JP5984452B2

JP5984452B2 - Glass welding method, glass welding apparatus and glass welded body

Info

Publication number: JP5984452B2
Application number: JP2012076725A
Authority: JP
Inventors: 松本　聡; 松本　　聡
Original assignee: Hamamatsu Photonics KK
Current assignee: Hamamatsu Photonics KK
Priority date: 2012-03-29
Filing date: 2012-03-29
Publication date: 2016-09-06
Anticipated expiration: 2032-03-29
Also published as: JP2013203629A

Description

本発明は、板状の第１のガラス部材と板状の第２のガラス部材とを溶着してガラス溶着体を製造するためのガラス溶着方法及びガラス溶着装置、並びにガラス溶着体に関する。 The present invention relates to a glass welding method, a glass welding apparatus, and a glass welded body for producing a glass welded body by welding a plate-like first glass member and a plate-like second glass member.

上記技術分野における従来のガラス溶着方法として、溶着予定領域に沿うように配置されたガラス層を介してガラス部材同士を重ね合わせ、平板状の押圧部材を用いて、一方のガラス部材を他方のガラス部材に押圧し、その状態で、溶着予定領域に沿ってガラス層にレーザ光を照射することにより、溶着予定領域に沿ってガラス層を溶融させてガラス部材同士を溶着する方法が知られている（例えば、特許文献１参照）。 As a conventional glass welding method in the above technical field, glass members are overlapped with each other through a glass layer arranged along a planned welding region, and a flat pressing member is used to replace one glass member with the other glass. A method is known in which glass members are welded together by melting the glass layer along the planned welding region by irradiating the glass layer along the planned welding region with the member pressed against the member. (For example, refer to Patent Document 1).

特開２００９−２２４３２９号公報JP 2009-224329 A

しかしながら、上述したようなガラス溶着方法にあっては、何らかの原因により、製造されたガラス溶着体においてガラス層に亀裂が生じる場合があった。 However, in the glass welding method as described above, the glass layer may be cracked in the manufactured glass welded body for some reason.

そこで、本発明は、ガラス層での亀裂の発生が抑制されたガラス溶着体を得ることができるガラス溶着方法及びガラス溶着装置、並びにガラス層での亀裂の発生が抑制されたガラス溶着体を提供することを目的とする。 Therefore, the present invention provides a glass welding method and a glass welding apparatus capable of obtaining a glass welded body in which the occurrence of cracks in the glass layer is suppressed, and a glass welded body in which the occurrence of cracks in the glass layer is suppressed. The purpose is to do.

本発明のガラス溶着方法は、板状の第１のガラス部材と板状の第２のガラス部材とを溶着してガラス溶着体を製造するためのガラス溶着方法であって、環状に延在する溶着予定領域に沿うようにガラス層が配置された第１のガラス部材に、ガラス層を介して第２のガラス部材を重ね合わせ、ガラス層が介在する領域に対応する環状部分での第１のガラス部材と第２のガラス部材との距離が中央部分及び外縁部分での第１のガラス部材と第２のガラス部材との距離よりも大きくなるように、第１のガラス部材及び第２のガラス部材の少なくとも一方を変形させる第１の工程と、第１の工程の後に、第１のガラス部材及び第２のガラス部材の少なくとも一方を変形させた状態で、溶着予定領域に沿ってレーザ光の照射領域が相対的に移動するようにガラス層にレーザ光を照射することにより、溶着予定領域に沿ってガラス層を溶融させて第１のガラス部材と第２のガラス部材とを溶着する第２の工程と、を備える。 The glass welding method of the present invention is a glass welding method for producing a glass welded body by welding a plate-like first glass member and a plate-like second glass member, and extends in an annular shape. The second glass member is superimposed on the first glass member in which the glass layer is arranged so as to be along the planned welding region via the glass layer, and the first portion in the annular portion corresponding to the region where the glass layer is interposed. The first glass member and the second glass so that the distance between the glass member and the second glass member is larger than the distance between the first glass member and the second glass member at the central portion and the outer edge portion. A first step of deforming at least one of the members; and after the first step, in a state in which at least one of the first glass member and the second glass member is deformed, the laser beam along the planned welding region So that the irradiation area moves relatively Comprising by irradiating the glass layer with a laser beam, a second step of welding the first glass member and the second glass member along a region to be fused to melt the glass layer.

このガラス溶着方法では、ガラス層が介在する領域に対応する環状部分での第１のガラス部材と第２のガラス部材との距離が中央部分及び外縁部分での第１のガラス部材と第２のガラス部材との距離よりも大きくなるように、第１のガラス部材及び第２のガラス部材の少なくとも一方を変形させ、その状態で、溶着予定領域に沿ってガラス層にレーザ光を照射することにより、溶着予定領域に沿ってガラス層を溶融させて第１のガラス部材と第２のガラス部材とを溶着する。これにより、製造されたガラス溶着体においては、ガラス層に圧縮応力が生じるように第１のガラス部材及び第２のガラス部材に応力が残留し、ガラス層に亀裂が発生し難くなる。よって、このガラス溶着方法によれば、ガラス層での亀裂の発生が抑制されたガラス溶着体を得ることができる。 In this glass welding method, the distance between the first glass member and the second glass member at the annular portion corresponding to the region where the glass layer is interposed is the first glass member and the second glass member at the central portion and the outer edge portion. By deforming at least one of the first glass member and the second glass member so as to be larger than the distance to the glass member, and in that state, irradiating the glass layer with the laser beam along the planned welding region The glass layer is melted along the planned welding region to weld the first glass member and the second glass member. Thereby, in the manufactured glass welded body, stress remains in the first glass member and the second glass member so that compressive stress is generated in the glass layer, and cracks are hardly generated in the glass layer. Therefore, according to this glass welding method, the glass welded body with which generation | occurrence | production of the crack in a glass layer was suppressed can be obtained.

ここで、第１の工程では、第１のガラス部材及び第２のガラス部材の一方を載置台に載置し、押圧治具を用いて、第１のガラス部材及び第２のガラス部材の他方を載置台側に押圧してもよい。これによれば、ガラス層が介在する領域に対応する環状部分での第１のガラス部材と第２のガラス部材との距離が中央部分及び外縁部分での第１のガラス部材と第２のガラス部材との距離よりも大きくなるように、第１のガラス部材及び第２のガラス部材の少なくとも一方を容易に且つ確実に変形させることができる。 Here, in the first step, one of the first glass member and the second glass member is placed on the mounting table, and the other of the first glass member and the second glass member is used using a pressing jig. May be pressed toward the mounting table. According to this, the distance between the first glass member and the second glass member in the annular portion corresponding to the region where the glass layer is interposed is the first glass member and the second glass in the central portion and the outer edge portion. At least one of the first glass member and the second glass member can be easily and reliably deformed so as to be larger than the distance to the member.

このとき、第２の工程では、押圧治具並びに第１のガラス部材及び第２のガラス部材の他方を介してガラス層にレーザ光を照射してもよい。これによれば、溶着予定領域に沿ってガラス層にレーザ光を容易に且つ確実に照射することができる。 At this time, in the second step, the glass layer may be irradiated with laser light through the pressing jig and the other of the first glass member and the second glass member. According to this, the laser beam can be easily and surely irradiated onto the glass layer along the planned welding region.

更に、載置台は、第１のガラス部材が載置される平坦面を有し、押圧治具は、溶着予定領域の内側に位置する領域に対向する第１の凸面と、溶着予定領域に対向する凹面と、溶着予定領域の外側において溶着予定領域に沿う領域に対向する第２の凸面と、を有し、第２のガラス部材を押圧してもよい。これによれば、ガラス層が介在する領域に対応する環状部分での第１のガラス部材と第２のガラス部材との距離が中央部分及び外縁部分での第１のガラス部材と第２のガラス部材との距離よりも大きくなるように、第１のガラス部材及び第２のガラス部材の少なくとも一方を変形させる際に、ガラス層が配置された第１のガラス部材の変形が抑制される一方で、第２のガラス部材の変形が促進されるため、ガラス層及び第１のガラス部材に無理な力が生じるのを防止しつつ、第２のガラス部材を変形させることができる。 Furthermore, the mounting table has a flat surface on which the first glass member is mounted, and the pressing jig faces the first convex surface facing the region located inside the planned welding region and the planned welding region. And a second convex surface facing the region along the planned welding region outside the planned welding region, and pressing the second glass member. According to this, the distance between the first glass member and the second glass member in the annular portion corresponding to the region where the glass layer is interposed is the first glass member and the second glass in the central portion and the outer edge portion. While deforming at least one of the first glass member and the second glass member so as to be larger than the distance to the member, the deformation of the first glass member on which the glass layer is disposed is suppressed. Since the deformation of the second glass member is promoted, the second glass member can be deformed while preventing an excessive force from being generated in the glass layer and the first glass member.

