JP5922469B2 - Grinding equipment - Google Patents

Grinding equipment Download PDF

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JP5922469B2
JP5922469B2 JP2012083945A JP2012083945A JP5922469B2 JP 5922469 B2 JP5922469 B2 JP 5922469B2 JP 2012083945 A JP2012083945 A JP 2012083945A JP 2012083945 A JP2012083945 A JP 2012083945A JP 5922469 B2 JP5922469 B2 JP 5922469B2
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grinding
workpiece
grindstone
chuck table
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聡 山中
聡 山中
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Disco Corp
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Description

本発明は、シリコン、サファイア或いは炭化珪素の如き硬脆材料製ウエーハの片面研削に好適に使用される研削装着に関する。   The present invention relates to a grinding mounting suitably used for single-side grinding of a wafer made of a hard and brittle material such as silicon, sapphire or silicon carbide.

下記特許文献１には、硬脆材料製ウエーハの片面研削に好適に使用することができる研削装置が開示されている。この研削装置は、回転駆動されるチャックテーブルを有する被加工物保持手段と、回転駆動され且つチャックテーブルに対して接近及び離隔する方向に移動せしめられる研削ホイールを有する研削手段と、研削液供給手段とを備えている。研削ホイールは環状に配列された複数個の砥石を有し、回転駆動されるチャックテーブル上に保持された被加工物の表面に、回転駆動される研削ホイールの砥石を押圧せしめることによって被加工物の片面が研削される。研削液供給手段は、研削ホイールを支持している回転スピンドルに配設されている供給路を介して、砥石の内周面に向けて研削液を供給する。   The following Patent Document 1 discloses a grinding apparatus that can be suitably used for single-side grinding of a wafer made of a hard and brittle material. The grinding apparatus includes a workpiece holding means having a chuck table that is rotationally driven, a grinding means having a grinding wheel that is rotationally driven and is moved toward and away from the chuck table, and a grinding fluid supply means And. The grinding wheel has a plurality of grindstones arranged in an annular shape, and the work piece is pressed by pressing the grindstone of the grind wheel that is driven to rotate onto the surface of the work piece that is held on the chuck table that is driven to rotate. One side is ground. The grinding fluid supply means supplies the grinding fluid toward the inner peripheral surface of the grindstone via a supply path disposed on the rotary spindle that supports the grinding wheel.

特開２００３−６８６９０号公報JP 2003-68690 A

而して、上述したとおりの従来の研削装置には、研削ホイールが高速回転せしめられることに起因して、砥石の内周面に向けて供給された研削液が砥石乃至砥石と被加工物との接触部位に効果的に供給されることなく周囲に飛散されてしまって、良好な研削を遂行することが阻害されてしまう傾向がある。   Thus, in the conventional grinding apparatus as described above, the grinding liquid supplied toward the inner peripheral surface of the grindstone is supplied to the grindstone or the grindstone and the work piece because the grinding wheel is rotated at a high speed. There is a tendency that it is scattered to the surroundings without being effectively supplied to the contact area, and hindering good grinding.

本発明は上記事実に鑑みてなされたものであり、その主たる技術的課題は、研削液を充分効果的に供給することができる、新規且つ改良された研削装置を提供することである。   The present invention has been made in view of the above facts, and a main technical problem thereof is to provide a new and improved grinding apparatus capable of supplying a grinding liquid sufficiently effectively.

本発明者は、鋭意検討の結果、砥石が被加工物の片面に押圧される研削領域において、砥石の内周面及び外周面に夫々研削液を噴射するための内側研削液噴射手段及び外側研削液噴射手段から研削液供給手段を構成することによって、上記主たる技術的課題を達成することができることを見出した。   As a result of intensive studies, the present inventor has found that an inner grinding liquid injection means and an outer grinding for injecting a grinding liquid onto the inner peripheral surface and the outer peripheral surface of the grindstone, respectively, in a grinding region where the grindstone is pressed against one surface of the workpiece. It has been found that the main technical problem can be achieved by configuring the grinding liquid supply means from the liquid injection means.

