JP5904025B2 - Abnormality detection device and abnormality detection method for ball screw device - Google Patents

Abnormality detection device and abnormality detection method for ball screw device Download PDF

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JP5904025B2
JP5904025B2 JP2012134331A JP2012134331A JP5904025B2 JP 5904025 B2 JP5904025 B2 JP 5904025B2 JP 2012134331 A JP2012134331 A JP 2012134331A JP 2012134331 A JP2012134331 A JP 2012134331A JP 5904025 B2 JP5904025 B2 JP 5904025B2
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ball screw
frequency band
abnormality detection
abnormality
support bearing
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JP2013257253A (en
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雅人 殿谷
雅人 殿谷
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NSK Ltd
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H25/22—Screw mechanisms with balls, rollers, or similar members between the co-operating parts; Elements essential to the use of such members
    • F16H25/2204—Screw mechanisms with balls, rollers, or similar members between the co-operating parts; Elements essential to the use of such members with balls
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H57/00—General details of gearing
    • F16H57/01—Monitoring wear or stress of gearing elements, e.g. for triggering maintenance
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H57/00—General details of gearing
    • F16H57/01—Monitoring wear or stress of gearing elements, e.g. for triggering maintenance
    • F16H2057/012—Monitoring wear or stress of gearing elements, e.g. for triggering maintenance of gearings

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Testing Of Devices, Machine Parts, Or Other Structures Thereof (AREA)
  • Transmission Devices (AREA)

Description

本発明は、ボールねじ軸とボールねじナットとの間のボール転動路で多数のボールを転動させてボールねじ軸又はボールねじナットを回転移動するボールねじ装置の異常検出装置及び異常検出方法に関するものである。   The present invention relates to an abnormality detection device and an abnormality detection method for a ball screw device in which a large number of balls roll on a ball rolling path between a ball screw shaft and a ball screw nut to rotationally move the ball screw shaft or the ball screw nut. It is about.

一般に、ボールねじは、外周面に螺旋状のボール転動溝が形成されたボールねじ軸と、前記ボールねじ軸のボール転動溝と対向する螺旋状のボール転動溝を有するボールねじナットと、前記ボールねじ軸及びボールねじナットのボール転動溝間のボール転動路を当該ボールねじ軸又はボールねじナットの回転運動に伴って転動する多数のボールと、前記ボールの転がり方向を変更してボール戻し路に送給し且つボール戻し路からボールをボール転動路に戻すボール循環路とを備えて構成される。   Generally, a ball screw includes a ball screw shaft having a spiral ball rolling groove formed on an outer peripheral surface thereof, and a ball screw nut having a spiral ball rolling groove facing the ball rolling groove of the ball screw shaft. , A ball rolling path between the ball screw shaft and the ball rolling groove of the ball screw nut, and a number of balls rolling with the rotational movement of the ball screw shaft or the ball screw nut, and the rolling direction of the ball is changed. And a ball circulation path for feeding the ball to the ball return path and returning the ball from the ball return path to the ball rolling path.

転がり軸受などの異常を検出する方法としては、例えば下記特許文献１に記載されるように、振動センサによって軸受の振動を検出し、その検出信号に基づいて異常を判定する方法が提案されている。検出した振動信号を用いて異常を判定する方法としては、振動強度解析により異常を判定する方法や、振動周波数解析により異常を判定する方法がある。振動強度解析により異常を判定する際には、一般的に知られた方法として、例えば下記特許文献２に記載されるように、振動値の大きさの変化を追跡することによって異常を判定する方法がある。また、振動周波数解析により異常を判定する際には、例えば下記特許文献３に記載されるように、判定対象を駆動することにより発生する振動周波数のうち、幾何学的に計算される周波数（例えば転動体通過振動周波数や転動体自転周波数）などに着目し、その増減に基づいて異常を判定する方法がある。また、下記特許文献４に記載されるように、判定対象に異常が発生した場合には、計算周波数を基本周波数として、その自然数倍の高調波成分にも変化が表れるので、その高長波成分の変化を用いて異常の判定を行う方法もある。また、下記特許文献５では、ボールねじの異常を検出する場合、前述の高長波成分の変化が明確に表れる周波数範囲に制限のあることを明らかにしており、その周波数範囲を使用したボールねじの異常検出方法が記載されている。   As a method of detecting an abnormality such as a rolling bearing, for example, as described in Patent Document 1 below, a method of detecting the vibration of a bearing with a vibration sensor and determining the abnormality based on the detection signal has been proposed. . As a method for determining abnormality using the detected vibration signal, there are a method for determining abnormality by vibration intensity analysis and a method for determining abnormality by vibration frequency analysis. When determining an abnormality by vibration intensity analysis, as a generally known method, for example, as described in Patent Document 2 below, a method of determining an abnormality by tracking changes in the magnitude of vibration values There is. Further, when determining abnormality by vibration frequency analysis, for example, as described in Patent Document 3 below, among the vibration frequencies generated by driving the determination target, a geometrically calculated frequency (for example, There is a method of judging an abnormality based on the increase or decrease of the rolling element passing vibration frequency or the rolling element rotation frequency). In addition, as described in Patent Document 4 below, when an abnormality occurs in the determination target, the calculation frequency is set as a fundamental frequency, and a change also appears in a harmonic component that is a natural number multiple thereof. There is also a method of determining an abnormality by using the change of. Further, in Patent Document 5 below, when detecting an abnormality of a ball screw, it is clarified that there is a limit to the frequency range in which the above-described change in the high and long wave components clearly appears. An anomaly detection method is described.

