JP5980110B2 - Diffusion bonding jig and diffusion bonding method - Google Patents

Diffusion bonding jig and diffusion bonding method Download PDF

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JP5980110B2
JP5980110B2 JP2012287026A JP2012287026A JP5980110B2 JP 5980110 B2 JP5980110 B2 JP 5980110B2 JP 2012287026 A JP2012287026 A JP 2012287026A JP 2012287026 A JP2012287026 A JP 2012287026A JP 5980110 B2 JP5980110 B2 JP 5980110B2
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diffusion bonding
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敬之 中山
敬之 中山
大輔 野本
大輔 野本
卓 関谷
卓 関谷
圭佑 西本
圭佑 西本
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Mitsubishi Electric Corp
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Description

本発明は、拡散接合用治具と、この治具を用いた拡散接合方法に関する。   The present invention relates to a diffusion bonding jig and a diffusion bonding method using the jig.

内部に冷媒の流路を有するヒートシンクの製造において、複数の被接合部材（母材）を接合する方法として拡散接合が行われている。拡散接合は、真空または不活性雰囲気中で加圧機構により被接合部材を加圧保持した状態で、母材の融点よりも低い温度で加熱することにより、接合面に生じる原子の拡散を利用して接合する溶接方法である。母材としては、アルミニウム、銅、ニッケル、ステンレス、チタン等の金属が用いられる。   In the manufacture of a heat sink having a refrigerant flow path therein, diffusion bonding is performed as a method of bonding a plurality of members to be bonded (base materials). Diffusion bonding uses the diffusion of atoms generated on the bonding surface by heating at a temperature lower than the melting point of the base material in a state where the member to be bonded is pressurized and held in a vacuum or inert atmosphere. Welding method. As the base material, metals such as aluminum, copper, nickel, stainless steel and titanium are used.

例えば特許文献１では、被接合部材を接合するロットごとに当て板を挟んで重ね、さらにそれらの上下にスペーサーを介して基礎と押し板で挟むことによって、被接合部材の加圧を行う拡散接合方法が提示されている。この例では、押し板の上部に設置された耐熱ばねの圧縮量を調節することにより、加圧力を調整している。   For example, in Patent Document 1, diffusion bonding is performed in which pressure is applied to a member to be bonded by sandwiching a backing plate for each lot to which the members to be bonded are bonded, and further sandwiching a base plate and a pressing plate via spacers above and below them. A method is presented. In this example, the applied pressure is adjusted by adjusting the amount of compression of the heat-resistant spring installed on the upper part of the push plate.

また、例えば特許文献２では、被接合部材を治具（カーボンダイ）で挟み込み、エアーまたは油圧で駆動できるシリンダーを用いて加圧する機構を有する高加圧拡散接合装置が提示されている。この例では、カーボンダイからなる治具の間にカーボンシートを挟み込む構成とすることで、被接合部材の寸法精度に加圧がならう構造になっている。また、被接合部材が高温状態になった場合に寸法変化を起こしても、カーボンシートが変形し、安定した加圧が実現される。   Further, for example, Patent Document 2 proposes a high pressure diffusion bonding apparatus having a mechanism in which a member to be bonded is sandwiched with a jig (carbon die) and pressurized using a cylinder that can be driven by air or hydraulic pressure. In this example, a structure in which a carbon sheet is sandwiched between jigs made of a carbon die is configured such that pressure is applied to the dimensional accuracy of the members to be joined. Moreover, even if a dimensional change occurs when the member to be joined is in a high temperature state, the carbon sheet is deformed and stable pressurization is realized.

特許第２５４０７７５号公報Japanese Patent No. 2540775 特開２００８−３００９７号公報JP 2008-30097 A

上記のような拡散接合においては、拡散接合の初期において、接合面に隙間がないように被接合部材の接合面を十分に密着させることが重要である。そのためには、接合面の凹凸が変形する程度の圧力を被接合部材に加える必要がある。しかしながら、従来技術では、接合面の外側にスペースがあるため、接合面の中心部に比べて端部では加圧による原子の移動抵抗が小さくなり、材料が横に広がりやすく厚み方向の変形量が大きくなる。その結果、端部は中心部に比べて面圧が小さくなり、密着が十分でない（あるいは密着していない）という事態が発生し、接合状態が悪くなるという問題があった。   In the diffusion bonding as described above, it is important that the bonding surface of the members to be bonded is sufficiently adhered at the initial stage of the diffusion bonding so that there is no gap in the bonding surface. For this purpose, it is necessary to apply pressure to the member to be joined to such an extent that the unevenness of the joining surface is deformed. However, in the prior art, since there is a space outside the joint surface, the resistance of atom movement due to pressure is smaller at the end than at the center of the joint surface, and the material tends to spread laterally, and the amount of deformation in the thickness direction is small. growing. As a result, the end portion has a smaller surface pressure than the center portion, and there is a problem that the contact state is not sufficient (or is not in close contact), resulting in a poor bonding state.

