JP5914304B2 - インクジェット印字ヘッド - Google Patents
インクジェット印字ヘッド Download PDFInfo
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- JP5914304B2 JP5914304B2 JP2012253532A JP2012253532A JP5914304B2 JP 5914304 B2 JP5914304 B2 JP 5914304B2 JP 2012253532 A JP2012253532 A JP 2012253532A JP 2012253532 A JP2012253532 A JP 2012253532A JP 5914304 B2 JP5914304 B2 JP 5914304B2
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- JP
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- Prior art keywords
- diaphragm
- print head
- holes
- piezoelectric actuators
- adhesive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000010410 layer Substances 0.000 claims description 64
- 125000006850 spacer group Chemical group 0.000 claims description 62
- 239000000853 adhesive Substances 0.000 claims description 58
- 230000001070 adhesive effect Effects 0.000 claims description 58
- 239000012528 membrane Substances 0.000 claims description 46
- 229920000642 polymer Polymers 0.000 claims description 22
- 239000012790 adhesive layer Substances 0.000 claims description 10
- 229920001721 polyimide Polymers 0.000 claims description 8
- 230000000149 penetrating effect Effects 0.000 claims 12
- 239000004642 Polyimide Substances 0.000 claims 3
- 239000000976 ink Substances 0.000 description 43
- 238000000034 method Methods 0.000 description 30
- 238000004519 manufacturing process Methods 0.000 description 21
- 239000000463 material Substances 0.000 description 21
- 239000004020 conductor Substances 0.000 description 9
- 229910001220 stainless steel Inorganic materials 0.000 description 8
- 239000010935 stainless steel Substances 0.000 description 8
- 238000000608 laser ablation Methods 0.000 description 7
- 238000007872 degassing Methods 0.000 description 6
- 239000007788 liquid Substances 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 238000005530 etching Methods 0.000 description 5
- 239000007787 solid Substances 0.000 description 4
- 239000003795 chemical substances by application Substances 0.000 description 3
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920001187 thermosetting polymer Polymers 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 239000000615 nonconductor Substances 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229920001646 UPILEX Polymers 0.000 description 1
- 238000002679 ablation Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000009969 flowable effect Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000010329 laser etching Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14491—Electrical connection
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Description
Claims (4)
- インクジェット印字ヘッドであって、
複数の貫通穴と、第1の面と、前記第1の面と反対側の第2の面とを含むダイヤフラムと、
複数の圧電アクチュエータを含む圧電アクチュエータアレイであって、該印字ヘッド内の前記複数の圧電アクチュエータの各々が前記ダイヤフラムの前記第1の面に取り付けられている圧電アクチュエータアレイと、
前記ダイヤフラムの前記第1の面の隣接する圧電アクチュエータの間に直接挟まれた位置に取り付けられ、高分子層を含み、前記複数の圧電アクチュエータの真上に位置しない、あらかじめ形成された膜スペーサと、
前記複数の圧電アクチュエータに電気的に接続された電気相互接続部分であって、前記膜スペーサと前記複数の圧電アクチュエータとが、前記ダイヤフラムの前記第1の面に対して垂直方向において前記ダイヤフラムと該電気相互接続部分との間に直接挟まれている、電気相互接続部分と、
複数のノズルを含む開口プレートと、
を含み、
前記ダイヤフラムの前記第2の面が、該印字ヘッド内の各圧電アクチュエータと前記開口プレートとの間の高さに位置し、
前記膜スペーサを貫通する複数の貫通穴をさらに含み、この複数の貫通穴の位置が前記ダイヤフラムを貫通する前記複数の貫通穴の位置と一致しており、これにより複数のインクポートが設けられ、
前記電気相互接続部分を貫通する複数の貫通穴をさらに含み、この複数の貫通穴の位置が前記膜スペーサを貫通する前記複数の貫通穴の位置および前記ダイヤフラムを貫通する前記複数の貫通穴の位置と一致しており、これにより複数のインクポートが設けられ、
前記電気相互接続部分を貫通する前記複数の貫通穴の各々の直径または幅と前記膜スペーサを貫通する前記複数の貫通穴の各々の直径または幅とが前記ダイヤフラムを貫通する前記複数の貫通穴の各々の直径または幅よりも小さく、
ダイヤフラム貼り付け接着剤を貫通する複数の貫通穴の直径または幅が前記ダイヤフラムを貫通する前記複数の貫通穴の各々の直径または幅よりも大きく、
