JP6107212B2 - Article shape measuring method and measuring apparatus - Google Patents
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Description
この発明は物品の形状測定装置に関し、詳しくは断面が円形形状の測定対象物を回転手段に保持し、前記回転手段により測定対象物を回転させながら測定手段を介して測定対象物の真円度やウェービネス(表面のうねり)等の形状データを計測する形状測定装置に関する。 The present invention relates to an article shape measuring apparatus, and more specifically, a measuring object having a circular cross section is held by a rotating means, and the roundness of the measuring object is measured via the measuring means while rotating the measuring object by the rotating means. The present invention relates to a shape measuring apparatus that measures shape data such as sway and waveness (surface swell).
従来より、転がり軸受の構成部品である軌道輪(内輪及び外輪)や転動体などの真円度やウェービネス等、微小な形状変位を計測する形状測定装置としては、スピンドル(回転手段)上に測定対象物を保持して前記スピンドルを回転させ、測定対象物の近傍に配設された測定子(測定手段)によって測定対象物の形状データを計測する装置が知られている。 Conventionally, as a shape measuring device for measuring minute shape displacements such as roundness and waveness of bearing rings (inner and outer rings) and rolling elements, which are components of rolling bearings, it is measured on a spindle (rotating means). 2. Description of the Related Art An apparatus is known that holds an object, rotates the spindle, and measures shape data of the object to be measured by a probe (measuring unit) disposed in the vicinity of the object to be measured.
この分野における先行技術として、特許文献1には被測定物を回転させて表面性状を測定する装置が記載されている。これは、回転駆動系の振動が測定に影響を与えないよう被測定物を惰性で回転させ、測定子を被測定物の外周面に接触させて表面性状を検査するものである。これにより、回転駆動系が発する外乱振動が測定値に及ぼす影響を抑制することができる。 As a prior art in this field, Patent Document 1 describes an apparatus for measuring a surface property by rotating an object to be measured. In this method, the object to be measured is rotated by inertia so that the vibration of the rotational drive system does not affect the measurement, and the surface property is inspected by bringing the probe into contact with the outer peripheral surface of the object to be measured. Thereby, the influence which the disturbance vibration which a rotation drive system emits on a measured value can be suppressed.
また、特許文献2には内外輪、転動体部品の表面形状検査装置が記載されている。この装置は非接触式検出器、増幅回路、増幅後の信号を周波数分析するためのFFTアナライザとからなっており、被測定物を一定速度で回転させ、被測定面の凹凸をレーザドップラー式速度計により非接触で検出し、増幅回路で増幅した形状信号をAD変換後に周波数分析し、真円度やハーモニック解析により部品精度の良否を判別することができる。 Patent Document 2 describes a surface shape inspection device for inner and outer rings and rolling element parts. This device consists of a non-contact detector, an amplifier circuit, and an FFT analyzer for frequency analysis of the amplified signal. The object to be measured is rotated at a constant speed, and the unevenness of the surface to be measured is laser Doppler speed The shape signal detected in a non-contact manner by the meter and amplified by the amplifier circuit is subjected to frequency analysis after AD conversion, and the quality of the parts can be determined by roundness and harmonic analysis.
しかしながら、上記先行技術は被測定物の外形形状を測定する手法であることは本案と同じであるが、被測定物の被測定面に対する測定器の向きに関する記述はない。このため、軸受部品など被測定面の形状が平面ではない被対象物を高精度で測定する際に、測定器の測定方向が被測定面に対して適正な向きに設定されていないと測定子の挙動が不安定となる可能性があり測定値の信頼性が低下するという問題があった。 However, although the above prior art is the same as the present proposal in that it measures the outer shape of the object to be measured, there is no description regarding the orientation of the measuring device with respect to the surface to be measured of the object to be measured. For this reason, when measuring an object whose surface to be measured is not flat, such as bearing parts, with a high accuracy, the measuring element must be set so that the measuring direction of the measuring device is not set to an appropriate direction with respect to the surface to be measured. There is a possibility that the behavior of the measurement becomes unstable and the reliability of the measurement value is lowered.
