JP6103645B2 - Magnetic field characteristic evaluation apparatus and magnetic field characteristic evaluation method - Google Patents
Magnetic field characteristic evaluation apparatus and magnetic field characteristic evaluation method Download PDFInfo
- Publication number
- JP6103645B2 JP6103645B2 JP2013215917A JP2013215917A JP6103645B2 JP 6103645 B2 JP6103645 B2 JP 6103645B2 JP 2013215917 A JP2013215917 A JP 2013215917A JP 2013215917 A JP2013215917 A JP 2013215917A JP 6103645 B2 JP6103645 B2 JP 6103645B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- magnetic field
- magnetic head
- magnetic disk
- coil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Hall/Mr Elements (AREA)
Description
本発明は、磁気抵抗効果(MR)型磁気ヘッド素子の磁界特性を評価する磁界特性評価装置及び磁界特性評価方法に係り、特にMR型磁気ヘッド素子に平行及び垂直磁界を印加した状態おけるMR型磁気ヘッド素子の磁界特性を評価する磁界特性評価装置及び磁界特性評価方法に関する。 The present invention relates to a magnetic field characteristic evaluation apparatus and a magnetic field characteristic evaluation method for evaluating magnetic field characteristics of a magnetoresistive (MR) type magnetic head element, and more particularly to an MR type in a state where a parallel and vertical magnetic field is applied to the MR type magnetic head element. The present invention relates to a magnetic field characteristic evaluation apparatus and a magnetic field characteristic evaluation method for evaluating magnetic field characteristics of a magnetic head element.
一般に磁気ディスク装置に採用されるMR型磁気ヘッド素子は、磁気ディスク上の磁界変化によって電気抵抗値が変化する磁気抵抗効果素子を利用した再生専用の素子であり、磁気ディスクにデータを書き込むための磁気記録(WR)素子と共に磁気ヘッドアーム先端のスライダに支持される複合型磁気ヘッドを構成し、磁気ディスク上に微小間隔で浮上しながら磁気記録(WR)素子及びMR型磁気ヘッド素子が磁気ディスクへのデータ記録再生を行うように構成されている。特に浮上量が極小化した近年の複合型磁気ヘッドにおいては、スライダに発熱体を設けてTPTP(熱的ポールチップ膨脹:Thermal Pole Tip Protrusion)現象を積極的に利用することによって磁気ヘッド素子個々の浮上量ばらつきを調整し、微小な浮上量を精度良く制御する技術が採用されている。 In general, an MR type magnetic head element employed in a magnetic disk apparatus is a read-only element that uses a magnetoresistive effect element whose electrical resistance value changes due to a magnetic field change on the magnetic disk, and is used for writing data on the magnetic disk. A composite magnetic head supported by a slider at the tip of a magnetic head arm is configured together with a magnetic recording (WR) element, and the magnetic recording (WR) element and the MR type magnetic head element are magnetic disks while flying over the magnetic disk at a minute interval. It is configured to perform data recording / reproduction to / from. In particular, in recent composite type magnetic heads having a minimal flying height, a slider is provided with a heating element to positively utilize the TPTP (Thermal Pole Tip Expansion) phenomenon, so that individual magnetic head elements can be used. A technology that adjusts the flying height variation and accurately controls a small flying height is employed.
このMR型磁気ヘッド素子は、磁気ディスク面に対向する下部シールド層と上部シールド層の間に、磁気モーメントを持たない反強磁性材料から成る反強磁性層と、磁化方向が固定された固定層と、絶縁材から成る絶縁層と、磁化方向が外部磁界により変化する自由層とを積層し、ハードバイアス層により挟み込まれるように構成され、下部シールド層側から磁界が印加された場合は図5(a)に示す如く自由層の磁化方向が固定層の磁化方向と平行になり、上部シールド層側から磁界が印加された場合は図5(b)に示す如く自由層の磁化方向が固定層の磁化方向が反平行になる特性があり、この各磁性膜の磁化の角度に依存して絶縁層を通過するトンネル電流が変化すること(抵抗変化)を利用してデータ再生を行うものである。 This MR type magnetic head element includes an antiferromagnetic layer made of an antiferromagnetic material having no magnetic moment between a lower shield layer and an upper shield layer facing the magnetic disk surface, and a fixed layer having a fixed magnetization direction. And an insulating layer made of an insulating material and a free layer whose magnetization direction is changed by an external magnetic field are stacked and sandwiched between hard bias layers. When a magnetic field is applied from the lower shield layer side, FIG. When the magnetization direction of the free layer is parallel to the magnetization direction of the fixed layer as shown in FIG. 5A and a magnetic field is applied from the upper shield layer side, the magnetization direction of the free layer is changed to the fixed layer as shown in FIG. The magnetization direction of each of the magnetic films is antiparallel, and data reproduction is performed by utilizing the fact that the tunnel current passing through the insulating layer changes depending on the magnetization angle of each magnetic film (resistance change). .
