数の空間光変調素子の密集した並列配置に対応し、各空間光変調素子の光学面に垂直な光軸周りの傾き調整を、周囲を他の空間光変調素子に囲まれた内側の空間光変調素子も含めて調整し得る傾き調整機構を備えた光学機器と方法を提供することを目的とする。 The present invention has been made in view of the above points, and corresponds to a dense parallel arrangement of a plurality of spatial light modulation elements, and is capable of adjusting the inclination around the optical axis perpendicular to the optical surface of each spatial light modulation element. It is an object of the present invention to provide an optical apparatus and method including an inclination adjustment mechanism that can be adjusted including an inner spatial light modulation element surrounded by the spatial light modulation element.
上記の目的を達成するため、本発明の傾き調整機構を備えた光学機器は、所定のパネル面に行方向及び列方向に並列配置された複数の空間光変調素子(10)と、前記空間光変調素子毎にその近傍位置にそれぞれ設けられた調整光反射部材(112)と、前記空間光変調素子毎にその近傍位置にそれぞれ設けられた副次的反射面(113)と、前記空間光変調素子毎に設けられた、前記空間光変調素子の光学面に垂直な光軸周りの回転による前記空間光変調素子の傾きを調整する傾き調整機構部(40,108,110)とを有し、前記調整光反射部材(112)は、入射した調整光を前記副次的反射面に反射するように配置され、前記副次的反射面(113)は、隣接する他の空間光変調素子の前記調整光反射部材で反射されて入射する反射調整光を前記調整光反射部材に反射するように配置されることを特徴とする。
また、本発明の傾き調整方法は、所定のパネル面に行方向及び列方向に並列配置された複数の空間光変調素子毎における近傍位置それぞれに設けられた調整光反射部材に、外部の光源から調整光を入射するステップと、前記調整光反射部材において前記調整光を反射させることにより、前記空間光変調素子毎における近傍位置それぞれに設けられた副次的反射面に前記調整光を入射するステップと、前記副次的反射面において前記調整光を反射させることにより、前記調整光反射部材に前記調整光を入射する第１反射ステップと、前記調整光反射部材において、前記第１反射ステップにおいて入射された前記調整光を反射させる第２反射ステップと、前記第２反射ステップにより反射された前記調整光に基づいて、前記空間光変調素子の光学面に垂直な光軸周りの回転による前記空間光変調素子の傾きを調整するステップとを有する。
To achieve the above object, an optical apparatus provided with a tilt adjustment mechanism of the present invention includes a plurality of spatial light modulators arranged in parallel in a row direction and a column direction in a predetermined panel surface (10), before Symbol space The adjustment light reflecting member (112) provided in the vicinity position for each light modulation element, the secondary reflection surface (113) provided in the vicinity position for each spatial light modulation element, and the spatial light A tilt adjusting mechanism (40, 108, 110) for adjusting the tilt of the spatial light modulator by rotation around an optical axis perpendicular to the optical surface of the spatial light modulator provided for each modulator; The reflection member (112) is arranged so as to reflect the incident adjustment light on the secondary reflection surface, and the secondary reflection surface (113) reflects the adjustment light of other adjacent spatial light modulation elements. Arranged so that the reflected adjustment light reflected by the member is reflected on the adjustment light reflecting member. Characterized in that it is.
In addition, the tilt adjustment method of the present invention provides an adjustment light reflecting member provided at each of adjacent positions in a plurality of spatial light modulation elements arranged in parallel in the row direction and the column direction on a predetermined panel surface from an external light source. comprising the steps of entering the adjusted light, by reflecting the adjustment light in the adjustment light reflecting member, the step of entering the adjusted light to the secondary reflecting surface provided near each location in the spatial light modulator for each When, by reflecting the Oite the adjustment light to the secondary reflecting surface, a first reflecting step of entering the adjusted light to the adjustment light reflecting member, in the adjustment light reflecting member, the first reflecting step A second reflection step for reflecting the adjustment light incident on the optical path, and an optical component of the spatial light modulator based on the adjustment light reflected by the second reflection step. And a step of adjusting the inclination of the spatial light modulator according to the rotation around the optical axis perpendicular to the.
本発明によれば、密集して並列配置された複数の空間光変調素子の各光軸周りの傾き調整を、周囲を他の空間光変調素子に囲まれた内側の空間光変調素子も含めて調整することができる。 According to the present invention, the inclination adjustment around each optical axis of a plurality of closely arranged spatial light modulation elements including the inner spatial light modulation element surrounded by other spatial light modulation elements is performed. Can be adjusted.
以下、図面を参照して本発明の実施形態について説明する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
図１は、本発明になる傾き調整機構を備えた光学機器を構成要素として含む光学表示システムの一例のシステム構成図を示す。同図において、光学表示システム１は、サーバー部２、本発明の傾き調整機構を備えた光学機器３、光学系４から構成されており、合成像５を表示する。サーバー部２は表示すべき画像の映像信号を出力する。 FIG. 1 shows a system configuration diagram of an example of an optical display system including an optical apparatus having a tilt adjusting mechanism according to the present invention as a constituent element. In the figure, an optical display system 1 includes a server unit 2, an optical device 3 having an inclination adjustment mechanism of the present invention, and an optical system 4, and displays a composite image 5. The server unit 2 outputs a video signal of an image to be displayed.