特開２００７−１９２８２８号公報JP 2007-192828 A 特開２００６−１３３１６２号公報JP 2006-133162 A 特開２００５−１７１２８号公報JP 2005-17128 A 特開２００４−２１２２２５号公報JP 2004-212225 A 特開２０１０−３８５６７号公報JP 2010-38567 A

しかしながら、工作機械などではボールねじ軸を支持軸受で支持して使用することが多く、その場合、支持軸受とボールねじの双方に異常検出装置を備える必要がある。また、実質的に、支持軸受又はボールねじの何れか一方にのみ異常が生じた場合であっても、その双方を機械装置から取り外す必要がある。
本発明は、上記のような問題点に着目してなされたものであり、ボールねじ軸を支持軸受で支持して使用する場合であっても、１つの装置又は方法でボールねじ及び支持軸受の双方の異常を検出することが可能なボールねじ装置の異常検出装置及び異常検出方法を提供することを目的とするものである。 However, a machine tool or the like often uses a ball screw shaft supported by a support bearing, and in that case, both the support bearing and the ball screw must be provided with an abnormality detection device. Moreover, even when an abnormality occurs in only one of the support bearing and the ball screw, it is necessary to remove both from the mechanical device.
The present invention has been made paying attention to the above-mentioned problems, and even when the ball screw shaft is supported and used by the support bearing, the ball screw and the support bearing can be used with a single device or method. It is an object of the present invention to provide an abnormality detection device and an abnormality detection method for a ball screw device that can detect both abnormalities.

上記課題を解決するために、本発明のボールねじの異常検出装置は、ボールねじ軸及びボールねじナットを備えたボールねじと、前記ボールねじ軸を回転自在に支持する支持軸受とを備えたボールねじ装置の異常検出装置において、前記ボールねじナットに取付けられ振動を検出する振動センサと、前記振動センサで検出された振動データからボールねじ異常検出周波数帯及び支持軸受異常検出周波数帯の夫々の振動データを濾波する濾波部と、前記濾波部で濾波されたボールねじ異常検出周波数帯の振動データに基づいてボールねじの異常を検出すると共に支持軸受異常検出周波数帯の振動データに基づいて支持軸受の異常を検出する異常検出部とを備え、前記濾波部は、前記ボールねじ軸の一次縦固有振動数以下の周波数帯を支持軸受の異常検出周波数帯として濾波する支持軸受異常検出周波数帯濾波部を備えたことを特徴とするものである。   In order to solve the above-described problems, a ball screw abnormality detection device according to the present invention includes a ball screw including a ball screw shaft and a ball screw nut, and a support bearing that rotatably supports the ball screw shaft. In the abnormality detection device for a screw device, a vibration sensor that is attached to the ball screw nut and detects vibration, and a vibration of each of a ball screw abnormality detection frequency band and a support bearing abnormality detection frequency band from vibration data detected by the vibration sensor. A filtering unit for filtering data, and detecting an abnormality of the ball screw based on vibration data of the ball screw abnormality detection frequency band filtered by the filtering unit, and of the support bearing based on the vibration data of the support bearing abnormality detection frequency band An abnormality detecting unit for detecting an abnormality, and the filtering unit has a frequency band equal to or lower than a primary longitudinal natural frequency of the ball screw shaft. It is characterized in further comprising a support bearing abnormality detection frequency band filter section that filters a normal detection frequency band.

なお、ボールねじナットにテーブルが堅固に取付けられている場合には、テーブルに振動センサを取付けてもよい。
また、前記濾波部は、前記ボールねじナットの固有振動数以下の周波数帯をボールねじの異常検出周波数帯として濾波するボールねじ異常検出周波数帯濾波部を備えたことを特徴とするものである。 If the table is firmly attached to the ball screw nut, a vibration sensor may be attached to the table.
The filtering unit includes a ball screw abnormality detection frequency band filtering unit that filters a frequency band equal to or lower than the natural frequency of the ball screw nut as a ball screw abnormality detection frequency band.

また、前記異常検出部は、正常時の前記ボールねじ異常検出周波数帯の振動データ及び正常時の前記支持軸受異常検出周波数帯の振動データを記憶する記憶部と、前記記憶部に記憶されている前記正常時のボールねじ異常検出周波数帯の振動データを前記濾波されたボールねじ異常検出周波数帯の振動データと比較すると共に記憶されている前記正常時の支持軸受異常検出周波数帯の振動データを前記濾波された支持軸受異常検出周波数帯の振動データと比較する比較部と、前記比較部で比較された振動データの比較データに基づいて前記ボールねじの異常及び前記支持軸受の異常を判定する異常判定部とを備えたことを特徴とするものである。   In addition, the abnormality detection unit is stored in the storage unit that stores vibration data in the normal ball screw abnormality detection frequency band and vibration data in the support bearing abnormality detection frequency band in the normal state, and the storage unit. The vibration data in the normal ball screw abnormality detection frequency band is compared with the filtered vibration data in the ball screw abnormality detection frequency band, and the vibration data in the normal support bearing abnormality detection frequency band is stored. A comparison unit for comparing with the vibration data of the filtered support bearing abnormality detection frequency band, and an abnormality determination for determining the abnormality of the ball screw and the abnormality of the support bearing based on the comparison data of the vibration data compared with the comparison unit And a section.