また、本発明のガラス溶着装置は、板状の第１のガラス部材と板状の第２のガラス部材とを溶着してガラス溶着体を製造するためのガラス溶着装置であって、環状に延在する溶着予定領域に沿うようにガラス層が配置された第１のガラス部材に、ガラス層を介して第２のガラス部材が重ね合わされた状態で、且つ、ガラス層が介在する領域に対応する環状部分での第１のガラス部材と第２のガラス部材との距離が中央部分及び外縁部分での第１のガラス部材と第２のガラス部材との距離よりも大きくなるように、第１のガラス部材及び第２のガラス部材の少なくとも一方が変形させられた状態で、第１のガラス部材及び第２のガラス部材を支持するガラス部材支持部と、溶着予定領域に沿ってガラス層を溶融させて第１のガラス部材と第２のガラス部材とを溶着するために、ガラス部材支持部によって第１のガラス部材及び第２のガラス部材が支持された状態で、溶着予定領域に沿ってレーザ光の照射領域が相対的に移動するようにガラス層にレーザ光を照射するレーザ光照射部と、を備える。 The glass welding apparatus of the present invention is a glass welding apparatus for manufacturing a glass welded body by welding a plate-like first glass member and a plate-like second glass member, and extends in an annular shape. Corresponds to a region where the glass layer is interposed in a state where the second glass member is superimposed on the first glass member in which the glass layer is arranged along the existing welding planned region via the glass layer. The first glass member and the second glass member at the annular portion have a distance greater than the distance between the first glass member and the second glass member at the central portion and the outer edge portion. In a state where at least one of the glass member and the second glass member is deformed, the glass member supporting portion supporting the first glass member and the second glass member and the glass layer are melted along the planned welding region. The first glass member and the second In order to weld the lath member, the irradiation region of the laser light relatively moves along the planned welding region in a state where the first glass member and the second glass member are supported by the glass member support portion. And a laser beam irradiation unit for irradiating the glass layer with laser beam.

このガラス溶着装置によれば、上述したガラス溶着方法と同様の理由により、ガラス層での亀裂の発生が抑制されたガラス溶着体を得ることができる。 According to this glass welding apparatus, a glass welded body in which the occurrence of cracks in the glass layer is suppressed can be obtained for the same reason as in the glass welding method described above.

ここで、ガラス部材支持部は、第１のガラス部材及び第２のガラス部材の一方が載置される載置台と、第１のガラス部材及び第２のガラス部材の他方を載置台側に押圧する押圧治具と、を有してもよい。これによれば、ガラス層が介在する領域に対応する環状部分での第１のガラス部材と第２のガラス部材との距離が中央部分及び外縁部分での第１のガラス部材と第２のガラス部材との距離よりも大きくなるように、第１のガラス部材及び第２のガラス部材の少なくとも一方を容易に且つ確実に変形させることができる。 Here, the glass member support portion presses the mounting table on which one of the first glass member and the second glass member is mounted, and the other of the first glass member and the second glass member to the mounting table side. And a pressing jig to be used. According to this, the distance between the first glass member and the second glass member in the annular portion corresponding to the region where the glass layer is interposed is the first glass member and the second glass in the central portion and the outer edge portion. At least one of the first glass member and the second glass member can be easily and reliably deformed so as to be larger than the distance to the member.

このとき、レーザ光照射部は、押圧治具並びに第１のガラス部材及び第２のガラス部材の他方を介してガラス層にレーザ光を照射してもよい。これによれば、溶着予定領域に沿ってガラス層にレーザ光を容易に且つ確実に照射することができる。 At this time, the laser light irradiation unit may irradiate the glass layer with the laser light via the pressing jig and the other of the first glass member and the second glass member. According to this, the laser beam can be easily and surely irradiated onto the glass layer along the planned welding region.

また、本発明のガラス溶着体は、板状の第１のガラス部材と、第１のガラス部材に重ね合わされた板状の第２のガラス部材と、第１のガラス部材と第２のガラス部材とを溶着した状態で、第１のガラス部材と第２のガラス部材との間において環状に延在するガラス層と、を備え、ガラス層が介在する領域に対応する環状部分での第１のガラス部材と第２のガラス部材との距離が中央部分及び外縁部分での第１のガラス部材と第２のガラス部材との距離よりも大きくなるように、第１のガラス部材及び第２のガラス部材の少なくとも一方が変形している。 Moreover, the glass welded body of the present invention includes a plate-shaped first glass member, a plate-shaped second glass member superimposed on the first glass member, a first glass member, and a second glass member. And a glass layer extending annularly between the first glass member and the second glass member, and the first portion in the annular portion corresponding to the region where the glass layer is interposed The first glass member and the second glass so that the distance between the glass member and the second glass member is larger than the distance between the first glass member and the second glass member at the central portion and the outer edge portion. At least one of the members is deformed.

このガラス溶着体では、ガラス層が介在する領域に対応する環状部分での第１のガラス部材と第２のガラス部材との距離が中央部分及び外縁部分での第１のガラス部材と第２のガラス部材との距離よりも大きくなるように、第１のガラス部材及び第２のガラス部材の少なくとも一方が変形している。そのため、ガラス層に引張応力が生じることが抑制され、ガラス層に亀裂が発生し難くなる。よって、このガラス溶着体によれば、ガラス層での亀裂の発生が抑制される。 In this glass welded body, the distance between the first glass member and the second glass member in the annular portion corresponding to the region where the glass layer is interposed is the first glass member and the second glass portion in the central portion and the outer edge portion. At least one of the first glass member and the second glass member is deformed so as to be larger than the distance from the glass member. Therefore, it is suppressed that a tensile stress arises in a glass layer, and it becomes difficult to generate | occur | produce a crack in a glass layer. Therefore, according to this glass welded body, generation | occurrence | production of the crack in a glass layer is suppressed.

本発明によれば、ガラス層での亀裂の発生が抑制されたガラス溶着体を得ることができるガラス溶着方法及びガラス溶着装置、並びにガラス層での亀裂の発生が抑制されたガラス溶着体を提供することが可能となる。 ADVANTAGE OF THE INVENTION According to this invention, the glass welding method and glass welding apparatus which can obtain the glass welded body with which generation | occurrence | production of the crack in the glass layer was suppressed, and the glass welded body with which generation | occurrence | production of the crack in the glass layer were suppressed are provided. It becomes possible to do.

本発明の一実施形態のガラス溶着体の斜視図である。It is a perspective view of the glass welded body of one Embodiment of this invention. 図１のII−II線に沿ってのガラス溶着体の断面図である。It is sectional drawing of the glass welded body along the II-II line | wire of FIG. 本発明の一実施形態のガラス溶着方法を説明するための斜視図である。It is a perspective view for demonstrating the glass welding method of one Embodiment of this invention. 本発明の一実施形態のガラス溶着方法を説明するための斜視図である。It is a perspective view for demonstrating the glass welding method of one Embodiment of this invention. 本発明の一実施形態のガラス溶着装置の構成図である。It is a block diagram of the glass welding apparatus of one Embodiment of this invention. 本発明の一実施形態のガラス溶着装置の構成図である。It is a block diagram of the glass welding apparatus of one Embodiment of this invention. 本発明の他の実施形態のガラス溶着装置の構成図である。It is a block diagram of the glass welding apparatus of other embodiment of this invention. 本発明の他の実施形態のガラス溶着装置の構成図である。It is a block diagram of the glass welding apparatus of other embodiment of this invention. 本発明の他の実施形態のガラス溶着装置の構成図である。It is a block diagram of the glass welding apparatus of other embodiment of this invention. 本発明の他の実施形態のガラス溶着装置の構成図である。It is a block diagram of the glass welding apparatus of other embodiment of this invention. 本発明の他の実施形態のガラス溶着方法を説明するための平面図である。It is a top view for demonstrating the glass welding method of other embodiment of this invention.

以下、本発明の好適な実施形態について、図面を参照して詳細に説明する。なお、各図において同一又は相当部分には同一符号を付し、重複する説明を省略する。 DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. In addition, in each figure, the same code | symbol is attached | subjected to the same or an equivalent part, and the overlapping description is abbreviate | omitted.

