JP5954424B2 - Optical property measuring device - Google Patents

Optical property measuring device Download PDF

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JP5954424B2
JP5954424B2 JP2014541914A JP2014541914A JP5954424B2 JP 5954424 B2 JP5954424 B2 JP 5954424B2 JP 2014541914 A JP2014541914 A JP 2014541914A JP 2014541914 A JP2014541914 A JP 2014541914A JP 5954424 B2 JP5954424 B2 JP 5954424B2
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attachment
light
optical
measuring device
illumination light
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JPWO2014061191A1 (en
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嘉彦 小川
嘉彦 小川
繁 大崎
繁 大崎
横田　聡
聡 横田
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Konica Minolta Inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G01J3/50—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0202—Mechanical elements; Supports for optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0218—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using optical fibers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0229—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0262—Constructional arrangements for removing stray light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0264—Electrical interface; User interface
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0272—Handheld
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)

Description

本発明は、光学特性測定装置に関する。 The present invention relates to an optical property measuring apparatus .

従来、光学特性測定装置として、例えば車両やパネル等の工業製品における表面色の管理や印刷物の色の管理等を行うために用いられる、例えば色彩計や分光測色計等が知られている。このような色彩計や分光測色計等の装置は、一般に、測定対象である試料に照明光を照射し、その試料からの前記照明光の反射光を受光し、この受光結果に基づいて例えば分光反射特性等の所定の光学特性を測定する。その一つに、例えば、特許文献１に開示のハンディ型の光学特性測定装置がある。   2. Description of the Related Art Conventionally, as an optical characteristic measuring apparatus, for example, a colorimeter, a spectrocolorimeter, or the like, which is used for managing the surface color and the color of printed matter in industrial products such as vehicles and panels, is known. Such an apparatus such as a colorimeter or a spectrocolorimeter generally irradiates a sample to be measured with illumination light, receives reflected light of the illumination light from the sample, and based on the light reception result, for example, Predetermined optical characteristics such as spectral reflection characteristics are measured. One of them is, for example, a handy type optical characteristic measuring apparatus disclosed in Patent Document 1.

この特許文献１に開示の光学特性測定装置は、手で把持可能な外形形状を持つ例えば円筒体である筐体と、前記筐体の内部に収容され、試料に拡散光で照明光を照射するための積分球および光源と、前記筐体の内部に収容され、ｄ／０（拡散照明、０度受光）のジオメトリ（光学的条件）で前記試料によって反射された反射光を受光する測定用光ファイバケーブルとを備えている。そして、円筒体の筐体における一方端には、前記筐体への取り付け端部から先端に向けて径が徐々に小さくなる漏斗形状であって前記先端に測定開口（例えば直径５ｍｍ〜直径１０ｍｍ程度で、試料面開口とも言う）を持つ遮光筒や、前記測定開口を覆う透明板をさらに備えるガラス板付き遮光筒が取り替え可能に取り付けられる。このように特許文献１に開示の光学特性測定装置では、前記遮光筒またはガラス板付き遮光筒がアタッチメントとして使用用途に応じて利用可能である。   The optical characteristic measuring apparatus disclosed in Patent Document 1 is a casing having an outer shape that can be grasped by a hand, for example, a cylindrical body, and is housed inside the casing, and irradiates a sample with illumination light using diffused light. Integrating sphere and light source, and measurement light that is received in the housing and receives reflected light reflected by the sample with a geometry (optical condition) of d / 0 (diffuse illumination, 0 degree light reception) And a fiber cable. The one end of the cylindrical housing has a funnel shape in which the diameter gradually decreases from the attachment end to the housing toward the tip, and a measurement opening (for example, a diameter of about 5 mm to about 10 mm in diameter) is formed at the tip. Thus, a light-shielding cylinder having a glass surface and a light-shielding cylinder with a glass plate further provided with a transparent plate covering the measurement opening is attached in a replaceable manner. Thus, in the optical characteristic measuring apparatus disclosed in Patent Document 1, the light shielding tube or the light shielding tube with a glass plate can be used as an attachment according to the intended use.

ところで、例えば液晶表示装置の表示パネルや太陽電池等の色味（色合い）を測定する場合、比較的パネルが大きいため、据え置き型の光学特性測定装置は、不向きである一方、上記特許文献１に開示の光学特性測定装置は、ハンディ型であるため、好適である。   By the way, for example, when measuring the hue (color shade) of a display panel or a solar cell of a liquid crystal display device, since the panel is relatively large, a stationary optical characteristic measuring device is unsuitable. The disclosed optical property measuring apparatus is suitable because it is a handy type.

しかしながら、このような表示パネルや太陽電池等には、一般に、表面を保護するために例えばガラス薄板や樹脂薄板等の透明な保護パネルがその表面に用いられているため、光学特性測定装置で光学特性を測定した場合に、その測定結果が安定しない場合があり、正確に色を測定することが難しいことが判明した。このような保護パネルは、その表面の光学特性と裏面の光学特性とが異なっており、このため、光学特性測定装置で測定される反射光は、裏面が影響し、表面での反射光成分と裏面での反射光成分とがアンバランスになってしまうためと発明者は、推察している。より具体的には、保護パネルは、その表面に例えば反射防止膜等のコーティング層（被覆層）を有する一方、その裏面に例えば拡散層等を有している。このため、ｄ／０のジオメトリで光学特性を測定する光学特性測定装置を測定に用いた場合、この光学特性測定装置で測定される反射光は、前記裏面での色味成分を含まない反射光成分の割合が着色のある前記表面での反射光成分より相対的に多くなってしまうためと発明者は、推察している。   However, since a transparent protective panel such as a glass thin plate or a resin thin plate is generally used on such a surface to protect the surface of such a display panel, solar cell, etc. When the characteristics are measured, the measurement results may not be stable, and it has been found difficult to accurately measure the color. Such a protection panel has different optical characteristics on the front surface and optical properties on the back surface. Therefore, the reflected light measured by the optical property measuring apparatus is affected by the back surface, and the reflected light component on the front surface The inventor infers that the reflected light component on the back surface becomes unbalanced. More specifically, the protective panel has, for example, a coating layer (covering layer) such as an antireflection film on its surface, and has a diffusion layer or the like on its back surface. For this reason, when an optical property measurement device that measures optical properties with a geometry of d / 0 is used for measurement, the reflected light measured by this optical property measurement device is reflected light that does not contain a color component on the back surface. The inventor speculates that the ratio of the component is relatively larger than the reflected light component on the colored surface.

その一方で、塗装面、印刷面、プラスチックおよび不透明性の高い材料等の一般的な測定対象の試料を測定する場合には、上述の保護パネルのような事態は、生じないため、光学特性測定装置は、ｄ／０のジオメトリで光学特性を好適に測定することができる。このため、光学特性測定装置は、このような一般的な試料の測定も可能としつつ、保護パネルで生じる上述の事態に対処可能であることが望ましい。   On the other hand, when measuring samples of general measurement objects such as painted surfaces, printed surfaces, plastics, and highly opaque materials, the situation described above for protective panels does not occur. The apparatus can suitably measure optical properties with a d / 0 geometry. For this reason, it is desirable that the optical characteristic measurement apparatus can cope with the above-described situation that occurs in the protective panel while enabling measurement of such a general sample.

また、上記特許文献１に開示の前記遮光筒およびガラス板付き遮光筒では、検出開口をオープン（開口）状態とするかクローズ（閉塞）状態とするかだけであり、保護パネルで生じる上述の事態に対応することができていない。   Moreover, in the said light shielding cylinder and the light shielding cylinder with a glass plate of the said patent document 1, it is only whether a detection opening is made into an open (opening) state or a closed (closed) state, The above-mentioned situation which arises in a protection panel It is not possible to cope with.

特開２０１１−１３３４６３号公報JP 2011-133463 A

本発明は、上述の事情に鑑みて為された発明であり、その目的は、一般的な試料の測定機能を維持しつつ、例えば表示パネルや太陽電池等に用いられる保護パネルのような、裏面の光学特性が表面の光学特性に影響する試料も測定することができる光学特性測定装置を提供することである。 The present invention has been made in view of the above-described circumstances, and its object is to maintain a general sample measurement function, for example, a back surface such as a protection panel used for a display panel, a solar cell, or the like. It is an object of the present invention to provide an optical characteristic measuring apparatus capable of measuring a sample whose optical characteristics affect the optical characteristics of the surface.

本発明にかかる光学特性測定装置は、光学特性測定装置に脱着可能であって外光を遮光する中空柱状のアタッチメント本体の内面に、照明光の反射を防止するための反射防止部材を備える。このような光学特性測定装置は、一般的な試料の測定機能を維持しつつ、例えば表示パネルや太陽電池等に用いられる保護パネルのような、裏面の光学特性が表面の光学特性に影響する試料も測定できる。 The optical characteristic measuring apparatus according to the present invention includes an antireflection member for preventing reflection of illumination light on the inner surface of a hollow columnar attachment body that is detachable from the optical characteristic measuring apparatus and shields external light. Such an optical property measuring apparatus is a sample in which the optical properties of the back surface affect the optical properties of the front surface, such as a protective panel used for a display panel, a solar cell, etc., while maintaining a general sample measurement function. Can also be measured.

上記並びにその他の本発明の目的、特徴及び利点は、以下の詳細な記載と添付図面から明らかになるであろう。   The above and other objects, features and advantages of the present invention will become apparent from the following detailed description and the accompanying drawings.

実施形態における光学特性測定装置の外観構成を示す図である。It is a figure which shows the external appearance structure of the optical characteristic measuring apparatus in embodiment. 図１に示す光学特性測定装置の電気的な構成を示すブロック図である。It is a block diagram which shows the electrical structure of the optical characteristic measuring apparatus shown in FIG. 図１に示す光学特性測定装置における測定プローブの一部断面を示す縦断面図である。It is a longitudinal cross-sectional view which shows the partial cross section of the measurement probe in the optical characteristic measuring apparatus shown in FIG. 図１に示す光学特性測定装置における測定プローブに対し、アタッチメントの交換の一例として、通常の遮光筒とガラス板付き遮光筒との交換の様子を説明するための図である。It is a figure for demonstrating the mode of replacement | exchange of a normal light shielding cylinder and a light shielding cylinder with a glass plate as an example of replacement | exchange of an attachment with respect to the measurement probe in the optical characteristic measuring apparatus shown in FIG. 図１に示す光学特性測定装置における第１態様の反射防止遮光筒の構成を示す縦断面図である。It is a longitudinal cross-sectional view which shows the structure of the antireflection light-shielding cylinder of the 1st aspect in the optical characteristic measuring apparatus shown in FIG. 図１に示す光学特性測定装置における種類検出部を示す外観斜視図である。It is an external appearance perspective view which shows the kind detection part in the optical characteristic measuring apparatus shown in FIG. 図１に示す光学特性測定装置における第２態様の反射防止遮光筒の構成を示す図である。It is a figure which shows the structure of the antireflection light-shielding cylinder of the 2nd aspect in the optical characteristic measuring apparatus shown in FIG. 図１に示す光学特性測定装置における第３態様の反射防止遮光筒の構成を示す図である。It is a figure which shows the structure of the reflection prevention light shielding cylinder of the 3rd aspect in the optical characteristic measuring apparatus shown in FIG. 図１に示す光学特性測定装置における第４態様の反射防止遮光筒の構成を示す図である。It is a figure which shows the structure of the reflection prevention light shielding cylinder of the 4th aspect in the optical characteristic measuring apparatus shown in FIG. 図１に示す光学特性測定装置における第５態様の反射防止遮光筒の構成を示す縦断面図である。It is a longitudinal cross-sectional view which shows the structure of the antireflection light-shielding cylinder of the 5th aspect in the optical characteristic measuring apparatus shown in FIG. 図１に示す光学特性測定装置の測定動作を示すフローチャートである。It is a flowchart which shows the measurement operation | movement of the optical characteristic measuring apparatus shown in FIG.

以下、本発明にかかる実施の一形態を図面に基づいて説明する。なお、各図において同一の符号を付した構成は、同一の構成であることを示し、適宜、その説明を省略する。また、本明細書において、総称する場合には添え字を省略した参照符号で示し、個別の構成を指す場合には添え字を付した参照符号で示す。   Hereinafter, an embodiment according to the present invention will be described with reference to the drawings. In addition, the structure which attached | subjected the same code | symbol in each figure shows that it is the same structure, The description is abbreviate | omitted suitably. Further, in this specification, when referring generically, it is indicated by a reference symbol without a suffix, and when referring to an individual configuration, it is indicated by a reference symbol with a suffix.