即ち、本発明によれば、上記主たる技術的課題を達成する研削装置として、回転駆動されるチャックテーブルを有する被加工物保持手段と、回転駆動され且つ該チャックテーブルに対して接近及び離隔する方向に移動せしめられる研削ホイールを有する研削手段と、研削液供給手段とを備え、該研削ホイールは環状に配設された砥石を有し、回転駆動される該チャックテーブル上に保持された被加工物の露呈片面に、回転駆動される該研削ホイールの該砥石を押圧せしめることによって該被加工物の該表面が研削される研削装置において、
該研削ホイールと該チャックテーブルとは中心軸線を変位せしめて配置され、
該研削液供給手段は、該砥石が該被加工物の該片面に押圧される弧状研削領域において、該砥石の内周面及び外周面に夫々研削液を噴射するための内側研削液噴射手段及び外側研削液噴射手段を含み、
該内側研削液噴射手段は、該被加工物の上方であって該弧状研削領域の内側に弧状に配列された複数個の噴射孔を有し、該外側研削液噴射手段は、該被加工物の上方であって該弧状研削領域の外側に弧状に配列された複数個の噴射孔を有する、ことを特徴とする研削装置が提供される。 That is, according to the present invention, as a grinding apparatus that achieves the main technical problem, a workpiece holding means having a chuck table that is rotationally driven, and a direction that is rotationally driven and approaches and separates from the chuck table. A grinding means having a grinding wheel that is moved to a position, and a grinding fluid supply means, the grinding wheel having a grindstone arranged in an annular shape, and a workpiece held on the chuck table that is rotationally driven In the grinding apparatus in which the surface of the workpiece is ground by pressing the grindstone of the grinding wheel that is rotationally driven on the exposed surface of
The grinding wheel and the chuck table are arranged with the central axis displaced,
The grinding liquid supply means includes an inner grinding liquid injection means for injecting the grinding liquid onto the inner peripheral surface and the outer peripheral surface of the grindstone, respectively, in an arcuate grinding region where the grindstone is pressed against the one surface of the workpiece. look including an outer grinding fluid injection means,
The inner grinding fluid spraying means has a plurality of spraying holes arranged in an arc shape above the workpiece and inside the arcuate grinding region, and the outer grinding fluid spraying means includes the workpiece. a of upward that having a arc-shaped ground region a plurality of injection holes arranged in an arc on the outside of, the grinding device is provided, characterized in that.

好適実施形態においては、該弧状研削領域は略９０乃至１８０度の角度範囲に渡って存在する。該研削液供給手段は、中央円形部材と、該円形部材を同心状に囲繞する外側リング部材とを含み、該中央円形部材と該外側リング部材との間には、該弧状研削領域に対応して位置する弧状開口が形成され、該内側研削液噴射手段の該複数個の噴射孔は該弧状開口に沿って該中央円形部材の外周面に周方向に間隔をおいて形成され、該外側研削液噴射手段の該複数個の噴射孔は該弧状開口に沿って該外側リング部材の内周面に周方向に間隔をおいて形成されているのが好適である。 In a preferred embodiment, arc-shaped grinding region exists over an angular range of approximately 90 to 180 degrees. The grinding fluid supply means includes a central circular member and an outer ring member concentrically surrounding the circular member, and the gap between the central circular member and the outer ring member corresponds to the arc-shaped grinding region. And the plurality of injection holes of the inner grinding fluid spraying means are formed along the arc-shaped openings on the outer peripheral surface of the central circular member at intervals in the circumferential direction. plurality several injection holes of the liquid injection means is preferred that that are formed at intervals in the peripheral direction on the inner peripheral surface of the outer ring member along the arc-shaped opening.

本発明の研削装置においては、砥石が被加工物の片面に押圧される研削領域において、内側研削液噴射手段及び外側研削液噴射手段から夫々砥石の内周面及び外周面に向けて研削液が噴射され、かくして砥石の内外両面から効果的に研削液が供給される。   In the grinding apparatus of the present invention, in the grinding region where the grindstone is pressed against one surface of the workpiece, the grinding fluid is directed from the inner grinding fluid jetting means and the outer grinding fluid jetting means toward the inner circumferential surface and the outer circumferential surface of the grinding stone, respectively. Thus, the grinding liquid is effectively supplied from both the inside and outside of the grindstone.