図１は、本発明の一実施形態のガラス溶着体の斜視図である。図１に示されるように、ガラス溶着体１は、板状のガラス部材（第１のガラス部材）４と、ガラス部材４に重ね合わされた板状のガラス部材（第２のガラス部材）５と、ガラス部材４とガラス部材５とを溶着した状態で、ガラス部材４とガラス部材５との間において溶着予定領域Ｒに沿って環状に延在するガラス層３と、を備えている。ガラス溶着体１は、例えば有機ＥＬディスプレイであり、溶着予定領域Ｒの内側に形成された発光素子領域がガラス部材４，５及びガラス層３によって外部雰囲気から封止されている。ガラス部材４，５は、例えば無アルカリガラスからなる厚さ０．７ｍｍの矩形板状の部材である。溶着予定領域Ｒは、ガラス部材４，５の外縁に沿うように所定の幅で矩形環状に設定されている。ガラス層３は、例えば低融点ガラス（バナジウムリン酸系ガラス、鉛ホウ酸ガラス等）からなる層である。 FIG. 1 is a perspective view of a glass welded body according to an embodiment of the present invention. As shown in FIG. 1, the glass welded body 1 includes a plate-like glass member (first glass member) 4, and a plate-like glass member (second glass member) 5 superimposed on the glass member 4. The glass member 4 and the glass member 5 are welded, and the glass layer 3 is provided between the glass member 4 and the glass member 5 so as to extend annularly along the planned welding region R. The glass welded body 1 is an organic EL display, for example, and the light emitting element region formed inside the planned welding region R is sealed from the outside atmosphere by the glass members 4 and 5 and the glass layer 3. The glass members 4 and 5 are rectangular plate-shaped members having a thickness of 0.7 mm made of non-alkali glass, for example. The planned welding region R is set in a rectangular ring shape with a predetermined width so as to follow the outer edges of the glass members 4 and 5. The glass layer 3 is a layer made of, for example, low-melting glass (vanadium phosphate glass, lead borate glass, etc.).

図２は、図１のII−II線に沿ってのガラス溶着体の断面図である。図２に示されるように、ガラス部材４及びガラス部材５は、ガラス層３が介在する領域に対応する環状部分４ｃ，５ｃでのガラス部材４とガラス部材５との距離が中央部分４ｍ，５ｍ及び外縁部分４ｆ，５ｆでのガラス部材４とガラス部材５との距離よりも大きくなるように（ここでは、ガラス層３が介在する領域の全部においてガラス部材４とガラス部材５との距離が最大となるように）、変形している。より具体的には、ガラス部材４は、ガラス層３に対向する環状部分４ｃからガラス部材４の中央部分４ｍに向かって凹むと共に、ガラス層３に対向する環状部分４ｃからガラス部材４の外縁部分４ｆに向かって凹むように、湾曲している。これにより、ガラス部材４の環状部分４ｃには、ガラス部材４の内側表面４ａにおいて圧縮応力が生じ、ガラス部材４の外側表面４ｂにおいて引張応力が生じている（図２の矢印参照）。同様に、ガラス部材５は、ガラス層３に対向する環状部分５ｃからガラス部材５の中央部分５ｍに向かって凹むと共に、ガラス層３に対向する環状部分５ｃからガラス部材５の外縁部分５ｆに向かって凹むように、湾曲している。これにより、ガラス部材５の環状部分５ｃには、ガラス部材５の内側表面５ａにおいて圧縮応力が生じ、ガラス部材５の外側表面５ｂにおいて引張応力が生じている（図２の矢印参照）。 FIG. 2 is a cross-sectional view of the glass welded body taken along line II-II in FIG. As shown in FIG. 2, the glass member 4 and the glass member 5 are such that the distance between the glass member 4 and the glass member 5 at the annular portions 4c and 5c corresponding to the region where the glass layer 3 is interposed is the central portions 4m and 5m. And the distance between the glass member 4 and the glass member 5 at the outer edge portions 4f and 5f (here, the distance between the glass member 4 and the glass member 5 is maximum in the entire region where the glass layer 3 is interposed). So that it is deformed). More specifically, the glass member 4 is recessed from the annular portion 4 c facing the glass layer 3 toward the central portion 4 m of the glass member 4, and the outer edge portion of the glass member 4 from the annular portion 4 c facing the glass layer 3. It is curved so as to be recessed toward 4f. Thereby, in the annular portion 4c of the glass member 4, compressive stress is generated on the inner surface 4a of the glass member 4, and tensile stress is generated on the outer surface 4b of the glass member 4 (see the arrow in FIG. 2). Similarly, the glass member 5 is recessed from the annular portion 5c facing the glass layer 3 toward the central portion 5m of the glass member 5, and from the annular portion 5c facing the glass layer 3 toward the outer edge portion 5f of the glass member 5. It is curved so as to be recessed. Thereby, in the annular portion 5c of the glass member 5, compressive stress is generated on the inner surface 5a of the glass member 5, and tensile stress is generated on the outer surface 5b of the glass member 5 (see the arrow in FIG. 2).

なお、中央部分４ｍは、ガラス部材４のうち、ガラス層３が介在する領域に対応する環状部分４ｃの内側に位置する部分であり、外縁部分４ｆは、ガラス部材４のうち、ガラス層３が介在する領域に対応する環状部分４ｃの外側に位置する部分である。同様に、中央部分５ｍは、ガラス部材５のうち、ガラス層３が介在する領域に対応する環状部分５ｃの内側に位置する部分であり、外縁部分５ｆは、ガラス部材５のうち、ガラス層３が介在する領域に対応する環状部分５ｃの外側に位置する部分である。また、ガラス部材４，５及びガラス層３によって外部雰囲気から封止された領域は、外部雰囲気に対して減圧されていてもよいし、減圧されていなくてもよい。 In addition, the center part 4m is a part located inside the annular part 4c corresponding to the area | region where the glass layer 3 interposes among the glass members 4, and the outer edge part 4f is the glass layer 3 among the glass members 4. This is a portion located outside the annular portion 4c corresponding to the intervening region. Similarly, the central portion 5 m is a portion located inside the annular portion 5 c corresponding to the region where the glass layer 3 is interposed in the glass member 5, and the outer edge portion 5 f is the glass layer 3 in the glass member 5. This is a portion located outside the annular portion 5c corresponding to the region where the is interposed. Moreover, the area | region sealed from the external atmosphere by the glass members 4 and 5 and the glass layer 3 may be pressure-reduced with respect to an external atmosphere, and does not need to be pressure-reduced.

次に、ガラス部材４とガラス部材５とを溶着してガラス溶着体１を製造するためのガラス溶着方法及びガラス溶着装置について説明する。図３及び図４は、本発明の一実施形態のガラス溶着方法を説明するための斜視図であり、図５及び図６は、本発明の一実施形態のガラス溶着装置の構成図である。 Next, a glass welding method and a glass welding apparatus for manufacturing the glass welded body 1 by welding the glass member 4 and the glass member 5 will be described. 3 and 4 are perspective views for explaining a glass welding method according to an embodiment of the present invention, and FIGS. 5 and 6 are configuration diagrams of a glass welding apparatus according to an embodiment of the present invention.

まず、図３に示されるように、ディスペンサやスクリーン印刷等によってフリットペーストを塗布することにより、溶着予定領域Ｒに沿ってガラス部材４の内側表面４ａにペースト層６を形成する。フリットペーストは、例えば、低融点ガラス（バナジウムリン酸系ガラス、鉛ホウ酸ガラス等）からなる粉末状のガラスフリット（ガラス粉）２、酸化鉄等の無機顔料であるレーザ光吸収性顔料（レーザ光吸収材）、酢酸アミル等である有機溶剤及びガラスの軟化点温度以下で熱分解する樹脂成分（アクリル等）であるバインダを混練したものである。 First, as shown in FIG. 3, a paste layer 6 is formed on the inner surface 4 a of the glass member 4 along the planned welding region R by applying a frit paste by a dispenser, screen printing, or the like. The frit paste is, for example, a powdery glass frit (glass powder) 2 made of low-melting glass (vanadium phosphate glass, lead borate glass, etc.), or a laser light absorbing pigment (laser) that is an inorganic pigment such as iron oxide. A light absorbing material), an organic solvent such as amyl acetate, and a binder that is a resin component (such as acrylic) that is thermally decomposed at a temperature lower than the softening temperature of the glass.