図１は、実施形態における光学特性測定装置の外観構成を示す図である。図２は、実施形態における光学特性測定装置の電気的な構成を示すブロック図である。図３は、実施形態の光学特性測定装置における測定プローブの一部断面を示す縦断面図である。図３には、測定プローブに通常の遮光筒を装着した様子（図の上側）と、測定プローブにガラス板付き遮光筒を装着した様子（図の下側）とが示されている。図４は、実施形態の光学特性測定装置における測定プローブに対し、アタッチメントの交換の一例として、通常の遮光筒とガラス板付き遮光筒との交換の様子を説明するための図である。図５は、実施形態の光学特性測定装置における第１態様の反射防止遮光筒の構成を示す縦断面図である。図６は、実施形態の光学特性測定装置における種類検出部を示す外観斜視図である。   FIG. 1 is a diagram illustrating an external configuration of an optical characteristic measuring apparatus according to an embodiment. FIG. 2 is a block diagram illustrating an electrical configuration of the optical characteristic measuring apparatus according to the embodiment. FIG. 3 is a longitudinal cross-sectional view showing a partial cross section of the measurement probe in the optical characteristic measurement apparatus of the embodiment. FIG. 3 shows a state in which a normal light shielding cylinder is attached to the measurement probe (upper side in the figure) and a state in which a light shielding cylinder with a glass plate is attached to the measurement probe (lower side in the figure). FIG. 4 is a diagram for explaining a state of replacement between a normal light-shielding cylinder and a light-shielding cylinder with a glass plate as an example of replacement of the attachment with respect to the measurement probe in the optical property measurement apparatus of the embodiment. FIG. 5 is a longitudinal cross-sectional view showing the configuration of the antireflection light-shielding tube of the first aspect in the optical property measuring apparatus of the embodiment. FIG. 6 is an external perspective view illustrating a type detection unit in the optical characteristic measurement apparatus according to the embodiment.

本実施形態の光学特性測定装置は、照明光として拡散光を測定対象である試料に照射し、これによって前記試料で反射された前記拡散光の反射光を受光し、この受光した反射光に基づいて所定の光学特性を測定する装置である。前記所定の光学特性は、例えば、色、色彩等である。より具体的には、光学特性測定装置は、例えば、前記拡散光の反射光に含まれるいわゆる三刺激値を測定することによって色彩を測定する色彩計や、前記拡散光の反射光に含まれる各波長の強度を測定することによっていわゆる分光反射率を測定する分光測色計や、前記拡散光の反射光に基づいて輝度と色度とを測定する色彩輝度計等である。このような本実施形態の光学特性測定装置Ｄは、図１ないし図６に示すように、演算制御本体１と、光ファイバケーブルＦＣおよび制御信号線ＣＬを含むケーブルＣＢを介して演算制御本体１に接続される測定プローブ（光学特性測定装置本体）２と、測定プローブ２に脱着可能であるアタッチメントＡＴとを備えている。図１に示す例では、アタッチメントＡＴとして遮光筒（第１のアタッチメント）３ａが測定プローブ２に装着されている。本実施形態の光学特性測定装置Ｄでは、ハンディ型であるため、演算制御本体１と測定プローブ２とで、光学特性測定本体が構成されている。 The optical characteristic measurement apparatus of the present embodiment irradiates the sample to be measured with diffused light as illumination light, thereby receiving the reflected light of the diffused light reflected by the sample, and based on the received reflected light. This is a device for measuring predetermined optical characteristics. The predetermined optical characteristic is, for example, color, color, and the like. More specifically, the optical characteristic measuring device includes, for example, a color meter that measures color by measuring a so-called tristimulus value included in the reflected light of the diffused light, and each of the light included in the reflected light of the diffused light. A spectral colorimeter that measures so-called spectral reflectance by measuring the intensity of wavelength, a color luminance meter that measures luminance and chromaticity based on the reflected light of the diffused light, and the like. As shown in FIGS. 1 to 6, the optical characteristic measuring apparatus D according to the present embodiment includes the calculation control main body 1 and the calculation control main body 1 via the cable CB including the optical fiber cable FC and the control signal line CL. A measurement probe ( optical characteristic measuring device main body) 2 connected to the, and an attachment AT detachable from the measurement probe 2. In the example shown in FIG. 1, a light shielding cylinder ( first attachment) 3 a is attached to the measurement probe 2 as the attachment AT. Since the optical characteristic measuring apparatus D of the present embodiment is a handy type, the optical characteristic measuring main body is configured by the arithmetic control main body 1 and the measurement probe 2.

演算制御本体１は、光学特性測定装置Ｄの各部を当該機能に応じて制御し、測定プローブ２によって得られた、試料ＳＭに対する拡散光の反射光に基づいて所定の光学特性を演算する装置である。前記拡散光の反射光は、測定プローブ２によって、照明光として拡散光を試料ＳＭに照射することによって得られる。このような演算制御本体１は、図１および図２に示すように、例えば、入力部１１と、表示部１２と、印刷部１３と、インターフェース部（ＩＦ部）１４と、演算制御部１５と、受光処理部１６とを備えている。   The calculation control main body 1 is a device that controls each part of the optical characteristic measuring apparatus D according to the function and calculates predetermined optical characteristics based on the reflected light of the diffused light with respect to the sample SM obtained by the measurement probe 2. is there. The reflected light of the diffused light is obtained by irradiating the sample SM with diffused light as illumination light by the measurement probe 2. As shown in FIGS. 1 and 2, the arithmetic control main body 1 includes, for example, an input unit 11, a display unit 12, a printing unit 13, an interface unit (IF unit) 14, an arithmetic control unit 15, and the like. The light receiving processing unit 16 is provided.

入力部１１は、例えば、測定開始を指示するコマンド等の各種コマンド、および、例えば試料ＳＭにおける識別子の入力等の光学特性を測定する上で必要な各種データを光学特性測定装置Ｄに入力する装置であり、例えば、複数のスイッチおよびその周辺回路を備えている。表示部１２は、入力部１１から入力されたコマンドやデータ、および、測定した測定結果の光学特性を表示する装置であり、例えばＣＲＴディスプレイ、液晶ディスプレイ（ＬＣＤ）および有機ＥＬディスプレイ等の表示装置である。印刷部１３は、入力部１１から入力されたコマンドやデータ、および、測定結果の光学特性を印刷する装置であり、例えばプリンタ等の印刷装置等である。ＩＦ部１４は、外部の機器とデータをやり取りするための外部インターフェースであり、例えばＵＳＢ（Ｕｎｉｖｅｒｓａｌ Ｓｅｒｉａｌ Ｂｕｓ）等である。   The input unit 11 is a device that inputs various commands such as a command for instructing the start of measurement and various data necessary for measuring optical properties such as input of an identifier in the sample SM to the optical property measuring apparatus D, for example. For example, a plurality of switches and their peripheral circuits are provided. The display unit 12 is a device that displays commands and data input from the input unit 11 and optical characteristics of measured measurement results. For example, the display unit 12 is a display device such as a CRT display, a liquid crystal display (LCD), and an organic EL display. is there. The printing unit 13 is a device that prints commands and data input from the input unit 11 and optical characteristics of measurement results, and is, for example, a printing device such as a printer. The IF unit 14 is an external interface for exchanging data with an external device, and is, for example, a USB (Universal Serial Bus).

演算制御部１５は、光学特性測定装置Ｄの各部を当該機能に応じて制御することによって光学特性測定装置全体の動作を司るとともに、測定プローブ２によって得られた拡散光の反射光に基づいて所定の光学特性を演算するものであり、例えば、マイクロプロセッサ、メモリおよびその周辺回路を備えたマイクロコンピュータである。演算制御部１５には、メモリに記憶されているプログラムが実行されることによって、制御部１５１および光学特性演算部１５２が機能的に構成される。制御部１５１は、光学特性測定装置Ｄにおける入力部１１、表示部１２、印刷部１３、ＩＦ部１４、受光処理部１６および測定プローブ２の各部を当該機能に応じて制御するものである。光学特性演算部１５２は、測定プローブ２によって得られた試料ＳＭに対する拡散光の反射光に基づいて所定の光学特性を演算するものである。この光学特性の演算に際し、光学特性演算部１５２は、後述するように、種類検出部２６の出力に応じて測定プローブ２に装着されたアタッチメントＡＴの種類を判定し、前記判定したアタッチメントの種類に応じて前記光学特性を求める。   The arithmetic control unit 15 controls the respective units of the optical property measuring device D according to the function, thereby controlling the operation of the entire optical property measuring device, and predetermined based on the reflected light of the diffused light obtained by the measurement probe 2. For example, a microcomputer including a microprocessor, a memory, and its peripheral circuits is used. In the calculation control unit 15, a control unit 151 and an optical characteristic calculation unit 152 are functionally configured by executing a program stored in the memory. The control unit 151 controls each unit of the input unit 11, the display unit 12, the printing unit 13, the IF unit 14, the light reception processing unit 16, and the measurement probe 2 in the optical characteristic measuring device D according to the function. The optical characteristic calculator 152 calculates a predetermined optical characteristic based on the reflected light of the diffused light with respect to the sample SM obtained by the measurement probe 2. In the calculation of the optical characteristics, the optical characteristic calculation unit 152 determines the type of the attachment AT attached to the measurement probe 2 according to the output of the type detection unit 26, as will be described later, and determines the type of the determined attachment. Accordingly, the optical characteristics are obtained.

受光処理部１６は、測定プローブ２によって得られた試料ＳＭに対する拡散光の反射光を受光し、この受光結果に所定の前処理を施して演算制御部１５へ出力するものである。受光処理部１６は、例えば、光電変換を行って受光した光量に応じた電気信号を出力する光電変換素子を備える受光回路、前記受光回路の出力を所定の増幅率で増幅する低ノイズ増幅回路、ノイズを除去するために、低ノイズ増幅回路の出力を所定の帯域でフィルタリング（濾波）するフィルタ回路、および、フィルタ回路の出力をアナログ信号からディジタル信号へ変換するアナログ−ディジタル変換回路等を備えて、前記所定の前処理として、増幅処理、ノイズ除去処理およびＡＤ変換処理等を行う。   The light reception processing unit 16 receives the reflected light of the diffused light with respect to the sample SM obtained by the measurement probe 2, performs a predetermined preprocessing on the light reception result, and outputs the result to the arithmetic control unit 15. The light receiving processing unit 16 includes, for example, a light receiving circuit including a photoelectric conversion element that outputs an electric signal corresponding to the amount of light received by performing photoelectric conversion, a low noise amplification circuit that amplifies the output of the light receiving circuit at a predetermined amplification factor, In order to remove noise, a filter circuit for filtering the output of the low noise amplifier circuit in a predetermined band (filtering), an analog-digital conversion circuit for converting the output of the filter circuit from an analog signal to a digital signal, and the like are provided. As the predetermined preprocessing, amplification processing, noise removal processing, AD conversion processing, and the like are performed.

これら演算制御本体１における入力部１１、表示部１２、印刷部１３、ＩＦ部１４、演算制御部１５および受光処理部１６は、図１に示すように、略直方体形状の箱形の第１筐体ＨＳ１に収納される。第１筐体ＨＳ１には、入力部１１、表示部１２および印刷部１３が一方端から他方端へ順に配置され、その側面から光ファイバケーブルＦＣおよび制御信号線ＣＬを含むケーブルＣＢが延びている。   As shown in FIG. 1, the input unit 11, the display unit 12, the printing unit 13, the IF unit 14, the calculation control unit 15, and the light receiving processing unit 16 in the calculation control main body 1 are a box-shaped first housing having a substantially rectangular parallelepiped shape. It is stored in the body HS1. In the first housing HS1, the input unit 11, the display unit 12, and the printing unit 13 are arranged in order from one end to the other end, and the optical fiber cable FC and the cable CB including the control signal line CL extend from the side surface. .

測定プローブ２は、演算制御本体１とケーブルＣＢを介して接続され、ケーブルＣＢに含まれる制御信号線ＣＬを介した演算制御部１５における制御部１５１の制御に従って照明光として拡散光を試料ＳＭに照射し、これによって試料ＳＭで反射された前記拡散光の反射光を光ファイバケーブルＦＣの一方先端部で受光するものである。光ファイバケーブルＦＣは、複数の光ファイバを備え、これら複数の光ファイバを束ねたものである。前記拡散光の反射光は、光ファイバケーブルＦＣを介して受光処理部１６まで導光され、受光処理部１６の前記光電変換素子で受光され、光電変換される。また、この前記拡散光の反射光の測定に際し、アタッチメントＡＴの種類を検出するために、種類検出部２６は、演算制御部１５における制御部１５１によって前記制御信号線ＣＬを介して制御される。   The measurement probe 2 is connected to the calculation control main body 1 via the cable CB, and diffused light is applied to the sample SM as illumination light in accordance with the control of the control unit 151 in the calculation control unit 15 via the control signal line CL included in the cable CB. The reflected light of the diffused light that has been irradiated and reflected by the sample SM is received at one end of the optical fiber cable FC. The optical fiber cable FC includes a plurality of optical fibers and is a bundle of the plurality of optical fibers. The reflected light of the diffused light is guided to the light receiving processing unit 16 through the optical fiber cable FC, received by the photoelectric conversion element of the light receiving processing unit 16 and photoelectrically converted. Further, in the measurement of the reflected light of the diffused light, the type detection unit 26 is controlled by the control unit 151 in the calculation control unit 15 via the control signal line CL in order to detect the type of the attachment AT.

測定プローブ２は、例えば、図１および図３に示すように、積分球２１と、光源２２と、遮光板２３と、拡散板２４と、受光筒２５と、種類検出部２６と、これら積分球２１、光源２２、遮光板２３、拡散板２４、受光筒２５および種類検出部２６を収納する第２筐体ＨＳ２とを備えている。   For example, as shown in FIGS. 1 and 3, the measurement probe 2 includes an integrating sphere 21, a light source 22, a light shielding plate 23, a diffusion plate 24, a light receiving tube 25, a type detection unit 26, and these integrating spheres. 21, a light source 22, a light shielding plate 23, a diffusion plate 24, a light receiving cylinder 25, and a second housing HS <b> 2 that houses a type detection unit 26.