このように構成された磁気記録素子(WR素子)と磁気抵抗効果素子(MR素子)と発熱体であるTFC素子を搭載した複合型磁気ヘッドは、製品化の過程として磁気的特性を評価する必要があり、この複合型磁気ヘッドの磁気特性を評価(検査)する技術が記載された文献としては下記の特許文献1が挙げられ、この特許文献1には、特定条件の略垂直磁界を複合型磁気ヘッドに印加して磁気ヘッドの出力電圧を測定し、ノイズストレス磁界を印加した後に、再び特定条件の略垂直磁界を複合型磁気ヘッドに印加して磁気ヘッドの出力電圧を測定し、最後にこれらの出力電圧の差と規格値を比較して良否判定を行うことによって、外部からの影響による磁気出力不安定性不良を検出する技術が記載されている、 A composite magnetic head equipped with a magnetic recording element (WR element), a magnetoresistive effect element (MR element), and a TFC element as a heating element constructed as described above needs to be evaluated for magnetic characteristics as a process of commercialization. As a document describing a technique for evaluating (inspecting) the magnetic characteristics of this composite magnetic head, the following Patent Document 1 is cited. In this Patent Document 1, a substantially vertical magnetic field under a specific condition is combined. Measure the output voltage of the magnetic head by applying it to the magnetic head, apply a noise stress magnetic field, then apply a substantially vertical magnetic field of a specific condition to the composite magnetic head again to measure the output voltage of the magnetic head, and finally A technique for detecting magnetic output instability failure due to external influences by comparing these output voltage differences and standard values to determine pass / fail is described.
前記の特許文献1に記載された技術は、垂直磁界の印加後にノイズストレス磁界を印加し更に略垂直磁界を印加し、出力電圧差と規格値を比較することによって磁気出力不安定性不良を検出することができるものの、近年の複合型磁気ヘッドは、前記した上部及び下部シールド層が磁気ディスク以外からの外部磁界の影響を防止するために設けられているものの、磁気ディスクの大容量化の要望によって複合型磁気ヘッドも極小化しており、垂直磁界の印加による磁気ヘッド特性の評価だけでは製品化したMR型磁気ヘッド素子を搭載した複合型磁気ヘッド特性を正確に評価することが困難であり、このために水平磁界をMR型磁気ヘッド素子に印加することが考えられるが、磁界を印加するための磁気コイルを複合型磁気ヘッド近傍に接近して配置することが困難であった。 The technique described in Patent Document 1 detects a magnetic output instability defect by applying a noise stress magnetic field after applying a vertical magnetic field, further applying a substantially vertical magnetic field, and comparing the output voltage difference with a standard value. However, in recent composite type magnetic heads, the upper and lower shield layers are provided to prevent the influence of external magnetic fields from other than the magnetic disk. The composite magnetic head has also been miniaturized, and it is difficult to accurately evaluate the characteristics of the composite magnetic head equipped with the commercialized MR magnetic head element only by evaluating the magnetic head characteristics by applying a vertical magnetic field. Therefore, it is conceivable to apply a horizontal magnetic field to the MR magnetic head element, but the magnetic coil for applying the magnetic field is close to the vicinity of the composite magnetic head. Placing Te has been difficult.
本発明の目的は、前述の従来技術による課題しようとするものであり、MR型磁気ヘッド素子を搭載する複合型磁気ヘッドの磁気特性を正確に評価することができる磁界特性評価装置及び磁界特性評価方法を提供することである。 SUMMARY OF THE INVENTION An object of the present invention is to solve the above-described conventional technology, and a magnetic field characteristic evaluation apparatus and a magnetic field characteristic evaluation capable of accurately evaluating a magnetic characteristic of a composite magnetic head equipped with an MR magnetic head element. Is to provide a method.
