JP6112077B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP6112077B2 JP6112077B2 JP2014137615A JP2014137615A JP6112077B2 JP 6112077 B2 JP6112077 B2 JP 6112077B2 JP 2014137615 A JP2014137615 A JP 2014137615A JP 2014137615 A JP2014137615 A JP 2014137615A JP 6112077 B2 JP6112077 B2 JP 6112077B2
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
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- Computer Hardware Design (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Description
2;半導体チップ
3;熱拡散部材
4;放熱部材
5;冷却器
10;傾斜部材
21;第1半導体チップ
22;第2半導体チップ
25;間隙部
31;第1熱拡散部材
32;第2熱拡散部材
35;間隙部
40;放熱部材の表面
41;第1放熱部材
42;第2放熱部材
49;放熱部材の裏面
51;第1冷却器
52;第2冷却器
53;筐体
54;隔壁
55;流路
56;絶縁部材
61;一端面
62;他端面
63;側面
64;背面
65;先端部
71;シート材
72;積層体
73;薄膜
81;金属部材
82;接続部材
91;はんだ
92;スペーサー
93;封止樹脂
101;第1傾斜部材
102;第2傾斜部材
103;第3傾斜部材
104;第4傾斜部材
181;一端部
182;他端部
183;空間
Claims (9)
- 金属の放熱部材と、
前記放熱部材の表面に接続された第1半導体チップと、
前記第1半導体チップから間隔をあけて前記放熱部材の前記表面に接続された第2半導体チップと、
前記第1半導体チップ、前記第2半導体チップ、および前記第1半導体チップと前記第2半導体チップの間の前記放熱部材の前記表面を封止する封止樹脂と、
前記第1半導体チップに対向する位置で前記放熱部材の裏面に接続され、炭素系材料からなる第1熱拡散部材と、
前記第2半導体チップに対向する位置で前記放熱部材の前記裏面に接続され、炭素系材料からなる第2熱拡散部材と、
前記放熱部材の反対側において前記第1熱拡散部材および前記第2熱拡散部材を冷却する冷却器と、を備え、
前記第1熱拡散部材と前記第2熱拡散部材は、間隔をあけて配置されており、前記第1熱拡散部材と前記第2熱拡散部材の間の前記間隔が前記第1半導体チップと前記第2半導体チップの間の前記間隔に対して前記放熱部材を介して対向する位置になるように、前記第1熱拡散部材と前記第2熱拡散部材が配置されている、半導体装置。 - 前記冷却器が、流れる冷媒を用いて前記第1熱拡散部材および前記第2熱拡散部材を冷却し、
前記第1熱拡散部材の前記冷却器側の端面の位置と前記第2熱拡散部材の前記冷却器側の端面の位置が、前記冷媒の流れ方向において互いに重なり合わない、請求項1に記載の半導体装置。 - 前記第1熱拡散部材および前記第2熱拡散部材は、それぞれ、前記放熱部材に対して傾いた状態で前記放熱部材から前記冷却器に向かって延びている傾斜部材を備える、請求項1又は2に記載の半導体装置。
- 前記第1熱拡散部材が、前記放熱部材に対して傾いた状態で前記放熱部材から前記冷却器に向かって延びている第1傾斜部材と、前記冷却器側ほど前記第1傾斜部材から離れるように前記放熱部材に対して傾いた状態で前記放熱部材から前記冷却器に向かって延びている第2傾斜部材を有している、請求項3に記載の半導体装置。
- 前記第1熱拡散部材および前記第2熱拡散部材と前記冷却器との間に配置された金属部材を更に備える請求項1から4のいずれかに記載の半導体装置。
- 前記放熱部材の側方に配置された金属部材を更に備える請求項1から4のいずれかに記載の半導体装置。
- 前記放熱部材と前記金属部材の間に配置され、前記放熱部材と前記金属部材を接続する接続部材を更に備える請求項6に記載の半導体装置。
- 前記第1熱拡散部材および前記第2熱拡散部材を囲む金属部材を更に備え、
前記金属部材によって囲まれた空間に液体または粉末が充填されている請求項1から4のいずれかに記載の半導体装置。 - 前記冷却器は、流れる冷媒を用いて前記第1熱拡散部材および前記第2熱拡散部材を冷却し、
前記傾斜部材は、前記冷却器の前記冷媒の流れ方向に直交する方向に延びている、請求項3または4に記載の半導体装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014137615A JP6112077B2 (ja) | 2014-07-03 | 2014-07-03 | 半導体装置 |
US14/707,708 US9287193B2 (en) | 2014-07-03 | 2015-05-08 | Semiconductor device |
DE102015109361.8A DE102015109361B4 (de) | 2014-07-03 | 2015-06-12 | Halbleiterbauteil |
CN201510379411.0A CN105280582B (zh) | 2014-07-03 | 2015-07-01 | 半导体装置 |