測定器を被測定面に対して適正な角度で設定するというのは、具合的には測定子のストローク方向が被測定面に対して垂直となる状態のことであるが、被測定物の形状に合わせて測定器の向きを正確に設定するのは熟練を要する。例えば円すいころ軸受に用いる円すいころは、その回転軸に対する母線の角度が多種多様であり、形状の異なる円すいころを測定する毎に測定器の向きを変える手間が生じる。 Setting the measuring device at an appropriate angle with respect to the surface to be measured means that the stroke direction of the probe is perpendicular to the surface to be measured. It takes skill to set the orientation of the measuring device accurately according to the situation. For example, a tapered roller used for a tapered roller bearing has a wide variety of angles of the generatrix with respect to its rotating shaft, and each time a tapered roller having a different shape is measured, it takes time to change the direction of the measuring device.
本発明は前述の課題を鑑みたものであり、主に軸受の外輪、内輪、転動体(玉やころ)の真円度やウェービネスの測定において、異なる形状の被測定物を測定する場合であっても一定の範囲内であれば測定器の向きを変えることなく十分な精度の測定結果を求めることを目的とする。 The present invention has been made in view of the above-mentioned problems, and is mainly used for measuring objects having different shapes in measuring the roundness and the waveness of bearing outer rings, inner rings, and rolling elements (balls and rollers). However, the purpose is to obtain a sufficiently accurate measurement result without changing the orientation of the measuring instrument within a certain range.
本発明は、軸対称の形状を有する被測定物を回転軸まわりに回転させ、前記被測定物の外周面の形状を測定器にて測定する物品の形状測定方法であって、
前記測定器の測定方向が前記被測定面の法線方向と一致するように、前記測定器の向きを設定する際、前記測定器の測定方向が前記被測定面の法線に対して±3°以内に入った場合に、測定可能であることを表示装置に表示させることを特徴とする。
また、本発明は、軸対称の形状を有する被測定物を保持しつつ回転駆動する回転手段と、
前記回転手段により回転している前記被測定物の外周面の形状を測定する測定手段と、
前記測定手段を前記被測定物の回転軸方向及び径方向に移動させる移動手段と、
前記測定手段により検出された多数の測定データを格納する格納手段と、
前記測定データを所望の形式に演算する演算装置と、
表示装置とを備え、
前記被測定物を回転軸まわりに回転させ、前記被測定物の外周面の形状を前記測定手段にて測定する物品の形状測定装置であって、
前記測定手段の測定方向を変化させる測定方向調整機構及び測定方向検出手段とを有し、
前記測定方向検出手段から得られた前記測定方向と前記被測定物における被測定面の法線との成す角度が±3°以内であれば前記表示装置に測定可能である旨の表示を行うことを特徴とする。
The present invention is an article shape measuring method for rotating an object to be measured having an axisymmetric shape around a rotation axis and measuring the shape of the outer peripheral surface of the object to be measured with a measuring instrument,
When setting the orientation of the measuring device so that the measuring direction of the measuring device matches the normal direction of the surface to be measured, the measuring direction of the measuring device is ± 3 with respect to the normal of the surface to be measured. When the temperature falls within the range of ° , the display device displays that the measurement is possible .
Further, the present invention provides a rotating means for rotating and holding an object to be measured having an axisymmetric shape,
Measuring means for measuring the shape of the outer peripheral surface of the object to be measured being rotated by the rotating means;
Moving means for moving the measuring means in the rotational axis direction and radial direction of the object to be measured;
Storage means for storing a large number of measurement data detected by the measurement means;
A computing device for computing the measurement data into a desired format;
A display device,
An article shape measuring apparatus for rotating the object to be measured around a rotation axis and measuring the shape of the outer peripheral surface of the object to be measured by the measuring means,
A measuring direction adjusting mechanism and a measuring direction detecting means for changing the measuring direction of the measuring means;
If the angle between the measurement direction obtained from the measurement direction detection means and the normal line of the surface to be measured of the object to be measured is within ± 3 °, a display indicating that measurement is possible is performed on the display device. It is characterized by.