また、本発明のボールねじ装置の異常検出方法は、ボールねじ軸及びボールねじナットを備えたボールねじと、前記ボールねじ軸を回転自在に支持する支持軸受とを備えたボールねじ装置の異常検出方法において、前記ボールねじナットに取付けられた振動センサで振動を検出し、前記振動センサで検出された振動データからボールねじ異常検出周波数帯及び支持軸受異常検出周波数帯の夫々の振動データを濾波し、前記濾波されたボールねじ異常検出周波数帯の振動データに基づいてボールねじの異常を検出すると共に支持軸受異常検出周波数帯の振動データに基づいて支持軸受の異常を検出し、前記ボールねじ軸の一次縦固有振動数以下の周波数帯を支持軸受の異常検出周波数帯として濾波することを特徴とするものである。
ここでも、ボールねじナットにテーブルが堅固に取付けられている場合には、テーブルに振動センサを取付けてもよい。 In addition, the abnormality detection method for a ball screw device according to the present invention includes a ball screw including a ball screw shaft and a ball screw nut, and an abnormality detection for the ball screw device including a support bearing that rotatably supports the ball screw shaft. In the method, vibration is detected by a vibration sensor attached to the ball screw nut, and vibration data of the ball screw abnormality detection frequency band and the support bearing abnormality detection frequency band are filtered from the vibration data detected by the vibration sensor. Detecting an abnormality of the ball screw based on the vibration data of the filtered ball screw abnormality detection frequency band and detecting an abnormality of the support bearing based on the vibration data of the support bearing abnormality detection frequency band. The frequency band below the primary longitudinal natural frequency is filtered as an abnormality detection frequency band of the support bearing.
Again, if the table is firmly attached to the ball screw nut, a vibration sensor may be attached to the table.

而して、本発明のボールねじ装置の異常検出装置及び異常検出方法によれば、ボールねじのボールねじ軸を支持軸受で回転自在に支持する場合に、ボールねじナットに取付けられた振動センサで振動を検出し、検出された振動データからボールねじ異常検出周波数帯及び支持軸受異常検出周波数帯の夫々の振動データを濾波し、濾波されたボールねじ異常検出周波数帯の振動データに基づいてボールねじの異常を検出すると共に支持軸受異常検出周波数帯の振動データに基づいて支持軸受の異常を検出し、その場合に、ボールねじ軸の一次縦固有振動数以下の周波数帯を支持軸受の異常検出周波数帯として濾波する。従って、１つの装置又は方法でボールねじ及び支持軸受の双方の異常を検出することができると共に、支持軸受の異常を正確に検出することができる。   Thus, according to the abnormality detection device and abnormality detection method of the ball screw device of the present invention, when the ball screw shaft of the ball screw is rotatably supported by the support bearing, the vibration sensor attached to the ball screw nut is used. Vibration is detected, the vibration data of the ball screw abnormality detection frequency band and the support bearing abnormality detection frequency band are filtered from the detected vibration data, and the ball screw is based on the vibration data of the filtered ball screw abnormality detection frequency band. And anomalies in the support bearing based on vibration data in the support bearing anomaly detection frequency band. In that case, the frequency band below the primary longitudinal natural frequency of the ball screw shaft is detected. Filter as a band. Therefore, the abnormality of both the ball screw and the support bearing can be detected by one apparatus or method, and the abnormality of the support bearing can be accurately detected.

また、ボールねじナットの固有振動数以下の周波数帯をボールねじの異常検出周波数帯として濾波することにより、ボールねじの異常を正確に検出することができる。
また、正常時のボールねじ異常検出周波数帯の振動データ及び正常時の支持軸受異常検出周波数帯の振動データを記憶し、記憶されている正常時のボールねじ異常検出周波数帯の振動データを濾波されたボールねじ異常検出周波数帯の振動データと比較すると共に記憶されている正常時の支持軸受異常検出周波数帯の振動データを濾波された支持軸受異常検出周波数帯の振動データと比較し、比較された振動データの比較データに基づいてボールねじの異常及び支持軸受の異常を判定する。そのため、ボールねじ及び支持軸受の異常を正確に検出することができる。 Further, by filtering the frequency band below the natural frequency of the ball screw nut as the ball screw abnormality detection frequency band, it is possible to accurately detect the abnormality of the ball screw.
Also, vibration data in the normal ball screw abnormality detection frequency band and vibration data in the normal support bearing abnormality detection frequency band are stored, and the stored vibration data in the normal ball screw abnormality detection frequency band are filtered. Compared with the vibration data of the ball screw abnormality detection frequency band, the vibration data of the normal support bearing abnormality detection frequency band stored and compared with the vibration data of the filtered support bearing abnormality detection frequency band were compared. The abnormality of the ball screw and the abnormality of the support bearing are determined based on the comparison data of the vibration data. Therefore, it is possible to accurately detect abnormality of the ball screw and the support bearing.

本発明のボールねじ装置の異常検出装置の一実施形態を示す概略構成図である。It is a schematic block diagram which shows one Embodiment of the abnormality detection apparatus of the ball screw apparatus of this invention. 図１の異常検出装置のブロック図である。It is a block diagram of the abnormality detection apparatus of FIG. 支持軸受異常検出周波数帯の振動データの説明図である。It is explanatory drawing of the vibration data of a support bearing abnormality detection frequency band. ボールねじ異常検出周波数帯の振動データの説明図である。It is explanatory drawing of the vibration data of a ball screw abnormality detection frequency band. 濾波された振動データのサンプリングの説明図である。It is explanatory drawing of sampling of the vibration data filtered.