前記の目的を達成するために請求項1記載の発明は、下部シールド層と上部シールド層の間に、磁気モーメントを持たない反強磁性材料から成る反強磁性層と、磁化方向が固定された固定層と、絶縁材から成る絶縁層と、磁化方向が外部磁界により変化する自由層とを積層し、ハードバイアス層により挟み込まれるように構成されたMR型磁気ヘッド素子に対する外部磁界の印加による絶縁層を通過するトンネル電流の抵抗変化を利用して複合型磁気ヘッドの特性を評価する磁界特性評価装置であって、磁気ディスクを回転しながら支持するスピンドルモータと、該磁気ディスク上に浮上状態で支持される磁気ヘッドと、該磁気ディスクの上下面を挟み込むように概略コ字形状に形成されて磁気ヘッドに垂直方向の交流磁界を印加するため垂直コイルと、磁気ディスク上の磁気ヘッドに平行方向の直流磁界を印加するため平行コイルとを備え、前記平行コイルが、磁界を発生するための開口部を有し、一辺にスリット部を設けた概略ロ字形状のコイル本体部と、該コイル本体部の他三辺に巻成された複数の導線とから構成され、該スリット間の間隔に磁気ディスクを挿入配置するように構成されていることを第1の特徴とする。 In order to achieve the above object, according to the first aspect of the present invention, an antiferromagnetic layer made of an antiferromagnetic material having no magnetic moment and a magnetization direction are fixed between the lower shield layer and the upper shield layer. Insulation by applying an external magnetic field to an MR type magnetic head element constructed by laminating a fixed layer, an insulating layer made of an insulating material, and a free layer whose magnetization direction is changed by an external magnetic field and sandwiched by a hard bias layer A magnetic field characteristic evaluation apparatus that evaluates characteristics of a composite magnetic head using a resistance change of a tunnel current passing through a layer, and a spindle motor that supports a magnetic disk while rotating, and a floating state on the magnetic disk A magnetic head to be supported, and a vertical U-shaped magnetic field applied to the magnetic head are formed so as to sandwich the upper and lower surfaces of the magnetic disk. Schematic comprising a coil and a parallel coil for applying a DC magnetic field in a parallel direction to a magnetic head on a magnetic disk, wherein the parallel coil has an opening for generating a magnetic field, and a slit is provided on one side. It is composed of a B-shaped coil main body and a plurality of conductive wires wound around the other three sides of the coil main body, and is configured to insert and arrange a magnetic disk between the slits. First feature.
請求項2記載の発明は、第1の特徴の磁界特性評価装置において、前記磁気ディスクを所定回転数で回転させて磁気ヘッドを磁気ディスク上に位置させ、磁気ディスク上にロードし、前記平行コイルにより磁気ヘッドに所定量の平行直流磁界を印加した状態において、垂直交流磁界変化時のMR型磁気ヘッド素子の絶縁層の抵抗値変化量の推移を測定することを第2の特徴とし、請求項3記載の発明は、前記何れかの特徴の磁界特性評価装置において、前記磁気ヘッドが熱的ポールチップ膨脹現象を利用して磁気ディスクに対する浮上量を制御する発熱体を含み、磁気ヘッドの該発熱体の抵抗値変化量の推移を測定することを第3の特徴とする。 According to a second aspect of the present invention, in the magnetic field characteristic evaluation apparatus according to the first feature, the magnetic disk is rotated at a predetermined rotational speed so that the magnetic head is positioned on the magnetic disk, loaded onto the magnetic disk, and the parallel coils. And measuring a change in the resistance value change amount of the insulating layer of the MR type magnetic head element when the vertical AC magnetic field changes in a state where a predetermined amount of parallel DC magnetic field is applied to the magnetic head. 3. The magnetic field characteristic evaluation apparatus according to any one of the above features, wherein the magnetic head includes a heating element that controls a flying height with respect to the magnetic disk using a thermal pole chip expansion phenomenon, and the heat generation of the magnetic head. The third feature is to measure the transition of the amount of change in resistance value of the body.