測定器の測定方向を被測定面の法線に対して±3°以内とすることにより、被測定物を異なる形状のものに交換した場合であっても、測定器の設定を変更することなく十分に正確な真円度やウェービネスの値を得ることが可能となり、被測定物の形状測定を効率良く行うことができる。 By setting the measuring direction of the measuring instrument within ± 3 ° with respect to the normal of the surface to be measured, even if the measured object is replaced with a different shape, the setting of the measuring instrument is not changed. It becomes possible to obtain sufficiently accurate roundness and waving values, and the shape of the object to be measured can be measured efficiently.
以下、本発明に係る測定方法及び測定装置について、図面に基づいて詳細に説明する。 Hereinafter, a measurement method and a measurement apparatus according to the present invention will be described in detail with reference to the drawings.
図1は本発明に係る測定装置の概略図であり、例として球面ころを測定する状態を表している。本図では説明を分かりやすくするため装置の土台部分や図示されている部品を取り付けるための支持部材等は省略している。 FIG. 1 is a schematic view of a measuring apparatus according to the present invention, and shows a state in which a spherical roller is measured as an example. In this figure, for the sake of easy understanding, the base portion of the apparatus, the support member for attaching the illustrated components, and the like are omitted.
図1において測定装置は被測定物17を保持し、回転させるための主軸5と、測定器13を保持する測定部12からなる。主軸5は被測定物17を保持するチャック16と、チャック16を回転自在に保持するスピンドル6と、スピンドル6を回転させる主軸回転用モータ7と、主軸回転用モータ7の角度を検出する角度検出器8からなる。主軸回転用モータ7は制御装置1によって制御され、測定が開始されると一定の速度で回転する。回転速度は任意に設定できる。測定部12は被測定面18に接触して変位を検出する測定子14と、測定子14の動きを電気信号に変換する測定器13と、測定器13の位置を調整する直交ステージ9と、直交ステージ9を含めて測定器12の向きを変化させる測定方向調整機構10とからなる。測定方向調整機構10には測定部12の傾きを電気信号に変換する測定方向検出器11が備えられている。 In FIG. 1, the measuring apparatus includes a main shaft 5 for holding and rotating an object to be measured 17 and a measuring unit 12 for holding a measuring instrument 13. The spindle 5 includes a chuck 16 that holds the object 17 to be measured, a spindle 6 that rotatably holds the chuck 16, a spindle rotating motor 7 that rotates the spindle 6, and an angle detection that detects the angle of the spindle rotating motor 7. It consists of vessel 8. The spindle rotating motor 7 is controlled by the control device 1 and rotates at a constant speed when measurement is started. The rotation speed can be set arbitrarily. The measurement unit 12 is in contact with the measurement surface 18 to detect a displacement, a measurement device 13 that converts the movement of the measurement device 14 into an electrical signal, an orthogonal stage 9 that adjusts the position of the measurement device 13, The measuring direction adjusting mechanism 10 changes the direction of the measuring instrument 12 including the orthogonal stage 9. The measurement direction adjustment mechanism 10 includes a measurement direction detector 11 that converts the inclination of the measurement unit 12 into an electrical signal.