次に、本発明のボールねじ装置の異常検出装置及び異常検出方法の一実施形態について図面を参照しながら説明する。図１は、本実施形態の異常検出装置が適用されたボールねじ装置の概略構成図であり、例えば工作機械などに適用されたものである。このボールねじ装置は、直動テーブル１を図１の左右方向に往復移動させるものであり、軸線を図の左右方向に向けてボールねじ軸２が配置されている。ボールねじ軸２の軸方向両端部は支持軸受３によって回転自在に支持されており、支持軸受３のボールねじ軸２との接触部位には図示しない転がり軸受などの軸受部材が内装されている。また、ボールねじ軸２の軸方向両端部のうち、図示右端部は継手４を介して電動モータ５に接続されている。   Next, an embodiment of an abnormality detection device and an abnormality detection method for a ball screw device according to the present invention will be described with reference to the drawings. FIG. 1 is a schematic configuration diagram of a ball screw device to which the abnormality detection device of the present embodiment is applied, and is applied to, for example, a machine tool. This ball screw device reciprocates the linear motion table 1 in the left-right direction in FIG. 1, and a ball screw shaft 2 is arranged with its axis line directed in the left-right direction in the figure. Both end portions in the axial direction of the ball screw shaft 2 are rotatably supported by a support bearing 3, and a bearing member such as a rolling bearing (not shown) is housed in a contact portion of the support bearing 3 with the ball screw shaft 2. Of the both ends in the axial direction of the ball screw shaft 2, the right end in the figure is connected to the electric motor 5 through the joint 4.

ボールねじ軸２にはボールねじナット６が被嵌されている。ボールねじ軸２の外周面には、断面がほぼ半円形のボール転動溝７が螺旋状に形成されており、これに対向するボールねじナット６の内周面にも、断面がほぼ半円形のボール転動溝が螺旋状に形成されている。このボールねじ軸２のボール転動溝７とボールねじナット６のボール転動溝との間にボール転動路が形成される。そして、このボール転動路には、ボールねじ軸２又はボールねじナット６の回転運動に伴って転動するボールが多数配設されている。また、ボールねじナット６の内部には、ボール転動路のボールを掬い上げて再びボール転動路に戻すためのボール戻し路も形成されている。   A ball screw nut 6 is fitted on the ball screw shaft 2. A ball rolling groove 7 having a substantially semicircular cross section is formed on the outer peripheral surface of the ball screw shaft 2 in a spiral shape, and the inner peripheral surface of the ball screw nut 6 opposed thereto is also substantially semicircular in cross section. The ball rolling groove is formed in a spiral shape. A ball rolling path is formed between the ball rolling groove 7 of the ball screw shaft 2 and the ball rolling groove of the ball screw nut 6. The ball rolling path is provided with a large number of balls that roll with the rotational movement of the ball screw shaft 2 or the ball screw nut 6. In addition, a ball return path is formed inside the ball screw nut 6 for picking up the ball on the ball rolling path and returning it to the ball rolling path again.

ボールねじナット６の軸方向一方の端部にはフランジ８が設けられ、このフランジ８が直動テーブル１に固定されている。直動テーブル１及びボールねじナット６のボールねじ軸２軸周りの回転が規制されている状態で、電動モータ５を回転するとボールねじ軸２が回転し、ボール転動路内のボールの転動に伴ってボールねじナット６及び直動テーブル１が図１の左右方向に直線移動する。ボールねじ軸２やボールねじナット６、ボールなどを備えて構成されるボールねじ９では、このボールの転動に伴って振動が生じる。本実施形態では、ボールねじナット６のフランジ８に振動センサ（振動加速度センサ）１０を取付け、振動センサ１０で検出される振動データからボールねじ装置の異常を検出する。なお、振動センサ１０の取付箇所はボールねじナット６のフランジ８に限定されるものではなく、直動テーブル１の移動方向、つまりボールねじナット６の進行方向の振動加速度を検出することが可能な部位であればどこに取付けてもよい。但し、振動センサ１０の取付可能部位は、ナット６又は直動テーブル１の何れかに限定する。   A flange 8 is provided at one end of the ball screw nut 6 in the axial direction, and the flange 8 is fixed to the linear motion table 1. When the electric motor 5 is rotated in a state where the rotation of the linear motion table 1 and the ball screw nut 6 around the ball screw shaft 2 is restricted, the ball screw shaft 2 rotates and the balls in the ball rolling path roll. Accordingly, the ball screw nut 6 and the linear motion table 1 linearly move in the left-right direction in FIG. In the ball screw 9 including the ball screw shaft 2, the ball screw nut 6, the ball, and the like, vibration is generated as the ball rolls. In this embodiment, a vibration sensor (vibration acceleration sensor) 10 is attached to the flange 8 of the ball screw nut 6, and abnormality of the ball screw device is detected from vibration data detected by the vibration sensor 10. The mounting location of the vibration sensor 10 is not limited to the flange 8 of the ball screw nut 6, and it is possible to detect the vibration acceleration in the moving direction of the linear motion table 1, that is, in the traveling direction of the ball screw nut 6. It may be attached anywhere as long as it is a part. However, the attachable part of the vibration sensor 10 is limited to either the nut 6 or the linear motion table 1.

振動センサ１０は異常検出装置１１に接続されている。この異常検出装置１１は、振動センサ１０の振動データを読込んで所定の演算処理を行う演算処理部１２、種々のプログラムやデータ、演算結果などを記憶する記憶部１３、演算処理部１２の演算処理結果や指示内容を表示する表示部１４を備えて構成される。図２には、異常検出装置１１の構成をブロック図で示す。振動センサ１０で検出される振動データは波形データである。この異常検出装置１１は、振動センサ１０からの振動データからボールねじ異常検出周波数帯の振動データと支持軸受異常検出周波数帯の振動データを濾波する濾波部１５と、濾波部１５で濾波されたボールねじ異常検出周波数帯の振動データに基づいてボールねじ９の異常を検出すると共に支持軸受異常検出周波数帯の振動データに基づいて支持軸受３の異常を検出し、場合によっては、その異常検出結果を表示部１４に表示指示する異常検出部１６とを備えて構成される。   The vibration sensor 10 is connected to the abnormality detection device 11. The abnormality detection device 11 includes an arithmetic processing unit 12 that reads vibration data of the vibration sensor 10 and performs predetermined arithmetic processing, a storage unit 13 that stores various programs, data, and arithmetic results, and arithmetic processing of the arithmetic processing unit 12. A display unit 14 for displaying results and instruction contents is provided. FIG. 2 is a block diagram showing the configuration of the abnormality detection device 11. The vibration data detected by the vibration sensor 10 is waveform data. This abnormality detection device 11 includes a filtering unit 15 for filtering vibration data in the ball screw abnormality detection frequency band and vibration data in the support bearing abnormality detection frequency band from the vibration data from the vibration sensor 10, and the ball filtered by the filtering unit 15. An abnormality of the ball screw 9 is detected based on vibration data in the screw abnormality detection frequency band, and an abnormality in the support bearing 3 is detected on the basis of vibration data in the support bearing abnormality detection frequency band. An abnormality detection unit 16 that instructs display on the display unit 14 is configured.

