JP6161619B2 - 静電容量式変位センサ - Google Patents

静電容量式変位センサ Download PDF

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Publication number
JP6161619B2
JP6161619B2 JP2014539703A JP2014539703A JP6161619B2 JP 6161619 B2 JP6161619 B2 JP 6161619B2 JP 2014539703 A JP2014539703 A JP 2014539703A JP 2014539703 A JP2014539703 A JP 2014539703A JP 6161619 B2 JP6161619 B2 JP 6161619B2
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JP
Japan
Prior art keywords
compensation
electrode
capacitance
electrostatic shield
compensation electrode
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JP2014539703A
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English (en)
Japanese (ja)
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JPWO2014054529A1 (ja
Inventor
桂一 西川
桂一 西川
隆弘 南谷
隆弘 南谷
泰久 廣瀬
泰久 廣瀬
伊藤　一寿
一寿 伊藤
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CKD Corp
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CKD Corp
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Publication of JPWO2014054529A1 publication Critical patent/JPWO2014054529A1/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
JP2014539703A 2012-10-05 2013-09-27 静電容量式変位センサ Active JP6161619B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2012223438 2012-10-05
JP2012223438 2012-10-05
PCT/JP2013/076282 WO2014054529A1 (ja) 2012-10-05 2013-09-27 静電容量式変位センサ

Publications (2)

Publication Number Publication Date
JPWO2014054529A1 JPWO2014054529A1 (ja) 2016-08-25
JP6161619B2 true JP6161619B2 (ja) 2017-07-12

Family

ID=50434857

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014539703A Active JP6161619B2 (ja) 2012-10-05 2013-09-27 静電容量式変位センサ

Country Status (6)

Country Link
JP (1) JP6161619B2 (de)
KR (1) KR102023799B1 (de)
CN (1) CN104620080B (de)
DE (1) DE112013004893B4 (de)
TW (1) TWI599761B (de)
WO (1) WO2014054529A1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6432861B2 (ja) * 2014-10-01 2018-12-05 株式会社クリエイティブテクノロジー 静電容量センサ及び静電チャック
CN105281006A (zh) * 2015-07-02 2016-01-27 南京赛格微电子科技股份有限公司 一种用于控制调谐螺杆长度的可调式高精度限位装置
CN105352422B (zh) * 2015-11-17 2018-09-25 中国航空工业集团公司北京航空精密机械研究所 一种用于电液伺服阀的电容位移传感器
DE102015121047A1 (de) 2015-12-03 2017-06-08 Bürkert Werke GmbH Ventilantrieb mit Stellungssensor
JP6815283B2 (ja) * 2017-06-09 2021-01-20 アズビル株式会社 静電容量型圧力センサ
JP7245025B2 (ja) * 2018-10-30 2023-03-23 川崎重工業株式会社 流体荷役装置用の緊急離脱機構
TWI675202B (zh) 2018-11-30 2019-10-21 財團法人工業技術研究院 流體管路內部靜電量測系統及其方法
US11929744B2 (en) * 2019-02-11 2024-03-12 Texas Instruments Incorporated Differential capacitive sensing system
RU2723971C1 (ru) * 2020-01-28 2020-06-18 Общество С Ограниченной Ответственностью "Конструкторское Бюро "Дорс" (Ооо "Кб "Дорс") Электростатический датчик для контроля перемещаемого тонкого объекта

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6367502A (ja) * 1986-09-10 1988-03-26 Kubota Ltd 静電容量式ストロ−クセンサの温度補正方法
JPH02259417A (ja) * 1989-03-30 1990-10-22 Kubota Ltd 静電容量式のストローク検出装置
CN1229618C (zh) * 2001-12-30 2005-11-30 中国科学院声学研究所 变间距电容式非接触型角位移传感器
US7119552B2 (en) * 2003-01-06 2006-10-10 Nitta Corporation Capacitance type force sensors
CN1170116C (zh) * 2003-01-28 2004-10-06 天津大学 非接触式电容复合电极型位移传感器及测量仪
WO2012090583A1 (ja) * 2010-12-28 2012-07-05 シーケーディ株式会社 静電容量式変位センサ及び静電容量式変位センサを有する比例制御弁

Also Published As

Publication number Publication date
TW201423051A (zh) 2014-06-16
WO2014054529A1 (ja) 2014-04-10
CN104620080B (zh) 2016-08-24
DE112013004893B4 (de) 2022-06-15
CN104620080A (zh) 2015-05-13
TWI599761B (zh) 2017-09-21
KR20150066518A (ko) 2015-06-16
JPWO2014054529A1 (ja) 2016-08-25
KR102023799B1 (ko) 2019-09-20
DE112013004893T5 (de) 2015-06-18

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