JP6058515B2 - 気相成膜装置 - Google Patents
気相成膜装置 Download PDFInfo
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- JP6058515B2 JP6058515B2 JP2013209507A JP2013209507A JP6058515B2 JP 6058515 B2 JP6058515 B2 JP 6058515B2 JP 2013209507 A JP2013209507 A JP 2013209507A JP 2013209507 A JP2013209507 A JP 2013209507A JP 6058515 B2 JP6058515 B2 JP 6058515B2
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- 238000007740 vapor deposition Methods 0.000 title claims description 8
- 230000015572 biosynthetic process Effects 0.000 claims description 42
- 239000000463 material Substances 0.000 claims description 42
- 239000000758 substrate Substances 0.000 claims description 41
- 239000004065 semiconductor Substances 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 11
- 150000001875 compounds Chemical class 0.000 claims description 9
- 150000004767 nitrides Chemical class 0.000 claims description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 4
- 229910052799 carbon Inorganic materials 0.000 claims description 4
- 229910052750 molybdenum Inorganic materials 0.000 claims description 4
- 239000011733 molybdenum Substances 0.000 claims description 4
- 229910052582 BN Inorganic materials 0.000 claims description 3
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 3
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 3
- 230000007246 mechanism Effects 0.000 claims description 3
- 239000007769 metal material Substances 0.000 claims description 3
- NFFIWVVINABMKP-UHFFFAOYSA-N methylidynetantalum Chemical compound [Ta]#C NFFIWVVINABMKP-UHFFFAOYSA-N 0.000 claims description 3
- 239000010453 quartz Substances 0.000 claims description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 3
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 229910003468 tantalcarbide Inorganic materials 0.000 claims description 3
- 238000005229 chemical vapour deposition Methods 0.000 claims description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 2
- 150000001247 metal acetylides Chemical class 0.000 claims description 2
- 239000012528 membrane Substances 0.000 claims 1
- 125000002524 organometallic group Chemical group 0.000 claims 1
- 239000010408 film Substances 0.000 description 100
- 238000000151 deposition Methods 0.000 description 90
- 230000008021 deposition Effects 0.000 description 89
- 239000007789 gas Substances 0.000 description 64
- 239000012159 carrier gas Substances 0.000 description 47
- 230000000694 effects Effects 0.000 description 22
- 239000002994 raw material Substances 0.000 description 15
- 238000009792 diffusion process Methods 0.000 description 14
- 230000008901 benefit Effects 0.000 description 9
- 238000009826 distribution Methods 0.000 description 9
- 238000007796 conventional method Methods 0.000 description 7
- 238000011144 upstream manufacturing Methods 0.000 description 7
- 230000008859 change Effects 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 5
- 229910002601 GaN Inorganic materials 0.000 description 4
