JP6140023B2 - Joining method and apparatus for producing a long rod-shaped bonding material from a short rod-shaped workpiece - Google Patents

Description

本発明は短尺棒状の被接合材から長尺棒状の接合材を製作する接合方法及び装置に関する。   The present invention relates to a joining method and apparatus for producing a long rod-shaped bonding material from a short rod-shaped workpiece.

従来、金属製の短い棒やパイプを接合して長尺材を製作するには、電気溶接、摩擦圧接、レーザ溶接または電子ビーム溶接などにより接合部を溶解して接合する技術を使用するのが一般的であった。これらの接合方法では、接合部近傍の結晶が粗大化し、素材の強度が低下するという欠点がある。また、接合部の周囲に溶解して押出された付着物を除去しなければならなかった。   Conventionally, in order to produce long materials by joining short metal bars and pipes, it is necessary to use a technique of melting and joining the joints by electric welding, friction welding, laser welding or electron beam welding. It was general. These joining methods have the disadvantage that the crystal near the joint becomes coarse and the strength of the material is reduced. Moreover, the deposit | attachment melt | dissolved and extruded around the junction part had to be removed.

また、接合部に溶解付着物が出ない長尺材の製作装置としては、粉末原料から細長い長尺材を製作する「長尺材の焼結装置」がある（特許文献１）。   In addition, as an apparatus for producing a long material in which melted deposits do not appear at the joint, there is a “long material sintering apparatus” for producing an elongated long material from a powder raw material (Patent Document 1).

上述の「長尺材の焼結装置」は、通電焼結法を利用して粉末原料の焼結と焼結溶接とを連続的に行うことによって長尺材を製作するものである。   The above-described “long material sintering apparatus” is a device for producing a long material by continuously sintering a powder raw material and sintering welding using an electric current sintering method.

しかしながら、粉末原料を焼結して製作された短い焼結体を順次に焼結接合しながら長尺材を製作するには多くの時間を必要とする。また、粉末を使用する焼結法においては、粉末を焼結型へ充填する際に重力を利用しているため、前記長尺材の焼結装置は必然的に縦長の装置となり、数メートルを越える長尺材を製作する焼結装置の場合には、地下深くピットを掘らなければならないという問題がある。   However, it takes a lot of time to produce a long material while sequentially sintering and joining short sintered bodies produced by sintering powder raw materials. Further, in the sintering method using powder, since the gravity is utilized when filling the powder into the sintering mold, the long material sintering apparatus is inevitably a vertical apparatus, and several meters are used. In the case of a sintering apparatus that produces a long material that exceeds, there is a problem that a pit must be dug deep underground.

ところで、前述の「長尺材の焼結装置」において実施されている粉体同士或いは固体と粉体との接合では、粉体間の接触点は直列的接触と並列的接触が入り乱れて存在しているので放電と通電は分散し易くなり粉体は均質に昇温する。   By the way, in the joining of powders or solids and powders performed in the above-mentioned “long material sintering apparatus”, the contact points between the powders are disturbed by serial contact and parallel contact. Therefore, discharge and energization are easy to disperse, and the temperature of the powder rises uniformly.

しかしながら、固体同士の接触は、微視的には点接触になり易く不均質な放電と通電が起こり均質な接合を得るのが難しい。   However, contact between solids is likely to be a point contact microscopically and it is difficult to obtain a homogeneous joint because non-uniform discharge and energization occur.

特許第１０８５５１５号公報Japanese Patent No. 1085515

本発明は上述の如き問題を解決するために成されたものであり、本発明の課題は、接合部近傍の強度が低下せず、かつ接合部外周に溶融物の付着がない均質な接合が短時間で得られる金属材、半導体又はセラミックス等の長尺材を製作する接合装置及び方法を提供することである。   The present invention has been made in order to solve the above-described problems. The object of the present invention is to provide a homogeneous joint in which the strength in the vicinity of the joint does not decrease and the melt does not adhere to the outer periphery of the joint. It is to provide a joining apparatus and method for producing a long material such as a metal material, a semiconductor or a ceramic obtained in a short time.

上述の課題を解決する手段として請求項１に記載の短尺棒状の被接合材から長尺棒状の接合材を製作する接合方法は、短尺棒状の被接合材から長尺棒状の接合材を製作する接合方法にして、２本の短尺被接合材を水平に対向保持し、該２本の短尺被接合材における対向する接合面を係合させると共に押圧保持し、前記接合面の周囲を非接触に包囲する上下に分割可能な黒鉛製の上部加熱治具と下部加熱治具とを設け、該上下の加熱治具に加熱用電源から通電して前記接合面を間接的に加熱し、該接合面の温度が接合可能な温度に到達したか否かを検出し、前記接合面の温度が接合可能な温度に到達したことを検出したら、前記被接合材に接合用電源から通電して前記接合面において放電をさせ、該接合面を活性化させると共に通電によるジュール熱で該接合面を接合させることを特徴とするものである。   As a means for solving the above-mentioned problem, the joining method for producing a long rod-shaped joining material from the short rod-shaped joined material according to claim 1 produces a long rod-shaped joining material from the short rod-like joined material. In the joining method, the two short workpieces are horizontally held opposite to each other, the opposing joining surfaces of the two short workpieces are engaged and pressed, and the periphery of the joining surfaces is kept non-contact. An upper heating jig and a lower heating jig made of graphite that can be divided into upper and lower parts are provided, and the upper and lower heating jigs are energized from a heating power source to indirectly heat the bonding surface. If the temperature of the bonding surface reaches a temperature that can be joined, and if it is detected that the temperature of the joining surface has reached the temperature that can be joined, the joining material is energized from a joining power source. In order to activate the joint surface and discharge the It is characterized in that bonding the the bonding surface Le heat.