請求項4記載の発明は、下部シールド層と上部シールド層の間に、磁気モーメントを持たない反強磁性材料から成る反強磁性層と、磁化方向が固定された固定層と、絶縁材から成る絶縁層と、磁化方向が外部磁界により変化する自由層とを積層し、ハードバイアス層により挟み込まれるように構成されたMR型磁気ヘッド素子に対する外部磁界の印加による絶縁層を通過するトンネル電流の抵抗変化を利用して複合型磁気ヘッドの特性を評価する磁界特性評価装置の磁界特性評価方法であって、磁気ディスクを回転しながら支持するスピンドルモータと、該磁気ディスク上に浮上状態で支持される磁気ヘッドと、該磁気ディスクの上下面を挟み込むように概略コ字形状に形成されて磁気ヘッドに垂直方向の交流磁界を印加するため垂直コイルと、磁気ディスク上の磁気ヘッドに平行方向の直流磁界を印加するために磁界を発生するための開口部を有し、一辺にスリット部を設けた概略ロ字形状のコイル本体部と、該コイル本体部の他三辺に巻成された複数の導線とから構成され、該スリット間の間隔に磁気ディスクを挿入配置するように構成された平行コイル部とを設け、前記磁気ディスクを所定回転数で回転させて磁気ヘッドを磁気ディスク上に位置させ、磁気ディスク上にロードし、前記平行コイルにより磁気ヘッドに所定量の平行直流磁界を印加した状態において、垂直交流磁界変化時のMR型磁気ヘッド素子の絶縁層の抵抗値変化量の推移を測定することを第4の特徴とする。 According to a fourth aspect of the present invention, an antiferromagnetic layer made of an antiferromagnetic material having no magnetic moment, a fixed layer having a fixed magnetization direction, and an insulating material are provided between the lower shield layer and the upper shield layer. The resistance of the tunnel current passing through the insulating layer by applying the external magnetic field to the MR type magnetic head element constructed by laminating the insulating layer and the free layer whose magnetization direction is changed by the external magnetic field and sandwiched by the hard bias layer A magnetic field characteristic evaluation method for a magnetic field characteristic evaluation apparatus that evaluates characteristics of a composite magnetic head using changes, a spindle motor that supports a magnetic disk while rotating, and is supported in a floating state on the magnetic disk A perpendicular coil for applying a vertical alternating magnetic field to the magnetic head, which is formed in a generally U shape so as to sandwich the magnetic head and the upper and lower surfaces of the magnetic disk A coil body having a generally rectangular shape having an opening for generating a magnetic field to apply a DC magnetic field in a parallel direction to a magnetic head on a magnetic disk, and having a slit on one side; and the coil body And a parallel coil section configured to insert and arrange the magnetic disk in the space between the slits, and the magnetic disk is rotated at a predetermined number of rotations. An MR type magnetic head element when the vertical AC magnetic field changes in a state where the magnetic head is rotated and positioned on the magnetic disk, loaded onto the magnetic disk, and a predetermined amount of parallel DC magnetic field is applied to the magnetic head by the parallel coil. It is a fourth feature that the transition of the resistance value change amount of the insulating layer is measured.
請求項5記載の発明は、第4の特徴の磁界特性評価方法において、前記磁気ヘッドが熱的ポールチップ膨脹現象を利用して磁気ディスクに対する浮上量を制御する発熱体を含み、磁気ヘッドの該発熱体の抵抗値変化量の推移を測定することを第5の特徴とする。 According to a fifth aspect of the present invention, in the magnetic field characteristic evaluation method according to the fourth aspect, the magnetic head includes a heating element for controlling a flying height with respect to the magnetic disk by utilizing a thermal pole chip expansion phenomenon, A fifth feature is to measure the transition of the resistance value change amount of the heating element.
本発明による磁界特性評価装置及び磁界特性評価方法は、平行コイルが、一辺に設けたスリット部に磁気ディスクを挿入してMR型磁気ヘッド素子に平行直流磁界を印加した状態で垂直コイルから発生する垂直交流磁界を変化させたときのMR型磁気ヘッド素子の絶縁層の抵抗値変化の推移を測定することによって、MR型磁気ヘッド素子を搭載した複合型磁気ヘッド素子の平行磁界に対する評価を行うことができる。 In the magnetic field characteristic evaluation apparatus and magnetic field characteristic evaluation method according to the present invention, a parallel coil is generated from a vertical coil in a state in which a magnetic disk is inserted into a slit provided on one side and a parallel DC magnetic field is applied to an MR type magnetic head element. To evaluate the parallel magnetic field of a composite magnetic head element mounted with an MR type magnetic head element by measuring the change in the resistance value of the insulating layer of the MR type magnetic head element when the vertical AC magnetic field is changed. Can do.
以下、本発明による磁界特性評価方法を適用した磁界特性評価装置の一実施形態を図面を参照して詳細に説明する。
[課題の説明]
まず、本発明の解決しようとする課題の詳細について説明する。前記したようにMR型磁気ヘッド素子の上部シールド及び下部シールドは、磁気ディスク以外からの外乱磁界が反強磁性層・固定層・絶縁層・自由層に影響することを防止するために設けられているが、複合型磁気ヘッドの極小化に伴って各層が薄く小さくなってきているため、図6(a)に示すMR型磁気ヘッド素子に磁気ディスク以外からの従来では問題とならなかった程度の平行外部磁界が印加された場合、上下シールド層の磁区構造によっては、図6(b)に示す如く、磁化方向が反対方向に容易に反転し、自由層の磁化方向も変化し、安定的に磁気情報を読み込むことが困難になる。
Hereinafter, an embodiment of a magnetic field characteristic evaluation apparatus to which a magnetic field characteristic evaluation method according to the present invention is applied will be described in detail with reference to the drawings.
