JP5944910B2 - 窒化珪素焼結体とその製造方法、およびそれを用いた耐摩耗性部材とベアリング - Google Patents
窒化珪素焼結体とその製造方法、およびそれを用いた耐摩耗性部材とベアリング Download PDFInfo
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- JP5944910B2 JP5944910B2 JP2013532436A JP2013532436A JP5944910B2 JP 5944910 B2 JP5944910 B2 JP 5944910B2 JP 2013532436 A JP2013532436 A JP 2013532436A JP 2013532436 A JP2013532436 A JP 2013532436A JP 5944910 B2 JP5944910 B2 JP 5944910B2
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Description
式:Mc=Fn9/8/(K1c 1/2・Hv5/8)
から算出されるマシナブル係数Mcが0.125〜0.150の範囲である。
Mc=Fn9/8/(K1c 1/2・Hv5/8) …(1)
式(1)において、Fnは押込み荷重であり、ここでは20kgfとする。20kgfの押込み荷重Fnは、窒化珪素焼結体の硬度や靭性を測定する上で適した値である。ビッカース硬度(Hv)は、JIS−R−1610に準じて測定するものとする。破壊靭性値(K1c)は、JIS−R−1607の圧子圧入法(IF法)に準じて測定するものとする。破壊靭性値の計算には、新原の式を用いるものとする。後述するベアリングボールについては、その断面を使用して測定するものとする。
Sc.m=[(1+10・μ)・Pmax・(d1/2)]/K1c
パラメータSc.mが大きいと摩耗が大きく、パラメータSc.mが小さいと摩耗が小さいことを意味する。材料の結晶粒径dを小さくすることや破壊靭性値K1cを大きくすることで、摩耗を抑えることが可能であることが分かる。
TI値=ηb/ηa
せん断速度aおよびbの値に特に決まりはないが、TI値が1以上の値をとるように設定するのが好ましい。TI値が1に近づくほど、ニュートン流体の挙動に近くなり、凝集のない、あるいは凝集の極めて弱い高分散のスラリーであることを意味する。ここでは、
せん断速度aを6s−1、せん断速度bを60s−1としたときのTI値が1〜2の範囲となるように、焼結助剤粉末を含むスラリーを調製することが好ましい。
酸素含有量が1.0質量%、平均粒子径が0.7μm、α相の割合が90質量%(残部はβ相)である窒化珪素粉末を用意した。焼結助剤として、Al2O3粉末(平均粒子径1.2μm)、AlN粉末(平均粒子径1.2μm)、Y2O3粉末(平均粒子径1.5μm)、HfO2粉末(平均粒子径0.8μm)、Mo2C粉末(平均粒子径0.7μm)、およびSiC粉末(平均粒子径0.7μm)を用意した。これら原料粉末を表1の割合で混合した。原料粉末の混合は、焼結助剤粉末を含むスラリーと窒化珪素粉末を含むスラリーとを混合することにより実施した。焼結助剤粉末を含むスラリーの分散係数(TI値)は、表2に示す通りである。比較例2については、事前分散を実施していない。原料混合物にバインダを添加してボールミルで混合した。
実施例1と同じ原料混合物を使用し、焼結条件を窒素雰囲気中にて1800℃×5時間、HIP処理条件を100MPaにて1600℃×1時間に変更する以外は、実施例1と同様にして窒化珪素焼結体を作製した。得られた窒化珪素焼結体について、実施例1と同様の方法により、窒化珪素結晶粒子の長軸の平均粒径、ビッカース硬度、破壊靭性値、マシナブル係数Mcを測定した。その結果を表4に示す。
実施例2と同じ原料混合物を使用し、焼結条件を窒素雰囲気中にて1850℃×5時間、HIP処理条件を100MPaにて1620℃×2時間に変更する以外は、実施例2と同様にして窒化珪素焼結体を作製した。得られた窒化珪素焼結体について、実施例1と同様の方法により、窒化珪素結晶粒子の長軸の平均粒径、ビッカース硬度、破壊靭性値、マシナブル係数Mcを測定した。その結果を表4に示す。