測定器13には差動トランスを用いた測定器、レーザ測定器、光学式あるいは磁力を用いたスケール式測定器などを用いることができる。軸受部品の測定においては被測定面18には汚れや油分の付着が考えられるのでレーザ等の非接触測定よりも接触測定である差動トランスまたはスケール式の測定器が好ましい。主軸5の角度検出器8は一般的なロータリエンコーダを用いることができる。主軸回転用モータ7がサーボモータである場合には通常はモータ内にロータリーエンコーダが内蔵されているのでその出力信号を利用することができる。 The measuring device 13 can be a measuring device using a differential transformer, a laser measuring device, an optical type or a scale type measuring device using magnetic force. In the measurement of bearing parts, since the surface to be measured 18 may be contaminated or oily, a differential transformer or a scale-type measuring instrument that performs contact measurement is preferable to non-contact measurement such as laser. The angle detector 8 of the main shaft 5 can use a general rotary encoder. When the spindle rotating motor 7 is a servo motor, the output signal can be used because a rotary encoder is usually built in the motor.
測定器13から出力された電気信号はアンプで増幅され、演算装置2に送られる。また主軸5の角度検出器8からの信号も同様に演算装置2に送られる。両者はデジタル化処理がを行われた後、それぞれ変位データ、主軸角度データとなって表1に示すように関連付けされた状態で演算装置2に内蔵された格納手段4に格納される。 The electric signal output from the measuring instrument 13 is amplified by an amplifier and sent to the arithmetic unit 2. Similarly, the signal from the angle detector 8 of the main shaft 5 is also sent to the arithmetic unit 2. After both are digitized, both are converted into displacement data and spindle angle data and stored in the storage means 4 built in the arithmetic unit 2 in the state of being associated as shown in Table 1.
制御装置1は一般的にはプログラマブルコントローラが用いられる。演算装置2はパーソナルコンピュータを、またデータの格納手段4にはパーソナルコンピュータの内蔵ハードディスク装置を、モニタ画面3にはCRT表示装置または液晶表示装置を用いることができる。 As the control device 1, a programmable controller is generally used. The computing device 2 can be a personal computer, the data storage means 4 can be a built-in hard disk device of the personal computer, and the monitor screen 3 can be a CRT display device or a liquid crystal display device.
(表1)
(Table 1)
本発明に係る測定装置の動作について、図1の構成図と測定手順を示す図3のフローチャートを用いて説明する。 The operation of the measuring apparatus according to the present invention will be described using the configuration diagram of FIG. 1 and the flowchart of FIG. 3 showing the measurement procedure.
測定作業を開始すると、まず制御装置1は主軸5を原点に復帰させる。原点は任意に設定することもできるが、一般的には主軸5の角度検出器8の角度が0°にある状態である(ステップS1)。 When the measurement work is started, the control device 1 first returns the spindle 5 to the origin. Although the origin can be arbitrarily set, generally, the angle of the angle detector 8 of the spindle 5 is 0 ° (step S1).
原点復帰が完了すると作業者は被測定物17の種類や型番を制御装置1に指示する(ステップS2)。指示の方法については演算装置2に付属のモニタ画面3に表示された型番を選択する方法やバーコードを読み込むなどの方法を用いることができる。被測定物17が定まると制御装置1は演算装置2の格納手段4から被測定物17の形状データを取得し、モニタ画面3に測定器13の向きを設定すべき目標値、すなわち被測定面18の法線19と測定方向検出器11の電気信号から算出した現在の測定器13の測定方向15を表示する(ステップS3)。 When the return to origin is completed, the operator instructs the type and model number of the object 17 to be measured to the control device 1 (step S2). As an instruction method, a method of selecting a model number displayed on the monitor screen 3 attached to the arithmetic device 2 or a method of reading a barcode can be used. When the device under test 17 is determined, the control device 1 acquires the shape data of the device under test 17 from the storage means 4 of the arithmetic unit 2 and sets the orientation of the measuring device 13 on the monitor screen 3, that is, the surface to be measured. The measurement direction 15 of the current measuring instrument 13 calculated from the 18 normal lines 19 and the electrical signal of the measuring direction detector 11 is displayed (step S3).
