JP6120527B2 - プラズマ処理方法 - Google Patents
プラズマ処理方法 Download PDFInfo
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- JP6120527B2 JP6120527B2 JP2012243356A JP2012243356A JP6120527B2 JP 6120527 B2 JP6120527 B2 JP 6120527B2 JP 2012243356 A JP2012243356 A JP 2012243356A JP 2012243356 A JP2012243356 A JP 2012243356A JP 6120527 B2 JP6120527 B2 JP 6120527B2
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- 238000009832 plasma treatment Methods 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 4
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- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 241000575946 Ione Species 0.000 description 1
- LTXREWYXXSTFRX-QGZVFWFLSA-N Linagliptin Chemical compound N=1C=2N(C)C(=O)N(CC=3N=C4C=CC=CC4=C(C)N=3)C(=O)C=2N(CC#CC)C=1N1CCC[C@@H](N)C1 LTXREWYXXSTFRX-QGZVFWFLSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
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- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32568—Relative arrangement or disposition of electrodes; moving means
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- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32091—Radio frequency generated discharge the radio frequency energy being capacitively coupled to the plasma
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- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32174—Circuits specially adapted for controlling the RF discharge
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- H—ELECTRICITY
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- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
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- H—ELECTRICITY
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- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
- H01J37/32449—Gas control, e.g. control of the gas flow
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- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32541—Shape
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
- H01L21/31116—Etching inorganic layers by chemical means by dry-etching
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
- H01L21/31116—Etching inorganic layers by chemical means by dry-etching
- H01L21/31122—Etching inorganic layers by chemical means by dry-etching of layers not containing Si, e.g. PZT, Al2O3
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31127—Etching organic layers
- H01L21/31133—Etching organic layers by chemical means
- H01L21/31138—Etching organic layers by chemical means by dry-etching
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H2242/00—Auxiliary systems
- H05H2242/20—Power circuits
- H05H2242/26—Matching networks