続いて、ペースト層６を乾燥させて有機溶剤を除去する。そして、図４に示されるように、溶着予定領域Ｒに沿ってレーザ光Ｌ１の照射領域が相対的に移動するように、ガラスフリット２、レーザ光吸収性顔料及びバインダを含むガラス層３にレーザ光Ｌ１を照射することにより、バインダをガス化すると共にガラスフリット２を溶融させて、ガラス部材４の内側表面４ａにガラス層３を定着させる（仮焼成）。これにより、レーザ光吸収性顔料を含むガラス層３が、環状に延在する溶着予定領域Ｒに沿うようにガラス部材４に配置されることになる。なお、加熱炉においてバインダをガス化すると共にガラスフリット２を溶融させて、ガラス部材４の内側表面４ａにガラス層３を定着させてもよい。 Subsequently, the paste layer 6 is dried to remove the organic solvent. Then, as shown in FIG. 4, a laser is applied to the glass layer 3 containing the glass frit 2, the laser light absorbing pigment and the binder so that the irradiation region of the laser light L1 relatively moves along the planned welding region R. By irradiating the light L1, the binder is gasified and the glass frit 2 is melted to fix the glass layer 3 on the inner surface 4a of the glass member 4 (temporary firing). Thereby, the glass layer 3 containing a laser beam absorptive pigment is arrange | positioned at the glass member 4 so that the welding planned area | region R extended cyclically | annularly. Note that the glass layer 3 may be fixed to the inner surface 4 a of the glass member 4 by gasifying the binder in the heating furnace and melting the glass frit 2.

続いて、図５に示されるように、溶着予定領域Ｒに沿うようにガラス層３が配置されたガラス部材４を、ガラス溶着装置１１の載置台１２に載置する。載置台１２は、ガラス部材４の外側表面４ｂが接触した状態でガラス部材４が載置される平坦面１２ａを有している。そして、載置台１２に載置されたガラス部材４に、ガラス層３を介してガラス部材５を重ね合わせる（第１の工程）。なお、ガラス部材５の内側表面５ａには、発光素子領域が形成されている。 Subsequently, as shown in FIG. 5, the glass member 4 on which the glass layer 3 is arranged along the planned welding region R is placed on the placing table 12 of the glass welding apparatus 11. The mounting table 12 has a flat surface 12a on which the glass member 4 is mounted in a state where the outer surface 4b of the glass member 4 is in contact. And the glass member 5 is piled up on the glass member 4 mounted in the mounting base 12 through the glass layer 3 (1st process). A light emitting element region is formed on the inner surface 5 a of the glass member 5.

続いて、ガラス溶着装置１１の押圧治具１３を用いて、ガラス部材５を載置台１２側に押圧する（第１の工程）。押圧治具１３は、溶着予定領域Ｒの内側に位置する領域に対向する凸面（第１の凸面）１３ａと、溶着予定領域Ｒに対向する凹面１３ｂと、溶着予定領域Ｒの外側において溶着予定領域Ｒに沿う領域に対向する凸面（第２の凸面）１３ｃと、を有し、石英等の光透過性材料からなる。これにより、図６に示されるように、少なくともガラス部材５は、ガラス層３が介在する領域に対応する環状部分４ｃでのガラス部材４とガラス部材５との距離が中央部分４ｍ，５ｍ及び外縁部分４ｆ，５ｆでのガラス部材４とガラス部材５との距離よりも大きくなるように、変形させられる（第１の工程）。ここでは、ガラス部材５の外側表面５ｂに接触する凸面１３ａ、凹面１３ｂ及び凸面１３ｃが、連続する曲面として形成されているので、ガラス部材５は、ガラス層３に対向する環状部分５ｃから中央部分５ｍに向かって凹むと共に、ガラス層３に対向する環状部分５ｃから外縁部分５ｆに向かって凹むように、湾曲する。 Subsequently, the glass member 5 is pressed toward the mounting table 12 using the pressing jig 13 of the glass welding apparatus 11 (first step). The pressing jig 13 includes a convex surface (first convex surface) 13a facing a region located inside the planned welding region R, a concave surface 13b facing the planned welding region R, and a planned welding region outside the planned welding region R. And a convex surface (second convex surface) 13c facing the region along R, and made of a light-transmitting material such as quartz. As a result, as shown in FIG. 6, at least the glass member 5 has a distance between the glass member 4 and the glass member 5 in the annular portion 4c corresponding to the region where the glass layer 3 is interposed. It is made to change so that it may become larger than the distance of the glass member 4 and the glass member 5 in the parts 4f and 5f (1st process). Here, since the convex surface 13a, the concave surface 13b, and the convex surface 13c that are in contact with the outer surface 5b of the glass member 5 are formed as continuous curved surfaces, the glass member 5 has a central portion from the annular portion 5c that faces the glass layer 3. It is curved so as to be recessed toward 5 m and recessed toward the outer edge portion 5 f from the annular portion 5 c facing the glass layer 3.

ガラス溶着装置１１では、載置台１２及び押圧治具１３によってガラス部材支持部１４が構成されている。従って、ガラス部材支持部１４は、溶着予定領域Ｒに沿うようにガラス層３が配置されたガラス部材４に、ガラス層３を介してガラス部材５が重ね合わされた状態で、且つ、ガラス層３が介在する領域に対応する環状部分４ｃでのガラス部材４とガラス部材５との距離が中央部分４ｍ，５ｍ及び外縁部分４ｆ，５ｆでのガラス部材４とガラス部材５との距離よりも大きくなるように、少なくともガラス部材５が変形させられた状態で、ガラス部材４及びガラス部材５を支持する。 In the glass welding apparatus 11, a glass member support portion 14 is configured by the mounting table 12 and the pressing jig 13. Therefore, the glass member support part 14 is in a state where the glass member 5 is superimposed on the glass member 4 on which the glass layer 3 is arranged so as to follow the planned welding region R, and the glass layer 3 is interposed therebetween. The distance between the glass member 4 and the glass member 5 at the annular portion 4c corresponding to the region where the intervenes are larger than the distance between the glass member 4 and the glass member 5 at the central portions 4m and 5m and the outer edge portions 4f and 5f. As described above, the glass member 4 and the glass member 5 are supported in a state where at least the glass member 5 is deformed.

続いて、ガラス部材支持部１４によってガラス部材４，５が支持された状態（すなわち、少なくともガラス部材５が変形させられた状態）で、ガラス溶着装置１１のレーザ光照射部１５を用いて、溶着予定領域Ｒに沿ってレーザ光Ｌの照射領域が相対的に移動するようにガラス層３にレーザ光Ｌを照射する。そして、これにより、溶着予定領域Ｒに沿ってガラス層３及びその周辺部分（ガラス部材４，５の内側表面４ａ，５ａ部分）を溶融させて、ガラス部材４とガラス部材５とを溶着する（第２の工程）。より具体的には、レーザ光Ｌの集光スポットがガラス部材５とガラス層３との界面に位置するように、押圧治具１３及びガラス部材５を介してガラス層３にレーザ光Ｌを照射する。ガラス部材４とガラス部材５とは、溶着予定領域Ｒに沿ってガラス層３及びその周辺部分が溶融・再固化することにより、溶着される。これにより、図１及び図２に示されるように、ガラス溶着体１が得られる。なお、ガラス部材４とガラス部材５との溶着においては、ガラス層３が溶融し、ガラス部材４，５の少なくとも一方が溶融しない場合もある。 Subsequently, welding is performed using the laser beam irradiation unit 15 of the glass welding apparatus 11 in a state where the glass members 4 and 5 are supported by the glass member support portion 14 (that is, at least the glass member 5 is deformed). The glass layer 3 is irradiated with the laser beam L so that the irradiation region of the laser beam L is relatively moved along the scheduled region R. And thereby, the glass layer 3 and its peripheral part (inside surface 4a, 5a part of the glass members 4 and 5) are fuse | melted along the welding plan area | region R, and the glass member 4 and the glass member 5 are welded ( Second step). More specifically, the glass layer 3 is irradiated with the laser light L via the pressing jig 13 and the glass member 5 so that the condensing spot of the laser light L is located at the interface between the glass member 5 and the glass layer 3. To do. The glass member 4 and the glass member 5 are welded by melting and resolidifying the glass layer 3 and its peripheral portion along the planned welding region R. Thereby, as FIG.1 and FIG.2 shows, the glass welded body 1 is obtained. In the welding of the glass member 4 and the glass member 5, the glass layer 3 may melt and at least one of the glass members 4 and 5 may not melt.

このように、レーザ光照射部１５は、溶着予定領域Ｒに沿ってガラス層３を溶融させてガラス部材４とガラス部材５とを溶着するために、ガラス部材支持部１４によってガラス部材４，５が支持された状態で、溶着予定領域Ｒに沿ってレーザ光Ｌの照射領域が相対的に移動するようにガラス層３にレーザ光Ｌを照射する。 Thus, in order to melt the glass layer 3 and weld the glass member 4 and the glass member 5 along the planned welding region R, the laser beam irradiation unit 15 uses the glass members 4 and 5 by the glass member support unit 14. In the state in which the glass layer 3 is supported, the glass layer 3 is irradiated with the laser beam L so that the irradiation region of the laser beam L relatively moves along the planned welding region R.