[Explanation of issue]
First, details of the problem to be solved by the present invention will be described. As described above, the upper shield and the lower shield of the MR type magnetic head element are provided to prevent the disturbance magnetic field from other than the magnetic disk from affecting the antiferromagnetic layer, the fixed layer, the insulating layer, and the free layer. However, since each layer has become thinner and smaller with the miniaturization of the composite magnetic head, the MR type magnetic head element shown in FIG. When a parallel external magnetic field is applied, depending on the magnetic domain structure of the upper and lower shield layers, as shown in FIG. 6B, the magnetization direction can be easily reversed to the opposite direction, and the magnetization direction of the free layer can be changed stably. It becomes difficult to read magnetic information.
[構成]
本実施形態によるMR型磁気ヘッド素子を搭載した複合型磁気ヘッドの磁界特性評価装置の機械的構成は、図1に示す如く、磁気ディスク10を回転しながら支持するスピンドルモータ19と、該磁気ディスク10上に浮上状態で支持される磁気ヘッド11(後述するコイルの陰になり図示されていない)と、該磁気ヘッド11を磁気ディスク10の表面に対して直交するXY方向に移動させるためのXYステージ21と、前記磁気ヘッド11を磁気ディスク10の表面に対して垂直Z方向に移動させるためのZステージ22と、磁気ディスク10の上下面を挟み込むように概略コ字形状に形成されて磁気ヘッド11に垂直方向のAC(交流)磁界を印加するため垂直コイル60と、磁気ディスク10上の磁気ヘッド11に平行方向のDC(直流)磁界を印加するため平行コイル50とを備える。
[Constitution]
As shown in FIG. 1, the mechanical configuration of the magnetic field characteristic evaluation apparatus for a composite magnetic head equipped with the MR magnetic head element according to the present embodiment includes a spindle motor 19 that supports the magnetic disk 10 while rotating, and the magnetic disk. A magnetic head 11 that is supported in a floating state on 10 (not shown in the shadow of a coil to be described later), and an XY for moving the magnetic head 11 in an XY direction perpendicular to the surface of the magnetic disk 10 The magnetic head is formed in a substantially U shape so as to sandwich the stage 21, the Z stage 22 for moving the magnetic head 11 in the vertical Z direction with respect to the surface of the magnetic disk 10, and the upper and lower surfaces of the magnetic disk 10. 11 to apply a vertical AC (alternating current) magnetic field to the vertical coil 60 and a DC (parallel to the magnetic head 11 on the magnetic disk 10). And a parallel coil 50 for applying a fluid) field.
前記垂直コイル60は、図4A(a)の斜視図及び図4Bに示す如く、開口部61bを有する概略ロ字形状のコイル本体部61aと、該コイル本体部61aの開口部61bを設けた以外の3辺に巻成された3つの導線62とから構成され、該コイル本体部61aの開口部61b間にAC(交流)磁界を発生するように構成されている。尚、図4A(b)から(d)は、垂直コイル60の斜視図に対する上面図、左側面図、右側面図である。 As shown in the perspective view of FIG. 4A (a) and FIG. 4B, the vertical coil 60 is provided with a coil body 61a having a substantially square shape having an opening 61b and an opening 61b of the coil main body 61a. And three conducting wires 62 wound around the three sides of the coil main body 61a. An AC (alternating current) magnetic field is generated between the openings 61b of the coil body 61a. 4A to 4D are a top view, a left side view, and a right side view with respect to the perspective view of the vertical coil 60. FIG.