特許文献１に記載された拡散接合法では、カーボン等の平板を介して被接合部材を加圧しているため、上記に述べた理由により接合面の端部の面圧が小さくなり、接合面の端部で接合状態が悪くなる。また、特許文献２に記載された拡散接合法においても、カーボンダイからなる治具の間にカーボンシートを挟み込み、加圧の均一化を図っているが、被接合部材を直接加圧する治具は剛体のカーボンダイであるため、上記の問題点は解消されず、接合面の端部で接合状態が悪くなる。   In the diffusion bonding method described in Patent Document 1, since the member to be bonded is pressurized through a flat plate made of carbon or the like, the surface pressure at the end of the bonding surface is reduced for the reason described above, and the bonding surface The joining state becomes worse at the end. In the diffusion bonding method described in Patent Document 2, a carbon sheet is sandwiched between jigs made of a carbon die to achieve uniform pressurization. Since it is a rigid carbon die, the above-mentioned problems are not solved, and the joining state becomes worse at the end of the joining surface.

さらに、拡散接合により形成される接合体が、内部に冷媒の流路を有するヒートシンクのような中空構造である場合、カーボンや金属等の剛体からなる治具を介して被接合部材を加圧すると、中空部の上下の表面が凹む変形が生じ、不良となる問題があった。   Furthermore, when the joined body formed by diffusion joining has a hollow structure such as a heat sink having a coolant channel therein, when the member to be joined is pressurized via a jig made of a rigid body such as carbon or metal. There is a problem that the upper and lower surfaces of the hollow portion are deformed to be recessed, resulting in a defect.

本発明は、上記のような問題を解決するためになされたものであり、その第１の目的は、接合面端部の加圧不足を解消し、接合面全体に均一な加圧が得られる拡散接合用治具及び拡散接合方法を提供することである。   The present invention has been made in order to solve the above-described problems, and a first object of the present invention is to eliminate insufficient pressurization at the end of the joint surface and to obtain uniform pressurization over the entire joint surface. It is to provide a diffusion bonding jig and a diffusion bonding method.

また、その第２の目的は、接合体が中空構造である場合に、中空部の上下の表面が凹む変形が生じない拡散接合用治具及び拡散接合方法を提供することである。   A second object of the present invention is to provide a diffusion bonding jig and a diffusion bonding method that do not cause deformation in which the upper and lower surfaces of the hollow portion are recessed when the bonded body has a hollow structure.

本発明に係る拡散接合用治具は、真空または不活性雰囲気中で複数の被接合部材を上下方向に重ね合わせて加熱及び加圧し、所定形状の中空部を有する接合体を形成する拡散接合において用いられる拡散接合用治具であって、複数の被接合部材の最上面と最下面に直に接するように配置される弾性体からなるシート状治具と、シート状治具を介して複数の被接合部材を上下から挟むように配置される剛体からなる板状治具を備え、シート状治具は、中空部に該当する部分に、所定形状と相似する形状の穴を有するものである。 The diffusion bonding jig according to the present invention is a diffusion bonding in which a plurality of members to be bonded are vertically stacked and heated and pressed in a vacuum or an inert atmosphere to form a bonded body having a hollow portion of a predetermined shape . A diffusion bonding jig to be used, comprising: a sheet-shaped jig made of an elastic body arranged so as to be in direct contact with the uppermost surface and the lowermost surface of a plurality of members to be bonded; A plate-like jig made of a rigid body is arranged so as to sandwich the member to be joined from above and below , and the sheet-like jig has a hole having a shape similar to a predetermined shape in a portion corresponding to the hollow portion .

また、真空または不活性雰囲気中で複数の被接合部材を上下方向に重ね合わせて加熱及び加圧し、所定形状の中空部を有する接合体を形成する拡散接合において用いられる拡散接合用治具であって、複数の被接合部材の最上面と最下面に直に接するように配置される弾性体からなるシート状治具と、シート状治具を介して複数の被接合部材を上下から挟むように配置される剛体からなる板状治具を備え、板状治具は、中空部に該当する部分に、所定形状と相似する形状の穴を有するものである。 Further, the diffusion bonding jig is used in diffusion bonding in which a plurality of members to be bonded are heated and pressed in a vertical direction in a vacuum or an inert atmosphere to form a bonded body having a hollow portion having a predetermined shape. A sheet-like jig made of an elastic body arranged so as to be in direct contact with the uppermost surface and the lowermost face of the plurality of members to be joined, and the plurality of members to be joined from above and below via the sheet-like jig. A plate-shaped jig made of a rigid body is provided , and the plate-shaped jig has a hole having a shape similar to a predetermined shape in a portion corresponding to the hollow portion .