傾き調整機構を備えた光学機器３は、後述するように、その光学面に複数の空間光変調素子が３行３列、あるいは４行４列のように並列に配置されており、サーバー部２から供給された映像信号に応じて複数の空間光変調素子からそれぞれ光信号を出力する。光学系４は傾き調整機構を備えた光学機器３の複数の空間光変調素子からの複数の光出力を所望の形に合成して大きな合成像５を表示する。 As will be described later, the optical device 3 provided with the tilt adjustment mechanism has a plurality of spatial light modulation elements arranged in parallel on its optical surface in the form of 3 rows by 3 columns or 4 rows by 4 columns. The optical signals are respectively output from the plurality of spatial light modulation elements in accordance with the video signal supplied from. The optical system 4 combines a plurality of light outputs from a plurality of spatial light modulation elements of the optical apparatus 3 having an inclination adjustment mechanism into a desired shape and displays a large composite image 5.
次に、本発明の傾き調整機構を備えた光学機器の一実施形態の構成について説明する。 Next, the configuration of an embodiment of an optical apparatus provided with the tilt adjustment mechanism of the present invention will be described.
図２は、本発明の傾き調整機構を備えた光学機器の一実施形態の概略外観斜視図を示す。同図に示す本実施形態の光学機器３は図１に示した光学機器３に相当し、外形が大略直方体形状の筐体３０の前面パネルであるベース面３１に、空間光変調素子の一例としての反射型液晶表示素子（Liquid Crystal on Silicon：以下、ＬＣＯＳという）１０が１６個、４行４列に並列配置されている。ＬＣＯＳ１０はその駆動端子がＦＰＣ（フレキシブルプリント回路）基板を介して筐体３０内に実装されているＬＣＯＳ駆動用の回路基板に接続されている。 FIG. 2 is a schematic external perspective view of an embodiment of an optical apparatus provided with the tilt adjusting mechanism of the present invention. The optical device 3 of the present embodiment shown in the figure corresponds to the optical device 3 shown in FIG. 1, and the outer surface is a base panel 31 that is a front panel of a housing 30 having a substantially rectangular parallelepiped shape, as an example of a spatial light modulation element. 16 reflective liquid crystal display elements (Liquid Crystal on Silicon: hereinafter referred to as LCOS) 10 are arranged in parallel in 4 rows and 4 columns. The drive terminal of the LCOS 10 is connected to a circuit board for driving the LCOS mounted in the housing 30 through an FPC (flexible printed circuit) board.
ベース面３１は、筐体３０の底板３２に対して垂直に設けられており、また、図１に示した光学系４の光軸を垂線とするように光学系４に対して正対するように配置されている。また、ベース面３１の１６個のＬＣＯＳ１０が並列配置されている領域の上側の領域のほぼ中央部に角度調整用基準反射部材２５が取り付けられている。 The base surface 31 is provided perpendicular to the bottom plate 32 of the housing 30 and faces the optical system 4 so that the optical axis of the optical system 4 shown in FIG. Has been placed. In addition, the angle-reflecting reference reflecting member 25 is attached to substantially the center of the upper region of the region where the 16 LCOSs 10 of the base surface 31 are arranged in parallel.
底板３２は、その一部がベース面３１よりも前方に突き出ており、その突き出ている底板位置で、１６個のＬＣＯＳ１０のうち最下行の４個のＬＣＯＳ１０にそれぞれ対応する位置に、４個の傾き調整用基準反射部材２０が設けられている。傾き調整用基準反射部材２０は、最下段のＬＣＯＳの光軸に垂直な平面内での回転による傾きを調整する際に用いる。具体的には光学系の光軸に平行な調整光を調整光反射部材(112)で傾き調整用基準反射部材に反射し、傾き調整用基準反射部材２０からの戻り光により傾き測定装置で調整するために用いる。 A part of the bottom plate 32 protrudes forward from the base surface 31, and at the bottom plate position at which the bottom plate 32 protrudes, there are four pieces at positions corresponding to the four LCOSs 10 at the bottom of the 16 LCOSs 10. An inclination adjusting reference reflecting member 20 is provided. The tilt adjusting reference reflecting member 20 is used to adjust the tilt due to rotation in a plane perpendicular to the optical axis of the lowermost LCOS. Specifically, the adjustment light parallel to the optical axis of the optical system is reflected by the adjustment light reflecting member (112) to the inclination adjusting reference reflecting member, and adjusted by the inclination measuring device by the return light from the inclination adjusting reference reflecting member 20. Used to do.
一方、筐体３０の上面３３には１６個のＬＣＯＳ１０の角度調整を個別に行う調整ノブ４０が配置されている。調整ノブ４０は、１個のＬＣＯＳ１０に対して、素子光学面であるベース面３１に垂直な光軸の倒れ方向の傾きであるパン方向の傾きとチルト方向の傾きの計２方向の傾き角を別々に調整する２軸のアオリ調整用の２個と、素子光学面内の回転による傾き（θ傾き）調整用の１軸の１個とが設けられる。従って、ここではＬＣＯＳ１０は１６個あるので、調整ノブ４０は全部で４８個設けられている。 On the other hand, adjustment knobs 40 for individually adjusting the angles of the 16 LCOSs 10 are arranged on the upper surface 33 of the housing 30. The adjustment knob 40 determines the tilt angle in two directions, that is, the tilt in the pan direction and the tilt in the tilt direction, which are tilts in the tilt direction of the optical axis perpendicular to the base surface 31 that is the element optical surface, for one LCOS 10. Two two-axis tilt adjustments that are adjusted separately and one one axis for tilt (θ tilt) adjustment by rotation in the element optical surface are provided. Therefore, since there are 16 LCOSs 10 here, 48 adjustment knobs 40 are provided in total.