濾波部１５は、図２ｂに示すように、後述するボールねじナット６の固有振動数以下の周波数帯の振動データを振動センサ１０からの振動データからボールねじ異常検出周波数帯の振動データとして濾波するボールねじ異常検出周波数帯濾波部１７と、後述するボールねじ軸２の一次縦固有周波数以下の周波数帯の振動データを振動センサ１０からの振動データから支持軸受異常検出周波数帯の振動データとして濾波する支持軸受異常検出周波数帯濾波部１８を備えて構成される。また、記憶部１３には、正常時のボールねじ異常検出周波数帯の振動データ及び正常時の支持軸受異常検出周波数帯の振動データが記憶されている。   As shown in FIG. 2b, the filtering unit 15 filters vibration data in a frequency band equal to or lower than the natural frequency of the ball screw nut 6 described later from vibration data from the vibration sensor 10 as vibration data in the ball screw abnormality detection frequency band. The vibration data of the ball screw abnormality detection frequency band filtering unit 17 and the frequency band of the ball screw shaft 2 described later, which is equal to or lower than the primary longitudinal natural frequency, are filtered from the vibration data from the vibration sensor 10 as vibration data of the support bearing abnormality detection frequency band. A support bearing abnormality detection frequency band filtering unit 18 is provided. The storage unit 13 stores vibration data in a normal ball screw abnormality detection frequency band and vibration data in a normal support bearing abnormality detection frequency band.

そこで、本実施形態の異常検出部１６は、記憶部１３に記憶されている正常時のボールねじ異常検出周波数帯の振動データをボールねじ異常検出周波数帯濾波部１７で濾波されたボールねじ異常検出周波数帯の振動データと比較すると共に記憶されている正常時の支持軸受異常検出周波数帯の振動データを支持軸受異常検出周波数帯濾波部１８で濾波された支持軸受異常検出周波数帯の振動データと比較する比較部１９と、比較部１９で比較された振動データの比較データに基づいてボールねじ９の異常及び支持軸受３の異常を判定する異常判定部２０を備えて構成される。なお、比較部１９では、例えば正常時のボールねじ異常検出周波数帯の振動データから閾値を設定し、その閾値と濾波されたボールねじ異常検出周波数帯の振動データを比較すると共に、正常時の支持軸受異常検出周波数帯の振動データから閾値を設定し、その閾値と濾波された支持軸受異常検出周波数帯の振動データを比較する。   Therefore, the abnormality detection unit 16 of the present embodiment detects the ball screw abnormality detected by filtering the vibration data in the normal ball screw abnormality detection frequency band stored in the storage unit 13 by the ball screw abnormality detection frequency band filtering unit 17. Compared with the vibration data in the frequency band, the vibration data in the normal support bearing abnormality detection frequency band stored in comparison with the vibration data in the support bearing abnormality detection frequency band filtered by the support bearing abnormality detection frequency band filtering unit 18 are compared. And an abnormality determination unit 20 that determines abnormality of the ball screw 9 and abnormality of the support bearing 3 based on the comparison data of the vibration data compared by the comparison unit 19. The comparison unit 19 sets, for example, a threshold value from vibration data in a normal ball screw abnormality detection frequency band, compares the threshold value with the vibration data in the filtered ball screw abnormality detection frequency band, and supports normal time. A threshold value is set from the vibration data in the bearing abnormality detection frequency band, and the threshold value is compared with the vibration data in the filtered support bearing abnormality detection frequency band.

ボールねじ軸２などの棒材の縦固有振動数は下記１式で求められる。式中のｌは軸方向の長さ、Ｅは縦弾性係数、ρは密度である。また、式中のλnは、境界条件と振動モードによって決まる無次元の定数である。ボールねじナット６の固有振動数も同式で得られる。支持軸受３に異常が発生したときの支持軸受３起因の振動成分は、異常が発生した支持軸受３からボールねじ軸２を介しボールねじナット６へと伝播する。工作機械などで用いられるボールねじ装置の支持軸受３とボールねじナット６間の長さは７００〜１２００ｍｍ程度であるから、その長さ範囲のボールねじ軸２の縦固有振動数は約２ｋＨｚ〜３．６ｋＨｚ程度となる。一方、ボールねじナット６の長さは１５０〜２００ｍｍ程度であるから、その長さ範囲のボールねじナット６の固有振動数は６．５ｋＨｚ程度以上となる。 The longitudinal natural frequency of a bar such as the ball screw shaft 2 can be obtained by the following equation (1). In the equation, l is the axial length, E is the longitudinal elastic modulus, and ρ is the density. Further, λ n in the equation is a dimensionless constant determined by the boundary condition and the vibration mode. The natural frequency of the ball screw nut 6 is also obtained by the same equation. The vibration component caused by the support bearing 3 when an abnormality occurs in the support bearing 3 propagates from the support bearing 3 in which an abnormality has occurred to the ball screw nut 6 via the ball screw shaft 2. Since the length between the support bearing 3 and the ball screw nut 6 of the ball screw device used in a machine tool or the like is about 700 to 1200 mm, the longitudinal natural frequency of the ball screw shaft 2 in the length range is about 2 kHz to 3 mm. About 6 kHz. On the other hand, since the length of the ball screw nut 6 is about 150 to 200 mm, the natural frequency of the ball screw nut 6 in the length range is about 6.5 kHz or more.