本発明に従って構成された研削装置の主要部を示す部分斜面図。The partial slope figure which shows the principal part of the grinding device comprised according to this invention. 図１に示す研削装置の研削液供給手段を示す部分断面図。The fragmentary sectional view which shows the grinding fluid supply means of the grinding apparatus shown in FIG. 図１に示す研削装置の主要部を、被加工物の片面を研削している状態で示す部分斜面図。The partial slope figure which shows the principal part of the grinding apparatus shown in FIG. 1 in the state which grinds the single side | surface of a workpiece.

以下、添付図面を参照して、本発明に従って構成された研削装置の好適実施形態について詳細に説明する。   DESCRIPTION OF EMBODIMENTS Hereinafter, a preferred embodiment of a grinding apparatus configured according to the present invention will be described in detail with reference to the accompanying drawings.

図１を参照して説明すると、本発明に従って構成された図示の研削装置は、被加工物保持手段２、研削手段４及び研削液供給手段６を具備している。   Referring to FIG. 1, the illustrated grinding apparatus constructed according to the present invention includes a workpiece holding means 2, a grinding means 4, and a grinding fluid supply means 6.

被加工物保持手段２は、上方から見て反時計方向に回転せしめられる回転盤１０に配設されたチャックテーブル１２から構成されている。回転盤１０には周方向に間隔をおいて複数個のチャックテーブル１２（図１にはそのうちの１個のみを図示している）が配設されており、回転盤１０の回転によってチャックテーブル１２の各々が順次に被加工物装着及び取出位置（図示していない）、粗研削位置及び仕上研削位置（図示していない）に位置せしめられる。図１においては、粗研削位置に位置せしめられているチャックテーブル１２が図示されている。図示の実施形態におけるチャックテーブル１２は、多孔質材料から形成され実質上水平に延在する円板形状であり、回転盤１０に回転自在に装着されていて回転駆動手段（図示していない）によって、例えば３００ｒｐｍ程度の回転速度で上方から見て反時計方向に回転せしめられる。チャックテーブル１２は真空吸引源（図示していない）に選択的に接続され、表面に載置された被加工物を真空吸着する。   The workpiece holding means 2 is composed of a chuck table 12 disposed on a turntable 10 that is rotated counterclockwise when viewed from above. A plurality of chuck tables 12 (only one of which is shown in FIG. 1) are arranged on the turntable 10 at intervals in the circumferential direction. Are sequentially positioned at a workpiece loading and unloading position (not shown), a rough grinding position, and a finish grinding position (not shown). In FIG. 1, the chuck table 12 positioned in the rough grinding position is shown. The chuck table 12 in the illustrated embodiment is formed of a porous material and has a disk shape that extends substantially horizontally. The chuck table 12 is rotatably mounted on the rotating disk 10 and is rotated by rotation driving means (not shown). For example, it is rotated counterclockwise when viewed from above at a rotational speed of about 300 rpm. The chuck table 12 is selectively connected to a vacuum suction source (not shown), and vacuum-sucks the workpiece placed on the surface.