Description
[実施例1]
[実施例2]
[実施例3]
[他の実施形態または変形例]
FXi=100*Ion E/R/(Ion E/R+Radical E/R) ・・・・(1)
FXR=100*Radical E/R/(IonE/R+Radical E/R) ・・・・(2)
12 サセプタ(下部電極)
30 (イオン引き込み用)下部高周波電源
52 上部電極
54 外側上部電極
56 内側上部電極
58 誘電体
66 第1上部給電棒
70 給電筒(筒状導電部材)
72 (プラズマ生成用)上部高周波電源
94 第2上部給電棒(中心棒状導電部材)
96 可変コンデンサ
98 主制御部
100 ステップモータ
Claims (4)
- 真空排気可能な処理容器と、
前記処理容器内で基板を載置する下部電極と対向するようにリング状に設置される外側上部電極と、
前記外側上部電極の径方向内側に絶縁して配置される内側上部電極と、
前記外側上部電極および前記内側上部電極と前記下部電極との間の処理空間に処理ガスを供給する処理ガス供給部と、
前記処理ガスのプラズマを生成するのに適した周波数を有する第1の高周波を出力する第1の高周波電源と、
前記外側上部電極に周回方向で連続的に接続される筒状導電部材を有し、前記第1の高周波電源からの前記第1の高周波を前記筒状導電部材を介して前記外側上部電極に印加する第1の給電部と、
前記内側上部電極の中心に接続される棒状の中心導電部材を有し、前記第1の高周波電源からの前記第1の高周波を前記第1の給電部から分岐し前記中心導電部材を介して前記内側上部電極に供給する第2の給電部と、
前記外側上部電極を通じて前記プラズマに供給される電力と前記内側上部電極を通じて前記プラズマに供給される電力との比を調整するために、前記第2の給電部に設けられる可変コンデンサと、
前記可変コンデンサのキャパシタンスを制御変数を通じて可変に制御するための可変コンデンサ制御部と
を有し、前記可変コンデンサが所定の共振領域内のキャパシタンス値をとる場合に、前記第1および第2の給電部と、前記外側上部電極と前記内側上部電極との間に形成される固定コンデンサと、前記可変コンデンサとを含む閉回路が前記第1の高周波に対して実質的に共振状態になるプラズマ処理装置を用いて、前記基板に所望のプラズマ処理を施すプラズマ処理方法であって、
前記可変コンデンサの前記共振領域より低い第1の領域内のキャパシタンス値と前記共振領域より高い第2の領域内のキャパシタンス値とを選択的に用いて前記プラズマ処理を実行し、
前記基板プラズマ処理を実行している間、前記第1の給電部に接続されたVpp検出回路を通じて、前記外側上部電極および前記内側上部電極に供給される前記第1の高周波のピーク対ピーク値(Vpp)をモニタし、
予め記憶している前記可変コンデンサの制御変数と前記ピーク対ピーク値(Vpp)との相関関係を示すデータのテーブルを基に、前記可変コンデンサの前記制御変数が共振領域に入りそうな時にインターロックを掛ける
ことを特徴とするプラズマ処理方法。 - 前記内側上部電極の厚みに応じて、前記可変コンデンサのキャパシタンス値を可変に制御することを特徴とする請求項1に記載のプラズマ処理方法。
- 真空排気可能な処理容器と、
前記処理容器内で基板を載置する下部電極と対向するようにリング状に設置される外側上部電極と、
前記外側上部電極の径方向内側に絶縁して配置される内側上部電極と、
前記外側上部電極および前記内側上部電極と前記下部電極との間の処理空間に処理ガスを供給する処理ガス供給部と、
前記処理ガスのプラズマを生成するのに適した周波数を有する第1の高周波を出力する第1の高周波電源と、
前記外側上部電極に周回方向で連続的に接続される筒状導電部材を有し、前記第1の高周波電源からの前記第1の高周波を前記筒状導電部材を介して前記外側上部電極に印加する第1の給電部と、
前記内側上部電極の中心に接続される棒状の中心導電部材を有し、前記第1の高周波電源からの前記第1の高周波を前記第1の給電部から分岐し前記中心導電部材を介して前記内側上部電極に供給する第2の給電部と、
前記外側上部電極を通じて前記プラズマに供給される電力と、前記内側上部電極を通じて前記プラズマに供給される電力との比を調整するために、前記第2の給電部に設けられる可変コンデンサと、
前記可変コンデンサのキャパシタンスをステップ的に制御するための可変コンデンサ制御部と、
前記外側上部電極および前記内側上部電極と前記下部電極との間の電極間ギャップを可変に調整するための電極間ギャップ調整部と
を有し、前記可変コンデンサが所定の共振領域内のキャパシタンス値をとる場合に、前記第1および第2の給電部と、前記外側上部電極と前記内側上部電極との間に形成される固定コンデンサと、前記可変キャパシタとを含む閉回路が前記第1の高周波に対して実質的に共振状態になるプラズマ処理装置を用いて、前記基板に所望のプラズマ処理を施すプラズマ処理方法であって、
前記プラズマ処理におけるプロセス特性の面内プロファイルを制御するために、前記可変コンデンサ制御部による前記可変コンデンサの前記共振領域より低い第1の領域および前記共振領域より高い第2の領域の両領域にわたるキャパシタンス値の可変の調整と、前記電極間ギャップ調整部による前記電極間ギャップの可変の調整とを併用して行うことを特徴とするプラズマ処理方法。 - 前記基板に対する1回のプラズマ処理の中で、前記第1の領域内のキャパシタンス値と前記第2の領域内のキャパシタンス値とを交互に切り換えることを特徴とする請求項1〜3のいずれか一項に記載のプラズマ処理方法。
Priority Applications (5)
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JP2012243356A JP6120527B2 (ja) | 2012-11-05 | 2012-11-05 | プラズマ処理方法 |
KR1020157008544A KR102036950B1 (ko) | 2012-11-05 | 2013-10-30 | 플라즈마 처리 방법 |