Figure 0005904025
Figure 0005904025

前述したように、支持軸受３に異常が発生したときの支持軸受３起因の振動成分は、異常が発生した支持軸受３からボールねじ軸２を介しボールねじナット６へと伝播する。その際、ボールねじナット６のバネ効果によりボールねじナット６の固有振動数以上の振動周波数成分が伝播しないのは当然として、ボールねじ軸２の縦固有振動数以上の振動周波数成分も伝播しない。このことから、支持軸受３に異常が発生した際の振動成分は、ボールねじ軸２の縦固有振動数以下の振動成分となり、その成分を監視することによって支持軸受３に発生する異常を検出することが可能となる。図３には、支持軸受３が正常なときのボールねじナット６の振動データと支持軸受３が損傷したときのボールねじナット６の振動データを示す。図中の楕円で囲んだ範囲（約３ｋＨｚ以下の周波数帯）で、支持軸受損傷有無の差異が顕著に確認でき、表れた周波数ピークは計算結果に一致している。   As described above, the vibration component caused by the support bearing 3 when an abnormality occurs in the support bearing 3 propagates from the support bearing 3 in which the abnormality has occurred to the ball screw nut 6 via the ball screw shaft 2. At this time, it is natural that the vibration frequency component higher than the natural frequency of the ball screw nut 6 does not propagate due to the spring effect of the ball screw nut 6, and the vibration frequency component higher than the longitudinal natural frequency of the ball screw shaft 2 does not propagate. From this, the vibration component when the abnormality occurs in the support bearing 3 becomes a vibration component equal to or lower than the longitudinal natural frequency of the ball screw shaft 2, and the abnormality occurring in the support bearing 3 is detected by monitoring the component. It becomes possible. FIG. 3 shows vibration data of the ball screw nut 6 when the support bearing 3 is normal and vibration data of the ball screw nut 6 when the support bearing 3 is damaged. In the range surrounded by the ellipse in the figure (frequency band of about 3 kHz or less), the difference in presence or absence of damage to the support bearing can be remarkably confirmed, and the frequency peak that appears corresponds to the calculation result.

一方、ボールねじにおいては、循環するボールが非負荷圏から負荷圏に進入する際に軌道面と衝突し、その衝突による軌道面側部材の自由振動が励起されて部材の固有振動周波数を周波数とする振動が発生する。このボールねじの異常を、ボールねじナット６の振動データから検出しようとする際、ボールねじナット６の固有振動数以上の周波数成分では、高長波成分が隠れてしまい、一般的な転がり軸受などと同じように部材の固有振動成分を含む振動データでは、正常時と異常時の変化割合が小さくなってしまい、異常を判定しにくくしてしまう。これに対し、図４に示すように、ボールねじナット６の固有振動数以下の周波数帯域では、図に楕円で囲んだ範囲（約６ｋＨｚ以下の周波数帯）で、ボールねじ損傷有無の差異が顕著に確認できる。   On the other hand, in the ball screw, the circulating ball collides with the raceway surface when entering the load zone from the non-load zone, and the free vibration of the raceway side member due to the collision is excited, and the natural vibration frequency of the member is set as the frequency. Vibration occurs. When detecting this ball screw abnormality from vibration data of the ball screw nut 6, a high-long wave component is hidden by a frequency component equal to or higher than the natural frequency of the ball screw nut 6. Similarly, in the vibration data including the natural vibration component of the member, the rate of change between the normal time and the abnormal time becomes small, and it becomes difficult to determine the abnormality. On the other hand, as shown in FIG. 4, in the frequency band below the natural frequency of the ball screw nut 6, the difference in the presence or absence of the ball screw damage is remarkable in the range enclosed by an ellipse (frequency band of about 6 kHz or less). Can be confirmed.