次に、ＬＣＯＳ１０を調整機構に実装した空間光変調素子ユニットの構成について図３、図４及び図５と共に説明する。 Next, the configuration of the spatial light modulation element unit in which the LCOS 10 is mounted on the adjustment mechanism will be described with reference to FIGS.
図３は、空間光変調素子ユニットの一実施形態の光学系側斜め上方から見た外観斜視図、図４は、空間光変調素子ユニットの一実施形態のユニットベースを透過した状態の装置内部側斜め上方から見た外観斜視図、図５は、空間光変調素子ユニットの一実施形態のユニットベースを透過した状態の斜め下方から見た外観斜視図を示す。図３〜図５中、同一構成部分には同一符号を付してある。 FIG. 3 is an external perspective view of an embodiment of the spatial light modulation element unit as viewed obliquely from above the optical system side, and FIG. FIG. 5 is an external perspective view as seen from obliquely above, and FIG. 5 is an external perspective view as seen from obliquely below in a state where the unit base of one embodiment of the spatial light modulation element unit is transmitted. 3 to 5, the same reference numerals are given to the same components.
図３〜図５の外観斜視図に示す空間光変調素子ユニット１００は、各ＬＣＯＳ１０毎に筐体３０に実装されており、ＬＣＯＳ１０の光学面１０−２に垂直な光軸に対するＬＣＯＳの傾きを、パン方向及びチルト方向にそれぞれ調整するアオリ調整と、光軸周りの回転に関して傾きを調整するθ傾き調整との機能を備える。ＬＣＯＳ１０は光源から光学面１０−２に入射するレーザー光を反射させて画像表示を行うため、光学系の一部としてＬＣＯＳ１０の光学面１０−２側には図示しないレーザー光を入射させるハーフミラーが設けてあり、ＬＣＯＳ搭載側から再生像を見ながらアオリ調整を行うことはできない。 The spatial light modulation element unit 100 shown in the external perspective view of FIGS. 3 to 5 is mounted on the housing 30 for each LCOS 10, and the inclination of the LCOS with respect to the optical axis perpendicular to the optical surface 10-2 of the LCOS 10 is expressed as follows. It has functions of tilt adjustment that adjusts in the pan direction and tilt direction, and θ inclination adjustment that adjusts the inclination with respect to rotation around the optical axis. Since the LCOS 10 displays an image by reflecting laser light incident on the optical surface 10-2 from the light source, a half mirror that makes laser light not shown enter the optical surface 10-2 side of the LCOS 10 as a part of the optical system. The tilt adjustment cannot be performed while viewing the reproduced image from the LCOS mounting side.
次に、図３、図４及び図５を用いて空間光変調素子ユニット１００の構成を具体的に説明する。 Next, the configuration of the spatial light modulation element unit 100 will be specifically described with reference to FIGS. 3, 4, and 5.
図３に示すように素子保持部材１０１は、ＬＣＯＳ１０の光学面１０−２の長辺と短辺に平行なＬＣＯＳ外形とそれぞれ合わせるようにして位置決めして、ＬＣＯＳ１０を筐体３０の表面がベース面３１である筐体部分（以下、これをユニットベースという）に取付けている。素子保持部材１０１はパン回転軸１２でパン方向に回転自在にパンベース部材１０２に係合されている。図示しない付勢手段が、素子保持部材１０１をユニットベースに付勢する方向に設けられており、素子保持部材１０１に取付けた素子保持部材押圧部１０３をユニットベースに螺合されたパン調整ねじ１０４の凸量によって支持高さを変えてパン方向の角度変位を得る構造である。保持部材１０１の下側端部には４５°反射面１１２が設けられ、それに対向する上側端部には副次的基準反射面１１３が設けられている。４５°反射面１１２は、本発明の調整光反射部材を構成している。副次的基準反射面１１３はベース面３１と垂直であり、ベース面３１はＬＣＯＳ１０の光学面と平行である。 As shown in FIG. 3, the element holding member 101 is positioned so as to match the LCOS outer shape parallel to the long side and the short side of the optical surface 10-2 of the LCOS 10, and the surface of the housing 30 is the base surface. It is attached to a housing portion 31 (hereinafter referred to as a unit base). The element holding member 101 is engaged with the pan base member 102 so as to be rotatable in the pan direction by the pan rotation shaft 12. A biasing means (not shown) is provided in a direction for biasing the element holding member 101 to the unit base, and a pan adjusting screw 104 in which the element holding member pressing portion 103 attached to the element holding member 101 is screwed to the unit base. This is a structure that obtains an angular displacement in the pan direction by changing the support height according to the amount of protrusion. A 45 ° reflection surface 112 is provided at the lower end of the holding member 101, and a secondary reference reflection surface 113 is provided at the upper end opposite thereto. The 45 ° reflecting surface 112 constitutes the adjusting light reflecting member of the present invention. The secondary reference reflecting surface 113 is perpendicular to the base surface 31, and the base surface 31 is parallel to the optical surface of the LCOS 10.