本実施形態の特徴である平行コイル50は、図3A(a)の斜視図及び図3Bに示す如く、開口部51bを有し、一辺にスリット部51cを設けた概略ロ字形状のコイル本体部51aと、該コイル本体部51aの他三辺に巻成された3つの導線52とから構成され、該スリット部51c間の間隔に磁気ディスク10を挿入配置することによって、コイル本体部51aの開口部51b間にDC(直流)磁界を発生し、磁気ヘッド11に印加するように構成されている。尚、図3A(b)から(d)は、平行コイル50の斜視図に対する上面図、左側面図、右側面図である。
The parallel coil 50, which is a feature of the present embodiment, has a substantially square-shaped coil main body having an opening 51b and a slit 51c on one side, as shown in the perspective view of FIG. 3A and FIG. 3B. 51a and three conducting
この水平コイル50は、ケイ素鋼板51のコイル本体部51aの幅を60mm、高さを60mm、厚さを10mmとし、スリット部51cの幅を2.5mm、深さを40mmとし、開口部51b間を12mmとし、コイル本体部51aを覆う導線52の幅を7mm(外径では24mm)とすることによって、最大500[Oe]の水平磁界を発生することができる。なお、水平垂直コイルの材質は前記したものに限られるものではない。
This horizontal coil 50 has a width of 60 mm, a height of 60 mm, a thickness of 10 mm, a width of a slit 51 c of 2.5 mm, a depth of 40 mm, and a width of 40 mm between the openings 51 b of the silicon steel plate 51. Is set to 12 mm, and the width of the
このように構成された磁界特性評価装置の回路的構成は、図2に示す如く、磁気ヘッド11を支持するHGA(Head Gimbal Assembly)治具を搭載したXYXステージ21及びZステージ22を駆動するステージモータドライバ201と、スピンドルモータ19を駆動するためのスピンドルモータドライバ206と、磁気ヘッド11のMR型磁気ヘッド素子の抵抗値を測定するMR抵抗測定器203と、磁気ヘッド11のTFC素子の抵抗値を測定するTFC抵抗測定器204と、磁気ヘッド11のMR型磁気ヘッド素子の抵抗値変化分を測定するDVH測定アンプ202と、前記垂直コイル60の開口部61bにAC磁界を発生させると共に平行コイル50の開口部51bにDC磁界を発生させるように駆動するコイルドライバ205と、前記ステージモータドライバ201とスピンドルモータドライバ206とMR抵抗測定器203とスピンドルモータドライバ206とTFC抵抗測定器204とDVH測定アンプ202とコイルドライバ205とを制御する制御回路200とを備える。
As shown in FIG. 2, the circuit configuration of the magnetic field characteristic evaluation apparatus configured as described above is a stage for driving an XYX stage 21 and a Z stage 22 on which an HGA (Head Gimbal Assembly) jig for supporting the magnetic head 11 is mounted.
[動作]
このように構成された磁界特性評価装置は、制御回路200が、スピンドルモータドライバ206の制御によりスピンドルモータ19を所定回転数で回転させて磁気ヘッド11を磁気ディスク10上に位置させ、ステージモータドライバ201の制御によりXYステージ21及びZステージ22によりXYZ方向に移動させて磁気ヘッド11を磁気ディスク10上にロードし、コイルドライバ205の制御によって平行コイル50により磁気ヘッド11に所定量のDC磁界を印加すると共に垂直コイル60により磁気ヘッド11に垂直AC磁界を変化させながら印加し、この垂直AC磁界変化時のDVH測定アンプ202によるMR型磁気ヘッド素子の抵抗値変化量の推移と、TFC素子の抵抗値変化量の推移とを、例えば、X軸に垂直コイル60によるAC磁界、Y軸にAC磁界に対するMR型磁気ヘッド素子の抵抗値変化量をプロットした図7に示す如く、測定して評価するように動作する。
[Operation]
In the magnetic field characteristic evaluation apparatus configured as described above, the
特に本実施形態においては、コイルドライバ205が平行コイル50の開口部51aに所定の平行DC磁界を印加することによって、MR型磁気ヘッド素子内に影響する平行磁界の影響を増幅又は打ち消すことができ、上下シールド層の磁化方向が反転するか否か等の評価を行うことができる。
Particularly in the present embodiment, the
10 磁気ディスク、11 磁気ヘッド、19 スピンドルモータ、
21 XYステージ、22 Zステージ、50 垂直コイル、
51a コイル本体部、51b 開口部、51c スリット部、52 導線、
60 垂直コイル、61a コイル本体部、61b 開口部、62 導線、
200 制御回路、201 ステージモータドライバ、
202 DVH測定アンプ、203 MR抵抗測定器、
204 TFC抵抗測定器、205 コイルドライバ、
206 スピンドルモータドライバ
10 magnetic disk, 11 magnetic head, 19 spindle motor,
21 XY stage, 22 Z stage, 50 vertical coil,
51a coil body part, 51b opening part, 51c slit part, 52 conducting wire,
60 vertical coil, 61a coil body, 61b opening, 62 conductor,
200 control circuit, 201 stage motor driver,
202 DVH measuring amplifier, 203 MR resistance measuring instrument,
204 TFC resistance measuring device, 205 coil driver,
206 Spindle motor driver
Claims (5)
磁気ディスクを回転しながら支持するスピンドルモータと、該磁気ディスク上に浮上状態で支持される磁気ヘッドと、該磁気ディスクの上下面を挟み込むように概略コ字形状に形成されて磁気ヘッドに垂直方向の交流磁界を印加するため垂直コイルと、磁気ディスク上の磁気ヘッドに平行方向の直流磁界を印加するため平行コイルとを備え、前記平行コイルが、磁界を発生するための開口部を有し、一辺にスリット部を設けた概略ロ字形状のコイル本体部と、該コイル本体部の他三辺に巻成された複数の導線とから構成され、該スリット間の間隔に磁気ディスクを挿入配置するように構成されていることを特徴とする磁界特性評価装置。 Between the lower shield layer and the upper shield layer, an antiferromagnetic layer made of an antiferromagnetic material having no magnetic moment, a fixed layer having a fixed magnetization direction, an insulating layer made of an insulating material, and a magnetization direction being external Combined with a free layer that changes depending on the magnetic field, a composite type magnetic field utilizing the resistance change of the tunnel current passing through the insulating layer due to the application of an external magnetic field to an MR type magnetic head element configured to be sandwiched between hard bias layers A magnetic field characteristic evaluation apparatus for evaluating the characteristics of a head,