実施例4と同じ原料混合物を使用し、焼結条件を窒素雰囲気中にて1820℃×5時間、HIP処理条件を100MPaにて1700℃×1時間に変更する以外は、実施例4と同様にして窒化珪素焼結体を作製した。得られた窒化珪素焼結体について、実施例1と同様の方法により、窒化珪素結晶粒子の長軸の平均粒径、ビッカース硬度、破壊靭性値、マシナブル係数Mcを測定した。その結果を表4に示す。
Claims (12)
- アルミニウムを酸化物換算量で2〜10質量%の範囲、希土類元素から選ばれる少なくとも1つのR元素を酸化物換算量で1〜5質量%範囲、および4A族元素、5A族元素および6A族元素から選ばれる少なくとも1つのM元素を酸化物換算量で1〜5質量%の範囲で含有する窒化珪素焼結体であって、
前記窒化珪素焼結体を構成する窒化珪素結晶粒子の長軸の平均粒径が5μm以上であり、
前記アルミニウムの含有量と前記R元素の含有量との比が酸化物換算量で2:1〜5:1の範囲であり、かつ前記アルミニウムの含有量と前記M元素の含有量との比が酸化物換算量で2:1〜10:1の範囲であると共に、前記窒化珪素焼結体の任意の断面において、100μm×100μmの単位面積当たりに存在する粒界相の面積比率が35〜50%の範囲であり、
前記窒化珪素焼結体のビッカース硬度(Hv)が1000〜1500の範囲、破壊靭性値(K1c)が4.5〜6.5MPa・m1/2の範囲であると共に、押込み荷重Fnが20kgfのときに、
式:Mc=Fn9/8/(K1c 1/2・Hv5/8)
から算出されるマシナブル係数Mcが0.125〜0.150の範囲であることを特徴とする窒化珪素焼結体。 - 請求項1記載の窒化珪素焼結体において、
炭化珪素を1〜5質量%の範囲で含有することを特徴とする窒化珪素焼結体。 - 請求項1または請求項2記載の窒化珪素焼結体を具備することを特徴とする耐摩耗性部材。
- 請求項3記載の耐摩耗性部材において、
前記窒化珪素焼結体の摺動面は、表面粗さRaが0.1μm以下となるように研磨加工されていることを特徴とする耐摩耗性部材。 - 請求項3または請求項4記載の耐摩耗性部材において、
ベアリングボールであることを特徴とする耐摩耗性部材。 - 請求項5記載の耐摩耗性部材において、
前記ベアリングボールはファンモータ用ベアリングに用いられることを特徴とする耐摩耗性部材。 - 請求項5記載の耐摩耗性部材において、
前記ベアリングボールの転がり寿命は、最大接触圧力が5.1GPa、回転数が1200rpmの条件下にてスラスト型軸受け試験機で測定したとき、400時間以上であることを特徴とする耐摩耗性部材。 - 請求項1または請求項2記載の窒化珪素焼結体からなるベアリングボールを具備することを特徴とするベアリング。
- 請求項1記載の窒化珪素焼結体を製造する方法であって、
酸素含有量が4質量%以下で、α相型窒化珪素を85質量%以上含み、平均粒子径が1μm以下である窒化珪素粉末を用意する工程と、
前記窒化珪素粉末に、酸化アルミニウム粉末を2〜10質量%の範囲、希土類元素から選ばれる少なくとも1つのR元素の酸化物粉末を1〜5質量%範囲、および4A族元素、5A族元素および6A族元素から選ばれる少なくとも1つのM元素を含む化合物粉末を1〜5質量%の範囲で添加し、原料混合物を調製する工程と、
前記原料混合物を所望の形状に成形し、成形体を得る工程と、
前記成形体を脱脂し、脱脂体を得る工程と、
前記脱脂体を1600〜1900℃の範囲の温度で焼結し、焼結体を得る工程と
を具備することを特徴とする窒化珪素焼結体の製造方法。 - 請求項9記載の窒化珪素焼結体の製造方法において、
前記窒化珪素粉末に、さらに炭化珪素粉末を1〜5質量%の範囲で添加することを特徴とする窒化珪素焼結体の製造方法。 - 請求項9または請求項10記載の窒化珪素焼結体の製造方法において、
さらに、前記焼結体に非酸化性雰囲気中にて30MPa以上の圧力下で熱間静水圧プレス処理を施す工程を具備することを特徴とする窒化珪素焼結体の製造方法。 - 請求項9ないし請求項11のいずれか1項記載の窒化珪素焼結体の製造方法において、
前記酸化アルミニウム粉末、前記R元素の酸化物粉末、および前記M元素を含む化合物粉末を含む第1のスラリーを、チクソトロピーインデックスが1〜2の範囲となるように調製し、前記第1のスラリーと前記窒化珪素粉末を含む第2のスラリーとを混合し、前記原料混合物を調製することを特徴とする窒化珪素焼結体の製造方法。
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