JP6116728B2 - 半導体光検出素子 - Google Patents
半導体光検出素子 Download PDFInfo
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- JP6116728B2 JP6116728B2 JP2016065558A JP2016065558A JP6116728B2 JP 6116728 B2 JP6116728 B2 JP 6116728B2 JP 2016065558 A JP2016065558 A JP 2016065558A JP 2016065558 A JP2016065558 A JP 2016065558A JP 6116728 B2 JP6116728 B2 JP 6116728B2
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- 239000004065 semiconductor Substances 0.000 title claims description 138
- 239000000758 substrate Substances 0.000 claims description 120
- 238000010791 quenching Methods 0.000 claims description 22
- 230000000171 quenching effect Effects 0.000 claims description 22
- 238000003491 array Methods 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims 1
- 239000011521 glass Substances 0.000 description 34
- 238000000034 method Methods 0.000 description 34
- 238000001514 detection method Methods 0.000 description 25
- 238000004519 manufacturing process Methods 0.000 description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 238000005229 chemical vapour deposition Methods 0.000 description 8
- 238000002161 passivation Methods 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 229910052681 coesite Inorganic materials 0.000 description 4
- 229910052906 cristobalite Inorganic materials 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- 235000012239 silicon dioxide Nutrition 0.000 description 4
- 229910052682 stishovite Inorganic materials 0.000 description 4
- 229910052905 tridymite Inorganic materials 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000001312 dry etching Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 239000002585 base Substances 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- 239000003513 alkali Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 229910021478 group 5 element Inorganic materials 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- Semiconductor Integrated Circuits (AREA)
- Light Receiving Elements (AREA)
- Solid State Image Pick-Up Elements (AREA)
Description
Claims (1)
- 一つのフォトダイオードアレイを一つのチャンネルとして複数のチャンネルを有し、各前記チャンネルからの出力信号が信号処理部で処理される半導体光検出素子であって、
前記フォトダイオードアレイは、ガイガーモードで動作すると共に半導体基板内に形成された複数のアバランシェフォトダイオードと、それぞれの前記アバランシェフォトダイオードに対して直列に接続されると共に前記半導体基板の第一主面側に配置されたクエンチング抵抗と、前記クエンチング抵抗が並列に接続されると共に前記半導体基板の前記第一主面側に配置された信号線と、前記信号線に接続されると共に前記半導体基板の前記第一主面側に配置された電極と、を含み、
前記半導体基板には、前記フォトダイオードアレイが複数配置されていると共に、前記フォトダイオードアレイ毎に、前記第一主面側から前記第一主面に対向する第二主面側まで貫通する貫通孔が形成されており、
各前記貫通孔には、対応する前記フォトダイオードアレイに含まれる前記電極と接続される貫通電極が絶縁層を介して配置されている、半導体光検出素子。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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JP2016065558A JP6116728B2 (ja) | 2016-03-29 | 2016-03-29 | 半導体光検出素子 |
Applications Claiming Priority (1)
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JP2016065558A JP6116728B2 (ja) | 2016-03-29 | 2016-03-29 | 半導体光検出素子 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015154154A Division JP5911629B2 (ja) | 2015-08-04 | 2015-08-04 | 光検出装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2016164992A JP2016164992A (ja) | 2016-09-08 |
JP6116728B2 true JP6116728B2 (ja) | 2017-04-19 |
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ID=56876794
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2016065558A Active JP6116728B2 (ja) | 2016-03-29 | 2016-03-29 | 半導体光検出素子 |
Country Status (1)
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JP (1) | JP6116728B2 (ja) |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001318155A (ja) * | 2000-02-28 | 2001-11-16 | Toshiba Corp | 放射線検出器、およびx線ct装置 |
JP2004057507A (ja) * | 2002-07-29 | 2004-02-26 | Toshiba Corp | X線検出装置、貫通電極の製造方法及びx線断層撮影装置 |
JP4440554B2 (ja) * | 2002-09-24 | 2010-03-24 | 浜松ホトニクス株式会社 | 半導体装置 |
JP4720434B2 (ja) * | 2005-10-31 | 2011-07-13 | 日本ビクター株式会社 | 固体撮像装置 |
TWI443817B (zh) * | 2006-07-03 | 2014-07-01 | Hamamatsu Photonics Kk | Photodiode array |
GB2451447B (en) * | 2007-07-30 | 2012-01-11 | Sensl Technologies Ltd | Light sensor |
GB2451678A (en) * | 2007-08-10 | 2009-02-11 | Sensl Technologies Ltd | Silicon photomultiplier circuitry for minimal onset and recovery times |
JP5546806B2 (ja) * | 2009-06-26 | 2014-07-09 | 株式会社東芝 | 核医学イメージング装置 |
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2016
- 2016-03-29 JP JP2016065558A patent/JP6116728B2/ja active Active
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JP2016164992A (ja) | 2016-09-08 |
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