以上説明したように、ガラス溶着体１を製造するためのガラス溶着方法及びガラス溶着装置１１では、ガラス層３が介在する領域に対応する環状部分４ｃでのガラス部材４とガラス部材５との距離が中央部分４ｍ，５ｍ及び外縁部分４ｆ，５ｆでのガラス部材４とガラス部材５との距離よりも大きくなるように、少なくともガラス部材５を変形させ、その状態で、溶着予定領域Ｒに沿ってガラス層３にレーザ光Ｌを照射することにより、溶着予定領域Ｒに沿ってガラス層３を溶融させてガラス部材４とガラス部材５とを溶着する。これにより、製造されたガラス溶着体１においては、ガラス層３に圧縮応力が生じるようにガラス部材４，５に応力が残留し、ガラス層３に亀裂が発生し難くなる。よって、上述したガラス溶着方法及びガラス溶着装置１１によれば、ガラス層３での亀裂の発生が抑制されたガラス溶着体１を得ることができる。 As described above, in the glass welding method and the glass welding apparatus 11 for manufacturing the glass welded body 1, the distance between the glass member 4 and the glass member 5 at the annular portion 4c corresponding to the region where the glass layer 3 is interposed. At least the glass member 5 is deformed so that the distance is larger than the distance between the glass member 4 and the glass member 5 at the center portions 4m and 5m and the outer edge portions 4f and 5f, and in that state, along the planned welding region R By irradiating the glass layer 3 with the laser beam L, the glass layer 3 is melted along the planned welding region R and the glass member 4 and the glass member 5 are welded. As a result, in the manufactured glass welded body 1, stress remains in the glass members 4 and 5 so that compressive stress is generated in the glass layer 3, and cracks are hardly generated in the glass layer 3. Therefore, according to the glass welding method and the glass welding apparatus 11 described above, the glass welded body 1 in which the occurrence of cracks in the glass layer 3 is suppressed can be obtained.

ここで、図２に示されるように、ガラス溶着体１では、ガラス層３が介在する領域に対応する環状部分４ｃでのガラス部材４とガラス部材５との距離が中央部分４ｍ，５ｍ及び外縁部分４ｆ，５ｆでのガラス部材４とガラス部材５との距離よりも大きくなるように、ガラス部材４，５が変形しているので、ガラス層３に引張応力が生じることが抑制され、ガラス層３に亀裂が発生し難くなる。よって、ガラス溶着体１によれば、ガラス層３での亀裂の発生が抑制される。 Here, as shown in FIG. 2, in the glass welded body 1, the distance between the glass member 4 and the glass member 5 in the annular portion 4 c corresponding to the region where the glass layer 3 is interposed is the central portions 4 m and 5 m and the outer edge. Since the glass members 4 and 5 are deformed so as to be larger than the distance between the glass member 4 and the glass member 5 at the portions 4f and 5f, the generation of tensile stress in the glass layer 3 is suppressed, and the glass layer 3 is less likely to crack. Therefore, according to the glass welded body 1, generation | occurrence | production of the crack in the glass layer 3 is suppressed.

また、上述したガラス溶着方法及びガラス溶着装置１１では、ガラス部材４を載置台１２に載置し、押圧治具１３を用いて、ガラス部材５を載置台１２側に押圧する。これにより、ガラス層３が介在する領域に対応する環状部分４ｃでのガラス部材４とガラス部材５との距離が中央部分４ｍ，５ｍ及び外縁部分４ｆ，５ｆでのガラス部材４とガラス部材５との距離よりも大きくなるように、少なくともガラス部材５を容易に且つ確実に変形させることができる。 Moreover, in the glass welding method and the glass welding apparatus 11 mentioned above, the glass member 4 is mounted in the mounting base 12, and the glass member 5 is pressed to the mounting base 12 side using the pressing jig 13. FIG. Thereby, the distance between the glass member 4 and the glass member 5 in the annular portion 4c corresponding to the region where the glass layer 3 is interposed is the glass member 4 and the glass member 5 in the central portions 4m and 5m and the outer edge portions 4f and 5f. At least the glass member 5 can be easily and reliably deformed so as to be larger than this distance.

また、上述したガラス溶着方法及びガラス溶着装置１１では、レーザ光照射部１５を用いて、押圧治具１３及びガラス部材５を介してガラス層３にレーザ光Ｌを照射する。これにより、溶着予定領域Ｒに沿ってガラス層３にレーザ光Ｌを容易に且つ確実に照射することができる。 In the glass welding method and the glass welding apparatus 11 described above, the laser light L is irradiated onto the glass layer 3 through the pressing jig 13 and the glass member 5 using the laser light irradiation unit 15. Thereby, the laser beam L can be easily and reliably irradiated onto the glass layer 3 along the planned welding region R.

更に、上述したガラス溶着方法及びガラス溶着装置１１では、載置台１２が、ガラス層３が配置されたガラス部材４が載置される平坦面１２ａを有している。そして、押圧治具１３が、溶着予定領域Ｒの内側に位置する領域に対向する凸面１３ａと、溶着予定領域Ｒに対向する凹面１３ｂと、溶着予定領域Ｒの外側において溶着予定領域Ｒに沿う領域に対向する凸面１３ｃと、を有しており、ガラス部材５を押圧する。これにより、ガラス層３が介在する領域に対応する環状部分４ｃでのガラス部材４とガラス部材５との距離が中央部分４ｍ，５ｍ及び外縁部分４ｆ，５ｆでのガラス部材４とガラス部材５との距離よりも大きくなるように、少なくともガラス部材５を変形させる際に、ガラス層３が配置されたガラス部材４の変形が抑制される一方で、ガラス部材５の変形が促進される。そのため、ガラス層３及びガラス部材４に無理な力が生じるのを防止しつつ、ガラス部材５を変形させることができる。 Furthermore, in the glass welding method and the glass welding apparatus 11 described above, the mounting table 12 has a flat surface 12a on which the glass member 4 on which the glass layer 3 is disposed is placed. And the pressing jig 13 is a region along the planned welding region R outside the planned welding region R, a convex surface 13a facing the region located inside the planned welding region R, a concave surface 13b facing the planned welding region R, and the like. And presses the glass member 5. Thereby, the distance between the glass member 4 and the glass member 5 in the annular portion 4c corresponding to the region where the glass layer 3 is interposed is the glass member 4 and the glass member 5 in the central portions 4m and 5m and the outer edge portions 4f and 5f. When the glass member 5 is deformed at least so as to be larger than the distance, the deformation of the glass member 4 on which the glass layer 3 is disposed is suppressed, while the deformation of the glass member 5 is promoted. Therefore, the glass member 5 can be deformed while preventing an excessive force from being generated in the glass layer 3 and the glass member 4.

なお、仮に、平板状の押圧部材を用いてガラス部材５をガラス部材４に押圧し、その状態で、レーザ光Ｌの照射を実施すると、製造されたガラス溶着体においては、ガラス層３が介在する領域の全部においてガラス部材４とガラス部材５との距離が最小となるように、ガラス部材４，５の少なくとも一方が変形してしまう。この場合、ガラス層３に引張応力が生じるようにガラス部材４，５に応力が残留するので、ガラス層３に亀裂が発生し易くなってしまう。 If the glass member 5 is pressed against the glass member 4 using a flat pressing member and the laser beam L is irradiated in this state, the glass layer 3 is interposed in the manufactured glass welded body. At least one of the glass members 4 and 5 is deformed so that the distance between the glass member 4 and the glass member 5 is minimized in the entire region. In this case, since the stress remains in the glass members 4 and 5 so that the tensile stress is generated in the glass layer 3, the glass layer 3 is likely to be cracked.

また、仮に、溶着予定領域Ｒに沿って移動可能な押圧部材を用いて、レーザ光Ｌの照射領域の両側の領域（すなわち、ガラス層３が介在する領域の一部）においてガラス部材４，５の少なくとも一方を変形させつつ、レーザ光Ｌの照射を実施すると、レーザ光Ｌの照射領域が溶着予定領域Ｒの角部を通過する際の押圧部材の移動制御が困難となってしまう。また、製造されたガラス溶着体においては、ガラス部材４，５の少なくとも一方の変形の度合いが、ガラス層３が介在する領域の全部において均一化されず、ガラス部材４，５が歪んでしまう。 Further, suppose that the glass members 4 and 5 are used in the regions on both sides of the irradiation region of the laser beam L (that is, a part of the region where the glass layer 3 is interposed) using a pressing member that can move along the planned welding region R. When the laser beam L is irradiated while deforming at least one of the above, it becomes difficult to control the movement of the pressing member when the irradiation region of the laser beam L passes through the corner portion of the planned welding region R. Moreover, in the manufactured glass welded body, the degree of deformation of at least one of the glass members 4 and 5 is not uniformized in the entire region where the glass layer 3 is interposed, and the glass members 4 and 5 are distorted.