また、本発明に係る拡散接合方法は、真空または不活性雰囲気中で複数の被接合部材を上下方向に重ね合わせて加熱及び加圧し、所定形状の中空部を有する接合体を形成する拡散接合方法であって、複数の被接合部材の最上面と最下面に直に接するように弾性体からなるシート状治具を配置し、シート状治具を介して複数の被接合部材を剛体からなる板状治具で上下から挟み込み、加圧機構により加圧して拡散接合する工程を含み、シート状治具または板状治具は、中空部に該当する部分に、所定形状と相似する形状の穴を有するものである。 Further, the diffusion bonding method according to the present invention is a diffusion bonding method in which a plurality of members to be bonded are stacked in a vertical direction in a vacuum or an inert atmosphere and heated and pressed to form a bonded body having a hollow portion of a predetermined shape. A sheet-like jig made of an elastic body is arranged so as to be in direct contact with the uppermost and lowermost surfaces of the plurality of members to be joined, and the plurality of members to be joined are made of rigid bodies via the sheet-like jig. Including a step of sandwiching from above and below with a jig and pressurizing and diffusion bonding with a pressurizing mechanism . The sheet-like jig or plate-like jig has a hole having a shape similar to a predetermined shape in a portion corresponding to the hollow portion. It is what you have .

本発明に係る拡散接合用治具及び拡散接合方法によれば、複数の被接合部材の最上面と最下面に直に接するように弾性体からなるシート状治具を配置するようにしたので、加圧による被接合部材の変形に倣ってシート状治具が変形することにより、接合面全体において加圧力が均一化され、接合面端部の加圧力不足による接合不良の発生を抑制することができる。   According to the diffusion bonding jig and the diffusion bonding method according to the present invention, since the sheet-shaped jig made of an elastic body is arranged so as to be in direct contact with the uppermost surface and the lowermost surface of the plurality of members to be bonded, By deforming the sheet-shaped jig following the deformation of the member to be joined due to pressurization, the applied pressure is made uniform over the entire bonded surface, and the occurrence of poor bonding due to insufficient applied pressure at the end of the bonded surface can be suppressed. it can.

また、接合体が所定形状の中空部を有するものであり、シート状治具または板状治具の中空部に該当する部分に、所定形状と相似する形状の穴を設けているので、中空部の上下の表面に対する加圧力が緩和され、形成された接合体において中空部の上下の表面が凹む変形を抑制することができる。   In addition, the joined body has a hollow portion having a predetermined shape, and a hole having a shape similar to the predetermined shape is provided in a portion corresponding to the hollow portion of the sheet-like jig or plate-like jig. The pressure applied to the upper and lower surfaces of the hollow portion is relieved, and deformation of the upper and lower surfaces of the hollow portion indented in the formed joined body can be suppressed.

本発明の実施の形態１に係る拡散接合用治具及び被接合部材を示す斜視図である。It is a perspective view which shows the jig | tool for diffusion bonding and to-be-joined member which concern on Embodiment 1 of this invention. 本発明の実施の形態１に係る拡散接合用治具を用いた拡散接合方法を示す断面図である。It is sectional drawing which shows the diffusion bonding method using the jig | tool for diffusion bonding which concerns on Embodiment 1 of this invention. 本発明の実施の形態１に係る拡散接合用治具を用いた拡散接合方法を示す断面図である。It is sectional drawing which shows the diffusion bonding method using the jig | tool for diffusion bonding which concerns on Embodiment 1 of this invention. 本発明の実施の形態２に係る拡散接合用治具及び被接合部材を示す斜視図である。It is a perspective view which shows the jig | tool for diffusion bonding which concerns on Embodiment 2 of this invention, and a to-be-joined member. 本発明の実施の形態２に係る拡散接合用治具を用いた拡散接合方法を示す断面図である。It is sectional drawing which shows the diffusion bonding method using the jig | tool for diffusion bonding which concerns on Embodiment 2 of this invention. 本発明の実施の形態２に係る拡散接合用治具を用いた拡散接合方法を示す断面図である。It is sectional drawing which shows the diffusion bonding method using the jig | tool for diffusion bonding which concerns on Embodiment 2 of this invention.

実施の形態１．
以下に、本発明の実施の形態１に係る拡散接合用治具及びこの治具を用いた拡散接合方法について、図面に基づいて説明する。図１は、本実施の形態１に係る拡散接合用治具及び被接合部材を示す斜視図、図２は本実施の形態１に係る拡散接合用治具を用いた拡散接合方法を示す断面図である。なお、図中、同一、相当部分には同一符号を付している。 Embodiment 1 FIG.
Hereinafter, a diffusion bonding jig and a diffusion bonding method using the jig according to Embodiment 1 of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view illustrating a diffusion bonding jig and a member to be bonded according to the first embodiment, and FIG. 2 is a cross-sectional view illustrating a diffusion bonding method using the diffusion bonding jig according to the first embodiment. It is. In the drawing, the same and corresponding parts are denoted by the same reference numerals.

本実施の形態１に係る拡散接合用治具は、真空または不活性雰囲気中で複数の被接合部材を上下方向に重ね合わせて加熱及び加圧する拡散接合において用いられる治具である。本実施の形態１では、拡散接合により形成される接合体として、内部に冷媒の流路を有する中空構造のヒートシンクを例に挙げて説明する。   The diffusion bonding jig according to the first embodiment is a jig used in diffusion bonding that heats and pressurizes a plurality of members to be bonded in a vertical direction in a vacuum or an inert atmosphere. In the first embodiment, a hollow heat sink having a coolant channel therein will be described as an example of a bonded body formed by diffusion bonding.

