JP5988179B2 - 透明導電膜の製造方法 - Google Patents
透明導電膜の製造方法 Download PDFInfo
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- JP5988179B2 JP5988179B2 JP2014112506A JP2014112506A JP5988179B2 JP 5988179 B2 JP5988179 B2 JP 5988179B2 JP 2014112506 A JP2014112506 A JP 2014112506A JP 2014112506 A JP2014112506 A JP 2014112506A JP 5988179 B2 JP5988179 B2 JP 5988179B2
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 4
- 238000002834 transmittance Methods 0.000 description 4
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- 239000007787 solid Substances 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910021393 carbon nanotube Inorganic materials 0.000 description 2
- 239000002041 carbon nanotube Substances 0.000 description 2
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- 230000008602 contraction Effects 0.000 description 2
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- 229910021389 graphene Inorganic materials 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 239000002861 polymer material Substances 0.000 description 2
- LLLVZDVNHNWSDS-UHFFFAOYSA-N 4-methylidene-3,5-dioxabicyclo[5.2.2]undeca-1(9),7,10-triene-2,6-dione Chemical compound C1(C2=CC=C(C(=O)OC(=C)O1)C=C2)=O LLLVZDVNHNWSDS-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000012994 photoredox catalyst Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
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- 230000000007 visual effect Effects 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022466—Electrodes made of transparent conductive layers, e.g. TCO, ITO layers
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/0412—Digitisers structurally integrated in a display
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1884—Manufacture of transparent electrodes, e.g. TCO, ITO
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
- Y10T428/24612—Composite web or sheet
- Y10T428/2462—Composite web or sheet with partial filling of valleys on outer surface
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- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electromagnetism (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Theoretical Computer Science (AREA)
- Human Computer Interaction (AREA)
- Manufacturing & Machinery (AREA)
- Laminated Bodies (AREA)
- Non-Insulated Conductors (AREA)
Description
第一表面と前記第一表面に対向するように設置される第二表面とを含むベースと、
前記ベースの第一表面に設けられ、その底部が非平面構造である第一格子凹溝と、
前記第一格子凹溝に充填される導電性材料から形成される第一導電格子を含む第一導電層とを含む。
112 第一表面
113 基板
114 第二表面
115 第一基質層
116 第一格子凹溝
117 第二基質層
118 第二格子凹溝
120 第一導電層
122 第一導電格子
130 第二導電層
132 第二導電格子
Claims (9)
- 第一表面および前記第一表面とは反対側の第二表面を有するベースを提供する段階と、