以上、本発明の一実施形態について説明したが、本発明は、上記実施形態に限定されるものではない。例えば、レーザ光吸収性顔料（レーザ光吸収材）は、ガラスフリット（ガラス粉）２自体に含まれていてもよい。また、ガラスフリット（ガラス粉）２は、ガラス部材４，５の融点よりも低い融点を有するものに限定されず、ガラス部材４，５の融点以上の融点を有するものであってもよい。また、溶着予定領域Ｒは、矩形環状に限定されず、環状であれば、他の形状であってもよい。このように、上述したガラス溶着方法、ガラス溶着装置１１及びガラス溶着体１に適用される各構成の形状や材料としては、上述したもの限定されず、様々な形状や材料を適用することができる。 Although one embodiment of the present invention has been described above, the present invention is not limited to the above embodiment. For example, the laser light absorbing pigment (laser light absorbing material) may be contained in the glass frit (glass powder) 2 itself. Further, the glass frit (glass powder) 2 is not limited to one having a melting point lower than the melting point of the glass members 4, 5, and may have a melting point equal to or higher than the melting point of the glass members 4, 5. Moreover, the welding planned area | region R is not limited to a rectangular ring shape, As long as it is cyclic | annular, another shape may be sufficient. As described above, the shape and material of each configuration applied to the glass welding method, the glass welding apparatus 11, and the glass welded body 1 described above are not limited to those described above, and various shapes and materials can be applied. .

また、図７及び図８に示されるように、押圧治具１３は、石英等の光透過性材料からなる平板状の光透過部材１６と、可撓性の光透過性材料からなる袋体１７と、を有するものであってもよい。この場合には、袋体１７をガラス部材５の外側表面５ｂに接触させて、袋体１７内に空気等のガスを供給することにより、ガラス層３が介在する領域に対応する環状部分４ｃでのガラス部材４とガラス部材５との距離が中央部分４ｍ，５ｍ及び外縁部分４ｆ，５ｆでのガラス部材４とガラス部材５との距離よりも大きくなるように、少なくともガラス部材５を変形させることができる。 7 and 8, the pressing jig 13 includes a flat light transmitting member 16 made of a light transmissive material such as quartz, and a bag body 17 made of a flexible light transmissive material. And may have. In this case, the bag 17 is brought into contact with the outer surface 5b of the glass member 5 and a gas such as air is supplied into the bag 17 so that the annular portion 4c corresponding to the region where the glass layer 3 is interposed is provided. At least the glass member 5 is deformed so that the distance between the glass member 4 and the glass member 5 is greater than the distance between the glass member 4 and the glass member 5 at the central portions 4m and 5m and the outer edge portions 4f and 5f. Can do.

また、図９及び図１０に示されるように、押圧治具１３は、石英等の光透過性材料からなる平板状の光透過部材１６と、樹脂等からなる凸部１８，１９と、を有するものであってもよい。凸部１８は、溶着予定領域Ｒの内側に位置する領域に対向しており、凸部１９は、溶着予定領域Ｒの外側において溶着予定領域Ｒに沿う領域に対向している。この場合には、凸部１８，１９をガラス部材５の外側表面５ｂに接触させて、光透過部材１６を載置台１２側に移動させることにより、ガラス層３が介在する領域に対応する環状部分４ｃでのガラス部材４とガラス部材５との距離が中央部分４ｍ，５ｍ及び外縁部分４ｆ，５ｆでのガラス部材４とガラス部材５との距離よりも大きくなるように、少なくともガラス部材５を変形させることができる。なお、ガラス部材５に応力が集中してガラス部材５が損傷するのを防止する観点から、凸部１８，１９の角部は、丸められていることが好ましい。 As shown in FIGS. 9 and 10, the pressing jig 13 includes a flat light transmitting member 16 made of a light transmitting material such as quartz, and convex portions 18 and 19 made of resin or the like. It may be a thing. The convex portion 18 faces a region located inside the planned welding region R, and the convex portion 19 faces a region along the planned welding region R outside the planned welding region R. In this case, the convex portions 18 and 19 are brought into contact with the outer surface 5b of the glass member 5, and the light transmitting member 16 is moved to the mounting table 12 side, whereby an annular portion corresponding to the region where the glass layer 3 is interposed. At least the glass member 5 is deformed so that the distance between the glass member 4 and the glass member 5 at 4c is larger than the distance between the glass member 4 and the glass member 5 at the central portions 4m and 5m and the outer edge portions 4f and 5f. Can be made. In addition, it is preferable that the corner | angular part of the convex parts 18 and 19 is rounded from a viewpoint which prevents that the stress concentrates on the glass member 5 and the glass member 5 is damaged.

また、載置台１２は、溶着予定領域Ｒの内側に位置する領域に対向する第１の凸面と、溶着予定領域Ｒに対向する凹面と、溶着予定領域Ｒの外側において溶着予定領域Ｒに沿う領域に対向する第２の凸面と、を有していてもよい。その場合、押圧治具１３は、凸面１３ａ、凹面１３ｂ及び凸面１３ｃを有していてもよいし、それらの代わりに、平坦面を有していてもよい。また、載置台１２にガラス部材５を載置し、押圧治具１３を用いて、ガラス層３を介してガラス部材５に重ね合わされたガラス部材４を載置台１２側に押圧してもよい。その場合には、レーザ光Ｌの照射を、ガラス部材４を介して実施することになる。このように、溶着予定領域Ｒに沿うようにガラス層３が配置されたガラス部材４に、ガラス層３を介してガラス部材５を重ね合わせ、ガラス層３が介在する領域に対応する環状部分４ｃでのガラス部材４とガラス部材５との距離が中央部分４ｍ，５ｍ及び外縁部分４ｆ，５ｆでのガラス部材４とガラス部材５との距離よりも大きくなるように、ガラス部材４，５の少なくとも一方を変形させることができれば、載置台１２や押圧治具１３の形状等は、上述したものに限定されない。 Further, the mounting table 12 includes a first convex surface facing the region located inside the planned welding region R, a concave surface facing the planned welding region R, and a region along the planned welding region R outside the planned welding region R. And a second convex surface facing the surface. In that case, the pressing jig 13 may have a convex surface 13a, a concave surface 13b, and a convex surface 13c, or may have a flat surface instead. Moreover, the glass member 5 may be mounted on the mounting table 12, and the glass member 4 superimposed on the glass member 5 may be pressed to the mounting table 12 side through the glass layer 3 using the pressing jig 13. In that case, the laser beam L is irradiated through the glass member 4. In this way, the glass member 5 is placed on the glass member 4 on which the glass layer 3 is arranged so as to be along the planned welding region R, and the glass member 5 is overlapped via the glass layer 3, and the annular portion 4c corresponding to the region where the glass layer 3 is interposed. At least the glass members 4 and 5 are arranged such that the distance between the glass member 4 and the glass member 5 is greater than the distance between the glass member 4 and the glass member 5 at the central portions 4m and 5m and the outer edge portions 4f and 5f. As long as one side can be deformed, the shape of the mounting table 12 and the pressing jig 13 is not limited to those described above.

また、図１１に示されるように、複数のガラス部材４を含むガラス基板と、複数のガラス部材５を含むガラス基板とを重ね合わせ、対向するガラス部材４，５ごとに設定された溶着予定領域Ｒに沿ってガラス部材４，５同士を溶着し、その後に、対向するガラス部材４，５ごとにガラス基板を切断するようにしてもよい。ここでは、ガラス部材４，５同士を溶着する際に、溶着予定領域Ｒの内側に位置する領域に対向する平坦な凸面（第１の凸面）２１と、溶着予定領域Ｒの外側において溶着予定領域Ｒに沿う領域に対向する平坦な凸面（第２の凸面）２２と、溶着予定領域Ｒに対向する平坦な凹面（凸面２１と凸面２２との間の面）と、を有する押圧治具を用いて、ガラス部材４，５の一方をガラス部材４，５の他方に押圧する。 Moreover, as shown in FIG. 11, a glass substrate including a plurality of glass members 4 and a glass substrate including a plurality of glass members 5 are overlapped, and a planned welding region is set for each of the opposing glass members 4 and 5. The glass members 4 and 5 may be welded along R, and then the glass substrate may be cut for each of the opposing glass members 4 and 5. Here, when the glass members 4 and 5 are welded to each other, a flat convex surface (first convex surface) 21 facing a region located inside the planned welding region R and a planned welding region outside the planned welding region R. A pressing jig having a flat convex surface (second convex surface) 22 facing the region along R and a flat concave surface (surface between the convex surface 21 and convex surface 22) facing the welding planned region R is used. Then, one of the glass members 4 and 5 is pressed against the other of the glass members 4 and 5.