図１に示すように、被接合部材１０は、第１の被接合部材１１、第２の被接合部材１２、第３の被接合部材１３を含み、それらが上下方向に重ね合わされ接合されることにより、所定形状の中空部を有するヒートシンクが形成される。図１に示す例では、第１の被接合部材１１は冷媒の流入口用穴１４と排出口用穴１５を有し、第２の被接合部材１２は流路を形成するための流路用穴１６を有している。   As shown in FIG. 1, the member to be bonded 10 includes a first member to be bonded 11, a second member to be bonded 12, and a third member to be bonded 13, which are overlapped and bonded in the vertical direction. Thus, a heat sink having a hollow portion with a predetermined shape is formed. In the example shown in FIG. 1, the first member 11 has a refrigerant inlet hole 14 and a discharge hole 15, and the second member 12 is used for a flow path for forming a flow path. A hole 16 is provided.

また、本実施の形態１に係る拡散接合用治具は、上側治具１Ａと下側治具１Ｂからなり、上側治具１Ａは、板状治具である当て板２Ａとシート状治具３Ａを備えている。同様に、下側治具１Ｂは、当て板２Ｂとシート状治具３Ｂを備えている。   The diffusion bonding jig according to the first embodiment includes an upper jig 1A and a lower jig 1B. The upper jig 1A is a plate-shaped jig 2A and a sheet-shaped jig 3A. It has. Similarly, the lower jig 1B includes a backing plate 2B and a sheet-like jig 3B.

弾性体からなるシート状治具３Ａ、３Ｂは、被接合部材１０の最上面と最下面に直に接するように配置される。また、剛体からなる当て板２Ａ、２Ｂは、シート状治具３Ａ、３Ｂを介して被接合部材１０を上下から挟むように配置される。シート状治具３Ａ、３Ｂとしては、拡散接合時の温度に対して耐熱性があり、加圧により弾性が失われない材料であれば良く、例えばカーボンシートが好適である。また、当て板２Ａ、２Ｂとしては、拡散接合時の温度に対して耐熱性があり、加圧により破損しない強度を有する材料であれば良く、カーボンまたは金属からなる板材が用いられる。   The sheet-like jigs 3A and 3B made of an elastic body are arranged so as to be in direct contact with the uppermost surface and the lowermost surface of the member 10 to be joined. Further, the contact plates 2A and 2B made of a rigid body are arranged so as to sandwich the member to be joined 10 from above and below via the sheet-like jigs 3A and 3B. As the sheet-like jigs 3A and 3B, any material may be used as long as it is heat resistant to the temperature at the time of diffusion bonding and does not lose elasticity by pressurization. For example, a carbon sheet is suitable. Moreover, as the contact plates 2A and 2B, any material may be used as long as it is heat resistant to the temperature at the time of diffusion bonding and has a strength that is not damaged by pressurization, and a plate made of carbon or metal is used.

さらに、シート状治具３Ａ、３Ｂは、ヒートシンクの所定形状の中空部（図１では第２の被接合部材１２に設けられた流路用穴１６）に該当する部分に、該中空部と相似する形状の穴４Ａ、４Ｂを有している。これらの穴４Ａ、４Ｂを設けることにより、第１の被接合部材１１及び第３の被接合部材１３の流路用穴１６に該当する部分に対する加圧力が緩和され、完成したヒートシンクにおいて流路用穴１６の上下部分の表面が凹む変形を抑制することができる。   Further, the sheet-like jigs 3A and 3B are similar to the hollow portion at a portion corresponding to the hollow portion of the predetermined shape of the heat sink (the flow path hole 16 provided in the second bonded member 12 in FIG. 1). The holes 4A and 4B are shaped. By providing these holes 4A and 4B, the pressure applied to the portions corresponding to the flow path holes 16 of the first member to be bonded 11 and the third member to be bonded 13 is relieved, and the flow heat is applied to the completed heat sink. It is possible to suppress deformation in which the surfaces of the upper and lower portions of the hole 16 are recessed.

本実施の形態１に係る拡散接合方法について説明する。第１の被接合部材１１、第２の被接合部材１２、及び第３の被接合部材を上下方向に重ね合わせ、炉の中で真空加熱する。この時の加熱温度は、被接合部材１０の金属の融点より低い温度とする。複数の被接合部材１０の最上面と最下面に直に接するように弾性体のカーボンからなるシート状治具３Ａ、３Ｂを配置し、さらに、シート状治具３Ａ、３Ｂを介して複数の被接合部材１０を当て板２Ａ、２Ｂで上下から挟み込んだ状態で、バネ、錘、サーボ等を用いた加圧機構２０により鉛直方向に加圧して拡散接合する。   The diffusion bonding method according to the first embodiment will be described. The 1st to-be-joined member 11, the 2nd to-be-joined member 12, and the 3rd to-be-joined member are piled up and down, and are vacuum-heated in a furnace. The heating temperature at this time is lower than the melting point of the metal of the member to be bonded 10. The sheet-like jigs 3A and 3B made of elastic carbon are arranged so as to be in direct contact with the uppermost and lowermost faces of the plurality of members to be joined 10, and a plurality of pieces to be joined via the sheet-like jigs 3A and 3B. In a state where the joining member 10 is sandwiched from above and below by the contact plates 2A and 2B, the joining member 10 is subjected to diffusion joining by pressing in the vertical direction by the pressurizing mechanism 20 using a spring, a weight, a servo, or the like.