第２筐体ＨＳ２は、手で把持可能な外形形状を持つ例えば中空柱状体、例えば円筒体であり、その一方端部（先端）には、アタッチメントＡＴを取り付けるための筐体側取付部２７を備え、その他方端部は、閉塞され、その他方端部近傍の側周面から前記ケーブルＣＢが延びている。筐体側取付部２７は、例えば、第２筐体ＨＳ２の円筒体の外周面に形成されたオネジであってよい。このような場合では、アタッチメントＡＴの内周面には、後述の遮光筒側取付部３２、４２としてメネジが形成され、このねじ構造によって第２筐体ＨＳ２とアタッチメントＡＴとは、脱着自在とされる。また例えば、筐体側取付部２７は、第２筐体ＨＳ２の円筒体の外周面に形成された、周方向に延びると共に径方向内側に凹んだ嵌合溝（係止溝）であってよい。このような場合では、アタッチメントＡＴの内周面には、遮光筒側取付部３２、４２として、周方向に延びると共に径方向外側に突出する突条（係合凸部）が形成され、前記突条が嵌合溝に嵌り込む構造によって第２筐体ＨＳ２とアタッチメントＡＴとは、脱着自在とされる。   The second housing HS2 is, for example, a hollow columnar body having an outer shape that can be grasped by hand, for example, a cylindrical body, and has a housing-side attachment portion 27 for attaching the attachment AT at one end (tip) thereof. The other end is closed, and the cable CB extends from the side peripheral surface near the other end. The housing side attaching portion 27 may be, for example, a male screw formed on the outer peripheral surface of the cylindrical body of the second housing HS2. In such a case, female threads are formed on the inner peripheral surface of the attachment AT as light-shielding tube side mounting portions 32 and 42, which will be described later, and the second housing HS2 and the attachment AT are detachable by this screw structure. The Further, for example, the housing side attaching portion 27 may be a fitting groove (locking groove) formed on the outer peripheral surface of the cylindrical body of the second housing HS2 and extending in the circumferential direction and recessed radially inward. In such a case, on the inner peripheral surface of the attachment AT, protrusions (engagement protrusions) extending in the circumferential direction and protruding radially outward are formed as the light shielding tube side attachment portions 32 and 42, and the protrusion The second housing HS2 and the attachment AT are detachable by the structure in which the strip is fitted in the fitting groove.

光源２２は、照明光となる光を放射する装置であり、例えば、キセノンランプ（Ｘｅランプ）等である。遮光板２３は、光を遮断する部材である。拡散板２４は、入射光を拡散して射出する部材である。受光筒２５は、円筒状の部材であり、受光筒２５内には、光ファイバケーブルＦＣが配設されている。   The light source 22 is a device that emits light serving as illumination light, and is, for example, a xenon lamp (Xe lamp). The light shielding plate 23 is a member that blocks light. The diffusion plate 24 is a member that diffuses and emits incident light. The light receiving cylinder 25 is a cylindrical member, and an optical fiber cable FC is disposed in the light receiving cylinder 25.

種類検出部２６は、測定プローブ２に装着されたアタッチメントＡＴの種類を検出するためのセンサ装置である。種類検出部２６は、例えば、発光ダイオード等の発光部とホトダイオード等の受光部とを備えたＰＲセンサおよびその周辺回路を備え、発光部で発光した光の反射光を受光部で受光し、その受光強度の大きさをケーブルＣＢを介して演算制御部１５へ出力する。なお、種類検出部２６は、前記ＰＲセンサに代え、機械的な動作によってオンオフするメカスイッチであってもよく、オンオフの各状態に応じた信号をケーブルＣＢを介して演算制御部１５へ出力する。種類検出部２６は、図６に示すように、第２筐体ＨＳ２における筐体側取付部２７近傍の外周面で、アタッチメントＡＴの種類を検出することができるように外部に臨んでいる。例えば、種類検出部２６は、発光した赤外線を射出し、赤外線の反射光を入射することができるように、前記外周面で外部に臨んでいる。   The type detection unit 26 is a sensor device for detecting the type of the attachment AT attached to the measurement probe 2. The type detection unit 26 includes, for example, a PR sensor including a light emitting unit such as a light emitting diode and a light receiving unit such as a photodiode and its peripheral circuit, and receives reflected light of light emitted from the light emitting unit at the light receiving unit. The magnitude of the received light intensity is output to the arithmetic control unit 15 via the cable CB. The type detection unit 26 may be a mechanical switch that is turned on / off by a mechanical operation instead of the PR sensor, and outputs a signal corresponding to each on / off state to the arithmetic control unit 15 via the cable CB. . As shown in FIG. 6, the type detection unit 26 faces the outside so that the type of the attachment AT can be detected on the outer peripheral surface of the second housing HS2 in the vicinity of the housing side mounting portion 27. For example, the type detection unit 26 faces the outside on the outer peripheral surface so that emitted infrared light can be emitted and infrared reflected light can be incident.

積分球２１は、光源２２から放射された放射光を拡散板２４に均一に照射することで、試料ＳＭを均等に拡散照明するための部材である。より具体的には、図３に示すように、例えば釣鐘のような形状の一方端が開口され他方端が閉塞された中空円柱状の部材である。図３に示す形状の積分球２１は、内面形状が球形ではないが、球形の場合と同様な機能を持つ簡易的な積分球と言ってよい。このような形状の積分球２１内には、中心位置に受光筒２５が開口面から閉塞面まで軸方向に沿って配置されている。前記閉塞面（天井面）には、ケーブルＣＢを挿通するための貫通開口が形成されており、この貫通開口と受光筒２５との隙間から外光が積分球２１内に入射することを防止するために、前記閉塞面に近い受光筒２５の一方端周面には、受光筒２５の外周面を囲むようにそして径方向外側に延びるようにリング形状のフランジ板が立設されており、前記開口面側の受光筒２５の他方端周面には、受光筒２５の外周面を囲むようにそして径方向外側に延びるようにリング形状で拡散板２４が配設されている。受光筒２５における軸方向中央位置よりやや前記閉塞面に寄った位置には、受光筒２５の外周面を囲むようにリング管形状の光源２２が配設されている。光源２２と拡散板２４との間には、光源２２から射出された放射光が拡散板２４に直接到達することを防止するように、遮光板２３が配設されている。より具体的には、受光筒２５における軸方向略中央位置に、受光筒２５の外周面を囲むようにそして径方向外側に延びるように遮光板２３が配設されている。拡散板２４の外周縁は、積分球２１の内周面に当接して積分球２１の開口面を閉塞してもよい。本実施形態では、円筒形状の第２筐体ＨＳ２の一方端部は、筐体側取付部２７から先端へ向けて径が所定の直径になるまで徐々に小さくなるように形成されたテーパ部と、照明受光部１００として前記所定の第１直径の第１開口部１００とを備えるように形成されている。そして、前記開口面を形成している積分球２１の一方端は、第２筐体ＨＳ２の前記テーパ部と当接しており、拡散板２４の外周縁は、第２筐体ＨＳ２の前記第１開口部１００の周縁と当接している。したがって、照明受光部１００としての第２筐体ＨＳ２の前記第１開口部１００には、リング板形状の拡散板２４および受光筒２５の先端部２５１が配置されている。そして、積分球２１の内面は、光を拡散反射するように例えば硫酸バリウム等の白色塗料で塗装され、前記内面上には白色塗布層が形成されている。   The integrating sphere 21 is a member for uniformly diffusing and illuminating the sample SM by uniformly irradiating the diffuser plate 24 with the radiated light emitted from the light source 22. More specifically, as shown in FIG. 3, for example, a hollow cylindrical member having one end opened like a bell and closed at the other end. The integrating sphere 21 having the shape shown in FIG. 3 may be said to be a simple integrating sphere having the same function as that of a spherical shape although the inner surface shape is not spherical. In the integrating sphere 21 having such a shape, the light receiving cylinder 25 is disposed at the center position along the axial direction from the opening surface to the closing surface. A through opening for inserting the cable CB is formed in the closed surface (ceiling surface), and external light is prevented from entering the integrating sphere 21 through a gap between the through opening and the light receiving tube 25. Therefore, a ring-shaped flange plate is erected on the one end peripheral surface of the light receiving tube 25 close to the closed surface so as to surround the outer peripheral surface of the light receiving tube 25 and to extend radially outward. On the other end peripheral surface of the light receiving tube 25 on the opening surface side, a diffuser plate 24 is disposed in a ring shape so as to surround the outer peripheral surface of the light receiving tube 25 and to extend radially outward. A ring tube-shaped light source 22 is disposed so as to surround the outer peripheral surface of the light receiving tube 25 at a position slightly closer to the closing surface than the axial center position in the light receiving tube 25. A light shielding plate 23 is disposed between the light source 22 and the diffusion plate 24 so as to prevent the emitted light emitted from the light source 22 from reaching the diffusion plate 24 directly. More specifically, a light shielding plate 23 is disposed at a substantially central position in the axial direction of the light receiving tube 25 so as to surround the outer peripheral surface of the light receiving tube 25 and to extend radially outward. The outer peripheral edge of the diffusing plate 24 may contact the inner peripheral surface of the integrating sphere 21 to close the opening surface of the integrating sphere 21. In the present embodiment, the one end portion of the cylindrical second housing HS2 has a tapered portion formed so as to gradually decrease from the housing-side mounting portion 27 toward the tip until the diameter becomes a predetermined diameter, The illumination light receiving unit 100 is formed to include the first opening 100 having the predetermined first diameter. One end of the integrating sphere 21 forming the opening surface is in contact with the tapered portion of the second casing HS2, and the outer peripheral edge of the diffusion plate 24 is the first end of the second casing HS2. It is in contact with the peripheral edge of the opening 100. Therefore, the ring plate-shaped diffusion plate 24 and the front end 251 of the light receiving cylinder 25 are disposed in the first opening 100 of the second housing HS2 as the illumination light receiving unit 100. The inner surface of the integrating sphere 21 is painted with a white paint such as barium sulfate so as to diffusely reflect light, and a white coating layer is formed on the inner surface.

このような積分球２１では、光源２２から放射された光は、遮光板２３で拡散板２４へ直接的に到達しないように遮光される一方、積分球２１の内面で拡散反射を１または複数回繰り返した後に、拡散板２４に到達し、拡散板２４から拡散光の状態で照明光として射出される。   In such an integrating sphere 21, the light emitted from the light source 22 is shielded by the light shielding plate 23 so as not to reach the diffusion plate 24 directly, and diffusely reflects on the inner surface of the integrating sphere 21 one or more times. After repeating, the light reaches the diffusion plate 24 and is emitted from the diffusion plate 24 as illumination light in the state of diffused light.

アタッチメントＡＴは、測定プローブ２における第２筐体ＨＳ２に形成された照明受光部１００としての前記第１開口部１００における光学的な状態（条件）を、当該光学特性測定装置Ｄの測定目的に応じた状態（条件）に合わせるための部材である。図１および図３の上側に示すアタッチメントＡＴは、通常の測定に対して用いられる遮光筒３ａである。   The attachment AT changes the optical state (condition) of the first opening 100 as the illumination light receiving unit 100 formed in the second housing HS2 of the measurement probe 2 according to the measurement purpose of the optical characteristic measuring device D. This is a member for adjusting to the state (condition). The attachment AT shown in the upper side of FIGS. 1 and 3 is a light shielding cylinder 3a used for normal measurement.

この遮光筒３ａは、一方端から他方端に向けて径が所定の第２直径になるまで徐々に小さくなるように形成されたテーパ部３１と、テーパ部３１の一方端に形成された、この遮光筒３ａを測定プローブ２の第２筐体ＨＳ２に脱着可能に取り付けるための遮光筒側取付部（第１の取付部）３２と、テーパ部３１の他方端において、前記所定の第２直径の第２開口部を囲むようにそして径方向外側に延びるように形成されたリング形状のフランジ板３３とを備えており、テーパ部３１の内面は、拡散反射するように白色塗装されている。このような遮光筒３ａは、測定プローブ２の第２筐体ＨＳ２に形成された第１開口部１００の開口面積を第２開口部ＡＰの開口面積までさらに絞り込み、そして、フランジ板３３によって平坦な試料面に密着させるために用いられる。 The light-shielding cylinder 3a has a tapered portion 31 formed so as to gradually decrease from one end to the other end until the diameter reaches a predetermined second diameter, and the tapered portion 31 is formed at one end of the tapered portion 31. At the other end of the light shielding tube side attachment portion (first attachment portion) 32 for attaching the light shielding tube 3a to the second housing HS2 of the measurement probe 2 in a detachable manner, the predetermined second diameter is provided. A ring-shaped flange plate 33 is formed so as to surround the second opening and extend radially outward, and the inner surface of the tapered portion 31 is painted white so as to diffusely reflect. Such a light shielding cylinder 3a further narrows down the opening area of the first opening 100 formed in the second housing HS2 of the measurement probe 2 to the opening area of the second opening AP, and is flattened by the flange plate 33. Used to adhere to the sample surface.

また、測定プローブ２で例えば粉体等の試料ＳＭを測定する場合には、前記粉体等が測定プローブ２内に侵入することを防止するために、図３の下側に示すようなガラス板付き遮光筒３ｂが、図４に示すように遮光筒３ａに代えて測定プローブ２にアタッチメントＡＴとして装着される。このガラス板付き遮光筒３ｂは、遮光筒３ａの構成に加えて、例えばガラス等で形成された透明板３４をさらに備えている。この透明板３４は、前記第２開口部ＡＰを閉塞するように、フランジ板３３上に例えば接着剤等によって密着固定されている。   In addition, when measuring the sample SM such as powder with the measurement probe 2, in order to prevent the powder or the like from entering the measurement probe 2, a glass plate as shown in the lower side of FIG. The attached light-shielding cylinder 3b is attached to the measurement probe 2 as an attachment AT in place of the light-shielding cylinder 3a as shown in FIG. In addition to the configuration of the light shielding tube 3a, the light shielding tube 3b with a glass plate further includes a transparent plate 34 made of, for example, glass. The transparent plate 34 is tightly fixed to the flange plate 33 with, for example, an adhesive so as to close the second opening AP.