A spindle motor that supports the magnetic disk while rotating, a magnetic head supported in a floating state on the magnetic disk, and a substantially U-shape that sandwiches the upper and lower surfaces of the magnetic disk and is perpendicular to the magnetic head A vertical coil for applying the alternating magnetic field and a parallel coil for applying a parallel direct current magnetic field to the magnetic head on the magnetic disk, the parallel coil having an opening for generating a magnetic field, It is composed of a generally rectangular-shaped coil main body provided with a slit on one side and a plurality of conductive wires wound on the other three sides of the coil main body, and a magnetic disk is inserted and disposed in the space between the slits. A magnetic field characteristic evaluation apparatus configured as described above.
磁気ディスクを回転しながら支持するスピンドルモータと、該磁気ディスク上に浮上状態で支持される磁気ヘッドと、該磁気ディスクの上下面を挟み込むように概略コ字形状に形成されて磁気ヘッドに垂直方向の交流磁界を印加するため垂直コイルと、磁気ディスク上の磁気ヘッドに平行方向の直流磁界を印加するために磁界を発生するための開口部を有し、一辺にスリット部を設けた概略ロ字形状のコイル本体部と、該コイル本体部の他三辺に巻成された複数の導線とから構成され、該スリット間の間隔に磁気ディスクを挿入配置するように構成された平行コイル部とを設け、前記磁気ディスクを所定回転数で回転させて磁気ヘッドを磁気ディスク上に位置させ、磁気ディスク上にロードし、前記平行コイルにより磁気ヘッドに所定量の平行直流磁界を印加した状態において、垂直交流磁界変化時のMR型磁気ヘッド素子の絶縁層の抵抗値変化量の推移を測定することを特徴とする磁界特性評価方法。 Between the lower shield layer and the upper shield layer, an antiferromagnetic layer made of an antiferromagnetic material having no magnetic moment, a fixed layer having a fixed magnetization direction, an insulating layer made of an insulating material, and a magnetization direction being external Combined with a free layer that changes depending on the magnetic field, a composite type magnetic field utilizing the resistance change of the tunnel current passing through the insulating layer due to the application of an external magnetic field to an MR type magnetic head element configured to be sandwiched between hard bias layers A magnetic field characteristic evaluation method for a magnetic field characteristic evaluation apparatus for evaluating the characteristics of a head,
A spindle motor that supports the magnetic disk while rotating, a magnetic head supported in a floating state on the magnetic disk, and a substantially U-shape that sandwiches the upper and lower surfaces of the magnetic disk and is perpendicular to the magnetic head A vertical coil for applying an alternating magnetic field, and an opening for generating a magnetic field for applying a direct magnetic field in parallel to a magnetic head on a magnetic disk, with a slit portion on one side. A coil body portion having a shape and a plurality of conductive wires wound around the other three sides of the coil body portion, and a parallel coil portion configured to insert and arrange a magnetic disk between the slits. The magnetic disk is rotated at a predetermined rotational speed, the magnetic head is positioned on the magnetic disk, loaded onto the magnetic disk, and a predetermined amount of flatness is applied to the magnetic head by the parallel coil. In a state of applying a DC magnetic field, the magnetic field characteristic evaluation method characterized by measuring the changes of the resistance change amount in the insulating layer of the MR type magnetic head element during the vertical alternating magnetic field changes.