一般に、拡散接合においては、被接合部材の接合面の外側にスペースがあるため、接合面の中心部に比べて端部では加圧による原子の移動抵抗が小さくなり、材料が横に広がりやすく厚み方向の変形量が大きくなる。その結果、端部は中心部に比べて面圧が小さくなり加圧力不足になりやすい。これに対し、本実施の形態１に係る拡散接合用治具は、被接合部材１０の最上面と最下面に弾性体のカーボンシートからなるシート状治具３Ａ、３Ｂを配置しており、加圧による被接合部材１０の変形に倣ってシート状治具３Ａ、３Ｂが変形することにより、接合面全体において加圧力が均一化される。   In general, in diffusion bonding, since there is a space outside the bonding surface of the member to be bonded, the resistance to atom movement due to pressure is smaller at the end than at the center of the bonding surface, and the material tends to spread laterally. The amount of deformation in the direction increases. As a result, the end portion has a smaller surface pressure than the center portion, and the pressure is likely to be insufficient. On the other hand, in the diffusion bonding jig according to the first embodiment, sheet-like jigs 3A and 3B made of an elastic carbon sheet are arranged on the uppermost surface and the lowermost surface of the member 10 to be joined. By deforming the sheet-like jigs 3A and 3B following the deformation of the member to be joined 10 due to the pressure, the applied pressure is made uniform over the entire joining surface.

なお、図１及び図２では、接合体として１つのヒートシンクを形成する場合を示したが、図３に示すように、複数の接合体を同時に形成する場合にも、本実施の形態１に係る拡散接合用治具は適用可能である。図３に示す例では、被接合部材１０ａ、１０ｂ、１０ｃは、それぞれ第１の被接合部材１１ａ、１１ｂ、１１ｃ、第２の被接合部材１２ａ、１２ｂ、１２ｃ、第３の被接合部材１３ａ、１３ｂ、１３ｃを含んでいる。   1 and FIG. 2 show the case where one heat sink is formed as a joined body. However, as shown in FIG. 3, the present embodiment 1 also relates to the case where a plurality of joined bodies are formed simultaneously. Diffusion bonding jigs are applicable. In the example shown in FIG. 3, the members to be joined 10a, 10b, and 10c are the first members to be joined 11a, 11b, and 11c, the second members to be joined 12a, 12b, and 12c, the third member to be joined 13a, 13b and 13c are included.

また、複数の接合体を形成する場合の拡散接合用治具としては、図２と同様の上側治具１Ａと下側治具１Ｂに加え、中間治具１Ｃ、１Ｄが必要となる。中間治具１Ｃ、１Ｄは、上側治具１Ａと下側治具１Ｂの両方の役割を担うものであるため、当て板２Ｃ（２Ｄ）の両面にシート状治具３Ｃ（３Ｄ）がそれぞれ配置される。シート状治具３Ｃ、３Ｄは、ヒートシンクの流路用穴１６ａ、１６ｂ、１６ｃと相似する形状の穴４Ｃ、４Ｄをそれぞれ有している。   Further, as diffusion diffusion jigs for forming a plurality of joined bodies, intermediate jigs 1C and 1D are required in addition to upper jig 1A and lower jig 1B similar to those in FIG. Since the intermediate jigs 1C and 1D serve as both the upper jig 1A and the lower jig 1B, the sheet-like jigs 3C (3D) are respectively arranged on both sides of the backing plate 2C (2D). The The sheet-like jigs 3C and 3D respectively have holes 4C and 4D having shapes similar to the flow passage holes 16a, 16b and 16c of the heat sink.

以上のように、本実施の形態１に係る拡散接合用治具及びこれを用いた拡散接合方法によれば、被接合部材１０の最上面と最下面に直に接するように弾性体のカーボンシートからなるシート状治具３Ａ、３Ｂを配置し、これらのシート状治具３Ａ、３Ｂを介して被接合部材１０を上下から挟むように当て板２Ａ、２Ｂを配置しているので、加圧による被接合部材１０の変形に倣ってシート状治具３Ａ、３Ｂが変形することにより、接合面全体において加圧力が均一化される。これにより、接合面端部の加圧力不足による接合不良の発生を抑制することができ、歩留まりが向上する。   As described above, according to the diffusion bonding jig and the diffusion bonding method using the same according to the first embodiment, the elastic carbon sheet is in direct contact with the uppermost surface and the lowermost surface of the member 10 to be bonded. Since the sheet-like jigs 3A and 3B are arranged and the contact plates 2A and 2B are arranged so as to sandwich the member 10 to be joined from above and below via the sheet-like jigs 3A and 3B, By deforming the sheet-like jigs 3A and 3B following the deformation of the member to be bonded 10, the applied pressure is made uniform over the entire bonding surface. Thereby, generation | occurrence | production of the joining defect by insufficient pressurization of a joining surface edge part can be suppressed, and a yield improves.