このことから、本実施形態では、約６ｋＨｚ以下の周波数帯をボールねじ異常検出周波数帯とし、約３ｋＨｚ以下の周波数帯を支持軸受異常検出周波数帯とし、ボールねじ９の正常時のボールねじ異常検出周波数帯の振動データ及び支持軸受３の正常時の支持軸受異常検出体の振動データを記憶部１３に記憶する。濾波部１５では、ボールねじ異常検出周波数帯濾波部１７によって振動センサ１０の振動データからボールねじ異常検出周波数帯の振動データを濾波し、支持軸受異常検出周波数帯濾波部１８によって振動センサ１０の振動データから支持軸受異常検出周波数帯の振動データを濾波する。そして、比較部１９では、正常時のボールねじ異常検出周波数帯の振動データを濾波されたボールねじ異常検出周波数帯の振動データと比較すると共に正常時の支持軸受異常検出周波数帯の振動データを濾波された支持軸受異常検出周波数帯の振動データと比較し、異常判定部２０では、比較された振動データの比較データに基づいてボールねじ９の異常及び支持軸受３の異常を判定する。異常判定方法としては、例えば図５に示すように、濾波された夫々の異常検出周波数帯の振動データと正常時の夫々の検出周波数帯の振動データから得られた閾値とを比較し、その結果、濾波された異常検出周波数帯の振動データが閾値以上である場合に、異常であると判定する方法などがある。この例では、濾波された夫々の異常検出周波数帯の振動データを時系列的にサンプリングし、各サンプリング時刻の振動データを夫々の異常検出周波数帯の閾値と比較するようにしている。   Therefore, in this embodiment, the frequency band of about 6 kHz or less is set as the ball screw abnormality detection frequency band, the frequency band of about 3 kHz or less is set as the support bearing abnormality detection frequency band, and the ball screw 9 is detected when the ball screw 9 is normal. The storage unit 13 stores the vibration data of the frequency band and the vibration data of the support bearing abnormality detector when the support bearing 3 is normal. In the filtering unit 15, vibration data of the ball screw abnormality detection frequency band is filtered from vibration data of the vibration sensor 10 by the ball screw abnormality detection frequency band filtering unit 17, and vibration of the vibration sensor 10 is performed by the support bearing abnormality detection frequency band filtering unit 18. The vibration data of the support bearing abnormality detection frequency band is filtered from the data. The comparison unit 19 compares the vibration data in the normal ball screw abnormality detection frequency band with the filtered vibration data in the ball screw abnormality detection frequency band, and filters the vibration data in the normal support bearing abnormality detection frequency band. In comparison with the vibration data of the support bearing abnormality detection frequency band, the abnormality determination unit 20 determines the abnormality of the ball screw 9 and the abnormality of the support bearing 3 based on the comparison data of the compared vibration data. As an abnormality determination method, for example, as shown in FIG. 5, the vibration data of each filtered abnormality detection frequency band is compared with the threshold value obtained from the vibration data of each detection frequency band at normal time. There is a method of determining that the vibration is abnormal when the vibration data of the filtered abnormality detection frequency band is equal to or greater than a threshold value. In this example, the filtered vibration data of each abnormality detection frequency band is sampled in time series, and the vibration data at each sampling time is compared with the threshold value of each abnormality detection frequency band.

このように本実施形態のボールねじ装置の異常検出装置及び異常検出方法では、ボールねじ９のボールねじ軸２を支持軸受３で回転自在に支持する場合に、ボールねじナット６に取付けられた振動センサ１０で振動を検出し、検出された振動データからボールねじ異常検出周波数帯及び支持軸受異常検出周波数帯の夫々の振動データを濾波し、濾波されたボールねじ異常検出周波数帯の振動データに基づいてボールねじの異常を検出すると共に支持軸受異常検出周波数帯の振動データに基づいて支持軸受の異常を検出し、その場合に、ボールねじ軸２の一次縦固有振動数以下の周波数帯を支持軸受３の異常検出周波数帯として濾波する。従って、１つの装置又は方法でボールねじ９及び支持軸受３の双方の異常を検出することができると共に、支持軸受３の異常を正確に検出することができる。   As described above, in the abnormality detection device and abnormality detection method of the ball screw device according to the present embodiment, when the ball screw shaft 2 of the ball screw 9 is rotatably supported by the support bearing 3, the vibration attached to the ball screw nut 6. The vibration is detected by the sensor 10, the vibration data of the ball screw abnormality detection frequency band and the support bearing abnormality detection frequency band are filtered from the detected vibration data, and based on the filtered vibration data of the ball screw abnormality detection frequency band. In this case, the abnormality of the ball screw is detected and the abnormality of the support bearing is detected based on the vibration data of the support bearing abnormality detection frequency band. In this case, the frequency band below the primary longitudinal natural frequency of the ball screw shaft 2 is supported. Filter as 3 anomaly detection frequency band. Therefore, the abnormality of both the ball screw 9 and the support bearing 3 can be detected by one apparatus or method, and the abnormality of the support bearing 3 can be accurately detected.

また、ボールねじナット６の固有振動数以下の周波数帯をボールねじ９の異常検出周波数帯として濾波することにより、ボールねじ９の異常を正確に検出することができる。
また、正常時のボールねじ異常検出周波数帯の振動データ及び正常時の支持軸受異常検出周波数帯の振動データを記憶し、記憶されている正常時のボールねじ異常検出周波数帯の振動データを濾波されたボールねじ異常検出周波数帯の振動データと比較すると共に記憶されている正常時の支持軸受異常検出周波数帯の振動データを濾波された支持軸受異常検出周波数帯の振動データと比較し、比較された振動データの比較データに基づいてボールねじ９の異常及び支持軸受３の異常を判定する。そのため、ボールねじ９及び支持軸受３の異常を正確に検出することができる。 Further, by filtering the frequency band equal to or lower than the natural frequency of the ball screw nut 6 as the abnormality detection frequency band of the ball screw 9, the abnormality of the ball screw 9 can be accurately detected.
Also, vibration data in the normal ball screw abnormality detection frequency band and vibration data in the normal support bearing abnormality detection frequency band are stored, and the stored vibration data in the normal ball screw abnormality detection frequency band are filtered. Compared with the vibration data of the ball screw abnormality detection frequency band, the vibration data of the normal support bearing abnormality detection frequency band stored and compared with the vibration data of the filtered support bearing abnormality detection frequency band were compared. Based on the comparison data of the vibration data, the abnormality of the ball screw 9 and the abnormality of the support bearing 3 are determined. Therefore, the abnormality of the ball screw 9 and the support bearing 3 can be accurately detected.