このような遮光筒３ａまたはガラス板付き遮光筒３ｂをアタッチメントＡＴとして測定プローブ２に装着することによって、光学特性測定装置Ｄは、ｄ／０のジオメトリで試料ＳＭを測定する。   By mounting such a light shielding tube 3a or a light shielding tube 3b with a glass plate on the measurement probe 2 as an attachment AT, the optical property measuring apparatus D measures the sample SM with a geometry of d / 0.

そして、本実施形態の光学特性測定装置Ｄでは、前記保護パネル付きの例えば表示パネルや太陽電池等を測定するために、図５および図６に示す第１態様の反射防止遮光筒（第２のアタッチメント）４ａが、アタッチメントＡＴとしてさらに用意されている。 And in the optical characteristic measuring apparatus D of this embodiment, in order to measure, for example, a display panel or a solar cell with the protective panel, the antireflection light-shielding cylinder ( the second mode) shown in FIGS. 5 and 6 is used. Attachment) 4a is further prepared as an attachment AT.

この第１態様の反射防止遮光筒４ａは、外光を遮光し、前記照明受光部１００としての第１開口部１００の周縁を囲む内周を有する中空柱状のアタッチメント本体４１と、アタッチメント本体４１の一方端に形成された、この反射防止遮光筒４ａを測定プローブ２の第２筐体ＨＳ２に脱着可能に取り付けるための遮光筒側取付部（第２の取付部）４２と、アタッチメント本体４１の内面に備えられ、拡散板２４を介して積分球２１から放射される前記照明光の反射を防止するための第１反射防止部材４３とを備えている。 The antireflection light-shielding cylinder 4a of the first aspect shields external light and has a hollow columnar attachment body 41 having an inner periphery surrounding the periphery of the first opening 100 as the illumination light receiving unit 100, and the attachment body 41 A light shielding tube side mounting portion (second mounting portion) 42 for detachably mounting the antireflection light shielding tube 4 a formed at one end to the second housing HS 2 of the measurement probe 2, and the inner surface of the attachment main body 41 And a first antireflection member 43 for preventing reflection of the illumination light radiated from the integrating sphere 21 through the diffuser plate 24.

アタッチメント本体４１は、例えば、測定プローブ２の第２筐体ＨＳ２の外形と同形の外形を有する中空柱状体である。本実施形態では、第２筐体ＨＳ２が円筒形状であるため、アタッチメント本体４１もこれと同外形の円筒形状である。アタッチメント本体４１の軸方向の長さは、試料ＳＭに照射される拡散光の光量およびリング状の照明領域が測定目的に合うように適宜な長さに設定されている。そして、アタッチメント本体４１は、上述の種類検出部２６によってアタッチメントＡＴの種類を検出させるために、図６に示すように、遮光筒側取付部４２近傍の一方端から軸方向外側に突出する検出用突起片４１１を備えている。この検出用突起片４１１の有無を種類検出部２６によって検出することで、反射防止遮光筒４ａであるか遮光筒３ａ、３ｂであるかの別が判定される。第１反射防止部材４３は、この第１態様では、例えば、黒色塗料を塗布することによって形成された黒色塗膜である。このような黒色塗膜によって第１反射防止部材４３を簡単に形成することができる。   The attachment main body 41 is, for example, a hollow columnar body having an outer shape that is the same as the outer shape of the second housing HS2 of the measurement probe 2. In the present embodiment, since the second housing HS2 has a cylindrical shape, the attachment main body 41 also has a cylindrical shape with the same outer shape. The length of the attachment body 41 in the axial direction is set to an appropriate length so that the amount of diffused light irradiated on the sample SM and the ring-shaped illumination area meet the measurement purpose. Then, the attachment main body 41 is for detection that protrudes outward in the axial direction from one end in the vicinity of the light-shielding tube side mounting portion 42 as shown in FIG. 6 in order to cause the type detection portion 26 to detect the type of the attachment AT. A protruding piece 411 is provided. By detecting the presence / absence of the detection protrusion 411 by the type detection unit 26, it is determined whether it is the antireflection light shielding cylinder 4a or the light shielding cylinders 3a, 3b. In the first aspect, the first antireflection member 43 is, for example, a black coating film formed by applying a black paint. The first antireflection member 43 can be easily formed by such a black coating film.

このような第１態様の反射防止遮光筒４ａをアタッチメントＡＴとして測定プローブ２に装着することによって、拡散板２４を介して積分球２１から放射された照明光は、アタッチメント本体４１の内周面に到達した場合には第１反射防止部材４３の黒色塗膜によってその反射が抑制または防止される。このため、試料ＳＭには、拡散板２４を介して積分球２１から放射され、直接試料ＳＭの表面に到達した照明光が照射される。この照明光は、試料ＳＭで反射され、受光筒２５内に配置された光ファイバケーブルＦＣの先端部で受光される。この反射光の受光においても、反射光は、アタッチメント本体４１の内周面に到達した場合には第１反射防止部材４３の黒色塗膜によってその反射が抑制または防止される。このため、試料ＳＭの表面から反射され直接光ファイバケーブルＦＣの先端部に到達した反射光が光ファイバケーブルＦＣの先端部で受光される。   By attaching the antireflection light-shielding cylinder 4a of the first aspect to the measurement probe 2 as the attachment AT, the illumination light radiated from the integrating sphere 21 via the diffusion plate 24 is applied to the inner peripheral surface of the attachment main body 41. When it reaches, the reflection is suppressed or prevented by the black coating film of the first antireflection member 43. For this reason, the sample SM is irradiated with illumination light that is emitted from the integrating sphere 21 via the diffusion plate 24 and reaches the surface of the sample SM directly. This illumination light is reflected by the sample SM and received by the tip of the optical fiber cable FC disposed in the light receiving cylinder 25. Also in the reception of the reflected light, when the reflected light reaches the inner peripheral surface of the attachment main body 41, the reflection is suppressed or prevented by the black coating film of the first antireflection member 43. For this reason, the reflected light reflected from the surface of the sample SM and directly reaching the tip of the optical fiber cable FC is received by the tip of the optical fiber cable FC.

このように第１態様の反射防止遮光筒４ａは、第１反射防止部材４３によって照明光や反射光の反射を抑制または防止するので、光学特性測定装置Ｄの前記第１開口部１００に配置される光ファイバケーブルＦＣの先端部２５１には、照明光の正反射成分を導光することができる。このため、光学特性測定装置Ｄは、第１態様の反射防止遮光筒４ａを用いることによって、上記保護パネルを備える例えば表示パネルや太陽電池等のパネルも測定することができる。   Thus, since the antireflection light-shielding cylinder 4a of the first aspect suppresses or prevents reflection of illumination light and reflected light by the first antireflection member 43, it is disposed in the first opening 100 of the optical characteristic measuring device D. The regular reflection component of the illumination light can be guided to the tip portion 251 of the optical fiber cable FC. For this reason, the optical characteristic measuring apparatus D can also measure panels, such as a display panel and a solar cell, provided with the said protection panel by using the antireflection light-shielding cylinder 4a of a 1st aspect.

したがって、この第１態様の反射防止遮光筒４ａは、光学特性測定装置Ｄに脱着可能なアタッチメントＡＴであるので、このアタッチメントＡＴを装着することなく測定することによって、光学特性測定装置Ｄは、一般的な試料を好適に測定することができ、一方、このアタッチメントＡＴを装着して測定することによって、光学特性測定装置Ｄは、例えば表示パネルや太陽電池等の保護パネルのような、パネル裏面の光学特性が表面の光学特性に影響する試料ＳＭも測定することができる。このように第１態様の反射防止遮光筒４ａは、光学特性測定装置Ｄに対する脱着によって、光学特性測定装置Ｄにおける一般的な試料ＳＭの測定機能を維持しつつ、例えば表示パネルや太陽電池等の保護パネルのような、パネル裏面の光学特性が表面の光学特性に影響する試料ＳＭの測定も光学特性測定装置Ｄに可能とさせ得る。   Therefore, since the antireflection light-shielding cylinder 4a of the first aspect is an attachment AT that can be attached to and detached from the optical property measuring device D, the optical property measuring device D is generally used by measuring without attaching the attachment AT. On the other hand, by attaching and measuring this attachment AT, the optical property measuring apparatus D can be used for a back panel such as a protective panel such as a display panel or a solar cell. Samples SM whose optical properties affect the optical properties of the surface can also be measured. As described above, the antireflection light-shielding cylinder 4a of the first aspect maintains the measurement function of the general sample SM in the optical property measuring device D by being attached to and detached from the optical property measuring device D, for example, such as a display panel or a solar cell. The optical property measuring apparatus D can also measure a sample SM such as a protective panel in which the optical properties of the back surface of the panel affect the optical properties of the front surface.

なお、前記保護パネル付きの例えば表示パネルや太陽電池等を測定するために、上述の第１態様の反射防止遮光筒４ａに代え、次の第２ないし第５態様の反射防止遮光筒４ｂ〜４ｅのいずれかが用いられてもよい。   In order to measure, for example, a display panel or a solar cell with the protection panel, the following antireflection light shielding cylinders 4b to 4e of the second to fifth aspects are used instead of the antireflection light shielding cylinder 4a of the first aspect. Either of these may be used.

図７は、実施形態の光学特性測定装置における第２態様の反射防止遮光筒の構成を示す図である。図７（Ａ）は、縦断面図であり、図７（Ｂ）は、透視斜視図である。図８は、実施形態の光学特性測定装置における第３態様の反射防止遮光筒の構成を示す図である。図８（Ａ）は、縦断面図であり、図８（Ｂ）は、反射防止部材本体４５の斜視図である。図９は、実施形態の光学特性測定装置における第４態様の反射防止遮光筒の構成を示す図である。図９（Ａ）は、縦断面図であり、図９（Ｂ）は、透視斜視図である。図１０は、実施形態の光学特性測定装置における第５態様の反射防止遮光筒の構成を示す縦断面図である。   FIG. 7 is a diagram illustrating a configuration of the antireflection light-shielding cylinder of the second aspect in the optical property measuring apparatus according to the embodiment. FIG. 7A is a longitudinal sectional view, and FIG. 7B is a perspective view. FIG. 8 is a diagram illustrating a configuration of the antireflection light-shielding tube of the third aspect in the optical property measuring apparatus according to the embodiment. 8A is a longitudinal sectional view, and FIG. 8B is a perspective view of the antireflection member main body 45. As shown in FIG. FIG. 9 is a diagram illustrating a configuration of the antireflection light-shielding tube of the fourth aspect in the optical property measuring apparatus according to the embodiment. FIG. 9A is a longitudinal sectional view, and FIG. 9B is a perspective view. FIG. 10 is a longitudinal sectional view showing the configuration of the antireflection light shielding tube of the fifth aspect in the optical property measuring apparatus of the embodiment.

第２態様の反射防止遮光筒４ｂは、図７に示すように、第１態様の反射防止遮光筒４ａと同様なアタッチメント本体４１（検出用突起片４１１を含む）、遮光筒側取付部４２および第１反射防止部材４３を備え、さらに、前記照明受光部１００である前記第１開口部１００の周縁とアタッチメント本体４１の内周面との間に位置するように設けられた、前記照明光の反射を防止するための第２反射防止部材４４を備えている。   As shown in FIG. 7, the antireflection light-shielding cylinder 4b of the second aspect includes an attachment main body 41 (including the detection protrusion 411), the light-shielding cylinder-side mounting portion 42, and the same as the antireflection light-shielding cylinder 4a of the first aspect. The first reflection preventing member 43 is provided, and the illumination light is provided between the peripheral edge of the first opening 100 that is the illumination light receiving unit 100 and the inner peripheral surface of the attachment main body 41. A second antireflection member 44 for preventing reflection is provided.

この第２反射防止部材４４は、図７に示す例では、前記第１開口部１００の周縁を囲むようにそして径方向内側に延びるように、アタッチメント本体４１の内周面から立設されるリング形状のフランジ板４４である。前記第１開口部１００の周縁を囲むように形成されるフランジ板４４の第３開口部は、前記第１開口部１００の直径と略同一な直径となる。そして、フランジ板４４は、この第２態様の反射防止遮光筒４ｂが測定プローブ２に装着された場合に、前記第１開口部１００の高さ位置に略位置するアタッチメント本体４１の軸方向位置に立設されている。フランジ板４４の内面は、反射を防止するために、黒色塗装されている。   In the example shown in FIG. 7, the second antireflection member 44 is a ring erected from the inner peripheral surface of the attachment main body 41 so as to surround the periphery of the first opening 100 and to extend radially inward. This is a flange plate 44 having a shape. A third opening of the flange plate 44 formed so as to surround the periphery of the first opening 100 has a diameter substantially the same as the diameter of the first opening 100. The flange plate 44 is positioned at the axial position of the attachment main body 41 substantially located at the height position of the first opening 100 when the antireflection light-shielding tube 4b of the second aspect is attached to the measurement probe 2. It is erected. The inner surface of the flange plate 44 is painted black to prevent reflection.