請求項２に記載の短尺棒状の被接合材から長尺棒状の接合材を製作する接合方法は、請求項１に記載の短尺棒状の被接合材から長尺棒状の接合材を製作する接合方法において、前記加熱用電源と接合用電源はそれぞれ互いに独立していて、両電源共に矩形波パルス通電とパルスを重畳した直流通電とを切り替え可能に設けてなることを特徴とするものである。   The joining method for producing a long rod-shaped joining material from the short rod-shaped joining material according to claim 2 is a joining method for producing a long rod-shaped joining material from the short rod-like joining material according to claim 1. The heating power source and the joining power source are independent of each other, and both power sources are provided so as to be switchable between rectangular wave pulse energization and direct current energization with pulses superimposed.

請求項３に記載の短尺棒状の被接合材から長尺棒状の接合材を製作する接合方法は、請求項１に記載の短尺の被接合材から長尺の接合材を製作する接合方法において、前記２本の短尺被接合材の接合面を係合させて押圧保持する圧力が１〜６０ＭＰａであることを特徴とするものである。   The joining method for producing a long rod-shaped joining material from the short rod-shaped material to be joined according to claim 3 is a joining method for producing a long joining material from the short to-be-joined material according to claim 1, The pressure for engaging and holding the joining surfaces of the two short materials to be joined is 1 to 60 MPa.

請求項４に記載の短尺棒状の被接合材から長尺棒状の接合材を製作する接合装置は、短尺棒状の被接合材から長尺棒状の接合材を製作する接合装置にして、Ｚ軸方向の昇降軸を昇降自在の上部電極を設けると共に、該上部電極に離隔して対向する下部固定電極を設け、前記昇降軸を挟んでその両側に左右一対の可動電極を前記Ｚ軸に直交するＸ軸方向に互いに接近離反自在に設け、該左右一対の可動電極のそれぞれに前記被接合材を通電可能に把持する把持手段を設け、前記下部固定電極に前記可動電極に把持された一対の前記被接合材の先端の当接係合部である接合面を非接触で包囲可能な黒鉛製の上部加熱治具と下部加熱治具からなる加熱治具を設け、前記左右一対の可動電極を互いに接近する方向へ移動させ、前記被接合材における対向する接合面を係合させると共に押圧保持し、前記加熱治具に加熱用電源から通電して前記接合面を間接的に加熱し、該接合面の温度が接合可能温度近傍に到達したか否かを検出し、前記接合面の温度が接合可能な所定の温度に到達したことを検出したら、前記被接合材に接合用電源から通電して前記接合面において放電をさせ、該接合面を活性化させると共に通電によるジュール熱で該接合面を接合させることを特徴とするものである。   The joining apparatus for producing a long rod-shaped joining material from the short rod-shaped joined material according to claim 4 is a joining apparatus for producing a long rod-shaped joining material from a short rod-shaped joining material, and the Z-axis direction An upper electrode that can be moved up and down is provided, and a lower fixed electrode that is spaced apart and opposed to the upper electrode is provided, and a pair of left and right movable electrodes on both sides of the lifting shaft is orthogonal to the Z axis. A pair of the left and right movable electrodes is provided so as to be movable toward and away from each other, and gripping means for gripping the material to be joined is provided on each of the left and right movable electrodes. A heating jig composed of a graphite upper heating jig and a lower heating jig that can surround the bonding surface, which is a contact engagement portion at the tip of the bonding material, in a non-contact manner is provided, and the pair of left and right movable electrodes approach each other. In the direction to be Whether or not the joining surface to be engaged is pressed and held, and the heating jig is indirectly energized by energizing the heating jig from a heating power source, and whether or not the temperature of the joining surface has reached the vicinity of the bondable temperature. And detecting that the temperature of the bonding surface has reached a predetermined temperature at which bonding can be performed, energize the material to be bonded from a bonding power source to discharge the bonding surface, and activate the bonding surface. And the joining surface is joined by Joule heat by energization.

請求項５に記載の短尺棒状の被接合材から長尺棒状の接合材を製作する接合装置は、請求項４に記載の短尺棒状の被接合材から長尺棒状の接合材を製作する接合装置において、前記加熱用電源と接合用電源はそれぞれ互いに独立していて、両電源共に矩形波パルス通電とパルスを重畳した直流通電とを切り替え可能に設けてなることを特徴とするものである。   A joining apparatus for producing a long rod-shaped joining material from the short rod-shaped material to be joined according to claim 5 is a joining apparatus for producing a long rod-shaped joining material from the short rod-shaped material to be joined according to claim 4. The heating power source and the joining power source are independent of each other, and both power sources are provided so as to be switchable between rectangular wave pulse energization and direct current energization with pulses superimposed.

請求項６に記載の短尺棒状の被接合材から長尺棒状の接合材を製作する接合装置は、請求項４に記載の短尺棒状の被接合材から長尺棒状の接合材を製作する接合装置において、前記被接合材の先端の当接係合部である接合面を係合させて押圧保持する圧力が１〜６０ＭＰａであることを特徴とするものである。   A joining apparatus for producing a long rod-shaped joining material from the short rod-shaped joined material according to claim 6 is a joining apparatus for producing a long rod-shaped joining material from the short rod-like joined material according to claim 4. The pressure for engaging and holding the joining surface, which is the contact engaging portion at the tip of the material to be joined, is 1 to 60 MPa.

本発明によれば、短尺棒状の被接合材から接合部近傍の強度が低下せず、かつ接合部外周に溶融物の付着がない均質な接合部を有する長尺棒状の接合材を短時間で製作することができる。   According to the present invention, a long bar-shaped bonding material having a uniform bonded portion in which the strength in the vicinity of the bonded portion does not decrease from the short bar-shaped bonded material and the melt does not adhere to the outer periphery of the bonded portion can be obtained in a short time. Can be produced.

また、本発明によれば、焼結法でなければ製作できない高融点の焼結体やセラミックスからなる焼結体、又は成形圧の関係から短尺のものしか作れない半導体の焼結体等を被接合材として長尺棒状の接合材を製作することができる。   In addition, according to the present invention, a high melting point sintered body or a sintered body made of ceramics that can only be manufactured by a sintering method, or a semiconductor sintered body that can only be made short due to the molding pressure, etc. are covered. A long rod-shaped bonding material can be manufactured as the bonding material.