さらに、シート状治具３Ａ、３Ｂに、ヒートシンクの中空部である流路用穴１６と相似する形状の穴４Ａ、４Ｂを設けているので、第１の被接合部材１１及び第３の被接合部材１３の流路用穴１６に該当する部分に対する加圧力が緩和され、完成したヒートシンクにおいて流路用穴１６の上下部分の表面が凹む変形を抑制することができ、歩留まりが向上する。   Further, since the sheet-like jigs 3A and 3B are provided with holes 4A and 4B having a shape similar to the channel hole 16 which is the hollow portion of the heat sink, the first member 11 and the third member to be joined are provided. The pressure applied to the portion corresponding to the channel hole 16 of the member 13 is relieved, so that the deformation of the surface of the upper and lower portions of the channel hole 16 in the completed heat sink can be suppressed, and the yield is improved.

実施の形態２．
図４は、本発明の実施の形態２に係る拡散接合用治具及び被接合部材を示す斜視図、図５は本実施の形態２に係る拡散接合用治具を用いた拡散接合方法を示す断面図である。図中、同一、相当部分には同一符号を付している。本実施の形態２において拡散接合により形成される接合体は、上記実施の形態１と同様のヒートシンクであり、被接合部材１０は、第１の被接合部材１１、第２の被接合部材１２、第３の被接合部材１３を含んでいる。なお、被接合部材１０の構成と、本実施の形態２に係る拡散接合方法は、上記実施の形態１と同様であるので説明を省略する。 Embodiment 2. FIG.
FIG. 4 is a perspective view showing a diffusion bonding jig and a member to be bonded according to the second embodiment of the present invention, and FIG. 5 shows a diffusion bonding method using the diffusion bonding jig according to the second embodiment. It is sectional drawing. In the figure, the same and corresponding parts are denoted by the same reference numerals. The bonded body formed by diffusion bonding in the second embodiment is a heat sink similar to that of the first embodiment, and the bonded member 10 includes a first bonded member 11, a second bonded member 12, A third member to be joined 13 is included. In addition, since the structure of the to-be-joined member 10 and the diffusion bonding method according to the second embodiment are the same as those in the first embodiment, description thereof is omitted.

本実施の形態２に係る拡散接合用治具は、図４に示すように、上側治具５Ａと下側治具５Ｂからなり、上側治具５Ａは、板状治具である当て板６Ａとシート状治具７Ａを備えている。同様に、下側治具５Ｂは、当て板６Ｂとシート状治具７Ｂを備えている。弾性体からなるシート状治具７Ａ、７Ｂは、被接合部材１０の最上面と最下面に直に接するように配置される。また、剛体からなる当て板６Ａ、６Ｂは、シート状治具７Ａ、７Ｂを介して被接合部材１０を上下から挟むように配置される。なお、シート状治具７Ａ、７Ｂと当て板６Ａ、６Ｂの材質については、上記実施の形態１と同様であるので説明を省略する。   As shown in FIG. 4, the diffusion bonding jig according to the second embodiment includes an upper jig 5A and a lower jig 5B, and the upper jig 5A includes a contact plate 6A that is a plate-like jig. A sheet-like jig 7A is provided. Similarly, the lower jig 5B includes a backing plate 6B and a sheet-like jig 7B. The sheet-like jigs 7A and 7B made of an elastic body are arranged so as to be in direct contact with the uppermost surface and the lowermost surface of the member 10 to be joined. Further, the contact plates 6A and 6B made of a rigid body are arranged so as to sandwich the member to be joined 10 from above and below via the sheet-like jigs 7A and 7B. The materials of the sheet-like jigs 7A and 7B and the contact plates 6A and 6B are the same as those in the first embodiment, and a description thereof will be omitted.

当て板６Ａ、６Ｂは、ヒートシンクの所定形状の中空部（図４では第２の被接合部材１２に設けられた流路用穴１６）に該当する部分に、該中空部と相似する形状の穴８Ａ、８Ｂを有している。これらの穴８Ａ、８Ｂを設けることにより、第１の被接合部材１１及び第３の被接合部材１３の流路用穴１６に該当する部分に対する加圧力が緩和され、完成したヒートシンクにおいて流路用穴１６の上下部分の表面が凹む変形を抑制することができる。   The contact plates 6A and 6B are holes having a shape similar to the hollow portion in a portion corresponding to the hollow portion of the predetermined shape of the heat sink (the hole 16 for the flow path provided in the second bonded member 12 in FIG. 4). 8A and 8B. By providing these holes 8A and 8B, the pressure applied to the portions corresponding to the flow path holes 16 of the first member to be bonded 11 and the third member to be bonded 13 is alleviated, and the flow heat is applied to the completed heat sink. It is possible to suppress deformation in which the surfaces of the upper and lower portions of the hole 16 are recessed.