The magnetic head includes a heating element that controls a flying height with respect to a magnetic disk by utilizing a thermal pole tip expansion phenomenon, and measures a change in a resistance change amount of the heating element of the magnetic head. 4. The magnetic field characteristic evaluation method according to 4.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013215917A JP6103645B2 (en) | 2013-10-17 | 2013-10-17 | Magnetic field characteristic evaluation apparatus and magnetic field characteristic evaluation method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013215917A JP6103645B2 (en) | 2013-10-17 | 2013-10-17 | Magnetic field characteristic evaluation apparatus and magnetic field characteristic evaluation method |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015079551A JP2015079551A (en) | 2015-04-23 |
JP6103645B2 true JP6103645B2 (en) | 2017-03-29 |
Family
ID=53010848
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013215917A Expired - Fee Related JP6103645B2 (en) | 2013-10-17 | 2013-10-17 | Magnetic field characteristic evaluation apparatus and magnetic field characteristic evaluation method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP6103645B2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7265427B2 (en) * | 2019-06-26 | 2023-04-26 | 株式会社東芝 | Magnetic head evaluation method and magnetic head evaluation apparatus |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3717628B2 (en) * | 1997-04-08 | 2005-11-16 | アルプス電気株式会社 | Method and apparatus for evaluating magnetoresistive head |
JP2007294007A (en) * | 2006-04-25 | 2007-11-08 | Hitachi Global Storage Technologies Netherlands Bv | Disk drive device and control method thereof |
JP2008065898A (en) * | 2006-09-07 | 2008-03-21 | Fujitsu Ltd | Method for evaluating magnetoresistance effect type reproduction head |
JP2011222067A (en) * | 2010-04-06 | 2011-11-04 | Hitachi Ltd | Magnetic head slider inspection device |
-
2013
- 2013-10-17 JP JP2013215917A patent/JP6103645B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2015079551A (en) | 2015-04-23 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2008052818A (en) | Inspection method of head element and magnetic recording and reproducing device capable of head evaluation | |
US8542456B2 (en) | Magnetic head having a contact sensor | |
US7683610B2 (en) | Method for inspecting magnetic characteristics of a plurality of thin magnetic heads by means of local application of magnetic field | |
JP6263344B2 (en) | Magnetic sensor device, hard disk head, and magnetic recording / reproducing device | |
JP2013097828A (en) | Magnetic head, magnetic sensor, and magnetic recording and playback device | |
JP2008077751A (en) | Head slider for inspecting magnetic disk, and glide height inspection apparatus | |
JP2008052819A (en) | Magnetic reproducing method which suppresses noise in low temperature | |
US20190034167A1 (en) | Random number generator by superparamagnetism | |
JP2008047241A (en) | Floating height measurement method and magnetic disk drive capable of adjusting floating height | |
US20080291579A1 (en) | Method for testing noise of thin-film magnetic head, and magnetic disk drive apparatus with noise testing function | |
JP2010080000A (en) | Method for manufacturing thin-film magnetic head | |
JP2008112496A (en) | Magnetresistive reproducing magnetic head, and magnetic recording device using the reproducing magnetic head | |
JP6103645B2 (en) | Magnetic field characteristic evaluation apparatus and magnetic field characteristic evaluation method | |
US20170011757A1 (en) | Magnetoresistive Element, Method of Manufacturing Magnetoresistive Element, Magnetic Head, and Magnetic Recording/Reproducing Device | |
US8274761B2 (en) | Magnetic head including a thermal asperity effect element sensor in a stepped-back position from an air bearing surface | |
JP3521755B2 (en) | Method and apparatus for measuring magnetic domain control bias magnetic field of magnetoresistive element | |
JP2016126803A (en) | Magnetic recording and reproducing device | |
JP2006303097A (en) | Magnetoresistance effect element, thin-film magnetic head with it, head-gimbals assembly with thin-film magnetic head, magnetic disk drive with head-gimbals assembly and method for reproducing magnetic recording using thin-film magnetic head | |
US9899046B2 (en) | Method of testing anti-high temperature performance of a magnetic head and apparatus thereof | |
US20080192374A1 (en) | Test method and apparatus for tunneling magnetoresistive element | |
US8254066B2 (en) | Technique for measuring process induced magnetic anisotropy in a magnetoresistive sensor | |
US8063630B2 (en) | Testing method for thin-film magnetic head and jig used therefor | |
JP2007323761A (en) | Thin-film magnetic head equipped with coil insulating layer with regulated coefficient of thermal expansion and young's modulus | |
US20240194223A1 (en) | Magnetic recording device | |
JP4664085B2 (en) | Method for measuring insulation resistance in thin film magnetic head and method for manufacturing thin film magnetic head |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20161002 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20170207 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20170222 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20170223 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6103645 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
LAPS | Cancellation because of no payment of annual fees |