また、本発明によれば、接合面の周囲を非接触に包囲する黒鉛からなる上部加熱治具と下部加熱治具とを設け、この上下の加熱治具に通電して被接合材の接合面を接合可能温度に加熱するようにしたので、接合面を均等な温度に短時間で加熱することができ生産効率をより向上させることができた。   Further, according to the present invention, an upper heating jig and a lower heating jig made of graphite surrounding the joint surface in a non-contact manner are provided, and the upper and lower heating jigs are energized to join the joining surfaces of the materials to be joined. Was heated to a bondable temperature, so that the bonding surfaces could be heated to a uniform temperature in a short time, and production efficiency could be further improved.

本願発明に係る接合装置の全体図。1 is an overall view of a joining device according to the present invention. 図１の接合装置の左右可動電極に被接合材を装着した状態の説明図。Explanatory drawing of the state which attached the to-be-joined material to the right-and-left movable electrode of the joining apparatus of FIG. 図１の接合装置において、上下の加熱治具に上下電極から通電加熱している状態と被接合材の接合部を当接係合した状態の説明図。In the joining apparatus of FIG. 1, explanatory drawing of the state which carried out the electrical heating from the upper and lower electrodes to the upper and lower heating jigs, and the state which contact-engaged the joined part of the to-be-joined material. 図３におけるＡ−Ａ断面図。AA sectional drawing in FIG. 種々の化合物の導電率と温度との関係を示したグラフ。The graph which showed the relationship between the electrical conductivity of various compounds, and temperature.

以下、本発明の実施の形態を図面によって説明する。   Embodiments of the present invention will be described below with reference to the drawings.

図１は、本願発明に係る短尺棒状の被接合材から長尺棒状の接合材を製作する接合装置１の全体の概要図を示してある。   FIG. 1 shows an overall schematic view of a joining apparatus 1 for producing a long bar-shaped bonding material from short bar-shaped materials to be bonded according to the present invention.

総括的に示す接合装置１は、機台３上に一体的に設けた真空チャンバ５内に突出した上部電極７と、この上部電極７に離隔して対向する下部固定電極９とを備えている。   A joining apparatus 1 generally shown includes an upper electrode 7 projecting into a vacuum chamber 5 provided integrally on a machine base 3 and a lower fixed electrode 9 that is spaced apart and opposed to the upper electrode 7. .

前記上部電極７は、前記機台３に設けたガイド機構（図示省略）により、Ｚ軸方向（上下方向）の昇降軸１９に沿って昇降自在に設けてある。この上部電極７の昇降駆動手段としては、例えば、油圧シリンダ１１が設けてあり、この油圧シリンダ１１のピストンロッド１３が前記上部電極７の上部に接続してある。   The upper electrode 7 is provided so as to be movable up and down along a vertical axis 19 in the Z-axis direction (vertical direction) by a guide mechanism (not shown) provided in the machine base 3. As the raising / lowering driving means for the upper electrode 7, for example, a hydraulic cylinder 11 is provided, and a piston rod 13 of the hydraulic cylinder 11 is connected to the upper portion of the upper electrode 7.

したがって、前記油圧シリンダ１１を適宜に制御することにより、前記上部電極７はＺ軸方向の昇降軸１９上を昇降自在である。   Accordingly, by appropriately controlling the hydraulic cylinder 11, the upper electrode 7 can be moved up and down on the lifting shaft 19 in the Z-axis direction.

また、前記上部電極７の下端部には、上部電極７を熱的に保護するカーボンブロックからなる電極保護部材１５が、上部電極７に設けた複数個の固定部材１７を介して着脱可能に装着してある。   An electrode protection member 15 made of a carbon block that thermally protects the upper electrode 7 is detachably attached to the lower end portion of the upper electrode 7 through a plurality of fixing members 17 provided on the upper electrode 7. It is.

前記下部固定電極９は前記機台３に一体的に設けてある。そして、この下部固定電極９の軸心は前記上部電極７の昇降軸１９と同軸に設けてある。   The lower fixed electrode 9 is integrally provided on the machine base 3. The axis of the lower fixed electrode 9 is provided coaxially with the lifting shaft 19 of the upper electrode 7.

図２、図４によく示されている様に、下部固定電極９の上面には、下部固定電極９を熱的に保護するカーボンブロックからなる電極保護部材２１が定位置に装着してある。   As well shown in FIGS. 2 and 4, an electrode protection member 21 made of a carbon block for thermally protecting the lower fixed electrode 9 is mounted on the upper surface of the lower fixed electrode 9 in a fixed position.

また、電極保護部材２１の上面には、短尺棒状の被接合材Ｗ１とＷ２の当接係合部である接合面Ｓを非接触で包囲可能な上部加熱治具２３ａと下部加熱治具２３ｂとに分割可能な加熱治具２３が定位置に載置してある。   Further, on the upper surface of the electrode protection member 21, there are an upper heating jig 23a and a lower heating jig 23b that can surround the joining surface S, which is a contact engagement portion between the short rod-like materials W1 and W2, in a non-contact manner. A heating jig 23 that can be divided into two is placed at a fixed position.

なお、前記加熱治具２３には、前記被接合材Ｗ１とＷ２の当接係合部である接合面Ｓの温度を検出する温度センサ（図示省略）が設けてある。   The heating jig 23 is provided with a temperature sensor (not shown) for detecting the temperature of the joining surface S, which is the abutting engagement portion between the materials to be joined W1 and W2.

前記上下電極７、９の昇降軸１９を挟んでその両側には、左右一対の可動電極２５、２７が設けてあり、かつ、この可動電極２５、２７の軸心２８上を前記Ｚ軸に直交するＸ軸方向に互いに接近離反自在に設けてある。   A pair of left and right movable electrodes 25 and 27 are provided on both sides of the lifting shaft 19 of the upper and lower electrodes 7 and 9, and the axis 28 of the movable electrodes 25 and 27 is orthogonal to the Z axis. Are provided so as to be able to approach and separate from each other in the X-axis direction.