１は直動テーブル
２はボールねじ軸
３は支持軸受
４は継手
５は電動モータ
６はボールねじナット
７はボール転動溝
８はフランジ
９はボールねじ
１０は振動センサ
１１は異常検出装置
１２は演算処理部
１３は記憶部
１４は表示部
１５は濾波部
１６は異常検出部
１７はボールねじ異常検出周波数帯濾波部
１８は支持軸受異常検出周波数帯濾波部
１９は比較部
２０は異常判定部 1 is a linear motion table 2 is a ball screw shaft 3 is a support bearing 4 is a joint 5 is an electric motor 6 is a ball screw nut 7 is a ball rolling groove 8 is a flange 9 is a ball screw 10 is a vibration sensor 11 is an abnormality detection device 12 Arithmetic processing unit 13 Storage unit 14 Display unit 15 Filter unit 16 Abnormality detection unit 17 Ball screw abnormality detection frequency band filtering unit 18 Support bearing abnormality detection frequency band filtering unit 19 Comparison unit 20 Abnormality determination unit

Claims (3)

ボールねじ軸及びボールねじナットを備えたボールねじと、前記ボールねじ軸を回転自在に支持する支持軸受とを備えたボールねじ装置の異常検出装置において、前記ボールねじナットに取付けられ振動を検出する振動センサと、前記振動センサで検出された振動データからボールねじ異常検出周波数帯及び支持軸受異常検出周波数帯の夫々の振動データを濾波する濾波部と、前記濾波部で濾波されたボールねじ異常検出周波数帯の振動データに基づいてボールねじの異常を検出すると共に支持軸受異常検出周波数帯の振動データに基づいて支持軸受の異常を検出する異常検出部とを備え、前記濾波部は、前記ボールねじ軸の一次縦固有振動数以下の周波数帯を支持軸受の異常検出周波数帯として濾波する支持軸受異常検出周波数帯濾波部と、前記ボールねじナットの固有振動数以下の周波数帯をボールねじの異常検出周波数帯として濾波するボールねじ異常検出周波数帯濾波部とを備えたことを特徴とするボールねじ装置の異常検出装置。 An abnormality detection device for a ball screw device including a ball screw having a ball screw shaft and a ball screw nut and a support bearing for rotatably supporting the ball screw shaft, and detecting vibrations attached to the ball screw nut. A vibration sensor, a filtering unit for filtering the vibration data of the ball screw abnormality detection frequency band and the support bearing abnormality detection frequency band from the vibration data detected by the vibration sensor, and a ball screw abnormality detection filtered by the filtering unit An abnormality detection unit that detects an abnormality of the ball bearing based on vibration data of the frequency band and detects an abnormality of the support bearing based on vibration data of the support bearing frequency band, and the filtering unit includes the ball screw a support bearing abnormality detection frequency band filter section for filtering the frequency band of the primary longitudinal natural frequency below the axis as the abnormality detection frequency band of the support bearing Abnormality detecting device of a ball screw device characterized by comprising a ball screw abnormality detection frequency band filter unit which the frequency band below the natural frequency filtering as an abnormality detection frequency band of a ball screw of the ball screw nut. 前記異常検出部は、正常時の前記ボールねじ異常検出周波数帯の振動データ及び正常時の前記支持軸受異常検出周波数帯の振動データを記憶する記憶部と、前記記憶部に記憶されている前記正常時のボールねじ異常検出周波数帯の振動データを前記濾波されたボールねじ異常検出周波数帯の振動データと比較すると共に記憶されている前記正常時の支持軸受異常検出周波数帯の振動データを前記濾波された支持軸受異常検出周波数帯の振動データと比較する比較部と、前記比較部で比較された振動データの比較データに基づいて前記ボールねじの異常及び前記支持軸受の異常を判定する異常判定部とを備えたことを特徴とする請求項１に記載のボールねじ装置の異常検出装置。 The abnormality detector includes a storage unit that stores vibration data in the normal ball screw abnormality detection frequency band and vibration data in the support bearing abnormality detection frequency band in a normal state, and the normal that is stored in the storage unit. The vibration data of the ball screw abnormality detection frequency band at the time is compared with the filtered vibration data of the ball screw abnormality detection frequency band, and the vibration data of the normal support bearing abnormality detection frequency band stored is filtered. A comparison unit that compares the vibration data of the support bearing abnormality detection frequency band, and an abnormality determination unit that determines abnormality of the ball screw and abnormality of the support bearing based on comparison data of vibration data compared by the comparison unit; The abnormality detection device for a ball screw device according to claim 1 , comprising: ボールねじ軸及びボールねじナットを備えたボールねじと、前記ボールねじ軸を回転自在に支持する支持軸受とを備えたボールねじ装置の異常検出方法において、前記ボールねじナットに取付けられた振動センサで振動を検出し、前記振動センサで検出された振動データからボールねじ異常検出周波数帯及び支持軸受異常検出周波数帯の夫々の振動データを濾波し、前記濾波されたボールねじ異常検出周波数帯の振動データに基づいてボールねじの異常を検出すると共に支持軸受異常検出周波数帯の振動データに基づいて支持軸受の異常を検出し、前記ボールねじ軸の一次縦固有振動数以下の周波数帯を支持軸受の異常検出周波数帯として濾波すると共に前記ボールねじナットの固有振動数以下の周波数帯をボールねじの異常検出周波数帯として濾波することを特徴とするボールねじ装置の異常検出方法。 In a method of detecting an abnormality of a ball screw device including a ball screw including a ball screw shaft and a ball screw nut and a support bearing that rotatably supports the ball screw shaft, a vibration sensor attached to the ball screw nut is used. Vibration is detected, the vibration data of the ball screw abnormality detection frequency band and the support bearing abnormality detection frequency band are filtered from the vibration data detected by the vibration sensor, and the vibration data of the filtered ball screw abnormality detection frequency band is filtered. The ball screw shaft abnormality is detected based on the vibration data of the support bearing abnormality detection frequency band, and the abnormality of the support bearing is detected in a frequency band lower than the primary longitudinal natural frequency of the ball screw shaft. abnormality detection frequency band of the ball screw the natural frequency below the frequency band of the ball screw nut and with filtering as the detected frequency band Abnormality detecting method for a ball screw device, characterized by filtering Te.
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