- 239000000470 constituent Substances 0.000 description 4
- 230000003247 decreasing effect Effects 0.000 description 4
- 238000013461 design Methods 0.000 description 4
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 239000012071 phase Substances 0.000 description 3
- 238000000103 photoluminescence spectrum Methods 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 230000002123 temporal effect Effects 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 239000012808 vapor phase Substances 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 239000012050 conventional carrier Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 229910021478 group 5 element Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 1
- 239000004570 mortar (masonry) Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 125000004433 nitrogen atom Chemical group N* 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 239000013049 sediment Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45502—Flow conditions in reaction chamber
- C23C16/45508—Radial flow
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/301—AIII BV compounds, where A is Al, Ga, In or Tl and B is N, P, As, Sb or Bi
- C23C16/303—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
- C23C16/4584—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally the substrate being rotated
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical Vapour Deposition (AREA)
Description
次に、本発明を窒化ガリウム膜の成膜に適用し、従来方法と比較した例を紹介する。まず比較のために行った従来方法の例に関して説明する。従来例では図10に示された断面構造を有するリアクタを用いた。この装置において膜質、原料利用効率、キャリアガス消費量、及び流速の観点から条件出しを行ったところ、最適な成膜圧力は25kPa、フローチャネル高さは14mm、キャリアガス流量は120SLMであった。一方本発明の構造としては、対向面形成部材として、図1及び図2に示すような矩形の断面形状を持ち、12分割のフローチャネルとなる対向面を採用した。凹部34、凸部36のいずれも開き角は15度で、これらは30度の周期性を有し、従って12回対称の形状である。凹部34とサセプタ20との距離は従来構造での最適値である14mmに一致させ、凸部36とのそれは4mmとした。対向面形成部材の材質にはカーボンを用いた。
次に、実施例1にある従来型と本発明型の装置を用い、InGaN/GaNの多重量子井戸を作製し、フォトルミネッセンスのスペクトルにより評価した。それぞれの成膜条件を以下の表2に記した。
(1)前記実施例で示した形状、寸法は一例であり、同様の効果を奏する範囲内で適宜設計変更可能である。
(2)前記実施例で示した対向面形成部材30やインジェクタ部40を構成する材料も一例であり、同様に効果を奏する範囲内で適宜変更可能である。
(3)前記実施例では、インジェクタ部40を用いることとしたが、これも一例であり、インジェクタは必要に応じて設けるようにすればよい。また、インジェクタ部40の構造も一例であり、必要に応じて適宜設計変更可能である。
(4)前記実施例では、基板表面が下を向くフェイスダウンのタイプとしたが、基板表面が上を向くフェイスアップにおいても適用可能である。
20:サセプタ
22:基板保持部材
24:均熱板
26:受部
30:対向面形成部材
30A:対向面
32:開口部
34:凹部
34A:凹部対向面
35:側壁
36:凸部
36A:凸部対向面
38:ガス排気部
40:インジェクタ部
42:第1のインジェクタ構成部材
44:凹部
46:凸部
48:ガス導入口
48A:貫通孔
50:第2のインジェクタ構成部材
52:凹部
54:凸部
56:ガス導入口
56A:貫通孔
60:ガス導入部
70:対向面形成部材
72:開口部
74:凹部
74A:長方形部分
74B:扇状部分
75:斜面
76:凸部
100:リアクタ
110:対向面形成部材
120:インジェクタ部
122:第1のインジェクタ構成部材
124:第2のインジェクタ構成部材
W:基板
Claims (5)
- 成膜用基板を保持するための基板保持部材を有する円板状サセプタ、前記基板を自公転せしめる機構、前記基板保持部材に対向しフローチャネルを形成する対向面、材料ガスの導入部及び排気部を有する気相成膜装置において、
前記円板状サセプタと前記対向面との距離が前記基板の公転方向において変化するように、前記対向面に凹凸形状を施すとともに、
前記材料ガスの導入部に円板状のインジェクタを有し、
前記インジェクタに、前記対向面の凹凸形状の凸部と同じ位置に凸部を有し、前記対向面の凹凸形状の凹部と同じ位置に凹部を有する凹凸形状を施すことを特徴とする気相成膜装置。 - 成膜方式が化学気相成長であることを特徴とする請求項1記載の気相成膜装置。
- 前記材料ガスが化合物半導体あるいは酸化物の材料ガスであることを特徴とする請求項1又は2記載の気相成膜装置。
- 前記材料ガスの一部に有機金属を含むことを特徴とする請求項1〜3のいずれか一項に記載の気相成膜装置。