なお、図４及び図５では、接合体として１つのヒートシンクを形成する場合を示したが、図６に示すように、複数の接合体を同時に形成する場合にも、本実施の形態２に係る拡散接合用治具は適用可能である。図６に示す例では、被接合部材１０ａ、１０ｂ、１０ｃは、それぞれ第１の被接合部材１１ａ、１１ｂ、１１ｃ、第２の被接合部材１２ａ、１２ｂ、１２ｃ、第３の被接合部材１３ａ、１３ｂ、１３ｃを含んでいる。   4 and 5 show the case where one heat sink is formed as a joined body, but as shown in FIG. 6, the present embodiment 2 also relates to the case where a plurality of joined bodies are formed simultaneously. Diffusion bonding jigs are applicable. In the example shown in FIG. 6, the members to be joined 10a, 10b, and 10c are the first members to be joined 11a, 11b, and 11c, the second members to be joined 12a, 12b, and 12c, the third member to be joined 13a, 13b and 13c are included.

また、複数の接合体を形成する場合の拡散接合用治具としては、図５と同様の上側治具５Ａと下側治具５Ｂに加え、中間治具５Ｃ、５Ｄが必要となる。中間治具５Ｃ、５Ｄは、上側治具５Ａと下側治具５Ｂの両方の役割を担うものであるため、当て板６Ｃ（６Ｄ）の両面にシート状治具７Ｃ（７Ｄ）がそれぞれ配置される。当て板６Ｃ、６Ｄは、ヒートシンクの流路用穴１６ａ、１６ｂ、１６ｃと相似する形状の穴８Ｃ、８Ｄをそれぞれ有している。   Further, as diffusion diffusion jigs for forming a plurality of joined bodies, intermediate jigs 5C and 5D are required in addition to upper jig 5A and lower jig 5B similar to FIG. Since the intermediate jigs 5C and 5D serve as both the upper jig 5A and the lower jig 5B, the sheet-like jigs 7C (7D) are respectively arranged on both sides of the backing plate 6C (6D). The The contact plates 6C and 6D have holes 8C and 8D having shapes similar to the flow path holes 16a, 16b and 16c of the heat sink, respectively.

以上のように、本実施の形態２に係る拡散接合用治具及びこれを用いた拡散接合方法によれば、上記実施の形態１と同様に、接合面全体において加圧力が均一化され、接合面端部の加圧力不足による接合不良の発生を抑制することができる。さらに、当て板６Ａ、６Ｂに、ヒートシンクの中空部である流路用穴１６と相似する形状の穴８Ａ、８Ｂを設けているので、第１の被接合部材１１及び第３の被接合部材１３の流路用穴１６に該当する部分に対する加圧力が緩和され、完成したヒートシンクにおいて流路用穴１６の上下部分の表面が凹む変形を抑制することができる。なお、本発明は、その発明の範囲内において、各実施の形態を自由に組み合わせたり、各実施の形態を適宜、変形、省略したりすることが可能である。   As described above, according to the diffusion bonding jig and the diffusion bonding method using the same according to the second embodiment, as in the first embodiment, the applied pressure is made uniform over the entire bonding surface, and the bonding is performed. Generation | occurrence | production of the joining defect by the insufficient pressurizing force of a surface edge part can be suppressed. Furthermore, since the contact plates 6A and 6B are provided with the holes 8A and 8B having a shape similar to the flow passage hole 16 which is the hollow portion of the heat sink, the first member to be bonded 11 and the third member to be bonded 13 are provided. The pressure applied to the portion corresponding to the flow path hole 16 is alleviated, and deformation of the surface of the upper and lower portions of the flow path hole 16 in the completed heat sink can be suppressed. It should be noted that the present invention can be freely combined with each other within the scope of the invention, and each embodiment can be appropriately modified or omitted.

本発明は、中空構造を有する接合体を形成するための拡散接合用治具として利用することができる。   The present invention can be used as a diffusion bonding jig for forming a bonded body having a hollow structure.