作業者は被測定物17をチャック16に取り付ける(ステップS4)。この作業はステップS2の前に行っても良い。次に作業者はモニタ画面3に表示されている測定器13の測定方向15、すなわち測定子12のストローク方向が目標値と一致するよう、測定部12の角度を設定する(ステップS5)。その際、測定器13の測定方向15はモニタ画面3に表示された目標値に対して±3°以内に設定する。ここでは作業者から見て、被測定面18の法線19を基準として時計回りを+方向、反時計回りを−方向とする(図2参照)。測定方向検出器11から得られた測定器13の測定方向15が目標値の±3°以内に入ればモニタ画面3に「測定可能」が表示される。 The operator attaches the measurement object 17 to the chuck 16 (step S4). This operation may be performed before step S2. Next, the operator sets the angle of the measurement unit 12 so that the measurement direction 15 of the measuring instrument 13 displayed on the monitor screen 3, that is, the stroke direction of the probe 12 coincides with the target value (step S 5). At that time, the measurement direction 15 of the measuring instrument 13 is set within ± 3 ° with respect to the target value displayed on the monitor screen 3. Here, when viewed from the operator, the clockwise direction is defined as a positive direction and the counterclockwise direction is defined as a negative direction with reference to the normal line 19 of the measured surface 18 (see FIG. 2). If the measuring direction 15 of the measuring instrument 13 obtained from the measuring direction detector 11 is within ± 3 ° of the target value, “measurable” is displayed on the monitor screen 3.
被測定物17の取り付けと測定器13の向きの設定が完了すると、作業者は測定開始ボタンを押す(ステップS6)。測定開始ボタンが押されると制御装置1が主軸5を回転させ(ステップS7)、主軸5の角度が予め設定されたデータ取り込み角度と一致すると演算装置2は測定器13から電気信号を取り込んで変位データに変換し、同時に角度検出器8から取り込んだ電気信号を主軸角度データに変換して表1に示すように両者を関連付けて格納手段4に格納する(ステップS9)。データ取り込み角度は360度を1周当たりの測定点数で割ったものであり、任意に設定可能である。1周当たりの測定点数は多いほど精密な測定が可能となるが測定データの容量が大きくなるので格納手段4の容量を勘案して決めるのが良い。 When the attachment of the measurement object 17 and the setting of the orientation of the measuring instrument 13 are completed, the operator presses the measurement start button (step S6). When the measurement start button is pressed, the control device 1 rotates the main shaft 5 (step S7), and when the angle of the main shaft 5 coincides with a preset data acquisition angle, the arithmetic device 2 takes in an electric signal from the measuring device 13 and is displaced. At the same time, the electrical signal acquired from the angle detector 8 is converted into spindle angle data, and the two are associated with each other and stored in the storage means 4 as shown in Table 1 (step S9). The data capture angle is 360 degrees divided by the number of measurement points per round, and can be set arbitrarily. As the number of measurement points per round increases, more accurate measurement is possible. However, since the capacity of measurement data increases, it is preferable to determine the capacity of the storage means 4 in consideration.
ステップS7を繰り返し、測定器13が予め設定された測定完了位置に到達すると測定完了とし(ステップS10)、制御装置1は主軸5を原点復帰させる(ステップS11)。 Step S7 is repeated, and when the measuring instrument 13 reaches a preset measurement completion position, the measurement is completed (step S10), and the control device 1 returns the spindle 5 to the origin (step S11).
原点復帰が完了すると演算装置2は主軸角度データに基づき、変位データに対して同期加算平均化処理を行う(ステップS12)。加算平均された変位データはFFTによる周波数分析(ステップS13)の後、所望の山数成分のスペクトル演算処理を行い(ステップS14)、うねりの振幅あるいは真円度形状などがモニタ画面3に表示される(ステップS15)。 When the return to origin is completed, the arithmetic unit 2 performs a synchronous addition averaging process on the displacement data based on the spindle angle data (step S12). The averaged displacement data is subjected to frequency analysis by FFT (step S13) and then subjected to spectrum calculation processing of a desired peak component (step S14), and the amplitude of the swell or the roundness shape is displayed on the monitor screen 3. (Step S15).