前記複数のインクポートは少なくともその一部が前記ダイヤフラム貼り付け接着剤を貫通する前記複数の貫通穴と、前記ダイヤフラムを貫通する前記複数の貫通穴と、前記膜スペーサを貫通する前記複数の貫通穴と、前記電気相互接続部分を貫通する前記複数の貫通穴とによって形成されている、インクジェット印字ヘッド。 - 請求項1に記載のインクジェット印字ヘッドであって、
前記膜スペーサが前記ダイヤフラムの上面に対して垂直方向において前記複数の圧電アクチュエータの真上に位置しない、インクジェット印字ヘッド。 - 請求項1に記載のインクジェット印字ヘッドであって、
前記膜スペーサがポリイミド層を含み、さらに、
前記ポリイミド層を前記ダイヤフラムに貼り付け、前記複数の圧電アクチュエータを前記ダイヤフラムに貼り付ける第1の接着剤層と、
前記ポリイミド層を前記電気相互接続部分に貼り付ける第2の接着剤層と、
を含む、インクジェット印字ヘッド。 - 請求項3に記載のインクジェット印字ヘッドであって、
前記あらかじめ形成された膜スペーサの上面および各圧電アクチュエータの上面に取り付けられたスタンドオフ層をさらに含み、
前記あらかじめ形成された膜スペーサの上面が各圧電アクチュエータの上面とほぼ同一平面上にあり、
前記スタンドオフ層が前記ダイヤフラムの上面に対して垂直方向において前記複数の圧電アクチュエータの真上に位置し、
前記膜スペーサが前記ダイヤフラムの上面に対して垂直方向において前記複数の圧電アクチュエータの真上に位置しない、インクジェット印字ヘッド。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/323,867 | 2011-12-13 | ||
US13/323,867 US8814328B2 (en) | 2011-12-13 | 2011-12-13 | Polymer film as an interstitial fill for PZT printhead fabrication |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2013123917A JP2013123917A (ja) | 2013-06-24 |
JP2013123917A5 JP2013123917A5 (ja) | 2016-01-14 |
JP5914304B2 true JP5914304B2 (ja) | 2016-05-11 |
Family
ID=48571599
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012253532A Active JP5914304B2 (ja) | 2011-12-13 | 2012-11-19 | インクジェット印字ヘッド |
Country Status (4)
Country | Link |
---|---|
US (1) | US8814328B2 (ja) |
JP (1) | JP5914304B2 (ja) |
KR (1) | KR101911556B1 (ja) |
CN (1) | CN103158357B (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10038267B2 (en) * | 2014-06-12 | 2018-07-31 | Palo Alto Research Center Incorporated | Circuit interconnect system and method |
JP6394903B2 (ja) * | 2015-03-10 | 2018-09-26 | セイコーエプソン株式会社 | ヘッド及び液体噴射装置 |
JP6504348B2 (ja) * | 2015-03-16 | 2019-04-24 | セイコーエプソン株式会社 | ヘッド及び液体噴射装置 |
US9375926B1 (en) * | 2015-03-19 | 2016-06-28 | Xerox Corporation | Membrane bond alignment for electrostatic ink jet printhead |
DE102015212444A1 (de) * | 2015-06-12 | 2016-12-15 | Schuler Automation Gmbh & Co. Kg | Verfahren und Vorrichtung zur Herstellung einer Blechplatine |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4336416A1 (de) * | 1993-10-19 | 1995-08-24 | Francotyp Postalia Gmbh | Face-Shooter-Tintenstrahldruckkopf und Verfahren zu seiner Herstellung |
US6358767B2 (en) * | 2000-06-08 | 2002-03-19 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing semiconductor device |
KR100506093B1 (ko) * | 2003-05-01 | 2005-08-04 | 삼성전자주식회사 | 잉크젯 프린트헤드 패키지 |
US7549223B2 (en) * | 2004-09-28 | 2009-06-23 | Fujifilm Corporation | Method for manufacturing a liquid ejection head |
JP5011693B2 (ja) * | 2005-09-26 | 2012-08-29 | 富士ゼロックス株式会社 | 液滴吐出装置 |
JP4822840B2 (ja) * | 2005-12-28 | 2011-11-24 | 富士フイルム株式会社 | 液体吐出ヘッド及びその製造方法並びに画像形成装置 |
US7959266B2 (en) * | 2007-03-28 | 2011-06-14 | Xerox Corporation | Self aligned port hole opening process for ink jet print heads |
US8360557B2 (en) * | 2008-12-05 | 2013-01-29 | Xerox Corporation | Method for laser drilling fluid ports in multiple layers |
JP5742109B2 (ja) * | 2010-04-09 | 2015-07-01 | コニカミノルタ株式会社 | インクジェットヘッド、インクジェットヘッドの製造方法及びインクジェット描画装置 |
-
2011
- 2011-12-13 US US13/323,867 patent/US8814328B2/en active Active
-
2012
- 2012-11-19 JP JP2012253532A patent/JP5914304B2/ja active Active
- 2012-12-06 CN CN201210520013.2A patent/CN103158357B/zh not_active Expired - Fee Related
- 2012-12-10 KR KR1020120142745A patent/KR101911556B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
US20130147881A1 (en) | 2013-06-13 |
CN103158357B (zh) | 2015-09-02 |
US8814328B2 (en) | 2014-08-26 |
JP2013123917A (ja) | 2013-06-24 |
KR20130067228A (ko) | 2013-06-21 |
CN103158357A (zh) | 2013-06-19 |
KR101911556B1 (ko) | 2018-10-24 |
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