また、この可動電極２５、２７のそれぞれには、可動電極２５、２７をＸ軸方向に駆動する駆動手段動として、前記上部電極７の昇降駆動手段と同様に、左右の可動電極２５、２７のそれぞれに油圧シリンダ２９、３１が設けてある。   Further, each of the movable electrodes 25, 27 has a drive means movement for driving the movable electrodes 25, 27 in the X-axis direction, like the lift drive means of the upper electrode 7. Hydraulic cylinders 29 and 31 are provided respectively.

そして、前記油圧シリンダ２９のピストンロッド３０と、油圧シリンダ３１のピストンロッド３２が、それぞれ前記可動電極２５と可動電極２７の後部に接続してある。   The piston rod 30 of the hydraulic cylinder 29 and the piston rod 32 of the hydraulic cylinder 31 are connected to the rear portions of the movable electrode 25 and the movable electrode 27, respectively.

したがって、前記油圧シリンダ２９、３１を適宜に制御することにより、前記可動電極２５、２７をＸ軸方向の所望の位置に移動位置決めすることができる。
すなわち、前記被接合材Ｗ１とＷ２の当接係合部である接合面Ｓを前記昇降軸１９上に位置決めすることができる。 Therefore, by appropriately controlling the hydraulic cylinders 29 and 31, the movable electrodes 25 and 27 can be moved and positioned at desired positions in the X-axis direction.
That is, it is possible to position the joining surface S, which is a contact engagement portion between the materials to be joined W1 and W2, on the lifting shaft 19.

図２に良く示されている様に、前記左右の可動電極２５、２７の前端部には、それぞれ、前記短尺棒状の被接合材Ｗ１とＷ２を通電可能に把持する把持手段３３が導電性スペーサ３５を介して設けてある。   As shown well in FIG. 2, at the front end portions of the left and right movable electrodes 25 and 27, gripping means 33 for gripping the short rod-shaped materials W1 and W2 so as to be energized are conductive spacers. 35.

前記把持手段３３は左右対称の構成であるので、同一構成要素には同一の符号を付し、図２における左側の把持手段３３について説明する。   Since the gripping means 33 has a symmetrical configuration, the same components are denoted by the same reference numerals, and the left gripping means 33 in FIG. 2 will be described.

把持手段３３には、コレットチャック３７を着脱可能に把持するコレットチャックホルダ３９が設けてある。   The gripping means 33 is provided with a collet chuck holder 39 for detachably gripping the collet chuck 37.

前記コレットチャック３７は、コレットホルダ４１とコレット４３とからなり、コレットホルダ４１には前方に開放するテーパ穴４１ａを有し、このテーパ穴４１ａにコレット４３が係合させてある。   The collet chuck 37 includes a collet holder 41 and a collet 43. The collet holder 41 has a tapered hole 41a that opens forward, and the collet 43 is engaged with the tapered hole 41a.

前記コレット４３の根元には雄ねじ部が形成してあり、この雄ねじ部が前記コレットホルダ４１のテーパ穴４１ａの底部に設けた雌ねじ部に螺合するようになっている。   A male screw portion is formed at the base of the collet 43, and this male screw portion is screwed into a female screw portion provided at the bottom of the tapered hole 41 a of the collet holder 41.

したがって、コレット４３の前端部を作業者が回転させることにより、コレット４３を開放または締め付けることができる。   Therefore, the collet 43 can be opened or tightened by rotating the front end of the collet 43 by the operator.

前記図２の左右の把持手段３３を構成するコレットホルダ４１、コレット４３、コレットチャックホルダ３９および導電性スペーサ３５には、可動電極２５、２７の内部へ連通する同軸の貫通穴が設けてある。したがって、コレットチャック３７を弛めれば、把持されていた被接合材Ｗ１、Ｗ２を可動電極２５、２７の内部へ押し出すことができる。   The collet holder 41, the collet 43, the collet chuck holder 39 and the conductive spacer 35 constituting the left and right gripping means 33 in FIG. 2 are provided with coaxial through holes communicating with the movable electrodes 25 and 27. Therefore, if the collet chuck 37 is loosened, the held workpieces W1 and W2 can be pushed out into the movable electrodes 25 and 27.

なお、図２の可動電極２５、２７内部に挿通する穴は接合装置１の外部へ開放して設けてあり、接合が完了した長尺棒状の接合材を機外へ取り出すことができるようになっている。   The holes inserted into the movable electrodes 25 and 27 in FIG. 2 are opened to the outside of the bonding apparatus 1 so that the long rod-shaped bonding material that has been bonded can be taken out of the machine. ing.

なお、前記コレットチャックホルダ３９およびコレットチャック３７を構成する部品は全て導電性を有し、かつ耐熱性の高い黒鉛からなっている。   The parts constituting the collet chuck holder 39 and the collet chuck 37 are all made of graphite having conductivity and high heat resistance.

したがって、前記コレットチャック３７に把持された短尺棒状の被接合材Ｗ１とＷ２に前記可動電極２５、２７から通電することができる。   Therefore, it is possible to energize the short bar-shaped workpieces W1 and W2 held by the collet chuck 37 from the movable electrodes 25 and 27.

図１を参照するに、前記上部電極７とこの上部電極７に離隔して対向する下部固定電極９には加熱用電源部４５が接続してある。また、この加熱用電源部４５には、矩形波パルス通電又はパルスを重畳した直流を通電するための切り替え手段４７を備えている。   Referring to FIG. 1, a heating power source 45 is connected to the upper electrode 7 and the lower fixed electrode 9 that is opposed to the upper electrode 7 at a distance. The heating power supply unit 45 is provided with switching means 47 for energizing rectangular wave pulse energization or direct current with superimposed pulses.