このとき、凸面２２は、隣り合う溶着予定領域Ｒ，Ｒ間に位置することになるので、凸面２２の面積は、凸面２１の面積に比べて小さくなる。そのため、凸面２２によってガラス部材４，５の一方に付与される圧力は、凸面２１によってガラス部材４，５の一方に付与される圧力に比べて大きくなる。そこで、凸面２１と溶着予定領域Ｒとの間の距離Ｗ１に比べ、凸面２２と溶着予定領域Ｒとの間の距離Ｗ２を小さくすれば、ガラス部材４，５の一方において、溶着予定領域Ｒの内側に位置する領域の変形量と、溶着予定領域Ｒの外側において溶着予定領域Ｒに沿う領域の変形量とを同程度に調整することができる。 At this time, since the convex surface 22 is positioned between the adjacent welding planned regions R and R, the area of the convex surface 22 is smaller than the area of the convex surface 21. Therefore, the pressure applied to one of the glass members 4 and 5 by the convex surface 22 is larger than the pressure applied to one of the glass members 4 and 5 by the convex surface 21. Therefore, if the distance W2 between the convex surface 22 and the planned welding region R is made smaller than the distance W1 between the convex surface 21 and the planned welding region R, one of the glass members 4 and 5 has the planned welding region R. The deformation amount of the region located inside and the deformation amount of the region along the planned welding region R outside the planned welding region R can be adjusted to the same extent.

１…ガラス溶着体、３…ガラス層、４…ガラス部材（第１のガラス部材）、５…ガラス部材（第２のガラス部材）、１１…ガラス溶着装置、１２…載置台、１２ａ…平坦面、１３…押圧治具、１３ａ…凸面（第１の凸面）、１３ｂ…凹面、１３ｃ…凸面（第２の凸面）、１４…ガラス部材支持部、１５…レーザ光照射部、２１…凸面（第１の凸面）、２２…凸面（第２の凸面）、Ｌ…レーザ光。 DESCRIPTION OF SYMBOLS 1 ... Glass welded body, 3 ... Glass layer, 4 ... Glass member (1st glass member), 5 ... Glass member (2nd glass member), 11 ... Glass welding apparatus, 12 ... Mounting stand, 12a ... Flat surface , 13 ... pressing jig, 13a ... convex surface (first convex surface), 13b ... concave surface, 13c ... convex surface (second convex surface), 14 ... glass member support portion, 15 ... laser light irradiation portion, 21 ... convex surface (first surface) 1 convex surface), 22... Convex surface (second convex surface), L... Laser light.

Claims

板状の第１のガラス部材と板状の第２のガラス部材とを溶着してガラス溶着体を製造するためのガラス溶着方法であって、
環状に延在する溶着予定領域に沿うようにガラス層が配置された前記第１のガラス部材に、前記ガラス層を介して前記第２のガラス部材を重ね合わせ、前記ガラス層が介在する領域に対応する環状部分での前記第１のガラス部材と前記第２のガラス部材との距離が中央部分及び外縁部分での前記第１のガラス部材と前記第２のガラス部材との距離よりも大きくなるように、且つ前記環状部分から前記中央部分に向かって前記第１のガラス部材と前記第２のガラス部材との距離が変化する部分の幅が前記環状部分の幅よりも大きくなるように、前記第１のガラス部材及び前記第２のガラス部材の少なくとも一方を変形させる第１の工程と、
前記第１の工程の後に、前記第１のガラス部材及び前記第２のガラス部材の少なくとも一方を変形させた状態で、前記溶着予定領域に沿ってレーザ光の照射領域が相対的に移動するように前記ガラス層に前記レーザ光を照射することにより、前記溶着予定領域に沿って前記ガラス層を溶融させて前記第１のガラス部材と前記第２のガラス部材とを溶着する第２の工程と、を備える、ガラス溶着方法。 A glass welding method for producing a glass welded body by welding a plate-like first glass member and a plate-like second glass member,
The second glass member is overlaid on the first glass member in which the glass layer is arranged so as to extend along the annular welding planned region, and the glass layer is interposed in the region where the glass layer is interposed. The distance between the first glass member and the second glass member at the corresponding annular portion is larger than the distance between the first glass member and the second glass member at the center portion and the outer edge portion. And the width of the portion where the distance between the first glass member and the second glass member changes from the annular portion toward the central portion is larger than the width of the annular portion. A first step of deforming at least one of the first glass member and the second glass member;
After the first step, in a state where at least one of the first glass member and the second glass member is deformed, the irradiation region of the laser beam relatively moves along the planned welding region. Irradiating the glass layer with the laser beam to melt the glass layer along the planned welding region and welding the first glass member and the second glass member; A glass welding method.

前記第１の工程では、前記第１のガラス部材及び前記第２のガラス部材の一方を載置台に載置し、押圧治具を用いて、前記第１のガラス部材及び前記第２のガラス部材の他方を前記載置台側に押圧する、請求項１記載のガラス溶着方法。 In the first step, one of the first glass member and the second glass member is placed on a placing table, and the first glass member and the second glass member are placed using a pressing jig. The glass welding method according to claim 1, wherein the other is pressed toward the mounting table.

前記第２の工程では、前記押圧治具並びに前記第１のガラス部材及び前記第２のガラス部材の前記他方を介して前記ガラス層に前記レーザ光を照射する、請求項２記載のガラス溶着方法。 3. The glass welding method according to claim 2, wherein, in the second step, the laser light is irradiated to the glass layer through the pressing jig and the other of the first glass member and the second glass member. .

前記載置台は、前記第１のガラス部材が載置される平坦面を有し、
前記押圧治具は、前記溶着予定領域の内側に位置する領域に対向する第１の凸面と、前記溶着予定領域に対向する凹面と、前記溶着予定領域の外側において前記溶着予定領域に沿う領域に対向する第２の凸面と、を有し、前記第２のガラス部材を押圧する、請求項２又は３記載のガラス溶着方法。 The mounting table has a flat surface on which the first glass member is mounted,
The pressing jig includes a first convex surface facing a region located inside the planned welding region, a concave surface facing the planned welding region, and a region along the planned welding region outside the planned welding region. The glass welding method according to claim 2, further comprising a second convex surface facing each other and pressing the second glass member.

板状の第１のガラス部材と板状の第２のガラス部材とを溶着してガラス溶着体を製造するためのガラス溶着装置であって、
環状に延在する溶着予定領域に沿うようにガラス層が配置された前記第１のガラス部材に、前記ガラス層を介して前記第２のガラス部材が重ね合わされた状態で、且つ、前記ガラス層が介在する領域に対応する環状部分での前記第１のガラス部材と前記第２のガラス部材との距離が中央部分及び外縁部分での前記第１のガラス部材と前記第２のガラス部材との距離よりも大きくなるように、且つ前記環状部分から前記中央部分に向かって前記第１のガラス部材と前記第２のガラス部材との距離が変化する部分の幅が前記環状部分の幅よりも大きくなるように、前記第１のガラス部材及び前記第２のガラス部材の少なくとも一方が変形させられた状態で、前記第１のガラス部材及び前記第２のガラス部材を支持するガラス部材支持部と、
前記溶着予定領域に沿って前記ガラス層を溶融させて前記第１のガラス部材と前記第２のガラス部材とを溶着するために、前記ガラス部材支持部によって前記第１のガラス部材及び前記第２のガラス部材が支持された状態で、前記溶着予定領域に沿ってレーザ光の照射領域が相対的に移動するように前記ガラス層に前記レーザ光を照射するレーザ光照射部と、を備える、ガラス溶着装置。 A glass welding apparatus for producing a glass welded body by welding a plate-like first glass member and a plate-like second glass member,
The glass layer in a state in which the second glass member is superimposed on the first glass member in which the glass layer is disposed so as to extend along the annular welding planned region. The distance between the first glass member and the second glass member at the annular portion corresponding to the region where the intervenes are between the first glass member and the second glass member at the center portion and the outer edge portion. The width of the portion where the distance between the first glass member and the second glass member changes from the annular portion toward the central portion is larger than the width of the annular portion so as to be larger than the distance. In a state where at least one of the first glass member and the second glass member is deformed, a glass member support portion that supports the first glass member and the second glass member,
In order to fuse the first glass member and the second glass member by melting the glass layer along the planned welding region, the first glass member and the second glass member are supported by the glass member support portion. A laser beam irradiation unit configured to irradiate the glass layer with the laser beam so that an irradiation region of the laser beam relatively moves along the planned welding region in a state where the glass member is supported. Welding equipment.