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JP2014137615A JP6112077B2 (ja) | 2014-07-03 | 2014-07-03 | 半導体装置 |
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JP2016015441A JP2016015441A (ja) | 2016-01-28 |
JP6112077B2 true JP6112077B2 (ja) | 2017-04-12 |
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JP2014137615A Expired - Fee Related JP6112077B2 (ja) | 2014-07-03 | 2014-07-03 | 半導体装置 |
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US (1) | US9287193B2 (ja) |
JP (1) | JP6112077B2 (ja) |
CN (1) | CN105280582B (ja) |
DE (1) | DE102015109361B4 (ja) |
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JP6201966B2 (ja) * | 2014-11-25 | 2017-09-27 | 株式会社デンソー | 電子装置 |
JP6276721B2 (ja) * | 2015-02-06 | 2018-02-07 | 日立オートモティブシステムズ株式会社 | パワーモジュール |
DE112016001711T5 (de) * | 2015-04-13 | 2018-01-04 | Abb Schweiz Ag | Leistungselektronikmodul |
JP6648658B2 (ja) * | 2016-09-15 | 2020-02-14 | トヨタ自動車株式会社 | 電力変換装置 |
KR20180038597A (ko) * | 2016-10-06 | 2018-04-17 | 현대자동차주식회사 | 양면냉각형 파워모듈 및 그 제조방법 |
KR101956996B1 (ko) * | 2016-12-15 | 2019-06-24 | 현대자동차주식회사 | 양면냉각형 파워모듈 |
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JP7180490B2 (ja) * | 2019-03-26 | 2022-11-30 | 株式会社デンソー | 半導体装置およびその製造方法 |
KR102564459B1 (ko) * | 2019-05-09 | 2023-08-07 | 현대자동차주식회사 | 양면 냉각 파워모듈의 스페이서 구조 및 그 제조 방법 |
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JP5397340B2 (ja) | 2010-07-22 | 2014-01-22 | 株式会社デンソー | 半導体冷却装置 |
CN102456203B (zh) * | 2010-10-22 | 2015-10-14 | 阿里巴巴集团控股有限公司 | 确定候选产品链表的方法及相关装置 |
JP5316602B2 (ja) | 2010-12-16 | 2013-10-16 | 株式会社日本自動車部品総合研究所 | 熱拡散部材の接合構造、発熱体の冷却構造、及び熱拡散部材の接合方法 |
JP5529208B2 (ja) * | 2011-08-25 | 2014-06-25 | トヨタ自動車株式会社 | パワーモジュールの構造及び成形方法 |
JP5840933B2 (ja) * | 2011-11-15 | 2016-01-06 | トヨタ自動車株式会社 | 半導体装置 |
JP5851878B2 (ja) * | 2012-02-21 | 2016-02-03 | ルネサスエレクトロニクス株式会社 | 半導体モジュールの製造方法 |
JP2014017412A (ja) * | 2012-07-10 | 2014-01-30 | Nippon Soken Inc | 熱拡散装置 |
US9420731B2 (en) * | 2013-09-18 | 2016-08-16 | Infineon Technologies Austria Ag | Electronic power device and method of fabricating an electronic power device |
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2014
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US9287193B2 (en) | 2016-03-15 |
DE102015109361A1 (de) | 2016-01-07 |
CN105280582A (zh) | 2016-01-27 |
US20160005676A1 (en) | 2016-01-07 |
CN105280582B (zh) | 2018-01-30 |
JP2016015441A (ja) | 2016-01-28 |
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