研削手段４は回転自在に且つ昇降自在に装着されたスピンドル１４を有する。このスピンドル１４の下端にはホイールマウント１７が配設されており、ホイールマウント１７にはボルト１５によって研削ホイール１６が固定されている。研削ホイ−ル１６の下面には周方向に間隔をおいて配列され、全体として環状をなす複数個の弧状砥石１８が固定されている。所望ならば、複数個の弧状砥石１８に代えて単一の環状砥石を研削ホイール１６の下面に固定することもできる。かような研削手段４は、後に更に言及するとおり、スピンドル１４を昇降動せしめることによって研削ホイール１６が上記チャックテーブル１２に対して接近及び離隔する方向に移動せしめられ、チャックテーブル１２上に保持された被加工物を研削する際にはスピンドル１４が例えば６０００ｒｐｍ程度の回転速度で上方から見て反時計方向に回転駆動され、砥石１８が被加工物の露呈片面即ち上面に押圧せしめられる。図１を参照することによって明確に理解される如く、研削ホイール１６の中心軸線は粗研削位置に位置付けられているチャックテーブル１２の中心軸線に対して変位せしめられており、後に更に言及するとおり、研削ホイール１６の下面に固定されている環状砥石１８が規定する円はチャックテーブル１２の中心乃至中心を幾分超えた部位を通る。従って、略１８０度の角度範囲に渡る弧状領域である研削領域において、チャックテーブル１２上に保持された被加工物に対して砥石１８が作用する。研削領域は略１８０度よりも小さい角度範囲に設定することもでき、例えばチャクテーブル１２の中心が外周縁より２０μｍ程度高くなっていてチャックテーブル１２の全体が僅かな円錐形を呈している場合には研削領域を略９０度の角度範囲に設定することができる。図１には、粗研削位置に配設された研削手段４が図示されているが、上記仕上研削位置にも同様な形態である研削手段が配置されている。   The grinding means 4 has a spindle 14 mounted so as to be rotatable and movable up and down. A wheel mount 17 is disposed at the lower end of the spindle 14, and a grinding wheel 16 is fixed to the wheel mount 17 by a bolt 15. A plurality of arc-shaped grindstones 18 which are arranged at intervals in the circumferential direction and have an annular shape as a whole are fixed to the lower surface of the grinding wheel 16. If desired, a single annular grindstone may be fixed to the lower surface of the grinding wheel 16 in place of the plurality of arcuate grindstones 18. The grinding means 4 is held on the chuck table 12 by moving the spindle 14 up and down in a direction approaching and separating from the chuck table 12 as will be further described later. When grinding the workpiece, the spindle 14 is rotated counterclockwise as viewed from above at a rotational speed of, for example, about 6000 rpm, and the grindstone 18 is pressed against the exposed surface of the workpiece, that is, the upper surface. As clearly understood by referring to FIG. 1, the central axis of the grinding wheel 16 has been displaced with respect to the central axis of the chuck table 12 positioned in the rough grinding position, as will be further described later. The circle defined by the annular grindstone 18 fixed to the lower surface of the grinding wheel 16 passes through the center of the chuck table 12 or a part slightly beyond the center. Therefore, the grindstone 18 acts on the workpiece held on the chuck table 12 in a grinding region that is an arcuate region over an angle range of approximately 180 degrees. The grinding area can be set to an angle range smaller than about 180 degrees. For example, when the center of the chuck table 12 is about 20 μm higher than the outer peripheral edge and the entire chuck table 12 has a slight conical shape. The grinding area can be set to an angle range of approximately 90 degrees. Although FIG. 1 shows the grinding means 4 disposed at the rough grinding position, a grinding means having the same configuration is also disposed at the finish grinding position.

図示の研削装置における上述したとおりの構成は、例えば上記特許文献１の図１に図示されている従来の研削装置の構成と実質上同一であり、それ故にこれらの構成の詳細については本明細書においては説明を省略する。   The configuration as described above in the illustrated grinding apparatus is substantially the same as the configuration of the conventional grinding apparatus illustrated in FIG. 1 of Patent Document 1, for example. Therefore, details of these configurations are described in this specification. The description is omitted.