前記ベースの前記第一表面に、その底部が非平面構造である第一格子凹溝を設ける段階と、
前記第一格子凹溝に液状導電性材料を充填する段階と、
第一導電格子を含む第一導電層を形成すべく、前記第一格子凹溝に充填された前記液状導電性材料を焼結する段階と、
を有する透明導電膜の製造方法。 - 前記非平面構造の形状はV状又は円弧状の中の少なくとも一種を含む、請求項1に記載の透明導電膜の製造方法。
- 前記ベースを提供する段階は、基板の表面に第一基質層を形成する段階であって、前記ベースの前記第一表面が前記基板から離れる前記第一基質層の表面に位置するように前記第一基質層を形成する段階を含む、請求項1に記載の透明導電膜の製造方法。
- 前記ベースの前記第二表面に、その底部が非平面構造である第二格子凹溝を設ける段階と、
前記第二格子凹溝に液状導電性材料を充填する段階と、
をさらに有し、
前記焼結する段階は、第二導電格子を含む第二導電層を形成すべく、前記第二格子凹溝に充填された前記液状導電性材料を焼結する、請求項1に記載の透明導電膜の製造方法。 - 前記ベースを提供する段階は、
基板の表面に第一基質層を形成する段階であって、前記ベースの前記第一表面が前記基板から離れる前記第一基質層の表面に位置するように前記第一基質層を形成する段階と、
前記第一表面に付着されるように、前記第一基質層に第二基質層を積層する段階であって、前記第一基質層および前記第二基質層が前記基板の同側に設置される、積層する段階と、
を含み、
前記方法は、
前記第一基質層から離れる前記第二基質層の表面に、その底部が非平面構造である第二格子凹溝を設ける段階と、
前記第二格子凹溝に液状導電性材料を充填する段階と、
をさらに有し、
前記焼結する段階は、第二導電格子を含む第二導電層を形成すべく、前記第二格子凹溝に充填された前記液状導電性材料を焼結する、請求項1に記載の透明導電膜の製造方法。 - 前記ベースを提供する段階は、
基板の表面に第一基質層を形成する段階であって、前記ベースの前記第一表面が前記基板から離れる前記第一基質層の表面に位置するように前記第一基質層を形成する段階と、
前記第一基質層から離れる前記基板の表面に第二基質層を付着させる段階であって、前記基板が前記第一基質層と前記第二基質層との間に位置するように前記第二基質層を付着させる段階と、
を含み、
前記方法は、
前記基板から離れる前記第二基質層の表面に、その底部が非平面構造である第二格子凹溝を設ける段階と、
前記第二格子凹溝に液状導電性材料を充填する段階と、
をさらに有し、
前記焼結する段階は、第二導電格子を含む第二導電層を形成すべく、前記第二格子凹溝に充填された前記液状導電性材料を焼結する、請求項1に記載の透明導電膜の製造方法。 - 前記第一格子凹溝の深さと幅との比は1以上であり、及び/又は、前記第二格子凹溝の深さと幅との比は1以上である、請求項4〜6のいずれか一項に記載の透明導電膜の製造方法。
- 前記第一格子凹溝及び/又は前記第二格子凹溝の深さは2μm〜6μmであり、前記第一格子凹溝及び/又は前記第二格子凹溝の幅は0.2μm〜5μmである、請求項7に記載の透明導電膜の製造方法。
- 前記第一格子凹溝及び/又は前記第二格子凹溝の格子形状は規則的な格子又はランダムな格子である、請求項4〜6のいずれか一項に記載の透明導電膜の製造方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310210466.X | 2013-05-30 | ||
CN201310210466XA CN103345961A (zh) | 2013-05-30 | 2013-05-30 | 透明导电膜 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014236006A JP2014236006A (ja) | 2014-12-15 |
JP5988179B2 true JP5988179B2 (ja) | 2016-09-07 |
Family
ID=49280751
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014112506A Expired - Fee Related JP5988179B2 (ja) | 2013-05-30 | 2014-05-30 | 透明導電膜の製造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20140356584A1 (ja) |
JP (1) | JP5988179B2 (ja) |
KR (1) | KR20140141468A (ja) |
CN (1) | CN103345961A (ja) |
TW (1) | TWI524361B (ja) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104616725B (zh) * | 2013-11-04 | 2018-03-23 | 南昌欧菲光科技有限公司 | 一种透明导电膜 |
US20150286327A1 (en) * | 2014-04-07 | 2015-10-08 | Deven Charles Chakrabarti | Method and Apparatus for Protecting Touch-Screen Electronic Devices |
CN105448386B (zh) * | 2014-08-18 | 2018-10-12 | 深圳欧菲光科技股份有限公司 | 触控元件及其导电膜 |
CN104700928B (zh) * | 2014-12-24 | 2017-05-17 | 上海蓝沛信泰光电科技有限公司 | 低方阻透明导电薄膜及其制备方法 |
JP6563497B2 (ja) * | 2015-07-24 | 2019-08-21 | 富士フイルム株式会社 | タッチパネル用導電フィルム、タッチパネル、および、タッチパネル付き表示装置 |