このような第２態様の反射防止遮光筒４ｂは、第１態様の反射防止遮光筒４ａと同様な作用効果を奏する。さらに、この第２態様の反射防止遮光筒４ｂは、第２反射防止部材４４を備えるので、前記照明受光部１００である前記第１開口部１００の周縁とアタッチメント本体４１の内周面との間における測定プローブ２の第２筐体ＨＳ２の露出表面での反射を防止することができる。したがって、この第２態様の反射防止遮光筒４ｂでは、前記露出表面が測定結果に影響を与えることがなく、より高精度で測定することができる。   Such an antireflection light-shielding cylinder 4b of the second aspect has the same effects as the antireflection light-shielding cylinder 4a of the first aspect. Furthermore, since the antireflection light-shielding tube 4b of the second aspect includes the second antireflection member 44, it is between the peripheral edge of the first opening 100 that is the illumination light receiving unit 100 and the inner peripheral surface of the attachment main body 41. The reflection at the exposed surface of the second housing HS2 of the measurement probe 2 can be prevented. Therefore, in the antireflection light-shielding tube 4b of the second aspect, the exposed surface does not affect the measurement result, and the measurement can be performed with higher accuracy.

また、第３態様の反射防止遮光筒４ｃは、図８に示すように、第１態様の反射防止遮光筒４ａと同様なアタッチメント本体４１（検出用突起片４１１を含む）および遮光筒側取付部４２を備えている。第１反射防止部材４３に相当する反射防止部材として、この第３態様の反射防止遮光筒４ｃは、前記照明受光部１００である前記第１開口１００の周縁を囲む内周を有する一方端部とアタッチメント本体４１の他方端部における内周面に接して固定される他方端部とを持つ中空錐台形状の反射防止部材本体４５と、反射防止部材本体４５の内面に備えられ、前記照明光の反射を防止するための第３反射防止部材４６とを備える。   Further, as shown in FIG. 8, the antireflection light-shielding cylinder 4c of the third aspect includes an attachment main body 41 (including the detection projection piece 411) and a light-shielding cylinder side mounting portion similar to the antireflection light-shielding cylinder 4a of the first aspect. 42 is provided. As an anti-reflection member corresponding to the first anti-reflection member 43, the anti-reflection light-shielding cylinder 4c of the third aspect includes one end portion having an inner periphery surrounding the periphery of the first opening 100 which is the illumination light receiving unit 100. A hollow frustum-shaped antireflection member main body 45 having the other end fixed in contact with the inner peripheral surface of the other end of the attachment main body 41, and an inner surface of the antireflection member main body 45 are provided. A third antireflection member 46 for preventing reflection.

この反射防止部材本体４５は、測定プローブ２の第２筐体ＨＳ２およびアタッチメント本体４１が円筒形状であることに応じて、中空円錐台形状である。反射防止部材本体４５の一方端部における第４開口部は、前記第１開口部１００の直径と略同一な直径となる。そして、反射防止部材本体４５の軸方向長さ（円錐台の高さ）は、この第３態様の反射防止遮光筒４ｃが測定プローブ２に装着された場合に、前記第１開口部１００の高さ位置に反射防止部材本体４５の前記一方端部が略位置するように設定されている。第３反射防止部材４６は、第１反射防止部材４３と同様に、例えば、黒色塗料を塗布することによって形成された黒色塗膜である。   The antireflection member main body 45 has a hollow truncated cone shape according to the second casing HS2 and the attachment main body 41 of the measurement probe 2 having a cylindrical shape. The fourth opening at one end of the antireflection member body 45 has a diameter that is substantially the same as the diameter of the first opening 100. The axial length of the antireflection member main body 45 (the height of the truncated cone) is the height of the first opening 100 when the antireflection light-shielding cylinder 4c of the third aspect is attached to the measurement probe 2. The one end portion of the antireflection member main body 45 is set so as to be substantially located at this position. Similarly to the first antireflection member 43, the third antireflection member 46 is a black coating film formed by applying a black paint, for example.

このような第３態様の反射防止遮光筒４ｃは、第１および第２態様の反射防止遮光筒４ａ、４ｂと同様な作用効果を奏する。そして、この第３態様の反射防止遮光筒４ｃは、アタッチメント本体４１に反射防止部材本体４５を組み込むことによって簡単に製造することができる。この第３態様の反射防止遮光筒４ｃでは、アタッチメント本体４１と反射防止部材本体４５とを個別に製造することができるから、これらを並行して製造することができる。   The antireflection light-shielding cylinder 4c of the third aspect has the same effects as the antireflection light-shielding cylinders 4a and 4b of the first and second aspects. And the antireflection light-shielding cylinder 4c of this 3rd aspect can be easily manufactured by incorporating the antireflection member main body 45 in the attachment main body 41. FIG. In the anti-reflection light-shielding cylinder 4c of the third aspect, the attachment main body 41 and the anti-reflection member main body 45 can be manufactured separately, so that they can be manufactured in parallel.

なお、図８に示す第３態様の反射防止遮光筒４ｃでは、反射防止部材本体４５の一方端部における第４開口部は、前記第１開口部１００の直径と略同一な直径であるが、前記第１開口部１００の直径よりも大きな直径であって、第４開口部を形成する反射防止部材本体４５の一方端は、測定プローブ２の第２筐体ＨＳ２における前記テーパ部に当接するように構成されてもよい。このような場合には、前記第１開口部１００の周縁と前記第４開口部の周縁との間における測定プローブ２の第２筐体ＨＳ２の露出表面での反射を防止するために、第２態様の反射防止遮光筒４ｂの第２反射防止部材４４と同様な部材が前記第４開口部の周縁から延設されるように設けられてもよい。   In the antireflection light-shielding tube 4c of the third aspect shown in FIG. 8, the fourth opening at one end of the antireflection member body 45 has a diameter substantially the same as the diameter of the first opening 100. One end of the antireflection member main body 45 having a diameter larger than the diameter of the first opening 100 and forming the fourth opening is in contact with the tapered portion of the second housing HS2 of the measurement probe 2. May be configured. In such a case, in order to prevent reflection on the exposed surface of the second housing HS2 of the measurement probe 2 between the periphery of the first opening 100 and the periphery of the fourth opening, A member similar to the second antireflection member 44 of the antireflection light-shielding tube 4b of the aspect may be provided so as to extend from the periphery of the fourth opening.

また、第４態様の反射防止遮光筒４ｂは、図９に示すように、第１態様の反射防止遮光筒４ａと同様なアタッチメント本体４１（検出用突起片４１１を含む）、遮光筒側取付部４２および第１反射防止部材４３と、第１態様の反射防止遮光筒４ａと同様な第２反射防止部材４４とを備え、さらに、アタッチメント本体４１内に設けられ、前記照明受光部１００である第１開口部１００から射出される照明光の光束を制限する光学絞り４７を備えている。   Further, as shown in FIG. 9, the antireflection light shielding cylinder 4b of the fourth aspect includes an attachment main body 41 (including the detection projection piece 411) similar to the antireflection light shielding cylinder 4a of the first aspect, and the light shielding cylinder side mounting portion. 42, a first antireflection member 43, and a second antireflection member 44 similar to the antireflection light-shielding cylinder 4a of the first aspect, and further provided in the attachment body 41, which is the illumination light receiving unit 100. An optical diaphragm 47 that restricts the luminous flux of illumination light emitted from one opening 100 is provided.

この光学絞り４７は、開口絞りであり、例えば、図９に示すように、外側円筒体４７ａと、内側円筒体４７ｂと、１または複数の支持体４７ｃとを備えている。外側円筒体４７ａは、前記第１開口部の直径と略同一な内直径を有し、アタッチメント本体４１内に向けて軸方向に沿って前記第１開口部１００の周縁から立設するように、第２反射防止部材４４の内面に固定されて設けられている。内側円筒体４７ｂは、受光筒２５の内直径と略同一な内直径を有している。支持体４７ｃは、板状の部材であり、その一方端が外側円筒体４７ａの内周面に固定され、その他方端が内側円筒体４７ｂの外周面に固定されている。支持体４７ｃは、図９に示す例では、略４５度の等間隔で周方向に並ぶように設けられた８個の部材である。このような支持体４７ｃによって内側円筒体４７ｂは、外側円筒体４７ａに支持される。そして、支持体４７ｃの長さは、この第４態様の反射防止遮光筒４ｄが測定プローブ２に装着された場合に、内側円筒体４７ｂの位置が受光筒２５の位置と一致するように設定される。このように支持体４７ｃの長さを調整することで、受光筒２５が、内側円筒体４７ｂによって延長される。そして、これら外側円筒体４７ａ、内側円筒体４７ｂおよび支持体４７ｃの各表面は、反射を防止するために、黒色塗装されている。   The optical aperture 47 is an aperture stop, and includes, for example, an outer cylindrical body 47a, an inner cylindrical body 47b, and one or more supports 47c as shown in FIG. The outer cylindrical body 47a has an inner diameter substantially the same as the diameter of the first opening, and is erected from the periphery of the first opening 100 along the axial direction into the attachment body 41. The second antireflection member 44 is fixed to the inner surface. The inner cylindrical body 47 b has an inner diameter that is substantially the same as the inner diameter of the light receiving cylinder 25. The support 47c is a plate-like member, and one end thereof is fixed to the inner peripheral surface of the outer cylindrical body 47a, and the other end is fixed to the outer peripheral surface of the inner cylindrical body 47b. In the example shown in FIG. 9, the support 47c is eight members provided so as to be arranged in the circumferential direction at equal intervals of approximately 45 degrees. The inner cylindrical body 47b is supported by the outer cylindrical body 47a by such a support body 47c. The length of the support 47c is set so that the position of the inner cylindrical body 47b matches the position of the light receiving cylinder 25 when the antireflection light-shielding cylinder 4d of the fourth aspect is attached to the measurement probe 2. The Thus, the light receiving cylinder 25 is extended by the inner cylindrical body 47b by adjusting the length of the support body 47c. Each surface of the outer cylindrical body 47a, the inner cylindrical body 47b, and the support body 47c is painted black to prevent reflection.

このような構成の光学絞り４７では、拡散板２４を介して積分球２１から放射された照明光における径方向の広がりは、外側円筒体４７ａおよび内側円筒体４７ｂの各周面（側面）によって規制され、照明光の光束が制限される。したがって、このような構成の光学絞り４７は、軸方向における外側円筒体４７ａおよび内側円筒体４７ｂの各長さを調整することによって、前記照明光の光束の制限量が調整される。また、光ファイバケーブルＦＣの先端部が試料ＳＭの表面を観測する領域面積は、内側円筒体４７ｂの周面（側面）によって規制される。   In the optical diaphragm 47 having such a configuration, the spread in the radial direction of the illumination light emitted from the integrating sphere 21 via the diffusion plate 24 is restricted by the peripheral surfaces (side surfaces) of the outer cylindrical body 47a and the inner cylindrical body 47b. Thus, the luminous flux of the illumination light is limited. Therefore, in the optical diaphragm 47 having such a configuration, the amount of restriction of the luminous flux of the illumination light is adjusted by adjusting the lengths of the outer cylindrical body 47a and the inner cylindrical body 47b in the axial direction. The area of the area where the tip of the optical fiber cable FC observes the surface of the sample SM is regulated by the peripheral surface (side surface) of the inner cylindrical body 47b.

このような第４態様の反射防止遮光筒４ｄは、第１および第２態様の反射防止遮光筒４ａ、４ｂと同様な作用効果を奏する。そして、このような第４態様の反射防止遮光筒４ｄは、光学絞り４７を備えるので、拡散板２４を介して積分球２１から射出される照明光の光量および角度を制限することができる。   Such an antireflection light-shielding cylinder 4d of the fourth aspect has the same effects as the antireflection light-shielding cylinders 4a and 4b of the first and second aspects. And since the antireflection light-shielding cylinder 4d of such a 4th aspect is equipped with the optical diaphragm 47, it can restrict | limit the light quantity and angle of the illumination light inject | emitted from the integrating sphere 21 via the diffuser plate 24. FIG.

そして、第５態様の反射防止遮光筒４ｅは、上述の第１ないし第４態様の反射防止遮光筒４ａ〜４ｄにおいて、内表面が凹凸を有するように、凹凸処理が内表面に施されている。図１０には、第４態様の反射防止遮光筒４ｄに対し、アタッチメント本体４１の黒色塗膜４３の表面４８に凹凸処理が実施されている例の第５態様の反射防止遮光筒４ｅが示されている。なお、第４態様の反射防止遮光筒４ｄにおける内表面前面に凹凸処理が実施されてもよい。このように内表面に凹凸処理を施すことによって、反射の防止をより向上させることができる。   The fifth embodiment of the anti-reflection light-shielding cylinder 4e is subjected to an uneven process on the inner surface so that the inner surface has the unevenness in the anti-reflection light-shielding cylinders 4a to 4d of the first to fourth aspects described above. . FIG. 10 shows an antireflection light-shielding cylinder 4e according to a fifth embodiment in which an unevenness treatment is performed on the surface 48 of the black coating film 43 of the attachment body 41 with respect to the antireflection light-shielding cylinder 4d according to the fourth aspect. ing. In addition, an unevenness | corrugation process may be implemented in the inner surface front surface in 4 d of antireflection light-shielding cylinders of a 4th aspect. As described above, the unevenness treatment is performed on the inner surface, so that the prevention of reflection can be further improved.