本発明に従って構成された研削装置においては、研削手段４に関連せしめて独特な形態の研削液供給手段６が配設されていることが重要である。図１と共に図２を参照して説明を続けると、図示の研削液供給手段６は、中央円形部材２０とこの円形部材２０を同心状に囲繞する外側リング部材２２とを含んでいる。中央円形部材２０の外径は上記砥石１８の内径よりも幾分小さく、外側リング部材２２の内径は上記砥石１８の外径よりも幾分大きく、研削ホイール１６の砥石１８は中央円形部材２０と外側リング部材２２との間に進入せしめられる。中央円形部材２０及び外側リング部材２２の先端側半部、即ち上記チャックテーブル１２上に位置する先端側半部においては、中央円形部材２０と外側リング部材２２との間には半円弧形状の開口２４が形成されている。この弧状開口２４は上述した弧状研削領域に対応して位置し、上記砥石１８が挿通するのに充分な幅を有する。中央円形部材２０及び外側リング部材２２の後端側半部においては、図２を参照することによって理解される如く、中央円形部材２０と外側リング部材２２との間には上記砥石１８を収容するのに充分な深さ及び幅を有する半円弧形状の溝２６が形成されている。そして、中央円形部材２０及び外側リング部材２２は溝２６の両側において支持部材２８に接続されている。支持部材２８自体は上記回転盤１０を囲繞する静止ハウジング（図示していない)に固定されている。図１に図示する如く、中央円形部材２０の先端側半円弧状外周面には周方向に間隔をおいて複数個の噴射孔３０が形成されている。また、外側リング部材２２の先端側半円弧状内周面にも周方向に間隔をおいて複数個の噴射孔３２が形成されている。研削領域の角度範囲が略１８０度よりも小さい場合には、これに応じて噴射孔３０及び３２を配設する角度範囲を小さくすることができる。内側研削液噴射手段を構成する噴射孔３０及び外側研削液噴射手段を構成する噴射孔３２は、中央円形部材２０、外側リング部材２２及び支持部材２８に形成されている連通路（図示していない）を介して適宜の研削液供給源（図示していない）に連通せしめられており、研削液供給源が作動せしめられると、噴射孔３０及び３２から例えば純水でよい研削液が噴射される。所望ならば、中央円形部材２０の先端側半円弧状外周面に、間隔をおいて複数個の噴射孔３０を形成することに代えて、周方向に連続して延びる噴射スリットを形成することもできる。同様に、外側リング部材２２の先端側半円弧弧状内周面に、周方向に間隔をおいて複数個の噴射孔３２を形成することに代えて、周方向に連続して延びる噴射スリットを形成することもできる。   In the grinding apparatus constructed according to the present invention, it is important that the grinding liquid supply means 6 having a unique shape is provided in association with the grinding means 4. 1 and FIG. 2, the illustrated grinding fluid supply means 6 includes a central circular member 20 and an outer ring member 22 concentrically surrounding the circular member 20. The outer diameter of the central circular member 20 is somewhat smaller than the inner diameter of the grindstone 18, the inner diameter of the outer ring member 22 is somewhat larger than the outer diameter of the grindstone 18, and the grindstone 18 of the grinding wheel 16 is connected to the central circular member 20. It is made to enter between the outer ring member 22. A semicircular arc-shaped opening is formed between the central circular member 20 and the outer ring member 22 at the front end side half of the central circular member 20 and the outer ring member 22, that is, the front end side half located on the chuck table 12. 24 is formed. The arc-shaped opening 24 is located corresponding to the arc-shaped grinding region described above, and has a width sufficient for the grinding stone 18 to be inserted therethrough. The rear half of the central circular member 20 and the outer ring member 22 accommodates the grindstone 18 between the central circular member 20 and the outer ring member 22 as understood by referring to FIG. A semicircular groove 26 having a sufficient depth and width is formed. The central circular member 20 and the outer ring member 22 are connected to the support member 28 on both sides of the groove 26. The support member 28 itself is fixed to a stationary housing (not shown) that surrounds the rotating disk 10. As shown in FIG. 1, a plurality of injection holes 30 are formed on the tip-side semicircular outer peripheral surface of the central circular member 20 at intervals in the circumferential direction. In addition, a plurality of injection holes 32 are formed at intervals in the circumferential direction on the inner circumferential surface on the tip side of the outer ring member 22. When the angle range of the grinding region is smaller than about 180 degrees, the angle range in which the injection holes 30 and 32 are disposed can be reduced accordingly. The injection holes 30 constituting the inner grinding fluid ejection means and the injection holes 32 constituting the outer grinding fluid ejection means are communication paths (not shown) formed in the central circular member 20, the outer ring member 22 and the support member 28. ) Is communicated with an appropriate grinding fluid supply source (not shown), and when the grinding fluid supply source is operated, a grinding fluid, such as pure water, is ejected from the injection holes 30 and 32. . If desired, instead of forming a plurality of injection holes 30 at intervals in the semicircular arc outer peripheral surface of the central circular member 20, an injection slit extending continuously in the circumferential direction may be formed. it can. Similarly, instead of forming a plurality of injection holes 32 at intervals in the circumferential direction on the tip side semicircular arc-shaped inner peripheral surface of the outer ring member 22, an injection slit extending continuously in the circumferential direction is formed. You can also