前記ガラス部材支持部は、前記第１のガラス部材及び前記第２のガラス部材の一方が載置される載置台と、前記第１のガラス部材及び前記第２のガラス部材の他方を前記載置台側に押圧する押圧治具と、を有する、請求項５記載のガラス溶着装置。 The glass member support portion includes a mounting table on which one of the first glass member and the second glass member is mounted, and the other of the first glass member and the second glass member described above. The glass welding apparatus according to claim 5, further comprising a pressing jig that presses the side.

前記レーザ光照射部は、前記押圧治具並びに前記第１のガラス部材及び前記第２のガラス部材の前記他方を介して前記ガラス層に前記レーザ光を照射する、請求項６記載のガラス溶着装置。 The glass welding device according to claim 6, wherein the laser beam irradiation unit irradiates the glass layer with the laser beam through the pressing jig and the other of the first glass member and the second glass member. .

前記載置台は、前記第１のガラス部材が載置される平坦面を有し、
前記押圧治具は、前記溶着予定領域の内側に位置する領域に対向する第１の凸面と、前記溶着予定領域に対向する凹面と、前記溶着予定領域の外側において前記溶着予定領域に沿う領域に対向する第２の凸面と、を有し、前記第２のガラス部材を押圧する、請求項６又は７記載のガラス溶着装置。 The mounting table has a flat surface on which the first glass member is mounted,
The pressing jig includes a first convex surface facing a region located inside the planned welding region, a concave surface facing the planned welding region, and a region along the planned welding region outside the planned welding region. The glass welding apparatus of Claim 6 or 7 which has a 2nd convex surface which opposes, and presses the said 2nd glass member.

板状の第１のガラス部材と、
前記第１のガラス部材に重ね合わされた板状の第２のガラス部材と、
前記第１のガラス部材と前記第２のガラス部材とを溶着した状態で、前記第１のガラス部材と前記第２のガラス部材との間において環状に延在するガラス層と、を備え、
前記ガラス層が介在する領域に対応する環状部分での前記第１のガラス部材と前記第２のガラス部材との距離が中央部分及び外縁部分での前記第１のガラス部材と前記第２のガラス部材との距離よりも大きくなるように、且つ前記環状部分から前記中央部分に向かって前記第１のガラス部材と前記第２のガラス部材との距離が変化する部分の幅が前記環状部分の幅よりも大きくなるように、前記第１のガラス部材及び前記第２のガラス部材の少なくとも一方が変形している、ガラス溶着体。 A plate-like first glass member;
A plate-like second glass member superimposed on the first glass member;
A glass layer extending annularly between the first glass member and the second glass member in a state in which the first glass member and the second glass member are welded,
The distance between the first glass member and the second glass member at the annular portion corresponding to the region where the glass layer is interposed is the first glass member and the second glass at the central portion and the outer edge portion. The width of the portion where the distance between the first glass member and the second glass member changes from the annular portion toward the central portion so as to be larger than the distance to the member is the width of the annular portion. A glass welded body in which at least one of the first glass member and the second glass member is deformed so as to be larger .

板状の第１のガラス部材と板状の第２のガラス部材とを溶着してガラス溶着体を製造するためのガラス溶着方法であって、
環状に延在する溶着予定領域に沿うようにガラス層が配置された前記第１のガラス部材に、前記ガラス層を介して前記第２のガラス部材を重ね合わせ、前記ガラス層が介在する領域に対応する環状部分において前記第１のガラス部材と前記第２のガラス部材との距離が最大となるように、且つ前記環状部分から中央部分に向かって前記第１のガラス部材と前記第２のガラス部材との距離が変化する部分の幅が前記環状部分の幅よりも大きくなるように、前記第１のガラス部材及び前記第２のガラス部材の少なくとも一方を変形させる第１の工程と、
前記第１の工程の後に、前記第１のガラス部材及び前記第２のガラス部材の少なくとも一方を変形させた状態で、前記溶着予定領域に沿ってレーザ光の照射領域が相対的に移動するように前記ガラス層に前記レーザ光を照射することにより、前記溶着予定領域に沿って前記ガラス層を溶融させて前記第１のガラス部材と前記第２のガラス部材とを溶着する第２の工程と、を備える、ガラス溶着方法。 A glass welding method for producing a glass welded body by welding a plate-like first glass member and a plate-like second glass member,
The second glass member is overlaid on the first glass member in which the glass layer is arranged so as to extend along the annular welding planned region, and the glass layer is interposed in the region where the glass layer is interposed. The first glass member and the second glass so that the distance between the first glass member and the second glass member is maximized in the corresponding annular portion and from the annular portion toward the central portion. A first step of deforming at least one of the first glass member and the second glass member such that the width of the portion where the distance to the member changes is larger than the width of the annular portion ;
After the first step, in a state where at least one of the first glass member and the second glass member is deformed, the irradiation region of the laser beam relatively moves along the planned welding region. Irradiating the glass layer with the laser beam to melt the glass layer along the planned welding region and welding the first glass member and the second glass member; A glass welding method.

板状の第１のガラス部材と板状の第２のガラス部材とを溶着してガラス溶着体を製造するためのガラス溶着装置であって、
環状に延在する溶着予定領域に沿うようにガラス層が配置された前記第１のガラス部材に、前記ガラス層を介して前記第２のガラス部材が重ね合わされた状態で、且つ、前記ガラス層が介在する領域に対応する環状部分において前記第１のガラス部材と前記第２のガラス部材との距離が最大となるように、且つ前記環状部分から中央部分に向かって前記第１のガラス部材と前記第２のガラス部材との距離が変化する部分の幅が前記環状部分の幅よりも大きくなるように、前記第１のガラス部材及び前記第２のガラス部材の少なくとも一方が変形させられた状態で、前記第１のガラス部材及び前記第２のガラス部材を支持するガラス部材支持部と、
前記溶着予定領域に沿って前記ガラス層を溶融させて前記第１のガラス部材と前記第２のガラス部材とを溶着するために、前記ガラス部材支持部によって前記第１のガラス部材及び前記第２のガラス部材が支持された状態で、前記溶着予定領域に沿ってレーザ光の照射領域が相対的に移動するように前記ガラス層に前記レーザ光を照射するレーザ光照射部と、を備える、ガラス溶着装置。 A glass welding apparatus for producing a glass welded body by welding a plate-like first glass member and a plate-like second glass member,
The glass layer in a state in which the second glass member is superimposed on the first glass member in which the glass layer is disposed so as to extend along the annular welding planned region. The first glass member and the first glass member so that the distance between the first glass member and the second glass member is maximized in the annular portion corresponding to the region where the intermediate portion is interposed, and from the annular portion toward the central portion. A state in which at least one of the first glass member and the second glass member is deformed so that the width of the portion where the distance to the second glass member changes is larger than the width of the annular portion. And the glass member support part which supports the 1st glass member and the 2nd glass member,
In order to fuse the first glass member and the second glass member by melting the glass layer along the planned welding region, the first glass member and the second glass member are supported by the glass member support portion. A laser beam irradiation unit configured to irradiate the glass layer with the laser beam so that an irradiation region of the laser beam relatively moves along the planned welding region in a state where the glass member is supported. Welding equipment.

板状の第１のガラス部材と、
前記第１のガラス部材に重ね合わされた板状の第２のガラス部材と、
前記第１のガラス部材と前記第２のガラス部材とを溶着した状態で、前記第１のガラス部材と前記第２のガラス部材との間において環状に延在するガラス層と、を備え、
前記ガラス層が介在する領域に対応する環状部分において前記第１のガラス部材と前記第２のガラス部材との距離が最大となるように、且つ前記環状部分から中央部分に向かって前記第１のガラス部材と前記第２のガラス部材との距離が変化する部分の幅が前記環状部分の幅よりも大きくなるように、前記第１のガラス部材及び前記第２のガラス部材の少なくとも一方が変形している、ガラス溶着体。 A plate-like first glass member;
A plate-like second glass member superimposed on the first glass member;
A glass layer extending annularly between the first glass member and the second glass member in a state in which the first glass member and the second glass member are welded,
In the annular portion corresponding to the region where the glass layer is interposed, the first glass member and the second glass member have a maximum distance from the annular portion toward the central portion. At least one of the first glass member and the second glass member is deformed so that the width of the portion where the distance between the glass member and the second glass member changes is larger than the width of the annular portion. The glass welded body.