なお、上述の第１ないし第５態様の反射防止遮光筒４では、第１反射防止部材４３は、黒色塗膜であったが、これに限定されるものではない。黒色塗膜に代え、黒色の短毛を植毛した植毛紙であってもよく、この植毛紙がアタッチメント本体４１の内周面に接着され、貼付される。   In the antireflection light-shielding cylinder 4 of the first to fifth aspects described above, the first antireflection member 43 is a black coating film, but is not limited thereto. Instead of the black coating film, a flocked paper in which black short hairs are planted may be used, and this flocked paper is adhered to and adhered to the inner peripheral surface of the attachment main body 41.

また、上述の遮光筒３ａ、ガラス板付き遮光筒３ｂ、および、第１ないし第５態様の反射防止遮光筒４において、光ファイバケーブルＦＣは、その先端部が図３に示すように受光筒２５の軸方向途中に位置するように受光筒２５内に配置されてもよく、また、その先端が図５に示すように受光筒２５の先端部２５１に位置するように受光筒２５内に配置されてもよい。図５に示すように受光筒２５の先端部２５１に光ファイバケーブルＦＣの先端部が配置される場合には、相対的に広い面積で試料ＳＭを観測することができ、図３に示すように受光筒２５の軸方向途中に光ファイバケーブルＦＣの先端部が配置される場合には、相対的に狭い面積で試料ＳＭを観測することができる。   Further, in the light shielding cylinder 3a, the light shielding cylinder 3b with glass plate, and the antireflection light shielding cylinder 4 of the first to fifth aspects, the optical fiber cable FC has a light receiving cylinder 25 as shown in FIG. It may be arranged in the light receiving tube 25 so as to be positioned in the middle of the axial direction of the light receiving tube, and it is also arranged in the light receiving tube 25 so that its tip is located at the tip 251 of the light receiving tube 25 as shown in FIG. May be. When the tip of the optical fiber cable FC is disposed at the tip 251 of the light receiving tube 25 as shown in FIG. 5, the sample SM can be observed over a relatively large area, as shown in FIG. When the tip portion of the optical fiber cable FC is arranged in the middle of the light receiving cylinder 25 in the axial direction, the sample SM can be observed in a relatively small area.

次に、本実施形態の光学特性測定装置Ｄの動作について説明する。図１１は、実施形態における光学特性測定装置の測定動作を示すフローチャートである。   Next, the operation of the optical property measuring apparatus D of the present embodiment will be described. FIG. 11 is a flowchart illustrating the measurement operation of the optical characteristic measurement apparatus according to the embodiment.

図１１において、ユーザによって図略の電源スイッチが操作されることで、電源がオンされ、光学特性測定装置Ｄが起動する（Ｓ１１）。起動すると、演算制御部１５の制御部１５１は、初期化の必要な各部を初期化し、各部を当該機能に応じて制御する。そして、演算制御部１５の光学特性演算部１５２は、ケーブルＣＢを介して測定プローブ２の種類検出部２６からその検出結果を取得する（Ｓ１２）。次に、光学特性演算部１５２は、種類検出部２６の検出結果に基づいて測定プローブ２に装着されたアタッチメントＡＴの種類を判断する（Ｓ１３）。   In FIG. 11, when a power switch (not shown) is operated by the user, the power is turned on and the optical characteristic measuring device D is activated (S11). When activated, the control unit 151 of the arithmetic control unit 15 initializes each part that needs to be initialized, and controls each part according to the function. And the optical characteristic calculating part 152 of the calculation control part 15 acquires the detection result from the kind detection part 26 of the measurement probe 2 via the cable CB (S12). Next, the optical characteristic calculation unit 152 determines the type of the attachment AT attached to the measurement probe 2 based on the detection result of the type detection unit 26 (S13).

遮光筒３ａまたはガラス板付き遮光筒３ｂが測定プローブ２に装着された際には、本実施形態では、上述したように、遮光筒３ａおよびガラス板付き遮光筒３ｂは、検出用突起片４１１を備えない。このため、種類検出部２６がＰＲセンサである場合では、種類検出部２６は、反射光を受光しないので、検出結果は、ローレベルである。また、種類検出部２６がメカスイッチである場合では、種類検出部２６のメカスイッチがオンされないので、検出結果は、ローレベルである。一方、第１ないし第５態様の反射防止遮光筒４（４ａ〜４ｅ）のいずれかが測定プローブ２に装着された際には、上述したように、第１ないし第５態様の反射防止遮光筒４は、検出用突起片４１１を備えるので、種類検出部２６がＰＲセンサである場合では、種類検出部２６は、検出用突起片４１１によって反射された反射光を受光するので、検出結果は、ハイレベルであり、また、種類検出部２６がメカスイッチである場合では、種類検出部２６のメカスイッチが、検出用突起片４１１によってオンされるので、検出結果は、ハイレベルである。このように検出用突起片４１１の有無に応じて種類検出部２６から出力される検出結果のレベルが異なるので、光学特性演算部１５２は、種類検出部２６の検出結果に基づいて測定プローブ２に装着されたアタッチメントＡＴの種類を判定することができる。   When the light-shielding cylinder 3a or the light-shielding cylinder 3b with a glass plate is attached to the measurement probe 2, in the present embodiment, as described above, the light-shielding cylinder 3a and the light-shielding cylinder 3b with a glass plate have the detection protrusions 411. I do not prepare. For this reason, when the type detection unit 26 is a PR sensor, the type detection unit 26 does not receive the reflected light, and thus the detection result is at a low level. When the type detection unit 26 is a mechanical switch, the mechanical switch of the type detection unit 26 is not turned on, so the detection result is at a low level. On the other hand, when any one of the antireflection light shielding cylinders 4 (4a to 4e) of the first to fifth aspects is attached to the measurement probe 2, as described above, the antireflection light shielding cylinders of the first to fifth aspects are provided. 4 includes a detection projection piece 411. When the type detection unit 26 is a PR sensor, the type detection unit 26 receives the reflected light reflected by the detection projection piece 411. When the level is high and the type detection unit 26 is a mechanical switch, the mechanical switch of the type detection unit 26 is turned on by the detection protrusion 411, so the detection result is high level. As described above, since the level of the detection result output from the type detection unit 26 varies depending on the presence or absence of the detection projection piece 411, the optical characteristic calculation unit 152 applies the measurement probe 2 to the measurement probe 2 based on the detection result of the type detection unit 26. The type of attached AT can be determined.

上記処理Ｓ１３の判断の結果、種類検出部２６の検出結果がローレベルである場合には、光学特性演算部１５２は、測定プローブ２に装着されたアタッチメントＡＴが遮光筒３ａまたはガラス板付き遮光筒３ｂであると判定し（通常（拡散タイプ））、処理Ｓ１４以降の各処理を実行する。一方、上記処理Ｓ１３の判断の結果、種類検出部２６の検出結果がハイレベルである場合には、光学特性演算部１５２は、測定プローブ２に装着されたアタッチメントＡＴが第１ないし第５態様の反射防止遮光筒４のうちのいずれか１つであると判定し（遮光筒（黒塗装タイプ））、処理Ｓ２１以降の各処理を実行する。   If the detection result of the type detection unit 26 is at a low level as a result of the determination in the process S13, the optical characteristic calculation unit 152 indicates that the attachment AT attached to the measurement probe 2 is the light shielding tube 3a or the light shielding tube with a glass plate. It determines with it being 3b (normal (diffusion type)), and each process after process S14 is performed. On the other hand, as a result of the determination in the process S13, when the detection result of the type detection unit 26 is at a high level, the optical characteristic calculation unit 152 indicates that the attachment AT attached to the measurement probe 2 is in the first to fifth modes. It determines with it being any one of the anti-reflective light-shielding cylinders 4 (light-shielding cylinder (black painting type)), and performs each process after process S21.

処理Ｓ１４において、光学特性演算部１５２は、物体色測定モードを実行する。物体色測定モードの実行では、例えば、光学特性演算部１５２は、遮光筒３ａおよびガラス板付き遮光筒３ｂに対応する増幅率で制御部１５１を介して受光処理部１６を設定し、また、後述の処理Ｓ１７の測色演算１で用いられる校正データ（白色校正値および黒色校正値）を、遮光筒３ａおよびガラス板付き遮光筒３ｂに対応する校正データに設定する。   In process S14, the optical characteristic calculator 152 executes the object color measurement mode. In the execution of the object color measurement mode, for example, the optical characteristic calculation unit 152 sets the light reception processing unit 16 via the control unit 151 with an amplification factor corresponding to the light shielding tube 3a and the light shielding tube with glass plate 3b, and will be described later. The calibration data (white calibration value and black calibration value) used in the colorimetric calculation 1 in step S17 is set to calibration data corresponding to the light shielding tube 3a and the light shielding tube 3b with glass plate.

次に、処理Ｓ１５において、光学特性演算部１５２は、入力部１１をモニタし、測定開始の指示を受け付けたか否かを判断する。この処理Ｓ１５は、測定開始の指示を受け付けるまで、繰り返される（Ｓ１５でＮｏ）。   Next, in process S15, the optical characteristic calculator 152 monitors the input unit 11 and determines whether or not an instruction to start measurement has been received. This process S15 is repeated until an instruction to start measurement is received (No in S15).

そして、測定開始の指示を受け付けると（Ｓ１５でＹｅｓ）、処理Ｓ１６において、光学特性演算部１５２は、制御部１５１を介して光学特性測定装置Ｄの各部を制御し、測定を実行させる。より具体的には、制御部１５１は、測定プローブ２の光源２２を発光させる。光源２２から放射された光は、積分球２１の内面によって１または複数回拡散反射し、拡散板２４に到達し、拡散板２４を介して積分球２１から拡散光の照明光として放射される。積分球２１から放射された照明光は、試料ＳＭに照射され、試料ＳＭで反射される。ここで、アタッチメントＡＴの内面に到達した照明光は、アタッチメントＡＴが遮光筒３ａまたはガラス板付き遮光筒３ｂであるので、前記内面で拡散反射し、試料ＳＭに照射され、試料ＳＭで反射される。試料ＳＭで反射した照明光の反射光は、受光筒２５の光ファイバケーブルＦＣの先端部に到達すると、光ファイバケーブルＦＣに入射され、光ファイバケーブルＦＣによって受光処理部１６まで導光される。この導光された照明光の反射光は、光電変換され、所定の前処理を施される。この所定の前処理を施された信号が試料ＳＭの測定結果として受光処理部１６から演算制御部１５へ出力される。   Then, when an instruction to start measurement is received (Yes in S15), in process S16, the optical characteristic calculation unit 152 controls each part of the optical characteristic measurement device D via the control unit 151 to perform measurement. More specifically, the control unit 151 causes the light source 22 of the measurement probe 2 to emit light. The light emitted from the light source 22 is diffused and reflected one or more times by the inner surface of the integrating sphere 21, reaches the diffusion plate 24, and is emitted from the integrating sphere 21 as diffused illumination light through the diffusion plate 24. The illumination light emitted from the integrating sphere 21 is irradiated onto the sample SM and reflected by the sample SM. Here, the illumination light that has reached the inner surface of the attachment AT is diffusely reflected by the inner surface because the attachment AT is the light shielding tube 3a or the light shielding tube 3b with a glass plate, and is irradiated to the sample SM and reflected by the sample SM. . When the reflected light of the illumination light reflected by the sample SM reaches the tip of the optical fiber cable FC of the light receiving cylinder 25, it enters the optical fiber cable FC and is guided to the light reception processing unit 16 by the optical fiber cable FC. The reflected light of the guided illumination light is photoelectrically converted and subjected to a predetermined pretreatment. The signal subjected to the predetermined preprocessing is output from the light receiving processing unit 16 to the arithmetic control unit 15 as a measurement result of the sample SM.

次に、処理Ｓ１７において、光学特性演算部１５２は、測色演算１として、受光処理部１６から入力された試料ＳＭの測定結果に基づいて、物体色測定モードで所定の光学特性を求める。このように光学特性演算部１５２は、種類検出部２６で検出されたアタッチメントＡＴの種類に応じて前記所定の光学特性を求める。   Next, in process S <b> 17, the optical characteristic calculator 152 obtains predetermined optical characteristics in the object color measurement mode based on the measurement result of the sample SM input from the light receiving processor 16 as the colorimetric calculation 1. As described above, the optical characteristic calculation unit 152 obtains the predetermined optical characteristic according to the type of the attachment AT detected by the type detection unit 26.

次に、処理Ｓ１８において、光学特性演算部１５２は、制御部１５１を介して表示部１２に、この求めた所定の光学特性を表示する。そして、処理Ｓ１９において、光学特性演算部１５２は、入力部１１から測定終了が指示されているか否かを判断する。この判断の結果、測定終了が指示されている場合（Ｙｅｓ）には、処理を終了し、測定終了が指示されていない場合（Ｎｏ）には、処理を処理Ｓ１２に戻す。   Next, in process S <b> 18, the optical characteristic calculation unit 152 displays the determined predetermined optical characteristic on the display unit 12 via the control unit 151. In step S <b> 19, the optical characteristic calculation unit 152 determines whether or not the measurement unit is instructed from the input unit 11. If the end of measurement is instructed as a result of this determination (Yes), the process ends. If the end of measurement is not instructed (No), the process returns to step S12.