PCT/JP2013/006428 WO2014068974A1 (ja) | 2012-11-05 | 2013-10-30 | プラズマ処理方法 |
US14/433,522 US9502219B2 (en) | 2012-11-05 | 2013-10-30 | Plasma processing method |
TW102139963A TWI595528B (zh) | 2012-11-05 | 2013-11-04 | 電漿處理方法 |
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JP6120527B2 true JP6120527B2 (ja) | 2017-04-26 |
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US (1) | US9502219B2 (ja) |
JP (1) | JP6120527B2 (ja) |
KR (1) | KR102036950B1 (ja) |
TW (1) | TWI595528B (ja) |
WO (1) | WO2014068974A1 (ja) |
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JP5819154B2 (ja) * | 2011-10-06 | 2015-11-18 | 株式会社日立ハイテクノロジーズ | プラズマエッチング装置 |
JP6660936B2 (ja) * | 2014-04-09 | 2020-03-11 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 改良されたフロー均一性/ガスコンダクタンスを備えた可変処理容積に対処するための対称チャンバ本体設計アーキテクチャ |
JP6470313B2 (ja) * | 2014-05-09 | 2019-02-13 | エーファウ・グループ・エー・タルナー・ゲーエムベーハー | 基板をプラズマ処理するための方法及び装置 |
US9697990B2 (en) * | 2015-11-16 | 2017-07-04 | Tokyo Electron Limited | Etching method for a structure pattern layer having a first material and second material |
JP6556046B2 (ja) * | 2015-12-17 | 2019-08-07 | 東京エレクトロン株式会社 | プラズマ処理方法およびプラズマ処理装置 |
JP6784530B2 (ja) * | 2016-03-29 | 2020-11-11 | 東京エレクトロン株式会社 | 被処理体を処理する方法 |
JP6643950B2 (ja) * | 2016-05-23 | 2020-02-12 | 東京エレクトロン株式会社 | プラズマ処理方法 |
KR101842127B1 (ko) | 2016-07-29 | 2018-03-27 | 세메스 주식회사 | 기판 처리 장치 및 기판 처리 방법 |
JP6785171B2 (ja) * | 2017-03-08 | 2020-11-18 | 株式会社日本製鋼所 | 成膜方法および電子装置の製造方法並びにプラズマ原子層成長装置 |
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WO2019212059A1 (ja) | 2018-05-02 | 2019-11-07 | 東京エレクトロン株式会社 | 上部電極およびプラズマ処理装置 |
US10770257B2 (en) * | 2018-07-20 | 2020-09-08 | Asm Ip Holding B.V. | Substrate processing method |
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JP2020066764A (ja) | 2018-10-23 | 2020-04-30 | 東京エレクトロン株式会社 | 成膜装置および成膜方法 |
CN113186529A (zh) * | 2020-01-14 | 2021-07-30 | 深圳清华大学研究院 | 一种高精度低应力光学薄膜沉积方法及装置 |
JP2024049613A (ja) | 2022-09-29 | 2024-04-10 | 東京エレクトロン株式会社 | 基板処理装置 |
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US20060021580A1 (en) * | 2004-06-02 | 2006-02-02 | Tokyo Electron Limited | Plasma processing apparatus and impedance adjustment method |
US8450635B2 (en) * | 2007-03-30 | 2013-05-28 | Lam Research Corporation | Method and apparatus for inducing DC voltage on wafer-facing electrode |
US20170213734A9 (en) * | 2007-03-30 | 2017-07-27 | Alexei Marakhtanov | Multifrequency capacitively coupled plasma etch chamber |
US20100018648A1 (en) * | 2008-07-23 | 2010-01-28 | Applied Marterials, Inc. | Workpiece support for a plasma reactor with controlled apportionment of rf power to a process kit ring |
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