再測定の必要がなければ作業者が測定器13を退避位置に移動させた後、被測定物17をチャック16から取り外し(ステップS16)、一連の測定作業は完了となる。再測定を行う場合はステップS6から行う。 If re-measurement is not necessary, the operator moves the measuring instrument 13 to the retracted position, and then removes the measurement object 17 from the chuck 16 (step S16), completing a series of measurement operations. When re-measurement is performed, the process starts from step S6.
本願は、ステップS5において被測定面18の法線19に対して±3°以内の範囲に測定器13の測定方向15を設定することを特徴としている。この効果について以下、説明する。 The present application is characterized in that the measuring direction 15 of the measuring instrument 13 is set in a range within ± 3 ° with respect to the normal line 19 of the surface to be measured 18 in step S5. This effect will be described below.
測定器13の測定方向15が被測定面18の法線19の向きと大きく異なっている場合、被測定面18の表面性状を正確に測定できないばかりでなく、測定子14が不安定な挙動となる可能性があり測定結果の信頼性が低下する。図4は円すいころを被測定物17とし、ころ側面(円すい面)を被測定面18とした場合であって、測定器13の測定方向15と被測定面18の法線19との成す角度(以下「接触角」と呼ぶ。図2参照)を0°から5°まで1°刻みで変化させつつ、それぞれの条件において被測定面18の表面性状を繰り返し10回測定した結果である。 When the measuring direction 15 of the measuring instrument 13 is greatly different from the direction of the normal line 19 of the surface to be measured 18, not only the surface property of the surface to be measured 18 cannot be measured accurately but also the measuring element 14 has an unstable behavior. The reliability of the measurement results may be reduced. FIG. 4 shows a case where the tapered roller is the object to be measured 17 and the roller side surface (conical surface) is the surface to be measured 18, and the angle formed by the measuring direction 15 of the measuring instrument 13 and the normal line 19 of the surface to be measured 18. (Hereinafter referred to as “contact angle”, see FIG. 2) is a result of repeatedly measuring the surface properties of the surface 18 to be measured 10 times under each condition while changing the angle from 0 ° to 5 ° in 1 ° increments.
図4中、縦軸のうねり振幅比とは、接触角が0°において測定されたうねり振幅の平均値と、接触角が1°から5°においてそれぞれ測定されたうねり振幅との比率である。接触角が0°における測定結果が被測定面の表面性状に関する真の値であることは明らかであるので、うねり振幅比は1に近いほど精度良く測定できていることを意味している。 In FIG. 4, the swell amplitude ratio on the vertical axis is the ratio between the average value of the swell amplitude measured when the contact angle is 0 ° and the swell amplitude measured when the contact angle is 1 ° to 5 °. Since it is clear that the measurement result when the contact angle is 0 ° is a true value related to the surface property of the surface to be measured, the closer the waviness amplitude ratio is to 1, the more accurate the measurement is.
図4より、接触角が0°〜3°以内であれば、うねり振幅比は+5%〜−10%以内に収まっており、高い精度の測定値が得られることがわかる。測定精度は接触角の絶対値には影響されるが接触角の符号の影響を受けないことは明らかなので、接触角が±3°以内であれば+5%〜−10%のうねり振幅比の範囲に収まることが容易に予想できる。 As can be seen from FIG. 4, when the contact angle is within 0 ° to 3 °, the waviness amplitude ratio is within + 5% to −10%, and a highly accurate measurement value can be obtained. The measurement accuracy is affected by the absolute value of the contact angle, but it is clear that it is not affected by the sign of the contact angle, so if the contact angle is within ± 3 °, the range of the swell amplitude ratio is + 5% to -10%. It can be easily expected to be within the range.
一方、接触角が3°よりも大きくなると、うねり振幅比は−10%を大きく超え、加えて同一の接触角における測定結果のばらつきが大きくなるなど測定精度が悪化していることがわかる。 On the other hand, when the contact angle is larger than 3 °, the waviness amplitude ratio greatly exceeds −10%, and in addition, the measurement accuracy is deteriorated, for example, the variation in the measurement result at the same contact angle becomes large.