一方、処理Ｓ２１において、光学特性演算部１５２は、透明パネル測定モードを実行する。透明パネル測定モードの実行では、例えば、光学特性演算部１５２は、第１ないし第５態様の反射防止遮光筒４に対応する増幅率で制御部１５１を介して受光処理部１６を設定し、また、後述の処理Ｓ１７の測色演算２で用いられる校正データ（白色校正値および黒色校正値）を、第１ないし第５態様の反射防止遮光筒４に対応する校正データに設定する。より具体的には、アタッチメントＡＴが第１ないし第５態様の反射防止遮光筒４である場合では、試料ＳＭの表面に到達する照明光の光量は、アタッチメントＡＴが遮光筒３ａまたはガラス板付き遮光筒３ｂである場合に較べて、少ないので、これに応じて前記増幅率や校正データが調整される。   On the other hand, in the process S21, the optical characteristic calculation unit 152 executes the transparent panel measurement mode. In the execution of the transparent panel measurement mode, for example, the optical characteristic calculation unit 152 sets the light reception processing unit 16 via the control unit 151 with an amplification factor corresponding to the antireflection light-shielding cylinder 4 of the first to fifth aspects. Then, the calibration data (white calibration value and black calibration value) used in the colorimetric calculation 2 of processing S17 described later is set to calibration data corresponding to the antireflection light-shielding cylinder 4 of the first to fifth aspects. More specifically, in the case where the attachment AT is the antireflection light-shielding cylinder 4 of the first to fifth aspects, the amount of illumination light reaching the surface of the sample SM is determined by the attachment AT being shielded from the light-shielding cylinder 3a or the glass plate. Since there are few compared with the case of the cylinder 3b, the amplification factor and calibration data are adjusted accordingly.

次に、処理Ｓ２２において、光学特性演算部１５２は、前記処理Ｓ１５と同様に、入力部１１をモニタし、測定開始の指示を受け付けたか否かを判断する。この処理Ｓ２２は、測定開始の指示を受け付けるまで、繰り返される（Ｓ２２でＮｏ）。   Next, in process S22, the optical characteristic calculation unit 152 monitors the input unit 11 and determines whether or not an instruction to start measurement has been received, as in the process S15. This process S22 is repeated until an instruction to start measurement is received (No in S22).

そして、測定開始の指示を受け付けると（Ｓ２２でＹｅｓ）、処理Ｓ２３において、光学特性演算部１５２は、制御部１５１を介して光学特性測定装置Ｄの各部を制御し、測定を実行させる。より具体的には、制御部１５１は、測定プローブ２の光源２２を発光させる。光源２２から放射された光は、積分球２１の内面によって１または複数回拡散反射し、拡散板２４に到達し、拡散板２４を介して積分球２１から拡散光の照明光として放射される。積分球２１から放射された照明光は、試料ＳＭに照射され、試料ＳＭで反射される。ここで、アタッチメントＡＴの内面に到達した照明光は、アタッチメントＡＴが第１ないし第５態様の反射防止遮光筒４のうちのいずれかであるので、前記内面での拡散反射が抑制または防止される。試料ＳＭで反射した照明光の反射光は、受光筒２５の光ファイバケーブルＦＣの先端部に到達すると、光ファイバケーブルＦＣに入射され、光ファイバケーブルＦＣによって受光処理部１６まで導光される。この導光された照明光の反射光は、光電変換され、所定の前処理を施される。この所定の前処理を施された信号が試料ＳＭの測定結果として受光処理部１６から演算制御部１５へ出力される。   When an instruction to start measurement is received (Yes in S22), in process S23, the optical characteristic calculator 152 controls each part of the optical characteristic measuring device D via the controller 151 to perform measurement. More specifically, the control unit 151 causes the light source 22 of the measurement probe 2 to emit light. The light emitted from the light source 22 is diffused and reflected one or more times by the inner surface of the integrating sphere 21, reaches the diffusion plate 24, and is emitted from the integrating sphere 21 as diffused illumination light through the diffusion plate 24. The illumination light emitted from the integrating sphere 21 is irradiated onto the sample SM and reflected by the sample SM. Here, the illumination light that has reached the inner surface of the attachment AT is suppressed or prevented from being diffusely reflected on the inner surface because the attachment AT is one of the antireflection light-shielding cylinders 4 of the first to fifth aspects. . When the reflected light of the illumination light reflected by the sample SM reaches the tip of the optical fiber cable FC of the light receiving cylinder 25, it enters the optical fiber cable FC and is guided to the light reception processing unit 16 by the optical fiber cable FC. The reflected light of the guided illumination light is photoelectrically converted and subjected to a predetermined pretreatment. The signal subjected to the predetermined preprocessing is output from the light receiving processing unit 16 to the arithmetic control unit 15 as a measurement result of the sample SM.

次に、処理Ｓ２４において、光学特性演算部１５２は、測色演算２として、受光処理部１６から入力された試料ＳＭの測定結果に基づいて、透明パネル測定モードで所定の光学特性を求める。このように光学特性演算部１５２は、種類検出部２６で検出されたアタッチメントＡＴの種類に応じて前記所定の光学特性を求める。   Next, in process S24, the optical characteristic calculation unit 152 obtains predetermined optical characteristics in the transparent panel measurement mode based on the measurement result of the sample SM input from the light reception processing unit 16 as the color measurement calculation 2. As described above, the optical characteristic calculation unit 152 obtains the predetermined optical characteristic according to the type of the attachment AT detected by the type detection unit 26.

次に、処理Ｓ２５において、光学特性演算部１５２は、前記処理Ｓ１８と同様に、制御部１５１を介して表示部１２に、この求めた所定の光学特性を表示する。そして、処理Ｓ２６において、光学特性演算部１５２は、前記処理Ｓ１９と同様に、入力部１１から測定終了が指示されているか否かを判断する。この判断の結果、測定終了が指示されている場合（Ｙｅｓ）には、処理を終了し、測定終了が指示されていない場合（Ｎｏ）には、処理を処理Ｓ１２に戻す。   Next, in process S25, the optical characteristic calculation unit 152 displays the determined predetermined optical characteristic on the display unit 12 via the control unit 151, similarly to the process S18. In step S26, the optical characteristic calculation unit 152 determines whether or not the measurement end is instructed from the input unit 11 in the same manner as in step S19. If the end of measurement is instructed as a result of this determination (Yes), the process ends. If the end of measurement is not instructed (No), the process returns to step S12.

このように本実施形態の光学特性測定装置Ｄは、アタッチメントＡＴの脱着によって、一般的な試料の測定機能を維持しつつ、例えば表示パネルや太陽電池等の保護パネルを持つパネルのような、裏面の光学特性が表面の光学特性に影響する試料も測定することができる。そして、本実施形態の光学特性測定装置Ｄは、種類検出部２６によってアタッチメントＡＴの種類を自動判定することができ、光学特性演算部１５２によってアタッチメントＡＴの種類に応じて所定の光学特性を好適に求めることができる。   As described above, the optical property measurement apparatus D of the present embodiment maintains the general sample measurement function by attaching and detaching the attachment AT, and the back surface such as a panel having a protective panel such as a display panel or a solar cell. Samples whose optical properties affect the optical properties of the surface can also be measured. Then, the optical property measuring apparatus D of the present embodiment can automatically determine the type of the attachment AT by the type detector 26, and the optical property calculator 152 preferably has a predetermined optical property according to the type of the attachment AT. Can be sought.

本明細書は、上記のように様々な態様の技術を開示しているが、そのうち主な技術を以下に纏める。   The present specification discloses various aspects of the technology as described above, and the main technologies are summarized below.

一態様にかかる光学特性測定装置用アタッチメントは、拡散光が照明光として射出され、前記照明光の試料での反射光が入射される照明受光部を備える光学特性測定装置における前記照明受光部の開口面と前記試料の表面との間に介在される光学特性測定装置用アタッチメントであって、外光を遮光し、前記照明受光部の周縁を囲む内周を有する中空柱状のアタッチメント本体と、前記アタッチメント本体の内面に備えられ、前記照明光の反射を防止するための第１反射防止部材と、前記光学特性測定装置に脱着可能に取り付けるための取付部とを備える。   An attachment for an optical characteristic measurement device according to an aspect includes an opening of the illumination light receiving unit in the optical characteristic measurement device including an illumination light receiving unit through which diffused light is emitted as illumination light and reflected light from a sample of the illumination light is incident. An attachment for an optical property measuring apparatus interposed between a surface and the surface of the sample, the hollow columnar attachment body having an inner periphery that shields external light and surrounds the periphery of the illumination light receiving unit, and the attachment A first antireflection member provided on an inner surface of the main body for preventing reflection of the illumination light, and an attachment portion for detachably attaching to the optical characteristic measuring device.

上記保護パネルを備える例えば表示パネルや太陽電池等を様々な角度から観察および測定した結果、正反射方向から観察および測定すると、比較的安定した観察結果および測定結果が得られることが判明した。このような光学特性測定装置用アタッチメントでは、第１反射防止部材がアタッチメント本体の内面に設けられているので、照明受光部から射出されアタッチメント本体の内面に到達した照明光は、前記第１反射防止部材でその反射が抑えられるから、試料の表面に到達する照明光は、照明受光部から射出され直接試料の表面に到達した直達光となる。そして、試料の表面で反射してアタッチメント本体の内面に到達した照明光（直達光）の反射光は、前記第１反射防止部材でその反射が抑えられるから、照明受光部に到達する照明光（直達光）の反射光は、試料の表面から反射され直接照明受光部に到達した直達光（重直達光）となる。このように、上記光学特性測定装置用アタッチメントは、第１反射防止部材によって照明光や反射光の反射を抑制するので、光学特性測定装置の照明受光部には、照明光の正反射成分を導光することができる。このため、光学特性測定装置は、上記光学特性測定装置用アタッチメントを用いることによって、上記保護パネルを備える例えば表示パネルや太陽電池等のパネルも測定することができる。   As a result of observing and measuring, for example, a display panel and a solar cell provided with the protective panel from various angles, it has been found that a relatively stable observation result and measurement result can be obtained when observed and measured from the regular reflection direction. In such an optical characteristic measuring device attachment, since the first antireflection member is provided on the inner surface of the attachment body, the illumination light emitted from the illumination light receiving portion and reaching the inner surface of the attachment body is the first antireflection member. Since the reflection is suppressed by the member, the illumination light reaching the surface of the sample becomes direct light emitted from the illumination light receiving unit and directly reaching the surface of the sample. And since the reflected light of the illumination light (direct light) that is reflected on the surface of the sample and reaches the inner surface of the attachment body is suppressed by the first antireflection member, the illumination light that reaches the illumination light receiving unit ( The reflected light (direct light) is reflected directly from the surface of the sample and directly reaches the illumination light receiving unit (double direct light). As described above, since the attachment for an optical characteristic measurement device suppresses reflection of illumination light or reflected light by the first antireflection member, a regular reflection component of the illumination light is introduced into the illumination light receiving unit of the optical property measurement apparatus. Can be light. For this reason, the optical property measuring device can also measure a panel such as a display panel or a solar cell provided with the protective panel by using the attachment for the optical property measuring device.

したがって、上記光学特性測定装置用アタッチメントは、光学特性測定装置に脱着可能なアタッチメントであるので、例えば特許文献１に記載のような上記遮光筒を装着して（このアタッチメントを装着することなく）測定することによって、光学特性測定装置は、一般的な試料を好適に測定することができ、一方、このアタッチメントを装着して測定することによって、光学特性測定装置は、例えば表示パネルや太陽電池等の保護パネルを持つパネルのような、裏面の光学特性が表面の光学特性に影響する試料も測定することができる。このように上記光学特性測定装置用アタッチメントは、光学特性測定装置に対する脱着によって、光学特性測定装置における一般的な試料の測定機能を維持しつつ、例えば表示パネルや太陽電池等に用いられる保護パネルを持つパネルのような、裏面の光学特性が表面の光学特性に影響する試料の測定も光学特性測定装置に可能とさせ得る。   Therefore, since the attachment for an optical characteristic measuring device is an attachment that can be attached to and detached from the optical characteristic measuring device, for example, the measurement is performed by attaching the light shielding cylinder as described in Patent Document 1 (without attaching this attachment). By doing so, the optical property measuring device can suitably measure a general sample, while by attaching and measuring this attachment, the optical property measuring device can be used for, for example, a display panel or a solar cell. Samples such as a panel having a protective panel in which the optical properties of the back surface affect the optical properties of the front surface can also be measured. As described above, the attachment for an optical characteristic measuring device is provided with a protective panel used for, for example, a display panel or a solar cell while maintaining a general sample measuring function in the optical characteristic measuring device by detaching from the optical characteristic measuring device. The optical property measuring apparatus can also measure a sample such as a panel having an optical property of the back surface that affects the optical property of the front surface.

他の一態様では、上述の光学特性測定装置用アタッチメントにおいて、前記第１反射防止部材は、黒色塗膜である。   In another aspect, in the attachment for an optical property measurement apparatus described above, the first antireflection member is a black coating film.

このような光学特性測定装置用アタッチメントは、アタッチメント本体の内面に黒色の塗料を塗布することによって前記第１反射防止部材を簡単に形成することができる。   In such an attachment for an optical property measuring apparatus, the first antireflection member can be easily formed by applying a black paint on the inner surface of the attachment body.

他の一態様では、これら上述の光学特性測定装置用アタッチメントにおいて、前記照明受光部の周縁と前記アタッチメント本体の内周面との間に設けられ、前記照明光の反射を防止するための第２反射防止部材をさらに備える。   In another aspect, in the above-mentioned attachment for an optical characteristic measuring device, a second part is provided between the periphery of the illumination light receiving unit and the inner peripheral surface of the attachment main body to prevent reflection of the illumination light. An antireflection member is further provided.