また、前記可動電極２５、２７には、接合用電源部４９が接続してあり、切り替え手段５１によって矩形波パルス通電又はパルスを重畳した直流を通電することができる   The movable electrodes 25 and 27 are connected to a power supply unit 49 for bonding, and can be energized by a switching means 51 with rectangular wave pulse energization or DC with superimposed pulses.

次に、上記構成の接合装置１において、長さＬ１の棒状の被接合材Ｗ１と、長さＬ１の棒状の被接合材Ｗ２とから長さ「Ｌ１＋Ｌ２」の長尺棒状の接合材を製作する手順を説明する。   Next, in the joining apparatus 1 having the above-described configuration, a long rod-shaped joining material having a length “L1 + L2” is manufactured from the rod-shaped joining material W1 having a length L1 and the rod-like joining material W2 having a length L1. Explain the procedure.

（１）例えば、前記加熱治具２３の幅がｗ[ｍｍ]であるとき、可動電極２５側のコレットチャック３７に被接合材Ｗ１を装着する際には、被接合材Ｗ１の先端が（(ｗ／２)＋５）[ｍｍ]だけ突出した状態になるようにコレットチャック３７に装着固定する。   (1) For example, when the width of the heating jig 23 is w [mm], when the workpiece W1 is mounted on the collet chuck 37 on the movable electrode 25 side, the tip of the workpiece W1 is (( w / 2) +5) Mount and fix to the collet chuck 37 so that it protrudes by [mm].

（２）被接合材Ｗ２も被接合材Ｗ１と同様に可動電極２７側のコレットチャック３７に装着固定する。   (2) The material to be joined W2 is mounted and fixed to the collet chuck 37 on the movable electrode 27 side in the same manner as the material to be joined W1.

（３）下部固定電極９の電極保護部材２１の上面に下部加熱治具２３ｂを定位置に固定する。   (3) The lower heating jig 23b is fixed at a fixed position on the upper surface of the electrode protection member 21 of the lower fixed electrode 9.

（４）次に、加熱治具２３の中央に被接合材Ｗ２の先端（接合面Ｓ）が来るように右側の可動電極２７を前進させてその位置に固定する。   (4) Next, the right movable electrode 27 is advanced and fixed at the position so that the tip (joint surface S) of the material to be joined W2 comes to the center of the heating jig 23.

（５）次に、左側の可動電極２５を前進させて被接合材Ｗ１の先端と被接合材Ｗ２の先端とを接触させる。   (5) Next, the left movable electrode 25 is advanced to bring the tip of the material to be joined W1 into contact with the tip of the material to be joined W2.

（６）接触させた被接合材Ｗ１とＷ２の上に上部加熱治具２３ａを載置する。   (6) The upper heating jig 23a is placed on the materials to be joined W1 and W2.

（７）上部電極７を下降させて上部加熱治具２３ａに接触させる。   (7) Lower the upper electrode 7 and bring it into contact with the upper heating jig 23a.

（８）加熱用電源を入れ、加熱治具２３（２３ａ、２３ｂ）に、先ずパルス電流を流し両者の接触面をクリーンにして、接触面での局部発熱を抑えるようにする。次に直流電流を通電して、加熱治具２３（２３ａ、２３ｂ）を被接合材Ｗ１とＷ２が接合可能な温度まで上昇させる。   (8) Turn on the power supply for heating, and first apply a pulse current to the heating jig 23 (23a, 23b) to clean the contact surface between them to suppress local heat generation at the contact surface. Next, a direct current is applied to raise the heating jig 23 (23a, 23b) to a temperature at which the materials W1 and W2 can be joined.

（９）被接合材Ｗ１とＷ２が接合可能な所定の温度になったことを温度センサが検出したら、左右の可動電極２５、２７から設定された矩形波パルス電流およびパルスを重畳した直流電流を通電する。   (9) When the temperature sensor detects that the joining materials W1 and W2 have reached a predetermined temperature that can be joined, a rectangular wave pulse current set from the left and right movable electrodes 25 and 27 and a direct current superimposed with a pulse are generated. Energize.

（１０）被接合材Ｗ１とＷ２の接合面Ｓの凹凸が潰れ、被接合材Ｗ１とＷ２の軸方向の変位が所定値に達したとき、加熱用電源と接合電源を同時に切断する。ただし、徐冷を要するときには、加熱用電源を制御して被接合材Ｗ１、Ｗ２を徐冷する。   (10) When the unevenness of the joining surface S of the materials to be joined W1 and W2 is crushed and the axial displacement of the materials to be joined W1 and W2 reaches a predetermined value, the heating power source and the joining power source are simultaneously cut. However, when slow cooling is required, the heating power source is controlled to slowly cool the materials W1 and W2.

（１１）接合が完了した接合材は、コレットチャック３７を開放して、右側の可動電極２７側へ押し出し、再度新しい被接合材を左側可動可動電極２５セットし、工程（１）から（１０）を繰り返すことにより、短尺棒状の被接合材から長尺棒状の接合材を製作することができる。   (11) After the joining is completed, the collet chuck 37 is opened and pushed to the right movable electrode 27 side, and a new workpiece to be joined is set again with the left movable electrode 25. From the steps (1) to (10) By repeating the above, it is possible to manufacture a long bar-shaped bonding material from a short bar-shaped material to be bonded.

以下、いくつかの具体的な接合例を説明する。   Hereinafter, some specific joining examples will be described.

実施例１：タングステンパイプの接合   Example 1: Joining of tungsten pipe

（１）外径５φ、内径６φ、長さ２００ｍｍのタングステンパイプを右側の可動電極に取付け、左側の可動電極に外径５φ、内径６φ、長さ１００ｍｍタングステンパイプをセットし、真空雰囲気中で接合を行った。   (1) A tungsten pipe with an outer diameter of 5φ, an inner diameter of 6φ, and a length of 200mm is attached to the right movable electrode. An outer diameter of 5φ, an inner diameter of 6φ, and a length of 100mm tungsten pipe is set on the left movable electrode and bonded in a vacuum atmosphere. Went.