上述したとおりの研削装置の作用について説明すると、上述した被加工物装着及び取出位置において、チャックテーブル１２上に、例えば略円形のシリコン、サファイヤ或いは炭化珪素製ウエーハである被加工物３４（図３）が載置され、チャックテーブル１２上に真空吸着される。次いで、回転盤１０が所要角度回転せしめられてチャックテーブル１２及びこれに真空吸着された被加工物３４が粗研削位置に位置せしめられる。しかる後に、チャックテーブル１２が回転せしめられ、研削手段４のスピンドル１４が回転せしめられると共に下降せしめられ、研削液供給手段６における開口２４を通して研削ホイール１６の砥石１８が被加工物３４の露呈片面即ち上面に押圧され、かくして被加工物３４の上面が研削される。かかる研削の際には、研削液供給源が作動せしめられて、噴射孔３０及び３２から研削液が噴射される。噴射孔３０からの研削液は砥石１８乃至砥石１８と被加工物３４との接触部位に向けて砥石１８の半径方向内側から噴射され、噴射孔３２からの研削液は砥石１８乃至砥石１８と被加工物３４との接触部位に向けて砥石１８の半径方向外側から噴射され、かくして研削領域において充分効果的に研削液が供給される。   The operation of the grinding apparatus as described above will be described. The workpiece 34 (for example, a substantially circular silicon, sapphire or silicon carbide wafer) is placed on the chuck table 12 at the workpiece mounting and unloading positions described above (FIG. 3). ) Is placed on the chuck table 12 and vacuum-sucked. Next, the turntable 10 is rotated by a required angle, and the chuck table 12 and the workpiece 34 vacuum-sucked thereon are positioned at the rough grinding position. After that, the chuck table 12 is rotated, the spindle 14 of the grinding means 4 is rotated and lowered, and the grindstone 18 of the grinding wheel 16 passes through the opening 24 in the grinding fluid supply means 6 so that the exposed surface of the workpiece 34, i.e. The upper surface is pressed, and thus the upper surface of the workpiece 34 is ground. At the time of such grinding, the grinding fluid supply source is operated and the grinding fluid is ejected from the injection holes 30 and 32. The grinding liquid from the injection hole 30 is sprayed from the inner side in the radial direction of the grindstone 18 toward the contact portion between the grindstone 18 or the grindstone 18 and the workpiece 34, and the grinding liquid from the jetting hole 32 It is sprayed from the outside in the radial direction of the grindstone 18 toward the contact area with the workpiece 34, and thus the grinding fluid is supplied sufficiently effectively in the grinding region.

粗研削位置での粗研削が終了すると、チャックテーブル１２の回転が停止され、研削手段４のスピンドル１４の回転が停止されると共にスピンドル１４が上昇せしめられて研削ホイール１６が研削液供給手段６から上方に離隔され、そしてまた研削液供給手段６の研削液供給源の作動が停止される。次いで、回転盤１０が所定角度回転せしめられて、チャックテーブル１２上に真空吸着されている被加工物３４が仕上研削位置に位置せしめられ、仕上研削が遂行される。仕上研削が終了した後においては、回転盤１０が所定角度回転せしめられて、仕上研削された被加工物３４が被加工物装着及び取出位置に位置せしめられ、仕上研削された被加工物３４がチャックテーブル１２から取り出される。   When the rough grinding at the rough grinding position is finished, the rotation of the chuck table 12 is stopped, the rotation of the spindle 14 of the grinding means 4 is stopped and the spindle 14 is raised, and the grinding wheel 16 is moved from the grinding fluid supply means 6. The grinding fluid supply source of the grinding fluid supply means 6 is stopped. Next, the turntable 10 is rotated by a predetermined angle, the work piece 34 vacuum-adsorbed on the chuck table 12 is positioned at the finish grinding position, and finish grinding is performed. After finishing grinding is completed, the turntable 10 is rotated by a predetermined angle so that the finish-ground workpiece 34 is positioned at the workpiece loading and unloading position, and the finish-ground workpiece 34 is finished. The chuck table 12 is taken out.