前記照明受光部の周縁と前記アタッチメント本体の内周面との間に、光学特性測定装置の表面が露出している場合では、この露出表面で反射する場合があり得る。上記光学特性測定装置用アタッチメントは、第２反射防止部材を備えるので、前記光学特性測定装置の露出表面が測定結果に影響を与えることがない。   When the surface of the optical property measuring device is exposed between the peripheral edge of the illumination light receiving unit and the inner peripheral surface of the attachment main body, it may be reflected by the exposed surface. Since the attachment for an optical property measuring device includes the second antireflection member, the exposed surface of the optical property measuring device does not affect the measurement result.

他の一態様では、上述の光学特性測定装置用アタッチメントにおいて、前記取付部は、前記アタッチメント本体の一方端部に設けられ、前記第１反射防止部材は、前記照明受光部の周縁を囲む内周を有する一方端部と前記アタッチメント本体の他方端部における内周面に接する他方端部とを持つ中空錐台形状の反射防止部材本体と、前記反射防止部材本体の内面に備えられ、前記照明光の反射を防止するための第３反射防止部材とを備える。   In another aspect, in the above-described attachment for an optical property measurement device, the attachment portion is provided at one end portion of the attachment main body, and the first antireflection member is an inner periphery surrounding a periphery of the illumination light receiving portion. A hollow frustum-shaped antireflection member body having one end portion having the other end portion contacting the inner peripheral surface of the other end portion of the attachment body, and an inner surface of the antireflection member body, the illumination light And a third antireflection member for preventing the reflection.

このような光学特性測定装置用アタッチメントは、アタッチメント本体に第３反射防止部材を組み込むことによって簡単に製造することができる。そして、上記光学特性測定装置用アタッチメントでは、アタッチメント本体と第３反射防止部材とを個別に製造することができるから、これらを並行して製造することができる。   Such an attachment for an optical characteristic measuring device can be easily manufactured by incorporating the third antireflection member into the attachment body. And in the said attachment for optical characteristic measuring apparatuses, since an attachment main body and a 3rd antireflection member can be manufactured separately, these can be manufactured in parallel.

他の一態様では、上述の光学特性測定装置用アタッチメントにおいて、前記照明受光部の周縁と前記反射防止部材本体における前記一方端部の内周面との間に設けられ、前記照明光の反射を防止するための第４反射防止部材をさらに備える。   In another aspect, in the attachment for an optical characteristic measuring device described above, the illumination light receiving unit is provided between a peripheral edge of the illumination light receiving unit and an inner peripheral surface of the one end of the antireflection member body, and reflects the illumination light. A fourth antireflective member for preventing is further provided.

このような光学特性測定装置用アタッチメントは、第４反射防止部材を備えるので、前記光学特性測定装置の露出表面が測定結果に影響を与えることがない。   Since such an attachment for an optical property measuring device includes the fourth antireflection member, the exposed surface of the optical property measuring device does not affect the measurement result.

他の一態様では、これら上述の光学特性測定装置用アタッチメントにおいて、前記アタッチメント本体内に設けられ、前記照明受光部から射出される照明光の光束を制限する光学絞りをさらに備える。   In another aspect, the above-described attachment for an optical characteristic measurement device further includes an optical diaphragm provided in the attachment main body and restricting a luminous flux of illumination light emitted from the illumination light receiving unit.

このような光学特性測定装置用アタッチメントは、光学絞りを備えるので、照明受光部から射出される照明光の光量および角度を制限することができる。   Since such an attachment for an optical characteristic measuring device includes an optical diaphragm, the amount and angle of illumination light emitted from the illumination light receiving unit can be limited.

そして、他の一態様にかかる光学特性測定装置は、拡散光が照明光として射出され、前記照明光の試料での反射光が入射される照明受光部を備え、前記反射光を受光して所定の光学特性を求める光学特性測定本体と、前記光学特性測定本体と脱着可能である複数の光学特性測定装置用アタッチメントとを備え、前記複数の光学特性測定装置用アタッチメントのうちの少なくとも１つは、これら上述のいずれかに記載の光学特性測定装置用アタッチメントである。   The optical characteristic measurement apparatus according to another aspect includes an illumination light receiving unit that emits diffused light as illumination light and receives reflected light from a sample of the illumination light, and receives the reflected light to receive a predetermined light. An optical property measurement main body for obtaining the optical property, and a plurality of optical property measurement device attachments that are detachable from the optical property measurement main body, and at least one of the plurality of optical property measurement device attachments includes: It is an attachment for an optical property measuring device according to any of the above.

このような光学特性測定装置は、上記光学特性測定装置用アタッチメントの脱着によって、一般的な試料の測定機能を維持しつつ、例えば表示パネルや太陽電池等の保護パネルを持つパネルのような、裏面の光学特性が表面の光学特性に影響する試料も測定することができる。   Such an optical characteristic measuring device is a back surface such as a panel having a protective panel such as a display panel or a solar cell while maintaining a general sample measuring function by detaching the attachment for the optical characteristic measuring device. Samples whose optical properties affect the optical properties of the surface can also be measured.

他の一態様では、上述の光学特性測定装置において、前記光学特性測定本体は、装着された光学特性測定装置用アタッチメントの種類を検出する種類検出部と、前記種類検出部で検出された光学特性測定装置用アタッチメントの種類に応じて前記所定の光学特性を求める光学特性測定部とを備える。   In another aspect, in the above-described optical property measurement apparatus, the optical property measurement main body includes a type detection unit that detects the type of attached optical property measurement device attachment, and the optical property detected by the type detection unit. An optical property measuring unit that obtains the predetermined optical property according to the type of attachment for the measuring device.

このような光学特性測定装置は、種類検出部によって光学特性測定装置用アタッチメントの種類を自動判定することができ、光学特性測定部によって光学特性測定装置用アタッチメントの種類に応じて所定の光学特性を好適に求めることができる。   Such an optical characteristic measuring device can automatically determine the type of attachment for the optical characteristic measuring device by the type detection unit, and the optical characteristic measuring unit has a predetermined optical characteristic according to the type of attachment for the optical characteristic measuring device. It can be obtained suitably.

この出願は、２０１２年１０月１６日に出願された日本国特許出願特願２０１２−２２８８３４を基礎とするものであり、その内容は、本願に含まれるものである。   This application is based on Japanese Patent Application No. 2012-228834 filed on October 16, 2012, the contents of which are included in the present application.

本発明を表現するために、上述において図面を参照しながら実施形態を通して本発明を適切且つ十分に説明したが、当業者であれば上述の実施形態を変更および／または改良することは容易に為し得ることであると認識すべきである。したがって、当業者が実施する変更形態または改良形態が、請求の範囲に記載された請求項の権利範囲を離脱するレベルのものでない限り、当該変更形態または当該改良形態は、当該請求項の権利範囲に包括されると解釈される。   In order to express the present invention, the present invention has been properly and fully described through the embodiments with reference to the drawings. However, those skilled in the art can easily change and / or improve the above-described embodiments. It should be recognized that this is possible. Therefore, unless the modifications or improvements implemented by those skilled in the art are at a level that departs from the scope of the claims recited in the claims, the modifications or improvements are not covered by the claims. To be construed as inclusive.

本発明によれば、光学特性測定装置用アタッチメントおよび光学特性測定装置を提供することができる。   According to the present invention, it is possible to provide an attachment for an optical characteristic measuring device and an optical characteristic measuring device.

Claims (6)

拡散光が照明光として射出され、前記照明光の試料での反射光が入射される照明受光部を備え、前記反射光を受光して所定の光学特性を求める光学特性測定装置本体と、
前記光学特性測定装置本体と脱着可能である複数の光学特性測定装置用アタッチメントとを備え、
前記光学特性測定装置本体は、前記光学特性測定装置用アタッチメントを取り付けるための筺体側取付部を備え、
前記複数の光学特性測定装置用アタッチメントは、第１のアタッチメントと、前記第１のアタッチメントに代えて前記光学特性測定装置本体に取り付けられる第２のアタッチメントとを含み、
前記第１のアタッチメントは、一方端から他方端に向けて径が徐々に小さくなるように且つ内面が光を拡散反射するように形成されたテーパ部と、前記テーパ部の一方端に形成され前記光学特性測定装置本体の筺体側取付部に脱着可能に取り付けるための第１の取付部と、前記第１の取付部の開口径に比べて小さい開口径をもつように前記テーパ部の他方端に形成された第２開口部と、を備え、
前記第２のアタッチメントは、外光を遮光し前記照明受光部の周縁を囲む内周を有する中空柱状のアタッチメント本体と、前記光学特性測定装置本体の筺体側取付部に脱着可能に取り付けるための第２の取付部と、前記第２開口部に比べて大きな径をもつ測定開口部と、前記中空柱状のアタッチメント本体の内面に備えられ前記照明光の反射を防止するための第１反射防止部材とを備えること
を特徴とする光学特性測定装置。 An optical characteristic measuring device main body that includes an illumination light receiving unit that emits diffused light as illumination light and receives reflected light from a sample of the illumination light, and receives the reflected light to obtain predetermined optical characteristics;
A plurality of optical property measuring device attachments that are detachable from the optical property measuring device body ;
The optical property measuring device main body includes a housing side attaching portion for attaching the attachment for the optical property measuring device,
The plurality of optical property measuring device attachments include a first attachment and a second attachment attached to the optical property measuring device main body instead of the first attachment,
The first attachment is formed at one end of the tapered portion, and a tapered portion formed so that the diameter gradually decreases from one end to the other end and the inner surface diffusely reflects light. A first mounting portion for detachably mounting to the housing side mounting portion of the optical characteristic measuring apparatus main body, and an opening diameter smaller than the opening diameter of the first mounting portion at the other end of the tapered portion A second opening formed,
The second attachment is a hollow columnar attachment body having an inner periphery that shields outside light and surrounds the periphery of the illumination light receiving section, and a second attachment for detachably attaching to the housing side mounting section of the optical property measuring apparatus body. 2 attachment portions, a measurement opening portion having a diameter larger than that of the second opening portion, and a first antireflection member provided on the inner surface of the hollow columnar attachment body for preventing reflection of the illumination light An optical property measuring apparatus comprising: 前記テーパ部の内面は、白色塗装されており、
前記第２のアタッチメントの前記第１反射防止部材は、黒色塗膜であること
を特徴とする請求項１に記載の光学特性測定装置。 The inner surface of the tapered portion is painted white,
The optical property measuring apparatus according to claim 1, wherein the first antireflection member of the second attachment is a black coating film. 前記第２のアタッチメントは、前記照明受光部の周縁と前記中空柱状のアタッチメント本体の内周面との間に設けられ、前記照明光の反射を防止するためのリング形状の第２反射防止部材をさらに備えること
を特徴とする請求項１または請求項２に記載の光学特性測定装置。 The second attachment is provided between a peripheral edge of the illumination light receiving portion and an inner peripheral surface of the hollow columnar attachment main body, and includes a ring-shaped second antireflection member for preventing reflection of the illumination light. The optical characteristic measuring device according to claim 1, further comprising: 前記第２の取付部は、前記中空柱状のアタッチメント本体の一方端部に設けられ、
前記第１反射防止部材は、前記照明受光部の周縁を囲む内周を有する一方端部と前記中空柱状のアタッチメント本体の他方端部における内周面に接する他方端部とを持つ中空錐台形状の反射防止部材本体と、前記反射防止部材本体の内面に備えられ、前記照明光の反射を防止するための第３反射防止部材とを備えること
を特徴とする請求項１に記載の光学特性測定装置。 The second mounting portion is provided at one end of the hollow columnar attachment body,
The first antireflection member has a hollow frustum shape having one end portion having an inner periphery surrounding the periphery of the illumination light receiving portion and the other end portion in contact with the inner peripheral surface of the other end portion of the hollow columnar attachment body. The optical property measurement according to claim 1, further comprising: an antireflection member main body; and a third antireflection member provided on an inner surface of the antireflection member main body for preventing reflection of the illumination light. Equipment . 前記中空柱状アタッチメント本体内に設けられ、前記照明受光部から射出される照明光の光束を制限する光学絞りをさらに備えること
を特徴とする請求項１ないし請求項４のいずれか１項に記載の光学特性測定装置。 5. The optical diaphragm according to claim 1 , further comprising an optical diaphragm that is provided in the hollow columnar attachment main body and restricts a light flux of illumination light emitted from the illumination light receiving unit . Optical property measuring device . 前記光学特性測定装置本体は、装着された光学特性測定装置用アタッチメントの種類を検出する種類検出部と、前記種類検出部で検出された光学特性測定装置用アタッチメントの種類が前記第１のアタッチメントであると判断したときは物体色測定モードを起動し、前記第２のアタッチメントであると判断したときはパネル測定モードを起動して、起動したモードで光学特性を求める光学特性測定部とを備えること
を特徴とする請求項１〜５のいずれか１項に記載の光学特性測定装置。 The optical characteristic measuring device main body includes a type detecting unit that detects the type of attached optical characteristic measuring device attachment, and the type of optical characteristic measuring device attachment detected by the type detecting unit is the first attachment. An object color measurement mode is activated when it is determined to be present, and a panel measurement mode is activated when it is determined to be the second attachment, and an optical characteristic measurement unit for obtaining optical characteristics in the activated mode is provided. The optical property measuring apparatus according to claim 1, wherein:
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