（２）加熱治具２３（２３ａ、２３ｂ）に３,０００Ａの電流を流し、この加熱治具２３を１,５００°Ｃに加熱した。なお、予備実験においてタングステンは１,８００°Ｃ近辺で接合することが確認されている。   (2) A current of 3,000 A was passed through the heating jig 23 (23a, 23b), and the heating jig 23 was heated to 1,500 ° C. In preliminary experiments, it has been confirmed that tungsten is bonded in the vicinity of 1,800 ° C.

（３）加熱治具２３（２３ａ、２３ｂ）が１,５００°Ｃに達したとき、タングステンパイプにパルス幅が１,０００ｍｓのパルス電流２００Ａと、パルス重畳の直流電流５００Ａを同時に流した。   (3) When the heating jig 23 (23a, 23b) reached 1,500 ° C., a pulse current of 200 A having a pulse width of 1,000 ms and a pulse superimposed DC current of 500 A were simultaneously supplied to the tungsten pipe.

（４）タングステンパイプには左右方向に３０ＭＰａの圧力がかかっており、接合部は常に加圧状態になっている。接合部が１,８００°Ｃ前後で０．５ｍｍ変位したとき、加熱用電源および接合用電源を同時に切断した。被接合材への通電時間は約２分であった。   (4) A pressure of 30 MPa is applied to the tungsten pipe in the left-right direction, and the joint is always in a pressurized state. When the joint was displaced 0.5 mm around 1,800 ° C., the heating power source and the joining power source were simultaneously cut. The energization time to the materials to be joined was about 2 minutes.

接合後に接合材を引張り試験をしたところ、接合部以外の場所が２２０[Ｎ／ｍｍ^２]で破断したが接合部には何の変化も見られなかった。 When the joining material was subjected to a tensile test after joining, a place other than the joined part was broken at 220 [N / mm ² ], but no change was seen in the joined part.

実施例２：酸化アルミニュウム（Ａｌ_２Ｏ_３）棒の接合 Example 2: Joining of aluminum oxide (Al ₂ O ₃ ) rods

（１）６φ×１５０ｍｍの酸化アルミニュウムの棒を右側の可動電極に固定し、左側の可動電極には４φ×５０ｍｍの酸化アルミニュウムの棒を固定し、加熱治具２３（２３ａ、２３ｂ）の中央で接触させた。通電する左右のコレットチャックの先端は接合面からそれぞれ１５ｍｍの位置になるように固定した。雰囲気は大気中で、接合面には２０ＭＰａの圧力をかけた。   (1) A 6φ × 150 mm aluminum oxide rod is fixed to the right movable electrode, and a 4φ × 50 mm aluminum oxide rod is fixed to the left movable electrode, and at the center of the heating jig 23 (23a, 23b). Made contact. The tips of the left and right collet chucks to be energized were fixed at 15 mm from the joint surface. The atmosphere was air, and a pressure of 20 MPa was applied to the joint surface.

（２）酸化物は、一般に温度が上昇すると電気抵抗が低下することは、図５のグラフに示すとおりであり、酸化アルミニュウムは、４００°Ｃ位でカーボンと同程度の導電性を持つが、接合温度が高いので加熱治具を１,２００°Ｃまで加熱した。次に、酸化アルミニュウムの棒にパルス電流５０Ａを３０秒間流し、続けてパルス重畳の直流電流１００Ａ流した。約３分後、被接合材が５０μｍ収縮したので接合電源を切断した。加熱用電源はプログラム制御で徐冷させた。   (2) It is as shown in the graph of FIG. 5 that the electrical resistance of the oxide generally decreases as the temperature rises. As shown in the graph of FIG. 5, aluminum oxide has the same conductivity as carbon at about 400 ° C. Since the joining temperature was high, the heating jig was heated to 1,200 ° C. Next, a pulse current 50A was passed through the aluminum oxide rod for 30 seconds, followed by a pulse superimposed DC current 100A. About 3 minutes later, since the material to be joined contracted by 50 μm, the joining power source was cut off. The heating power supply was gradually cooled by program control.

（３）接合体の６φの部分をバイスで固定し、４φ棒の境界から１０ｍｍの個所をハンマーで叩いたところ、酸化アルミニュウム棒は折れたが接合部はしっかりついていた。セラミックスは加工しにくい材料である。特に本件のように細い棒が太い棒の中央、あるいは非対称な部位にあれば加工は不可能に近いが、それが簡単にできればそのメリットは極めて大きいものである。   (3) The 6φ portion of the joined body was fixed with a vise, and a 10 mm portion from the boundary of the 4φ rod was struck with a hammer. As a result, the aluminum oxide rod was broken, but the joined portion was firmly attached. Ceramics are difficult to process. In particular, if the thin bar is in the middle of the thick bar or an asymmetric part as in the present case, the processing is almost impossible, but if it can be done easily, the merit is extremely large.

実施例３：シリコンカーバイト（ＳｉＣ）棒の接合   Example 3: Joining of silicon carbide (SiC) rods

シリコンカーバイト（ＳｉＣ）は半導体なので、常温では電気抵抗が高く大電流は流せない。導電性も１,２００°Ｃを越えないと出てこない。また、接合温度も２,０００°Ｃ以上と高温である。   Since silicon carbide (SiC) is a semiconductor, it has a high electrical resistance at room temperature and cannot carry a large current. The conductivity will not come out unless it exceeds 1,200 ° C. Also, the bonding temperature is as high as 2,000 ° C or higher.