- 前記対向面及び前記インジェクタを構成する部材の材質が、ステンレス、モリブデンから選択される金属材料、カーボン、炭化ケイ素、炭化タンタルから選択される炭化物、窒化ホウ素、窒化ケイ素、窒化アルミニウムから選択される窒化物、石英、アルミナから選択される酸化物系材料のいずれか、或いはそれらの組み合わせであることを特徴とする請求項1〜4のいずれか一項に記載の気相成膜装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013209507A JP6058515B2 (ja) | 2013-10-04 | 2013-10-04 | 気相成膜装置 |
TW103133413A TWI521089B (zh) | 2013-10-04 | 2014-09-26 | 氣相成膜裝置 |
DE102014114099.0A DE102014114099A1 (de) | 2013-10-04 | 2014-09-29 | Gasphasen-Schichtabscheidung-Vorrichtung |
CN201410512506.0A CN104513968B (zh) | 2013-10-04 | 2014-09-29 | 气相成膜装置 |
US14/502,801 US20150096496A1 (en) | 2013-10-04 | 2014-09-30 | Vapor phase film deposition apparatus |
KR1020140133061A KR101681375B1 (ko) | 2013-10-04 | 2014-10-02 | 기상 성막 장치 |
Applications Claiming Priority (1)
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JP2013209507A JP6058515B2 (ja) | 2013-10-04 | 2013-10-04 | 気相成膜装置 |
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JP2015076417A JP2015076417A (ja) | 2015-04-20 |
JP2015076417A5 JP2015076417A5 (ja) | 2016-07-21 |
JP6058515B2 true JP6058515B2 (ja) | 2017-01-11 |
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US (1) | US20150096496A1 (ja) |
JP (1) | JP6058515B2 (ja) |
KR (1) | KR101681375B1 (ja) |
CN (1) | CN104513968B (ja) |
DE (1) | DE102014114099A1 (ja) |
TW (1) | TWI521089B (ja) |
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CN102773048B (zh) * | 2011-05-09 | 2017-06-06 | 波利玛利欧洲股份公司 | 生产环己酮肟的氨肟化反应器 |
TWI563542B (en) * | 2014-11-21 | 2016-12-21 | Hermes Epitek Corp | Approach of controlling the wafer and the thin film surface temperature |
JP6685216B2 (ja) * | 2016-01-26 | 2020-04-22 | 東京エレクトロン株式会社 | 成膜装置、成膜方法、プログラム及びコンピュータ可読記憶媒体 |
TWI612176B (zh) * | 2016-11-01 | 2018-01-21 | 漢民科技股份有限公司 | 應用於沉積系統的氣體分配裝置 |
US10844490B2 (en) | 2018-06-11 | 2020-11-24 | Hermes-Epitek Corp. | Vapor phase film deposition apparatus |
WO2020046567A1 (en) | 2018-08-29 | 2020-03-05 | Applied Materials, Inc. | Chamber injector |
TWI680201B (zh) * | 2018-09-27 | 2019-12-21 | 漢民科技股份有限公司 | 氣相沉積裝置及其蓋板與噴氣裝置 |
DE102018130140A1 (de) * | 2018-11-28 | 2020-05-28 | Aixtron Se | Verfahren zur Herstellung eines Bestandteils eines CVD-Reaktors |
DE102020101066A1 (de) * | 2020-01-17 | 2021-07-22 | Aixtron Se | CVD-Reaktor mit doppelter Vorlaufzonenplatte |
CN112323043A (zh) * | 2020-10-30 | 2021-02-05 | 泉芯集成电路制造(济南)有限公司 | 一种气体分配器以及原子层沉积反应设备 |
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KR100996210B1 (ko) * | 2010-04-12 | 2010-11-24 | 세메스 주식회사 | 가스 분사 유닛 및 이를 이용한 박막 증착 장치 및 방법 |
JP2013197474A (ja) * | 2012-03-22 | 2013-09-30 | Hitachi Kokusai Electric Inc | 基板処理方法と半導体装置の製造方法、および基板処理装置 |
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TW201531589A (zh) | 2015-08-16 |
KR20150040228A (ko) | 2015-04-14 |
CN104513968B (zh) | 2017-04-12 |
JP2015076417A (ja) | 2015-04-20 |
US20150096496A1 (en) | 2015-04-09 |
TWI521089B (zh) | 2016-02-11 |
KR101681375B1 (ko) | 2016-11-30 |
CN104513968A (zh) | 2015-04-15 |
DE102014114099A1 (de) | 2015-04-09 |
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