１Ａ、５Ａ 上側治具、１Ｂ、５Ｂ 下側治具、１Ｃ、１Ｄ、５Ｃ、５Ｄ 中間治具、２Ａ、２Ｂ、２Ｃ、２Ｄ、６Ａ、６Ｂ、６Ｃ、６Ｄ 板状治具（当て板）、
３Ａ、３Ｂ、３Ｃ、３Ｄ、７Ａ、７Ｂ、７Ｃ、７Ｄ シート状治具、
４Ａ、４Ｂ、４Ｃ、４Ｄ、８Ａ、８Ｂ、８Ｃ、８Ｄ 穴、
１０、１０ａ、１０ｂ、１０ｃ 被接合部材、
１１、１１ａ、１１ｂ、１１ｃ 第１の被接合部材、
１２、１２ａ、１２ｂ、１２ｃ 第２の被接合部材、
１３、１３ａ、１３ｂ、１３ｃ 第３の被接合部材、
１４ 流入口用穴、１５ 排出口用穴、１６、１６ａ、１６ｂ、１６ｃ 流路用穴、
２０ 加圧機構。 1A, 5A Upper jig, 1B, 5B Lower jig, 1C, 1D, 5C, 5D Intermediate jig, 2A, 2B, 2C, 2D, 6A, 6B, 6C, 6D Plate-shaped jig (batting plate),
3A, 3B, 3C, 3D, 7A, 7B, 7C, 7D Sheet-like jig,
4A, 4B, 4C, 4D, 8A, 8B, 8C, 8D hole,
10, 10a, 10b, 10c member to be joined,
11, 11a, 11b, 11c 1st member to be joined,
12, 12a, 12b, 12c second member to be joined,
13, 13a, 13b, 13c third member to be joined,
14 Inlet hole, 15 Outlet hole, 16, 16a, 16b, 16c Channel hole,
20 Pressurization mechanism.

Claims (4)

真空または不活性雰囲気中で複数の被接合部材を上下方向に重ね合わせて加熱及び加圧し、所定形状の中空部を有する接合体を形成する拡散接合において用いられる拡散接合用治具であって、
前記複数の被接合部材の最上面と最下面に直に接するように配置される弾性体からなるシート状治具と、前記シート状治具を介して前記複数の被接合部材を上下から挟むように配置される剛体からなる板状治具を備え、前記シート状治具は、前記中空部に該当する部分に、前記所定形状と相似する形状の穴を有することを特徴とする拡散接合用治具。 A diffusion bonding jig used in diffusion bonding to form a bonded body having a hollow portion having a predetermined shape by heating and pressurizing a plurality of bonded members in a vertical direction in a vacuum or an inert atmosphere,
A sheet-like jig made of an elastic body arranged so as to be in direct contact with the uppermost and lowermost surfaces of the plurality of members to be joined, and the plurality of members to be joined from above and below via the sheet-like jig A plate-like jig made of a rigid body disposed on the sheet-like jig, and the sheet-like jig has a hole having a shape similar to the predetermined shape in a portion corresponding to the hollow portion. Ingredients. 真空または不活性雰囲気中で複数の被接合部材を上下方向に重ね合わせて加熱及び加圧し、所定形状の中空部を有する接合体を形成する拡散接合において用いられる拡散接合用治具であって、
前記複数の被接合部材の最上面と最下面に直に接するように配置される弾性体からなるシート状治具と、前記シート状治具を介して前記複数の被接合部材を上下から挟むように配置される剛体からなる板状治具を備え、前記板状治具は、前記中空部に該当する部分に、前記所定形状と相似する形状の穴を有することを特徴とする拡散接合用治具。 A diffusion bonding jig used in diffusion bonding to form a bonded body having a hollow portion having a predetermined shape by heating and pressurizing a plurality of bonded members in a vertical direction in a vacuum or an inert atmosphere,
A sheet-like jig made of an elastic body arranged so as to be in direct contact with the uppermost and lowermost surfaces of the plurality of members to be joined, and the plurality of members to be joined from above and below via the sheet-like jig A plate-shaped jig made of a rigid body disposed on the plate , and the plate-shaped jig has a hole having a shape similar to the predetermined shape in a portion corresponding to the hollow portion. Ingredients. 前記シート状治具は、カーボンシートであり、前記板状治具は、カーボンまたは金属からなる板材であることを特徴とする請求項１または請求項２に記載の拡散接合用治具。 The diffusion bonding jig according to claim 1 or 2, wherein the sheet-like jig is a carbon sheet, and the plate-like jig is a plate made of carbon or metal. 真空または不活性雰囲気中で複数の被接合部材を上下方向に重ね合わせて加熱及び加圧し、所定形状の中空部を有する接合体を形成する拡散接合方法であって、
前記複数の被接合部材の最上面と最下面に直に接するように弾性体からなるシート状治具を配置し、前記シート状治具を介して前記複数の被接合部材を剛体からなる板状治具で上下から挟み込み、加圧機構により加圧して拡散接合する工程を含み、前記シート状治具または前記板状治具は、前記中空部に該当する部分に、前記所定形状と相似する形状の穴を有することを特徴とする拡散接合方法。 A diffusion bonding method in which a plurality of members to be bonded are stacked in a vertical direction in a vacuum or an inert atmosphere and heated and pressurized to form a bonded body having a hollow portion of a predetermined shape ,
A sheet-like jig made of an elastic body is arranged so as to be in direct contact with the uppermost surface and the lowermost face of the plurality of members to be joined, and the plurality of members to be joined are plate-like made of a rigid body via the sheet-like jig. The sheet-like jig or the plate-like jig has a shape similar to the predetermined shape in a portion corresponding to the hollow part, including a step of sandwiching from above and below by a jig and pressurizing and diffusion bonding with a pressure mechanism. A diffusion bonding method characterized by having a hole .
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