（１）５φ×２００ｍｍのシリコンカーバイト（ＳｉＣ）の棒を右側の可動電極に固定し、５φ×１００ｍｍのシリコンカーバイト（ＳｉＣ）の棒を左側の可動電極に固定し、加熱治具２３（２３ａ、２３ｂ）の中央で先端を接触させた。
通電する左右のコレットチャックの先端は接合面からそれぞれ２０ｍｍの位置になるように設定した。シリコンカーバイト（ＳｉＣ）は酸化を嫌うので、アルゴンガス（Ａｒ）雰囲気中で行った。接触面の圧力は１０ＭＰａである。 (1) A 5φ × 200 mm silicon carbide (SiC) rod is fixed to the right movable electrode, a 5φ × 100 mm silicon carbide (SiC) rod is fixed to the left movable electrode, and the heating jig 23 ( The tip was brought into contact at the center of 23a, 23b).
The tips of the left and right collet chucks to be energized were set to be 20 mm from the joint surface. Since silicon carbide (SiC) hates oxidation, it was performed in an argon gas (Ar) atmosphere. The pressure on the contact surface is 10 MPa.

（２）上下電極から加熱治具２３（２３ａ、２３ｂ）に３,５００Ａの電流を流し、この加熱治具を１,８００°Ｃに加熱した。   (2) A current of 3,500 A was passed from the upper and lower electrodes to the heating jig 23 (23a, 23b), and the heating jig was heated to 1,800 ° C.

（３）加熱治具が１,８００°Ｃに達したときに、左右の可動電極から１００Ａのパルス電流を３０秒間流し、続けてパルス重畳の直流電流１５０Ａを流した。   (3) When the heating jig reached 1,800 ° C., a pulse current of 100 A was passed from the left and right movable electrodes for 30 seconds, and then a pulsed DC current 150 A was passed.

（４）被接合材が０．１ｍｍ収縮したとき、加熱用電源と接合用電源を同時に切断した。   (4) When the material to be joined contracted by 0.1 mm, the heating power source and the joining power source were simultaneously cut.

（５）接合後に接合材の引張り試験をしたところ、２５０[Ｎ／ｍｍ^２]で母材が破断し接合部は母材より強くなっていた。 (5) When the tensile test of the joining material was performed after joining, the base material was broken at 250 [N / mm ² ], and the joint was stronger than the base material.

上述の接合試験結果から、接合時における接触面の最適な圧力範囲について検討した。   From the above-mentioned joining test results, the optimum pressure range of the contact surface during joining was examined.

被接合材の形状を棒状、パイプ状および異経材にして、材質を金属、酸化物、半導体と種々試みた結果、接触圧力が１ＭＰａ以下では接合面に痕が残り好ましくなかった。また、接触圧力が６０ＭＰａ以上では、被接合材が全体的に変形し、しかも接合強度が弱くなり好ましくないと結論した。   As a result of various attempts to make the materials to be joined into rods, pipes, and heterogeneous materials such as metals, oxides, and semiconductors, when the contact pressure was 1 MPa or less, marks remained on the joining surface, which was not preferable. In addition, it was concluded that when the contact pressure is 60 MPa or more, the material to be joined is deformed as a whole, and the joining strength is weakened.

以上の試験データから、接合時に使用する接触圧力は材料の強度、太さおよび接合温度によって異なるが、最適な圧力範囲は１ＭＰａ〜６０ＭＰａの範囲内にあることが判明した。   From the above test data, it was found that the optimum pressure range is in the range of 1 MPa to 60 MPa, although the contact pressure used during joining varies depending on the strength, thickness and joining temperature of the material.

１ 接合装置
３ 機台
５ 真空チャンバ
７ 上部電極
９ 下部固定電極
１１ 油圧シリンダ
１３ ピストンロッド
１５ 電極保護部材
１７ 固定部材
１９ 昇降軸
２１ 電極保護部材
２３ 加熱治具
２３ａ 上部加熱治具
２３ｂ 下部加熱治具
２５、２７ 可動電極
２８ 可動電極の軸心
２９ 油圧シリンダ
３０ ピストンロッド
３１ 油圧シリンダ
３２ ピストンロッド
３３ 把持手段
３５ 導電性スペーサ
３７ コレットチャック
３９ コレットチャックホルダ
４１ コレットホルダ
４１ａ テーパ穴
４３ コレット
４５ 加熱用電源部
４７ 切り替え手段
４９ 接合用電源部
５１ 切り替え手段
Ｓ 接合面
Ｗ１、Ｗ２ 被接合材 DESCRIPTION OF SYMBOLS 1 Joining apparatus 3 Machine stand 5 Vacuum chamber 7 Upper electrode 9 Lower fixed electrode 11 Hydraulic cylinder 13 Piston rod 15 Electrode protection member 17 Fixed member 19 Lifting shaft 21 Electrode protection member 23 Heating jig 23a Upper heating jig 23b Lower heating jig 25, 27 Movable electrode 28 Axis of movable electrode 29 Hydraulic cylinder 30 Piston rod 31 Hydraulic cylinder 32 Piston rod 33 Holding means 35 Conductive spacer 37 Collet chuck 39 Collet chuck holder 41 Collet holder 41a Taper hole 43 Collet 45 Heating power supply unit 47 switching means 49 power supply unit for joining 51 switching means S joining surface W1, W2 material to be joined

Claims (6)