KR102329801B1 (ko) | 2015-10-21 | 2021-11-22 | 삼성전자주식회사 | 테스트 소켓의 제조 방법 및 반도체 패키지의 테스트 방법 |
CN108701510A (zh) * | 2016-03-24 | 2018-10-23 | Jxtg能源株式会社 | 透明导电性膜、透明导电性膜的制造方法、金属模具、及金属模具的制造方法 |
CN106315505B (zh) * | 2016-08-24 | 2018-11-06 | 深圳先进技术研究院 | 一种增强聚酰亚胺基底和导电金属层之间的粘附力的方法 |
KR102504122B1 (ko) * | 2018-03-05 | 2023-02-28 | 삼성디스플레이 주식회사 | 표시 장치 |
CN111148422A (zh) * | 2018-11-05 | 2020-05-12 | 苏州大学 | 一种屏蔽膜及其制造方法 |
CN111148423A (zh) * | 2018-11-05 | 2020-05-12 | 苏州大学 | 一种屏蔽膜及其制造方法 |
CN111148419A (zh) * | 2018-11-05 | 2020-05-12 | 苏州大学 | 一种多层屏蔽膜及其制造方法 |
CN111148421A (zh) * | 2018-11-05 | 2020-05-12 | 苏州大学 | 一种屏蔽膜及其制造方法 |
CN111148420A (zh) * | 2018-11-05 | 2020-05-12 | 苏州大学 | 一种屏蔽膜及其制造方法 |
KR102323253B1 (ko) | 2019-06-21 | 2021-11-09 | 삼성전자주식회사 | 반도체 소자 및 반도체 소자의 제조방법 |
CN118067553A (zh) * | 2024-04-25 | 2024-05-24 | 天津宝兴威科技股份有限公司 | 一种纳米银透明导电膜性能测试装置 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4273702B2 (ja) * | 2002-05-08 | 2009-06-03 | 凸版印刷株式会社 | 導電膜の製造方法 |
JP4479287B2 (ja) * | 2004-03-11 | 2010-06-09 | 株式会社日立製作所 | 導電性ガラスおよびそれを用いた光電変換デバイス |
JP5466908B2 (ja) * | 2009-09-21 | 2014-04-09 | 株式会社ワコム | センサ基板および位置検出装置 |
US9244573B2 (en) * | 2010-03-03 | 2016-01-26 | Miraenanotech Co., Ltd. | Capacitive touch panel including embedded sensing electrodes |
CN102063951B (zh) * | 2010-11-05 | 2013-07-03 | 苏州苏大维格光电科技股份有限公司 | 一种透明导电膜及其制作方法 |
JP5518824B2 (ja) * | 2011-11-08 | 2014-06-11 | 尾池工業株式会社 | 透明電極基材およびその製造方法 |
CN102903423B (zh) * | 2012-10-25 | 2015-05-13 | 南昌欧菲光科技有限公司 | 透明导电膜中的导电结构、透明导电膜及制作方法 |
US9442535B2 (en) * | 2012-12-21 | 2016-09-13 | Atmel Corporation | Touch sensor with integrated antenna |
CN103105974B (zh) * | 2013-02-06 | 2014-05-07 | 南昌欧菲光科技有限公司 | 触摸屏、触摸显示屏及具有该触摸屏的电子装置 |
US9085194B2 (en) * | 2013-03-05 | 2015-07-21 | Eastman Kodak Company | Embossing stamp for optically diffuse micro-channel |
-
2013
- 2013-05-30 CN CN201310210466XA patent/CN103345961A/zh active Pending
-
2014
- 2014-04-21 TW TW103114366A patent/TWI524361B/zh not_active IP Right Cessation
- 2014-04-21 US US14/257,887 patent/US20140356584A1/en not_active Abandoned
- 2014-05-23 KR KR20140062601A patent/KR20140141468A/ko not_active Application Discontinuation
- 2014-05-30 JP JP2014112506A patent/JP5988179B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
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KR20140141468A (ko) | 2014-12-10 |
TWI524361B (zh) | 2016-03-01 |
CN103345961A (zh) | 2013-10-09 |
US20140356584A1 (en) | 2014-12-04 |
TW201445584A (zh) | 2014-12-01 |
JP2014236006A (ja) | 2014-12-15 |
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