パンベース部材１０２はチルト回転軸１４でチルト方向に回転自在にチルトベース部材１０５に係合されており、図示しない付勢手段がパンベース部材１０２をベース面側に押し付ける方向に設けられており、チルトベース部材１０５及びパンベース部材１０２に取付けたパンベース部材押圧部１０６をユニットベースに螺合されたチルト調整ねじ１０７の凸量によって支持高さを変えてチルト方向の角度変位を得る構造である。 The pan base member 102 is engaged with the tilt base member 105 so as to be rotatable in the tilt direction by the tilt rotation shaft 14, and an urging means (not shown) is provided in a direction to press the pan base member 102 toward the base surface side. The tilt base member 105 and the pan base member pressing portion 106 attached to the pan base member 102 are structured to obtain the angular displacement in the tilt direction by changing the support height according to the convex amount of the tilt adjusting screw 107 screwed to the unit base. .
パン調整ねじ１０４、チルト調整ねじ１０７、θ傾き調整ねじ１０８は筐体内部で一端をフレキシブルシャフトに接続されており、これらフレキシブルシャフトの他端は筐体上面３３に取付けられた操作ノブ４０に接続されている。このようにして、上面の操作ノブ３３を回す事により調整が可能となる。 One end of each of the pan adjustment screw 104, the tilt adjustment screw 107, and the θ inclination adjustment screw 108 is connected to the flexible shaft inside the housing, and the other end of these flexible shafts is connected to the operation knob 40 attached to the upper surface 33 of the housing. Has been. In this way, adjustment is possible by turning the operation knob 33 on the upper surface.
チルトベース部材１０５は光学面の中心と一致させた位置に基準ピン１０９が形成されている。基準ピン１０９をユニットベース上の対応穴に差し込まれる。ユニットベースにはθ傾き調整用押圧部材１１０が固定されており、ユニットベースの穴を通して、ユニットベース裏面側に出ている部分を、ユニットベース裏面に取付けてあるブラケット１１１に螺合したθ傾き調整ねじ１０８の進退によりチルトベース部材１０５を、基準ピン１０９を中心とした回転により傾きを調整する。 The tilt base member 105 has a reference pin 109 formed at a position coinciding with the center of the optical surface. The reference pin 109 is inserted into the corresponding hole on the unit base. A θ-tilt adjustment pressing member 110 is fixed to the unit base, and a portion that protrudes to the back side of the unit base through a hole in the unit base is screwed into a bracket 111 attached to the back side of the unit base. The tilt of the tilt base member 105 is adjusted by rotating around the reference pin 109 by moving the screw 108 back and forth.
図６は、調整ねじを遠隔操作するフレキシブルシャフトの接続を示す。図６に示すようにベース面３１に螺合された調整ネジ１０４、１０７または１０８と、上面３３に設けた操作用ノブ４０とを繋ぐ部材がフレキシブルシャフト３５である。フレキシブルシャフト３５は可撓性回転軸としての性質を持ち、直線でなく撓んだ状態で一端に与えた回転を他端に伝える事ができる。内部は芯線の周りに鋼線を巻き付けた層が複数重なっており、本実施形態で用いるフレキシブルシャフト３５は、重なりあった鋼線の巻き層は各層毎に反対周りに巻くようにしてあり、左右両回転方向に対応できる。外部は絶縁用の被覆で覆ってあり、回路基板等電気部品間の狭いスペースでもショート等の心配無く安心して使えるようにしてある。 FIG. 6 shows the connection of the flexible shaft that remotely controls the adjustment screw. As shown in FIG. 6, the flexible shaft 35 is a member that connects the adjusting screw 104, 107, or 108 screwed to the base surface 31 and the operation knob 40 provided on the upper surface 33. The flexible shaft 35 has a property as a flexible rotating shaft, and can transmit the rotation given to one end to the other end in a bent state instead of a straight line. Inside, there are a plurality of layers in which steel wires are wound around the core wire, and the flexible shaft 35 used in this embodiment is configured so that the wound layers of the steel wires that overlap each other are wound around the opposite sides. Compatible with both rotation directions. The outside is covered with an insulating coating so that it can be used safely in a narrow space between electrical parts such as circuit boards without worrying about short circuits.
フレキシブルシャフト３５は大トルク或いは高回転の伝達にも対応できる。フレキシブルシャフト３５は、それ自体の腰が強く、適切な曲げ半径の確保と同時に、取り付け面に対してフレキシブルシャフトの腰の強さに負けない強度が必要である。フレキシブルシャフト３５を接続した調整ネジ１０４、１０７、１０８をパンベース部材等に直接取付けると、フレキシブルシャフトの反力で角度が変わってしまい、反力に負けない付勢を行なうと操作性と操作に連れて角度変更する追従性が悪くなる。従って、本実施形態では中間支持体に直接取り付けずに、フレキシブルシャフト３５の腰の強さの影響を受けないベース面３１に取り付ける構造をとり、フレキシブルシャフトの反力はベース面３１で遮断し、調整ねじの凸量の変化のみ伝えられるようにしたので、密集実装された調整用ネジ４０の操作が可能になっている。 The flexible shaft 35 can cope with transmission of large torque or high rotation. The flexible shaft 35 has a strong waist, and needs to have a strength that does not lose the strength of the waist of the flexible shaft with respect to the mounting surface while ensuring an appropriate bending radius. If the adjusting screws 104, 107, and 108 connected to the flexible shaft 35 are directly attached to the pan base member or the like, the angle changes due to the reaction force of the flexible shaft. The follow-up ability to change the angle with it becomes worse. Therefore, in this embodiment, it is not directly attached to the intermediate support, but is attached to the base surface 31 that is not affected by the waist strength of the flexible shaft 35, and the reaction force of the flexible shaft is blocked by the base surface 31, Since only the change in the convex amount of the adjusting screw is transmitted, the operation of the adjusting screw 40 that is densely mounted is possible.