短尺棒状の被接合材から長尺棒状の接合材を製作する接合方法にして、２本の短尺被接合材を水平に対向保持し、該２本の短尺被接合材における対向する接合面を係合させると共に押圧保持し、前記接合面の周囲を非接触に包囲する上下に分割可能な黒鉛製の上部加熱治具と下部加熱治具とを設け、該上下の加熱治具に加熱用電源から通電して前記接合面を間接的に加熱し、該接合面の温度が接合可能な温度に到達したか否かを検出し、前記接合面の温度が接合可能な温度に到達したことを検出したら、前記被接合材に接合用電源から通電して前記接合面において放電をさせ、該接合面を活性化させると共に通電によるジュール熱で該接合面を接合させることを特徴とする短尺棒状の被接合材から長尺棒状の接合材を製作する接合方法。   Using a joining method in which a long rod-shaped bonding material is manufactured from a short rod-shaped workpiece, two short workpieces are horizontally held opposite to each other, and the opposing bonding surfaces of the two short workpieces are engaged. And an upper heating jig and a lower heating jig made of graphite that can be divided into upper and lower parts that surround and hold the joint surface in a non-contact manner, and a heating power source is connected to the upper and lower heating jigs. When the joining surface is heated indirectly by energizing, detecting whether or not the temperature of the joining surface has reached a temperature at which joining is possible, and detecting that the temperature of the joining surface has reached a temperature at which joining is possible A short bar-shaped joint characterized in that the joining material is energized from a joining power source and discharged at the joining surface, the joining surface is activated and the joining surface is joined by Joule heat by energization. A joining method to produce a long bar-shaped joint material from a material. 請求項１に記載の短尺棒状の被接合材から長尺棒状の接合材を製作する接合方法において、前記加熱用電源と接合用電源はそれぞれ互いに独立していて、両電源共に矩形波パルス通電とパルスを重畳した直流通電とを切り替え可能に設けてなることを特徴とする短尺棒状の被接合材から長尺棒状の接合材を製作する接合方法。   In the joining method which manufactures a long rod-shaped joining material from the short rod-shaped to-be-joined material of Claim 1, the said power supply for heating and the power supply for joining are mutually independent, and both power sources are rectangular wave pulse energization, A joining method for producing a long bar-shaped bonding material from a short bar-shaped material to be bonded, characterized in that it can be switched between direct current conduction with pulses superimposed. 請求項１に記載の短尺棒状の被接合材から長尺棒状の接合材を製作する接合方法において、前記２本の短尺被接合材の接合面を係合させて押圧保持する圧力が１〜６０ＭＰａであることを特徴とする短尺棒状の被接合材から長尺棒状の接合材を製作する接合方法。   In the joining method which manufactures a long rod-shaped joining material from the short rod-shaped to-be-joined material of Claim 1, the pressure which engages and hold | maintains the joining surface of the said two short to-be-joined materials is 1-60 MPa. A joining method for producing a long rod-shaped bonding material from a short rod-shaped material to be bonded. 短尺棒状の被接合材から長尺棒状の接合材を製作する接合装置にして、Ｚ軸方向の昇降軸を昇降位置決め自在の上部電極を設けると共に、該上部電極に離隔して対向する下部固定電極を設け、前記昇降軸を挟んでその両側に左右一対の可動電極を前記Ｚ軸に直交するＸ軸方向に互いに接近離反自在に設け、該左右一対の可動電極のそれぞれに前記被接合材を通電可能に把持する把持手段を設け、前記下部固定電極に前記可動電極に把持された一対の前記被接合材の先端の当接係合部である接合面を非接触で包囲可能な黒鉛製の上部加熱治具と下部加熱治具からなる加熱治具を設け、前記左右一対の可動電極を互いに接近する方向へ移動させ、前記被接合材における対向する接合面を係合させると共に押圧保持し、前記加熱治具に加熱用電源から通電して前記接合面を間接的に加熱し、該接合面の温度が接合可能温度近傍に到達したか否かを検出し、前記接合面の温度が接合可能な所定の温度に到達したことを検出したら、前記被接合材に接合用電源から通電して前記接合面において放電をさせ、該接合面を活性化させると共に通電によるジュール熱で該接合面を接合させることを特徴とする短尺棒状の被接合材から長尺棒状の接合材を製作する接合装置。   In a joining apparatus for producing a long rod-shaped bonding material from a short rod-shaped material to be joined, an upper electrode that can be moved up and down in the Z-axis direction is provided, and a lower fixed electrode that is spaced apart and opposed to the upper electrode A pair of left and right movable electrodes are provided on both sides of the lifting shaft so as to be close to and away from each other in the X-axis direction orthogonal to the Z axis, and the joined material is energized to each of the pair of left and right movable electrodes. An upper part made of graphite that can be gripped in a non-contact manner by providing a gripping means that grips the lower fixed electrode so that a joint surface that is an abutting engagement part between the tips of the pair of materials to be joined gripped by the movable electrode can be surrounded by the lower fixed electrode A heating jig comprising a heating jig and a lower heating jig is provided, the pair of left and right movable electrodes are moved in a direction approaching each other, the opposing joining surfaces of the materials to be joined are engaged and pressed and held, Is the heating jig a heating power source? Energized to indirectly heat the bonding surface, detect whether the temperature of the bonding surface has reached the vicinity of the bondable temperature, and that the temperature of the bonding surface has reached a predetermined temperature that can be bonded Once detected, the material to be joined is energized from a joining power source to discharge at the joining surface, the joining surface is activated and the joining surface is joined by Joule heat by energization. A joining device that produces a long bar-shaped joining material from the materials to be joined. 請求項４に記載の短尺棒状の被接合材から長尺棒状の接合材を製作する接合装置において、前記加熱用電源と接合用電源とは互いに独立していて、両電源共に矩形波パルス通電とパルスを重畳した直流通電とを切り替え可能に設けてなることを特徴とする短尺棒状の被接合材から長尺棒状の接合材を製作する接合装置。   In the joining apparatus which manufactures a long rod-shaped joining material from the short rod-shaped to-be-joined material of Claim 4, the said power supply for heating and the power supply for joining are mutually independent, and both power sources are rectangular-wave pulse energization, A joining apparatus for producing a long bar-shaped bonding material from a short bar-shaped material to be bonded, wherein the direct current conduction with a pulse superimposed thereon is switchable. 請求項４に記載の短尺棒状の被接合材から長尺棒状の接合材を製作する接合装置において、前記被接合材の先端の当接係合部である接合面を係合させて押圧保持する圧力が１〜６０ＭＰａであることを特徴とする短尺棒状の被接合材から長尺棒状の接合材を製作する接合装置。 In the joining apparatus which manufactures a long rod-shaped joining material from the short rod-shaped to-be-joined material of Claim 4, the joining surface which is a contact engaging part of the front-end | tip of the said to-be-joined material is engaged, and it press-holds. bonding apparatus for fabricating the bonding material long rod-like from the welded material of short length rod-like you, characterized in that the pressure is 1～60MPa.

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