以上のように接触角が±3°の範囲内であれば、形状が異なる被測定物に交換した場合でも測定器13の測定方向15を変更することなく十分な精度の測定が可能となり、物品の形状測定を効率良く行うことができる。 As described above, if the contact angle is within a range of ± 3 °, sufficient accuracy can be measured without changing the measurement direction 15 of the measuring instrument 13 even when the measurement object is replaced with a different shape. Can be efficiently measured.
1 制御装置
2 演算装置
3 モニタ画面
4 格納手段
5 主軸
6 スピンドル
7 主軸回転用モータ
8 角度検出器
9 直交ステージ
10 測定方向調整機構
11 測定方向検出器
12 測定部
13 測定器
14 測定子
15 測定方向
16 チャック
17 被測定物
18 被測定面
19 被測定面の法線
DESCRIPTION OF SYMBOLS 1 Control apparatus 2 Arithmetic apparatus 3 Monitor screen 4 Storage means 5 Spindle 6 Spindle 7 Spindle motor 8 Angle detector 9 Orthogonal stage 10 Measuring direction adjustment mechanism 11 Measuring direction detector 12 Measuring unit 13 Measuring instrument 14 Measuring element 15 Measuring direction 16 Chuck 17 Measured Object 18 Measured Surface 19 Normal Line of Measured Surface
Claims (3)
前記測定器の測定方向が前記被測定面の法線方向と一致するように、前記測定器の向きを設定する際、前記測定器の測定方向が前記被測定面の法線に対して±3°以内に入った場合に、測定可能であることを表示装置に表示させることを特徴とする物品の形状測定方法。 A method for measuring the shape of an article, wherein an object to be measured having an axisymmetric shape is rotated around a rotation axis, and the shape of the outer peripheral surface of the object to be measured is measured with a measuring instrument,
When setting the orientation of the measuring device so that the measuring direction of the measuring device matches the normal direction of the surface to be measured, the measuring direction of the measuring device is ± 3 with respect to the normal of the surface to be measured. A method for measuring the shape of an article, which displays on a display device that measurement is possible when the temperature falls within the range of °.
前記回転手段により回転している前記被測定物の外周面の形状を測定する測定手段と、
前記測定手段を前記被測定物の回転軸方向及び径方向に移動させる移動手段と、
前記測定手段により検出された多数の測定データを格納する格納手段と、
前記測定データを所望の形式に演算する演算装置と、
表示装置とを備え、
前記被測定物を回転軸まわりに回転させ、前記被測定物の外周面の形状を前記測定手段にて測定する物品の形状測定装置であって、
前記測定手段の測定方向を変化させる測定方向調整機構及び測定方向検出手段とを有し、
前記測定方向検出手段から得られた前記測定方向と前記被測定物における被測定面の法線との成す角度が±3°以内であれば前記表示装置に測定可能である旨の表示を行うことを特徴とする物品の形状測定装置。 Rotating means for rotationally driving while holding an object to be measured having an axisymmetric shape;
Measuring means for measuring the shape of the outer peripheral surface of the measured object is rotated by said rotation means,
Moving means for moving said measuring means in the rotation axis direction and the radial direction of the object to be measured,
Storage means for storing a number of measurement data detected by said measuring means,
A computing device for computing the measurement data into a desired format;
A display device,
An article shape measuring apparatus for rotating the object to be measured around a rotation axis and measuring the shape of the outer peripheral surface of the object to be measured by the measuring means,
A measuring direction adjusting mechanism and a measuring direction detecting means for changing the measuring direction of the measuring means;
If the angle between the measurement direction obtained from the measurement direction detection means and the normal line of the surface to be measured of the object to be measured is within ± 3 °, a display indicating that measurement is possible is performed on the display device. An apparatus for measuring the shape of articles.
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