図７は、調整ねじの動作説明図を示す。図７（Ｂ）は同図（Ａ）のａ方向から見た図を示す。図７（Ａ）、（Ｂ）に示すように、ベース面３１の内側の調整ねじ１０４の一端と上面の操作用ノブ４０とをフレキシブルシャフト３５で繋いで操作用ノブ４０の回転を伝える。ＬＣＯＳ間の配置を狭めて狭ピッチ配置を実現するため、操作部は筐体３０の裏面に設けてあり、裏面側にもＬＣＯＳを駆動する図示しない回路基板を実装するため直接操作を行なう空間が無く、遠隔操作を行う必要がある。 FIG. 7 is a diagram for explaining the operation of the adjusting screw. FIG. 7B shows a view from the direction a of FIG. As shown in FIGS. 7A and 7B, one end of the adjustment screw 104 inside the base surface 31 and the operation knob 40 on the upper surface are connected by a flexible shaft 35 to transmit the rotation of the operation knob 40. In order to realize a narrow pitch arrangement by narrowing the arrangement between the LCOSs, the operation unit is provided on the back surface of the housing 30 and there is a space for direct operation for mounting a circuit board (not shown) for driving the LCOS on the back surface side. There is no need to operate remotely.
このように、アオリ調整部はＬＣＯＳ１０を固定した水平方向及び垂直方向の支持体がそれぞれ回転軸を介して連結されており、連結された支持体の一端をベース面に螺合されネジ部が突き出す調整用ネジ１０４、１０７の突出量を変化させる作用により、支持体の傾きを変更する構造である。 As described above, the tilt adjusting unit is configured such that the horizontal and vertical supports to which the LCOS 10 is fixed are connected via the rotation shaft, and one end of the connected support is screwed to the base surface so that the screw part protrudes. In this structure, the inclination of the support is changed by the action of changing the protruding amount of the adjusting screws 104 and 107.
次に、調整方法について説明する。調整は光学系無しの状態で各ＬＣＯＳの向きを揃えて更にθ傾きが無い状態にする粗調整と、粗調整後に行う光学系を取付けて合成像を確認しながら光学系に合わせて調整を行う微調整で構成される。 Next, an adjustment method will be described. Adjustment is performed in accordance with the optical system while adjusting the orientation of each LCOS in the absence of the optical system so that there is no further θ tilt and attaching the optical system to be performed after the coarse adjustment and checking the composite image. Consists of fine adjustment.
粗調整は、アオリ調整とθ傾き調整とからなり、アオリ調整を行ってからθ傾き調整を行う。アオリ調整は、光源からのレーザー光を対象物に照射して対象物から反射された反射光を、コリメータレンズを介して受光素子で受け、その受光位置の変位により対象物の角度を得る市販の傾き測定装置を利用する。 Coarse adjustment includes tilt adjustment and θ tilt adjustment, and θ tilt adjustment is performed after tilt adjustment. The tilt adjustment is a commercially available device that receives the reflected light reflected from the object by irradiating the object with the laser light from the light source through the collimator lens and receives the angle of the object by the displacement of the light receiving position. An inclination measuring device is used.
まず、前述の傾き測定装置により図１のベース面３１上に設けた基準となる角度調整用基準反射部材２５の角度を測定し、角度調整用基準反射部材２５と同じアオリ角度になるように１６個のＬＣＯＳ１０の傾きを調整する。 First, the angle of the angle adjusting reference reflecting member 25 provided on the base surface 31 of FIG. 1 is measured by the tilt measuring device described above, and the angle 16 is adjusted to be the same as the angle adjusting reference reflecting member 25. The inclination of each LCOS 10 is adjusted.
次に、同じ傾き測定装置を、基準となる角度調整用基準反射部材２５に正対するように設置し、その状態を維持したまま、図２に示した底板３２に設けられた傾き調整用基準反射部材２０に近接離間した位置にある最下段のＬＣＯＳ１０を実装する保持部材１０１上に設けた図３に示す４５°反射面１１２に、図８に示すように傾き測定装置５０からレーザー光を照射する。 Next, the same inclination measuring device is installed so as to face the reference angle reflection reference member 25 for angle adjustment, and the reference reflection for inclination adjustment provided on the bottom plate 32 shown in FIG. As shown in FIG. 8, the laser beam is irradiated from the inclination measuring device 50 onto the 45 ° reflecting surface 112 shown in FIG. 3 provided on the holding member 101 on which the lowermost LCOS 10 is mounted in the position close to and away from the member 20. .
図９は、傾き測定装置５０を用いて光学機器３に向かってＬＣＯＳ１０のθ傾きを調整する状態を示す。傾き測定装置５０から出射されたレーザー光は光路５１を経て４５°反射面１１２に入射して反射し、その反射光が傾き調整用基準反射部材２０で反射した後元の４５°反射面１１２で再び反射され、光路５２を経て傾き測定装置５０に戻ってくる。このとき、角度調整用基準反射部材２５の場合と同様に反射光を受光できるように、θ傾きの調整を行える調整用ノブ４０を回して調整することにより、保持部材１０１が傾き調整用基準反射部材２０に平行な状態に調整できる。 FIG. 9 shows a state in which the θ inclination of the LCOS 10 is adjusted toward the optical apparatus 3 using the inclination measuring device 50. The laser light emitted from the tilt measuring device 50 is incident on and reflected by the 45 ° reflecting surface 112 through the optical path 51, and the reflected light is reflected on the tilt adjusting reference reflecting member 20 and then reflected on the original 45 ° reflecting surface 112. The light is reflected again and returns to the tilt measuring device 50 through the optical path 52. At this time, the holding member 101 is adjusted by turning the adjustment knob 40 that can adjust the θ inclination so that the reflected light can be received in the same manner as in the case of the angle adjustment reference reflecting member 25, so that the holding member 101 can adjust the inclination adjusting reference reflection. It can be adjusted to be parallel to the member 20.