２：被加工物保持手段
４：研削手段
６：研削液供給手段
１２：チャックテーブル
１４：スピンドル
１６：研削ホイール
１８：砥石
２０：中央円形部材
２２：外側リング部材
３０：噴射孔（内側研削液噴射手段）
３２：噴射孔（外側研削液噴射手段）
３４：被加工物 2: Workpiece holding means 4: Grinding means 6: Grinding fluid supply means 12: Chuck table 14: Spindle 16: Grinding wheel 18: Grinding wheel 20: Central circular member
22: Outer ring member 30: Injection hole (inner grinding fluid injection means)
32: Injection hole (outside grinding fluid injection means)
34: Workpiece

Claims (3)

回転駆動されるチャックテーブルを有する被加工物保持手段と、回転駆動され且つ該チャックテーブルに対して接近及び離隔する方向に移動せしめられる研削ホイールを有する研削手段と、研削液供給手段とを備え、該研削ホイールは環状に配設された砥石を有し、回転駆動される該チャックテーブル上に保持された被加工物の露呈片面に、回転駆動される該研削ホイールの該砥石を押圧せしめることによって該被加工物の該表面が研削される研削装置において、
該研削ホイールと該チャックテーブルとは中心軸線を変位せしめて配置され、
該研削液供給手段は、該砥石が該被加工物の該片面に押圧される弧状研削領域において、該砥石の内周面及び外周面に夫々研削液を噴射するための内側研削液噴射手段及び外側研削液噴射手段を含み、
該内側研削液噴射手段は、該被加工物の上方であって該弧状研削領域の内側に弧状に配列された複数個の噴射孔を有し、該外側研削液噴射手段は、該被加工物の上方であって該弧状研削領域の外側に弧状に配列された複数個の噴射孔を有する、ことを特徴とする研削装置。 A workpiece holding means having a chuck table that is rotationally driven, a grinding means having a grinding wheel that is rotationally driven and moved toward and away from the chuck table, and a grinding fluid supply means, The grinding wheel has a grindstone arranged in an annular shape, and by pressing the grindstone of the grinding wheel to be rotated against the exposed surface of the workpiece held on the chuck table to be rotationally driven. In a grinding apparatus for grinding the surface of the workpiece,
The grinding wheel and the chuck table are arranged with the central axis displaced,
The grinding liquid supply means includes an inner grinding liquid injection means for injecting the grinding liquid onto the inner peripheral surface and the outer peripheral surface of the grindstone, respectively, in an arcuate grinding region where the grindstone is pressed against the one surface of the workpiece. look including an outer grinding fluid injection means,
The inner grinding fluid spraying means has a plurality of spraying holes arranged in an arc shape above the workpiece and inside the arcuate grinding region, and the outer grinding fluid spraying means includes the workpiece. of a top that have a plurality of injection holes arranged in an arc outside the arc-shaped ground region, grinding apparatus, characterized in that. 該弧状研削領域は略９０乃至１８０度の角度範囲に渡って存在する、請求項１記載の研削装置。 Arc-shaped grinding region exists over an angular range of approximately 90 to 180 degrees, the grinding apparatus according to claim 1. 該研削液供給手段は、中央円形部材と、該円形部材を同心状に囲繞する外側リング部材とを含み、
該中央円形部材と該外側リング部材との間には、該弧状研削領域に対応して位置する弧状開口が形成され、
該内側研削液噴射手段の該複数個の噴射孔は該弧状開口に沿って該中央円形部材の外周面に周方向に間隔をおいて形成され、該外側研削液噴射手段の該複数個の噴射孔は該弧状開口に沿って該外側リング部材の内周面に周方向に間隔をおいて形成されている、請求項１又は２記載の研削装置。 The grinding fluid supply means includes a central circular member and an outer ring member concentrically surrounding the circular member,
Between the central circular member and the outer ring member, an arcuate opening located corresponding to the arcuate grinding region is formed,
The plurality of injection holes of the inner grinding fluid injection means are formed along the arcuate openings at circumferential intervals on the outer peripheral surface of the central circular member, and the plurality of injections of the outer grinding fluid injection means holes that are formed at intervals in the circumferential direction on the inner peripheral surface of the outer ring member along the arc-shaped opening, grinding apparatus according to claim 1 or 2, wherein.
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