最下段のＬＣＯＳの傾きを角度調整用基準反射部材２０を用いて調整しておけば、最下段のＬＣＯＳ保持部材の４５°反射面１１２の反対側に設けた垂直な反射面である副次的基準反射面１１３が底板３２と略平行な状態になるので、今度は、一行上の位置にあるＬＣＯＳ保持部材のθ調整が同様に可能になる。 If the inclination of the lowermost LCOS is adjusted by using the angle adjusting reference reflecting member 20, a secondary reflecting surface which is a vertical reflecting surface provided on the opposite side of the 45 ° reflecting surface 112 of the lowermost LCOS holding member. Since the reference reflecting surface 113 is in a state substantially parallel to the bottom plate 32, it is possible to adjust the θ of the LCOS holding member at the position on one line in the same manner.
なお、本実施形態では迷光抑止のため、ＬＣＯＳ保持部材１０１の４５°反射面１１２に対向する場所にだけそれぞれ基準となる反射面を設けたが、一体で必要な領域をカバーする反射面としても良い。更に、底板３２上に設けた傾き調整用基準反射部材２０とベース面３１上に設けた角度調整用基準反射部材２５とは垂直な位置関係となるように装置組立の段階に合わせ込んである。 In this embodiment, in order to suppress stray light, the reference reflective surface is provided only at the location facing the 45 ° reflective surface 112 of the LCOS holding member 101. However, the reflective surface may integrally cover a necessary area. good. Further, the tilt adjusting reference reflecting member 20 provided on the bottom plate 32 and the angle adjusting reference reflecting member 25 provided on the base surface 31 are adapted to the stage of device assembly so as to have a vertical positional relationship.
上記の傾き調整後の保持部材１０１の光軸に垂直な副次的基準反射面１１３は、隣接する一行上のＬＣＯＳの保持部材の４５°反射面１１２に対して傾き調整用基準反射部材２０と同じ働きが可能になる。すなわち、図９に示すように、一行上のＬＣＯＳのθ傾き調整のため、１行分の高さだけ高く位置調整された傾き測定装置５０から出射されたレーザー光（調整光）は光路５１‘を経て１行上のＬＣＯＳ保持部材の４５°反射面１１２に入射して反射し、その反射光が副次的基準反射面１１３で反射した後元の４５°反射面１１２で再び反射され、光路５２’を経て傾き測定装置５０に戻ってくる。このとき、角度調整用基準反射部材２５の場合と同様に反射光を受光できるように、θ傾きの調整を行える調整用ノブ４０を回して反射光の光路が傾き測定装置５０から出射されたレーザー光の光路と一致するように調整することにより、保持部材１０１が傾き調整用基準反射部材２０に平行な状態に調整できる。 The secondary reference reflecting surface 113 perpendicular to the optical axis of the holding member 101 after the tilt adjustment described above is aligned with the reference reflecting member 20 for tilt adjustment with respect to the 45 ° reflecting surface 112 of the LCOS holding member on the adjacent row. The same work becomes possible. That is, as shown in FIG. 9, the laser beam (adjustment light) emitted from the inclination measuring device 50 whose position is adjusted higher by the height of one line for adjusting the θ inclination of LCOS on one line is an optical path 51 ′. Then, the light enters the 45 ° reflecting surface 112 of the LCOS holding member on one row and is reflected, and the reflected light is reflected by the secondary reference reflecting surface 113 and then reflected again by the original 45 ° reflecting surface 112, and the optical path. It returns to the inclination measuring apparatus 50 through 52 '. At this time, as in the case of the angle adjusting reference reflecting member 25, the adjustment knob 40 capable of adjusting the θ inclination is turned so that the reflected light can be received, and the optical path of the reflected light is emitted from the inclination measuring device 50. The holding member 101 can be adjusted to be parallel to the inclination adjusting reference reflecting member 20 by adjusting the light path so as to coincide with the light path.
図１０は、θ傾きの調整の順番の一例を示す図である。まず、並列配置されたＬＣＯＳ１０のうち最下行の最も底板３２に近く、かつ、左端の第一列のＬＣＯＳ１０を含む空間光変調素子ユニット１００1に対して前述した傾き測定装置５０を用いたθ傾き調整が行われる。このとき、空間光変調素子ユニット１００1が傾いていると、傾き測定装置５０から出射されたレーザー光（調整光）の光路５３と、空間光変調素子ユニット１００1の４５°反射面で反射されて傾き測定装置に戻ってくる反射光の光路５４とが大きくずれる。そこで、この反射光の光路５４が入射するレーザー光の光路５３と一致するようにθ傾きの調整を行える調整用ノブ４０を回して調整する。 FIG. 10 is a diagram illustrating an example of the order of adjustment of the θ inclination. First, among the LCOSs 10 arranged in parallel, the θ inclination using the inclination measuring device 50 described above with respect to the spatial light modulation element unit 100 1 that is closest to the bottom plate 32 in the lowermost row and includes the first column of the leftmost LCOS 10. Adjustments are made. At this time, if the spatial light modulation element unit 100 1 is inclined, it is reflected by the optical path 53 of the laser light (adjustment light) emitted from the inclination measuring device 50 and the 45 ° reflection surface of the spatial light modulation element unit 100 1. Thus, the optical path 54 of the reflected light returning to the tilt measuring device is greatly deviated. Therefore, the adjustment knob 40 that can adjust the θ inclination is adjusted so that the optical path 54 of the reflected light coincides with the optical path 53 of the incident laser light.
続いて、並列配置されたＬＣＯＳ１０のうち下から二番目で、かつ、第一列のＬＣＯＳ１０を含む空間光変調素子ユニット１００2に対して前述した傾き測定装置５０を用いたθ傾き調整が行われる。空間光変調素子ユニット１００2のθ傾き調整が終了すると、続いて、並列配置されたＬＣＯＳ１０のうち下から三番目で、かつ、第一列のＬＣＯＳ１０を含む空間光変調素子ユニット１００3に対して前述した傾き測定装置５０を用いたθ傾き調整が行われる。続いて、並列配置されたＬＣＯＳ１０のうち最上位行で、かつ、第一列のＬＣＯＳ１０を含む空間光変調素子ユニット１００4に対して前述した傾き測定装置５０を用いたθ傾き調整が行われる。 Subsequently, the θ inclination adjustment using the inclination measuring device 50 described above is performed on the spatial light modulation element unit 100 2 that is the second from the bottom among the LCOSs 10 arranged in parallel and includes the LCOS 10 in the first row. . When the θ inclination adjustment of the spatial light modulation element unit 100 2 is finished, the spatial light modulation element unit 100 3 including the LCOS 10 in the third row from the bottom among the LCOSs 10 arranged in parallel and subsequently includes the LCOS 10 in the first row. The θ inclination adjustment using the inclination measuring apparatus 50 described above is performed. Then, at the top row of the LCOS10 arranged in parallel, and, theta tilt adjustment using tilt measuring device 50 described above with respect to the spatial light modulation element unit 100 4 containing LCOS10 first row is performed.
なお、図９とともに説明したように、θ傾き調整毎に調整対象の空間光変調素子ユニットの位置に対応した高さ位置に傾き測定装置が移動される。また、空間光変調素子ユニット１００2〜１００4のθ傾き調整時にはその下の行の空間光変調素子ユニットの副次的基準反射面１１３を傾き調整用基準反射部材２０と同様に扱う。 As described with reference to FIG. 9, the tilt measuring device is moved to a height position corresponding to the position of the spatial light modulation element unit to be adjusted for each θ tilt adjustment. Further, when adjusting the θ inclination of the spatial light modulation element units 100 2 to 100 4 , the secondary reference reflection surface 113 of the spatial light modulation element unit in the lower row is handled in the same manner as the inclination adjustment reference reflection member 20.
このようにして、同じ列に配置された４個の空間光変調素子ユニット１００1〜１００4をひとまとまりとして、下から順にθ傾き調整が行われ、それらのθ傾き調整が終了すると、今度は次の第２列の４個の空間光変調素子ユニット１００5〜１００8に対して、下から順番にθ傾き調整が行われる。以下同様にして、最後の列の４個の空間光変調素子ユニットまで順番にθ傾き調整が行われる。なお、一旦調整が終わった後は迷光防止のためマスク部材を光路にいれて反射を防止する。 In this way, the four spatial light modulation element units 100 1 to 100 4 arranged in the same row are grouped, and θ inclination adjustment is performed in order from the bottom. When these θ inclination adjustments are completed, this time, Θ inclination adjustment is performed in order from the bottom on the four spatial light modulation element units 100 5 to 100 8 in the next second row. In the same manner, θ inclination adjustment is sequentially performed up to the four spatial light modulation element units in the last column. Once the adjustment is completed, the mask member is placed in the optical path to prevent reflection in order to prevent stray light.
このように、本実施形態によれば、基準となる傾き調整用基準反射部材２０に近い側の空間光変調素子ユニットから順次ＬＣＯＳの光軸周りの傾き調整（θ傾き調整）を行うことにより、並列配置された複数のＬＣＯＳのうち周囲を他のＬＣＯＳに囲まれた内側に配置されたＬＣＯＳのθ傾き調整も可能になる。更に非接触で調整を行えるので、着脱等によるずれが無く、安定的な調整を行える。更に、本実施形態によれば、複数の並列配置全体にわたってＬＣＯＳ保持部材は同一形状のものを利用できるので、部品管理が容易になり、またコストダウンも見込める。 As described above, according to the present embodiment, the inclination adjustment (θ inclination adjustment) around the optical axis of the LCOS is sequentially performed from the spatial light modulation element unit closer to the reference adjusting member 20 for inclination adjustment as a reference. Of the plurality of LCOSs arranged in parallel, the inclination of LCOS arranged on the inner side surrounded by other LCOSs can be adjusted. Furthermore, since the adjustment can be performed in a non-contact manner, there is no deviation due to attachment / detachment or the like, and stable adjustment can be performed. Furthermore, according to the present embodiment, the LCOS holding member having the same shape can be used over a plurality of parallel arrangements, so that parts management becomes easy and cost reduction can be expected.
なお、本発明は以上の実施形態に限定されるものではなく、例えば、基準となる角度調整用基準反射部材２５は、筐体３０のベース面３１以外の側面や上面側に設けてもよく、ＬＣＯＳ保持部材の対応する位置に４５°反射面とその反対側に垂直な反射面を設けられれば、同様にθ傾き調整を行う事が可能である。
以上のようにして粗調整を行い、後に光学系４を接続し、合成像を見ながら微調整を行なう事で調整を完了する。
The present invention is not limited to the above embodiment. For example, the reference reflecting member for angle adjustment 25 serving as a reference may be provided on the side surface or the upper surface side other than the base surface 31 of the housing 30. If a 45 ° reflection surface and a reflection surface perpendicular to the opposite side are provided at the corresponding positions of the LCOS holding member, it is possible to similarly adjust the θ inclination.
The coarse adjustment is performed as described above, the optical system 4 is connected later, and fine adjustment is performed while viewing the composite image, thereby completing the adjustment.
１ 光学表示システム
２ サーバー部
３ 傾き調整機構を備えた光学機器
４ 光学系
５ 合成像
１０ 反射型液晶表示素子（ＬＣＯＳ）
２０ 傾き調整用基準反射部材
２５ 角度調整用基準反射部材
３０ 筐体
３１ ベース面
３２ 底板
３３ 上面
３５ フレキシブルシャフト
４０ 調整用ノブ
１００ 空間光変調素子ユニット
１０１ 素子保持部材
１０２ パンベース部材
１０３ 素子保持部材押圧部
１０４ パン調整ねじ
１０５ チルトベース部材
１０６ パンベース部材押圧部
１０７ チルト調整ねじ
１０８ θ傾き調整ねじ
１０９ 基準ピン
１１０ θ傾き調整用押圧部材
１１１ ユニットベースブラケット
１１２ ４５°反射面
１１３ 副次的基準反射面
DESCRIPTION OF SYMBOLS 1 Optical display system 2 Server part 3 Optical apparatus provided with inclination adjustment mechanism 4 Optical system 5 Composite image 10 Reflective liquid crystal display element (LCOS)
20 Reference reflecting member 25 for tilt adjustment Reference reflecting member 30 for angle adjustment Housing 31 Base surface 32 Bottom plate 33 Upper surface 35 Flexible shaft 40 Adjustment knob 100 Spatial light modulation element unit 101 Element holding member 102 Pan base member 103 Element holding member pressing Part 104 Pan adjusting screw 105 Tilt base member 106 Pan base member pressing part 107 Tilt adjusting screw 108 θ tilt adjusting screw 109 Reference pin 110 θ tilt adjusting pressing member 111 Unit base bracket 112 45 ° reflecting surface 113 Secondary reference reflecting surface
Claims (3)
前記空間光変調素子毎にその近傍位置にそれぞれ設けられた調整光反射部材と、
前記空間光変調素子毎にその近傍位置にそれぞれ設けられた副次的反射面と、
前記空間光変調素子毎に設けられた、前記空間光変調素子の光学面に垂直な光軸周りの回転による前記空間光変調素子の傾きを調整する傾き調整機構部とを有し、
前記調整光反射部材は、入射した調整光を前記副次的反射面に反射するように配置され、
前記副次的反射面は、隣接する他の空間光変調素子の前記調整光反射部材で反射されて入射する反射調整光を前記調整光反射部材に反射するように配置される
ことを特徴とする傾き調整機構を備えた光学機器。 A plurality of spatial light modulators arranged in parallel in a row direction and a column direction on a predetermined panel surface ;
And adjusting the light reflecting member provided respectively in the vicinity of a position in front Symbol each spatial light modulator,
A secondary reflecting surface provided for each of the spatial light modulators in the vicinity thereof;
An inclination adjusting mechanism that adjusts the inclination of the spatial light modulator by rotation about the optical axis perpendicular to the optical surface of the spatial light modulator provided for each spatial light modulator;
The adjustment light reflecting member is disposed so as to reflect before Symbol secondary reflecting surface is incident adjusted light,
The secondary reflective surface, Ru is positioned to reflect the reflection adjustment light incident is reflected by the adjustment light reflecting member of an adjacent other of the spatial light modulator to said adjustment light reflecting member
Optical apparatus equipped with the tilt adjusting mechanism, wherein the this.
前記調整光反射部材において前記調整光を反射させることにより、前記空間光変調素子毎における近傍位置それぞれに設けられた副次的反射面に前記調整光を入射するステップと、
前記副次的反射面において前記調整光を反射させることにより、前記調整光反射部材に前記調整光を入射する第１反射ステップと、
前記調整光反射部材において、前記第１反射ステップにおいて入射された前記調整光を反射させる第２反射ステップと、
前記第２反射ステップにより反射された前記調整光に基づいて、前記空間光変調素子の光学面に垂直な光軸周りの回転による前記空間光変調素子の傾きを調整するステップと
を有することを特徴とする傾き調整方法。 A step of making adjustment light from an external light source incident on an adjustment light reflecting member provided at each of adjacent positions in a plurality of spatial light modulation elements arranged in parallel in a row direction and a column direction on a predetermined panel surface;
By reflecting the adjustment light in the adjustment light reflecting member, comprising the steps of entering the adjusted light to the secondary reflecting surface provided near each location in the spatial light modulator each,
By reflecting the adjustment light have you said secondary anti reflecting surface, a first reflecting step of entering the adjusted light to the adjustment light reflecting member,
In the adjusting light reflecting member, and a second reflecting step of reflecting the incident said adjusted light in the first reflecting step,
Characterized by a step of adjusting the inclination of the second on the basis of the adjusted light reflected by the reflecting step, the spatial light modulator according to the rotation around the optical axis perpendicular to the optical surface of the spatial light modulator The tilt adjustment method.
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